Characterization device for pressure sensors

Abstract

To provide a characterization device of a pressure sensor capable of performing characterization in a state in which thermal volume of an object for making temperature constant in characterization is small.SOLUTION: A characterization device of a pressure sensor includes: a stage section 124 for supporting a module 11 for characterization housing a pressure sensor; a fixing section 125 for fixing the module 11 for characterization; and a pedestal member 121 installing the stage section 124 and the module fixing section 125 on an upper surface. In the stage section 124, a positioning section 126 for positioning the module 11 for characterization and washer insertion holes 127, 128 into which washers for guiding pressure of pressure sensors are inserted are provided. In the pedestal member 121, first and second test fluid introduction holes 135, 136, and a pressure introduction passage for guiding test fluid pressure from the first and second test fluid introduction holes 135, 136 to the washer insertion holes 127, 128 are formed.SELECTED DRAWING: Figure 20

Description

Technical Field

[0001] The present invention relates to a pressure sensor characterization device used for characterizing a pressure sensor.

Background Art

[0002] An industrial pressure gauge includes a sensor element made of Si or the like for detecting pressure, as described in Patent Document 1 for example. After the manufacturing process is completed, this type of pressure gauge is corrected by a process called characterization and then sent to the next process. Characterization is performed to remove the influence of the surrounding environment such as the surrounding temperature and pressure.

[0003] As shown in FIG. 27, the pressure measuring device shown in Patent Document 1 includes a sensor header 2 that houses a sensor element 1, a metal body 3 that supports the sensor header 2, a cover 4, and the like. This pressure measuring device 5 houses the sensor element 1 in the sensor header 2 in order to protect the sensor element 1 from an external corrosive environment such as a measurement medium, and further, the sensor header 2 is enclosed in a metal body 3 formed of stainless steel or the like. Oil 7 is enclosed in the pressure transmission path 6 inside the metal body 3 as a pressure transmission medium that transmits pressure to the sensor element 1. The sensor element 1 is electrically connected to an external output pin 9 of the cover 4 via wiring 8 inside the sensor header 2.

[0004] The sensor header 2 of the pressure measuring device 5 shown in Patent Document 1 is fixed by welding to the metal body 3 and the cover 4. In this pressure measuring device 5, the characterization of the sensor element 1 is performed by connecting a characterization substrate (not shown) to the external output pin 9 after welding the sensor header 2 to the metal body 3 and the cover 4.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

[0006] In the pressure measuring device 5 described in Patent Document 1, the sensor element 1 is characterized after the sensor header 2 is welded to the metal body 3 and cover 4. Therefore, when performing characterization, the temperature of the metal body 3 and cover 4 must be maintained at the same temperature as the sensor element. In other words, the pressure measuring device 5 shown in Patent Document 1 has the problem that the equipment for performing characterization is large, and that a long time is required for temperature stabilization because the heat volume of the object whose temperature must be kept constant during characterization is large.

[0007] The object of the present invention is to provide a pressure sensor characterization device that can perform characterization on an object whose temperature is kept constant during characterization, while the heat volume of the object is small. [Means for solving the problem]

[0008] To achieve this objective, the pressure sensor characterization apparatus according to the present invention is a pressure sensor characterization apparatus that performs characterization of a pressure sensor having a sensor package mounted on a first surface of a substrate, and a pressure introduction pipe having a pressure introduction pipe that protrudes from the sensor package through a notch or hole formed in the substrate to the opposite side of the first surface of the substrate, then bends and extends parallel to a second surface on the opposite side of the substrate to the first surface, with a washer provided at its tip, while the pressure sensor is housed in a characterization module having a washer housing and holding hole into which the washer is inserted, the characterization apparatus comprising: a stage portion that abuts against the bottom surface of the characterization module and supports the characterization module, and the stage The device comprises a module fixing part that restricts and fixes the movement of the characterization module placed on the stage part, and a base member on which the stage part and the module fixing part are installed on the upper surface. The stage part is provided with a positioning part having a recess or protrusion for engaging with a protrusion or recess formed on the bottom surface of the characterization module to position the characterization module on the stage part, and a washer insertion hole into which the washer is inserted. The base member has a test fluid introduction hole for introducing the pressure of the test fluid used for characterization of the pressure sensor, and a pressure introduction path is formed inside for guiding the test fluid pressure from the test fluid introduction hole to the washer insertion hole.

[0009] The present invention may also include, in a characterization device for a pressure sensor, a plurality of support columns erected vertically from the stage portion at intervals from the outer edge of the characterization module placed on the stage portion; a washer retaining pin holding member having a plurality of through holes through which the plurality of support columns pass, and which is fixed in a parallel state with the stage portion by a fastening member after each support column is inserted through the plurality of through holes; and two rod-shaped washer retaining pins, one end of which is inserted through two holding holes formed in the washer retaining pin holding member, and the other end of which abuts against the upper part of the washer to press and fix the washer.

[0010] In the present invention, in the characterization device for the pressure sensor, a slit may be formed at the other end of the washer-side of the washer retaining pin to avoid interference with the pressure introduction pipe.

[0011] The present invention relates to a characterization device for a pressure sensor, wherein a partially flat portion is formed on the side surface of one end of the washer retaining pin on the side of the washer retaining pin holding member, while the washer retaining pin holding member is a plate-shaped member having a screw hole formed thereon perpendicular to the holding hole through which one end of the washer retaining pin is inserted, and extending to an opening on the side surface of the washer retaining pin holding member, and the rotation of the washer retaining pin may be prevented by inserting a set screw into the screw hole from the opening of the screw hole with the washer retaining pin inserted through the holding hole of the washer retaining pin holding member, and the tip of the set screw contacting the flat portion of the washer retaining pin. [Effects of the Invention]

[0012] According to the present invention, characterization can be performed without assembling the pressure sensor to the body of the pressure measuring device. Therefore, it is possible to provide a pressure sensor characterization device that can perform characterization when the thermal volume of the object to be characterized to have a constant temperature is small. [Brief explanation of the drawing]

[0013] [Figure 1] Figure 1 is a perspective view of a characterization module used in the characterization apparatus according to the present invention. [Figure 2] Figure 2 is an exploded perspective view of the characterization module with the protective case removed. [Figure 3] Figure 3 is a perspective view of the protective case and characterization module. [Figure 4] Figure 4 is a perspective view of the protective case. [Figure 5] Figure 5 is a perspective view of the substrate cover. [Figure 6] Figure 6 is an exploded perspective view of the characterization module. [Figure 7] Figure 7 is a perspective cross-sectional view showing an enlarged first stopper portion. [Figure 8] Figure 8 is a perspective cross-sectional view showing an enlarged fitting portion between the substrate cover and the body of the pressure measuring device. [Figure 9] Figure 9 is a perspective cross-sectional view showing the fitting portion between the characterization module and the body of the pressure measuring device. [Figure 10] Figure 10 is a perspective cross-sectional view of the pressure sensor. [Figure 11] Figure 11 is a perspective view showing the state in which the characterization module is assembled to the body of the pressure measuring device. [Figure 12] Figure 12 is a perspective view of the body and the characterization module, showing a part of the body of the pressure measuring device broken away. [Figure 13] Figure 13 is a view showing the substrate holder. [Figure 14] Figure 14 is a longitudinal sectional view in the state where the characterization module is assembled to the pressure measuring device. [Figure 15] Figure 15 is a perspective cross-sectional view showing an enlarged washer portion. [Figure 16] Figure 16 is a perspective cross-sectional view showing the state where the washer portion is filled with a sealing material. [Figure 17] Figure 17 is a plan view of the characterization module and the protective case. [Figure 18] Figure 18 is a bottom view of the characterization module and the protective case. [Figure 19] Figure 19 is a perspective view of the characterization device. [Figure 20] Figure 20 is an exploded perspective view of the characterization device. [Figure 21]Figure 21 is a perspective view of the base component. [Figure 22] Figure 22 is a perspective cross-sectional view of the main parts of the characterization device and characterization module. [Figure 23] Figure 23 is a longitudinal cross-sectional view of the characterization device and characterization module during characterization. [Figure 24] Figure 24 is a perspective view of the washer retaining pin. [Figure 25] Figure 25 is a perspective cross-sectional view showing the structure supporting the washer retaining pin. [Figure 26] Figure 26 is a perspective cross-sectional view of the main parts of the characterization apparatus and characterization module. [Figure 27] Figure 27 is a cross-sectional view of a conventional pressure measuring device. [Modes for carrying out the invention]

[0014] Hereinafter, an embodiment of the pressure sensor characterization apparatus according to the present invention will be described in detail with reference to Figures 1 to 26. Characterization of the pressure sensor is performed with the pressure sensor housed in the characterization module shown in Figure 1. First, the characterization module will be described. Figure 1 is a perspective view showing the characterization module 11. Figure 1(A) is drawn from a diagonal upward view, and Figure 1(B) is drawn from a diagonal downward view. The characterization module 11 is used to characterize the pressure sensor 12 installed inside. By performing characterization, the linearity of the sensor output, temperature determination, and static pressure characteristics are corrected, and the influence of the surrounding environment, such as ambient temperature and pressure, can be eliminated. Characterization is performed with the characterization module 11 loaded into the characterization device 13 shown in Figure 19.

[0015] The characterization module 11 shown in Figure 1 is designed to protect the pressure sensor 12 from external forces and includes a protective housing 14 that covers the outside. As shown in Figure 2, the protective housing 14 consists of a box-shaped protective case 15 and a substrate cover 16 that is connected to the protective case 15 and closes the opening of the protective case 15. In the following, when describing the orientation of the components of the characterization module 11, for convenience, the direction in which the box-shaped protective case 15 opens will be considered the rear, and the orientation will be shown when the characterization module 11 is viewed from the front in a posture in which the rectangular bottom surface of the protective case 15 extends in the vertical and horizontal directions.

[0016] (Description of protective case) The protective case 15 is made of plastic material and, as shown in Figures 2 and 3, has a front wall 15a which forms the bottom of the box, an upper wall 15b and a lower wall 15c which extend from the upper and lower ends of the front wall 15a toward the opening side of the box, and a left side wall 15d and a right side wall 15e which extend from the left and right ends of the front wall 15a toward the opening side of the box. These walls are integrally formed by integral molding. The upper wall 15b and the lower wall 15c protrude rearward from the left side wall 15d and the right side wall 15e.

[0017] A first through-hole 17 is formed in the upper wall 15b, and a second through-hole 18 is formed in the lower wall 15c. These first and second through-holes 17 and 18 are each formed in an elongated oval shape that is long in the left-right direction. The first through-hole 17 in the upper wall 15b is formed in the opposite area to the second through-hole 18 in the lower wall 15c, which is projected perpendicularly onto the lower wall 15c.

[0018] As shown in Figure 4, a first groove 21 is formed in the lower wall 15c, extending in the front-rear direction and connecting to the second through-hole 18. The left wall 15d has a second groove 22 and a third groove 23 that extend in the front-rear direction. The right wall 15e has a fourth groove 24 and a fifth groove 25 that extend in the front-rear direction. As shown in Figure 1(A), a ventilation hole 26 is formed at the upper end of the protective case 15, specifically at the left front corner, so as to connect the inside and outside of the protective case 15.

[0019] (Description of the pressure sensor assembly) The circuit board cover 16, which closes the opening of the protective case 15, is a component that forms part of the pressure sensor assembly 31 (see Figures 2 and 3), which includes the pressure sensor 12. The pressure sensor assembly 31 is assembled into the body 33 of the pressure measuring device 32 (see Figures 11, 12, and 14), which will be described later, after the characterization is completed.

[0020] As shown in Figure 6, the pressure sensor assembly 31 consists of a substrate cover 16, which is shown on the far right in Figure 6, a pressure sensor 12, which is shown to the left of the substrate cover 16, a substrate 34, which is shown to the left of the pressure sensor 12, and a substrate holder 35, which is shown to the left of the substrate 34. The pressure sensor 12 is mounted on the first surface 34a of the substrate 34, which is the component mounting surface, as will be described in detail later. The substrate cover 16 and the substrate holder 35 are each made of plastic material. The substrate cover 16, the substrate 34, and the substrate holder 35 are combined so that one end (in this embodiment, the lower end) of adjacent parts in the front-to-back direction is in close contact with each other, and are joined together and integrated by a screw member 36 which serves as a fastening member. The screw member 36 is passed from the front through a third through hole 37 formed in the lower end of the substrate holder 35 and a fourth through hole 38 formed in the lower end of the substrate 34, and is screwed into a fifth through hole 39 formed in the lower end of the substrate cover 16.

[0021] (Explanation of the circuit board cover) As shown in Figure 5, the substrate cover 16 is formed in a box shape that opens forward and upward, and, as will be described in detail later, engages with the peripheral edge of the substrate 34 and covers the first surface 34a side (component mounting side) of the substrate 34. At the lower end of the substrate cover 16, a recess 42 for housing the sensor package 41 of the pressure sensor 12 (see Figure 6), which will be described later, and a flat substrate mounting surface 43 that abuts against the substrate 34 are formed. The substrate mounting surface 43 extends vertically from the lower end of the substrate cover 16 to a position that is approximately the same height as the upper edge of the recess 42, and also extends horizontally from the left end to the right end of the substrate cover 16.

[0022] Near the upper part of the recess 42 in the substrate cover 16, a ventilation hole 44 is formed that connects the inside and outside of the substrate cover 16. The upper left side and the upper-lower middle right side of the substrate cover 16 are provided with locking pieces 45 and 46 that protrude forward. As shown in Figure 7 (only the left locking piece 45 is shown in Figure 7), when the substrate cover 16 is placed over the substrate 34, these locking pieces 45 and 46 are inserted into locking notches 47 formed on the outer edge of the substrate 34 and are locked to the substrate 34 in a state where they are in contact with the second surface 34b opposite to the first surface 34a of the substrate 34.

[0023] The locking pieces 45 and 46 engage with the substrate 34, thereby restricting the upper part of the substrate 34 from bending away from the substrate cover 16 (forward). The bases of the locking pieces 45 and 46 have contact surfaces 48 that abut against the first surface 34a of the substrate 34 when the locking pieces 45 and 46 are locked to the substrate 34. In addition to the bases of the locking pieces 45 and 46, the contact surfaces 48 are also formed on the upper ends of both the left and right sides of the substrate cover 16, as shown in Figure 5. These contact surfaces 48 abut against the first surface 34a of the substrate 34 from the thickness direction (from the rear), restricting the upper part of the substrate 34 from bending toward the substrate cover 16 (towards the rear). Therefore, when the substrate cover 16 is attached to the substrate 34, the locking pieces 45 and 46 and the contact surfaces 48 provided on the other end (upper side) of the substrate 34 restrict the bending of the upper part of the substrate 34 in the front-rear direction by the substrate cover 16. In this embodiment, these multiple locking pieces 45, 46 and the contact surface 48 constitute a first stopper portion that holds the substrate 34 by sandwiching it from both sides in the thickness direction at the other end of the substrate cover 16.

[0024] A notch 49 is formed near the upper part of the locking piece 46 on the right side of the substrate cover 16. This notch 49 forms a space for the connector 50 (see Figure 6) provided on the substrate 34 to pass through. As shown in Figure 3, the right and left sides of the substrate cover 16, opposite to the substrate 34, have first to third convex curved surfaces 51 to 53 arranged vertically, respectively. These first to third convex curved surfaces 51 to 53 are shaped to match the shape of the body 33 of the pressure measuring device 32, which will be described later, and are formed so that the cross-sectional shape when viewed from above is arc-shaped.

[0025] Of the first to third convex curved surfaces 51 to 53, the lowest convex curved surface 51 is shaped to be loosely inserted into the cylindrical detection section 54 of the pressure measuring device 32, which will be described later, as shown in Figure 8. The second convex curved surface 52, adjacent to the first convex curved surface 51, is shaped to fit onto the inner circumferential surface 54a of the detection section 54, as shown in Figures 8 and 9. This second convex curved surface 52 constitutes a fitting section that fits onto the inner circumferential surface 54a of the detection section 54. The third convex curved surface 53 is formed in a shape that avoids interference with a component (not shown) that is mounted on top of the detection unit 54.

[0026] (Explanation of pressure sensor) As shown in Figure 10, the pressure sensor 12 comprises a sensor package 41, which is shown at the top of Figure 10; first and second pressure sensing pipes 61 and 62, one end of which is connected to the sensor package 41; and first and second washers 63 and 64, which are connected to the other ends of the first and second pressure sensing pipes 61 and 62. In this embodiment, the first and second pressure sensing pipes 61 and 62 correspond to the "pressure introduction pipes" as defined in the present invention.

[0027] The sensor package 41 is formed by a bottomed rectangular tubular package body 65 made of ceramic material and a lid 66 that closes the opening of the package body 65, and houses a sensor chip 67 inside. Multiple soldering pads 68 are provided on the bottom surface 65a of the package body 65. These soldering pads 68 are electrically connected to the electrodes of the sensor chip 67 via a conductor formed inside the package body 65 and bonding wires, etc., although not shown. The soldering pads 68 are soldered to soldering lands (not shown) on the substrate 34 while the package body 65 is placed on the first surface 34a, which is the component mounting surface of the substrate 34. At this time, the first and second pressure sensing pipes 61 and 62 connected to the sensor package 41 are passed through a pressure sensing pipe insertion notch 69 (see Figure 6) formed at the lower end of the substrate 34.

[0028] The first pressure sensing pipe 61 and the second pressure sensing pipe 62 are each made of stainless steel, extend forward from the sensor package 41, and project through a pressure sensing pipe notch 69 formed in the substrate 34 to the side opposite the first surface 34a of the substrate 34, then bend downward and extend parallel to the second surface 34b (see Figure 6) opposite the first surface 34a of the substrate 34. The first and second washers 63 and 64, which will be described later, are welded to the ends of these first and second pressure sensing pipes 61 and 62.

[0029] One end of each of the first and second pressure sensing pipes 61 and 62 extends into the sensor package 41 through a sixth through-hole 71 formed in the bottom wall 65b of the package body 65, and is soldered to the bottom wall 65b of the package body 65. The solder at the solder joint between the first and second pressure sensing pipes 61 and 62 and the package body 65 is indicated by reference numeral 72 in Figure 10.

[0030] The tip portions of the first and second pressure sensing pipes 61 and 62 on the package body 65 side are bonded to the sensor chip 67. After the pressure sensor 12 is completed, a pressure transmission medium 73 (see Figure 14) is injected into the first and second pressure sensing pipes 61 and 62. The sensor chip 67 detects the differential pressure between the pressure of the pressure transmission medium 73 in the first pressure sensing pipe 61 and the pressure of the pressure transmission medium 73 in the second pressure sensing pipe 62. The outer surfaces of the first and second pressure-sensing pipes 61 and 62 are gold-plated to allow solder 72 to spread between them and the package body 65. Although not shown in the figures, the area around the sixth through-hole 71 on the bottom surface 65a of the package body 65 is metallized to allow solder to spread between it and the first and second pressure-sensing pipes 61 and 62.

[0031] The first and second washers 63 and 64 are for attaching the pressure sensor 12 to the body 33 of the pressure measuring device 32 (see Figure 14), which will be described later. As shown in Figure 10, they are formed by a disc-shaped disc portion 74 and a cylindrical portion 75 protruding from the axial center of the disc portion 74. A seventh through hole 76 is formed in the axial center of the first and second washers 63 and 64 into which the other ends of the first and second pressure sensing pipes 61 and 62 are inserted. The first and second pressure sensing pipes 61 and 62 are fixed to the first and second washers 63 and 64 by crimping the cylindrical portion 75 while they are inserted into the seventh through hole 76. Then, while the first and second pressure sensing pipes 61 and 62 are fixed to the cylindrical portion 75, a laser beam is shone on the boundary between the tip and the cylindrical portion 75, and they are welded to the cylindrical portion 75 by laser welding.

[0032] (Description of the circuit board) The circuit board 34 is formed as a long, rectangular plate, and the pressure sensor 12 is mounted on the lower part of the first surface 34a, which is the component mounting surface. A connector 50 is also mounted on the upper right end of the first surface 34a. The connector 50 is electrically connected to the soldering pad to which the pressure sensor 12 is soldered. A cable extending from a characterization circuit (not shown) is connected to this connector 50 during the characterization process described later. Furthermore, when the pressure sensor assembly 31 is incorporated into the pressure measuring device 32, a cable extending from a pressure detection circuit (not shown) is connected.

[0033] As shown in Figure 6, the lower end of the substrate 34 has a notch 69 for inserting the first and second pressure sensing pipes 61 and 62, and a fourth through hole 38, and locking notches 47 are formed on both the left and right sides. Although not shown, washer through holes through which the first and second washers 63 and 64 can be inserted may be formed instead of the notch 69 for inserting the pressure sensing pipe.

[0034] (Explanation of the circuit board holder) As shown in Figure 6, the substrate holder 35 is installed on the opposite side of the substrate cover 16, sandwiching the substrate 34. The substrate holder 35 according to this embodiment is formed as shown in Figures 13(A) to (C), and has the first to third functional parts described later. Figure 13(A) is a perspective view of the substrate holder 35 seen from diagonally above, Figure 13(B) is a cross-sectional view of the substrate holder 35, and Figure 13(C) is a perspective view of the substrate holder 35 seen from diagonally below. The first functional part is a base 86 from which eighth to eleventh through holes 81 to 84 and a groove 85 for inserting a pressure sensing pipe are opened. As shown in Figure 13(B), eighth to eleventh through holes 81 to 84 extend vertically and penetrate the base 86 in the vertical direction.

[0035] Fixing bolts 87 (see Figure 12) for fixing the substrate holder 35 to the body 33 are inserted into the eighth through hole 81 and the eleventh through hole 84. The first washer 63 described above is inserted into the ninth through hole 82, and the second washer 64 described above is inserted into the tenth through hole 83. In this embodiment, the ninth through hole 82 and the tenth through hole 83 correspond to the "washer housing and holding holes" as defined in the present invention.

[0036] The groove 85 for inserting the pressure sensing pipe is formed in the center of the substrate holder 35 in the left-right direction, with its front end communicating with the ninth through hole 82 and the tenth through hole 83, and extending rearward from this front end. When attaching the substrate 34 to the substrate holder 35, the first and second pressure sensing pipes 61 and 62 are inserted into the groove 85 from above, and the first and second washers 63 and 64 are inserted into the ninth and tenth through holes 82 and 83 from above.

[0037] As shown in Figure 13(C), a positioning portion 88 is provided on the lower end surface 86a of the base portion 86, that is, the bottom surface of the substrate holder 35 and the bottom surface of the pressure sensor assembly 31. The positioning portion 88 in this embodiment has a recess 88a that opens downward {upward in Figure 13(C)}. This recess 88a engages with a positioning projection 89 (see Figures 12 and 15) that protrudes from the body 33 when the substrate holder 35 is placed on the body 33. Near the projection 89, a screw hole 90 is formed into which a fixing bolt 87 is screwed, as shown in Figure 12.

[0038] The second functional part is a substrate mounting portion 91 located at the rear end of the substrate holder 35, as shown in Figure 13(A). The substrate mounting portion 91 has a substrate mounting surface 92 which is a flat surface extending in the vertical and horizontal directions. When the substrate 34 is attached to the substrate holder 35, the second surface 34b of the substrate 34 comes into close contact with this substrate mounting surface 92. The substrate mounting surface 92 extends from the lower end to the upper end of the substrate holder 35, and also extends from the left end to the right end of the substrate holder 35. The groove 85 for inserting the pressure sensing pipe described above opens in the substrate mounting surface 92 and extends from this opening to the ninth and tenth through holes 82 and 83. At both ends of the lower end of the substrate mounting portion 91 in the horizontal direction, third through holes 37 are formed through which the screw members 36 described above are inserted. When the substrate 34 and the substrate cover 16 are attached to the substrate holder 35, as shown in Figure 9, the substrate 34 is held between the substrate mounting surface 92 of the substrate holder 35 and the substrate mounting surface 43 of the substrate cover 16. In this embodiment, the upper end of the substrate mounting surface 92 of the substrate holder 35 constitutes a second stopper portion that contacts the second surface 34b of the substrate 34 at the other end of the substrate holder 35.

[0039] The third functional part is the body connection portion 93 located at both ends of the substrate holder 35 in the left-right direction, as shown in Figure 13(A). The body connection portion 93 is formed in a shape (arc-shaped when viewed from above) that fits onto the inner circumferential surface 54a of the cylindrical detection portion 54 (see Figure 14) of the body 33. In this embodiment, the body connection portion 93 constitutes a fitting portion that fits onto the inner circumferential surface 54a of the detection portion 54.

[0040] To assemble the pressure sensor assembly 31 by connecting the substrate 34 and the substrate cover 16 to the substrate holder 35, first, the substrate 34 on which the pressure sensor 12 is mounted is brought close to the substrate holder 35 from above, the first and second washers 63 and 64 are inserted from above into the ninth and tenth through holes 82 and 83, and the first and second pressure sensing pipes 61 and 62 are inserted from above into the grooves 85 for inserting the pressure sensing pipes. In this state, the substrate cover 16 is placed on top of the substrate 34 from the rear, and the screw member 36 is passed from the front through the third through hole 37 of the substrate holder 35 and the fourth through hole 38 of the substrate 34 and screwed into the fifth through hole 39 of the substrate cover 16. By tightening the screw member 36 and locking the locking pieces 45 and 46 of the substrate cover 16 to the substrate 34, the pressure sensor assembly 31 consisting of the substrate holder 35, the substrate 34 and the substrate cover 16 is formed.

[0041] In the aforementioned embodiment of the pressure sensor characterization module, the substrate cover 16 and the substrate holder 35 were manufactured separately, and the pressure sensor assembly 31 was assembled by joining the substrate 34 and the substrate cover 16 to the substrate holder 35. However, an embodiment can also be adopted in which a substrate holding member (not shown) in which the substrate cover 16 and the substrate holder 35 are integrally molded from the outset is used, and a groove (not shown) is formed between the substrate cover 16 and the substrate holder 35 of the substrate holding member for mounting one end of the substrate 34, and the pressure sensor assembly 31 is formed by mounting and holding one end of the substrate 34 in this groove. After the characterization described later, the pressure sensor assembly 31 is incorporated into the body 33 of the pressure measuring device 32, as shown in Figures 11 and 14.

[0042] (Explanation of pressure measuring device) As shown in Figure 14, the body 33 of the pressure measuring device 32 has a pressure receiving section 103 to which the first and second pipes 101 and 102, which are shown at the bottom of Figure 14, are connected, and a bottomed cylindrical detection section 54, which is shown at the top of Figure 14. The bottom of the detection section 54 is connected to the pressure receiving section 103.

[0043] The pressure-receiving section 103 is provided with a first pressure-receiving diaphragm 105 that is in contact with the first fluid to be measured 104 filling the first pipe 101, and a second pressure-receiving diaphragm 107 that is in contact with the second fluid to be measured 106 filling the second pipe 102. The pressure-receiving section 103 also has a first pressure-receiving chamber 108 in which the first pressure-receiving diaphragm 105 forms part of the wall, and a second pressure-receiving chamber 109 in which the second pressure-receiving diaphragm 107 forms part of the wall. The first pressure-receiving chamber 108 is connected to the first sensor connection port 111 of the detection section 54 via a first pressure-conducting path 110 formed in the body 33.

[0044] The second pressure-receiving chamber 109 is connected to the second sensor connection port 113 of the detection unit 54 via a second pressure-conducting path 112 formed within the body 33. The pressure transmission path from the first and second pressure-receiving chambers 108, 109 to the first and second sensor connection ports 111, 113 is filled with a pressure transmission medium 73. The first and second sensor connection ports 111 and 113 open onto the positioning protrusions 89 of the detection unit 54. The first washer 63 of the pressure sensor 12 described above is welded to the first sensor connection port 111, and the second washer 64 is welded to the second sensor connection port 113.

[0045] To perform this welding, first, the pressure sensor assembly 31 is inserted into the detection section 54 of the body 33, and the circuit board holder 35 is fixed to the body 33 with fixing bolts 87. As a result of this operation, the first and second washers 63 and 64 will overlap the first and second sensor connection ports 111 and 113, as shown in Figure 15. Next, rod-shaped resistance welding electrodes 114 are inserted from above into the ninth and tenth through holes 82 and 83 of the substrate holder 35, and these electrodes 114 are pressed against the first and second washers 63 and 64. Then, current is passed from these electrodes 114 through the first and second washers 63 and 64 to the body 33 to perform resistance welding.

[0046] After welding in this manner, as shown in Figure 16, the ninth and tenth through holes 82 and 83 of the substrate holder 35 and the groove 85 for inserting the pressure sensing pipes are filled with sealing material 115 by potting, and the first and second pressure sensing pipes 61 and 62 and the first and second washers 63 and 64 are embedded in the sealing material 115. After filling with sealing material 115, pressure transmission medium 73 is injected into the first and second pressure sensing paths 110 and 112 from an injection port (not shown), and the pressure transmission path from the first and second pressure receiving chambers 108 and 107 to the sensor chip 67 is filled with pressure transmission medium 73, thereby completing a pressure measuring device 32 capable of detecting the differential pressure of the first and second fluids to be measured 104 and 106.

[0047] (Description of the characterization device) Next, the characterization device 13 for characterizing the pressure sensor 12 will be described. Characterization is performed using the characterization device 13 shown in Figure 19. Characterization can be performed by loading only the pressure sensor assembly 31 into the characterization device 13 as a characterization module, or by loading the characterization module 11, which is the storage and transport configuration in which the pressure sensor assembly 31 is inserted into a protective case 15, into the characterization device 13. Here, we will describe the case in which characterization is performed using the characterization module 11, which is the storage and transport configuration.

[0048] To assemble the characterization module 11, which is the configuration for storage and transport, by combining the pressure sensor assembly 31 and the protective case 15, the pressure sensor assembly 31 is inserted from the rear into the opening of the protective case 15, as shown in Figure 3. At this time, the bottom surface of the substrate holder 35 is placed on the bottom wall 15c of the protective case 15, and the first and second washers 63 and 64 are inserted into the first groove 21 of the bottom wall 15c. In addition, the body connection portion 93 of the substrate holder 35 is inserted into the second and fourth grooves 22 and 24 of the protective case 15, and the locking pieces 45 and 46 of the substrate cover 16 are inserted into the third and fifth grooves 23 and 25 of the protective case 15.

[0049] In the characterization module 11, which is in its storage and transport configuration, the pressure sensor assembly 31 is inserted into the protective case 15, so that the pressure sensor assembly 31 is placed on the lower wall 15c of the protective case 15. Before assembling the pressure sensor assembly 31 into the protective case 15, O-rings 116 (see Figure 20) are attached to the lower ends of the first and second washers 63 and 64. By combining the pressure sensor assembly 31 with the protective case 15 in this way, the second surface 34b of the substrate 34 and the substrate holder 35 are covered by the protective case 15. Therefore, in the characterization module 11, which is in its storage and transport configuration, the first and second washers 63 and 64 and the first and second pressure sensing pipes 61 and 62 are housed and protected inside the protective case 15.

[0050] When viewing the characterization module 11 in its storage and transport configuration from above, the first and second washers 63 and 64 can be seen through the first and second through-holes 17 and 18 of the protective case 15, as shown in Figures 17 and 18. Specifically, as shown in Figure 17, an opening consisting of the first through-hole 17 is formed on the top surface (upper end surface) of the protective case 15, in the area opposite to the vertical projection of the positioning portion 88 provided on the bottom surface of the substrate holder 35. Furthermore, as shown in Figure 18, an opening consisting of the second through-hole 18 is formed on the bottom surface of the protective case 15, exposing the positioning portion 88 provided on the bottom surface of the substrate holder 35.

[0051] (Explanation of base components) As shown in Figures 19(A) and (B), the characterization device 13 includes a base member 121 located at the bottom in these figures, a plurality of (two) support columns 122 extending upward from the base member 121, and a washer retaining pin holding member 123 connected to the upper end of the support columns 122. The base member 121 is for supporting the characterization module 11, and as shown in Figure 20, a stage portion 124 and a module fixing portion 125 are installed on its upper surface. The stage portion 124 contacts the bottom surface of the characterization module 11 and supports the characterization module 11. In this embodiment, the stage portion 124 is formed by the bottom of a groove that opens upward at the upper end of the base member 121 and extends in the front-rear direction. The width of the stage portion 124 in the left-right direction is the width into which the characterization module 11 fits.

[0052] As shown in Figure 21, the stage portion 124 is provided with a positioning portion 126 and first and second washer insertion holes 127 and 128. The positioning portion 126 has a protrusion 126a that engages with a recess 88a formed on the bottom surface of the characterization module 11 (the bottom surface of the substrate holder 35). The characterization module 11 is positioned on the stage portion 124 by the engagement of the protrusion 126a with the recess 88a of the characterization module 11.

[0053] The first and second washer insertion holes 127 and 128 are holes into which the first and second washers 63 and 64 are inserted. They are formed at the upper end of the protrusion 126a and open upward. As shown in Figure 22, the first and second washer insertion holes 127 and 128 have a large diameter portion 131 into which the disc portions 74 of the first and second washers 63 and 64 are inserted, and a small diameter portion 132 into which the O-rings 116 attached to the first and second washers 63 and 64 are housed. They are connected to the first and second pressure introduction passages 133 and 134 formed within the stage portion 124. The O-ring 116 is compressed between the disc portion 74 of the first and second washers 63 and 64 and the positioning portion 126, thereby sealing the space between the positioning portion 126, through which the first and second pressure introduction passages 133 and 134 open, and the first and second washers 63 and 64.

[0054] As shown in Figure 22, the first pressure introduction passage 133 is connected to a first test fluid introduction hole 135 that opens on the rear end face of the base member 121, and the second pressure introduction passage 134 is connected to a second test fluid introduction hole 136 that opens on the front end face of the base member 121. The first and second test fluid introduction holes 135 and 136 are holes for introducing the pressure of the test fluid used to characterize the pressure sensor 12.

[0055] The first washer insertion hole 127 into which the first washer 63 is inserted is connected to the first test fluid introduction hole 135 opening on the rear end face of the base member 121 via the first pressure introduction passage 134. The second washer insertion hole 128 into which the second washer 64 is inserted is connected to the second test fluid introduction hole 136 opening on the front end face of the base member 121 via the second pressure introduction passage 134. The first and second test fluid inlet holes 135 and 136 are supplied with fluid at a predetermined pressure when characterization is performed. The pressure of the test fluid is guided from the first and second test fluid inlet holes 135 and 136 through the first and second washer insertion holes 127 and 128 via the first and second pressure inlet passages 133 and 134.

[0056] As shown in Figure 21, the module fixing portion 125 is formed by the groove wall of the groove forming the stage portion 124, and restricts the left-right movement of the characterization module 11 placed on the stage portion 124. The module fixing portion 125 has a screw hole 137 into which the support column 122 is screwed. The screw hole 137 opens on the upper surface of the module fixing portion 125 and extends in the vertical direction. As shown in Figure 23, the support column 122 is made of a bolt with male threads 122a formed on both ends. By screwing the support column 122 into the screw hole 137 of the module fixing portion 125, the support column 122 is erected vertically from the stage portion 124, spaced apart from the outer edge of the characterization module 11 placed on the stage portion 124. In this embodiment, the support column 122 is fixed to the module fixing portion 125 by tightening a lock nut 138 while it is screwed into the screw hole 137 of the module fixing portion 125.

[0057] (Explanation of the washer retaining pin holder) The washer retaining pin holding member 123, which is connected to the support column 122, is formed in the shape of an elongated plate extending in the left-right direction. Twelfth through holes 141 are drilled at both ends of the washer retaining pin holding member 123 in the left-right direction, through which the support column 122 passes. When the support column 122 is passed through the twelfth through holes 141, the washer retaining pin holding member 123 is movable in the vertical direction along the support column 122.

[0058] As shown in Figure 23, two retaining holes 142 opening downwards are formed in the left-right central part of the washer retaining pin retaining member 123. One end (upper end) 143a, 144a of a pair of washer retaining pins 143, 144 that extend in the vertical direction are inserted into these retaining holes 142, respectively. The washer retaining pins 143 and 144 are used to press the first and second washers 63 and 64 from above against the base member 121 and fix them to the base member 121 (press and fix), and are formed in the shape of a cylindrical rod.

[0059] The upper ends 143a, 144a and lower ends 143b, 144b of the washer retaining pins 143, 144 are formed so that their outer diameter is smaller than that of the central part in the longitudinal direction. The outer diameter of the upper ends 143a, 144a of the washer retaining pins 143, 144 is the diameter that fits into the retaining hole 142 of the washer retaining pin holding member 123. As shown in Figure 24, a partially flat portion 145 is formed on the upper ends 143a, 144a of the washer retaining pins 143, 144a. The flat portion 145 is formed to be flat and to be parallel to each other in the radial direction of one end 143a, 144a and the other end 143b, 144a.

[0060] Slits 146 are formed at the other ends 143b and 144b of the washer retaining pins 143 and 144. These slits 146 are formed to avoid interference between the washer retaining pins 143 and 144 and the first and second pressure-sensing pipes 61 and 62 when the washer retaining pins 143 and 144 press the first and second washers 63 and 64, by housing the first and second pressure-sensing pipes 61 and 62 within the slits 146. In this embodiment, the slits 146 extend a predetermined length from the tip surface (lower end surface) of the washer retaining pins 143 and 144 toward one end 143a and 144a, and also extend radially from the outer circumferential surface to the radial center of the washer retaining pins 143 and 144. The two opposing inner wall surfaces 146a of the slits 146 are formed parallel to the flat portion 145 at one end.

[0061] The two washer retaining pins 143 and 144 are inserted into the retaining holes 142 of the washer retaining pin retaining member 123 with one end 143a and 144a facing the other end 143b and 144b, with the openings of the slits 146 facing each other. They are then fixed to the washer retaining pin retaining member 123 by a fixing structure 147 (see Figure 25), which will be described later. In this case, the flat portions 145 of the one end 143a and 144a of the washer retaining pins 143 and 144 that are inserted into the retaining holes 142 extend in both the vertical and horizontal directions.

[0062] As shown in Figure 25, the fixing structure 147 consists of a screw hole 148 extending from the holding hole 142 to the side surface 123a (rear surface) of the washer retaining pin holding member 123, and a set screw 149 screwed into this screw hole 148. With one end 143a, 144a of the washer retaining pins 143, 144 inserted into the holding hole 142, the set screw 149 is screwed into the screw hole 148, thereby pressing the set screw 149 against the one end 143a, 144a of the washer retaining pins 143, 144, and fixing the washer retaining pins 143, 144 to the washer retaining pin holding member 123.

[0063] As described above, when the washer retaining pins 143 and 144 are inserted into the retaining hole 142 with the slits 146 facing inward between the two washer retaining pins 143 and 144, the set screw 149 abuts against the flat portion 145 of the one end 143a and 144a, as shown in Figure 25. Therefore, by fixing the washer retaining pins 143 and 144 to the washer retaining pin retaining member 123 with the fixing structure 147, the vertical movement of the washer retaining pins 133 and 144 is restricted, and rotation of the washer retaining pins 143 and 144 relative to the washer retaining pin retaining member 123 is prevented.

[0064] (Explanation of the procedure for performing characterization) In order to perform characterization of the pressure sensor 12 using the characterization device 13 configured in this way, first, the washer retaining pin holding member 123 is removed from the support column 122 of the characterization device 13, and the characterization module 11 is placed on the stage portion 124 of the base member 121. For this placement, the positioning portion 126 of the stage portion 124 is inserted into the second through hole 18 of the protective case 15, and as shown in Figure 22, the first and second washers 63, 64 and the O-ring 116 are inserted from above into the first and second washer insertion holes 127, 128 of the positioning portion 126.

[0065] At this time, the protective case 15 is fitted onto the stage portion 124 of the base member 121, and the left-right position of the pressure sensor assembly 31 relative to the base member 121 is determined, so the first and second washers 63 and 64 can be easily and correctly inserted into the washer insertion holes 127 and 128. This means that the positions of the first and second pressure sensing pipes 61 and 62 are in the positions as designed, and the first and second pressure sensing pipes 61 and 62 are correctly inserted into the slits 146 of the washer retaining pins 143 and 144, preventing them from contacting the washer retaining pins 143 and 144 and deforming them. Furthermore, when the protective case 15 is placed on the stage portion 124 of the base member 121, even if force is applied to the connector 50 of the circuit board 34 when attaching or detaching the cable, the circuit board 34 will not tilt significantly relative to the base member 121. Therefore, it is possible to prevent stress from concentrating at the solder joint between the first and second pressure sensing pipes 61 and 62 and the sensor package 41.

[0066] Next, the two washer retaining pins 143 and 144 fixed to the washer retaining member are inserted from above into the first through-hole 17 in the upper wall 15b of the protective case 15, and the upper end of the support column 122 is inserted into the through-hole of the washer retaining pin retaining member 123. With the washer retaining pin retaining member 123 connected to the support column 122 in this way, the washer retaining pin retaining member 123 is lowered, so that the other ends (lower ends) 143b and 144b of the washer retaining pins 143 and 144 are placed on the first and second washers 63 and 64 from above. At this time, the first and second pressure sensing pipes 61 and 62 are housed in the slits 146 of the washer retaining pins 143 and 144.

[0067] Next, a fastening nut 151 (see Figures 20 and 23) is screwed onto the male thread 122a at the upper end of the support column 122, and the nut 151 is tightened. As the net 151 is tightened, the washer retaining pin holding member 123 is pushed downward, and the O-ring 116 sandwiched between the base member 121 and the first and second washers 63 and 64 is compressed. Then, by further tightening the nut 151, as shown in Figure 26, the disc portions 74 of the first and second washers 63 and 64 come into contact with the bottom of the large diameter portions 131 of the first and second washer insertion holes 127 and 128, restricting the further downward movement of the washer retaining pins 143 and 144. As the O-ring 116 is compressed in this way, the first and second washers 63 and 64 come into contact with the base member 121, sealing the space between the base member 121 and the first and second washers 63 and 64, and completing the process of attaching the characterization module 11 to the characterization device 13.

[0068] Subsequently, a characterization cable (not shown) is connected to the connector 50 of the circuit board 34, and with the temperature of the characterization device 13 reaching a predetermined temperature, the test fluid is introduced into the first and second test fluid introduction holes 135 and 136 of the base member 121 to perform characterization. After characterization is complete, the characterization module 11 is removed from the characterization device 13, and then the pressure sensor assembly 31 is removed from the protective case 15. The pressure sensor assembly 31 is then attached to the body 33 of the pressure measuring device 32.

[0069] (Instructions for attaching the pressure sensor assembly to the pressure measuring device) To attach the pressure sensor assembly 31 to the body 33, first, as shown in Figure 12, the pressure sensor assembly 31 is inserted from above into the cylindrical detection section 54 of the body 33. As the pressure sensor assembly 31 is inserted into the detection section 54, as shown in Figures 11 and 14, the body connection section 93 of the substrate holder 35 fits onto the inner circumferential surface 54a of the detection section 54, and as shown in Figure 19, the second convex curved surface 52 of the substrate cover 16 fits onto the detection section 54. Then, the pressure sensor assembly 31 is fixed to the body 33 with fixing bolts 87, and the first and second washers 63 and 64 are welded to the body 33. After that, the sealing material 115 is injected into the substrate holder 35, and the pressure transmission medium 73 is filled into the pressure transmission path from the first and second pressure sensing paths 110 and 112 inside the body 33 to the inside of the pressure sensor 12, thereby completing the installation of the pressure sensor assembly 31.

[0070] (Explanation of the effects according to the embodiment) The stage portion 124 of the characterization apparatus 13 according to this embodiment is provided with a positioning portion 126 having a protrusion 126a that engages with a recess 88a formed on the bottom surface of the characterization module 11 for positioning, and washer insertion holes 127 and 128. The base member 121 has first and second test fluid introduction holes 135 and 136, and first and second pressure introduction passages 133 and 134 that guide the test fluid pressure from the first and second test fluid introduction holes 135 and 136 to the washer insertion holes 127 and 128. The base member 121 having the stage portion 124 can be made smaller than the body 33 of the pressure measuring device 32. Therefore, the characterization apparatus 13 according to this embodiment can be made to have a smaller thermal volume than the body 33 of the pressure measuring device 32. Therefore, it is possible to provide a pressure sensor characterization device that can perform characterization when the thermal volume of the object to be characterized is small, while keeping the temperature constant during characterization.

[0071] The characterization device 13 according to this embodiment includes a plurality of support columns 122 erected vertically from the stage section 124, spaced apart from the characterization module 11 placed on the stage section 124; a washer retaining pin holding member 123 having a twelfth through hole 141 through which the support columns 122 pass, and fixed parallel to the stage section 124 by a nut 151 acting as a fastening member; and two washer retaining pins 143 and 144, one end of which is connected to the washer retaining pin holding member 123, and the other end of which presses and fixes the first and second washers 63 and 64. Therefore, by adjusting the tightening torque when tightening the fastening member (nut 151), it becomes possible to adjust the amount of elastic deformation of the O-ring 116 interposed between the first and second washers 63 and 64 and the base member 121. Therefore, since the connection between the characterization module 11 and the characterization device 13 can be reliably sealed, a characterization device with higher characterization accuracy can be provided.

[0072] In the characterization device 13 according to this embodiment, a slit 146 is formed at the other end of the washer-side washer-side washer-side washer retaining pins 143 and 144 to avoid interference with the first and second pressure sensing pipes 61 and 62. As a result, the first and second pressure sensing pipes 61 and 62 are accommodated in the slit 146, allowing a wide area of ​​the upper surface of the first and second washers 63 and 64 to be pressed by the washer retaining pins 143 and 144. Consequently, the first and second washers 63 and 64 are pressed against the O-ring 116 substantially evenly in the circumferential direction, resulting in high sealing performance.

[0073] In this embodiment, a flat portion 145 is formed at one end of the washer retaining pins 143 and 144. The washer retaining pin holding member 123 has a screw hole 148 perpendicular to the holding hole 142 through which one end of the washer retaining pins 143 and 144 is inserted. The tip of the set screw 149 screwed into the screw hole 148 abuts against the flat portion 145 of the washer retaining pins 143 and 144, thereby preventing the washer retaining pins 143 and 144 from rotating. As a result, the washer retaining pins 143 and 144 can be fixed to the washer retaining pin holding member 123 in a state where the first and second pressure sensing pipes 61 and 62 can be inserted into the slits 146 of the washer retaining pins 143 and 144. Therefore, the washer retaining pin holding member 123 can be connected to the support column 122 without having to be aware of the position of the slits 146 of the washer retaining pins 143 and 144, making the setup work for characterization easy.

[0074] In the above-described embodiment, an example was shown in which a positioning projection 89 is formed on the body 33 of the pressure measuring device 32, and a recess 88a that engages with this projection 89 is formed on the bottom surface of the substrate holder 35. However, although not shown, if a positioning recess is formed on the body 33 of the pressure measuring device 32 instead of the projection 89, a projection that engages with this recess is provided protruding from the bottom surface of the substrate holder 35. In this case, the base member 121 of the characterization device 13 is also provided with a positioning portion 126 having a recess that engages with the projection of the substrate holder 35.

[0075] The pressure sensor assembly 31 according to the above-described embodiment has a configuration in which the substrate 34 is held by sandwiching it in the thickness direction between the individually formed substrate cover 16 and substrate holder 35. However, the substrate cover 16 and substrate holder 35 can be integrally molded. When the substrate cover 16 and substrate holder 35 are integrally molded, a groove extending in the vertical direction is formed between the substrate cover 16 and substrate holder 35 of the integrally molded product, and the substrate is held in the integrally molded product by attaching one end of the substrate to this groove. Even when the substrate cover 16 and the substrate holder 35 are formed integrally in this way, it is possible to miniaturize the equipment for performing the characterization, and moreover, it is possible to provide a pressure sensor characterization device that can perform characterization when the thermal volume of the object to be characterized is small, while keeping the temperature constant during characterization. [Explanation of symbols]

[0076] 11…Characterization module, 12…Pressure sensor, 13…Characterization device, 34…Substrate, 34a…First surface, 34b…Second surface, 41…Sensor package, 61…First pressure sensing pipe (pressure introduction pipe), 62…Second pressure sensing pipe (pressure introduction pipe), 63…First washer, 64…Second washer, 69…Notch for inserting pressure sensing pipe, 82…Ninth through hole (washer housing and holding hole), 83…Tenth through hole (washer housing and holding hole), 88,126…Positioning part, 88a…Recess, 121 ...base member, 122...support column, 123...washer retaining pin holding member, 124...stage part, 125...module fixing part, 126a...protrusion, 127...first washer insertion hole, 128...second washer insertion hole, 133...first pressure introduction passage, 134...second pressure introduction passage, 135...first test fluid introduction hole, 136...second test fluid introduction hole, 141...12th through hole (through hole), 142...holding hole, 143,144...washer retaining pin, 145...flat part, 146...slit, 148...threaded hole, 151...nut (fastening member).

Claims

1. A pressure sensor characterization apparatus for performing characterization of a pressure sensor having a sensor package mounted on a first surface of a substrate, and a pressure introduction pipe that protrudes from the sensor package through a notch or hole formed in the substrate to the opposite side of the first surface of the substrate, then bends and extends parallel to a second surface on the opposite side of the substrate to the first surface, with a washer provided at its tip, the pressure sensor being housed in a characterization module having a washer housing and holding hole into which the washer is inserted, A stage portion that contacts the bottom surface of the characterization module and supports the characterization module, A module fixing unit that restricts and fixes the movement of the characterization module placed on the stage, The system comprises the stage section and a base member with the module fixing section mounted on its upper surface. The stage portion is provided with a positioning portion having a recess or protrusion for engaging with a protrusion or recess formed on the bottom surface of the characterization module to position the characterization module on the stage portion, and a washer insertion hole into which the washer is inserted. The pressure sensor characterization device is characterized in that the base member has a test fluid introduction hole formed therein for introducing the pressure of a test fluid used for characterizing the pressure sensor, and a pressure introduction path formed therein for guiding the test fluid pressure from the test fluid introduction hole to the washer insertion hole.

2. In the pressure sensor characterization apparatus according to claim 1, Multiple support columns are erected vertically from the stage portion, spaced apart from the outer edge of the characterization module placed on the stage portion, A washer retaining pin holding member having multiple through holes through which the multiple support columns pass, and which is fixed to the stage portion by a fastening member after each support column is inserted through the multiple through holes, and Two rod-shaped washer retaining pins, one end of which is inserted through two retaining holes formed in the washer retaining pin holding member, and the other end of which abuts against the upper part of the washer to press and fix the washer, A characterization device for a pressure sensor, characterized by being equipped with [a specific feature].

3. In the pressure sensor characterization device according to claim 2, A pressure sensor characterization device characterized in that a slit is formed at the other end of the washer-side of the washer retaining pin to avoid interference with the pressure introduction pipe.

4. In the pressure sensor characterization apparatus according to claim 2 or 3, A partially flat portion is formed on one end side of the washer retaining pin on the washer retaining pin holding member side, The washer retaining pin holding member is a plate-shaped member having a screw hole formed therein that is perpendicular to the holding hole through which one end of the washer retaining pin is inserted, and that extends to an opening on the side surface of the washer retaining pin holding member. Characterization device for a pressure sensor, characterized in that the washer retaining pin is inserted through the retaining hole of the washer retaining pin holding member, a set screw is inserted into the screw hole from the opening of the screw hole, and the tip of the set screw contacts the flat portion of the washer retaining pin, thereby preventing the washer retaining pin from rotating.

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