Scribe head and scribe device

Abstract

To provide a scribe head and a scribe device capable of stabilizing a load applied to a workpiece when scribing.SOLUTION: A scribe head 10 includes: a base member 110; a support member 210 to which a holder holding a cutter wheel is attached at a lower end; a guide part E1 that guides the support member 210 so as to be vertically movable with respect to the base member 110; and a drive part D1 that drives the support member 210 and applies a load to the cutter wheel. A bearing 140 guides a shaft 201 in a vertically movable manner by forming an air gap between the outer surfaces of the shaft 201 due to air pressure. When air pressure is introduced into a receiving hole 162a through a flow path 112, the air gap is formed between a ball 161 and the receiving hole 162a and a downward driving force is applied to the support member 210 via the ball 161 by air pressure from the flow path 112.SELECTED DRAWING: Figure 10

Claims

1. Base member and A support member to which a holder holding the cutter wheel is attached at the lower end, A guide portion that guides the support member so as to be vertically movable relative to the base member, The system includes a drive unit that drives the support member to apply a load to the cutter wheel, The aforementioned guide section is A shaft connected to the support member, The system includes a bearing that guides the shaft so that it can move up and down by forming an air gap between the outer surface of the shaft and the bearing due to air pressure, The aforementioned drive unit is Mobile child and, The receiving hole into which the aforementioned movable element is inserted, The receiving hole is provided with a flow path for introducing air pressure, When air pressure is introduced into the receiving hole via the flow path, an air gap is formed between the moving element and the receiving hole, and a downward driving force is applied to the support member via the moving element by the air pressure from the flow path. A scribe head characterized by the following features.

2. In the scribe head described in claim 1, The shaft is equipped with a plate member installed at the upper end, The aforementioned drive unit is Other mobile units, Another receiving hole into which the other movable element is inserted, The system includes another flow path for introducing air pressure into the other receiving hole, When air pressure is introduced into the other receiving hole via the other flow path, an air gap is formed between the other moving element and the other receiving hole, and an upward driving force is applied to the plate member via the other moving element by the air pressure from the other flow path. A scribe head characterized by the following features.

3. In the scribe head described in claim 2, The aforementioned receiving hole and the other receiving hole have a substantially circular shape in plan view. The aforementioned moving element and the other moving elements have a substantially spherical shape. A scribe head characterized by the following features.

4. In the scribe head described in claim 3, The center of the aforementioned moving element and the center of the other moving element are approximately coincident in a plan view. A scribe head characterized by the following features.

5. In the scribe head described in claim 2, A load cell integrally disposed with respect to the base member, The device comprises a shaft that moves up and down relative to the base member, a support member, and a pressing member integrally disposed with respect to the plate member, The pressing member is positioned above the load cell and facing the load cell. A scribe head characterized by the following features.

6. In the scribe head described in claim 1, The guide section comprises two shafts and two bearings. A scribe head characterized by the following features.

7. In the scribe head described in claim 6, The distance between one shaft and the moving element, and the distance between the other shaft and the moving element, are approximately equal in a plan view. A scribe head characterized by the following features.

8. In the scribe head described in claim 1, The inner surface of the bearing opposite the outer surface of the shaft is made of a porous material. A scribe head characterized by the following features.

9. The scribe head described in claim 2, A pressure application unit that introduces air pressure into the aforementioned receiving hole and the other receiving hole, The system comprises a control unit for controlling the pressure application unit, The control unit executes control to introduce air pressure into either the receiving hole or the other receiving hole, in accordance with the load applied to the cutter wheel. A scribe device characterized by the following features.

10. In the scribe device according to claim 9, The control unit, When applying a load greater than a predetermined load applied to the cutter wheel when no air pressure is introduced to either the aforementioned receiving hole or the other receiving hole, air pressure is introduced only to the aforementioned receiving hole among the aforementioned receiving holes and the other receiving hole. When applying a load less than or equal to the predetermined load to the cutter wheel, air pressure is introduced only to the other receiving hole among the receiving hole and the other receiving hole. A scribe device characterized by the following features.

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