micro device

Abstract

To provide a fine adjustment device capable of rotating a fine adjustment table to a base part with a simple construction.SOLUTION: A fine adjustment device comprises: a base part; a fine adjustment table; and a rotational device that is arranged to the base part, and rotates the fine adjustment table to the base part. The rotational device contains: a first driving part that contains a first movement member supporting a first supported part of the fine adjustment table, and moves the first movement member along a first shaft line; a second driving part that contains a second movement member supporting a second supported part of which a position is different in a plan view from the first supported part in the fine adjustment table, and moves the second movement member along a second shaft line paralleled to the first shaft line; a third driving part that contains a third movement member supporting a third supported part of which a position is difference in a plan view from the first and second supported parts in the fine adjustment table, and moves the third movement member along a third shaft line paralleled to the first shaft line; and a fourth driving part that rotates the fine adjustment table in a plan view by depressing a side surface of the fine adjustment table.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present disclosure relates to a fine motion device.

Background Art

[0002] Patent Document 1 discloses a table device including a coarse motion table movable along two axes orthogonal to each other, and a fine motion table supported by the coarse motion table and finely movable along two axes orthogonal to the coarse motion table.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the table device of Patent Document 1, in order to adjust the posture of the fine motion table, there is a desire to rotate the fine motion table with respect to the base supporting the fine motion table.

[0005] An aspect of the present disclosure aims to provide a fine motion device that can rotate a fine motion table with respect to a base with a simple configuration.

Means for Solving the Problems

[0006] Aspects of the present disclosure provide a micro-adjustment device comprising: a base; a micro-adjustment table; and a rotating device disposed on the base and rotating the micro-adjustment table relative to the base, wherein the rotating device includes a first moving member that supports a first supported portion of the micro-adjustment table and a first drive unit that moves the first moving member along a first axis; a second moving member that supports a second supported portion of the micro-adjustment table whose position in plan view differs from the first supported portion and a second drive unit that moves the second moving member along a second axis parallel to the first axis; a third moving member that supports a third supported portion of the micro-adjustment table whose position in plan view differs from the first supported portion and the second supported portion and a third drive unit that moves the third moving member along a third axis parallel to the first axis; and a fourth drive unit that rotates the micro-adjustment table in plan view by pressing on the side surface of the micro-adjustment table.

[0007] According to an aspect of this disclosure, the micro-adjustment table is supported by a first moving member, a second moving member, and a third moving member at three points that are different in position from each other in a plan view. The first, second, and third moving members move along a first axis, a second axis, and a third axis that are parallel to each other, respectively. Therefore, by adjusting the amount and direction of movement of the first, second, and third moving members, the micro-adjustment table can be tilted with respect to an axis parallel to the first axis. In other words, the micro-adjustment table can rotate about each of two axes that are perpendicular to the first axis and mutually perpendicular.

[0008] Furthermore, the fine-adjustment table can rotate in a plan view by being pressed on its side by the fourth drive unit. In other words, the fine-adjustment table can rotate around an axis parallel to the first axis as its central axis. Thus, the fine-adjustment table can rotate around three mutually orthogonal axes, including the axis parallel to the first axis, as its central axis.

[0009] Thus, the fine adjustment device allows the fine adjustment table to be rotated relative to its base with a simple configuration.

[0010] In embodiments of this disclosure, the first movable member may rotatably support the first supported portion.

[0011] This allows the fine adjustment mechanism to rotate the fine adjustment table around the first moving member. Furthermore, compared to a case where the fine adjustment mechanism has a separate member for rotating and supporting the fine adjustment table, the number of parts in the fine adjustment mechanism can be reduced, resulting in a simpler configuration.

[0012] In embodiments of this disclosure, the first movable member may have a first spherical surface, and the first supported portion may have a tapered surface that is in line contact with the first spherical surface.

[0013] This allows the first movable member to rotate and support the first supported part in a simple shape.

[0014] In embodiments of this disclosure, the second movable member may movably support the second supported portion, and the third movable member may movably support the third supported portion.

[0015] As a result, the second and third moving members can support the second and third supported parts so that the fine-adjustment table can rotate.

[0016] In embodiments of this disclosure, the second moving member may have a second spherical surface, the second supported portion may have a surface in contact with the second spherical surface, and the third moving member may have a third spherical surface, the third supported portion may have a surface in contact with the third spherical surface.

[0017] As a result, the second and third moving members can support the second and third supported parts in a simple shape so that the fine-adjustment table can rotate.

[0018] In embodiments of this disclosure, the invention may further include a first magnet for moving the micro-adjustment table toward the base.

[0019] As a result, the first magnet can maintain the contact state between the first moving member and the first supported portion, the contact state between the second moving member and the second supported portion, and the contact state between the third moving member and the third supported portion. Therefore, the rotating device can rotate the fine movement table accurately.

[0020] In an aspect of the present disclosure, the fourth driving unit may further include a second magnet that moves the fine movement table in a direction opposite to the direction in which the fourth driving unit presses the fine movement table.

[0021] As a result, the fine movement table can be rotated by the second magnet in a direction opposite to the direction in which the fourth driving unit presses the fine movement table. Therefore, the state in which the fourth moving member and the side surface of the fine movement table are in contact can be maintained. Therefore, the fourth driving unit can rotate the fine movement table accurately.

[0022] In an aspect of the present disclosure, the triangle formed by the first intersection point between the orthogonal plane perpendicular to the first axis and the first axis, the second intersection point between the orthogonal plane and the second axis, and the third intersection point between the orthogonal plane and the third axis may be an isosceles triangle in which the length of the side connecting the first intersection point and the second intersection point is equal to the length of the side connecting the first intersection point and the third intersection point.

[0023] As a result, compared with the case where the triangle formed by the first intersection point, the second intersection point, and the third intersection point is not an isosceles triangle, the movement amounts and movement directions of the first moving member, the second moving member, and the third moving member corresponding to the rotation amount and rotation direction of the fine movement table can be calculated easily.

[0024] In an aspect of the present disclosure, the fine movement table may have a line-symmetric shape with a straight line passing through the first intersection point and perpendicular to the base connecting the second intersection point and the third intersection point as the axis of symmetry in a plan view.

[0025] Thus, even when the fine movement table rotates, the center of gravity of the fine movement table is located near the symmetry axis in a plan view. Therefore, the posture of the fine movement table can be stabilized.

Effect of the Invention

[0026] According to an aspect of the present disclosure, the fine movement table can be rotated with respect to the base portion with a simple configuration.

Brief Description of the Drawings

[0027] [Figure 1] FIG. 1 is a plan view showing an example of a fine movement device according to the present embodiment and a transport device to which the fine movement device is attached. [Figure 2] FIG. 2 is a plan view of the fine movement device according to the present embodiment. [Figure 3] FIG. 3 is a side view of the fine movement device according to the present embodiment. [Figure 4] FIG. 4 is a cross-sectional view of the fine movement device according to the present embodiment. [Figure 5] FIG. 5 is an axial cross-sectional view of a second drive unit and a third drive unit according to the present embodiment. [Figure 6] FIG. 6 is an axial cross-sectional view of a fourth drive unit according to the present embodiment.

Mode for Carrying Out the Invention

[0028] Hereinafter, embodiments according to the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The components of each embodiment described below can be combined as appropriate. Also, some components may not be used.

[0029] In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described while referring to this XYZ orthogonal coordinate system. Further, the directions along the X-axis, Y-axis, and Z-axis are respectively referred to as the X-direction, Y-direction, and Z-direction. Furthermore, the rotation (tilt) directions about the X-axis, Y-axis, and Z-axis are respectively referred to as the θX-direction, θY-direction, and θZ-direction.

[0030] In this embodiment, the XY plane is parallel to the main surface S of the base 10, which will be described later. The Z axis is perpendicular to the main surface S of the base 10. The X axis is perpendicular to the YZ plane. The Y axis is perpendicular to the XZ plane. The Z axis is perpendicular to the XY plane. The XY plane includes the X and Y axes. The XZ plane includes the X and Z axes. The YZ plane includes the Y and Z axes.

[0031] Figure 1 is a plan view showing an example of a fine-adjustment device and a transport device to which the fine-adjustment device is attached according to this embodiment. The fine-adjustment device 1 and the transport device 2 are used, for example, in the manufacturing of semiconductor devices as part of the semiconductor device manufacturing process.

[0032] The fine-adjustment device 1 supports an object for manufacturing semiconductor devices and fine-tunes the object's orientation. The transport device 2 supports the fine-adjustment device 1 and transports it so that the object is positioned at the desired location.

[0033] The conveying device 2 comprises a base member 3 and a support member 4 that moves relative to the base member 3. A pair of guide members 3a, a ball screw 3b, and a rotary motor 3c are arranged on the base member 3.

[0034] A pair of guide members 3a are positioned on the surface of the base member 3 facing the support member 4 (the +Z side surface) so as to extend along the X direction. A ball screw 3b is positioned between the pair of guide members 3a so as to extend along the X direction. A rotary motor 3c drives the ball screw 3b to rotate.

[0035] The support member 4 supports the fine adjustment device 1 on the side opposite to the base member 3 (the side facing -Z). A pair of linear bearings 4a and nuts 4b are arranged on the support member 4.

[0036] Each of the pair of linear bearings 4a is mounted on the surface of the support member 4 facing the base member 3 and engages with the pair of guide members 3a. The nut 4b is mounted on the surface of the support member 4 facing the base member 3 and connects with the ball screw 3b.

[0037] When the rotary motor 3c rotates the ball screw 3b, the nut 4b moves along the axis of the ball screw 3b. This guides the support member 4 to the pair of guide members 3a via a pair of linear bearings 4a. In other words, the support member 4 moves along the X direction.

[0038] In this configuration, the transport device 2 is configured such that the support member 4 moves along the X direction. However, the transport device 2 may also be configured so that the support member 4 moves in two directions, along the X and Y directions, or so that the support member 4 moves in three directions, along the X, Y, and Z directions.

[0039] Figure 2 is a plan view of the fine adjustment device according to this embodiment. The fine adjustment device 1 comprises a base 10, a fine adjustment table 20, and a rotating device 30.

[0040] The base 10 is plate-shaped with its main surface S being the surface facing the fine-adjustment table 20 (the +Z side surface). The base 10 is attached to and supported by the support member 4 on its back surface opposite to the main surface S.

[0041] The micro-adjustment table 20 is plate-shaped and can place objects on it, for example, for manufacturing semiconductor devices. In plan view, the micro-adjustment table 20 has a T-shape, formed by the integration of a plate-shaped first plate portion 21 extending along the X direction and a plate-shaped second plate portion 22 extending along the Y direction.

[0042] Figure 3 is a side view of the fine adjustment device according to this embodiment. Figure 4 is a cross-sectional view of the fine adjustment device according to this embodiment. Specifically, Figure 4 is a cross-sectional view of the fine adjustment device 1 along the straight line L, which will be described later.

[0043] The rotating device 30 is positioned on the base 10 and rotates the fine-adjustment table 20 relative to the base 10. The rotating device 30 comprises a first drive unit 31, a second drive unit 32, a third drive unit 33, and a fourth drive unit 34.

[0044] The first drive unit 31 is positioned on the main surface S of the base 10, facing the +X side end of the fine adjustment table 20. The first drive unit 31 comprises a first housing 31a, a first drive element 31b, a first holding part 31c, and a first moving member 31d. The first drive unit 31 moves the first moving member 31d along the first axis 31e. The first axis 31e is parallel to the Z direction. The first axis 31e may be inclined with respect to the Z direction.

[0045] The first housing 31a is box-shaped with the +Z side open. The first drive element 31b is housed at the bottom of the first housing 31a and moves the first moving member 31d. The first drive element 31b is a piezoelectric element (piezo element) that deforms, for example, when a voltage is applied, so that its length along the first axis 31e changes.

[0046] The first retaining portion 31c is housed in the first housing 31a so as to be slidable along the first axis 31e relative to the first housing 31a, with its -Z side in contact with the first driving element 31b. The first retaining portion 31c also holds the first moving member 31d on the +Z side.

[0047] The first movable member 31d is spherical in shape, having a first spherical surface 31d1 on the +Z side. The -Z side of the first movable member 31d may be cylindrical, for example, or it may be integrated with the first holding part 31c. The first axis 31e passes through the center of the sphere having the first spherical surface 31d1.

[0048] When a voltage is applied to the first drive element 31b, the first drive element 31b deforms, causing the first holding portion 31c and subsequently the first moving member 31d to move along the first axis 31e. The first moving member 31d also supports the first supported portion 23 of the fine-adjustment table 20.

[0049] The first supported portion 23 is positioned on the -Z side of the fine-adjustment table 20 so as to face the first movable member 31d. The first supported portion 23 is plate-shaped and has a tapered surface 23a on the surface facing the first movable member 31d. Specifically, the tapered surface 23a is a conical surface with its apex on the +Z side. The tapered surface 23a may also be a pyramidal surface.

[0050] The first movable member 31d supports the first supported portion 23 such that the first spherical surface 31d1 makes line contact with the tapered surface 23a. In other words, the first movable member 31d rotates and supports the first supported portion 23.

[0051] The second drive unit 32 is positioned on the main surface S of the base 10, facing the +Y side end of the fine adjustment table 20. The third drive unit 33 is positioned on the main surface S of the base 10, facing the -Y side end of the fine adjustment table 20.

[0052] Figure 5 is an axial cross-sectional view of the second drive unit and the third drive unit according to this embodiment. The second drive unit 32 comprises a second housing 32a, a second drive element 32b, a second holding unit 32c, and a second moving member 32d. The second drive unit 32 moves the second moving member 32d along the second axis 32e. The second axis 32e is parallel to the first axis 31e.

[0053] The third drive unit 33 comprises a third housing 33a, a third drive element 33b, a third holding part 33c, and a third moving member 33d. The third drive unit 33 moves the third moving member 33d along the third axis 33e. The third axis 33e is parallel to the first axis 31e. In other words, the first axis 31e, the second axis 32e, and the third axis 33e are all parallel to each other.

[0054] The second drive unit 32 and the third drive unit 33 are configured in the same way as the first drive unit 31. In other words, the second housing 32a and the third housing 33a, the second drive element 32b and the third drive element 33b, the second holding part 32c and the third holding part 33c, and the second moving member 32d and the third moving member 33d are configured in the same way as the first housing 31a, the first drive element 31b, the first holding part 31c, and the first moving member 31d, respectively.

[0055] When a voltage is applied to the second drive element 32b, the second drive element 32b deforms, causing the second holding part 32c and subsequently the second moving member 32d to move along the second axis 32e. Similarly, when a voltage is applied to the third drive element 33b, the third drive element 33b deforms, causing the third holding part 33c and subsequently the third moving member 33d to move along the third axis 33e.

[0056] As shown in Figure 2, the triangle formed by the first intersection point P1 between the first axis 31e and the orthogonal plane perpendicular to the first axis 31e, the second intersection point P2 between the orthogonal plane and the second axis 32e, and the third intersection point P3 between the orthogonal plane and the third axis 33e is an isosceles triangle in which the length of the side connecting the first intersection point P1 and the second intersection point P2 is equal to the length of the side connecting the first intersection point P1 and the third intersection point P3. Note that when the first axis 31e is aligned in the Z direction, the orthogonal plane is parallel to the principal plane S of the base 10.

[0057] Furthermore, when the micro-adjustment table 20 is not rotated (tilted) with respect to the base 10, in a plan view it has a line-symmetric shape with respect to the line L that passes through the first intersection P1 and is perpendicular to the base connecting the second intersection P2 and the third intersection P3. Therefore, when the micro-adjustment table 20 is not rotated (tilted) with respect to the base 10, in a plan view it lies on the line L.

[0058] Furthermore, as shown in Figures 3 and 4, the second moving member 32d and the third moving member 33d support the second supported portion 24 and the third supported portion 25 of the fine-adjustment table 20, respectively.

[0059] The second supported portion 24 is positioned on the -Z side of the fine-adjustment table 20 so as to face the second moving member 32d. In other words, the position of the second supported portion 24 is different from the position of the first supported portion 23 in a plan view. The second supported portion 24 is plate-shaped and has a first plane 24a on the -Z side.

[0060] The second movable member 32d supports the second supported portion 24 such that the second spherical surface 32d1 and the first plane 24a are in contact. Specifically, the second spherical surface 32d1 makes point contact with the first plane 24a. In other words, the second movable member 32d provides movable support for the second supported portion 24.

[0061] The third supported portion 25 is positioned on the -Z side of the fine-adjustment table 20 so as to face the third moving member 33d. In other words, the position of the third supported portion 25 is different from the positions of the first supported portion 23 and the second supported portion 24 in a plan view. The third supported portion 25 is plate-shaped and has a second plane 25a on the -Z side.

[0062] The third movable member 33d supports the third supported portion 25 such that the third spherical surface 33d1 and the second plane 25a are in contact. Specifically, the third spherical surface 33d1 makes point contact with the second plane 25a. In other words, the third movable member 33d provides movable support for the third supported portion 25.

[0063] As shown in Figures 2 and 3, the fourth drive unit 34 is positioned on the base 10 at a location -Y side of the first plate portion 21. The fourth drive unit 34 rotates the fine-adjustment table 20 in a plan view by pressing the side surface of the fine-adjustment table 20.

[0064] Figure 6 is an axial cross-sectional view of the fourth drive unit according to this embodiment. The fourth drive unit 34 comprises a fourth housing 34a, a fourth drive element 34b, a fourth holding part 34c, and a fourth moving member 34d. The fourth drive unit 34 moves the fourth moving member 34d along the fourth axis 34e. The fourth axis 34e is perpendicular to the first axis 31e. Specifically, the fourth axis 34e is parallel to the Y direction. The fourth axis 34e may be inclined with respect to the Y direction.

[0065] The fourth housing 34a is box-shaped with the +Y side open. The fourth drive element 34b is housed at the bottom of the fourth housing 34a and moves the fourth moving member 34d. The fourth drive element 34b is a piezoelectric element (piezo element) that deforms so that its length along the fourth axis 34e changes when a voltage is applied.

[0066] The fourth retaining portion 34c has its -Y side in contact with the fourth driving element 34b and is housed in the fourth housing 34a so as to be slidable along the fourth axis 34e relative to the fourth housing 34a. The fourth retaining portion 34c also holds the fourth moving member 34d on the +Y side.

[0067] The fourth movable member 34d has a fourth spherical surface 34d1 on the +Y side and a cylindrical shape on the -Y side. The fourth movable member 34d may be spherical or integrated with the fourth holding part 34c. The fourth axis 34e passes through the center of the sphere having the fourth spherical surface 34d1.

[0068] When a voltage is applied to the fourth drive element 34b, the fourth drive element 34b deforms, causing the fourth holding portion 34c and subsequently the fourth moving member 34d to move along the fourth axis 34e. The fourth moving member 34d also presses against the side surface of the fine-adjustment table 20 via the pressed portion 26.

[0069] As shown in Figures 2 and 3, the pressed portion 26 is positioned on the -Y side surface of the first plate portion 21. The pressed portion 26 is plate-shaped and has a third plane 26a on the -Y side. The third plane 26a is perpendicular to the Y axis when the fine-adjustment table 20 is not rotated. As the fourth moving member 34d moves, the fourth spherical surface 34d1 makes point contact with the third plane 26a, pressing the third plane 26a toward the +Y side.

[0070] As shown in Figures 2 to 4, the fine adjustment device 1 further comprises a first magnet 50 and a second magnet 60.

[0071] The first magnet 50 moves the fine adjustment table 20 toward the base 10. The first magnet 50 is positioned on the -Z side surface of the first plate portion 21. The first magnet 50 is, for example, a permanent magnet.

[0072] On the main surface S of the base 10, a plate-shaped first magnetic material 11 is positioned opposite the first magnet 50 and attracts the first magnet 50. The first magnetic material 11 is made up of, for example, iron. The first magnetic material 11 may also be a permanent magnet.

[0073] The first magnet 50 attracts the first magnetic material 11, causing the micro-adjustment table 20 to move toward the base 10, i.e., toward the -Z side. This ensures that the states in which the first spherical surface 31d1 and the tapered surface 23a are in contact, the second spherical surface 32d1 and the first plane 24a are in contact, and the third spherical surface 33d1 and the second plane 25a are in contact are reliably maintained. Alternatively, the first magnet 50 may be placed on the main surface S, and the first magnetic material 11 may be placed on the micro-adjustment table 20.

[0074] The second magnet 60 moves the fine adjustment table 20 in the opposite direction to the direction in which the fourth drive unit 34 presses the fine adjustment table 20. The second magnet 60 is positioned on the base 10 at a position -Y side of the first plate portion 21 via a mounting portion 60a. The second magnet 60 is, for example, a permanent magnet.

[0075] On the first plate portion 21, a plate-shaped second magnetic material 27 that attracts the second magnet 60 is positioned opposite the second magnet 60 and is located away from the second magnet 60. The second magnetic material 27 is made up of, for example, iron. The second magnetic material 27 may also be a permanent magnet.

[0076] The second magnet 60 attracts the second magnetic material 27, causing the micro-adjustment table 20 to move toward the second magnet 60, that is, toward the -Y side. In other words, the micro-adjustment table 20 is moved in the opposite direction to the direction in which the fourth drive unit 34 presses it. This allows the fourth spherical surface 34d1 and the third plane 26a to remain in contact.

[0077] Furthermore, as shown in Figure 4, the fine adjustment device 1 is further equipped with a control device 70 that controls the rotation of the fine adjustment table 20. The control device 70 outputs control signals for rotating the fine adjustment table 20 to the first drive element 31b, the second drive element 32b, the third drive element 33b, and the fourth drive element 34b. The control signals output to the first drive element 31b, the second drive element 32b, the third drive element 33b, and the fourth drive element 34b each include command values ​​that specify the amount of deformation and the direction of deformation of the first drive element 31b, the second drive element 32b, the third drive element 33b, and the fourth drive element 34b, respectively.

[0078] The command values ​​that specify the amount of deformation and the direction of deformation of the first drive element 31b, the second drive element 32b, the third drive element 33b, and the fourth drive element 34b may be derived by the control device 70 based on the desired amount of rotation of the micro-adjustment table 20 input to the control device 70 by the user, or they may be derived by the control device 70 based on the difference between the detection result of a sensor for detecting the attitude of an object (e.g., an optical distance measuring sensor) and a predetermined attitude stored in the control device 70, so that the object is in a predetermined attitude. The control device 70 may also provide overall control of the transport device 2.

[0079] Next, the operation of the fine adjustment device 1 when the control device 70 rotates the fine adjustment table 20 relative to the base 10 will be described. First, the case in which the fine adjustment table 20 rotates along the θX direction relative to the base 10, starting from the initial state of the fine adjustment table 20 where the +Z side surface of the fine adjustment table 20 is parallel to the XY plane, will be described.

[0080] When the fine-adjustment table 20 rotates from its initial state along the θX direction relative to the base 10, the control signal output by the control device 70 is such that, for example, the deformation amount of the first drive element 31b is zero, the deformation amounts of the second drive element 32b and the third drive element 33b are the same, and the direction of deformation of the second drive element 32b and the direction of deformation of the third drive element 33b are opposite.

[0081] Based on the control signal, the first moving member 31d does not move because the first driving element 31b does not deform. Based on the control signal, the second driving element 32b and the third driving element 33b deform, causing the second moving member 32d and the third moving member 33d to move along the second axis 32e and the third axis 33e, respectively, in different directions with equal amounts of movement to each other.

[0082] As a result of the operation of the first moving member 31d, the second moving member 32d, and the third moving member 33d, the first supported portion 23 rotates around the center point of the first spherical surface 31d1 relative to the first moving member 31d, with the tapered surface 23a in contact with the first spherical surface 31d1, and moves along the Y direction in a plan view. The second supported portion 24 rotates around the second moving member 32d, with the first plane 24a in contact with the second spherical surface 32d1, and moves along the Y direction in a plan view. The third supported portion 25 rotates around the third moving member 33d, with the second plane 25a in contact with the third spherical surface 33d1, and moves along the Y direction in a plan view.

[0083] Through the operation of the first supported portion 23, the second supported portion 24, and the third supported portion 25, the fine-adjustment table 20 rotates from its initial state along the θX direction relative to the base portion 10, around the first movable member 31d.

[0084] Furthermore, in the control signal, the amount and direction of deformation of the fourth drive element 34b may be set to be equal to the amount and direction of deformation of the pressed portion 26 along the fourth axis 34e in the third plane 26a, which occurs when the micro-adjustment table 20 rotates along the θX direction. With such a control signal, the fourth moving member 34d moves in accordance with the displacement of the third plane 26a caused by the rotation of the micro-adjustment table 20 along the θX direction. This prevents the fourth moving member 34d from hindering the rotation of the micro-adjustment table 20 in the θX direction.

[0085] Next, we will describe the case where the fine adjustment table 20 rotates along the θY direction relative to the base 10 from its initial state. In this case, in the control signal output by the control device 70, for example, the direction of deformation of the first drive element 31b is on the +Z side or the -Z side, and the deformation amounts of the second drive element 32b and the third drive element 33b are zero.

[0086] As a result of this control signal, the first drive element 31b deforms, causing the first moving member 31d to move along the first axis 31e toward the +Z or -Z side, while the second drive element 32b and the third drive element 33b do not deform, so the second moving member 32d and the third moving member 33d do not move.

[0087] As a result of the operation of the first moving member 31d, the second moving member 32d, and the third moving member 33d, the first supported portion 23 rotates around the center point of the first spherical surface 31d1 relative to the first moving member 31d, with the tapered surface 23a in contact with the first spherical surface 31d1, and moves along the X direction in a plan view. The second supported portion 24 rotates around the second moving member 32d, with the first plane 24a in contact with the second spherical surface 32d1, and moves along the X direction in a plan view. The third supported portion 25 rotates around the third moving member 33d, with the second plane 25a in contact with the third spherical surface 33d1, and moves along the X direction in a plan view.

[0088] Through the operation of the first supported portion 23, the second supported portion 24, and the third supported portion 25, the fine-adjustment table 20 rotates from its initial state along the θY direction relative to the base portion 10, around the first movable member 31d.

[0089] Furthermore, as described above, since the third plane 26a of the pressed portion 26 is perpendicular to the Y axis, when the fine-adjustment table 20 rotates along the θY direction relative to the base 10, the third plane 26a of the pressed portion 26 does not displace along the fourth axis 34e. In other words, even if the amount of movement of the fourth moving member 34d is zero, the rotation of the fine-adjustment table 20 is not hindered. Therefore, in the control signal, the amount of deformation of the fourth drive element 34b is zero.

[0090] Furthermore, when the fine-adjustment table 20 rotates along the θY direction relative to the base 10 from its initial state, the control signal output by the control device 70 may, for example, be set so that the deformation amount of the first drive element 31b is zero, the deformation amount of the second drive element 32b and the deformation amount of the third drive element 33b are the same, and the direction of deformation of the second drive element 32b and the direction of deformation of the third drive element 33b are the same.

[0091] Next, we will describe the case where the fine-adjustment table 20 rotates along the θZ direction relative to the base 10 from its initial state. In this case, in the control signal output by the control device 70, for example, the deformation amounts of the first drive element 31b, the second drive element 32b, and the third drive element 33b are zero, and the deformation amount and direction of deformation of the fourth drive element 34b correspond to the desired amount and direction of rotation in the θZ direction.

[0092] As a result of this control signal, the first drive element 31b, the second drive element 32b, and the third drive element 33b do not deform, so the first moving member 31d, the second moving member 32d, and the third moving member 33d do not move, and the fourth drive element 34b deforms, causing the fourth moving member 34d to move along the fourth axis 34e to the +Y side or the -Y side.

[0093] As a result of the operation of the first moving member 31d, the second moving member 32d, the third moving member 33d, and the fourth moving member 34d, when the fourth moving member 34d moves along the fourth axis 34e to the +Y side, the fourth moving member 34d presses against the pressed portion 26, causing the pressed portion 26 to move toward the +Y side. On the other hand, when the fourth moving member 34d moves along the fourth axis 34e to the -Y side, the second magnet 60 and the second magnetic material 27 attract each other, causing the pressed portion 26 to move toward the -Y side.

[0094] As the pressed portion 26 moves in this manner, the micro-movement table 20 is displaced, causing the first supported portion 23 to rotate in the θZ direction with respect to the first moving member 31d, with the first axis 31e as the central axis, while the tapered surface 23a and the first spherical surface 31d1 are in contact. The second supported portion 24 rotates in the θZ direction with respect to the second moving member 32d, with respect to the first axis 31e as the central axis, while the first plane 24a and the second spherical surface 32d1 are in contact.

[0095] Then, with the second plane 25a and the third spherical surface 33d1 in contact, the third supported portion 25 moves along the θZ direction with the first axis 31e as its central axis relative to the third moving member 33d. Furthermore, with the third plane 26a and the fourth spherical surface 34d1 in contact, the fourth moved portion 26 moves along the θZ direction with the first axis 31e as its central axis relative to the fourth moving member 34d.

[0096] Through the operation of the first supported portion 23, the second supported portion 24, the third supported portion 25, and the pressed portion 26, the fine-movement table 20 rotates from its initial state along the θZ direction with respect to the base portion 10, with respect to the first movable member 31d.

[0097] Furthermore, the fine-adjustment table 20 is movable in the Z direction without rotating relative to the base 10, that is, it is translatable along the Z direction. When the fine-adjustment table 20 is translated along the Z direction relative to the base 10 from its initial state, in the control signal output by the control device 70, for example, the deformation amounts of the first drive element 31b, the second drive element 32b, and the third drive element 33b are the same as those of the first drive element 31b, the second drive element 32b, and the third drive element 33b are the same as those of the third drive element 33b.

[0098] In response to these control signals, the first drive element 31b, the second drive element 32b, and the third drive element 33b deform, causing the first moving member 31d, the second moving member 32d, and the third moving member 33d to move in different directions from each other, each by the same amount of movement.

[0099] As a result of the operation of the first moving member 31d, the second moving member 32d, and the third moving member 33d, the first supported portion 23 is translated along the Z direction with the tapered surface 23a in contact with the first spherical surface 31d1. The second supported portion 24 is translated along the Z direction with the first plane 24a in contact with the second spherical surface 32d1. The third supported portion 25 is translated along the Z direction with the second plane 25a in contact with the third spherical surface 33d1.

[0100] Due to the operation of the first supported portion 23, the second supported portion 24, and the third supported portion 25, the fine-adjustment table 20 translates along the Z direction. In this case, as described above, the third plane 26a of the pressed portion 26 is perpendicular to the Y axis, so when the fine-adjustment table 20 translates along the Z direction, the third plane 26a of the pressed portion 26 does not displace along the fourth axis 34e. In other words, even if the amount of movement of the fourth moving member 34d is zero, the translation of the fine-adjustment table 20 in the Z direction is not hindered. Therefore, in the control signal, the amount of deformation of the fourth drive element 34b is zero.

[0101] Thus, the rotating device 30 can rotate the fine-adjustment table 20 along the θX, θY, and θZ directions, and translate it along the Z direction. In other words, the fine-adjustment table 20 has 4 degrees of freedom. The amount of rotation and translation of the fine-adjustment table 20 is adjusted by adjusting the deformation amount and direction of deformation of the first drive element 31b, the second drive element 32b, the third drive element 33b, and the fourth drive element 34b, respectively. Furthermore, by adjusting the deformation amount and direction of deformation of the first drive element 31b, the second drive element 32b, the third drive element 33b, and the fourth drive element 34b, the rotating device 30 can rotate the fine-adjustment device 1 in a direction different from the above (for example, a direction with the axis intersecting the X, Y, and Z axes as the central axis).

[0102] As described above, according to this embodiment, the fine adjustment device 1 comprises a fine adjustment table 20 and a rotating device 30 arranged on the base 10 for rotating the fine adjustment table 20 relative to the base 10. The rotating device 30 includes a first moving member 31d that supports the first supported portion 23 of the fine-adjustment table 20, and a first drive unit 31 that moves the first moving member 31d along a first axis 31e; a second moving member 32d that supports the second supported portion 24 of the fine-adjustment table 20, which is in a different position from the first supported portion 23 in a plan view, and a second drive unit 32 that moves the second moving member 32d along a second axis 32e parallel to the first axis 31e; a third moving member 33d that supports the third supported portion 25 of the fine-adjustment table 20, which is in a different position from the first supported portion 23 and the second supported portion 24 in a plan view, and a third drive unit 33 that moves the third moving member 33d along a third axis 33e parallel to the first axis 31e; and a fourth drive unit 34 that rotates the fine-adjustment table 20 in a plan view by pressing the side surface of the fine-adjustment table 20. According to this, the fine-adjustment table 20 is supported by a first moving member 31d, a second moving member 32d, and a third moving member 33d at three points that are different in position from one another in a plan view. Furthermore, the first moving member 31d, the second moving member 32d, and the third moving member 33d move along the first axis 31e, the second axis 32e, and the third axis 33e, respectively, which are parallel to each other. Therefore, by adjusting the amount and direction of movement of the first moving member 31d, the second moving member 32d, and the third moving member 33d, the fine-adjustment table 20 can be tilted with respect to an axis parallel to the first axis 31e. In other words, the fine-adjustment table 20 can rotate around each of the two axes that are perpendicular to the first axis 31e and are mutually perpendicular. Furthermore, the fine-adjustment table 20 can rotate in a plan view by being pressed on its side by the fourth drive unit 34. In other words, the fine-adjustment table 20 can rotate around an axis parallel to the first axis 31e as its central axis. Thus, the fine-adjustment table 20 can rotate around three mutually orthogonal axes, including an axis parallel to the first axis 31e as its central axis. In this way, the fine adjustment device 1 can make the fine adjustment table 20 rotate relative to the base 10 with a simple configuration.

[0103] Furthermore, in this embodiment, the first movable member 31d rotates and supports the first supported portion 23. As a result, the fine adjustment device 1 can rotate the fine adjustment table 20 around the first moving member 31d. Furthermore, compared to a case where the fine adjustment device 1 is equipped with a member that rotates and supports the fine adjustment table 20 separately from the first moving member 31d, the number of parts in the fine adjustment device 1 can be reduced, and the fine adjustment device 1 can be made simpler in configuration.

[0104] Furthermore, in this embodiment, the first movable member 31d has a first spherical surface 31d1. The first supported portion 23 has a tapered surface 23a that is in line contact with the first spherical surface 31d1. As a result, the first movable member 31d can rotate and support the first supported portion 23 in a simple shape.

[0105] Furthermore, in this embodiment, the second movable member 32d provides movable support for the second supported portion 24, and the third movable member 33d provides movable support for the third supported portion 25. As a result, the second moving member 32d and the third moving member 33d can support the second supported part 24 and the third supported part 25 so that the fine-adjustment table 20 can rotate.

[0106] Furthermore, in this embodiment, the second movable member 32d has a second spherical surface 32d1. The second supported portion 24 has a surface that contacts the second spherical surface 32d1. The third movable member 33d has a third spherical surface 33d1. The third supported portion 25 has a surface that contacts the third spherical surface 33d1. As a result, the second moving member 32d and the third moving member 33d can support the second supported portion 24 and the third supported portion 25 in a simple shape so that the fine-adjustment table 20 can rotate.

[0107] Furthermore, in this embodiment, the fine adjustment device 1 includes a first magnet 50 that moves the fine adjustment table 20 toward the base 10. As a result, the first magnet 50 can maintain contact between the first moving member 31d, the second moving member 32d, and the third moving member 33d and the first supported part 23, the second supported part 24, and the third supported part 25, respectively. Therefore, the rotating device 30 can rotate the fine-adjustment table 20 with high precision.

[0108] Furthermore, in this embodiment, the fine adjustment device 1 includes a second magnet 60 that moves the fine adjustment table 20 in the opposite direction to the direction in which the fourth drive unit 34 presses the fine adjustment table 20. As a result, the fine-adjustment table 20 can be rotated by the second magnet 60 in the opposite direction to the direction in which the fourth drive unit 34 presses the fine-adjustment table 20. Therefore, the second magnet 60 can maintain contact between the fourth moving member 34d and the side surface of the fine-adjustment table 20. Consequently, the fourth drive unit 34 can rotate the fine-adjustment table 20 with high precision.

[0109] Furthermore, in this embodiment, the triangle formed by the first intersection point P1 between the orthogonal plane perpendicular to the first axis 31e and the first axis 31e, the second intersection point P2 between the orthogonal plane and the second axis 32e, and the third intersection point P3 between the orthogonal plane and the third axis 33e is an isosceles triangle in which the length of the side connecting the first intersection point P1 and the second intersection point P2 is equal to the length of the side connecting the first intersection point P1 and the third intersection point P3. This makes it possible to easily calculate the amount and direction of movement of the first moving member 31d, the second moving member 32d, and the third moving member 33d, which correspond to the amount and direction of rotation of the micro-movement table 20, and consequently, the amount and direction of deformation of the first drive element 31b, the second drive element 32b, and the third drive element 33b, compared to the case where the triangle formed by the first intersection P1, the second intersection P2, and the third intersection P3 is not an isosceles triangle.

[0110] Furthermore, in this embodiment, the micro-adjustment table 20 has a line-symmetric shape in a plan view, with respect to the line L that passes through the first intersection P1 and is perpendicular to the base connecting the second intersection P2 and the third intersection P3. As a result, even when the micro-adjustment table 20 rotates, the center of gravity G of the micro-adjustment table 20 remains near the axis of symmetry in a plan view. Therefore, the posture of the micro-adjustment table 20 can be stabilized.

[0111] In this embodiment, the tapered surface 23a of the first supported portion 23 may be replaced with a flat surface and a curved surface. In this case, the fine adjustment device 1 may further include a member that rotates and supports the fine adjustment table 20 at a position different from the first supported portion 23, the second supported portion 24, and the third supported portion 25, instead of the first moving member 31d.

[0112] Furthermore, the first plane 24a of the second supported portion 24, the second plane 25a of the third supported portion 25, and the third plane 26a of the pressed portion 26 may be replaced with curved surfaces. In addition, the first spherical surface 31d1, the second spherical surface 32d1, the third spherical surface 33d1, and the fourth spherical surface 34d1 of the first moving member 31d, the second moving member 32d, the third moving member 33d, and the fourth moving member 34d may be replaced with conical surfaces.

[0113] Furthermore, the first movable member 31d, the second movable member 32d, the third movable member 33d, and the fourth movable member 34d may each have a shape that makes surface contact with the first supported portion 23, the second supported portion 24, the third supported portion 25, and the pressed portion 26, respectively. In this case, the first movable member 31d, the second movable member 32d, the third movable member 33d, and the fourth movable member 34d may be cylindrical in shape, and their end faces may make surface contact with the first supported portion 23, the second supported portion 24, the third supported portion 25, and the pressed portion 26.

[0114] Furthermore, the triangle formed by the first intersection P1, the second intersection P2, and the third intersection P3 may be a triangle other than an isosceles triangle. The shape of the micro-adjustment table 20 may be a polygonal shape in plan view other than a T-shape, and may be a shape other than a line-symmetric shape.

[0115] Furthermore, the fine adjustment device 1 does not necessarily have to include the first magnet 50. In this case, the first moving member 31d, the second moving member 32d, and the third moving member 33d may support the first supported part 23, the second supported part 24, and the third supported part 25, respectively, by the weight of the fine adjustment table 20.

[0116] Furthermore, the second magnet 60 and the pressed portion 26 may be arranged on the +Y side of the first plate portion 21. In this case, the pressed portion 26 is, for example, a permanent magnet and is arranged to repel the second magnet 60.

[0117] Furthermore, the fine adjustment device 1 does not necessarily have to include the second magnet 60. In this case, the fine adjustment device 1 may include a pressing member that presses the side surface of the fine adjustment table 20 in the opposite direction to the direction in which the fourth drive unit 34 presses the fine adjustment table 20.

[0118] Alternatively, the pressed portion 26 may not be positioned on the first plate portion 21, and the fourth moving member 34d may directly press against the side surface of the fine-adjustment table 20. In this case, the surface on which the fourth moving member 34d contacts the fine-adjustment table 20 may be a cylindrical surface. [Explanation of symbols]

[0119] 1 Fine movement device 10 base 20 Fine adjustment table 23 1st supported part 23a Tapered surface 24 Second supported part 24a 1st plane 25 Third supported part 25a 2nd plane 30 Rotating device 31 First drive unit 31d First movable member 31d1 1st sphere 31e 1st axis 32 Second drive unit 32d Second movable member 32d1 2nd sphere 32e 2nd axis 33 Third drive unit 33d Third movable member 33d1 3rd sphere 33e 3rd axis 34. Fourth drive unit 34d Fourth movable member 34d1 4th sphere 34e 4th axis 50 First Magnet 60 Second Magnet G center of gravity L straight line P1 1st intersection P2 2nd intersection P3 3rd intersection

Claims

1. The base and, A fine-adjustment table and The base is provided with a rotating device that rotates the fine adjustment table relative to the base, The aforementioned rotating device is The first drive unit includes a first moving member that supports the first supported portion of the fine-adjustment table, and moves the first moving member along a first axis, The fine-adjustment table includes a second moving member that supports a second supported portion whose position in plan view differs from that of the first supported portion, and a second drive unit that moves the second moving member along a second axis parallel to the first axis, The fine-adjustment table includes a third moving member that supports a third supported portion which is in a different position in plan view from the first supported portion and the second supported portion, and a third drive unit that moves the third moving member along a third axis parallel to the first axis, The system includes a fourth drive unit that rotates the fine-adjustment table in a plan view by pressing on the side surface of the fine-adjustment table, The first movable member rotates and supports the first supported portion. Microtremor device.

2. The first movable member has a first spherical surface, The first supported portion has a tapered surface that is in line contact with the first spherical surface. The fine adjustment device according to claim 1.

3. The second movable member provides movable support for the second supported portion, The third movable member provides movable support for the third supported portion. The fine adjustment device according to claim 1 or 2.

4. The second moving member has a second spherical surface, The second supported portion has a surface that contacts the second spherical surface, The third moving member has a third spherical surface, The third supported portion has a surface that contacts the third spherical surface. The fine adjustment device according to claim 3.

5. It further includes a first magnet for moving the fine adjustment table toward the base, A fine adjustment device according to any one of claims 1 to 4.

6. The fourth drive unit further includes a second magnet that moves the fine-adjustment table in the opposite direction to the direction in which the fine-adjustment table is pressed. A fine adjustment device according to any one of claims 1 to 5.

7. The triangle formed by the first intersection point between the first axis and the orthogonal plane perpendicular to the first axis, the second intersection point between the orthogonal plane and the second axis, and the third intersection point between the orthogonal plane and the third axis is an isosceles triangle in which the length of the side connecting the first intersection point and the second intersection point is equal to the length of the side connecting the first intersection point and the third intersection point. A fine adjustment device according to any one of claims 1 to 6.

8. The aforementioned micro-adjustment table has a line-symmetrical shape in a plan view, with the axis of symmetry being a line passing through the first intersection and perpendicular to the base connecting the second and third intersections. The fine adjustment device according to claim 7.

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