Inspection equipment

Abstract

To provide an inspection device capable of shortening a time required for inspection (tact time) by controlling the processing for carrying-in and imaging and processing for inspecting and counting of an inspection target by a different conveyance unit.SOLUTION: An inspection device 10 includes an imaging unit 20, a conveyance part 40, and a control unit 30. The conveyance part 40 includes first and second conveyance units 41 and 42. The actuation of each of the conveyance units can be individually controlled by the control unit 30. The first conveyance unit 41 is arranged in an imaging area and the second conveyance unit 42 is arranged in an inspecting and counting area (waiting area). The control unit 30 carries out another inspection target from the inspecting and counting area by the second conveyance unit 42, while imaging the inspection target 12 moved to the imaging area by the first conveyance unit 41.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to an inspection apparatus for inspecting the appearance of a test object.

Background Art

[0002] In an inspection apparatus for inspecting the appearance of a substrate (test object) on which electronic components or the like are mounted, from the loading of the substrate into the inspection apparatus to imaging, inspection, aggregation, and unloading, it is configured to be performed by one transfer unit (see Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in such an inspection apparatus, since the substrate cannot be unloaded until the inspection and aggregation processes are completed, the inspection of the next substrate cannot be executed, a time for the next substrate to wait occurs, and as a result, there is a problem that the throughput of the inspection apparatus decreases.

[0005] The present invention has been made in view of such problems, and by configuring a transfer unit that transfers a test object in an inspection apparatus with a plurality of transfer units arranged in series, and managing the processes of loading and imaging of a substrate (test object) and the processes of inspection and aggregation with different transfer units, an object is to provide an inspection apparatus capable of shortening the time (tact time) required for inspection.

Means for Solving the Problems

[0006] To solve the aforementioned problems, a first aspect of the inspection apparatus according to the present invention comprises: an imaging unit for acquiring image data of an object to be inspected; a transport unit for moving the object to be inspected; and a control unit for controlling the operation of the imaging unit and the transport unit, wherein the transport unit has at least two transport units connected in series in the direction of moving the object to be inspected, the operation of each of the transport units can be individually controlled by the control unit, at least one of the transport units is a first transport unit located in an imaging area where image data can be acquired by the imaging unit, and at least one of the remaining transport units is a second transport unit located in a waiting area in front of or behind the imaging area in the direction of movement, and the control unit is The length of the object to be inspected in the direction of movement is compared with the length of the transport unit in the direction of movement. If the length of the object to be inspected is longer than the length of any of the transport units, the operation of all the transport units is controlled as a single transport unit. If the length of the object to be inspected is less than or equal to the length of any of the transport units, the operation of each transport unit is controlled individually. When the transport units are being controlled individually, and the object to be inspected, which has been moved to the imaging area by the first transport unit, is being imaged by the imaging unit, the second transport unit is used to transport another object to be inspected into or out of the waiting area.

[0007] Also, Modifications of the inspection device are, The system comprises an imaging unit for acquiring image data of an object to be inspected, a transport unit for moving the object to be inspected, and a control unit for controlling the operation of the imaging unit and the transport unit, wherein the transport unit has at least two transport units connected in series in the direction of moving the object to be inspected, and the operation of each of the transport units can be individually controlled by the control unit, and at least two of the transport units are a first transport unit and a second transport unit arranged in an imaging area where image data can be acquired by the imaging unit, and when the control unit is individually controlling the transport units, and the object to be inspected located in one of the first transport unit and the second transport unit is being imaged by the imaging unit, the other of the first transport unit and the second transport unit moves another object to be inspected. [Effects of the Invention]

[0008] According to the present invention, an inspection apparatus can be provided that can shorten the time required for inspection (cycle time) by managing the loading and imaging of substrates (objects to be inspected) and the inspection and tabulation processes using different transport units. [Brief explanation of the drawing]

[0009] [Figure 1] This is an explanatory diagram illustrating the configuration of the inspection device. [Figure 2] This is an explanatory diagram illustrating the configuration of the transport section according to the first embodiment of the inspection device described above. [Figure 3] This is an explanatory diagram illustrating the inspection process using the transport unit according to the first embodiment. [Figure 4] This is an explanatory diagram illustrating the configuration of the transport section according to the second embodiment of the inspection device described above. [Figure 5] This is an explanatory diagram illustrating the control method of the transport unit according to the second embodiment, where (a) shows the standard mode, (b) shows the case where imaging is performed by the first transport unit in 2-buffer mode, and (c) shows the case where imaging is performed by the second transport unit in 2-buffer mode. [Figure 6] This is an explanatory diagram illustrating the configuration of the transport section according to the third embodiment of the inspection device described above. [Modes for carrying out the invention]

[0010] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. First, the configuration of the inspection apparatus 10 according to this embodiment will be described using Figure 1. This inspection apparatus 10 is an apparatus that inspects an object to be inspected 12 using an image of the object to be inspected obtained by imaging the object to be inspected 12. The object to be inspected 12 is, for example, an electronic circuit board on which a large number of electronic components are mounted. The inspection apparatus 10 determines whether the mounting state of the electronic components is good or bad based on the image of the object to be inspected. This inspection is usually performed on multiple inspection items for each component. Inspection items are items that require a good or bad judgment. Inspection items include, for example, inspection items for component placement such as missing parts, misalignment, and polarity reversal of the component itself, and inspection items for connections between the component and the board such as soldering condition and lifting of the lead pins of the component.

[0011] The inspection device 10 comprises an inspection table 14 for holding the object to be inspected 12, an imaging unit 20 for illuminating and imaging the object to be inspected 12, an XY stage 16 for moving the imaging unit 20 relative to the inspection table 14, and a control unit 30 for controlling the imaging unit 20 and the XY stage 16 to perform the inspection of the object to be inspected 12. For the sake of explanation, as shown in Figure 1, the surface on which the object to be inspected is placed on the inspection table 14 is defined as the XY plane, and the direction perpendicular to that surface (i.e., the imaging direction by the first imaging unit 21 constituting the imaging unit 20 (the optical axis direction of the optical system of the first imaging unit 21)) is defined as the Z direction.

[0012] The imaging unit 20 is mounted on a movable table (not shown) of the XY stage 16 and is movable in the X and Y directions by the XY stage 16. The XY stage 16 is, for example, a so-called H-shaped XY stage. Therefore, the XY stage 16 includes a Y drive unit that moves the movable table in the Y direction along a Y-direction guide extending in the Y direction, and two X-direction guides and an X drive unit that support the Y-direction guide at both ends and are configured to allow the movable table and Y-direction guide to move in the X direction. The XY stage 16 may further include a Z-movement mechanism for moving the imaging unit 20 in the Z direction, or a rotation mechanism for rotating the imaging unit 20. The inspection device 10 may further include an XY stage that makes the inspection table 14 movable, in which case the XY stage 16 that moves the imaging unit 20 may be omitted. Linear motors or ball screws can be used for the X drive unit and Y drive unit. The XY stage 16 may also consist of one axis each in the X direction and the Y direction.

[0013] The imaging unit 20 includes a first imaging unit 21, which is a main camera that images from a direction perpendicular to the inspection surface (substrate surface) of the object under inspection 12 (in the Z-axis direction), an illumination unit 22, and a second imaging unit 23, which is a side camera that images from a direction oblique to the inspection surface (substrate surface) of the object under inspection 12 (at an angle different from the Z-axis). This is to improve inspection accuracy by photographing and inspecting the object under inspection 12 from two directions. In the inspection apparatus 10 according to this embodiment, the first imaging unit 21, the illumination unit 22, and the second imaging unit 23 may be configured as an integrated imaging unit 20. In this integrated imaging unit 20, the relative positions of the first imaging unit 21, the illumination unit 22, and the second imaging unit 23 may be fixed, or each unit may be configured to be relatively movable. Alternatively, the first imaging unit 21, the illumination unit 22, and the second imaging unit 23 may be separate components and configured to be independently movable. Furthermore, the imaging unit 20 may be equipped with a projection unit that projects a pattern onto the inspection surface of the object to be inspected 12. For example, if the projection unit is configured to project a striped pattern whose brightness changes according to a sine curve onto the object to be inspected 12, the control unit 30 can create a height map of the object to be inspected 12 from the image of the object to be inspected 12 onto which the striped pattern has been projected, using the PMP (Phase Measurement Profilometry) method.

[0014] The first imaging unit 21 includes an image sensor that generates two-dimensional image data of an object, and an optical system (e.g., a lens) for forming an image on the image sensor. The first imaging unit 21 is, for example, a CMOS camera. The maximum field of view of the first imaging unit 21 may be smaller than the area on the inspection table 14 where the object to be inspected is placed. In this case, the first imaging unit 21 images the entire object to be inspected 12 by dividing it into a plurality of partial images. The control unit 30 controls the XY stage 16 so that the first imaging unit 21 moves to the next imaging position each time the first imaging unit 21 captures a partial image. The control unit 30 synthesizes the partial image data output from the first imaging unit 21 to generate an overall image of the object to be inspected 12 (image data of the entire substrate).

[0015] Note that the first imaging unit 21 may be provided with an imaging element that generates one-dimensional image data, such as a line sensor, instead of a two-dimensional imaging element. In this case, by scanning the subject 12 with the first imaging unit 21, the overall image data of the subject 12 can be obtained.

[0016] The illumination unit 22 is configured to project illumination light for imaging by the first imaging unit 21 and the second imaging unit 23 onto the surface of the subject 12. The illumination unit 22 includes one or more light sources that emit light having a wavelength or wavelength range selected from the wavelength range detectable by the imaging elements of the first imaging unit 21 and the second imaging unit 23. The illumination light is not limited to visible light, and ultraviolet light, X-rays, or the like may be used. When a plurality of light sources are provided, each light source is configured to project light of different wavelengths (for example, red, blue, and green) onto the surface of the subject 12 at different light projection angles.

[0017] In the inspection apparatus 10 according to the present embodiment, the illumination unit 22 is a side illumination source that projects illumination light from an oblique direction with respect to the inspection surface of the subject 12. In the present embodiment, the upper light source 22a, the middle light source 22b, and the lower light source 22c are provided. Note that in the inspection apparatus 10 according to the present embodiment, the side illumination sources 22a, 22b, and 22c are each ring illumination sources, surround the optical axis of the first imaging unit 21, and are configured to project illumination light obliquely with respect to the inspection surface of the subject 12. Each of these side illumination sources 22a, 22b, and 22c may be configured by arranging a plurality of light sources in an annular shape. Further, the upper light source 22a, the middle light source 22b, and the lower light source 22c, which are side illumination sources, are each configured to project illumination light at different angles with respect to the inspection surface.

[0018] Further, the second imaging unit 23 is configured to image from an oblique direction with respect to the inspection surface (substrate surface) of the subject 12. Similar to the first imaging unit 21, the second imaging unit 23 is, for example, a CMOS camera.

[0019] In the illustrated embodiment, the second imaging unit 23 is provided between the upper light source 22a and the middle light source 22b. However, the arrangement of the second imaging unit 23 is not limited to this. For example, the second imaging unit 23 may be provided outside the lower light source 22c.

[0020] Further, on the inspection table 14, the inspection object 12 passed from the upstream process to this inspection device 10 is carried into an area (hereinafter referred to as the "imaging area") where imaging is performed by the imaging unit 20. After imaging, it is moved to an area (hereinafter referred to as the "inspection and tabulation area") where inspection and tabulation are performed, and a transport unit 40 is provided to carry out the inspected object 12 for which tabulation has been completed and pass it to the next process. Note that since the inspected object 12 moved to the inspection and tabulation area is in a state of waiting for the inspection and tabulation processes to be completed, the inspection and tabulation area may be referred to as a waiting area. The transport unit 40 is also provided with a clamp mechanism for fixing the inspection object 12 when imaging is performed by the imaging unit 20 in the imaging area. The operation of the transport unit 40 is controlled by the control unit 30. A detailed description of the transport unit 40 will be given later.

[0021] The control unit 30 shown in FIG. 1 comprehensively controls the entire device. As hardware, it is realized by a CPU of an arbitrary computer, a coprocessor such as a GPU (Graphics Processing Unit) or an FPU (Floating-point Processing Unit / Floating-Point Unit), a memory, and other LSIs. As software, it is realized by a program loaded into the memory, etc. Here, functional blocks realized by their cooperation are depicted. Therefore, these functional blocks can be realized in various forms by only hardware, only software, or a combination thereof.

[0022] Figure 1 shows an example of the configuration of the control unit 30. The control unit 30 comprises an inspection control unit 31 and a memory unit 35. The inspection control unit 31 comprises a height measuring unit 32, an inspection data processing unit 33, and an inspection unit 34. The inspection device 10 also includes an input unit 36 ​​for receiving input from a user or other device, and an output unit 37 for outputting information related to the inspection. The input unit 36 ​​and the output unit 37 are each connected to the control unit 30. The input unit 36 ​​includes, for example, input means such as a mouse or keyboard for receiving input from a user, and communication means for communicating with other devices. The output unit 37 includes known output means such as a display or printer.

[0023] The inspection control unit 31 is configured to perform various control processes for inspection based on input from the input unit 36 ​​and inspection-related information stored in the memory 35. The inspection-related information includes two-dimensional image data of the object to be inspected 12, a height map of the object to be inspected 12, and substrate inspection data. Prior to inspection, the inspection data processing unit 33 creates substrate inspection data using the two-dimensional image data and height map of the object to be inspected 12, which are guaranteed to pass all inspection items. The inspection unit 34 performs the inspection based on the created substrate inspection data and the two-dimensional image data and height map of the object to be inspected 12.

[0024] PCB inspection data is inspection data created for each type of PCB. PCB inspection data is, so to speak, a collection of inspection data for each component mounted on that PCB. The inspection data for each component includes the necessary inspection items for that component, an inspection window (an image-based inspection area) for each inspection item, and inspection information associated with this inspection window, including inspection criteria that serve as the basis for determining whether each inspection item is good or bad. One or more inspection windows are set for each inspection item. For example, in an inspection item that determines the quality of soldering of a component, typically the same number of inspection windows as the number of soldering areas of that component are set in an arrangement corresponding to the arrangement of the soldering areas. Furthermore, for inspection items that use image data that has undergone predetermined image processing on the object being inspected (partial image data or full-surface image data), the details of that image processing are also included in the inspection data.

[0025] The inspection data processing unit 33 sets each item of the inspection data according to the board as part of the board inspection data creation process. For example, the inspection data processing unit 33 automatically sets the position and size of each inspection window for each inspection item to match the component layout of the board. The inspection data processing unit 33 may also accept user input for some items of the inspection data. For example, the inspection data processing unit 33 may accept tuning of inspection criteria by the user. The inspection criteria may be set using height information.

[0026] The inspection control unit 31 performs imaging of the object to be inspected 12 as a preprocessing step for creating substrate inspection data. The object to be inspected 12 used is one that has passed all inspection items. As described above, the imaging process is performed by illuminating the object to be inspected 12 with the illumination unit 22, controlling the relative movement of the imaging unit 20 and the inspection table 14, and sequentially capturing partial images of the object to be inspected 12 with the first imaging unit 21 and the second imaging unit 23, and outputting partial image data. Multiple partial images are captured so that the entire object to be inspected 12 is covered. The inspection control unit 31 combines these multiple partial image data to generate full-surface substrate image data, which is an image that includes the entire inspection surface of the object to be inspected 12. The inspection control unit 31 stores the partial image data and the full-surface substrate image data in the memory 35.

[0027] The transport unit 40 provided in the inspection device 10 according to this embodiment will be described below.

[0028] (First embodiment) First, a first embodiment of the transport unit 40 will be described using Figures 2 and 3. As shown in Figure 2, the transport unit 40 consists of a first transport unit 41 and a second transport unit 42 arranged in series from the entrance to the exit of the inspection device 10. Here, the first transport unit 41 and the second transport unit 42 can employ a system combining pulleys and belts (belt conveyor system) or a system consisting of pulleys. For example, if the first transport unit 41 and the second transport unit 42 are belt conveyor type transport devices, the first transport unit 41 consists of a first belt conveyor 41a that supports both ends of the object to be inspected 12 in the Y direction from below and moves the object to be inspected 12, which is placed on the upper surface of the belt, from the entrance to the imaging area, and a first drive unit 41b that drives this first belt conveyor 41a. Furthermore, the second transport unit 42 consists of a second belt conveyor 42a that supports both ends of the object to be inspected 12 in the Y direction from below, moves the object to be inspected 12 placed on the upper surface of the belt to the inspection and tallying area, and then moves it to the outside from the discharge port, and a second drive unit 42b that drives this second belt conveyor 42a. The first drive unit 41b and the second drive unit 42b are configured to operate independently of each other by command signals from the control unit 30.

[0029] Furthermore, the transport unit 40 is provided with a clamping mechanism in the imaging area, which consists of a fixed part 44 and a movable part 45. In the configuration shown in Figure 2, the fixed part 44 grips at least two points on each of the Y-directions of the object to be inspected 12 located in the imaging area, and the movable part 45 lifts the object to be inspected 12 from below and fixes it by clamping it together with the fixed part 44. Note that the clamping mechanism shown here is just one example, and instead of the movable part 45, the first transport unit 41 may be moved upward to clamp the object to be inspected 12 together with the fixed part 44. Alternatively, the fixed part may be provided below the object to be inspected 12, and the movable part positioned above the object to be inspected 12 may be moved downward to clamp the object to be inspected 12 together with the fixed part. Alternatively, instead of clamping and fixing the object to be inspected 12 between the fixed part 44 and the movable part 45, the object to be inspected 12 may be fixed by suction.

[0030] Next, using Figure 3, the inspection process of the object to be inspected 12 by the inspection device 10 according to the first embodiment will be explained.

[0031] -When there is one transport unit- First, using Figure 3(a), we will explain the case where the transport section 40 is composed of a single transport unit. As described above, in the inspection device 10 according to this embodiment, the transport section 40 is composed of two transport units (a first transport unit 41 and a second transport unit 42), but since its operation is controlled by command signals from the control unit 30, these two transport units 41 and 42 can be operated as a single unit, making the whole a single transport unit.

[0032] When the object to be inspected 12 is passed from the entrance to the inspection device 10, the control unit 30 operates the first transport unit 41 and the second transport unit 42 to transport the object to be inspected 12 into the imaging area within the inspection device 10, and fixes the object to be inspected 12 with the fixing part 44 and the movable part 45 (step S101). Here, the imaging area is the range in which at least a part of the object to be inspected 12 can be imaged by moving the imaging unit 20 with the XY stage 16. If the field of view (FOV) of the first imaging part 21 and the second imaging part 23 of the imaging unit 20 is smaller than the object to be inspected 12, the entire image of the object to be inspected 12 (entire substrate image data) can be obtained by capturing multiple partial images of the object to be inspected 12 in this imaging area while moving the imaging unit 20 with the XY stage 16 and combining the obtained partial image data.

[0033] Once the object under inspection 12 is fixed in the imaging area by the fixed part 44 and the movable part 45, the control unit 30 moves the imaging unit 20 using the XY stage 16 to acquire partial image data of the object under inspection 12 and stores it in the memory 35 (step S102). The control unit 30 moves the imaging unit 20 and repeats the imaging process until partial image data covering the entire object under inspection 12 is acquired. In this way, when acquiring image data of the entire object under inspection 12 (image data of the entire substrate) as multiple partial image data, inspection can be performed sequentially using the acquired partial image data. Therefore, the control unit 30 reads the acquired partial image data from the memory 35 and performs inspection processing using the read partial image data in parallel with the imaging process described above (step S103).

[0034] When the control unit 30 determines that it has acquired all partial image data of the object under inspection 12, it releases the object under inspection 12 from the fixed part 44 and the movable part 45, and drives the first transport unit 41 and the second transport unit 42 to move the object under inspection 12 to the inspection aggregation area (step S104). On the other hand, if a defect is found as a result of the inspection, a visual inspection may be performed. When this visual inspection is performed, the object under inspection 12, after the imaging process is completed, is not immediately transported to the next process but needs to wait. Therefore, the object under inspection 12, after the imaging process is completed, is made to wait in the inspection aggregation area (step S105). If a visual inspection is not performed and preparations for the next subsequent process are complete, the object is transported without waiting. Also, when the inspection process is completed, the control unit 30 performs aggregation processing to output the results (step S106). The aggregated results are output to the output unit 37, memory 35, or an external storage device (not shown). Furthermore, as described above, the partial image data stored in memory 35 is used to generate full-surface image data of the substrate, which is then output to the output unit 37, memory 35, or an external storage device. When the aggregation process is completed and it is determined that there are no abnormalities in the inspection results, the control unit 30 operates the first transport unit 41 and the second transport unit 42 to transport the object under inspection 12 to the next process (step S107). In addition, the aggregation process may output both the inspection results and the full-surface image data of the object under inspection 12. Therefore, in order to execute the imaging process and the inspection process in parallel, the memory 35 needs to have enough capacity to store at least all of the partial image data of the object under inspection 12.

[0035] Furthermore, when the inspected object 12 is transported to the next process, the control unit 30 transports the next inspected object 12 to the imaging area using the first and second transport units 41 and 42 (step S111), performs imaging processing (step S112), and executes inspection processing (step S113). Once the imaging processing is complete, the first and second transport units 41 and 42 move the inspected object 12 to the inspection aggregation area (step S114), and the inspected object 12 is put into standby mode (step S115). Once the inspection processing is complete, aggregation processing is performed (step S116), and if it is determined that there are no abnormalities in post-inspection processing such as visual inspection, the inspected object 12 is transported to the next process by the first and second transport units 41 and 42 (step S117). The control unit 30 repeats the same process for subsequent inspected objects 12.

[0036] In this case, when the transport unit 40 has only one transport unit (in this embodiment, when two transport units are operated together), the next object to be inspected 12 cannot be brought in until the object currently being inspected 12 has been moved to the next process. Therefore, as shown in Figure 3(a), the time required to inspect one object to be inspected (takt time) is T1, from the start of loading to the end of loading.

[0037] -When there are two transport units- Next, using Figure 3(b), we will explain the case where the transport unit 40 is composed of two transport units 41 and 42 that operate independently and are arranged in series. Note that the inspection process is the same as when there is one transport unit.

[0038] When the object to be inspected 12 is passed from the entrance to the inspection device 10, the control unit 30 activates the first transport unit 41 to transport the object to be inspected 12 into the imaging area within the inspection device 10, and fixes the object to be inspected 12 with the fixing part 44 and the movable part 45 (step S201). Once the object to be inspected 12 is fixed in the imaging area, the control unit 30 moves the imaging unit 20 with the XY stage 16 to acquire partial image data of the object to be inspected 12 and stores it in the memory 35 (step S202). The control unit 30 repeats the imaging process until the entire partial image data of the object to be inspected 12 is acquired. The control unit 30 also reads the acquired partial image data from the memory 35 and performs inspection processing using the read partial image data in parallel with the imaging process described above (step S203). Furthermore, when the control unit 30 determines that it has acquired all partial image data of the object under inspection 12, it releases the object under inspection 12 from the fixing part 44 and the movable part 45, activates the first transport unit 41 and the second transport unit 42 to move the object under inspection 12 to the inspection aggregation area (step S204), and puts the object under inspection 12 into a standby state (step S205). Also, when the inspection process is completed, the control unit 30 performs aggregation processing to output the results (step S206). The aggregated results are output to the output unit 37, memory 35, or an external storage device. Then, when the control unit 30 determines from the aggregation processing that there is no abnormality in the object under inspection 12, it activates the second transport unit 42 to transport the object under inspection 12 to the next process (step S207).

[0039] On the other hand, once the imaging process for the currently inspected object 12 is completed, the object 12 is moved to the inspection and tallying area and is waiting. At this time, when the object 12 is waiting in the inspection and tallying area, the first transport unit 41 is not in use. Therefore, the control unit 30 activates the first transport unit 41 to transport the next object 12 to the imaging area before the inspection process for the currently inspected object 12 is completed (step S211), and when the inspection process for the currently inspected object 12 is completed, it performs the imaging process for the next object 12 (step S212), and performs the inspection process in parallel with this imaging process (step S213). If the object 12 is moved to the inspection and tallying area immediately after imaging, imaging of the next object 12 can be started without waiting for the inspection process of the previous object 12 to be completed. Furthermore, when the imaging process for the next object to be inspected 12 is completed, the control unit 30 activates the first transport unit 41 and the second transport unit 42, provided that the previous object to be inspected 12 has been transported, to move the next object to be inspected 12 to the inspection and aggregation area (step S214), and puts this object to be inspected 12 into a standby state (step S215). Also, when the inspection process is completed, the control unit 30 performs aggregation processing (step S216), and if the aggregation processing determines that there is no abnormality in the object to be inspected 12, it activates the second transport unit 42 to transport the object to be inspected 12 to the next process (step S217).

[0040] In this case, where the transport unit 40 has two transport units, the inspection process can be started when the imaging process for the previous object to be inspected 12 is completed, and the previous object to be inspected 12 can be moved from the imaging area to the inspection aggregation area in parallel with the inspection process. Furthermore, while the inspection process for the previous object to be inspected 12 is being executed, the next object to be inspected 12 can be brought in in parallel, and while the imaging process for the next object to be inspected 12 is being executed, the previous object to be inspected 12 can be removed. As shown in Figure 3(b), the time required from the start of bringing in the previous object to be inspected 12 to the start of bringing in the next object to be inspected 12 is T2. This time T2 can be made shorter than the time required to inspect one object to be inspected 12 (cycle time) T1 when there is one transport unit. Furthermore, as is clear from Figure 3(b), the aggregation processing of the previous object to be inspected 12 and the imaging processing of the next object to be inspected 12 can be executed in parallel. Therefore, twice the time T2, which is the time required to inspect two objects to be inspected 12, is shorter than twice the time T1, which is the time required to inspect two objects to be inspected 12 when there is only one transport unit, thus shortening the overall cycle time. In such a configuration, when the inspection processing of the next object to be inspected 12 and the aggregation processing of the previous object to be inspected 12 are performed simultaneously, it is desirable that the memory 35 has a capacity to store partial image data that covers the entirety of both objects to be inspected 12.

[0041] -When inspecting objects 12 of different lengths- When inspecting objects 12 with different lengths in the X direction, the control unit 30 can be configured to operate the transport unit 40 as two transport units (hereinafter referred to as "2-buffer mode") for objects 12 that fit within the inspection and tallying area (when the X-direction length La of the object 12 (length in the direction in which the object 12 is transported) is shorter than the length L2 of the inspection and tallying area), and to operate the transport unit 40 as one transport unit (hereinafter referred to as "standard mode") for objects 12 that do not fit within the inspection and tallying area (when the X-direction length La of the object 12 is longer than the length L2 of the inspection and tallying area). Note that the X-direction length L1 of the imaging area must be greater than or equal to the length of the longest object 12 among those to be inspected. Since the aforementioned substrate inspection data also includes the length of the object to be inspected 12 (length La in the X direction), the control unit 30 can determine the length of the object to be inspected 12 from the substrate inspection data of the object to be inspected and decide whether to operate the transport unit 40 in standard mode or in 2-buffer mode. As a result, even if objects to be inspected 12 of different lengths are mixed, the control unit 30 can determine the operating mode of the transport unit 40, thereby optimizing the time (cycle time) required for each object to be inspected 12, and consequently improving the throughput of the inspection device 10.

[0042] -Modification of the first embodiment- As described above, if a defect is found in the object under inspection 12 as a result of the inspection and aggregation, a visual inspection may be performed. After the imaging process is completed, the object under inspection 12 is transported to the transport unit. 40 The device is then moved to the inspection and tallying area. Therefore, a separate imaging unit from the imaging unit 20 described above may be provided in the inspection and tallying area of ​​the inspection device 10, and the control unit 30 may be configured to perform visual inspection using this imaging unit.

[0043] Furthermore, in the example described above, the imaging unit 20 was placed on the entrance side to serve as the imaging area, and the exit side was designated as the inspection and aggregation area where the objects to be inspected 12 wait. However, the entrance side (first transport unit 41 side) may be designated as the waiting area where the objects to be inspected 12 wait, and the imaging unit 20 may be placed on the exit side (second transport unit 42 side) to serve as the imaging area where imaging, inspection, and aggregation are performed. In this case, the second transport unit 42 Exit side A third transport unit (not shown) may be placed there, with the second transport unit 42 side designated as the imaging area and the third transport unit side as the inspection and aggregation area. If the time required for inspection by the inspection device 10 is longer than the time required for the upstream processes of the inspection device 10, the cycle time can be shortened by providing a waiting area on the upstream side (inlet side) of the imaging area.

[0044] Alternatively, a third transport unit (not shown) may be placed on the entrance side of the first transport unit 41, with the first transport unit 41 side serving as the imaging area, the second transport unit side as the inspection and aggregation area, and the third transport unit side as a reversing machine for inverting the object to be inspected 12.

[0045] (Second embodiment) A second embodiment of the transport unit 40 will be described with reference to Figure 4. Similar to the first embodiment, the transport unit 40 of this second embodiment is configured to have two transport units (first transport unit 41 and second transport unit 42) arranged in series from the inlet side to the outlet side. In addition, the first transport unit 41 has a fixed part 44a and a movable part 45a A clamping mechanism consisting of a fixed part 44b and a movable part 45b is provided for the second transport unit 42.

[0046] In this second embodiment, the imaging area is set to span across the first transport unit 41 and the second transport unit 42. The imaging unit 20 is also configured to move from the first transport unit 41 to the second transport unit 42 via the XY stage 16. Therefore, in this second embodiment, the operation of the first and second transport units 41 and 42, as well as the fixing of the object to be inspected 12 by the fixed part 44 and movable part 45, can be switched and controlled by the control unit 30 depending on the length of the object to be inspected 12, the time required for imaging, inspection, or aggregation processing, or the status of the preceding or succeeding processes of the inspection device 10. The control of the transport unit 40 by the control unit 30 will be explained below with reference to Figure 5. In the following explanation, the lengths of the first transport unit 41 and the second transport unit 42 in the X direction will be assumed to be the same, but they do not need to be the same length as described in the first embodiment. The processing performed on one object to be inspected 12 is the same as described in the first embodiment. Furthermore, in Figure 5, the first transport unit 41 and the second transport unit 42 are shown in a simplified form.

[0047] First, if the length of the object to be inspected 12 in the X direction is longer than the length of the effective area in the X direction of the first transport unit 41 or the second transport unit 42, the control unit 30 operates the first transport unit 41 and the second transport unit 42 in standard mode. In this case, as shown in Figure 5(a), the object to be inspected 12 is transported to the center of the imaging area and fixed by the fixed parts 44a, 44b and the movable parts 45a, 45b.

[0048] On the other hand, if the length of the object to be inspected 12 in the X direction is less than or equal to the length of the first transport unit 41 and the second transport unit 42 in the X direction, the control unit 30 operates the first transport unit 41 and the second transport unit 42 in 2-buffer mode. In this case, as shown in Figure 5(b), the first transport unit 41 side may be used as the imaging area and the second transport unit 42 side as the standby area (inspection and aggregation area), or as shown in Figure 5(c), the first transport unit 41 side may be used as the standby area and the second transport unit 42 side as the imaging area (inspection and aggregation are also performed in this area). When the first transport unit 41 side is used as the imaging area, Control unit 30 The object to be inspected 12 is fixed by the fixed part 44a and movable part 45a located on the first transport unit 41 side. Also, when the second transport unit 42 side is used as the imaging area, Control unit 30 The object to be inspected 12 is fixed by the fixed part 44b and the movable part 45b located on the second transport unit 42 side.

[0049] As described in the first embodiment, if the inspection and aggregation process takes longer than the imaging process of the object to be inspected 12, the cycle time for inspecting the object to be inspected 12 can be shortened by making the first transport unit 41 side the imaging area. On the other hand, if it is desired to improve the productivity of the process upstream of this inspection device 10, the first transport unit 41 side can be made the waiting area. Second transport unit 42 By making the side the imaging area, the cycle time can be shortened. The control unit 30 can switch between standard mode and 2-buffer mode based on the length of the object to be inspected 12 obtained from the substrate inspection data and the time required for each process. In 2-buffer mode, it can select whether the imaging area is on the side of the first transport unit 41 or the side of the second transport unit 42. This optimizes the cycle time for inspection of each object to be inspected 12, and as a result, the throughput of the inspection device 10 can be improved.

[0050] (Third embodiment) The transport unit 40 according to the first and second embodiments described above is also effective in a so-called dual-lane inspection device 10, where two transport units 40a and 40b are provided side by side, as shown in Figure 6. That is, each of the two transport units 40a and 40b has two lanes consisting of a first transport unit 41a, 41b and a second transport unit 42a, 42b. In this third embodiment, one imaging unit 20 may be provided in common for both lanes, but as shown in Figure 6, a better effect can be obtained when the transport unit 40 is operated in two-buffer mode by providing an imaging unit 20 in each lane. Specifically, by providing an imaging unit 20 in each lane, loading and imaging processing and inspection, aggregation and loading processing can be performed in each lane without generating waiting time for imaging by the imaging unit 20, the cycle time for inspecting each object 12 can be optimized, and the overall throughput of the inspection device 10 can be improved. [Explanation of Symbols]

[0051] 10 Inspection equipment 20. Imaging Unit (Imaging Section) 30 Control Unit (Control Section) 35 memory 40 Conveying section 41. First transport unit 42 Second transport unit

Claims

1. An imaging unit that acquires image data of the object to be examined, A transport unit for moving the object to be inspected, It has a control unit that controls the operation of the imaging unit and the transport unit, The transport unit has at least two transport units connected in series in the direction of moving the object to be inspected. The operation of each of the transport units can be individually controlled by the control unit. Of the transport units, at least one transport unit is a first transport unit positioned in an imaging area where image data can be acquired by the imaging unit. Of the remaining transport units, at least one transport unit is a second transport unit positioned in a waiting area in front of or behind the direction in which the imaging area is moved. The control unit, The length of the object to be inspected in the direction of movement and the length of the transport unit in the direction of movement are compared, If the length of the object to be inspected is longer than the length of any of the transport units, the operation of all the transport units is controlled as if they were a single transport unit. If the length of the object to be inspected is less than or equal to the length of any of the transport units, the operation of the transport units is controlled individually. When the transport units are being controlled individually, While the object to be inspected, which has been moved to the imaging area by the first transport unit, is being imaged by the imaging unit, the second transport unit transports another object to be inspected into or out of the waiting area. Inspection device.

2. When the waiting area is located behind the imaging area, the waiting area has an imaging unit for visual inspection. When the object to be inspected is moved to the waiting area, the control unit acquires image data of the object to be inspected using the imaging unit for visual inspection. The inspection apparatus according to claim 1.

3. When the waiting area is in front of the imaging area, a reversing device is provided in the waiting area. The inspection apparatus according to claim 1 or 2.

4. The control unit has memory with a capacity to store an overall image of at least one of the objects being inspected. The inspection apparatus according to claim 1 or 2.

Images