Monitoring device for a pure water production system or an ultrapure water production system, and monitoring method for a pure water production system or an ultrapure water production system.

Abstract

To enable an operator to instantaneously understand which of a plurality of control values acquired from a device constituting a pure water production system or an ultrapure water production system likely reaches the preset upper limit value or lower limit value.SOLUTION: A monitoring device 84 comprises an acquiring unit for acquiring a plurality of control values at least in a device in an operational state, constituting a monitoring target pure water production system or a monitoring target ultrapure water production system, a conversion unit for converting the plurality of acquired control values so that the upper limit value and the lower limit value set for each of the control values, and respective initial values being respective first values, have the same value on a graph, and a display unit for performing superposition display of the plurality of converted control values, each in time series on the same graph.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] This disclosure relates to a monitoring device for a pure water production system or an ultrapure water production system, and a method for monitoring a pure water production system or an ultrapure water production system. [Background technology]

[0002] A pure water production system for producing pure water (including an ultrapure water production system for producing ultrapure water) can be composed of a combination of multiple units (unit devices) such as membrane devices equipped with microfiltration membranes (MF membranes), limited filtration membranes (UF membranes), reverse osmosis membranes (RO membranes), etc., ion exchange devices such as cation resin towers, anion resin towers, mixed-bed resin towers, and electrodeionizers, degassing devices such as atmospheric pressure degassing towers, vacuum degassing towers, and degassing membranes, ultraviolet irradiation devices such as ultraviolet sterilization devices and ultraviolet irradiation TOC decomposition devices, filtration devices such as sand filtration devices and activated carbon packed towers, and coagulation and sedimentation devices.

[0003] In a pure water production system, pure water is produced by passing the water to be treated through a primary pure water unit. Then, in an ultrapure water production system, the pure water produced by passing the water through the primary pure water unit is passed through a secondary pure water unit to produce ultrapure water, which has a higher purity than pure water. In the pure water production system or ultrapure water production system described above, the purity of the water to be treated can be increased compared to using a single unit by passing the raw water or other water to be treated through multiple units in sequence.

[0004] For example, Patent Document 1 discloses an ultrapure water production system comprising a pretreatment system, a primary pure water system, and a secondary pure water system in that order, with each system comprising multiple of the above-mentioned units. Also, for example, Patent Document 2 discloses a reverse osmosis membrane treatment system comprising three parallel reverse osmosis membrane units. Generally, a pretreatment system consists of 2 to 4 units, a primary pure water system consists of 6 to 10 units, and a secondary pure water system consists of 4 to 8 units. Furthermore, each unit often consists of three to five parallel units of the same configuration.

[0005] Each of the above-mentioned devices undergoes periodic maintenance. For example, membrane systems undergo membrane module replacement and cleaning, while resin systems undergo resin cleaning, backwashing, and regeneration. The maintenance intervals vary for each device. Furthermore, maintenance is performed at different times for each unit to ensure that the pure water production system or ultrapure water production system can continue to operate. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] Japanese Patent Publication No. 2015-100733 [Patent Document 2] Japanese Patent Publication No. 2018-34093 [Overview of the Initiative] [Problems that the invention aims to solve]

[0007] However, in pure water production systems or ultrapure water production systems that consist of multiple devices as described above, each of the devices that make up the system is large and located far apart. As a result, it takes time and effort for the administrator to keep track of the operating status of each device.

[0008] Furthermore, if a malfunction occurs in one of the components of a pure water production system or an ultrapure water production system, problems such as replacing the component, addressing the malfunction, and shutting down the pure water production system due to the replacement or addressing of the component may occur.

[0009] Also, even when monitoring a plurality of management values acquired from each device constituting a pure water production system or an ultrapure water production system, it is difficult to grasp whether the acquired management values are approaching values indicating a device malfunction. For example, if the number of units constituting a pure water production system or an ultrapure water production system is 12 to 22, and each is equipped with, for example, 3 to 5 series of units, the number of units whose operating state should be grasped is the number of units × the number of series. In this case, it is necessary to grasp the operating states of 36 to 110 units. Furthermore, since each unit is operated so that the maintenance times do not coincide, it is not easy to grasp the operating status of all devices and all units.

[0010] An object of the present disclosure is to provide a monitoring device for a pure water production system or an ultrapure water production system that can visually grasp which of a plurality of management values acquired from a device constituting the pure water production system or the ultrapure water production system are likely to reach a preset upper limit value or lower limit value.

Means for Solving the Problems

[0011] The monitoring device for a pure water production system or an ultrapure water production system according to the first aspect of the present disclosure includes an acquisition unit that acquires a plurality of management values in at least one operating device constituting the monitoring target pure water production system or ultrapure water production system, and converts the acquired plurality of management values so that the upper limit value and the lower limit value set for each management value and the initial value, which is the first value, become the same value on a graph. A conversion unit, and a display unit that superimposes and displays the converted plurality of management values on the same graph in time series.

[0012] According to the monitoring device for a pure water production system or an ultrapure water production system according to the first aspect of the present disclosure, a plurality of management values obtained from the devices constituting the pure water production system or the ultrapure water production system are displayed unified in chronological order on the same graph. Thereby, it becomes possible to grasp at a glance which of the plurality of management values obtained from the devices constituting the pure water production system or the ultrapure water production system is likely to reach a preset upper limit value or lower limit value.

[0013] The monitoring device for a pure water production system or an ultrapure water production system according to the second aspect of the present disclosure is, in the first aspect, the pure water production system or the ultrapure water production system is composed of a plurality of devices, and the plurality of devices include at least any two of an activated carbon tower, a prefilter, a membrane device, an electro-deionization device, or a mixed-bed ion exchange device.

[0014] According to the monitoring device for a pure water production system or an ultrapure water production system according to the second aspect of the present disclosure, since the pure water production system or the ultrapure water production system is composed of a plurality of devices, by passing the water to be treated such as raw water through the plurality of devices in order, the purity of the water to be treated can be increased as compared with the case of being composed of a single device.

[0015] The monitoring device for a pure water production system or an ultrapure water production system according to the third aspect of the present disclosure is, in the first aspect, the display unit displays a management value that tends to increase when the operating state of the device continues between the initial value and the upper limit value, and displays a management value that tends to decrease when the operating state of the device continues between the initial value and the lower limit value.

[0016] According to the monitoring device for a pure water production system or an ultrapure water production system according to the third aspect of the present disclosure, by displaying unified on the same graph a management value that tends to increase when the operating state continues and a management value that tends to decrease when the operating state continues, the user can grasp the priority order of the devices to be dealt with at a glance.

[0017] In the fourth aspect of the present disclosure, a monitoring device for a pure water production system or an ultrapure water production system, in the first aspect, the display unit displays at least two of the following on the same graph: differential pressure, removal rate, flow rate, ultraviolet irradiation amount, and hydrogen peroxide generation amount of the ultraviolet irradiation device, and when the differential pressure is displayed, it is displayed between the initial value and the upper limit, and when any of the removal rate, flow rate, ultraviolet irradiation amount, or hydrogen peroxide generation amount of the ultraviolet irradiation device is displayed, it is displayed between the initial value and the lower limit.

[0018] According to the monitoring device for a pure water production system or ultrapure water production system of the fourth aspect of this disclosure, by displaying both control values ​​that tend to rise when the operating state continues and control values ​​that tend to fall when the operating state continues on the same graph, the user can grasp the priority of the equipment that needs to be addressed at a glance.

[0019] In the monitoring device for a pure water production system or ultrapure water production system according to the fifth aspect of the present disclosure, in the first aspect, the device further includes a notification unit that, when the difference between any of the superimposed control values ​​and an upper or lower limit set for that control value falls below a preset value, the device that acquired the control value will perform backwashing or chemical regeneration, or will notify that it is time to replace the device or the consumables used in the device.

[0020] According to the monitoring device for a pure water production system or ultrapure water production system of the fifth aspect of this disclosure, it becomes possible to make it easier for the user to understand what to do in the equipment where malfunctions may occur.

[0021] In the monitoring device for a pure water production system or an ultrapure water production system according to the sixth aspect of this disclosure, in the first aspect, the display unit displays the plurality of control values ​​in different manner.

[0022] According to the monitoring device for a pure water production system or ultrapure water production system of the sixth aspect of this disclosure, it is possible to make it easy for the user to quickly identify the equipment or parts of the equipment that are likely to malfunction.

[0023] In the seventh aspect of the present disclosure, a monitoring device for a pure water production system or an ultrapure water production system further comprises, in the first aspect, a correction unit that corrects a plurality of control values ​​using the temperature in each device from which a control value has been acquired, a conversion unit that converts the plurality of control values ​​corrected by the correction unit, and a display unit that superimposes the converted plurality of control values ​​on the same graph in time series.

[0024] According to the monitoring device for a pure water production system or ultrapure water production system of the seventh aspect of this disclosure, it is possible to display multiple control values ​​in a more precise and unified manner compared to when the effects of temperature are not taken into consideration.

[0025] In the monitoring device for a pure water production system or an ultrapure water production system according to the eighth aspect of this disclosure, in the first aspect, the display unit superimposes and displays multiple converted control value prediction curves on the same graph, each in time series.

[0026] According to the monitoring device for a pure water production system or ultrapure water production system of the eighth aspect of this disclosure, it becomes possible to unify and predict multiple control values ​​for the operating status of the equipment constituting the pure water production system or ultrapure water production system on the same graph, thereby suppressing the occurrence of equipment malfunctions at an earlier stage and maintaining efficient processing.

[0027] A monitoring method for a pure water production system or ultrapure water production system in another aspect of the present disclosure includes the steps of: acquiring a plurality of control values ​​in at least one operational device constituting the pure water production system or ultrapure water production system to be monitored; converting the acquired plurality of control values ​​so that the upper limit and lower limit set for each control value and the initial value, which is the first value, become the same value on a graph; and displaying the converted plurality of control values ​​superimposed on the same graph in time series.

[0028] According to a monitoring method for a pure water production system or ultrapure water production system in another aspect of this disclosure, multiple control values ​​obtained from the equipment constituting the pure water production system or ultrapure water production system are displayed together in a time series on the same graph. This makes it possible to see at a glance which of the multiple control values ​​obtained from the equipment constituting the pure water production system or ultrapure water production system is likely to reach a preset upper or lower limit. [Effects of the Invention]

[0029] According to this disclosure, it becomes possible to instantly identify which of the multiple control values ​​obtained from the equipment constituting the pure water production system or ultrapure water production system is likely to reach a preset upper or lower limit. [Brief explanation of the drawing]

[0030] [Figure 1] This is a diagram showing a pure water production system according to one embodiment of the present disclosure. [Figure 2] This is a block diagram showing the control configuration of a monitoring device for monitoring a pure water production system according to one embodiment of the present disclosure. [Figure 3] This figure shows an example of data stored in the memory unit of a monitoring device according to one embodiment of the present disclosure. [Figure 4] This figure shows an example of plotting management values ​​obtained from multiple operating devices using a monitoring device according to one embodiment of the present disclosure on the same graph. [Figure 5]This figure shows an example of plotting control values ​​obtained from multiple operating devices after a further period of time has elapsed since the state shown in Figure 4, onto the same graph. [Figure 6] This is a diagram illustrating another embodiment of the present disclosure. [Modes for carrying out the invention]

[0031] The pure water production system 12 of this embodiment will be described below with reference to the drawings. However, this disclosure is not limited to the embodiments shown in the drawings.

[0032] As shown in Figure 1, the pure water production system 12, starting from the upstream side in the flow direction of the raw water (an example of feedwater), includes a pretreatment system consisting of a tank 14, piping 16, and an activated carbon tower 18, connected by piping 20. The primary pure water system includes a prefilter 22, piping 24, a membrane device 26, piping 28, drainage piping 29, a tank 30, piping 32, an electro-deionizer 34, piping 36, drainage piping 41, a mixed-bed ion exchange device 38, and piping 40. In other words, the pure water production system 12 is composed of multiple devices, each comprising one or more units, and multiple piping systems. This disclosure is also applicable to an ultrapure water production system that includes a secondary pure water system in the subsequent stage. Therefore, the pure water production system 12 will be described below as including an ultrapure water production system. The secondary pure water system is equipped with one or more units, such as an ultraviolet irradiation device, a degassing membrane device, a non-regenerative mixed-bed ion exchange device, and an ultrafiltration device. The ultrapure water produced after passing through the ultrafiltration device is supplied to the POU (Point of Use).

[0033] Here, the raw water can be, for example, tap water, groundwater, river water, or industrial water. Depending on the concentration of impurities in the raw water, it is also possible to send the raw water to the membrane device 26 without pretreatment by the activated carbon tower 18 and prefilter 22.

[0034] Tank 14 temporarily stores raw water.

[0035] The piping 16 connects the tank 14 and the activated carbon tower 18. A pump 44 and a pressure gauge 46 are installed on the upstream side of the piping 16.

[0036] Pump 44 sends raw water from tank 14 to activated carbon tower 18.

[0037] The pressure gauge 46 detects the pressure of the raw water (water to be treated) flowing through the pipe 16.

[0038] The activated carbon tower 18 has a structure in which particulate activated carbon is filled inside a container. This activated carbon has numerous pores, and by passing the supplied water to be treated through this activated carbon, residual chlorine, organic matter, and other foreign substances are captured in the pores of the activated carbon and removed or decomposed from the water to be treated.

[0039] The piping 20 connects the activated carbon tower 18 and the prefilter 22. A pressure gauge 48 is provided on the piping 20.

[0040] The pressure gauge 48 detects the pressure of the treated water flowing through the pipe 20.

[0041] The pre-filter 22 removes residual chlorine, free chlorine, and suspended matter such as particulate matter from the treated water after foreign matter has been removed by the activated carbon tower 18. The pre-filter 22 is located upstream of the membrane device 26 and protects the reverse osmosis membrane (RO membrane).

[0042] Piping 24 connects the pre-filter 22 and the membrane device 26. Piping 24 is equipped with a pressure gauge 50, a pump 52, a pressure gauge 54, and a conductivity meter 56 from the upstream side.

[0043] The pressure gauge 50 detects the pressure of the treated water flowing between the pre-filter 22 and the pump 52 in the piping 24. In other words, the pressure gauge 50 detects the pressure of the treated water downstream of the pre-filter 22.

[0044] Pump 52 sends the treated water that has passed through the pre-filter 22 to the membrane device 26.

[0045] The pressure gauge 54 detects the pressure of the treated water flowing through the piping 24 between the pump 52 and the membrane device 26. In other words, the pressure gauge 54 detects the pressure of the water to be treated upstream of the membrane device 26.

[0046] The conductivity meter 56 detects the conductivity of the treated water flowing through the piping 24. In other words, the conductivity meter 56 detects the conductivity of the water to be treated upstream of the membrane device 26.

[0047] The membrane device 26 has a reverse osmosis membrane, and by allowing the water to be treated to permeate through the reverse osmosis membrane, it removes impurities such as inorganic substances, organic substances, fine particles, and microorganisms from the water to be treated. This separates the water into permeate that has permeated through the reverse osmosis membrane and concentrated water that has not permeated through the reverse osmosis membrane. The permeate is temporarily stored in the tank 30 as treated water via the piping 28. In contrast, the concentrated water is drained through the drainage piping 29.

[0048] Piping 28 connects the membrane device 26 and the tank 30. A flow meter 58, a pressure gauge 60, and a conductivity meter 62 are installed on piping 28 from the upstream side.

[0049] The flow meter 58 detects the flow rate of treated water flowing through the piping 28. In other words, the flow meter 58 detects the flow rate of treated water downstream of the membrane device 26.

[0050] The pressure gauge 60 detects the pressure of the treated water flowing through the piping 28. In other words, the pressure gauge 60 detects the pressure of the treated water downstream of the membrane device 26.

[0051] The conductivity meter 62 detects the conductivity of the treated water flowing through the piping 28. In other words, the conductivity meter 62 detects the conductivity of the treated water downstream of the membrane device 26.

[0052] Furthermore, a pressure gauge 66 is provided in the drainage pipe 29. The pressure gauge 66 detects the pressure of the concentrated water flowing through the drainage pipe 29. In other words, the pressure gauge 66 detects the pressure of the concentrated water downstream of the membrane device 26.

[0053] Tank 30 is a container for temporarily storing treated water that has passed through the membrane device 26.

[0054] Piping 32 connects the tank 30 and the electric deionizer 34. A pump 68 and a pressure gauge 70 are installed on the upstream side of piping 32.

[0055] Pump 68 sends the water to be treated in tank 30 to the electro-deionizer 34.

[0056] The pressure gauge 70 detects the pressure of the water to be treated flowing through the pipe 32. In other words, the pressure gauge 70 detects the pressure of the water to be treated upstream of the electric deionizer 34.

[0057] The electrodeionizer (EDI) 34 is connected to a DC power supply 35. The electrodeionizer 34 is configured to remove impurity ions from the water to be treated by filling the gap formed by an anion exchange membrane and a cation exchange membrane with ion exchange resin to form a desalination chamber and a concentration chamber, and by applying a DC current.

[0058] In the electrodeionizer 34, for example, the water to be treated is supplied to a desalination chamber and a concentration chamber, and a mixture of anion exchange resin and cation exchange resin in the desalination chamber adsorbs ionic components in the water to be treated. The adsorbed ionic components are transferred to the concentration chamber by the action of a direct current, and the concentrated water in the concentration chamber is drained through the drainage pipe 41. In the electrodeionizer 34, cations and anions are removed from the water to be treated.

[0059] Piping 36 connects the electrodeionizer 34 and the mixed-bed ion exchanger 38. Piping 36 is equipped with a pressure gauge 72, a resistivity meter 74, and a flow meter 76 from the upstream side.

[0060] The pressure gauge 72 detects the pressure of the treated water flowing through the piping 36. In other words, the pressure gauge 72 detects the pressure of the treated water downstream of the electrodeionizer 34.

[0061] The resistivity meter 74 detects the electrical resistivity of the treated water flowing through the piping 36. In other words, the resistivity meter 74 detects the electrical resistivity of the treated water downstream of the electric deionizer 34.

[0062] The flow meter 76 detects the flow rate of treated water flowing through the piping 36. In other words, the flow meter 76 detects the flow rate of treated water downstream of the electro-deionizer 34.

[0063] Furthermore, a flow meter 80 is provided in the drainage pipe 41. The flow meter 80 detects the flow rate of concentrated water flowing through the drainage pipe 41. In other words, the flow meter 80 detects the flow rate of concentrated water downstream of the electric deionizer 34.

[0064] The mixed-bed ion exchange apparatus 38 is configured, for example, by filling a cylindrical sealed container with a mixed-bed ion exchange resin, which is a mixture of cation exchange resin and anion exchange resin. In the mixed-bed ion exchange apparatus 38, by passing the water to be treated through the apparatus 38, cations and anions in the water to be treated are adsorbed onto the unbound cation exchange resin and anion exchange resin, and impurity ions that could not be removed by the electrodeionizer 34 are removed.

[0065] A pipe 40 is connected to the downstream side of the mixed-bed ion exchange unit 38. A resistivity meter 82 is installed in the pipe 40.

[0066] The resistivity meter 82 detects the electrical resistivity of the treated water flowing through the pipe 40. In other words, the resistivity meter 82 detects the electrical resistivity of the treated water downstream of the mixed-bed ion exchange device 38.

[0067] Here, pressure gauges 46, 48, 50, 54, 60, 66, 70, 72, conductivity meters 56, 62, flow meters 58, 76, 80, and resistivity meters 74, 82 are used as measuring devices to measure the values ​​described later.

[0068] Furthermore, although Figure 1 omits the illustration of the valves installed in each pipe, valves are installed at appropriate locations in each pipe.

[0069] In other words, in the pure water production system 12, raw water is subjected to various treatments such as adsorption, filtration, and ion exchange through multiple devices such as an activated carbon tower 18, a prefilter 22, a membrane device 26, an electrodeionizer 34, and a mixed-bed ion exchange device 38, thereby producing highly pure water.

[0070] Figure 2 shows an example of the control configuration of a monitoring device 84 in one embodiment of the present disclosure.

[0071] As shown in Figure 2, the monitoring device 84 includes a display unit 86, an acquisition unit 88, a calculation unit 90, a conversion unit 92, a storage unit 94, a correction unit 96, and a notification unit 98.

[0072] The monitoring device 84 plots and displays multiple control values ​​on the same graph on the display screen, based on measurements taken at predetermined intervals from each measuring device of the pure water production system 12 being monitored. The measurements taken here are stored as control values ​​in the storage unit 94. These measurements are also used when calculating the control values.

[0073] Here, control values ​​are items plotted on the same graph that serve as indicators for determining the occurrence of equipment malfunctions. Examples of control values ​​used include, as shown in Figure 3, the activated carbon differential pressure in the activated carbon column 18, the prefilter differential pressure in the prefilter 22, the flow rate per unit pressure of the reverse osmosis membrane in the membrane apparatus 26, the salt removal rate of the reverse osmosis membrane, the concentrated water differential pressure of the reverse osmosis membrane, the electrical resistance value of the electrodeionizer 34, the electrical resistivity downstream of the electrodeionizer 34, the differential pressure of the electrodeionizer 34, the flow rate value downstream of the electrodeionizer 34, the concentrated flow rate value, and the electrical resistivity downstream of the mixed-bed ion exchange apparatus 38.

[0074] The memory unit 94 stores the calculation formula, unit, lower limit, initial value (also called the appropriate value), and upper limit for each of the multiple control values ​​set using the measured values. Figure 3 shows an example of the data stored in the memory unit 94.

[0075] Specifically, for example, in the storage unit 94, the differential pressure of activated carbon as a management value is calculated using the difference between the pressure value P detected by the pressure gauge 48 ,

[0078] , , b , 3 , ,

[0079] , a , , a and the pressure value P detected by the pressure gauge 46 a and is stored. Furthermore, the initial value of the activated carbon differential pressure is 0.07 MPa, and the upper limit value is 1 MPa, which are stored.

[0076] Also, for example, in the storage unit 94, the differential pressure of the prefilter as a management value is calculated using the difference between the pressure value P detected by the pressure gauge 50 c and the pressure value P detected by the pressure gauge 48 b and is stored. Furthermore, the initial value of the prefilter differential pressure is 0.03 MPa, and the upper limit value is 0.5 MPa, which are stored.

[0077] Also, for example, in the storage unit 94, the flow rate per unit pressure of the reverse osmosis membrane as a management value is calculated by dividing the flow rate value F detected by the flow meter 58 a by the difference between the pressure value P detected by the pressure gauge 54 d and the pressure value P detected by the pressure gauge 60 e and is stored. Furthermore, in the storage unit 94, the lower limit value of the flow rate per unit pressure of the reverse osmosis membrane is 2 m 3 / hr / MPa, the initial value is 3.4 m 3 / hr / MPa, and the upper limit value is 4 m 3 / hr / MPa, which are stored.

[0078] Also, for example, in the storage unit 94, the salt rejection rate of the reverse osmosis membrane as a management value is calculated as a percentage (%) by dividing the difference between the conductivity C detected by the conductivity meter 56 a and the conductivity C detected by the conductivity meter 62 b by the conductivity C detected by the conductivity meter 56 a and is stored. Furthermore, the lower limit value of the salt rejection rate of the reverse osmosis membrane is 90%, and the initial value is 97.1%, which are stored.

[0079] Furthermore, for example, the memory unit 94 stores the differential pressure of concentrated water in the reverse osmosis membrane as a control value, which is the pressure value P detected by the pressure gauge 54. d The pressure value P detected by the pressure gauge 66 f It is stored that the calculation is performed using the difference between the two values, and further, it is stored that the initial value of the concentrated water differential pressure of the reverse osmosis membrane is 0.14 MPa and the upper limit is 0.5 MPa.

[0080] Furthermore, for example, the memory unit 94 stores that the electrical resistance value of the electric deionizer 34, as a control value, is calculated by dividing the voltage value V flowing through the electric deionizer 34 by the current value I. It also stores that the lower limit of the electrical resistance value of the electric deionizer 34 is 100Ω, the initial value is 199Ω, and the upper limit is 400Ω.

[0081] Furthermore, for example, the memory unit 94 stores, as a control value, the electrical resistivity R of the downstream side of the electric deionizer 34, which is detected by the resistivity meter 74. a The system is programmed to use [specific parameters], and it is also programmed to remember that the lower limit of the electrical resistivity downstream of the electric deionizer 34 is 10 MΩ·cm, and the initial value is 17.4 MΩ·cm.

[0082] Furthermore, for example, the memory unit 94 stores the differential pressure of the electric deionizer 34 as a control value, and the pressure value P detected by the pressure gauge 70. g The pressure value P detected by the pressure gauge 72 h It is stored that the calculation is performed using the difference between the two values, and it is also stored that the initial value of the differential pressure of the electric deionizer 34 is 0.15 MPa and the upper limit is 0.3 MPa.

[0083] Furthermore, for example, the memory unit 94 stores the flow rate value F, which is the flow rate value downstream of the electric deionizer 34 and detected by the flow meter 76, as a control value. b It is recorded that this is used, and furthermore, the lower limit of the flow rate value downstream of the electric deionizer 34 is 2m 3 / hr, initial value is 2.9m 3 It is remembered as / hr

[0084] Furthermore, for example, the memory unit 94 stores the flow rate value F of the concentration side of the electric deionizer 34 as a control value, which is detected by the flow meter 80. c It is recorded that this is used, and furthermore, the lower limit of the flow rate value on the concentration side of the electric deionizer 34 is 0.2 m 3 / hr, initial value is 0.3m 3 It is remembered as / hr

[0085] Furthermore, for example, the memory unit 94 contains, as a control value, the electrical resistivity R of the downstream side of the mixed-bed ion exchange device 38, which is detected by the resistivity meter 82. b The system is programmed to use [specific parameters], and it is also programmed to remember that the lower limit of the electrical resistivity downstream of the mixed-bed ion exchange device 38 is 17.5 MΩ·cm, and the initial value is 18.2 MΩ·cm.

[0086] In other words, it is desirable that the initial value of the electrical resistivity downstream of the mixed-bed ion exchange device 38, which is the downstreammost device of the pure water production system 12, be close to the ideal electrical resistivity of pure water, which is 18.2 MΩ·cm.

[0087] The acquisition unit 88 acquires, as measured values, pressure values ​​detected by pressure gauges 46, 48, 50, 54, 60, 66, 70, and 72; conductivity detected by conductivity meters 56 and 62; flow rate values ​​detected by flow meters 58, 76, and 80; and electrical resistivity detected by resistivity meters 74 and 82.

[0088] Furthermore, the acquisition unit 88 acquires the current value I and voltage value V flowing through the electric deionizer 34.

[0089] The calculation unit 90 calculates a control value using the measurement values ​​obtained by the acquisition unit 88.

[0090] Specifically, the calculation unit 90 calculates the pressure values ​​P detected by the pressure gauges 46 and 48, respectively. a , P b Using this method, the activated carbon differential pressure, which is one of the control values, is calculated.

[0091] Furthermore, the calculation unit 90 calculates the pressure values ​​P detected by the pressure gauges 48 and 50, respectively. b , P c Using this method, the pre-filter differential pressure, which is one of the control values, is calculated.

[0092] Furthermore, the calculation unit 90 calculates the pressure values ​​P detected by the pressure gauges 54 and 60, respectively. d , P e The flow rate value F detected by the flow meter 58. a The calculation unit 90 uses the conductivity C detected by conductivity meters 56 and 62, respectively, to calculate the flow rate per unit pressure of the reverse osmosis membrane, which is one of the control values. a , C b The salt removal rate of the reverse osmosis membrane, which is one of the control values, is calculated using this method. In addition, the pressure values ​​P detected by pressure gauges 54 and 66 are calculated respectively. d , P f Using this method, the differential pressure of the concentrated water in the reverse osmosis membrane, which will be one of the control values, is calculated.

[0093] Furthermore, the calculation unit 90 uses the current value I and voltage value V of the electric deionizer 34 to calculate the electrical resistance value of the electric deionizer 34, which is one of the control values. The calculation unit 90 also uses the pressure values ​​P detected by the pressure gauges 70 and 72, respectively. g , P h Using this method, the differential pressure of the electric deionizer 34, which is one of the control values, is calculated.

[0094] The conversion unit 92 converts multiple control values ​​so that the upper and lower limits set for each control value and the initial value (the first value) become the same value on the graph. Specifically, the conversion unit 92 converts the values ​​so that, for example, the upper limit becomes 100, the lower limit becomes -100, and the initial value becomes 0.

[0095] Furthermore, if there is variation in the initial values ​​for each unit, the conversion unit 92 may convert the initial values ​​to 0 using a value calculated based on data from the period immediately after the start of water flow until the initial values ​​for each unit stabilize, for example, data from 30 minutes to 2 hours after the start of water flow.

[0096] For example, the acquisition unit 88 obtains the pressure value P from the pressure gauges 48 and 50. b , P c The values ​​are obtained respectively, and the pre-filter differential pressure P is calculated by the calculation unit 90. c -P b Let's explain the case where the value is 0.1 MPa. In this case, as shown in Figure 3, if the initial value of the pre-filter differential pressure is 0.03 MPa and the upper limit is 0.5 MPa, and these are converted to an initial value of 0 and an upper limit of 100, respectively, then the pre-filter differential pressure of 0.1 MPa is converted to approximately 15 on the graph with a lower limit of -100, an initial value of 0, and an upper limit of 100. The display unit 86 then displays a new plot showing the pre-filter differential pressure at the position of 15 on the graph with a lower limit of -100, an initial value of 0, and an upper limit of 100, corresponding to the current date and time.

[0097] Furthermore, for example, the electrical resistivity R detected by the resistivity meter 74 in the acquisition unit 88 may also be detected by the acquisition unit 88. a Let's explain the case where the value is 17 MΩ·cm. In this case, as shown in Figure 3, the lower limit value of the electrical resistivity downstream of the electric deionizer 34 is 10 MΩ·cm, and the initial value is 17.4 MΩ·cm. When this is converted to a lower limit of -100 and an initial value of 0, the electrical resistivity of 17 MΩ·cm is converted to approximately -5.4 on the graph with a lower limit of -100, an initial value of 0, and an upper limit of 100. The display unit 86 then displays a new plot showing the electrical resistivity of the electric deionizer at the position of -5.4 for the current date and time on the graph with a lower limit of -100, an initial value of 0, and an upper limit of 100.

[0098] Similarly, the activated carbon differential pressure, the flow rate per unit pressure of the reverse osmosis membrane, the salt removal rate of the reverse osmosis membrane, the concentrated water differential pressure of the reverse osmosis membrane, the electrical resistance value of the electrodeionizer, the differential pressure of the electrodeionizer, the flow rate value on the downstream side of the electrodeionizer, the flow rate value on the concentration side, and the electrical resistivity on the downstream side of the mixed-bed ion exchanger are converted by the conversion unit 92 so that the lower limit is -100, the initial value is 0, and the upper limit is 100, and then plotted on the same graph and displayed by the display unit 86.

[0099] In other words, the display unit 86 superimposes multiple converted control values ​​onto the same graph in chronological order. For example, the display unit 86 superimposes converted differential pressure, removal rates such as salt removal rate, flow rate, ultraviolet irradiation amount, hydrogen peroxide generation amount of the ultraviolet irradiation device, etc., onto the same graph in chronological order.

[0100] At this time, the display unit 86 displays the multiple converted control values ​​in different forms, such as using different colors or plotting different shapes.

[0101] Furthermore, the correction unit 96 corrects the measured values ​​acquired by the acquisition unit 88 using disturbances such as water temperature and air temperature in each device from which the measured values ​​were acquired.

[0102] In this case, the conversion unit 92 converts the multiple control values ​​corrected by the correction unit 96 so that the lower limit is -100, the initial value is 0, and the upper limit is 100 on the same graph. The display unit 86 then displays the converted multiple control values ​​superimposed on the same graph in time series.

[0103] The notification unit 98 notifies the user that if the difference between any of the superimposed control values ​​and the upper or lower limit set for that control value falls below a preset value, it is time to perform backwashing or chemical regeneration in the device corresponding to that control value, or to replace the device or the consumables used in that device. The notification may be an alarm, a flashing light, or a display prompting regeneration or replacement.

[0104] Then, the user can perform backwashing or chemical regeneration, or replace the device or consumables used in the device, according to the plot display showing that the trend in each control value displayed on the display unit 86 is about to reach the upper or lower limit, and the difference from the upper or lower limit is less than or equal to a preset value.

[0105] Here, backwashing refers to cleaning filters and other components by flowing them in the opposite direction to the flow of the water being treated. Chemical regeneration refers to regenerating activated carbon, ion exchange resin, etc., using chemicals. Consumables include, for example, pre-filters, reverse osmosis membranes, ion exchange resins, activated carbon, etc.

[0106] Furthermore, the display unit 86 superimposes the prediction curves of the multiple converted control values ​​onto the same graph, each in a time series.

[0107] Figure 4 shows an example of the display screen shown by the display unit 86 of the monitoring device 84. For simplification and explanation, only data from one series each of the activated carbon column 18, prefilter 22, membrane device 26, electrodeionizer 34, and mixed-bed ion exchange device 38 are displayed, but it is possible to display other units and series on top of each other. Furthermore, if multiple data sets are displayed on top of each other, the control values ​​will be displayed as 0 if these devices are operating normally. Therefore, it will be impossible to determine what each data point represents, but this does not pose a problem as the devices are operating normally.

[0108] As shown in Figure 4, the display screen shows the vertical axis as the same indicator (a value used in common) for multiple control values, with an initial value of 0, an upper limit of 100, and a lower limit of -100, and the horizontal axis as the time axis.

[0109] Figure 4 shows the display screen as of July 18th. This device began full operation on March 20th, and this is an example of the display as of July 18th, shortly after its commencement. As shown in Figure 4, the display screen shows each control value plotted in a different manner over time, and the predicted curves for each control value from July 18th onward are shown as dashed lines. Here, "different manner" means that the colors and plot shapes are different, as well as being different enough for the user to distinguish them from other control values.

[0110] As of July 18th, despite the system having just started operation, a slight increase in the pre-filter differential pressure was observed, along with a slight decrease in the salt removal rate and flow rate of the membrane device 26 (reverse osmosis membrane). This suggests that there is some problem with the pre-filter 22, membrane device 26, or the stage preceding them. It can be determined that the pre-filter may need to be replaced in October, followed by replacement or cleaning of the reverse osmosis membrane after November 15th. In this way, the differential pressure of each device is displayed on the graph for comparison. Similarly, deterioration of water quality is plotted in the direction of decreasing control values, making it easy to compare the fluctuations in water quality of each device.

[0111] Figure 5 shows the display screen as of November 15th, after continuing to operate the apparatus shown in Figure 4. The pre-filter was replaced around September 10th, so the differential pressure has returned to its initial value. However, the differential pressure of the activated carbon has begun to rise. It can also be seen that the differential pressure of the concentrated water in the reverse osmosis membrane is rapidly increasing. From the rise in the differential pressure of the activated carbon and the reverse osmosis membrane, it can be determined that the membrane apparatus 26 will require cleaning or replacement first. Based on this figure, it can be predicted that the reverse osmosis membrane in this membrane apparatus 26 will require cleaning or replacement sometime after March 15th.

[0112] In other words, users can predict which devices require attention and what actions are needed by looking at the trends and prediction curves of each control value plot.

[0113] In other words, when the display unit 86 displays control values ​​that tend to increase as the device continues to operate, such as pre-filter differential pressure, activated carbon differential pressure, or pressure value downstream of the device, it plots them between the initial value of 0 and the upper limit of 100. Also, when the display unit 86 displays any of the following as the device continues to operate, such as salt removal rate, flow rate, ultraviolet irradiation amount, or hydrogen peroxide generation amount of the ultraviolet irradiation device, it plots control values ​​that tend to decrease, between the initial value of 0 and the lower limit of -100.

[0114] In other words, as shown in Figures 4 and 5, by displaying multiple control values ​​in a unified manner on the same graph, users can quickly grasp the priority of the devices that need attention. For example, although the number of units that make up a pure water system is around 12 to 22, the status of each device can be easily understood by displaying it in a unified manner on the same graph in this way.

[0115] Furthermore, by displaying multiple control values ​​on the same graph, users can understand which devices require attention based on the trends of each control value, and what actions are necessary, such as backwashing, chemical regeneration, or replacement of consumables. Devices and consumables corresponding to control values ​​where the difference between each control value and its upper or lower limit falls below a predetermined value can be used as a guideline for regeneration or replacement.

[0116] As described above, by using the monitoring device 84 of this embodiment, multiple control values ​​for the operating status of each device constituting the pure water production system 12 can be displayed in a unified manner on the same graph. This makes it possible to grasp at a glance which of the multiple control values ​​obtained from the devices constituting the pure water production system is likely to reach a preset upper or lower limit. Therefore, it becomes possible to easily identify at a glance which devices or parts of such devices are likely to malfunction.

[0117] Furthermore, by using the monitoring device 84 of this embodiment, the operating status (also called the operating conditions) of all devices and units can be grasped, which can be used to create maintenance plans. It can also be used to change operating conditions based on the operating status of all units. For example, if there is a unit in a membrane device that is severely clogged, the load on the membrane device can be reduced, for example, by reducing the amount of water supplied to the membrane device or lowering the water recovery rate.

[0118] Figure 6 shows another embodiment of the present disclosure. As shown in Figure 6, the pure water systems 100a, 100b, and 100c are each connected to a monitoring device 84 via a network. In other words, the monitoring device 84 is configured to collect management information from the pure water systems 100a, 100b, and 100c, which are installed in different locations, via the network. The monitoring device 84 can be used, for example, in a data aggregation center to aggregate the collected information and analyze the situation. In this case, because the data is centralized, the data can be directly compared even between pure water systems with different operating conditions, systems, and the water quality of the ultrapure water they produce. That is, it can be applied to the operation management of multiple sites.

[0119] The embodiments and other embodiments of this disclosure have been described in detail above. However, this disclosure is not limited to the embodiments and other embodiments described above, and can be modified in various ways without departing from its essence.

[0120] For example, the pure water production system 12 is not limited to the configuration described above. For instance, it may be sufficient to have at least one of the above-described devices that constitute the pure water production system 12.

[0121] For example, the pure water production system 12 may include ion exchange devices other than the mixed-bed ion exchange device 38, such as single-bed or multi-bed ion exchange devices. In this case, the salt removal rate and water flow differential pressure of the ion exchange devices other than the mixed-bed ion exchange device 38 may be measured and monitored as control values.

[0122] Furthermore, the system may have an atmospheric pressure degasser to remove carbon dioxide gas in particular from the water being treated, or a vacuum degasser to remove dissolved oxygen gas in particular from the water being treated. In the atmospheric pressure degasser, the removal rate calculated from the conductivity of the water before and after the system is monitored as a control value. In the vacuum degasser, for example, the removal rate measured by a dissolved oxygen meter using the dissolved oxygen amount (DO) before and after the system is monitored as a control value. In other words, the degasser monitors either the carbon dioxide removal rate or the dissolved oxygen removal rate. In addition, the differential pressure before and after the degasser may be monitored as a control value.

[0123] Furthermore, for example, an ultraviolet irradiation device may be provided for the purpose of oxidatively decomposing organic matter in the water to be treated. In the ultraviolet irradiation device, the irradiation dose (amount of light) is measured and monitored as a control value. The amount of hydrogen peroxide generated may also be measured and monitored as a control value. In this case, the ultraviolet irradiation device and an ion exchange device installed immediately after it may be set together, and the TOC before and after these devices may be measured with a TOC meter and monitored as a control value. The removal rate is calculated from the TOC value.

[0124] Furthermore, while the above description explains a configuration in which the differential pressure is calculated from the pressure on the upstream side of the device and the pressure on the downstream side of the device and used as a control value, this disclosure is not limited to this, and for example, the pressure value on the downstream side of the device may also be used as the control value.

[0125] Furthermore, the salt removal rate, which is one example of a control value mentioned above, can be substituted with the water quality of the treated water. For example, the electrical resistivity downstream of the device may be monitored as a control value.

[0126] Furthermore, the membrane device 26 may have, for example, a coagulation and sedimentation device, a turbidity removal device such as a microfilter or an ultrafiltration device, on its upstream side. Also, the order and number of devices constituting the pure water production system 12 from the upstream side are not limited to the configuration described above.

[0127] Furthermore, although the pure water production system described above has been configured with multiple devices arranged in series, this disclosure is not limited to this configuration and can also be applied to configurations with multiple devices arranged in parallel. [Explanation of symbols]

[0128] 12. Pure water production system 18 Activated carbon tower 22 Pre-filter 26 Membrane equipment 34. Electrical deionizer 38. Mixed-bed ion exchange system 84 Monitoring equipment 86 Display section 88 Acquisition Department 90 Calculation Department 92 Conversion Department 94 Memory Department 96. Correction Section 98 Notification Department

Claims

1. An acquisition unit that acquires multiple control values ​​in at least one operating device constituting the pure water production system or ultrapure water production system to be monitored, A conversion unit converts multiple acquired control values ​​so that the upper and lower limits set for each control value and the initial value (the first value) become the same value on the graph. It includes a display unit that superimposes multiple converted control values ​​onto the same graph, each in a time series. The aforementioned display unit is On the same graph mentioned above, at least two of the following are displayed: differential pressure, removal rate, flow rate, ultraviolet irradiation dose, and hydrogen peroxide generation amount from the ultraviolet irradiation device. When displaying the differential pressure, it shall be displayed between the initial value and the upper limit value. When displaying any of the removal rate, the flow rate value, the ultraviolet irradiation amount, or the hydrogen peroxide generation amount of the ultraviolet irradiation device, the value should be displayed between the initial value and the lower limit. A monitoring device for a pure water production system or an ultrapure water production system.

2. The aforementioned pure water production system or ultrapure water production system is composed of multiple devices, Monitoring device for a pure water production system or ultrapure water production system according to claim 1, wherein the plurality of devices include at least two of a filtration device, an activated carbon tower, a prefilter, a membrane device, an electrodeionizer, an ion exchange device, a degasser, and an ultraviolet irradiation device.

3. The aforementioned display unit is A control value that tends to rise as the device continues to operate is displayed between the initial value and the upper limit. A control value that tends to decrease as the device continues to operate is displayed between the initial value and the lower limit. A monitoring device for a pure water production system or an ultrapure water production system as described in claim 1.

4. A monitoring device for a pure water production system or an ultrapure water production system according to claim 1, further comprising a notification unit that, when the difference between any of the superimposed control values ​​and the upper or lower limit set for that control value falls below a predetermined value, the device that acquired the control value will perform backwashing or chemical regeneration, or will be notified that it is time to replace the device or the consumables used in the device.

5. The display unit is a monitoring device for a pure water production system or an ultrapure water production system according to claim 1, which displays the plurality of control values ​​in different manner.

6. The system further includes a correction unit that corrects multiple control values ​​using the temperature obtained from each device, The conversion unit converts each of the multiple control values ​​corrected by the correction unit, The monitoring device for a pure water production system or an ultrapure water production system according to claim 1, wherein the display unit superimposes the converted control values ​​on the same graph in a time series.

7. The monitoring device for a pure water production system or an ultrapure water production system according to claim 1, wherein the display unit superimposes and displays multiple converted control value prediction curves on the same graph in time series.

8. A process of acquiring multiple control values ​​in at least one operational device that constitutes the pure water production system or ultrapure water production system under monitoring, The process involves converting multiple acquired control values ​​so that the upper and lower limits set for each control value, and the initial value, become the same value on the graph. The process involves superimposing multiple converted control values ​​onto the same graph, each displayed in a time series. Equipped with, In the process of superimposing the time series as described above, On the same graph mentioned above, at least two of the following are displayed: differential pressure, removal rate, flow rate, ultraviolet irradiation dose, and hydrogen peroxide generation amount from the ultraviolet irradiation device. When displaying the differential pressure, it shall be displayed between the initial value and the upper limit value. When displaying any of the removal rate, the flow rate value, the ultraviolet irradiation amount, or the hydrogen peroxide generation amount of the ultraviolet irradiation device, the value should be displayed between the initial value and the lower limit. A method for monitoring a pure water production system or an ultrapure water production system.

Images