Control system, attitude adjustment device, and control method

Abstract

To provide a control system, a posture adjustment device, and a control method that can effectively reduce the load on a voice coil motor.SOLUTION: A posture adjustment device 100 supports a supported object and adjusts a posture of the supported object using an advancing / retracting mechanism 101 provided with a voice coil motor 10 having a mover movable in one direction and an air cylinder 30 assisting the movement of the mover. The advancing / retracting mechanisms 101 are plural, and each advancing / retracting mechanism 101 is circularly arranged at equal intervals.SELECTED DRAWING: Figure 2

Description

Technical Field

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[0001] The present invention relates to a control system, a posture adjustment device, and a control method.

Background Art

[0002] Patent Document 1 discloses a stage device that has both a voice coil motor and an air cylinder as drive sources for a Z-axis movable part, and controls by feeding back and controlling the current value to the air cylinder so that the current value flowing through the voice coil motor becomes 0.

[0003] Further, Patent Document 2 discloses a stage device that holds the stage via a tilt hinge at the tip of a piezo actuator that controls the tilt angle of the stage, aiming to improve the rigidity in the Z-axis direction.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] When the rigidity in the Z-axis direction is improved as in the stage device of Patent Document 2 (when a voice coil motor is used instead of a piezo actuator), there is a problem that the load on the voice coil motor increases, so the drive current of the voice coil motor increases.

[0006] In contrast, when an air cylinder is adopted to assist the voice coil motor as in the stage device of Patent Document 1, the load on the voice coil motor is reduced to some extent, but the speed at which the load is reduced is not sufficient.

[0007] The present invention has been made in view of these circumstances, and its objective is to provide a control system, attitude adjustment device, and control method that can quickly reduce the load on a voice coil motor when a stage device having a rigid Z-axis is equipped with both a voice coil motor and an air cylinder. [Means for solving the problem]

[0008] The control system according to the present invention controls the forward and backward movement of a forward / backward mechanism comprising a voice coil motor having a movable element that can move in one direction and an air cylinder that assists the movement of the movable element, wherein the air cylinder is controlled based on the movement speed of the movable element.

[0009] In this invention, the current used to drive the air cylinder is controlled based on the moving speed of the movable element, thereby enabling a rapid reduction in the load on the voice coil motor.

[0010] The control system according to the present invention controls the air cylinder so that the current input to the voice coil motor becomes zero.

[0011] In the present invention, when controlling the air cylinder, so-called feedback control is performed so that the current input to the voice coil motor becomes zero, thereby enabling a rapid reduction in the load on the voice coil motor.

[0012] The control system according to the present invention controls the air cylinder based on whether or not the speed of the movable element is constant.

[0013] In the present invention, the speed of the movable element is monitored, and the current control for driving the air cylinder is initiated so that the thrust of the air cylinder increases or decreases in proportion to the speed of the movable element, thereby enabling a rapid reduction in the load on the voice coil motor.

[0014] The posture adjustment device according to the present invention supports a support using a reciprocating mechanism that includes a voice coil motor having a movable element that can move in one direction and an air cylinder that assists the movement of the movable element, and adjusts the posture of the support, wherein there are multiple reciprocating mechanisms, and each reciprocating mechanism is arranged in a ring shape at equal intervals.

[0015] In the present invention, the posture adjustment device adjusts the posture of the supported object by using a plurality of reciprocating mechanisms arranged in a ring shape at equal intervals, thereby enabling accurate posture adjustment of the supported object.

[0016] The posture adjustment device according to the present invention comprises an air cylinder having a movable axis that can move in one direction, a plate member provided in each advancement / retraction mechanism with one surface held by the movable element and the movable axis, and a first variable member provided on the other surface of each plate member that deforms when the posture of the supported object is adjusted.

[0017] In the present invention, when adjusting the posture of the supported object by moving the movable element and the movable shaft, the first variable member provided on the plate member deforms, for example, by tilting in one direction, thereby adjusting the posture of the supported object more appropriately.

[0018] The posture adjustment device according to the present invention has a first variable member which comprises a cylindrical portion and mounting plates provided on both end faces of the cylindrical portion, and the cylindrical portion has a pair of grooves which are open in opposite directions in the radial direction.

[0019] In the present invention, since the cylindrical portion has the pair of grooves formed therein, the first variable member can be deformed to tilt in one direction, and the posture of the supported object can be adjusted more appropriately.

[0020] In the posture adjustment device according to the present invention, the pair of grooves are formed at equal intervals in the axial direction of the cylindrical portion.

[0021] In the present invention, since a plurality of the pair of grooves are formed at equal intervals in the axial length direction of the cylindrical portion, the posture of the supported body is adjusted more finely.

[0022] In the posture adjusting device according to the present invention, in each first variable member, the opening directions of the respective grooves are shifted at equal intervals in the circumferential direction.

[0023] In the present invention, since the opening directions of the respective grooves in the first variable member are shifted at equal intervals in the circumferential direction, the first variable member can be freely tilted in any direction orthogonal to the one direction.

[0024] In the posture adjusting device according to the present invention, in all the first variable members, the opening directions of the grooves are the same.

[0025] In the present invention, since the opening directions of the grooves are the same in all the first variable members, the posture of the supported body is adjusted more appropriately.

[0026] In the posture adjusting device according to the present invention, a second variable member is provided between each plate member and each moving shaft.

[0027] In the present invention, when adjusting the posture of the supported body, the second variable member is deformed as necessary, and the movement of the moving shaft is appropriately transmitted to the plate member.

[0028] In the posture adjusting device according to the present invention, each second variable member has a cylindrical portion and mounting plates provided on both end faces of the cylindrical portion, and a pair of grooves opened in opposite directions to each other in the radial direction are formed in the cylindrical portion.

[0029] In the present invention, since a pair of grooves opened in opposite directions to each other in the radial direction are formed in the cylindrical portion, when adjusting the posture of the supported body, the second variable member is deformed to tilt with respect to the one direction.

[0030] In the posture adjusting device according to the present invention, the grooves of the second variable member expand in width at the bottom side.

[0031] In the present invention, when adjusting the orientation of the supported object, the second variable member can be tilted more easily in one direction.

[0032] The posture adjustment device according to the present invention has at least three forward and backward movement mechanisms.

[0033] In this invention, the posture of the supported object is adjusted using at least three reciprocating mechanisms, allowing for more precise posture adjustment.

[0034] The control method according to the present invention is a control method for controlling the forward and backward movement of a forward and backward mechanism comprising a voice coil motor having a movable element that can move in one direction and an air cylinder that assists the movement of the movable element, wherein a control unit that controls the current related to the driving of the air cylinder controls the current based on the movement speed of the movable element.

[0035] In the present invention, the control unit controls the current related to the driving of the air cylinder based on the movement speed of the movable element, thereby enabling a rapid reduction in the load on the voice coil motor. [Effects of the Invention]

[0036] According to the present invention, the load on the voice coil motor can be reduced quickly. [Brief explanation of the drawing]

[0037] [Figure 1] This is a schematic diagram showing a stage apparatus according to an embodiment of the present invention. [Figure 2] This is a perspective view of a posture adjustment device according to an embodiment of the present invention. [Figure 3] This is a plan view of a posture adjustment device according to an embodiment of the present invention. [Figure 4] This figure shows the VCM of a posture adjustment device according to an embodiment of the present invention. [Figure 5] This figure shows the movable element of a posture adjustment device according to an embodiment of the present invention. [Figure 6] This figure shows the first hinge of a posture adjustment device according to an embodiment of the present invention. [Figure 7] This figure shows the second hinge of a posture adjustment device according to an embodiment of the present invention. [Figure 8] This is a block diagram illustrating the control of the forward and backward movement mechanism in the posture adjustment device according to this embodiment. [Figure 9] This is a flowchart illustrating the control of the forward / backward mechanism in the second drive system of the attitude adjustment device. [Figure 10] This figure shows the effect of adding the movement speed of the movable element to the control of the air cylinder. [Modes for carrying out the invention]

[0038] The following describes in detail, with reference to the drawings, how the control system, attitude adjustment device, and control method according to the embodiments of the present invention can be applied to a so-called stage device for transporting semiconductor substrates.

[0039] The stage device is used to transport and hold the substrate during so-called flip-chip bonding, which involves joining the silicon chip to the electrode surface of the substrate. The stage device can move the substrate in both the horizontal (XY direction) and vertical (Z direction) directions.

[0040] Figure 1 is a schematic diagram showing a stage device 500 according to an embodiment of the present invention. For the sake of explanation, the top and bottom directions of the drawing are considered to be the vertical direction (also called the Z direction).

[0041] The stage device 500 includes a substrate chuck 400 that holds a substrate (not shown) by means of vacuum suction, for example. Below the substrate chuck 400 is a lift pin mechanism 300 that raises and lowers the substrate from the substrate chuck 400. The lift pin mechanism 300 has a lift pin that penetrates the substrate chuck 400 in the vertical direction, and for example, when transporting and retrieving the substrate by a robot hand, the lift pin is made to protrude from the holding surface of the substrate chuck 400, thereby separating the substrate from the substrate chuck 400.

[0042] Furthermore, below the lift pin mechanism 300, a disc-shaped rotating mechanism 200 is provided for rotating the substrate (substrate chuck 400) around the Z axis. Below the rotating mechanism 200, a posture adjustment device 100 is provided to suppress horizontal displacement of the substrate during flip-chip bonding. The posture adjustment device 100 can drive the rotating mechanism 200 and the substrate chuck 400 in the Z direction.

[0043] Figure 2 is a perspective view of the posture adjustment device 100 according to an embodiment of the present invention, and Figure 3 is a plan view. The attitude adjustment device 100 comprises a frame 50. The frame 50 is made of metal and consists of four side walls that rise vertically. In other words, the frame 50 is a hollow rectangle in plan view. The frame 50 is provided with three reciprocating mechanisms 101 that move back and forth in the Z direction. Each reciprocating mechanism 101 has a voice coil motor (hereinafter referred to as VCM) 10 and an air cylinder 30. In other words, the attitude adjustment device 100 has three VCMs 10 and three air cylinders 30.

[0044] The three VCM10s are attached to the outside of the two long-side walls and one short-side wall of the frame 50, respectively. The three VCM10s are arranged in a ring shape at equal intervals. That is, the VCM10s are spaced 120 degrees apart in the circumferential direction.

[0045] Furthermore, three air cylinders 30 are provided inside the frame 50. Each air cylinder 30 is provided in correspondence with each VCM 10. In other words, the air cylinders 30 and VCM 10 form a pair.

[0046] Furthermore, the frame 50 is provided with three guides 51 to guide the movement of the movable element 2 of the VCM 10, which will be described later. One guide 51 is provided on the outside of the side wall on one of the long sides of the frame 50, and two guides 51 are provided on the outside of the other side wall on the other short side of the frame 50. Each guide 51 has an engagement groove 511 that engages with a part of the movable element 2 (see Figure 3). The engagement groove 511 extends in the vertical direction.

[0047] Figure 4 shows the VCM10 of the posture adjustment device 100 according to an embodiment of the present invention. Figure 4 shows four figures. Of the three figures arranged side by side, the central figure is a front view of the VCM10, the figures on both sides are side views, and a top view is shown above the front view. The VCM10 includes a stator 1 fixed to the frame 50 and a movable element 2. Figure 5 shows the movable element 2 of the posture adjustment device 100 according to an embodiment of the present invention.

[0048] The stator 1 has a pair of magnet yokes 11. The pair of magnet yokes 11 are positioned opposite each other at a predetermined distance apart. Each magnet yoke 11 is made of a ferromagnetic material (e.g., steel) and is rectangular in shape. Each magnet yoke 11 has notches 14 formed along the edges of two opposing sides of its four sides. The VCM 10 is attached to the frame 50 such that the opposing directions of the notches 14 are in the vertical direction.

[0049] Between the pair of magnet yokes 11 are interposed spacing sections 12 and 13 that maintain the distance between the magnet yokes 11. The spacing sections 12 and 13 are provided at the four corners of the magnet yoke 11, with the spacing section 12 provided on one side of each notch 14 and the spacing section 13 provided on the other side of the notch 14.

[0050] The spacing portion 13 is, for example, a rectangular parallelepiped shape extending in the opposing direction of the pair of magnet yokes 11. The spacing portion 12 has a rectangular parallelepiped shape extending in the opposing direction of the pair of magnet yokes 11, with the middle portion of the rectangular parallelepiped shape extending in the direction in which the spacing portions 12 and 13 are arranged side by side, and protruding from between the pair of magnet yokes 11.

[0051] A magnet unit M is fixed to the opposing surface of each magnet yoke 11, that is, to the inner surface of each magnet yoke 11. Each magnet unit M includes a pair of permanent magnets. Specifically, a pair of permanent magnets M1 and M2 are fixed to one magnet yoke 11, and a pair of permanent magnets M3 and M4 are fixed to the other magnet yoke 11. For example, the permanent magnets M1, M2, M3, and M4 are rare-earth magnets, and are of the same shape, being rectangular plates. Each permanent magnet M1, M2, M3, and M4 is magnetized in the thickness direction, and magnetic poles of opposite polarity are formed on both main surfaces. In this embodiment, as shown in Figure 4, the permanent magnet M1 is composed of two magnets, but it may be composed of one magnet or three or more magnets. In any case, the configuration is such that magnetic poles of the same polarity are formed on the main surface side. The same applies to permanent magnets M2, M3, and M4.

[0052] The pair of permanent magnets M1 and M2 are arranged side by side in the direction opposite to the notches 14, for example, so that their respective main surfaces are flush. Similarly, the pair of permanent magnets M3 and M4 are also arranged side by side in the direction opposite to the notches 14, so that their respective main surfaces are flush. The pair of permanent magnets M3 and M4 are positioned so that one main surface of each is opposite to one main surface of the pair of permanent magnets M1 and M2. That is, in the direction opposite to the pair of magnet yokes 11, the positions of the pair of permanent magnets M1 and M2 correspond to the positions of the pair of permanent magnets M3 and M4. Therefore, one main surface of permanent magnet M1 is opposite to one main surface of permanent magnet M3, and one main surface of permanent magnet M2 is opposite to one main surface of permanent magnet M4.

[0053] In this case, the polarity of one main surface of adjacent permanent magnets M1 and M2 is different, and the polarity of one main surface of permanent magnet M3 and M4 is different. Furthermore, the polarity of one main surface of opposing permanent magnets M1 and M3 is different, and the polarity of one main surface of permanent magnet M2 and M4 is different.

[0054] This configuration creates a so-called magnetic gap between the magnet units M of the pair of magnet yokes 11. A movable element 2 is positioned in this magnetic gap and moves in the opposite direction between the notches 14 (see the white arrows in Figure 4).

[0055] As shown in Figure 5, the movable element 2 includes a movable body 21 and an air-core coil C. The movable body 21 is made of metal and has a rectangular plate shape with the direction of movement of the movable element 2 (hereinafter simply referred to as the direction of movement) as the width direction. The movable body 21 has the central part of the edges on both long sides protruding in the direction of movement. On the side of the movable body 21, which is the central part on one of the long sides, screw holes 24, 24 are formed for screwing in the connecting plate member 20, which will be described later.

[0056] Furthermore, both ends 211 and 212 of the movable body 21 are bent in the same direction in the thickness direction of the movable body 21. Of the two ends 211 and 212, one end 211 is longer in the thickness direction of the movable body 21 than the other end 212. The tip of the end 211 has a shape that corresponds to the engagement groove 511 of the guide 51 of the frame 50, and engages with the engagement groove 511 and slides within the engagement groove 511.

[0057] A through-hole 22 for housing the air-core coil C is formed in the center of the movable body 21. The through-hole 22 has a roughly rectangular shape extending in the longitudinal direction of the movable body 21, and the concave corners of the through-hole 22 are rounded. On both long sides of the through-hole 22, there are anti-loosening pieces 221 projecting toward the center of the through-hole 22 to hold the air-core coil C and prevent it from coming loose. On both short sides of the through-hole 22, there are also anti-loosening pieces 222 projecting toward the center of the through-hole 22.

[0058] Furthermore, a lead-out groove 23 for drawing out the lead wires of the air-core coil C is formed on one of the main surfaces of the movable body 21. The lead-out groove 23 is L-shaped, and one end communicates with the through hole 22 via a notch formed in the anti-slip piece 222 near the end 212.

[0059] The air-core coil C is a roughly oval-shaped, flat coil formed by winding multiple layers of conductor wire, and is housed within the through-hole 22. In this configuration, the air-core coil C is held in place by retaining pieces 221 and 222.

[0060] As shown in Figure 4, the air-core coil C is positioned between the pair of magnet units M, i.e., in the magnetic gap, so as to align with the positions of the pair of magnet units M in the opposing direction of the pair of magnet yokes 11. In this case, the longitudinal direction of the air-core coil C is perpendicular to the parallel arrangement direction of the permanent magnets M1 and M2 and the parallel arrangement direction of the permanent magnets M3 and M4.

[0061] When current flows through the air-core coil C, a thrust is generated in the direction (Z direction) that crosses the magnetic flux in the magnetic air gap, based on Fleming's left-hand rule, pushing the air-core coil C in the direction of movement. As a result, the movable body 21 moves (see the white arrow in Figure 4). The movable body 21 moves in the direction of movement from an origin whose center position is approximately coincident with the center of the magnet unit M. In the direction of movement, the movement of the movable body 21 is restricted by the spacing holding parts 12 and 13, so that the movable body 21 does not extend beyond the edge of the magnet unit M.

[0062] As shown in Figure 2, the air cylinder 30 comprises a bottomed cylindrical cylinder tube 31, a rod-shaped rod 32 (moving shaft) inserted into the cylinder tube 31 and extending along the axial direction of the cylinder tube 31, and a disc-shaped piston (not shown) that is airtightly fitted to one end of the rod 32 and airtightly fitted inside the cylinder tube 31. By supplying air to one or the other side of the piston, the air cylinder 30 causes the piston to move axially within the cylinder tube 31, and consequently, the rod 32 also moves axially within the cylinder tube 31. The air cylinder 30 is a well-known model, and a detailed explanation is omitted.

[0063] The air cylinder 30 is installed such that the axial direction of the rod 32 is in the vertical direction (Z direction). Above the air cylinder 30, a second hinge 60 (second variable member) is provided, sandwiching a block that is rectangular in plan view.

[0064] A connecting plate member 20 is positioned above the pair of VCMs 10 and air cylinders 30. The connecting plate member 20 is plate-shaped, and its lower surface is held by the movable body 21 of the movable element 2 and the rod 32 of the air cylinder 30. The connecting plate member 20 is held by the rod 32 via a second hinge 60. In other words, the connecting plate member 20 is provided to span from the movable body 21 to the rod 32.

[0065] The connecting plate member 20 has a rectangular plate portion 202 extending in one direction, and protrusions 201, 201 are provided on both opposing edges of one end of the rectangular plate portion 202, respectively, in a direction intersecting the longitudinal direction of the rectangular plate portion 202. Each protrusion 201 has a through hole formed at a position corresponding to the screw hole 24 of the movable body 21. The connecting plate member 20 is screwed to the movable body 21 by passing a screw through the through hole of the protrusion 201 and screwing it into the screw hole 24.

[0066] Each retraction mechanism 101 further includes a first hinge (first variable member) 40. The first hinge 40 is attached to the upper surface of one end of the rectangular plate portion 202 of the connecting plate member 20. The first hinge 40 deforms when adjusting the orientation of the substrate, as will be described later. Figure 6 shows the first hinge 40 of the posture adjustment device 100 according to an embodiment of the present invention. Figure 6A is a perspective view of the first hinge 40, and Figure 6B is a front view.

[0067] The first hinge 40 has a cylindrical portion 41 and mounting plate portions 42 provided on both the upper and lower end faces of the cylindrical portion 41. The first hinge 40 is installed so that the axial length direction of the cylindrical portion 41 is in the vertical direction.

[0068] The cylindrical portion 41 has a pair of grooves 411 formed therein, which are open radially in opposite directions. The depth of each groove 411 is the same and shallower than the radius of the cylindrical portion 41. The width of each groove 411 may be constant, or it may be configured so that the width increases or decreases as it approaches the outer surface of the cylindrical portion 41.

[0069] Furthermore, the pair of grooves 411 are formed at equal intervals in the axial direction of the cylindrical portion 41, i.e., in the Z direction. Moreover, in the cylindrical portion 41, the opening direction of each groove 411 is offset at equal intervals in the circumferential direction. For example, in this embodiment, each groove 411 is formed offset by 60° in the circumferential direction.

[0070] Due to this configuration, the first hinge 40 of the attitude adjustment device 100 can tilt with respect to the Z direction. In particular, it can be freely tilted in any radial direction with respect to the Z direction as the axis.

[0071] Furthermore, the opening direction of the groove 411 is the same for all mounting plate portions 42 (first hinge 40).

[0072] Each mounting plate portion 42 has a roughly square shape, with through holes 421 formed at each of its four corners. In each mounting plate portion 42, the distance between opposing sides is longer than the diameter of the cylindrical portion 41. Also, each mounting plate portion 42 is positioned around the same axis as the cylindrical portion 41. The first hinge 40 is screwed to the connecting plate member 20 by passing screws through each through hole 421 of the lower mounting plate portion 42 and screwing them into screw holes (not shown) provided in the rectangular plate portion 202 of the connecting plate member 20.

[0073] As described above, a second hinge 60 is interposed between the connecting plate member 20 and the air cylinder 30. The second hinge 60 has substantially the same shape as the first hinge 40, but is smaller than the first hinge 40 (see Figure 2). However, the groove shape of the second hinge 60 differs from that of the groove 411 of the first hinge 40. In the first hinge 40, the width of the groove 411 is constant in the depth direction (from the outer surface side of the cylindrical part 41 to the bottom of the groove), whereas in the second hinge 60, a through hole is formed at the bottom of the groove along the length direction of the groove, and the width of the groove expands towards the bottom side of the groove (towards the center of the cylindrical part 41). In other words, the groove shape of the second hinge 60 resembles that of a round-bottom flask when viewed from the side. Therefore, the second hinge 60 can be tilted more easily in the Z direction.

[0074] As described above, a second hinge 60 is interposed between the connecting plate member 20 and the air cylinder 30. Figure 7 shows the second hinge 60 of the attitude adjustment device 100 according to an embodiment of the present invention. Figure 7A is a perspective view of the second hinge 60, and Figure 7B is a front view.

[0075] The second hinge 60 has a cylindrical portion 61 and mounting plate portions 62 provided on both the upper and lower ends of the cylindrical portion 61. Screw holes 621 are formed at each of the four corners of each mounting plate portion 62. The second hinge 60 is installed so that the axial length direction of the cylindrical portion 61 is in the vertical direction, and in this case, the cylindrical portion 61 is positioned around the same axis as the rod 32 of the air cylinder 30. The second hinge 60 deforms as needed to appropriately transmit the movement of the air cylinder 30 (rod 32) to the connecting plate member 20.

[0076] Although the second hinge 60 is smaller than the first hinge 40, the cylindrical portion 61 and the mounting plate portion 62 have substantially the same shape as the cylindrical portion 41 and the mounting plate portion 42. However, the second hinge 60 has a groove 611, and the shape of the groove 611 differs from the groove 411 of the first hinge 40. While groove 411 has a constant width, groove 611 has an elongated hole formed at its bottom along its length, and its width is expanded. That is, as shown in Figure 7B, groove 611 has a circular bottom in a longitudinal cross-sectional view. Therefore, the second hinge 60 can be tilted more easily in the Z direction. The other components of groove 611 are the same as those of groove 411, and a detailed explanation is omitted.

[0077] Multiple through holes are formed at the other end of the rectangular plate portion 202 of the connecting plate member 20. Each through hole is positioned to correspond to a screw hole 621 of the second hinge 60. By passing screws through these through holes and screwing them into the screw holes 621, the connecting plate member 20 is screwed to the second hinge 60. In other words, the connecting plate member 20 is fixed to the rod 32 of the air cylinder 30 via the second hinge 60.

[0078] The attitude adjustment device 100, having the above configuration, supports the substrate (supported object) via the rotation mechanism 200 and the substrate chuck 400, and adjusts the attitude of the substrate by appropriately controlling each of the three advancement / retraction mechanisms 101. In other words, the attitude adjustment device 100 controls the advancement / retraction of the movable element 2 of the VCM 10 and the rod 32 of the air cylinder 30 in the Z direction, thereby tilting the substrate in the Z direction.

[0079] More specifically, the attitude adjustment device 100 holds the substrate using three forward / backward mechanisms 101, and by appropriately controlling the VCM 10 for each forward / backward mechanism 101, the first hinge 40 is moved forward and backward in the Z direction to tilt the substrate in the Z direction. This allows the tilt angle of the substrate to be adjusted during the flip-chip bonding process. Furthermore, the attitude adjustment device 100 appropriately controls the air cylinder 30 to assist the VCM 10 in moving the first hinge 40 forward and backward. That is, the thrust generated by the VCM 10 and the thrust generated by the air cylinder 30 are added together, and the substrate is supported by the rotation mechanism 200 and the substrate chuck 400 with the added thrust, and is also tilted in the Z direction. As a result, the load (drive current) on the VCM 10 is reduced.

[0080] Figure 8 is a block diagram illustrating the control of the forward / backward mechanism 101 in the attitude adjustment device 100 according to this embodiment. Figure 8 shows an example of the control system of the attitude adjustment device 100. The attitude adjustment device 100 includes a first drive system 3, a second drive system 4, and a third drive system 5 that drive each of the forward / backward mechanisms 101. The first drive system 3, the second drive system 4, and the third drive system 5 are each controlled by a control unit 6.

[0081] The control unit 6 receives a Z-direction movement distance command related to the position (orientation) of the substrate from an external source, and controls the first drive system 3, the second drive system 4, and the third drive system 5 respectively according to the Z-direction movement distance command. The control unit 6 transmits command signals S1, S2, and S3, respectively, representing the target position of the movable element 2 of the respective advance / retract mechanism 101, to the first drive system 3, the second drive system 4, and the third drive system 5, respectively, according to the Z-direction movement distance command. The first drive system 3, the second drive system 4, and the third drive system 5 have the same configuration, and only the second drive system 4 will be described below.

[0082] The second drive system 4 includes a VCM driver 401 that controls the movable element 2 by supplying current to the VCM 10, a current detection unit 402 that detects the current value input to the VCM 10 from the VCM driver 401, a motor regulator 405 that supplies air to the air cylinder 30, and a first controller 403 and a second controller 404 that control the motor regulator 405. The first controller 403 controls the motor regulator 405 based on the detection result of the current detection unit 402, and the second controller 404 controls the current related to driving the air cylinder 30 based on the speed of the movable element 2 of the VCM 10. In other words, the second controller 404 controls the motor regulator 405.

[0083] Figure 9 is a flowchart illustrating the control of the forward / backward mechanism 101 in the second drive system 4 of the attitude adjustment device 100. In the following, only the control of the forward / backward mechanism 101 in the second drive system 4 will be explained using Figure 9, but it goes without saying that similar control is performed simultaneously in the first drive system 3 and the third drive system 5.

[0084] For example, the control unit 6 is a PID control system, and the Z-direction movement distance command represents the deviation between the target position and the detected position of the substrate. Based on the deviation between the target position and the detected position of the substrate (Z-direction movement distance command), the control unit 6 generates a command signal S2 for applying thrust to the VCM 10 and outputs it to the VCM driver 401 (S101).

[0085] The VCM driver 401 supplies a current to the VCM 10 in accordance with the input command signal S2 (S102). More specifically, based on the measurement result of a linear encoder (not shown) that measures the travel distance of the movable element 2, a current value is determined based on the deviation between the current position of the movable element 2 and the target position, and a current corresponding to the determined current value is supplied to the VCM 10. The current supplied to the VCM 10 flows through the air-core coil C of the movable element 2.

[0086] In this process, the current detection unit 402 detects the current value input to the VCM10 and inputs the detected current value to the first controller 403 (S103).

[0087] The VCM driver 401 supplies a current to the VCM 10 corresponding to the input command signal S2, and outputs a speed signal V representing the movement speed of the movable element 2 to the second controller 404 (S104).

[0088] Next, in S103, the first controller 403 performs PID control of the current flowing to the motor regulator 405 based on the current value input from the current detection unit 402 (S105). Specifically, the first controller 403 performs feedback control of the output current value so that the current output from the VCM driver 401 to the VCM 10 becomes "0".

[0089] Furthermore, in S104, the second controller 404 adds PID control of the current flowing to the motor regulator 405 based on the speed signal V input from the VCM driver 401 (S106).

[0090] Generally, the speed of the VCM10 (movable element 2) is kept constant until the load reaches its maximum, that is, before the current value input to the VCM10 reaches its maximum value. Focusing on this, in the attitude adjustment device 100 of this embodiment, the second controller 404 controls the motor regulator 405 based on the speed signal V. In other words, the second controller 404 controls the motor regulator 405 to start supplying air to the air cylinder 30 when the moving speed of the movable element 2 is constant. Furthermore, while the movable element 2 is moving, so-called feedforward control is performed according to the moving speed of the movable element 2 (speed signal V).

[0091] Subsequently, when current flows through the air-core coil C, a thrust in the Z direction is generated in the VCM10 as described above, causing the movable element 2 to move (see the white arrow in Figure 4). In this case, the motor regulator 405 controls the air cylinder 30 so that the current input to the VCM 10 becomes "0" after the VCM 10 starts operating, in accordance with the PID control of the first controller 403 and the second controller 404 (S107).

[0092] As described above, in the attitude adjustment device 100 of this embodiment, when controlling the air cylinder 30, a speed signal V representing the movement speed of the movable element 2 is added to the current value output from the VCM driver 401 to the VCM 10 for control. This allows for a rapid increase in air pressure to be applied to the air cylinder 30, and the load on the VCM 10 can be reduced quickly.

[0093] Figure 10 shows the effect of adding the movement speed of the movable element 2 to the control of the air cylinder 30. In Figure 10, the horizontal axis represents time, the left vertical axis represents the current value of the VCM 10, and the right vertical axis represents the pressure of the air cylinder 30. Furthermore, Figure 10 shows four graphs G1-G4, where graphs G1 and G2 show the current on the left vertical axis, and graphs G3 and G4 show the pressure on the right vertical axis. Additionally, graphs G1 and G3 represent the case where the movement speed of the movable element 2 is not added when controlling the air cylinder 30, while graphs G2 and G4 represent the case where the movement speed of the movable element 2 is added when controlling the air cylinder 30.

[0094] As can be seen from Figure 10, when the movement speed of the movable element 2 is added to the control of the air cylinder 30 (G2, G4), the current value of the VCM 10 is reduced compared to when the movement speed of the movable element 2 is not added (G1, G3), and the pressure of the air cylinder 30 rises earlier. Thus, in the attitude adjustment device 100 of this embodiment, the air cylinder 30 is controlled using the movement speed of the movable element 2 of the VCM 10, so the load on the VCM 10 can be reduced quickly and effectively.

[0095] In this embodiment, the case in which the posture adjustment device 100 has three forward / backward mechanisms 101 has been described as an example, but it is not limited to this, and there may be four or more forward / backward mechanisms 101.

[0096] The above explanation uses the example of a case where the first controller 403 performs control based on the current value output from the VCM driver 401 to the VCM 10, and the second controller 404 performs control based on the movement speed of the movable element 2, but it is not limited to this. The control of the first controller 403 and the second controller 404 may be configured to be executed by a single controller.

[0097] The disclosed embodiments should be considered in all respects to be illustrative and not restrictive. The scope of the invention is indicated by the claims rather than by the foregoing description, and all modifications within the meaning and scope equivalent to the claims are intended. [Explanation of Symbols]

[0098] 2 Mover 10 VCM 20 Connecting plate member 30 Air Cylinders 32 rods 40. First hinge 41 Cylindrical section 42 Mounting plate section 60 Second hinge 61 Cylindrical section 62 Mounting plate section 100 Posture adjustment device 101 Advancement / retraction mechanism 403 First Controller 404 Second Controller 411 Groove 500 Stage Equipment 611 Groove C Air-core coil

Claims

1. In a control system for controlling the forward and backward movement of a forward / backward mechanism comprising a voice coil motor having a movable element that can move in one direction, and an air cylinder that assists the movement of the movable element, A control system that controls the air cylinder based on the movement speed of the movable element.

2. The control system according to claim 1, which controls the air cylinder so that the current input to the voice coil motor becomes zero.

3. A control system according to claim 1 or 2, which controls the air cylinder based on whether or not the speed of the movable element is constant.

4. An attitude adjustment device that supports a support using a voice coil motor having a movable element that can move in one direction and an advance / return mechanism comprising an air cylinder that assists the movement of the movable element, and adjusts the attitude of the support, The system includes a controller that controls the air cylinder based on the movement speed of the movable element, The aforementioned reciprocating mechanism consists of multiple parts. Each forward / backward mechanism is a posture adjustment device arranged in a ring shape at equal intervals.

5. The air cylinder has a movable shaft that can move in one direction, A plate member is provided in each reciprocating mechanism, with one side of which is held by the movable element and the moving shaft, The posture adjustment device according to claim 4, further comprising a first variable member provided on the other side of each plate member, which deforms when the posture of the supported object is adjusted.

6. Each first variable member is The cylindrical part, It has mounting plates provided on both end faces of the cylindrical portion, The posture adjustment device according to claim 5, wherein the cylindrical portion has a pair of grooves that are open in opposite directions in the radial direction.

7. The posture adjustment device according to claim 6, wherein the pair of grooves are formed at equal intervals in the axial direction of the cylindrical portion.

8. The posture adjustment device according to claim 7, wherein in each first variable member, the opening direction of each groove is offset at equal intervals in the circumferential direction.

9. The posture adjustment device according to any one of claims 6 to 8, wherein the opening direction of the groove is the same in all first variable members.

10. The posture adjustment device according to any one of claims 4 to 8, wherein a second variable member is provided between each plate member and each movable axis.

11. Each second variable member is, The cylindrical part, It has mounting plates provided on both ends of the cylindrical portion, The posture adjustment device according to claim 10, wherein the cylindrical portion has a pair of grooves that are open in opposite directions in the radial direction.

12. The posture adjustment device according to claim 11, wherein the groove of the second variable member is widened at the bottom.

13. The posture adjustment device according to any one of claims 4 to 8, wherein the forward and backward movement mechanism comprises at least three parts.

14. A control method for controlling the forward and backward movement of a forward / backward mechanism comprising a voice coil motor having a movable element that can move in one direction, and an air cylinder that assists the movement of the movable element, A control method in which a control unit that controls the current related to the driving of the air cylinder controls the current based on the moving speed of the movable element.

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