Fluid pressure cylinder

Abstract

This hydraulic cylinder (10) comprises a cylinder housing (12) in which an accommodation chamber (31) is formed, and a cylinder unit (14). The cylinder housing has a first securing means (26). The cylinder unit has a piston (60), a piston rod (62) with which the piston is provided, a sleeve (66) for accommodating the piston, and a second securing means (32). The cylinder unit is accommodated in the accommodation chamber. In addition, the cylinder unit can be detachably attached to the cylinder housing due to engagement of the first securing means with the second securing means.

Description

Technical Field

[0001] The present invention relates to a fluid pressure cylinder that operates based on the supply and discharge of a pressure fluid.

Background Art

[0002] As described in Japanese Patent Application Laid-Open No. 2019-113101, an air cylinder includes a cylinder tube in which a piston chamber is formed and a piston accommodated in the piston chamber. Further, a supply and discharge pipe for supplying and exhausting compressed air to and from the piston chamber is connected to the air cylinder. In some cases, a position sensor for detecting the position of the piston may be provided on the cylinder tube. Further, a seal member (packing) is attached to the side peripheral wall (outer peripheral portion) of the piston. The seal member seals between the side peripheral wall of the piston and the inner peripheral wall of the piston chamber.

[0003] The piston moves within the piston chamber based on the supply and discharge of compressed air to and from the piston chamber. Along with this, the seal member slides in contact with the side peripheral wall of the piston. Therefore, when the operation of the air cylinder is repeated, the seal member wears out. That is, the seal member is a consumable part. The air cylinder is configured to include various consumable parts in addition to the seal parts. Therefore, in an air cylinder, regular maintenance is required.

[0004] The air cylinder is assembled to a predetermined device, for example. Therefore, when performing maintenance on the air cylinder, it is necessary to remove the air cylinder from the predetermined device. Next, the supply and discharge pipe is removed from the air cylinder. When a position sensor is attached to the air cylinder, next, the position sensor is removed from the air cylinder. Next, the air cylinder is disassembled and the consumable parts are replaced.

[0005] Next, the air cylinder is assembled, and then the position sensor is attached to the air cylinder. Then, the air supply and discharge pipes are attached to the air cylinder. Next, the air cylinder is assembled into the designated device, and the mounting position of the position sensor is adjusted. That is, for example, the piston is moved to a predetermined position, and the position sensor is positioned so that the piston in this state can be detected. After these steps are completed, the maintenance is finished. [Overview of the project]

[0006] As can be understood from the above, maintenance of an air cylinder involves many work steps. For this reason, performing maintenance on an air cylinder is not easy. In addition, the device to which the air cylinder is installed must be stopped while maintenance is being performed on the air cylinder. Consequently, the operating efficiency of the device is reduced.

[0007] Furthermore, after the air cylinder is assembled, the piston is housed inside the cylinder tube. Therefore, the operator cannot see the piston. Under these circumstances, aligning the piston with the position sensor is not easy.

[0008] The present invention aims to solve the problems described above.

[0009] According to one embodiment of the present invention, a fluid pressure cylinder is provided comprising a cylinder housing having a housing chamber formed therein, and a cylinder unit detachably housed in the housing chamber, wherein the cylinder housing has a first fixing means and a position sensor, and the cylinder unit has a piston pressed by a pressurized fluid, a piston rod on which the piston is mounted, a sleeve with a piston chamber formed therein through which the piston slides, a first holder that holds one end of the sleeve, a second holder that holds the other end of the sleeve, and a second fixing means that can engage with the first fixing means, wherein at least one of the first holder or the second holder has a through hole through which the piston rod is inserted, and the first fixing means engages with the second fixing means, thereby detachably connecting the cylinder unit to the cylinder housing, and the position of the position sensor aligns with the position of the piston.

[0010] The fluid pressure cylinder with the above configuration includes a cylinder unit in which the piston, piston rod, and other components are assembled integrally. This cylinder unit is housed in a chamber of the cylinder housing so that it can be inserted into and removed from it. Therefore, when it is time for maintenance of the cylinder unit, for example, the cylinder unit can be replaced with a spare part. This makes it possible to restart the fluid pressure cylinder.

[0011] As can be understood from this, in the present invention, when replacing the cylinder unit with a spare part, there is no particular need to remove the cylinder housing from the equipment. That is, the cylinder unit can be replaced with a spare part while the cylinder housing remains fixed to the equipment. Furthermore, there is no particular need to remove the position sensor and the wiring connected to the position sensor from the cylinder housing.

[0012] Thus, according to the present invention, maintenance on a fluid pressure cylinder can be completed, for example, by replacing the cylinder unit with a spare part. In this case, the maintenance work consists only of replacing the cylinder unit with a spare part. For the reasons described above, the maintenance work process is reduced and the work is simplified. In other words, maintenance on the fluid pressure cylinder can be performed easily and quickly. As a result, the downtime of the equipment is reduced.

[0013] Furthermore, the cylinder unit and the cylinder housing are connected based on the engagement of the first fixing means and the second fixing means. Therefore, connecting the cylinder unit and the cylinder housing is easy. Also, the connection between the cylinder unit and the cylinder housing can be released by releasing the engagement of the first fixing means and the second fixing means. Thus, with the above-described configuration, the cylinder unit can be easily attached to and detached from the cylinder housing.

[0014] In addition, the mounting position of the position sensor on the cylinder housing is the same before and after removing the cylinder unit from the cylinder housing. Therefore, by inserting and installing the cylinder unit into the cylinder housing, the piston is positioned in a predetermined location and aligns with the position sensor. In other words, the piston and the position sensor are aligned. In this way, even when the operator cannot visually inspect the piston, it is easy to align the piston and the position sensor. [Brief explanation of the drawing]

[0015] [Figure 1] Figure 1 is a schematic overall perspective view of an air cylinder according to an embodiment of the present invention. [Figure 2] Figure 2 is a schematic overall perspective view of the air cylinder, viewed from a different direction than in Figure 1. [Figure 3] Figure 3 is an exploded perspective view of the air cylinder. [Figure 4] Figure 4 is a side cross-sectional view of the air cylinder along its axial direction. [Figure 5] Figure 5 is a plan view of the air cylinder as seen from the Z2 direction. [Figure 6] Figure 6 is an exploded perspective view showing the piston, first holder, and cover member removed from the piston rod. [Figure 7] Figure 7 is a side cross-sectional view showing the state after the piston has moved from the state shown in Figure 4. [Modes for carrying out the invention]

[0016] In the following explanation, an air cylinder will be used as an example of a fluid pressure cylinder. Therefore, the pressure fluid is compressed air. Note that the fluid pressure cylinder may also be a hydraulic cylinder. In this case, the pressure fluid is hydraulic oil. Furthermore, the air cylinder used as an example is a single-rod cylinder, but a double-rod cylinder may also be used.

[0017] The X direction shown in the drawing is the axial direction of the air cylinder, cylinder housing, or sleeve. Directions X1 and X2 along the X direction are opposite to each other. The Y direction shown in the drawing is the horizontal direction perpendicular to the X direction. Directions Y1 and Y2 along the Y direction are opposite to each other. The Z direction shown in the drawing is the vertical direction perpendicular to the X and Y directions. Directions Z1 and Z2 along the Z direction are opposite to each other.

[0018] Figure 1 is a schematic overall perspective view of the air cylinder 10 according to this embodiment. Figure 2 is a schematic overall perspective view of the air cylinder 10 viewed from a different direction than that in Figure 1. Figure 3 is an exploded perspective view of the air cylinder 10. Figure 4 is a side cross-sectional view of the air cylinder 10 along the axial direction. As shown in Figures 1 to 4, the air cylinder 10 comprises a cylinder housing 12 and a cylinder unit 14.

[0019] First, let's describe the cylinder housing 12. As shown in Figures 1 to 3, the cylinder housing 12 has a roughly rectangular cylindrical shape. As shown in Figure 4, both ends of the cylinder housing 12 in the X direction are open ends. A cover member 16 is provided as a closing part for the first opening 15a, which is the X1 side opening of the cylinder housing 12. That is, the first opening 15a of the cylinder housing 12 is closed by the cover member 16. As shown in Figures 2 and 4, the cover member 16 has a large-diameter disc portion 17 and a small-diameter cylindrical portion 18. The cylindrical portion 18 protrudes from the X1 side end face of the disc portion 17.

[0020] In the cover member 16, a first lateral groove 19 is formed in the side circumferential wall of the disc portion 17 (see Figure 4). An annular outer sealing member 20 is housed in the first lateral groove 19. The outer sealing member 20 airtightly seals the space between the side circumferential wall of the disc portion 17 and the inner circumferential wall of the cylinder housing 12. On the other hand, a second lateral groove 22 is formed in the inner circumferential wall of the cylinder housing 12 near the first opening 15a. A snap ring 24 that passes through the cylindrical portion 18 is housed in the second lateral groove 22. The snap ring 24 prevents the cover member 16 from coming off the cylinder housing 12. In this way, the cover member 16 is positioned and fixed to the cylinder housing 12.

[0021] A C-shaped snap wire may be used instead of the snap ring 24. In this case, an annular groove (not shown) is formed on the side circumferential wall of the disc portion 17 at a position opposite the second lateral groove 22. The snap wire is inserted into the second lateral groove 22 and the annular groove, which prevents the cover member 16 from coming off the cylinder housing 12.

[0022] On the inner peripheral wall of the cylinder housing 12, a first threaded portion 26 is provided. Specifically, the first threaded portion 26 is provided at the second opening 15b which is the X2-side opening of the cylinder housing 12. Here, the cylinder unit 14 has a second holder 30 to be described later. In the second holder 30, a second threaded portion 32 is provided on the outer peripheral wall at the X2-side end portion. By screwing the second threaded portion 32 onto the first threaded portion 26, the second opening 15b of the cylinder housing 12 is closed by the second holder 30. Along with this closing, a space surrounded by the X2-side end face of the disk portion 17 of the cover member 16, the X1-side end face of the second holder 30, and the inner peripheral wall of the cylinder housing 12 is formed inside the cylinder housing 12. This space is the accommodation chamber 31 in which the cylinder unit 14 is accommodated.

[0023] As shown in FIGS. 1 to 3, first protrusions 34a and second protrusions 34b are respectively provided at the Y1-side end portion and the Y2-side end portion in the Z1 direction of the cylinder housing 12. Third protrusions 34c and fourth protrusions 34d are respectively provided at the Y1-side end portion and the Y2-side end portion in the Z2 direction of the cylinder housing 12. The first protrusions 34a to the fourth protrusions 34d extend along the axial direction (X direction) at the corners of the cylinder housing 12. Long holes 38 are respectively formed in the first protrusions 34a to the fourth protrusions 34d. For example, a long bolt (not shown) for connecting the air cylinder 10 to equipment such as a predetermined device or apparatus is inserted through the long holes 38.

[0024] As shown in FIG. 5, at the Z2-side end portion of the cylinder housing 12, a first sensor mounting groove 40a is formed near the third protrusion 34c, and a second sensor mounting groove 40b is formed near the fourth protrusion 34d. A first position sensor 42a is mounted in the first sensor mounting groove 40a, and a second position sensor 42b is mounted in the second sensor mounting groove 40b. The entire first position sensor 42a and the second position sensor 42b are respectively accommodated in the first sensor mounting groove 40a and the second sensor mounting groove 40b. The first position sensor 42a and the second position sensor 42b are electrically connected to a control portion (not shown) via cables 46a and 46b respectively.

[0025] On the flat portion 44 of the cylinder housing 12, a first mounting hole 52a for mounting the first pipe joint 50a and a second mounting hole 52b for mounting the second pipe joint 50b are formed. As shown in FIGS. 4 and 5, at the bottom of the first mounting hole 52a, a first input / output port 54a is formed. At the bottom of the second mounting hole 52b, a second input / output port 54b is formed. Compressed air is supplied to and discharged from the cylinder unit 14 through the first input / output port 54a and the second input / output port 54b.

[0026] The tip of the first supply / discharge pipe 56a is connected to the first pipe joint 50a, and the tip of the second supply / discharge pipe 56b is connected to the second pipe joint 50b. The other ends (not shown) of the first supply / discharge pipe 56a and the second supply / discharge pipe 56b are respectively connected to a supply / discharge mechanism (not shown). Compressed air flows through the first supply / discharge pipe 56a and the second supply / discharge pipe 56b.

[0027] Next, the cylinder unit 14 will be described. As shown in FIG. 4, the cylinder unit 14 is an assembly having a first holder 58, a piston 60, a piston rod 62, a second holder 30, and a sleeve 66.

[0028] The sleeve 66 is a cylindrical body, and the piston 60 slides inside the sleeve 66. That is, the internal space of the sleeve 66 is the piston chamber 68.

[0029] The first holder 58 holds the X-side end (one end) of the sleeve 66. When the cylinder unit 14 is inserted into the accommodation chamber 31, the first holder 58 is located between the disk portion 17 of the cover member 16 and the piston 60. There is a slight gap between the disk portion 17 and the first holder 58. That is, a first annular clearance 63 is formed between the disk portion 17 and the first holder 58. The first annular clearance 63 is continuous with the first input / output port 54a.

[0030] An outer annular groove 64 is formed on the outer circumferential wall of the first holder 58. An annular first unit seal 65 is housed in the outer annular groove 64. The first unit seal 65 hermetically seals the space between the inner circumferential wall of the cylinder housing 12 and the outer circumferential wall of the first holder 58. The first input / output port 54a is located between the outer sealing member 20 and the first unit seal 65 in the X direction.

[0031] The first holder 58 has a first engaging end 70 that protrudes toward the piston 60. The first engaging end 70 is inserted into one end (the X1 side end) of the sleeve 66. As shown in Figure 6, a receiving recess 71 is formed on the X1 side end face of the first holder 58, recessing toward the first engaging end 70. The first holder 58 has a through hole 72 that penetrates the first holder 58 in the X direction. An annular insertion groove 74 is formed on the radial outer edge of the bottom of the receiving recess 71, recessing toward the radial outward direction.

[0032] The housing recess 71 houses a holder-side damper 76, which is an annular elastic member. The holder-side damper 76 has a first body portion 78 and an annular first flange portion 80. The first flange portion 80 is inserted into the insertion groove 74. This insertion prevents the holder-side damper 76 from coming out of the housing recess 71. The X1 side end of the first body portion 78 is slightly exposed from the housing recess 71.

[0033] The holder-side damper 76 has a guide hole 82 that overlaps the through hole 72. The guide hole 82 is the hollow portion of the holder-side damper 76. In addition, three guide passages 84 are formed in the first main body portion 78. The guide passages 84 extend from the outer peripheral wall to the inner peripheral wall of the first main body portion 78 along the diametrical direction of the holder-side damper 76. The outer peripheral opening of the guide passage 84 is connected to the first annular clearance 63, and the inner peripheral opening of the guide passage 84 is connected to the guide hole 82. In this way, the first annular clearance 63 and the guide hole 82 are in communication via the guide passage 84. The guide passage 84 is a groove formed in the end face 77 (the end face that abuts against the disc portion 17) of the holder-side damper 76.

[0034] The first chamber 86 is formed by the X2-side end face of the first holder 58, the X1-side end face 61 of the piston 60 (see Figure 6), and the inner circumferential wall of the sleeve 66. The first chamber 86 is the space on one side of the piston chamber 68, which is separated by the piston 60.

[0035] The piston 60 has a fitting hole 87, a packing mounting groove 88, and a magnet mounting groove 89 (see Figure 6). The X1 side end of the piston rod 62 is fitted into the fitting hole 87 (see Figure 4). The packing 90 and magnet 92 are housed in the packing mounting groove 88 and magnet mounting groove 89, respectively. The annular packing 90 provides an airtight seal between the outer circumferential wall of the piston 60 and the inner circumferential wall of the sleeve 66.

[0036] As shown in Figure 6, a mounting recess 94 is formed on the X1-side end face 61 of the piston 60. An annular retaining groove 96 is formed on the radially outer edge of the bottom of the mounting recess 94, recessing radially outward. The first damper 98 is housed in the mounting recess 94. The first damper 98 has a second body portion 100 and an annular second flange portion 102. The second flange portion 102 is inserted into the retaining groove 96. This insertion prevents the first damper 98 from coming out of the mounting recess 94. The X1-side end of the second body portion 100 is slightly exposed from the mounting recess 94. That is, the X1-side end of the first damper 98 protrudes toward the first holder 58 beyond the X1-side end face 61 of the piston 60 (the end face facing the first holder 58).

[0037] The first damper 98 has an inlet / outlet hole 104 as a hollow section and two inlet / outlet passages 106. The two inlet / outlet passages 106 are formed in the second main body 100. The inlet / outlet hole 104 faces the through hole 72. The inlet / outlet passages 106 extend along the diametrical direction of the first damper 98 from the outer peripheral wall to the inner peripheral wall of the second main body 100. The inlet / outlet passages 106 guide the compressed air flowing into the inlet / outlet hole 104 to the first chamber 86 located diametrically outward from the inlet / outlet hole 104. The inlet / outlet passages 106 are grooves formed on the X1 side end face of the first damper 98.

[0038] The second holder 30 holds the X2 side end (other end) of the sleeve 66. As shown in Figure 4, the second holder 30 has a second engaging end 110 that protrudes toward the piston 60. The second engaging end 110 is inserted into the other end (X2 side end) of the sleeve 66. An engaging recess 112 is formed in the second holder 30. An annular engaging groove 114 is formed on the radial outer edge of the bottom of the engaging recess 112, recessing radially outward. The second damper 116 is housed in the engaging recess 112. The second damper 116 has a third body portion 118 and a third flange portion 120. The third flange portion 120 is inserted into the engaging groove 114. This insertion prevents the second damper 116 from coming out of the engaging recess 112. The X1 side end of the third body portion 118 is slightly exposed from the engaging recess 112. In other words, the X1-side end of the second damper 116 protrudes toward the piston 60 more than the X1-side end face of the second holder 30 (the end face facing the piston 60).

[0039] The second damper 116 has a supply and discharge hole 124. The diameter of the supply and discharge hole 124 is larger than the diameter of the piston rod 62. That is, a second annular clearance 126 is formed between the side circumferential wall of the piston rod 62 and the inner circumferential wall of the supply and discharge hole 124.

[0040] The second chamber 128 is formed by the X2-side end face of the piston 60, the X1-side end face of the second holder 30, and the inner circumferential wall of the sleeve 66. The second chamber 128 is the space on the other side of the piston chamber 68, which is separated by the piston 60.

[0041] The second holder 30 has a through hole 130 through which the piston rod 62 is inserted. An inner groove 132 is formed in the inner circumferential wall of the through hole 130. An annular rod seal 134 is housed in the inner groove 132. The rod seal 134 airtightly seals the space between the side circumferential wall of the piston rod 62 and the inner circumferential wall of the through hole 130.

[0042] In the second holder 30, a flow passage 136 is formed between the engagement recess 112 and the inner groove 132. The flow passage 136 has a first passage 138 extending in the axial direction (X direction) of the second holder 30 and a second passage 140 extending in the radial direction (Z direction) of the second holder 30. The X1 side end of the first passage 138 is connected to the second annular clearance 126. The X2 side end of the first passage 138 is closed by a rod seal 134. The Z1 side end of the second passage 140 is connected to the first passage 138. The Z2 side end of the second passage 140 is connected to the second input / output port 54b. That is, the second annular clearance 126 communicates with the second input / output port 54b via the flow passage 136.

[0043] An annular outer groove 142 is formed on the outer circumferential wall of the second holder 30 at a position closer to the X2 direction than the second passage 140. An annular second unit seal 144 is housed in the outer groove 142. The second unit seal 144 airtightly seals the space between the outer circumferential wall of the second holder 30 and the inner circumferential wall of the housing chamber 31. In other words, the first unit seal 65 and the second unit seal 144 prevent compressed air in the piston chamber 68 from leaking into the housing chamber 31.

[0044] A second threaded portion 32 is formed on the outer circumferential wall of the second holder 30 at the X2-side end. As described above, the second threaded portion 32 is screwed into the first threaded portion 26 formed on the X2-side end of the cylinder housing 12. In addition, an operating portion 146 protruding in the X2 direction is provided on the X2-side end face of the second holder 30. The operating portion 146 is a part that is gripped by a tool such as a wrench, spanner, or pliers. Two flat surfaces 147 are formed on the outer circumferential wall of the operating portion 146 at positions symmetrical to each other with respect to the central axis of the second holder 30 (see Figure 1).

[0045] The formation positions of the first threaded portion 26 and the second threaded portion 32 are not particularly limited to the above positions. For example, the first threaded portion 26 may be provided in the first opening 15a, and the second threaded portion 32 may be provided on the outer peripheral wall of the disc portion 17 of the cover member 16. Alternatively, the first threaded portion 26 may be provided on the inner peripheral wall of the housing chamber 31, and the second threaded portion 32 may be provided on the outer peripheral wall of the sleeve 66.

[0046] A piston rod 62 is passed through the insertion hole 130 of the second holder 30. A piston 60 is mounted on the X1 side end of the piston rod 62. A connecting hole 148 is formed at the X2 side end of the piston rod 62. A part of a workpiece (not shown) is inserted into the connecting hole 148. Therefore, when the piston 60 is displaced within the sleeve 66, the piston rod 62 and the workpiece are displaced integrally with the piston 60. The workpiece is, for example, a predetermined jig.

[0047] The first engaging end 70 of the first holder 58 is press-fitted into one end of the sleeve 66 (the X1 side opening). The outer circumferential wall of the first engaging end 70 is in close contact with the inner circumferential wall of the sleeve 66 at one end along its entire circumference. The second engaging end 110 of the second holder 30 is press-fitted into the other end of the sleeve 66 (the X2 side opening). The outer circumferential wall of the second engaging end 110 is in close contact with the inner circumferential wall of the sleeve 66 at the other end along its entire circumference. As a result of this press-fitting, the X1 side opening of the sleeve 66 is closed by the first holder 58, and the X2 side opening of the sleeve 66 is closed by the second holder 30. The first holder 58 and the second holder 30 can be manually removed from the sleeve 66.

[0048] The air cylinder 10 according to this embodiment is basically configured as described above. Next, the operation and effects of the air cylinder 10 will be explained.

[0049] A workpiece is connected to the piston rod 62. Specifically, a portion of the workpiece is inserted into the connecting hole 148 of the piston rod 62. The air cylinder 10 operates in this state.

[0050] Figure 4 shows a state in which compressed air has been discharged from the first chamber 86 while compressed air has been supplied to the second chamber 128. In this case, since the internal pressure of the second chamber 128 is higher than that of the first chamber 86, the piston 60 is moved in the X1 direction by pressure from the compressed air in the second chamber 128 and is in a first position closest to the disc portion 17 of the cover member 16. To move the piston 60 in the X2 direction from this state, compressed air is supplied to the first chamber 86 while compressed air is discharged from the second chamber 128. Specifically, compressed air is sent from the supply and discharge mechanism to the first supply and discharge pipe 56a. After flowing through the first supply and discharge pipe 56a, the compressed air flows into the first input / output port 54a. The compressed air passes through the first input / output port 54a and flows into the first annular clearance 63 between the disc portion 17 and the first holder 58.

[0051] Compressed air flows from the first annular clearance 63 into the guide passage 84 of the holder-side damper 76, and then from the guide passage 84 into the guide hole 82 of the holder-side damper 76. The compressed air then flows from the guide hole 82 into the through hole 72 of the first holder 58. In other words, the compressed air in the first annular clearance 63 reaches the through hole 72 via the guide passage 84 and the guide hole 82.

[0052] The through hole 72 faces the inlet / outlet hole 104 of the first damper 98. Therefore, compressed air moves from the through hole 72 to the inlet / outlet hole 104. Here, the second body portion 100 of the first damper 98 has two inlet / outlet passages 106 formed therein. The inlet / outlet passages 106 extend along the diametrical direction of the second body portion 100. Therefore, the compressed air in the inlet / outlet hole 104 flows through the inlet / outlet passages 106 into the first chamber 86 located diametrically outward of the first damper 98. As a result, the internal pressure of the first chamber 86 increases, and the piston 60 begins to move in the X2 direction. In this way, based on the formation of the guide passage 84 in the holder-side damper 76, a path for compressed air from the first annular clearance 63 toward the first chamber 86 is formed. That is, a path for compressed air to press the piston 60 can be secured.

[0053] As can be understood from the above, according to this embodiment, even when the first damper 98 is in contact with the first holder 58, compressed air enters the first chamber 86 through the inlet / outlet hole 104. Therefore, not only does the compressed air in the inlet / outlet hole 104 push the piston 60, but the compressed air in the first chamber 86 also pushes the piston 60. As a result, the area of ​​the piston 60 that receives pressure from the compressed air becomes larger. In other words, the piston 60 receives sufficient pressure from the compressed air. When the piston 60 begins to move in the X2 direction and the first damper 98 separates from the first holder 58, the compressed air flows directly into the first chamber 86 from the through hole 72 of the first holder 58.

[0054] Meanwhile, the compressed air in the second chamber 128 is discharged by the supply and discharge mechanism. Specifically, the compressed air in the second chamber 128 passes through the second annular clearance 126 formed by the supply and discharge hole 124 of the second damper 116 and flows into the first passage 138 of the flow passage 136. The compressed air moves from the first passage 138 to the second passage 140 and then flows into the second supply and discharge pipe 56b via the second input / output port 54b. As a result, the compressed air in the second chamber 128 is discharged through the second supply and discharge pipe 56b. Consequently, the internal pressure of the second chamber 128 decreases.

[0055] As a result of the internal pressure difference between the first chamber 86 and the second chamber 128, the piston 60 receives pressure from the compressed air in the first chamber 86. As a result, the piston 60 slides. That is, the piston 60 moves toward the second holder 30 located at the X2 side end. As a result, the air cylinder 10 is in the state shown in Figure 7. In Figure 7, the piston 60 is in the second position. This causes the workpiece connected to the piston rod 62 to move, for example. The second position sensor 42b detects the magnetic force of the magnet 92, and it is detected that the piston 60 has reached the second position. The control unit receives the detection signal from the second position sensor 42b and recognizes that the piston 60 has moved to the second position.

[0056] The X2-side end face of the piston 60 abuts against, for example, the third main body portion 118 of the second damper 116. This reduces the impact transmitted from the piston 60 to the second holder 30.

[0057] To return the piston 60 to the state shown in Figure 4, compressed air is sent from the supply and discharge mechanism to the second chamber 128, and compressed air is discharged from the first chamber 86 by the supply and discharge mechanism. The compressed air in the first chamber 86 passes through the inlet / outlet passage 106, inlet / outlet hole 104, through hole 72, guide hole 82, guide path 84, first annular clearance 63, and first input / output port 54a in this order, and flows into the first supply / discharge pipe 56a. As a result, the compressed air in the first chamber 86 is discharged through the first supply / discharge pipe 56a, and the internal pressure of the first chamber 86 decreases.

[0058] The compressed air sent from the supply and discharge mechanism flows through the second supply and discharge pipe 56b, then passes through the second input / output port 54b, the second passage 140, the first passage 138, and the second annular clearance 126 in that order before flowing into the second chamber 128. This increases the internal pressure of the second chamber 128. As a result of the internal pressure difference between the first chamber 86 and the second chamber 128, the piston 60 slides. That is, the piston 60 moves toward the disc portion 17 of the cover member 16 located at the X1 side end and reaches the first position. As a result, the air cylinder 10 returns to the state shown in Figure 4. At this time, the workpiece connected to the piston rod 62 also moves, for example. The first position sensor 42a detects the magnetic force of the magnet 92, and it is detected that the piston 60 has reached the first position. The control unit receives the detection signal from the first position sensor 42a and recognizes that the piston 60 has moved to the first position.

[0059] When the piston 60 moves, the first damper 98 provided in the mounting recess 94 of the piston 60 comes into contact with the X2-side end face of the first engaging end 70 of the first holder 58. This reduces the impact transmitted from the piston 60 to the first holder 58. If the first holder 58 is pushed out in the X1 direction, the holder-side damper 76 provided in the housing recess 71 of the first holder 58 comes into contact with the X2-side end face of the disc portion 17 of the cover member 16. This reduces the impact transmitted from the first holder 58 to the cover member 16.

[0060] As the piston 60 repeatedly moves as described above, the packing 90 attached to the outer circumferential wall of the piston 60 repeatedly slides against the inner circumferential wall of the sleeve 66. Also, the rod seal 134 provided on the second holder 30 repeatedly slides against the piston rod 62. Due to this sliding, the packing 90 and the rod seal 134 wear down. If the packing 90 and the rod seal 134 wear down excessively, compressed air will leak between the first chamber 86 and the second chamber 128, making it difficult to move the piston 60. To avoid this, the packing 90 and the rod seal 134 are replaced with new ones.

[0061] To achieve this, the maintenance worker detaches the cylinder unit 14 from the cylinder housing 12. Specifically, the worker grips the operating portion 146 of the second holder 30 with a tool such as a wrench, spanner, or pliers. In this state, the worker rotates the tool, causing the second threaded portion 32 to rotate relative to the first threaded portion 26. As a result, the screwing of the second threaded portion 32 and the first threaded portion 26 is released. In other words, the cylinder unit 14 is released from the constraint of the cylinder housing 12.

[0062] Next, the operator pulls the operating unit 146, etc., in the X2 direction, as shown in Figure 3. Here, the rod seal 134 provided on the second holder 30 is in close contact with the piston rod 62. The second holder 30 holds the second damper 116 and the sleeve 66, and also holds the first holder 58 via the sleeve 66, and further holds the holder-side damper 76 via the first holder 58. The piston rod 62 holds the piston 60, and the piston 60 holds the first damper 98. Therefore, as the operator pulls the operating unit 146, etc., in the X2 direction, the cylinder unit 14 slides in the X2 direction. As a result, the cylinder unit 14 is removed from the housing chamber 31 of the cylinder housing 12.

[0063] A small clearance is formed between the inner circumferential wall of the housing chamber 31 of the cylinder housing 12 and the outer circumferential wall of the sleeve 66. Therefore, interference between the sleeve 66 and the inner circumferential wall of the housing chamber 31 is avoided. As a result, the operator can easily slide the cylinder unit 14 in the X2 direction and detach it from the cylinder housing 12.

[0064] Thus, according to this embodiment, it is possible to separate the cylinder unit 14 from the cylinder housing 12 while the first pipe joint 50a, the first supply and discharge pipe 56a, the second pipe joint 50b, and the second supply and discharge pipe 56b are connected to the cylinder housing 12. Furthermore, there is no need to remove the first position sensor 42a and the second position sensor 42b from the cylinder housing 12. There is also no need to remove the cables 46a and 46b that electrically connect the first position sensor 42a and the second position sensor 42b to the control unit from the cylinder housing 12. Moreover, there is no particular need to remove the cylinder housing 12 from the equipment.

[0065] As described above, the first position sensor 42a and the second position sensor 42b are entirely housed in the first sensor mounting groove 40a and the second sensor mounting groove 40b, respectively. Therefore, even when the cylinder housing 12 is removed from the equipment, interference between the first position sensor 42a and the second position sensor 42b and any object is avoided. Thus, failure of the first position sensor 42a and the second position sensor 42b due to interference is avoided. In other words, the first position sensor 42a and the second position sensor 42b are protected by mounting the first position sensor 42a in the first sensor mounting groove 40a and the second position sensor 42b in the second sensor mounting groove 40b.

[0066] Next, the worker replaces the cylinder unit 14 with a spare part. Specifically, the worker inserts the spare part, which consists of the holder-side damper 76, the first holder 58, the second holder 30, the second damper 116, the piston rod 62, the piston 60, and the first damper 98 as a single unit, into the housing chamber 31 of the cylinder housing 12. At this time, with the holder-side damper 76 and the first holder 58 facing in the X1 direction, the worker slides the spare part from the X2 direction towards the X1 direction. This sliding is also easy because interference between the sleeve 66 and the inner circumferential wall of the housing chamber 31 is avoided.

[0067] The worker then inserts a tool such as a wrench, spanner, or pliers into the operating portion 146 of the second holder 30. In this state, the worker rotates the tool, causing the second threaded portion 32 to screw into the first threaded portion 26. This connects (restrains) the cylinder unit 14 to the cylinder housing 12. Thus, in this embodiment, the second opening 15b of the cylinder housing 12 becomes the mounting portion for the cylinder unit 14. In other words, there is no need to attach the cylinder unit 14 to the cylinder housing 12 via any other member. For this reason, there is no need to attach or detach any member when attaching or detaching the cylinder unit 14 to or from the cylinder housing 12.

[0068] During the process of detaching the cylinder unit 14 from the cylinder housing 12 and the process of assembling the spare parts into the cylinder housing 12, the first position sensor 42a and the second position sensor 42b remain attached to the cylinder housing 12. Therefore, after the spare parts are placed in the storage chamber 31, the positions of the first position sensor 42a or the second position sensor 42b and the piston 60 are aligned. Consequently, there is no particular need to perform alignment work between the first position sensor 42a or the second position sensor 42b and the piston 60. Furthermore, there is no particular need to remove the cables 46a and 46b from the first position sensor 42a and the second position sensor 42b. For these reasons, maintenance work is simplified.

[0069] When a spare part is inserted into the storage chamber 31, a first annular clearance 63 is formed between the first holder 58 and the X2-side end face of the disc portion 17 of the cover member 16. Here, a holder-side damper 76 is held in the storage recess 71 of the first holder 58. Here, a part of the holder-side damper 76 protrudes from the storage recess 71 toward the disc portion 17. Therefore, the part of the holder-side damper 76 that protrudes from the storage recess 71 abuts against the X2-side end face of the disc portion 17. As a result, there is a slight gap between the first holder 58 and the disc portion 17. This gap ensures that the first annular clearance 63 is reliably formed.

[0070] In this embodiment, the first threaded portion 26 and the second threaded portion 32 are screwed together. As a result, the cylinder unit 14 is positioned and fixed relative to the cylinder housing 12. In other words, displacement of the cylinder unit 14 along the axial direction (X direction) of the cylinder housing 12 is avoided. For this reason, for example, the first holder 58 is prevented from moving to a position that blocks the first input / output port 54a. Also, since the first holder 58 stops at a predetermined position in the X direction, the first annular clearance 63 is reliably formed.

[0071] Furthermore, the screwing of the first threaded portion 26 and the second threaded portion 32 prevents the piston rod 62 from shifting in the Z direction. That is, the axis of the sleeve 66 (axis of the piston chamber 68), the axis of the insertion hole 130, the axis of the piston rod 62, and the axis of the piston 60 are precisely aligned. Therefore, for example, it is prevented that the axis of the piston rod 62 is inclined with respect to the axis of the insertion hole 130, and that the piston 60 is inclined with respect to the axis of the piston chamber 68. For this reason, by connecting the workpiece to the connecting hole 148, the workpiece and the piston rod 62 are aligned. This allows the workpiece to be attached to the piston rod 62 in a predetermined position. In this state, the workpiece moves integrally with the piston rod 62 as the piston rod 62 moves. That is, the workpiece can be moved along a predetermined movement trajectory that has been set in advance.

[0072] Subsequently, the user operates the air cylinder 10 assembled with spare parts. In this case as well, the air cylinder 10 operates in the same manner as described above. Thus, according to this embodiment, maintenance of the air cylinder 10 can be completed by replacing the cylinder unit 14 with a spare part. In other words, by using spare parts, maintenance of the air cylinder 10 can be performed easily and quickly. Therefore, the downtime of the equipment incorporating the air cylinder 10 can be reduced.

[0073] Furthermore, according to this embodiment, when performing maintenance on the cylinder unit 14, it is not necessary to remove the first pipe joint 50a, the first supply and discharge pipe 56a, the second pipe joint 50b, the second supply and discharge pipe 56b, the first position sensor 42a, the second position sensor 42b, and the cables 46a, 46b, etc. from the cylinder housing 12. As a result, the maintenance work process is reduced. Also, the maintenance work is simplified. In other words, it is easy to perform maintenance on the air cylinder 10.

[0074] Furthermore, it is also possible to perform maintenance on the cylinder unit 14 after removing it from the cylinder housing 12. In this case, the worker disassembles the cylinder unit 14. For example, the worker detaches the second engaging end 110 of the second holder 30 from the sleeve 66. As a result, the second holder 30, piston rod 62, and piston 60 are removed from the sleeve 66. The worker then removes the piston rod 62 from the insertion hole 130. This detaches the second holder 30 from the piston rod 62. The worker then detaches the second damper 116 from the engaging recess 112.

[0075] As a result, the packing 90 and rod seal 134 are ready for replacement. The worker replaces the packing 90 and rod seal 134 with new ones. If necessary, the worker replaces the second damper 116, the second unit seal 144, or the first damper 98 with new ones. It is also possible to replace the holder-side damper 76 and the first unit seal 65 with new ones. The worker then assembles the cylinder unit 14 in the reverse order of the above procedure. When it is time for maintenance of the spare parts, the worker replaces the spare parts with the maintained cylinder unit 14 in the same manner as above.

[0076] As described above, this embodiment discloses a fluid pressure cylinder comprising a cylinder housing (12) having a housing chamber (31) formed therein, and a cylinder unit (14) that is detachably housed in the housing chamber, wherein the cylinder housing has a first fixing means and position sensors (42a, 42b), the cylinder unit has a piston (60) pressed by a pressurized fluid, a piston rod (62) on which the piston is provided, a sleeve (66) having a piston chamber (68) formed inside on which the piston slides, a first holder (58) that holds one end of the sleeve, a second holder (30) that holds the other end of the sleeve, and a second fixing means that can engage with the first fixing means, an insertion hole (130) through which the piston rod is inserted is formed in at least one of the first holder or the second holder, and the cylinder unit is detachably connected to the cylinder housing by the engagement of the first fixing means with the second fixing means, and the position of the position sensor matches the position of the piston.

[0077] A fluid pressure cylinder comprises a cylinder unit in which the piston, piston rod, and other components are assembled integrally. This cylinder unit is removably housed in a chamber within the cylinder housing. Therefore, when it is time for maintenance of the cylinder unit, for example, it can be replaced with a spare part. This makes it possible to restart the fluid pressure cylinder.

[0078] As can be seen from this, in this embodiment, when replacing the cylinder unit with a spare, there is no particular need to remove the cylinder housing from the equipment. Nor is there any particular need to remove the position sensor and the wiring connected to the position sensor from the cylinder housing. In other words, the work required when performing maintenance on a fluid pressure cylinder is typically only the replacement of the cylinder unit with a spare. For these reasons, the maintenance work process is reduced and the work is simplified. In other words, according to this embodiment, maintenance on the fluid pressure cylinder can be performed easily and quickly. As a result, the downtime of the equipment is reduced.

[0079] Furthermore, the cylinder unit and the cylinder housing are connected based on the engagement of the first fixing means and the second fixing means. Therefore, it is easy to connect the cylinder unit and the cylinder housing. Also, the connection between the cylinder unit and the cylinder housing can be released by releasing the engagement of the first fixing means and the second fixing means. Thus, with the above-described configuration, the cylinder unit can be easily attached to and detached from the cylinder housing.

[0080] In addition, the mounting position of the position sensor on the cylinder housing is the same before and after removing the cylinder unit from the cylinder housing. Therefore, by inserting and installing the cylinder unit into the cylinder housing, the piston is positioned in a predetermined location and aligns with the position sensor. In other words, the piston and the position sensor are aligned. In this way, even when the operator cannot visually inspect the piston, it is easy to align the piston and the position sensor.

[0081] This embodiment discloses a fluid pressure cylinder in which the first fixing means is a first threaded portion (26) formed on the inner circumferential wall forming the housing chamber of the cylinder housing, and the second fixing means is a second threaded portion (32) formed on the outer circumferential wall of the cylinder unit, and the first threaded portion is screwed into the second threaded portion.

[0082] In this configuration, the cylinder unit and the cylinder housing are connected via a first threaded portion and a second threaded portion. Therefore, it is easy to disconnect the cylinder unit from the cylinder housing by rotating the cylinder unit relative to the cylinder housing. Similarly, it is easy to connect the cylinder unit to the cylinder housing. In other words, this configuration allows for easy attachment and detachment of the cylinder unit from the cylinder housing.

[0083] Moreover, in this case, the cylinder unit is sufficiently positioned and fixed relative to the cylinder housing. This ensures, for example, a path for compressed air. Furthermore, it prevents the piston rod and piston from moving eccentrically relative to the piston chamber. As a result, it is possible to move the workpiece integrally with the piston rod while maintaining a predetermined orientation relative to the piston rod.

[0084] This embodiment discloses a fluid pressure cylinder in which a through hole (72) is formed in the first holder, and the pressurized fluid flows through the through hole to reach the piston.

[0085] In this way, by providing a through hole in the first holder, pressurized fluid can be supplied to the piston housed inside the sleeve. Alternatively, the pressurized fluid pushed by the piston can be discharged to the outside of the sleeve through the through hole. In other words, by providing a through hole in the first holder, the piston can be moved easily.

[0086] This embodiment discloses a fluid pressure cylinder in which the cylinder housing has a closing portion (16) that closes one axial end of the housing chamber, an annular clearance (63) is formed between the first holder and the closing portion, and the pressurized fluid that presses the piston flows from the clearance into the through hole.

[0087] In this case, one axial end of the housing chamber of the cylinder housing is closed off by the closing portion. In this configuration, it is preferable to form a clearance between the first holder and the closing portion that communicates with the through hole. This allows pressurized fluid to be supplied to and discharged from the piston housed inside the sleeve through the clearance and the through hole. In other words, even in this configuration, the piston can be easily moved.

[0088] This embodiment discloses a fluid pressure cylinder in which an annular elastic member (76) is provided between the first holder and the closing portion, and the elastic member has a hollow portion that serves as a guide hole (82) for guiding the pressurized fluid, which communicates with the piston chamber through the through hole of the first holder, and a guide passage (84) that connects the clearance and the hollow portion.

[0089] When the piston moves toward the first holder, it may come into contact with the first holder. In this case, the first holder may be pushed out by the piston and come into contact with the closure. By providing an elastic member in the first holder, the impact when the first holder comes into contact with the closure is mitigated.

[0090] In this case, it is preferable to form guide channels and guide holes in the elastic member. With this configuration, even when the elastic member is in contact with the closure, it is possible to supply pressurized fluid from the clearance through the guide channels to the guide holes. The pressurized fluid passes through the through holes of the first holder and comes into contact with the piston. Thus, based on the formation of guide channels and guide holes in the elastic member, it is possible to supply pressurized fluid to the piston even when the elastic member is in contact with the closure.

[0091] This embodiment discloses a fluid pressure cylinder in which the elastic member has an end face (77) that abuts against the closing portion, and the guide path is a groove formed on the end face.

[0092] By forming the guide channel as a groove on the end face of the elastic member, blockage of the guide channel is avoided even when the end face is in contact with the closed portion. Therefore, it is possible to deliver pressurized fluid to the passage hole via the guide channel.

[0093] This embodiment discloses a fluid pressure cylinder in which a first chamber (86) is formed between the piston and the first holder, the piston has an annular damper (98) facing the first holder, the damper has an inlet / outlet hole (104) facing the through hole in the axial direction of the cylinder unit through which the pressurized fluid flows, and an inlet / outlet passage (106) connecting the inlet / outlet hole and the first chamber.

[0094] As described above, when the piston moves toward the first holder, it may come into contact with the first holder. By providing a damper on the piston, the impact when the piston comes into contact with the first holder is mitigated.

[0095] In this case, it is preferable to form an inlet / outlet passage and an inlet / outlet hole in the damper. With this configuration, even when the damper is in contact with the first holder, the pressurized fluid that has passed through the through hole of the first holder can be received in the inlet / outlet hole. Furthermore, the pressurized fluid received in the inlet / outlet hole can be sent to the first chamber via the inlet / outlet passage. As a result, the pressurized fluid comes into contact with the piston in the inlet / outlet hole and the first chamber.

[0096] In other words, with this configuration, the pressurized fluid comes into contact with the piston in both the inlet / outlet holes and the first chamber. In this case, the contact area of ​​the pressurized fluid with the piston is larger compared to when it contacts the piston only in the inlet / outlet holes. Therefore, the piston can be moved more easily.

[0097] In one specific embodiment, a second fixing means and an insertion hole are formed in the second holder. That is, this embodiment discloses a fluid pressure cylinder in which the cylinder housing has a closing portion (16) that closes one axial end of the housing chamber, the second holder closes the other axial end of the housing chamber, and the second fixing means and the insertion hole are formed in the second holder.

[0098] In this way, a single-rod cylinder can be constructed. Furthermore, since the first threaded portion is located at one end of the cylinder housing and the second threaded portion is located at one end of the cylinder unit, it is easy to screw the first threaded portion relative to the second threaded portion.

[0099] This embodiment discloses a fluid pressure cylinder in which the second holder has a damper (116) that abuts against the piston and a flow passage (136) through which the pressurized fluid flows, and the damper has a supply / discharge hole (124) that communicates with the flow passage.

[0100] In this case, pressurized fluid can be supplied to or discharged from the piston chamber through the supply and discharge holes and flow passages. Therefore, the formation of a flow path for the pressurized fluid in the sleeve is avoided.

[0101] This embodiment discloses a fluid pressure cylinder in which the cylinder housing includes a first pipe fitting (50a) connected to a first supply and discharge pipe (56a) for supplying and discharging pressurized fluid, a first mounting hole (52a) for attaching the first pipe fitting, a second pipe fitting (50b) connected to a second supply and discharge pipe (56b) for supplying and discharging pressurized fluid, and a second mounting hole (52b) for attaching the second pipe fitting.

[0102] In this case, the cylinder unit can be separated from the cylinder housing while the first and second pipe fittings are attached to the cylinder housing. When performing maintenance on the cylinder unit, it is not necessary to remove the first pipe fitting, the first supply and exhaust pipe, the second pipe fitting, and the second supply and exhaust pipe from the cylinder housing. Therefore, maintenance on the fluid pressure cylinder can be performed more easily.

[0103] This embodiment discloses a fluid pressure cylinder in which the cylinder housing has sensor mounting grooves (40a, 40b) on which the position sensor is mounted.

[0104] In this case, the position sensor is housed in the sensor mounting groove. Therefore, for example, when performing maintenance on a fluid pressure cylinder, interference between the position sensor and any object is avoided. In other words, the position sensor is protected.

[0105] Furthermore, the present invention is not limited to the disclosure described above, and can take various configurations without departing from the spirit of the invention. [Explanation of Symbols]

[0106] 10...Air cylinder 12...Cylinder housing 14...Cylinder unit 16...Cover component 26...First threaded section 30...Second holder 31...Containment chamber 32...Second threaded section 40a...First sensor mounting groove 40b...Second sensor mounting groove 42a...First position sensor 42b...Second position sensor 50a...First pipe joint 50b...Second pipe joint 52a…First mounting hole 52b…Second mounting hole 54a...First input / output port 54b...Second input / output port 56a...First supply / discharge pipe 56b...Second supply / discharge pipe 58...First holder 60...Piston 62...Piston rod 63...First ring clearance 65...First unit seal 66...Sleeve 68...Piston chamber 70...First engagement end 72...Through hole 76...Holder-side damper 82... Guide hole 84... Guide path 86...First chamber 90...Packing 92...Magnet 98...First damper 104…Entry / exit hole 106…Entrance / exit route 110...Second engaging end 116...Second damper 124…Supply / discharge hole 126...Second ring clearance 128...Second chamber 130... Through hole 134... Rod seal 136...Distribution passage 138...First passage 140...Second aisle 144...Second unit seal 146...Operation unit

Claims

1. A cylinder housing (12) in which a containment chamber (31) is formed, A cylinder unit (14) is housed in the aforementioned housing chamber in a manner that allows for insertion and removal, Equipped with, The cylinder housing has a first fixing means and position sensors (42a, 42b), The cylinder unit includes a piston (60) that is pressed by a pressurized fluid, The piston rod (62) on which the piston is provided, A sleeve (66) having a piston chamber (68) in which the piston slides, A first holder (58) that holds one end of the sleeve, A second holder (30) that holds the other end of the sleeve, A second fixing means that can engage with the first fixing means, It has, An insertion hole (130) through which the piston rod is inserted is formed in at least one of the first holder or the second holder. A fluid pressure cylinder (10) wherein the cylinder unit is detachably connected to the cylinder housing by the engagement of the first fixing means with the second fixing means, and the position of the position sensor aligns with the position of the piston.

2. A fluid pressure cylinder according to claim 1, wherein the first fixing means is a first threaded portion (26) formed on the inner circumferential wall forming the housing chamber of the cylinder housing, and the second fixing means is a second threaded portion (32) formed on the outer circumferential wall of the cylinder unit, wherein the first threaded portion is screwed into the second threaded portion.

3. In the fluid pressure cylinder according to claim 1, a through hole (72) is formed in the first holder, The pressurized fluid flows through the passage hole and reaches the piston in the fluid pressure cylinder.

4. In the fluid pressure cylinder according to claim 3, the cylinder housing has a closing portion (16) that closes one end of the housing chamber in the axial direction, An annular clearance (63) is formed between the first holder and the closing portion. The pressure fluid that presses the piston flows into the through hole from the clearance in the fluid pressure cylinder.

5. In the fluid pressure cylinder according to claim 4, an annular elastic member (76) is provided between the first holder and the closing portion. The elastic member has a hollow portion serving as a guide hole (82) that communicates with the piston chamber through the through hole of the first holder and guides the pressurized fluid, and a guide passage (84) that connects the clearance and the hollow portion, in a fluid pressure cylinder.

6. A fluid pressure cylinder according to claim 5, wherein the elastic member has an end face (77) that contacts the closing portion, and the guide path is a groove formed on the end face.

7. In the fluid pressure cylinder according to claim 3, a first chamber (86) is formed between the piston and the first holder, and the piston has an annular damper (98) facing the first holder. The damper is a fluid pressure cylinder having an inlet / outlet hole (104) facing the through hole in the axial direction of the cylinder unit through which the pressurized fluid flows, and an inlet / outlet passage (106) connecting the inlet / outlet hole to the first chamber.

8. In the fluid pressure cylinder according to claim 1, the cylinder housing has a closing portion (16) that closes one end of the housing chamber in the axial direction, A fluid pressure cylinder wherein the second holder closes the other axial end of the housing chamber, and the second fixing means and the insertion hole are formed in the second holder.

9. In the fluid pressure cylinder according to claim 8, the second holder has a damper (116) that contacts the piston and a flow passage (136) through which the pressurized fluid flows, The damper is a fluid pressure cylinder having a supply / discharge hole (124) that communicates with the flow passage.

10. In the fluid pressure cylinder according to claim 1, the cylinder housing includes a first pipe joint (50a) connected to a first supply / discharge pipe (56a) for supplying and discharging pressurized fluid, The first mounting hole (52a) for attaching the first pipe fitting, A second pipe joint (50b) connected to a second supply / discharge pipe (56b) for supplying and discharging the pressurized fluid, The second mounting hole (52b) for attaching the second pipe fitting, A fluid pressure cylinder having

11. A fluid pressure cylinder according to any one of claims 1 to 10, wherein the cylinder housing has sensor mounting grooves (40a, 40b) on which the position sensor is mounted.

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