Hydrogen sensor

Abstract

A hydrogen sensor (100) comprises: a planar first electrode (103); a second electrode (106) that is planar, that is provided so as to oppose the first electrode (103), and that has an exposed section (106e) exposed to a gas including hydrogen; a metal oxide layer (104) that is sandwiched between the two opposing surfaces of the first electrode (103) and the second electrode (106) and that has a resistance value that changes as a result of the exposed section (106e) coming into contact with the gas; a first terminal (111), a second terminal (112), and a heat dissipation unit (130) that are provided at a distance from each other; one or more first vias (121) that are electrically connected to the first terminal (111) and the second electrode (106), and that are provided above the second electrode (106); one or more second vias (122) that are electrically connected to the second terminal (112) and the second electrode (106) and that are provided above the second electrode (106); and one or more third vias (123) that are in contact with the heat dissipation unit (130) and that are provided above the second electrode (106).

Claims

1. A planar first electrode, A planar second electrode is provided opposite the first electrode and has an exposed portion that is exposed to a gas containing hydrogen, A metal oxide layer sandwiched between two opposing surfaces of the first electrode and the second electrode, the exposed portion of which changes in resistance when in contact with the gas, A first terminal, a second terminal, and a heat dissipation section are provided, separated from each other. One or more first vias are electrically connected to the first terminal and the second electrode and are provided above the second electrode, One or more second vias are electrically connected to the second terminal and the second electrode and are provided above the second electrode, The system comprises one or more third vias that are in contact with the heat dissipation portion and are provided above the second electrode. Hydrogen sensor.

2. The heat dissipation section dissipates heat from the exposed portion, the one or more first vias, and the one or more second vias caused by the application of voltage to the first terminal or the second terminal. The hydrogen sensor according to claim 1.

3. The exposed portion is provided on the path of the current flowing from the first terminal to the second terminal via one or more first vias, the second electrode, and one or more second vias. The hydrogen sensor according to claim 1.

4. The one or more third vias are provided on the path of the current flowing from the first terminal to the second terminal, via the one or more first vias, the second electrode, and the one or more second vias. The hydrogen sensor according to claim 1.

5. When a voltage is applied between the first and second terminals, the exposed portion comes into contact with the gas, causing the resistance between the first and second terminals to change. The hydrogen sensor according to claim 1.

6. The system comprises multiple heat dissipation sections, In a plan view of the first electrode, A portion of the aforementioned heat dissipation section is provided between the first terminal and the exposed section. Another portion of the plurality of heat dissipation parts is provided between the second terminal and the exposed portion. The hydrogen sensor according to claim 1.

7. A planar first electrode, A planar second electrode is provided opposite the first electrode and has an exposed portion that is exposed to a gas containing hydrogen, A metal oxide layer sandwiched between two opposing surfaces of the first electrode and the second electrode, the exposed portion of which changes in resistance when in contact with the gas, The first terminal, the third terminal, and the heat dissipation section are provided at a distance from each other. One or more first vias are electrically connected to the first terminal and the second electrode and are provided above the second electrode, One or more fourth vias are electrically connected to the third terminal and the first electrode and are provided below the first electrode, The system comprises one or more third vias that are in contact with the heat dissipation portion and are provided above the second electrode. Hydrogen sensor.

8. The heat dissipation section dissipates heat from the exposed portion, the one or more first vias, and the one or more fourth vias caused by the application of voltage to the first terminal or the third terminal. The hydrogen sensor according to claim 7.

9. The exposed portion is provided on the path of the current flowing from the first terminal to the third terminal via one or more first vias, the second electrode, the metal oxide layer, the first electrode, and one or more fourth vias. The hydrogen sensor according to claim 7.

10. The one or more third vias are provided on the path of the current flowing from the first terminal to the third terminal via the one or more first vias, the second electrode, the metal oxide layer, the first electrode, and the one or more fourth vias. The hydrogen sensor according to claim 7.

11. When a voltage is applied between the first and third terminals, the exposed portion comes into contact with the gas, causing a change in the resistance between the first and second electrodes. The hydrogen sensor according to claim 7.

12. In a plan view of the first electrode, the one or more fourth vias and the exposed portion overlap. The hydrogen sensor according to claim 7.

13. The system comprises multiple heat dissipation sections, In a plan view of the first electrode, A portion of the aforementioned heat dissipation section is provided between the first terminal and the exposed section. Another portion of the plurality of heat dissipation parts is provided between the third terminal and the exposed portion. The hydrogen sensor according to claim 7.

14. The metal oxide layer has a bulk region and a local region surrounded by the bulk region. The aforementioned local region is more prone to current flow than the aforementioned bulk region. A hydrogen sensor according to any one of claims 1 to 13.

15. The aforementioned metal oxide layer is composed of an oxygen-deficient metal oxide, The aforementioned local region has a higher degree of oxygen deficiency than the aforementioned bulk region. The hydrogen sensor according to claim 14.

16. A planar first electrode, A planar second electrode is provided opposite the first electrode and has an exposed portion that is exposed to a gas containing hydrogen, A metal oxide layer sandwiched between two opposing surfaces of the first electrode and the second electrode, the exposed portion of which changes in resistance when in contact with the gas, A first terminal, a second terminal, a third terminal, and a heat dissipation section are provided, each separated from the others. One or more first vias are electrically connected to the first terminal and the second electrode and are provided above the second electrode, One or more second vias are electrically connected to the second terminal and the second electrode and are provided above the second electrode, One or more third vias are provided in contact with the heat dissipation section and above the second electrode, The device comprises one or more fourth vias electrically connected to the third terminal and the first electrode, and provided below the first electrode. Hydrogen sensor.

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