Circuit board housing container and lid-side circuit board support section

Abstract

The present invention provides a substrate storage container which is provided with: a lid-body-side substrate support part 73 that is capable of supporting edges of a plurality of substrates in a state where the opening of a container main body is closed by means of a lid body; and a back-side substrate support part which supports the plurality of substrates together with the lid-body-side substrate support part 73 in such a manner that the edges of the plurality of substrates are arranged in parallel to each other in a state where the opening of the container main body is closed by means of the lid body. With respect to this substrate storage container, the lid-body-side substrate support part 73 has flat support surfaces 731 which support the plurality of substrates by coming into contact with the circumferential surfaces of the respective edges of the substrates; and flat support surfaces 731 which are in contact with the circumferential surfaces of the respective edges of substrates that are adjacent to each other among the plurality of substrates have overlapping parts 733 that face each other in a direction that is parallel to the upper surfaces of the substrates.

Description

Technical Field

[0001] The present invention relates to a substrate storage container and a lid-side substrate support portion used when storing, storing, transporting, and transporting a substrate made of a semiconductor wafer or the like.

Background Art

[0002] As a substrate storage container for storing a substrate made of a semiconductor wafer and transporting it in a process in a factory, a configuration including a container body and a lid has been conventionally known (see, for example, Patent Document 1 and Patent Document 2).

[0003] One end of the container body has an opening peripheral edge portion where a container body opening is formed. The other end of the container body has a closed cylindrical wall portion. A substrate storage space is formed inside the container body. The substrate storage space is formed surrounded by the wall portion and can store a substrate. The lid is detachable from the opening peripheral edge portion and can close the container body opening. The side substrate support portions are provided on the wall portion so as to face each other within the substrate storage space. The side substrate support portions can support the edge portions of the substrates in a state where adjacent substrates are separated from each other at a predetermined interval and arranged in parallel when the container body opening is not closed by the lid.

[0004] A front retainer is provided at a portion of the lid that faces the substrate storage space when closing the container body opening. The front retainer can support the edge portion of the substrate when the container body opening is closed by the lid. Further, a rear-side substrate support portion is provided on the wall portion so as to face the front retainer. The rear-side substrate support portion can support the edge portion of the substrate. The rear-side substrate support portion holds the substrates in a state where adjacent substrates are separated from each other at a predetermined interval and arranged in parallel by supporting the substrates in cooperation with the front retainer when the container body opening is closed by the lid.

Prior Art Documents

Patent Documents

[0005] [Patent Document 1] Patent No. 6375577 [Patent Document 2] Patent No. 6258069 [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] In semiconductor manufacturing processes, substrates thinned by polishing or other processes are sometimes transported in substrate storage containers. In such cases, the substrate may bend due to its own weight, or due to vibrations or slight impacts during transport, potentially leading to damage or breakage. For this reason, configurations such as widening the pitch of the supports that hold multiple substrates in the substrate storage container to avoid such damage or breakage during transport have been considered. However, due to the bending that occurs as described above, when the opening of the container body is closed by the lid, cross-slots may form, preventing the front retainer from cooperating to support the substrate.

[0007] The present invention aims to provide a substrate storage container and a lid-side substrate support portion that can hold a thin substrate without damage or breakage when the substrate bends due to its own weight or impact. [Means for solving the problem]

[0008] The present invention relates to a container body having a cylindrical wall portion with a container body opening at one end and a closed end at the other end, wherein the inner surface of the wall portion forms a substrate storage space capable of accommodating a plurality of substrates and communicating with the container body opening; a lid that is detachable from the container body opening and capable of closing the container body opening; a portion of the lid that is positioned facing the substrate storage space when the container body opening is closed by the lid, and capable of supporting the edges of the plurality of substrates when the container body opening is closed by the lid; and the lid within the substrate storage space The present invention relates to a substrate storage container comprising: a rear substrate support portion, which is arranged in conjunction with a side substrate support portion and capable of supporting the edges of the plurality of substrates, and which cooperates with the lid side substrate support portion to support the plurality of substrates in a state in parallel when the opening of the container body is closed by the lid, wherein the lid side substrate support portion has a support flat surface that abuts against the circumferential surface of each edge of the plurality of substrates to support the substrate, and the support flat surfaces that abut against the circumferential surface of each edge of adjacent substrates among the plurality of substrates have overlapping portions that face each other in a direction parallel to the upper surface of the substrate.

[0009] Furthermore, it is preferable that multiple support flat surfaces are provided, one for each circumferential surface of the edge of each of the multiple substrates. It is also preferable that the support flat surfaces are located at the free end of the cantilever spring. Furthermore, it is preferable that the support flat surfaces abut one of the substrates at one point on the circumferential surface of the front edge of one of the substrates. In addition, the multiple substrates are stored in parallel within the substrate storage space, and the length of the support flat surfaces in the parallel direction of the multiple substrates is preferably 5 mm or more. Furthermore, the area of ​​the support flat surfaces is preferably 50 mm². 2 It is preferable that the above conditions are met.

[0010] Furthermore, the present invention includes a container body having a cylindrical wall portion with a container body opening at one end and a closed end at the other end, wherein the inner surface of the wall portion forms a substrate storage space capable of accommodating a plurality of substrates and communicating with the container body opening; a lid that is detachable from the container body opening and capable of closing the container body opening; a portion of the lid that is positioned facing the substrate storage space when the container body opening is closed by the lid, and capable of supporting the edges of the plurality of substrates when the container body opening is closed by the lid; and the lid side substrate within the substrate storage space A lid-side substrate support for a substrate storage container, comprising: a rear-side substrate support portion arranged in conjunction with a support portion and capable of supporting the edges of the plurality of substrates, and which cooperates with the lid-side substrate support portion to support the plurality of substrates in a parallel arrangement when the opening of the container body is closed by the lid, wherein the lid-side substrate support portion has a support flat surface that abuts against the circumferential surface of each edge of the plurality of substrates to support the substrate, and the support flat surface that abuts against the circumferential surface of each edge of adjacent substrates among the plurality of substrates has an overlapping portion that faces each other in a direction parallel to the upper surface of the substrate.

[0011] Furthermore, it is preferable that multiple support flat surfaces are provided, one for each circumferential surface of the edge of each of the multiple substrates. It is also preferable that the support flat surfaces are located at the free end of the cantilever spring. Furthermore, it is preferable that the support flat surfaces abut one of the substrates at a single point on the circumferential surface of the front edge of one of the substrates. In addition, the multiple substrates are stored in parallel within the substrate storage space, and the length of the support flat surfaces in the parallel direction of the multiple substrates is preferably 5 mm or more. Furthermore, the area of ​​the support flat surfaces is preferably 50 mm². 2 It is preferable that the above conditions are met. [Effects of the Invention]

[0012] According to the present invention, it is possible to provide a substrate storage container and a lid-side substrate support portion that can hold a thin substrate without damage or breakage when the substrate bends due to its own weight or impact. [Brief explanation of the drawing]

[0013] [Figure 1] This is an exploded perspective view showing how multiple substrates are stored in a substrate storage container according to an embodiment of the present invention. [Figure 2] This is a perspective view showing the container body of a substrate storage container according to an embodiment of the present invention. [Figure 3] This is a perspective view showing the lid of a substrate storage container according to an embodiment of the present invention. [Figure 4] This is a perspective view showing the front retainer of a substrate storage container according to an embodiment of the present invention. [Figure 5] This is a front view showing the front retainer of a substrate storage container according to an embodiment of the present invention. [Figure 6] This is an enlarged front view showing the front retainer of a substrate housing container according to an embodiment of the present invention. [Figure 7] This is a cross-sectional view showing the positional relationship between a substrate housed in a substrate housing container according to an embodiment of the present invention and a front retainer. [Modes for carrying out the invention]

[0014] Hereinafter, the substrate storage container 1 and the lid-side substrate support portion 73 according to the present embodiment will be described with reference to the drawings. Hereinafter, for the sake of convenience of explanation, the direction from the container body 2 to the lid 3 described later (the direction from the upper right to the lower left in FIG. 1) is defined as the front direction D11, the opposite direction is defined as the rear direction D12, and these are collectively defined as the front-rear direction D1. Further, the direction from the lower wall 24 to the upper wall 23 described later (the upward direction in FIG. 1) is defined as the upward direction D21, the opposite direction is defined as the downward direction D22, and these are collectively defined as the up-down direction D2. Further, the direction from the second side wall 26 to the first side wall 25 described later (the direction from the lower right to the upper left in FIG. 1) is defined as the left direction D31, the opposite direction is defined as the right direction D32, and these are collectively defined as the left-right direction D3. Arrows indicating these directions are shown in the main drawings.

[0015] Further, the substrate W (see FIG. 1) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc. that have been thinned by polishing or the like, and are thin ones used in the industry. The substrate W in the present embodiment is a silicon wafer with a diameter of 300 mm.

[0016] As shown in FIGS. 1 and 2, the substrate storage container 1 stores the substrate W made of the silicon wafer as described above, and is used as a process container for transporting in the processes in the factory, or as a shipping container for transporting the substrate W by means of transportation such as land transportation means, air transportation means, and sea transportation means. It is composed of a container body 2 and a lid 3. The container body 2 includes a substrate support plate-shaped portion 5 as a side substrate support portion and a back-side substrate support portion 6. The lid 3 includes a front retainer 给7 (see FIGS. 4 to 6) having a lid-side substrate support portion 73. [[ID=​​As shown in FIG. 1 and the like, the container body 2 has a cylindrical wall portion 20 with a container body opening 21 formed at one end and the other end closed. A substrate storage space 27 is formed inside the container body 2. The substrate storage space 27 is formed surrounded by the wall portion 20. As shown in FIG. 2, a substrate support plate-like portion 5 is disposed at a portion of the wall portion 20 that forms the substrate storage space 27. As shown in FIG. 1, a plurality of substrates W can be stored in the substrate storage space 27.

[0018] The substrate support plate-like portion 5 is provided on the wall portion 20 so as to be paired inside the substrate storage space 27. When the container body opening 21 is not closed by the lid body 3 (when in the open lid state), the substrate support plate-like portion 5 can support the edges of the plurality of substrates W in a state where adjacent substrates W are separated at a predetermined interval and arranged in parallel by abutting against the edges of the plurality of substrates W. An inner substrate support portion 6 is provided behind the substrate support plate-like portion 5.

[0019] The inner substrate support portion 6 (see FIG. 2 and the like) is provided on the wall portion 20 so as to be paired with a front retainer 7 (see FIG. 3 and the like) described later inside the substrate storage space 27. When the container body opening 21 is closed by the lid body 3 (when in the closed lid state), the inner substrate support portion 6 can support the rear portions of the edges of the plurality of substrates W by abutting against the edges of the plurality of substrates W.

[0020] The lid body 3 is detachable from the opening peripheral edge portion 28 (FIG. 1 and the like) that forms the container body opening 21 and can close the container body opening 21. The front retainer 7 is provided at a portion of the lid body 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid body 3. The front retainer 7 is arranged so as to be paired with the inner substrate support portion 6 inside the substrate storage space 27.

[0021] The front retainer 7 can support the front portions of the edges of multiple substrates W by contacting the edges of the multiple substrates W when the container body opening 21 is closed by the lid 3. When the container body opening 21 is closed by the lid 3, the front retainer 7 works in cooperation with the rear substrate support portion 6 to support the multiple substrates W, thereby holding adjacent substrates W in a parallel state spaced apart at a predetermined interval.

[0022] The substrate housing container 1 is made of a resin such as plastic material. Examples of such resins include thermoplastic resins and alloys thereof, such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymer. When conductivity is to be imparted to these molding resins, conductive substances such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers are selectively added. It is also possible to add glass fibers or carbon fibers to increase rigidity.

[0023] The following describes each part in detail. As shown in Figure 1, the wall portion 20 of the container body 2 has a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The back wall 22, upper wall 23, lower wall 24, first side wall 25, and second side wall 26 are made of the material described above and are integrally molded.

[0024] The first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear ends of the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are all connected to the back wall 22. The front ends of the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are in a positional relationship facing the back wall 22 and constitute an opening periphery 28 that forms a substantially rectangular container body opening 21.

[0025] The opening periphery 28 is provided at one end of the container body 2, and the back wall 22 is located at the other end of the container body 2. The outer shape of the container body 2, formed by the outer surfaces of the walls 20, is box-shaped. The inner surfaces of the walls 20, namely the inner surfaces of the back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26, form a substrate storage space 27 surrounded by these surfaces. The container body opening 21 formed at the opening periphery 28 communicates with the substrate storage space 27 formed inside the container body 2, surrounded by the walls 20. The substrate storage space 27 can accommodate a maximum of 13 substrates W. In this embodiment, the substrate storage structure is capable of accommodating 13 substrates W. However, the substrate support plate-like part 5 may be removed, and a substrate support plate-like part (not shown) capable of accommodating 25 substrates W may be fixed to the container body 2 to create a substrate storage container structure capable of accommodating 25 substrates W.

[0026] As shown in Figure 1, in the portions of the upper wall 23 and the lower wall 24, near the opening periphery 28, latch engagement recesses 231A, 231B, 241A, and 241B are formed, recessed outward toward the substrate storage space 27. A total of four latch engagement recesses 231A, 231B, 241A, and 241B are formed, one each near the left and right ends of the upper wall 23 and the lower wall 24.

[0027] As shown in Figure 1, a top flange 236 is fixed to the center of the upper wall 23. The top flange 236 is a component that is hung and suspended from the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (Automatic Wafer Transfer System), PGV (Wafer Substrate Transport Cart), etc.

[0028] The substrate support plate-like portion 5 is provided on the first side wall 25 and the second side wall 26, respectively, and is arranged in the substrate storage space 27 in pairs in the left-right direction D3. The substrate support plate-like portion 5 may be integrally molded with the first side wall 25 and the second side wall 26.

[0029] The substrate support plate-like portion 5 has a plate-like, substantially arc shape. A total of 26 substrate support plate-like portions 5 are provided, 13 on the first side wall 25 side and 13 on the second side wall 26 side, in the vertical direction D2. Adjacent substrate support plate-like portions 5 are spaced apart from each other at intervals of 10 mm to 30 mm in the vertical direction D2 and are arranged in a parallel position. Above the uppermost substrate support plate-like portion 5, another plate-like member is arranged parallel to the substrate support plate-like portion 5. This member is positioned at the top and serves as a guide for inserting the substrate W into the substrate storage space 27.

[0030] Furthermore, the 13 substrate support plate-like portions 5 arranged on the first side wall 25 and the 13 substrate support plate-like portions 5 arranged on the second side wall 26 are positioned opposite each other in the left-right direction D3. In addition, the 13 substrate support plate-like portions 5 and the plate-shaped guide members parallel to the substrate support plate-like portions 5 are positioned parallel to the inner surface of the lower wall 24. As shown in Figure 2, etc., protrusions are provided on the upper surface of the substrate support plate-like portions 5. The substrate W supported by the substrate support plate-like portions 5 contacts only the protruding ends of the protrusions and does not contact the substrate support plate-like portions 5 in a planar manner.

[0031] The substrate support plate-like portion 5 is capable of supporting the edges of multiple substrates W such that adjacent substrates W are spaced apart at a predetermined interval and are in a parallel positional relationship with each other.

[0032] As shown in Figure 2, the rear substrate support portion 6 has a rear edge support portion 60. The rear edge support portion 60 is integrally molded with the rear end of the substrate support plate-like portion 5. The rear substrate support portion 6 may also be integrally molded with the first side wall 25, the second side wall 26, and the rear wall 22.

[0033] The rear edge support portions 60 are provided in a number corresponding to each substrate W that can be stored in the substrate storage space 27, specifically, 13 portions. The rear edge support portions 60 located on the first side wall 25 side and the second side wall 26 side have a positional relationship in the front-rear direction D1 such that they are paired with the front retainer 7, which will be described later. When a substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the rear edge support portions 60 grip and support the edges of the substrate W.

[0034] Next, the lid 3 and the front retainer 7 will be described in detail. As shown in Figure 1, the lid 3 has a substantially rectangular shape that substantially matches the shape of the opening periphery 28 of the container body 2. The lid 3 is detachable from the opening periphery 28 of the container body 2, and when the lid 3 is attached to the opening periphery 28, the lid 3 can close the opening 21 of the container body. An annular sealing member 4 is attached to the inner surface of the lid 3 (the back surface of the lid 3 shown in Figure 1). The sealing member 4 is made of various thermoplastic elastomers such as elastically deformable polyester or polyolefin, fluororubber, or silicone rubber. The sealing member 4 is arranged to encircle the outer periphery of the lid 3.

[0035] When the lid 3 is attached to the opening periphery 28, the sealing member 4 is elastically deformed by being sandwiched between the opening periphery 28 and the inner surface of the lid 3, and the lid 3 closes the container body opening 21 in a sealed state. When the lid 3 is removed from the opening periphery 28, the substrate W can be inserted into and removed from the substrate storage space 27 inside the container body 2.

[0036] The lid 3 has a lid body that forms the outer shape of the lid 3, and a latch mechanism is provided on the lid body. The latch mechanism is provided near both the left and right ends of the lid body, and as shown in Figure 1, it comprises two upper latch portions 32A that can protrude upward D21 from the upper edge of the lid body, and two lower latch portions 32B that can protrude downward D22 from the lower edge of the lid body. The two upper latch portions 32A are located near both the left and right ends of the upper edge of the lid body, and the two lower latch portions 32B are located near both the left and right ends of the lower edge of the lid body.

[0037] An operating section 33 is provided on the outer surface of the lid body. By operating the operating section 33 from the front of the lid body, the upper latch section 32A and the lower latch section 32B can be made to protrude from the top and bottom edges of the lid body, or to be made not to protrude from the top and bottom edges. The upper latch portion 32A protrudes upward D21 from the upper edge of the lid body and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion 32B protrudes downward D22 from the lower edge of the lid body and engages with the latch engagement recesses 241A and 241B of the container body 2, thereby fixing the lid 3 to the opening peripheral edge 28 of the container body 2.

[0038] As shown in Figure 3, a recess 34 is formed on the inside of the lid body that constitutes the lid 3, recessed outward (forward direction D11) from the substrate storage space 27. A front retainer 7 is fixedly provided in the portion of the lid body inside the recess 34.

[0039] As shown in Figures 4 to 6, the front retainer 7 has a lid-side substrate support portion 73, legs 72, and a vertical frame 71. There are 25 lid-side substrate support portions 73 arranged in the vertical direction D2, and each is supported by an elastically deformable leg portion 72. The legs 72 extend to the right in the direction D32 so as to be spaced apart from the lid-side substrate support portion 73. As shown in Figures 4 to 6, the vertical frame 71, which extends along the vertical direction D2, is integrally molded and provided at the end of the leg portion 72. As a result, the lid-side substrate support portion 73 is located at the free end of a cantilever spring, with the leg portion 72 forming a cantilever beam. When the circuit board W is placed in the circuit board storage space 27 and the lid 3 is closed, the lid-side circuit board support portion 73 supports the circuit board W by clamping it with the elastic force of the legs 72, biasing the foremost edge of the circuit board W toward the center of the circuit board storage space 27.

[0040] The rear surface of the lid-side substrate support portion 73 has a support flat surface 731 that abuts against the substrate W at one point on the circumferential surface of each edge of the multiple substrates W and supports the substrate W. Multiple support flat surfaces 731 are provided in one-to-one correspondence with the circumferential surface of each edge of the multiple substrates W and are composed of vertical planes. The support flat surface 731 abuts against the edge of the surface (upper surface) of the substrate W when the container body opening 21 is closed by the lid 3. The lid-side substrate support portion 73 is elastically displaceable in the direction from the other end to the one end of the container body 2 (forward direction D11) when the container body opening 21 is closed by the lid 3.

[0041] As shown in Figures 4 to 6, the lid-side substrate support portion 73 has a shape in which, at its central position in the left-right direction D3, the rectangular half connected to the leg portion 72 is offset downward in the tip direction D22. Therefore, as shown in Figure 6, the lower left end portion of the support flat surface 731 of one lid-side substrate support portion 73 and the upper right end portion of the support flat surface 731 of the lid-side substrate support portion 73 below it form an overlapping portion 733 that faces each other in the left-right direction D3, which is parallel to the upper surface of the substrate W. In this way, since the support flat surfaces 731 have overlapping portions 733 that face each other in the left-right direction D3, a linear gap is not formed between adjacent support flat surfaces 731 in the vertical direction D2, and a crank-shaped gap is formed.

[0042] The length H1 of the free-end edge of the support flat surface 731 of the lid-side substrate support portion 73 in the parallel direction of the multiple substrates W stored in the substrate storage space 27, i.e., in the vertical direction D2, is 5 mm or more and 9 mm or less. The area S1 of the support flat surface 731 is 50 mm². 2 71.5mm 2 The following applies:

[0043] Since the length H1 of the free-end edge of the support flat surface 731 of the lid-side substrate support portion 73 in the vertical direction D2 is 5 mm or more, the area S1 that contacts the circumferential surface of the edge of the substrate W is 50 mm 2This can be made larger, and even if the thin substrate W is bent, less force is applied to the substrate W itself, making it less likely for the substrate W to crack. As a result, the substrate W can be made less likely to be damaged. Furthermore, it is more preferable that the length H1 of the free end edge of the support flat surface 731 of the lid side substrate support portion 73 in the vertical direction D2 be 7 mm or more, which makes it possible to make the substrate W even less likely to crack.

[0044] Furthermore, since the length H1 of the free-end edge of the support flat surface 731 of the lid-side substrate support portion 73 in the vertical direction D2 is 9 mm or less, the area in contact with the circumferential surface of the edge of the substrate W is 71.5 mm². 2 By keeping this in check, it is possible to ensure that the number of boards W that can be stored in the substrate storage container 1 does not fall below the number of boards that can be stored in a normal substrate storage container. The length H1 of the free end edge of the support flat surface 731 of the lid-side substrate support portion 73 in the vertical direction D2 is more preferably 8.4 mm or less, which ensures that the number of boards that can be stored does not fall below the number of boards that can be stored in a normal substrate storage container.

[0045] According to the substrate storage container 1 of the first embodiment having the above configuration, the following effects can be obtained. The lid-side substrate support portion 73 has a support flat surface 731 that abuts against the circumferential surface of each edge of a plurality of substrates W to support the substrates W. The support flat surfaces 731 that abut against the circumferential surface of each edge of adjacent substrates W have overlapping portions 733 that face each other in a direction parallel to the upper surface of the substrate W. This configuration makes it possible to provide a substrate storage container 1 that can hold thin substrates W without damage or breakage when the substrates W bend due to their own weight or impact.

[0046] Furthermore, multiple support flat surfaces 731 are provided in a one-to-one correspondence with the circumferential surface of each edge of the multiple substrates W. This configuration allows each support flat surface 731 to abut against the circumferential surface of the edge of one substrate W, thereby enabling one substrate W to be supported by one support flat surface 731.

[0047] Furthermore, the support flat surface 731 is located at the free end of the cantilever spring. This configuration makes it possible to support the support flat surface 731 with the cantilever spring. As a result, it becomes possible to support the substrate W with the support flat surface 731 with an appropriate biasing force.

[0048] Furthermore, the length H1 of the support flat surface 731 in the parallel direction of the multiple substrates W is 5 mm or more. This configuration allows the contact area with the circumferential surface of the edge of the substrate W to be 50 mm². 2 This can be made larger than the above. As a result, it is possible to support the substrate W with a wide area of ​​support flat surface 731, so even if the thin substrate W bends, less force is applied to the substrate W itself, making it less likely to crack. As a result, it is possible to make the substrate W less likely to be damaged.

[0049] The present invention is not limited to the embodiments described above, and can be modified within the technical scope described in the claims.

[0050] For example, the shape of the container body and lid, and the number and dimensions of the substrates W that can be stored in the container body are not limited to the shapes of the container body 2 and lid 3, or the number and dimensions of the substrates W that can be stored in the container body 2, as in this embodiment. That is, the configuration of the lateral substrate support portion (substrate support plate-like portion 5), the lid-side substrate support portion 73, and the rear-side substrate support portion 6 are not limited to the configuration of this embodiment. Also, although the substrate W in this embodiment was a silicon wafer with a diameter of 300 mm, it is not limited to this value. [Explanation of Symbols]

[0051] 1. Circuit board storage container 2. Container body 3 Lid 5. Substrate support plate-like part (lateral substrate support part) 6 Rear side substrate support section 20 Wall 21 Container body opening 27 Circuit board storage space 28 Periphery of the opening 73 Cover side substrate support part 731 Support flat surface 733 Overlap section H1 Length W board

Claims

1. A container body having a cylindrical wall portion with an opening at one end and a closed end at the other, wherein the inner surface of the wall portion forms a substrate storage space that can accommodate multiple substrates and communicates with the opening of the container body, A lid that is detachable from the opening of the container body and capable of closing the opening of the container body, A portion of the lid that is positioned facing the substrate storage space when the container body opening is closed by the lid, and a lid-side substrate support portion that can support the edges of the plurality of substrates when the container body opening is closed by the lid, The container comprises a rear-side substrate support portion, which is positioned in the substrate storage space in a pair with the lid-side substrate support portion and capable of supporting the edges of the plurality of substrates, and which cooperates with the lid-side substrate support portion to support the plurality of substrates in a parallel arrangement when the opening of the container body is closed by the lid, The lid-side substrate support portion has a support flat surface that abuts against the circumferential surface of each edge of the plurality of substrates and supports the substrates. The adjacent support flat surfaces are in a parallel positional relationship. The central portions of the vertically adjacent support flat surfaces that abut the circumferential surfaces of the edges of adjacent substrates among the plurality of substrates do not face each other in a direction parallel to the upper surface of the substrate, and at least one of the upper and lower ends of one of the vertically adjacent support flat surfaces has an overlap portion that faces the other of the upper and lower ends of the other vertically adjacent support flat surface in a direction parallel to the upper surface of the substrate. The support flat surfaces are provided one for each of the circumferential surfaces of the edges of the plurality of substrates, The aforementioned support flat surface is located at the free end of the cantilever spring, A substrate housing container in which all of the aforementioned cantilever springs travel in the same direction from their base end to their free end.

2. The substrate storage container according to claim 1, wherein the support flat surface abuts the substrate at one point on the circumferential surface of the front edge of the substrate.

3. In the aforementioned substrate storage space, the plurality of substrates are stored in parallel. The substrate storage container according to claim 2, wherein the length of the support flat surface in the parallel direction of the plurality of substrates is 5 mm or more.

4. The area of ​​the aforementioned support flat surface is 50 mm². ２ The substrate storage container according to claim 2, as described above.

5. A container body having a cylindrical wall portion with an opening at one end and a closed end at the other, wherein the inner surface of the wall portion forms a substrate storage space that can accommodate multiple substrates and communicates with the opening of the container body, A lid that is detachable from the opening of the container body and capable of closing the opening of the container body, A portion of the lid that is positioned facing the substrate storage space when the container body opening is closed by the lid, and a lid-side substrate support portion that can support the edges of the plurality of substrates when the container body opening is closed by the lid, The rear-side substrate support portion is positioned in the substrate storage space in a pair with the lid-side substrate support portion, capable of supporting the edges of the plurality of substrates, and when the container body opening is closed by the lid, it cooperates with the lid-side substrate support portion to support the plurality of substrates with their edges aligned in parallel, A substrate support portion on the lid side of a substrate storage container, comprising: The plurality of substrates have a support flat surface that abuts against the circumferential surface of each edge and supports the substrate, The adjacent support flat surfaces are in a parallel positional relationship. The central portions of the vertically adjacent support flat surfaces that abut the circumferential surfaces of the edges of adjacent substrates among the plurality of substrates do not face each other in a direction parallel to the upper surface of the substrate, and at least one of the upper and lower ends of one of the vertically adjacent support flat surfaces has an overlap portion that faces the other of the upper and lower ends of the other vertically adjacent support flat surface in a direction parallel to the upper surface of the substrate. The support flat surfaces are provided one for each of the circumferential surfaces of the edges of the plurality of substrates, The aforementioned support flat surface is located at the free end of the cantilever spring, The lid-side substrate support portion is such that all of the aforementioned cantilever springs travel in the same direction from their base end to their free end.

6. The lid-side substrate support portion according to claim 5, wherein the support flat surface abuts the substrate at one point on the circumferential surface of the front edge of one of the substrates.

7. In the aforementioned substrate storage space, the plurality of substrates are stored in parallel. The lid-side substrate support portion according to claim 6, wherein the length of the support flat surface in the parallel direction of the plurality of substrates is 5 mm or more.

8. The area of ​​the aforementioned support flat surface is 50 mm². ２ The lid-side substrate support portion according to claim 6.

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