Heating device

Abstract

To improve the uniform heating property.SOLUTION: A heating apparatus comprises a heating plate, a plurality of heaters, and a pair of rod-like members. The heating plate includes a heating surface and a plurality of concave parts positioned at a back surface opposite to the heating surface. The plurality of heaters are arranged at the plurality of concave parts, respectively. The pair of rod-like members hold a heater group arranged in a long direction of the rod-like member. The heater includes a heater main body and a cover member surrounding an outer peripheral surface of the heater main body. The pair of rod-like members face each other across the cover member of the heater included in the arranged heater group.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] The disclosed embodiments relate to a heating device.

Background Art

[0002] Conventionally, there is known a heating device having a heating plate in which a plurality of cartridge heaters are respectively inserted into a plurality of recesses formed on the back surface located on the opposite side of the heating surface, and heating an object by bringing the object into contact with such a heating plate (see Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the above-described conventional technology, there is a possibility that the temperature of the heating plate becomes non-uniform because the heat generated in the plurality of cartridge heaters dissipates separately.

[0005] One aspect of the embodiment has been made in view of the above, and an object thereof is to provide a heating device capable of improving heat uniformity.

Means for Solving the Problems

[0006] A heating device according to one aspect of the embodiment includes a heating plate, a plurality of heaters, and a pair of rod-shaped members. The heating plate has a heating surface and a plurality of recesses located on the back surface opposite to the heating surface. The plurality of heaters are respectively located in the plurality of recesses. The pair of rod-shaped members holds a group of heaters arranged in the longitudinal direction of the rod-shaped members among the plurality of heaters. The heater has a heater body and a cover member surrounding the outer peripheral surface of the heater body. The pair of rod-shaped members face each other with the cover members of the heaters included in the arranged group of heaters interposed therebetween. [Effects of the Invention]

[0007] According to one embodiment, it is possible to improve heat uniformity. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 is a side view of the heating device according to the embodiment, viewed from the negative Y-axis direction. [Figure 2A] Figure 2A is a cross-sectional view of the heater according to the embodiment. [Figure 2B] Figure 2B is a plan view of the heater according to the embodiment, viewed from the positive Z-axis direction. [Figure 2C] Figure 2C is a plan view of the heater according to the embodiment, viewed from the negative Z-axis direction. [Figure 3] Figure 3 is a plan view of the heating device according to the embodiment, as seen from the positive Z-axis direction. [Figure 4] Figure 4 is a cross-sectional view along the line IV-IV shown in Figure 3. [Figure 5] Figure 5 is a cross-sectional view along the VV line shown in Figure 3. [Figure 6] Figure 6 is a side view of the heating device according to the embodiment, viewed from the negative X-axis direction. [Figure 7] Figure 7 is a cross-sectional view taken along the line VII-VII shown in Figure 6. [Figure 8] Figure 8 is a cross-sectional view of the heater and a pair of rod-shaped members according to the embodiment. [Figure 9] Figure 9 is a plan view of the heater group according to the embodiment, viewed from the positive Z-axis direction. [Figure 10] Figure 10 is a plan view of the heater group according to the embodiment, viewed from the negative Z-axis direction. [Figure 11] Figure 11 is a cross-sectional view showing a group of heaters according to an embodiment. [Figure 12] Figure 12 is a cross-sectional view showing a group of heaters according to a first modified example of the embodiment. [Figure 13] Figure 13 is a cross-sectional view showing a heater group according to a second modified example of the embodiment. [Figure 14] FIG. 14 is a cross-sectional view showing a heater group according to a third modification of the embodiment. [Figure 15] FIG. 15 is a plan view of a heater group according to a fourth modification of the embodiment as viewed from the negative Z-axis direction. [Figure 16] FIG. 16 is a cross-sectional view showing a heater group according to a fourth modification of the embodiment. [Figure 17] FIG. 17 is a cross-sectional view showing a heater according to a fifth modification of the embodiment. [Figure 18] FIG. 18 is a cross-sectional view showing a heater according to a sixth modification of the embodiment. [Figure 19] FIG. 19 is a plan view of a heater group according to a sixth modification of the embodiment as viewed from the positive Z-axis direction. [Figure 20] FIG. 20 is a plan view of a heater group according to a sixth modification of the embodiment as viewed from the negative Z-axis direction. [Figure 21] FIG. 21 is a plan view of a heater according to a seventh modification of the embodiment as viewed from the positive Z-axis direction. [Figure 22] FIG. 22 is a plan view of a heater according to a seventh modification of the embodiment as viewed from the negative Z-axis direction. [Figure 23] FIG. 23 is a plan view of a heater group according to an eighth modification of the embodiment as viewed from the negative Z-axis direction.

MODE FOR CARRYING OUT THE INVENTION

[0009] Hereinafter, embodiments for implementing a heating device according to the present disclosure (hereinafter referred to as "embodiments") will be described in detail with reference to the drawings. Note that the heating device according to the present disclosure is not limited by this embodiment. In addition, each embodiment can be appropriately combined as long as the processing contents do not conflict. In the following embodiments, the same parts are denoted by the same reference numerals, and duplicate descriptions are omitted.

[0010] Furthermore, in the embodiments described below, expressions such as "constant," "orthogonal," "perpendicular," or "parallel" may be used, but these expressions do not require strict adherence to "constant," "orthogonal," "perpendicular," or "parallel" conditions. In other words, each of the above expressions allows for deviations such as manufacturing accuracy or installation accuracy.

[0011] Furthermore, the diagrams referenced below are schematic representations for illustrative purposes. Therefore, details may be omitted, and the dimensional proportions may not necessarily match those of reality.

[0012] Furthermore, in the drawings referenced below, for the sake of clarity, mutually orthogonal X, Y, and Z axis directions are sometimes defined, and a Cartesian coordinate system is shown with the positive Z axis pointing vertically upward.

[0013] Figure 1 is a side view of the heating device 100 according to the embodiment, viewed from the negative Y-axis direction. Hereinafter, the surface of the heating device 100 that is on the side of the object to be heated when it is in contact with the object to be heated will be referred to as the "top surface," and the surface that is on the opposite side of the object to be heated will be referred to as the "bottom surface." However, the heating device 100 is not limited to this and may be used in any orientation, for example, by inverting it upside down.

[0014] The heating device 100 shown in Figure 1 includes a heating plate 110, a fixing device 120, a plurality of heaters 130, and a support plate 150. The heating device 100 also includes a plurality of anode-side electrode assemblies 160, a plurality of cathode-side electrode assemblies 170, and a plurality of insulating members 180.

[0015] The heating plate 110 is, for example, a metal plate-shaped member. The heating plate 110 has an upper surface 110a that can come into contact with the object to be heated. That is, the upper surface 110a of the heating plate 110 becomes the heating surface that heats the object to be heated. The upper surface 110a is used, for example, to heat a mold, which is an example of an object to be heated. On the lower surface 110b of the heating plate 110, opposite to the heating surface, there are a number of recesses 113 (see Figures 3, 5, etc.) into which a number of heaters 130 are inserted.

[0016] Multiple heaters 130 are inserted into multiple recesses 113. This positions the multiple heaters 130 perpendicular to the upper surface 110a of the heating plate 110, which is the heating surface. By positioning the multiple heaters 130 perpendicular to the heating surface of the heating plate 110 in this way, variations in the distance between the multiple heaters 130 and the heating surface are reduced, thereby improving the uniformity of heating within the surface. In addition, the heaters 130 have a temperature distribution in the longitudinal direction. However, by positioning the multiple heaters 130 perpendicular to the heating surface of the heating plate 110, it is possible to reduce the temperature difference caused by the temperature distribution of the heaters 130 between the center and the outer edge of the upper surface 110a.

[0017] Here, the configuration of the heater 130 will be described with reference to Figures 2A to 2C. Figure 2A is a cross-sectional view of the heater 130 according to the embodiment. Figure 2B is a plan view of the heater 130 according to the embodiment as seen from the positive Z-axis direction. Figure 2C is a plan view of the heater 130 according to the embodiment as seen from the negative Z-axis direction.

[0018] As shown in Figure 2A, the heater 130 according to this embodiment includes a heater body 131, a cover member 132, an anode-side lead electrode 133, and a cathode-side lead electrode 134.

[0019] The heater body 131 is a ceramic heater. In a cross-sectional view perpendicular to the X-axis, the heater body 131 is rectangular in shape and has a tip portion 130a and a base portion 130b. The heater body 131 is inserted into the recess 113 from the tip portion 130a side.

[0020] The heater body 131 has a heating resistor 131a and wiring 131b and 131c inside a ceramic body. By using a ceramic heater for the heater body 131, it is possible to reduce seizing between the metal heating plate 110 and the heater body 131. Therefore, problems such as the heater body 131 seizing onto the heating plate 110 and making it impossible to replace the heater 130 are less likely to occur.

[0021] The length of the heater body 131, i.e., the length of the ceramic body, can be, for example, between 1 mm and 200 mm. The outer dimensions of the ceramic body can also be, for example, between 0.5 mm and 100 mm.

[0022] The shape of the heater body 131, i.e., the shape of the ceramic body, is, for example, a prismatic shape. However, the shape of the heater body 131 is not limited to a prismatic shape; for example, it may be cylindrical or elliptical. The material of the ceramic body is, for example, an insulating ceramic. As the material of the ceramic body, for example, oxide ceramics, nitride ceramics, or carbide ceramics can be used.

[0023] The heat-generating resistor 131a is a component that generates heat when an electric current flows through it. At one end, the heat-generating resistor 131a is connected to the pad portion 133a of the anode-side lead electrode 133, which will be described later, via wiring 131b. At the other end, the heat-generating resistor 131a is connected to the pad portion 134a of the cathode-side lead electrode 134, which will be described later, via wiring 131c.

[0024] The heating resistor 131a may include a high-resistance conductor, such as tungsten or molybdenum. The dimensions of the heating resistor 131a can be, for example, a width of 0.1 mm to 5 mm, a thickness of 0.05 mm to 0.3 mm, and a total length of 1 mm to 500 mm. Alternatively, the heating resistor 131a may be a conductive ceramic containing, for example, tungsten carbide. In this case, the difference in thermal expansion between the ceramic body and the heating resistor 131a can be reduced. This reduces the thermal stress between the ceramic body and the heating resistor 131a. As a result, the durability of the heater body 131 can be increased.

[0025] Wiring 131b connects one end of the heat-generating resistor 131a to the pad portion 133a of the anode-side lead electrode 133. Wiring 131c connects the other end of the heat-generating resistor 131a to the pad portion 134a of the cathode-side lead electrode 134.

[0026] The wirings 131b and 131c may contain high-resistance conductors, such as tungsten or molybdenum, similar to the heat-generating resistor 131a. Alternatively, the wirings 131b and 131c may be conductive ceramics, such as tungsten carbide. The wirings 131b and 131c are wider than the heat-generating resistor 131a. This allows the electrical resistance of the wirings 131b and 131c to be lower than that of the heat-generating resistor 131a. As a result, the amount of heat generated in the wirings 131b and 131c can be reduced.

[0027] The cover member 132 is cylindrical in shape and surrounds the outer circumferential surface of the heater body 131. The cover member 132 is positioned in the longitudinal direction of the heater body 131 at locations corresponding to the pad portion 133a of the anode-side lead electrode 133 and the pad portion 134a of the cathode-side lead electrode 134. The cover member 132 covers the pad portion 133a of the anode-side lead electrode 133 and the pad portion 134a of the cathode-side lead electrode 134. The space formed by the inner circumferential surface of the cover member 132 is filled with a bonding material 132a for joining the cover member 132 and the heater body 131.

[0028] The cover member 132 is, for example, an insulating ceramic. The material of the cover member 132 may be, for example, alumina, silicon nitride, etc.

[0029] The anode lead electrode 133 and the cathode lead electrode 134 are fixed to one end (base end 130b) of the heater body 131. One end of the anode lead electrode 133 is connected to an external power supply via an anode assembly electrode 160 (described later), and the other end is electrically connected to the heating resistor 131a via wiring 131b. Similarly, one end of the cathode lead electrode 134 is connected to an external power supply via a cathode assembly electrode 170 (described later), and the other end is electrically connected to the heating resistor 131a via wiring 131c.

[0030] The anode lead electrode 133 and the cathode lead electrode 134 are wires containing a metallic material such as nickel, iron, or a nickel-based heat-resistant alloy.

[0031] The anode-side lead electrode 133 has a pad portion 133a and a terminal portion 133b. The pad portion 133a is a planar portion located on the surface of the heater body 131 and is electrically connected to one end of the heating resistor 131a via wiring 131b. The terminal portion 133b is electrically connected to the pad portion 133a and extends outward in the longitudinal direction of the heater body 131 (in this case, in the negative Z-axis direction) from the base end portion 130b of the heater body 131. The cross-section of the terminal portion 133b may be, for example, circular, elliptical, or rectangular. The outer diameter of the terminal portion 133b may be, for example, 0.5 to 2.0 mm.

[0032] The cathode lead electrode 134 has a pad portion 134a and a terminal portion 134b. The pad portion 134a is a planar portion located on the surface of the heater body 131 and is electrically connected to the other end of the heating resistor 131a via wiring 131c. The terminal portion 134b is electrically connected to the pad portion 134a and extends outward in the longitudinal direction of the heater body 131 (in this case, in the negative Z-axis direction) from the base end portion 130b of the heater body 131. The cross-section of the terminal portion 134b may be, for example, circular, elliptical, or rectangular. The outer diameter of the terminal portion 134b may be, for example, 0.5 to 2.0 mm.

[0033] Thus, the pair of lead electrodes (anode lead electrode 133 and cathode lead electrode 134) of the heater 130 have pad portions 133a and 134a located on the surface of the heater body 131, and terminal portions 133b and 134b connected to the pad portions 133a and 134a. In this configuration, the heater 130 is less prone to stress concentration because the pad portions 133a and 134a function as buffers. Therefore, the heater 130 configured in this way has high durability.

[0034] Furthermore, as shown in Figures 2B and 2C, the cover member 132 has an oval shape that is elongated in the Y-axis direction when viewed in a plan view from the length direction (Z-axis direction) of the heater 130. An "oval shape" is a shape that resembles two circles flattened in the X-axis direction and facing each other approximately parallel to one another. For example, it is a shape in which the ends of two linear outer surfaces in the X-axis direction are connected in the Y-axis direction by a convex curved surface (for example, a semicircular curved surface). The cover member 132 also has a first opening 132c and a second opening 132d. The first opening 132c is a through hole that penetrates the cover member 132 in the Z-axis direction and is located on the positive Z-axis side, and is the opening through which the heater body 131 is pulled out. The second opening 132d is located on the negative Z-axis side of the through hole that penetrates the cover member 132 in the Z-axis direction, and is an opening through which the lead terminals (terminal portions 133b, 134b) of a pair of lead electrodes (anode lead electrode 133 and cathode lead electrode 134) are pulled out.

[0035] The first opening 132c has a rectangular shape, which is elongated in the Y-axis direction, when viewed from the length direction (Z-axis direction) of the heater 130. This facilitates the positioning of the heater body 131 relative to the cover member 132.

[0036] Furthermore, the area of ​​the first opening 132c, when viewed from the length direction (Z-axis direction) of the heater 130, may be smaller than that of the second opening 132d. Heat generated inside the cover member 132 is released through the first opening 132c and the second opening 132d. By making the opening area on the heater body 131 side smaller than the opening area on the lead terminal (terminal portion 133b, 134b) side, heat inside the cover member 132 can more easily escape from the lead terminal (terminal portion 133b, 134b) side. Therefore, the heater 130 configured in this way has high durability.

[0037] Multiple heaters 130 of the heating device 100 are inserted into multiple recesses 113 formed on the lower surface 110b of the heating plate 110. Figure 3 is a plan view of the heating device 100 according to the embodiment, viewed from the positive Z-axis direction.

[0038] Figure 3 shows the upper surface 110a of the heating plate 110, which is the heating surface, as a rectangular plate, and the positions of the multiple recesses 113 are indicated by dashed lines. As an example, the multiple recesses 113 shown in Figure 3 are arranged in 6 rows and 6 columns. That is, the heating plate 110 according to this embodiment has a total of 36 recesses 113. Note that the arrangement and number of the multiple recesses 113 are not limited to the example shown.

[0039] Returning to Figure 1, the fixing device 120 will be described. The fixing device 120 is positioned at a distance from the heating plate 110. Multiple heaters 130 are fixed to the fixing device 120, each inserted into a plurality of recesses 113. The manner in which the heaters 130 are fixed to the fixing device 120 will be described later.

[0040] The support plate 150 is fixed to the fastener 120 by a plurality of columnar members 151, while remaining separate from the fastener 120. By positioning the support plate 150 separately from the fastener 120, it is possible to secure space between the support plate 150 and the fastener 120 for arranging the terminal portions 133b and 134b of each heater 130, in other words, space for arranging the anode-side electrode assembly 160 and the cathode-side electrode assembly 170, which will be described later. Note that the support plate 150 and the plurality of columnar members 151 may be omitted if necessary.

[0041] Figure 4 is a cross-sectional view taken along the line IV-IV shown in Figure 3. Figure 5 is a cross-sectional view taken along the line VV shown in Figure 3. Note that the support plate 150 and the multiple columnar members 151 are not shown in Figures 4 and 5.

[0042] As shown in Figures 4 and 5, the heating device 100 is configured such that a plurality of heaters 130 are fixed to a fixing device 120 and inserted into a plurality of recesses 113 of the heating plate 110.

[0043] The heating plate 110 has a first plate member 111 and a second plate member 112.

[0044] The first plate member 111 is a plate-shaped member having an upper surface 110a of a heating plate 110, which is the heating surface. The first plate member 111 is joined to the second plate member 112 by a fixing member 114, such as a bolt. That is, the lower surface 111a of the first plate member 111, opposite to the upper surface 110a, is the joining surface that is joined to the second plate member 112.

[0045] The second plate member 112 is a plate-shaped member having an upper surface 112a which is the surface to be joined to the joining surface of the first plate member 111, and a lower surface 110b located on the opposite side of the upper surface 112a. Multiple through holes 112b are formed in the lower surface 110b, and the lower surface 111a of the first plate member 111 is exposed from each of the multiple through holes 112b.

[0046] Each of the multiple recesses 113 is formed by each of the multiple through holes 112b and the lower surface 111a of the first plate member 111 that is exposed from each of the multiple through holes 112b. That is, the inner wall surface of each through hole 112b forms the inner surface of each recess 113, and the lower surface 111a of the first plate member 111 forms the bottom surface (top surface in the orientation shown in Figure 5) of each recess 113. The tips 130a of the multiple heaters 130 are located within the multiple recesses 113 when the multiple heaters 130 are inserted into each of the multiple recesses 113. Furthermore, the heating plate 110 does not have to be divided into two members, a first plate member 111 and a second plate member 112. The heating plate 110 may be integrally formed from a metal plate-like member in the parts corresponding to the first plate member 111 and the second plate member 112. The heating plate 110 has multiple recesses 113 on its back surface, which is located opposite the heating surface of the integrally formed plate-like member. By integrally forming the heating plate 110, the manufacturing process of the heating device 100 can be simplified.

[0047] Furthermore, the tip portions 130a of each of the multiple heaters 130 may or may not be in contact with the bottom surface of each recess 113.

[0048] The fixing device 120 has a fixing plate 121 and a plurality of retaining bars 122, 123.

[0049] The fixing plate 121 is, for example, a metal plate-shaped member. The fixing plate 121 is positioned away from the heating plate 110 by being connected to the heating plate 110 by a connecting member 124, such as a bolt, with a gap formed between the fixing plate 121 and the heating plate 110. By positioning the fixing plate 121 away from the heating plate 110, the temperature rise of the fixing portions of the multiple heaters 130 to the fixing device 120 (for example, the holding bars 122 and 123) can be reduced. On the other hand, since the heat removed from the heating plate 110 by the fixing plate 121 is reduced, the temperature rise of the heating plate 110 can be promoted.

[0050] The fixing plate 121 has multiple through holes 121a at positions corresponding to the multiple recesses 113. Multiple heaters 130 are inserted through each of the multiple through holes 121a. Hereafter, for the sake of explanation, unless otherwise necessary, the multiple recesses 113, multiple through holes 121a, and multiple heaters 130 will simply be referred to as "recesses 113," "fixing holes 120a," and "heaters 130," respectively.

[0051] The heater body 131 of the heater 130 penetrates the through hole 121a, and its tip 130a is inserted into the recess 113. The base end 130b of the heater body 131 protrudes away from the upper surface 110a of the heating plate 110, which is the heating surface, compared to the lower surface of the fixing plate 121. The anode-side lead electrode 133 and the cathode-side lead electrode 134 are located at the base end 130b of the heater body 131. By providing the anode-side lead electrode 133 and the cathode-side lead electrode 134 at the base end 130b of the heater body 131 that protrudes away from the upper surface 110a of the heating plate 110, the anode-side lead electrode 133 and the cathode-side lead electrode 134 can be moved away from the heating surface. Therefore, with this configuration, heat transfer to the anode-side lead electrode 133 and the cathode-side lead electrode 134 can be reduced.

[0052] The retaining bars 122 and 123 are, for example, metal rod-shaped members. The retaining bars 122 and 123 sandwich the cover members 132 of multiple heaters 130 and are connected to the fixing plate 121 by connecting members 125, such as bolts. In this way, the retaining bars 122 and 123 can hold multiple heaters 130 and fix them to the fixing plate 121. In this embodiment, the heating device 100 has 36 heaters 130, and the pair of retaining bars 122 and 123 sandwich the cover members 132 of six heaters 130 that are arranged in a row from among these 36 heaters 130. In this way, the pair of retaining bars 122 and 123 can hold and fix the six heaters 130 that are arranged in a row in the longitudinal direction (X-axis direction) of the retaining bars 122 and 123. The heating device 100 has a total of six pairs of retaining bars 122 and 123 (see Figure 6). Hereinafter, the six heaters 130 held by the pair of retaining bars 122 and 123 may be referred to as the heater group 30 (see Figures 9 and 10).

[0053] A spacer member 140 is placed between the heating plate 110 and the fixing device 120. The spacer member 140 is cylindrical, and a connecting member 124 is inserted through it. By providing the spacer member 140 between the heating plate 110 and the fixing device 120, it is possible to maintain a state of separation between the heating plate 110 and the fixing device 120, and to maintain the distance between the heating plate 110 and the fixing device 120. Therefore, with this configuration, it is possible to continuously suppress the temperature rise of the fixing device 120 due to heat transfer from the heating plate 110.

[0054] The material of the spacer member 140 is preferably, for example, a heat-resistant ceramic. Examples of materials that can be used for the spacer member 140 include oxide ceramics, nitride ceramics, or carbide ceramics. This reduces the thermal expansion and contraction of the spacer member 140, thereby reducing wear and tear on the spacer member 140.

[0055] Returning to Figure 1, the anode-side assembly electrode 160 is electrically connected to the anode-side lead electrodes 133 of the multiple heaters 130. In this embodiment, the heating device 100 has 36 heaters 130, and the anode-side assembly electrode 160 is electrically connected to the anode-side lead electrodes 133 of six of these 36 heaters 130 that are arranged in a row and held by a pair of holding bars 122 and 123. The heating device 100 has a total of six anode-side assemblies 160 (see Figure 6).

[0056] Furthermore, the cathode-side assembly electrode 170 is electrically connected to the cathode-side lead electrodes 134 of the multiple heaters 130. In this embodiment, the heating device 100 has 36 heaters 130, and the cathode-side assembly electrode 170 is electrically connected to the cathode-side lead electrodes 134 of six of these 36 heaters 130 that are arranged in a row and fixed to a pair of retaining bars 122 and 123. The heating device 100 has a total of six cathode-side assembly electrodes 170 (see Figure 7).

[0057] The insulating member 180 is, for example, a plate-shaped member made of insulating ceramic, and is positioned between the anode-side electrode assembly 160 and the cathode-side electrode assembly 170. In this embodiment, the heating device 100 has two insulating members 180 for each pair of anode-side electrode assembly 160 and cathode-side electrode assembly 170, and these two insulating members 180 are positioned between one pair of anode-side electrode assembly 160 and cathode-side electrode assembly 170.

[0058] As described above, the heating device 100 according to the embodiment has an anode-side assembly electrode 160 connected to two or more anode-side lead electrodes 133 of two or more of the heaters 130 among the plurality of heaters 130 of the heating device 100. The heating device 100 according to the embodiment also has a cathode-side assembly electrode 170 connected to two or more cathode-side lead electrodes 134 of two or more of the heaters 130 among the plurality of heaters 130 of the heating device 100. Furthermore, the heating device 100 according to the embodiment has an insulating member 180 positioned between the anode-side assembly electrode 160 and the cathode-side assembly electrode 170.

[0059] The heat generated by the multiple (in this case, six) heaters 130 is transferred to two combined electrodes (anode combined electrode 160 and cathode combined electrode 170) corresponding to each polarity via lead electrodes with different polarities (anode-side lead electrode 133 and cathode-side lead electrode 134). The heat transferred to the two combined electrodes (anode-side combined electrode 160 and cathode-side combined electrode 170) corresponding to each polarity is then transferred to an insulating member 180 located between the two combined electrodes. This reduces the dissipation of heat generated by each heater 130 from the lead electrodes with different polarities of each heater 130. Therefore, the heating device 100 according to this embodiment can improve uniform heating.

[0060] The number of insulating members 180 sandwiched between a pair of anode-side electrode sets 160 and cathode-side electrode sets 170 is not limited to the illustrated example.

[0061] The configurations of the anode-side electrode assembly 160, the cathode-side electrode assembly 170, and the insulating member 180 will be described in more detail below with reference to Figures 6 and 7. Figure 6 is a side view of the heating device 100 according to the embodiment, viewed from the negative X-axis direction. Figure 7 is a cross-sectional view taken along the line VII-VII shown in Figure 6.

[0062] As shown in Figures 6 and 7, the anode-side electrode assembly 160 includes a first metal plate 161, a second metal plate 162, and a plurality of first fixing members 163. The first metal plate 161 and the second metal plate 162 are metal plates with a rectangular cross-section. The first fixing members 163 detachably fix the first metal plate 161 and the second metal plate 162. The first fixing members 163 are, for example, bolts.

[0063] The anode-side electrode assembly 160 is electrically connected to the multiple anode-side lead electrodes 133 by sandwiching the terminal portions 133b of the multiple anode-side lead electrodes 133 between the first metal plate 161 and the second metal plate 162. Specifically, in this embodiment, the first metal plate 161 and the second metal plate 162 extend along the X-axis direction and sandwich a plurality (in this case, six) of terminal portions 133b arranged along the X-axis direction.

[0064] This configuration allows multiple anode-side lead electrodes 133 to be connected in a straight line, thus enabling the shortest possible connection of multiple anode-side lead electrodes 133. Furthermore, even if there are variations in the length of the terminal portion 133b, connection is easy.

[0065] Furthermore, the first metal plate 161 and the second metal plate 162 sandwich the terminal portions 133b of multiple (in this case, six) anode-side lead electrodes 133, leaving a gap between them. This configuration allows the first metal plate 161 and the second metal plate 162 to function as springs. Therefore, according to the heating device 100 of this embodiment, the force that sandwiches the terminal portions 133b can be maintained for a long period of time. In addition, the stress caused by the difference in thermal expansion and contraction between the first metal plate 161 and the second metal plate 162 and the insulating member 180 is relieved by the first metal plate 161 and the second metal plate 162 acting as springs, thereby reducing damage to the insulating member 180.

[0066] Furthermore, the first fixing member 163 fixes the first metal plate 161 and the second metal plate 162 at positions corresponding to the gaps between the terminal portions 133b of the multiple (in this case, six) anode-side lead electrodes 133. This configuration allows the first metal plate 161 and the second metal plate 162 to bend in a direction toward each other, thereby reducing the contact area between the second metal plate 162 and the insulating member 180. Therefore, according to the heating device 100 of this embodiment, the generation of stress caused by the difference in thermal expansion and contraction between the first metal plate 161 and the second metal plate 162 and the insulating member 180 is suppressed, and damage to the insulating member 180 is further reduced.

[0067] Furthermore, the second metal plate 162 is in contact with the insulating member 180. The thickness of the second metal plate 162 is thinner than the thickness of the first metal plate 161. By making the thickness of the second metal plate 162 thinner in this way, the heat transfer properties of the second metal plate 162 are improved, thereby promoting the transfer of heat from the terminal portion 133b of each heater 130 to the insulating member 180 via the second metal plate 162. Therefore, according to the heating device 100 of this embodiment, uniform heating can be further improved. In addition, since the second metal plate 162 is more elastically deformable, the thermal stress acting from the second metal plate 162 to the insulating member 180 can be reduced.

[0068] As shown in Figure 7, multiple (in this case, six) anode-side electrode assemblies 160 are arranged along the Y-axis. As shown in Figure 7, in a plan view taken from a direction perpendicular to the upper surface 110a, which is the heating surface of the heating plate 110, the connection positions between each anode-side electrode assembly 160 and the terminal portion 133b overlap with the upper surface 110a of the heating plate 110. By connecting the anode-side electrode assemblies 160 and the terminal portion 133b within the heating region in this way, heat dissipation from each heater 130 to the outside of the heating device 100 can be reduced compared to, for example, the case where the anode-side electrode assemblies 160 and the terminal portion 133b are connected outside the heating region. Therefore, the heating device 100 according to this embodiment can further improve uniform heating.

[0069] As shown in Figures 6 and 7, the cathode-side electrode assembly 170 includes a third metal plate 171, a fourth metal plate 172, and a plurality of second fixing members 173. The third metal plate 171 and the fourth metal plate 172 are metal plates with a rectangular cross-section. The second fixing members 173 detachably fix the third metal plate 171 and the fourth metal plate 172. The second fixing members 173 are, for example, bolts.

[0070] The cathode-side electrode assembly 170 is electrically connected to the multiple cathode-side lead electrodes 134 by sandwiching the terminal portions 134b of the multiple cathode-side lead electrodes 134 between the third metal plate 171 and the fourth metal plate 172. Specifically, in this embodiment, the third metal plate 171 and the fourth metal plate 172 extend along the X-axis direction and sandwich a plurality (in this case, six) of terminal portions 134b arranged along the X-axis direction.

[0071] This configuration allows multiple cathode-side lead electrodes 134 to be connected in a straight line, thus enabling the shortest possible connection of multiple cathode-side lead electrodes 134. Furthermore, even if there are variations in the length of the terminal portion 134b, connection is easy.

[0072] Furthermore, the third metal plate 171 and the fourth metal plate 172 sandwich the terminal portions 134b of multiple (in this case, six) cathode-side lead electrodes 134, leaving a gap between them. This configuration allows the third metal plate 171 and the fourth metal plate 172 to function as springs. Therefore, according to the heating device 100 of this embodiment, the force that sandwiches the terminal portions 134b can be maintained for a long period of time. In addition, the stress caused by the difference in thermal expansion and contraction between the third metal plate 171 and the fourth metal plate 172 and the insulating member 180 is relieved by the third metal plate 171 and the fourth metal plate 172 acting as springs, thereby reducing damage to the insulating member 180.

[0073] Furthermore, the second fixing member 173 fixes the third metal plate 171 and the fourth metal plate 172 at positions corresponding to the gaps between the terminal portions 134b of the multiple (in this case, six) cathode-side lead electrodes 134. This configuration allows the third metal plate 171 and the fourth metal plate 172 to bend in a direction toward each other, thereby reducing the contact area between the fourth metal plate 172 and the insulating member 180. Therefore, according to the heating device 100 of this embodiment, the generation of stress caused by the difference in thermal expansion and contraction between the third metal plate 171 and the fourth metal plate 172 and the insulating member 180 is reduced, and damage to the insulating member 180 is further reduced.

[0074] Furthermore, the fourth metal plate 172 is in contact with the insulating member 180. The thickness of the fourth metal plate 172 is thinner than the thickness of the third metal plate 171. By making the thickness of the fourth metal plate 172 thinner in this way, the heat transfer properties of the fourth metal plate 172 are improved, thereby promoting the transfer of heat from the terminal portion 133b of each heater 130 to the insulating member 180 via the fourth metal plate 172. Therefore, according to the heating device 100 of this embodiment, uniform heating can be further improved. In addition, since the fourth metal plate 172 is more elastically deformable, the thermal stress acting from the fourth metal plate 172 to the insulating member 180 can be reduced.

[0075] Furthermore, as shown in Figure 7, the terminal portions 133b of adjacent anode lead electrodes 133 and the terminal portions 134b of adjacent cathode lead electrodes 134 are located on opposite sides of each other, separated by an insulating member 180. The first fixing member 163 fixes the first metal plate 161 and the second metal plate 162 at a position closer to the other anode lead electrode than to one of the adjacent anode lead electrodes 133. The second fixing member 173 fixes the third metal plate 171 and the fourth metal plate 172 at a position closer to the other cathode lead electrode than to the one corresponding to the other anode lead electrode among the adjacent cathode lead electrodes 134. With this configuration, the fixing positions of the first metal plate 161 and the second metal plate 162 by the first fixing member 163 and the fixing positions of the third metal plate 171 and the fourth metal plate 172 by the second fixing member 173 are misaligned, causing the contact areas between the metal plates (second metal plate 162 and fourth metal plate 172) and the insulating member 180 to shift. Therefore, according to the heating device 100 of this embodiment, the generation of stress caused by the difference in thermal expansion and contraction between the second metal plate 162 and the fourth metal plate 172 and the insulating member 180 is reduced, and damage to the insulating member 180 is further reduced.

[0076] Furthermore, as shown in Figures 6 and 7, the insulating member 180 is fixed to one of the anode-side manifold electrode 160 and the cathode-side manifold electrode 170 by a fixing member 181, such as a bolt. For example, as shown in Figure 7, the anode-side manifold electrode 160 and the cathode-side manifold electrode 170 extend along the X-axis direction parallel to the upper surface 110a, which is the heating surface of the heating plate 110. The insulating member 180 is cantilevered to one end of the anode-side manifold electrode 160 and the cathode-side manifold electrode 170 in the direction of extension (in this case, the X-axis direction) by the fixing member 181. Specifically, one of the two insulating members 180 sandwiched between the anode-side manifold electrode 160 and the cathode-side manifold electrode 170 is cantilevered to the end of the second metal plate 162 of the anode-side manifold electrode 160 on the negative X-axis side by the fixing member 181. Furthermore, one of the two insulating members 180 sandwiched between the anode-side collective electrode 160 and the cathode-side collective electrode 170 is cantilevered and fixed to the positive X-axis end of the fourth metal plate 172 of the cathode-side collective electrode 170 by a fixing member 181.

[0077] Thus, by fixing the insulating member 180 to either the anode-side electrode assembly 160 or the cathode-side electrode assembly 170, the thermal stress acting on the insulating member 180 can be reduced compared to the case where the insulating member 180 is fixed to both the anode-side electrode assembly 160 and the cathode-side electrode assembly 170. Therefore, according to the heating device 100 of this embodiment, damage to the insulating member 180 is further reduced. Furthermore, since the insulating member 180 is fixed in a cantilevered manner to one end of either the anode-side electrode assembly 160 or the cathode-side electrode assembly 170 in the direction of extension (here, the X-axis direction), the thermal stress acting on the insulating member 180 can be further reduced.

[0078] Furthermore, as shown in Figure 7, the two insulating members 180 sandwiched between the anode-side electrode assembly 160 and the cathode-side electrode assembly 170 are positioned side by side in a direction parallel to the upper surface 110a, which is the heating surface of the heating plate 110 (X-axis direction), between the anode-side electrode assembly 160 and the cathode-side electrode assembly 170. By positioning the two insulating members 180 side by side between the anode-side electrode assembly 160 and the cathode-side electrode assembly 170 in this way, the thermal stress on each insulating member 180 can be reduced compared to the case where only one insulating member 180 is positioned between the anode-side electrode assembly 160 and the cathode-side electrode assembly 170. Therefore, according to the heating device 100 of this embodiment, damage to the insulating members 180 is further reduced.

[0079] In the above explanation, the example shown was that the two insulating members 180 are positioned parallel to the upper surface 110a, which is the heating surface of the heating plate 110 (in the X-axis direction), between the anode-side electrode assembly 160 and the cathode-side electrode assembly 170. However, the arrangement of the insulating members 180 is not limited to this. For example, the two insulating members 180 may be positioned parallel to the upper surface 110a, which is the heating surface of the heating plate 110 (in the Z-axis direction), between the anode-side electrode assembly 160 and the cathode-side electrode assembly 170. Furthermore, the insulating members 180 may not be present at all.

[0080] The configuration of the heater group 30, which has a pair of rod-shaped members (holding bars 122 and 123) and a plurality of heaters 130, will be described in more detail below with reference to Figures 8 to 11.

[0081] Figure 8 is a cross-sectional view of the heater and a pair of rod-shaped members according to the embodiment. Figure 9 is a plan view of the heater group according to the embodiment as seen from the positive Z-axis direction. Figure 10 is a plan view of the heater group according to the embodiment as seen from the negative Z-axis direction. Figure 11 is a cross-sectional view showing the heater group according to the embodiment. Note that in Figure 8 and the other drawings described later, some components of the heater 130 are omitted and shown in a simplified manner.

[0082] As shown in Figures 8 to 11, the retaining bars 122 and 123, which constitute a pair of rod-shaped members, face each other, sandwiching the cover member 132 of the heater 130 from above and below (in the Z-axis direction). The retaining bar 122 is located closer to the positive Z-axis direction where the heater body 131 is located, while the retaining bar 123 is located closer to the negative Z-axis direction where the pair of lead terminals (terminal portions 133b and 134b) of the pair of lead electrodes (anode-side lead electrode 133 and cathode-side lead electrode 134) are located.

[0083] The retaining bar 122 has a first surface 122a, a second surface 122b, a housing portion 122c, and an opening 122d. The first surface 122a is the outer surface (top surface) located at the end on the positive Z-axis side. The second surface 122b is the inner surface located at the end on the negative Z-axis side and is positioned opposite the retaining bar 123. The housing portion 122c is a space for housing a part of the cover member 132, with one end located on the second surface 122b. The opening 122d is a through hole connecting the first surface 122a and the other end of the housing portion 122c, through which the heater body 131 is inserted.

[0084] The retaining bar 123 has a first surface 123a, a second surface 123b, a housing portion 123c, and an opening 123d. The first surface 123a is the outer surface (bottom surface) located at the end on the negative Z-axis side. The second surface 123b is the inner surface located at the end on the positive Z-axis side and is positioned opposite the retaining bar 122. The housing portion 123c is a space for housing a part of the cover member 132, with one end located on the second surface 123b. The opening 123d is a through hole connecting the first surface 123a and the other end of the housing portion 123c, through which a pair of lead terminals (terminal portions 133b, 134b) of a pair of lead electrodes (anode-side lead electrode 133 and cathode-side lead electrode 134) are inserted.

[0085] The retaining bars 122 and 123 hold the heater 130 via the cover member 132, thereby insulating the heater 130 from the heating device 100. As a result, the heating device 100 itself is not energized during heating, and the metal parts are not heated by the current, improving the uniformity of the heating plate 110. In addition, since the heater 130 is held by being sandwiched between the retaining bars 122 and 123, the tip 130a of the heater body 131 is less likely to wobble, making it easier to position the tip 130a of the heater body 131 in the desired position.

[0086] Furthermore, as described above, the retaining bars 122 and 123 face each other in the longitudinal direction (Z-axis direction) of the heater 130 and sandwich the cover member 132 in the vertical direction (Z-axis direction). The cover member 132 may have different temperatures on the heater body 131 side and the lead terminal (terminal portion 133b, 134b) side depending on the energization of the heater 130. The retaining bars 122 and 123 that collectively hold the cover members 132 of each of the multiple heaters 130 constituting the heater group 30 are separated into the heater body 131 side and the lead terminal (terminal portion 133b, 134b) side, which makes it easier for the temperature of each of the retaining bars 122 and 123 to be constant. This improves the uniformity of heating within the plane of the heating surface of the heating plate 110.

[0087] Furthermore, the pair of lead terminals (terminal portions 133b and 134b) are inserted through the opening 123d located on the opposite side of the tip portion 130a of the heater body 131. As a result, the pair of lead electrodes (anode lead electrode 133 and cathode lead electrode 134) and the pair of lead terminals (terminal portions 133b and 134b) are less prone to resistance changes, and stable power can be supplied to multiple heaters 130 over a long period of time, thereby improving uniform heat distribution.

[0088] Furthermore, as shown in Figures 9 and 10, the retaining bars 122 and 123 have oval-shaped housing portions 122c and 123c that are elongated in the Y-axis direction when viewed from the Z direction, corresponding to the outer shape of the cover member 132. The retaining bar 122 also has an oval-shaped opening 122d that is elongated in the Y-axis direction when viewed from the Z direction, corresponding to the heater body 131. Since the pair of retaining bars 122 and 123 have multiple such housing portions 122c and 123c and openings 122d positioned along the X-axis direction, the retaining bars 122 and 123 can align the orientation of the heaters 130 of the heater group 30. Because the heaters 130 can have temperature variations depending on their orientation, aligning the arrangement direction of the heaters 130 can improve the uniformity of heating within the plane of the heating surface of the heating plate 110.

[0089] Furthermore, as shown in Figure 10, the opening 123d of the retaining bar 123 can be made smaller than the housing portion 123c when viewed from the negative Z-axis direction. As a result, as shown in Figure 8, a step is created between the housing portion 123c and the opening 123d, making it easier for the cover member 132 to be fixed in a predetermined position within the housing portion 123c. Therefore, as shown in Figure 11, the heater group 30 held by the retaining bars 122 and 123, which constitute a pair of rod-shaped members, makes it easier for the heater 130 to be positioned in a predetermined position.

[0090] Furthermore, the pair of lead terminals (terminal portions 133b and 134b) are drawn out from an opening 123d that penetrates the retaining bar 123 in the thickness direction. As shown in Figure 10, in a retaining bar 123 having one opening 123d for one heater 130, there is no metal (retaining bar 123) between the lead terminals (terminal portions 133b and 134b), so the lead terminals (terminal portions 133b and 134b) are cooled more easily, and durability is improved.

[0091] Furthermore, the opening 122d can be made smaller than the housing portion 122c when viewed from the positive Z-axis direction. As a result, a step is created between the housing portion 122c and the opening 122d, as shown in Figure 8. With this configuration, heat is less likely to dissipate from the cover member 132 to the surrounding outside air, and the temperatures of adjacent heaters 130 can be equalized via the retaining bars 122 and 123. This is particularly effective, for example, when there is a configuration that provides cooling air around the lead terminals (terminal portions 133b and 134b) of the heater 130. In addition, although the shape of the opening 123d from which the lead terminals (terminal portions 133b and 134b) of the heater 130 are drawn out, as viewed from the negative Z-axis direction, is shown to be smaller than the outer shape of the housing portion 123c, they may be the same. The retaining bars 122 and 123 that hold the circumferential surface of the cover member 132 allow the cover member 132 to be properly held even if the shape of the opening 123d is the same as the outer shape of the housing portion 123c.

[0092] (First variation) Figure 12 is a cross-sectional view showing a heater group according to a first modified example of the embodiment. As shown in Figure 12, the pair of retaining bars 122 and 123 that hold the heater group 30 may be in contact with each other. With this configuration, the cover member 132 is surrounded by the pair of retaining bars 122 and 123, and the temperature of the multiple cover members 132 held by the pair of retaining bars 122 and 123 tends to remain constant. Also, since the contact surfaces of the retaining bars 122 and 123 are at the same temperature, there is no difference in thermal expansion between the retaining bars 122 and 123, and stress is less likely to occur on the contact surfaces of the retaining bars 122 and 123. This improves the durability of the retaining bars 122 and 123.

[0093] (Second variation) Figure 13 is a cross-sectional view showing a heater group according to a second modified example of the embodiment. As shown in Figure 13, there may be gaps g1 and g2 between the cover member 132 and the retaining bars 122 and 123 facing each other in the longitudinal direction (Z-axis direction) of the heater 130.

[0094] The cover member 132 becomes hotter on the heater body 131 side, which is located on the positive Z-axis side, than on the lead terminals (terminal portions 133b, 134b) located on the negative Z-axis side, making it easy for a difference in thermal expansion to occur in the vertical direction (Z-axis direction). By having air gaps g1 and g2 in the vertical direction, stress can be relieved. This improves the durability of the cover member 132. Note that the air gap g1 located between the cover member 132 and the retaining bar 122, and the air gap g2 located between the cover member 132 and the retaining bar 123, may both be present, or only one of them may be present.

[0095] (Third variation) Figure 14 is a cross-sectional view showing a heater group according to a third modified embodiment. As shown in Figure 14, there may be gaps g3 and g4 between the circumferential surface of the cover member 132 and the retaining bars 122 and 123.

[0096] As shown in Figure 14, the heater 130 is arranged along the Z-axis before heating, but when heated, the retaining bars 122 and 123 expand due to thermal expansion and become larger in the planar direction (X-axis direction and / or Y-axis direction), and the positions of the housing portions 122c and 123c may also shift outward. By having air gaps g3 and g4 between the circumferential surface of the cover member 132 and the retaining bars 122 and 123, the stress concentrated on the cover member 132 that fixes the heater body 131 can be relieved, and uniform heating can be maintained over a long period of time.

[0097] (Fourth variation) Figure 15 is a plan view of the heater group according to the fourth modified embodiment, viewed from the negative Z-axis direction. Figure 16 is a cross-sectional view showing the heater group according to the fourth modified embodiment. As shown in Figures 15 and 16, a pair of lead terminals (terminal portions 133b, 134b) may have an insulating member 135 between them. The insulating member 135 is, for example, a plate-shaped member made of insulating ceramic. By having an insulating member 135 between lead terminals (terminal portions 133b, 134b) with different polarities, insulation can be achieved between the lead terminals (terminal portions 133b, 134b), and by making it difficult for temperature differences to occur between the lead terminals (terminal portions 133b, 134b), heat uniformity can be improved.

[0098] The insulating member 135 may be spaced apart from the retaining bar 123. If the insulating member 135 and the retaining bar 123 are spaced apart, for example, stress on the insulating member 135 due to temperature changes in the retaining bar 123 will be less likely to occur, improving the durability of the insulating member 135. The insulating member 135 may also be in contact with the retaining bar 123. This makes it easier to position the insulating member 135, for example.

[0099] (Fifth variation) Figure 17 is a cross-sectional view showing a heater according to a fifth modified example of the embodiment. As shown in Figure 17, the retaining bar 123 does not have to have, for example, the opening 123d shown in Figure 8. In this case, the lead terminals (terminal portions 133b, 134b) can be pulled out from the gap between the retaining bars 122, 123.

[0100] (Sixth variation) Figure 18 is a cross-sectional view showing a heater according to a sixth modified example of the embodiment. Figure 19 is a plan view of the heater group according to the sixth modified example of the embodiment, viewed from the positive Z-axis direction. Figure 20 is a plan view of the heater group according to the sixth modified example of the embodiment, viewed from the negative Z-axis direction.

[0101] As shown in Figures 18 to 20, the retaining bars 126 and 127 that constitute a pair of rod-shaped members differ from the above-described embodiment and its various modifications in that they face each other, sandwiching the cover member 132 of the heater 130 from the horizontal direction (Y-axis direction).

[0102] The retaining bar 126 has a first surface 126a, a second surface 126b, a third surface 126c, a fourth surface 126d, and a housing portion 126e. The first surface 126a is the outer surface (top surface) located at the end on the positive Z-axis side, the second surface 126b is the outer surface (bottom surface) located at the end on the negative Z-axis side, and the third surface 126c is the outer surface (side surface) located at the end on the positive Y-axis side. The fourth surface 126d is the inner surface located at the end on the negative Y-axis side and is positioned opposite the retaining bar 127. The housing portion 126e is a space for housing a part of the cover member 132, and one end is located on the fourth surface 126d.

[0103] The retaining bar 127 has a first surface 127a, a second surface 127b, a third surface 127c, a fourth surface 127d, and a housing portion 127e. The first surface 127a is the outer surface (top surface) located at the end on the positive Z-axis side, the second surface 127b is the outer surface (bottom surface) located at the end on the negative Z-axis side, and the third surface 125c is the outer surface (side surface) located at the end on the positive Y-axis side. The fourth surface 127d is the inner surface located at the end on the positive Y-axis side and is positioned opposite the retaining bar 126. The housing portion 127e is a space for housing a part of the cover member 132, and one end is located on the fourth surface 127d.

[0104] The retaining bars 126 and 127 hold the heater 130 so as to sandwich the circumferential surface of the cover member 132. The heater body 131 is pulled out in the positive Z-axis direction through the gap between the retaining bars 126 and 127, and the lead terminals (terminal parts 133b and 134b) are pulled out in the negative Z-axis direction through the gap between the retaining bars 126 and 127.

[0105] In this modified example, the retaining bars 126 and 127 are shown spaced apart from each other, but they may be in contact.

[0106] Furthermore, in this modified example, the shape of the opening from which the heater body 131 is pulled out, as viewed from the positive Z-axis direction, is shown to be smaller than the outer shape of the housing sections 126e and 127e, but they may be the same. The retaining bars 126 and 127 that hold the circumferential surface of the cover member 132 can properly hold the cover member 132 even if the shape of the opening from which the heater body 131 is pulled out is the same as the outer shape of the housing sections 126e and 127e.

[0107] (Seventh variation) Figure 21 is a plan view of the heater according to the seventh modified embodiment, viewed from the positive Z-axis direction. Figure 22 is a plan view of the heater according to the seventh modified embodiment, viewed from the negative Z-axis direction.

[0108] As shown in Figures 21 and 22, the cover member 132 according to this modified example may have an elliptical outer shape that is elongated in the Y-axis direction when viewed in a plan view from the length direction (Z-axis direction) of the heater 130. The cover member 132 may also have a first elliptical opening 132c and a second opening 132d that are elongated in the Y-axis direction to correspond to its outer shape. In such cases, for example, the shapes of the housing portion 122c and opening 122d shown in Figure 9, and the housing portion 123c and opening 123d shown in Figure 10, can be, for example, elliptical to correspond to the outer shape of the cover member 132.

[0109] (Variation 8) Figure 23 is a plan view of the heater group according to the eighth modified embodiment, viewed from the negative Z-axis direction. The retaining bar 123 that holds the heater group 30 according to this modified embodiment has openings 123d1 and 123d2 that penetrate in the thickness direction. Terminal portion 133b is drawn out from opening 123d1, and terminal portion 134b is drawn out from opening 123d2. Thus, a pair of lead terminals (terminal portions 133b and 134b) corresponding to one heater 130 may be drawn out from different openings 123d1 and 123d2, respectively.

[0110] Further effects and other embodiments can be readily derived by those skilled in the art. Therefore, broader embodiments of this disclosure are not limited to the specific details and representative embodiments expressed and described above. Accordingly, various modifications are possible without departing from the spirit or scope of the overall concept of the invention as defined by the appended claims and their equivalents. [Explanation of Symbols]

[0111] 100 Heating device 110 heating plate 110a top side 110b Bottom side 111 First plate member 111a Bottom side 112 Second plate member 112a Top side 112b Through hole 113 Recess 114 Fixing member 120 Fixtures 120a fixing hole 121 Fixing plate 121a Through hole 122 Holding Bar 123 Holding bar 124 Connecting member 125 Connecting member 130 Heater 130a Tip 130b Proximal end 131 Heater body 131a Heat-generating resistor 131b Wiring 131c wiring 132 Cover component 132a Bonding material 133 Anode-side lead electrode 133a Pad section 133b Terminal section 134 Cathode lead electrode 134a Pad section 134b Terminal section 140 Spacer member 150 Support Plate 151 Columnar member 160 Anode side collective electrode 161 1st metal plate 162 Second metal plate 163 First fixing member 170 Cathode side collective electrode 171 Third metal plate 172 4th metal plate 173 Second fixing member 180 Insulating material 181 Fixing member

Claims

1. A heating plate and Multiple heaters, A pair of rod-shaped members and Equipped with, The heating plate has a heating surface and a plurality of recesses located on the back surface opposite to the heating surface, arranged in a first direction and a second direction that are perpendicular to each other. The plurality of heaters are each located in the plurality of recesses, The heater comprises a heater body and a cover member that surrounds the outer circumferential surface of the heater body. When the plurality of heaters arranged in the first direction along the longitudinal direction of the rod-shaped member are considered a heater group, the heater group is arranged in the second direction, The pair of rod-shaped members face each other, sandwiching the cover member of each of the heaters in the heater group. heating device.

2. The heater has a pair of lead terminals connected to the heater body, The rod-shaped member has an opening on the side opposite to the tip of the heater body through which the pair of lead terminals are inserted. The heating device according to claim 1.

3. The pair of rod-shaped members are facing each other in the longitudinal direction of the heater. The heating device according to claim 1.

4. The pair of rod-shaped members are in contact. The heating device according to claim 3.

5. The heater has a gap between the cover member and the rod-shaped member that are facing each other in the longitudinal direction of the heater. The heating device according to claim 3.

6. There is a gap between the circumferential surface of the cover member and the rod-shaped member. The heating device according to claim 3.

7. The heater has a pair of lead terminals connected to the heater body, The pair of lead terminals are drawn out from an opening that penetrates the rod-shaped member in the thickness direction. The heating device according to claim 1.

8. The heater has a pair of lead terminals connected to the heater body, The pair of lead terminals have an insulating member between them. The heating device according to claim 1.

9. The cover member has an elliptical or oval shape when viewed in a plan view from the longitudinal direction of the heater. The rod-shaped member has a housing portion that corresponds to the outer shape of the cover member. The heating device according to claim 1.

10. The heater has a pair of lead terminals connected to the heater body, The cover member has a first opening from which the heater body is pulled out and a second opening from which the pair of lead terminals are pulled out. The area of ​​the first opening, when viewed from the length direction of the heater, is smaller than that of the second opening. A heating device according to any one of claims 1 to 9.

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