Surface-emitting laser element array and method for manufacturing a surface-emitting laser element array

Abstract

To irradiate a target irradiation target area with light even when a positional shift occurs between the target irradiation target area and an actual irradiation target area.SOLUTION: A surface-emitting laser element that outputs laser light perpendicular to a substrate surface includes a surface-emitting laser element that can be switched on and off, and an optical element that directs the laser light output from the surface-emitting laser element to a target irradiation target area 41-1, and the area of an irradiation area 42-1 which is irradiated with the laser light is configured to be larger than the area of the irradiation target area 41-1, and surface-emitting laser elements corresponding to the outside range of the irradiation target area 41-1 (#1-1, #1-2, #1-15, #1-16 shown in Fig.8A, and #1-1, #1-2, #1-3 shown in Fig.8B) are turned off.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] The present invention relates to a surface-emitting laser element array and a method for manufacturing the surface-emitting laser element array.

Background Art

[0002] Regarding a surface-emitting laser element array in which a plurality of light-emitting elements are arranged on a surface, the technology described in Patent Document 1 below is known. Japanese Unexamined Patent Application Publication No. 2021-150651 as Patent Document 1 describes a light-emitting device that irradiates laser light toward a predetermined irradiation region (40) using a VCSEL array (10) having a plurality of VCSELs.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] An object of the present invention is to irradiate light to a target irradiation region even when a positional deviation occurs between the target irradiation region and the actual irradiation region.

Means for Solving the Problems

[0005] In order to solve the above technical problem, the surface-emitting laser element array according to the invention described in claim 1 includes: a surface-emitting laser element that outputs laser light perpendicular to the substrate surface, and the surface-emitting laser element capable of switching on and off; an optical element disposed corresponding to the surface-emitting laser element and directing the laser light output from the surface-emitting laser element predetermined toward a target irradiation region; and The aforementioned laser light actually The area of ​​the irradiation region is Purpose It is configured to be larger than the area of ​​the irradiation target region, The surface-emitting laser element corresponding to the area outside the irradiated region is turned off. It is characterized by the following:

[0006] The invention described in claim 2 relates to the surface-emitting laser element array described in claim 1, The surface-emitting laser elements are arranged on a surface in such a number that the area of ​​the irradiation region is larger than the area of ​​the area to be irradiated, It is characterized by having the following features.

[0007] The invention described in claim 3 relates to the surface-emitting laser element array described in claim 1 or 2, The optical element that guides the laser light such that the area of ​​the irradiation region is larger than the area of ​​the area to be irradiated, It is characterized by having the following features.

[0008] The invention described in claim 4 relates to the surface-emitting laser element array described in any one of claims 1 to 3, Each group of elements, which has multiple surface-emitting laser elements arranged along a predetermined line, can be switched on and off. It is characterized by the following:

[0009] The invention described in claim 5 is a surface-emitting laser element array described in claim 4, The order in which the illuminated elements light up is changed according to the position of the elements that are turned off. It is characterized by the following:

[0010] The invention described in claim 6 relates to the surface-emitting laser element array described in any one of claims 1 to 3, The surface-emitting laser elements can be individually switched on and off. It is characterized by the following:

[0011] To solve the above technical problem, the method for manufacturing a surface-emitting laser element array according to the invention of claim 7 is as follows. For a surface-emitting laser element that outputs laser light perpendicular to the substrate surface, a step of arranging an optical element that directs the laser light output from the surface-emitting laser element toward a target irradiation area. For the target irradiation area configured to have a larger area than the area of the irradiation area irradiated with the laser light, a step of inspecting the deviation of the irradiation area with respect to the target irradiation area. Based on the deviation of the irradiation area with respect to the target irradiation area, a step of setting to turn off the surface-emitting laser elements corresponding to the range outside the target irradiation area. It is characterized by comprising the above.

Advantages of the Invention

[0012] According to the inventions described in claims 1 and 7, even if a positional deviation occurs between the target irradiation area and the actual irradiation area, the target irradiation area can be irradiated with light. According to the invention described in claim 2, the area of the irradiation area can be made larger than the area of the target irradiation area by the number of surface-emitting laser elements. According to the invention described in claim 3, the area of the irradiation area can be made larger than the area of the target irradiation area by the optical element. According to the invention described in claim 4, compared with the case of individually switching surface-emitting laser elements, the control can be simplified. According to the invention described in claim 5, compared with the case where the light emission order is not changed, the state where the turning-off continues can be eliminated. According to the invention described in claim 6, compared with the case of not individually switching surface-emitting laser elements, the surface-emitting laser elements to be turned off can be set in finer detail.

Brief Description of the Drawings

[0013] [Figure 1] FIG. 1 is a diagram showing an example of an information processing apparatus. [Figure 2] FIG. 2 is a block diagram for explaining the configuration of the information processing apparatus. [Figure 3] FIG. 3 is a diagram for explaining a state in which light is irradiated toward a measurement target by a light emitting device. [Figure 4] FIG. 4 is a diagram for explaining the light emitting device. FIG. 4A is a plan view of the light emitting device, and FIG. 4B is a cross-sectional view of the light emitting device taken along line IVB-IVB of FIG. 4A. [Figure 5] FIG. 5 is an explanatory diagram of the relationship between a surface-emitting laser element group to which the first embodiment is applied, an optical element, and an irradiation target region. [Figure 6] FIG. 6 is an explanatory diagram of the relationship between the irradiation target region of an individual surface-emitting laser element array of the first embodiment and the actually irradiated irradiation region. [Figure 7] FIG. 7 is an explanatory diagram of the deviation between the irradiation target region and the irradiation region in the conventional configuration. FIG. 7A is an explanatory diagram of an ideal state without deviation, and FIG. 7B is an explanatory diagram of a state in which deviation has occurred. [Figure 8] FIG. 8 is an explanatory diagram of the deviation between the irradiation target region and the irradiation region. FIG. 8A is an explanatory diagram when the irradiation region protrudes beyond both the left and right sides of the irradiation target region, and FIG. 8B is an explanatory diagram when the irradiation region protrudes only on the right side of the irradiation target region.

Embodiments for Carrying Out the Invention

[0014] Next, specific examples of embodiments of the present invention will be described while referring to the drawings, but the present invention is not limited to the following embodiments. For ease of understanding the following description, in the drawings, the front-rear direction is the X-axis direction, the left-right direction is the Y-axis direction, the up-down direction is the Z-axis direction, and the directions or sides indicated by the arrows X, -X, Y, -Y, Z, -Z are the front, rear, right, left, upper, lower, or front side, rear side, right side, left side, upper side, lower side, respectively. Also, in the figures, those with "·" inside "○" mean arrows from the back side of the paper surface toward the front side, and those with "×" inside "○" mean arrows from the front side of the paper surface toward the back side. In the following description using the drawings, illustrations other than the members necessary for the explanation are appropriately omitted for ease of understanding.

[0015] Measurement devices for measuring the three-dimensional shape of an object include those that measure the three-dimensional shape based on the so-called ToF (Time of Flight) method, which uses the time of flight of light. In the ToF method, the time from when light is emitted from the light-emitting device of the measurement device to when the irradiated light is reflected by the object being measured and received by the three-dimensional sensor (hereinafter referred to as the 3D sensor) of the measurement device is measured, and the three-dimensional shape of the object being measured is determined from the measured three-dimensional shape. The object whose three-dimensional shape is being measured is referred to as the object being measured. The three-dimensional shape is sometimes referred to as a three-dimensional image. Furthermore, the act of measuring a three-dimensional shape is sometimes referred to as three-dimensional measurement, 3D measurement, or 3D sensing.

[0016] Such measuring devices are installed in portable information processing devices and are used for facial recognition of users attempting to access them. Traditionally, portable information processing devices have used methods such as passwords, fingerprints, and iris scans to authenticate users. In recent years, there has been a growing demand for authentication methods with higher security. As a result, portable information processing devices have begun to be equipped with measuring devices that measure three-dimensional shapes. In other words, the three-dimensional shape of the user's face is acquired, and it is determined whether or not access is permitted. Only if the user is authenticated as an authorized access user is permission to use the device (portable information processing device).

[0017] Here, the information processing device is described as a portable information processing terminal, and it authenticates the user by recognizing the shape of the face as a three-dimensional object. Furthermore, this information processing system can be applied to information processing devices other than portable information processing terminals, such as personal computers (PCs).

[0018] The configuration, functions, and methods described in this embodiment can also be applied to objects other than the face being measured, and to recognizing the object from its measured three-dimensional shape. Furthermore, such a measuring device can also be applied to situations where the three-dimensional shape of an object is continuously measured, such as in augmented reality (AR).

[0019] Here, when measuring three-dimensional shapes, noise known as multipath noise may occur. This occurs because the time of flight of light when it is reflected by the object being measured and received differs from the time of flight of light when it is reflected by light from other objects and then reflected again by the object being measured, or when light reflected by light from other objects before being received. Therefore, light irradiated in an area shifted from the area being irradiated may be reflected by objects other than the object being measured and then reflected by the object being measured in the irradiated area, potentially becoming a source of multipath noise. Additionally, emitting unnecessary light also consumes electricity. Furthermore, if the entire irradiation area is not always measured, but rather divided into smaller areas and irradiated sequentially, irradiating areas other than the target area will prevent measurement of the target area for that time. This is especially true if the object being measured is moving, as the distance to the object may change significantly during that time. For these reasons, it is advantageous to direct the light to the target area. On the other hand, if the light-emitting device is configured to correspond only to the target area, there is a risk that the target area may not be illuminated, considering tolerances in the components, etc.

[0020] [First Embodiment] (Information Processing Device 1) Figure 1 shows an example of an information processing device. As mentioned above, the information processing device 1 is, for example, a portable information processing terminal. The information processing device 1 comprises a user interface unit (hereinafter referred to as the UI unit) 2 and an optical device 3 for measuring three-dimensional shapes. The UI unit 2 is configured by integrating, for example, a display device that displays information to the user and an input device into which instructions for information processing are input by the user's operation. The display device is, for example, a liquid crystal display or an organic EL display, and the input device is, for example, a touch panel.

[0021] The optical device 3 comprises a light-emitting device 4 and a three-dimensional sensor (hereinafter referred to as a 3D sensor) 5. The light-emitting device 4 emits light towards the object to be measured, in this example, the face. The 3D sensor 5 acquires the light emitted by the light-emitting device 4 and reflected back from the face. Here, the three-dimensional shape is measured based on the so-called ToF method, which uses the time of flight of light. Then, the three-dimensional shape of the face is identified from the three-dimensional shape. As mentioned above, the three-dimensional shape may also be measured for objects other than the face. The 3D sensor 5 is an example of a light-receiving unit.

[0022] The information processing device 1 is configured as a computer including a CPU, ROM, RAM, etc. The ROM includes non-volatile, rewritable memory, such as flash memory. Programs and constants stored in the ROM are loaded into the RAM, and the CPU executes the programs, causing the information processing device 1 to operate and perform various information processing tasks.

[0023] Figure 2 is a block diagram illustrating the configuration of the information processing device. The information processing device 1 comprises the optical device 3 described above, a measurement control unit 8, and a system control unit 9. The measurement control unit 8 controls the optical device 3. The measurement control unit 8 also includes a three-dimensional shape identification unit 8A. The system control unit 9 controls the entire information processing device 1 as a system. The system control unit 9 includes an authentication processing unit 9A. The system control unit 9 is connected to the UI unit 2, a speaker 9B, a two-dimensional camera (referred to as a 2D camera in Figure 2) 9C, and other components.

[0024] The three-dimensional shape identification unit 8A of the measurement control unit 8 measures the three-dimensional shape from the reflected light from the object to be measured and identifies the three-dimensional shape of the object to be measured. The authentication processing unit 9A of the system control unit 9 identifies whether or not access is permitted based on the three-dimensional shape identified by the three-dimensional shape identification unit 8A and authenticates the user who is permitted to access. In Figure 2, the measuring device 6 comprises an optical device 3 and a measurement control unit 8.

[0025] (Light-emitting device 4) Figure 3 illustrates the state in which light is irradiated onto the object to be measured by a light-emitting device. Here, the light-emitting device 4 is shown as viewed from the side opposite to the side from which light is emitted (referred to as the back side). The light-emitting device 4 and the irradiation target area 40 are positioned opposite each other, but in Figure 3, the light-emitting device 4 and the irradiation target area 40 are shown offset vertically on the paper. The irradiation target area 40 is a plane perpendicular to the direction of light at a certain distance from the direction of light emitted by the light-emitting device 4, and is the area in which the light emitted by the light-emitting device 4 is directed toward the object to be measured. Here, the left direction on the paper is defined as the x direction, the top direction on the paper as the y direction, and the back direction on the paper as the z direction.

[0026] The irradiation target area 40 has a length Sx in the x-direction and a length Sy in the y-direction. Furthermore, the length Sx in the x-direction is greater than the length Sy in the y-direction (Sx > Sy). In other words, the irradiation target area 40 has a shape with the x-direction as its longitudinal direction.

[0027] As described later, the light-emitting device 4 is constructed by arranging a group of surface-emitting laser elements, including multiple surface-emitting laser elements, in a two-dimensional manner within an array region 100. The array region 100 has a length Lx in the x-direction and a length Ly in the y-direction. The ratio of the length Lx in the x-direction to the length Ly in the y-direction, i.e., the aspect ratio of the array region 100, is set to be close to 1:1. The length Lx in the x-direction should be at least 0.8 times and at least 1.2 times the length Ly in the y-direction. It is even better if the length Lx in the x-direction is at least 0.9 times and at least 1.1 times the length Ly in the y-direction. And it is even better if the length Lx in the x-direction is at least 0.95 times and at least 1.05 times the length Ly in the y-direction.

[0028] As explained above, the shape of the array region 100 in the light-emitting device 4, where the surface-emitting laser elements are arranged, is set to be different from, and not similar to, the shape of the irradiation target region 40. Note that the x-direction is an example of the first direction, and the y-direction is an example of the second direction perpendicular to the first direction.

[0029] Figure 4 is a diagram illustrating the light-emitting device. Figure 4A is a plan view of the light-emitting device, and Figure 4B is a cross-sectional view of the light-emitting device along the line IVB-IVB in Figure 4A. In Figure 4A, unlike in Figure 3, the light-emitting device 4 is shown as viewed from the side that emits light (referred to as the front side). Therefore, the right direction on the paper is the x-direction, the top direction on the paper is the y-direction, and the front direction on the paper is the z-direction. The plan view is a view of the light-emitting device 4 from the +z direction side. Also, in Figure 4B, the right direction on the paper is the x-direction, the top direction on the paper is the y-direction, and the back direction on the paper is the z-direction.

[0030] As shown in Figure 4B, the light-emitting device 4 comprises a surface-emitting laser element array 10, a focusing lens 60, and a diffusion member 30, from the bottom side (-y direction side). The surface-emitting laser element array 10 comprises multiple surface-emitting laser elements. Here, the surface-emitting laser element is, as an example, a vertical cavity surface-emitting laser element (VCSEL). In the following explanation, the light-emitting element is assumed to be a vertical cavity surface-emitting laser element (VCSEL). The vertical cavity surface-emitting laser element (VCSEL) will be denoted as VCSEL. Therefore, the surface-emitting laser element array 10 will be referred to as the VCSEL array 10. In Figure 4B, light is schematically shown with diagonal lines.

[0031] As shown in Figure 4A, the surface-emitting laser element array 10 is composed of multiple surface-emitting laser elements (VCSELs) forming a group of surface-emitting laser elements. The surface-emitting laser element array 10 may also be referred to as a group of surface-emitting laser elements or a VCSEL group. The region where the VCSEL groups are arranged is the array region 100. Here, as shown in Figure 4A, eight VCSEL groups are formed. When distinguishing between the VCSEL groups, they are referred to as VCSEL group #1 to #8. The VCSEL groups are arranged in a pattern of four in the x-direction and two in the y-direction. Therefore, in the array region 100, the number of VCSEL groups in the x-direction is greater than the number in the y-direction.

[0032] Each VCSEL group has a total of 64 VCSELs arranged in the x-direction (4 in the x-direction) and the y-direction (16 in the y-direction). Therefore, in the first embodiment, in each VCSEL group, the number of VCSELs in the y-direction is greater than the number of VCSELs in the x-direction. In each VCSEL group #1 to #8 of the first embodiment, four VCSELs arranged in the x-direction form a single element group #1-1 to #1-16 (#2-1 to #2-16, ..., #8-1 to #8-16), and these four elements are configured to allow switching between on and off. In the following description, each element group #1-1 to #8-16, consisting of four elements in a row, may be referred to as one line.

[0033] As shown in Figure 4B, the focusing lens 60 is placed on the path of light emitted from each VCSEL (sometimes referred to as the emission path), narrowing the divergence angle of the light emitted from each VCSEL and directing it to the diffusion member 30. The diffusion member 30 is designed to have a predetermined function when parallel light is incident on it. Each VCSEL emits light with a divergence angle determined by its structure. Therefore, even if the light emitted from the VCSEL is directly incident on the diffusion member 30, the diffusion member 30 cannot perform its designed function. Thus, the focusing lens 60 narrows the divergence angle of the light emitted from the VCSEL and directs it to the diffusion member 30. Note that the divergence angle is the full width at half maximum (FWHM) of the light emitted from the VCSEL. This refers to the aximum. The diffusing member 30 and the focusing lens 60 are examples of optical elements.

[0034] The condensing lens 60 is, for example, a plano-convex lens with a flat side in the -y direction, and its length is Cx in the x direction and Cy in the y direction. Here, we assume it is a circle where the length Cx in the x direction and the length Cy in the y direction are the same (Cx=Cy). Note that a circle includes, for example, an ellipse where the length Cx in the x direction is 0.95 times and 1.05 times the length Cy in the y direction. The major axis of the ellipse is not limited to the x direction or the y direction. The condensing lens 60 is just one example of a lens and is not limited to a plano-convex lens.

[0035] The diffusion member 30 comprises, for example, a resin layer formed on the back side (-z direction) of a glass substrate with parallel and flat surfaces for diffusing light. The diffusion member 30 is provided on the emission path of each VCSEL emitted through the focusing lens 60, and widens the divergence angle of the incident light, emitting light into the irradiation target area 40. In other words, the diffusion member 30 refracts and scatters the light by the irregularities formed in the resin layer, spreading the incident light into the irradiation target area 40 before emission. The diffusion member 30 has a length Dx in the x direction and a length Dy in the y direction. Alternatively, instead of the diffusion member 30, a diffractive optical element (DOE) or other diffractive optical element that changes the direction of the incident light to a different direction before emission may be used.

[0036] In Figure 4B, although not shown, the VCSEL array 10 is mounted on a circuit board (not shown), and the focusing lens 60 and the diffusing member 30 are held at a predetermined distance from the VCSEL array 10 by a holding member (not shown) provided on the circuit board.

[0037] As shown in Figure 4A, the VCSEL array region 100 is set to have an aspect ratio close to 1:1. A focusing lens 60 is provided so as to encompass the array region 100. In this way, the area (sometimes referred to as size) of the circular focusing lens 60 is used effectively. As described above, in each VCSEL group, the VCSELs are arranged such that the number in the y direction is greater than the number in the x direction, and the VCSEL groups are arranged such that the number in the x direction is greater than the number in the y direction. As a result, the aspect ratio of the array region 100 is close to 1:1.

[0038] Figure 5 is an explanatory diagram illustrating the relationship between the surface-emitting laser element group, optical elements, and the irradiation target area to which the first embodiment is applied. Figure 6 is an explanatory diagram illustrating the relationship between the irradiation target area and the actually irradiated area of ​​an individual surface-emitting laser element array in the first embodiment. In Figure 5, the laser light from VCSEL groups #1 to #8 is refracted by a focusing lens 60 and a diffusing member 30, depending on the total irradiation area 40 intended to be irradiated with laser light by the entire light-emitting device 4. The irradiation area 40 has individual irradiation areas 41-1 to 41-8 for each VCSEL group #1 to #8. In Figure 6, in the first embodiment, the individual VCSEL group #1 is configured to irradiate laser light over an irradiation area 42-1 that is larger in area than the irradiation area 41-1.

[0039] Furthermore, methods to make the area of ​​the irradiation area 42-1 larger than the area of ​​the irradiation target area 41-1 include, for example, increasing the number of VCSELs or widening the spacing between them. Alternatively, it is also possible to change the shape, material, and other configurations of the focusing lens 60 and the diffusion member 30, as well as their arrangement (positional relationship), such as distance and location, so that the irradiation area 42-1 is larger than the irradiation target area 41-1.

[0040] (Adjustment of surface-emitting laser element array) Figure 7 is an explanatory diagram of the displacement between the irradiation target area and the irradiation area in a conventional configuration. Figure 7A is an explanatory diagram of the ideal state with no displacement, and Figure 7B is an explanatory diagram of the state where displacement occurs. Figure 8 is an explanatory diagram illustrating the discrepancy between the irradiation target area and the irradiation area. Figure 8A is an explanatory diagram for the case where the irradiation area extends beyond both the left and right sides of the irradiation target area, and Figure 8B is an explanatory diagram for the case where the irradiation area extends only to the right side of the irradiation target area. When manufacturing the light-emitting device 4 of the first embodiment, first, a focusing lens 60 and a diffusing member 30 are installed for the VCSEL group #1 to #8 so as to be directed toward the irradiation target area 40.

[0041] Next, the misalignment between each irradiation target area 41-1 to 41-8 and the irradiation areas 42-1 to 42-8 is inspected. However, individual differences, manufacturing errors, and assembly errors in each VCSEL and focusing lens 60 are unavoidable. As shown in Figure 7, if the conventional configuration is manufactured so that the range of irradiation target area 01 and the range of irradiation area 02 coincide, achieving the ideal state shown in Figure 7A is difficult in practice, and as shown in Figure 7B, the irradiation target area 01 and the irradiation area 02 may be misaligned. When this misalignment occurs, there is a problem in that the measurement accuracy of the three-dimensional sensor 5 decreases.

[0042] In the first embodiment, the irradiation areas 42-1 to 42-8 are set to be wider than the irradiation target areas 41-1 to 41-8, and the deviation between the actual irradiation area 42-1 after assembly and the irradiation target area 41-1 is inspected. For example, in the case shown in Figure 8A, it is inspected if the areas 51 corresponding to two lines of element groups #1-1, #1-2, #1-15, and #1-16 extend beyond (are misaligned) on both the left and right sides of the irradiation target area 41-1. As another example, in the case shown in Figure 8B, it is inspected if the areas 51' corresponding to three lines of element groups #1-1, #1-2, and #1-3 extend beyond (are misaligned) on both the right side of the irradiation target area 41-1.

[0043] Next, based on the deviation confirmed during inspection, the VCSELs corresponding to the area outside the irradiation target region 41-1 are set to be turned off. That is, in the example shown in Figure 8A, the VCSELs of element groups #1-1, #1-2, #1-15, and #1-16 are set to be turned off, and in the example shown in Figure 8B, the VCSELs of element groups #1-1, #1-2, and #1-3 are set to be turned off. Controlling the VCSELs by turning them on and off in units of element groups is simpler than turning them on and off individually.

[0044] Here, due to the circuit configuration, the surface-emitting laser element array does not light up all VCSELs simultaneously, but lights them up (drives) sequentially as follows: element group #1-1 → element group #1-2 → element group #1-3 → ... → element group #1-16 → element group #1-1 → ... In the example in Figure 8A, if you want to turn off element groups #1-1, #1-2, #1-15, and #1-16, it is also possible to control the lighting in the following order: skip (element group #1-1) → skip (element group #1-2) → element group #1-3 → element group #1-4 → ... → element group #1-14 → skip (element group #1-15) → skip (element group #1-16) → skip (element group #1-1) → skip (element group #1-2) → element group #1-3... Note that "skip" is used to mean turning off. However, in this configuration, the period of time the lights remain off tends to be long. Therefore, it is desirable to drive the lights by rearranging the order of illumination according to the position of the group of elements to be turned off, such as element group #1-3 → element group #1-4 → ... → element group #1-14 → element group #1-3...

[0045] In the light-emitting device 4 of the first embodiment having the above configuration, the VCSELs corresponding to the outside of the irradiation target areas 41-1 to 41-8 are turned off when the surface-emitting laser element array 10 has irradiation areas 42-1 to 42-8 which are wider than the irradiation target areas 41-1 to 41-8, and laser light is irradiated onto the irradiation target areas 41-1 to 41-8. Therefore, compared to the conventional configuration in which a misalignment occurs between the irradiation target area 01 and the irradiation area 02 as shown in Figure 7, it is possible to irradiate the target area with light even if a misalignment occurs between the irradiation target areas 41-1 to 41-8 and the irradiation areas 42-1 to 42-8 due to manufacturing errors, assembly errors, etc.

[0046] (Example of change) Although embodiments of the present invention have been described in detail above, the present invention is not limited to the embodiments described above, and various modifications can be made within the scope of the gist of the present invention as described in the claims. Examples of modifications to the present invention (H01) to (H05) are shown below. (H01) In the above embodiment, the number and arrangement of VCSELs are not limited to the example number and arrangement. They can be arbitrarily changed depending on the design and specifications. (H02) In the above embodiment, an example was given in which one set consists of four VCSELs arranged in a straight line for the element group, but the invention is not limited to this. The number and arrangement of elements in one set can be arbitrarily changed depending on the settings of the arrangement and irradiation area, etc.

[0047] (H03) In the above embodiment, an example was given in which the switching of on and off is performed on a group-by-group basis, but the invention is not limited to this. It can also be applied to a configuration in which each VCSEL is controlled individually to turn on and off. (H04) In the above embodiment, an example was shown in which the irradiation area 42 is shifted in the y direction relative to the irradiation target area 41, but it is not limited to this. It is also applicable when it is shifted in the x direction, and when it is shifted in two dimensions, in the x and y directions. In this case, the irradiation area 42 also needs to be set to be wide not only in the y direction but also in the x direction relative to the irradiation target area 41. Furthermore, when it is shifted in two dimensions, it is desirable to control the VCSELs to be turned off individually rather than at the element group level, so that it can respond finely according to the shift.

[0048] (H05) In the above embodiment, all areas shifted from the irradiation target area 41 were turned off, but this is not limited to this. If an element group unit spans both the irradiation target area 41 and areas shifted from the irradiation target area 41, it is necessary to irradiate the areas shifted from the irradiation target area 41 as well. Furthermore, even turning off only a part of the areas shifted from the irradiation target area 41 increases the rate at which light is irradiated to the target irradiation area compared to irradiating all of the areas shifted from the irradiation target area. [Explanation of Symbols]

[0049] 10, #1~#8... Surface-emitting laser element array, 30, 60… Optical elements, 41... Irradiation target area, 42...Irradiation area, VCSEL… Surface-emitting laser element, #1-1 to #8-16... group of elements.

Claims

1. A surface-emitting laser element that outputs laser light perpendicular to the substrate surface, wherein the surface-emitting laser element is capable of switching between on and off, An optical element positioned in correspondence with the surface-emitting laser element, directing the laser light output from the surface-emitting laser element towards a predetermined target irradiation area, Equipped with, The area of ​​the irradiation region to which the laser light is actually irradiated is configured to be larger than the area of ​​the target irradiation region, The surface-emitting laser element corresponding to the area outside the irradiated region is turned off. A surface-emitting laser element array characterized by the following:

2. The surface-emitting laser elements are arranged on a surface in such a number that the area of ​​the irradiation region is larger than the area of ​​the area to be irradiated, The surface-emitting laser element array according to claim 1, characterized by comprising the above.

3. The optical element that guides the laser light such that the area of ​​the irradiation region is larger than the area of ​​the area to be irradiated, A surface-emitting laser element array according to claim 1 or 2, characterized by comprising the above.

4. Each group of elements, which has multiple surface-emitting laser elements arranged along a predetermined line, can be switched on and off. A surface-emitting laser element array according to any one of claims 1 to 3.

5. The order in which the illuminated elements light up is changed according to the position of the elements that are turned off. The surface-emitting laser element array according to feature 4.

6. The surface-emitting laser elements can be individually switched on and off. A surface-emitting laser element array according to any one of claims 1 to 3.

7. A process of arranging an optical element to direct the laser light output from a surface-emitting laser element, which outputs laser light perpendicular to the substrate surface, onto a target irradiation area, A step of inspecting the displacement of the irradiation area relative to the irradiation target area, with respect to the irradiation target area which is configured to have a larger area than the area of ​​the irradiation area to which the laser light is irradiated, A step of setting the surface-emitting laser element corresponding to the area outside the area to be irradiated based on the displacement of the irradiation area relative to the irradiation target area, A method for manufacturing a surface-emitting laser element array, characterized by comprising the following:

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