Method and apparatus for grinding wafers

Abstract

To evenly grind all of a plurality of wafers by preventing thermal expansion of a chuck table.SOLUTION: A grinding method of a wafer 100 grinds the wafer 100 held on a holding surface 11 of a porous plate 13 of a chuck table 10 with a grinding wheel 452, and includes a holding step of holding the wafer 100 on the holding surface 11, a grinding step of grinding the wafer 100 with the grinding wheel 452 while supplying grinding water having a predetermined temperature to the wafer 100, and a separation step of separating the ground wafer 100 from the holding surface 11 while supplying to the porous plate 13 a cooling fluid having a temperature lower than that of the grinding water. The porous plate 13 is cooled by the cooling fluid so that a temperature of the holding surface 11 becomes an initial temperature when the wafer 100 is held.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a wafer grinding method for grinding a wafer held on a holding surface of a porous plate of a chuck table with a grindstone, and a grinding apparatus for implementing the grinding method.

Background Art

[0002] A grinding apparatus for grinding a wafer using a grindstone grinds the upper surface of the wafer by bringing an annular grindstone into contact with the upper surface of the wafer held on the holding surface of a chuck table while rotating the grindstone. In the grinding of a wafer by this grinding apparatus, since machining heat is generated by friction between the grindstone and the wafer that are in contact with each other and rotate relative to each other, grinding water is supplied to the contact surface between the grindstone and the wafer to remove the machining heat (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Even if grinding water is supplied to the contact surface between the grindstone and the wafer as described above to remove the machining heat, a part of the machining heat is conducted through the wafer to the porous plate of the chuck table and stored in the porous plate.

[0005] By the way, in the grinding apparatus, when the grinding of the wafer is completed, a fluid is ejected from the porous plate to separate the wafer from the holding surface. At this time, a part of the machining heat accumulated in the porous plate is dissipated by the fluid. Thereafter, cleaning water is supplied to the holding surface of the chuck table to clean the holding surface. Even at this time, since the fluid is ejected from the holding surface, the porous plate is further cooled by this fluid.

[0006] However, not all of the processing heat stored in the porous plate is completely removed. Some of the processing heat remains in the porous plate, and when the next wafer is held by suction on the holding surface of the porous plate while this processing heat remains, some of the processing heat is stored in the porous plate again. In this way, the heat stored in the porous plate from grinding the previous wafer is added to the heat from grinding the subsequent wafer, so as wafer grinding is repeated, the temperature of the porous plate gradually rises.

[0007] As mentioned above, as the temperature of the porous plate gradually rises over time, the chuck table expands due to thermal expansion, and the holding surface of the chuck table becomes no longer parallel to the underside (working surface) of the grinding wheel. This results in the problem that the wafer held on the holding surface is not ground to a uniform thickness.

[0008] The present invention has been made in view of the above problems, and its purpose is to prevent thermal expansion of the chuck table and enable uniform grinding of multiple wafers. [Means for solving the problem]

[0009] The present invention relates to a wafer grinding method for grinding a wafer held on the holding surface of a porous plate of a chuck table with a grinding wheel, comprising: a holding step of holding the wafer on the holding surface; a grinding step of grinding the wafer with the grinding wheel while supplying grinding water at a predetermined temperature to the wafer; and a separation step of separating the ground wafer from the holding surface while supplying a cooling fluid at a temperature lower than the initial temperature when the holding surface held the wafer to the porous plate. The process includes a cleaning step in which the cooling fluid is supplied to the porous plate after the separation step, causing the cooling fluid to be ejected from the holding surface, and the holding surface is cleaned with a cleaning tool, causing the cooling fluid to be ejected from the holding surface. The porous plate is cooled by the cooling fluid so that the holding surface reaches the initial temperature when the wafer is held. Furthermore, the present invention relates to a wafer grinding method for grinding a wafer held on the holding surface of a porous plate of a chuck table with a grinding wheel, comprising: a holding step of holding the wafer on the holding surface; and a grinding step of grinding the wafer with the grinding wheel while supplying grinding water at a predetermined temperature to the wafer. The grinding process includes a separation step in which a cooling fluid at a temperature lower than the initial temperature at which the holding surface holds the wafer is supplied to the porous plate, and the ground wafer is separated from the holding surface, wherein the grinding process includes a load measurement step in which a load applied to the lower surface of the grinding wheel in a direction perpendicular to the lower surface is measured, a load-response temperature change step is performed in which the temperature of the cooling fluid is changed according to the magnitude of the load measured in the load measurement step, and the porous plate is cooled by the cooling fluid whose temperature has been changed in the load-response temperature change step so that the holding surface reaches the initial temperature at which it holds the wafer. Furthermore, the present invention relates to a wafer grinding method comprising grinding a wafer held on the holding surface of a porous plate of a chuck table with a grinding wheel, the method comprising a holding step of holding the wafer on the holding surface, A grinding step in which grinding water at a predetermined temperature is supplied to the wafer and the wafer is ground with the grinding wheel, and a separation step in which a cooling fluid at a temperature lower than the initial temperature when the holding surface held the wafer is supplied to the porous plate and the ground wafer is separated from the holding surface, The grinding process includes a load measurement step that measures the load applied to the lower surface of the grinding wheel in a direction perpendicular to the lower surface, a load response time modification step that changes the ejection time for ejecting the cooling fluid from the holding surface according to the magnitude of the load measured in the load measurement step, and the porous plate is cooled by the cooling fluid ejected from the holding surface at the ejection time modified in the load response time modification step so that the holding surface reaches the initial temperature when it holds the wafer. The cooling fluid supplied to the porous plate may be, for example, a mixture of water and air. The grinding process includes a temperature measurement step to measure the temperature of the porous plate, and the temperature of the cooling fluid is changed according to the temperature measured in the temperature measurement step. Porous temperature compatible temperature The change process may be implemented. The grinding process includes a temperature measurement step to measure the temperature of the porous plate, and the ejection time for ejecting the cooling fluid from the holding surface is changed according to the temperature measured in the temperature measurement step. Porous temperature response time The change process may be implemented.

[0010] The present invention relates to a grinding apparatus comprising: a chuck table that holds a wafer on a porous plate holding surface; a grinding mechanism that grinds the wafer by rotating a spindle with an annular grinding wheel attached to its tip; a grinding water supply unit that supplies grinding water at a predetermined temperature to the wafer and the grinding wheel; and a wafer separation mechanism that separates the wafer from the holding surface by ejecting a cooling fluid at a lower temperature than the grinding water from the holding surface. A cleaning mechanism that sprays the cooling fluid from the holding surface that does not hold the wafer and cleans the holding surface with a cleaning tool, It is equipped with. The wafer separation mechanism and the cleaning mechanism may be supplied with a cooling fluid mixture of water and air. Furthermore, the present invention relates to a grinding apparatus comprising: a chuck table that holds a wafer on a holding surface of a porous plate; a grinding mechanism that grinds the wafer by rotating a spindle with an annular grinding wheel attached to its tip; a grinding water supply unit that supplies grinding water at a predetermined temperature to the wafer and the grinding wheel; a wafer separation mechanism that separates the wafer from the holding surface by ejecting a cooling fluid at a lower temperature than the grinding water from the holding surface; a load measuring unit that measures a load applied to the lower surface of the grinding wheel in a direction perpendicular to the lower surface; and a load-response temperature changing unit that changes the temperature of the cooling fluid according to the magnitude of the load measured by the load measuring unit. Furthermore, the present invention relates to a grinding apparatus comprising: a chuck table that holds a wafer on a holding surface of a porous plate; a grinding mechanism that grinds the wafer by rotating a spindle with an annular grinding wheel attached to its tip; a grinding water supply unit that supplies grinding water at a predetermined temperature to the wafer and the grinding wheel; a wafer separation mechanism that separates the wafer from the holding surface by ejecting a cooling fluid at a lower temperature than the grinding water from the holding surface; a load measuring unit that measures the load applied to the lower surface of the grinding wheel in a direction perpendicular to the lower surface; and a load response time changing unit that changes the ejection time for ejecting the cooling fluid from the holding surface according to the magnitude of the load measured by the load measuring unit. This grinding apparatus includes a thermometer for measuring the temperature of the porous plate, and a mechanism for changing the temperature of the cooling fluid based on the difference between the temperature of the porous plate when the wafer is held on the holding surface and the temperature of the porous plate when the wafer is separated from the holding surface, as measured by the thermometer. Porous temperature compatible temperature It may also include a modified section. Furthermore, a thermometer is used to measure the temperature of the porous plate, and the ejection time for ejecting the cooling fluid from the holding surface is changed based on the difference between the temperature of the porous plate when the wafer is held on the holding surface and the temperature of the porous plate when the wafer is separated from the holding surface, as measured by the thermometer. Porous temperature response time It may also include a modified section. [Effects of the Invention]

[0011] According to the grinding device and the wafer grinding method according to the present invention, part of the processing heat stored in the porous plate once cooled by the grinding water supplied to the contact surface (processing surface) between the grinding wheel and the wafer during grinding is removed by the cooling fluid ejected from the holding surface when separating from the holding surface of the wafer, and the temperature of the holding surface is maintained at the initial temperature when holding the wafer, so that thermal expansion of the chuck table is prevented. For this reason, the holding surface of the chuck table is always parallel to the processing surface of the grinding wheel, the thicknesses of a plurality of wafers continuously and successively ground by the grinding wheel are kept uniform, and the effect that the quality of the wafers is stabilized is obtained.

Brief Description of the Drawings

[0012] [Figure 1] It is a perspective view showing a part of the wafer grinding device according to the present invention broken away. [Figure 2] It is a broken side view of a main part of the grinding device showing the holding step in the wafer grinding method according to the present invention. [Figure 3] It is a broken side view of a main part of the grinding device showing the grinding step in the wafer grinding method according to the present invention. [Figure 4] It is a broken side view of a main part of the grinding device showing the separation step in the wafer grinding method according to the present invention. [Figure 5] It is a broken side view of a main part of the grinding device showing the cleaning step in the wafer grinding method according to the present invention.

Embodiments for Carrying Out the Invention

[0013] Hereinafter, embodiments of the present invention will be described based on the accompanying drawings.

[0014] [Wafer Grinding Device] The grinding apparatus 1 shown in Figure 1 grinds a disc-shaped wafer 100, which is a workpiece, and includes a chuck table 10 that holds the wafer 100 on its upper circular holding surface 11 and rotates around the center of the wafer 100 as an axis, a grinding mechanism 40 that grinds the wafer 100, which is held by suction on the holding surface 11 of the chuck table 10, with a grinding wheel 452, a grinding water supply unit 60 (see Figure 3) that supplies grinding water at a predetermined temperature to the contact surface between the wafer 100 and the grinding wheel 452, a wafer separation mechanism 70 (see Figure 3) that ejects a cooling fluid at a temperature lower than the temperature of the grinding water from the holding surface 11 to separate the wafer 100 from the holding surface 11, and a cleaning mechanism 80 (see Figure 5) that cleans the holding surface 11 of the chuck table 10 after the wafer 100 has separated.

[0015] Here, wafer 100 is made of a single-crystal silicon matrix, and in the state shown in Figure 1, multiple devices (not shown) are formed on the downward-facing surface, and these devices are protected by protective tape (not shown) attached to the surface of wafer 100. The wafer 100 is then held by suction on its surface (the bottom surface in Figure 1) to the holding surface 11 of the chuck table 10, and its back surface (the top surface in Figure 1) is ground by the grinding mechanism 40.

[0016] The chuck table 10 is a disc-shaped member, and as shown in Figure 2, a disc-shaped porous plate 13 made of porous ceramic or the like is incorporated into a circular recess 12 formed in its center. The upper surface of the porous plate 13 constitutes a holding surface 11 that attracts and holds the disc-shaped wafer 100.

[0017] As shown in Figure 2, the chuck table 10 is horizontally mounted on the upper end of the rotating shaft 15 extending upward from the rotary joint 14, and a driven pulley 16 is mounted on the outer circumference of the rotating shaft 15. Next to the driven pulley 16, a motor 17, which is the rotation drive source, is positioned vertically, and a drive pulley 18 is mounted on the upper end of the motor shaft 171 extending upward from the motor 17. An endless timing belt 19 is wrapped around the drive pulley 18 and the driven pulley 16. The outer diameter of the drive pulley 18 is set to be smaller than the outer diameter of the driven pulley 16.

[0018] Furthermore, as shown in Figure 2, vertically extending passages 2, 3, and 4 are formed along the axes of the chuck table 10, the rotating shaft 15, and the rotary joint 14. The upper end of passage 2 opens toward the lower surface of the porous plate 13. The lower end of passage 4 bends at a right angle and opens toward the side of the rotary joint 14, to which the piping 5 is connected.

[0019] Here, three branch pipes 6, 7, and 8 branch off from pipe 5. Branch pipe 6 is connected to a suction source 22, such as a vacuum pump, via a variable orifice 20 for flow rate adjustment and an electromagnetic valve 21. Branch pipe 7 is connected to an air supply source 73, such as an air compressor, via a variable orifice 71 and an electromagnetic valve 72. Branch pipe 8 is connected to a cooling water supply source 77, such as a water pump, via a variable orifice 74, an electromagnetic valve 75, and a temperature control unit 76. The temperature control unit 76 includes a first temperature change unit 761 and a second temperature change unit 762.

[0020] The two electromagnetic valves 72 and 75 are electrically connected to a time adjustment unit 78 for controlling the opening and closing timing of these electromagnetic valves 72 and 75. The time adjustment unit 78 comprises a first time adjustment unit 781 and a second time adjustment unit 782.

[0021] Furthermore, as shown in Figure 2, the chuck table 10 is equipped with a load sensor 23 that measures the load applied to the wafer 100 from the grinding wheel 452 during the grinding process. In addition, the chuck table 10 is equipped with a thermometer 24 that measures the temperature of the porous plate 13. The load sensor 23 constitutes the load measurement unit, and this load sensor 23, thermometer 24, motor 17, electromagnetic valves 21, 72, 75, and time adjustment unit 78 are electrically connected to a control unit (not shown).

[0022] In this embodiment, the grinding apparatus 1, as shown in Figure 1, is equipped with a rectangular box-shaped base 25 that is long in the Y-axis direction (front-to-back direction), and a chuck table 10 is housed in a rectangular opening 26 that is long in the Y-axis direction and opens into the base 25. The area around the chuck table 10 in the opening 26 that opens into the upper surface of the base 25 is covered by a rectangular plate-shaped cover 27, and the front and rear (-Y direction and +Y direction) portions of the cover 27 of the opening 26 are covered by bellows-shaped expandable covers 28 that move and expand together with the cover 27. Therefore, even when the chuck table 10 is in that position on the Y-axis, the opening 26 is always closed by the cover 27 and the expandable cover 28, so that foreign matter is reliably prevented from entering the base 25 from the opening 26.

[0023] As shown in Figure 1, the base 25 is provided with a horizontal movement mechanism 30 that moves the chuck table 10 horizontally (in the Y-axis direction) relative to the holding surface 11. This horizontal movement mechanism 30 is disposed on a rectangular block-shaped internal base 31 housed inside the base 25 and includes a block-shaped slider 32. This slider 32 is slidable in the Y-axis direction along a pair of left and right guide rails 33 that are arranged parallel to each other along the Y-axis direction (front-rear direction). Therefore, the rotational drive mechanism, including the chuck table 10 and motor 17 (see Figure 2), which is supported by this slider 32, is slidable along the Y-axis direction together with the slider 32.

[0024] A rotatable ball screw shaft 34 extending in the Y-axis direction (front-to-back direction) is positioned between a pair of left and right guide rails 33 on the internal base 31. One end of the ball screw shaft 34 in the Y-axis direction (right end in Figure 1) is connected to a reversible motor 35, which is the drive source. The other end of the ball screw shaft 34 in the Y-axis direction (left end in Figure 1) is rotatably supported by a bearing 36 erected on the internal base 31. A nut member (not shown), projecting downward from the slider 32, is screwed onto this ball screw shaft 34.

[0025] Therefore, when the motor 35 is rotated in both forward and reverse directions, causing the ball screw shaft 34 to rotate in both forward and reverse directions, a nut member (not shown) that is screwed onto the ball screw shaft 34 slides along the ball screw shaft 34 in the Y-axis direction (forward and backward direction) together with the slider 32. As a result, the chuck table 10 also moves integrally along the Y-axis direction together with the slider 32. Consequently, the wafer 100, which is held by suction on the holding surface 11 of the chuck table 10, also moves along the Y-axis direction. The motor 35 is electrically connected to a control unit (not shown), and its drive is controlled by the control unit.

[0026] As shown in Figure 1, the grinding mechanism 40 includes a holder 41 with an opening at the top, a spindle motor 42 which is a rotational drive source housed vertically in the holder 41, a spindle 43 which is rotationally driven by the spindle motor 42, a disc-shaped mount 44 attached to the lower end of the spindle 43, and a grinding wheel 45 which is detachably mounted on the lower surface of the mount 44. Here, the grinding wheel 45 is composed of a disc-shaped base 451 and a plurality of grinding wheels 452 which are processing tools attached in an annular shape to the lower surface of the base 451. The grinding wheels 452 are processing tools for grinding the wafer 100, and their lower surfaces constitute a grinding surface that contacts the wafer 100.

[0027] As shown in Figure 3, a load current value detection unit 46 is connected to the spindle motor 42 for detecting the load current value of the spindle motor 42. The spindle 43 is also equipped with a load sensor 47, which constitutes a load measurement unit for measuring the load acting from the grinding wheel 452 on the wafer 100 during grinding. The spindle motor 42, the load current value detection unit 46, and the load sensor 47 are electrically connected to a control unit (not shown).

[0028] The grinding mechanism 40 can be moved up and down in a direction perpendicular to the holding surface 11 of the chuck table 10 (Z-axis direction) by a vertical movement mechanism 50. As shown in Figure 1, this vertical movement mechanism 50 is positioned on the -Y-axis end face (front face) of a rectangular box-shaped column 51 that is erected vertically on the +Y-axis end (rear end) of the upper surface of the base 25. This vertical movement mechanism 50 moves a rectangular plate-shaped lifting plate 52 attached to the back of the holder 41 up and down in the Z-axis direction along a pair of left and right guide rails 53, together with the holder 41 and the spindle motor 42 and grinding wheel 45 held by the holder 41. Here, the pair of left and right guide rails 53 are arranged perpendicularly and parallel to each other on the front surface of the column 51.

[0029] Furthermore, a rotatable ball screw shaft 54 ​​is erected vertically along the Z-axis direction (up and down direction) between a pair of left and right guide rails 53, and the upper end of the ball screw shaft 54 ​​is connected to a motor 55 that is capable of forward and reverse rotation and is the drive source. Here, the motor 55 is mounted vertically via a rectangular plate-shaped bracket 56 attached to the upper surface of the column 51. The lower end of the ball screw shaft 54 ​​is rotatably supported by the column 51, and a nut member (not shown) that protrudes horizontally toward the rear (+Y-axis direction) from the back of the lifting plate 52 is screwed onto this ball screw shaft 54.

[0030] Therefore, by driving the motor 55 to rotate the ball screw shaft 54 ​​in both forward and reverse directions, the lifting plate 52, to which a nut member (not shown) that screws onto the ball screw shaft 54 ​​is attached, moves up and down along the Z-axis together with the grinding mechanism 40. The motor 55 is electrically connected to a control unit (not shown), and its drive is controlled by the control unit.

[0031] The grinding water supply unit 60 shown in Figure 3 supplies grinding water at a predetermined temperature to the contact surface between the wafer 100 and the grinding wheel 452 during the grinding process of the wafer 100, which is held by suction on the holding surface 11 of the chuck table 10, and is equipped with a grinding water supply source 61. Here, the grinding water supply source 61 is connected to the upper end of a water channel 62 formed along the axis center of the spindle 43, and the lower end of the water channel 62 is connected to a plurality of water channels 63 formed horizontally and radially outward from the center of the mount 44. The radially outer ends of the plurality of water channels 63 communicate with a plurality of water channels 64 formed vertically on the mount 44 and the base 451 of the grinding wheel 45, and the plurality of water channels 64 open to the inner circumference side of the grinding wheel 452.

[0032] The wafer separation mechanism 70 separates the wafer 100, which has finished grinding, from the holding surface 11 of the chuck table 10 by ejecting a cooling fluid (in this embodiment, a mixed fluid of water and air) at a temperature lower than the temperature of the grinding water from the holding surface 11, and is configured as shown in Figure 2. Specifically, the wafer separation mechanism 70 includes an air supply source 73 connected to the piping 5 via a variable orifice 71 and an electromagnetic valve 72 provided in the branch pipe 7, a cooling water supply source 77 connected to the piping 5 via a variable orifice 74, an electromagnetic valve 75 and a temperature adjustment unit 76 provided in the branch pipe 8, and a time adjustment unit 78 for controlling the opening and closing timing of the electromagnetic valves 72 and 75.

[0033] The cleaning mechanism 80 supplies cleaning fluid to the holding surface 11 of the chuck table 10 after the wafer 100 has been ground and separated from the holding surface 11, and is configured as follows.

[0034] Specifically, as shown in Figure 1, a gate-shaped support frame 81 is erected vertically on the base 25 so as to straddle the opening 26. A motor 82 and a lifting cylinder 83 that moves the motor 82 up and down in the Z-axis direction (vertical direction) are supported on the horizontal portion 811 of this support frame 81. A brush-shaped cleaning tool 84 is attached to the lower end of the motor shaft 821 that extends downward from the motor 82.

[0035] Furthermore, as shown in Figure 5, the cleaning mechanism 80 includes a cleaning liquid injection nozzle 85 that sprays cleaning liquid toward the contact surface between the cleaning tool 84 and the porous plate 13, a cleaning liquid supply source 86 that supplies cleaning liquid to the cleaning liquid injection nozzle 85, and an electromagnetic on / off valve 87 and a temperature control unit 88 provided in the cleaning liquid supply path from the cleaning liquid supply source 86 to the cleaning liquid injection nozzle 85. The electromagnetic on / off valve 87 and the temperature control unit 88 are electrically connected to a control unit (not shown).

[0036] As shown in Figure 1, the grinding apparatus 1 according to this embodiment includes a cassette 101 for storing a plurality of wafers 100 before grinding, a cassette 102 for storing wafers 100 after grinding, an loading / unloading robot 103 for loading and unloading wafers 100 into and out of cassette 101, an alignment table 104 for positioning wafers 100 unloaded from cassette 101, a first transport arm 105 for transporting wafers 100 positioned on the alignment table 104 to a chuck table 10, a cleaning mechanism 90 for cleaning wafers 100 after grinding, and a second transport arm 106 for removing wafers 100 after grinding from the chuck table 10 and transporting them to the cleaning mechanism 90.

[0037] The cleaning mechanism 90 includes a spinner table 91 that holds and rotates the wafer 100 after grinding, and an injection nozzle 92 that sprays cleaning water or high-pressure air.

[0038] Here, Figure 4 shows a part of the configuration of the second transport arm 106. At the tip of this second arm 106, a disc-shaped suction plate 110 is horizontally attached by multiple pins 111 (only two are shown in Figure 4). A disc-shaped porous plate 112 is fitted onto this suction plate 110, and a suction source 113, such as a vacuum pump, is connected to the porous plate 112. The lower surface of the porous plate 112 forms a holding surface for adsorbing and holding the ground wafer 100.

[0039] [Wafer grinding method] Next, a method for grinding a wafer 100 using the grinding apparatus 1 configured as described above will be explained.

[0040] The wafer grinding method according to the present invention is carried out sequentially through four steps: a holding step, a grinding step, a separation step, and a cleaning step. Each step will be described below.

[0041] (holding process) The holding process involves suction-holding the wafer 100 onto the holding surface 11 of the chuck table 10. In this holding process, one wafer 100 is removed from the cassette 101 by the loading / unloading robot 103 shown in Figure 1 and placed on the alignment table 104. The alignment table 104 then aligns the wafer 100, and the aligned wafer 100 is transported to the chuck table 10 while being suction-held by the first transport arm 105. In the chuck table 10, the wafer 100 is placed on the holding surface 11 with its back surface (ground surface) facing upwards. From this state, the electromagnetic valve 21 is opened with both electromagnetic valves 72 and 75 closed. Then, when a suction source 22 such as a vacuum pump is driven and air inside the porous plate 13 is sucked in through passages 2, 3, 4, piping 5 and branch pipe 6, a negative pressure is generated inside the porous plate 13. The wafer 100 is then attracted and held on the holding surface 11 of the chuck table 10 by this negative pressure.

[0042] (Grinding process) The grinding process is a process in which the wafer 100, which was held by suction on the holding surface 11 of the chuck table 10 in the holding process, is ground by the grinding mechanism 40 shown in Figure 1. In this grinding process, the chuck table 10 and the wafer 100 held by suction on it are moved below the grinding wheel 45 of the grinding mechanism 40 by the horizontal movement mechanism 30 shown in Figure 1 and positioned.

[0043] In other words, when the motor 35 of the horizontal movement mechanism 30 is activated and the ball screw shaft 34 rotates, a slider 32, to which a nut member (not shown) is attached and screwed onto the ball screw shaft 34, slides along a pair of left and right guide rails 33 in the +Y axis direction together with the chuck table 10, etc., so that the wafer 100 held on the holding surface 11 of the chuck table 10 is positioned below the grinding wheel 45 of the grinding mechanism 40. At this time, the horizontal positional relationship between the grinding wheel 452 and the wafer 100 is adjusted so that the lower surface (machining surface) of the grinding wheel 452 passes through the center of the wafer 100.

[0044] Furthermore, the motor 17 shown in Figure 3 is driven to rotate the chuck table 10, causing the wafer 100 held on the holding surface 11 of the chuck table 10 to rotate at a predetermined rotational speed in the direction of arrow 10a (counterclockwise). That is, when the motor 17 is driven and the drive pulley 18 rotates, this rotation is reduced via the timing belt 19 and transmitted to the driven pulley 16, so that together with the driven pulley 16, the rotating shaft 15, the chuck table 10 attached to the rotating shaft 15, and the wafer 100 held thereon are rotated at the predetermined rotational speed as described above. At the same time, the spindle motor 42 is driven to rotate the grinding wheel 45 at a predetermined rotational speed in the direction of arrow 40a (counterclockwise) in Figure 3.

[0045] As described above, with the wafer 100 and grinding wheel 45 rotating, the vertical movement mechanism 50 is driven to lower the grinding wheel 45 in the -Z axis direction. That is, when the motor 55 is driven and the ball screw shaft 54 ​​rotates, the lifting plate 52, which is provided with a nut member (not shown) that is screwed onto the ball screw shaft 54, descends in the -Z axis direction together with the spindle motor 42 and the grinding wheel 45. Then, the lower surface (machining surface) of the grinding wheel 452 of the grinding wheel 45 comes into contact with the back surface of the wafer 100. In this state, when the grinding wheel 45 is lowered by a predetermined amount in the -Z axis direction (direction of arrow 60a in Figure 3) from the lower surface of the grinding wheel 452 in contact with the upper surface of the wafer 100, the upper surface of the wafer 100 is ground by a predetermined amount by the grinding wheel 452.

[0046] In this grinding process, grinding water at a predetermined temperature is supplied from the grinding water supply source 61 shown in Figure 3 through water channels 62, 63, and 64 to the contact surface (processing surface) between the grinding wheel 452 and the wafer 100. The processing heat generated at the contact surface between the grinding wheel 452 and the wafer 100 due to friction is removed by the grinding water, and the contact surface is cooled. In this grinding process, the temperature of the porous plate 13 provided on the chuck table 10 is measured by a thermometer 24 (temperature measurement process). The wafer 100 is maintained in a state of being held by suction on the holding surface 11 of the chuck table 10 by suction of air from the porous plate 13 by the suction source 22. Furthermore, at the end of the grinding process, in preparation for the subsequent separation process, a temperature measurement process is performed to measure the temperature of the porous plate 13, or a load measurement process is performed using a load sensor 47 to measure the load applied to the lower surface of the grinding wheel 452 in a direction perpendicular to the lower surface 452. The temperature of the porous plate 13 or the value of the said load is then stored in the control unit.

[0047] (Defection process) The separation process is a process in which the wafer 100, which has been ground in the preceding grinding process, is separated from the holding surface 11 of the chuck table 10. In this separation process, as shown in Figure 4, the electromagnetic valve 21 is closed and the two electromagnetic valves 72 and 75 of the wafer separation mechanism 70 are opened. Then, a cooling fluid, which is a mixture of air from the air supply source 73 and cooling water from the cooling water supply source 77, is supplied from each branch pipe 7 and 8 to the porous plate 13 via the pipes 5 and passages 4, 3, and 2. The cooling fluid is ejected from the porous plate 13 and applies pressure to the underside of the wafer 100, making it easier for the wafer 100 to separate from the holding surface 11 of the chuck table 10.

[0048] Then, from the above state, as shown in Figure 4, the suction plate 110 provided at the tip of the second transport arm 106 descends, and when the porous plate 112 of the suction plate 110 comes into contact with the upper surface of the wafer 100, air inside the porous plate 112 is sucked in from a suction source 113 such as a vacuum pump. As a result, negative pressure is generated in the porous plate 112, and the wafer 100 is attracted and held by the porous plate 112 by this negative pressure. Therefore, as the second transport arm 106 rises, the wafer 100 is transferred from the chuck table 10 to the second transport arm 106.

[0049] Here, in the grinding process prior to this separation process, the temperature of the cooling fluid supplied to the porous plate 13 is set lower than the temperature of the grinding water supplied to the contact surface between the grinding wheel 452 and the wafer 100. The temperature of this cooling fluid is changed by the temperature adjustment unit 76 so that the temperature of the porous plate 13 measured by the thermometer 24 becomes the initial temperature when the wafer 100 is held by suction (first temperature change process). Specifically, the first temperature change unit 761, which constitutes the temperature adjustment unit 76, changes the temperature of the cooling fluid so that the temperature difference becomes zero, based on the temperature of the porous plate 13 measured in advance by the thermometer 24 before the holding process and the temperature of the porous plate 13 when the wafer 100 is separated from the holding surface 11 in the separation process. The temperature of the porous plate 13 before the holding process may be used as the initial temperature. Alternatively, the temperature of the porous plate 13 before the holding process (initial temperature) may be measured with a thermometer 24, or the temperature of the holding surface 100 of the porous plate 13 may be measured with a thermometer other than the thermometer 24. Alternatively, the thermometer 24 may be positioned to measure the temperature of the frame that houses the porous plate 13 in the chuck table 10, and the temperature of the frame may be measured to return the porous plate 13 to its initial temperature. Furthermore, the temperature of the cooling fluid may be changed to zero based on the temperature difference between the initial temperature and the temperature of the porous plate 13 before separating the wafer 100 from the holding surface 11. Furthermore, when the cooling fluid is a mixture of water and air, the temperature of the cooling fluid may be changed by changing the temperature of the cooling water only, the temperature of the air only, or the temperature of both the cooling water and air. Furthermore, the temperature of the cooling fluid ejected from the holding surface 11 may be lower than the initial temperature.

[0050] Alternatively, in the load measurement step during the grinding process, the temperature of the cooling fluid may be changed by the second temperature change unit 762 of the temperature adjustment unit 76 according to the magnitude of the load applied to the lower surface of the grinding wheel 452 in a direction perpendicular to the lower surface, as measured by the load sensor 47 (second temperature change step), so that the temperature of the porous plate 13 becomes the initial temperature when the wafer 100 is held by suction. Specifically, the greater the load on the lower surface of the grinding wheel 452 (the greater the processing heat), the lower the temperature of the cooling fluid is set.

[0051] Alternatively, instead of changing the temperature of the cooling fluid by the first and second temperature changing steps described above, the ejection time of the cooling fluid may be changed. That is, in the temperature measurement step, the first time changing unit 781 of the time adjustment unit 78 may change the ejection time of the cooling fluid according to the difference between the temperature of the porous plate 13 when the wafer 100 is held on the holding surface 11 as measured by the thermometer 24, and the temperature of the porous plate 13 when the wafer 100 is separated from the holding surface 11 in the separation step (first time changing step). Alternatively, in the time adjustment unit 78, the second time changing unit 782 of the time adjustment unit 78 may change the ejection time of the cooling fluid according to the magnitude of the load on the lower surface of the grinding wheel 452 in a direction perpendicular to the lower surface as detected by the load sensor 47 (second time changing step). Specifically, the higher the temperature of the porous plate 13 measured by the thermometer 24, and the greater the load detected by the load sensor 47, the longer the cooling fluid ejection time is increased. Conversely, the lower the temperature of the porous plate 13 measured by the thermometer 24, and the smaller the vertical load detected by the load sensor 47, the shorter the cooling fluid ejection time is increased. Furthermore, the temperature of the cooling fluid ejected from the holding surface 11 may be lower than the initial temperature.

[0052] (Washing process) The cleaning process is a process of cleaning the surface of the holding surface 11 of the chuck table 10 after the wafer 100 has separated from the holding surface 11 in the preceding separation process. In this cleaning process, the holding surface 11 of the chuck table 10 is cleaned by the cleaning mechanism 80 shown in Figure 5.

[0053] Specifically, with the cleaning tool 84 pressed against the holding surface 11 of the chuck table 10, which rotates in the direction of arrow 10a in Figure 5, the electromagnetic valve 87 is opened and cleaning fluid from the cleaning fluid supply source 86 is sprayed from the cleaning fluid spray nozzle 85 towards the contact area between the holding surface 11 and the cleaning tool 84. This cleans the holding surface 11 of the chuck table 10. At this time, the electromagnetic valve 75 may be opened to supply cooling water from the cooling water supply source 77 to the porous plate 13, causing the cooling water to be ejected from the holding surface 11. In this case, the temperature of the cooling water is adjusted by the temperature adjustment unit 88 so that the temperature of the porous plate 13 measured by the thermometer 24 (see Figure 3) becomes the initial temperature when the wafer 100 is held by suction. This allows the temperature of the porous plate 13 to be returned to the initial temperature even if the temperature of the porous plate 13 rises after the release process.

[0054] In the detachment process, the wafer 100, which has detached from the holding surface 11 of the chuck table 10 and is held by the second transport arm 106, is transported to the cleaning mechanism 90 shown in Figure 1 and set on the spinner table 91 of the cleaning mechanism 90. Then, as the wafer 100 rotates together with the spinner table 91, its top surface (processed surface) is cleaned by high-pressure air and water sprayed from the spray nozzle 92, and foreign matter such as grinding debris adhering to the top surface is removed.

[0055] Subsequently, the wafer 100, whose top surface has been cleaned, is suction-held by the loading / unloading robot 103 shown in Figure 1 and transported to the cassette 102. The series of grinding processes on the wafer 100 is completed when it is stored in the cassette 102.

[0056] As described above, according to the grinding method of the present invention, the grinding water supplied to the contact surface (processing surface) between the grinding wheel 452 and the wafer 100 during grinding removes the processing heat from the contact surface (processing surface) between the grinding wheel 452 and the wafer 100. A portion of the processing heat transferred to the porous plate 13 during grinding and stored in the porous plate 13 is removed by the cooling fluid ejected from the holding surface 11 when the wafer 100 is separated from the holding surface 11, and the temperature of the holding surface 11 is returned to the initial temperature when the wafer 100 was held. As a result, heat does not accumulate in the chuck table 10 over time, and the temperature of the chuck table 10 is always kept constant (initial temperature), preventing thermal expansion. Therefore, the holding surface 11 of the chuck table 10 is always parallel to the surface (processing surface) of the grinding wheel 452, and the wafer 100 to be ground next is also held by the holding surface 11 of the porous plate 13, which has been brought to the initial temperature. Consequently, the thickness of the multiple wafers 100 that are continuously ground one after another by the grinding wheel 452 is kept uniform, resulting in the effect of stabilizing the quality of the wafers 100.

[0057] It should be noted that the present invention is not limited to the embodiments described above, and various modifications are possible within the scope of the technical idea described in the claims, specification, and drawings. [Explanation of symbols]

[0058] 1: Grinding device, 2-4: Passageway, 5: Piping, 6-8: Branch pipe, 10: Chuck table, 11: Retaining surface, 12: Recess, 13: Porous plate, 14: Rotary joint, 15: Rotating shaft, 16: Driven pulley, 17: Motor, 171: Motor shaft, 18: Drive pulley, 19: Timing belt, 20: Variable orifice, 21: Electromagnetic valve, 22: Suction source, 23: Load sensor (load measuring unit), 24: Thermometer, 25: Base, 26: Opening, 27: Cover, 28: Telescopic cover, 30: Horizontal movement mechanism, 31: Internal base, 32: Slider, 33: Guide rail, 34: Ball screw shaft, 35: Motor, 36: Bearing, 40: Grinding mechanism, 41: Holder, 42: Spindle motor, 43: Spindle, 44: Mount, 45: Grinding wheel 451: Base, 452: Grinding wheel, 46: Load current value detection unit, 47: Load sensor (load measurement unit), 50: Vertical movement mechanism, 51: Column, 52: Lifting plate, 53: Guide rail, 54: Ball screw shaft, 55: Motor, 56: Bracket, 60: Grinding water supply unit, 61: Grinding water supply source, 62-64: Water channels, 70: Wafer separation mechanism, 71: Variable orifice, 72: Solenoid valve, 73: Air supply source, 74: Variable orifice, 75: Electromagnetic switch valve, 76: Temperature control unit 761: First temperature change unit, 762: Second temperature change unit, 77: Cooling water supply source, 78: Time adjustment section 781: First time change section, 782: Second time change section, 80: Cleaning mechanism, 81: Support frame, 811: Horizontal section of the support frame, 82: Motor, 821: Motor shaft, 83: Lifting cylinder, 84: Cleaning tool, 85: Cleaning fluid spray nozzle, 86: Cleaning fluid supply source, 87: Electromagnetic switch valve, 88: Temperature control unit, 90: Cleaning mechanism, 91: Spinner 4-table, 92: Spray nozzle, 100: Wafer, 101, 102: Cassette, 103: Loading / unloading robot, 104: Alignment table, 105: First transport arm, 106: Second transport arm, 110: Suction plate, 111: Pin, 112: Porous plate, 113: Suction source

Claims

1. A wafer grinding method comprising grinding a wafer held on the holding surface of a porous plate of a chuck table with a grinding wheel, A holding step of holding the wafer on the holding surface, A grinding step in which grinding water at a predetermined temperature is supplied to the wafer and the wafer is ground with the grinding wheel, A separation step is performed to separate the ground wafer from the holding surface while supplying a cooling fluid at a temperature lower than the initial temperature when the holding surface held the wafer to the porous plate, Equipped with, The process includes a cleaning step in which, after the separation step, the cooling fluid is supplied to the porous plate, causing the cooling fluid to be ejected from the holding surface, and the holding surface is cleaned with a cleaning tool. A wafer grinding method characterized by cooling the porous plate with a cooling fluid ejected from the holding surface so that the holding surface reaches the initial temperature when the wafer is held.

2. A wafer grinding method comprising grinding a wafer held on the holding surface of a porous plate of a chuck table with a grinding wheel, A holding step of holding the wafer on the holding surface, A grinding step in which grinding water at a predetermined temperature is supplied to the wafer and the wafer is ground with the grinding wheel, A separation step is performed to separate the ground wafer from the holding surface while supplying a cooling fluid at a temperature lower than the initial temperature when the holding surface held the wafer to the porous plate, Equipped with, The grinding process includes a load measurement step in which the load applied to the lower surface of the grinding wheel in a direction perpendicular to the lower surface is measured, and a load-response temperature change step is performed in which the temperature of the cooling fluid is changed according to the magnitude of the load measured in the load measurement step. A wafer grinding method characterized by cooling the porous plate with the cooling fluid whose temperature has been changed in the load-response temperature change step so that the holding surface reaches the initial temperature when the wafer is held.

3. A wafer grinding method comprising grinding a wafer held on the holding surface of a porous plate of a chuck table with a grinding wheel, A holding step of holding the wafer on the holding surface, A grinding step in which grinding water at a predetermined temperature is supplied to the wafer and the wafer is ground with the grinding wheel, A separation step is performed to separate the ground wafer from the holding surface while supplying a cooling fluid at a temperature lower than the initial temperature when the holding surface held the wafer to the porous plate, Equipped with, The grinding process includes a load measurement step in which a load applied to the lower surface of the grinding wheel in a direction perpendicular to the lower surface is measured, and a load response time modification step is performed in which the ejection time for ejecting the cooling fluid from the holding surface is changed according to the magnitude of the load measured in the load measurement step. A wafer grinding method characterized by cooling the porous plate with the cooling fluid ejected from the holding surface at a modified ejection time in the load response time modification step, so that the holding surface reaches the initial temperature when the wafer is held.

4. A method for grinding a wafer according to any one of claims 1 to 3, wherein the cooling fluid supplied to the porous plate is a mixed fluid of water and air.

5. A method for grinding a wafer according to any one of claims 1 to 3, wherein the grinding step includes a temperature measurement step for measuring the temperature of the porous plate, and a porous temperature-dependent temperature changing step is performed to change the temperature of the cooling fluid according to the temperature measured in the temperature measurement step.

6. A method for grinding a wafer according to any one of claims 1 to 3, wherein the grinding step includes a temperature measurement step for measuring the temperature of the porous plate, and a porous temperature response time changing step is performed to change the ejection time for ejecting the cooling fluid from the holding surface according to the temperature measured in the temperature measurement step.

7. A grinding device, A chuck table that holds wafers on the porous plate holding surface, A grinding mechanism that grinds the wafer by rotating a spindle with an annular grinding wheel attached to its tip, A grinding water supply unit that supplies grinding water at a predetermined temperature to the wafer and the grinding wheel, A wafer separation mechanism that separates the wafer from the holding surface by ejecting a cooling fluid at a lower temperature than the grinding water from the holding surface, A cleaning mechanism that sprays the cooling fluid from the holding surface that does not hold the wafer and cleans the holding surface with a cleaning tool, A grinding device equipped with the following features.

8. The grinding apparatus according to claim 7, wherein the wafer separation mechanism and the cleaning mechanism are supplied with a cooling fluid mixture of water and air.

9. A grinding device, A chuck table that holds wafers on the porous plate holding surface, A grinding mechanism that grinds the wafer by rotating a spindle with an annular grinding wheel attached to its tip, A grinding water supply unit that supplies grinding water at a predetermined temperature to the wafer and the grinding wheel, A wafer separation mechanism that separates the wafer from the holding surface by ejecting a cooling fluid at a lower temperature than the grinding water from the holding surface, A load measuring unit for measuring the load applied to the lower surface of the grinding wheel in a direction perpendicular to the lower surface, A load-response temperature change unit that changes the temperature of the cooling fluid according to the magnitude of the load measured by the load measuring unit, A grinding device equipped with the following features.

10. A grinding device, A chuck table that holds wafers on the porous plate holding surface, A grinding mechanism that grinds the wafer by rotating a spindle with an annular grinding wheel attached to its tip, A grinding water supply unit that supplies grinding water at a predetermined temperature to the wafer and the grinding wheel, A wafer separation mechanism that separates the wafer from the holding surface by ejecting a cooling fluid at a lower temperature than the grinding water from the holding surface, A load measuring unit for measuring the load applied to the lower surface of the grinding wheel in a direction perpendicular to the lower surface, A load-response time adjustment unit that changes the ejection time for ejecting the cooling fluid from the holding surface according to the magnitude of the load measured by the load measuring unit, A grinding device equipped with the following features.

11. A thermometer for measuring the temperature of the porous plate, A porous temperature-compatible temperature changing unit that changes the temperature of the cooling fluid based on the difference between the temperature of the porous plate when the wafer is held on the holding surface and the temperature of the porous plate when the wafer is separated from the holding surface, as measured by the thermometer, The grinding apparatus according to claim 9 or 10, comprising:

12. A thermometer for measuring the temperature of the porous plate, A porous temperature-dependent time adjustment unit that changes the ejection time for ejecting the cooling fluid from the holding surface based on the difference between the temperature of the porous plate when the wafer is held on the holding surface and the temperature of the porous plate when the wafer is separated from the holding surface, as measured by the thermometer, The grinding apparatus according to claim 9 or 10, comprising:

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