Optical sensors, manufacturing methods

Abstract

To provide an optical sensor securing optical axis adjustment accuracy.SOLUTION: An optical sensor 10 includes: a sensor base 14 forming a base surface 141 along a YZ plane and a base surface 142 along an XZ plane; a light-receiving unit 41 receiving reflection beams along a light-receiving optical axis Or whose attitude in a three-dimensional coordinate system is adjusted; first shims 15 at three places positioning the light-receiving unit 41 around a Y axis and a Z axis relative to the sensor base 14; and second shims 16 at two places positioning the light-receiving unit 41 around an X axis relative to the sensor base 14. The respective first shims 15 are screwed between a contact surface and the surface 141 in the state that corner parts are in contact with a contact surface of the light-receiving unit 41 according to a thickness corresponding to an attitude angle θ of a light-receiving optical axis Or. The respective second shims 16 are screwed between a contact surface 452 and a surface 142 in an orthogonal position relation with a contact surface 451 in the light-receiving unit 41 in the state that corner parts 160 are in contact with the surface 142 according to a thickness according to the attitude angle θ.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present disclosure relates to an optical sensor and a method for manufacturing the same.

Background Art

[0002] Conventionally, an optical sensor that projects a light beam toward the outside world and detects the outside world by receiving a reflected beam reflected from the outside world with respect to the projected light beam is widely known. In the technique disclosed in Patent Document 1 as this type of optical sensor, the optical axis of a lens module that guides the projected light beam from a light source module to the outside world is adjusted in posture with respect to the light source module that generates the projected light beam.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the device disclosed in Patent Document 1, the optical axis of a light receiving unit that receives a reflected beam with respect to the projected light beam also needs to be further adjusted in posture with respect to a light projecting unit composed of a light source module and a lens module. In the adjustment of the optical axis of such a light receiving unit, although an adjustment method in three axial directions can be applied as disclosed in Patent Document 1, the adjustment substantially limited to the three axial directions causes a limit in adjustment accuracy due to manufacturing tolerances.

[0005] From the above, an object of the present disclosure is to provide an optical sensor that ensures optical axis adjustment accuracy and a method for manufacturing the same.

Means for Solving the Problems

[0006] The following describes the technical means of solving the problem described in this disclosure. Note that the claims and the reference numerals in parentheses in this section indicate the correspondence with the specific means described in the embodiments detailed later, and do not limit the technical scope of this disclosure.

[0007] The first aspect of this disclosure is, An optical sensor (10) detects the outside world by projecting a light beam (Bp) toward the outside world and receiving a reflected beam (Br) reflected from the outside world toward the light beam, wherein a three-dimensional coordinate system is defined by the X axis, Y axis, and Z axis. A sensor base (14) that forms a first base surface (141) along the YZ plane of the three-dimensional coordinate system, and a second base surface (142) along the XZ plane of the three-dimensional coordinate system, A light receiving unit (41) is fixed to a sensor base and receives a reflected beam along a light receiving optical axis (Or) whose orientation in a three-dimensional coordinate system is adjusted, Three first shims (15) (P11, P12, P13) position the light receiving unit around the Y-axis and Z-axis relative to the sensor base, It includes two second shims (16) at locations (P21, P22) that position the light receiving unit around the X-axis relative to the sensor base, Each first shim is in a three-dimensional coordinate system It is adjusted in Light receiving optical axis This is the attitude angle. The corner portion (150) is screwed between the first base surface and the first contact surface while in contact with either the first contact surface (451) or the first base surface of the light receiving unit, with an individual thickness corresponding to the adjustment orientation angle (θ). Each second shim has a unique thickness corresponding to the adjustment orientation angle of the light-receiving optical axis in the three-dimensional coordinate system, and its corner (160) is in contact with either the second contact surface (452), which is orthogonal to the first contact surface in the light-receiving unit, or the second base surface, while being screwed between the second base surface and the second contact surface.

[0008] A second aspect of this disclosure is, A manufacturing method for manufacturing an optical sensor (10) according to the first embodiment, Each first shim and each second shim, with a thickness corresponding to the adjustment attitude angle in the three-dimensional coordinate system, are interposed between the first base surface and the first contact surface, and between the second base surface and the second contact surface, respectively. This includes screwing each first shim between the first base surface and the first contact surface, and then screwing each second shim between the second base surface and the second contact surface.

[0009] According to these first and second embodiments, each of the three first shims has a different thickness corresponding to the adjustment orientation angle of the light-receiving optical axis in the three-dimensional coordinate system, and its corners are screwed between the first base surface and the first contact surface, with the corners in contact with either the first contact surface of the light-receiving unit or the first base surface of the sensor base that is aligned with the YZ plane. As a result, the positioning state of the light-receiving unit around the Y axis and the Z axis relative to the sensor base can be uniquely defined as a three-point support state that matches the adjustment orientation angle of the light-receiving optical axis.

[0010] In addition, according to the first and second embodiments, each of the two second shims has an individual thickness corresponding to the adjustment orientation angle of the light-receiving optical axis in the three-dimensional coordinate system, and its corners are screwed between the second base surface and the second contact surface, while in contact with either the second contact surface, which is orthogonal to the first contact surface in the light-receiving unit, or the second base surface, which is aligned with the XZ plane in the sensor base. As a result, the positioning state of the light-receiving unit around the X axis relative to the sensor base can be defined not only to match the adjustment orientation angle of the light-receiving optical axis, but also to be a two-point support state that can suppress interference with the three-point support.

[0011] According to these first and second embodiments, the optical axis of the light-receiving unit can be adjusted around the XYZ axes in the three-dimensional coordinate system of the sensor base. Therefore, accuracy in optical axis adjustment can be ensured.

[0012] Furthermore, according to the second embodiment, after screwing in the first shims at three locations to position the light-receiving unit in a three-point support state relative to the sensor base, screwing in the second shims at two locations to position the light-receiving unit in a two-point support state relative to the sensor base is performed. This makes it possible to achieve a two-point support state while avoiding interference with the unambiguous three-point support state, thereby improving the accuracy of optical axis adjustment.

[0013] A third aspect of this disclosure is: An optical sensor (10) detects the outside world by projecting a light beam (Bp) toward the outside world and receiving a reflected beam (Br) reflected from the outside world toward the light beam, wherein a three-dimensional coordinate system is defined by the X axis, Y axis, and Z axis. A sensor base (14) that forms a first base surface (141) along the YZ plane of the three-dimensional coordinate system, and a second base surface (142) along the XZ plane of the three-dimensional coordinate system, A light projection unit (21) is fixed to the sensor base and guides the light projection beam along the light projection axis (Op), Three first shims (15) (P11, P12, P13) position the light projection unit around the Y-axis and Z-axis relative to the sensor base, It includes two second shims (16) at locations (P21, P22) that position the light projection unit around the X-axis relative to the sensor base, Each first shim is in a three-dimensional coordinate system It is adjusted in Projection light axis This is the attitude angle. The corner portion (150) is screwed between the first base surface and the first contact surface while in contact with either the first contact surface (451) or the first base surface of the light projection unit, with an individual thickness corresponding to the adjustment attitude angle (θ). Each second shim has a unique thickness corresponding to the adjustment orientation angle of the light projection axis in the three-dimensional coordinate system, and its corner (160) is in contact with either the second contact surface (452), which is orthogonal to the first contact surface in the light projection unit, or the second base surface, while being screwed between the second base surface and the second contact surface.

[0014] The fourth aspect of this disclosure is: A manufacturing method for manufacturing the optical sensor (10) of the third aspect, comprising: interposing first shims and second shims each having a thickness corresponding to an adjustment attitude angle in a three-dimensional coordinate system between a first base surface and a first contact surface and between a second base surface and a second contact surface, respectively; including screwing each first shim between the first base surface and the first contact surface and then screwing each second shim between the second base surface and the second contact surface.

[0015] According to these third and fourth aspects, each of the three first shims has a corner portion with an individual thickness corresponding to an adjustment attitude angle of a light projection optical axis in a three-dimensional coordinate system, and is screwed between the first base surface and the first contact surface while being in contact with one of the first contact surface in the light projection unit and the first base surface along the YZ plane in the sensor base. Thereby, the positioning states of the light projection unit about the Y-axis and the Z-axis with respect to the sensor base can be uniquely defined in a three-point support state adjusted according to the adjustment attitude angle of the light projection optical axis.

[0016] At the same time, according to the third and fourth aspects, each of the two second shims has a corner portion with an individual thickness corresponding to an adjustment attitude angle of a light projection optical axis in a three-dimensional coordinate system, and is screwed between the second base surface and the second contact surface while being in contact with one of the second contact surface orthogonal to the first contact surface in the light projection unit and the second base surface along the XZ plane in the sensor base. Thereby, the positioning state of the light projection unit about the X-axis with respect to the sensor base can be defined not only adjusted according to the adjustment attitude angle of the light projection optical axis but also in a two-point support state that can suppress interference with the above three-point support.

[0017] According to such third and fourth aspects, the light projection optical axis of the light projection unit can be adjusted in attitude about each of the X, Y, and Z axes in the three-dimensional coordinate system of the sensor base. Therefore, it is possible to ensure the light axis adjustment accuracy.

[0018] Moreover, according to the fourth aspect, after screwing the first shims at three positions where the light projection unit is positioned in a three-point support state with respect to the sensor base, screwing of the second shims at two positions where the light projection unit is positioned in a two-point support state with respect to the sensor base is performed. According to this, it is possible to realize a two-point support state while avoiding interference with the unambiguous three-point support state, so that the optical axis adjustment accuracy can be improved.

Brief Description of Drawings

[0019] [Figure 1] It is a cross-sectional view showing the overall configuration of the optical sensor according to the first embodiment. [Figure 2] It is a perspective view showing the light projection unit according to the first embodiment. [Figure 3] It is a plan view in the XY plane schematically showing the light projection unit according to the first embodiment. [Figure 4] It is a perspective view showing the light receiving unit according to the first embodiment. [Figure 5] It is a plan view in the XY plane schematically showing the light receiving unit according to the first embodiment. [Figure 6] It is a plan view in the YZ plane schematically showing the configurations of the light projection unit and the light receiving unit according to the first embodiment. [Figure 7] It is a plan view in the XZ plane schematically showing the configuration of the light projection unit according to the first embodiment. [Figure 8] It is a plan view in the XZ plane schematically showing the configuration of the light receiving unit according to the first embodiment. [Figure 9] It is a plan view in the XY plane showing the configurations of the light projection unit and the light receiving unit according to the first embodiment. [Figure 10] It is a cross-sectional view in the YZ plane schematically showing the configuration of the light receiving unit according to the first embodiment. [Figure 11] It is a cross-sectional view in the XZ plane schematically showing the configuration of the light receiving unit according to the first embodiment. [Figure 12] It is a cross-sectional view in the XY plane showing the configuration of the light receiving unit according to the first embodiment. [Figure 13]This is a YZ plan view showing the configuration of the light-emitting unit and light-receiving unit according to a modified example of Figure 6. [Figure 14] This is a YZ plan view showing the configuration of the light-emitting unit and light-receiving unit according to a modified example of Figure 6. [Figure 15] This is a flowchart showing the method for manufacturing an optical sensor according to the first embodiment. [Figure 16] This is a YZ cross-sectional view schematically showing the configuration of the light receiving unit according to the second embodiment. [Figure 17] This is an XZ cross-sectional view schematically showing the configuration of the light receiving unit according to the second embodiment. [Figure 18] This is an XY cross-sectional view showing the configuration of the light receiving unit according to the second embodiment. [Figure 19] This is a flowchart showing the method for manufacturing an optical sensor according to the third embodiment. [Figure 20] This is a YZ plan view diagram for schematically illustrating the light projection sequence of the preparation subroutine in the manufacturing method according to the third embodiment. [Figure 21] This is a YZ plan view diagram for schematically illustrating the light projection sequence of the preparation subroutine in the manufacturing method according to the third embodiment. [Figure 22] This is a YZ plan view diagram for schematically illustrating the light reception sequence of the preparation subroutine in the manufacturing method according to the third embodiment. [Figure 23] This is a YZ plan view diagram for schematically illustrating the light reception sequence of the preparation subroutine in the manufacturing method according to the third embodiment. [Figure 24] This is a YZ plan view schematicly showing the configuration of the light-emitting unit and light-receiving unit according to the fourth embodiment. [Figure 25] This is a flowchart showing a method for manufacturing an optical sensor according to the fourth embodiment. [Figure 26] This is a YZ plan view schematicly showing the configuration of the light-emitting unit and light-receiving unit according to the fifth embodiment. [Figure 27] This is a flowchart showing a method for manufacturing an optical sensor according to the fifth embodiment. [Figure 28] This is an XZ plan view schematicly showing the configuration of the light receiving unit according to the modified example in Figure 8. [Figure 29] This is an XY plan view showing the configuration of the light-emitting unit and light-receiving unit according to a modified example of Figure 9. [Figure 30] This is an XZ plan view schematicly showing the configuration of the light receiving unit according to the modified example in Figure 8. [Figure 31] This is an XY plan view showing the configuration of the light-emitting unit and light-receiving unit according to a modified example of Figure 9. [Figure 32] This is a YZ plan view schematicly showing the configuration of the light-emitting unit and light-receiving unit according to the variation example in Figure 6. [Figure 33] This is a YZ plan view schematicly showing the configuration of the light-emitting unit and light-receiving unit according to the variation example in Figure 6. [Figure 34] This is a YZ plan view schematicly showing the configuration of the light-emitting unit and light-receiving unit according to the variation example in Figure 24. [Figure 35] This is a YZ plan view schematicly showing the configuration of the light-emitting unit and light-receiving unit according to the variation example in Figure 26. [Modes for carrying out the invention]

[0020] (First Embodiment) As shown in Figure 1, the optical sensor 10 according to the first embodiment of this disclosure is a LiDAR (Light Detection and Ranging / Laser Imaging Detection and Ranging) for optically detecting the external environment when placed on a moving object. The moving object on which the optical sensor 10 is to be placed is a vehicle, such as an automobile, capable of at least one type of driving from manual driving, automatic driving, and remote driving. In the following description, unless otherwise specified, the directions indicated by front, rear, up, down, left, and right are defined with respect to the vehicle on a horizontal plane. Also, in the following description, the horizontal direction and the vertical direction mean the direction parallel and perpendicular to the horizontal plane of the vehicle, respectively.

[0021] The optical sensor 10 is positioned at least one location on the vehicle, such as the front, left and right sides, rear, and upper roof. The optical sensor 10 emits a light beam Bp towards a detection area Ad in the outside world, corresponding to its position on the vehicle. The optical sensor 10 detects the reflected light Br, which returns when the emitted light beam Bp is reflected by a target in the detection area Ad in the outside world. The emitted light beam Bp that becomes the reflected beam Br is selected to be near-infrared light, which is difficult for humans to see.

[0022] The optical sensor 10 detects targets in the detection area Ad of the external environment by receiving the reflected beam Br that has been reflected from the projected light beam Bp. This detection of external targets involves detecting one or more types of information, including at least distance, such as the distance from the optical sensor 10 to the target, the direction in which the target is located, and the reflection intensity of the reflected beam Br from the target. Typical targets for detection in an optical sensor 10 applied to a vehicle may include at least one type of moving object, such as pedestrians, cyclists, animals other than humans, and other vehicles. Typical targets for detection in an optical sensor 10 applied to a vehicle may include at least one type of stationary object, such as guardrails, road signs, roadside structures, and fallen objects on the road.

[0023] The optical sensor 10 has a three-dimensional coordinate system defined by three mutually orthogonal axes: the X, Y, and Z axes. In particular, in the three-dimensional coordinate system of the optical sensor 10, the Y-axis direction is defined along the vertical direction of the vehicle, while the X-axis and Z-axis directions are defined along the different horizontal directions of the vehicle. As a result, on a vehicle on a horizontal plane, the XY and YZ planes of the three-dimensional coordinate system align with a vertical plane perpendicular to the horizontal plane, and the XZ plane aligns with the horizontal plane. Note that in Figure 1, the portion to the left of the dashed line along the Y-axis direction (the optical window 13 side described later) actually shows a cross-section perpendicular to the portion to the right of the dashed line (the units 21 and 41 side described later).

[0024] The optical sensor 10 comprises a housing unit 11, a light-emitting unit 21, a scanning unit 31, a light-receiving unit 41, and a control unit 51. The housing unit 11, which separates the outside world from the inside, is composed of a housing body 12 and an optical window 13. The light-shielding housing body 12 is formed in the shape of a box, for example, from metal or resin. The housing body 12 houses the light-emitting unit 21, the scanning unit 31, the light-receiving unit 41, and the control unit 51 inside. The housing unit 11 has an opening that is closed by the optical window 13. The light-transmitting optical window 13 is formed in the shape of a plate, for example, from resin or glass.

[0025] As shown in Figures 1 and 2, the light projection unit 21 is composed of a light projection light source module 22 and a light projection lens module 26. As shown in Figure 3, the light projection light source module 22 is constructed by mounting a plurality of light projection light sources 24 in an array on a substrate 224. In particular, each light projection light source 24 in this embodiment is a laser diode arranged in a single row along the Y-axis. Each light projection light source 24 generates pulsed laser light that becomes part of the light projection beam Bp in accordance with a control signal from the control unit 51. Each light projection light source 24 may be an edge emitter laser or a vertical cavity surface-emitting laser (VCSEL).

[0026] As shown in Figures 1 and 3, the light source module 22 has a light-emitting surface 226 formed on one side of the substrate 224, onto which a light-emitting beam Bp is projected by the light emitted from each light source 24. The light-emitting surface 226 is pseudo-defined as a rectangular contour that is long in the Y-axis direction and short in the X-axis direction by the aggregation of the laser oscillation units of each light source 24. The laser light projected from the laser oscillation unit of each light source 24 is projected from the light-emitting surface 226 as a light-emitting beam Bp that is shaped into a vertically elongated line in the detection region Ad.

[0027] As shown in Figures 1 and 2, the light-emitting lens module 26 is constructed in such a way that at least one light-emitting lens 260 is held by a lens barrel 261. The light-transmitting light-emitting lens 260 is mainly made of a base material such as resin or glass, and is formed into a lens shape according to the optical function it is to perform. The light-emitting lens 260 performs at least one type of optical function, such as focusing, collimating, and shaping, on the light-emitting beam Bp from the light-emitting light source module 22. The light-emitting lens 260 is positioned within a light-shielding lens barrel 261 made of, for example, metal or resin.

[0028] The light-emitting lens module 26, configured in this way, is aligned with the light-emitting light source module 22 to form a light-emitting optical axis Op. Therefore, the light-emitting beam Bp projected from the light-emitting light source module 22 is guided along the light-emitting optical axis Op toward the outside of the vehicle by the optical action of the light-emitting lens module 26.

[0029] As shown in Figure 1, the scanning unit 31 comprises a scanning mirror 32 and a scanning motor 35. The scanning mirror 32 is formed in the shape of a plate with a reflective film deposited on a reflective surface 33, which is one side of a substrate. The scanning mirror 32 is supported by the housing unit 11 so as to be rotatable around a rotation centerline in the Y-axis direction. The scanning mirror 32 oscillates within a finite drive range determined by a mechanical or electrical stopper. The scanning motor 35 is, for example, a voice coil motor, a brushed DC motor, or a stepping motor. The output shaft of the scanning motor 35 is coupled to the scanning mirror 32 directly or indirectly via a drive mechanism such as a reduction gear. The scanning motor 35 is held by the housing unit 11 so as to be rotatable along with the output shaft of the scanning mirror 32. The scanning motor 35 rotates (i.e., oscillates) the scanning mirror 32 within a finite drive range in accordance with a control signal from the control unit 51.

[0030] The scanning mirror 32 reflects the light beam Bp incident from the light projection unit 21 by the reflective surface 33 and illuminates the detection region Ad through the optical window 13, thereby scanning the region Ad according to the rotation angle of the scanning motor 35. At this time, the scanning of the detection region Ad by the light beam Bp is substantially limited to horizontal scanning in this embodiment, according to the rotation drive of the scanning mirror 32.

[0031] The scanning mirror 32 reflects the reflected beam Br, which is incident from the target in the detection area Ad through the optical window 13, towards the light receiving unit 41 using its reflective surface 33, in accordance with the rotation angle of the scanning motor 35. At this time, the speeds of the emitted beam Bp and the reflected beam Br are sufficiently large compared to the rotational speed of the scanning mirror 32. As a result, the reflected beam Br is guided towards the light receiving unit 41 in the opposite direction to the emitted beam Bp by the reflection effect from the scanning mirror 32, which can be simulated to have essentially the same rotation angle as the emitted beam Bp.

[0032] As shown in Figures 1 and 4, the light receiving unit 41 is composed of a light receiving lens module 42 and a light receiving detection module 45. The light receiving lens module 42 is constructed such that at least one light receiving lens 420 is held by a lens barrel 421. The light-transmitting light receiving lens 420 is formed in a lens shape corresponding to the optical effect it will exert, mainly using a substrate such as resin or glass. The light receiving lens 420 exerts an optical effect to image the reflected beam Br from the scanning mirror 32 onto the light receiving detection module 45. The light receiving lens 420 is positioned within a light-shielding lens barrel 421, which is made of, for example, metal or resin.

[0033] The light-receiving lens module 42, configured in this way, is aligned with the light-receiving detection module 45 so as to form a light-receiving optical axis Or. Here, the light-receiving optical axis Or of the light-receiving lens module 42 is offset in the Y-axis direction relative to the light-emitting optical axis Op of the light-emitting lens module 26. As a result, the reflected beam Br, which is reflected from the reflective surface 33 of the scanning mirror 32 with an offset in the Y-axis direction, is guided along the light-receiving optical axis Or by the optical action of the light-receiving lens module 42 and is imaged onto the light-receiving detection module 45.

[0034] As shown in Figure 5, the light-receiving detection module 45 is constructed by mounting multiple light-receiving pixels 46 in an array on a substrate 454. Each light-receiving pixel 46 is arranged at least in the Y-axis direction. Each light-receiving pixel 46 is further formed from multiple light-receiving elements 460, such as single-photon avalanche diodes.

[0035] As shown in Figures 1 and 5, the light-receiving detection module 45 has a light-receiving surface 456 formed on one side of the substrate 454. The light-receiving surface 456 is formed by the collection of incident surfaces of each light-receiving pixel 46, resulting in a rectangular contour that is longitudinal in the Y-axis direction and transverse in the X-axis direction. Each light-receiving pixel 46 receives a line-shaped reflected beam Br incident from the light-receiving lens module 42 onto the light-receiving surface 456 along the light-receiving optical axis Or.

[0036] As shown in Figure 1, the light receiving detection module 45 has an output circuit 47. The output circuit 47 performs sampling processing at each control cycle according to a control signal from the control unit 51 in detection frames for each scanning line, which are associated with the rotation angle of the scanning mirror 32 and synchronized with the light emission period of the light emission beam Bp from the light emission light source module 22. At this time, the output circuit 47 generates a detection signal by combining the response outputs from the photodetector elements 460 of each light receiving pixel 46 at each control cycle. The detection signals thus generated are output from the output circuit 47 to the control unit 51 for each scanning line.

[0037] The control unit 51 controls target detection in the external detection area Ad. The control unit 51 is primarily constructed from at least one computer, including a processor and memory. The control unit 51 is connected to the light source module 22, the scanning motor 35, and the light detection module 45. The control unit 51 controls the light source module 22 to generate a light beam Bp for each light emission period. At the same time, the control unit 51 controls the scanning motor 35 to control scanning and reflection by the scanning mirror 32 in synchronization with the light emission period of the light source module 22. Furthermore, the control unit 51 generates target detection data in the detection area Ad by processing the detection signal output from the light detection module 45 in accordance with the light emission period of the light source module 22 and the scanning and reflection by the scanning mirror 32.

[0038] (Detailed configuration) The housing unit 11 further comprises a sensor base 14, two types of shims 15 and 16, and three types of fixing screws 17, 18, and 19, as shown in Figures 6 to 12.

[0039] As shown in Figures 6-9, the light-shielding sensor base 14 is formed as a partition wall dividing the inside of the housing body 12 (see Figure 1), mainly using a base material such as resin or metal. The sensor base 14 is surrounded and held by the housing body 12 from the outer periphery, and is positioned with one side facing the inner surface of the optical window 13. Thus, the sensor base 14 is assumed to have the three-dimensional coordinate system defined above. The sensor base 14 has two types of base surfaces 141 and 142 as a structure for fixing the light-receiving unit 41.

[0040] The first base surface 141 is formed on one side of the sensor base 14 facing the optical window 13. The first base surface 141 is defined as a planar shape extending along the YZ plane. The first base surface 141 may be constructed as a continuous surface common to three locations P11, P12, and P13 for positioning the light receiving unit 41 relative to the sensor base 14 around the Y axis and Z axis. The first base surface 141 may be constructed as a plurality of separate segmented surfaces for each of the three locations P11, P12, and P13 for positioning the light receiving unit 41 relative to the sensor base 14 around the Y axis and Z axis. Figures 6, 8, and 9 show examples of the first base surface 141 constructed as a continuous surface.

[0041] The second base surface 142 is formed on the side surface of a protrusion that protrudes in a block-like manner in the X-axis direction from one side of the sensor base 14 forming the first base surface 141. The second base surface 142 is defined as a planar shape that extends along the XZ plane, and is positioned substantially orthogonally to the first base surface 141. The second base surface 142 may be constructed as a continuous surface common to two locations P21 and P22 for positioning the light receiving unit 41 around the X axis relative to the sensor base 14. Alternatively, the second base surface 142 may be constructed as a plurality of separate segmented surfaces for each of the two locations P21 and P22 for positioning the light receiving unit 41 around the X axis relative to the sensor base 14. Figure 6 shows an example of a second base surface 142 constructed as a continuous surface.

[0042] The sensor base 14 has a light-emitting base surface 143, separate from the base surfaces 141 and 142 for the light-receiving unit 41, as a structure for fixing the light-emitting unit 21. The light-emitting base surface 143 is formed on one side of the sensor base 14, on the same side as the first base surface 141. The light-emitting base surface 143 is defined as a planar shape extending along the YZ plane. The light-emitting base surface 143 may be constructed as a continuous surface, continuous with the first base surface 141. The light-emitting base surface 143 may be constructed as a separate surface, separate from the first base surface 141. Figures 6 and 9 show an example of a light-emitting base surface 143 constructed as a continuous surface.

[0043] As shown in Figures 2, 6, 7, and 9, the light-emitting light source module 22 in the light-emitting unit 21 has a light-emitting holder 220 that is bonded to the lens barrel 261 of the light-emitting lens module 26 in the Z-axis direction. The light-shielding light-emitting holder 220 is formed in a cylindrical shape, mainly from a base material such as resin or metal. Inside the light-emitting holder 220, a substrate 224 on which multiple light-emitting light sources 24 (see Figure 3) are mounted is held.

[0044] The light-emitting holder 220 has a light-emitting contact surface 221 as a structure for fixing the light-emitting unit 21 to the sensor base 14, as shown in Figures 7 and 9. The light-emitting contact surface 221 is defined as a planar shape that is in surface contact with the light-emitting base surface 143, and is positioned in a manner that spreads along the YZ plane when positioned by the light-emitting base surface 143. The light-emitting contact surface 221 may be constructed as a continuous surface common to multiple locations for positioning the light-emitting unit 21 relative to the sensor base 14. The light-emitting contact surface 221 may be constructed as multiple separate divided surfaces for each of the multiple locations for positioning the light-emitting unit 21 relative to the sensor base 14. Figures 7 and 9 show an example of a light-emitting contact surface 221 constructed as a divided surface.

[0045] As shown in Figures 6, 7, and 9, the light-emitting holder 220 is screwed to the sensor base 14, which is in surface contact with the light-emitting contact surface 221 at the light-emitting base surface 143, by a plurality of light-emitting fixing screws 19. Each of these light-emitting fixing screws 19 is formed in the shape of a male screw, for example, from metal. Each light-emitting fixing screw 19 has its shaft loosely inserted into an individual through-hole in the light-emitting holder 220 along the X-axis direction. At the same time, each light-emitting fixing screw 19 has its shaft screwed into an individual female screw hole in the sensor base 14 along the X-axis direction. With this screw fastening structure, each light-emitting fixing screw 19 fixes the light-emitting unit 21 to the sensor base 14 with its head end face in surface contact with the side of the light-emitting holder 220 opposite to the sensor base 14.

[0046] In the light projector holder 220, a virtual light projection axis Vp is geometrically assumed to be aligned with the Z-axis direction when positioned by the light projector base surface 143. Based on this assumption, the virtual light projection axis Vp is defined along the light projector contact surface 221. In the light projector holder 220, an attitude angle tolerance with respect to the virtual light projection axis Vp in a three-dimensional coordinate system is assumed for the holding position of the substrate 224 and / or the mounting position of each light projector light source 24 on the substrate 224. Similarly, in the lens barrel 261, an attitude angle tolerance with respect to the virtual light projection axis Vp in a three-dimensional coordinate system is assumed for the bonding position to the light projector holder 220 and / or the holding position of the light projector lens 260.

[0047] From these observations, the optical sensor 10 exhibits an attitude angle deviation δp in the three-dimensional coordinate system of the optical projection axis Op with respect to the virtual projection axis Vp, as shown in Figures 6, 7, and 9, in at least one of the YZ, XZ, and XY planar views. Specifically, in the YZ planar view of Figure 6, the attitude angle deviation δp of the optical projection axis Op with respect to the virtual projection axis Vp is represented by an inclined angle of the optical projection axis Op around the X axis, centered on the adhesive interface between the lens barrel 261 and the light projection holder 220, from the virtual projection axis Vp. At the same time, in the XZ planar view of Figure 7, the attitude angle deviation δp of the optical projection axis Op with respect to the virtual projection axis Vp is represented by an inclined angle of the optical projection axis Op around the Y axis, centered on the adhesive interface between the lens barrel 261 and the light projection holder 220, from the virtual projection axis Vp. Furthermore, in the XY plan view of Figure 9, the rotation angle δp of the projection beam Op relative to the projection virtual axis Vp is revealed at the bonding interface between the lens barrel 261 and the projection holder 220, representing the rotation of the projection beam Bp on the projection optical axis Op around the Z axis, from the ideal projection beam Bpv on the projection virtual axis Vp.

[0048] As shown in Figures 4, 6, 8, and 9, the light receiving unit 41 has a light receiving holder 450 which is bonded to the lens barrel 421 of the light receiving lens module 42 in the Z-axis direction. The light-shielding light receiving holder 450 is formed in a cylindrical shape, mainly from a base material such as resin or metal. Inside the light receiving holder 450, a substrate 454 on which multiple light receiving pixels 46 (see Figure 5) are arranged is held. As a structure for fixing the light receiving unit 41 to the sensor base 14, the light receiving holder 450 has two types of contact surfaces 451 and 452 as shown in Figures 6, 8, 9 to 12.

[0049] As shown in Figures 8, 9, 11, and 12, the first contact surface 451 is defined as a planar surface that sandwiches each first shim 15 in the X-axis direction between itself and the first base surface 141. The first contact surface 451 may be constructed as a continuous surface common to three locations P11, P12, and P13 for positioning the light receiving unit 41 relative to the sensor base 14 around the Y-axis and Z-axis. The first contact surface 451 may be constructed as a plurality of separate segmented surfaces for each of the three locations P11, P12, and P13 for positioning the light receiving unit 41 relative to the sensor base 14 around the Y-axis and Z-axis. Figures 8 and 9 show examples of first contact surfaces 451 constructed as segmented surfaces.

[0050] As shown in Figures 8, 9, 11, and 12, individual first shims 15 are interposed at three locations P11, P12, and P13 between the first contact surface 451 and the first base surface 141 to position the light receiving unit 41 relative to the sensor base 14 around the Y-axis and Z-axis. Each first shim 15 is formed in the shape of a circular flat plate, for example, from metal or resin. Each first shim 15 may be made from a single shim material. Each first shim 15 may also be made from a combination of multiple shim materials.

[0051] Each first shim 15 is positioned with a thickness in the direction normal to the surface 141 (in the first embodiment, the X-axis direction) by making surface contact with one side of the first base surface 141. The thickness of each first shim 15 is set to individual thicknesses T11, T12, and T13. Due to these thickness settings, each first shim 15 has a corner (i.e., outer peripheral edge) 150 on the side opposite to the first base surface 141 in contact with the first contact surface 451. In particular, in the optical sensor 10, the first shims 15 at the interposing locations (i.e., positioning locations) P11 and P12 are arranged side by side in the Y-axis direction. At the same time, the first shim 15 at interposing location P13 is positioned so that its Z-axis position is offset from that of interposing locations P11 and P12, and its Y-axis position is offset towards interposing location P12 compared to interposing location P11 (see also Figure 6). Based on these findings, at locations P11, P12, and P13, the first shims 15 are positioned spaced apart from each other along the YZ plane.

[0052] Each first shim 15 is individually secured between the first contact surface 451 and the first base surface 141 by a corresponding first fixing screw 17. Each of these first fixing screws 17 is formed in the shape of a male screw, for example, from metal. Each first fixing screw 17 has its shaft loosely inserted into an individual through hole in the light receiving holder 450 along the direction normal to the first contact surface 451. At the same time, each first fixing screw 17 has its shaft inserted into a fitting hole in the first shim 15 along the direction normal to the first contact surface 451. Furthermore, each first fixing screw 17 has its shaft screwed into an individual female screw hole in the sensor base 14 along the direction normal to the first contact surface 451. With this screw fastening structure, each first fixing screw 17 fixes the light receiving unit 41 to the sensor base 14 while the corner portion (i.e., the outer peripheral edge) 170 of the shaft-side end face of the head of each screw is in contact with the side of the light receiving holder 450 opposite to the first shim 15.

[0053] As shown in Figures 6 and 10, the second contact surface 452 is defined as a planar shape that sandwiches each second shim 16 in the Y-axis direction between itself and the second base surface 142, and is positioned substantially orthogonally to the first contact surface 451. The second contact surface 452 may be constructed as a continuous surface common to two locations P21 and P22 for positioning the light receiving unit 41 around the X-axis relative to the sensor base 14. Alternatively, the second contact surface 452 may be constructed as a plurality of separate segmented surfaces for each of the two locations P21 and P22 for positioning the light receiving unit 41 around the X-axis relative to the sensor base 14. Figures 6 and 10 show an example of a second contact surface 452 constructed as a continuous surface.

[0054] At two locations P21 and P22 between the second contact surface 452 and the second base surface 142, separate second shims 16 are interposed to position the light receiving unit 41 around the X-axis relative to the sensor base 14. Each second shim 16 is formed in a circular, flat shape as a whole, for example, from metal or resin. Each second shim 16 may be made from a single shim material. Each second shim 16 may be made from a combination of multiple shim materials.

[0055] Each second shim 16 is positioned with a thickness in the direction normal to the second contact surface 452 (in the first embodiment, the inclination direction relative to the Y-axis direction) by making surface contact with one side of the second contact surface 452. The thickness of each second shim 16 is set to individual thicknesses T21 and T22. Due to these thickness settings, each second shim 16 has a corner (i.e., outer peripheral edge) 160 on the side opposite to the second contact surface 452 in contact with the second base surface 142. In particular, in the optical sensor 10, the second shims 16 at the interposing locations (i.e., positioning locations) P21 and P22 are arranged side by side in the Z-axis direction. As a result, at each location P21 and P22, the second shims 16 are positioned spaced apart from each other along the XZ plane.

[0056] Each second shim 16 is individually secured between the second contact surface 452 and the second base surface 142 by a corresponding second fixing screw 18. Each of these second fixing screws 18 is formed in the shape of a male screw, for example, from metal. The shaft of each second fixing screw 18 is loosely inserted into an individual through hole in the sensor base 14 along the direction normal to the second contact surface 452. At the same time, the shaft of each second fixing screw 18 is fitted into a fitting hole in the second shim 16 along the direction normal to the second contact surface 452. Furthermore, the shaft of each second fixing screw 18 is screwed into an individual female screw hole in the light receiving holder 450 along the direction normal to the second contact surface 452. With this screw fastening structure, each second fixing screw 18 fixes the light receiving unit 41 to the sensor base 14 while the corner portion (i.e., outer peripheral edge) 180 of the shaft-side end face of the head of each screw is in contact with the side of the protrusion of the sensor base 14 opposite to the second shim 16.

[0057] As shown in Figures 6, 8, and 9, the light-receiving holder 450 is geometrically assumed to have a virtual light-receiving axis Vr designed along the Z-axis direction in the ideal (i.e., design) state where the thickness of the shims 15 and 16 of the same type is common, as a positioning state via corresponding shims 15 and 16 on each base surface 141 and 142. Based on this assumption, the virtual light-receiving axis Vr is defined along both the first contact surface 451 and the second contact surface 452. In the light-receiving holder 450, attitude angle tolerances with respect to the virtual light-receiving axis Vr in a three-dimensional coordinate system are assumed with respect to the holding position of the substrate 454 and / or the arrangement position of each light-receiving pixel 46 on the substrate 454. Similarly, in the lens barrel 421, attitude angle tolerances with respect to the virtual light-receiving axis Vr in a three-dimensional coordinate system are assumed with respect to the bonding position to the light-receiving holder 450 and / or the holding position of the light-receiving lens 420.

[0058] From these observations, the optical sensor 10 exhibits an attitude angle deviation δr in the three-dimensional coordinate system of the optical receiving axis Or relative to the virtual light receiving axis Vr, as shown in Figures 6, 8, and 9, in at least one of the YZ, XZ, and XY planar views. Specifically, in the YZ planar view of Figure 6, the attitude angle deviation δr of the optical receiving axis Or relative to the virtual light receiving axis Vr is expressed as an inclined angle of the optical receiving axis Or around the X axis, centered on the adhesive interface between the lens barrel 421 and the light receiving holder 450, from the virtual light receiving axis Vr. Simultaneously, in the XZ planar view of Figure 8, the attitude angle deviation δr of the optical receiving axis Or relative to the virtual light receiving axis Vr is expressed as an inclined angle of the optical receiving axis Or around the Y axis, centered on the adhesive interface between the lens barrel 421 and the light receiving holder 450, from the virtual light receiving axis Vr. Furthermore, in the XY planar view of Figure 9, the rotation angle δr of the optical axis Or relative to the virtual light-receiving axis Vr is derived from the rotation of the reflected beam Br on the optical axis Or around the Z axis at the bonding interface between the lens barrel 421 and the light-receiving holder 450, which is derived from the ideal reflected beam Brv on the virtual light-receiving axis Vr.

[0059] Based on the above, in the product state of the optical sensor 10, as shown in Figures 6-9, the adjustment attitude angle θ of the light-receiving optical axis Or in the three-dimensional coordinate system is adjusted so that the light-receiving optical axis Or is aligned with the light-emitting optical axis Op. As a result, the adjustment attitude angle θ of the light-receiving optical axis Or substantially matches the attitude angle deviation δp of the light-emitting optical axis Op with respect to the light-emitting virtual axis Vp in the three-dimensional coordinate system. Therefore, the adjustment attitude angle θ is selected so that the positioning attitude angle ψ of the light-receiving virtual axis Vr in the three-dimensional coordinate system substantially matches the relative error δp_r (=δp-δr) between the attitude angle deviation δp of the light-emitting optical axis Op with respect to the light-emitting virtual axis Vp and the attitude angle deviation δr of the light-receiving optical axis Or with respect to the light-receiving virtual axis Vr. Here, each attitude angle deviation δp,δr is defined as a signed angle on the corresponding drawing in Figures 6-9 for each plan view to which the relative error δp_r is applied, with clockwise being positive and counterclockwise being negative. Thus, the relative error δp_r for each plan view is also used as a signed angle for selecting the positioning attitude angle ψ.

[0060] Specifically, in the YZ plan view shown in Figure 6 and its modified examples Figures 13 and 14, the tilt angle obtained by tilting the light-receiving optical axis Or around the X axis from the Z axis is adjusted as the attitude angle θ that aligns the light-receiving optical axis Or with the light-emitting optical axis Op. Therefore, in the YZ plan view, an adjustment attitude angle θ is selected that substantially matches the relative error δp_r between the attitude angle deviations δp and δr in the YZ plan view, which is the positioning attitude angle ψ obtained by tilting the virtual light-receiving axis Vr around the X axis from the Z axis. Here, Figure 6 shows an example of a relative error δp_r with a negative sign, where the sum of the absolute values ​​of the attitude angle deviations δp and δr is positive, relative to a pattern where the attitude angle deviation δr is positive relative to a negative attitude angle deviation δp. Figure 13 shows an example of a relative error δp_r with a negative sign, where the absolute difference between the attitude angle deviations δp and δr is negative, where the absolute value of the negative attitude angle deviation δr is smaller than the absolute value of the negative attitude angle deviation δp. Figure 14 shows an example of a relative error δp_r that takes a positive sign when the absolute value of the negative attitude angle deviation δr is greater than the absolute value of the negative attitude angle deviation δp. Note that in patterns where the positive and negative relationship between the attitude angle deviations δp and δr is reversed compared to the above examples, the positive and negative relationship of the relative error δp_r is also reversed.

[0061] In addition, in the XZ planar view shown in Figures 7 and 8, the tilt angle obtained by tilting the light-receiving optical axis Or around the Y axis from the Z axis is adjusted as the attitude angle θ that aligns the light-receiving optical axis Or with the light-emitting optical axis Op. Therefore, in the XZ planar view, an adjustment attitude angle θ is selected that substantially matches the positioning attitude angle ψ obtained by tilting the virtual light-receiving axis Vr around the Y axis from the Z axis to the relative error δp_r between the attitude angle deviations δp and δr in the XZ planar view. Here, Figures 7 and 8 show an example of a relative error δp_r with a positive sign, where the sum of the absolute values ​​of the attitude angle deviations δp and δr is positive, in a pattern where the attitude angle deviation δr is negative relative to the positive attitude angle deviation δp. For patterns other than this example, the relative error δp_r will be similar to the pattern in the YZ plane.

[0062] Furthermore, in the XY plane view shown in Figure 9, the rotation angle that rotates the reflected beam Br on the receiving optical axis Or around the Z axis from the Y axis along which the ideal linear reflected beam Br should align is adjusted as the attitude angle θ that aligns the receiving optical axis Or with the projecting optical axis Op. Therefore, in the XY plane view, an adjustment attitude angle θ is selected that substantially matches the relative error δp_r between the attitude angle deviations δp and δr in the XY plane view, by positioning attitude angle ψ that rotates the virtual receiving axis Vr along the assumed reflected beam Brv on it around the Z axis from the Y axis. Here, Figure 9 shows an example of a relative error δp_r with a negative sign, where the sum of the absolute values ​​of the attitude angle deviations δp and δr is negative, in a pattern where the attitude angle deviation δr is positive for a negative attitude angle deviation δp. The relative error δp_r in patterns other than this example will be similar to the pattern in the YZ plane.

[0063] Based on this adjustment principle, the individual thicknesses T11, T12, and T13 of each first shim 15 are determined as shown in Figures 11 and 12, according to the correlation between the absolute value and sign around the Y axis of the adjustment attitude angle θ in the XZ plane view and the absolute value and sign around the Z axis of the adjustment attitude angle θ in the XY plane view. At the same time, the individual thicknesses T21 and T22 of each second shim 16 are determined as shown in Figure 10, according to the absolute value and sign around the X axis of the adjustment attitude angle θ in the YZ plane view.

[0064] (Manufacturing method) Next, the manufacturing method of the optical sensor 10 will be explained according to the manufacturing flow shown in Figure 15. In the manufacturing flow of Figure 15, "S" represents the "manufacturing process" for manufacturing the optical sensor 10.

[0065] The preparation step in S10 involves selecting the adjustment attitude angle θ of the receiving optical axis Or in a three-dimensional coordinate system, and determining the individual thicknesses T11, T12, T13 of each first shim 15 and the individual thicknesses T21, T22 of each second shim 16. Specifically, first, the attitude angle deviation δp of the projection optical axis Op with respect to the projection virtual axis Vp in the projection unit 21 and the attitude angle deviation δr of the receiving optical axis Or with respect to the receiving virtual axis Vr in the receiving unit 41 are measured. At this time, each attitude angle deviation δp and δr can be measured by identifying the corresponding optical axes Op and Or from the focusing state of the corresponding beams Bp and Br at specific positions.

[0066] In the preparation step of S10, based on the results of these measurements, an adjustment attitude angle θ is selected so that the positioning attitude angle ψ of the light-receiving virtual axis Vr in the three-dimensional coordinate system defined by the sensor base 14 substantially matches the relative error δp_r between the attitude angle deviations δp and δr. Furthermore, the individual thicknesses T11, T12, T13 of each first shim 15 and the individual thicknesses T21, T22 of each second shim 16 are determined so as to realize the selected adjustment attitude angle θ.

[0067] The setting process in S20 involves interposing the first shims 15 and second shims 16, each with a thickness corresponding to the adjusted attitude angle θ in S10, between the first base surface 141 and the first contact surface 451, and between the second base surface 142 and the second contact surface 452, respectively. As a result, the light receiving unit 41, together with the light transmitting unit 21, is set on the sensor base 14 in a position that gives the light receiving optical axis Or adjusted to an attitude angle θ along the light transmitting optical axis Op.

[0068] In the first fixing step of S30, with respect to the light receiving unit 41 while maintaining the light receiving optical axis Or at the adjusted attitude angle θ of S20, each first shim 15 is screwed between the first base surface 141 and the first contact surface 451 using individual first fixing screws 17. At this time, the screwing is performed sequentially, starting with the thinnest first shim 15.

[0069] In the second fixing step of S40, with respect to the light receiving unit 41, which maintains the light receiving optical axis Or at the adjusted attitude angle θ even after the first fixing step of S30, each second shim 16 is screwed between the second base surface 142 and the second contact surface 452 using individual second fixing screws 18. At this time, the screws are fastened to each other starting with the second shim 16 with the thinnest thickness. As a result, the light receiving unit 41 is fixed to the sensor base 14.

[0070] The third fixing step, S50 (Figure 15 shows an example of parallel operation), which occurs in parallel with or before / after steps S20 to S40, involves fixing the light-emitting unit 21 to the sensor base 14 by screw fastening so that it forms a light-emitting optical axis Op along which the light-receiving optical axis Or is aligned. With the completion of steps S40 and S50, the manufacturing of the optical sensor 10 is completed.

[0071] (Effects and Benefits) The effects and benefits of the first embodiment described above will be explained below.

[0072] According to the first embodiment, each of the three first shims 15 at locations P11, P12, and P13 has an individual thickness T11, T12, and T13 corresponding to the adjustment attitude angle θ of the light-receiving optical axis Or in a three-dimensional coordinate system. With the corners 150 in contact with the first contact surface 451 of the light-receiving unit 41, the shims are screwed between the first base surface 141 and the first contact surface 451 of the sensor base 14, which are aligned with the YZ plane. As a result, the positioning state of the light-receiving unit 41 relative to the sensor base 14 around the Y axis and the Z axis can be uniquely defined as a three-point support state aligned with the adjustment attitude angle θ of the light-receiving optical axis Or.

[0073] In addition, according to the first embodiment, each of the two second shims 16 at locations P21 and P22 has an individual thickness T21 and T22 corresponding to the adjustment attitude angle θ of the light-receiving optical axis Or in the three-dimensional coordinate system, and the corner portion 160 is in contact with the second base surface 142 along the XZ plane in the sensor base 14, and is screwed between the second contact surface 452 and the second base surface 142 in the light-receiving unit 41, which are in an orthogonal positional relationship with the first contact surface 451. As a result, the positioning state of the light-receiving unit 41 around the X axis relative to the sensor base 14 can be defined not only to match the adjustment attitude angle θ of the light-receiving optical axis Or, but also to a two-point support state that can suppress interference with the three-point support.

[0074] According to this first embodiment, the optical axis Or of the light receiving unit 41 can be adjusted around each of the XYZ axes in the three-dimensional coordinate system of the sensor base 14. Therefore, accuracy of optical axis adjustment can be ensured.

[0075] In the first embodiment, each first shim 15 and each second shim 16 are individually fastened by fixing screws 17 and 18 that secure the light receiving unit 41 to the sensor base 14, with the corners 170 and 180 of the screw heads in contact with the light receiving unit 41 or the sensor base 14. This allows for the precise realization of a three-point support state at points P11, P12, and P13 spaced apart along the YZ plane, and a two-point support state at points P21 and P22 spaced apart along the XZ plane, by fastening each first shim 15 and each second shim 16, each having an individual thickness corresponding to the adjustment attitude angle θ of the light receiving optical axis Or in the three-dimensional coordinate system. Therefore, it is possible to improve the reliability of the effect of ensuring optical axis adjustment accuracy.

[0076] According to the first embodiment, the adjustment attitude angle θ of the light-receiving optical axis Or in the three-dimensional coordinate system is determined by the thickness of each first shim 15 and each second shim 16, corresponding to the angle at which the light-receiving optical axis Or aligns with the light-emitting optical axis Op. This allows the light-receiving optical axis Or to be correctly adjusted along the light-emitting optical axis Op, thereby ensuring accuracy in optical axis adjustment between the light-emitting unit 21 and the light-receiving unit 41.

[0077] In the first embodiment, a virtual light projection axis Vp along the Z-axis is assumed for the light projection unit 21, and a virtual light receiving axis Vr along both the first contact surface 451 and the second contact surface 452 is assumed for the light receiving unit 41. According to the first embodiment, in a three-dimensional coordinate system, the positioning attitude angle ψ of the light receiving virtual axis Vr is matched to the relative error δp_r between the attitude angle deviation δp of the light projection optical axis Op with respect to the light projection virtual axis Vp and the attitude angle deviation δr of the light receiving optical axis Or with respect to the light receiving virtual axis Vr, with each first shim 15 and each second shim 16 having a thickness corresponding to this adjustment attitude angle. This makes it possible to geometrically adjust the attitude of the light receiving optical axis Or with respect to the light projection optical axis Op, thereby improving the accuracy of optical axis adjustment between the light projection unit 21 and the light receiving unit 41.

[0078] According to the first embodiment, after screwing the first shim 15 at three locations P11, P12, and P13 to position the light receiving unit 41 in a three-point support state relative to the sensor base 14, screwing the second shim 16 at two locations P21 and P22 to position the light receiving unit 41 in a two-point support state relative to the sensor base 14 is performed. This makes it possible to achieve a two-point support state while avoiding interference with the unambiguous three-point support state, thereby improving the accuracy of optical axis adjustment.

[0079] According to the first embodiment, the first shims 15 are screwed together in order from the thinnest first shim 15, and similarly, the second shims 16 are screwed together in order from the thinnest second shim 16. This reduces the moment acting on the light-receiving unit 41, especially when screwing together the thinnest first shim 15 and the thinnest second shim 16, thereby suppressing stress and strain generated in the light-receiving unit 41 by this moment. Therefore, it is possible to suppress variations in screw axial force caused by stress and strain and ensure accuracy of optical axis adjustment.

[0080] (Second embodiment) As shown in Figures 16-18, the second embodiment is a modification of the first embodiment.

[0081] In the second embodiment, each first shim 15 shown in Figures 17 and 18 is individually secured by screwing it between the head of a first fixing screw 17 that secures the light receiving unit 41 to the sensor base 14 and the light receiving holder 450 of the light receiving unit 41, with a metal spring washer 2017 in between. Similarly, each second shim 16 shown in Figure 16 in the second embodiment is individually secured by screwing it between the head of a second fixing screw 18 that secures the light receiving unit 41 to the sensor base 14 and the sensor base 14, with a metal spring washer 2018 in between.

[0082] In this second embodiment as well, by screwing each first shim 15 and each second shim 16, each having an individual thickness corresponding to the adjustment attitude angle θ of the light-receiving optical axis Or in a three-dimensional coordinate system, at different locations, it is possible to accurately achieve a three-point support state at locations P11, P12, and P13 spaced apart along the YZ plane, and a two-point support state at locations P21 and P22 spaced apart along the XZ plane. Therefore, it is possible to contribute to improving the reliability of the effect of ensuring optical axis adjustment accuracy. Moreover, according to the first embodiment, the attitude displacement of each unit 21, 41 caused by vehicle vibration can be suppressed by the spring washers 2017 and 2018, so it is possible to continuously ensure optical axis adjustment accuracy.

[0083] (Third embodiment) As shown in Figures 19-23, the third embodiment is a modified version of the first embodiment.

[0084] In the manufacturing method of the optical sensor 10 according to the third embodiment, the preparation step S10 is performed according to the preparation subroutine shown in Figure 19. Note that in Figures 20 to 23, which will be described later, the angles corresponding to those in the first embodiment are schematically enlarged to facilitate understanding of the explanation.

[0085] In the preparation subroutine, the first light projection measurement step S100 in the light projection sequence measures the light projection focus angle ωp formed by the light projection optical axis Op with respect to the light projection virtual axis Vp, while the light projection beam Bp is in focus. Specifically, the first light projection measurement step involves integrally mounting the light projection holder 220 to the movable base surface 3a of the movable stage 3 of the manufacturing apparatus 1 shown in Figure 20. At this time, an uncured light projection adhesive 210, such as a gel, is sandwiched between the lens barrel 261 and the light projection holder 220.

[0086] Therefore, the first projection measurement step searches in three dimensions for the projection focus angle ωp that gives a focused state at the screen position by defocusing the projection beam Bp on a screen at a set distance from the projection lens module 26, evaluating the degree of focusing, such as the image size. Here, the focused state means a state in which the linear projection beam Bp is in focus overall in the longitudinal direction within the range of the allowable circle of confusion. The measured value of the projection focus angle ωp obtained by this search may be corrected by the three-dimensional attitude angle error of the movable base surface 3a of the movable stage 3.

[0087] In the preparation subroutine, the light projection bonding step S110 in the light projection sequence cures the light projection adhesive 210 between the lens barrel 261 and the light projection holder 220, thereby bonding the light projection lens module 26 to the light projection light source module 22 via the light projection adhesive 210. At this time, the light projection adhesive 210 is cured by ultraviolet irradiation from at least the outer circumference around the light projection axis Op. In addition to this ultraviolet curing, the light projection adhesive 210 may also be heat-cured.

[0088] In the preparation subroutine, the second light projection measurement step S120 in the light projection sequence measures the light projection error angle ρp that occurs in the light projection axis Op of the light projection lens module 26, which is bonded to the light projection light source module 22 by the curing of the light projection adhesive 210, as shown in Figure 21. In the second light projection measurement step, the focus state of the light projection beam Bp is searched in three dimensions on a screen at a set distance from the light projection lens module 26, in accordance with S100, and the light projection error angle ρp of the light projection axis Op corresponding to the deviation of the focus state is measured in three dimensions. As a result of this search, the sum of the light projection focus angle ωp by S100 and the light projection error angle ρp by S120 is obtained as the three-dimensional attitude angle deviation δp (=ωp+ρp) of the light projection axis Op with respect to the virtual light projection axis Vp.

[0089] In the second light projection measurement step, the measured value of the light projection error angle ρp may be corrected by the three-dimensional attitude angle error of the movable base surface 3a on the movable stage 3. However, if the attitude of the movable base surface 3a in S100 is reproduced in S120 by a different movable stage 3 than in S100, it is preferable to correct it by the attitude angle error of the movable base surface 3a in S100 and S120, respectively.

[0090] In the preparation subroutine, the first light reception measurement step in S130, which is executed in association with the light projection sequence, measures the light reception focus angle ωr formed by the light reception optical axis Or with respect to the light reception virtual axis Vr, while the reflected beam Br is in focus. Specifically, the first light reception measurement step involves integrally mounting the light reception holder 450 to the movable base surface 3a of the movable stage 3 of the manufacturing apparatus 1 shown in Figure 22. At this time, an uncured light reception adhesive 410, such as a gel, is sandwiched between the lens barrel 421 and the light reception holder 450.

[0091] Therefore, the first light reception measurement step searches for a light reception focus angle ωr that gives a focused state at the position of the light reception surface 456 of the light reception detection module 456 by defocusing, which evaluates the degree of focusing of the reflected beam Br, such as the image size or energy. Here, the focused state means a state in which the linear reflected beam Br is in focus overall in the longitudinal direction within the range of the allowable circle of confusion. The measured value of the light reception focus angle ωr obtained by this search may be corrected by the three-dimensional attitude angle error of the movable base surface 3a of the movable stage 3.

[0092] In the preparation subroutine, the light-receiving bonding step S140 in the light-receiving sequence hardens the light-receiving adhesive 410 between the lens barrel 421 and the light-receiving holder 450, thereby bonding the light-receiving lens module 42 to the light-receiving detection module 45 via the light-receiving adhesive 410. At this time, the light-receiving adhesive 410 is hardened by ultraviolet irradiation from at least the outer circumference around the light-receiving optical axis Or. In addition to this ultraviolet curing, the light-receiving adhesive 410 may also be heat-cured.

[0093] In the preparation subroutine, the second light reception measurement step S150 in the light reception sequence measures the light reception error angle ρr that occurs in the light reception optical axis Or of the light reception lens module 42, which is bonded to the light reception detection module 45 by the curing of the light reception adhesive 410, as shown in Figure 23. In the second light reception measurement step, the focus state of the reflected beam Br is searched in three dimensions on the light reception surface 456 of the light reception detection module 45 in accordance with S120, and the light reception error angle ρr of the light reception optical axis Or corresponding to the deviation of the focus state is measured in three dimensions. As a result of this search, the sum of the light reception focus angle ωr from S130 and the light reception error angle ρr from S150 is obtained as the three-dimensional attitude angle deviation δr (=ωr+ρr) of the light reception optical axis Or with respect to the light reception virtual axis Vr.

[0094] In the second light reception measurement step, the measured value of the light reception error angle ρr may be corrected by the three-dimensional attitude angle error of the movable base surface 3a on the movable stage 3. However, if the attitude of the movable base surface 3a in S130 is reproduced in S150 by a different movable stage 3 than in S130, it is preferable to correct it by the attitude angle error of the movable base surface 3a in S130 and S150, respectively.

[0095] In the preparation subroutine, the light receiving adjustment step S160 in the light receiving sequence receives the attitude angle deviation δp of the light projection axis Op acquired in S120 of the light projection sequence and the attitude angle deviation δr of the light receiving axis Or acquired in S150 of the light receiving sequence. The light receiving adjustment step then selects an adjustment attitude angle θ such that the positioning attitude angle ψ of the light receiving virtual axis Vr in the three-dimensional coordinate system substantially matches the relative error δp_r between the respective attitude angle deviations δp and δr. Furthermore, the light receiving adjustment step determines the individual thicknesses T11, T12, T13 of each first shim 15 and the individual thicknesses T21, T22 of each second shim 16 in order to realize the selected adjustment attitude angle θ.

[0096] In the third embodiment described above, S20 to S50 following the preparation subroutine in S10 are executed in accordance with the first embodiment. As a result, in particular with respect to the light receiving unit 41, in S20 to S40, each first shim 15 and each second shim 16, with a thickness corresponding to the adjustment attitude angle θ in S160, are interposed and screwed between the first base surface 141 and the first contact surface 451 and between the second base surface 142 and the second contact surface 452, respectively.

[0097] According to this third embodiment, the positioning attitude angle ψ and the relative error δp_r can be matched, allowing the receiving optical axis Or to be geometrically adjusted with high precision relative to the light-emitting optical axis Op. This ensures accuracy in optical axis adjustment between each unit 21, 41. Furthermore, effects other than such angle matching can be achieved in the same way as in the first embodiment.

[0098] (Fourth embodiment) As shown in Figures 24-25, the fourth embodiment is a modified version of the third embodiment.

[0099] In the optical sensor 10 of the fourth embodiment shown in Figure 24, base surfaces 141 and 142 are provided for the light-emitting unit 21, and base surface 143 is provided for the light-receiving unit 41. In addition, contact surfaces 451 and 452 are provided on the light-emitting holder 220, and contact surface 221 is provided on the light-receiving holder 450.

[0100] In the optical sensor 10 of the fourth embodiment, individual first shims 15 are interposed at three locations P11, P12, and P13 between the first contact surface 451 and the first base surface 141 to position the light-emitting unit 21 relative to the sensor base 14 around the Y axis and the Z axis. The first fixing screws 17 that fasten each first shim 15 are loosely inserted into individual through holes in the light-emitting holder 220 along the direction normal to the first contact surface 451, and are fitted into the fitting holes of the first shims 15 and screwed into the female screw holes of the sensor base 14. With this screw fastening structure, each first fixing screw 17 fixes the light-emitting unit 21 to the sensor base 14 with the corner portion (i.e., outer peripheral edge) 170 of the shaft end face of each head in contact with the side of the light-emitting holder 220 opposite to the first shim 15.

[0101] In the optical sensor 10 of the fourth embodiment, individual second shims 16 are interposed at two locations P21 and P22 between the second contact surface 452 and the second base surface 142 to position the light-emitting unit 21 around the X axis relative to the sensor base 14. The second fixing screws 18 that fasten each second shim 16 are loosely inserted into individual through holes in the sensor base 14 along the direction normal to the second contact surface 452, and are fitted into the fitting holes of the second shims 16 and screwed into the female screw holes of the light-emitting holder 220. With this screw fastening structure, each second fixing screw 18 fixes the light-emitting unit 21 to the sensor base 14 with the corner portion (i.e., outer peripheral edge) 180 of the shaft-side end face of the head of each second fixing screw 18 in contact with the side of the protrusion of the sensor base 14 opposite to the second shim 16.

[0102] In the fourth embodiment, multiple fixing screws 19 are provided to screw the light receiving holder 450 to the sensor base 14, which is in surface contact with the contact surface 221 at the base surface 143. Each fixing screw 19 has its shaft loosely inserted into an individual through hole in the light receiving holder 450 along the X-axis direction and is screwed into a female screw hole in the sensor base 14. With this screw fastening structure, each light-emitting fixing screw 19 fixes the light receiving unit 41 to the sensor base 14 with its head end face in surface contact with the side of the light receiving holder 450 opposite to the sensor base 14.

[0103] In the fourth embodiment, the light projection virtual axis Vp in the light projection holder 220 is defined along both the first contact surface 451 and the second contact surface 452, while the light receiving virtual axis Vr in the light receiving holder 450 is defined along the Z-axis direction and along the contact surface 221. Under these definitions, the attitude angle deviation δp of the light projection optical axis Op with respect to the light projection virtual axis Vp in the three-dimensional coordinate system, and the attitude angle deviation δr of the light receiving optical axis Or with respect to the light receiving virtual axis Vr, are the same as in the first embodiment.

[0104] In the product state of the optical sensor 10 according to the fourth embodiment, the adjustment attitude angle θ of the light-emitting optical axis Op in the three-dimensional coordinate system is adjusted so that the light-emitting optical axis Op aligns with the light-receiving optical axis Or. As a result, the adjustment attitude angle θ of the light-emitting optical axis Op substantially coincides with the attitude angle deviation δr of the light-receiving optical axis Or with respect to the light-receiving virtual axis Vr in the three-dimensional coordinate system. Therefore, the adjustment attitude angle θ is selected so that the positioning attitude angle ψ of the light-emitting virtual axis Vp in the three-dimensional coordinate system substantially coincides with the relative error δr_p (=δr-δp) between the attitude angle deviation δr of the light-receiving optical axis Or with respect to the light-receiving virtual axis Vr and the attitude angle deviation δp of the light-emitting optical axis Op with respect to the light-emitting virtual axis Vp.

[0105] In the manufacturing method of the optical sensor 10 according to this fourth embodiment, the preparation step S10 is performed according to the preparation subroutine shown in Figure 25.

[0106] In the preparation subroutine of the fourth embodiment, the light receiving sequence omits the light receiving adjustment step S160 in the third embodiment, and instead, the light projection adjustment step S4160 following S120 is executed in the light projection sequence. Specifically, the light projection adjustment step receives the attitude angle deviation δr of the light receiving optical axis Or acquired in S150 of the light receiving sequence and the attitude angle deviation δp of the light projection optical axis Op acquired in S120 of the light projection sequence. The light projection adjustment step then selects an adjustment attitude angle θ such that the positioning attitude angle ψ of the light projection virtual axis Vp in the three-dimensional coordinate system substantially matches the relative error δr_p between the respective attitude angle deviations δr and δp. Furthermore, the light projection adjustment step determines the individual thicknesses T11, T12, T13 of each first shim 15 and the individual thicknesses T21, T22 of each second shim 16 so as to realize the selected adjustment attitude angle θ.

[0107] In the fourth embodiment described above, steps S20 to S50 following the preparation subroutine in S10 are executed in accordance with the first embodiment. However, in steps S20 to S40, which relate to the light-emitting unit 21, each first shim 15 and each second shim 16, with a thickness corresponding to the adjustment attitude angle θ in S4160, are interposed and screwed between the first base surface 141 and the first contact surface 451 and between the second base surface 142 and the second contact surface 452, respectively. This fixes the light-emitting unit 21 to the sensor base 14. On the other hand, in step S50, which relates to the light-receiving unit 41, the unit 41 is fixed to the sensor base 14 by screwing so that it forms a light-receiving optical axis Or along which the light-emitting optical axis Op is aligned.

[0108] According to this fourth embodiment, the positioning attitude angle ψ and the relative error δr_p can be matched, allowing the projection optical axis Op to be geometrically adjusted with high precision relative to the receiving optical axis Or, thereby ensuring accuracy in optical axis adjustment between each unit 21, 41. Furthermore, in addition to such angle matching, the effects of swapping "projection" and "reception" in accordance with the first embodiment can also be achieved.

[0109] (Fifth embodiment) As shown in Figures 26-27, the fifth embodiment is a modified example that combines the third and fourth embodiments and further modifies them.

[0110] In the optical sensor 10 of the fifth embodiment shown in Figure 26, base surfaces 141 and 142 are provided for the light receiving unit 41 and the light transmitting unit 21, respectively. At the same time, contact surfaces 451 and 452 are provided for the light receiving holder 450 and the light transmitting holder 220, respectively.

[0111] In the optical sensor 10 of the fifth embodiment, individual first shims 15 are interposed at three locations P11, P12, and P13 between the first contact surface 451 of the light receiving holder 450 and the first base surface 141 for the light receiving unit 41, in order to position the light receiving unit 41 relative to the sensor base 14 around the Y axis and the Z axis. At the same time, individual first shims 15 are interposed at three locations P11, P12, and P13 between the first contact surface 451 of the light emitting holder 220 and the first base surface 141 for the light emitting unit 21, in order to position the light emitting unit 21 relative to the sensor base 14 around the Y axis and the Z axis.

[0112] In the optical sensor 10 of the fifth embodiment, separate second shims 16 are interposed at two locations P21 and P22 between the second contact surface 452 of the light receiving holder 450 and the second base surface 142 for the light receiving unit 41, in order to position the light receiving unit 41 around the X axis relative to the sensor base 14. At the same time, separate second shims 16 are interposed at two locations P21 and P22 between the second contact surface 452 of the light emitting holder 220 and the second base surface 142 for the light emitting unit 21, in order to position the light emitting unit 21 around the X axis relative to the sensor base 14.

[0113] In the fifth embodiment, the light-receiving virtual axis Vr in the light-receiving holder 450 is defined along both the first contact surface 451 and the second contact surface 452 of the holder 450. Similarly, the light-emitting virtual axis Vp in the light-emitting holder 220 is defined along both the first contact surface 451 and the second contact surface 452 of the holder 220. Under these definitions, the attitude angular deviation δp of the light-emitting optical axis Op with respect to the light-emitting virtual axis Vp in the three-dimensional coordinate system, and the attitude angular deviation δr of the light-receiving optical axis Or with respect to the light-receiving virtual axis Vr, are the same as in the first embodiment.

[0114] In the product state of the optical sensor 10 according to the fifth embodiment, the adjustment attitude angle θ of the light-receiving optical axis Or in the three-dimensional coordinate system is adjusted to virtually zero (0 degrees), as the angle at which the light-receiving optical axis Or aligns with the light-emitting optical axis Op. For this reason, the adjustment attitude angle θ of the light-receiving optical axis Or is selected so as to substantially match the positioning attitude angle ψ of the light-receiving virtual axis Vr in the three-dimensional coordinate system with the attitude angle deviation δr of the light-receiving optical axis Or with respect to the light-receiving virtual axis Vr. On the other hand, in the product state of the optical sensor 10 according to the fifth embodiment, the adjustment attitude angle θ of the light-emitting optical axis Op in the three-dimensional coordinate system is adjusted to virtually zero (0 degrees), as the angle at which the light-emitting optical axis Op aligns with the light-receiving optical axis Or. For this reason, the adjustment attitude angle θ of the projection optical axis Op is selected so that the positioning attitude angle ψ of the projection virtual axis Vp in the three-dimensional coordinate system substantially matches the attitude angle deviation δp of the projection optical axis Op with respect to the projection virtual axis Vp.

[0115] In the manufacturing method of the optical sensor 10 according to this fifth embodiment, the preparation step S10 is performed according to the preparation subroutine shown in Figure 27.

[0116] In the fifth embodiment's preparation subroutine, the light receiving sequence performs the light receiving adjustment step S5160 instead of S160 in the third embodiment. Specifically, the light receiving adjustment step receives the attitude angle deviation δr of the light receiving optical axis Or acquired in S150 of the light receiving sequence. The light receiving adjustment step then selects an adjustment attitude angle θ to be virtually zero (0 degrees) so that the positioning attitude angle ψ of the light receiving virtual axis Vr in the three-dimensional coordinate system substantially matches the attitude angle deviation δr of the light receiving optical axis Or. Furthermore, the light receiving adjustment step determines the individual thicknesses T11, T12, T13 of each first shim 15 and the individual thicknesses T21, T22 of each second shim 16 for the light receiving unit 41 in order to realize the selected adjustment attitude angle θ.

[0117] In the fifth embodiment, the light projection sequence performs the light projection adjustment step S5170 instead of S4160 in the fourth embodiment. Specifically, the light projection adjustment step receives the attitude angle deviation δp of the light projection axis Op, which was acquired in S120 of the light projection sequence. The light projection adjustment step then selects an adjustment attitude angle θ to be virtually zero (0 degrees) so that the positioning attitude angle ψ of the virtual light projection axis Vp in the three-dimensional coordinate system substantially matches the attitude angle deviation δp of the light projection axis Op. Furthermore, the light receiving adjustment step determines the individual thicknesses T11, T12, T13 of each first shim 15 and the individual thicknesses T21, T22 of each second shim 16 for the light projection unit 21 so as to realize the selected adjustment attitude angle θ.

[0118] In the fifth embodiment described above, S20 to S50 following the preparation subroutine in S10 are executed in accordance with the first embodiment. However, in S20 to S40 with respect to the light receiving unit 41, each first shim 15 and each second shim 16, with a thickness corresponding to the adjustment attitude angle θ by S5160, are interposed and screwed between the first base surface 141 and the first contact surface 451 and between the second base surface 142 and the second contact surface 452, respectively. At the same time, in S20 to S40 with respect to the light transmitting unit 21, each first shim 15 and each second shim 16, with a thickness corresponding to the adjustment attitude angle θ by S5170, are interposed and screwed between the first base surface 141 and the first contact surface 451 and between the second base surface 142 and the second contact surface 452, respectively. Note that the execution of S50 is omitted in this fifth embodiment.

[0119] According to this fifth embodiment, the light-emitting optical axis Op and the light-receiving optical axis Or can be geometrically adjusted with high precision from the matching of each positioning attitude angle ψ with the attitude angle deviation δp or δr, thereby ensuring the accuracy of optical axis adjustment between each unit 21, 41. Furthermore, in addition to such angle matching, the effects of the first embodiment and the effects obtained by swapping "light emission" and "light reception" in accordance with the first embodiment can also be achieved.

[0120] (Other embodiments) Although several embodiments have been described above, this disclosure is not intended to be limited to those embodiments, and can be applied to various embodiments and combinations without departing from the spirit of this disclosure.

[0121] As shown in Figures 28-31, in the modified examples, each first shim 15 may have its corner portion 150 on the opposite side of the first contact surface 451, with which it makes surface contact, in contact with the first base surface 141. In the modified examples of Figures 28 and 29, each first fixing screw 17 may have its corner portion 170 on the shaft-side end face of its head in contact with the sensor base 14 on the opposite side of the first shim 15. Furthermore, in the modified examples of Figures 30 and 31, the spring washer 2017 used in accordance with the second embodiment may be sandwiched between the head of the first fixing screw 17 and the sensor base 14.

[0122] As shown in Figures 32 and 33, in the modified example, each second shim 16 may have its corner portion 160 on the opposite side of the second base surface 142, with which it makes surface contact, in contact with the second contact surface 452. In the modified example shown in Figures 32 and 33, each second fixing screw 18 may have its corner portion 180 on the shaft-side end face of its head in contact with the side of the light receiving holder 450 opposite to the second shim 16. Furthermore, in the modified example shown in Figure 33, the spring washer 2018 used in accordance with the second embodiment may be sandwiched between the head of the second fixing screw 18 and the light receiving holder 450 of the light receiving unit 41.

[0123] The spring washers 2017 and 2018 in the second embodiment or in each of the above-described modifications may also be applied to the third to fifth embodiments. Here, an example of applying the spring washers 2017 and 2018 to the fourth embodiment is shown in Figure 34, and an example of applying the spring washers 2017 and 2018 to the fifth embodiment is shown in Figure 35.

[0124] In the modified example, the execution order of S30 and S40 may be reversed. In S30 of the modified example, screw fastening may be performed on each first shim 15 in order from the first shim 15 with the greater thickness. In S40 of the modified example, screw fastening may be performed on each second shim 16 in order from the second shim 16 with the greater thickness.

[0125] In a modified example, the attitude of units 21 and / or 41 may be adjusted using attitude adjustment members such as spring screws instead of shims 15 and 16. In this case as well, the attitude adjustment methods described in the third to fifth embodiments are still effective.

[0126] In the modified version, the Y-axis direction along the horizontal direction and the X-axis direction along the vertical direction may be defined. In the modified version, the moving object to which the optical sensor 10 is applied may be, for example, a mobile robot whose movement can be remotely controlled. In the modified version, the object to which the optical sensor 10 is applied may be something other than a moving object, for example, a stationary structure.

[0127] (Additional note) This specification discloses several technical concepts and several combinations thereof, as listed below.

[0128] (Technical thought 1) An optical sensor (10) detects the outside world by projecting a light beam (Bp) toward the outside world and receiving a reflected beam (Br) reflected from the outside world toward the light beam, wherein a three-dimensional coordinate system is defined by the X axis, Y axis, and Z axis. A sensor base (14) that forms a first base surface (141) along the YZ plane of the three-dimensional coordinate system and a second base surface (142) along the XZ plane of the three-dimensional coordinate system, A light receiving unit (41) fixed to the sensor base and receiving the reflected beam along the light receiving optical axis (Or) whose orientation in the three-dimensional coordinate system is adjusted, Three first shims (15) (P11, P12, P13) position the light receiving unit around the Y axis and the Z axis relative to the sensor base, The sensor base is equipped with two second shims (16) at two locations (P21, P22) that position the light receiving unit around the X axis, Each of the first shims has a different thickness corresponding to the adjustment orientation angle (θ) of the light-receiving optical axis in the three-dimensional coordinate system, and its corner portion (150) is in contact with one of the first contact surface (451) of the light-receiving unit and the first base surface, and is screwed between the first base surface and the first contact surface. Each of the second shims has a different thickness corresponding to the adjustment orientation angle of the light-receiving optical axis in the three-dimensional coordinate system, and its corner portion (160) is in contact with one of the second contact surface (452), which is orthogonal to the first contact surface in the light-receiving unit, or the second base surface, and is screwed between the second base surface and the second contact surface to form an optical sensor.

[0129] (Technical thought 2) The optical sensor according to technical concept 1, wherein each of the first shims and each of the second shims are individually fastened by the respective fixing screws (17, 18) that fix the light receiving unit to the sensor base, with the corners (170, 180) of the heads of the fixing screws in contact with the light receiving unit or the sensor base.

[0130] (Technical Thought 3) Each of the first shims and each of the second shims are individually screwed together with the heads of fixing screws (17, 18) that secure the light receiving unit to the sensor base, with spring washers (2017, 2018) in between, and the light receiving unit or the sensor base, as described in Technical Concept 1.

[0131] (Technical Thought 4) The sensor base is fixed to the light projection unit (21) which guides the light projection beam along the light projection axis (Op), An optical sensor according to any one of the technical concepts 1 to 3, wherein each of the first shims and each of the second shims has a thickness corresponding to the adjustment orientation angle in which the light-receiving optical axis is aligned with the light-emitting optical axis.

[0132] (Technical Thought 5) Assuming that the light-emitting unit has a virtual light-emitting axis (Vp) along the Z-axis, and the light-receiving unit has a virtual light-receiving axis (Vr) along both the first contact surface and the second contact surface, An optical sensor according to the technical concept 4, wherein each of the first shims and each of the second shims has a thickness corresponding to the adjustment attitude angle that matches the positioning attitude angle (ψ) of the light-receiving virtual axis to the relative error (δp_r) between the attitude angle deviation (δp) of the light-emitting optical axis with respect to the light-emitting virtual axis and the attitude angle deviation (δr) of the light-receiving optical axis with respect to the light-receiving virtual axis.

[0133] (Technical Thought 6) Assuming that the light-receiving unit has a virtual light-receiving axis (Vr) that extends along both the first contact surface and the second contact surface, An optical sensor according to any one of the technical concepts 1 to 4, wherein each of the first shims and each of the second shims has a thickness corresponding to the adjustment attitude angle that matches the positioning attitude angle (ψ) of the light-receiving virtual axis to the attitude angle deviation (δr) of the light-receiving optical axis with respect to the light-receiving virtual axis in the three-dimensional coordinate system.

[0134] (Technical Thought 7) An optical sensor (10) detects the outside world by projecting a light beam (Bp) toward the outside world and receiving a reflected beam (Br) reflected from the outside world toward the light beam, wherein a three-dimensional coordinate system is defined by the X axis, Y axis, and Z axis. A sensor base (14) that forms a first base surface (141) along the YZ plane of the three-dimensional coordinate system and a second base surface (142) along the XZ plane of the three-dimensional coordinate system, A light projection unit (21) is fixed to the sensor base and guides the light projection beam along the light projection axis (Op), Three first shims (15) (P11, P12, P13) position the light projection unit around the Y axis and the Z axis relative to the sensor base, The sensor base is equipped with two second shims (16) at locations (P21, P22) that position the light-emitting unit around the X-axis, Each of the first shims has a different thickness corresponding to the adjustment orientation angle (θ) of the light projection axis in the three-dimensional coordinate system, and its corner portion (150) is in contact with one of the first contact surface (451) and the first base surface of the light projection unit, and is screwed between the first base surface and the first contact surface. Each of the second shims has an individual thickness corresponding to the adjustment orientation angle of the light projection axis in the three-dimensional coordinate system, and its corner portion (160) is in contact with one of the second contact surface (452), which is orthogonal to the first contact surface in the light projection unit, or the second base surface, and is screwed between the second base surface and the second contact surface to form an optical sensor.

[0135] (Technical Thought 8) The optical sensor according to technical concept 7, wherein each of the first shims and each of the second shims are individually fastened by the respective fixing screws (17, 18) that fix the light-emitting unit to the sensor base, with the corners (170, 180) of the heads of the fixing screws in contact with the light-emitting unit or the sensor base.

[0136] (Technical Thought 9) Each of the first shims and each of the second shims are individually screwed together with the heads of fixing screws (17, 18) that secure the light-emitting unit to the sensor base, with spring washers (2017, 2018) in between, and the light-emitting unit or the sensor base, as described in technical concept 7.

[0137] (Technical Thought 10) The sensor base is fixed to the light receiving unit (41) which receives the reflected beam along the light receiving optical axis (Or) whose orientation in the three-dimensional coordinate system is adjusted, An optical sensor according to any one of the technical concepts 7 to 9, wherein each of the first shims and each of the second shims has a thickness corresponding to the adjustment orientation angle in which the light-emitting optical axis is aligned with the light-receiving optical axis.

[0138] (Technical Thought 11) Assuming that the light-emitting unit has a virtual light-emitting axis (Vp) along both the first and second contact surfaces, and that the light-receiving unit has a virtual light-receiving axis (Vr) along the Z-axis, An optical sensor according to the technical concept 10, wherein each of the first shims and each of the second shims has a thickness corresponding to the adjustment attitude angle that matches the positioning attitude angle (ψ) of the light-emitting virtual axis to the attitude angle deviation (δr) of the light-receiving optical axis with respect to the light-receiving virtual axis and the attitude angle deviation (δp) of the light-emitting optical axis with respect to the light-emitting virtual axis.

[0139] (Technical Thought 12) Assuming that the light projection unit has a virtual light projection axis (Vp) along both the first contact surface and the second contact surface, An optical sensor according to any one of the technical concepts 7 to 10, wherein each of the first shims and each of the second shims has a thickness corresponding to the adjustment attitude angle that matches the positioning attitude angle (ψ) of the projection virtual axis to the attitude angle deviation (δp) of the projection optical axis with respect to the projection virtual axis in the three-dimensional coordinate system.

[0140] (Technical Thought 13) A manufacturing method for an optical sensor (10) described in any one of the technical ideas 1 to 12, Each of the first shims and each of the second shims, with a thickness corresponding to the adjustment attitude angle in the three-dimensional coordinate system, is interposed between the first base surface and the first contact surface and between the second base surface and the second contact surface, respectively. A manufacturing method comprising screwing each of the first shims between the first base surface and the first contact surface, and then screwing each of the second shims between the second base surface and the second contact surface.

[0141] (Technical Thought 14) Each of the first shims is screwed between the first base surface and the first contact surface, Each of the first shims is screwed together in order from the thinnest to the thickest, including the following: Each of the second shims is screwed between the second base surface and the second contact surface, A manufacturing method according to technical idea 13, which includes fastening each of the second shims to each other with screws in order from the thinnest second shim.

[0142] (Technical Thought 15) A manufacturing method for manufacturing an optical sensor (10) as described in Technical Idea 5, The focusing angle (ωp) of the light projection beam with respect to the virtual light projection axis is measured when the light projection beam is in focus. In the aforementioned light-emitting unit, a light-emitting lens module (26) that guides the light-emitting beam emitted from the light-emitting light source module (22) toward the outside along the light-emitting optical axis is bonded to the light-emitting light source module via a light-emitting adhesive (210), The projection error angle (ρp) generated in the three-dimensional coordinate system is measured in the projection optical axis of the projection lens module, which is bonded to the projection light source module by the curing of the projection adhesive. The focusing angle (ωr) of the light-receiving optical axis with respect to the light-receiving virtual axis is measured in the focused state of the reflected beam, In the light receiving unit, a light receiving lens module (42) is attached to the light receiving detection module (45) via a light receiving adhesive (410) in order to receive the reflected beam from the outside and detect the outside, and to guide the reflected beam along the light receiving optical axis to the light receiving detection module in order to detect the outside. The light-receiving error angle (ρr) generated in the three-dimensional coordinate system is measured at the light-receiving optical axis of the light-receiving lens module, which is bonded to the light-receiving detection module by the curing of the light-receiving adhesive. The light-emitting unit is fixed to the sensor base, A manufacturing method comprising: defining the sum of the light projection focus angle and the light projection error angle as the attitude angle deviation (δp) of the light projection optical axis with respect to the light projection virtual axis, and defining the sum of the light reception focus angle and the light reception error angle as the attitude angle deviation (δr) of the light receiving optical axis with respect to the light receiving virtual axis, wherein the positioning attitude angle (ψ) of the light receiving virtual axis in the three-dimensional coordinate system is matched to the relative error (δp_r) between the attitude angle deviations (δp_r) of the light projection optical axis and the light receiving optical axis, wherein each of the first shims and each of the second shims, with a thickness corresponding to the adjustment attitude angle, are interposed and screwed between the first base surface and the first contact surface and between the second base surface and the second contact surface, respectively.

[0143] (Technical Thought 16) A manufacturing method for manufacturing an optical sensor (10) as described in Technical Idea 6, The focusing angle (ωr) of the light-receiving optical axis with respect to the light-receiving virtual axis is measured in the focused state of the reflected beam, In the light receiving unit, a light receiving lens module (42) is attached to the light receiving detection module (45) via a light receiving adhesive (410) in order to receive the reflected beam from the outside and detect the outside, and to guide the reflected beam along the light receiving optical axis to the light receiving detection module in order to detect the outside. The light-receiving error angle (ρr) generated in the three-dimensional coordinate system is measured at the light-receiving optical axis of the light-receiving lens module, which is bonded to the light-receiving detection module by the curing of the light-receiving adhesive. A manufacturing method comprising the following steps: defining the sum of the light-receiving focus angle and the light-receiving error angle as the attitude angle deviation (δr) of the light-receiving optical axis with respect to the light-receiving virtual axis; and interposing and screwing together each of the first shims and each of the second shims, with a thickness corresponding to the adjustment attitude angle, between the first base surface and the first contact surface and between the second base surface and the second contact surface, respectively, so that the positioning attitude angle (ψ) of the light-receiving virtual axis in the three-dimensional coordinate system matches the attitude angle deviation of the light-receiving optical axis.

[0144] (Technical Thought 17) A manufacturing method for an optical sensor (10) as described in Technical Idea 11, The focusing angle (ωp) of the light projection beam with respect to the virtual light projection axis is measured when the light projection beam is in focus. In the aforementioned light-emitting unit, a light-emitting lens module (26) that guides the light-emitting beam emitted from the light-emitting light source module (22) toward the outside along the light-emitting optical axis is bonded to the light-emitting light source module via a light-emitting adhesive (210), The projection error angle (ρp) generated in the three-dimensional coordinate system is measured in the projection optical axis of the projection lens module, which is bonded to the projection light source module by the curing of the projection adhesive. The focusing angle (ωr) of the light-receiving optical axis with respect to the light-receiving virtual axis is measured in the focused state of the reflected beam, In the light receiving unit, a light receiving lens module (42) is attached to the light receiving detection module (45) via a light receiving adhesive (410) in order to receive the reflected beam from the outside and detect the outside, and to guide the reflected beam along the light receiving optical axis to the light receiving detection module in order to detect the outside. The light-receiving error angle (ρr) generated in the three-dimensional coordinate system is measured at the light-receiving optical axis of the light-receiving lens module, which is bonded to the light-receiving detection module by the curing of the light-receiving adhesive. The light receiving unit is fixed to the sensor base, A manufacturing method comprising: defining the sum of the projection focus angle and the projection error angle as the attitude angle deviation (δp) of the projection optical axis with respect to the projection virtual axis, and defining the sum of the receiving focus angle and the receiving error angle as the attitude angle deviation (δr) of the receiving optical axis with respect to the receiving virtual axis, and then interposing and screwing together each of the first shims and each of the second shims, each with a thickness corresponding to the adjustment attitude angle, between the first base surface and the first contact surface and between the second base surface and the second contact surface, respectively, so that the positioning attitude angle (ψ) of the projection virtual axis in the three-dimensional coordinate system matches the relative error (δr_p) between the attitude angle deviations of the receiving optical axis and the projection optical axis.

[0145] (Technical Thought 18) A manufacturing method for an optical sensor (10) as described in Technical Idea 12, The focusing angle (ωp) of the light projection beam with respect to the virtual light projection axis is measured when the light projection beam is in focus. In the aforementioned light-emitting unit, a light-emitting lens module (26) that guides the light-emitting beam emitted from the light-emitting light source module (22) toward the outside along the light-emitting optical axis is bonded to the light-emitting light source module via a light-emitting adhesive (210), The projection error angle (ρp) generated in the three-dimensional coordinate system is measured in the projection optical axis of the projection lens module, which is bonded to the projection light source module by the curing of the projection adhesive. A manufacturing method comprising the following steps: defining the sum of the projection focus angle and the projection error angle as the attitude angle deviation (δp) of the projection optical axis with respect to the projection virtual axis; and interposing and screwing together each of the first shims and each of the second shims, each with a thickness corresponding to the adjustment attitude angle, between the first base surface and the first contact surface and between the second base surface and the second contact surface, respectively, so that the positioning attitude angle (ψ) of the projection virtual axis in the three-dimensional coordinate system matches the attitude angle deviation of the projection optical axis. [Explanation of Symbols]

[0146] 10: Optical sensor, 14: Sensor base, 15: First shim, 16: Second shim, 17: First fixing screw, 18: Second fixing screw, 21: Light projection unit, 22: Light projection light source module, 26: Light projection lens module, 41: Light receiving unit, 42: Light receiving lens module, 45: Light receiving detection module, 141: First base surface, 142: Second base surface, 150, 160, 170, 180: Corners, 210: Light projection adhesive, 410: Light receiving adhesive, 451: First contact surface, 452: Second contact surface, 2017, 2018: Spring washer, Bp: Projection beam, Br: Reflection beam, Op: Projection optical axis, Or: Receiver optical axis, Vr: Receiver virtual axis, Vp: Projection virtual axis, δp, δr: Attitude angle deviation, δp_r, δr_p: Relative error, θ: Adjustment attitude angle, ρp: Projection error angle, ρr: Receiver error angle, ψ: Positioning attitude angle, ωp: Projection focus angle, ωr: Receiver focus angle

Claims

1. An optical sensor (10) detects the outside world by projecting a light beam (Bp) toward the outside world and receiving a reflected beam (Br) reflected from the outside world toward the light beam, wherein a three-dimensional coordinate system is defined by the X axis, Y axis, and Z axis. A sensor base (14) that forms a first base surface (141) along the YZ plane of the three-dimensional coordinate system, and a second base surface (142) along the XZ plane of the three-dimensional coordinate system, A light receiving unit (41) fixed to the sensor base and receiving the reflected beam along the light receiving optical axis (Or) whose orientation in the three-dimensional coordinate system is adjusted, Three first shims (15) (P11, P12, P13) position the light receiving unit around the Y axis and the Z axis relative to the sensor base, The sensor base is equipped with two second shims (16) at locations (P21, P22) that position the light receiving unit around the X-axis, Each of the first shims has a unique thickness corresponding to the adjustment attitude angle (θ), which is the attitude angle of the light-receiving optical axis adjusted in the three-dimensional coordinate system. The corner portion (150) is in contact with either the first contact surface (451) of the light-receiving unit or the first base surface, and is screwed between the first base surface and the first contact surface. Each of the second shims has a different thickness corresponding to the adjustment orientation angle of the light-receiving optical axis in the three-dimensional coordinate system, and its corner portion (160) is in contact with one of the second contact surface (452), which is orthogonal to the first contact surface in the light-receiving unit, or the second base surface, and is screwed between the second base surface and the second contact surface to form an optical sensor.

2. The optical sensor according to claim 1, wherein each of the first shims and each of the second shims are individually fastened by the respective fixing screws (17, 18) that fix the light receiving unit to the sensor base, with the corners (170, 180) of the heads of the fixing screws in contact with the light receiving unit or the sensor base.

3. The optical sensor according to claim 1, wherein each of the first shims and each of the second shims are individually screwed together with a spring washer (2017, 2018) sandwiched between the head of a fixing screw (17, 18) that fixes the light receiving unit to the sensor base and the light receiving unit or the sensor base.

4. The sensor base is fixed to the light projection unit (21) which guides the light projection beam along the light projection axis (Op), The optical sensor according to claim 1, wherein each of the first shims and each of the second shims has a thickness corresponding to the adjustment orientation angle in which the light-receiving optical axis is aligned with the light-emitting optical axis.

5. Assuming that the light-emitting unit has a virtual light-emitting axis (Vp) along the Z-axis, and the light-receiving unit has a virtual light-receiving axis (Vr) along both the first contact surface and the second contact surface, The optical sensor according to claim 4, wherein each of the first shims and each of the second shims has a thickness corresponding to the adjustment attitude angle that matches the positioning attitude angle (ψ), which is the attitude angle of the light-receiving virtual axis assumed to be the light-receiving unit in a positioning state in the three-dimensional coordinate system, to the relative error (δp_r) between the attitude angle deviation (δp) of the light-emitting optical axis with respect to the light-emitting virtual axis and the attitude angle deviation (δr) of the light-receiving optical axis with respect to the light-receiving virtual axis.

6. Assuming that the light-receiving unit has a virtual light-receiving axis (Vr) that extends along both the first contact surface and the second contact surface, The optical sensor according to claim 1, wherein each of the first shims and each of the second shims has a thickness corresponding to the adjustment attitude angle that matches the positioning attitude angle (ψ), which is the attitude angle of the virtual light receiving axis assumed to be the light receiving unit in a positioning state in the three-dimensional coordinate system, to the attitude angle deviation (δr) of the light receiving optical axis with respect to the virtual light receiving axis.

7. An optical sensor (10) detects the outside world by projecting a light beam (Bp) toward the outside world and receiving a reflected beam (Br) reflected from the outside world toward the light beam, wherein a three-dimensional coordinate system is defined by the X axis, Y axis, and Z axis. A sensor base (14) that forms a first base surface (141) along the YZ plane of the three-dimensional coordinate system, and a second base surface (142) along the XZ plane of the three-dimensional coordinate system, A light projection unit (21) is fixed to the sensor base and guides the light projection beam along the light projection axis (Op), Three first shims (15) (P11, P12, P13) position the light-emitting unit around the Y-axis and the Z-axis relative to the sensor base, The sensor base is equipped with two second shims (16) at two locations (P21, P22) that position the light-emitting unit around the X-axis, Each of the first shims has a different thickness corresponding to the adjustment attitude angle (θ), which is the attitude angle of the light projection axis adjusted in the three-dimensional coordinate system, and its corner portion (150) is in contact with one of the first contact surface (451) and the first base surface of the light projection unit, and is screwed between the first base surface and the first contact surface. Each of the second shims has a different thickness corresponding to the adjustment orientation angle of the light projection axis in the three-dimensional coordinate system, and its corner portion (160) is in contact with one of the second contact surface (452), which is orthogonal to the first contact surface in the light projection unit, or the second base surface, and is screwed between the second base surface and the second contact surface to form an optical sensor.

8. The optical sensor according to claim 7, wherein each of the first shims and each of the second shims are individually fastened by the respective fixing screws (17, 18) that fix the light-emitting unit to the sensor base, with the corners (170, 180) of the heads of the fixing screws in contact with the light-emitting unit or the sensor base.

9. The optical sensor according to claim 7, wherein each of the first shims and each of the second shims are individually screwed together with a spring washer (2017, 2018) sandwiched between the head of a fixing screw (17, 18) that fixes the light-emitting unit to the sensor base and the light-emitting unit or the sensor base.

10. The sensor base is fixed to the light receiving unit (41) which receives the reflected beam along the light receiving optical axis (Or) whose orientation in the three-dimensional coordinate system is adjusted, The optical sensor according to claim 7, wherein each of the first shims and each of the second shims has a thickness corresponding to the adjustment orientation angle in which the light-emitting optical axis is aligned with the light-receiving optical axis.

11. Assuming that the light-emitting unit has a virtual light-emitting axis (Vp) along both the first and second contact surfaces, and that the light-receiving unit has a virtual light-receiving axis (Vr) along the Z-axis, The optical sensor according to claim 10, wherein each of the first shims and each of the second shims has a thickness corresponding to the adjustment attitude angle that matches the positioning attitude angle (ψ), which is the attitude angle of the virtual light projection axis assumed to be the positioning state of the light projection unit in the three-dimensional coordinate system, to the relative error (δr_p) between the attitude angle deviation (δr) of the light receiving optical axis with respect to the light receiving virtual axis and the attitude angle deviation (δp) of the light projection optical axis with respect to the light projection virtual axis.

12. Assuming that the light projection unit has a virtual light projection axis (Vp) along both the first contact surface and the second contact surface, The optical sensor according to claim 7, wherein each of the first shims and each of the second shims has a thickness corresponding to the adjustment attitude angle that matches the positioning attitude angle (ψ), which is the attitude angle of the virtual light projection axis assumed to be the positioning state of the light projection unit in the three-dimensional coordinate system, with the attitude angle deviation (δp) of the light projection optical axis with respect to the virtual light projection axis.

13. A manufacturing method for an optical sensor (10) according to any one of claims 1 to 12, Each of the first shims and each of the second shims, with a thickness corresponding to the adjustment attitude angle in the three-dimensional coordinate system, is interposed between the first base surface and the first contact surface and between the second base surface and the second contact surface, respectively. A manufacturing method comprising screwing each of the first shims between the first base surface and the first contact surface, and then screwing each of the second shims between the second base surface and the second contact surface.

14. Each of the first shims is screwed between the first base surface and the first contact surface, Each of the first shims is screwed together in order from the thinnest to the thickest, including the following: Each of the second shims is screwed between the second base surface and the second contact surface, The manufacturing method according to claim 13, further comprising fastening each of the second shims to each other with screws, starting with the thinnest second shim.

15. A manufacturing method for producing the optical sensor (10) described in claim 5, The focusing angle (ωp) of the light projection beam with respect to the virtual light projection axis is measured when the light projection beam is in focus. In the aforementioned light-emitting unit, a light-emitting lens module (26) that guides the light-emitting beam emitted from the light-emitting light source module (22) toward the outside along the light-emitting optical axis is bonded to the light-emitting light source module via a light-emitting adhesive (210), The projection error angle (ρp) generated in the three-dimensional coordinate system is measured in the projection optical axis of the projection lens module, which is bonded to the projection light source module by the curing of the projection adhesive. The angle of focus (ωr) between the light-receiving optical axis and the light-receiving virtual axis is measured in the focused state of the reflected beam. In the light receiving unit, a light receiving lens module (42) is attached to the light receiving detection module (45) via a light receiving adhesive (410) in order to receive the reflected beam from the outside and detect the outside, and to guide the reflected beam along the light receiving optical axis to the light receiving detection module in order to detect the outside. The light-receiving error angle (ρr) generated in the three-dimensional coordinate system is measured at the light-receiving optical axis of the light-receiving lens module, which is bonded to the light-receiving detection module by the curing of the light-receiving adhesive. The light-emitting unit is fixed to the sensor base, A manufacturing method comprising: defining the sum of the light projection focus angle and the light projection error angle as the attitude angle deviation (δp) of the light projection optical axis with respect to the light projection virtual axis, and defining the sum of the light reception focus angle and the light reception error angle as the attitude angle deviation (δr) of the light receiving optical axis with respect to the light receiving virtual axis, wherein the positioning attitude angle of the light receiving virtual axis in the three-dimensional coordinate system is matched to the relative error (δp_r) between the attitude angle deviations of the light projection optical axis and the light receiving optical axis, by interposing and screwing together each of the first shims and each of the second shims, each with a thickness corresponding to the adjustment attitude angle, between the first base surface and the first contact surface and between the second base surface and the second contact surface, respectively.

16. A manufacturing method for producing the optical sensor (10) described in claim 6, The angle of focus (ωr) between the light-receiving optical axis and the light-receiving virtual axis is measured in the focused state of the reflected beam. In the light receiving unit, a light receiving lens module (42) is attached to the light receiving detection module (45) via a light receiving adhesive (410) in order to receive the reflected beam from the outside and detect the outside, and to guide the reflected beam along the light receiving optical axis to the light receiving detection module in order to detect the outside. The light-receiving error angle (ρr) generated in the three-dimensional coordinate system is measured at the light-receiving optical axis of the light-receiving lens module, which is bonded to the light-receiving detection module by the curing of the light-receiving adhesive. A manufacturing method comprising the following steps: defining the sum of the light-receiving focus angle and the light-receiving error angle as the attitude angle deviation (δr) of the light-receiving optical axis with respect to the light-receiving virtual axis; and interposing and screwing together each of the first shims and each of the second shims, with a thickness corresponding to the adjustment attitude angle, between the first base surface and the first contact surface and between the second base surface and the second contact surface, respectively, so that the positioning attitude angle of the light-receiving virtual axis in the three-dimensional coordinate system matches the attitude angle deviation of the light-receiving optical axis.

17. A manufacturing method for producing the optical sensor (10) described in claim 11, The focusing angle (ωp) of the light projection beam with respect to the virtual light projection axis is measured when the light projection beam is in focus. In the aforementioned light-emitting unit, a light-emitting lens module (26) that guides the light-emitting beam emitted from the light-emitting light source module (22) toward the outside along the light-emitting optical axis is bonded to the light-emitting light source module via a light-emitting adhesive (210), The projection error angle (ρp) generated in the three-dimensional coordinate system is measured in the projection optical axis of the projection lens module, which is bonded to the projection light source module by the curing of the projection adhesive. The angle of focus (ωr) between the light-receiving optical axis and the light-receiving virtual axis is measured in the focused state of the reflected beam. In the light receiving unit, a light receiving lens module (42) is attached to the light receiving detection module (45) via a light receiving adhesive (410) in order to receive the reflected beam from the outside and detect the outside, and to guide the reflected beam along the light receiving optical axis to the light receiving detection module in order to detect the outside. The light-receiving error angle (ρr) generated in the three-dimensional coordinate system is measured at the light-receiving optical axis of the light-receiving lens module, which is bonded to the light-receiving detection module by the curing of the light-receiving adhesive. The light receiving unit is fixed to the sensor base, A manufacturing method comprising: defining the sum of the projection focus angle and the projection error angle as the attitude angle deviation (δp) of the projection optical axis with respect to the projection virtual axis, and defining the sum of the receiving focus angle and the receiving error angle as the attitude angle deviation (δr) of the receiving optical axis with respect to the receiving virtual axis, wherein the positioning attitude angle of the projection virtual axis in the three-dimensional coordinate system is matched to the relative error (δr_p) between the attitude angle deviations of the receiving optical axis and the projection optical axis, wherein each of the first shims and each of the second shims, with a thickness corresponding to the adjustment attitude angle, are interposed and screwed between the first base surface and the first contact surface and between the second base surface and the second contact surface, respectively.

18. A manufacturing method for producing the optical sensor (10) described in claim 12, The focusing angle (ωp) of the light projection beam with respect to the virtual light projection axis is measured when the light projection beam is in focus. In the aforementioned light-emitting unit, a light-emitting lens module (26) that guides the light-emitting beam emitted from the light-emitting light source module (22) toward the outside along the light-emitting optical axis is bonded to the light-emitting light source module via a light-emitting adhesive (210), The projection error angle (ρp) generated in the three-dimensional coordinate system is measured in the projection optical axis of the projection lens module, which is bonded to the projection light source module by the curing of the projection adhesive. A manufacturing method comprising the following steps: defining the sum of the projection focus angle and the projection error angle as the attitude angle deviation (δp) of the projection optical axis with respect to the projection virtual axis; and interposing and screwing together each of the first shims and each of the second shims, with a thickness corresponding to the adjustment attitude angle, between the first base surface and the first contact surface and between the second base surface and the second contact surface, respectively, so that the positioning attitude angle of the projection virtual axis in the three-dimensional coordinate system matches the attitude angle deviation of the projection optical axis.

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