Laser crystallization apparatus
The laser crystallization apparatus optimizes the optical unit's structure with joined parts and sub-optical sections to irradiate a wide area efficiently, addressing the challenge of large glass substrates without cost increases.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- SAMSUNG DISPLAY CO LTD
- Filing Date
- 2021-12-28
- Publication Date
- 2026-05-27
AI Technical Summary
Existing laser crystallization apparatuses face challenges in irradiating a laser beam over a large area without increasing manufacturing costs, particularly as glass substrates for display devices become larger.
The laser crystallization apparatus is designed with an optical unit comprising a first and second part joined at a joining surface, where the widths and lengths of these parts are optimized to allow for efficient laser beam irradiation over a wide area, using optical contact bonding or welding to join these parts, and incorporating multiple sub-optical sections arranged to distribute the beam uniformly.
This design enables irradiation of a laser beam over a large area without increasing manufacturing costs, ensuring uniformity and efficiency in the crystallization process.
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Abstract
Description
Technical Field
[0001] The present disclosure relates to a laser crystallization apparatus.
Background Art
[0002] A liquid crystal display (LCD) and an organic light emitting display (OLED), which are types of flat panel display devices, can be miniaturized and lightened, and thus are widely used as display devices for portable electronic devices, and their application areas are also expanding to large-area display devices. In particular, recently, there is an increasing need for display devices that require high-speed operation characteristics, and research on them is being actively conducted.
[0003] In order to satisfy high-speed operation characteristics, poly-silicon is used instead of amorphous silicon to form the channel portion of a thin film transistor.
[0004] An annealing method using a laser has been disclosed as a method for forming poly-silicon.
[0005] On the other hand, as the glass substrate for forming a display device becomes larger, it is important to irradiate a laser beam over a wide area.
Summary of the Invention
Problems to be Solved by the Invention
[0006] An object of an embodiment of the present invention is to provide a laser crystallization apparatus capable of irradiating a laser beam over a large area without increasing manufacturing costs.
[0007] It is obvious that an object of an embodiment of the present invention is not limited to the above-mentioned object, and can be variously extended without departing from the spirit and scope of the present invention.
Means for Solving the Problems
[0008] A laser crystallization apparatus according to one embodiment includes a light source unit and an optical unit into which a laser beam irradiated from the light source unit is incident, the optical unit includes a first part and a second part joined to each other at a joining surface, and the first width of the first part and the second width of the second part may be the same as each other at the joining surface with respect to a direction parallel to the direction in which the laser beam is incident.
[0009] With respect to a direction perpendicular to the direction in which the laser beam is incident, the first length of the first portion and the second length of the second portion may be different from each other.
[0010] The first and second parts may be joined by optical contact bonding or welding.
[0011] The bonding surface may be parallel to the direction in which the laser beam is incident.
[0012] The bonding surface may be inclined at a certain angle with respect to the direction in which the laser beam is incident.
[0013] With respect to a direction perpendicular to the direction in which the laser beam is incident, the width of the bonding surface may be 0.3% or more and 0.6% or less of the length of the optical part.
[0014] With respect to a direction perpendicular to the direction in which the laser beam is incident, the length of the optical section may be between 2000 mm and 2500 mm.
[0015] A laser crystallization apparatus according to another embodiment includes a light source and an optical section into which a laser beam irradiated from the light source is incident and which includes a plurality of sub-optical sections, each of which includes a first portion and a second portion joined to each other at a bonding surface, and the plurality of sub-optical sections may be arranged sequentially with reference to a direction parallel to the direction in which the laser beam is incident.
[0016] The plurality of sub-optical units may include a first sub-optical unit and a second sub-optical unit, and the length of the first portion of the first sub-optical unit may be different from the length of the first portion of the second sub-optical unit.
[0017] The bonding surface of the first sub-optical unit and the bonding surface of the second sub-optical unit may be positioned offset from each other with respect to a direction parallel to the direction in which the laser beam is incident.
[0018] With respect to a direction parallel to the direction in which the laser beam is incident, the first width of the first portion and the second width of the second portion at the joining surface may be the same as each other.
[0019] The bonding surface of the first sub-optical unit and the bonding surface of the second sub-optical unit may be parallel to the direction in which the laser beam is incident.
[0020] The bonding surface of the first sub-optical unit and the bonding surface of the second sub-optical unit may be inclined at a certain angle with respect to the direction in which the laser beam is incident.
[0021] With respect to a direction perpendicular to the direction in which the laser beam is incident, the width of the bonding surface of the first sub-optical part may be 0.3% or more and 0.6% or less of the length of the first sub-optical part.
[0022] The length of the first sub-optical section may be between 2000 mm and 2500 mm.
[0023] The plurality of sub-optical units may be joined together and arranged along the direction in which the laser beam is incident.
[0024] The plurality of sub-optical units may be arranged spaced apart from each other along the direction in which the laser beam is incident.
[0025] The laser crystallization apparatus according to an embodiment includes a light source unit and an optical unit into which the laser beam irradiated from the light source unit is incident. The optical unit includes a first part and a second part joined to each other at a joint surface, and the joint surface may be inclined so as to form a certain angle with the direction in which the laser beam is incident.
Advantages of the Invention
[0026] According to the laser crystallization apparatus according to one embodiment, a laser beam can be irradiated over a large area without increasing the manufacturing cost.
[0027] It is obvious that the effects of the present invention are not limited to the effects described above, and can be variously extended without departing from the spirit and scope of the present invention.
Brief Description of the Drawings
[0028] [Figure 1] It is a schematic perspective view showing a laser crystallization apparatus according to one embodiment. [Figure 2] It is a drawing showing a part of the laser crystallization apparatus of FIG. [Figure 3] It is a layout diagram of a laser crystallization apparatus according to one embodiment. [Figure 4] It is a perspective view conceptually showing the optical unit of the laser crystallization apparatus of FIG. [Figure 5] It is a drawing showing an example of the optical unit of a laser crystallization apparatus according to another embodiment. [Figure 6] It is an exploded perspective view of the optical unit of FIG. [Figure 7] It is a graph conceptually showing the change in intensity of a laser beam passing through the optical unit of a laser crystallization apparatus according to one embodiment. [Figure 8] It is a drawing showing an example of the optical unit of a laser crystallization apparatus according to another embodiment. [Figure 9] It is a drawing showing an example of the optical unit of a laser crystallization apparatus according to another embodiment. [Figure 10] It is an exploded perspective view of the optical unit of FIG. [Figure 11]This graph conceptually shows the intensity change of the laser beam as it passes through the optical section of a laser crystallization apparatus according to another embodiment. [Figure 12] This is a drawing showing an example of the optical section of a laser crystallization apparatus according to another embodiment. [Modes for carrying out the invention]
[0029] Hereinafter, various embodiments of the present invention will be described in detail with reference to the attached drawings, so that they can be easily implemented by a person with ordinary skill in the art to which the present invention pertains. The present invention can be realized in a variety of different forms and is not limited to the embodiments described herein.
[0030] To clearly explain the present invention, unnecessary explanatory parts have been omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.
[0031] Furthermore, the dimensions and thicknesses of each component shown in the drawings are arbitrarily indicated for the sake of explanation, and therefore the present invention is not necessarily limited to what is shown in the drawings. In the drawings, the thicknesses are shown enlarged to clearly represent multiple layers and regions. Also, in the drawings, the thicknesses of some layers and regions are shown exaggerated for the sake of explanation.
[0032] Furthermore, when a part such as a layer, film, region, or substrate is said to be "on top" of another part, this includes not only when it is "directly above" the other part, but also when the other part is in between. Conversely, when one part is said to be "directly above" another part, it means that there is no other part in between. Also, being "on top" of a reference part means being located above or below the reference part, and does not necessarily mean being located "up" in the opposite direction of gravity.
[0033] Furthermore, when a specification states that a part "includes" a certain component, unless otherwise stated, this means that other components are not excluded and that other components may be included.
[0034] Furthermore, throughout the specification, "planar" refers to the view of the subject from above, and "cross-sectional" refers to the view of a cross-section obtained by cutting the subject perpendicularly, as seen from the side.
[0035] Furthermore, throughout the specification, the term "connected" does not only mean that two or more components are directly connected, but may also mean that two or more components are indirectly connected through other components, that they are not only physically connected but also electrically connected, or that they are a single unit despite being referred to by different names based on their location or function.
[0036] Furthermore, throughout the specification, “parallel” includes not only cases where lines are perfectly parallel, but also cases where they can be considered substantially parallel. Furthermore, throughout the specification, “perpendicular” includes not only cases where lines are perfectly perpendicular, but also cases where they can be considered substantially perpendicular. Furthermore, throughout the specification, “identical” includes not only cases where lines are perfectly identical, but also cases where they can be considered substantially identical.
[0037] A crystallization apparatus according to one embodiment will be described with reference to Figures 1 and 2. Figure 1 is a schematic perspective view showing a laser crystallization apparatus according to one embodiment of the present invention, and Figure 2 is a drawing showing a part of the laser crystallization apparatus of Figure 1.
[0038] First, referring to Figure 1, the laser crystallization apparatus according to this embodiment includes a light source unit LS, a first optical unit OP1, a second optical unit M, a third optical unit OP2, a fourth optical unit W1, a fifth optical unit W2, and a transfer stage 18.
[0039] Along the third direction dz, the substrate 14 containing the amorphous silicon thin film 16 is positioned on the transfer stage 18, and the amorphous silicon thin film 16 is irradiated from above to below in a direction parallel to the third direction dz by the laser crystallization apparatus according to this embodiment, and scanned along the scanning direction.
[0040] At this time, the position of the laser beam 20 is fixed, and the transfer stage 18 can move in the transfer direction a2. In other words, as the transfer stage 18 moves, the laser beam 20 scans the amorphous silicon thin film 16 in the scanning direction, which is opposite to the transfer direction a2, and the amorphous silicon in the scanned region 16a can be transformed into polycrystalline silicon through a post-molten solid phase process.
[0041] The laser beam 20 can have a line shape extending in the first direction dx, and the crystallization step to transform into polycrystalline silicon can only be uniformly carried out when a laser beam of uniform intensity is irradiated in the first direction dx and the second direction dy.
[0042] The first optical section OP1 is a long-axis lens, the second optical section M is a mirror, the third optical section OP2 is a short-axis lens, and the fourth optical section W1 and the fifth optical section W2 may be windows. The short-axis lens may be a condenser lens or an image formation lens. However, the first optical section OP1, the second optical section M, the third optical section OP2, the fourth optical section W1, and the fifth optical section W2 are not limited to these and may be other optical devices.
[0043] The laser beam B supplied from the light source unit LS passes through the first optical unit OP1, is focused in the long axis direction, its path is transformed in the second optical unit M, then it passes through the third optical unit OP2, is diffused in the short axis direction, and passes through the fourth optical unit W1 and the fifth optical unit W2 to be supplied as a line-shaped laser beam 20.
[0044] Although the laser crystallization apparatus according to the illustrated embodiment is described as including a first optical section OP1, a second optical section M, a third optical section OP2, a fourth optical section W1, and a fifth optical section W2, it is not limited to this and may further include several other optical systems, and some of the first optical section OP1, second optical section M, third optical section OP2, fourth optical section W1, and fifth optical section W2 may be omitted.
[0045] The optical section of a laser crystallization apparatus according to one embodiment will be described in more detail below with reference to Figures 3 and 4. Figure 3 is a layout diagram of a laser crystallization apparatus according to one embodiment, and Figure 4 is a conceptual perspective view showing the optical section of the laser crystallization apparatus of Figure 3.
[0046] First, referring to Figure 3, as mentioned above, the laser crystallization apparatus according to one embodiment includes a first optical section OP1, a second optical section M, a third optical section OP2, a fourth optical section W1, and a fifth optical section W2 through which the laser beam B supplied from the light source section LS passes.
[0047] The first optical unit OP1 includes a first portion OP1a and a second portion OP1b. The first portion OP1a and the second portion OP1b of the first optical unit OP1 are joined to each other. The first portion OP1a and the second portion OP1b of the first optical unit OP1 may be joined to each other by optical contact bonding or welding.
[0048] The first length La of the first part OP1a of the first optical unit OP1 and the second length Lb of the second part OP1b of the first optical unit OP1 may be different from each other. However, the first length La of the first part OP1a of the first optical unit OP1 and the second length Lb of the second part OP1b of the first optical unit OP1 may be the same from each other. Here, the first length La and the second length Lb are lengths measured with respect to a direction perpendicular to the direction in which the laser beam B is incident.
[0049] The sum of the first length La of the first part OP1a of the first optical section OP1 and the second length Lb of the second part OP1b of the first optical section OP1 (La + Lb) may be approximately 2000 mm or more and 2500 mm or less.
[0050] The junction between the first part OP1a and the second part OP1b of the first optical unit OP1 may be parallel to the incident direction of the laser beam B, and the widths of the first part OP1a and the second part OP1b of the first optical unit OP1, measured in a direction parallel to the incident direction of the laser beam B, may be the same as those of the first part OP1a and the second part OP1b of the first optical unit OP1.
[0051] Similarly, the second optical section M includes a first section Ma and a second section Mb that are joined together, and the first length La of the first section Ma and the second length Lb of the second section Mb of the second optical section M may be different from each other. However, the first length La of the first section Ma and the second length Lb of the second section Mb of the second optical section M may be the same. The sum of the first length La of the first section Ma and the second length Lb of the second section Mb of the second optical section M (La + Lb) may be between approximately 2000 mm and 2500 mm. Here, the first length La and the second length Lb are lengths measured with respect to a direction perpendicular to the direction in which the laser beam B is incident.
[0052] Furthermore, the junction between the first part Ma and the second part Mb of the second optical section M may be parallel to the incident direction of the laser beam B, and the widths of the first part Ma and the second part Mb of the second optical section M, measured in a direction parallel to the incident direction of the laser beam B at the junction between the first part Ma and the second part Mb of the second optical section M, may be the same as those of the second optical section M.
[0053] Similarly, the third optical section OP2 includes a first section OP2a and a second section OP2b that are joined together, and the first length La of the first section OP2a and the second length Lb of the second section OP2b of the third optical section OP2 may be different from each other. However, the first length La of the first section OP2a and the second length Lb of the second section OP2b of the third optical section OP2 may be the same. The sum of the first length La of the first section OP2a and the second length Lb of the second section OP2b of the third optical section OP2 (La + Lb) may be approximately 2000 mm or more and 2500 mm or less. Here, the first length La and the second length Lb are lengths measured with respect to a direction perpendicular to the direction in which the laser beam B is incident.
[0054] Furthermore, the junction between the first portion OP2a and the second portion OP2b of the third optical unit OP2 may be parallel to the incident direction of the laser beam B, and the widths of the first portion OP2a and the second portion OP2b of the third optical unit OP2, measured in a direction parallel to the incident direction of the laser beam B, may be the same as those of the second portion OP2b of the third optical unit OP2.
[0055] Furthermore, the fourth optical section W1 includes a first section W1a and a second section W1b that are joined together, and the first length La of the first section W1a and the second length Lb of the second section W1b of the fourth optical section W1 may be different from each other. However, the first length La of the first section W1a and the second length Lb of the second section W1b of the fourth optical section W1 may be the same. The sum of the first length La of the first section W1a and the second length Lb of the second section W1b of the fourth optical section W1 (La + Lb) may be approximately 2000 mm or more and 2500 mm or less. Here, the first length La and the second length Lb are lengths measured with respect to a direction perpendicular to the direction in which the laser beam B is incident.
[0056] Furthermore, the junction between the first part W1a and the second part W1b of the fourth optical unit W1 may be parallel to the incident direction of the laser beam B, and the widths of the first part W1a and the second part W1b of the fourth optical unit W1, measured in a direction parallel to the incident direction of the laser beam B, may be the same as those of the second part W1b of the fourth optical unit W1.
[0057] Similarly, the fifth optical section W2 includes a first section W2a and a second section W2b that are joined together, and the first length La of the first section W2a and the second length Lb of the second section W2b of the fifth optical section W2 may be different from each other. However, the first length La of the first section W2a and the second length Lb of the second section W2b of the fifth optical section W2 may be the same. The sum of the first length La of the first section W2a and the second length Lb of the second section W2b of the fifth optical section W2 (La + Lb) may be approximately 2000 mm or more and 2500 mm or less. Here, the first length La and the second length Lb are lengths measured with respect to a direction perpendicular to the direction in which the laser beam B is incident.
[0058] Furthermore, the joint between the first part W2a and the second part W2b of the fifth optical unit W2 may be parallel to the incident direction of the laser beam B, and the widths of the first part W2a and the second part W2b of the fifth optical unit W2, measured in a direction parallel to the incident direction of the laser beam B, may be the same as those of the second part W2b of the fifth optical unit W2.
[0059] The first length La of the first part OP1a of the first optical part OP1 may be different from or the same as the first length La of the first part Ma of the second optical part M. Similarly, the second length Lb of the second part OP1b of the first optical part OP1 may be different from or the same as the second length Lb of the second part Mb of the second optical part M.
[0060] The first length La of the first part Ma of the second optical section M may be different from or the same as the first length La of the first part OP2a of the third optical section OP2. Also, the second length Lb of the second part Mb of the second optical section M may be different from or the same as the second length Lb of the second part OP2b of the third optical section OP2.
[0061] The first length La of the first part OP2a of the third optical section OP2 may be different from or the same as the first length La of the first part W1a of the fourth optical section W1. Similarly, the second length Lb of the second part OP2b of the third optical section OP2 may be different from or the same as the second length Lb of the second part W1b of the fourth optical section W1.
[0062] The first length La of the first part W1a of the fourth optical section W1 may be different from or the same as the first length La of the first part W2a of the fifth optical section W2. Also, the second length Lb of the second part W1b of the fourth optical section W1 may be different from or the same as the second length Lb of the second part W2b of the fifth optical section W2.
[0063] The first length La of the first part W2a of the fifth optical section W2 may be different from or the same as the first length La of the first part OP1a of the first optical section OP1. Also, the second length Lb of the second part W2b of the fifth optical section W2 may be different from or the same as the second length Lb of the second part OP1b of the first optical section OP1.
[0064] In the embodiment shown in Figure 3, each of the optical sections OP1, M, OP2, W1, and W2 of the laser crystallization apparatus is described as including a first part and a second part joined to each other. However, the invention is not limited to this, and at least one of the optical sections OP1, M, OP2, W1, and W2 of the laser crystallization apparatus may include a first part and a second part joined to each other.
[0065] The structures of the optical sections OP1, M, OP2, W1, and W2 of the laser crystallization apparatus according to the embodiment shown in Figure 3 will be described in more detail below with reference to Figure 4.
[0066] The optical sections OP1, M, OP2, W1, and W2 of the laser crystallization apparatus according to the embodiment shown in Figure 3 can have a structure similar to that of optical section OP shown in Figure 4.
[0067] Referring to Figure 4, the optical section OP of the laser crystallization apparatus according to this embodiment includes a first section Pa and a second section Pb joined together. The first section Pa and the second section Pb of the optical section OP may include glass.
[0068] The first portion Pa and the second portion Pb of the optical unit OP can be joined to each other by optical contact bonding or welding. Furthermore, the bonding surface Sab of the first portion Pa and the second portion Pb of the optical unit OP may be parallel to the incident direction of the laser beam B. The first width Wa of the first portion Pa and the second width Wb of the second portion Pb, measured in a direction parallel to the incident direction of the laser beam B at the bonding surface Sab of the optical unit OP, may be identical to each other.
[0069] As the size of glass substrates used to form display devices increases, laser crystallization equipment must irradiate a wider area with a laser beam, which in turn necessitates a larger optical section. When using a single piece of glass to form a large optical section, manufacturing costs increase.
[0070] However, the laser crystallization apparatus according to this embodiment includes an optical section comprising a first part and a second part joined together, and the joint between the first part and the second part can be joined together by optical contact bonding or welding. Therefore, a laser crystallization apparatus including an optical section with a large size can be formed without increasing the manufacturing cost of the laser crystallization apparatus.
[0071] The following describes a laser crystallization apparatus according to another embodiment, with reference to Figure 5. Figure 5 is a diagram showing an example of the optical section of a laser crystallization apparatus according to another embodiment.
[0072] As described above, the laser crystallization apparatus according to this embodiment includes a plurality of optical units OP1, M, OP2, W1, and W2, and at least one of the plurality of optical units OP1, M, OP2, W1, and W2 of the laser crystallization apparatus may have the structure of optical unit OP shown in Figure 5.
[0073] Referring to Figure 5, the optical section OP of the laser crystallization apparatus according to this embodiment can include a plurality of sub-optical sections O1, O2, O3, O4, and O5 that are joined to each other.
[0074] The first sub-optical section O1, the second sub-optical section O2, the third sub-optical section O3, the fourth sub-optical section O4, and the fifth sub-optical section O5 of the optical section OP can be connected to one another.
[0075] The first sub-optical section O1 of the optical section OP includes a first part O1a and a second part O1b joined together; the second sub-optical section O2 of the optical section OP includes a third part O2a and a fourth part O2b joined together; the third sub-optical section O3 of the optical section OP includes a fifth part O3a and a sixth part O3b joined together; the fourth sub-optical section O4 of the optical section OP includes a seventh part O4a and an eighth part O4b joined together; and the fifth sub-optical section O5 of the optical section OP may include a ninth part O5a and a tenth part O5b joined together.
[0076] The first part O1a and the second part O1b of the first sub-optical part O1 of the optical part OP are joined to each other at the first bonding surface Sab1, the third part O2a and the fourth part O2b of the second sub-optical part O2 of the optical part OP are joined to each other at the second bonding surface Sab2, the fifth part O3a and the sixth part O3b of the third sub-optical part O3 of the optical part OP are joined to each other at the third bonding surface Sab3, the seventh part O4a and the eighth part O4b of the fourth sub-optical part O4 of the optical part OP are joined to each other at the fourth bonding surface Sab4, and the ninth part O5a and the tenth part O5b of the fifth sub-optical part O5 of the optical part OP are joined to each other at the fifth bonding surface Sab5.
[0077] The first bonding surface Sab1 of the first sub-optical section O1 of the optical section OP, the second bonding surface Sab2 of the second sub-optical section O2 of the optical section OP, the third bonding surface Sab3 of the third sub-optical section O3 of the optical section OP, the fourth bonding surface Sab4 of the fourth sub-optical section O4 of the optical section OP, and the fifth bonding surface Sab5 of the fifth sub-optical section O5 of the optical section OP may each be parallel to the incident direction of the laser beam B incident on the optical section OP. Furthermore, with reference to a direction parallel to the incident direction of the laser beam B incident on the optical section OP, the first bonding surface Sab1 of the first sub-optical section O1 of the optical section OP, the second bonding surface Sab2 of the second sub-optical section O2 of the optical section OP, the third bonding surface Sab3 of the third sub-optical section O3 of the optical section OP, the fourth bonding surface Sab4 of the fourth sub-optical section O4 of the optical section OP, and the fifth bonding surface Sab5 of the fifth sub-optical section O5 of the optical section OP may not be arranged in a straight line with respect to each other, but rather offset from each other.
[0078] The sub-optical section of the optical section in Figure 5 will be explained in more detail below, with reference to Figure 6 along with Figure 5. Figure 6 is an exploded perspective view of the optical section in Figure 5.
[0079] Referring to Figure 6 along with Figure 5, the optical section OP of the laser crystallization apparatus according to this embodiment includes a plurality of sub-optical sections O1, O2, O3, O4, and O5.
[0080] The first sub-optical part O1 of the optical part OP includes a first part O1a and a second part O1b that are joined to each other at a first bonding surface Sab1, and the first length L01 of the first part O1a of the first sub-optical part O1 of the optical part OP and the second length L11 of the second part O1b of the first sub-optical part O1 of the optical part OP may be different from each other or may be the same from each other.
[0081] The first bonding surface Sab1 of the first sub-optical section O1 of the optical section OP may be a surface substantially parallel to the incident direction of the laser beam B, and with respect to the direction parallel to the incident direction of the laser beam B, the first width Wa of the first part O1a of the first sub-optical section O1 and the second width Wb of the second part O1b of the first sub-optical section O1 may be the same as each other on the first bonding surface Sab1.
[0082] The second sub-optical part O2 of the optical part OP includes a third part O2a and a fourth part O2b that are joined to each other at the second bonding surface Sab2, and the third length L02 of the third part O2a of the second sub-optical part O2 of the optical part OP and the fourth length L12 of the fourth part O2b of the second sub-optical part O2 of the optical part OP may be different from each other or may be the same from each other.
[0083] The second bonding surface Sab2 of the second sub-optical section O2 of the optical section OP may be a surface substantially parallel to the incident direction of the laser beam B, and with respect to the direction parallel to the incident direction of the laser beam B, the first width Wa of the third portion O2a of the second sub-optical section O2 and the second width Wb of the fourth portion O2b of the second sub-optical section O2 may be the same as each other on the second bonding surface Sab2.
[0084] The third sub-optical part O3 of the optical part OP includes a fifth part O3a and a sixth part O3b that are joined to each other at the third bonding surface Sab3, and the fifth length L03 of the fifth part O3a and the sixth length L13 of the sixth part O3b of the third sub-optical part O3 of the optical part OP may be different from each other or may be the same from each other.
[0085] The third bonding surface Sab3 of the third sub-optical section O3 of the optical section OP may be a surface substantially parallel to the incident direction of the laser beam B, and with respect to the direction parallel to the incident direction of the laser beam B, the first width Wa of the fifth portion O3a of the third sub-optical section O3 and the second width Wb of the sixth portion O3b of the third sub-optical section O3 may be the same as each other on the third bonding surface Sab3.
[0086] The fourth sub-optical part O4 of the optical part OP includes a seventh part O4a and an eighth part O4b that are joined to each other at the fourth bonding surface Sab4, and the seventh length L04 of the seventh part O4a and the eighth length L14 of the eighth part O4b of the fourth sub-optical part O4 of the optical part OP may be different from each other or may be the same from each other.
[0087] The fourth bonding surface Sab4 of the fourth sub-optical section O4 of the optical section OP may be a surface substantially parallel to the incident direction of the laser beam B, and with respect to the direction parallel to the incident direction of the laser beam B, the first width Wa of the seventh portion O4a and the second width Wb of the eighth portion O4b of the fourth sub-optical section O4 may be the same as each other on the fourth bonding surface Sab4.
[0088] The fifth sub-optical part O5 of the optical part OP includes a ninth part O5a and a tenth part O5b that are joined to each other at the fifth bonding surface Sab5, and the ninth length L05 of the ninth part O5a and the tenth length L15 of the tenth part O5b of the fifth sub-optical part O5 of the optical part OP may be different from each other or may be the same from each other.
[0089] The fifth bonding surface Sab5 of the fifth sub-optical section O5 of the optical section OP may be a surface substantially parallel to the incident direction of the laser beam B, and with respect to the direction parallel to the incident direction of the laser beam B, the first width Wa of the ninth portion O5a and the second width Wb of the tenth portion O5b of the fifth sub-optical section O5 may be the same as each other on the fifth bonding surface Sab5.
[0090] The first length L01 of the first part O1a of the first sub-optical part O1 of the optical part OP, the third length L02 of the third part O2a of the second sub-optical part O2 of the optical part OP, the fifth length L03 of the fifth part O3a of the third sub-optical part O3 of the optical part OP, the seventh length L04 of the seventh part O4a of the fourth sub-optical part O4 of the optical part OP, and the ninth length L05 of the ninth part O5a of the fifth sub-optical part O5 of the optical part OP may be different from each other. Here, the first length L01, the third length L02, the fifth length L03, the seventh length L04, and the ninth length L05 may be lengths measured in a direction perpendicular to the direction in which the laser beam B is incident.
[0091] Similarly, the second length L11 of the second portion O1b of the first sub-optical section O1 of the optical section OP, the fourth length L12 of the fourth portion O2b of the second sub-optical section O2 of the optical section OP, the sixth length L13 of the sixth portion O3b of the third sub-optical section O3 of the optical section OP, the eighth length L14 of the eighth portion O4b of the fourth sub-optical section O4 of the optical section OP, and the tenth length L15 of the tenth portion O5b of the fifth sub-optical section O5 of the optical section OP may be different from each other. Here, the second length L11, the fourth length L12, the sixth length L13, the eighth length L14, and the tenth length L15 may be lengths measured in a direction perpendicular to the direction in which the laser beam B is incident.
[0092] The first part O1a and the second part O1b of the first sub-optical part O1 of the optical part OP are joined to each other through optical contact bonding or welding; the third part O2a and the fourth part O2b of the second sub-optical part O2 of the optical part OP are joined to each other through optical contact bonding or welding; the fifth part O3a and the sixth part O3b of the third sub-optical part O3 of the optical part OP are joined to each other through optical contact bonding or welding; the seventh part O4a and the eighth part O4b of the fourth sub-optical part O4 of the optical part OP are joined to each other through optical contact bonding or welding; and the ninth part O5a and the tenth part O5b of the fifth sub-optical part O5 of the optical part OP may be joined to each other through optical contact bonding or welding.
[0093] Furthermore, the first sub-optical section O1, the second sub-optical section O2, the third sub-optical section O3, the fourth sub-optical section O4, and the fifth sub-optical section O5 of the optical section OP are arranged sequentially along a direction parallel to the incident direction of the laser beam B, and the first sub-optical section O1, the second sub-optical section O2, the third sub-optical section O3, the fourth sub-optical section O4, and the fifth sub-optical section O5 of the optical section OP can be joined to each other through optical contact bonding or welding.
[0094] With respect to a direction parallel to the incident direction of the laser beam B incident on the optical unit OP, the first bonding surface Sab1 of the first sub-optical unit O1 of the optical unit OP, the second bonding surface Sab2 of the second sub-optical unit O2 of the optical unit OP, the third bonding surface Sab3 of the third sub-optical unit O3 of the optical unit OP, the fourth bonding surface Sab4 of the fourth sub-optical unit O4 of the optical unit OP, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP may not be arranged in a straight line with respect to each other, but rather offset from each other.
[0095] As previously explained in the embodiments shown in Figures 5 and 6, the optical section of the laser crystallization apparatus according to one embodiment includes five sub-optical sections O1, O2, O3, O4, and O5. However, the number of sub-optical sections is not limited to this and can be varied.
[0096] The following describes the intensity change of the laser beam that has passed through the optical section of a laser crystallization apparatus according to one embodiment, with reference to Figures 5 and 6, as well as Figure 7. Figure 7 is a conceptual graph showing the intensity change of the laser beam that has passed through the optical section of a laser crystallization apparatus according to one embodiment.
[0097] Referring to Figure 7 in conjunction with Figures 5 and 6, as the laser beam B passes through the first sub-optical section O1, second sub-optical section O2, third sub-optical section O3, fourth sub-optical section O4, and fifth sub-optical section O5 of the optical section OP, the intensity BL of the laser beam B may decrease at the first bonding surface Sab1 of the first sub-optical section O1, the second bonding surface Sab2 of the second sub-optical section O2 of the optical section OP, the third bonding surface Sab3 of the third sub-optical section O3 of the optical section OP, the fourth bonding surface Sab4 of the fourth sub-optical section O4 of the optical section OP, and the fifth bonding surface Sab5 of the fifth sub-optical section O5 of the optical section OP.
[0098] As explained earlier with reference to Figures 5 and 6, the first bonding surface Sab1 of the first sub-optical section O1 of the optical section OP, the second bonding surface Sab2 of the second sub-optical section O2 of the optical section OP, the third bonding surface Sab3 of the third sub-optical section O3 of the optical section OP, the fourth bonding surface Sab4 of the fourth sub-optical section O4 of the optical section OP, and the fifth bonding surface Sab5 of the fifth sub-optical section O5 of the optical section OP are not arranged in a line with each other, but are offset from each other. As a result, the first bonding surface Sab1, the second bonding surface Sab2, the third bonding surface Sab3, the fourth bonding surface Sab4, and the fifth bonding surface Sab5, which change the intensity BL of the laser beam B, do not overlap with each other.
[0099] Therefore, since the intensity change BL of the laser beam B that has passed through the optical unit OP does not concentrate at a specific location, a uniform laser beam B can be supplied regardless of the position.
[0100] The following describes a laser crystallization apparatus according to another embodiment, with reference to Figure 8. Figure 8 is a diagram showing an example of the optical section of a laser crystallization apparatus according to another embodiment.
[0101] As described above, the laser crystallization apparatus according to this embodiment includes a plurality of optical units OP1, M, OP2, W1, and W2, and at least one of the plurality of optical units OP1, M, OP2, W1, and W2 of the laser crystallization apparatus may have the structure of optical unit OP shown in Figure 8. Referring to Figure 8, the optical section OP of the laser crystallization apparatus according to this embodiment can include a plurality of sub-optical sections O1, O2, O3, O4, and O5 that are spaced apart from each other.
[0102] The first sub-optical section O1 of the optical section OP includes a first part O1a and a second part O1b joined together; the second sub-optical section O2 of the optical section OP includes a third part O2a and a fourth part O2b joined together; the third sub-optical section O3 of the optical section OP includes a fifth part O3a and a sixth part O3b joined together; the fourth sub-optical section O4 of the optical section OP includes a seventh part O4a and an eighth part O4b joined together; and the fifth sub-optical section O5 of the optical section OP may include a ninth part O5a and a tenth part O5b joined together.
[0103] The first part O1a and the second part O1b of the first sub-optical part O1 of the optical part OP are joined to each other at the first bonding surface Sab1, the third part O2a and the fourth part O2b of the second sub-optical part O2 of the optical part OP are joined to each other at the second bonding surface Sab2, the fifth part O3a and the sixth part O3b of the third sub-optical part O3 of the optical part OP are joined to each other at the third bonding surface Sab3, the seventh part O4a and the eighth part O4b of the fourth sub-optical part O4 of the optical part OP are joined to each other at the fourth bonding surface Sab4, and the ninth part O5a and the tenth part O5b of the fifth sub-optical part O5 of the optical part OP are joined to each other at the fifth bonding surface Sab5.
[0104] The first bonding surface Sab1 of the first sub-optical section O1 of the optical section OP, the second bonding surface Sab2 of the second sub-optical section O2 of the optical section OP, the third bonding surface Sab3 of the third sub-optical section O3 of the optical section OP, the fourth bonding surface Sab4 of the fourth sub-optical section O4 of the optical section OP, and the fifth bonding surface Sab5 of the fifth sub-optical section O5 of the optical section OP may each be parallel to the incident direction of the laser beam B incident on the optical section OP. Furthermore, with reference to a direction parallel to the incident direction of the laser beam B incident on the optical section OP, the first bonding surface Sab1 of the first sub-optical section O1 of the optical section OP, the second bonding surface Sab2 of the second sub-optical section O2 of the optical section OP, the third bonding surface Sab3 of the third sub-optical section O3 of the optical section OP, the fourth bonding surface Sab4 of the fourth sub-optical section O4 of the optical section OP, and the fifth bonding surface Sab5 of the fifth sub-optical section O5 of the optical section OP may not be arranged in a straight line with respect to each other, but rather offset from each other.
[0105] According to the embodiment shown in Figure 8, the optical section of the laser crystallization apparatus according to one embodiment is described as including five sub-optical sections O1, O2, O3, O4, and O5, but it is not limited to this, and the number of sub-optical sections can be changed.
[0106] Many of the features of the optical section of the laser crystallization apparatus according to the embodiment described earlier with reference to Figures 1 to 7 are all applicable to the optical section of the laser crystallization apparatus according to this embodiment.
[0107] The following describes a laser crystallization apparatus according to another embodiment, with reference to Figure 9. Figure 9 is a drawing showing an example of the optical section of a laser crystallization apparatus according to another embodiment.
[0108] As described above, the laser crystallization apparatus according to this embodiment includes a plurality of optical units OP1, M, OP2, W1, and W2, and at least one of the plurality of optical units OP1, M, OP2, W1, and W2 of the laser crystallization apparatus may have the structure of optical unit OP shown in Figure 9.
[0109] Referring to Figure 9, the optical section OP of the laser crystallization apparatus according to this embodiment can include a plurality of sub-optical sections O1, O2, O3, O4, and O5.
[0110] The first sub-optical section O1, the second sub-optical section O2, the third sub-optical section O3, the fourth sub-optical section O4, and the fifth sub-optical section O5 of the optical section OP can be arranged sequentially along a direction parallel to the incident direction of the laser beam B and connected to one another.
[0111] The first sub-optical section O1 of the optical section OP includes a first part O1a and a second part O1b joined together; the second sub-optical section O2 of the optical section OP includes a third part O2a and a fourth part O2b joined together; the third sub-optical section O3 of the optical section OP includes a fifth part O3a and a sixth part O3b joined together; the fourth sub-optical section O4 of the optical section OP includes a seventh part O4a and an eighth part O4b joined together; and the fifth sub-optical section O5 of the optical section OP may include a ninth part O5a and a tenth part O5b joined together.
[0112] The first part O1a and the second part O1b of the first sub-optical part O1 of the optical part OP are joined to each other at the first bonding surface Sab1, the third part O2a and the fourth part O2b of the second sub-optical part O2 of the optical part OP are joined to each other at the second bonding surface Sab2, the fifth part O3a and the sixth part O3b of the third sub-optical part O3 of the optical part OP are joined to each other at the third bonding surface Sab3, the seventh part O4a and the eighth part O4b of the fourth sub-optical part O4 of the optical part OP are joined to each other at the fourth bonding surface Sab4, and the ninth part O5a and the tenth part O5b of the fifth sub-optical part O5 of the optical part OP are joined to each other at the fifth bonding surface Sab5.
[0113] The first bonding surface Sab1 of the first sub-optical section O1 of the optical section OP can form a first angle θ1 with the incident direction of the laser beam B, the second bonding surface Sab2 of the second sub-optical section O2 of the optical section OP can form a second angle θ2 with the incident direction of the laser beam B, the third bonding surface Sab3 of the third sub-optical section O3 of the optical section OP can form a third angle θ3 with the incident direction of the laser beam B, the fourth bonding surface Sab4 of the fourth sub-optical section O4 of the optical section OP can form a fourth angle θ4 with the incident direction of the laser beam B, and the fifth bonding surface Sab5 of the fifth sub-optical section O5 of the optical section OP can form a fifth angle θ5 with the incident direction of the laser beam B.
[0114] The first angle θ1, the second angle θ2, the third angle θ3, the fourth angle θ4, and the fifth angle θ5 may be less than approximately 45 degrees, and may be the same as or different from each other.
[0115] Furthermore, with reference to a direction parallel to the incident direction of the laser beam B incident on the optical unit OP, the first bonding surface Sab1 of the first sub-optical unit O1 of the optical unit OP, the second bonding surface Sab2 of the second sub-optical unit O2 of the optical unit OP, the third bonding surface Sab3 of the third sub-optical unit O3 of the optical unit OP, the fourth bonding surface Sab4 of the fourth sub-optical unit O4 of the optical unit OP, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP may not be arranged in a straight line with respect to each other, but rather offset from each other.
[0116] The sub-optical section of the optical section in Figure 9 will be explained in more detail below, with reference to Figure 10 along with Figure 9. Figure 10 is an exploded perspective view of the optical section in Figure 9.
[0117] Referring to Figure 10 along with Figure 9, the optical section OP of the laser crystallization apparatus according to this embodiment includes a plurality of sub-optical sections O1, O2, O3, O4, and O5.
[0118] The first sub-optical part O1 of the optical part OP includes a first part O1a and a second part O1b that are joined to each other at a first bonding surface Sab1, and the first length L01 of the first surface of the first part O1a and the second length L11 of the first surface of the second part O1b of the first sub-optical part O1 may be different from the first length L01-L of the second surface facing the first surface of the first part O1a of the first sub-optical part O1 and the second length L11+L of the second surface of the second part O1b of the first sub-optical part O1.
[0119] More specifically, the first length L01-L of the second surface of the first part O1a of the first sub-optical section O1 may be shorter than the first length L01 of the first surface of the first part O1a of the first sub-optical section O1 by the difference in length L, and the second length L11+L of the second surface of the second part O1b of the second sub-optical section O1 may be longer than the second length L11 of the first surface of the second part O1b of the first sub-optical section O1 by the difference in length L. In other words, with respect to the direction perpendicular to the direction in which the laser beam B is incident, the width of the first bonding surface Sab1 of the first sub-optical section O1 may be the same as the difference in length L.
[0120] The length difference L and the width of the first bonding surface Sab1 may be between approximately 0.3% and approximately 0.6% of the total length of the first sub-optical section O1. For example, if the total length of the first sub-optical section O1 is approximately 2200 mm, the length difference L and the width of the first bonding surface Sab1 may be approximately 10 mm.
[0121] All the lengths mentioned above were measured in a direction perpendicular to the direction in which the laser beam B was incident.
[0122] Furthermore, the first bonding surface Sab1 of the first sub-optical section O1 of the optical section OP can form a first angle θ1 with the incident direction of the laser beam B, and with respect to a direction parallel to the incident direction of the laser beam B, the first width Wa of the first part O1a of the first sub-optical section O1 and the second width Wb of the second part O1b of the first sub-optical section O1 may be the same as each other at the first bonding surface Sab1.
[0123] Similarly, the second sub-optical section O2 of the optical section OP includes a third section O2a and a fourth section O2b that are joined to each other at the second bonding surface Sab2. The third length L02 of the first surface of the third section O2a of the second sub-optical section O2 and the fourth length L12 of the first surface of the fourth section O2b of the second sub-optical section O2 may differ by a length difference L from the third length L02-L of the second surface of the third section O2a of the second sub-optical section O2 and the fourth length L12+L of the second surface of the fourth section O2b of the second sub-optical section O2. In other words, with respect to the direction perpendicular to the direction in which the laser beam B is incident, the width of the second bonding surface Sab2 of the second sub-optical section O2 may be the same as the length difference L.
[0124] The length difference L and the width of the second bonding surface Sab2 may be between approximately 0.3% and approximately 0.6% of the total length of the second sub-optical section O2. For example, if the total length of the second sub-optical section O2 is approximately 2200 mm, the length difference L and the width of the second bonding surface Sab2 may be approximately 10 mm.
[0125] All the lengths mentioned above were measured perpendicular to the direction in which laser beam B was incident.
[0126] Furthermore, the second bonding surface Sab2 of the second sub-optical section O2 of the optical section OP can form a second angle θ2 with respect to the incident direction of the laser beam B, and the first width Wa of the third portion O2a of the second sub-optical section O2 and the second width Wb of the fourth portion O2b of the second sub-optical section O2 may be the same as each other at the second bonding surface Sab2, with respect to a direction parallel to the incident direction of the laser beam B.
[0127] The third sub-optical section O3 of the optical section OP includes a fifth section O3a and a sixth section O3b that are joined to each other at the third bonding surface Sab3. The fifth length L03 of the first surface of the fifth section O3a of the third sub-optical section O3 and the sixth length L13 of the first surface of the sixth section O3b of the third sub-optical section O3 may differ by a length difference L from the fifth length L03-L of the second surface of the fifth section O3a of the third sub-optical section O3 and the sixth length L13+L of the second surface of the sixth section O3b of the third sub-optical section O3. In other words, with respect to the direction perpendicular to the direction in which the laser beam B is incident, the width of the third bonding surface Sab3 of the third sub-optical section O3 may be the same as the length difference L.
[0128] The length difference L and the width of the third bonding surface Sab3 may be between approximately 0.3% and approximately 0.6% of the total length of the third sub-optical section O3. For example, if the total length of the third sub-optical section O3 is approximately 2200 mm, the length difference L and the width of the third bonding surface Sab3 may be approximately 10 mm.
[0129] All the lengths mentioned above were measured in a direction perpendicular to the direction in which the laser beam B was incident.
[0130] Furthermore, the third bonding surface Sab3 of the third sub-optical section O3 of the optical section OP can form a third angle θ3 with the incident direction of the laser beam B, and with respect to a direction parallel to the incident direction of the laser beam B, the first width Wa of the fifth portion O3a of the third sub-optical section O3 and the second width Wb of the sixth portion O3b of the third sub-optical section O3 may be the same as each other at the third bonding surface Sab3.
[0131] The fourth sub-optical section O4 of the optical section OP includes a seventh section O4a and an eighth section O4b that are joined to each other at the fourth bonding surface Sab4. The seventh length L04 of the first surface of the seventh section O4a of the fourth sub-optical section O4 and the eighth length L14 of the first surface of the eighth section O4b of the fourth sub-optical section O4 may differ by a length difference L from the seventh length L04-L of the second surface of the seventh section O4a of the fourth sub-optical section O4 and the eighth length L14+L of the second surface of the eighth section O4b of the fourth sub-optical section O4. In other words, with respect to the direction perpendicular to the direction in which the laser beam B is incident, the width of the fourth bonding surface Sab4 of the fourth sub-optical section O4 may be the same as the length difference L.
[0132] The length difference L and the width of the fourth bonding surface Sab4 may be between approximately 0.3% and approximately 0.6% of the total length of the fourth sub-optical section O4. For example, if the total length of the fourth sub-optical section O4 is approximately 2200 mm, the length difference L and the width of the fourth bonding surface Sab4 may be approximately 10 mm.
[0133] All the lengths mentioned above were measured perpendicular to the direction in which the laser beam B was incident.
[0134] Furthermore, the fourth bonding surface Sab4 of the fourth sub-optical section O4 of the optical section OP can form a fourth angle θ4 with respect to the incident direction of the laser beam B, and with respect to a direction parallel to the incident direction of the laser beam B, the first width Wa of the seventh portion O4a of the fourth sub-optical section O4 and the second width Wb of the eighth portion O4b of the fourth sub-optical section O4 may be the same as each other at the fourth bonding surface Sab4.
[0135] Similarly, the fifth sub-optical section O5 of the optical section OP includes a ninth section O5a and a tenth section O5b that are joined to each other at the fifth bonding surface Sab5. The ninth length L05 of the first surface of the ninth section O5a of the fifth sub-optical section O5 and the tenth length L15 of the first surface of the tenth section O5b of the fifth sub-optical section O5 may differ by a length difference L from the ninth length L05-L of the second surface of the ninth section O5a of the fifth sub-optical section O5 and the tenth length L15+L of the second surface of the tenth section O5b of the fifth sub-optical section O5. In other words, with respect to the direction perpendicular to the direction in which the laser beam B is incident, the width of the fifth bonding surface Sab5 of the fifth sub-optical section O5 may be the same as the length difference L.
[0136] The length difference L and the width of the fifth bonding surface Sab5 may be between approximately 0.3% and approximately 0.6% of the total length of the fifth sub-optical section O5. For example, if the total length of the fifth sub-optical section O5 is approximately 2200 mm, the length difference L and the width of the fifth bonding surface Sab5 may be approximately 10 mm.
[0137] All the lengths mentioned above were measured in a direction perpendicular to the direction in which the laser beam B was incident.
[0138] The fifth bonding surface Sab5 of the fifth sub-optical section O5 of the optical section OP can form a fifth angle θ5 with the incident direction of the laser beam B, and with respect to a direction parallel to the incident direction of the laser beam B, the first width Wa of the ninth portion O5a and the second width Wb of the tenth portion O5b of the fifth sub-optical section O5 may be the same at the fifth bonding surface Sab5.
[0139] The first length L01 of the first part O1a of the first sub-optical part O1 of the optical part OP, the third length L02 of the third part O2a of the second sub-optical part O2 of the optical part OP, the fifth length L03 of the fifth part O3a of the third sub-optical part O3 of the optical part OP, the seventh length L04 of the seventh part O4a of the fourth sub-optical part O4 of the optical part OP, and the ninth length L05 of the ninth part O5a of the fifth sub-optical part O5 of the optical part OP may be different from each other. Here, the first length L01, the third length L02, the fifth length L03, the seventh length L04, and the ninth length L05 may be lengths measured in a direction perpendicular to the direction in which the laser beam B is incident.
[0140] Similarly, the second length L11 of the second portion O1b of the first sub-optical section O1 of the optical section OP, the fourth length L12 of the fourth portion O2b of the second sub-optical section O2 of the optical section OP, the sixth length L13 of the sixth portion O3b of the third sub-optical section O3 of the optical section OP, the eighth length L14 of the eighth portion O4b of the fourth sub-optical section O4 of the optical section OP, and the tenth length L15 of the tenth portion O5b of the fifth sub-optical section O5 of the optical section OP may be different from each other. Here, the second length L11, the fourth length L12, the sixth length L13, the eighth length L14, and the tenth length L15 may be lengths measured in a direction perpendicular to the direction in which the laser beam B is incident.
[0141] The first part O1a and the second part O1b of the first sub-optical part O1 of the optical part OP are joined to each other through optical contact bonding or welding; the third part O2a and the fourth part O2b of the second sub-optical part O2 of the optical part OP are joined to each other through optical contact bonding or welding; the fifth part O3a and the sixth part O3b of the third sub-optical part O3 of the optical part OP are joined to each other through optical contact bonding or welding; the seventh part O4a and the eighth part O4b of the fourth sub-optical part O4 of the optical part OP are joined to each other through optical contact bonding or welding; and the ninth part O5a and the tenth part O5b of the fifth sub-optical part O5 of the optical part OP may be joined to each other through optical contact bonding or welding.
[0142] Furthermore, the first sub-optical section O1, the second sub-optical section O2, the third sub-optical section O3, the fourth sub-optical section O4, and the fifth sub-optical section O5 of the optical section OP are arranged sequentially along a direction parallel to the incident direction of the laser beam B, and the first sub-optical section O1, the second sub-optical section O2, the third sub-optical section O3, the fourth sub-optical section O4, and the fifth sub-optical section O5 of the optical section OP can be joined to each other through optical contact bonding or welding.
[0143] With respect to a direction parallel to the incident direction of the laser beam B incident on the optical unit OP, the first bonding surface Sab1 of the first sub-optical unit O1 of the optical unit OP, the second bonding surface Sab2 of the second sub-optical unit O2 of the optical unit OP, the third bonding surface Sab3 of the third sub-optical unit O3 of the optical unit OP, the fourth bonding surface Sab4 of the fourth sub-optical unit O4 of the optical unit OP, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP may not be arranged in a straight line with respect to each other, but rather offset from each other.
[0144] According to the embodiments shown in Figures 9 and 10, the optical section of the laser crystallization apparatus in one embodiment is described as including five sub-optical sections O1, O2, O3, O4, and O5, but it is not limited to this, and the number of sub-optical sections can be varied.
[0145] The following describes the intensity change of the laser beam that has passed through the optical section of a laser crystallization apparatus according to one embodiment, with reference to Figures 9 and 10, as well as Figure 11. Figure 11 is a graph conceptually showing the intensity change of the laser beam that has passed through the optical section of a laser crystallization apparatus according to one embodiment.
[0146] Referring to Figure 11 in conjunction with Figures 9 and 10, as the laser beam B passes through the first sub-optical section O1, second sub-optical section O2, third sub-optical section O3, fourth sub-optical section O4, and fifth sub-optical section O5 of the optical section OP, the intensity BL of the laser beam B may decrease at the first bonding surface Sab1 of the first sub-optical section O1, the second bonding surface Sab2 of the second sub-optical section O2 of the optical section OP, the third bonding surface Sab3 of the third sub-optical section O3 of the optical section OP, the fourth bonding surface Sab4 of the fourth sub-optical section O4 of the optical section OP, and the fifth bonding surface Sab5 of the fifth sub-optical section O5 of the optical section OP.
[0147] As explained earlier with reference to Figures 9 and 10, the first bonding surface Sab1 of the first sub-optical section O1 of the optical section OP, the second bonding surface Sab2 of the second sub-optical section O2 of the optical section OP, the third bonding surface Sab3 of the third sub-optical section O3 of the optical section OP, the fourth bonding surface Sab4 of the fourth sub-optical section O4 of the optical section OP, and the fifth bonding surface Sab5 of the fifth sub-optical section O5 of the optical section OP are not arranged in a line with each other, but are offset from each other. As a result, the first bonding surface Sab1, the second bonding surface Sab2, the third bonding surface Sab3, the fourth bonding surface Sab4, and the fifth bonding surface Sab5, which change the intensity BL of the laser beam B, do not overlap with each other.
[0148] Therefore, since the intensity change BL of the laser beam B that has passed through the optical unit OP does not concentrate at a specific location, a uniform laser beam B can be supplied regardless of the position.
[0149] The following describes a laser crystallization apparatus according to another embodiment, with reference to Figure 12. Figure 12 is a drawing showing an example of the optical section of a laser crystallization apparatus according to another embodiment.
[0150] As described above, the laser crystallization apparatus according to this embodiment includes a plurality of optical units OP1, M, OP2, W1, and W2, and at least one of the plurality of optical units OP1, M, OP2, W1, and W2 of the laser crystallization apparatus may have the structure of optical unit OP shown in Figure 12. Referring to Figure 12, the optical section OP of the laser crystallization apparatus according to this embodiment can include a plurality of sub-optical sections O1, O2, O3, O4, and O5 that are spaced apart from each other.
[0151] The first sub-optical section O1 of the optical section OP includes a first part O1a and a second part O1b joined together; the second sub-optical section O2 of the optical section OP includes a third part O2a and a fourth part O2b joined together; the third sub-optical section O3 of the optical section OP includes a fifth part O3a and a sixth part O3b joined together; the fourth sub-optical section O4 of the optical section OP includes a seventh part O4a and an eighth part O4b joined together; and the fifth sub-optical section O5 of the optical section OP may include a ninth part O5a and a tenth part O5b joined together.
[0152] The first part O1a and the second part O1b of the first sub-optical part O1 of the optical part OP are joined to each other at the first bonding surface Sab1, the third part O2a and the fourth part O2b of the second sub-optical part O2 of the optical part OP are joined to each other at the second bonding surface Sab2, the fifth part O3a and the sixth part O3b of the third sub-optical part O3 of the optical part OP are joined to each other at the third bonding surface Sab3, the seventh part O4a and the eighth part O4b of the fourth sub-optical part O4 of the optical part OP are joined to each other at the fourth bonding surface Sab4, and the ninth part O5a and the tenth part O5b of the fifth sub-optical part O5 of the optical part OP are joined to each other at the fifth bonding surface Sab5.
[0153] The first bonding surface Sab1 of the first sub-optical section O1 of the optical section OP, the second bonding surface Sab2 of the second sub-optical section O2 of the optical section OP, the third bonding surface Sab3 of the third sub-optical section O3 of the optical section OP, the fourth bonding surface Sab4 of the fourth sub-optical section O4 of the optical section OP, and the fifth bonding surface Sab5 of the fifth sub-optical section O5 of the optical section OP can each form a first angle θ1, second angle θ2, third angle θ3, fourth angle θ4, and fifth angle θ5 with respect to the incident direction of the laser beam B incident on the optical section OP, respectively. Furthermore, the first angle θ1, second angle θ2, third angle θ3, fourth angle θ4, and fifth angle θ5 may be the same as or different from each other.
[0154] Furthermore, with reference to a direction parallel to the incident direction of the laser beam B incident on the optical unit OP, the first bonding surface Sab1 of the first sub-optical unit O1 of the optical unit OP, the second bonding surface Sab2 of the second sub-optical unit O2 of the optical unit OP, the third bonding surface Sab3 of the third sub-optical unit O3 of the optical unit OP, the fourth bonding surface Sab4 of the fourth sub-optical unit O4 of the optical unit OP, and the fifth bonding surface Sab5 of the fifth sub-optical unit O5 of the optical unit OP may not be arranged in a straight line with respect to each other, but rather offset from each other.
[0155] According to the embodiment shown in Figure 12, the optical section of the laser crystallization apparatus according to one embodiment is described as including five sub-optical sections O1, O2, O3, O4, and O5, but it is not limited to this, and the number of sub-optical sections can be changed.
[0156] Many of the features of the optical section of the laser crystallization apparatus according to the embodiments described above are all applicable to the optical section of the laser crystallization apparatus according to this embodiment.
[0157] As described above, a laser crystallization apparatus according to one embodiment includes a plurality of optical parts, at least one of the plurality of optical parts includes a first part and a second part joined together, and at least one of the plurality of optical parts may include a plurality of sub-optical parts, each including the first part and the second part joined together, and the plurality of sub-optical parts may be joined together or separated from each other. Furthermore, the joining surfaces of the plurality of sub-optical parts may not be arranged in a line parallel to the direction of incidence of the laser beam, but may be arranged offset from each other. Therefore, a laser crystallization apparatus including optical parts of a large size can be formed without increasing the manufacturing cost of the laser crystallization apparatus, and the reduction in the uniformity of the laser beam can be reduced.
[0158] Although embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and improvements made by those skilled in the art using the basic concepts of the present invention as defined in the claims also fall within the scope of the present invention. [Explanation of Symbols]
[0159] B: Laser beam OP1, OP2: Lens M: Mirror W1, W2: Windows OP:Optics Department Sab1, Sab2, Sab3, Sab4, Sab5: Joint surface O1, O2, O3, O4, O5: Sub-optical section
Claims
1. Light source unit, and A laser beam irradiated from the light source unit is incident upon the optical unit, which includes a plurality of sub-optical units. Each of the aforementioned sub-optical sections includes a first portion and a second portion joined to each other at a bonding surface. The plurality of sub-optical units are arranged sequentially with reference to a direction parallel to the direction in which the laser beam is incident. The plurality of sub-optical units include a first sub-optical unit and a second sub-optical unit. The length of the first portion of the first sub-optical unit is different from the length of the first portion of the second sub-optical unit. A laser crystallization apparatus that can improve the uniformity of the intensity of the laser beam that has passed through the optical parts, wherein the bonding surface of the first sub-optical part and the bonding surface of the second sub-optical part are arranged to be offset from each other with respect to a direction parallel to the direction in which the laser beam is incident.
2. The laser crystallization apparatus according to claim 1, wherein, with reference to a direction parallel to the direction in which the laser beam is incident, the first width of the first portion and the second width of the second portion are the same at the joining surface.
3. The laser crystallization apparatus according to claim 1, wherein the first part and the second part are joined by optical contact bonding or welding.
4. The laser crystallization apparatus according to claim 1, wherein the bonding surface is parallel to the direction in which the laser beam is incident.
5. The laser crystallization apparatus according to claim 1, wherein the bonding surface is inclined at a certain angle with respect to the direction in which the laser beam is incident.
6. The laser crystallization apparatus according to claim 5, wherein the width of the bonding surface is 0.3% or more and 0.6% or less of the length of the optical part, with reference to a direction perpendicular to the direction in which the laser beam is incident.
7. The laser crystallization apparatus according to claim 1, wherein in each of the plurality of sub-optical units, the first sub-optical unit and the second sub-optical unit are arranged along a direction intersecting the direction in which the laser beam is incident.