Electronic equipment and spectrometers

Abstract

To enhance impact resistance of an electronic device equipped with a movable member.SOLUTION: An electronic device equipped with a movable member has a housing that houses the movable member therein, and a buffer member that reduces impact on the movable member. The buffer member holds the housing inside, and includes on the outside at least one of a protrusion projecting in a direction along a movable direction of the movable member and a recess recessed in the direction along the movable direction.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an electronic device and a spectroscope.

Background Art

[0002] Conventionally, an electronic device having a movable member such as a MEMS (Micro Electro Mechanical Systems) mirror has been known. Such electronic devices include a spectroscope that spectroscopically analyzes light from an object. For example, a spectroscope is used to identify the resin type of an object by spectroscopic analysis and to selectively collect the object as a recycled material for each resin type.

[0003] In addition, in order to protect an electronic device from an impact applied to the electronic device from the outside, an electronic device having a plurality of end protection members that cover at least two locations of the end of the electronic device has been disclosed (see, for example, Patent Document 1).

Summary of the Invention

Problems to be Solved by the Invention

[0004] Since the movable member is likely to be damaged in response to an impact from the outside, an electronic device equipped with the movable member is required to have higher shock resistance.

[0005] An object of the present invention is to increase the shock resistance of an electronic device equipped with a movable member.

Means for Solving the Problems

[0006] An electronic device according to an aspect of the present invention is an electronic device equipped with a movable member, and includes a housing that houses the movable member therein, and a buffer member including a flexible portion. The buffer member holds the housing inside and It includes at least one of a projection and a recess on the outside, and the projection is is provided on the flexible portion and protrudes in a direction along the movable direction of the movable member We , The aforementioned depression is,The flexible portion is provided with a recess in a direction along the direction of movement, and in a cross-section including the movable member and the projection, the movable member and the projection are aligned in the direction of movement, or in a cross-section including the movable member and the recess, the movable member and the recess are aligned in the direction of movement. [Effects of the Invention]

[0007] According to the present invention, the shock resistance of electronic devices equipped with movable members can be increased. [Brief explanation of the drawing]

[0008] [Figure 1] This is a perspective view illustrating the overall configuration of the spectrometer according to the first embodiment. [Figure 2] Figure 1 is a perspective view illustrating the housing of the spectrometer. [Figure 3] This is a cross-sectional view taken along line II-II in Figure 2. [Figure 4] Figure 1 is a perspective view illustrating the frame configuration of the spectrometer. [Figure 5] Figure 1 is a plan view illustrating the configuration of the movable members in the spectrometer. [Figure 6] Figure 1 is a front view showing a first example of the configuration of the buffer member in the spectrometer. [Figure 7] Figure 1 is a top view showing a first example of the configuration of the buffer member in the spectrometer. [Figure 8] Figure 1 is a side view showing a first example of the configuration of the buffering member in the spectrometer. [Figure 9] This is a cross-sectional view taken from VI-VI in Figure 6. [Figure 10] This is a side view showing a second example of a buffer member in the spectrometer in Figure 1. [Figure 11] This is a side view showing a third example of a buffer member in the spectrometer in Figure 1. [Figure 12] This diagram illustrates a movable component damaged by a fall impact. [Figure 13] This diagram illustrates the measurement results of impact from a fall. [Figure 14] A diagram illustrating the results of the drop impact measurement of the spectrometer of FIG. 1. [Figure 15] A diagram illustrating the results of the drop impact measurement of the spectrometer according to the comparative example. [Figure 16] A schematic diagram showing a fourth example of the buffer member in the spectrometer of FIG. 1. [Figure 17] A schematic diagram showing a fifth example of the buffer member in the spectrometer of FIG. 1. [Figure 18] A diagram showing a modification example of the movable member in the spectrometer of FIG. 1. [Figure 19] A diagram showing a modification example of the frame in the spectrometer of FIG. 1. [Figure 20] A diagram illustrating the overall configuration of the spectroscopic system according to the second embodiment. [Figure 21] A flowchart illustrating the operation of the spectroscopic system of FIG. 21. [[ID=​​​​​​​​​​​​The direction in which the arrow points in the X direction is denoted as the +X direction or the +X side, and the opposite direction of the +X direction is denoted as the -X direction or the -X side. The direction in which the arrow points in the Y direction is denoted as the +Y direction or the +Y side, and the opposite direction of the +Y direction is denoted as the -Y direction or the -Y side. Also, the direction in which the arrow points in the Z direction is denoted as the +Z direction or the +Z side, and the opposite direction of the +Z direction is denoted as the -Z direction or the -Z side. The spectroscope according to the embodiment is assumed to irradiate light in the +X direction as an example. However, these do not limit the orientation during the use of the spectroscope, and the orientation of the spectroscope is arbitrary.

[0012] Hereinafter, an embodiment will be described by taking, as an example of an electronic device, a spectroscope that mounts a movable member and spectroscopically analyzes light from an object. [First Embodiment] [Example of the overall configuration of the spectroscope 100] FIG. 1 is a perspective view illustrating the overall configuration of a spectroscope 100 according to the first embodiment. The spectroscope 100 is a handy-type electronic device that is configured to be small and portable so that a user of the spectroscope 100 can hold it by hand or store it in a pocket of clothes, a bag, etc. As shown in FIG. 1, the spectroscope 100 includes a housing 1 and a buffer member 2.

[0013] The spectroscope 100 irradiates light from a light source in the housing 1 onto an object, and spectroscopically analyzes the reflected light of the irradiated light by the object. Spectroscopic analysis means examining the spectrum of light emitted or absorbed by a substance to identify or determine the components of the substance.

[0014] The object is, for example, a member containing resin as a material, fruits and vegetables, grains, meats, fish, medicine tablets, concrete, etc. The spectroscope 100 is used to identify the resin type, etc. of the object by spectroscopic analysis, and to sort and collect the object as a recycling material for each resin type.

[0015] The housing 1 is a box-shaped member that houses a light source and a movable member inside. The movable member swings around a pivot axis along the Y-axis inside the housing 1. The movable direction 10 along the Z-axis refers to the direction in which the movable member moves due to the swing. In this embodiment, the housing 1 is an example of a rectangular prism-shaped box member, but it is not limited to this. The housing 1 may be any shape, such as cylindrical, elliptical, or polygonal, as long as it can house the movable member inside.

[0016] The cushioning member 2 is a member that mitigates the impact on the movable member 13. The cushioning member 2 is made of an elastic material such as rubber and is detachably provided so as to cover the housing 1. However, the cushioning member 2 does not necessarily have to be detachable and may be attached to the housing 1.

[0017] If the spectrometer 100 is dropped to the ground or hits a wall or other object during transport or use, it may be subjected to impact and damaged. In particular, the movable parts built into the housing 1 are susceptible to damage from impact. The cushioning member 2 mitigates the impact applied to the spectrometer 100 by elastically absorbing it, thereby preventing damage to the spectrometer 100, especially its movable parts.

[0018] When the spectrometer 100 hits the ground or the like, the ends or corners of the spectrometer 100 are most likely to make contact first. Therefore, it is preferable that the cushioning member 2 be provided on the housing 1 so as to mainly cover the ends and corners of the housing 1 in the X and Z directions.

[0019] Figure 2 is a perspective view illustrating the housing 1. Figure 2 shows the spectrometer 100 with the buffer member 2 removed. The housing 1 has a window 11 on the +X side of the housing 1 and a switch 12 on the +Z side of the housing 1.

[0020] Window 11 is a window that allows light from the light source inside the housing 1 to be emitted to the outside of the housing 1, and also allows reflected light from the object 108, which is irradiated from the spectrometer 100, to enter the inside of the housing 1. Window 11 includes glass or resin that is light-transmitting to the light emitted by the light source. Here, light-transmitting means having a transmittance of 60% or more to the light emitted by the light source.

[0021] Switch 12 is a switch that turns the power of the spectrometer 100 on or off. Switch 12 switches the power on or off in response to a user operation of sliding switch 12 in the X direction. However, switch 12 is not limited to a sliding type, and various types such as push buttons can be used.

[0022] The buffer member 2 has openings in positions where at least the window 11 and the switch 12 are located when the buffer member 2 is attached to the housing 1. Through these openings, the window 11 can allow light to enter or exit, and the switch 12 can accept operation by the user.

[0023] <Example of internal configuration of enclosure 1> Figure 3 is a cross-sectional view taken along line II-II in Figure 2. Figure 4 is a perspective view illustrating the configuration of the frame 209 in the spectrometer 100.

[0024] As shown in Figure 3, the spectrometer 100 includes a light source 216, a concave diffraction grating 202, a movable member 13, and a light receiving unit 217. The spectrometer 100 also includes a frame 209, a processing unit 215a, and a battery 218. The spectrometer 100 houses these components inside the housing 1.

[0025] The light source 216 irradiates light onto the object to be subjected to spectroscopic analysis. The light source 216 is, for example, an LED (Light Emitting Diode) or a halogen lamp. The light source 216 is selected to irradiate the object to be subjected to spectroscopic analysis with light in an appropriate wavelength range and is placed outside the outer frame 210.

[0026] The concave diffraction grating 202 is an example of a diffraction section that diffracts light irradiated from the light source 216 and reflected by an object. The concave diffraction grating 202 is an optical element in which fine lines at equal intervals are formed on the surface of a concave metal mirror. However, the material of the substrate of the concave diffraction grating 202 is not limited to metal, but may be a semiconductor, glass, resin, etc. However, when using a semiconductor, glass, resin, etc. as the material, it is preferable to form a reflective mirror film on the surface of the fine lines.

[0027] The fine lines in the concave diffraction grating 202 may be formed directly on the substrate, or they may be formed on a thin layer of resin or the like formed on the substrate. The concave diffraction grating 202 combines the function of light dispersion by the diffraction grating and the function of light collection by the concave mirror. Light incident on the concave diffraction grating 202 is diffracted and dispersed by the concave diffraction grating 202 and focused toward the movable member 13. Note that light dispersion refers to the phenomenon in which incident light is separated into different wavelengths.

[0028] The movable member 13 is, for example, a MEMS mirror in which the mirror portion is integrally formed on the substrate with the elastic beam portion which acts as a connecting portion. The mirror portion reflects incoming light. The mirror portion also oscillates along the direction of the arrow around the oscillation axis E due to the elastic motion of the elastic beam portion. Due to the oscillation around the oscillation axis E, both ends of the mirror portion of the movable member 13 in the X-axis direction reciprocate in the movable direction 10 along the Z direction.

[0029] In the movable member 13, the mirror portion performs a movement that strictly includes curvature due to its oscillation, but for example, both ends of the mirror portion in the X-axis direction reciprocate in a manner that is substantially linear in the movable direction 10. The movable direction 10 includes the direction of movement in which such a mirror portion moves substantially linearly.

[0030] In Figure 3, the movable member 13 is slightly inclined with respect to the X-axis, but the movable member 13 may also be provided substantially parallel to the X-axis. In this embodiment, the movable direction 10 is the direction of movement in which both ends of the mirror portion move substantially linearly when the movable member 13 is provided inclined with respect to the X-axis as shown in Figure 3.

[0031] In this embodiment, a swinging movable member 13 is provided as an example, but the invention is not limited thereto. For example, the movement of the movable member may include movements such as swinging, vibrating, rotating, linear motion, precession, or translation. The movable direction 10 includes the direction in which the movable member 13 moves in accordance with these movements.

[0032] The movable member 13 changes the reflection angle of the incident light by oscillating the mirror portion. The movable member 13 guides the light diffracted by the concave diffraction grating 202 to the light receiving portion 217 by reflecting it towards the light receiving portion 217, for example, by the mirror portion.

[0033] The light-receiving unit 217 is a photoelectric conversion element such as a photodiode. The light-receiving unit 217 outputs an electrical signal corresponding to the light intensity of the light diffracted by the concave diffraction grating 202.

[0034] The processing unit 215a performs calculations to acquire a spectral spectrum based on the electrical signal input from the light receiving unit 217. A spectral spectrum refers to the intensity distribution of each wavelength in the reflected light of an object. The spectrometer 100 can perform spectral analysis based on the spectral spectrum.

[0035] The processing unit 215a controls the movable member 13 to emit light of a predetermined wavelength toward the light receiving unit, and further controls the irradiation of light by the light source 216, for example, the intensity of the light.

[0036] The battery 218 supplies power to drive components included in the spectrometer 100, such as the light source 216, the movable member 13, and the processing unit 215a. The battery 218 can be a battery, a secondary battery (storage battery), or the like. However, the spectrometer 100 may be configured to be powered by a commercial power source instead of, or together with, the battery 218.

[0037] As shown in Figure 4, the frame 209 is a rectangular prism with a polygonal cross-section and a hollow structure with a hollow interior. The material of the frame 209 is not particularly limited and can be resin, metal, ceramic, etc. The frame 209 has an entrance slit 201 and an exit slit 204. The frame 209 also has rectangular openings 209a to 209d at predetermined positions on the surfaces constituting the frame 209, which connect the outside of the frame 209 with the hollow part inside the frame 209.

[0038] As shown in Figures 3 and 4, the concave diffraction grating 202 is positioned at the aperture 209b in the frame 209 and fixed to the outer surface of the frame 209. Light incident from aperture 209a passes through aperture 209b and is incident on the concave diffraction grating 202 located on the outside of the frame 209. The light incident on the concave diffraction grating 202 is diffracted and dispersed by the concave diffraction grating 202 and propagates while focusing toward aperture 209c.

[0039] The movable member 13 is positioned at the aperture 209c and fixed to the outer surface of the frame 209. Dispersed light from the concave diffraction grating 202 passes through the aperture 209c and is incident on the movable member 13 located outside the frame 209. Light incident on the mirror portion of the movable member 13 is reflected by the mirror portion and propagates toward the aperture 209d.

[0040] The mirror portion of the movable member 13 swings around the pivot axis E, but since the mirror portion swings within the region included in the opening 209c of the frame 209, the mirror portion does not come into contact with the frame 209 during the swing.

[0041] The dashed line L in Figure 3 represents a portion of the light ray that enters the frame 209, is diffracted by the concave diffraction grating 202, is reflected by the mirror portion of the movable member 13, and then reaches the light receiving unit 217.

[0042] The entrance slit 201 is a long, narrow, roughly rectangular opening that directs light entering from the tapered hole 203 of the outer frame 210 into the frame 209. The longitudinal direction of the opening in the entrance slit 201 corresponds to the X direction, and the short direction corresponds to a direction approximately perpendicular to the X direction.

[0043] The width of the aperture in the short-side direction of the entrance slit 201 is, for example, several tens of micrometers to several hundred micrometers. The entrance slit 201 is formed by making a rectangular through-hole in a metal substrate such as nickel. However, the material of the substrate in which the entrance slit 201 is formed is not limited to metal, but may be a semiconductor, resin, etc. Also, the entrance slit 201 is not limited to a rectangular aperture, but may be a circular pinhole, etc. Light that enters the frame 209 from the entrance slit 201 is incident on the concave diffraction grating 202.

[0044] The exit slit 204 is a long, narrow, roughly rectangular opening that allows dispersed light to exit from the frame 209. The material and shape of the exit slit 204 can be the same as those of the entrance slit 201.

[0045] The exit slit 204 is positioned where the light dispersed by the concave diffraction grating 202 is approximately focused. The focus position of the light dispersed by the concave diffraction grating 202 shifts laterally according to the wavelength. The spectrometer 100 can selectively guide light of a predetermined wavelength from the dispersed light to the light receiving unit 217 by changing the reflection angle of the mirror portion of the movable member 13 of the light dispersed by the concave diffraction grating 202, thereby changing the wavelength of the light passing through the exit slit 204.

[0046] <Example of configuration of movable member 13> Figure 5 is a plan view illustrating the configuration of the movable member 13. The movable member 13 is a MEMS mirror of the double-supported beam type. The movable member 13 deflects the light incident on the mirror surface 14 provided on the mirror part 120 around the oscillation axis E by oscillating the mirror part 120 around the oscillation axis E, which is parallel to the Y-axis. Deflection refers to changing the direction of the light.

[0047] As shown in Figure 5, the movable member 13 includes a mirror portion 120, drive beams 130a and 130b, and support portions 140a and 140b.

[0048] The mirror portion 120 is a plate-like part that is formed in a substantially rectangular shape in plan view and is capable of swinging around the pivot axis E. The end of the mirror portion 120 on the -X side is connected to the drive beam 130a, and the end on the +X side is connected to the drive beam 130b. A mirror surface 14 is formed on the -Y side surface of the mirror portion 120. In Figure 5, a mirror surface 14 with a rectangular shape in plan view is shown as an example, but the shape of the mirror surface 14 is not limited to this, and may be other shapes such as circular or elliptical.

[0049] The drive beams 130a and 130b are provided so as to sandwich the mirror portion 120 from both sides in the Y direction, and support the mirror portion 120 so as to be able to swing around the pivot axis E. By swinging the mirror portion 120, the drive beams 130a and 130b can change the inclination of the mirror surface 14 around the pivot axis E.

[0050] The drive beam 130a is a meandering beam composed of a meander structure (folded structure) including multiple beam members 133. One end of the drive beam 130a is connected to the outer circumference of the mirror section 120, and the other end is connected to the inner circumference of the support section 140a. Each of the multiple beam members 133 included in the drive beam 130a is provided with piezoelectric drive units 131a to 131d. Each of the piezoelectric drive units 131a to 131d includes a piezoelectric element and deforms the drive beam 130a in accordance with the applied drive voltage.

[0051] The drive beam 130b is a meandering beam composed of a meander structure including multiple beam members 133. One end of the drive beam 130b is connected to the outer circumference of the mirror section 120, and the other end is connected to the inner circumference of the support section 140b. Each of the multiple beam members 133 included in the drive beam 130b is provided with piezoelectric drive units 132a to 132d. Each of the piezoelectric drive units 132a to 132d includes a piezoelectric element and deforms the drive beam 130b in accordance with the applied drive voltage.

[0052] The points where the drive beam 130a connects to the mirror section 120 and where the drive beam 130b connects to the mirror section 120 are point-symmetric with respect to the center of the mirror surface 14. The points where the drive beam 130a connects to the support section 140a and where the drive beam 130b connects to the support section 140b are point-symmetric with respect to the center of the mirror surface 14. However, the positional relationship may be line-symmetric with respect to a line perpendicular to the oscillation axis E (i.e., a line parallel to the X-axis) on a plane parallel to the mirror surface 14.

[0053] Support portion 140a supports the drive beam 130a. Support portion 140b supports the drive beam 130b.

[0054] The support portion 140b has an electrode connection portion 150 on its -Z side surface for inputting a drive voltage. The electrode connection portion 150 includes a positive electrode connection portion 150a to which a positive voltage is input, a GND connection portion 150b to which is connected to GND, and a negative electrode connection portion 150c to which a negative voltage is input.

[0055] The positive electrode connection section 150a, the GND connection section 150b, and the negative electrode connection section 150c are multiple voltage input sections arranged along the X direction. The direction in which the positive electrode connection section 150a, the GND connection section 150b, and the negative electrode connection section 150c are arranged is along the X direction, which is the longitudinal direction of each of the multiple beam members 133 that constitute the drive beam 130a or the drive beam 130b.

[0056] At least one or more wires 123 are provided on the area of ​​the mirror portion 120 other than the mirror surface 14 on the -Z side surface, and on the respective -Z side surfaces of the drive beams 130a and 130b. If there are multiple wires 123, it is preferable to arrange them so as to surround the mirror surface 14, as this can suppress weight unevenness.

[0057] The piezoelectric drive units 131a to 131d, provided on the drive beam 130a, are electrically connected to the electrode connection unit 150 provided on the support unit 140b by wiring 123. The wiring 123 conducts the drive voltage input via the electrode connection unit 150 to each of the piezoelectric drive units 132a to 132d, and also conducts it to each of the piezoelectric drive units 131a to 131d through the surface of the mirror unit 120. The drive voltage input from the electrode connection unit 150 is applied to both the drive beam 130a and 130b by wiring 123.

[0058] The wiring 123 includes a positive voltage conductor 123a that conducts a positive voltage, a ground conductor 123b that is connected to GND, and a negative voltage conductor 123c that conducts a negative voltage. The positive voltage conductor 123a is connected to the positive electrode connection part 150a, the ground conductor 123b is connected to the ground connection part 150b, and the negative voltage conductor 123c is connected to the negative electrode connection part 150c.

[0059] The movable member 13 has light-passing regions 16 and 17 on both sides of the mirror portion 120, which is aligned in the X direction, between the support portion 140a and the support portion 140b. These light-passing regions 16 and 17 are open areas where no obstacles such as support portions exist. When the mirror portion 120 swings, the light reflected by the mirror surface 14 passes through these regions. The light-passing regions 16 and 17 may be empty spaces without any members, or they may include a member such as light-transmitting glass in at least a part of the space. The light-passing regions 16 and 17 may be tapered, with their width increasing in the direction along the swing axis E as they move away from the swing axis E.

[0060] The movable member 13 is formed by etching a single SOI (Silicon On Insulator) substrate, and then forming the mirror surface 14, drive beams 130a and 130b, electrode connection parts 150, etc., on the formed substrate, thereby integrally forming each component. The formation of each component may be performed after the SOI substrate is formed, or during the SOI substrate is formed.

[0061] The movable member 13 includes a mirror portion 120 and a plurality of movable parts such as drive beams 130a and 130b, and these are integrally formed by a semiconductor process. However, the movable member 13 does not necessarily have to be integrally formed, and the movable member 13 may be formed by combining multiple members.

[0062] The movable member 13 does not necessarily have to be formed by a semiconductor process, but it is preferable to manufacture the movable member 13 by a semiconductor process because it makes it possible to manufacture a smaller movable member 13, increases manufacturing efficiency, and improves the precision of the formation.

[0063] From the perspective of including multiple movable parts, the movable member 13 can also be referred to as a movable device. In this embodiment in particular, the movable direction 10 of the movable member 13 means the direction in which the mirror portion 120, which swings around the pivot axis E, moves.

[0064] The region V, indicated by the dashed rectangle in Figure 5, will be explained separately with reference to Figures 10 and 11.

[0065] <Example of the configuration of the buffer member 2> Figures 6 to 9 show a first example of the configuration of the buffer member 2 in the spectrometer 100. Figure 6 is a front view, Figure 7 is a top view, Figure 8 is a side view, and Figure 9 is a cross-sectional view taken along line VI-VI in Figure 6.

[0066] As shown in Figures 6 to 9, the cushioning member 2 has a front opening 21 in the center and is a roughly rectangular frame-shaped member when viewed from the front (+Y side). The cushioning member 2 is attached to the housing 1 through the front opening 21. The cushioning member 2 holds the housing 1 inward.

[0067] An upper opening 23 is provided on the upper surface 211 of the cushioning member 2. The upper opening 23 is located at a position corresponding to the switch 12 in the housing 1, and exposes the switch 12 when the cushioning member 2 is attached to the housing 1.

[0068] Protective parts 22a and 22b are provided at both ends of the cushioning member 2 in the longitudinal direction (X direction) of the rectangle when viewed from the front. The protective parts 22a and 22b are provided so as to protrude from the +Z side of the top surface 211, from the -Z side of the bottom surface 212, from the +Y side of the front surface 213, and from the -Y side of the back surface 214. In the event that the spectrometer 100 falls to the ground, these protective parts 22a and 22b will hit the ground before the top surface 211, bottom surface 212, front surface 213, and back surface 214.

[0069] The protective parts 22a and 22b are provided in substantially symmetrical shapes at substantially symmetrical positions on both ends of the buffer member 2 in the X direction with respect to the center of the front opening 21. Since the protective parts 22a and 22b have the same configuration except for their position and orientation, protective part 22a will be described as a representative example here.

[0070] As shown in Figures 8 and 9, the protective portion 22a has a side opening 24 in the center, and its shape, when viewed from the +X direction, is formed in the shape of a roughly rectangular frame. The four outer corners and the four inner corners of the roughly rectangular frame of the protective portion 22a each have curvature.

[0071] The side opening 24 exposes the window 11 when the cushioning member 2 is attached to the housing 1. Figures 8 and 9 show the movable member 13 located inside the side opening 24, which is positioned inside the housing 1 when the housing 1 is held by the cushioning member 2. The mirror portion 120 of the movable member 13 swings along the direction of movement 10.

[0072] Recesses 25a and 25b are provided on both sides of the protective portion 22a in the Y direction. Inside the protective portion 22a, a restricting portion 26 is provided in a substantially symmetrical shape at a position substantially symmetrical with respect to the center of the side opening 24. The restricting portion 26 restricts the position of the housing 1 in the X direction when the housing 1 is held by the cushioning member 2.

[0073] The cushioning member 2 holds the housing 1 inward and includes recesses 27a and 27b on its exterior that are recessed in a direction along the movable direction 10 of the movable member 13. The recesses 27a and 27b are provided at both ends of the protective portion 22a in the Z direction, in positions that are substantially symmetrical with respect to the center of the side opening 24, and in substantially symmetrical shapes. Since the recesses 27a and 27b have the same configuration as each other except for their position and orientation, the recess 27a will be described as a representative example here.

[0074] The recess 27a includes a tapered shape that becomes narrower as it approaches the bottom 271. The recess taper angle θ is the taper angle in the tapered shape of the recess 27a. The thickness h is the thickness (length) along the movable direction 10 from the inside to the outside of the protective part 22a as viewed from the +X direction. The depth d is the depth (length) along the movable direction 10 from the outside of the cushioning member 2 to the bottom 271 of the recess 27a.

[0075] Because the cushioning member 2 has a recess 27a, the flexible portions 28a and 28b around the recess 27a are more easily deformed compared to the protective portion 22a which does not have a recess 27a. In particular, when a force is applied to the cushioning member 2 along the movable direction 10, the flexible portions 28a and 28b are easily deformed by being crushed in the movable direction 10. If the tips (+Z side ends) of the flexible portions 28a and 28b are pointed, they will be even more easily deformed. Here, the flexible portions 28a and 28b refer to the parts of the cushioning member 2 other than the recess 27a at the end where the recess 27a is formed.

[0076] The deeper the recesses 27a and 27b, the easier the flexible portions 28a and 28b are to deform. In the first example of this embodiment, the depth d is 5.1 mm. The smaller the recess taper angle of the recesses 27a and 27b, the easier the flexible portions 28a and 28b are to deform. In the first example of this embodiment, the recess taper angle θ is 120.0 degrees. The thickness h is 11.0 mm.

[0077] The recesses 27a and 27b are essential components of the buffer member 2 in the spectrometer 100. On the other hand, the front opening 21, protective parts 22a and 22b, top opening 23, side opening 24, recesses 26a and 26b, and restricting part 26 in the buffer member 2 are not essential components and do not necessarily have to be provided.

[0078] Figure 10 is a side view showing a second example of a buffer member in the spectrometer 100, namely buffer member 2a. Components identical or of the same nature as those in the first example shown in Figure 8 are denoted by the same reference numerals, and redundant explanations are omitted as appropriate. This also applies to the modified examples and embodiments described later.

[0079] The cushioning member 2a has recesses 27aa and 27ab. In recesses 27aa and 27ab, the depth da is 2.0 mm, the recess taper angle θa is 120.0 degrees, and the thickness ha is 11.0 mm.

[0080] Figure 11 is a side view showing buffer member 2b, which is a third example of a buffer member in the spectrometer 100.

[0081] The cushioning member 2b has recesses 27ba and 27bb. In recesses 27ba and 27bb, the depth db is 3.5 mm, the recess taper angle θb is 120.0 degrees, and the thickness hb is 9.5 mm.

[0082] Table 1 shows the results of the material evaluation for cushioning member 2. The evaluation primarily focused on operability and durability, and the results are indicated by "◎", "〇", "△", or "×". "◎" represents the best, "〇" represents no problems, "△" represents unsuitable under certain conditions, and "×" represents fatally unsuitable. "-" in Table 1 indicates that the material was not evaluated.

[0083] [Table 1] As shown in Table 1, silicone rubber was found to be the most suitable material for the cushioning member 2 from the viewpoint of operability and durability. Silicone rubber was applied to the materials of cushioning member 2, cushioning member 2a, and cushioning member 2b in this embodiment.

[0084] <Function of cushioning member 2> Figure 12 is an example of a movable member 13 damaged by a fall impact, and is a magnified photograph of the area corresponding to area V in Figure 5.

[0085] If the spectrometer 100 falls or hits a wall or the like, it may be subjected to impact and damaged. For example, as shown in Figure 12, in the meander structure of the movable member 13, the part where adjacent beam members 133 are connected is prone to shear stress in response to impact and is therefore prone to damage. Crack 162 is a crack that occurred at the connection point of beam member 133 due to shear stress in response to impact.

[0086] In addition, the parts where the support part 140a and the drive beam 130a are connected, the parts where the support part 140a and the drive beam 130b are connected, and the parts where the drive beams 130a and 130b are connected to the mirror part 120 are also prone to shear stress in response to impact and are therefore susceptible to damage.

[0087] In particular, when an impact is applied along the direction of movement 10, the movable member 13 becomes more susceptible to breakage because the shear stress from the impact is added to the shear stress already present due to the movement. If the movable member 13 breaks, the spectrometer 100 itself becomes unusable.

[0088] In this embodiment, the cushioning member 2 is particularly susceptible to deformation in response to forces applied in the movable direction 10 because the flexible portions 28a and 28b around the recess 27a of the cushioning member 2 are easily deformed. Therefore, it can suitably absorb impacts applied in the movable direction 10, such as when the spectrometer 100 is dropped. As a result of the cushioning member 2 absorbing the impact, the shear stress associated with the impact is suppressed from being added to the movable member 13, thereby preventing damage to the movable member 13.

[0089] Figure 13 illustrates the measurement results of the drop impact. In the drop impact measurement, an acceleration sensor was placed in close proximity to the movable member 13 inside the housing 1 of the spectrometer 100, and the spectrometer 100 was dropped onto the floor from approximately 60 cm above the floor. The dropped spectrometer 100 bounced on the floor, and the 1st acceleration, which is the acceleration of the first impact among the multiple impacts that occurred against the floor, was measured.

[0090] In Figure 13, the horizontal axis represents time, and the vertical axis represents the first acceleration. "0" in the time axis represents the timing when the spectrometer 100 first hits the floor. The solid line graph 141 shows the results for the buffer member 2 according to the first example, and the dashed line graph 142 shows the results for the buffer member 2a (see Figure 10) according to the second example. The dashed line graph 143 shows the results for a comparative example in which the buffer member 2 including the depressions 27a and 27b is not provided, i.e., the embodiment is not applied.

[0091] In Graph 143, the 1st acceleration increased rapidly immediately after the spectrometer 100 hit the floor. In Graph 141, the increase in 1st acceleration was significantly suppressed compared to Graph 143.

[0092] In Graph 142, the increase in the 1st acceleration was suppressed up to time t1, similar to Graph 141, but after time t1, the 1st acceleration increased rapidly. This time t1 is the time it took from when the flexible portion 28a or 28b of the cushioning member 2a was crushed by the collision with the floor until the bottom 271 of the depression 27aa made contact with the floor. In other words, it is the time it took for the flexible portion 28a or 28b to be completely crushed and unable to absorb the impact.

[0093] Figure 14 illustrates the measurement results of the drop impact of spectrometer 100. Figure 15 illustrates the measurement results of the drop impact of spectrometer 100X, which is a comparative example. The method for measuring the drop impact is the same as that described in Figure 14.

[0094] Figure 14 shows the measurement results of the first acceleration when spectrometer 100 was dropped from a height of 60 cm above the floor. On the other hand, when spectrometer 100X was dropped from a height of 60 cm above the floor, the first acceleration became too large to measure. Therefore, Figure 16 shows the measurement results of the first acceleration when spectrometer 100X was dropped from a height of 20 cm above the floor, with the dropping conditions relaxed compared to the measurement in Figure 15.

[0095] In Figures 14 and 15, the horizontal axis represents the drop angle. The drop angle refers to the angle at which the portion of the spectrometer 100 and 100X along its longitudinal direction (the X direction in Figure 1) is inclined relative to the floor when the spectrometers 100 and 100X are dropped onto the floor.

[0096] In Figures 14 and 15, the "●" plots show the measurement results when a board made of lauan wood is laid on the floor and the spectrometers 100 and 100X are dropped onto the lauan wood board. The "×" plots show the measurement results when a metal plate is laid on the floor and the spectrometers 100 and 100X are dropped onto the lauan wood.

[0097] As shown in Figure 14, the 1st acceleration was approximately 500.0 G in the spectrometer 100. On the other hand, as shown in Figure 15, in the spectrometer 100X, even under less severe conditions than in Figure 14 (dropping from a height of 20 cm from the floor), the 1st acceleration when dropping onto a lauan wood board was approximately 500.0 G. Furthermore, when dropping onto a metal plate, the 1st acceleration was 700.0 G or 1700.0 G.

[0098] Table 2 shows the measurement results of the drop impact for each of the following: cushioning member 2 for the first example, cushioning member 2a for the second example, and cushioning member 2b for the third example. The drop impact F is the average value of the results obtained by dropping the spectrometer onto the floor 20 times and measuring the 1st acceleration 20 times. The variation σ is the standard deviation of the above results obtained by measuring the 1st acceleration 20 times. [Table 2]

[0099] As shown in Table 2, among cushioning members 2, 2a, and 2b, cushioning member 2 showed the lowest drop impact F and variation σ, indicating that it absorbed the drop impact and had the highest impact resistance.

[0100] <Effects of Spectrometer 100> As described above, the spectrometer 100 is an electronic device equipped with a movable member 13, and comprises a housing 1 that houses the movable member 13 internally, and a cushioning member 2 that mitigates impacts to the movable member 13. The cushioning member 2 holds the housing 1 inward and includes recesses 27a and 27b on its outer side that are recessed in a direction along the movable direction 10 of the movable member 13.

[0101] Because the cushioning member 2 has a recess 27a, the flexible portions 28a and 28b around the recess 27a are more easily deformed compared to the protective portion 22a which does not have a recess 27a. In particular, when a force is applied to the cushioning member 2 along the movable direction 10, the flexible portions 28a and 28b are more easily deformed to collapse along the movable direction 10. Therefore, the cushioning member 2 can more effectively absorb the impact applied in the movable direction 10 due to the fall of the spectrometer 100, and can suppress the addition of shear stress due to the impact to the movable member 13. As a result, in this embodiment, the impact resistance of the spectrometer 100 equipped with the movable member 13 can be increased. Furthermore, the increased impact resistance of the spectrometer 100 can suppress damage to the movable member 13.

[0102] In this embodiment, a configuration is illustrated in which the protective parts 22a and 22b each include recesses 27a and 27b, but the cushioning member 2 only needs to have at least one recess that is recessed in a direction along the movable direction 10 of the movable member 13. However, from the viewpoint of increasing impact resistance, it is preferable that a recess recess that is recessed in a direction along the movable direction 10 of the movable member 13 is formed at each end of the cushioning member 2 in the Z direction. Alternatively, sets of multiple recesses may be provided at each end of the cushioning member 2.

[0103] From the viewpoint of making the flexible portions 28a and 28b more easily deformable and more effectively absorbing the impact applied in the movable direction 10 due to the fall of the spectrometer 100, it is preferable that the depth d along the movable direction 10 from the outside of the cushioning member 2 to the bottom 271 of the recess 5.1 mm or more. It is also preferable that the recesses 27a and 27b include a tapered shape that becomes narrower as it approaches the bottom 271. Furthermore, it is preferable that the recess taper angle θ in the tapered shape of the recesses 27a and 27b is 120 degrees or less. It is even more preferable that the tips (+Z side ends) of the flexible portions 28a and 28b are pointed.

[0104] Preferably, the movable member 13 is formed by a semiconductor process. By manufacturing the movable member 13 using a semiconductor process, it becomes possible to manufacture a smaller movable member 13, thereby enabling miniaturization of the spectrometer 100. Furthermore, the manufacturing efficiency of the movable member 13 is increased, which increases the productivity of the spectrometer 100 and reduces its cost. In addition, the formation precision of the movable member 13 is improved, which improves the yield of the spectrometer 100, increases the productivity of the spectrometer 100, and reduces its cost.

[0105] The cushioning member 2 preferably contains silicone rubber. By constructing the cushioning member 2 with silicone rubber, the operability and durability of the cushioning member 2 can be improved, as shown in Table 1.

[0106] Here, we will describe the effects of the frame 209. In this embodiment, the frame 209 in the spectrometer 100 is formed by continuously connecting straight lines between adjacent vertices of a polygon. In other words, each surface of the frame 209 that fixes the concave diffraction grating 202 and the movable member 13 is formed integrally. This suppresses deformation of the frame 209.

[0107] In this embodiment, the spectrometer 100 has the movable member 13 and the concave diffraction grating 202 fixed to the outer surface of the frame 209. This allows the use of devices such as chip mounters, which are used for surface mounting electronic components onto printed circuit boards, for mounting the concave diffraction grating 202 and the movable member 13. The use of devices such as chip mounters enables high-precision alignment of the movable member 13 and the concave diffraction grating 202. It also suppresses individual differences between each spectrometer 100 being manufactured. It is desirable that each outer surface of the frame 209 be provided with tilt correction mechanisms such as abutment parts and alignment marks to prevent the movable member 13 and the concave diffraction grating 202 from being positioned at an angle during mounting.

[0108] Furthermore, in this embodiment, the concave diffraction grating 202 and the movable member 13 are not mounted on a primary mounting substrate (carrier member) such as a printed circuit board, but are mounted directly on the frame 209. This prevents interference between primary mounting substrates, which would limit the close placement of optical elements and the miniaturization of the spectrometer.

[0109] As a comparative example of this embodiment, for example, when a spectrometer is constructed by arranging primary mounting boards on which a concave diffraction grating, a movable device, etc., are each mounted to form a frame, it is difficult to accurately position the primary mounting boards. Furthermore, because the configuration is made up of separate boards, the rigidity is reduced, deformation occurs, and the stability of the spectrometer is compromised. In contrast, in this embodiment, the concave diffraction grating 202, the movable member 13, etc., can be mounted in close proximity to the frame 209 with high precision, thereby increasing the precision of the spectrometer 100. Furthermore, the rigidity of the spectrometer 100 can be increased, and the spectrometer 100 can be stabilized.

[0110] <Modified form of the first embodiment> (Torture of cushioning material) In the first embodiment, a cushioning member 2 having recesses 27a and 27b on its outer side was illustrated, but the cushioning member 2 may also have projections on its outer side that protrude in a direction along the movable direction 10 of the movable member 13.

[0111] Figure 16 illustrates the configuration of buffer member 2c, which is a fourth example of a buffer member in the spectrometer 100. Figure 17 illustrates the configuration of buffer member 2d, which is a fifth example of a buffer member in the spectrometer 100. Buffer members 2c and 2d each include a protective portion 22a. Figures 16 and 17 schematically show the +Z end of the protective portion 22a as viewed from the +X direction.

[0112] As shown in Figure 16, the cushioning member 2c holds the housing 1 inward and includes a projection 29c on its outward side that protrudes in a direction along the movable direction 10 of the movable member 13.

[0113] The projection 29c includes a tapered shape that becomes narrower as it approaches its end. The projection taper angle θc is the taper angle in the tapered shape of the projection 29c. The thickness hc is the thickness (length) of the cushioning member 2c along the movable direction 10 from the inside to the outside of the protective portion 22a when viewed from the +X direction. The depth dc is the height (length) along the movable direction 10 from the outside of the cushioning member 2c to the end 291 of the projection 29c.

[0114] The cushioning member 2c has a projection 29c, which makes it more susceptible to deformation compared to the protective part 22a, which does not have a projection 29c. In particular, when a force is applied to the cushioning member 2c along the movable direction 10, the projection 29c is more likely to deform by being crushed along the movable direction 10. If the tip of the projection 29c (the end on the +Z side) is pointed, it is even more susceptible to deformation.

[0115] The cushioning member 2c can more effectively absorb impacts applied in the movable direction 10 due to the fall of the spectrometer 100, and can suppress the addition of shear stress to the movable member 13 due to the impact. As a result, the cushioning member 2c can increase the impact resistance of the spectrometer 100 equipped with the movable member 13.

[0116] Furthermore, as shown in Figure 17, the cushioning member 2d holds the housing 1 inward and includes a projection 29d on its outward side that protrudes in a direction along the movable direction 10 of the movable member 13. The projection 29d includes two projections positioned substantially perpendicular to the pivot axis E and symmetrically with respect to the axis K along the movable direction 10. These two projections are formed to be substantially the same shape.

[0117] Each of the two protrusions in projection 29d includes a tapered shape that becomes narrower as it approaches the end of projection 29d. The projection taper angle θd is the taper angle of the tapered shape of each of the two protrusions in projection 29d. The thickness hd is the thickness (length) of the cushioning member 2d along the movable direction 10 from the inside to the outside of the protective part 22a when viewed from the +X direction. The depth dd is the height (length) along the movable direction 10 from the outside of the cushioning member 2d to the end 291 of each of the two protrusions in projection 29d.

[0118] The cushioning member 2d is more susceptible to deformation at the projection 29d compared to the protective part 22a, which does not have the projection 29d, due to the presence of the projection 29d. In particular, when a force is applied to the cushioning member 2d along the movable direction 10, the projection 29d is more likely to deform by being crushed along the movable direction 10. If the tip of the projection 29d (the end on the +Z side) is pointed, it is even more susceptible to deformation.

[0119] As a result, the cushioning member 2d can more effectively absorb the impact applied in the movable direction 10 due to the spectrometer 100 being dropped, and can suppress the addition of shear stress to the movable member 13 due to the impact. Consequently, the cushioning member 2d can improve the impact resistance of the spectrometer 100 equipped with the movable member 13.

[0120] In this case, the spectrometer 100 may bounce and repeatedly hit the floor or wall when it hits it, subjecting it to repeated impacts. However, since the projection 29d includes two projections positioned symmetrically with respect to axis K, it is easier to maintain the balance of the spectrometer 100 when it hits the floor or wall. As a result, it is possible to suppress the spectrometer 100 from bouncing and hitting the floor or wall multiple times, suppress the repeated impacts on the spectrometer 100, and prevent damage to the spectrometer 100.

[0121] In order to make the projection 29c or projection 29d more easily deformable and to more effectively absorb the impact applied in the movable direction 10 due to the fall of the spectrometer 100, it is preferable that the height dc of projection 29c and the height dd of projection 29d are each 5.1 mm or more. It is also preferable that projections 29c and 29d include a tapered shape that becomes thinner as they approach the end 291. Furthermore, it is preferable that the projection taper angle θc of projection 29c and the projection taper angle θd of projection 29d are each 120 degrees or less. It is even more preferable that the tip of projection 29c or 29d is pointed.

[0122] The cushioning member 2 may include both a recess and a projection. In other words, the cushioning member 2 holds the housing 1 inward and may include at least one of a projection protruding in a direction along the direction of movement of the movable member 13, or a recess in a direction along the direction of movement 10, on its exterior.

[0123] (Variations of movable devices) Figure 18 is a plan view showing a modified movable member 13a of the spectrometer 100, which is a modified example of the movable member 13. In the movable member 13a, the support portion 140a and the support portion 140b are integrated, and the support portion is formed in a frame shape that surrounds the mirror portion 120.

[0124] If the light deflected by the oscillation of the mirror portion 120 is not obstructed by the support portions 140a and 140b, or if the effect of obstruction is not a concern, the support portions 140a and 140b can be formed as a single integrated frame.

[0125] By forming the support parts 140a and 140b in a frame shape, handling operations after the semiconductor wafer has been separated into individual pieces become easier, and furthermore, the operation of bonding the support parts 140a and 140b to a base or the like becomes easier.

[0126] (A modified example of a spectrometer) Figure 19 shows a modified version of frame 209A in the spectrometer 100. Frame 209A has an upper restricting member 199 on the inside of frame 209A that faces the movable member 13.

[0127] The upper restrictor 199 is formed in a shape that does not obstruct the light rays L. The upper restrictor 199 has a light-transmitting portion smaller than the opening 209c and is bonded to the inside of the frame 209A by an adhesive member or the like. The upper restrictor 199 is formed in a frame shape that surrounds the opening 209c, for example, but is not limited to a frame shape and may be formed in a shape that covers the drive beams 130a and 130b of the movable member 13.

[0128] The mirror portion 120 of the movable member 13 swings around the pivot axis E, but since the mirror portion 120 swings within the thickness region of the frame 209A, the mirror portion 120 does not come into contact with the upper restricting member 199 during the swing.

[0129] Furthermore, in frame 209A, an aperture 209a is formed so that the incident slit 201 is positioned on the Rowland circle. Also, an aperture 209b is formed so that the concave surface of the concave diffraction grating 202 forms a part of the circumference of the Rowland circle. This makes it easy to adjust the position and tilt of the incident slit 201, concave diffraction grating 202, etc., which are fixed to frame 209A.

[0130] [Second Embodiment] A spectroscopic system 300 according to the second embodiment will be described.

[0131] Here, used home appliances such as air conditioners, televisions, refrigerators, freezers, washing machines, and clothes dryers are recycled. Used home appliances are crushed into small pieces at the home appliance recycling plant, and then sorted and collected by material type using magnetism, wind power, or vibration, and recycled as resources.

[0132] The resin materials mainly consist of general-purpose resins such as PE (polyethylene), PP (polypropylene), PVC (polyvinyl chloride), PS (polystyrene), PET (polyethylene terephthalate), ABS (acrylonitrile, butadiene, styrene copolymer), and PC (polycarbonate). Mixtures of PC and PS, or PC and ABS, are also common, and the resins are sorted and recovered by type using sorting devices that utilize the absorption characteristics in the near-infrared region (wavelength range of 1 to 3 μm) based on the molecular structure of the resins. Even in such sorting devices, configurations using movable members such as MEMS devices are known.

[0133] The spectroscopic system 300, using the functions of the handheld device 310, can select and display a single spectral waveform, and can be used to easily and non-destructively determine the composition of an unknown sample.

[0134] <Example configuration of the 300 spectroscopic system> Figure 20 is a diagram illustrating the overall configuration of the spectroscopic system 300. As shown in Figure 20, the spectroscopic system 300 includes a spectroscopic unit 250 and a handheld device 310. The spectroscopic unit 250 includes a spectrometer 100 with a movable member 13, a processor 306, and a communication circuit 304.

[0135] The spectroscopic system 300 may have a configuration in which one spectrometer 100 is connected to one handheld device 310, or it may have a configuration in which multiple spectrometers 100 are connected to one handheld device 310.

[0136] The processor 306 receives an electrical signal output from the light receiving unit 217 via the spectrometer 100 and calculates information that associates the output with the time and light intensity of the light spectrum. The communication circuit 304 outputs the results obtained by the processor 306 to the handheld device 310.

[0137] The handheld device 310 has an interface 314 and a processor 316. The handheld device 310 is, for example, a portable device such as a mobile phone or a smartphone. The handheld device 310 may also have a camera function.

[0138] The processor 316 converts time to wavelength of light and obtains spectral information Sp, which is composed of the relationship between the light intensity for each wavelength of light, based on the information relating the time and light intensity of the output of the optical spectrum output from the processor 306 of the spectroscopic unit 250 and the vibration frequency of the movable member 13 of the spectrometer 100. The processor 316 also calculates and obtains analysis results such as the information of the optical spectrum reflected by the object 108 acquired by the spectrometer 100 and the composition discrimination result of the object 108.

[0139] The processor 316 can display the analysis results on the display 312 via the interface 314.

[0140] In such a spectroscopic system 300, the spectrometer 100 transmits data to a handheld device 310 via a communication circuit 304 using wireless serial communication such as Bluetooth®. The handheld device 310 receives the data from the spectrometer 100 and processes and analyzes it using a processor 316. The spectroscopic system 300 then displays the analysis results, such as information on the light spectrum and composition discrimination results, on a display 312.

[0141] <Example of operation of the 300 spectral system> Figure 21 is a flowchart illustrating the resin discrimination operation in the spectroscopic system 300.

[0142] First, in step S1, the spectroscopic system 300 is provided with a plurality of unknown objects 108 whose resin type to be classified or identified is unknown, for example, in a recycling operation.

[0143] Next, in step S2, the spectroscopic system 300 stores one or more infrared material classification models (multivariate classification models) in its memory.

[0144] Next, in step S3, the spectroscopic system 300 performs a spectroscopic analysis on the object 108 in order to collect raw infrared spectral data.

[0145] Next, in step S4, the spectroscopic system 300 performs multivariate processing of the raw infrared spectral data using the processor 316 of the handheld device 310.

[0146] Next, in step S5, the spectroscopic system 300, using the processor 316 of the handheld device 310, identifies the composition of the sample as a specific type of resin-based composite material (corresponding to the material model).

[0147] Next, in step S6, the spectroscopic system 300 further processes the object 108 (for example, by storing it in a suitable location for further recycling steps). The spectroscopic system 300 can repeat each of these processes from steps S1 to S6 for an object 108 containing a different resin in step S3.

[0148] For example, the spectroscopic system 300 uses a classification model to identify the composition of the resin-containing object 108 and determine the resins that a sample containing a specific resin may contain. For example, by identifying the resin using the spectroscopic system 300, it is possible to optimize the processing conditions of processes such as optimizing the processing conditions of the furnace used for material processing in the recycling of the resin-containing object 108.

[0149] In one exemplary method, a resin-based composite material includes carbon fibers (e.g., CRFP) from which the resin has been regenerated by burning (sintering) the resin for reuse by known methods. The appropriate sintering temperature can be determined depending on the type of resin contained in the composite material.

[0150] Thus, the spectroscopic system 300 can distinguish resins with high reliability.

[0151] Although preferred embodiments have been described in detail above, the invention is not limited to the embodiments described above, and various modifications and substitutions can be made to the embodiments described above without departing from the scope of the claims.

[0152] In this embodiment, a cushioning member 2 is shown as having a projection or recess on the outside of the position where it covers the end of the housing 1, but the configuration is not limited to this. The position where the projection or recess is provided on the cushioning member 2 is not particularly limited, as long as it protrudes or recesses along the movable direction 10 of the movable member 13.

[0153] In this embodiment, a spectrometer 100 is used as an example, but electronic devices having movable members are not limited to the spectrometer 100. For example, the electronic device may be a projector or the like, having a buffer member and a movable member such as a DMD (Digital Mirror Device). Also, the movable member 13 is not limited to a MEMS mirror, but may be any movable member.

[0154] The electronic devices to which the embodiments apply are not limited to portable, handheld devices, but handheld electronic devices are more susceptible to impacts such as dropping them or bumping into walls while being carried. Therefore, the embodiments are more effective when applied to handheld electronic devices.

[0155] The ordinal numbers, quantities, and other figures used in the description of the embodiments are all illustrative to specifically illustrate the technology of the present invention, and the present invention is not limited to these illustrative figures. Furthermore, the connection relationships between the components are illustrative to specifically illustrate the technology of the present invention, and do not limit the connection relationships that realize the functions of the present invention. [Explanation of symbols]

[0156] 1 cabinet 2. Cushioning member 10 Direction of movement 11 windows 12 switches 13 Movable member 14 Mirror surface 16, 17 Light passing area 21 Front opening 211 Top surface 212 Bottom surface 213 Front 214 Back 22a, 22b protection part 23 Top opening 24 Side opening 25a, 25b recess 26 Regulatory Department 27a, 27b, 27aa, 27ab, 27ba, 27bb depressions 271 bottom 28a, 28b flexible part 29c, 29d protrusions 291 End 100 spectrometer 108 Object 120 Mirror section 123 Wiring 130a, 130b Drive beams 131a to 131d Piezoelectric drive unit 132a to 132d Piezoelectric drive unit 133 Beam members 140a, 140b Support part Graphs 141, 142, 143 150 Electrode connection section 162 Crack 199 Upper regulating material 201 Entrance slit 202 Concave diffraction grating 203 Tapered hole 204 Injection Slit 209 frames 209a, 209b, 209c, 209d aperture 210 Outer frame 215a Processing Unit 216 Light source 217 Light receiving part 218 batteries 250 Spectroscopic Units 300 Spectroscopic System 304 Communication Circuit 306 Processors 310 Handheld devices 312 displays 314 Interface 316 processors E Oscillating axis d, da, db, dc, dd depth h, ha, hb, hc, hd thickness θ, θa, θb: recessed taper angles θc, θd Projection taper angle t1 hours Sp Spectroscopic Information [Prior art documents] [Patent Documents]

[0157] [Patent Document 1] Japanese Patent Publication No. 2017-38820

Claims

1. An electronic device equipped with a movable member, A housing that houses the aforementioned movable member inside, It has a cushioning member that includes a flexible portion, The cushioning member holds the housing inward and includes at least one of the protrusion and recess on the outside, The projection is provided on the flexible portion and protrudes in a direction along the direction of movement of the movable member. The aforementioned recess is provided in the flexible portion and is recessed in a direction along the direction of movement. In a cross-section including the movable member and the projection, the movable member and the projection are aligned in the direction of movement, or An electronic device in which, in a cross-section including the movable member and the recess, the movable member and the recess are aligned in the direction of movement.

2. The electronic device according to claim 1, wherein the depth along the movable direction from the outside of the cushioning member to the bottom of the recess is 5.1 mm or more.

3. The electronic device according to claim 1 or 2, wherein the recess has a tapered shape that becomes narrower as it approaches the bottom of the recess.

4. The electronic device according to claim 3, wherein the recess taper angle in the tapered shape of the recess is 120 degrees or less.

5. The electronic device according to any one of claims 1 to 4, wherein the height along the movable direction from the outside of the cushioning member to the end of the projection is 5.1 mm or more.

6. The electronic device according to any one of claims 1 to 5, wherein the projection has a tapered shape that becomes thinner as it approaches the end of the projection.

7. The electronic device according to claim 6, wherein the taper angle of the projection in the tapered shape of the projection is 120 degrees or less.

8. The electronic device according to any one of claims 1 to 7, wherein the movable member swings about a predetermined pivot axis as the center of rotation.

9. The electronic device according to claim 8, wherein the projection includes a plurality of projections that intersect the pivot axis and are positioned symmetrically with respect to an axis along the direction of movement.

10. The movable member is formed by a semiconductor process, as described in any one of claims 1 to 9.

11. The electronic device according to any one of claims 1 to 10, wherein the cushioning member comprises silicone rubber.

12. A spectrometer for spectrally analyzing light from an object, Having an electronic device as described in any one of claims 1 to 11, The aforementioned electronic device is A light source that irradiates the aforementioned object with light, A diffraction unit that diffracts light irradiated from the light source and reflected by the object, It has a light receiving unit that outputs an electrical signal corresponding to the light intensity of the light diffracted by the diffraction unit, The movable member is a spectrometer that guides the light diffracted by the diffraction section to the light receiving section.

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