Laser processing equipment

Abstract

To provide a laser processing device in which, no fume and dust are adhered to a laser head, and which can maintain performance of laser and directivity of the laser.SOLUTION: A laser processing device 1 comprises: a laser head 2 for radiating laser beam L; a protection part 5 which is provided on a housing 4 which seals a processing object W, the protection part passing the laser beam L; and a reception part 6 which is arranged on the housing 4 coaxially to the protection part 5. The protection part 5 comprises: a protection window 8 which is arranged in a protection part casing 7 for making the laser light L enter into the housing 4, and which passes the laser light L; a coating layer 9 formed on a surface of the protection window 8; a gas channel 12 for supplying compressed air or a cooling gas to the surface of the coating layer 9; and an assist gas nozzle 13 arranged in the housing 4, and supplying an assist gas.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a laser processing apparatus.

Background Art

[0002] Conventionally, in the disassembly work of reactor components in the nuclear field and the work of buildings (for example, column members such as concrete and metal) in the general field, since a large amount of energy is required for the work itself, processing using laser light is often performed.

[0003] As a laser cutting system, for example, there is known one having a laser cutting unit (laser head), a laser output device, equipment attached to the laser cutting unit, a damper unit, equipment attached to the damper, a dustproof unit, a dust collection unit, a moving unit, a temporary storage container, a control device, a gantry, and a container unit (see, for example, Patent Document 1).

[0004] The laser cutting system described in Patent Document 1 is characterized by using a dustproof unit and a dust collection unit to suck and collect fumes and dust generated during the cutting of the cutting object, thereby improving the working environment and receiving laser light attenuated by a water curtain.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] The laser cutting system described in Patent Document 1 can use a dust-proof unit and a dust collection unit to suck up and collect fumes and dust generated by cutting the object to be cut. However, fumes and dust that cannot be sucked up may adhere to the laser cutting unit. If foreign matter such as fumes and dust accumulates in the laser cutting unit, it may adversely affect the processing accuracy of the object to be cut (workpiece).

[0007] Furthermore, simply shielding the laser head with glass or similar material could potentially reduce the performance and directivity of the laser beam, so it was necessary to improve the mechanism around the laser cutting unit.

[0008] The present invention aims to provide a laser processing apparatus that prevents fumes and dust from adhering to the laser head and maintains the performance and directivity of the laser beam. [Means for solving the problem]

[0009] To solve the aforementioned problems, the laser processing apparatus according to the present invention comprises a laser head that irradiates laser light, a protective part arranged in a housing that encloses the workpiece and through which the laser light passes, and a receiving part arranged in the housing coaxially with the protective part. A workpiece gripping section that grips the workpiece from the upper part of the housing, The protective unit comprises a protective window disposed within a protective unit casing into which the laser light is incident, a coating layer formed on the surface of the protective window, a gas channel for supplying compressed air or cooling gas to the surface of the coating layer, and an assist gas nozzle disposed within the housing for supplying assist gas. Furthermore, the laser processing apparatus according to the present invention comprises a laser head that irradiates laser light, a protective unit disposed in a housing that seals a workpiece and through which the laser light passes, and a receiving unit disposed in the housing coaxially with the protective unit, wherein the protective unit comprises a protective window disposed in a protective unit casing through which the laser light is incident into the housing, a coating layer formed on the surface of the protective window, a gas passage for supplying compressed air or cooling gas to the surface of the coating layer, an assist gas nozzle disposed in the housing and for supplying assist gas, and the protective unit comprises a protective cover inside the housing, wherein the protective cover comprises a circulation nozzle for injecting compressed air or cooling gas to circulate within the protective cover . Furthermore, the laser processing apparatus according to the present invention comprises a laser head for irradiating laser light, a protective unit disposed in a housing that seals a workpiece and allows the laser light to pass through, and a receiving unit disposed in the housing coaxially with the protective unit, wherein the protective unit comprises a protective window disposed in a protective unit casing into which the laser light is incident and allows the laser light to pass through, a coating layer formed on the surface of the protective window, a gas passage for supplying compressed air or cooling gas to the surface of the coating layer, an assist gas nozzle disposed in the housing and supplying assist gas, and the protective unit comprises a protective cover inside the housing, wherein the protective cover comprises an atmosphere-dividing nozzle for forming an air curtain inside the protective cover. Furthermore, the laser processing apparatus according to the present invention comprises a laser head that irradiates laser light, a protective part arranged in a housing that seals a workpiece and through which the laser light passes, and a receiving part arranged in the housing coaxially with the protective part, wherein the protective part comprises a protective window arranged in a protective part casing through which the laser light is incident into the housing and through which the laser light passes, a coating layer formed on the surface of the protective window, a gas passage for supplying compressed air or cooling gas to the surface of the coating layer, an assist gas nozzle arranged in the housing and for supplying assist gas, and the protective part comprises a protective cover inside the housing, wherein the protective cover comprises a purging nozzle that sprays an intrusion prevention gas to suppress the intrusion of substances such as fumes and dross into the protective cover, and an exhaust nozzle that sprays an extrusion gas to push out foreign substances such as fumes and dross that have entered the protective cover. [Effects of the Invention]

[0010] According to the laser processing apparatus of the present invention, fumes and dust do not adhere to the laser head, and the performance and directivity of the laser beam can be maintained. Furthermore, by using assist gases such as compressed air, cooling gas, and inert gas, the processing accuracy of the workpiece can be improved. Furthermore, by positioning the laser head outside the enclosure that encloses the workpiece, maintenance can be easily performed in the event of a laser head malfunction or other issues. [Brief explanation of the drawing]

[0011] [Figure 1] A schematic perspective view of the laser processing apparatus of this embodiment. [Figure 2] A schematic cross-sectional view of the laser processing apparatus of this embodiment. [Figure 3] A schematic cross-sectional view of the main part of the lifting mechanism of this embodiment. [Figure 4] A schematic perspective view of the lifting mechanism and Y-axis movement section of this embodiment. [Figure 5] A schematic perspective view of the lifting mechanism and X-axis movement section of this embodiment. [Figure 6] A schematic perspective view of the main parts showing a first modified example of the laser processing apparatus of this embodiment. [Figure 7] A schematic perspective view of the main parts showing a first modified example of the laser processing apparatus of this embodiment. [Figure 8] A schematic cross-sectional view of the main part showing a first modified example of the laser processing apparatus of this embodiment. [Figure 9] This diagram shows a second modified example of the laser processing apparatus of this embodiment. [Figure 10] This diagram shows a third modified example of the laser processing apparatus of this embodiment. [Figure 11] This diagram shows a fourth modified example of the laser processing apparatus of this embodiment. [Modes for carrying out the invention]

[0012] Hereinafter, the laser processing apparatus 1 according to an embodiment of the present invention will be described with reference to the drawings as appropriate. The same reference numerals are assigned to the same components, and redundant descriptions are omitted. For the sake of convenience, the side of the laser head 2 shown in FIG. 1 is referred to as "front", the side of the housing 4 is referred to as "rear", the vertically upward side is referred to as "up", the vertically downward side is referred to as "down", and the direction in which the X-axis moving part 18 extends is referred to as "left" and "right" as appropriate.

[0013] <<Configuration of Laser Processing Apparatus>> As shown in FIG. 1 or FIG. 2, the laser processing apparatus 1 is an apparatus that laser-processes a workpiece W with the laser beam L irradiated from the laser head 2. The laser processing apparatus 1 mainly includes a laser head 2 that irradiates the laser beam L, a protection part 5 that allows the laser beam L to pass through, a receiving part 6 that is arranged on the housing 4 coaxially with the protection part 5, and a collecting part 24 that collects chips and the like generated during laser processing. As shown in FIG. 1, in addition, the laser processing apparatus 1 has a lifting mechanism 15, an X-axis moving part 18, and a Y-axis moving part 21 in order to move the laser head 2 in the XYZ-axis directions (vertical, front-back, and left-right directions).

[0014] Note that the apparatus for moving the laser head 2 of the laser processing apparatus 1 only needs to include at least any one of the lifting mechanism 15, the X-axis moving part 18, and the Y-axis moving part 21. Hereinafter, as an example of the laser processing apparatus 1, the case where it has the lifting mechanism 15, the X-axis moving part 18, and the Y-axis moving part 21 will be described as an example.

[0015] <<Configuration of Laser Head>> As shown in FIG. 1, the laser head 2 is an apparatus that irradiates the laser beam L supplied from the laser oscillator 3 to the workpiece W. The laser head 2 is attached to the side surface of the lifting plate 16b of the lifting mechanism 15 described later. As the laser beam L, a fiber laser, a YAG laser, or the like is used. The laser beam L may be appropriately changed to a continuous wave, a pulse wave, or the like according to the workpiece W and the processing environment.

[0016] <<Configuration of Housing>> As shown in Figure 2, the housing 4 is a polygonal or cylindrical box that houses the workpiece W in a shielded state. When the housing 4 is filled with gas as the internal environment for processing the workpiece W, it is preferable to use a highly shielding material for the housing 4 and to have a sealed structure without gaps so that the gas does not leak out of the housing 4.

[0017] <Structure of the protective section> The protective unit 5 is designed to allow the laser beam L emitted from the laser head 2 to pass through and irradiate the workpiece W with the laser beam L. The protective unit 5 is located on the front exterior of the housing 4. By positioning the protective unit 5, the laser processing apparatus 1 can prevent fumes, dust, dross, etc. generated from the workpiece W during laser processing from adhering to the laser head 2 by separating the space between the laser head 2 and the workpiece W.

[0018] The protective unit 5 includes a protective unit casing 7 (a first protective unit casing 7a and a second protective unit casing 7b), a protective window 8, a coating layer 9, a protective cover 10, a cooling water passage 11, a gas passage 12, and an assist gas nozzle 13.

[0019] <Protective casing configuration> As shown in Figure 2, the protective casing 7 is a cylindrical metal casing into which the laser beam L is injected. The protective casing 7 is composed of a first protective casing 7a and a second protective casing 7b. The first protective casing 7a and the second protective casing 7b are fixed to each other with a protective window 8 in between. The second protective casing 7b is fixed to the housing 4 while ensuring airtightness to prevent gas from leaking out of the housing 4.

[0020] <Structure of protective window> The protective window 8 is formed of a transparent material such as glass that allows the laser beam L to pass through. The protective window 8 is selected and used to irradiate the laser beam L with a focal length appropriate to the size and position of the workpiece W. The protective window 8 is located within a protective casing 7 installed on the front side of the housing 4. Therefore, the protective window 8 maximizes the effectiveness of the laser beam L by separating the space inside the housing 4, which is the processing area of ​​the workpiece W, from the space where the laser beam L is generated. For example, fused silica can be used as the transparent material for the protective window 8. By using fused silica, the protective window 8 can achieve effects such as focusing the laser beam L and anti-reflection. In addition, a coating layer 9 is formed on the surface of the protective window 8. In this specification, the coating layer 9 is formed on only one side of the protective window 8, but it can also be formed on one side (front or back) or both sides (including the entire surface).

[0021] <Protective cover configuration> As shown in Figure 2, the protective cover 10 is a cover fixed inside the second protective casing 7b. The protective cover 10 prevents foreign matter such as fumes, dross, and other scattered materials generated from the workpiece W when irradiated with laser light L from adhering to the protective window 8. As a result, the protective cover 10 can maintain the performance of the laser light L. The protective cover 10 consists of a cylindrical member, similar in shape to the protective window 8, and is installed on the inner wall of the second protective casing side inside the housing 4, positioned to surround the laser light L up to the vicinity of the workpiece W.

[0022] <Configuration of the cooling water flow path> The cooling water channel 11 is a cooling water supply path that mitigates the temperature rise of the protective window 8 caused by the irradiation of laser light L by flowing cooling water supplied from the cooling water supply source Q around the protective window 8. The cooling water channel 11 is formed from the outside to the inner circumferential surface of the first protective casing 7a. The cooling water channel 11 can be used to supply cooling water as needed, such as before or during processing of the workpiece W, to achieve optimal processing conditions.

[0023] <Gas flow path configuration> The gas passage 12 is a gas supply passage for supplying various gases to the surface of the coating layer 9. Compressed air, cooling gas, inert gas, etc., can be used as the gas. When using compressed air or inert gas, the passage is configured as a compressed gas passage or an inert gas passage, and materials that can maintain airtightness are used. Furthermore, when using cooling gas, the passage is configured as a cooling gas passage, and materials that can maintain cooling performance are used. The gas passage 12 comprises at least one of a first gas passage 12a formed in the first protective casing 7a and a second gas passage 12b formed in the second protective casing 7b. Furthermore, the gas passage 12 (first gas passage 12a, second gas passage 12b) can be positioned where gas can be injected onto the surface (including cooling the protective window 8 and indirectly cooling the coating layer 9) or side of the coating layer 9. The gas passage 12 is connected, for example, to an assist gas supply source A. Note that the gas supplied to the first gas passage 12a may be a gas other than the assist gas.

[0024] Furthermore, although this embodiment illustrates the case where the gas and the assist gas are the same, it goes without saying that it also includes configurations where the gas and the assist gas are supplied from separate sources. Regarding the gas and assist gas, the gas can be appropriately selected based on the effects and countermeasures suitable for processing the workpiece W, such as avoiding temperature rise in the workpiece W and inside the housing 4 by using a cooling gas, removing foreign matter such as dross by using an assist gas, and preventing oxidation of the workpiece W by using an inert gas. Furthermore, the first gas passage 12a formed in the first protective casing 7a and the second gas passage 12b formed in the second protective casing 7b do not necessarily need to use the same cooling gas; gases can be supplied from separate sources. Moreover, it goes without saying that not only gases such as nitrogen, argon, and helium can be used, but also air, compressed air, and the like. In particular, when the temperature rise inside the enclosure 4 or the workpiece W is small, it can be replaced by air purging or the like.

[0025] By forming the gas passage 12 in the first protective casing 7a, gas supplied directly from the assist gas supply source A can be injected into the protective window 8 from around the protective window 8, thereby removing dust and other debris adhering to the vicinity of the protective window 8.

[0026] Furthermore, when the gas channel 12 is formed in the second protective casing 7b, the cooling gas supplied from the assist gas supply source A is supplied to the surface of the coating layer 9, thereby maintaining the characteristics and directivity of the laser beam L irradiated from the laser head 2 to the greatest extent possible. When formed in the second protective casing 7b, the cooling gas also has the effect of preventing foreign matter such as fumes, dust, and dross from adhering to the surface of the protective window 8. As the gas, an inert gas such as nitrogen, argon, or helium, or a gas other than an inert gas (including air, etc.) may be used as appropriate. The gas and the assist gas may be the same medium, or they may be different mediums.

[0027] As described above, the gas supplied from the gas flow path 12 may be changed as appropriate. As an example, the following explanation will describe the case in which an inert gas is supplied from the assist gas supply source A.

[0028] <Configuration of the assist gas nozzle> As shown in Figure 2, the assist gas nozzle 13 is a nozzle used to perform appropriate processing on the workpiece W by pre-filling the housing 4 with an inert gas or the like, or to blow away foreign matter such as molten metal or attached dross by injecting assist gas. The assist gas nozzle 13 is installed on the inner wall above the protective cover 10 inside the housing 4, with its nozzle facing the workpiece W.

[0029] The assist gas nozzle 13 may be made movable by providing X-axis and Y-axis movement mechanisms, similar to the movement mechanism of the laser head 2 described later. The assist gas nozzle 13 can appropriately select compressed gas, cooling gas, inert gas, etc., and by employing a flat nozzle, multi-stage nozzle, or multiple nozzles, the assist gas can be blown linearly or according to the processing shape without providing an X-axis or Y-axis movement mechanism within the housing 4. In addition to blowing compressed gas, cooling gas, and inert gas individually, it is also possible to blow multiple fluids simultaneously or with a time difference using multiple nozzles, such as compressed gas and cooling gas, or compressed gas and inert gas. As a result, the assist gas nozzle 13 can be applied to environments where it is difficult to ensure lubrication of the movement mechanism and the lifespan of the mechanism, such as high-temperature environments, high-radiation environments, and steam environments.

[0030] <Configuration of the receiving part> The receiving portion 6 is positioned coaxially with the protective portion 5 and is the part that receives the laser beam L that comes perpendicular to the workpiece W after it has been processed. The receiving portion 6 is located on the outer rear surface of the housing 4. The receiving portion 6 has a laser absorber 14 that absorbs the laser beam L so that it is not emitted to the outside.

[0031] <Configuration of the collection unit> As shown in Figure 2, the recovery unit 24 is for recovering chips, dross, and other debris generated after the workpiece W is processed by the laser beam L emitted from the laser head 2. The recovery unit 24 consists of a box-shaped member that is larger than the diameter of the workpiece W. The recovery unit 24 is provided with a tapered, widened edge 24a around its perimeter to prevent bouncing after falling and to ensure ease of storage.

[0032] <Configuration of the workpiece gripping section> The workpiece gripping unit 26 is a gripping device for gripping the workpiece W. The workpiece gripping unit 26 is fixed to the ceiling of the housing 4 and is configured to grip the workpiece W from above. The workpiece gripping section 26 only needs to be capable of gripping the workpiece W, and may be of a type in which a commercially available gripping tool is attached to the tip, or a type in which it is fixed with bolts and screws, and may be modified as appropriate.

[0033] <Configuration of the workpiece rotation unit> The workpiece rotation unit 28 is a device for rotating the workpiece W to change the orientation of the workpiece. The workpiece rotation unit 28 is configured with a motor (not shown) as its drive source, which rotates the workpiece gripping unit 26 that grips the workpiece W. The workpiece rotation unit 28 is installed on top of the workpiece gripping unit 26. When the motor (not shown) is driven, the drive shaft connected to the motor (not shown) rotates, and the rotation of the drive shaft is transmitted to the workpiece W, thereby rotating the workpiece W. Note that the workpiece rotation unit 28 may be omitted if machining is possible by moving the laser head 2 in the XYZ axis directions (up and down, front and back, left and right directions).

[0034] <Configuration of the lifting mechanism> As shown in Figures 1 and 4, the lifting mechanism 15 is a lifting device for raising and lowering the laser head 2 in the Z-axis direction (vertical direction). The lifting mechanism 15 includes a lifting body 16, a lifting guide 16a, a lifting plate 16b, a lifting ball screw 17a, a lifting nut 17b, and a lifting motor M1.

[0035] As shown in Figure 3, the lifting body 16 is a frame-shaped member formed in an inverted concave shape when viewed from the front. The lifting body 16 is erected on the base 19a. The lifting guide 16a is a pair of front and rear guides for moving the lifting plate 16b, which is moved by the lifting motor M1, up and down in the vertical direction. The lifting guide 16a is provided on the right surface of the support column of the lifting body 16, which extends vertically upward from the left and right ends on the base 19a.

[0036] The lifting plate 16b is a plate-shaped member that is provided so as to be vertically movable on a pair of front and rear lifting guides 16a. As shown in FIG. 4, a Y-axis movement guide 22 extending in the front-rear direction and a Y-axis movement motor M3 are provided at the upper and lower central portions of the right surface of the lifting plate 16b. The laser head 2 is provided on the Y-axis movement guide 22 so as to be movable in the front-rear direction. That is, the laser head 2 is integrally held in the vertical direction on the lifting plate 16b and is arranged so as to be movable in the front-rear direction with respect to the lifting plate 16b. A lifting nut 17b is fixed to the upper and lower central portions of the right back surface (left surface) of the lifting plate 16b.

[0037] The lifting motor M1 is a motor for lifting and lowering the laser head 2. The lifting motor M1 is installed vertically upward at the center of the ceiling portion of the lifting body 16. A lifting ball screw 17a is connected to the rotor shaft of the lifting motor M1.

[0038] The lifting ball screw 17a extends vertically downward from the lifting motor M1. The lifting nut 17b fixed to the lifting plate 16b is screwed to a position closer to the lower side of the lifting ball screw 17a. Therefore, when the lifting motor M1 is driven, the lifting ball screw 17a rotates to lift and lower the lifting nut 17b fixed to the lifting plate 16b that supports the laser head 2 and the Y-axis movement motor M3.

[0039] In this way, the lifting nut 17b is fixed to a position opposite to the surface to which the laser head 2 is fixed on the lifting plate 16b, so that the lifting plate 16b and the laser head 2 can be lifted and lowered in the Z-axis direction (vertical direction) along the lifting guide 16a.

[0040] <Configuration of X-axis movement section> As shown in FIGS. 1 and 5, the X-axis movement section 18 is a device for moving the laser head to the X-axis direction (left-right direction) perpendicular to the irradiation direction of the laser light L. The X-axis movement section 18 includes a base 19a, an X-axis movement guide 19b, an X-axis movement ball screw 20, and an X-axis movement motor M2.

[0041] As shown in Fig. 5, the base 19a is a member for placing the lifting body 16 provided with a lifting plate 16b that supports the laser head 2 in a central portion on the base 19a so as to be movable in the left - right direction. The base 19a is composed of a thick plate member that is rectangular in plan view and long in the left - right direction.

[0042] The X - axis movement guide 19b is a guide member for guiding the lifting body 16 that moves in the left - right direction. The X - axis movement guides 19b are respectively provided at the front and rear ends of the base 19a and extend in a rail shape in the left - right direction. On the front and rear X - axis movement guides 19b, the lower end portion of the lifting body 16 that is reverse concave in front view is placed so as to be movable in the left - right direction.

[0043] The X - axis movement motor M2 is a motor for rotating the X - axis movement ball screw 20 by driving. The X - axis movement motor M2 is fixed to the center of the left - hand end portion on the base 19a. The X - axis movement ball screw 20 is connected to the rotor shaft of the X - axis movement motor M2.

[0044] The X - axis movement ball screw 20 is a male screw member that moves the tip end portion in the X - axis direction (left - right direction) by rotating the X - axis movement nut (not shown) fixed to the lifting body 16. For this reason, the X - axis movement ball screw 20 moves the lifting mechanism 15 and the laser head ② fixed to the lifting mechanism 15 in the X - axis direction (left - right direction) along the X - axis movement guide 19b by rotating through the X - axis movement nut (not shown).

[0045] <Configuration of the Y - axis movement part> As shown in Figs. 1 and 4, the Y - axis movement part 21 is a device for moving the laser head 2 in the Y - axis direction (front - rear direction) parallel to the irradiation direction of the laser beam L. The Y - axis movement part 21 includes a Y - axis movement guide 22, a Y - axis movement ball screw 23, and a Y - axis movement motor M3.

[0046] As shown in Figure 4, the laser head 2 is mounted on a Y-axis movement guide 22 that extends in the front-to-back direction from the center of the vertical direction of the lifting plate 16b, so as to be movable in the front-to-back direction. The front end of the laser head 2 is provided with a female threaded portion (not shown) into which a Y-axis movement ball screw 23 is screwed.

[0047] The Y-axis movement guide 22 is a component that guides the movement of the laser head 2, which moves in the forward and backward direction. The Y-axis movement motor M3 is a motor for moving the laser head 2 in the forward and backward directions. The Y-axis movement motor M3 is fixed to the front end of the center of the vertical direction of the lifting plate 16b. A Y-axis movement ball screw 23 is connected to the rotor shaft of the Y-axis movement motor M3. Therefore, when the Y-axis movement motor M3 is driven, it rotates the Y-axis movement ball screw 23.

[0048] The Y-axis movement ball screw 23 rotates, causing the laser head 2 to move along the Y-axis movement guide 22 in the Y-axis direction (forward and backward direction) via a Y-axis movement nut (not shown) provided on the laser head 2 at its tip.

[0049] ≪How laser processing equipment works≫ Next, the operation of the laser processing apparatus 1 according to this embodiment will be explained in order of the processing steps, with reference to Figures 1 to 5.

[0050] First, as a preparatory step before processing, the workpiece W is placed as shown in Figure 2. The workpiece W, which is transported from the outside, is gripped by the workpiece gripping section 26 inside the housing 4. Next, the inside of the housing 4 is sealed. The retrieval section 24 is placed in the lower part of the housing 4 beforehand.

[0051] Next, as a preparatory step before processing, an environment is created that maximizes the effectiveness of laser processing. Specifically, as shown in Figure 2, the assist gas supplied from the assist gas supply source A is supplied from the assist gas nozzle 13 located inside the housing 4, thereby filling the housing 4 with assist gas. The assist gas can be selected according to the purpose, such as using an inert gas to prevent oxidation of the workpiece W or using a cooling gas to cool the workpiece W.

[0052] Next, as a preparatory step before processing, the protective unit 5 and the laser head 2 are set up so that the laser beam L is accurately irradiated. The protective unit 5 is supplied with assist gas from the assist gas supply source A to at least one of the first protective unit casing 7a and the second protective unit casing 7b. Before or during processing, cooling water may be supplied from the cooling water supply source Q into the cooling water flow path 11 to avoid a temperature rise in the protective part 5. Then, the laser oscillator 3 is activated, allowing the laser beam L to be emitted.

[0053] Next, the laser head 2 irradiates the workpiece W with laser light L to perform processing. The laser light L emitted from the laser head 2 passes through the protective window 8 and coating layer 9 located inside the protective unit 5 and is irradiated onto the workpiece W. Assist gas is continuously supplied to the workpiece W from the assist gas nozzle 13, enhancing the effectiveness of the laser light L during processing.

[0054] Furthermore, a protective cover 10 is placed inside the housing 4, and by passing the laser beam L through the protective cover 10, a decrease in the effectiveness of the laser beam L due to external disturbances can be prevented. Furthermore, the laser beam L has a straight-line directional property, and when it penetrates the workpiece W, it is received by the laser absorber 14 of the receiving section 6.

[0055] Furthermore, when processing the workpiece W with the laser beam L, the position of the laser head 2 can be adjusted by moving the XYZ axes of the lifting mechanism 15, X-axis movement unit 18, and Y-axis movement unit 21 to specified positions, as shown in Figures 4 and 5. By adjusting the position of the laser head 2, the processing position can be changed, although it is limited to the area of ​​the protective window 8.

[0056] Furthermore, by changing the position of the workpiece gripping section 26 and rotating the workpiece W using the workpiece rotation section 28, complex machining can be performed on the workpiece W.

[0057] When the processing of the workpiece W is complete, the supply of laser light L from the laser head 2 is stopped, and the supply of assist gas from the assist gas nozzle 13 is stopped. Next, the assist gas inside the housing 4 is discharged from the exhaust port 4d to complete the process.

[0058] As described above, the laser processing apparatus 1 according to the present invention, as shown in Figure 1, comprises a laser head 2 that irradiates laser light L, a protective part 5 arranged in a housing 4 that seals the workpiece W and allows the laser light L to pass through, and a receiving part 6 arranged in the housing 4 coaxially with the protective part 5. The protective part 5 is arranged in a protective part casing 7 into which the laser light L is incident and has a protective window 8 through which the laser light L passes, a coating layer 9 formed on the surface of the protective window 8, a gas passage 12 that supplies compressed air or cooling gas to the surface of the coating layer 9, and an assist gas nozzle 13 arranged in the housing 4 and supplying assist gas.

[0059] With this configuration, the laser processing apparatus 1 of the present invention has a protective unit 5 arranged in a housing 4 that seals the workpiece W, a protective window 8 arranged inside the protective unit casing 7, and a coating layer 9 formed on the surface of the protective window 8. As a result, the laser head 2 is not contaminated with foreign matter such as fumes, dust, and other scattered objects, and the performance and directivity of the laser beam L can be maintained. Furthermore, the laser processing apparatus 1 has an assist gas nozzle 13 that supplies assist gases such as compressed air, cooling gas, and inert gas, which allows the assist gas to blow away foreign matter such as molten metal and attached dross caused by laser irradiation, and to cool the inside of the housing 4 or the workpiece W, etc.

[0060] Furthermore, as shown in Figure 2, the laser processing apparatus 1 has a workpiece gripping unit 26 that grips the workpiece W from the top of the housing 4. With this configuration, the laser processing apparatus 1 has a workpiece gripping unit 26 that grips the workpiece W from the top of the housing 4, so that the workpiece W can be easily positioned in a desired position within the housing 4 that is easy to laser process.

[0061] Furthermore, the protective unit 5 has a protective cover 10 inside the housing 4. With this configuration, the protective unit 5 has a protective cover 10 inside the housing 4, which helps to prevent the metal molten by the irradiation of the laser beam L from scattering towards the protective unit casing 7 or the laser head 2.

[0062] Furthermore, as shown in Figure 1, the laser processing apparatus 1 has, or has either, a lifting mechanism 15 for raising and lowering the laser head 2, an X-axis moving unit 18 for moving the laser head 2 in a direction perpendicular to the irradiation direction of the laser beam L, and a Y-axis moving unit 21 for moving the laser head 2 in a direction parallel to the irradiation direction of the laser beam L.

[0063] With this configuration, the laser processing apparatus 1 has a lifting mechanism 15, an X-axis moving unit 18, and a Y-axis moving unit 21, which allows the laser head 2 to move freely in the X, Y, and Z axis directions (up, down, forward, backward, left, and right directions). Therefore, the laser processing apparatus 1 can accurately process objects by appropriately moving the orientation of the laser head 2 to match the position of the workpiece W. Furthermore, the laser processing apparatus 1 has either a lifting mechanism 15, an X-axis moving unit 18, or a Y-axis moving unit 21, which allows the laser head 2 to be automatically moved in any appropriate direction among the X, Y, and Z axis directions (up, down, forward, backward, left, and right directions).

[0064] Furthermore, the protective window 8 shown in Figure 2 is made of a permeable material. With this configuration, the protective window 8 is made of a transparent material, which allows the laser light L to pass through and prevents foreign objects from entering or exiting.

[0065] Furthermore, the protective window 8 shown in Figure 2 is made of fused silica. With this configuration, the protective window 8 is made of fused silica, which provides excellent corrosion resistance, heat resistance, high transparency, and allows laser light L to pass through without attenuation.

[0066] Furthermore, the assist gas nozzle 13 shown in Figure 2 can be a flat nozzle, a multi-stage nozzle, or a multiple nozzle. With this configuration, the assist gas nozzle 13 is a flat nozzle that can uniformly blow air over a range matching the linear shape of the nozzle tip. This makes it possible to blow air in accordance with the linear processing shape while using a fixed nozzle, and enables linear processing without providing movable parts inside the container. Furthermore, by making the assist gas nozzle 13 a multi-stage nozzle whose shape matches the processing shape, it is possible to process the required shape without installing a movable part inside the container. Furthermore, by arranging the assist gas nozzle 13 with multiple nozzles that match the processing shape, it is possible to process the required shape without installing any movable parts inside the container. These features enable laser processing without the need to install an X-axis or Y-axis movement mechanism within the housing 4, by using a nozzle that corresponds to the processing shape. This makes it applicable to environments where lubrication of the movement mechanism and ensuring its lifespan are difficult, such as high-temperature environments, high-radiation environments, and steam environments.

[0067] [First variation] As stated above, the present invention is not limited to the embodiments described, and it goes without saying that the present invention can be modified as appropriate without departing from its spirit.

[0068] Figure 6 is a schematic perspective view of the main parts showing a first modified example of the laser processing apparatus 1 according to an embodiment of the present invention. Figure 7 is a schematic perspective view of the main parts showing a first modified example of the laser processing apparatus 1 according to an embodiment of the present invention. Figure 8 is a schematic cross-sectional view of the main parts showing a first modified example of the laser processing apparatus 1 according to an embodiment of the present invention.

[0069] <Mechanism for loading and unloading the workpiece W> For example, as a mechanism for efficiently loading and unloading the workpiece W, the laser processing apparatus 1 may have a divided structure for the housing 4A, as shown in Figures 6 and 7, or it may have a workpiece gripping unit movement guide 27 for moving the workpiece gripping unit 26 for gripping the workpiece W.

[0070] As shown in Figures 6 to 8, the housing 4 is divided into a first housing 4a and a second housing 4b by an opening / closing door 4c. The first housing 4a is a space for processing the workpiece W. The second housing 4b may be a space for transporting the workpiece W.

[0071] In this case, the first housing 4a is a component that forms a space for processing the workpiece W. The first housing 4a is often used with various gases filling its interior, but by placing an exhaust port 4d at the bottom of the first housing 4a to discharge the gases, the gases inside the first housing 4a can be discharged. Furthermore, the laser processing apparatus 1 may be configured to facilitate the discharge of gas from inside the housing 4 by arranging a suction device (not shown) outside the housing 4 and connecting it to the exhaust port 4d.

[0072] As shown in Figures 6 and 7, the opening / closing door 4c has a divided structure consisting of, for example, a first opening / closing door 4c1 and a second opening / closing door 4c2. The opening / closing door 4c is structured to allow the workpiece gripping part 26 or the retrieval part 24 to slide, thereby enabling the workpiece W to move between the first housing 4a and the second housing 4b. Furthermore, in the first modified example of the present invention, the opening and closing door 4c has a door-like structure, but it may also be bellows-shaped, or it may open and close vertically instead of horizontally.

[0073] Alternatively, the workpiece gripping unit 26 may be connected to a workpiece gripping unit movement guide 27 located on the upper part of the housing 4A, and slid from the state in which the workpiece W is gripped inside the second housing 4b to the state in which the workpiece W is being processed inside the first housing 4a. In this case, a motor (not shown) is used as the driving source (power) to move the workpiece gripping unit 26 along the workpiece gripping unit movement guide 27. Furthermore, the moving device for moving the workpiece gripping section 26 in the horizontal direction is not limited to a motor; it may also be a structure utilizing a ball screw or the like.

[0074] Furthermore, the retrieval unit 24 may have a sliding structure. For example, the first housing 4a and the second housing 4b may have a structure in which a pair of front and rear rail-shaped guides 25 for moving the retrieval unit are extended in the left and right directions from the inner bottom surface of housing 4a, and the retrieval unit 24 slides on the inner bottom surface of the first housing 4a and the inner bottom surface of the second housing 4b.

[0075] ≪How laser processing equipment works≫ Next, the operation of a first modified example of the laser processing apparatus 1 according to an embodiment of the present invention will be described in order of the processing steps, mainly referring to Figures 6 to 8.

[0076] First, as a preparatory step before processing, the workpiece W is placed inside the housing 4A. As shown in Figure 6, the workpiece W, which is transported from the outside, is gripped by the workpiece gripping unit 26 inside the second housing 4b.

[0077] Next, the opening / closing door 4c separating the first housing 4a and the second housing 4b is opened, allowing the workpiece W to slide from the second housing 4b into the first housing 4a. Then, as shown in Figure 7, the workpiece gripping unit 26 is slid towards the first housing 4a along the workpiece gripping unit movement guide 27.

[0078] Next, the opening / closing door 4c is closed to separate the space between the first housing 4a and the second housing 4b, thereby sealing at least the inside of the first housing 4a. Prior to this, the recovery unit 24 is positioned at the bottom of the first housing 4a.

[0079] Next, as a preparatory step before processing, an environment is created that maximizes the effectiveness of laser processing. Specifically, as shown in Figure 2, within the first housing 4a, the assist gas supplied from the assist gas supply source A is supplied from the assist gas nozzle 13 located inside the first housing 4a, thereby filling the first housing 4a with assist gas.

[0080] In this case, as a modified example, a suction device (not shown) may be placed outside the housing 4 and connected to the exhaust port 4d, and instead of supplying assist gas, the gas inside the housing 4 may be sucked out, thereby enabling processing in a vacuum state inside the housing 4.

[0081] Next, as a preparatory step before processing, the protective unit 5 and the laser head 2 are set up so that the laser beam L is accurately irradiated. The protective unit 5 is supplied with assist gas from the assist gas supply source A to at least one of the first protective unit casing 7a and the second protective unit casing 7b. Before or during processing, cooling water may be supplied from the cooling water supply source Q into the cooling water flow path 11 to avoid a temperature rise in the protective part 5. Then, the laser oscillator 3 is activated, allowing the laser beam L to be emitted from the laser head 2.

[0082] Next, the laser head 2 irradiates the workpiece W with laser light L to perform processing. The laser light L irradiated from the laser head 2 passes through the protective window 8 and coating layer 9 located inside the protective unit 5 and is irradiated onto the workpiece W. Assist gas is continuously supplied to the workpiece W from the assist gas nozzle 13, enhancing the effectiveness of the laser light L during processing. In addition, a protective cover 10 is located inside the first housing 4a, and the laser light L passes through the protective cover 10, preventing a decrease in the effectiveness of the laser light L due to external disturbances. Furthermore, the laser beam L has a straight-line directional property, and when it penetrates the workpiece W, it is received by the laser absorber 14 of the receiving section 6.

[0083] Furthermore, when processing the workpiece W with the laser beam L, the position of the laser head 2 can be adjusted by moving the XYZ axes of the lifting mechanism 15, X-axis movement unit 18, and Y-axis movement unit 21 to specified positions, as shown in Figures 4 and 5. By adjusting the position of the laser head 2, the processing position can be changed, although it is limited to the area of ​​the protective window 8. Furthermore, by changing the position of the workpiece gripping unit 26 and rotating the workpiece rotating unit 28, complex machining can be performed on the workpiece W.

[0084] When the processing of the workpiece W is complete, the supply of laser light L from the laser head 2 is stopped, the supply of assist gas from the assist gas nozzle 13 is stopped, the assist gas in the first housing 4a is discharged from the exhaust port 4d, the opening / closing door 4c is opened, and the workpiece gripping unit 26 is moved into the second housing 4b to complete the process.

[0085] Thus, the housing 4 of the laser processing apparatus 1 according to the first modified example of the present invention may have, as shown in Figures 6 and 7, a first housing 4a for sealing the workpiece W, a second housing 4b for preparing the workpiece W for transport, and an opening / closing door 4c separating the first housing 4a and the second housing 4b.

[0086] With this configuration, the housing 4 is divided into a first housing 4a and a second housing 4b by an opening / closing door 4c, so that when laser processing the workpiece W, the transport and preparation of the workpiece W can be carried out efficiently.

[0087] Alternatively, the opening and closing door 4c may be opened and closed by the first opening and closing door 4c1 and the second opening and closing door 4c2 sliding against each other.

[0088] With this configuration, the first opening / closing door 4c1 and the second opening / closing door 4c2 slide against each other, allowing the opening / closing door 4c to be opened and closed smoothly without contacting the workpiece W or the like during opening and closing.

[0089] [Second variation] Figure 9 is an explanatory diagram showing a second modified example of the laser processing apparatus 1 according to an embodiment of the present invention. The laser processing apparatus 1 described above (see Figure 1) may have a protective cover 10B equipped with a circulation nozzle 31 that injects a cooling gas G1 to be circulated within the protective cover 10B, as shown in Figure 9. In the description of the second modified example, the cooling gas G1 is used as a premise, but it goes without saying that the cooling gas G1 can be appropriately selected from compressed air, cooling gas, inert gas, etc.

[0090] The circulation nozzle 31 is connected to a cooling gas supply source A2 that supplies a cooling gas G1 such as argon gas. The circulation nozzle 31 is installed, for example, on the inner wall of the protective cover 10B, with its outlet facing the protective window 8. The cooling gas G1 injected from the circulation nozzle 31 flows along the inner wall of the protective cover 10B toward the protective window 8, then rises along the protective window 8 and flows toward the rear of the inner wall of the protective cover 10B, and circulates back to the circulation nozzle 31 by an air curtain G4 injected from the atmosphere separation nozzle 32.

[0091] Thus, the laser processing apparatus 1B is equipped with a circulation nozzle 31 that injects cooling gas G1 circulating within the protective cover 10B, thereby enabling the cooling gas G1 to circulate within the protective cover 10B. As a result, the circulation nozzle 31 can efficiently cool the protective window 8 and the protective cover 10B with a small amount of cooling gas G1.

[0092] Furthermore, as shown in Figure 9, the protective cover 10B may be equipped with an atmosphere-dividing nozzle 32 for forming an air curtain G4 within the protective cover 10B.

[0093] In this case, the atmosphere-dividing nozzle 32 is connected to a cooling gas supply source A3 that supplies a cooling gas G1 such as argon gas. The atmosphere-dividing nozzle 32 is installed, for example, on the outer surface of the protective cover 10B facing the circulation nozzle 31, with its nozzle facing towards the center inside the protective cover 10B. The air curtain G4 injected from the atmosphere-dividing nozzle 32 flows in a manner that divides the protective cover 10B into front and back sections, and also restricts the cooling gas G1 injected from the circulation nozzle 31 to circulate in the area of ​​the protective cover 10B closer to the protective window 8.

[0094] Thus, the laser processing apparatus 1B is equipped with an atmosphere-dividing nozzle 32 that forms an air curtain G4 inside the protective cover 10B. Therefore, the cooling gas G1 circulating inside the protective cover 10B is prevented from flowing towards the workpiece W side by the air curtain G4, and can be blocked so that it circulates only within a predetermined range inside the protective cover 10B.

[0095] Furthermore, as shown in Figure 9, the protective cover 10B may also include a purging nozzle 34 that injects an intrusion prevention gas G3 to suppress the entry of foreign matter such as fumes F and dross D into the protective cover 10B, and a discharge nozzle 33 that injects an extrusion gas G2 to push out foreign matter such as fumes F and dross D that have entered the protective cover 10B.

[0096] In this case, the discharge nozzle 33 and the purge nozzle 34 are connected to a gas supply source A1 that supplies, for example, argon gas. The purge nozzle 34 is attached to the outer circumferential surface of the opening on the workpiece W side of the protective cover 10B, and its nozzle is positioned to face the center of the opening of the protective cover 10B.

[0097] The discharge nozzle 33 is installed on the outer circumferential surface of the protective cover 10B, with its outlet facing towards the center of the opening in the protective cover 10B. The extrusion gas G2 ejected from the discharge nozzle 33 is sprayed from the inside of the protective cover 10B toward the outside of the opening.

[0098] Thus, the laser processing apparatus 1B is equipped with a purging nozzle 34 that sprays an intrusion prevention gas G3 to suppress the entry of foreign matter such as fumes F and dross D into the protective cover 10B. Therefore, the intrusion prevention gas G3 sprayed from the purging nozzle 34 forms an air curtain at the opening of the protective cover 10B, thereby suppressing the entry of foreign matter such as fumes F, dross D, and other scattered materials generated during laser processing into the protective cover 10B. Furthermore, the laser processing device 1B is equipped with an exhaust nozzle 33, which allows it to push out foreign matter such as fumes F, dross D, and other scattered materials that have entered the protective cover 10B by injecting extrusion gas G2.

[0099] [Third variation] Figure 10 is an explanatory diagram showing a third modified example of the laser processing apparatus 1 according to an embodiment of the present invention. Furthermore, as shown in Figure 10, the protective casing 7C may include an auxiliary nozzle 35 (first auxiliary nozzle) for spraying cooling gas G5 toward the surface of the protective window 8C, and a gas exhaust port 36 for exhausting the cooling gas G5 to the outside of the protective casing 7C. In the description of the third modified example, the cooling gas G5 is assumed to be used, but it goes without saying that the cooling gas G5 can be appropriately selected from compressed air, cooling gas, inert gas, etc.

[0100] The auxiliary nozzle 35 (first auxiliary nozzle) is connected to a cooling gas supply source A4 that supplies a cooling gas G5, such as argon gas. The auxiliary nozzle 35 (first auxiliary nozzle) is installed at the rear end of the protective casing 7C, with its nozzle facing the axis of the protective window 8C. The gas exhaust port 36 is installed near the rear end of the protective casing 7C, opposite the auxiliary nozzle 35 (first auxiliary nozzle) on the protective casing 7C. The gas exhaust port 36 is attached to the protective casing 7C so as to exhaust the cooling gas G5 ejected into the protective casing 7C to the rear side of the protective cover 10C. The exhaust direction can be changed as appropriate.

[0101] Thus, the laser processing apparatus 1C, by having an auxiliary nozzle 35 (first auxiliary nozzle), can inject cooling gas G5 toward the rear surface of the protective window 8C to cool the protective window 8C and blow off any foreign matter adhering to the protective window 8C. Furthermore, the laser processing apparatus 1C, by having a gas exhaust port 36, can smoothly exhaust the cooling gas G5, which has been heated by cooling the protective window 8C, to the outside of the protective casing 7C.

[0102] [Fourth variation] Figure 11 is an explanatory diagram showing a fourth modified example of the laser processing apparatus 1 according to an embodiment of the present invention. Furthermore, as shown in Figure 11, the laser processing apparatus 1D may be equipped with an auxiliary nozzle 37 (second auxiliary nozzle) that sprays cooling gas G6 toward the outer surface of the protective window 8D. In the description of the fourth modified example, the cooling gas G6 is assumed to be used, but it goes without saying that the cooling gas G6 can be appropriately selected from compressed air, cooling gas, inert gas, etc.

[0103] The auxiliary nozzle 37 (second auxiliary nozzle) is connected to a cooling gas supply source A4 that supplies a cooling gas G6, such as argon gas. The auxiliary nozzle 37 (second auxiliary nozzle) is installed at the front end of the protective casing 7D, with its nozzle facing the axis of the protective window 8D. The gas exhaust port 38 is installed near the front end of the protective casing 7D, opposite the auxiliary nozzle 35 (first auxiliary nozzle) of the protective casing 7D. The gas exhaust port 38 is attached to the protective casing 7D so as to exhaust the cooling gas G6 ejected to the front of the protective casing 7D. The exhaust direction can be changed as appropriate.

[0104] Thus, the laser processing device 1D, equipped with an auxiliary nozzle 37 (second auxiliary nozzle), can cool the protective window 8D by spraying cooling gas G6 toward the outer surface of the protective window 8D, and can also blow off any foreign matter adhering to the protective window 8C. [Explanation of Symbols]

[0105] 1,1A,1B,1C,1D Laser processing equipment 2 laser heads 3. Laser Oscillator 4 cabinets 4a First enclosure 4b Second cabinet 4c Opening and closing door 4d exhaust port 5 Protective part 6 Receiving part 7,7C,7D Protective casing 7a First protective casing 7b Second protective casing 8,8C,8D Protective window 9. Coating layer 10, 10B, 10C Protective Cover 11 Cooling water channel 12 Gas flow path 12a First gas flow path 12b Second gas flow path 13 Assist gas nozzle 14. Laser absorber 15 Lifting mechanism 16 Lifting Unit 16a Lifting Guide 16b Lifting platform 17a Ball screw for lifting 17b Lifting nut 18 X-axis moving part 19a Base 19b X-axis movement guide 20 X-axis movement ball screw 21 Y-axis moving part 22 Y-axis movement guide 23. Ball screw for Y-axis movement 24. Recovery Section 24a Edge 25 Guide for moving the recovery unit 26 Workpiece gripping section 27 Guide for moving the workpiece gripping section 28 Workpiece Rotating Section 31 Circulation nozzle 32. Nozzle for separating the atmosphere 33 Discharge nozzle 34 Purge nozzles 35,37 Auxiliary nozzle 36,38 Gas exhaust port A,A1 Assist gas supply source A2, A3, A4 Gas supply sources D. Dros F. Hume G1, G5, G6 various gases G2 Extrusion Gas G3 Intrusion Prevention Gas G4 Air Curtain L Laser light M1 Lifting Motor M2 X-axis movement motor M3 Y-axis movement motor Q Cooling water supply source W - Object to be processed

Claims

1. A laser head that emits laser light, A protective part is placed in a housing that encloses the workpiece, and allows the laser light to pass through. A receiving portion arranged in the housing coaxially with the protective portion, The housing includes a workpiece gripping section that grips the workpiece from the upper part of the housing, The aforementioned protective part is The protective casing is arranged within the housing into which the laser beam is incident. A protective window to allow passage, A coating layer formed on the surface of the protective window, A gas channel for supplying compressed air or cooling gas to the surface of the coating layer, The housing is disposed within the housing and includes an assist gas nozzle for supplying assist gas, Laser processing equipment.

2. A laser head that emits laser light, A protective part is placed in a housing that encloses the workpiece, and allows the laser light to pass through. The housing comprises a receiving portion arranged coaxially with the protective portion, The aforementioned protective part is The protective casing is arranged within the housing into which the laser beam is incident. A protective window to allow passage, A coating layer formed on the surface of the protective window, A gas channel for supplying compressed air or cooling gas to the surface of the coating layer, An assist gas nozzle, which is arranged inside the housing and supplies assist gas, The protective part includes a protective cover inside the housing, The protective cover is provided with compressed air or a cooling gas that is injected into the protective cover. It is equipped with a circulation nozzle. Laser processing equipment.

3. A laser head that emits laser light, A protective part is placed in a housing that encloses the workpiece, and allows the laser light to pass through. The housing comprises a receiving portion arranged coaxially with the protective portion, The aforementioned protective part is The protective casing is arranged within the housing into which the laser beam is incident. A protective window to allow passage, A coating layer formed on the surface of the protective window, A gas channel for supplying compressed air or cooling gas to the surface of the coating layer, An assist gas nozzle, which is arranged inside the housing and supplies assist gas, The protective part includes a protective cover inside the housing, The protective cover is equipped with an atmosphere-dividing nozzle for forming an air curtain within the protective cover. Laser processing equipment.

4. A laser head that emits laser light, A protective part is placed in a housing that encloses the workpiece, and allows the laser light to pass through. The housing comprises a receiving portion arranged coaxially with the protective portion, The aforementioned protective part is The protective casing is arranged within the housing into which the laser beam is incident. A protective window to allow passage, A coating layer formed on the surface of the protective window, A gas channel for supplying compressed air or cooling gas to the surface of the coating layer, An assist gas nozzle, which is arranged inside the housing and supplies assist gas, The protective part includes a protective cover inside the housing, The aforementioned protective cover is An intrusion prevention gas is used to suppress the entry of fumes, dross, and other materials into the protective cover. A purging nozzle that sprays, This process pushes out foreign matter such as fumes and dross that have entered the protective cover. An exhaust nozzle that injects extrusion gas, It is equipped with Laser processing equipment.

5. The aforementioned enclosure is A first housing for sealing the workpiece, A second housing for preparing the object to be processed for transport, The first housing and the second housing are separated by an opening and closing door, A laser processing apparatus according to any one of claims 1 to 4.

6. The aforementioned opening and closing doors open and close by the first opening and closing door and the second opening and closing door sliding against each other. ru, The laser processing apparatus according to claim 5.

7. The housing has a workpiece gripping section that grips the workpiece from the upper part. A laser processing apparatus according to any one of claims 2 to 4.

8. The protective part has a protective cover inside the housing. The laser processing apparatus according to claim 1.

9. A lifting mechanism for raising and lowering the laser head, An X-axis moving unit that moves the laser head in a direction perpendicular to the irradiation direction of the laser light, A Y-axis moving unit that moves the laser head in a direction parallel to the irradiation direction of the laser beam, to have, or to have either A laser processing apparatus according to any one of claims 1 to 8.

10. The protective window is made of a permeable material. A laser processing apparatus according to any one of claims 1 to 9.

11. The protective window is made of fused silica. A laser processing apparatus according to any one of claims 1 to 10.

12. The assist gas nozzle is a flat nozzle, a multi-stage nozzle, or a combination of multiple nozzles. did, A laser processing apparatus according to any one of claims 1 to 11.

13. The protective cover is provided with compressed air or a cooling gas that is injected into the protective cover. It is equipped with a circulation nozzle. A laser processing apparatus according to any one of claims 3, 4, or 8.

14. The protective cover is equipped with an atmosphere-dividing nozzle for forming an air curtain within the protective cover. A laser processing apparatus according to any one of claims 2, 4, or 8.

15. The aforementioned protective cover is An intrusion prevention gas is used to suppress the entry of fumes, dross, and other materials into the protective cover. A purging nozzle that sprays, This process pushes out foreign matter such as fumes and dross that have entered the protective cover. An exhaust nozzle that injects extrusion gas, It is equipped with A laser processing apparatus according to any one of claims 2, 3, or 8.

16. The protective casing is, An auxiliary nozzle for injecting compressed air or cooling gas toward the surface of the protective window, A gas exhaust port for exhausting the compressed air or cooling gas to the outside of the protective casing, 、 It is equipped with A laser processing apparatus according to any one of claims 1 to 15.

17. The protective casing sprays compressed air or cooling gas toward the outer surface of the protective window. It is equipped with an auxiliary nozzle for spraying. A laser processing apparatus according to any one of claims 1 to 16.

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