Liquid dispensing device

Abstract

To simultaneously perform driving of a discharge section and detection of a change in a pressure of liquid in the discharge section.SOLUTION: A liquid discharge device includes: a flow passage substrate which has one or more pressure chambers, an absorption chamber absorbing vibration of liquid propagated from the pressure chambers, and a nozzle connected to the pressure chambers so as to discharge liquid; a diaphragm laminated on the flow passage substrate; a first piezoelectric element which is provided at a position overlapping the pressure chambers viewed from a lamination direction with respect to a first surface to be a surface on an opposite side of a side where the pressure chambers exist of the diaphragm and the first piezoelectric element which vibrates the diaphragm and applies a pressure to liquid in the pressure chambers; a second piezoelectric element which is provided at a position overlapping the absorption chamber with respect to the first surface of the diaphragm and the second piezoelectric element which absorbs at least a part of vibration of liquid propagated from the pressure chamber due to deformation; and a pressure detection section which detects the pressure of liquid in the absorption chamber on the basis of electromotive force of the second piezoelectric element.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present disclosure relates to a liquid ejection device.

Background Art

[0002] Patent Document 1 describes a technique related to a liquid ejection device. In this liquid ejection device, when a drive signal generation unit outputs a drive signal for ink ejection, a piezoelectric element included in the ejection unit is driven. The piezoelectric element is joined to a diaphragm that closes the upper surface opening of the cavity plate. When the diaphragm is vibrated by driving the piezoelectric element, ink is ejected from a nozzle communicating with the cavity. Further, in this liquid ejection device, based on a residual vibration signal generated after the piezoelectric element is driven, a discharge abnormality detection unit detects a change in the pressure of the liquid inside the discharge unit. The residual drive signal is a signal indicating a change in the electromotive force of the piezoelectric element.

[0003] Furthermore, in the technique described in Patent Document 1, in order to switch between driving for ink ejection and detecting an abnormality, a switching unit switches between a state in which the ejection unit is connected to a drive vibration generation unit and a state in which the ejection unit is connected to a discharge abnormality detection unit.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the technique described in Patent Document 1, it is not possible to simultaneously perform driving of the ejection unit for ink ejection and detection of a change in the pressure of the liquid inside the ejection unit.

Means for Solving the Problems

[0006] According to one embodiment of the present disclosure, a liquid dispensing device is provided. The liquid dispensing device comprises a flow path substrate having one or more pressure chambers that form a liquid flow path, at least one absorption chamber connected to the pressure chambers and forming a liquid flow path together with the pressure chambers and absorbing vibrations of the liquid propagated from the pressure chambers, and a nozzle connected to the pressure chambers for dispensing liquid; a diaphragm laminated on the flow path substrate at a position overlapping the pressure chambers and absorption chambers in the lamination direction; a first piezoelectric element provided on one surface of the diaphragm, which is the surface opposite to the side where the pressure chambers are located, at a position overlapping the pressure chambers in the lamination direction, the first piezoelectric element vibrates the diaphragm to impart pressure to the liquid in the pressure chambers; a second piezoelectric element provided on the first surface of the diaphragm at a position overlapping the absorption chambers in the lamination direction, the second piezoelectric element deforms to absorb at least a portion of the vibrations of the liquid propagated from the pressure chambers; and a pressure detection unit that detects the pressure of the liquid inside the absorption chambers based on the electromotive force of the second piezoelectric element. [Brief explanation of the drawing]

[0007] [Figure 1] This is a schematic diagram showing the general configuration of a liquid dispensing device. [Figure 2] This is an exploded perspective view showing the configuration of the liquid dispensing head. [Figure 3] This is a cross-sectional view of the liquid discharge head at line III-III in Figure 2. [Figure 4] Figure 3 is a cross-sectional view of the pressure chamber and absorption chamber along line IV-IV. [Figure 5] Figure 3 is an enlarged view of the vibrating section. [Figure 6] This diagram shows an example of the arrangement of piezoelectric elements. [Figure 7] This is an enlarged view of the vibrating part according to Embodiment 3. [Figure 8] This is a schematic diagram showing the arrangement of the absorption section according to Embodiment 4. [Figure 9] This figure shows an example of the arrangement of drive wiring and detection wiring. [Modes for carrying out the invention]

[0008] A1. Embodiment 1: Figure 1 is a schematic diagram showing the general configuration of a liquid dispensing device 300 equipped with a liquid dispensing head 100. In Figure 1, for ease of understanding, an XYZ Cartesian coordinate system is set up. The X and Y axes are aligned with the horizontal plane, and the Z axis is aligned with the vertical line. Therefore, the -Z axis direction is the direction of gravity. However, this is not the case depending on the mounting direction of the liquid dispensing device 300. Furthermore, in this specification, orthogonal includes the range of 90° ± 10°.

[0009] The liquid ejection device 300 is an inkjet printer that prints an image on a printing paper P, which is a medium, by ejecting ink as a liquid. Specifically, the liquid ejection device 300 sprays ink onto the printing paper P based on print data indicating the on / off state of dots on the printing paper P, forming dots at various positions on the printing paper P. The liquid ejection device 300 may eject liquid onto a medium other than printing paper P, such as plastic, film, fiber, fabric, leather, metal, glass, wood, or ceramics. The liquid ejection device 300 may eject various colorants, electrode materials, bio-organic materials, inorganic samples, lubricating oil, resin liquid, etching solution, etc., instead of ink.

[0010] The liquid dispensing device 300 comprises a liquid dispensing head 100, a liquid container 310, a head moving mechanism 320, a transport mechanism 330, and a control unit 500.

[0011] The liquid dispensing head 100 has a plurality of nozzles 21 for dispensing liquid. The liquid dispensing head 100 is mounted on a carriage 322 and reciprocates mainly in the main scanning direction as the carriage 322 moves. While reciprocating in the main scanning direction, the liquid dispensing head 100 dispenses liquid supplied from a liquid container 310 onto the printing paper P being transported along the sub-scanning direction. In Embodiment 1, the main scanning direction is the +Y direction and the -Y direction. The sub-scanning direction is the direction intersecting the main scanning direction, and is the +X direction and the -X direction. In the illustrated example, the liquid is dispensed from the nozzles 21 in the -Z direction.

[0012] The liquid container 310 stores the liquid dispensed from the liquid dispensing head 100. The liquid stored in the liquid container 310 is supplied to the liquid dispensing head 100 via a resin tube 312. The liquid container 310 can be a bag-shaped liquid pack made of flexible film, a cartridge that can be attached to or detached from the liquid dispensing device 300, an ink tank, or the like.

[0013] The head movement mechanism 320 comprises a drive belt 321, a carriage 322, a transport motor 326, and a pulley 327. The carriage 322 mounts the liquid discharge head 100 in a state where liquid can be discharged. The carriage 322 is fixed to the drive belt 321. The drive belt 321 is stretched between the transport motor 326 and the pulley 327. When the transport motor 326 is rotationally driven, the drive belt 321 reciprocates in the main scanning direction. As a result, the carriage 322, which is fixed to the drive belt 321, also reciprocates in the main scanning direction.

[0014] The transport mechanism 330 transports the printing paper P in the sub-scanning direction. The transport mechanism 330 comprises three transport rollers 332, a transport rod 334 to which the transport rollers 332 are mounted, and a transport motor 336 that rotationally drives the transport rod 334. The transport motor 336 rotationally drives the transport rod 334, thereby transporting the printing paper P in the sub-scanning direction.

[0015] The control unit 500 controls the entire liquid dispensing device 300. The functions of the control unit 500 are realized by a computer equipped with a processor and memory. For example, the control unit 500 controls the reciprocating motion of the carriage 322 along the main scanning direction, the transport motion of the printing paper P along the sub-scanning direction, and the dispensing motion of the liquid dispensing head 100.

[0016] Figure 2 is an exploded perspective view showing the configuration of the liquid discharge head 100. Figure 3 is a cross-sectional view of the liquid discharge head 100 along line III-III in Figure 2.

[0017] As shown in FIG. 2, the liquid ejection head 100 includes a head body 11, a case member 40, and a wiring board 120. As shown in FIG. 3, the head body 11 and the case member 40 are configured to be plane-symmetric with respect to the center plane O. The center plane O is a plane parallel to the X-axis and the Z-axis, and is the XZ plane where the distances from the nozzle row L1 and the nozzle row L2 are equal. The configurations of the head body 11 and the case member 40 are common in the +Y direction and the -Y direction with respect to the center plane O.

[0018] As shown in FIG. 2, the head body 11 has a pressure chamber substrate 10, a communication substrate 15, a nozzle substrate 20, and a vibration unit 30. The pressure chamber substrate 10, the communication substrate 15, the nozzle substrate 20, and the vibration unit 30 are laminated members. By laminating these laminated members, the liquid ejection head 100 is formed. In Embodiment 1, the direction in which the laminated members forming the liquid ejection head 100 are laminated is also referred to as the lamination direction. In the present embodiment, the lamination direction is the Z-axis direction.

[0019] The pressure chamber substrate 10 is fixed on the communication substrate 15 by an adhesive or the like. The pressure chamber substrate 10 is formed of a single crystal silicon substrate. Alternatively, the pressure chamber substrate 10 may be formed of a metal such as stainless steel (SUS) or nickel (Ni), a ceramic material such as zirconia (ZrO2) or alumina (Al2O3), a glass ceramic material, an oxide material such as magnesium oxide (MgO) or lanthanum aluminate (LaAlO3).

[0020] As shown in FIG. 3, a pressure chamber 12, an absorption chamber 13, and a support portion 14 are formed in the pressure chamber substrate 10. Both the pressure chamber 12 and the absorption chamber 13 form a part of the liquid flow path. The pressure chamber 12 and the absorption chamber 13 are formed, for example, by processing the pressure chamber substrate 10 by anisotropic etching.

[0021] The pressure chamber 12 and the absorption chamber 13 are located at the same position in the Z-axis direction and adjacent to each other in the Y-axis direction. Between the pressure chamber 12 and the absorption chamber 13, there is a support portion 14 that is formed as part of the pressure chamber substrate 10 and separates the pressure chamber 12 and the absorption chamber 13. The pressure chamber 12 and the absorption chamber 13 are connected in the Y-axis direction via a connecting passage Cm1 provided at the lower part of the support portion 14.

[0022] Figure 4 is a cross-sectional view of the pressure chamber 12 and absorption chamber 13 along line IV-IV in Figure 3. The dashed line indicates the position of the nozzle 21. The single-dot dashed line indicates the position of the actuator 150. The double-dot dashed line indicates the position of the absorption section 200. The multiple pressure chambers 12 are individually arranged along the Y-axis direction, corresponding to the multiple nozzles 21. The pressure chambers 12 are formed as spaces with the Y-axis direction as the longitudinal direction and the X-axis direction as the short direction. The multiple pressure chambers 12 are connected to one absorption chamber 13. The absorption chamber 13 extends along the X-axis direction, which is the direction in which the pressure chambers 12 extend. The absorption chamber 13 is formed as a space with the X-axis direction as the longitudinal direction and the Y-axis direction as the short direction. The longitudinal direction of the absorption chamber 13 is the same direction as the direction in which the multiple pressure chambers 12 are arranged. The longitudinal direction of the absorption chamber 13 is also called the first direction. The longitudinal direction of the pressure chamber 12 is also called the second direction.

[0023] In Embodiment 1, the length W1 in the X-axis direction of the actuator 150 corresponding to one pressure chamber 12 is shorter than the length W2 in the X-axis direction of the absorption section 200. For illustrative purposes, the length W2 is omitted in Figure 4. Compared to cases where length W1 is longer than length W2, and where lengths W1 and W2 are equal, setting length X1 shorter than length W2 makes it easier to ensure the flexibility of the absorption section 200. The functions of the pressure chamber 12 and the absorption chamber 13 will be described later.

[0024] As shown in Figures 2 and 3, the communication substrate 15 is placed between the pressure chamber substrate 10 and the nozzle substrate 20. The communication substrate 15 is fixed onto the nozzle substrate 20 by adhesive. The communication substrate 15 is formed from, for example, a silicon single crystal substrate. By placing the communication substrate 15 between the pressure chamber substrate 10 and the nozzle substrate 20, it is easier to ensure the flatness of the nozzle substrate 20 and stabilize the quality of the liquid discharged from the nozzle 21 compared to the case where the pressure chamber substrate 10 and the nozzle substrate 20 are directly laminated.

[0025] As shown in Figure 3, the communication substrate 15 has a first communication channel 16, a first common liquid chamber 17, a second common liquid chamber 18, and a second communication channel 19 formed therein. The first communication channel 16 is formed as an opening that penetrates the communication substrate 15 in the Z-axis direction. The first communication channel 16 is a channel that connects the pressure chamber 12 and the nozzle 21. The communication substrate 15 has a number of first communication channels 16 corresponding to the number of nozzles 21.

[0026] The first common liquid chamber 17 is formed as an opening that penetrates the communication substrate 15 in the Z-axis direction. The second common liquid chamber 18 is formed as a recess provided on the lower surface of the communication substrate 15. The first common liquid chamber 17 and the second common liquid chamber 18, together with the liquid chamber portion 42 formed in the case member 40 (described later), form a common liquid chamber portion 25. The common liquid chamber portion 25 constitutes part of the liquid flow path and stores the liquid supplied to the nozzle 21. The second communication flow path 19 is formed as an opening that penetrates the communication substrate 15 in the Z-axis direction. The second communication flow path 19 is a flow path that connects the absorption chamber 13 and the second common liquid chamber 18.

[0027] As shown in Figure 2, the nozzle substrate 20 is located on the side of the communication substrate 15 opposite to the side in contact with the pressure chamber substrate 10, i.e., the -Z side of the communication substrate 15. The nozzle substrate 20 is made of, for example, a stainless steel substrate, a substrate made of an organic material such as polyimide resin, or a silicon single crystal substrate. The nozzle substrate 20 has a plurality of nozzles 21. The plurality of nozzles 21 are holes that penetrate the nozzle substrate 20 in the Z-axis direction. The plurality of nozzles 21 are arranged along the X-axis direction. The pressure chamber substrate 10, the communication substrate 15, and the nozzle substrate 20 together are also called the flow path substrate.

[0028] The vibrating section 30 is positioned on the side of the pressure chamber substrate 10 opposite to the side in contact with the communication substrate 15, that is, on the +Z side of the pressure chamber substrate 10. As shown in Figure 3, the vibrating section 30 includes a protective substrate 31, an actuator 150, a diaphragm 155, and an absorption section 200. The absorption section 200 is also called the second piezoelectric element.

[0029] The protective substrate 31 is laminated on the pressure chamber substrate 10, sandwiching the diaphragm 155. The material used to form the protective substrate 31 is the same as that used for the pressure chamber substrate 10. The protective substrate 31 is provided to protect the actuator 150 by a recess 33, which will be described later.

[0030] Figure 5 is an enlarged view of the vibrating section 30 in Figure 3. As shown in Figure 5, the protective substrate 31 of the vibrating section 30 has a recess 33, an atmospheric communication hole 38, and a through hole 39. The recess 33 is a recess that opens to the -Z side. The recess 33 is not connected to a liquid flow path. Therefore, no liquid flows through the recess 33. The atmospheric communication hole 38 is connected to the end of the recess 33 in the X-axis direction. The recess 33 is connected to the outside through the atmospheric communication hole 38. In this way, the pressure in the recess 33 is maintained at atmospheric pressure with a simple configuration. As shown in Figure 3, the through hole 39 is formed to penetrate in the Z-axis direction at the center of the protective substrate 31 in the Y-axis direction. A wiring board 120, which will be described later, is inserted into the through hole 39.

[0031] As shown in Figure 5, the actuator 150 of the vibrating section 30 is positioned on the diaphragm 155 inside the recess 33. The actuator 150 vibrates the diaphragm 155 to apply pressure to the liquid in the pressure chamber 12. The actuator 150 includes a piezoelectric element 160 and wiring 180.

[0032] The piezoelectric element 160 is stacked on the diaphragm 155 in a position that overlaps with the pressure chamber 12. More specifically, the piezoelectric element 160 is provided on the upper surface of the diaphragm 155 in a position that overlaps with the pressure chamber 12 when viewed in the stacking direction. The upper surface of the diaphragm 155 is the surface of the diaphragm 155 opposite to the side where the pressure chamber 12 is located. The upper surface of the diaphragm 155 is also called the first surface. When liquid is discharged, the diaphragm 155 is vibrated by the driving of the piezoelectric element 160, and pressure is applied to the liquid in the pressure chamber 12. The piezoelectric element 160 is also called the first piezoelectric element.

[0033] The piezoelectric element 160 has a plurality of first electrodes 165, a second electrode 170, and a piezoelectric body 175. The first electrodes 165 are positioned on the diaphragm 155 in a location that overlaps with the corresponding pressure chamber 12. The first electrodes 165 are also called individual electrodes. The second electrodes 170 are positioned further from the pressure chamber 12 than the first electrodes 165 in the stacking direction. The second electrodes 170 are electrodes common to the plurality of first electrodes 165. The second electrodes 170 are positioned over a range that overlaps with all of the plurality of first electrodes 165. The second electrodes 170 are also called common electrodes. Since the first electrodes 165 provided for each pressure chamber 12 are positioned close to the diaphragm 155, the piezoelectric strain of the piezoelectric element 160 can be efficiently propagated to the diaphragm 155. The first electrode 165 and the second electrode 170 are formed from various metals such as platinum, iridium, titanium, tungsten, and tantalum, as well as conductive metal oxides such as lanthanum nickelate (LaNiO3).

[0034] The piezoelectric element 175 is provided between the first electrode 165 and the second electrode 170. The piezoelectric element 175 is also called the first piezoelectric element. The piezoelectric element 175 is made of lead zirconate titanate (PZT). However, the piezoelectric element 175 may be made of other types of ceramic materials having a so-called perovskite structure represented by the ABO3 type, instead of PZT. Examples of ceramic materials include barium titanate, lead titanate, potassium niobate, lithium niobate, lithium tantalate, sodium tungstate, zinc oxide, barium strontium titanate (BST), strontium bismuth tantalate (SBT), lead metaniobate, zinc niobate, and scandium niobate.

[0035] The wiring 180 electrically connects the first electrode 165 to the drive circuit 121, which will be described later. The wiring 180 is made of a conductive material. In Figure 5, although not shown, the second electrode 170 and the drive circuit 121 are electrically connected by other wiring made of a conductive material. The actuator 150 can be fabricated, for example, using etching with masking using photoresist. Details of the function of the actuator 150 will be described later.

[0036] The diaphragm 155 of the vibrating section 30 is laminated on the pressure chamber substrate 10 at positions overlapping with the pressure chambers 12 and absorption chambers 13 when viewed in the lamination direction. The diaphragm 155 is arranged to cover the multiple pressure chambers 12 and absorption chambers 13. The diaphragm 155 has a flexible layer 156 formed on the pressure chamber substrate 10 and a protective layer 157 formed on the flexible layer 156. The flexible layer 156 is made of, for example, silicon dioxide. The protective layer 157 is made of, for example, zirconium oxide. At least a portion of the pressure chamber substrate 10 and the diaphragm 155 may be formed from a single integrated member.

[0037] The absorption section 200 of the vibrating section 30 is arranged on the diaphragm 155 inside the recess 33. The absorption section 200 has a piezoelectric element 210. The piezoelectric element 210 is stacked on the diaphragm 155 in a position that overlaps with the absorption chamber 13. More specifically, the piezoelectric element 210 is provided in a position that overlaps with the absorption chamber 13 when viewed in the stacking direction with respect to the upper surface of the diaphragm 155. The piezoelectric element 210 absorbs at least a portion of the vibrations of the liquid propagated from the pressure chamber 12 to the absorption chamber 13. The piezoelectric element 210 is also called the second piezoelectric element. The piezoelectric element 210 has a third electrode 215, a fourth electrode 220, and a piezoelectric body 225. The piezoelectric body 225 is also called the second piezoelectric body. The third electrode 215 is provided on the diaphragm 155 in a position that overlaps with the absorption chamber 13. The fourth electrode 220 is positioned further from the absorption chamber 13 than the third electrode 215 in the stacking direction. The fourth electrode 220 is also positioned to overlap with the absorption chamber 13. The fourth electrode 220 and the third electrode 215 are electrically connected to a voltage detection circuit 122 (described later) by wiring made of a conductive material (not shown). The voltage detection circuit 122 is also referred to as the pressure detection unit.

[0038] The piezoelectric element 225 is provided between the third electrode 215 and the fourth electrode 220. The piezoelectric element 225 is formed, for example, to have a uniform thickness. Preferably, the material used to form the piezoelectric element 225 is the same as that used for the piezoelectric element 175. Also, preferably, the material used to form the third electrode 215 and the fourth electrode 220 is the same as that used for the first electrode 165 and the second electrode 170. By using common materials in this way, the piezoelectric element 160 of the actuator 150 and the piezoelectric element 210 of the absorption section 200 can be manufactured in the same process. This simplifies the manufacturing process and reduces costs. However, the material of the piezoelectric element 225 may be different from that of the piezoelectric element 175. In this case, for example, an organic piezoelectric material can be used as the material for the piezoelectric element 225. Organic piezoelectric materials include, for example, fluorine-based polymer semiconductor materials such as polyfluorovinylidene (PVDF), polyfluorovinylidene-trifluoroethylene copolymers (P(VDF-TrFE)) obtained by copolymerizing polyfluorovinylidene (PVDF) with trifluoroethylene (TrFE), polylactic acid, and polyamino acids.

[0039] The third electrode 215 and the fourth electrode 220 may be arranged so as to overlap the entire piezoelectric element 225. Alternatively, they may be arranged so as to overlap at least a portion of the piezoelectric element 225. Details of the function of the absorption section 200 will be described later.

[0040] As shown in Figure 2, the case member 40 is positioned on the +Z side of the head body 11. As shown in Figure 3, the case member 40 has a liquid chamber 42, a connection port 43, and two liquid flow ports 44. The liquid chamber 42, together with the first common liquid chamber 17 and the second common liquid chamber 18, forms a common liquid chamber 25 through which liquid flows. The connection port 43 is an opening that penetrates the case member 40 in the Z-axis direction. The wiring board 120 is inserted into the connection port 43. The liquid flow ports 44 are holes that penetrate the case member 40 in the Z-axis direction. Liquid flows into the liquid discharge head 100 from the liquid flow ports 44. The case member 40 is made of, for example, a resin material or a metal material.

[0041] The wiring board 120 is provided with a drive circuit 121 and a voltage detection circuit 122. The drive circuit 121 is a circuit for driving the actuator 150. The drive circuit 121 is electrically connected to the first electrode 165 via the wiring board 120 and wiring 180. The drive circuit 121 is also electrically connected to the second electrode 170 via the wiring board 120 and wiring (not shown). Furthermore, the drive circuit 121 is electrically connected to the control unit 500 via the wiring board 120 and wiring (not shown).

[0042] The drive circuit 121 generates a drive signal for driving the actuator 150 based on a control signal supplied from the control unit 500. The drive circuit 121 is also called the drive unit. The drive signal is also called the first drive signal. The drive circuit 121 supplies the drive signal to the first electrode 165 with the second electrode 170 set to a reference potential.

[0043] The voltage detection circuit 122 is electrically connected to the third electrode 215 via the wiring board 120 and wiring (not shown). Furthermore, the voltage detection circuit 122 is electrically connected to the fourth electrode 220 via the wiring board 120 and wiring (not shown). Additionally, the voltage detection circuit 122 is electrically connected to the control unit 500 via the wiring board 120 and wiring (not shown).

[0044] The voltage detection circuit 122 detects the electromotive force of the piezoelectric element 210 and outputs a signal indicating the detected electromotive force of the piezoelectric element 210 to the control unit 500. For example, after the piezoelectric element 160 is driven to discharge liquid, residual vibrations of the liquid propagated from the pressure chamber 12 to the absorption chamber 13 are propagated to the piezoelectric element 210 via the diaphragm 155. Residual vibrations generate an electromotive force in the piezoelectric element 210. In Figure 3, the drive circuit 121 and the voltage detection circuit 122 are provided separately, but they may also be provided on a single substrate.

[0045] The functions of the pressure chamber 12 and actuator 150 are described below. The actuator 150 applies pressure to the liquid in the pressure chamber 12 by vibrating the diaphragm 155. Specifically, with the second electrode 170 set to a reference potential, a drive signal is supplied to the first electrode 165. The reference potential is, for example, the ground potential. The drive signal is, for example, a signal whose applied voltage changes over time. When a voltage is applied to the first electrode 165 and the second electrode 170, piezoelectric strain occurs in the part of the piezoelectric element 175 that is sandwiched between the first electrode 165 and the second electrode 170. In this way, the actuator 150 is driven. The diaphragm 155 vibrates as the actuator 150 is driven. Note that piezoelectric strain does not occur in the part of the piezoelectric element 175 that is not sandwiched between the first electrode 165 and the second electrode 170. When pressure is applied to the liquid in the pressure chamber 12, the liquid is discharged from the nozzle 21 via the first communication channel 16. The nozzle 21, pressure chamber 12, diaphragm 155, and piezoelectric element 160 together are also referred to as the discharge section.

[0046] Next, the functions of the absorption chamber 13 and the absorption unit 200 will be explained. As described above, when pressure is applied to the liquid in the pressure chamber 12 by driving the actuator 150, a portion of the liquid in the pressure chamber 12 is discharged to the outside from the nozzle 21 located downstream, while another portion of the liquid in the pressure chamber 12 flows into the absorption chamber 13, which is located upstream of the pressure chamber 12 and is common to multiple pressure chambers 12. As a result, vibrations of the liquid are propagated from the pressure chamber 12 to the absorption chamber 13. The piezoelectric element 210 of the absorption unit 200 bends in response to the vibrations of the liquid propagated to the absorption chamber 13, thereby absorbing the vibrations of the liquid. This makes it possible to keep the pressure inside the absorption chamber 13 below a certain pressure. Furthermore, the pressure inside the pressure chambers 12 connected to the absorption chamber 13 can also be reduced.

[0047] As shown in Figure 5, the pressure chamber 12 and the absorption chamber 13 are located at the same position in the Z-axis direction and adjacent to each other in the Y-axis direction, so the absorption chamber 13 can effectively absorb vibrations of the liquid propagated from the pressure chamber 12. It is preferable to form the absorption portion 200 in a way that provides flexibility suitable for absorbing vibrations of the liquid propagated from the pressure chamber 12 by adjusting the material used to form the absorption portion 200 and the thickness of the absorption portion 200.

[0048] Furthermore, in Embodiment 1, the absorption unit 200 is used to detect the pressure of the liquid in the absorption chamber 13. The control unit 500 detects the pressure of the liquid inside the absorption chamber 13 based on the electromotive force of the piezoelectric element 210. Specifically, the control unit 500 detects the change in the electromotive force of the piezoelectric element 210 from the signal supplied from the voltage detection circuit 122. The control unit 500 determines whether the pressure state inside the absorption chamber 13 and the pressure chamber 12 is normal or abnormal based on the change in pressure inside the absorption chamber 13 indicated by the change in the electromotive force of the piezoelectric element 210.

[0049] If the pressure inside the pressure chamber 12 and the absorption chamber 13 becomes abnormal, the liquid discharge operation may not be performed normally. Alternatively, if the pressure inside the pressure chamber 12 and the absorption chamber 13 becomes abnormal, the stability of the quality of the liquid discharged from the nozzle 21 may decrease.

[0050] Abnormal pressure conditions inside the absorption chamber 13 and pressure chamber 12 can occur due to the following reasons, for example: Air bubbles may enter the pressure chamber 12 when the liquid is discharged. In this case, the pressure inside the pressure chamber 12 and absorption chamber 13 will be higher than under normal conditions when no air bubbles are present. If the viscosity of the liquid increases due to a decrease in temperature, the pressure inside the pressure chamber 12 and absorption chamber 13 when the liquid is discharged may change compared to under normal conditions. If the amount of liquid supplied to the liquid flow path including the pressure chamber 12 and absorption chamber 13 becomes insufficient due to a malfunction of a pump (not shown) that supplies liquid to the liquid flow path including the pressure chamber 12 and absorption chamber 13, the pressure inside the pressure chamber 12 and absorption chamber 13 when the liquid is discharged may also change compared to under normal conditions. In addition, malfunctions in cartridge attachment / detachment, malfunctions during initial liquid filling, etc., may cause the pressure inside the pressure chamber 12 and absorption chamber 13 to change compared to under normal conditions.

[0051] If the control unit 500 determines that the pressure conditions inside the absorption chamber 13 and the pressure chamber 12 are abnormal, it will display a message warning of the abnormality, for example, on a display on the liquid discharge device 300. Alternatively, the control unit 500 will perform a cleaning process for the liquid discharge head 100 by discharging liquid from the nozzle 21.

[0052] In Embodiment 1, the liquid dispensing device 300 detects changes in the pressure in the absorption chamber 13 from changes in the electromotive force generated by a piezoelectric element 210, which is different from the piezoelectric element 160 that applies pressure to the pressure chamber 12. This allows the liquid dispensing operation during printing and the detection of the liquid pressure inside the pressure chamber 12 and absorption chamber 13 to be performed simultaneously. Therefore, changes in the liquid pressure inside the pressure chamber 12 and absorption chamber 13 can be detected not only when liquid is not being dispensed, but also when liquid is being dispensed. Conventionally, it was not possible to detect changes in the pressure inside the pressure chamber 12 when liquid was being dispensed. However, in the configuration according to Embodiment 1, changes in the pressure inside the pressure chamber 12 can be detected even when liquid is being dispensed. Therefore, abnormalities in the pressure state inside the pressure chamber 12 can be detected even when liquid is being dispensed.

[0053] Furthermore, in Embodiment 1, changes in liquid pressure are detected in an absorption chamber 13 shared by multiple pressure chambers 12. For example, if changes in liquid pressure were to be detected in each individual pressure chamber 12, it would be necessary to provide a mechanism for detecting pressure changes in each pressure chamber 12 and monitor each pressure chamber 12, making the configuration required for pressure detection complex. However, in Embodiment 1, since changes in liquid pressure are detected in a common absorption chamber 13, the configuration for detecting pressure changes can be simplified.

[0054] Furthermore, since the liquid dispensing operation during printing and the detection of the liquid pressure in the absorption chamber can be performed simultaneously, there is no need to stop the liquid dispensing operation for the pressure detection operation. Therefore, the waiting time for printing operations can be reduced.

[0055] Figure 9 shows an example of the arrangement of drive wiring connected to piezoelectric element 160 and detection wiring connected to piezoelectric element 210. Note that in Figure 9, the piezoelectric body 175, piezoelectric body 225, drive circuit 121, and voltage detection circuit 122 are not shown. The drive wiring includes wiring 180 connecting the first electrode 165 and the drive circuit 121, and wiring 185 connecting the second electrode 170 and the drive circuit 121. Wiring 180 is also called the first drive wiring. Wiring 185 is also called the second drive wiring. At least a portion of wiring 180 and wiring 185 extends along the second direction. Since the number of second electrodes 170 corresponds to the number of nozzles 21, the number of wirings 180 will also correspond to the number of nozzles 21. Multiple wirings 180 are also called the first drive wiring group.

[0056] The detection wiring includes wiring 230 connecting the third electrode 215 and the voltage detection circuit 122, and wiring 235 connecting the fourth electrode 220 and the voltage detection circuit 122. Wiring 230 is also called the first detection wiring. Wiring 235 is also called the second detection wiring. At least a portion of wiring 230 and wiring 235 extends along the second direction.

[0057] As mentioned above, the drive circuit 121 supplies a drive signal to the first electrode 165 via the wiring 180 with the second electrode 170 set to a reference potential via the wiring 185. Here, the drive signal supplied to the first electrode 165 via the wiring 180 is a signal whose applied voltage changes over time, so electrical noise is easily generated from the wiring 180. On the other hand, the reference potential set for the second electrode 170 is a constant voltage, and electrical noise is less likely to be generated from the wiring 185 compared to the wiring 180. Therefore, in the example shown in Figure 9, the wiring 185 is placed between the wiring 230 and the wiring group of the wiring 180, which is prone to generating noise. By increasing the distance between the wiring 230 and the wiring group of the wiring 180, the influence of noise generated from the wiring 180 on the wiring 230 and wiring 235 can be reduced. In addition, by shielding the noise generated in the wiring 180 with the wiring 185, the influence of that noise on the wiring 230 and wiring 235 can be reduced. As a result, the influence of noise on the voltage detection circuit 122 when detecting changes in the electromotive force of the piezoelectric element 210 can be suppressed, and changes in the pressure of the absorption chamber 13 can be detected with higher accuracy.

[0058] A2. Embodiment 2: Embodiment 2 describes another example of the configuration of the piezoelectric element 210 of the absorption section 200. The following description will focus on configurations different from those in Embodiment 1, and will omit descriptions of configurations similar to those in Embodiment 1.

[0059] Figure 6 shows the arrangement of the piezoelectric body 225 of the piezoelectric element 210. In Figure 6, the arrangement of the piezoelectric body 225 is shown when the piezoelectric element 210 is viewed in the -Z direction within the recess 33. Note that the fourth electrode 220 is omitted from Figure 6 for ease of understanding. The positions of the pressure chamber 12, absorption chamber 13, and communication passage Cm1 are indicated by dashed lines. The position of the nozzle 21 is also indicated by a dashed line.

[0060] As shown in Figure 6, when viewed in the Z-axis direction, the absorption chamber 13 includes a first region 2251 and a second region 2252 surrounding the first region 2251. When viewed in the Z-axis direction, the piezoelectric element 225 overlapping the second region 2252 has a predetermined thickness. When viewed in the Z-axis direction, the piezoelectric element 225 overlapping the first region 2251 has a thickness smaller than the thickness in the second region 2252. Alternatively, when viewed in the Z-axis direction, the piezoelectric element 225 is provided so as to overlap the second region 2252, while it is not provided so as to overlap the first region 2251. Note that the thickness of the piezoelectric element 225 refers to the thickness in the Z-axis direction.

[0061] Since a first region 2251 is provided in which the piezoelectric element 225 is formed thinly in the region overlapping with the absorption chamber 13 of the piezoelectric element 225, the degree of deflection of the piezoelectric element 225 can be increased compared to the case where the thickness of the piezoelectric element 225 is uniform.

[0062] Furthermore, a portion of the second region 2252 is continuously formed from a position corresponding to one end of the absorption chamber 13 in the Y-axis direction to a position corresponding to the other end. Since the absorption chamber 13 is formed as a space with the X-axis direction as the longitudinal direction and the Y-axis direction as the short direction, the displacement of the piezoelectric element 210 in the Y-axis direction is greater than the displacement in the X-axis direction. Because the second region 2252 includes a continuous portion in the Y-axis direction, the stress applied to the piezoelectric body 225 is distributed, and vibrations of the liquid propagated from the pressure chamber 12 can be efficiently absorbed.

[0063] The third electrode 215 and the fourth electrode 220 are formed continuously in the region that overlaps with the absorption chamber 13 when viewed in the stacking direction, from a position corresponding to one end of the absorption chamber 13 in the Y-axis direction to a position corresponding to the other end. Since the absorption chamber 13 is formed as a space with the X-axis direction as the longitudinal direction and the Y-axis direction as the short direction, the displacement of the piezoelectric element 210 in the Y-axis direction is greater than the displacement in the X-axis direction. Because the third electrode 215 and the fourth electrode 220 are formed continuously in the Y-axis direction, a larger electromotive force can be detected using the piezoelectric element 210.

[0064] Alternatively, in the region where the piezoelectric element 210 and the absorption chamber 13 overlap, the piezoelectric body may not be formed in the first region 2251, but the piezoelectric body 225 may be formed in the second region 2252 surrounding the first region 2251. Since the first region 2251, where no piezoelectric body is formed, is surrounded by the second region 2252 where the piezoelectric body 225 is formed, the degree of deflection of the piezoelectric body 225 can be increased compared to the case where the thickness of the piezoelectric body 225 is uniform.

[0065] Note that the arrangement of the first region 2251 and the second region 2252 shown in Figure 6 is just one example. In the example shown in Figure 6, the first region 2251 corresponding to each pressure chamber 12 is arranged along the X-axis direction. The first region 2251 is positioned at the same location in the X-axis direction as the corresponding pressure chamber 12. Each pressure chamber 12 is associated with a pair: a first region 2251 in which no piezoelectric material is formed, and a second region 2252 surrounding the first region 2251 and in which the piezoelectric material 225 is formed. Alternatively, one pair of the first region 2251 and the second region 2252 may be arranged so that one pair of the first region 2251 and the second region 2252 corresponds to two or more pressure chambers 12. Furthermore, the second region 2252 does not necessarily have to surround the first region 2251.

[0066] A3. Embodiment 3: Embodiment 3 describes an example in which the absorption section 200 and the actuator 150 are integrally formed. The following description will focus on configurations different from Embodiment 1, and will omit descriptions of configurations similar to Embodiment 1.

[0067] Figure 7 is an enlarged view of the vibration section 30 according to Embodiment 3. In Embodiment 3, the piezoelectric body 225 of the absorption section 200 is formed integrally with the piezoelectric body 175 of the actuator 150. In the illustrated example, the piezoelectric body 225 is the portion sandwiched between the first electrode 165 and the second electrode 170. The piezoelectric body 175 is the portion sandwiched between the third electrode 215 and the fourth electrode 220. Since the piezoelectric body 175 of the actuator 150 and the piezoelectric body 225 of the absorption section 200 are formed as a continuous piezoelectric body, the effort required to form the piezoelectric body can be simplified compared to the case where the piezoelectric body 175 and the piezoelectric body 225 are formed separately.

[0068] Furthermore, of the integrally formed piezoelectric elements 175 and 225, no piezoelectric strain occurs in the parts not sandwiched between the electrodes. Therefore, the driving of the actuator 150 does not affect the pressure detection result of the absorption section 200.

[0069] A4. Embodiment 4: In embodiments 1 to 4, an example was described in which the absorption unit 200 having a piezoelectric element 210 is arranged in the upper part of the absorption chamber 13, but the position of the absorption unit 200 is not limited to this.

[0070] Figure 8 is a schematic diagram showing the arrangement of the absorption section 200 according to Embodiment 4. In Embodiment 4, the absorption section 200 is arranged on the side surfaces of the pressure chamber 12 and the absorption chamber 13. In the illustrated example, the side surfaces are the planes parallel to the YZ planes of the pressure chamber 12 and the absorption chamber 13. In this case, the absorption section 200 is not provided on the diaphragm 155, but on the pressure chamber substrate 10 that forms the pressure chamber 12 and the absorption chamber 13. Unlike Embodiment 1, by arranging the absorption section 200 so as to overlap not only the absorption chamber 13 but also the pressure chamber 12, the accuracy of liquid pressure detection can be improved.

[0071] Furthermore, if the nozzle 21 is not provided on the -Z side of the pressure chamber 12, the absorption section 200 may be placed on the bottom surfaces of the pressure chamber 12 and the absorption chamber 13. In this case as well, by placing the absorption section 200 so as to overlap the pressure chamber 12 in addition to the absorption chamber 13, the accuracy of detecting the liquid pressure can be improved.

[0072] B. Other Embodiments In Embodiment 1, an example was described in which one absorption chamber 13 is connected to multiple pressure chambers 12. However, one absorption chamber 13 may be connected to a set number of pressure chambers 12. For example, one absorption chamber 13 may be connected to 10 pressure chambers 12. If the liquid discharge device 300 has 50 pressure chambers 12, then 5 absorption chambers 13 will be provided. Even in such a case, since the change in liquid pressure is detected by an absorption chamber 13 common to multiple pressure chambers 12, the configuration for detecting the change in pressure can be simplified.

[0073] Alternatively, an absorption chamber 13 may be provided individually for each pressure chamber 12. In this case, it is possible to determine whether the internal pressure state of each pressure chamber 12 is normal or abnormal. Furthermore, the distribution of internal pressure states for multiple pressure chambers 12 can be examined.

[0074] Furthermore, the control unit 500 of the liquid discharge device 300 can simultaneously perform a discharge operation that applies pressure to the liquid in the pressure chamber and a detection operation that detects the pressure of the liquid in the absorption chamber from the electromotive force of the second piezoelectric element, since it discharges liquid from the nozzle 21 by driving the first piezoelectric element. However, the control unit 500 does not necessarily need to perform the discharge operation and the detection operation simultaneously.

[0075] In Embodiment 1, an example was described in which the piezoelectric element 160 and the piezoelectric element 210 are manufactured from the same material. In this case, the number of required materials can be reduced. Alternatively, the piezoelectric element 160 and the piezoelectric element 210 may be manufactured from different materials. In this case, the piezoelectric element 160 may be configured to be suitable for liquid discharge operation. The piezoelectric element 210 may be configured to be suitable for vibration absorption and detection of the liquid pressure in the absorption chamber 13.

[0076] Furthermore, in Embodiment 1, an example was described in which, in the piezoelectric element 160 of the actuator 150, the second electrode 170, which is a common electrode, is located on the upper part of the piezoelectric body 175, and the first electrode 165, which is an individual electrode, is located on the lower part of the piezoelectric body 175. However, the individual electrodes may be located on the upper part of the piezoelectric body 175, and the common electrode may be located on the lower part of the piezoelectric body 175.

[0077] This disclosure is not limited to the embodiments described above, and can be implemented in various configurations without departing from its spirit. For example, the technical features in the embodiments corresponding to the technical features in each form described in the summary of the invention can be replaced or combined as appropriate in order to solve some or all of the above-described problems, or to achieve some or all of the above-described effects. Furthermore, if a technical feature is not described as essential in this specification, it can be deleted as appropriate.

[0078] C. Other forms: (1) According to a first embodiment of the present disclosure, a liquid dispensing device is provided. The liquid discharge device comprises a flow path substrate having one or more pressure chambers that form a liquid flow path, at least one absorption chamber connected to the pressure chamber and forming the liquid flow path together with the pressure chamber and absorbing vibrations of the liquid propagated from the pressure chamber, and a nozzle connected to the pressure chamber for discharging the liquid; a diaphragm laminated on the flow path substrate at a position overlapping the pressure chamber and the absorption chamber when viewed in the lamination direction; a first piezoelectric element provided on one surface of the diaphragm, which is the surface opposite to the side where the pressure chamber is located, at a position overlapping the pressure chamber when viewed in the lamination direction, the first piezoelectric element vibrates the diaphragm and applies pressure to the liquid in the pressure chamber; a second piezoelectric element provided on the first surface of the diaphragm at a position overlapping the absorption chamber when viewed in the lamination direction, the second piezoelectric element deforms to absorb at least a portion of the vibrations of the liquid propagated from the pressure chamber; and a pressure detection unit that detects the pressure of the liquid inside the absorption chamber based on the electromotive force of the second piezoelectric element. According to the above configuration, changes in the pressure in the absorption chamber can be detected from changes in the electromotive force generated by a second piezoelectric element, which is different from the first piezoelectric element that applies pressure to the liquid in the pressure chamber. Therefore, when the discharge unit is driven to discharge the liquid, changes in the liquid pressure near the pressure chamber of the discharge unit can be detected.

[0079] (2) In the liquid dispensing device of the above form, the one or more pressure chambers may be a plurality of pressure chambers, and at least one absorption chamber may be provided in common to the plurality of pressure chambers. In this configuration, changes in liquid pressure propagated from multiple pressure chambers are detected in a common absorption chamber. Compared to detecting changes in liquid pressure in each individual pressure chamber, the configuration for detecting changes in liquid pressure can be simplified.

[0080] (3) In the liquid dispensing device of the above embodiment, the first piezoelectric element may have a first electrode, a second electrode provided at a position further from the diaphragm than the first electrode, and a first piezoelectric body provided between the first electrode and the second electrode in the stacking direction, and the second piezoelectric element may have a third electrode, a fourth electrode provided at a position further from the diaphragm than the third electrode in the stacking direction, and a second piezoelectric body provided between the third electrode and the fourth electrode in the stacking direction. With this configuration, the first electrodes, which are provided in each pressure chamber of the first piezoelectric element, are positioned close to the diaphragm, so that the piezoelectric strain of the first piezoelectric element can be efficiently propagated to the diaphragm.

[0081] (4) In the liquid dispensing device of the above form, when the absorption chamber is viewed in the stacking direction, the absorption chamber has a first region and a second region, and the thickness of the piezoelectric material overlapping the first region when viewed in the stacking direction may be smaller than the thickness of the piezoelectric material overlapping the second region when viewed in the stacking direction. In this configuration, a first region is provided in which the piezoelectric material is formed thinly in the area overlapping the absorption chamber. This allows for a greater degree of deflection of the piezoelectric material compared to the case where the thickness of the piezoelectric material is uniform. Therefore, the function of absorbing vibrations of the liquid propagating from the pressure chamber can be improved.

[0082] (5) In the liquid dispensing device of the above form, when the absorption chamber is viewed in the stacking direction, the absorption chamber has a first region and a second region, and the piezoelectric material may overlap the second region and not overlap the first region when viewed in the stacking direction. In this configuration, since there is a first region where no piezoelectric material is formed and a second region where a piezoelectric material is formed, the degree of deflection of the piezoelectric material can be increased compared to the case where the thickness of the piezoelectric material is uniform. Therefore, the function of absorbing vibrations of the liquid propagated from the pressure chamber can be improved.

[0083] (6) In the liquid dispensing device of the above form, the absorption chamber is formed as a space with the first direction as its longitudinal direction, the pressure chamber is formed as a space with the second direction as its longitudinal direction, which intersects the first direction and the stacking direction, and in the second piezoelectric element, a part of the second region may be formed continuously from a position corresponding to one end of the absorption chamber in the second direction to a position corresponding to the other end. Since the displacement in the second direction, which is the short direction of the absorption chamber, is greater than the displacement in the first direction, which is the long direction, a portion of the second region includes a continuous portion in the second direction, which distributes the stress applied to the piezoelectric material and allows for efficient absorption of vibrations of the liquid propagated from the pressure chamber.

[0084] (7) In the liquid dispensing device of the above embodiment, the third electrode and the fourth electrode may be formed continuously in the region that overlaps with the absorption chamber when viewed in the stacking direction, from a position corresponding to one end of the absorption chamber in the second direction to a position corresponding to the other end. Since the displacement in the second direction, which is the short direction of the absorption chamber, is greater than the displacement in the first direction, which is the long direction, the third and fourth electrodes are formed continuously in the second direction, allowing for the detection of a larger electromotive force and improving the accuracy of pressure detection.

[0085] (8) In the liquid discharge device of the above form, the device includes a group of wiring connected to the first electrode, the first drive wiring group including a plurality of first drive wirings extending along a second direction that intersects a first direction which is the direction in which the plurality of pressure chambers are arranged and the stacking direction; at least one second drive wiring connected to the second electrode; a drive unit that supplies a first drive signal to the first electrode via the first drive wiring and sets the second electrode to a reference potential via the second drive wiring; and a first detection wiring that connects the third electrode and the pressure detection unit, wherein in the first direction, the second drive wiring may be arranged between the group of first drive wirings and the first detection wiring. With this configuration, by providing a second drive wiring that generates less noise than the first drive wiring group between the first drive wiring group, which is prone to generating noise, and the first detection wiring, the first drive wiring group and the first detection wiring can be physically separated, thereby reducing the impact of noise generated from the first drive wiring group on the first detection wiring.

[0086] (9) In the liquid dispensing device of the above form, the device further comprises a second detection wiring that connects the fourth electrode and the pressure detection unit, and the second drive wiring is arranged between the first drive wiring group and the second detection wiring. With this configuration, by providing a second drive wiring that generates less noise than the first drive wiring group between the first drive wiring group, which is prone to generating noise, and the second detection wiring, the first drive wiring group and the second detection wiring can be physically separated, thereby reducing the influence of noise generated from the first drive wiring group on the second detection wiring.

[0087] (10) In the liquid dispensing device of the above embodiment, the first piezoelectric element and the second piezoelectric element may be formed as a continuous piezoelectric element. With this configuration, since the first piezoelectric element and the second piezoelectric element are formed as a single unit, the effort required to form the piezoelectric elements can be simplified compared to the case where the first piezoelectric element and the second piezoelectric element are formed separately.

[0088] (11) In the liquid dispensing device of the above embodiment, the device further comprises a control unit that drives the first piezoelectric element and the second piezoelectric element, and the control unit may simultaneously perform a dispensing operation that applies pressure to the liquid in the pressure chamber in order to dispensing the liquid from the nozzle by driving the first piezoelectric element, and a detection operation that detects the pressure of the liquid in the absorption chamber from the electromotive force of the second piezoelectric element. With this configuration, the liquid ejection operation during printing and the detection of the liquid pressure in the absorption chamber can be performed simultaneously. Therefore, there is no need to stop the liquid ejection operation for the pressure detection operation. Thus, the waiting time for printing operations can be reduced.

[0089] This disclosure is not limited to the form of a liquid dispensing device described above, but can be implemented in various forms such as a liquid dispensing system or a combined machine equipped with a liquid dispensing device. [Explanation of symbols]

[0090] 10...Pressure chamber substrate, 11...Head body, 12...Pressure chamber, 13...Absorption chamber, 14...Support part, 15...Communication plate, 16...First communication channel, 17...First common liquid chamber, 18...Second common liquid chamber, 19...Second communication channel, 20...Nozzle substrate, 21...Nozzle, 25...Common liquid chamber section, 30...Vibration section, 31...Protective substrate, 33...Recess, 38...Atmospheric communication hole, 39...Through hole, 40...Case member, 42...Liquid chamber section, 43...Connection port, 44...Liquid flow port, 100...Liquid discharge head, 120...Wiring board, 121...Drive circuit, 122...Voltage detection circuit, 150...Actuator, 155...Vibrating plate, 156...Flexible layer, 157...Protective layer, 160...Piezoelectric element, 165...First electrode, 170...Second electrode, 175...Piezoelectric element, 180...Wiring, 185...Wiring, 200...Absorbing part, 210...Piezoelectric element, 215...Third electrode, 220...Fourth electrode, 225...Piezoelectric element, 230...Wiring, 235...Wiring, 300...Liquid dispensing device, 310...Liquid container, 312...Tube, 320...Head moving mechanism, 321...Drive belt, 322...Carriage, 326...Movement motor, 327...Pulley, 330...Conveying mechanism, 332...Conveying roller, 334...Conveying rod, 336...Conveying motor, 500...Control unit, 2251...First region, 2252...Second region, Cm1...Connecting passage, L1...Nozzle row, L2...Nozzle row, O...Center plane, P...Printing paper

Claims

1. A liquid dispensing device, A flow path substrate having one or more pressure chambers that form a liquid flow path, at least one absorption chamber connected to the pressure chambers and together with the pressure chambers forming the liquid flow path and absorbing vibrations of the liquid propagating from the pressure chambers, and a nozzle connected to the pressure chambers for discharging the liquid, A diaphragm is laminated on the flow channel substrate at a position overlapping the pressure chamber and the absorption chamber when viewed in the lamination direction, A first piezoelectric element is provided on one of the surfaces of the diaphragm, the surface opposite to the side where the pressure chamber is located, at a position that overlaps with the pressure chamber when viewed in the stacking direction, and the first piezoelectric element vibrates the diaphragm to apply pressure to the liquid in the pressure chamber, A second piezoelectric element provided on the first surface of the diaphragm at a position overlapping with the absorption chamber in the stacking direction, the second piezoelectric element absorbs at least a portion of the vibrations of the liquid propagated from the pressure chamber by deformation, A pressure detection unit that detects the pressure of the liquid inside the absorption chamber based on the electromotive force of the second piezoelectric element, Equipped with, The first piezoelectric element includes a first electrode, a second electrode positioned further from the diaphragm than the first electrode in the stacking direction, and a first piezoelectric body provided between the first electrode and the second electrode in the stacking direction. The second piezoelectric element comprises a third electrode, a fourth electrode positioned further from the diaphragm than the third electrode in the stacking direction, and a second piezoelectric body provided between the third electrode and the fourth electrode in the stacking direction. When the absorption chamber is viewed in the stacking direction, the absorption chamber has a first region and a second region, The thickness of the second piezoelectric element overlapping the first region is smaller than the thickness of the second piezoelectric element overlapping the second region. Liquid discharge device.

2. A liquid dispensing device, A flow path substrate having one or more pressure chambers that form a liquid flow path, at least one absorption chamber connected to the pressure chambers and together with the pressure chambers forming the liquid flow path and absorbing vibrations of the liquid propagating from the pressure chambers, and a nozzle connected to the pressure chambers for discharging the liquid, A diaphragm is laminated on the flow channel substrate at a position overlapping the pressure chamber and the absorption chamber when viewed in the lamination direction, A first piezoelectric element is provided on one of the surfaces of the diaphragm, the surface opposite to the side where the pressure chamber is located, at a position that overlaps with the pressure chamber when viewed in the stacking direction, and the first piezoelectric element vibrates the diaphragm to apply pressure to the liquid in the pressure chamber, A second piezoelectric element provided on the first surface of the diaphragm at a position overlapping with the absorption chamber in the stacking direction, the second piezoelectric element absorbs at least a portion of the vibrations of the liquid propagated from the pressure chamber by deformation, A pressure detection unit that detects the pressure of the liquid inside the absorption chamber based on the electromotive force of the second piezoelectric element, Equipped with, The first piezoelectric element includes a first electrode, a second electrode positioned further from the diaphragm than the first electrode in the stacking direction, and a first piezoelectric body provided between the first electrode and the second electrode in the stacking direction. The second piezoelectric element comprises a third electrode, a fourth electrode positioned further from the diaphragm than the third electrode in the stacking direction, and a second piezoelectric body provided between the third electrode and the fourth electrode in the stacking direction. When the absorption chamber is viewed in the stacking direction, the absorption chamber has a first region and a second region, The second piezoelectric element overlaps the second region and does not overlap the first region when viewed in the stacking direction. The flow path substrate is provided between the pressure chamber and the absorption chamber and further comprises a communication passage connecting the pressure chamber and the absorption chamber, and a support portion provided at a position overlapping the communication passage when viewed in the stacking direction, forming a part of the flow path of the liquid and in contact with the diaphragm. Liquid discharge device.

3. A liquid dispensing device, A flow path substrate having one or more pressure chambers that form a liquid flow path, at least one absorption chamber connected to the pressure chambers and together with the pressure chambers forming the liquid flow path and absorbing vibrations of the liquid propagated from the pressure chambers, a communication passage that forms the liquid flow path and connects the pressure chambers and the absorption chambers, a support portion provided at a position overlapping the communication passage when viewed in the stacking direction, and a nozzle connected to the pressure chambers for discharging the liquid, A diaphragm is laminated on the flow channel substrate at a position overlapping the pressure chamber and the absorption chamber when viewed in the lamination direction, A first piezoelectric element is provided on one of the surfaces of the diaphragm, the surface opposite to the side where the pressure chamber is located, at a position that overlaps with the pressure chamber when viewed in the stacking direction, and the first piezoelectric element vibrates the diaphragm to apply pressure to the liquid in the pressure chamber, A second piezoelectric element provided on the first surface of the diaphragm at a position overlapping with the absorption chamber in the stacking direction, the second piezoelectric element absorbs at least a portion of the vibrations of the liquid propagated from the pressure chamber by deformation, A pressure detection unit that detects the pressure of the liquid inside the absorption chamber based on the electromotive force of the second piezoelectric element, Equipped with, The first piezoelectric element includes a first electrode, a second electrode positioned further from the diaphragm than the first electrode in the stacking direction, and a first piezoelectric body provided between the first electrode and the second electrode in the stacking direction. The second piezoelectric element comprises a third electrode, a fourth electrode positioned further from the diaphragm than the third electrode in the stacking direction, and a second piezoelectric body provided between the third electrode and the fourth electrode in the stacking direction. The support portion of the flow channel substrate is in contact with the diaphragm and forms a part of the flow channel of the liquid. Liquid discharge device.

4. A liquid dispensing device, A flow path substrate having one or more pressure chambers that form a liquid flow path, at least one absorption chamber connected to the pressure chambers and together with the pressure chambers forming the liquid flow path and absorbing vibrations of the liquid propagating from the pressure chambers, and a nozzle connected to the pressure chambers for discharging the liquid, A diaphragm is laminated on the flow channel substrate at a position overlapping the pressure chamber and the absorption chamber when viewed in the lamination direction, A first piezoelectric element is provided on one of the surfaces of the diaphragm, the surface opposite to the side where the pressure chamber is located, at a position that overlaps with the pressure chamber when viewed in the stacking direction, and the first piezoelectric element vibrates the diaphragm to apply pressure to the liquid in the pressure chamber, A second piezoelectric element provided on the first surface of the diaphragm at a position overlapping with the absorption chamber in the stacking direction, the second piezoelectric element absorbs at least a portion of the vibrations of the liquid propagated from the pressure chamber by deformation, A pressure detection unit that detects the pressure of the liquid inside the absorption chamber based on the electromotive force of the second piezoelectric element, Equipped with, The first piezoelectric element includes a first electrode, a second electrode positioned further from the diaphragm than the first electrode in the stacking direction, and a first piezoelectric body provided between the first electrode and the second electrode in the stacking direction. The second piezoelectric element comprises a third electrode, a fourth electrode positioned further from the diaphragm than the third electrode in the stacking direction, and a second piezoelectric body provided between the third electrode and the fourth electrode in the stacking direction. The material constituting the first piezoelectric element and the material constituting the second piezoelectric element are different. The absorption chamber is formed as a space with the first direction as the longitudinal direction, The pressure chamber is formed as a space whose longitudinal direction is a second direction that intersects the first direction and the stacking direction. The second piezoelectric element is formed continuously from a position corresponding to one end of the absorption chamber in the second direction to a position corresponding to the other end. Liquid discharge device.

5. A liquid dispensing device, A flow path substrate having one or more pressure chambers that form a liquid flow path, at least one absorption chamber connected to the pressure chambers and together with the pressure chambers forming the liquid flow path and absorbing vibrations of the liquid propagating from the pressure chambers, and a nozzle connected to the pressure chambers for discharging the liquid, A diaphragm is laminated on the flow channel substrate at a position overlapping the pressure chamber and the absorption chamber when viewed in the lamination direction, A first piezoelectric element is provided on one of the surfaces of the diaphragm, the surface opposite to the side where the pressure chamber is located, at a position that overlaps with the pressure chamber when viewed in the stacking direction, and the first piezoelectric element vibrates the diaphragm to apply pressure to the liquid in the pressure chamber, A second piezoelectric element provided on the first surface of the diaphragm at a position overlapping with the absorption chamber in the stacking direction, the second piezoelectric element absorbs at least a portion of the vibrations of the liquid propagated from the pressure chamber by deformation, A pressure detection unit that detects the pressure of the liquid inside the absorption chamber based on the electromotive force of the second piezoelectric element, Equipped with, The first piezoelectric element includes a first electrode, a second electrode positioned further from the diaphragm than the first electrode in the stacking direction, and a first piezoelectric body provided between the first electrode and the second electrode in the stacking direction. The second piezoelectric element comprises a third electrode, a fourth electrode positioned further from the diaphragm than the third electrode in the stacking direction, and a second piezoelectric body provided between the third electrode and the fourth electrode in the stacking direction. The flow channel substrate has a plurality of pressure chambers, A group of wiring connected to the first electrode, the first drive wiring group including a plurality of first drive wirings extending along a second direction that intersects a first direction which is the direction in which the plurality of pressure chambers are arranged and the stacking direction, At least one second drive wiring connected to the second electrode, A drive unit that supplies a first drive signal to the first electrode via the first drive wiring and sets the second electrode to a reference potential via the second drive wiring, A first detection wiring that connects the third electrode and the pressure detection unit, It has, In the first direction, the second drive wiring is positioned between the first drive wiring group and the first detection wiring. Liquid discharge device.

6. A liquid dispensing device, A flow path substrate having one or more pressure chambers that form a liquid flow path, at least one absorption chamber connected to the pressure chambers and together with the pressure chambers forming the liquid flow path and absorbing vibrations of the liquid propagating from the pressure chambers, and a nozzle connected to the pressure chambers for discharging the liquid, A diaphragm is laminated on the flow channel substrate at a position overlapping the pressure chamber and the absorption chamber when viewed in the lamination direction, A first piezoelectric element is provided on one of the surfaces of the diaphragm, the surface opposite to the side where the pressure chamber is located, at a position that overlaps with the pressure chamber when viewed in the stacking direction, and the first piezoelectric element vibrates the diaphragm to apply pressure to the liquid in the pressure chamber, A second piezoelectric element provided on the first surface of the diaphragm at a position overlapping with the absorption chamber in the stacking direction, the second piezoelectric element absorbs at least a portion of the vibrations of the liquid propagated from the pressure chamber by deformation, A pressure detection unit that detects the pressure of the liquid inside the absorption chamber based on the electromotive force of the second piezoelectric element, Equipped with, The first piezoelectric element includes a first electrode, a second electrode positioned further from the diaphragm than the first electrode in the stacking direction, and a first piezoelectric body provided between the first electrode and the second electrode in the stacking direction. The second piezoelectric element comprises a third electrode, a fourth electrode positioned further from the diaphragm than the third electrode in the stacking direction, and a second piezoelectric body provided between the third electrode and the fourth electrode in the stacking direction. The first piezoelectric element and the second piezoelectric element are formed as a continuous piezoelectric element. Liquid discharge device.

7. A liquid dispensing device according to claim 3, When the absorption chamber is viewed in the stacking direction, the absorption chamber has a first region and a second region, The thickness of the second piezoelectric element overlapping the first region is smaller than the thickness of the second piezoelectric element overlapping the second region. Liquid discharge device.

8. A liquid dispensing device according to claim 3 or 4, When the absorption chamber is viewed in the stacking direction, the absorption chamber has a first region and a second region, The second piezoelectric element, when viewed in the stacking direction, overlaps the second region and does not overlap the first region. Liquid discharge device.

9. A liquid dispensing device according to any one of claims 5 to 8, The absorption chamber is formed as a space with the first direction as the longitudinal direction, The pressure chamber is formed as a space whose longitudinal direction is a second direction that intersects the first direction and the stacking direction. The second piezoelectric element is formed continuously from a position corresponding to one end of the absorption chamber in the second direction to a position corresponding to the other end. Liquid discharge device.

10. A liquid dispensing device according to claim 9, The third electrode and the fourth electrode are formed continuously in the region that overlaps with the absorption chamber when viewed in the stacking direction, from a position corresponding to one end of the absorption chamber in the second direction to a position corresponding to the other end. Liquid discharge device.

11. A liquid dispensing device according to any one of claims 1 to 10, The aforementioned one or more pressure chambers are multiple pressure chambers, At least one of the absorption chambers is provided in common to the plurality of pressure chambers. Liquid discharge device.

12. A liquid dispensing device according to claim 5, The device further includes a second detection wiring that connects the fourth electrode and the pressure detection unit. The second drive wiring is positioned between the first drive wiring group and the second detection wiring. Liquid discharge device.

13. A liquid dispensing device according to any one of claims 1 to 12, The system further comprises a control unit that drives the first piezoelectric element and the second piezoelectric element, The control unit, In order to discharge the liquid from the nozzle by driving the first piezoelectric element, a discharge operation is performed to apply pressure to the liquid in the pressure chamber, A detection operation is performed to detect the pressure of the liquid in the absorption chamber from the electromotive force of the second piezoelectric element, Execute simultaneously Liquid discharge device.

14. A liquid dispensing device according to any one of claims 1 to 3, The material constituting the first piezoelectric element and the material constituting the second piezoelectric element are different. Liquid discharge device.

15. A liquid dispensing device according to claim 14, The first piezoelectric material is formed of lead zirconate titanate, The second piezoelectric body is formed of an organic piezoelectric material. Liquid discharge device.

16. A liquid dispensing device according to claim 3, The dimensions of the communication passage in the intersecting direction, which is the direction that intersects the direction connecting the pressure chamber and the absorption chamber and the stacking direction, are smaller than the dimensions of the pressure chamber and the dimensions of the absorption chamber in the intersecting direction. The dimensions of the communication passage in the stacking direction are smaller than the dimensions of the pressure chamber and the dimensions of the absorption chamber in the stacking direction. Liquid discharge device.

17. A liquid dispensing device according to claim 1, The flow path substrate is provided between the pressure chamber and the absorption chamber and further comprises a communication passage connecting the pressure chamber and the absorption chamber, and a support portion provided at a position overlapping the communication passage when viewed in the stacking direction, forming a part of the flow path of the liquid and in contact with the diaphragm. Liquid discharge device.

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