Isolator and method for manufacturing an isolator

Abstract

To provide an isolator that reduces the influence of a non-reciprocal material on an element on a substrate, and a method for manufacturing the same.SOLUTION: An isolator 10 comprises: a substrate 50; waveguides 21, 22 and an electronic circuit 60 located on the substrate 50; and a non-reciprocal material 40 located on the waveguides 21, 22 and electronic circuit 60. The non-reciprocity of a portion of the non-reciprocal material 40 which is located within a predetermined range 62 from the electronic circuit 60 is weaker than the non-reciprocity of a portion in contact with the waveguides 21, 22.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to an isolator and a method for manufacturing the isolator.

Background Art

[0002] An optical isolator using a magneto-optical material Ce:YIG as a waveguide layer is known (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] When forming an isolator using a non-reciprocal material on a semiconductor substrate, it is required to reduce the influence of the non-reciprocal material on elements on the semiconductor substrate.

[0005] An object of the present disclosure is to provide an isolator capable of reducing the influence of a non-reciprocal material on elements on a substrate and a method for manufacturing the same.

Means for Solving the Problems

[0006] An isolator according to an embodiment of the present disclosure includes a substrate, a waveguide and an electronic circuit located on the substrate, and a non-reciprocal member located on the waveguide and the electronic circuit. The non-reciprocity of a portion of the non-reciprocal member located within a predetermined range from the electronic circuit is weaker than the non-reciprocity of a portion in contact with the waveguide.

[0007] A method for manufacturing an isolator according to one embodiment of the present disclosure includes forming a waveguide and an electronic circuit on a substrate, and forming a non-reciprocal member on the waveguide and the electronic circuit. The method for manufacturing the isolator includes irradiating a portion of the non-reciprocal member that is in contact with the waveguide, and a portion that does not extend beyond a predetermined range from the electronic circuit, with laser light. [Effects of the Invention]

[0008] According to an isolator and a method for manufacturing the same as one embodiment of the present disclosure, the influence of non-reciprocal materials on elements on a substrate can be reduced. [Brief explanation of the drawing]

[0009] [Figure 1] This is a plan view showing an example configuration of an isolator according to one embodiment. [Figure 2] This is a cross-sectional view AA in Figure 1. [Figure 3] This is a plan view showing an example configuration in which waveguides are arranged in a zigzag pattern within a roughly circular laser irradiation area. [Figure 4] This is a side view showing an example of a configuration for laser irradiation. [Figure 5] This graph shows the relationship between the laser power irradiated onto a non-reciprocal component and the Faraday rotation angle of the irradiated non-reciprocal component. [Figure 6] This graph shows the relationship between the lens position when a laser is irradiated onto a non-reciprocal member and the Faraday rotation angle of the non-reciprocal member irradiated with the laser. [Figure 7] This is a photographic example of the surface of a non-reciprocal member when the Faraday rotation angle is large. [Figure 8] This is an example of a photograph of the surface of a non-reciprocal member when the Faraday rotation angle is small. [Figure 9] This graph shows an example of the results of XRD measurements of a crystallized non-reciprocal material. [Figure 10A] This is a cross-sectional view showing the process of forming a waveguide, electronic circuit, and insulating layer on a substrate. [Figure 10B]This is a cross-sectional view showing the process of forming grooves in the insulating layer so that the sides of the waveguide are exposed, and then depositing a non-reciprocal material. [Figure 10C] This is a cross-sectional view showing the process of crystallizing a portion of a non-reciprocal material by irradiating it with a laser. [Modes for carrying out the invention]

[0010] (Example configuration of isolator 10) As shown in Figures 1 and 2, an isolator 10 according to one embodiment comprises a first waveguide 21, a second waveguide 22, a non-reciprocal member 40, a first branch 81, and a second branch 82, all formed on a substrate 50. The first waveguide 21 and the second waveguide 22 are also simply referred to as waveguides. A non-reciprocal material is a material in which the effect received from the substance differs depending on the direction of light propagation due to the magneto-optical effect.

[0011] The isolator 10 is configured to allow TE mode electromagnetic waves input to the first branch 81 to pass through to the second branch 82, and to block TE mode electromagnetic waves input to the second branch 82, preventing them from passing through to the first branch 81. The direction in which electromagnetic waves propagate from the first branch 81 to the second branch 82 is also referred to as the first direction. The direction in which electromagnetic waves propagate from the second branch 82 to the first branch 81 is also referred to as the second direction. In other words, the isolator 10 allows TE mode electromagnetic waves to pass through in the first direction, but prevents them from passing through in the second direction.

[0012] The electromagnetic waves input to the first branch 81 of the isolator 10 are emitted from a light source. The light source may be provided on the substrate 50. The electromagnetic waves output from the second branch 82 of the isolator 10 are converted into a signal by a modulator. The signal converted by the modulator is transmitted to the outside by a high-frequency transmission circuit. The modulator or high-frequency transmission circuit may be provided on the substrate 50. The light source, modulator, or high-frequency transmission circuit are collectively referred to as the electronic circuit 60.

[0013] The isolator 10 realizes the propagation characteristics of an asymmetric electromagnetic wave by using the principle of an asymmetric Mach-Zehnder interferometer. The isolator 10 is configured such that the phase shift of the electromagnetic wave propagating in the first waveguide 21 in the first direction is the same as the phase shift of the electromagnetic wave propagating in the second waveguide 22 in the first direction. Further, the isolator 10 is configured such that there is a difference corresponding to 1 / 4 of the wavelength (a 90-degree phase) between the phase shift of the electromagnetic wave propagating in the first waveguide 21 in the second direction and the phase shift of the electromagnetic wave propagating in the second waveguide 22 in the second direction.

[0014] The phase shift can be adjusted by the line length of the waveguide or by the effective refractive index of the waveguide. Assume that the isolator 10 is configured such that when there is no non-reciprocal member 40, the phase of the electromagnetic wave propagating in the first waveguide 21 advances by 90 degrees more than the phase of the electromagnetic wave propagating in the second waveguide 22. When there is no non-reciprocal member 40, regardless of whether the electromagnetic wave propagates through the isolator 10 in the first direction or the second direction, the phase of the electromagnetic wave propagating in the first waveguide 21 advances by 90 degrees more than the phase of the electromagnetic wave propagating in the second waveguide 22. Therefore, simply setting the line length or the effective refractive index of the waveguide makes the phase shift of the electromagnetic wave propagating in the first direction the same as the phase shift of the electromagnetic wave propagating in the second direction. Thus, the isolator 10 includes a non-reciprocal member 40 positioned along at least a part of the waveguide so as to make the phase shift of the electromagnetic wave propagating in the first direction of the waveguide different from the phase shift of the electromagnetic wave propagating in the second direction. The waveguide provided with the non-reciprocal member 40 functions as a non-reciprocal waveguide by applying a magnetic field.

[0015] The non-reciprocal waveguide advances or delays the phase of the propagating electromagnetic wave. In the isolator 10 according to the present embodiment, when the non-reciprocal member 40 is positioned on the right side of the waveguide when looking at the waveguide in the direction of propagation of the electromagnetic wave, the phase of the electromagnetic wave is delayed by a amount corresponding to 1 / 8 of the wavelength (a 45-degree phase). Further, in the isolator 10, when the non-reciprocal member 40 is positioned on the left side of the waveguide when looking at the waveguide in the direction of propagation of the electromagnetic wave, the phase of the electromagnetic wave is advanced by a amount corresponding to 1 / 8 of the wavelength (a 45-degree phase).

[0016] In the example of FIG. 1, when an electromagnetic wave propagates in the first direction (the positive direction of the X-axis in FIG. 1), the non-reciprocal member 40 is located on the right side toward the first direction of the first waveguide 21. Also, the non-reciprocal member 40 is located on the left side toward the first direction of the second waveguide 22. Therefore, the phase of the electromagnetic wave propagating in the first direction is delayed by 45 degrees in the first waveguide 21 and advanced by 45 degrees in the second waveguide 22. As described above, the isolator 10 is configured such that when the non-reciprocal member 40 does not exist, the phase of the electromagnetic wave propagating in the first direction in the first waveguide 21 advances by 90 degrees with respect to the phase of the electromagnetic wave propagating in the first direction in the second waveguide 22. Then, the advance of the phase of the electromagnetic wave propagating in the first direction in the first waveguide 21 becomes 45 degrees. On the other hand, the advance of the phase of the electromagnetic wave propagating in the first direction in the second waveguide 22 becomes 45 degrees. As a result, the difference between the phase shift of the electromagnetic wave propagating in the first direction in the first waveguide 21 and the phase shift of the electromagnetic wave propagating in the first direction in the second waveguide 22 becomes 0 degrees. That is, the phase shift of the electromagnetic wave propagating in the first direction in the first waveguide 21 and the phase shift of the electromagnetic wave propagating in the first direction in the second waveguide 22 become the same.

[0017] On the other hand, when electromagnetic waves propagate in the second direction (the negative direction of the X-axis in Figure 1), the non-reciprocal member 40 is located to the left of the first waveguide 21 in the direction of the second direction. Also, the non-reciprocal member 40 is located to the right of the second waveguide 22 in the direction of the second direction. Therefore, the phase of the electromagnetic wave propagating in the second direction advances by 45 degrees in the first waveguide 21 and lags by 45 degrees in the second waveguide 22. As described above, the isolator 10 is configured such that, when the non-reciprocal member 40 is not present, the phase of the electromagnetic wave propagating in the second direction through the first waveguide 21 advances by 90 degrees compared to the phase of the electromagnetic wave propagating in the second direction through the second waveguide 22. In this case, the phase advance of the electromagnetic wave propagating in the second direction through the first waveguide 21 becomes 135 degrees. On the other hand, the phase lag of the electromagnetic wave propagating in the second direction through the second waveguide 22 becomes 45 degrees. As a result, the difference between the phase shift of the electromagnetic wave propagating through the first waveguide 21 in the second direction and the phase shift of the electromagnetic wave propagating through the second waveguide 22 in the first direction becomes 180 degrees.

[0018] In the isolator 10 configured as described above, the phase difference between the electromagnetic wave propagating in the first waveguide 21 and the electromagnetic wave propagating in the second waveguide 22 is 0 degrees when propagating in the first direction and 180 degrees when propagating in the second direction. In this way, the isolator 10 is configured to transmit electromagnetic waves propagating in the first direction but not transmit electromagnetic waves propagating in the second direction.

[0019] The waveguide and non-reciprocal member 40 of the isolator 10 are formed on a substrate 50 having a substrate surface 50A. The substrate 50 may be composed of a conductor such as metal, a semiconductor such as silicon, glass, or resin. In this embodiment, the substrate 50 is assumed to be silicon (Si), but it is not limited to this and may be made of various other materials.

[0020] The substrate 50 includes a box layer 52 made of an insulator such as a silicon oxide film on the substrate surface 50A. The waveguide is located on the box layer 52. The substrate 50 further includes an insulating layer 54 located on the waveguide. The substrate 50 further includes an electronic circuit 60 located on the box layer 52, or in or on the insulating layer 54.

[0021] The substrate 50 further includes a groove 30 provided in the insulating layer 54 such that at least a portion of the waveguide is exposed. The groove 30 extends along the waveguide. The groove 30 has a bottom and a side in a cross-section (Figure 2) viewed in the direction of its extension (X-axis direction in Figure 1). The position of the bottom of the groove 30 may be within the box layer 52 as shown in Figure 2, or it may be approximately the same as the position on the underside of the waveguide (upper surface of the box layer 52).

[0022] The substrate 50 further comprises an insulating layer 54, grooves 30, and a non-reciprocal member 40 that covers the waveguides exposed in the grooves 30. The non-reciprocal member 40 is formed by deposition on the substrate 50 and is located at the bottom and sides of the grooves 30, as well as on the upper surface of the insulating layer 54. The non-reciprocal member 40 contacts the sides of the first waveguide 21 and the second waveguide 22 in the grooves 30 located along the first waveguide 21 and the second waveguide 22.

[0023] The waveguide is surrounded by a box layer 52, an insulating layer 54, and a non-reciprocal member 40. The waveguide is also called the core. The box layer 52 and the insulating layer 54 are also called the cladding. The core and cladding may be composed of a dielectric material. The waveguide is also called a dielectric line. The materials of the core and cladding are determined such that the relative permittivity of the core is greater than that of the cladding. In other words, the materials of the core and cladding are determined such that the refractive index of the cladding is greater than that of the core. In this way, electromagnetic waves propagating through the core can be totally reflected at the boundary with the cladding. As a result, the loss of electromagnetic waves propagating through the core can be reduced.

[0024] The relative permittivity of the core and cladding may be greater than that of air. By making the relative permittivity of the core and cladding greater than that of air, leakage of electromagnetic waves from the isolator 10 can be suppressed. As a result, losses due to electromagnetic waves radiated from the isolator 10 to the outside can be reduced.

[0025] In this embodiment, the material of the waveguide as the core is silicon (Si), but it is not limited to this and may be any other material. The material of the box layer 52 and the insulating layer 54 as cladding is quartz glass or silicon oxide film (SiO2), but it is not limited to this and may be any other material. The relative permittivity of silicon and quartz glass is about 12 and about 2, respectively. Silicon can propagate electromagnetic waves having near-infrared wavelengths of about 1.2 μm to about 6 μm with low loss. When the waveguide is made of silicon, it can propagate electromagnetic waves having wavelengths in the 1.3 μm band or 1.55 μm band used in optical communications with low loss.

[0026] In this embodiment, Ce:YIG (cerium-substituted yttrium iron garnet) is used as the material for the non-reciprocal member 40. A transparent magnetic material such as Bi:YIG (bismuth-substituted YIG) or other partially substituted YIG materials may also be used as the material for the non-reciprocal member 40. However, various other magnetic materials are not limited to these and may be used as the non-reciprocal member 40.

[0027] The YIG-based non-reciprocal member 40 exhibits sufficient non-reciprocity when its crystallization progresses sufficiently. Crystallization of the non-reciprocal member 40 progresses when the non-reciprocal member 40 is heated above a predetermined temperature. However, considering the impact on other components such as waveguides or wiring formed on the substrate 50, it is difficult to heat the entire substrate 50 above a predetermined temperature when depositing the non-reciprocal member 40. Therefore, the non-reciprocal member 40 formed in the groove 30 by deposition without heating the substrate 50 is not sufficiently crystallized and does not exhibit sufficient non-reciprocity in that state.

[0028] Therefore, in the isolator 10 according to this embodiment, the non-reciprocal member 40 is heated by irradiation with laser light in order to crystallize the non-reciprocal member 40. As the laser light, light of a wavelength that has a high absorption efficiency of light by the non-reciprocal member 40 is used. When the non-reciprocal member 40 is Ce:YIG, it has a high absorption efficiency of visible light. Therefore, a visible light laser may be used for heating.

[0029] The non-reciprocity exhibited by the non-reciprocity member 40 can affect the phase of electromagnetic waves propagating through the waveguide, and may also affect the operation of the electronic circuit 60. In the isolator 10 according to this embodiment, the non-reciprocity member 40 located within the influence range 62, which includes the electronic circuit 60, is configured to exhibit no non-reciprocity, or only weak non-reciprocity. Conversely, the non-reciprocity member 40 located in contact with the waveguide is configured to exhibit the non-reciprocity necessary for the phase of electromagnetic waves propagating through the waveguide to advance or lag by a predetermined value (e.g., 45 degrees).

[0030] Of the non-reciprocal member 40, the portion located in contact with the waveguide and configured to exhibit the necessary non-reciprocity is also referred to as the first portion 41. Of the non-reciprocal member 40, the portion located within the influence range 62 including the electronic circuit 60 and configured not to exhibit non-reciprocity to the extent that it affects the electronic circuit 60 is also referred to as the second portion 42. The second portion 42 corresponds to a portion of the non-reciprocal member 40 that exhibits weaker non-reciprocity than the first portion 41, or a portion that exhibits no non-reciprocity at all. In other words, the non-reciprocity of the portion of the non-reciprocal member 40 located within a predetermined range from the electronic circuit 60 (within the influence range 62) (second portion 42) is weaker than the non-reciprocity of the portion in contact with the waveguide (first portion 41).

[0031] In the isolator 10 according to this embodiment, when the non-reciprocal member 40 is heated by irradiating it with laser light, the laser light is partially irradiated so that the non-reciprocal member 40 includes a first portion 41 and a second portion 42. The laser light is irradiated onto the first portion 41 of the non-reciprocal member 40 deposited on the substrate 50 so as to promote crystallization of the first portion 41 and not promote crystallization of the second portion 42. In this way, the non-reciprocal member 40 can be selectively crystallized. As a result, the influence of the crystallized first portion 41 of the non-reciprocal member 40 on the electronic circuit 60 can be reduced.

[0032] When the non-reciprocal member 40 is heated, the temperature of the electronic circuit 60 may rise. This rise in temperature of the electronic circuit 60 may change its properties. In other words, heating the non-reciprocal member 40 can affect the electronic circuit 60. By preventing laser light from irradiating the affected area 62, which includes the electronic circuit 60, the temperature of the electronic circuit 60 is less likely to rise. In other words, by selectively irradiating the electronic circuit 60 with laser light, the effect on the electronic circuit 60 can be reduced.

[0033] The isolator 10 may include a mask that blocks or attenuates the laser light so that it is irradiated onto the first portion 41 of the non-reciprocal member 40 and not onto the second portion 42. The mask may be made of a metal such as aluminum so that the transmittance of the laser light is less than a transmission threshold.

[0034] As described above, in the isolator 10 according to this embodiment, the non-reciprocal member 40 is selectively heated so as to minimize the impact on elements on the substrate 50, such as the electronic circuit 60. In this way, even when a material requiring heat treatment is used as the non-reciprocal member 40, the impact on elements on the substrate 50, such as the electronic circuit 60, can be reduced.

[0035] As shown in Figure 3, the first waveguide 21 and the second waveguide 22 may each be arranged in a zigzag pattern. In other words, the waveguide may have a portion in which the direction of extension changes. The waveguide may be located in a zigzag pattern within a substantially circular region. The waveguide may be arranged so as to fall within a substantially circular laser irradiation region LS. In this way, the laser light can be effectively utilized to heat the non-reciprocal member 40. Furthermore, elements such as the electronic circuit 60 may be placed outside the laser irradiation region LS. In this way, the laser light irradiation is less likely to affect elements such as the electronic circuit 60 on the substrate 50.

[0036] As shown in Figure 4, in the isolator 10 according to this embodiment, an irradiation device 70 may be used to irradiate the non-reciprocal member 40 with laser light. The irradiation device 70 comprises a laser light source 72, a lens 74, and a stage 78. The stage 78 is configured to support a substrate 50. The laser light source 72 emits laser light 76. The laser light 76 is focused by the lens 74. The focused laser light 76 is incident on the non-reciprocal member 40 on the substrate 50 placed on the stage 78, heating the non-reciprocal member 40. The area on the substrate 50 irradiated with laser light 76 is represented as LS. The stage 78 is configured to control the position of the substrate 50 along the XY plane. The irradiation device 70 controls the area on the substrate 50 irradiated with laser light 76 by controlling the position of the substrate 50 on the stage 78 and controlling the emission of laser light 76 from the laser light source 72.

[0037] The laser beam 76 may be a pulsed laser or a continuous-wave (CW) laser. When the laser beam 76 is a pulsed laser, a large amount of energy is delivered to the non-reciprocal member 40 in a short time. In this way, the temperature of the non-reciprocal member 40 rises before the heat escapes to the substrate 50. As a result, the non-reciprocal member 40 is heated efficiently. The conditions for the pulsed laser may be set, for example, as follows. Wavelength: 532 nanometers (nm) • Scanning speed: 100 micrometers per second (μm / s) to 10 millimeters per second (mm / s) • Laser irradiation spot diameter: 1 to 1000 micrometers (μm) • Average output power: 0.1~10 watts (W)

[0038] When the substrate 50 is heated in the atmosphere, elements such as waveguides or electronic circuits 60 contained in the substrate 50 may be oxidized. To prevent oxidation of the elements contained in the substrate 50, the irradiation device 70 may further include a vacuum chamber housing a stage 78 on which the substrate 50 is placed. The laser light source 72 or lens 74 may be housed inside the vacuum chamber or installed outside the vacuum chamber. If the laser light source 72 or lens 74 is installed outside the vacuum chamber, the vacuum chamber may have a window that allows the laser light 76 to pass through.

[0039] <Identification of the state of the non-reciprocal member 40> The state of the non-reciprocal member 40 may be determined by a measured Faraday rotation angle. The larger the measured Faraday rotation angle of the non-reciprocal member 40, the stronger the non-reciprocity exhibited by that non-reciprocal member 40. As illustrated in Figures 5 and 6, the measured Faraday rotation angle changes depending on the power of the laser beam 76 or the position of the lens 74. The vertical axis in Figures 5 and 6 represents the measured Faraday rotation angle of the non-reciprocal member 40. The horizontal axis in Figure 5 represents the power of the laser beam 76. The horizontal axis in Figure 6 represents the position of the lens 74.

[0040] The greater the power of the laser beam 76, the higher the temperature of the non-reciprocal member 40 when the laser beam 76 is irradiated onto it. Also, the closer the focal point of the lens 74 is to the position of the non-reciprocal member 40 when the laser beam 76 is focused by the lens 74, the more efficiently the power of the laser beam 76 is used to heat the non-reciprocal member 40, resulting in a higher temperature for the non-reciprocal member 40.

[0041] Specifically, as shown in Figure 5, when the power of the laser beam 76 is within the range represented by R1, the Faraday rotation angle is greater than or equal to the threshold represented by FTH. Also, as shown in Figure 6, when the position of the lens 74 is within the range represented by R2, the Faraday rotation angle is greater than or equal to the threshold represented by FTH. According to the graphs shown in Figures 5 and 6, when the irradiation conditions of the laser beam 76 by the irradiation device 70 are appropriately set and the temperature of the non-reciprocal member 40 rises to a predetermined range, the crystallization of the non-reciprocal member 40 proceeds sufficiently and the Faraday rotation angle becomes greater than or equal to the threshold.

[0042] As illustrated in Figure 7, when the Faraday rotation angle exceeds a threshold, the non-reciprocal member 40 is sufficiently crystallized and becomes substantially uniform. This substantially uniform crystallization corresponds to a state where the proportion of crystals with a particle size greater than or equal to a predetermined particle size is greater than or equal to a predetermined proportion. In other words, the difference in particle size between each crystal contained in the non-reciprocal member 40 becomes small.

[0043] If the temperature of the non-reciprocal member 40 does not rise sufficiently (i.e., the temperature is too low), the crystallization of the non-reciprocal member 40 will not proceed sufficiently, and the Faraday rotation angle will not increase. As illustrated in the photograph in Figure 8, the difference in grain size of each crystal contained in the non-reciprocal member 40, including areas where crystallization is insufficient, becomes large. Furthermore, if the temperature of the non-reciprocal member 40 becomes too high, a structural phase transition occurs in the non-reciprocal member 40, and the magneto-optical effect disappears.

[0044] The crystalline state of the non-reciprocal member 40 can be determined by measurement results obtained using an X-ray diffractometer (XRD device). XRD measurement is based on Bragg's equation nλ = 2d·sinθ, which represents the X-ray diffraction conditions in the sample (crystal) being measured. d represents the lattice plane spacing of the atomic arrangement of the sample (crystal) being measured. n represents the order of the X-rays. λ represents the wavelength of the characteristic X-rays used in the XRD measurement. θ represents the angle of incidence of the X-rays to the surface of the sample (crystal).

[0045] The XRD measurement results are represented by a graph with the X-ray diffraction angle (2θ) on the horizontal axis and the diffraction intensity on the vertical axis, as illustrated in Figure 9. The diffraction angle is the angle between the direction in which the X-rays are incident on the sample and the direction in which the X-rays diffracted by the sample propagate. When the non-reciprocal member 40 is YIG, a peak appears in the measurement waveform of the non-reciprocal member 40, where crystallization is progressing. The first part 41 of the non-reciprocal member 40 may be a single crystal or a polycrystalline material. When the first part 41 of the non-reciprocal member 40 is polycrystalline, three peaks represented by P1, P2, and P3 may appear in the waveform of the XRD measurement result, as illustrated in Figure 9. When the first part 41 of the non-reciprocal member 40 is a single crystal, one peak may appear in the waveform of the XRD measurement result.

[0046] The isolator 10 according to this embodiment is configured such that the degree of crystallization of the second portion 42 of the non-reciprocal member 40 is less than the degree of crystallization of the first portion 41. The degree of crystallization can be determined by the intensity of the peak in the XRD measurement waveform. If the peak intensity of the measurement result for the second portion 42 is lower than the peak intensity of the measurement result for the first portion 41, it is confirmed that the degree of crystallization of the second portion 42 is less than that of the first portion 41. The degree of crystallization of the non-reciprocal member 40 is not limited to XRD and can be determined by other methods. For example, the degree of crystallization of the non-reciprocal member 40 can be determined based on an image obtained by observing the non-reciprocal member 40 with sub-nano order resolution using a transmission electron microscope (TEM) or the like.

[0047] The lattice constant of the crystallized portion (first portion 41) of the non-reciprocal member 40 may be configured to be different from the lattice constant of the portion of the substrate 50 that is in contact with the crystallized portion (first portion 41) of the non-reciprocal member 40. In the isolator 10 according to this embodiment, the non-reciprocal member 40 is crystallized after film formation. Therefore, the lattice constant of the first portion 41 does not have to match the lattice constant of the substrate 50.

[0048] The lattice constant of a sample (crystal) can be calculated based on the XRD measurement results. Bragg's equation is satisfied at the diffraction angle (2θ) where the diffraction intensity peak appears. The lattice constant can be calculated by applying the diffraction angle (2θ) where the peak appears to Bragg's equation.

[0049] The lattice constant of a sample (crystal) can be determined not only by XRD but also by other methods. For example, the lattice constant of a sample (crystal) can be calculated based on the diffraction pattern obtained by thinning the sample (crystal) using a Focused Ion Beam (FIB) and irradiating the thinned sample (crystal) with an electron beam using a transmission electron microscope (TEM). Alternatively, the lattice constant of a sample (crystal) can be calculated based on an image obtained by observing the sample (crystal) with sub-nanometer resolution. Furthermore, the lattice constant of a sample (crystal) can also be calculated by analyzing the X-rays emitted from the sample (crystal) when it is irradiated with an electron beam.

[0050] An amorphous portion of the non-reciprocal member 40 or the substrate 50 may be located between the crystallized portion (first portion 41) of the non-reciprocal member 40 and the substrate 50. Whether it is amorphous can be determined by XRD measurement. In the isolator 10 according to this embodiment, the non-reciprocal member 40 is crystallized after film formation. Therefore, a crystallized film is not required as a seed film for film formation.

[0051] (Method for manufacturing isolator 10) The manufacturing method of the isolator 10 according to this embodiment will be explained with reference to the cross-sectional views illustrated in Figures 10A to 10C.

[0052] As shown in Figure 10A, a first waveguide 21 and a second waveguide 22 are formed on the box layer 52 of the substrate 50. The waveguides may be formed by a combination of a film deposition process and an etching process. As the film deposition process, plasma CVD (Chemical Vapor Deposition) or sputtering may be performed. As the etching process, dry etching such as RIE (Reactive Ion Etching) or wet etching may be performed. Subsequently, an insulating layer 54 is formed on the first waveguide 21 and the second waveguide 22. The insulating layer 54 may be formed by plasma CVD or the like. Furthermore, an electronic circuit 60 is formed on the box layer 52, or in or on the insulating layer 54. The electronic circuit 60 may be formed by a known semiconductor device manufacturing process.

[0053] As shown in Figure 10B, grooves 30 are formed in the insulating layer 54. The grooves 30 may be formed by dry etching. Wet etching may be further performed so that the waveguide is exposed on the sides of the grooves 30. Subsequently, a non-reciprocal member 40 is formed on the grooves 30 and the insulating layer 54. The non-reciprocal member 40 may be deposited by sputtering or the like.

[0054] As shown in Figure 10C, laser light is irradiated onto the non-reciprocal member 40 in the laser irradiation area LS. The laser irradiation area LS is set to exclude the influence area 62, which includes the electronic circuit 60. The non-reciprocal member 40 is heated by the irradiation of the laser light. The degree of crystallization of the non-reciprocal member 40 can be controlled by controlling the temperature and heating time of the non-reciprocal member 40. The non-reciprocal member 40 located in the laser irradiation area LS corresponds to the first portion 41. Crystallization of the first portion 41 progresses as the first portion 41 is heated by the irradiation of laser light onto the first portion 41 of the non-reciprocal member 40. The non-reciprocal member 40 located outside the laser irradiation area LS (within the influence area 62) corresponds to the second portion 42. Crystallization does not progress in the second portion 42 of the non-reciprocal member 40.

[0055] As described above with reference to Figures 10A to 10C, the isolator 10 can be manufactured such that the non-reciprocal member 40 includes a first portion 41 and a second portion 42.

[0056] (Examples of applications for Isolator 10) The isolator 10 may be used in combination with a configuration for transmitting electromagnetic waves. The isolator 10 may be applied to an optical switch, an optical transceiver, or a data center. The isolator 10 may be applied to, for example, an electromagnetic wave transmitter. The electromagnetic wave transmitter comprises the isolator 10 and a light source. The electromagnetic wave transmitter inputs electromagnetic waves from the light source to the isolator 10 and outputs electromagnetic waves from the isolator 10 toward a receiver. The isolator 10 is configured such that the transmittance of electromagnetic waves propagating from the light source toward the receiver is greater than the transmittance of electromagnetic waves propagating from the receiver toward the light source. In this way, it is difficult for electromagnetic waves to incident toward the light source. As a result, the light source can be protected.

[0057] The light source may be, for example, a semiconductor laser such as an LD (Laser Diode) or a VCSEL (Vertical Cavity Surface Emitting Laser). The light source may include a device that emits electromagnetic waves of various wavelengths, not limited to visible light. The light source may be formed on the substrate 50 together with the isolator 10. The light source may input TE mode electromagnetic waves to the isolator 10.

[0058] The electromagnetic wave transmitter may further include a modulator and a signal input section. The modulator modulates by changing the intensity of the electromagnetic wave. The modulator may be located between the isolator 10 and the receiver, rather than between the light source and the isolator 10. The modulator may, for example, pulse-modulate the electromagnetic wave. The signal input section receives signals from external devices, etc. The signal input section may include, for example, a D / A converter. The signal input section outputs a signal to the modulator. The modulator modulates the electromagnetic wave based on the signal acquired by the signal input section.

[0059] The light source may include a modulator and a signal input unit. In this case, the light source may output a modulated electromagnetic wave and input it to the isolator 10.

[0060] The electromagnetic wave transmitter may be mounted on the circuit board 50. The light source may be mounted to connect to the first branch 81 via a modulator. The light source may be mounted to connect to the first branch 81 without a modulator. The receiver may be mounted to connect to the second branch 82 without a modulator. The receiver may be mounted to connect to the second branch 82 via a modulator. In this case, the modulator may be mounted to connect to the second branch 82. The light source, modulator and receiver may be included in the electronic circuit 60 described above.

[0061] While embodiments relating to this disclosure have been described based on the drawings and examples, it should be noted that those skilled in the art can make various modifications or alterations based on this disclosure. Therefore, it should be noted that these modifications or alterations are within the scope of this disclosure. For example, the functions included in each component can be rearranged in a logically consistent manner, and multiple components can be combined into one or separated.

[0062] In this disclosure, the terms "First," "Second," etc., are identifiers used to distinguish the configurations. Configurations distinguished by the terms "First," "Second," etc., in this disclosure may have their numbers swapped. For example, the first waveguide 21 may swap the identifiers "First" and "Second" with the second waveguide 22. The identifier swapping occurs simultaneously. The configurations remain distinguishable even after the identifier swapping. Identifiers may be deleted. Configurations from which identifiers have been deleted are distinguished by codes. The terms "First," "Second," etc., in this disclosure should not be used alone to interpret the order of the configurations or to justify the existence of smaller numbered identifiers.

[0063] In this disclosure, the X, Y, and Z axes are provided for explanatory purposes and may be interchanged. The configurations relating to this disclosure have been described using a Cartesian coordinate system composed of the X, Y, and Z axes. The positional relationships of the configurations relating to this disclosure are not limited to being orthogonal. [Explanation of Symbols]

[0064] 10 Isolators 21 Waveguide No. 1 22 Second Waveguide 30 grooves 40 Non-reciprocal member (41: 1st part, 42: 2nd part) 50 substrates (50A: substrate surface, 52: box layer, 54: insulating layer) 60 Electronic Circuits (62: Scope of Influence) 70 Irradiation device (72: light source, 74: lens, 76: laser light, 78: stage) 81 First branching point 82 Second Branch LS laser irradiation range

Claims

1. circuit board and Waveguides and electronic circuits located on the aforementioned substrate, Non-reciprocal member located on the waveguide and the electronic circuit Equipped with, The non-reciprocity of the non-reciprocal member in the portion located within a predetermined range from the electronic circuit is weaker than the non-reciprocity of the portion in contact with the waveguide. Isolator.

2. The isolator according to claim 1, wherein the non-reciprocal member includes YIG (yttrium iron garnet).

3. The isolator according to claim 1 or 2, wherein the degree of crystallization in the portion of the non-reciprocal member located within a predetermined range from the electronic circuit is smaller than the degree of crystallization in the portion in contact with the waveguide.

4. The isolator according to any one of claims 1 to 3, wherein the lattice constant of the crystallized portion of the non-reciprocal member is different from the lattice constant of the portion of the substrate that is in contact with the crystallized portion of the non-reciprocal member.

5. The isolator according to claim 4, wherein the non-reciprocal member or the amorphous portion of the substrate is located between the crystallized portion of the non-reciprocal member and the substrate.

6. The isolator according to any one of claims 1 to 5, wherein the proportion of crystals having a particle size of a predetermined size or larger in the crystallized portion of the non-reciprocal member is a predetermined proportion or larger.

7. Waveguides and electronic circuits are formed on the substrate. A non-reciprocal member is formed on the waveguide and the electronic circuit. The non-reciprocal member includes a portion that contacts the waveguide, and the laser beam is irradiated onto a range that does not include a predetermined range from the electronic circuit. A method for manufacturing an isolator.

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