Grinding device

Abstract

To provide a grinding apparatus that is advantageous for space-saving and is also capable of increasing efficiency of work related to maintenance of the grinding apparatus.SOLUTION: A grinding apparatus is used for grinding a workpiece and includes: a chuck table having a holding surface for holding the workpiece; a grinding unit having a spindle to which a grinding wheel in which a plurality of grindstones is arrayed in an annular shape, is attached; and an exterior cover having an opening facing the grinding unit, and a door capable of covering the opening, the exterior cover being configured to cover both the chuck table and the grinding unit. In the grinding apparatus, on an inner surface of the door that faces the grinding unit in a closed state in which the opening is covered with the door, a work bench is provided that is folded to prevent interference with the grinding unit in the closed state.SELECTED DRAWING: Figure 3

Description

Technical Field

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[0003]

[0001] The present invention relates to a grinding device used when grinding a plate-shaped workpiece such as a wafer.

Background Art

[0002] When grinding a plate-shaped workpiece such as a wafer, a grinding device is used that includes a chuck table having a holding surface for holding the workpiece and a grinding unit having a spindle to which a grinding wheel having a plurality of grinding wheels arranged thereon is attached with bolts or the like (see, for example, Patent Document 1). The grinding unit is supported by a ball screw type grinding feed mechanism, and this grinding feed mechanism moves the grinding wheel in a direction intersecting the holding surface and brings the grinding wheel into contact with the workpiece on the chuck table, thereby grinding the workpiece.

[0003] In the grinding device as described above, the thickness of the workpiece after grinding is precisely controlled by setting the position where the grinding wheel of the grinding wheel contacts the holding surface of the chuck table as the reference position of the grinding feed mechanism. The setting of the reference position for the grinding device is performed by a method in which an operator approaches the grinding wheel to the chuck table with a block gauge of a predetermined thickness arranged on the chuck table. Note that since this reference position is shifted by the detachment and attachment of the grinding wheel, the setting of the reference position is performed every time the grinding wheel is replaced.

Prior Art Documents

Patent Documents

[0004] <00−00019>

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, maintenance of grinding equipment, such as replacing grinding wheels, requires several tools, including torque wrenches and other replacement tools, cleaning tools such as rags and alcohol, and the aforementioned gauge blocks used for setting reference positions. Therefore, a workbench capable of holding these tools is used when maintaining grinding equipment.

[0006] However, carrying the workbench around and setting it up and putting it away each time the grinding equipment needs maintenance is inefficient. Furthermore, a separate storage area for the workbench, not far from the grinding equipment itself, is needed for storing the used workbench.

[0007] Therefore, the object of the present invention is to provide a grinding apparatus that can improve the efficiency of maintenance work and is advantageous in terms of space saving. [Means for solving the problem]

[0008] According to one aspect of the present invention, a grinding apparatus used for grinding a workpiece comprises: a chuck table having a holding surface for holding the workpiece; a grinding unit having a spindle on which a grinding wheel with a plurality of grinding wheels arranged in an annular shape is mounted; and an exterior cover having an opening facing the grinding unit and a door that can cover the opening, covering both the chuck table and the grinding unit, wherein the inner surface of the door facing the grinding unit when the opening is covered by the door is a workbench that folds down so as not to interfere with the grinding unit when the door is closed. And a shelf on which a case for housing the grinding wheel is placed, A grinding device is provided that is equipped with [a specific feature / feature]. [Effects of the Invention]

[0010] A grinding apparatus according to one aspect of the present invention has a workbench on the inner surface of the door that covers the opening of the outer cover, which folds down so as not to interfere with the grinding unit. Therefore, there is no need to carry the workbench around and prepare or put it away each time maintenance of the grinding apparatus is performed with the opening exposed. Furthermore, when the opening is closed and covered by the door, the workbench is housed inside the outer cover, so there is no need to secure a separate place to store the workbench in addition to where the grinding apparatus is installed.

[0011] Thus, according to one aspect of the present invention, a grinding apparatus is provided that can improve the efficiency of maintenance work on the grinding apparatus and is advantageous in terms of saving space. [Brief explanation of the drawing]

[0012] [Figure 1] Figure 1 is a schematic perspective view showing the structure of a grinding machine. [Figure 2] Figure 2 is a schematic perspective view showing the external appearance of the grinding machine. [Figure 3] Figure 3 is a schematic perspective view showing the grinding machine with the door open. [Figure 4] Figure 4 is a front view of the door, workbench, and shelves as seen from inside the door. [Figure 5] Figure 5 shows side views of the door, workbench, and shelves. [Modes for carrying out the invention]

[0013] Embodiments of the present invention will be described below with reference to the attached drawings. Figure 1 is a schematic perspective view showing the structure of the grinding apparatus 2 of this embodiment. In Figure 1, some of the elements constituting the grinding apparatus 2 are represented by functional blocks. Also, the X-axis (axis along the front-to-back direction), Y-axis (axis along the left-to-right direction), and Z-axis (axis along the up-to-down direction) used in the following description are perpendicular to each other.

[0014] As shown in Figure 1, the grinding device 2 is equipped with a base 4 that supports the various elements that constitute the grinding device 2. A concave housing 4a is provided on the front end of the upper surface of the base 4, with its upper end opening to the upper surface of the base 4. A first transport mechanism 6, used for transporting a plate-shaped workpiece 11, is housed in this housing 4a. The first transport mechanism 6 is typically a robot arm with multiple joints, which can not only transport the workpiece 11 but also invert the workpiece 11.

[0015] The workpiece 11 is, for example, a disc-shaped wafer made of a semiconductor material such as silicon. That is, the workpiece 11 has a circular surface 11a and a circular back surface 11b opposite to the surface 11a. The surface 11a side of the workpiece 11 is divided into multiple small regions by multiple intersecting streets (planned division lines), and devices such as integrated circuits (ICs) are formed in each small region.

[0016] The grinding apparatus 2 of this embodiment is used, for example, when grinding the back surface 11b of the workpiece 11. When grinding the back surface 11b of the workpiece 11, it is desirable that a protective member made of a material such as resin be attached to the front surface 11a of the workpiece 11. By attaching the protective member to the front surface 11a of the workpiece 11, the impact applied to the front surface 11a during grinding of the back surface 11b is mitigated, and the device of the workpiece 11 is protected.

[0017] Furthermore, in this embodiment, a disc-shaped wafer made of a semiconductor material such as silicon is used as the workpiece 11, but the material, shape, structure, size, etc. of the workpiece 11 are not limited to this embodiment. For example, substrates made of other semiconductors, ceramics, resins, metals, etc. can be used as the workpiece 11. Similarly, the type, quantity, shape, structure, size, arrangement, etc. of devices are not limited to the above embodiment. Devices do not need to be formed on the workpiece 11.

[0018] As shown in FIG. 1, in front of the housing portion 4a, there are provided two cassette placement areas 10 on which cassettes 8 capable of accommodating a plurality of workpieces 11 are placed. Diagonally rearward of the housing portion 4a, a position adjustment mechanism 12 for adjusting the position of the workpiece 11 is provided. The position adjustment mechanism 12 includes a disk-shaped position adjustment table having a diameter smaller than that of the workpiece 11, and a plurality of pins arranged around the position adjustment table.

[0019] By moving a plurality of pins along the radial direction of the position adjustment table, for example, the center of the workpiece 11 carried out from the cassette 8 by the first transfer mechanism 6 and placed on the position adjustment table can be aligned with a predetermined position in the direction along the X-axis and the direction along the Y-axis. The workpiece 11 is placed on the position adjustment table such that its grinding surface (in this embodiment, the back surface 11b) is exposed upward.

[0020] On the side of the position adjustment mechanism 12, a second transfer mechanism 14 for holding and transporting the workpiece 11 rearward is provided. The second transfer mechanism 14 includes, for example, an arm and a holding pad connected to the tip of the arm and capable of sucking and holding the upper surface (grinding surface) side of the workpiece 11. By rotating the holding pad by the arm, the workpiece 11 whose position has been adjusted by the position adjustment mechanism 12 is transported rearward.

[0021] Behind the second transfer mechanism 14, a turntable 16 is provided. The turntable 16 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis by the power of this rotation drive source. On the upper surface of the turntable 16, three sets of disk-shaped chuck tables 18 are provided at substantially equal angular intervals along the circumferential direction of the turntable 16. However, the number and arrangement of the chuck tables 18 are not limited to this embodiment.

[0022] Each chuck table 18 includes, for example, a disk-shaped frame body made of a material such as ceramics. At the upper part of the frame body, a concave portion is provided whose upper end is circularly open on the upper surface of the frame body. A holding plate made of a porous disk shape with a material such as ceramics is fixed to this concave portion.

[0023] The upper surface (holding surface) 18a of the holding plate is formed in a shape corresponding to the side surface of a cone, for example, and functions as a holding surface for holding the workpiece 11. The height difference between the center of the upper surface 18a of the holding plate corresponding to the apex of the cone and the outer peripheral edge of the upper surface 18a of the holding plate is about 10 μm to 30 μm.

[0024] The lower surface side of the holding plate is connected to a suction source such as an ejector via a flow path provided inside the frame body and a valve or the like arranged outside the frame body. Therefore, when the valve is opened and the negative pressure of the suction source acts in a state where the workpiece 11 or the like is in contact with the upper surface 18a of the holding plate, the workpiece 11 is sucked by this chuck table 18. That is, the workpiece 11 is held by the holding surface of the chuck table 18.

[0025] Each chuck table 18 is connected to a rotational drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis or a rotation axis slightly inclined with respect to the Z-axis by the power of this rotational drive source. Each chuck table 18 is supported by the turntable 16 via an angle adjustment mechanism (not shown), and the angle of the rotation axis of each chuck table 18 is adjusted by this angle adjustment mechanism.

[0026] When the turntable 16 rotates, each chuck table 18 moves, for example, in the order of the loading / unloading area A adjacent to the second transfer mechanism 14, the rough grinding area B behind the loading / unloading area A, the finish grinding area C on the side of the rough grinding area B, and the loading / unloading area A. The second transfer mechanism 14 transfers the workpiece 11 held by the holding pad from the position adjustment table of the position adjustment mechanism 12 to the chuck table 18 arranged in the loading / unloading area A.

[0027] As shown in Figure 1, columnar support structures 20 are provided behind the rough grinding area B and the finish grinding area C (i.e., behind the turntable 16). A Z-axis moving mechanism 22 is provided on the front side of each support structure 20. Each Z-axis moving mechanism 22 is equipped with a pair of guide rails 24 that are generally parallel to the Z-axis, and a moving plate 26 is attached to the guide rails 24 in a manner that allows it to slide.

[0028] Each movable plate 26 is provided with a nut portion (not shown) that constitutes a ball screw on its rear (back) side. A screw shaft 28, which is generally parallel to the guide rail 24, is connected to this nut portion in a manner that allows it to rotate. A rotational drive source 30, such as a motor, is connected to one end of each screw shaft 28. By rotating the screw shaft 28 with the rotational drive source 30, the movable plate 26 moves along the guide rail 24.

[0029] A grinding unit 32 is supported on the front (surface) of each movable plate 26. Each grinding unit 32 includes a spindle housing 34 fixed to the movable plate 26. Each spindle housing 34 houses a spindle 36 having a rotation axis parallel to the Z-axis, or an axis slightly inclined with respect to the Z-axis, in such a manner that it can rotate around its axis.

[0030] The lower end of each spindle 36 is exposed from the lower end surface of the spindle housing 34, and a disc-shaped mount 38 is fixed to this lower end. For example, the outer edge of each mount 38 is provided with a plurality of holes (not shown) that penetrate the mount 38 in the direction of its thickness, and bolts (not shown), which are fasteners, are inserted into each hole.

[0031] A grinding wheel 40 for rough grinding is bolted to the underside of the mount 38 of the grinding unit 32 on the rough grinding area B side. In other words, the grinding wheel 40 for rough grinding is mounted on the spindle 36 on the rough grinding area B side. Furthermore, a rotational drive source 42, such as a motor, is provided on the upper part of the spindle housing 34 of the grinding unit 32 on the rough grinding area B side, and is connected to the upper end of the spindle 36. The power from this rotational drive source 42 rotates the grinding wheel 40 for rough grinding together with the spindle 36.

[0032] On the other hand, a grinding wheel 40 for finishing grinding is bolted to the underside of the mount 38 of the grinding unit 32 on the finishing grinding area C side. In other words, the grinding wheel 40 for finishing grinding is mounted on the spindle 36 on the finishing grinding area C side. Furthermore, a rotational drive source 42, such as a motor, is provided on the upper part of the spindle housing 34 of the grinding unit 32 on the finishing grinding area C side, and is connected to the upper end of the spindle 36. The power from this rotational drive source 42 rotates the grinding wheel 40 for finishing grinding together with the spindle 36.

[0033] Each grinding wheel 40 includes an annular wheel base 40a made of a metal such as stainless steel or aluminum. Multiple grinding wheels 40b, each in which abrasive grains such as diamond are dispersed in a binder such as vitrified or resinoid, are fixed to the lower surface of the wheel base 40a so as to be arranged in an annular shape along the circumferential direction of the wheel base 40a.

[0034] Furthermore, the average particle size of the abrasive grains contained in the grinding wheel 40b of the grinding wheel 40 for finish grinding is smaller than the average particle size of the abrasive grains contained in the grinding wheel 40b of the grinding wheel 40 for rough grinding. This realizes a grinding wheel 40 suitable for rough grinding and a grinding wheel 40 suitable for finish grinding. The specific size of the abrasive grains is appropriately set according to the quality required of the workpiece 11 after grinding.

[0035] Next to each grinding wheel 40, a nozzle (not shown) is provided at the point where the workpiece 11 held by the chuck table 18 and the grinding wheel 40b come into contact, allowing for the supply of a liquid (grinding fluid) such as pure water. Alternatively, or in conjunction with this nozzle, a liquid supply port for supplying the liquid may be provided on the grinding wheel 40 or the like.

[0036] Furthermore, thickness measuring devices 44 are positioned on the sides of the rough grinding area B and the finish grinding area C, respectively, to measure the thickness of the workpiece 11 during grinding. Typically, the thickness measuring device 44 includes a first height gauge that can measure the height of the upper surface of the frame of the chuck table 18, and a second height gauge that can measure the height of the upper surface of the workpiece 11 held by the chuck table 18. The difference between the measurement value of the first height gauge and the measurement value of the second height gauge is adopted as the thickness of the workpiece 11.

[0037] The workpiece 11 held on the chuck table 18 in the rough grinding area B has its upper surface ground by the grinding unit 32 on the rough grinding area B side as described above. Similarly, the workpiece 11 held on the chuck table 18 in the finish grinding area C has its upper surface ground by the grinding unit 32 on the finish grinding area C side as described above.

[0038] In other words, the chuck table 18 holding the workpiece 11 moves in the order of loading / unloading area A, rough grinding area B, and finish grinding area C, so that rough grinding and finish grinding of the workpiece 11 are performed continuously. When the finish grinding of the workpiece 11 is completed, the chuck table 18 in finish grinding area C is placed back in loading / unloading area A.

[0039] A third conveying mechanism 46 is provided in front of the loading / unloading area A and to the side of the second conveying mechanism 14, which holds the workpiece 11 after grinding and conveys it forward. The third conveying mechanism 46 includes a holding pad that sucks and holds the upper surface of the workpiece 11, and an arm connected to the holding pad. The arm rotates the holding pad, thereby conveying the workpiece 11 after grinding from the chuck table 18 in the loading / unloading area A forward.

[0040] A cleaning unit 48 is provided to the side of the third conveying mechanism 46 for cleaning the workpiece 11 that has been discharged by the third conveying mechanism 46. The cleaning unit 48 includes, for example, a spinner table that rotates while holding the lower surface of the workpiece 11, and a cleaning nozzle that sprays cleaning fluid onto the upper surface of the workpiece 11 held by the spinner table.

[0041] The cleaning fluid used in the cleaning unit 48 is typically a mixed fluid (two fluids) of water and air. Of course, water or other fluids not mixed with air may also be used as the cleaning fluid. The workpiece 11 cleaned in the cleaning unit 48 is transported by the first transport mechanism 6 and, for example, stored in the transport source cassette 8.

[0042] A control unit 50 is connected to each element of the grinding apparatus 2. This control unit 50 is composed of a computer including, for example, a processing unit 50a and a storage device 50b, and controls the operation of each element of the grinding apparatus 2 described above so that the workpiece 11 is properly ground.

[0043] The processing unit 50a is typically a CPU (Central Processing Unit) and performs various processes necessary to control the elements described above. The storage device 50b includes, for example, a main memory such as DRAM (Dynamic Random Access Memory) and an auxiliary storage device such as a hard disk drive or flash memory. The functions of this control unit 50 are realized, for example, by the operation of the processing unit 50a according to software such as a program stored in the storage device 50b.

[0044] Figure 2 is a schematic perspective view showing the external appearance of the grinding device 2. As shown in Figure 2, a hollow rectangular parallelepiped-shaped outer cover 52 is provided on the upper surface of the base 4. Elements of the grinding device 2, such as the chuck table 18 and the grinding unit 32, are covered by this outer cover 52.

[0045] The exterior cover 52 includes a door 54. Figure 3 is a schematic perspective view showing the grinding apparatus 2 with the door 54 open. As shown in Figure 3, the door 54 is configured as a plate that can cover, for example, a rectangular opening 56 provided in the exterior cover 52. This opening 56 is typically located facing the grinding unit 32, and in the open state, when the door 54 is opened and the opening 56 is exposed, an operator can access the internal grinding unit 32 from outside the exterior cover 52 through the opening 56.

[0046] A touchscreen (input / output device) 58, which serves as a user interface, is positioned at the front of the outer cover 52 in a manner that allows it to be operated from outside the outer cover 52. Additionally, an indicator light 60 that emits light is positioned at the top of the outer cover 52 in a manner that allows it to be seen from outside the outer cover 52. Both the touchscreen 58 and the indicator light 60 are connected to the control unit 50.

[0047] For example, various conditions applied when grinding the workpiece 11 are input from the operator to the control unit 50 via the touchscreen 58. Also, for example, if any abnormality occurs in the grinding device 2, the indicator light 60 will light up or flash to notify the operator. Instead of the touchscreen 58 which integrates the input device and output device (display device), an input device such as a keyboard or mouse and an output device (display device) such as a liquid crystal display may be used.

[0048] In the grinding apparatus 2 according to this embodiment, as shown in Figure 3, a foldable workbench 62 and a shelf 64 are provided on the inner surface 54a of the door 54 that faces the grinding unit 32 when the opening 56 is covered by the door 54 in a closed state. Figure 4 is a front view of the door 54, workbench 62 and shelf 64 as seen from the inside of the door 54, and Figure 5 is a side view of the door 54, workbench 62 and shelf 64.

[0049] As shown in Figure 4, hinges 54b and 54c are provided on one side of the rectangular, flat door 54. The door 54 is connected to the exterior cover 52 via hinges 54b and 54c in a manner that allows it to be opened and closed. For example, during maintenance of the grinding device 2, the door 54 is opened (open state) to expose the opening 56. This allows the operator to access the internal grinding unit 32 through the opening 56. When maintenance is complete, the door 54 is closed (closed state) so that the opening 56 is covered by the door 54.

[0050] The workbench 62, provided on the inner surface 54a of the door 54, has a first plate 62a that is configured as a rectangular flat plate. For example, the upper edge of the first plate 62a is fixed or connected to the inner surface 54a of the door 54. The lower edge of the first plate 62a is connected to the lower edge of a second plate 62b that is configured as a rectangular flat plate via a connecting member (not shown), such as a hinge. Therefore, the second plate 62b rotates around this connecting member as its center of rotation.

[0051] As shown in Figure 5, regulating members 62c are provided at positions corresponding to the lower edge of the first plate 62a, the connecting member, and the lower edge of the second plate 62b, supporting the first plate 62a and restricting the range of angles in which the second plate 62b can rotate. However, if the range of angles in which the second plate 62b can rotate is restricted by other members or methods, these regulating members 62c may be omitted.

[0052] When using the workbench 62 configured in this way, for example, the second plate 62b is rotated around the connecting part as the center of rotation, so that the height of the upper part of the second plate 62b is approximately the same as the height of the lower part. As a result, the upward-facing surface of the second plate 62b becomes roughly horizontal, and various tools used for maintenance and other purposes can be placed on this surface.

[0053] On the other hand, when storing the workbench 62, the workbench 62 is folded by, for example, rotating the second plate 62b around the connecting part as the center of rotation, so that the height of the upper edge of the second plate 62b is approximately the same as the height of the upper edge of the first plate 62a. In other words, the second plate 62b is placed on top of the first plate 62a so that the surface on which the second plate 62b is placed comes into contact with one side of the first plate 62a. As a result, even when the door 54 is closed, the workbench 62 does not interfere with the grinding unit 32.

[0054] As shown in Figure 4, a shelf 64 is provided on the surface 54a above the workbench 62, on which a case 21 capable of housing a grinding wheel 40 is placed. The shelf 64 includes, for example, a rectangular flat shelf plate 64a. The shelf plate 64a has a flat mounting surface on which the case 21 is placed, and is fixed to the surface 54a with this mounting surface facing upward.

[0055] One end of shelf board 64a is connected to the lower end of side plate 64b, which is a rectangular flat plate and defines one end of the storage area of ​​shelf 64. Similarly, the other end of shelf board 64a is connected to the lower end of side plate 64c, which is a rectangular flat plate and defines the other end of the storage area of ​​shelf 64. Both side plate 64b and side plate 64c are fixed to surface 54a.

[0056] Furthermore, fall prevention bars 64d are fixed to the side panels 64b and 64c to prevent the case 21 placed on the shelf 64a from falling. By providing such a shelf 64 on the door 54, work such as replacing the grinding wheel 40 can be carried out more efficiently. Note that this shelf 64 is also configured to be of a size and shape that does not interfere with the grinding unit 32 when the door 54 is closed.

[0057] As described above, the grinding apparatus 2 according to this embodiment has a workbench 62 on the inner surface 54a of the door 54 that covers the opening 56 of the outer cover 52, which folds down so as not to interfere with the grinding unit 32. Therefore, there is no need to carry the workbench around and prepare or put it away each time maintenance of the grinding apparatus 2 is performed with the opening 56 exposed. Furthermore, when the opening 56 is covered by the door 54 and the workbench 62 is housed inside the outer cover 52, there is no need to secure a separate place to store the workbench in addition to the place where the grinding apparatus 2 is installed. In other words, the efficiency of maintenance work on the grinding apparatus 2 is increased, and it is also advantageous in terms of saving space.

[0058] Furthermore, the present invention is not limited to the embodiments described above and can be implemented with various modifications. For example, the number and arrangement of doors 54 provided in the grinding device 2 are not limited to the above-described configuration. The number of doors 54 provided in the grinding device 2 may be one or two or more. Also, if there are multiple doors 54, workbenches 62 and shelves 64 may be provided on all doors 54, or workbenches 62 and shelves 64 may be provided on only some of the doors 54. In addition, if at least a workbench 62 is provided, shelves 64 do not need to be provided on the doors 54.

[0059] Furthermore, the structures, methods, etc., of the embodiments and modified versions described above may be modified as appropriate, as long as they do not deviate from the scope of the present invention. [Explanation of Symbols]

[0060] 2: Grinding equipment 4: Base 4a: Containment section 6: First conveying mechanism 8: Cassette 10: Cassette mounting area 12:Position adjustment mechanism 14: Second conveying mechanism 16: Turntable 18: Chuck Table 18a:Top surface (holding surface) 20 :Support structure 22:Z-axis movement mechanism 24: Guide rail 26: Mobile Plate 28: Screw shaft 30: Rotary drive source 32: Grinding Unit 34: Spindle Housing 36: Spindle 38: Mount 40: Grinding Wheel 40a: Wheel base 40b: Grinding wheel 42: Rotary drive source 44: Thickness measuring instrument 46: Third conveying mechanism 48: Washing Unit 50: Control Unit 50a: Processing device 50b: Storage device 52: Exterior cover 54: Door 54a: face 54b: Hinge 54c: Hinge 56: Opening 58: Touchscreen (Input / Output Device) 60: Indicator light 62: Workbench 62a: 1st plate 62b: 2nd board 62c: Regulating member 64: Shelf 64a: Shelf board 64b: Side plate 64c: Side plate 64d: Fall prevention bar 11: Workpiece 11a: Surface 11b: Back side 21: Case A: Loading / unloading area B:Rough grinding area C: Finishing grinding area

Claims

[Claim 1] A grinding device used when grinding a workpiece, A chuck table having a holding surface for holding the workpiece, A grinding unit having a spindle on which a grinding wheel is mounted, in which multiple grinding wheels are arranged in a ring shape, It includes an exterior cover that covers both the chuck table and the grinding unit, having an opening facing the grinding unit and a door that can cover the opening, A grinding apparatus provided on the inner surface of the door facing the grinding unit when the opening is closed and covered by the door, the inner surface of the door is provided with a workbench that folds down so as not to interfere with the grinding unit when closed, and a shelf on which a case for housing the grinding wheel is placed.

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