Analytical device

Abstract

To provide an analysis device capable of suppressing upsizing of a device.SOLUTION: An analysis device includes a casing 10 in which a sample can be disposed, a detection part 31 provided within the casing, and a first door 20 and a second door 21 that are provided on one surface of the casing in a double-sliding manner, and are each slid along one surface of the casing so as to be overlapped in a thickness direction. The analysis device is configured such that a first opening 41 capable of accessing the inside of the casing is formed in a second direction opposite to a first direction in one surface of the casing when the first door is slid in the first direction in which a part overlapping the second door in a thickness direction increases from a closed state, and is configured such that a second opening 42 capable of accessing the inside of the casing is formed in the first direction on one surface of the casing when the second door is slid in the second direction in which a part overlapping the first door in the thickness direction increases from the closed state.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to an analytical apparatus, and particularly to an analytical apparatus including a housing, a detection unit, and a door.

Background Art

[0002] Conventionally, an inspection apparatus provided with a front door that can be opened and closed on the front surface of a housing is known (see, for example, Non-Patent Document 1).

[0003] Non-Patent Document 1 discloses an inspection apparatus provided with a front door constituted by two doors, a first door and a second door, each of which slides along the front surface of the housing. This inspection apparatus is configured such that, from a state in which the two doors are closed, an opening through which the inside of the housing can be accessed is formed between the first door and the second door by sliding the first door and the second door in a direction away from each other. A user can place a workpiece on a stage provided inside the housing through the opening.

Prior Art Documents

Non-Patent Documents

[0004]

Non-Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The inspection device described in Non-Patent Document 1 above has a first door and a second door that slide away from each other in order to form an opening. This inspection device is provided with a space (margin) in the direction of the sliding movement of the doors to accommodate each of the first and second doors that have been slid. That is, this inspection device is provided with a space (margin) equal to the width of the opening for accommodating the doors in the direction of the sliding movement of the first and second doors. If the doors that have been slid to form the opening are configured to protrude to the outside of the inspection device, there is a possibility that the doors protruding to the outside of the inspection device may collide with the user. For this reason, it is thought that the inspection device described in Non-Patent Document 1 is configured to have a space (margin) inside the inspection device for accommodating each of the first and second doors in the direction of sliding movement when the opening is formed. In this case, there is a problem that the inspection device will become larger.

[0006] This invention was made to solve the above-mentioned problems, and one of its objectives is to provide an analytical device that can suppress the increase in size of the device. [Means for solving the problem]

[0007] This invention 1 The analytical apparatus in this context comprises a housing in which a sample can be placed, a detection unit provided inside the housing, and a first door and a second door provided in a sliding manner on one side of the housing, which slide along the side of the housing so as to overlap in the thickness direction. The first door is slid from a closed state in a first direction in which the portion overlapping with the second door in the thickness direction increases, thereby forming a first opening that allows access to the inside of the housing in a second direction opposite to the first direction on one side of the housing. The second door is slid from a closed state in a second direction in which the portion overlapping with the first door in the thickness direction increases, thereby forming a second opening that allows access to the inside of the housing in a first direction on one side of the housing. The system further comprises a locking mechanism configured to prevent the sliding movement of the first door based on the formation of a second opening, and to prevent the sliding movement of the second door based on the formation of a first opening. . Furthermore, the analytical apparatus in the second aspect of this invention comprises a housing in which a sample can be placed, a detection unit provided inside the housing, and a first door and a second door provided in a sliding manner on one surface of the housing, which slide along the surface of the housing so as to overlap in the thickness direction. The first door is slid from a closed state in a first direction in which the portion overlapping with the second door in the thickness direction increases, thereby forming a first opening that allows access to the inside of the housing in a second direction opposite to the first direction on one surface of the housing. The second door is slid from a closed state in a second direction in which the portion overlapping with the first door in the thickness direction increases, thereby forming a second opening that allows access to the inside of the housing in a first direction on one surface of the housing. The first door includes a recess on the side facing the inside of the housing, and the second door is configured to be housed in the recess of the first door when the first and second doors slide. Furthermore, the analytical apparatus in the third aspect of this invention comprises a housing in which a sample can be placed, a detection unit provided inside the housing, and a first door and a second door provided in a sliding manner on one surface of the housing, each sliding along the surface of the housing so as to overlap in the thickness direction, wherein the first door is slid from a closed state in a first direction in which the portion overlapping with the second door in the thickness direction increases, thereby forming a first opening that allows access to the inside of the housing in a second direction opposite to the first direction on one surface of the housing, and the second door is slid from a closed state in a second direction in which the portion overlapping with the first door in the thickness direction increases, thereby forming a second opening that allows access to the inside of the housing in a first direction on one surface of the housing, wherein the apparatus further comprises a sealing portion provided on at least one of the first door and the second door, which closes the gap formed in the thickness direction of the door by the sliding movement of the door, and the sealing portion includes a first member and a second member which is arranged to overlap with the first member when the door is closed and is pulled out from the first member when the door is fully open. [Effects of the Invention]

[0008] This invention 1st~3rd In this configuration, the analytical apparatus is configured such that, as described above, the first door slides from a closed position in a first direction, increasing the portion that overlaps with the second door in the thickness direction, thereby forming a first opening on one side of the housing that allows access to the interior of the housing in a second direction, and the second door slides from a closed position in a second direction, increasing the portion that overlaps with the first door in the thickness direction, thereby forming a second opening on one side of the housing that allows access to the interior of the housing in a first direction. With this configuration, in the formation of the first opening, the first door that has been slid in the first direction is positioned to overlap with the second door in the thickness direction, and in the formation of the second opening, the second door that has been slid in the second direction is positioned to overlap with the first door in the thickness direction. Since one door that has been slid open overlaps with the other closed door in the thickness direction, it is not necessary to separately provide a dedicated space (margin) inside the analytical apparatus to accommodate the open door. As a result, the size of the apparatus can be suppressed. Furthermore, by sliding the first door in a first direction when forming the first opening and sliding the second door in a second direction when forming the second opening, the slid doors do not protrude outside the analyzer, thus preventing collisions with the protruding doors from the analyzer. In addition, by sliding the first door in a first direction when forming the first opening and sliding the second door in a second direction when forming the second opening, the deterioration of operability caused by the weight of the doors can be suppressed compared to the case where both the first and second doors are slid simultaneously in the same direction. [Brief explanation of the drawing]

[0009] [Figure 1] This is a schematic front view of the analyzer according to the first embodiment, with the first and second doors closed. [Figure 2] This is a schematic front view of the analytical apparatus according to the first embodiment, showing the first door in the open position and the second door in the closed position. [Figure 3]This is a schematic front view of the analytical apparatus according to the first embodiment, showing the first door in the closed state and the second door in the open state. [Figure 4] This is a schematic diagram showing the overall configuration of the analytical apparatus according to the first embodiment. [Figure 5] These are schematic front views and cross-sectional views along the 500-500 line of the first and second doors according to the first embodiment. [Figure 6] This is a perspective view of the first door, the second door, and the locking mechanism according to the first embodiment. [Figure 7] This is a perspective view of the first locking mechanism according to the first embodiment. [Figure 8] This is a perspective view of the second locking mechanism according to the first embodiment. [Figure 9] This is a schematic diagram showing the configuration of the moving mechanism according to the first embodiment. [Figure 10] These are schematic front views of the first and second doors with modified designs, and cross-sectional views along the 1000-1000 line. [Figure 11] This is a perspective view of the first and second doors with modified designs. [Figure 12] This is a schematic cross-sectional view of the analysis apparatus in the state with the first door open, according to the first embodiment. [Figure 13] This is a schematic cross-sectional view of the analysis apparatus in the state with the second door open according to the first embodiment. [Figure 14] This shows a schematic front view of the first door and the second door according to the second embodiment, and a schematic cross-sectional view along the 1400-1400 line. [Figure 15] This is a schematic front view of the first and second doors in the open position, and a schematic cross-sectional view along the 1500-1500 line. [Figure 16] This is a schematic cross-sectional view of the first sealing portion according to the second embodiment. [Figure 17] This is a schematic diagram illustrating the movement of the first blocking portion according to the second embodiment. [Figure 18] This is a schematic front view of the first and second doors with the second door open, and a cross-sectional view along the 1800-1800 line. [Figure 19]It is a schematic cross-sectional view of the second closing part according to the second embodiment. [Figure 20] It is a schematic diagram for explaining the movement of the second closing part according to the second embodiment. [Figure 21] It is a front schematic view and a top schematic view of the second closing part according to the second embodiment.

Embodiments for Carrying Out the Invention

[0010] Hereinafter, embodiments of the present invention will be described based on the drawings.

[0011] [First Embodiment] (Configuration of X-ray Phase Imaging Device)<00001​​​​​​

[0013] In this specification, an analytical device refers to a device that, for the observation and analysis of a sample, has a stage for placing the sample inside the housing and an analysis unit for acquiring (detecting) a signal based on the sample placed on the stage. The X-ray phase imaging device 1, as an analytical device, has a stage 32 and an analysis unit 11, which includes an X-ray source 30, a detection unit 31, a control unit 90, an image processing unit 91, a stage 32, a moving mechanism 35, a first grid 33 and a second grid 34, inside the housing 10.

[0014] In this specification, the left-right direction as viewed from the side of the X-ray phase imaging apparatus 1 with the door (hereinafter referred to as the "front side") is described as the X direction. Of the X directions, the direction toward the right when viewing the X-ray phase imaging apparatus 1 from the front side is defined as the X1 direction, and the direction toward the left when viewing the X-ray phase imaging apparatus 1 from the front side is defined as the X2 direction. Furthermore, the up-down direction as viewed from the front side of the X-ray phase imaging apparatus 1 is described as the Y direction. Of the Y directions, the direction toward the upward when viewing the X-ray phase imaging apparatus 1 from the front side is defined as the Y1 direction, and the direction toward the downward when viewing the X-ray phase imaging apparatus 1 from the front side is defined as the Y2 direction. Furthermore, the front-back direction as viewed from the front side of the X-ray phase imaging apparatus 1 is described as the Z direction.

[0015] As shown in Figures 2 to 4, the housing 10 has a roughly rectangular parallelepiped shape and is hollow inside. The housing 10 has an opening 40 (see Figure 4) on one side that allows access to the inside. In the first embodiment, the housing 10 has an opening 40 that allows access to the inside of the housing 10 in a predetermined area on the front. As will be described in detail later, the opening 40 includes a first opening 41 (see Figure 2) and a second opening 42 (see Figure 3). As shown in Figure 4, the inside of the housing 10 is arranged an X-ray source 30, a detection unit 31, a control unit 90, an image processing unit 91, a stage 32, a moving mechanism 35, and a plurality of grids including a first grid 33 and a second grid 34. Furthermore, the housing 10 is structured to suppress X-ray leakage to the outside of the housing 10 when the first door 20 and the second door 21 are closed.

[0016] (Composition of Door 1 and Door 2) As shown in Figure 5, the first door 20 and the second door 21 are provided in a sliding manner on the front of the housing 10 so as to cover the opening 40 formed in the housing 10. In this specification, sliding refers to two or more doors that are opened and closed by sliding them laterally on two or more grooves or rails. As shown in Figures 5 and 6, the first door 20 and the second door 21 are configured to slide along the front of the housing 10 in the X direction by rails 36 and 37 provided near the upper and lower ends, respectively, of the opening 40 formed in the housing 10. In Figure 5, the rails 37 for sliding the opening 40 formed in the housing 10 and the second door 21 are shown as dashed lines. When the first door 20 and the second door 21 are closed, the first door 20 is positioned closer to the X2 direction than the second door 21, and the second door 21 is positioned closer to the X1 direction than the first door 20, and the entire opening 40 is covered by the first door 20 and the second door 21. The first door 20 covers the portion of the opening 40 on the X2 direction side when closed, and the second door 21 covers the portion of the opening 40 on the X1 direction side when closed. Figures 5 and 6 are schematic diagrams showing the first door 20 and the second door 21, etc., with the front cover (not shown) that covers components such as rails 36 and 37 removed from the front of the housing 10.

[0017] As shown in Figure 2, the first door 20 slides from a closed position in the X1 direction, where the portion overlapping with the second door 21 in the thickness direction increases, thereby forming a first opening 41 that allows access to the interior of the housing 10 in the X2 direction of the first door 20. The first opening 41 is opened and closed by the sliding movement of the first door 20. As shown in Figure 3, the second door 21 slides from a closed position in the X2 direction, where the portion overlapping with the first door 20 in the thickness direction increases, thereby forming a second opening 42 that allows access to the interior of the housing 10 in the X1 direction of the second door 21. The second opening 42 is opened and closed by the sliding movement of the second door 21. Of the openings 40, the first opening 41 and the second opening 42 are provided to be selectively openable. Here, the closed position of the first door 20 means that the first opening 41 is not formed, and the closed position of the second door 21 means that the second opening 42 is not formed.

[0018] As shown in Figure 5, when the first door 20 overlaps the second door 21 in the thickness direction, it is located on the outside of the housing 10, and when the second door 21 overlaps the first door 20 in the thickness direction, it is located on the inside of the housing 10, compared to the first door 20. The first door 20 is supported by a pair of rails 36 and slides in the X direction so as to cover the second door 21 on the outside of the housing 10. The second door 21 is supported by a pair of rails 37 and slides in the X direction so as to be covered by the first door 20 on the inside of the housing 10. The first door 20 and the second door 21 cannot be moved in the Y and Z directions.

[0019] The housing 10 is provided with a first placement area 50 in which a sample S can be placed, and a second placement area 51 in which a sample S can be placed, which is different from the first placement area 50. The first placement area 50 is the area between the X-ray source 30 and the first grating 33. The first aperture 41 is formed to face the first placement area 50. The second placement area 51 is the area between the first grating 33 and the second grating 34. The second aperture 42 is formed to face the second placement area 51 in which a sample S can be placed inside the housing 10. The first placement area 50 and the second placement area 51 are configured to have different magnifications for the acquired X-ray phase contrast images. When it is desired to observe a small area of ​​the sample S while ensuring sufficient magnification, the sample S can be placed in the first placement area 50. When it is desired to observe a wide area of ​​the sample S, the sample S can be placed in the second placement area 51.

[0020] The first door 20 has a recess 39 formed on the side (back side) facing the interior of the housing 10. The size of the recess 39 of the first door 20 in the Y direction is configured to be larger than the size of the second door 21 in the Y direction. When the first door 20 is slid in the X1 direction from a closed state, and when the second door 21 is slid in the X2 direction from a closed state, the portion of the second door 21 that overlaps with the first door 20 in the thickness direction is configured to be accommodated in the recess 39 of the first door 20. Similarly, the portion of the rail 37 for sliding the second door 21 that overlaps with the first door 20 in the thickness direction is configured to be accommodated in the recess 39 of the first door 20.

[0021] The first door 20 and the second door 21 are covered with lead or the like to prevent X-rays from leaking outside the housing 10. The first door 20 and the second door 21 are provided with handles 38 on the outer surface of the housing 10 for the user to grasp in order to slide them open.

[0022] (Configuration of the locking mechanism) As shown in Figure 5, the locking section 60 includes a locking mechanism 60a, which includes a first locking mechanism 70 and a second locking mechanism 80, and an electromagnetic lock 60b.

[0023] The first locking mechanism 70 is configured to prevent the sliding movement of the first door 20. The second locking mechanism 80 is configured to prevent the sliding movement of the second door 21.

[0024] As shown in Figure 7, the first locking mechanism 70 includes a first engaging portion 71 provided on the first door 20, a first engaging member 72 provided on the housing 10 and capable of engaging with the first engaging portion 71, and a first guide portion 75 provided on the second door 21.

[0025] The first engaging portion 71 is formed on a plate-shaped member 76 that is provided along the Y2-direction end (lower end surface) of the first door 20 and protruding in the X1 direction of the first door 20. The first engaging portion 71 is, for example, a hole formed in the Y direction. The first engaging portion 71 is configured to be able to engage with the first engaging member 72.

[0026] The first engaging member 72 includes a first rod-shaped member 73 and a first pressing member 74 capable of pressing down the first rod-shaped member 73. The first rod-shaped member 73 is configured to be biased by an elastic member (not shown) to return to its original position when the pressing by the first pressing member 74 is released. The first engaging member 72 is positioned such that it engages with the first engaging portion 71 when the first rod-shaped member 73 is pressed down. The first rod-shaped member 73 is, for example, a plunger. The first pressing member 74 is, for example, a linear guide and a slider.

[0027] The first guide portion 75 is a plate-shaped member and is provided along the Y2-direction end (lower end surface) of the second door 21 and protruding in the Y2 direction of the second door 21. The first guide portion 75 has a first inclined portion 75a formed at its X2-direction end, which is inclined toward the Y1 direction. The first guide portion 75 is positioned such that, when the second door 21 is closed, the first inclined portion 75a does not contact the first push-down member 74 of the first engaging member 72, and as the second door 21 slides in the X2 direction, the first inclined portion 75a contacts the first push-down member 74 and becomes able to be pushed down.

[0028] (Method for locking and unlocking the first door using the first locking mechanism) The first locking mechanism 70 is configured to prevent the sliding movement of the first door 20 based on the start of sliding movement of the second door 21 in the X2 direction from a state in which the first opening 41 and the second opening 42 are not formed.

[0029] As the second door 21 begins to slide in the X2 direction, the first guide portion 75 provided on the second door 21 also moves in the X2 direction. As the first guide portion 75 moves in the X2 direction, the first inclined portion 75a of the first guide portion 75 comes into contact with the first pressing member 74 of the first engaging member 72. The first pressing member 74, which is in contact with the first inclined portion 75a, moves in the Y2 direction and comes into contact with the first rod-shaped member 73. The first rod-shaped member 73, which is in contact with the first pressing member 74, moves in the Y2 direction and engages with the hole which is the first engaging portion 71. The engagement of the first rod-shaped member 73 with the first engaging portion 71 prevents the first door 20 from sliding in the X1 direction.

[0030] As the second door 21 slides in the X1 direction and closes from the state in which the second opening 42 is formed, the first inclined portion 75a of the first guide portion 75 is separated from the first pressing member 74 of the first engaging member 72. When the first pressing member 74 is separated from the first guide portion 75, the first pressing member 74 releases its pressure on the first rod-shaped member 73. The first rod-shaped member 73, whose pressure by the first pressing member 74 has been released, is moved by an elastic member (not shown) to return to its original position and is disengaged from the first engaging portion 71. As a result, the engagement between the first rod-shaped member 73 and the first engaging portion 71 is released, and the restriction on sliding movement in the X1 direction by the first door 20 is lifted.

[0031] As shown in Figure 8, the second locking mechanism 80 includes a second engaging portion 81 provided on the second door 21, a second engaging member 82 provided on the housing 10 and capable of engaging with the second engaging portion 81, and a second guide portion 85 provided on the first door 20.

[0032] The second engaging portion 81 is formed in a member 86 provided at the end of the second door 21 on the X2 direction side and the Y1 direction side. The second engaging portion 81 is, for example, a hole formed in the Y direction. The second engaging portion 81 is configured so that the second engaging member 82 can engage with it.

[0033] The second engaging member 82 includes a second rod-shaped member 83 and a second pressing member 84 capable of pressing down the second rod-shaped member 83. The second rod-shaped member 83 is configured to be biased by an elastic member (not shown) to return to its original position when the pressing by the second pressing member 84 is released. The second engaging member 82 is positioned such that it engages with the second engaging portion 81 when the second rod-shaped member 83 is pressed down. The second rod-shaped member 83 is, for example, a plunger. The second pressing member 84 is, for example, a linear guide and a slider.

[0034] The second guide portion 85 is a plate-shaped member, provided along the Y1-direction end (upper end surface) of the first door 20, with its X1-direction end protruding in the X1 direction from the first door. The second guide portion 85 has a second inclined portion 85a formed at its X1-direction end, which is inclined toward the Y1 direction. The second guide portion 85 is positioned such that, when the first door 20 is closed, the second inclined portion 85a does not contact the second push-down member 84 of the second engaging member 82, and as the first door 20 slides toward the X1 direction, the second inclined portion 85a contacts the second push-down member 84 and becomes able to be pushed down.

[0035] (Method for locking and unlocking the second door using the second locking mechanism) The second locking mechanism 80 is configured to prevent the sliding movement of the second door 21 based on the start of the sliding movement of the first door 20 in the X1 direction from a state in which the first opening 41 and the second opening 42 are not formed.

[0036] As the first door 20 begins to slide in the X1 direction, the second guide portion 85 provided on the first door 20 also moves in the X1 direction. As the second guide portion 85 moves in the X1 direction, the second inclined portion 85a of the second guide portion 85 comes into contact with the second pressing member 84 of the second engaging member 82. The second pressing member 84, which is in contact with the second guide portion 85, moves in the Y2 direction and comes into contact with the second rod-shaped member 83. The second rod-shaped member 83, which is in contact with the second pressing member 84, moves in the Y2 direction and engages with the hole which is the second engaging portion 81. The engagement of the second rod-shaped member 83 with the second engaging portion 81 prevents the second door 21 from sliding in the X2 direction.

[0037] As the first door 20 slides in the X2 direction and closes from the state in which the first opening 41 is formed, the second inclined portion 85a of the second guide portion 85 is separated from the second pressing member 84 of the second engaging member 82. When the second pressing member 84 is separated from the second guide portion 85, the second pressing member 84 releases its pressure on the second rod-shaped member 83. The second rod-shaped member 83, released from the pressure applied by the second pressing member 84, is moved by an elastic member (not shown) to return to its original position and is disengaged from the second engaging portion 81. As a result, the engagement between the second rod-shaped member 83 and the second engaging portion 81 is released, and the restriction on sliding movement in the X2 direction by the second door 21 is lifted.

[0038] As shown in Figure 5, the electromagnetic locks 60b are provided near the ends of the first door on the X2 and Y1 directions, and near the ends of the second door on the X1 and Y1 directions. The electromagnetic locks 60b are configured to lock the first and second doors so that they do not open when the X-ray phase imaging apparatus 1 is powered up and the X-ray source 30 is irradiating the doors with X-rays. The configuration of the electromagnetic locks 60b is not particularly limited.

[0039] As shown in Figures 5 and 6, when the first door 20 is slid in the X1 direction from a closed position, the second door 21 and the locking mechanism 60a are configured to be covered by the first door 20. In other words, when the first door 20 is slid in the X1 direction from a closed position, the second door 21 and the locking mechanism 60a are configured to be housed in the recess 39 of the first door 20.

[0040] (Structure of the analysis department) As shown in Figure 4, the analysis unit 11 includes an X-ray source 30, a detection unit 31, a control unit 90, an image processing unit 91, a stage 32, a moving mechanism 35, and a plurality of grids including a first grid 33 and a second grid 34. The X-ray source 30, the first grid 33, the second grid 34, and the detection unit 31 are arranged in this order in the direction of the X1 direction, which is the optical axis of the X-rays.

[0041] The X-ray source 30 is configured to generate X-rays when a high voltage is applied, and to irradiate the generated X-rays in the X1 direction.

[0042] The detection unit 31 is configured to detect X-rays transmitted through the sample S, convert the detected X-rays into electrical signals, and read the converted electrical signals as image signals. The detection unit 31 is, for example, an FPD (Flat Panel Detector). The detection unit 31 is configured to acquire (detect) signals based on a sample S selectively placed in the first placement area 50 or the second placement area 51. The detection unit 31 is composed of a plurality of conversion elements (not shown) and pixel electrodes (not shown) placed on the plurality of conversion elements. The detection signal (image signal) from the detection unit 31 is sent to the image processing unit 91.

[0043] The control unit 90 is configured to control the operation of the moving mechanism 35. The control unit 90 includes, for example, a CPU (Central Processing Unit), ROM (Read Only Memory), and RAM (Random Access Memory).

[0044] The image processing unit 91 is configured to generate a phase contrast image based on the detection signal sent from the detection unit 31. The image processing unit 91 includes, for example, a processor such as a GPU (Graphics Processing Unit) or an FPGA (Field-Programmable Gate Array) configured for image processing. The phase contrast image is a general term for images taken using the first grid 33 and the second grid 34, and includes, for example, at least one of an absorption image, a phase differential image, and a dark-field image. An absorption image is an X-ray image imaged based on the difference in the degree of X-ray absorption by the sample S. A phase differential image is an X-ray image imaged based on the phase shift of X-rays. A dark-field image is a visibility image obtained by the change in visibility based on small-angle scattering of an object. A dark-field image is also called a small-angle scattering image. "Visibility" refers to the degree of clarity.

[0045] Stage 32 has a placement surface on which a sample S can be placed. Stage 32 is configured to be movable across a first placement area 50 and a second placement area 51 by a moving mechanism 35. Stage 32 is configured to be movable in the X1 and X2 directions beyond the first grid 33 inside the housing 10.

[0046] As shown in Figure 9, the moving mechanism 35 includes a first moving mechanism 35a capable of moving the stage 32 in the Y1 and Y2 directions, a second moving mechanism 35b capable of moving the stage 32 in the X1 and X2 directions, and a drive unit 35c. The first moving mechanism 35a and the second moving mechanism 35b are composed of linear motion mechanisms such as pole screw mechanisms.

[0047] The movement of the stage from the first configuration area 50 to the second configuration area 51 by the moving mechanism 35 will now be explained. The first moving mechanism 35a moves the stage 32 in the Y2 direction from the imaging position P1 in the first configuration area 50 to a non-interference position P2 where the stage 32 and the first grating 33 do not interfere with each other in the direction of the X-ray optical axis. Next, the second moving mechanism 35b moves the stage 32, which has been moved to the non-interference position P2, to a non-interference position P3, which is in the X2 direction and is perpendicular to the Y2 direction of the imaging position P4 in the second configuration area 51. The non-interference position P3 is also a position where the stage 32 and the first grating 33 do not interfere with each other in the direction of the X-ray optical axis. Next, the first moving mechanism 35a moves the stage 32, which has been moved to the non-interference position P3, in the Y1 direction to the imaging position P4 in the second configuration area 51. With this, the movement of the stage 32 from the first configuration area 50 to the second configuration area 51 is completed. Furthermore, the movement of stage 32 from the second arrangement area 51 to the first arrangement area 50 is carried out in the same manner as the movement of stage 32 from the first arrangement area 50 to the second arrangement area 51 described above. When stage 32 is moved in the X direction beyond the first grating 33, instead of moving stage 32 in the Y direction by the first movement mechanism 35a, the first grating 33 may be moved in the Y direction by a retraction mechanism (not shown) that retracts the first grating 33 to a non-interference position P5 where stage 32 and the first grating 33 do not interfere in the direction of the X-ray optical axis.

[0048] The first grating 33 is a so-called phase grating and has a plurality of slits and X-ray phase change sections arranged in the Y direction at a predetermined period (pitch). The first grating 33 is positioned between the X-ray source 30 and the second grating 34, and X-rays are irradiated from the X-ray source 30. The first grating 33 is provided to form a self-image due to the Talbot effect. When coherent X-rays pass through a grating with slits formed therein, an image of the grating (a self-image) is formed at a predetermined distance (Talbot distance) from the grating. This is called the Talbot effect.

[0049] The second grating 34 is a so-called absorption grating and has a plurality of X-ray transmitting and X-ray absorbing sections arranged in the Y direction at a predetermined period (pitch). The second grating 34 is positioned between the first grating 33 and the detection unit 31, and is irradiated with X-rays that have passed through the first grating 33. The second grating 34 is positioned at a Talbot distance from the first grating 33. The second grating 34 interferes with the self-image of the first grating 33, forming moiré fringes on the detection surface of the detection unit 31.

[0050] (Effects of the first embodiment) In the first embodiment, the following effects can be obtained.

[0051] In the first embodiment, as described above, the first door 20 is slid in the X1 direction from a closed state, increasing the portion that overlaps with the second door 21 in the thickness direction, thereby forming a first opening 41 on one side of the housing 10 that allows access to the inside of the housing 10 in the X2 direction. The second door 21 is slid in the X2 direction from a closed state, increasing the portion that overlaps with the first door 20 in the thickness direction, thereby forming a second opening 42 on one side of the housing 10 that allows access to the inside of the housing 10 in the X1 direction. As a result, in the formation of the first opening 41, the first door 20, which has been slid in the X1 direction, is positioned to overlap with the second door 21 in the thickness direction, and in the formation of the second opening 42, the second door 21, which has been slid in the X2 direction, is positioned to overlap with the first door 20 in the thickness direction. Since one door that has been slid open overlaps with the other door that has been closed in the Z direction, it is not necessary to separately provide a dedicated space (margin) inside the X-ray phase imaging apparatus 1 to accommodate the open door. As a result, the size of the apparatus can be suppressed. Furthermore, by sliding the first door 20 in the X1 direction when forming the first opening 41 and sliding the second door 21 in the X2 direction when forming the second opening 42, the slid doors do not protrude outside the X-ray phase imaging apparatus 1, thereby preventing collisions with the protruding doors from the X-ray phase imaging apparatus 1 with the user. In addition, by sliding the first door 20 in the X1 direction when forming the first opening 41 and sliding the second door 21 in the X2 direction when forming the second opening 42, the deterioration of operability caused by the weight of the doors can be suppressed compared to the case where both the first door 20 and the second door 21 are slid simultaneously in the same direction.

[0052] Furthermore, in the first embodiment, as described above, the first opening 41 is formed to face a first placement area 50 in which a sample S can be placed inside the housing 10, and the second opening 42 is formed to face a second placement area 51 in which a sample S can be placed inside the housing 10, which is different from the first placement area 50. The detection unit 31 is configured to acquire a signal based on a sample S selectively placed in either the first placement area 50 or the second placement area 51. This allows for the selection of the first placement area 50 accessible from the first opening 41 and the second placement area 51 accessible from the second opening 42 to place the sample S. Compared to a configuration in which the opening is formed by sliding the first door 20 and the second door 21 away from each other from a closed state, the ease of selective access to either of the two placement areas is equivalent, while suppressing an increase in the size of the device.

[0053] Furthermore, in the first embodiment, as described above, the device further includes a stage 32 on which the sample S is placed and which is movable across the first placement area 50 and the second placement area 51. This eliminates the need to install a stage 32 in each of the first placement area 50 and the second placement area 51, thereby reducing the number of parts.

[0054] Furthermore, in the first embodiment, as described above, the housing 10 further includes an X-ray source 30, a first grating 33 for forming a self-image with X-rays irradiated from the X-ray source 30, and a second grating 34 for interfering with the self-image of the first grating 33, and the detection unit 31 is configured to detect X-rays irradiated from the X-ray source 30, the first arrangement region 50 is the region between the X-ray source 30 and the first grating 33, and the second arrangement region 51 is the region between the first grating 33 and the second grating 34. By arranging the first arrangement region 50 and the second arrangement region 51 as described above, the magnification ratios of the X-ray phase contrast images acquired in the first arrangement region 50 and the second arrangement region 51 are configured to be different. Therefore, when it is desired to observe a minute area of ​​the sample S while ensuring a sufficient magnification ratio, the sample S can be placed in the first arrangement region 50, and when it is desired to observe a wide area of ​​the sample S, the sample S can be placed in the second arrangement region 51. This makes it easy to acquire X-ray phase contrast images with different magnifications.

[0055] Furthermore, in the first embodiment, as described above, the first door 20 includes a recess 39 on the side (rear side) facing the inside of the housing 10, and the second door 21 is configured to be housed in the recess 39 of the first door 20 when the first door 20 and the second door 21 slide. This makes it possible to suppress the increase in size of the device with a simple configuration.

[0056] Furthermore, in the first embodiment, as described above, the device further includes a locking mechanism 60a configured to prohibit the sliding movement of the first door 20 based on the formation of the second opening 42, and to prohibit the sliding movement of the second door 21 based on the formation of the first opening 41.

[0057] The X-ray phase imaging apparatus 1 is configured such that the first door 20 and the second door 21 cannot be opened while the X-ray source 30 is irradiating with X-rays, thanks to an electromagnetic lock 60b. In contrast, the lock mechanism 60a is configured such that when one door is slid open and work is performed through the opening, the other door cannot be opened. As a result, when a first user slides the closed first door 20 in the X1 direction and accesses the inside of the housing 10 through the formed first opening 41 to perform work, a second user cannot slide the closed second door 21 in the X2 direction, thus preventing contact between the first user and the sliding second door 21. Furthermore, since the first door 20 and the second door 21 are not equipped with a lock mechanism that uses a key to lock and unlock, or a lock mechanism that uses a thumbturn to lock and unlock, and are not designed to prevent the other door from being opened when one door is slid open for work, the reduction in work efficiency associated with the user unlocking and locking the doors can be suppressed. As a result, when using the X-ray phase imaging apparatus 1, it is possible to ensure safety while suppressing a decrease in work efficiency.

[0058] Furthermore, in the first embodiment, as described above, the locking mechanism 60a is configured to prevent the sliding movement of the other door 21 from the first door 20 and the second door 21 based on the sliding movement of either the first door 20 or the second door 21, even when the first opening 41 and the second opening 42 are not formed. This makes it easy to prevent the sliding movement of the other door, thereby ensuring safety while further suppressing the decrease in work efficiency.

[0059] Furthermore, in the first embodiment, as described above, the locking mechanism 60a includes a first locking mechanism 70 that prohibits the sliding movement of the first door 20 based on the start of the sliding movement of the second door 21, and a second locking mechanism 80 that prohibits the sliding movement of the second door 21 based on the start of the sliding movement of the first door 20. This makes it possible to prevent the sliding movement of the other door by triggering the start of the sliding movement of one door, thereby further improving safety during operation.

[0060] Furthermore, in the first embodiment, as described above, the first locking mechanism 70 includes a first engaging member 72 provided on the housing 10 and a first engaging portion 71 provided on the first door 20, and is configured such that the sliding second door 21 comes into contact with the first engaging member 72, and the first engaging member 72, which has been moved by the contact, engages with the first engaging portion 71. The second locking mechanism 80 includes a second engaging member 82 provided on the housing 10 and a second engaging portion 81 provided on the second door 21, and is configured such that the sliding first door 20 comes into contact with the second engaging member 82, and the second engaging member 82, which has been moved by the contact, engages with the second engaging portion 81. As a result, the first locking mechanism 70 and the second locking mechanism 80 can be made to function even when the electromagnetic lock is not activated and is not energized, thereby further improving safety and work efficiency.

[0061] Furthermore, in the first embodiment, as described above, the second door 21 and the locking mechanism 60a are configured to be covered by the first door 20 when the first door 20 slides. This makes it possible to suppress an increase in the size of the device even when the locking mechanism 60a is provided.

[0062] [Second Embodiment] (Configuration of X-ray phase imaging system) Next, the configuration of the X-ray phase imaging apparatus 2 according to the second embodiment will be described with reference to Figures 14 to 21. In the second embodiment, as shown in Figure 14, unlike the first embodiment, the X-ray phase imaging apparatus 2 further includes a first sealing part 22 provided on the first door 20 that closes the first gap 12, and a second sealing part 26 provided on the second door 21 that closes the second gap 13. Components similar to those in the first embodiment are denoted by the same reference numerals and their descriptions are omitted.

[0063] In the X-ray phase imaging apparatus 1 according to the first embodiment, as shown in Figure 12, when the first door 20 is slid in the X1 direction from a closed state, a first gap 12 is formed. The first gap 12 is formed in the Z direction between the X2 direction end of the first door 20 and the X2 direction end of the first opening 41 at the lower end 41a of the first opening 41 (see Figure 14). That is, the first gap 12 is formed between the lower end 41a of the first opening 41 (see Figure 14) and the bottom 10a inside the housing, sandwiched between the X2 direction end of the first door 20 and the X2 direction end of the first opening 41. In Figure 12, the first gap 12 is shown by a dashed line.

[0064] Furthermore, as shown in Figure 13, when the second door 21 is slid in the X2 direction from a closed state, a second gap 13 is formed. The second gap 13 is formed in the Z direction between the X1 direction end of the second door 21 and the X1 direction end of the second opening 42 at the lower end 42a of the second opening 42 (see Figure 14). That is, the second gap 13 is formed between the lower end 42a of the second opening 42 (see Figure 14) and the bottom 10a inside the housing, sandwiched between the X1 direction end of the second door 21 and the X1 direction end of the second opening 42. Note that in Figure 13, the second gap 13 is shown by a dashed line.

[0065] The formation of the first gap 12 and the second gap 13 may cause samples, X-ray phase imaging equipment components, etc., to fall into the first gap 12 and the second gap 13. To prevent samples, components, etc., from falling into the first gap 12 and the second gap 13, it is preferable to block or cover the first gap 12 and the second gap 13.

[0066] Therefore, it is conceivable to provide a single member extending in the X2 direction at the X2 end of the first door 20, and a single member extending in the X1 direction at the X1 end of the second door 21, and to cover the first gap 12 and the second gap 13 with these members. However, when the first door 20 and the second door 21 are closed, space (margin) is required to accommodate these members in the X2 direction of the first door 20 and the X1 direction of the second door 21. This would increase the size of the X-ray phase imaging apparatus.

[0067] Alternatively, a brush containing bristles extending in the Z direction could be placed at the formation positions of the first gap 12 and the second gap 13, thereby covering the first gap 12 and the second gap 13 with the bristles of the brush. However, the opening and closing of the first door 20 and the second door 21 can cause the bristles of the brush to become kinked or bent, making it difficult to reliably cover the first gap 12 and the second gap 13. Therefore, it is preferable to suppress the increasing size of the X-ray phase imaging apparatus while preventing samples, parts, etc., from falling into the first gap 12 and the second gap 13 formed by the sliding movement of the first door 20 and the second door 21.

[0068] Figure 14 is a schematic diagram of the X-ray phase imaging apparatus 2 of the second embodiment. For the sake of clarity, the analysis unit 11, rails 36 and 37, and locking unit 60 shown in Figure 5 have been omitted in Figure 14.

[0069] (Structure of the sealing part) The X-ray phase imaging apparatus 2 includes a first blocking section 22 and a second blocking section 26. The first blocking section 22 is provided on the first door 20. The second blocking section 26 is provided on the second door 21.

[0070] The first sealing portion 22 is provided projecting in the X2 direction from the X2 direction side of the first door 20. As shown in Figure 15, the first sealing portion 22 is configured to close the first gap 12 formed at the lower end 41a of the first opening 41 by the sliding movement of the first door 20. Note that the sealing of the first gap 12 by the first sealing portion 22 also includes a state in which there is a small gap in the Z direction of the first gap 12. The first sealing portion 22 includes a first sealing portion side first member 23, a first sealing portion side second member 24, and a first sliding portion 25 (see Figure 16).

[0071] The first closing-side first member 23 is connected to the X2-direction end of the first door 20 at its X1-direction end. As shown in Figure 16, the first closing-side first member 23 includes a first upper surface 23a and a pair of first side surfaces 23b. The first upper surface 23a of the first closing-side first member 23 includes a flat surface. The pair of first side surfaces 23b of the first closing-side first member 23 are a pair of surfaces facing each other in the Z direction. The pair of first side surfaces 23b are formed to extend downward from each of a pair of sides of the first upper surface 23a of the first closing-side first member 23 along the X2 direction. The first closing-side first member 23 has an inverted U-shape in cross-section as viewed from the X2 direction (see Figure 16). The first closing-side first member 23 is formed of a metal plate.

[0072] The first sealing portion side second member 24 includes a second upper surface 24a, a pair of second side surfaces 24b, and a contact side surface 24c (see Figure 17). As shown in Figure 17, the first sealing portion side second member 24 is positioned to overlap the first sealing portion side first member 23 in the Y direction when the first door 20 is closed. More specifically, the first sealing portion side second member 24 is provided so as to be covered by the first upper surface 23a and the pair of first side surfaces 23b of the first sealing portion side first member 23 when the first door 20 is closed. Furthermore, the first sealing portion side second member 24 is configured to be pulled out in the X2 direction from the X2 end of the first sealing portion side first member 23 when the first door 20 is fully open. As shown in Figure 16, the second upper surface 24a of the first sealing portion side second member 24 includes a flat surface. The pair of second sides 24b of the first closing portion side second member 24 are formed to extend downward from each of the pair of sides of the second upper surface 24a of the first closing portion side second member 24 along the X2 direction. The contact side 24c of the first door closing portion second member (see Figure 17) is formed to cover the end of the first closing portion side second member 24 in the X2 direction. The first closing portion side second member 24 has an inverted U shape in cross-section viewed from the X2 direction (see Figure 16). The first closing portion side second member 24 is formed of a metal plate.

[0073] The first sliding portion 25 is provided on a pair of first side surfaces 23b of the first blocking portion side first member 23. The first blocking portion side second member 24 is supported so as to be relatively movable with respect to the first blocking portion side first member 23 via the first sliding portion 25, in a non-contact state with the first blocking portion side first member 23. The first sliding portion 25 is connected to brackets 25c provided on a pair of second side surfaces 24b of the first blocking portion side second member 24. The first sliding portion 25 includes, for example, a slide rail 25a and a slide guide 25b. The configuration of the first sliding portion 25 is not particularly limited.

[0074] As shown in Figure 14, the second sealing portion 26 is provided projecting in the X1 direction from the X1 direction side of the second door 21. As shown in Figure 18, the second sealing portion 26 is configured to close the second gap 13 formed at the lower end 42a of the second opening 42 by the sliding movement of the second door 21. Note that the closing of the second gap 13 by the second sealing portion 26 also includes a state in which there is a small gap in the Z direction of the second gap 13. The second sealing portion 26 includes a second sealing portion side first member 27, a second sealing portion side second member 28, and a second sliding portion 29 (see Figure 19).

[0075] The second sealing portion side first member 27 is connected to the X1 direction end of the second door 21 at its X2 direction end. As shown in Figure 19, the second sealing portion side first member 27 includes a third upper surface 27a and a pair of third side surfaces 27b. The third upper surface 27a of the second sealing portion side first member 27 includes a flat surface. The pair of third side surfaces 27b of the second sealing portion side first member 27 are a pair of surfaces facing each other in the Z direction. The pair of third side surfaces 27b are formed to extend downward from each of the pair of sides of the third upper surface 27a of the second sealing portion side first member 27 along the X1 direction. The second sealing portion side first member 27 has an inverted U shape in cross-section viewed from the X1 direction (see Figure 19). The second sealing portion side first member 27 is formed of a metal plate.

[0076] As shown in Figure 20, the second member 28 on the second sealing side is positioned to overlap with the first member 27 on the second sealing side in the Y direction when the second door 21 is closed. More specifically, the plate-like portion 28a of the second member 28 on the second sealing side is provided to be covered by the third upper surface 27a and a pair of third side surfaces 27b of the first member 27 on the second sealing side when the second door 21 is closed. Furthermore, the second member 28 on the second sealing side is configured to be pulled out in the X1 direction from the X1 direction end of the first member 27 on the second sealing side when the second door is fully open.

[0077] As shown in Figure 21, the second member 28 on the second sealing portion side includes a plate-shaped portion 28a, a side portion 28b, an extension portion 28c, and a protruding portion 28d.

[0078] The plate-like portion 28a has a fourth upper surface 28e. The side portion 28b is formed to extend downward from one end in the Z direction of the end of the plate-like portion 28a in the X1 direction. The extension portion 28c is formed to further extend in the X1 direction from the other end in the Z direction of the end of the plate-like portion 28a in the X1 direction. The projection portion 28d is formed to extend upward from the end of the extension portion 28c in the X1 direction. The second member 24 on the first closing portion side is made of a metal plate. The plate-like portion 28a is provided with a bracket 29b (see Figure 19) for connecting to the second sliding portion 29.

[0079] As shown in Figure 19, the second sliding portion 29 is provided on a pair of third side surfaces 27b of the second blocking portion side first member 27. The second blocking portion side second member 28 is supported so as to be relatively movable relative to the second blocking portion side first member 27 via the second sliding portion 29, in a non-contact state with the second blocking portion side first member 27. The second sliding portion 29 is connected to a bracket 29b provided on the plate-shaped portion 28a of the second blocking portion side second member 28. The second sliding portion 29 includes, for example, a slide rail 29a. The configuration of the second sliding portion 29 is not particularly limited.

[0080] (Configuration of the stopper pull-out section) The housing 10 (see Figures 15 and 18) includes a first restraining pull-out section 14 (see Figure 17) and a second restraining pull-out section 16 (see Figure 20).

[0081] As shown in Figure 17, the first restraining pull-out section 14 is configured to restrain the second member 24 on the first sealing section side by contacting it as the first door 20 slides in the X1 direction, and to pull the second member 24 on the first sealing section side from the first member 23 on the first sealing section side in the X2 direction.

[0082] The first restraining pull-out section 14 is provided on the housing 10 (see Figure 15). The first restraining pull-out section 14 is fixed to the housing (see Figure 15) separately from the first blocking section side first member 23 and the first blocking section side second member 24. That is, the first restraining pull-out section 14 is fixed to the housing (see Figure 15) so as not to move with the sliding movement of the first door 20. The first restraining pull-out section 14 is provided below the first upper surface 23a (see Figure 16) of the first blocking section side first member 23 and the second upper surface 24a (see Figure 16) of the first blocking section side second member, and in a position facing the contact side surface 24c of the first blocking section side second member 24 in the X direction. Furthermore, the first restraining pull-out portion 14 is located on the X2 side of the side end of the opening 40 (see Figure 15) in the X2 direction, and is also located near the side end of the opening 40 in the X2 direction. The first restraining pull-out portion 14 contacts the contact surface 24c of the first blocking portion side second member 24, which slides in the X1 direction, thereby restraining the sliding movement of the first blocking portion side second member 24 in the X1 direction.

[0083] The first stopping pull-out section 14 stops the second member 24 on the first sealing section side by contacting the contact surface 24c of the second member 24 on the first sealing section side, and as the first door 20 slides in the X1 direction, the second member 24 on the first sealing section side is pulled out in the X2 direction from the first member 23 on the first sealing section side. In other words, as the second member 24 on the first sealing section side is stopped by the first stopping pull-out section 14, the second member 24 on the first sealing section side, which was covered by the first member of the first door sealing section, becomes exposed.

[0084] As shown in Figure 20, the second restraining pull-out section 16 is configured to restrain the second member 28 on the second sealing section side by contacting it as the second door 21 slides in the X2 direction, and to pull the second member 28 on the second sealing section side out from the first member 27 on the second sealing section side in the X1 direction.

[0085] The second restraining pull-out section 16 is provided on the housing 10 (see Figure 18). The second restraining pull-out section 16 is fixed to the housing (see Figure 18) separately from the second sealing section side first member 27 and the second sealing section side second member 28. That is, the second restraining pull-out section 16 is fixed to the housing (see Figure 18) so as not to move with the sliding movement of the second door 21. The second restraining pull-out section 16 is provided above the third upper surface 27a of the second sealing section side first member 27 (see Figure 19) and the fourth upper surface 28e of the second sealing section side second member (see Figure 21), and in a position opposite the protrusion 28d of the second sealing section side second member 28 in the X direction. Furthermore, the second restraining pull-out portion 16 is located on the X1 side of the opening 40 (see Figure 15) and near the X1 side of the opening 40. The second restraining pull-out portion 16 contacts the protruding portion 28d of the second closing portion side second member 28, which slides in the X2 direction, thereby restraining the sliding movement of the second closing portion side second member 28 in the X2 direction.

[0086] The second stopping pull-out section 16 stops the second member 28 on the second sealing section side by contacting the protruding portion 28d of the second member 28 on the second sealing section side, and as the second door 21 slides in the X2 direction, the second member 28 on the second sealing section side is pulled out in the X1 direction from the first member 27 on the second sealing section side. In other words, as the second member 28 on the second sealing section side is stopped by the second stopping pull-out section 16, the second member 28 on the second sealing section side, which was covered by the first member 27 on the second sealing section side, becomes exposed.

[0087] (Stopper configuration) The housing 10 (see Figures 15 and 18) includes a first stopper 15 (see Figure 17) and a second stopper 17 (see Figure 20).

[0088] As shown in Figure 17, the first stopper 15 is configured to stop the first blocking side second member 24 from moving as the first door 20 slides in the X2 direction, and to overlap the first blocking side first member 23 and the first blocking side second member 24.

[0089] The first stopper 15 is provided on the housing 10 (see Figure 15). The first stopper 15 is fixed to the housing (see Figure 15) separately from the first closing part side first member 23 and the first closing part side second member 24. That is, the first stopper 15 is fixed to the housing (see Figure 15) so as not to move with the sliding movement of the first door 20. The first stopper 15 is provided at a position facing the contact surface 24c of the first closing part side second member 24 in the X direction. The first stopper 15 is provided at a position away from the X2 direction end face of the first door 20 by a distance corresponding to the X direction length of the first closing part side first member 23 when the first door 20 is closed, in the X2 direction.

[0090] When the first door 20 slides in the X2 direction with the first sealing part side second member 24 pulled out, the first stopper 15 contacts the contact side 24c and prevents the first sealing part side second member 24 from moving in the X2 direction. As a result, the first stopper 15 pushes the first sealing part side second member 24 into the first sealing part side first member 23. Then, with the first door 20 closed, almost the entire first sealing part side second member 24 is stored inside the first sealing part side first member 23.

[0091] As shown in Figure 20, the second stopper 17 is configured to stop the second member 28 on the second sealing side from moving as the second door 21 slides in the X1 direction, and to overlap the first member 27 on the second sealing side and the second member 28 on the second sealing side.

[0092] The second stopper 17 is provided on the housing 10 (see Figure 18). The second stopper 17 is fixed to the housing (see Figure 18) separately from the second closing part side first member 27 and the second closing part side second member 28. That is, the second stopper 17 is fixed to the housing (see Figure 18) so as not to move with the sliding movement of the second door 21. The second stopper 17 is provided at a position opposite the side portion 28b of the second closing part side second member 28 in the X direction. The second stopper 17 is provided at a position away from the X1 direction end face of the second door 21 by a distance corresponding to the X direction length of the second closing part side first member 27 when the second door 21 is closed, toward the X1 direction.

[0093] When the second door 21 slides in the X1 direction with the second member 28 on the second sealing section side pulled out, the second stopper 17 contacts the side portion 28b and prevents the second member 28 on the second sealing section side from moving in the X1 direction. As a result, the second stopper 17 pushes the second member 28 on the second sealing section side into the interior of the first member 27 on the second sealing section side. Then, with the second door 21 closed, almost the entire second member 28 on the second sealing section side is stored inside the first member 27 on the second sealing section side.

[0094] (Movement of the first and second members of the closing section as the door slides) The movement of the first closing portion 22, specifically the first closing portion side first member 23 and the first closing portion side second member 24, in conjunction with the sliding movement of the first door 20 will be explained.

[0095] As the first door 20, which is in a closed state as shown in Figure 17(a), slides in the X1 direction, a first opening 41 is formed in the X2 direction of the first door 20, and a first gap 12 is formed in the X2 direction of the first door 20 (see Figure 15). The first sealing portion 22 moves in the X1 direction as the first door 20 slides. At this time, the first sealing portion side first member 23 moves in the X1 direction to close the first gap 12. The first gap 12 is covered by the first sealing portion side first member 23 (see Figure 15). As shown in Figure 17(b), the relative positions of the first sealing portion side first member 23 and the first sealing portion side second member 24 remain unchanged, and the first sealing portion side second member 24 is covered by the first sealing portion side first member 23, while the first sealing portion side first member 23 and the first sealing portion side second member 24 move in the X1 direction.

[0096] As the first door 20 slides further in the X1 direction, the first stopping pull-out part 14 comes into contact with the contact surface 24c of the first sealing part side second member 24, as shown in Figure 17(b). As a result, the sliding movement of the first sealing part side second member 24 in the X1 direction is stopped. As shown in Figure 17(c), as the first door slides further in the X1 direction while the first sealing part side second member 24 is stopped by the first stopping pull-out part 14, the first sealing part side first member 23 moves in the X1 direction together with the first door 20, while the first sealing part side second member 24 remains stopped by the first stopping pull-out part 14. As a result, the first sealing part side second member 24 is pulled out from the first sealing part side first member 23 in the X1 direction so as to close the first gap 12. When the first door 20 is fully open, the first gap 12 formed in the X2 direction of the first door 20 is closed by the first closing part side first member 23 and the first closing part side second member 24 which is pulled out from the first closing part side first member 23 (see Figure 15).

[0097] As shown in Figure 17(d), when the fully open first door 20 slides in the X2 direction, the first member 23 on the first closing part 22 and the pulled-out second member 24 on the first closing part side also slide in the X2 direction together with the first door 20. At this time, the second member 24 on the first closing part side slides in the X2 direction while remaining pulled out from the first member 23 on the first closing part side.

[0098] As the first door 20 slides further in the X2 direction, the first stopper 15 comes into contact with the contact surface 24c of the first sealing part side second member 24. As a result, the sliding movement of the first sealing part side second member 24 in the X2 direction is stopped. With the first sealing part side second member 24 stopped by the first stopper 15, the first door 20 slides further in the X2 direction, causing the first sealing part side first member 23 to move in the X2 direction together with the first door 20, while the first sealing part side second member 24 remains stopped by the first stopping pull-out part 14. Consequently, in response to the sliding movement of the first sealing part 22 in the X2 direction, the first sealing part side second member 24 is gradually covered by the first sealing part side first member 23 from the X1 direction. When the first door 20 is closed, as shown in Figure 17(a), the first sealing part side first member 23 is covered by the first sealing part side second member 24.

[0099] Note that the movement of the second closing portion 26's first closing portion side first member 27 and second closing portion side second member 28 in conjunction with the sliding movement of the second door 21, as shown in Figure 20, is the same as the movement of the first closing portion 22's first closing portion side first member 23 and second closing portion side second member 24 in conjunction with the sliding movement of the first door 20 described above, so no explanation is provided.

[0100] (Relationship between the lengths of the cover, door, and housing in the X direction) As shown in Figure 14, when the first door 20 is closed, the length Lf1 in the X direction of the first sealing portion where the first sealing portion side first member 23 and the second sealing portion side second member 24 overlap is smaller than the length Ld1 in the X direction of the first door 20. Also, when the second door 21 is closed, the length Lf2 in the X direction of the second sealing portion where the second sealing portion side first member 27 and the second sealing portion side second member 28 overlap is smaller than the length Ld2 in the X direction of the second door 21.

[0101] As shown in Figure 15, when the first door 20 is fully open, the length Lf3 in the X direction of the first closing portion 22, which is extended from the first closing portion side second member 24 by the first closing portion side first member 23, is greater than the length Ld1 in the X direction of the first door 20. Also, as shown in Figure 18, when the second door 21 is fully open, the length Lf4 in the X direction of the second closing portion 26, which is extended from the second closing portion side second member 28 by the first closing portion side first member 27, is greater than the length Ld2 in the X direction of the second door 21.

[0102] As shown in Figure 14, the distance Lk1 from the X2 end of the first opening 41 to the X2 end 10b of the housing 10 is greater than the X2 length Lf1 of the first sealing portion when the first door 20 is closed, and less than the X length Ld1 of the first door 20. Also, the distance Lk2 from the X1 end of the second opening 42 to the X1 end 10c of the housing 10 is greater than the X1 length Lf2 of the second sealing portion when the second door 21 is closed, and less than the X length Ld2 of the second door 21.

[0103] (Effects of the second embodiment) In the second embodiment, the following effects can be obtained.

[0104] In the second embodiment, as described above, the first door 20 is provided with a first closing portion 22 that closes a first gap 12 formed in the thickness direction of the first door 20 by the sliding movement of the first door 20, and the second closing portion 26 is provided with a second door 21 that closes a second gap 13 formed in the thickness direction of the second door 21 by the sliding movement of the second door 21, wherein the first closing portion 22 comprises a first closing portion side first member 23 and the first closing portion when the first door 20 is closed The second closing portion 26 includes a second closing portion side member 24 which is positioned to overlap with the first closing portion side member 23 and is extended from the first closing portion side member 23 when the first door 20 is fully open, and the second closing portion 26 includes a first closing portion side member 27 and a second closing portion side member 28 which is positioned to overlap with the first closing portion side member 27 when the second door 21 is closed and is extended from the first closing portion side member 27 when the second door 21 is fully open. As a result, when the first door 20 is closed, the second closing portion side member 24 is positioned to overlap with the first closing portion side member 23, so that the length of the first closing portion 22 in the X direction when the first door 20 is closed can be reduced. Furthermore, when the second door 21 is closed, the second member 28 on the second sealing portion side is positioned to overlap with the first member 27 on the second sealing portion side, thus reducing the length of the second sealing portion 26 in the X direction when the second door 21 is closed. As a result, compared to a configuration in which the second member remains extended without overlapping the first member when the door is closed, it is possible to suppress the increase in size of the X-ray phase imaging apparatus 2 while preventing samples, parts, etc. from falling into the first gap 12 and the second gap 13 formed as the first door 20 and the second door 21 slide.

[0105] Furthermore, in the second embodiment, as described above, the housing 10 contacts the first sealing part side second member 24 as the first door 20 slides in the X1 direction when the first door 20 opens, thereby restraining the first sealing part side second member 24. With the first sealing part side second member 24 restrained, the first door 20 slides further in the X1 direction, thereby pulling the first sealing part side second member 24 out from the first sealing part side first member 23. The device includes a first restraining pull-out section 14 and a second restraining pull-out section 16 that, when the second door 21 slides in the X2 direction as the second door 21 opens, contacts the second member 28 on the second sealing section side and restrains the second member 28 on the second sealing section side, and when the second door 21 slides further in the X2 direction while the second member 28 on the second sealing section side is restrained, it pulls the second member 28 on the second sealing section side out from the first member 27 on the second sealing section side. This eliminates the need for special mechanisms such as a drive unit to pull out the second member 24 on the first sealing section side from the first member 23 on the first sealing section side as the first door 20 slides in the X1 direction, and a drive unit to pull out the second member 28 on the second sealing section side from the first member 27 on the second sealing section side as the second door 21 slides in the X2 direction. Therefore, the configuration of the X-ray phase imaging device 2 can be simplified compared to the case where a mechanism such as the above-mentioned drive unit is provided.

[0106] Furthermore, in the second embodiment, as described above, the housing 10 contacts the first sealing part side second member 24 by the sliding movement of the first door 20 in the X2 direction when the first door 20 closes, thereby restraining the first sealing part side second member 24. In this state, as the first door 20 slides further in the X2 direction, the first sealing part side first member 23 and the first sealing part side second member 24 overlap. The device includes a first stopper 15 and a second stopper 17 that contacts the second sealing part side second member 28 when the second door 21 slides in the X1 direction as the second door 21 closes, thereby restraining the second sealing part side second member 28, and when the second door 21 slides further in the X2 direction while the second sealing part side second member 28 is restrained, the second stopper 17 overlaps the second sealing part side first member 27 and the second sealing part side second member 28. This eliminates the need for a special mechanism for the first sealing part side second member 24 to be covered by the first sealing part side first member 23 as the first door 20 slides in the X2 direction, and a special mechanism for the second sealing part side second member 28 to be covered by the second sealing part side first member 27 as the second door 21 slides in the X1 direction. Therefore, the configuration of the X-ray phase imaging device 2 can be simplified compared to the case where the above mechanisms are provided.

[0107] Furthermore, in the second embodiment, as described above, the first sealing portion side first member 23 includes a first upper surface 23a extending along the X1 direction and a first side surface 23b extending along the X1 direction, the first sealing portion side second member 24 is provided so as to be covered by the first upper surface 23a and the first side surface 23b, the second sealing portion side first member 27 includes a third upper surface 27a extending along the X2 direction and a third side surface 27b extending along the X2 direction, and the second sealing portion side second member 28 is provided so as to be covered by the third upper surface 27a and the third side surface 27b. By including the first side surface 23b in the first sealing portion side first member 23, the first sealing portion side second member 24 can be housed inside the first sealing portion side first member 23, and the rigidity of the first sealing portion side first member 23 can be improved. Furthermore, by including the third side surface 27b of the second sealing portion side first member 27, the second sealing portion side second member 28 can be housed inside the second sealing portion side first member 27, and the rigidity of the second sealing portion side first member 27 can be improved. By improving the rigidity of the first sealing portion side first member 23 and the second sealing portion side first member 27, deformation of the first sealing portion side first member 23 and the second sealing portion side first member 27 can be suppressed even if a sample or part falls onto the first upper surface 23a of the first sealing portion side first member 23 and the third upper surface 27a of the second sealing portion side first member 27.

[0108] Furthermore, in the second embodiment, as described above, the second member 28 on the second sealing portion side includes a fourth upper surface 28e, and the first upper surface 23a, second upper surface 24a, third upper surface 27a, and fourth upper surface 28e include flat surfaces. This makes it possible to suppress the diffusion of falling objects such as samples and parts after they fall, compared to cases where the first upper surface 23a to the fourth upper surface 28e are not flat surfaces.

[0109] Furthermore, in the second embodiment, as described above, the length in the X direction of the first sealing portion 22, where the first sealing portion side first member 23 and the first sealing portion side second member 24 overlap when the first door 20 is closed, is smaller than the length in the X direction of the first door 20, and the length in the X direction of the second sealing portion 26, where the second sealing portion side first member 27 and the second sealing portion side second member 28 overlap when the second door 21 is closed, is smaller than the length in the X direction of the second door 21. As a result, the increase in size of the X-ray phase imaging apparatus 2 can be further suppressed compared to the case where the lengths in the X direction of the first sealing portion 22 and the second sealing portion 26 when the first door 20 and the second door 21 are closed are larger than the lengths in the X direction of the first door 20 and the second door 21.

[0110] Furthermore, in the second embodiment, as described above, when the first door 20 is fully open, the length in the X direction of the first closing portion 22, which is extended from the first closing portion side second member 24 to the first closing portion side first member 23, is greater than the length in the X direction of the first door 20, and when the second door 21 is fully open, the length in the X direction of the second closing portion 26, which is extended from the second closing portion side second member 28 to the first closing portion side first member 27, is greater than the length in the X direction of the second door 21. Since the length in the X direction of the first opening 41 when the first door 20 is fully open is less than or equal to the length in the X direction of the first door 20, the length in the X direction of the first closing portion 22 can be made greater than the length in the X direction of the first opening 41 when the first door 20 is fully open. As a result, the first gap 12 can be closed by the first closing portion 22 even when the first door 20 is fully open. Furthermore, when the second door 21 is fully open, the length of the second opening 42 in the X direction is less than or equal to the length of the second door 21 in the X direction. Therefore, when the second door 21 is fully open, the length of the second sealing portion 26 in the X direction can be made greater than the length of the second opening 42 in the X direction. As a result, even when the second door 21 is fully open, the second gap 13 can be sealed by the second sealing portion 26.

[0111] [Differentiation] It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of the present invention is defined by the claims rather than by the description of the embodiments above, and further includes all modifications (exceptions) within the meaning and scope equivalent to the claims.

[0112] For example, the first embodiment described above shows an example in which a locking mechanism 60a is provided, but the present invention is not limited thereto. As shown in Figures 10 and 11, a configuration without a locking mechanism 60a is also possible. Even in a configuration without a locking mechanism 60a, the size of the device can be kept down. Figure 11 is a schematic diagram showing the front of the housing 10 with the front cover (not shown) that covers members such as rails 36 and 37 removed to reveal the first door 20 and the second door 21.

[0113] Furthermore, although the first embodiment described above showed an example where the analytical device was an X-ray phase imaging device 1, the present invention is not limited thereto. The analytical device may be, for example, an X-ray computed tomography device or an electron beam microanalyzer (EPMA) device. Also, although the above embodiment described an example where the analytical device was used for non-destructive testing, the present invention is not limited thereto. The analytical device may be used, for example, for medical purposes to image the inside of a biological sample.

[0114] Furthermore, although the first embodiment described above shows an example in which a stage 32 is movable across the first placement area 50 and the second placement area 51 is provided, the present invention is not limited thereto. The stage 32 may be provided in each of the first placement area 50 and the second placement area 51.

[0115] Furthermore, although the first embodiment described above shows an example in which a first arrangement area 50 and a second arrangement area 51 are provided, the present invention is not limited thereto. There do not necessarily have to be two arrangement areas.

[0116] Furthermore, although the first embodiment described above shows an example in which a first grating 33 and a second grating 34 are included as a plurality of gratings, the present invention is not limited thereto. The plurality of gratings may further include a multi-slit arranged between the X-ray source 30 and the first grating 33, having a plurality of X-ray transmitting and X-ray absorbing portions. This makes it possible to increase the coherence of the X-rays irradiated from the X-ray source.

[0117] Furthermore, in the first embodiment described above, an example was shown in which the locking mechanism 60a is configured such that an engaging member, which includes a plunger as a rod-shaped member and a linear guide and slider as a pressing member, engages with an engaging portion which is a hole. However, the present invention is not limited to this. The locking mechanism 60a may be composed of other known mechanisms, as long as it is configured to prevent the sliding movement of the other of the first door 20 and the second door 21 based on the sliding movement of either the first door 20 or the second door 21.

[0118] Furthermore, in the first embodiment described above, the stage 32 was shown to be movable across the first placement area 50 and the second placement area 51 by a moving mechanism 35, but the present invention is not limited to this. The stage 32 may be made movable by other known moving mechanisms instead of the moving mechanism 35.

[0119] Furthermore, in the first embodiment described above, the locking mechanism 60a is configured to prevent the sliding movement of the other door 21 based on the start of sliding movement by either the first door 20 or the second door 21, but the present invention is not limited thereto. The locking mechanism 60a may be configured to prevent the sliding movement of the other door 21 when either the first door 20 or the second door 21 has slid from a closed position to a predetermined position.

[0120] Furthermore, although the second embodiment described above shows an example in which the sealing portion is provided on both the first door 20 and the second door 21, the present invention is not limited to this. In the present invention, the sealing portion may not be provided. Alternatively, the sealing portion may be provided only on the first door 20, or only on the second door 21.

[0121] Furthermore, although the second embodiment described above shows an example in which the sealing portion includes a first member and a second member, the present invention is not limited thereto. The sealing portion may be, for example, a roll curtain, a bellows structure, or a brush-shaped sealing portion.

[0122] Furthermore, although the second embodiment described above shows an example in which the sealing portion includes a first member and a second member, the present invention is not limited thereto. The sealing portion may be configured to include a first member and a plurality of second members that are arranged to overlap with the first member when the door is closed and are pulled out from the first member when the door is fully open.

[0123] Furthermore, in the second embodiment described above, the first sealing portion side second member 24 is provided so as to cover the first upper surface 23a and first side surface 23b of the first sealing portion side first member 23 when the first door 20 is closed, and the second sealing portion side second member 28 is provided so as to cover the third upper surface 27a and third side surface 27b of the second sealing portion side second member 28 when the second door 21 is closed, but the present invention is not limited thereto. The first sealing portion side second member 28 may be provided so as to overlap the first upper surface 23a of the first sealing portion side first member 23 when the first door 20 is closed, or the second sealing portion side second member 28 may be provided so as to overlap the third upper surface 27a of the second sealing portion side first member 27 when the second door 21 is closed.

[0124] Furthermore, although the second embodiment described above shows an example in which the configuration of the first blocking portion 22, the first restraining pull-out portion 14, and the first stopper 15 differs from the configuration of the second blocking portion 26, the second restraining pull-out portion 16, and the second stopper 17, the present invention is not limited thereto. The first blocking portion 22, the first restraining pull-out portion 14, and the first stopper 15 may have the same configuration as the second blocking portion 26, the second restraining pull-out portion 16, and the second stopper 17, and the second blocking portion 26, the second restraining pull-out portion 16, and the second stopper 17 may have the same configuration as the first blocking portion 22, the first restraining pull-out portion 14, and the first stopper 15.

[0125] [Aspect] (First aspect) Those skilled in the art will understand that the exemplary embodiments described above are specific examples of the following first embodiment.

[0126] (Item 1) A housing in which a sample can be placed inside, A detection unit provided inside the aforementioned housing, The housing comprises a first door and a second door, which are provided on one side of the housing in a sliding manner and which slide along the surface of the housing so as to overlap in the thickness direction, When the first door is slid from a closed position in a first direction in which the portion overlapping with the second door in the thickness direction increases, a first opening is formed on one surface of the housing that allows access to the inside of the housing in a second direction opposite to the first direction. An analytical apparatus configured such that the second door slides from a closed position in a second direction, increasing the portion that overlaps with the first door in the thickness direction, thereby forming a second opening on one surface of the housing that allows access to the inside of the housing in the first direction.

[0127] (Item 2) The first opening is formed to face a first placement area within the housing where the sample can be placed, The second opening is formed to face a second placement region, which is different from the first placement region, and in which the sample can be placed inside the housing. The analytical apparatus according to item 1, wherein the detection unit is configured to acquire a signal based on the sample selectively placed in the first placement area or the second placement area.

[0128] (Item 3) The analytical apparatus according to item 2, further comprising a stage on which the sample is placed and which is movable between the first placement area and the second placement area.

[0129] (Item 4) The housing further comprises an X-ray source, a first grating for forming a self-image using X-rays irradiated from the X-ray source, and a second grating for interfering with the self-image of the first grating, The detection unit is configured to detect X-rays irradiated from the X-ray source. The analytical apparatus according to item 2 or 3, wherein the first arrangement region is the region between the X-ray source and the first grating, and the second arrangement region is the region between the first grating and the second grating.

[0130] (Item 5) The first door includes a recess on the side facing the interior of the housing, The analytical apparatus according to any one of items 1 to 4, wherein the second door is configured to be housed in the recess of the first door when the first and second doors slide apart.

[0131] (Item 6) The analytical apparatus according to any one of items 1 to 5, further comprising a locking mechanism configured to prevent the sliding movement of the first door based on the formation of the second opening.

[0132] (Item 7) The analytical apparatus according to item 6, wherein the locking mechanism is configured to prevent the sliding movement of the other of the first and second doors based on the sliding movement of either the first or second door from a state in which the first and second openings are not formed.

[0133] (Item 8) The analytical apparatus according to item 7, wherein the locking mechanism includes a first locking mechanism that prohibits the sliding movement of the first door based on the commencement of the sliding movement of the second door, and a second locking mechanism that prohibits the sliding movement of the second door based on the commencement of the sliding movement of the first door.

[0134] (Item 9) The first locking mechanism includes a first engaging member provided on the housing and a first engaging portion provided on the first door, wherein the sliding second door abuts against the first engaging member, and the first engaging member, moved by the abutment, engages with the first engaging portion. The analytical apparatus according to item 8, wherein the second locking mechanism includes a second engaging member provided on the housing and a second engaging portion provided on the second door, and the sliding first door abuts against the second engaging member, and the second engaging member, which has been moved by the abutment, engages with the second engaging portion.

[0135] (Item 10) The analytical apparatus according to any one of items 6 to 9, wherein the second door and the locking mechanism are configured to be covered by the first door when the first door slides.

[0136] (Item 11) The door further comprises a closing portion provided on at least one of the first door and the second door, which closes the gap formed in the thickness direction of the door as the door slides, The blocking portion includes a first member and a second member which is positioned to overlap with the first member when the door is closed and which is pulled out from the first member when the door is fully open, according to any one of items 1 to 10 of the analytical apparatus.

[0137] (Item 12) The analytical apparatus according to item 11, wherein the sealing portion is provided on both the first door and the second door.

[0138] (Item 13) The analytical apparatus according to item 11 or 12, wherein the housing includes a stopper pull-out section that contacts the second member when the door slides in the opening direction, thereby stopping the second member, and further slides the door in the opening direction while the second member is stopped, thereby pulling the second member out from the first member.

[0139] (Item 14) The analytical apparatus according to any one of items 11 to 13, wherein the housing includes a stopper that contacts the second member when the door slides in the closing direction when the door is closed, thereby stopping the second member, and further slides the door in the closing direction while the second member is stopped, thereby overlapping the first member and the second member.

[0140] (Item 15) The first member includes an upper surface of the first member extending along the first direction and a side surface of the first member extending along the first direction. The analytical apparatus according to any one of items 11 to 14, wherein the second member is provided so as to cover the upper surface and the side surface of the first member.

[0141] (Item 16) The second member includes the upper surface of the second member, The analytical apparatus according to item 15, wherein the upper surface of the first member and the upper surface of the second member include flat surfaces.

[0142] (Item 17) The analytical apparatus according to any one of items 11 to 16, wherein the length in the first direction of the blocking portion where the first member and the second member overlap when the door is closed is smaller than the length in the first direction of either the first door or the second door.

[0143] (Item 18) The analytical apparatus according to any one of items 11 to 17, wherein the length in the first direction of the blocking portion to which the second member is pulled out from the first member when the door is fully open is greater than the length in the first direction of either the first door or the second door. [Explanation of Symbols]

[0144] 1, 2 X-ray imaging equipment 10 cabinets 20 Door 1 21 Door 2 30 X-ray source 31 Detection unit 32 stages 33 1st grid 34 2nd grid 39 Recess 41. First opening 42. Second opening 50 1st placement area 51 Second placement area 60a Locking mechanism 70 First locking mechanism 71 First engagement portion 72 First engaging member 80 Second locking mechanism 81 Second engaging portion 82 Second engaging member S sample 12 1st gap (gap) 13 Second gap (gap) 14. First stop-drawer section (stop-drawer section) 15. First stopper (stopper) 16. Second stopper pull-out section (stopper pull-out section) 17. Second stopper (stopper) 22. First blockage section (blockage section) 23 First sealing portion side first member (first member) 23a 1st top surface 23b 1st side 24. Second member on the first sealing side (second member) 24a 2nd top surface 24b Second side 26. Second Blocking Section (Blocking Section) 27. First member on the second sealing side (first member) 27a 3rd top surface 27b Third aspect 28 Second member on the second sealing side (second member) 28e 4th top surface

Claims

1. A housing in which a sample can be placed inside, A detection unit provided inside the aforementioned housing, The housing comprises a first door and a second door, which are provided on one side of the housing in a sliding manner and which slide along the surface of the housing so as to overlap in the thickness direction, When the first door is slid from a closed position in a first direction in which the portion overlapping with the second door in the thickness direction increases, a first opening is formed on one surface of the housing that allows access to the inside of the housing in a second direction opposite to the first direction. The second door is configured to slide from a closed position in a second direction, increasing the portion that overlaps with the first door in the thickness direction, thereby forming a second opening on one side of the housing that allows access to the inside of the housing in the first direction. An analytical apparatus further comprising a locking mechanism configured to prevent the sliding movement of the first door based on the formation of the second opening, and to prevent the sliding movement of the second door based on the formation of the first opening.

2. The first opening is formed to face a first placement area within the housing where the sample can be placed, The second opening is formed to face a second placement region, which is different from the first placement region, and in which the sample can be placed inside the housing. The analytical apparatus according to claim 1, wherein the detection unit is configured to acquire a signal based on the sample selectively placed in the first arrangement area or the second arrangement area.

3. The analytical apparatus according to claim 2, further comprising a stage on which the sample is placed and which is movable across the first placement area and the second placement area.

4. The housing further comprises an X-ray source, a first grating for forming a self-image using X-rays irradiated from the X-ray source, and a second grating for interfering with the self-image of the first grating, The detection unit is configured to detect X-rays irradiated from the X-ray source. The analytical apparatus according to claim 2 or 3, wherein the first arrangement region is the region between the X-ray source and the first grating, and the second arrangement region is the region between the first grating and the second grating.

5. The first door includes a recess on the side facing the interior of the housing, The analytical apparatus according to any one of claims 1 to 4, wherein the second door is configured to be housed in the recess of the first door when the first door and the second door slide.

6. The analytical apparatus according to claim 1, wherein the locking mechanism is configured to prevent the sliding movement of the other of the first and second doors based on the sliding movement of either the first or second door from a state in which the first and second openings are not formed.

7. The analytical apparatus according to claim 6, wherein the locking mechanism includes a first locking mechanism that prohibits the sliding movement of the first door based on the start of the sliding movement of the second door, and a second locking mechanism that prohibits the sliding movement of the second door based on the start of the sliding movement of the first door.

8. The first locking mechanism includes a first engaging member provided on the housing and a first engaging portion provided on the first door, wherein the sliding second door abuts against the first engaging member, and the first engaging member, moved by the abutment, engages with the first engaging portion. The analytical apparatus according to claim 7, wherein the second locking mechanism includes a second engaging member provided on the housing and a second engaging portion provided on the second door, and the sliding first door abuts against the second engaging member, and the second engaging member, which has been moved by the abutment, engages with the second engaging portion.

9. The analytical apparatus according to any one of claims 1 to 8, wherein the second door and the locking mechanism are configured to be covered by the first door when the first door slides.

10. The door further comprises a closing portion provided on at least one of the first door and the second door, which closes the gap formed in the thickness direction of the door as the door slides, The analytical apparatus according to any one of claims 1 to 9, wherein the blocking portion includes a first member and a second member which is arranged to overlap with the first member when the door is closed and is pulled out from the first member when the door is fully open.

11. The analytical apparatus according to claim 10, wherein the sealing portion is provided on both the first door and the second door.

12. The analytical apparatus according to claim 10 or 11, wherein the housing includes a stopping pull-out section that contacts the second member and stops the second member when the door slides in the opening direction, and further slides the door in the opening direction while the second member is stopped, thereby pulling the second member out from the first member.

13. The analytical apparatus according to any one of claims 10 to 12, wherein the housing includes a stopper that contacts the second member and restrains the second member when the door slides in the closing direction when the door is closed, and further slides in the closing direction while the second member is restrained, thereby overlapping the first member and the second member.

14. The first member includes an upper surface of the first member extending along the first direction and a side surface of the first member extending along the first direction. The analytical apparatus according to any one of claims 10 to 13, wherein the second member is provided so as to cover the upper surface and the side surface of the first member.

15. The second member includes the upper surface of the second member, The analytical apparatus according to claim 14, wherein the upper surface of the first member and the upper surface of the second member include flat surfaces.

16. The analytical apparatus according to any one of claims 10 to 15, wherein the length in the first direction of the blocking portion where the first member and the second member overlap when the door is closed is smaller than the length in the first direction of either the first door or the second door.

17. The analytical apparatus according to any one of claims 10 to 16, wherein the length in the first direction of the closing portion, to which the second member is pulled out from the first member when the door is fully open, is greater than the length in the first direction of either the first door or the second door.

18. A housing in which a sample can be placed inside, A detection unit provided inside the aforementioned housing, The housing comprises a first door and a second door, which are provided on one side of the housing in a sliding manner and which slide along the surface of the housing so as to overlap in the thickness direction, When the first door is slid from a closed position in a first direction in which the portion overlapping with the second door in the thickness direction increases, a first opening is formed on one surface of the housing that allows access to the inside of the housing in a second direction opposite to the first direction. The second door is configured to slide from a closed position in a second direction, increasing the portion that overlaps with the first door in the thickness direction, thereby forming a second opening on one side of the housing that allows access to the inside of the housing in the first direction. The first door includes a recess on the side facing the interior of the housing, An analytical apparatus configured such that when the first door and the second door slide, the second door is housed in the recess of the first door.

19. A housing in which a sample can be placed inside, A detection unit provided inside the aforementioned housing, The housing comprises a first door and a second door, which are provided on one side of the housing in a sliding manner and which slide along the surface of the housing so as to overlap in the thickness direction, When the first door is slid from a closed position in a first direction in which the portion overlapping with the second door in the thickness direction increases, a first opening is formed on one surface of the housing that allows access to the inside of the housing in a second direction opposite to the first direction. The second door is configured to slide from a closed position in a second direction, increasing the portion that overlaps with the first door in the thickness direction, thereby forming a second opening on one side of the housing that allows access to the inside of the housing in the first direction. The door further comprises a closing portion provided on at least one of the first door and the second door, which closes the gap formed in the thickness direction of the door as the door slides, The blocking portion includes a first member and a second member which is positioned to overlap with the first member when the door is closed and is extended from the first member when the door is fully open, in an analytical apparatus.

Images