High-density downward-facing plasma generation module

Abstract

The present invention discloses a plasma generation module including: a plurality of needle-shaped discharge electrodes arranged in a plurality of cells arranged in the XY plane, with the tips thereof arranged in the Z-axis direction at the centers of the respective cells; a ground electrode formed in one-to-one correspondence with the tips around the cells in the XY plane at the same height as the tips; a guide block having a groove formed therein on the upper part, on which the ground electrode is placed and into which the plurality of needle-shaped discharge electrodes are inserted; and a first terminal electrically connected to the plurality of needle-shaped discharge electrodes and a second terminal electrically connected to the ground electrode. According to the present invention, plasma can be uniformly generated over a large area by using the discharge electrodes and the ground electrodes included in the plurality of cells.

Description

Technical Field

[0001] The present invention relates to a plasma generation module of a direct - under - high - density method, and more particularly, to a large - area plasma generation module.

Background Art

[0002] A plasma generation device is a device that applies a high voltage of several kV to several thousand kV to a positive electrode and a negative electrode to cause partial discharge. The plasma generation device is generally used by being mounted on an electronic device such as an air purifier or an air conditioner. For example, an air purifier blows air together with positive (+) ions and negative (-) ions generated from a plasma generation device provided inside to clean the indoor space, and an air conditioner provided with a plasma generation device blows cold air into the indoor space. At the same time, it blows positive ions and negative ions together to clean the indoor space while cooling.

[0003] When a piezoelectric transformer amplifies and outputs a voltage and the output high voltage is applied in a needle shape, plasma is generated in the space around the needle. According to the conventional technology, in order to sterilize a large space using a plasma generation module configured in a pair of needles, a large number of plasma modules are required. By mounting a large number of plasma modules while maintaining the sterilization power, there is a problem that the amount of ozone generation increases in proportion to the number of plasma modules.

[0004] Also, according to the conventional technology, the needle - shaped part of the small plasma module attached to the air flow path is smaller than the total area of the air flow volume, that is, the active volume is small, and only a part of the air is sterilized, resulting in a problem of reduced sterilization efficiency.

[0005] As a technology related to the present invention, a plasma generator disclosed in the Registered Patent Publication of the Republic of Korea has a grid-type discharge structure including a first electrode plate and a second electrode plate. This technology relates to a structure in which the second electrode plate surrounds the entire first electrode plate, and there is a risk of ozone generation. The configuration and effects of the two inventions are distinguished from each other in that the arrangement position of the tip of the needle-type electrode and the ground electrode differs from that of the present invention. [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] One problem that the present invention aims to solve is to provide a plasma generation module that generates plasma over a multi-area area using discharge electrodes and ground electrodes in multiple cell units.

[0007] One problem that this invention aims to solve is to provide a plasma generation module that can reduce the probability of ozone generation through a smooth airflow.

[0008] One problem that this invention aims to solve is to provide a high-density plasma generation module with high process efficiency using modularized electrodes.

[0009] One problem that this invention aims to solve is not limited to the problems described above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description. [Means for solving the problem]

[0010] A plasma generation module according to one embodiment of the present invention for solving the aforementioned technical problems can be configured to include: a plurality of cells arranged in the XY plane, a plurality of needle-shaped discharge electrodes with peaks positioned in the Z-axis direction at the center of each cell; ground electrodes formed around the cells in a one-to-one correspondence with the peaks in the XY plane at the same height as the peaks; a guide block on which the ground electrodes are placed and into which the plurality of needle-shaped discharge electrodes are inserted; and a first terminal electrically connected to the plurality of needle-shaped discharge electrodes and a second terminal electrically connected to the ground electrode.

[0011] Furthermore, the multiple needle-shaped discharge electrodes are arranged so that their tips face the direction of the airflow.

[0012] Furthermore, the plurality of needle-shaped discharge electrodes may further include a plurality of electrode connectors that electrically connect the needle-shaped discharge electrodes of the row (m) or the column (n) in the cell arrangement of rows (m) and columns (n), and a cross connector that connects the plurality of electrode connectors to each other, and the first terminal may be configured to be electrically connected to the cross connector.

[0013] Furthermore, the electrode connector may include fitting grooves formed at one end and the other end, and the cross connector may be configured to be inserted into any one of the fitting grooves.

[0014] Furthermore, the ground electrode can be configured in the shape of a conductive ground pad, in which electrode holes are formed in a circular or polygonal shape with multiple rows (m) and columns (n) having a common center with the tip of the needle-shaped discharge electrode.

[0015] Furthermore, the guide block can be cylindrical in shape, having a common center with the tip of the needle-shaped discharge electrode, and can be configured to include flow channels arranged in correspondence with the cell.

[0016] Furthermore, the guide block may be formed such that the tunnel diameter is longest at the bottom and gradually shortens as it approaches the ground electrode, depending on the direction of airflow.

[0017] The plasma generation module further includes a top block that secures the ground electrode at the top of the guide block, the top block including an exhaust passage connected to the tunnel downstream of the airflow, the diameter of which may be formed to gradually increase in the direction of the airflow.

[0018] Furthermore, in the upper block, the diameter of the discharge passage at the height of the ground electrode may be longer than the diameter of the electrode hole, because the area of ​​the hole edge of the ground electrode that is in contact with the electrode hole is exposed in the line of sight parallel to the z-axis.

[0019] The plasma generation module further includes a bottom block located below the guide block, the bottom block of which may have an inflow passage that connects to the tunnel upstream of the airflow.

[0020] Specific details of other embodiments are included in the "Specific Details for Carrying Out the Invention" and the attached "Drawings".

[0021] The advantages and / or features of the present invention, and how they are fulfilled, will become clearer with reference to the various embodiments described in detail later with the accompanying drawings.

[0022] However, the present invention is not limited only to the configurations of each embodiment disclosed below, and may be embodied in various different forms. Merely, each embodiment disclosed herein is provided to complete the disclosure of the present invention and to fully inform those skilled in the art of the scope of the present invention, and it must be understood that the present invention is defined only by the scope of each claim of the claims.

Advantages of the Invention

[0023] According to the present invention, plasma can be uniformly generated over a large area by using a discharge electrode and a ground electrode included in a plurality of cells.

[0024] Also, the ozone generation probability can be reduced by a smooth air flow.

[0025] Also, the process convenience of the plasma generation module is increased by using modularized electrodes.

Brief Description of the Drawings

[0026] [Figure 1] It is a perspective view of a plasma generation module according to an embodiment of the present invention. [Figure 2] It is an exploded perspective view of a plasma generation module according to an embodiment of the present invention. [Figure 3] It is an exemplary view showing a cross-section parallel to the y-axis of the plasma generation module of FIG. 1. [Figure 4] It is an exemplary view showing a cross-section parallel to the x-axis of the plasma generation module of FIG. 1. [Figure 5] It is an exemplary view of a plurality of needle-shaped discharge electrodes of the plasma generation module of FIG. 1. [Figure 6] It is an exemplary view for explaining a hole edge on a ground electrode of the plasma generation module of FIG. 1.

Modes for Carrying Out the Invention

[0027] Before describing the present invention in detail, it should be noted that the terms and words used herein should not be interpreted unconditionally as being limited to their ordinary or dictionary meanings, and that the inventors of the present invention may appropriately define and use the concepts of various terms in order to best describe their invention, and furthermore, these terms and words must be interpreted as meanings and concepts consistent with the technical idea of ​​the present invention.

[0028] In other words, it should be noted that the terms used herein are used to describe preferred embodiments of the invention and are not intended to specifically limit the scope of the invention, and these terms are defined in consideration of the various possibilities of the invention.

[0029] Furthermore, in this specification, singular expressions may include plural expressions unless the context clearly indicates a different meaning, and similarly, expressions that are plural may include a singular meaning.

[0030] Throughout this specification, where a component is described as "including" another component, unless otherwise stated, it means that it may include any other component, rather than excluding any other component.

[0031] Furthermore, when it is stated that a component is "located inside or connected to" another component, it should be noted that this component may be directly connected to or in contact with the other component, or it may be located at a certain distance apart. In the case where it is located at a certain distance apart, there may be a third component or means for fixing or connecting the component to the other component, and the description of this third component or means may be omitted.

[0032] On the other hand, if one component is described as being "directly connected" or "directly linked" to another component, it should be understood that there is no third component or means.

[0033] Similarly, other expressions describing the relationships between each component, namely "between" and "immediately between," or "adjacent to" and "directly adjacent to," must be interpreted as having the same meaning.

[0034] Furthermore, it should be noted that, in this specification, terms such as "one side," "the other side," "one side," "the other side," "first," and "second," if used, are used to clearly distinguish one component from other components, and such terms are not used to restrict the meaning of the component in question.

[0035] Furthermore, in this specification, position-related terms such as "up," "down," "left," and "right," if used, should be understood to indicate the relative position of the component in the drawing, and these position-related terms should not be understood to refer to an absolute position unless an absolute position is specified for them.

[0036] Furthermore, in this specification, when specifying the reference numeral for each component in each drawing, the same component will have the same reference numeral even if it is shown in other drawings; that is, the same reference numeral throughout the specification will indicate the same component.

[0037] The sizes, positions, and relationships of the components constituting the present invention in the drawings attached herein may be exaggerated, reduced, or omitted in order to clearly convey the concept of the present invention or for the sake of explanatory convenience, and therefore, their proportions and scales are not strictly accurate.

[0038] Furthermore, in describing the present invention below, detailed explanations of configurations that are deemed likely to obscure the essence of the invention, such as prior art and other known technologies, may be omitted.

[0039] Embodiments of the present invention will be described in detail below with reference to the relevant drawings.

[0040] A plasma generation module 100 according to one embodiment of the present invention is a module that includes an electrode that generates atmospheric pressure plasma, which can be used to constitute a plasma generation device together with a high-voltage generator.

[0041] The longitudinal direction of the plasma generation module 100 is defined in the y-axis direction, the width direction in the x-axis direction, and the height direction in the z-axis direction.

[0042] Figure 1 is a perspective view of a plasma generation module according to one embodiment of the present invention.

[0043] Figure 2 is an exploded perspective view of a plasma generation module according to one embodiment of the present invention.

[0044] Referring to Figure 1, the plasma generation module 100 can be configured to include multiple cells arranged in multiple rows (m) and multiple columns (n), for example, 13 rows and 9 columns in Figure 1, in order to generate a large-area plasma.

[0045] In Figure 1, the cross-sectional shape of the cell is depicted as a circle, but it is not limited to this, and each cell has at least one shape from among a circle, an ellipse, and a polygon. Referring to Figure 2, similar to the cells, the holes 151, 121, 132, and 136 formed in the stacked blocks 130, 150 and the ground electrode 120 also have at least one shape from among a circle, an ellipse, and a polygon.

[0046] Referring to Figure 2, the hole formed in the upper block 150 is referred to as the discharge passage 151, the hole formed in the ground electrode 120 is referred to as the electrode hole 121, the hole formed in the upper guide block 131 is referred to as the tunnel 132, and the hole formed in the bottom block 135 is referred to as the inflow passage 136.

[0047] Referring again to Figures 1 and 2, the plasma generation module 100 can be configured to include a needle-shaped discharge electrode 110, a ground electrode 120, a guide block 130, a terminal 140, and an upper block 150. The ground electrode 120, the guide block 130, and the upper block 150 may be connected by coupling means 150, for example, screws.

[0048] The needle-shaped discharge electrode 110 consists of multiple cells arranged in the XY plane, with a pointed tip 111a positioned in the Z-axis direction at the center of each cell. The multiple needle-shaped discharge electrodes 110 are arranged so that their pointed tips face the direction of airflow. In other words, the needle-shaped tips of the needle-shaped discharge electrodes 110 are positioned downstream of the airflow at the center of each cell. This arrangement minimizes resistance to airflow. If air does not circulate smoothly, that is, if air accumulates around the needle-shaped discharge electrode 110, the probability of ozone generation increases.

[0049] Multiple needle-shaped discharge electrodes 110 are electrically connected to a high-voltage generator (not shown) via a first terminal 141. The method for connecting the multiple needle-shaped discharge electrodes 110 will be described later.

[0050] The ground electrode 120 can be configured in the shape of a ground pad on a conductor, in which electrode holes 121 are formed in a circular or polygonal shape with multiple rows (m) and columns (n) having a common center with the tip of the needle-shaped discharge electrode 110. Referring again to Figure 2, multiple ground electrodes 120 can be realized in the shape of a single connected ground pad. The ground electrode 120 is completed when electrode holes 121 are formed in a plate-shaped conductor by aligning rows and columns. The multiple electrode holes 121 are at least one of the shapes of a circle or a polygon.

[0051] The ground electrode 120 can be formed around the cell in the XY plane at the same height as the tip of the needle-shaped discharge electrode 110, in a one-to-one correspondence with the tip. The height of the ground electrode 120 will be described later.

[0052] The guide block 130 has the function of fixing the needle-shaped discharge electrodes 110 and the ground electrode 120. That is, the ground electrode 120 is placed on top of the guide block 130. Multiple needle-shaped discharge electrodes 110 are then inserted into grooves formed in the guide block 130. The multiple needle-shaped discharge electrodes 110 are fixed to the grooves formed in the guide block 130 either individually or after being woven together in a group. The shape of the needle-shaped discharge electrodes 110 will be described later.

[0053] Referring to Figure 2, the guide block 130 is cylindrical in shape, sharing a common center with the tip of the needle-shaped discharge electrode 110, and can be configured to include tunnels 132 arranged in correspondence with the cells. The tunnels 132 will be described later.

[0054] The guide block 130 can be made up of one piece or two pieces, depending on the direction in which the needle-shaped discharge electrode 110 is inserted. For example, if the needle-shaped discharge electrode 110 is inserted into a groove formed on the upper part of the guide block 130, the guide block 130 can be made up of one piece. In this case, the upper part of the guide block 130 is finished by the upper block 150. If the groove into which the needle-shaped discharge electrode 110 is inserted is formed on the lower part of the guide block 130, a bottom block 135 is required to finish the lower part.

[0055] In other words, the guide block 130 can be configured to include an upper guide block 131 positioned below the ground electrode 120 and a bottom block 135 positioned below the upper guide block 131. The tunnel formed in the bottom block 135 corresponds to an inflow passage 136 through which air flows upstream of the airflow.

[0056] Referring to Figure 2, the terminal 140 can be configured to include a first terminal 141 electrically connected to a plurality of needle-shaped discharge electrodes 110 and a second terminal 142 electrically connected to the ground electrode 120. It is preferable that the terminal 140 be formed as a pair, as shown in Figure 2, rather than being formed individually on multiple electrodes. Therefore, there is an intermediary between the electrode and the terminal to facilitate the electrical connection.

[0057] Referring again to Figure 2, the plasma generation module 100 can be configured to include an upper block 150 that secures the ground electrode 120 on top of the guide block 130. The ground electrode 120 is positioned between the upper block 150 and the upper guide block 131.

[0058] The upper block 150 can be configured to include a discharge passage 151 that connects to the tunnel 132 downstream of the airflow. The diameter of the discharge passage 151 may be formed to gradually increase in the direction of the airflow. The diameter of the discharge passage 151 will be described later.

[0059] Figure 3 is an illustrative diagram showing a cross-section of the plasma generation module of Figure 1 parallel to the y-axis. Referring to Figure 3, a longitudinal cross-section of the plasma generation module 100 formed by the bifurcation of the needle-shaped discharge electrodes 111 is depicted. Multiple needle-shaped discharge electrodes 110 can be configured to include individual needle-shaped discharge electrodes 111 and electrode connectors 112.

[0060] Figure 4 is an illustrative diagram showing a cross-section of the plasma generation module in Figure 1 parallel to the x-axis. Referring to Figure 4, a cross-section in the width direction of the plasma generation module 100 is depicted, formed by the bifurcation of the tip 111a of the needle-shaped discharge electrode 111. W1 to W3 indicate airflow.

[0061] Referring to Figures 3 and 4, W1 to W3 represent airflow. Viewed along the Z-axis, the upper block 150 is positioned at the top, and the ground electrode 120 is positioned in contact with the upper block 150. Below the ground electrode 120, the upper guide block 131 and the bottom block 135 are positioned in order.

[0062] W1 describes the airflow in the inlet passage 136, W2 describes the airflow in the tunnel 132, and W3 describes the airflow in the outlet passage 151.

[0063] The guide block 130 can be formed such that the diameter of the tunnel 126 is longest at the bottom and gradually shortens as it approaches the ground electrode 120, depending on the direction of airflow. According to Bernoulli's theory, the velocity of a fluid is inversely proportional to its cross-sectional area. Therefore, as the diameter of the tunnel 126 gradually narrows along the direction of airflow, the velocity of the airflow within the tunnel 126 gradually increases, enabling smooth air discharge.

[0064] Referring again to Figures 3 and 4, the ground electrode 120 may be formed in the XY plane at the same height as the tip of the needle-shaped discharge electrode 110, in one-to-one correspondence with the tip 111a around the cell. That is, the electrode hole 121 formed in the ground electrode 120 may be formed at the same height as the tip 111a of the needle-shaped discharge electrode 110. That is, the tip 111a of the needle-shaped discharge electrode 111 may be formed between the upper and lower surfaces of the pad forming the ground electrode 120. The position and shape of the needle-shaped discharge electrode 111 and the ground electrode 120 are related to the plasma parameters.

[0065] Figure 5 is an illustrative diagram of the multiple needle-shaped discharge electrodes of the plasma generation module shown in Figure 1.

[0066] Referring to Figure 5, the multiple needle-shaped discharge electrodes 110 can be configured to further include, in a cell arrangement of rows (m) and columns (n), multiple electrode connectors 112 that electrically connect each needle-shaped discharge electrode 111, i.e., multiple electrode connectors 112 that electrically connect each of the multiple electrode connectors 112, and multiple electrode connectors 115 that connect each of the multiple electrode connectors 112.

[0067] The electrode connector 112 can be configured to include insertion grooves 113 formed at one end and the other end. The cross connector 115 can be inserted into any one of the insertion grooves 113. The insertion grooves 113 may be provided at both ends for ease of assembly during the manufacturing process.

[0068] The first terminal 141 can be configured to be electrically connected to the cross connector 115. The second terminal 142 can be configured to be electrically connected to the ground electrode 120.

[0069] Figure 6 is an illustrative diagram illustrating the hole edge on the ground electrode of the plasma generation module of Figure 1. Referring to Figure 6, the upper block 150 can be formed such that the diameter of the discharge passage 151 is longer than the diameter of the electrode hole 121 at the height of the ground electrode 120, so that the area of ​​the hole edge 122 of the ground electrode 120 in contact with the electrode hole 121 is exposed in the line of sight parallel to the z-axis. That is, the hole edge 122 of the ground electrode 120 is exposed between the upper guide block 131 and the upper block 150, i.e., between the vertical wall surfaces of the discharge passage 151. Specifically, the wall surface corresponding to the thickness of the horizontal hole edge 122 and the vertical ground electrode 120 is exposed to the air, and this area is related to the discharge in relation to the individual needle-shaped discharge electrodes 111.

[0070] Thus, according to one embodiment of the present invention, plasma can be uniformly generated over a multi-area surface using discharge electrodes and ground electrodes contained in multiple cells. Furthermore, the probability of ozone generation can be reduced by smooth airflow. In addition, the modularized electrodes improve the process efficiency of the plasma generation module.

[0071] The present invention has been described above, focusing on its preferred embodiments. Those skilled in the art will understand that the present invention can be embodied in modified forms that do not deviate from its essential characteristics. Therefore, the disclosed embodiments should be considered in an explanatory rather than restrictive manner. The scope of the present invention is defined in the claims for utility model registration, not in the foregoing description, and any differences within an equivalent scope should be interpreted as being included in the present invention. [Industrial applicability]

[0072] This invention is used in the field of manufacturing plasma generators.

Claims

1. In a plurality of cells arranged in the XY plane, a plurality of needle-shaped discharge electrodes are arranged at the center of each cell such that their peaks face in the Z-axis direction, Ground electrodes are formed around the cell in the XY plane at the same height as the aforementioned point, corresponding one-to-one with the aforementioned point. The upper part is a guide block on which the ground electrode is placed and grooves are formed into which the plurality of needle-shaped discharge electrodes are inserted, A first terminal electrically connected to the plurality of needle-shaped discharge electrodes, It is configured to include a second terminal electrically connected to the ground electrode, A plasma generation module wherein the guide block is cylindrical in shape having a common center with the tips of the needle-shaped discharge electrodes and is configured to include tunnels arranged in correspondence with the cells, the diameter of the tunnels being longest at the bottom and gradually becoming shorter as it approaches the ground electrode depending on the direction of airflow, and the plurality of needle-shaped discharge electrodes are configured to be fixed in grooves formed in the guide block, either individually or after being woven together in groups.

2. The plurality of needle-shaped discharge electrodes are, The plasma generation module according to claim 1, wherein the pointed tip is positioned in the direction of the airflow.

3. In the plasma generation module according to claim 1, the plurality of needle-shaped discharge electrodes are In the arrangement of cells in rows (m) and columns (n), a plurality of electrode connectors electrically connect the needle-shaped discharge electrodes of the row (m) or the column (n) to each other, The present invention further includes a cross connector that connects the plurality of electrode connectors to each other, The first terminal is configured to be electrically connected to the cross connector, and is a plasma generation module.

4. In the plasma generation module according to claim 3, the electrode connector is It includes fitting grooves formed at one end and the other end, A plasma generation module configured such that the cross connector is inserted into one of the insertion grooves.

5. In the plasma generation module according to claim 1, the ground electrode is A plasma generation module configured in the shape of a conductor ground pad, in which electrode holes are formed in a circular or polygonal shape with multiple rows (m) and columns (n) having a common center with the tip of the needle-shaped discharge electrode.

6. The plasma generation module according to Claim 1, wherein the plasma generation module is The guide block further includes a top block for fixing the ground electrode at its upper part, A plasma generation module comprising an upper block including an exhaust passage connected to the tunnel downstream of the airflow, wherein the diameter of the exhaust passage is formed to gradually increase in the direction of the airflow.

7. In the plasma generation module according to claim 6, the upper block is: A plasma generation module in which, in order that the region of the hole edge of the ground electrode in contact with the electrode hole is exposed in a line of sight parallel to the z-axis, the diameter of the discharge passage at the height of the ground electrode is formed to be longer than the diameter of the electrode hole.

8. In the plasma generation module according to claim 1, the guide block is An upper guide block is positioned below the ground electrode, It includes a bottom block positioned below the upper guide block, The tunnel formed in the bottom block corresponds to an inflow passage through which air flows upstream of the airflow, and is a plasma generation module.

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