Sensor device

Abstract

This sensor device (100) comprises a plurality of sensor groups (10) which are each composed of a plurality of types of sensors, and a shared sensor placement member (1) on which the plurality of sensor groups (10) are disposed, wherein: the plurality of sensor groups (10) include one or more sensors having the same design and measuring the same type of physical amount; and the sensors having the same design are disposed symmetrically relative to the center of gravity of the sensor placement member (1).

Description

Technical Field

[0001] This invention relates to a sensor device, and particularly to a sensor device including a sensor placement member on which a sensor is arranged.

Background Art

[0002] Conventionally, a sensor device including a sensor placement member on which a sensor is arranged is known. Such a sensor device is disclosed, for example, in Japanese Patent Application Laid-Open No. 2021-67625.

[0003] The inertial measurement device (sensor device) described in Japanese Patent Application Laid-Open No. 2021-67625 includes a printed circuit board (sensor placement member) on which a sensor is provided. The sensor includes a plurality of gyroscopes corresponding to each of the X-axis, Y-axis, and Z-axis that are orthogonal to each other. Here, although not specified in Japanese Patent Application Laid-Open No. 2021-67625, for example, in order to provide a reserve (redundancy) of a sensor set composed of a gyroscope for the X-axis, a gyroscope for the Y-axis, and a gyroscope for the Z-axis, there may be a case where a plurality of the above sensor sets are provided in the sensor device.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In conventional sensor devices, such as those described in Japanese Patent Publication No. 2021-67625, multiple sensor sets are sometimes provided in the sensor device to provide backups (redundancy) of sensor sets, for example, consisting of an X-axis gyroscope, a Y-axis gyroscope, and a Z-axis gyroscope. In this case, it is thought that sensor placement members corresponding to each of the multiple sensor sets are provided separately from each other. This leads to the problem of an increase in the number of parts in the sensor device and an increase in the complexity of the sensor device's structure.

[0006] This invention was made to solve the above-mentioned problems, and one of its objectives is to provide a sensor device that can reduce the number of parts and suppress structural complexity even when multiple sensor sets are provided. [Means for solving the problem]

[0007] To achieve the above objective, a sensor device according to one aspect of this invention comprises: a plurality of sensor sets, each composed of a plurality of types of sensors; a common sensor arrangement member on which the plurality of sensor sets are arranged; and a plurality of control units provided corresponding to each of the plurality of sensor sets, each acquiring the measured values ​​of the plurality of types of sensors in the plurality of sensor sets. The sensor placement component consists of a single article made of a single material. Each sensor set includes at least one sensor of the same design that measures the same type of physical quantity, and the sensors of the same design are arranged symmetrically with respect to the center of gravity of the sensor mounting member.

[0008] A sensor device according to one aspect of this invention includes a common sensor arrangement member on which multiple sensor sets are arranged, as described above. This reduces the number of parts in the sensor device and prevents the structure of the sensor device from becoming more complex compared to a case where each of the multiple sensor sets has a separate sensor arrangement member.

[0009] Furthermore, when multiple sensor placement members are provided, it is necessary to leave gaps between them to prevent interference between the sensor placement members. On the other hand, when multiple sensor sets are placed on a common sensor placement member, the above gaps can be omitted, thereby reducing the mounting (placement) area of ​​the common sensor placement member.

[0010] Furthermore, when sensor placement members corresponding to each of multiple sensor sets are provided separately from each other, positional misalignment may occur between the sensor placement members. In this case, the positional misalignment between sensor sets may become large. Therefore, by placing multiple sensor sets on a common sensor placement member, positional misalignment between sensor sets is prevented, thus suppressing positional misalignment between sensor sets. As a result, differences in detection results between sensor sets caused by the aforementioned positional misalignment can be suppressed.

[0011] In the sensor device according to the first aspect described above, preferably, the sensor placement member has a polyhedral shape, and the sensor placement member is provided with recesses for arranging all sensors symmetrically, and the recesses open in a direction perpendicular to any surface of the sensor placement member. With this configuration, by placing the sensors in the recesses, the amount of protrusion of the sensors from the sensor placement member can be reduced by at least the depth of the recesses. As a result, the sensor device can be made more compact.

[0012] In this case, preferably, each of the multiple sensor sets includes, as sensors arranged symmetrically, a first-axis sensor, a second-axis sensor, and a third-axis sensor corresponding to each of the mutually orthogonal first, second, and third axes, and the sensor arrangement member has a rectangular parallelepiped shape, with all first-axis sensors, all second-axis sensors, and all third-axis sensors arranged in recesses of the sensor arrangement member. With this configuration, by arranging all first-axis sensors, all second-axis sensors, and all third-axis sensors in recesses, the amount of protrusion of the sensors from the sensor arrangement member can be reduced by at least the depth of the recesses. As a result, the sensor device can be made more compact.

[0013] In this case, preferably, the system further includes a control unit, and the first axis sensor, second axis sensor, and third axis sensor included in the plurality of sensor sets include one or more pairs of sensors arranged facing each other. The control unit receives measurement results from both of the paired sensors and performs control to invert the sign of one of the measurement values ​​included in the measurement results, but does not perform control to invert the sign of the other measurement value. With this configuration, even if an abnormality occurs in one of the paired sensors, the detected value of the other sensor can be used.

[0014] In this case, preferably, the first axis sensors are arranged rotationally symmetrically with respect to an axis passing through the center of gravity of the sensor mounting member and extending in a predetermined direction, the second axis sensors are arranged rotationally symmetrically with respect to an axis passing through the center of gravity of the sensor mounting member and extending in a predetermined direction, and the third axis sensors are arranged rotationally symmetrically with respect to an axis passing through the center of gravity of the sensor mounting member and extending in a predetermined direction. With this configuration, the absolute values ​​of the detection values ​​of the first axis sensors can be made the same, so even if a malfunction occurs in one of the first axis sensors, the detection value of the other first axis sensor can be used. The second axis sensors and third axis sensors also provide the same effect as the first axis sensors.

[0015] In a sensor device in which the above-mentioned sensors are arranged rotationally symmetrically with respect to an axis, preferably, the axis extends perpendicularly to the bottom surface of the sensor mounting member. With this configuration, the first axis sensors can be easily arranged axially symmetrically with respect to an axis extending perpendicularly to the bottom surface of the sensor mounting member. The second axis sensor and the third axis sensor also have the same effect as the first axis sensor.

[0016] In this case, preferably, a pair of first-axis sensors are arranged on each of a pair of first surfaces of a sensor mounting member that are opposite to each other, a pair of second-axis sensors are arranged on each of a pair of second surfaces of a sensor mounting member that are opposite to each other, and a pair of third-axis sensors are arranged on a common third surface of the sensor mounting member. With this configuration, the area of ​​the first surface (second surface) can be easily reduced compared to the case where the first-axis sensors are provided on a common first surface (or the second-axis sensors are provided on a common second surface). As a result, the sensor mounting member (sensor device) can be easily miniaturized. Also, unlike the case where a pair of third-axis sensors are arranged on each of the opposite surfaces of the sensor mounting member, no sensors are provided on the surface opposite the third surface. As a result, components other than sensors (such as substrates or wiring) can be easily provided on the surface opposite the third surface. In this way, the sensor mounting member (sensor device) can be miniaturized while components other than sensors (such as substrates or wiring) can be easily provided on the sensor mounting member.

[0017] In this case, preferably, the centerlines along the depth direction of the recesses for the first axis sensors, the recesses for the second axis sensors, and the recesses for the third axis sensors of the multiple sensor sets that open on the surface of the sensor arrangement member do not coincide with each other but extend parallel to each other.

[0018] In the sensor device according to the above first aspect, preferably, the first-axis sensor, the second-axis sensor, and the third-axis sensor are gyroscopes. Here, a gyroscope is a relatively large sensor compared to, for example, an acceleration sensor. Therefore, when sensor arrangement members corresponding to each of a plurality of sensor sets are provided separately from each other, a plurality of relatively large sensor arrangement members are provided. Thus, when the sensor includes a gyroscope, arranging a plurality of sensor sets on a common sensor arrangement member to suppress an increase in the number of sensor arrangement members is particularly effective in downsizing the sensor device.

Advantages of the Invention

[0019] According to the present invention, as described above, even when a plurality of sensor sets are provided, it is possible to reduce the number of components of the sensor device and suppress the complication of the structure of the sensor device.

Brief Description of the Drawings

[0020] [Figure 1] It is an exploded perspective view showing the whole sensor device according to one embodiment. [Figure 2] It is an exploded perspective view showing a sensor mount, a control board, and a power supply board according to one embodiment. [Figure 3] It is an exploded perspective view showing a sensor mount, a gyroscope, and a plate member according to one embodiment. [Figure 4] It is a perspective view of a sensor mount according to one embodiment seen obliquely from below. [Figure 5] It is a block diagram showing the configuration of a sensor device according to one embodiment. [Figure 6] It is a schematic cross-sectional view showing the relationship between connection wiring and a notch according to one embodiment. [Figure 7] It is a perspective view showing the configuration of a gyroscope according to one embodiment.

Modes for Carrying Out the Invention

[0021] Embodiments of the present invention will be described below with reference to the drawings.

[0022] First, a sensor device 100 according to one embodiment will be described with reference to Figures 1 to 7.

[0023] (Overall configuration of the sensor device) As shown in Figure 1, the sensor device 100 comprises a sensor mount 1, a gyroscope 2 (see Figure 3), a base member 3, a cover member 4, a power supply board 5, a control board 6, and a plate member 7. The sensor mount 1 and the gyroscope 2 are examples of the "sensor placement member" and "sensor" as defined in the claims.

[0024] Furthermore, the sensor mount 1 is equipped with two connectors 8 for connecting the power supply board 5 to an external power supply (not shown) and for transmitting and receiving signals. The connectors 8 and the power supply board 5 are connected by a flexible cable 8a. The flexible cable 8a is provided on the sensor device 100 in a bent state. Either an FPC (Flexible Printed Circuit) or an FFC (Flexible Flat Cable) can be used as the flexible cable 8a.

[0025] As shown in Figure 2, the sensor mount 1 has a polyhedral shape. Specifically, the sensor mount 1 has a rectangular parallelepiped shape. The sensor mount 1 also includes a pair of X-axis surfaces 1x extending perpendicular to the X-axis, a pair of Y-axis surfaces 1y extending perpendicular to the Y-axis, and a pair of Z-axis surfaces 1z extending perpendicular to the Z-axis. The X-axis surface 1x is an example of the "first surface" and "pair of surfaces" in the claim. The Y-axis surface 1y is an example of the "second surface" and "pair of surfaces" in the claim. The Z-axis surface 1z on the Z2 side of the pair of Z-axis surfaces 1z is an example of the "third surface" and "bottom surface" in the claim. The X-axis is an example of the "first axis" in the claim. The Y-axis is an example of the "second axis" in the claim. The Z-axis is an example of the "third axis" in the claim. In this embodiment, the Z-axis is an axis extending along the vertical direction.

[0026] The sensor mount 1 is provided on each of a pair of Y-axis planes 1y and includes a plurality of Y-axis protrusions 1a that protrude from the Y-axis planes 1y. A Y-axis control board 6y, which will be described later, is connected (fastened) to the Y-axis protrusions 1a.

[0027] Furthermore, the sensor mount 1 is provided on the Z-axis surface 1z on the Z1 side and includes a plurality of Z-axis protrusions 1b that protrude from the Z-axis surface 1z. The power supply board 5 is connected (fastened) to the Z-axis protrusions 1b. The sensor mount 1 is also provided on the Z-axis surface 1z on the Z1 side and includes a plurality of Z-axis protrusions 1c that protrude from the Z-axis surface 1z. The amount of protrusion of the Z-axis protrusions 1c is smaller than the amount of protrusion of the Z-axis protrusions 1b. The Z-axis control board 6z, which will be described later, is connected (fastened) to the Z-axis protrusions 1c.

[0028] Furthermore, the sensor mount 1 is made of metal. Specifically, the sensor mount 1 is made of a non-magnetic metal (for example, an aluminum alloy). In other words, the sensor mount 1 shields against electromagnetic noise (magnetic flux).

[0029] Furthermore, the sensor mount 1 is fixed to the base member 3 by fastening it to the base member 3 with screws or the like (not shown).

[0030] As shown in Figure 1, the cover member 4 is provided to cover the sensor mount 1. Specifically, the cover member 4 has a box shape that accommodates the sensor mount 1. Specifically, the sensor mount 1 is housed in a housing space formed by the cover member 4 and the base member 3. That is, the cover member 4, the base member 3 and the connector 8 cover the sensor mount 1 and the parts fixed to the sensor mount 1 so that the sensor mount 1 is not exposed. Alternatively, the sensor mount 1 may be covered by the cover member 4 and the base member 3 without the notch portion 4c described later, so that the sensor mount 1 is not exposed.

[0031] The cover member 4 is made of metal. Specifically, the cover member 4 is made of a non-magnetic metal (for example, an aluminum alloy). In other words, the cover member 4 shields against electromagnetic noise (magnetic flux).

[0032] The cover member 4 is fastened to the base member 3. Specifically, the end of the cover member 4 on the base member 3 side (Z2 side) is provided with a flange portion 4a that makes surface contact with the base member 3. The cover member 4 is fixed to the base member 3 by fastening the flange portion 4a to the base member 3 with screws 4b or the like. The cover member 4 is also provided with two notches 4c to expose the two connectors 8. The flange portion 4a of the cover member 4 is in contact with the Z1 side surface 3a of the base member 3. A gasket is provided at the interface between the connectors 8 and the notches 4c of the cover member 4 to block electromagnetic noise. The gasket is made of a conductive material.

[0033] Furthermore, the sensor device 100 includes a pair of sensor sets 10. Each sensor set 10 consists of a gyroscope 2 (one of the sensor sets 10 described later), an acceleration sensor 9, a power supply circuit 5b, and a control board 6 (control circuit 6b). The pair of sensor sets 10 have the same configuration as each other. The pair of sensor sets 10 are arranged side by side in the Y direction.

[0034] As shown in Figure 2, the control board 6 includes an X-axis control board 6x, a Y-axis control board 6y, and a Z-axis control board 6z. The X-axis control board 6x and the Y-axis control board 6y, and the Y-axis control board 6y and the Z-axis control board 6z are each connected by wiring 6a.

[0035] A pair of X-axis control boards 6x are mounted on each of the pair of X-axis surfaces 1x of the sensor mount 1. A pair of Y-axis control boards 6y are mounted on each of the pair of Y-axis surfaces 1y of the sensor mount 1. Each of the Z-axis control boards 6z of the pair of sensor sets 10 is mounted on the Z1 side of the pair of Z-axis surfaces 1z of the sensor mount 1. The two Z-axis control boards 6z mounted on the Z-axis surfaces 1z are arranged side by side along the Y direction.

[0036] Furthermore, the X-axis control board 6x on the X1 side is located on the Y1 side of the X-axis plane 1x on the X1 side. Similarly, the X-axis control board 6x on the X2 side is located on the Y2 side of the X-axis plane 1x on the X2 side.

[0037] Furthermore, the control board 6 is equipped with a microcontroller and power supply (not shown). The control board 6 is also equipped with an acceleration sensor 9. Note that the acceleration sensor 9 is schematically shown in Figure 2.

[0038] The power supply board 5 is positioned to cover the two Z-axis control boards 6z from the Z1 side. The power supply board 5 is connected to the control board 6 (to each of the pair of Y-axis control boards 6y) by wiring 5a. Specifically, the power supply board 5 includes a power supply circuit 5b (see Figure 5) that supplies power to the control circuit 6b (see Figure 5) provided on the control board 6 via wiring 5a. The power supply circuit 5b also supplies power to the gyroscope 2 and the accelerometer 9. The power supply circuit 5b and the control circuit 6b are provided on each of the pair of sensor sets 10. The control circuit 6b also receives information (detected values) from the gyroscope 2 and the accelerometer 9, etc.

[0039] As shown in Figure 3, multiple gyroscopes 2 are arranged on a sensor mount 1. The sensor mount 1 includes multiple recesses 11 on which the multiple gyroscopes 2 are arranged. Specifically, the recesses 11 are provided on each of the pair of X-axis planes 1x, the pair of Y-axis planes 1y, and the Z-axis plane 1z on the Z2 side of the sensor mount 1. One recess 11 is provided on each of the pair of X-axis planes 1x. Also, one recess 11 is provided on each of the pair of Y-axis planes 1y. Furthermore, as shown in Figure 4, two recesses 11 are provided on the Z-axis plane 1z on the Z2 side. The two recesses 11 on the Z-axis plane 1z are arranged side by side along the Y direction (see Figure 4). Also, the recesses 11 open in a direction perpendicular to any surface of the sensor mount 1. Specifically, the recesses 11 provided on the X-axis plane 1x open in a direction perpendicular to the X-axis plane 1x. The recess 11 provided on the Y-axis plane 1y opens in a direction perpendicular to the Y-axis plane 1y. The recess 11 provided on the Z-axis plane 1z opens in a direction perpendicular to the Z-axis plane 1z.

[0040] Each of the multiple gyroscopes 2 is housed within the recess 11. Specifically, the gyroscopes 2 are housed within the recess 11 so as not to protrude from the open end 11a of the recess 11.

[0041] Furthermore, the gyroscope 2 is fixed to the recess 11 by fastening screws 2a, which are provided at the four corners of the gyroscope 2, into screw insertion holes 11b provided in the recess 11.

[0042] Gyroscope 2 includes an X-axis gyroscope 2x, a Y-axis gyroscope 2y, and a Z-axis gyroscope 2z, corresponding to the mutually orthogonal X, Y, and Z axes, respectively. Two of each of the X-axis gyroscope 2x, Y-axis gyroscope 2y, and Z-axis gyroscope 2z are provided. That is, multiple sensor sets 10 consisting of an X-axis gyroscope 2x, a Y-axis gyroscope 2y, and a Z-axis gyroscope 2z are provided. Specifically, a pair of sensor sets 10 are provided. One of the pair of sensor sets 10 is provided as a spare (redundancy) for the other sensor set 10. The X-axis gyroscope 2x is an example of the "first axis sensor" in the claims. The Y-axis gyroscope 2y is an example of the "second axis sensor" in the claims. The Z-axis gyroscope 2z is an example of the "third axis sensor" in the claims.

[0043] In this embodiment, each sensor group 10 includes at least one sensor that measures the same type of physical quantity. Specifically, each sensor group 10 includes an X-axis gyroscope 2x, a Y-axis gyroscope 2y, and a Z-axis gyroscope 2z that measure angular velocity. Furthermore, each sensor group 10 includes at least one sensor of the same design that measures the same type of physical quantity. Specifically, each sensor group 10 includes an X-axis gyroscope 2x, a Y-axis gyroscope 2y, and a Z-axis gyroscope 2z that are all of the same design. Note that "same design" means that the configurations of the X-axis gyroscope 2x, Y-axis gyroscope 2y, and Z-axis gyroscope 2z are exactly the same. In other words, the X-axis gyroscope 2x, Y-axis gyroscope 2y, and Z-axis gyroscope 2z consist of identical sensors.

[0044] Furthermore, in this embodiment, as shown in Figure 4, the centerlines along the depth direction of the recesses 11 for the X-axis gyroscope 2x, the Y-axis gyroscope 2y, and the Z-axis gyroscope 2z of the multiple sensor sets 10 that open on the surface of the sensor mount 1 do not coincide with each other and extend parallel to each other. Specifically, the centerlines βx1 and βx2 along the depth direction of the recesses 11 of the X-axis gyroscope 2x do not coincide with each other and extend parallel to each other. The centerlines βy1 and βy2 along the depth direction of the recesses 11 of the Y-axis gyroscope 2y do not coincide with each other and extend parallel to each other. The centerlines βz1 and βz2 along the depth direction of the recesses 11 of the Z-axis gyroscope 2z do not coincide with each other and extend parallel to each other.

[0045] Furthermore, in this embodiment, the pair of sensor sets 10 are arranged on a common sensor mount 1. That is, the sensor device 100 is provided with a single sensor mount 1 on which the pair of sensor sets 10 are commonly arranged.

[0046] In this embodiment, each of the pairs of X-axis gyroscopes 2x, the pair of Y-axis gyroscopes 2y, and the pair of Z-axis gyroscopes 2z is arranged symmetrically with respect to the center of gravity of the sensor mount 1. Specifically, the pairs of X-axis gyroscopes 2x are arranged rotationally symmetrically with respect to an axis α that passes through the center of gravity of the sensor mount 1 and extends along the Z-axis. Similarly, the pairs of Y-axis gyroscopes 2y are arranged rotationally symmetrically with respect to an axis α that passes through the center of gravity of the sensor mount 1 and extends along the Z-axis. Furthermore, the pairs of Z-axis gyroscopes 2z are arranged rotationally symmetrically with respect to an axis α that passes through the center of gravity of the sensor mount 1 and extends along the Z-axis. As a result, the absolute values ​​of the detected values ​​of each pair of sensor sets 10 are the same. This eliminates the need to provide an interface board that performs calculations based on the detected values ​​of each of the pair of sensor sets 10. Furthermore, since multiple X-axis gyroscopes 2x (multiple Y-axis gyroscopes 2y, and multiple Z-axis gyroscopes 2z) do not interfere with each other, and multiple sensor sets 10 can be placed close together, the overall size of the sensor device 100 can be reduced. The sensor mount 1 has a shape that is rotationally symmetric with respect to axis α. Axis α extends perpendicularly to the Z-axis plane 1z of the sensor mount 1. In addition, "rotational symmetry" is a broad concept that includes not only perfect rotational symmetry but also rotational symmetry with a small error in the range where the absolute values ​​of the detected values ​​of the pair of sensor sets 10 are the same. That is, in a sensor mount 1 that has a shape that is rotationally symmetric with respect to axis α, each of the pair of X-axis gyroscopes 2x, the pair of Y-axis gyroscopes 2y, and the pair of Z-axis gyroscopes 2z may be arranged asymmetrically with respect to axis α to the extent that it does not affect the detected values ​​of the pair of sensor sets 10.

[0047] In detail, the pair of X-axis gyroscopes 2x are positioned at the same height relative to each other in the Z direction. Furthermore, the pair of X-axis gyroscopes 2x are positioned offset from each other in the Y direction. Specifically, the X-axis gyroscope 2x on the X1 side is positioned in a recess 11 on the Y2 side of the X-axis plane 1x on the X1 side. Similarly, the X-axis gyroscope 2x on the X2 side is positioned in a recess 11 on the Y1 side of the X-axis plane 1x on the X2 side.

[0048] Furthermore, the pair of Y-axis gyroscopes 2y are positioned at the same height relative to each other in the Z direction. In addition, the pair of Y-axis gyroscopes 2y are positioned offset from each other in the X direction. Specifically, the Y-axis gyroscope 2y on the Y1 side is positioned in a recess 11 provided on the X1 side of the Y-axis plane 1y on the Y1 side. The Y-axis gyroscope 2y on the Y2 side is positioned in a recess 11 provided on the X2 side of the Y-axis plane 1y on the Y2 side.

[0049] Furthermore, the pair of Z-axis gyroscopes 2z are positioned at the same height relative to each other in the Z direction. In addition, the pair of Z-axis gyroscopes 2z are positioned offset from each other in the X direction. The Z-axis gyroscope 2z on the Y1 side is positioned in a recess 11 located on the Z-axis plane 1z on the Z2 side, closer to the X1 side. The Z-axis gyroscope 2z on the Y2 side is positioned in a recess 11 located on the Z-axis plane 1z on the Z2 side, closer to the X2 side.

[0050] Furthermore, because the pair of sensor sets 10 are arranged rotationally symmetrically with respect to each other, the positive and negative signs of the detected values ​​of the pair of sensor sets 10 are reversed. The control board 6 (control circuit 6b) adjusts so that the detected values ​​of the pair of sensor sets 10 are either positive or negative. Specifically, the control circuit 6b receives measurement results from both of the pair of gyroscopes 2, and performs control to reverse the positive and negative signs of one of the measured values ​​included in the measurement results, while not performing control to reverse the positive and negative signs of the other measured value. In addition, because the pair of sensor sets 10 are arranged rotationally symmetrically with respect to each other, it is possible to make the configuration of the pair of control boards 6 common. That is, the pair of control boards 6 have a common configuration in that they are composed of an X-axis control board 6x, a Y-axis control board 6y, and a Z-axis control board 6z. The control circuit 6b is an example of a "control unit" within the scope of the claims.

[0051] In this embodiment, the pair of X-axis gyroscopes 2x are positioned in the recesses 11 of each of the pair of X-axis planes 1x that are located opposite each other. The pair of Y-axis gyroscopes 2y are positioned in the recesses 11 of the pair of Y-axis planes 1y that are located opposite each other. In other words, one gyroscope 2 (2x, 2y) is positioned on each of the four sides (1x, 1y) of the sensor mount 1.

[0052] Furthermore, the Z-axis gyroscope 2z is positioned in each of the two recesses 11 provided on the Z-axis plane 1z on the Z2 side. Note that there are no recesses 11 on the Z-axis plane 1z on the Z1 side.

[0053] Furthermore, the plate member 7 is provided between the recess 11 and the cover member 4, and is positioned to cover the recess 11 so that the gyroscope 2, which is located in the recess 11 of the sensor mount 1, is not exposed. Specifically, the plate member 7 is provided so as to overlap the entire recess 11. The plate member 7 is fixed to the sensor mount 1 by inserting screws 7a, which are provided at the four corners of the plate member 7, into screw insertion holes 11c provided on the outside of the recess 11.

[0054] Furthermore, the plate member 7 shields against electromagnetic noise. Specifically, the plate member 7 is made of metal. More specifically, the plate member 7 is formed from a non-magnetic metal (for example, an aluminum alloy).

[0055] Furthermore, the plate member 7 has a plate-like shape that is positioned along each of the pair of X-axis surfaces 1x or the pair of Y-axis surfaces 1y of the sensor mount 1. Specifically, the plate member 7 is formed in a square shape. The plate member 7 is attached to the Y2 side of the X-axis surface 1x on the X1 side, which is formed in a rectangular shape. The plate member 7 is also attached to the Y1 side of the X-axis surface 1x on the X2 side, which is formed in a rectangular shape.

[0056] Furthermore, the plate member 7 includes an X-axis plate member 7x that covers a recess 11 provided on the X-axis plane 1x, and a Y-axis plate member 7y that covers a recess 11 provided on the Y-axis plane 1y. The X-axis plate member 7x is arranged alongside the X-axis control board 6x in the Y direction without overlapping with the X-axis control board 6x (see Figure 1). The Y-axis plate member 7y is arranged to overlap with the Y-axis control board 6y (see Figures 1 and 2).

[0057] The Y-axis plate member 7y is provided with multiple notches 7b to avoid the Y-axis projection 1a of the sensor mount 1. The X-axis plate member 7x does not have any notches.

[0058] Furthermore, the base member 3 (see Figure 1) is provided to cover the recess 11 (see Figure 4) located on the Z-axis surface 1z on the Z2 side. Specifically, the base member 3 is provided to cover the entire surface of the Z-axis surface 1z on the Z2 side. In other words, the two recesses 11 where the two Z-axis gyroscopes 2z are located are covered by a common (single) base member 3 on the Z-axis surface 1z.

[0059] Furthermore, the base member 3 shields against electromagnetic noise. Specifically, the base member 3 is made of metal. More specifically, the base member 3 is formed from a non-magnetic metal (for example, an aluminum alloy). That is, the cover member 4, the plate member 7, the sensor mount 1, and the base member 3 are all made from the same material.

[0060] Furthermore, the thickness t1 of the base member 3 (see Figure 1) is greater than the thickness t2 of the cover member 4 (see Figure 1). Specifically, the thickness t1 of the base member 3 is more than twice (for example, three times) the thickness t2 of the cover member 4.

[0061] Furthermore, the thickness t1 of the base member 3 (see Figure 1) is greater than the thickness t3 of the plate member 7 (see Figure 3). Specifically, the thickness t1 of the base member 3 is more than twice (for example, three times) the thickness t3 of the plate member 7. Note that no plate member is placed between the base member 3 and the Z-axis gyroscope 2z to shield against electromagnetic noise. In other words, the base member 3 and the Z-axis gyroscope 2z are positioned facing each other without a plate member in between. Electromagnetic noise is shielded to the Z-axis gyroscope 2z by being surrounded by the recess 11 and the base member 3.

[0062] Furthermore, the gyroscope 2 (2x~2z) includes a sensor body 2b and a connecting wire 2c that connects the sensor body 2b to the control board 6 (Y-axis control board 6y). The gyroscope 2 and the control board 6 (Y-axis control board 6y), which are included in the common sensor set 10, are connected by the connecting wire 2c.

[0063] The recess 11 of the sensor mount 1 is provided with a notch 11d for pulling out the connecting wiring 2c. The notch 11d is provided at the open end 11a of the recess 11. That is, the connecting wiring 2c is pulled out through the notch 11d when the recess 11 is covered by the plate member 7 (base member 3) (see Figure 6). The notch 11d may be provided in the plate member 7, or in both the recess 11 and the plate member 7.

[0064] As shown in Figure 6, the connecting wire 2c has a thickness t3 (for example, 0.8 mm). The notch 11d has a depth h (for example, 1 mm) that is greater than the thickness t3. The connecting wire 2c also has a width W1. The notch 11d also has a width W2 that is greater than the width W1. Note that multiple notches 11d are all the same size.

[0065] Furthermore, the connection wiring 2c of the gyroscope 2 includes a flexible cable. That is, the connection wiring 2c is flexible (flexible). The connection wiring 2c is made of, for example, polyimide. Because the connection wiring 2c includes a flexible cable, even if vibration occurs, the flexible cable can absorb the shock. As a result, it is possible to suppress the disconnection of the connection wiring 2c and the control board 6. Also, because the connection wiring 2c includes a flexible cable, it is possible to bend the connection wiring 2c at an angle that makes it easy to pull out from the notch 11d within the recess 11. This makes it possible to easily pull out the connection wiring 2c from the notch 11d even if the clearance between the notch 11d and the connection wiring 2c is reduced. By reducing the above clearance, it is possible to widen the frequency range of electromagnetic noise shielded by the plate member 7 and the base member 3 (increase the upper limit on the high frequency side).

[0066] In each of the pair of sensor sets 10, the connecting wires 2c extending from the X-axis gyroscope 2x, the Y-axis gyroscope 2y, and the Z-axis gyroscope 2z are connected to the Y-axis control board 6y in a bent (flexible) state.

[0067] Furthermore, as shown in Figure 7, the gyroscope 2 includes a rigid-flex substrate. A rigid-flex substrate refers to a substrate that includes a rigid part and a flexible part. The sensor body 2b includes two rigid parts 2d and a flexible part 2e that connects the rigid parts 2d. The two rigid parts 2d are arranged to face each other by bending the flexible part 2e. The connecting wire 2c is derived from one of the two rigid parts 2d. The flexible part 2e is made of the same material as the connecting wire 2c (i.e., polyimide).

[0068] Furthermore, the sensor body 2b includes a spacer member 2f provided between a pair of rigid parts 2d arranged to face each other. The spacer member 2f creates a predetermined space between the two rigid parts 2d. The spacer member 2f is provided at the four corners of the rectangular (square) rigid part 2d. The spacer member 2f also has a cylindrical shape. The screw 2a is provided so as to pass through the cylindrical spacer member 2f. Note that the dotted line in Figure 7 indicates the sensor head 2g. The sensor head 2g is, for example, an electromagnetic type using MEMS technology. Alternatively, the sensor head 2g may be piezoelectric or electrostatic.

[0069] (Effects of this embodiment) In this embodiment, the following effects can be obtained.

[0070] In this embodiment, the sensor device 100 is configured to include a common sensor mount 1 on which multiple sensor sets 10 are arranged, as described above. This reduces the number of parts in the sensor device 100 and prevents the structure of the sensor device 100 from becoming more complex compared to the case where each of the multiple sensor sets 10 has a separate sensor mount 1.

[0071] Furthermore, when multiple sensor mounts 1 are provided, it is necessary to leave gaps between them to prevent interference between the sensor mounts 1. On the other hand, when multiple sensor sets 10 are arranged on a common sensor mount 1, the above gaps can be omitted, thereby reducing the mounting (arrangement) area of ​​the common sensor mount 1.

[0072] Furthermore, if each of the multiple sensor sets 10 has a separate sensor mount 1, misalignment may occur between the sensor mounts 1. In this case, the misalignment between the sensor sets 10 may become large. Therefore, by arranging the multiple sensor sets 10 on a common sensor mount 1, misalignment between the sensor mounts 1 is prevented, thus suppressing misalignment between the sensor sets 10. As a result, differences in detection results between the sensor sets 10 caused by the aforementioned misalignment can be suppressed.

[0073] In this embodiment, as described above, the sensor mount 1 has a polyhedral shape, and the sensor mount 1 is provided with recesses 11 for arranging all sensors symmetrically, and the recesses 11 open in a direction perpendicular to one of the surfaces of the sensor mount 1. As a result, by arranging the gyroscope 2 in the recesses 11, the amount of protrusion of the gyroscope 2 from the sensor mount 1 can be reduced by at least the depth of the recesses 11. Consequently, the sensor device 100 can be made more compact.

[0074] In this embodiment, as described above, all X-axis gyroscopes 2x, all Y-axis gyroscopes 2y, and all Z-axis gyroscopes 2z are arranged in the recesses 11 of the sensor mount 1. By arranging all the gyroscopes 2 in the recesses 11, the amount of protrusion of the gyroscopes 2 from the sensor mount 1 can be reduced by at least the depth of the recesses 11. As a result, the sensor device 100 can be made more compact.

[0075] In this embodiment, as described above, the control circuit 6b receives measurement results from both of the pair of gyroscopes 2, and performs a control to invert the sign of one of the measurement values ​​included in the measurement results, while not performing a control to invert the sign of the other measurement value. As a result, even if an abnormality occurs in one of the pair of gyroscopes 2, the detected value of the other gyroscope 2 can be used.

[0076] In this embodiment, as described above, the sensor device 100 is configured such that the X-axis gyroscopes 2x (Y-axis gyroscopes 2y and Z-axis gyroscopes 2z of the same design) are arranged rotationally symmetrically with respect to an axis α that passes through the center of gravity of the sensor mount 1 and extends in a predetermined direction. This makes it possible to make the absolute values ​​of the detected values ​​of the X-axis gyroscopes 2x the same, so that even if an abnormality occurs in one of the X-axis gyroscopes 2x, the detected value of the other X-axis gyroscope 2x can be used. The same effect is obtained for the Y-axis gyroscope 2y and Z-axis gyroscope 2z as for the X-axis gyroscope 2x.

[0077] In this embodiment, as described above, the axis α extends perpendicularly to the Z-axis plane 1z of the sensor mount 1. This allows the X-axis gyroscope 2x to be easily positioned axially symmetrically with respect to the axis α that extends perpendicularly to the Z-axis plane 1z of the sensor mount 1. The Y-axis gyroscope 2y and the Z-axis gyroscope 2z have the same effect as the X-axis gyroscope 2x.

[0078] In this embodiment, as described above, the pair of X-axis gyroscopes 2x are arranged on each of the pair of X-axis surfaces 1x of the sensor mount 1 which are located on opposite sides of each other, the pair of Y-axis gyroscopes 2y are arranged on each of the pair of Y-axis surfaces 1y of the sensor mounting members which are located on opposite sides of each other, and the pair of Z-axis gyroscopes 2z are arranged on the common Z-axis surface 1z of the sensor mount 1. This makes it easy to reduce the area of ​​each of the pair of X-axis surfaces 1x on which the pair of X-axis gyroscopes 2x are arranged, and the pair of Y-axis surfaces 1y on which the pair of Y-axis gyroscopes 2y are arranged, compared to the case where all pairs of X-axis gyroscopes 2x, Y-axis gyroscopes 2y, and Z-axis gyroscopes 2z are arranged on a common surface. As a result, the sensor mount 1 (sensor device 100) can be easily miniaturized. Also, unlike the case where the pair of Z-axis gyroscopes 2z are arranged on each of the opposite sides of the sensor mount 1, no gyroscopes 2 are arranged on the surface opposite to the Z-axis surface 1z. As a result, components other than the gyroscope 2 (such as a circuit board or wiring) can be easily placed on the opposite side of the Z-axis plane 1z. This allows for miniaturization of the sensor mount 1 (sensor device 100) while easily arranging components other than the gyroscope 2 (such as a circuit board or wiring) on ​​the sensor mount 1.

[0079] In this embodiment, the sensor device 100 is configured such that the sensor includes a gyroscope 2, as described above. Here, the gyroscope 2 is a relatively large sensor compared to, for example, an acceleration sensor. Therefore, if a sensor mount 1 corresponding to each of the multiple sensor sets 10 is provided separately, multiple relatively large sensor mounts 1 will be provided. Consequently, when the sensor includes a gyroscope 2, the increase in the number of sensor mounts 1 is suppressed by arranging the multiple sensor sets 10 on a common sensor mount 1, which is particularly effective in miniaturizing the sensor device 100.

[0080] [Differentiation] It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of the present invention is indicated by the claims rather than by the description of the embodiments above, and further includes all modifications (exceptions) within the meaning and scope of the claims.

[0081] For example, the above embodiment shows an example in which a pair of sensor sets 10 are arranged on a common sensor mount 1 (sensor mounting member), but the present invention is not limited to this. Three or more sensor sets 10 may be arranged on the sensor mount 1.

[0082] Furthermore, although the above embodiment shows an example in which multiple sensor sets 10, each composed of multiple types of gyroscopes 2 (sensors), are arranged on the sensor mount 1, the present invention is not limited to this. For example, multiple sensor sets 10, each composed of sensors other than gyroscopes 2 (for example, acceleration sensors 9 or temperature sensors), may be arranged on the sensor mount 1.

[0083] Furthermore, although the above embodiment shows an example in which one gyroscope 2 measures a physical quantity acting in one direction, the present invention is not limited to this. For example, one gyroscope 2 may be capable of measuring physical quantities acting in multiple directions.

[0084] Furthermore, although the above embodiment shows an example in which one gyroscope 2 is placed in one recess 11, the present invention is not limited to this. For example, multiple gyroscopes 2 may be placed in one recess 11.

[0085] Furthermore, although the above embodiment shows an example in which the sensor mount 1 (sensor placement member), plate member 7, and base member 3 are each made of metal, the present invention is not limited to this. For example, at least one of the sensor mount 1, plate member 7, and base member 3 may be made of non-magnetic ceramic or non-magnetic resin. However, from the viewpoint of heat dissipation, it is preferable that the sensor mount 1, plate member 7, and base member 3 are made of metal.

[0086] Furthermore, although the above embodiment shows an example where the sensor mount 1, plate member 7, and base member 3 are separate parts, two or more of these parts may be integrated. Also, the sensor mount 1 may be composed of two or more parts, as long as there are no problems with the placement accuracy of the gyroscopes 2 within the sensor assembly 10, or the gyroscopes 2 included in the sensor assembly 10. Similarly, the plate member 7 and base member 3 may also be composed of two or more parts.

[0087] Furthermore, although the above embodiment shows an example where the sensor mount 1, plate member 7, and base member 3 are separate parts, it is sufficient that all the functions described in the claims are performed when assembled as the sensor device 100, and it is not necessary for the functions to be performed individually as the sensor mount 1, plate member 7, and base member 3. Also, some of the functions described in the claims may be transferred, exchanged, or shared among the sensor mount 1, plate member 7, and base member 3.

[0088] Furthermore, although the above embodiment shows an example in which the sensor mount 1 (sensor placement member) has a rectangular parallelepiped shape, the present invention is not limited to this. The sensor mount 1 may have a shape other than a rectangular parallelepiped (for example, a cubic shape). Depending on its purpose, the sensor mount 1 may be provided with chamfers, steps, protrusions, recesses, or through holes, and does not necessarily have to be a perfect rectangular parallelepiped shape.

[0089] Furthermore, although the above embodiment shows an example in which a pair of Z-axis gyroscopes 2z (third-axis sensors) are arranged on a common Z-axis plane 1z (third plane) of the sensor mount 1 (sensor placement member), the present invention is not limited to this. A pair of Z-axis gyroscopes 2z may be arranged on opposite Z-axis planes 1z. Also, a pair of X-axis gyroscopes 2x (first-axis sensors) may be arranged on a common X-axis plane 1x (first plane). Also, a pair of Y-axis gyroscopes 2y (second-axis sensors) may be arranged on a common Y-axis plane 1y (second plane). Multiple gyroscopes may be arranged on each of the two opposing X-axis planes 1x (opposite Y-axis planes 1y and opposite Z-axis planes 1z).

[0090] Furthermore, although the above embodiment shows an example in which a pair of sensor sets 10 are arranged rotationally symmetrically with respect to an axis α along the Z-axis (third axis), the present invention is not limited to this. Two sets of sensor sets 10 may be arranged rotationally symmetrically with respect to an axis passing through the center of gravity of the sensor mount 1 (sensor mounting member) and along the X-axis (first axis) or the Y-axis (second axis).

[0091] Furthermore, in the above embodiment, an example was shown in which the positive and negative signs of the detected values ​​of the pair of gyroscopes 2 are reversed when they are arranged rotationally symmetrically and facing each other. However, the present invention is not limited to this. For example, the pair of gyroscopes 2 may be arranged in the recess 11 so that they face the same direction, thereby preventing the reversed signs of the detected values.

[0092] Furthermore, although the above embodiment shows an example in which the gyroscope 2 (sensor) is provided in the recess 11 of the sensor mount 1 (sensor mounting member), the present invention is not limited to this. The gyroscope 2 may be provided in a sensor mount 1 that does not have a recess 11. [Explanation of Symbols]

[0093] 1. Sensor mount (sensor placement member) 1x X-axis plane (first plane) (a pair of planes) 1y Y-axis plane (second plane) (a pair of planes) 1z Z-axis surface (3rd surface) (bottom surface) 2. Gyroscope (sensor) 2x X-axis gyroscope (1st axis sensor) 2y Y-axis gyroscope (second axis sensor) 2z Z-axis gyroscope (3rd axis sensor) 6b Control circuit (control unit) 10 Sensor Assembly 11 recess 100 Sensor device X axis (1st axis) Y-axis (second axis) Z axis (3rd axis) α axis

Claims

1. Multiple sensor sets, each composed of multiple types of sensors, A common sensor arrangement member on which the plurality of sensor sets are arranged, The system comprises a plurality of control units, each of which is provided in accordance with the plurality of sensor sets, and which acquire the measured values ​​of the plurality of types of sensors in the plurality of sensor sets, The sensor placement member is composed of a single article made of a single material, The aforementioned set of sensors It includes at least one type of sensor of the same design that measures the same type of physical quantity, A sensor device in which the aforementioned sensors of the same design are arranged symmetrically with respect to the center of gravity of the sensor arrangement member.

2. The sensor placement member has a polyhedral shape, The sensor arrangement member is provided with recesses for arranging all of the symmetrically arranged sensors, The sensor device according to claim 1, wherein the recess opens in a direction perpendicular to the surface of any of the sensor placement members.

3. Each of the aforementioned set of sensors includes, as sensors arranged symmetrically, a first-axis sensor, a second-axis sensor, and a third-axis sensor, each corresponding to a first axis, a second axis, and a third axis that are orthogonal to each other. The sensor placement member has a rectangular parallelepiped shape, The sensor device according to claim 2, wherein all of the first axis sensors, all of the second axis sensors, and all of the third axis sensors are arranged in the recesses of the sensor arrangement member.

4. It further includes a control unit, The first-axis sensor, the second-axis sensor, and the third-axis sensor included in the plurality of sensor sets each include one or more pairs of sensors that are arranged facing each other. The control unit, The measurement results are received from both of the aforementioned pair of sensors. The sensor device according to any one of claims 1 to 3, wherein control is performed to invert the sign of one of the measured values ​​included in the measurement result, but control is not performed to invert the sign of the other measured value.

5. The first axis sensors are arranged rotationally symmetrically with respect to an axis that passes through the center of gravity of the sensor arrangement member and extends in a predetermined direction. The second-axis sensors are arranged rotationally symmetrically with respect to the axis that passes through the center of gravity of the sensor arrangement member and extends in a predetermined direction. The sensor device according to claim 4, wherein the third-axis sensors are arranged rotationally symmetrically with respect to the axis that passes through the center of gravity of the sensor arrangement member and extends in a predetermined direction.

6. The sensor device according to claim 5, wherein the axis extends perpendicularly to the bottom surface of the sensor mounting member.

7. The pair of first axis sensors are positioned on each of the pair of first surfaces of the sensor mounting member, which are arranged on opposite sides of each other. The pair of second-axis sensors are positioned on each of the pair of second surfaces of the sensor mounting member, which are arranged on opposite sides of each other. The sensor device according to claim 6, wherein a pair of third-axis sensors are arranged on a common third surface of the sensor arrangement member.

8. The sensor device according to claim 7, wherein the centerlines along the depth direction of the recesses for the first axis sensors, the recesses for the second axis sensors, and the recesses for the third axis sensors of the plurality of sensor sets, which are opened on the surface of the sensor arrangement member, do not coincide with each other and extend parallel to each other.

9. The sensor device according to claim 3, wherein the first axis sensor, the second axis sensor, and the third axis sensor are gyroscopes.

Images