Optical apparatus, exposure apparatus, and exposure method
The optical device uses wedge prisms with a minimized deflection angle and corrective optics to maintain constant astigmatism, enabling simple and high-speed light beam shifts on substrates, addressing the complexity of conventional adjustment mechanisms.
JP7874993B2Active Publication Date: 2026-06-17SCREEN HOLDINGS CO LTD
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- SCREEN HOLDINGS CO LTD
- Filing Date
- 2022-03-24
- Publication Date
- 2026-06-17
AI Technical Summary
Technical Problem
Conventional optical systems for substrate patterning require complex mechanisms to adjust light beam shifts while minimizing astigmatism, necessitating rotational motion of wedge prisms, which complicates the support and adjustment process.
Method used
An optical device using a pair of wedge prisms with a set incident angle to minimize deflection, combined with a corrective optical element to maintain constant astigmatism, allowing shift adjustment through linear motion without changing the correction amount.
Benefits of technology
The system achieves simple and high-speed adjustment of light beam shifts on substrates by maintaining constant astigmatism, reducing the need for rotational mechanisms and simplifying the support structure.
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Abstract
To provide a technique of shifting the course of light which can adjust a shift amount while suppressing an increase of an astigmatic difference despite a simple configuration.SOLUTION: An optical device that shifts the course of input light, and outputs output light along an optical path that is parallel with but not the same as an optical path of input light comprises: a first wedge prism in which an incident angle of input light is set at an angle at which a deflection angle of emitted light becomes the minimum; a second wedge prism which has an apex angle approximately the same as the first wedge prism, and is arranged in an opposite direction to the first wedge prism in a facing manner; a shift amount adjustment mechanism which supports the first wedge prism and the second wedge prism, and changes a distance between the prisms to adjust a shift amount; and a correction optical element which is arranged in an optical path of input light or an optical path of output light, and corrects an astigmatic difference appeared in output light.SELECTED DRAWING: Figure 3
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