Support device

Abstract

To provide an auxiliary device which can automatically replace a cutting blade, which can be attached later to a cutting device that has been already delivered to a user, and in which a cutting edge detection sensor or the like can be cleaned.SOLUTION: An auxiliary device 2 at least includes: cutting blade storage means 4 which stores a plurality of cutting blades; carry-out / in means 6 which carries out / in the cutting blade from the cutting blade storage means 4; Y-axis direction positioning means 8 which positions the carry-out / in means 6 to the action position and the retreat position in the Y-axis direction with respect to the cutting blade storage means 4; Z-axis movement means 10 which moves the carry-out / in means 6 in the Z-axis direction; X-axis movement means 12 which moves the carry-out / in means 6 in the X-axis direction to act on the cutting blade attached to a spindle of the cutting means; and a cleaning mechanism 13.SELECTED DRAWING: Figure 1

Description

Technical Field

[0006] , , ,

[0001] The present invention relates to an auxiliary device connected to a cutting device.

Background Art

[0002] A wafer on which a plurality of devices such as ICs and LSIs are formed on the surface and partitioned by a division planned line is divided into individual device chips by a cutting device, and each of the divided device chips is used in electric devices such as mobile phones and personal computers.

[0003] The cutting device includes a chuck table having a holding surface for holding a wafer, cutting means for fixing a cutting blade for cutting the wafer held on the chuck table with a fixing nut, X-axis feeding means for machining and feeding the chuck table in the X-axis direction, Y-axis feeding means for indexing and feeding the cutting means in the Y-axis direction orthogonal to the X-axis direction, and Z-axis feeding means for cutting and feeding the cutting means in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction. The holding surface is defined in the X-axis direction and the Y-axis direction, and the wafer can be divided into individual device chips with high precision.

[0004] In addition, the present applicant has proposed an automatic exchange device capable of automatically exchanging the cutting blade mounted on the cutting means (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] However, there is a problem in that it is difficult to later install an automatic blade replacement device on cutting equipment that has already been delivered to the user. In addition, cleaning the cutting edge detection sensor and other components that detect the condition of the cutting edge of the cutting blade must be done by the operator, which is an unbearable inconvenience.

[0007] The object of the present invention is to provide an auxiliary device that can automatically replace cutting blades, can be later attached to cutting equipment that has already been delivered to the user, and can also clean cutting edge detection sensors and the like. [Means for solving the problem]

[0008] According to the present invention, the following auxiliary device is provided to solve the above problems. That is, "An auxiliary device comprising a chuck table having a holding surface for holding a workpiece, a cutting means having a cutting blade for cutting the workpiece held on the chuck table mounted on a fixed flange and fixed with a fixing nut, an X-axis feed means for machining feed of the chuck table in the X-axis direction, a Y-axis feed means for indexing feed of the cutting means in the Y-axis direction perpendicular to the X-axis direction, and a Z-axis feed means for cutting feed of the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, wherein the holding surface is connected to a cutting device defined in the X-axis direction and the Y-axis direction, A cutting blade storage means for storing multiple cutting blades; an loading / unloading means for loading and unloading cutting blades from the cutting blade storage means; a Y-axis positioning means for positioning the loading / unloading means in an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means; a Z-axis moving means for moving the loading / unloading means in the Z-axis direction; an X-axis moving means for moving the loading / unloading means in the X-axis direction to act on a cutting blade mounted on the spindle of the cutting means; and a cutting blade stored together with the cutting blade in the cutting blade storage means, which is removed from the cutting blade storage means and mounted on the fixed flange. In that case, while attached to the fixing flange An auxiliary device is provided which includes at least a cleaning mechanism that has a function for cleaning the facing position.

[0009] Preferably, the cleaning mechanism includes a first cleaning unit that cleans a cutting edge detection sensor disposed on the cutting means for detecting the state of the cutting edge of the cutting blade, and the loading / unloading means attaches the first cleaning unit to the fixed flange. ru.

[0010] The cleaning mechanism includes a second cleaning unit disposed adjacent to the chuck table for cleaning a position detection sensor that detects the position of the cutting edge of a cutting blade mounted on the cutting means, and the loading / unloading means may be used to mount the second cleaning unit to the fixed flange. stomach.

[0011] According to the present invention, the machine comprises a chuck table having a holding surface for holding a workpiece, a cutting means having a cutting blade for cutting the workpiece held on the chuck table mounted on a fixed flange and fixed with a fixed nut, an X-axis feed means for feeding the chuck table in the X-axis direction, a Y-axis feed means for indexing the cutting means in the Y-axis direction perpendicular to the X-axis direction, and a Z-axis feed means for cutting the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, wherein the holding surface is defined in the X-axis direction and the Y-axis direction. An auxiliary device connected to a cutting machine, comprising at least: a cutting blade storage means for storing a plurality of cutting blades; an loading / unloading means for loading and unloading cutting blades from the cutting blade storage means; a Y-axis positioning means for positioning the loading / unloading means in an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means; a Z-axis moving means for moving the loading / unloading means in the Z-axis direction; an X-axis moving means for moving the loading / unloading means in the X-axis direction to act on a cutting blade mounted on the spindle of the cutting machine; and a cleaning mechanism. The cleaning mechanism includes a third cleaning unit for cleaning the fixed flange, and the loading / unloading means holds the third cleaning unit and presses it against the fixed flange. Auxiliary devices are provided. It is convenient that the third cleaning unit is stored in the cutting blade storage means.

[0012] According to the present invention, the machine comprises a chuck table having a holding surface for holding a workpiece, a cutting means having a cutting blade for cutting the workpiece held on the chuck table mounted on a fixed flange and fixed with a fixed nut, an X-axis feed means for feeding the chuck table in the X-axis direction, a Y-axis feed means for indexing the cutting means in the Y-axis direction perpendicular to the X-axis direction, and a Z-axis feed means for cutting the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, wherein the holding surface is defined in the X-axis direction and the Y-axis direction. An auxiliary device connected to a cutting machine, comprising at least: a cutting blade storage means for storing a plurality of cutting blades; an loading / unloading means for loading and unloading cutting blades from the cutting blade storage means; a Y-axis positioning means for positioning the loading / unloading means in an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means; a Z-axis moving means for moving the loading / unloading means in the Z-axis direction; an X-axis moving means for moving the loading / unloading means in the X-axis direction to act on a cutting blade mounted on the spindle of the cutting machine; and a cleaning mechanism. The cleaning mechanism includes a fourth cleaning unit that cleans the clamping surface of the mounting flange that clamps the washer blade between the fixing flange, and the loading / unloading means holds the mounting flange and presses it against the fourth cleaning unit while rotating it. Auxiliary devices are provided. The fourth cleaning unit is obtained by storing it in the cutting blade storage means. [Effects of the Invention]

[0013] Auxiliary device of the present invention According to It can be installed later on cutting equipment that has already been delivered to the user, and the cutting edge detection sensor and other components can be cleaned. [Brief explanation of the drawing]

[0014] [Figure 1] A perspective view of an auxiliary device configured according to the present invention. [Figure 2] Figure 1 shows an exploded perspective view of the cutting blade storage mechanism. [Figure 3] A perspective view of the blade support axis shown in Figure 2. [Figure 4] Cross-sectional view of the blade support shaft shown in FIG. 2. [Figure 5] Perspective view of the blade support shaft that supports the washer blade. [Figure 6] Perspective view of the loading / unloading means shown in FIG. 1. [Figure 7] Exploded perspective view of the frame body, lifting table, and base stand shown in FIG. 1. [Figure 8] Exploded perspective view of the frame body shown in FIG. 1. [Figure 9] Perspective view showing the first cleaning unit. [Figure 10] Perspective view showing the second cleaning unit. [Figure 11] Perspective view showing the third cleaning unit. [Figure 12] Perspective view showing the fourth cleaning unit. [Figure 13] Perspective view of the cutting device to which the auxiliary device shown in FIG. 1 is connected. [Figure 14] Perspective view of the chuck table shown in FIG. 13. [Figure 15] Perspective view of the cutting means shown in FIG. 13. <~ [Figure 16] Perspective view of the cutting means with the blade cover shown in FIG. 15 opened. [Figure 17] Exploded perspective view of the cutting means shown in FIG. 13. [Figure 18] Exploded perspective view of the cutting means when the washer blade is installed. [Figure 19] Perspective view showing the cutting edge detection sensor of the cutting means shown in FIG. 13. [Figure 20] Perspective view showing the state in which the auxiliary device shown in FIG. 1 is connected to the cutting device shown in FIG. 13. [Figure 21] Perspective view showing the state in which the cutting blade storage means and the loading / unloading means of the auxiliary device shown in FIG. 1 face each other. [Figure 22] Perspective view showing the state in which the frame body has advanced toward the cutting blade storage means from the state shown in FIG. 21. [Figure 23]Figure 22 is a perspective view showing the state in which the frame retracts and the lifting table rises, compared to the state shown in Figure 22. [Figure 24] Figure 23 is a perspective view showing the state in which the loading / unloading mechanism has advanced toward the cutting device from the state shown in Figure 23. [Figure 25] A schematic diagram showing the cutting edge detection sensor being cleaned by the first cleaning unit shown in Figure 9. [Figure 26] A schematic diagram showing the position detection sensor being cleaned by the second cleaning unit shown in Figure 10. [Figure 27] A schematic diagram showing the cleaning of the fixed flange by the third cleaning unit shown in Figure 11. [Figure 28] A schematic diagram showing the cleaning of the clamping surface of the mounting flange by the fourth cleaning unit shown in Figure 12. [Modes for carrying out the invention]

[0015] Hereinafter, preferred embodiments of the auxiliary device configured according to the present invention will be described with reference to the drawings.

[0016] (auxiliary device 2) Referring to Figure 1, the auxiliary device, collectively denoted by reference numeral 2, comprises at least: a cutting blade storage means 4 for storing multiple cutting blades; an loading / unloading means 6 for loading and unloading cutting blades from the cutting blade storage means 4; a Y-axis positioning means 8 for positioning the loading / unloading means 6 in an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means 4; a Z-axis moving means 10 for moving the loading / unloading means 6 in the Z-axis direction; an X-axis moving means 12 for moving the loading / unloading means 6 in the X-axis direction to act on the cutting blades mounted on the spindle of the cutting means of the cutting device; and a cleaning mechanism 13.

[0017] The X-axis direction is indicated by the arrow X in Figure 1, and the Y-axis direction is indicated by the arrow Y in Figure 1, which is perpendicular to the X-axis direction. The Z-axis direction is indicated by the arrow Z in Figure 1, which is the vertical direction perpendicular to both the X-axis and Y-axis directions. The plane defined by the X-axis and Y-axis directions is essentially horizontal.

[0018] (Cutting blade storage means 4) As shown in Figure 2, the cutting blade storage means 4 includes a drive gear 16 having a rotating shaft 14 extending in the Y-axis direction, a driven gear 20 having a rotating shaft 18 spaced apart from the drive gear 16 in the Z-axis direction and extending in the Y-axis direction, an endless track 22 wrapped around the drive gear 16 and the driven gear 20, and a blade support shaft 24 extending in the Y-axis direction, which is arranged at predetermined intervals on the endless track 22 and inserted into the central opening of the cutting blade to support the cutting blade.

[0019] (Drive gear 16) Referring to Figures 1 and 2, the cutting blade storage means 4 of the illustrated embodiment includes a base plate 26 (see Figure 1), a support wall 28 extending upward from the upper surface of the base plate 26, and a motor 30 fixed to one side of the support wall 28. As shown in Figure 2, the motor 30 is connected to the rotation shaft 14 of the drive gear 16, and the motor 30 rotates the drive gear 16 with the Y-axis direction as its axis.

[0020] (Driven gear 20) As shown in Figure 2, the driven gear 20 is positioned above the drive gear 16, and the rotation shaft 18 of the driven gear 20 is supported by a support wall 28 so as to be rotatable about the Y-axis and vertically movable in the Z-axis direction. The support wall 28 is provided with a lifting mechanism (not shown) for raising and lowering the driven gear 20 in the Z-axis direction. The lifting mechanism may consist of a ball screw connected to the rotation shaft 18 of the driven gear 20 and extending in the Z-axis direction, and a motor for rotating this ball screw.

[0021] (Infinite track 22) The continuous track 22 is composed of numerous interconnected link pieces (not shown in the symbols) and is wrapped around the drive gear 16 and the driven gear 20. The continuous track 22 rotates in accordance with the rotation of the drive gear 16 by the motor 30.

[0022] In the illustrated embodiment of the cutting blade storage means 4, the distance between the drive gear 16 and the driven gear 20 in the Z-axis direction can be adjusted by changing the position of the driven gear 20 in the Z-axis direction using the lifting means. In addition, in the cutting blade storage means 4, the length of the endless track 22 can also be adjusted by appropriately increasing or decreasing the number of link pieces of the endless track 22.

[0023] (Blade support shaft 24) As shown in Figure 2, multiple blade support shafts 24 are arranged on the continuous track 22 at predetermined intervals. Furthermore, as can be understood by referring to Figure 3 in conjunction with Figure 2, each blade support shaft 24 has a cylindrical base 32 connected to the continuous track 22 and a cylindrical shaft portion 34 extending in the Y-axis direction from the end face of the base 32. The diameter of the shaft portion 34 is smaller than the diameter of the base 32.

[0024] (Hub blade 36) Figure 3 also shows a hub blade 36 as a cutting blade stored in the cutting blade storage means 4. The hub blade 36 has an annular base 38 and an annular cutting edge 40 arranged on the outer circumference of the base 38. The base 38 can be formed from an appropriate metal material such as an aluminum alloy. A circular central opening 38a is provided in the center of the base 38. The cutting edge 40 is formed from abrasive grains such as diamond and a binder such as metal or resin to a predetermined thickness (for example, about 10 to 30 μm) and protrudes radially outward from the outer edge of the base 38.

[0025] In the illustrated embodiment, the shaft portion 34 of the blade support shaft 24 has an outer diameter corresponding to the inner diameter of the central opening 38a of the hub blade 36. In the blade support shaft 24, the shaft portion 34 is inserted into the central opening 38a of the hub blade 36, and multiple (for example, five) hub blades 36 are supported by the shaft portion 34.

[0026] In the illustrated embodiment, as can be understood by referring to Figure 2, the hub blade 36 is supported by half of the multiple blade support shafts 24. Also, as shown in Figure 3, multiple ball plungers 42 are mounted at circumferential intervals on the tip side of the shaft portion 34 to prevent the hub blade 36 supported by the shaft portion 34 from flying out.

[0027] As shown in Figure 4, a flow channel 32a is formed inside each base portion 32 of the blade support shaft 24, and multiple flow channels 22a are formed on the endless track 22, communicating with one end of each flow channel 32a. The other end of each flow channel 32a opens at the end face of the base portion 32 radially outward from the shaft portion 34, as shown in Figure 3.

[0028] Furthermore, as shown in Figure 2, the support wall 28 is provided with an air nozzle 44 that protrudes in the Y-axis direction below the drive gear 16, and the air nozzle 44 is connected to a high-pressure air supply means (not shown). In the illustrated embodiment, the blade support shaft 24, which is located at the lowest end of the trajectory of the blade support shaft 24 as the endless track 22 rotates, faces the tip of the air nozzle 44.

[0029] When the hub blade 36 located at the tip of the shaft portion 34 is ejected, high-pressure air is supplied from the air nozzle 44 through the flow path 22a of the continuous track 22 to the flow path 32a of the base 32 of the blade support shaft 24 located at the lowest end, thereby pushing the hub blade 36 remaining on the shaft portion 34 towards the tip of the shaft portion 34. However, the hub blade 36 will not fall from the shaft portion 34 due to the action of the ball plunger 42.

[0030] (Washer blade 45) The cutting blades stored in the cutting blade storage means 4 are not limited to the hub blade 36 described above, but may also be washer blades 45 as shown in Figure 5. The washer blade 45 is composed of annularly formed cutting edges. When the washer blades 45 are stored in the cutting blade storage means 4, the shaft portion 34 of the blade support shaft 24 is formed to have an outer diameter D corresponding to the inner diameter of the central opening 45a of the washer blade 45. The shaft portion 34 is then inserted into the central opening 45a of the washer blade 45, and multiple washer blades 45 (for example, 10) are supported by the shaft portion 34.

[0031] The cutting blade storage means 4 may store only one of the hub blade 36 or the washer blade 45, or it may store both the hub blade 36 and the washer blade 45.

[0032] (Carrying in / out means 6) The loading / unloading means 6 will be described with reference to Figure 6. The loading / unloading means 6 comprises at least a Z rotation axis 46 extending in the Z axis direction, a blade holding part 48 radially connected to the Z rotation axis 46 and holding the cutting blade by suction, and a fixing nut holding part 50 that screws and unscrews a fixing nut onto a male thread formed at the tip of the spindle of the cutting device.

[0033] As shown in Figure 6, the loading / unloading means 6 of the illustrated embodiment further comprises a casing 52, which has a regular hexagonal top plate 54 and six rectangular plate-shaped side walls 56 hanging down from the periphery of the top plate 54. The Z rotation axis 46 protrudes from the upper surface of the top plate 54. A motor (not shown) connected to the Z rotation axis 46 is housed inside the casing 52.

[0034] In the illustrated embodiment, of the six side walls 56 of the casing 52, blade holding portions 48 are attached to four side walls 56, and fixing nut holding portions 50 are attached to two side walls 56, with the two fixing nut holding portions 50 being provided on a pair of opposing side walls 56.

[0035] (Blade holding section 48) The blade holder 48 is rotatably mounted on the casing 52 and is rotated by a motor 57 housed in the casing 52. The blade holder 48 is formed in a cylindrical shape, and its end face 58 is provided with a circular central opening 60 capable of receiving the shaft portion 34 of the blade support shaft 24 and the tip of the spindle of the cutting device, and a plurality of first suction holes 61 arranged at equal intervals in the circumferential direction around the central opening 60.

[0036] Furthermore, an annular projection 62 is provided on the outer circumference of the end face 58. Second suction holes 63 are formed in the annular projection 62, which are arranged at equal intervals in the circumferential direction. The first and second suction holes 61 and 63 are connected to a suction means (not shown).

[0037] Furthermore, the inner diameter of the annular projection 62 is slightly larger than the outer diameter D of the shaft portion 34 that supports the washer blade 45, so that the annular projection 62 can receive the shaft portion 34 that supports the washer blade 45.

[0038] The blade holding portion 48 is positioned so that its end face 58 contacts the base 38 of the hub blade 36 stored in the cutting blade storage means 4, and the suction means generates a suction force in the first suction hole 61 to hold the hub blade 36 in suction.

[0039] Furthermore, when the blade holding unit 48 holds the washer blade 45, it generates a suction force in the second suction hole 63 by the suction means to suction and hold the washer blade 45 stored in the cutting blade storage means 4.

[0040] (Fixed nut holding part 50) Referring to Figure 6, the fixing nut holding section 50 includes a cylindrical housing 64 fixed to the side wall 56 of the casing 52, an annular rotating body 66 rotatably housed inside the housing 64, and a motor 67 that rotates the rotating body 66.

[0041] The rotating body 66 has a central opening 68 that can receive the tip of the spindle of the cutting device. The end face 66a of the rotating body 66 has a plurality of suction holes 70 and a plurality of pins 72 that are alternately spaced apart in the circumferential direction.

[0042] Each suction hole 70 is connected to a suction means (not shown). The pin 72 is positioned to protrude from the end face 66a of the rotating body 66 (as shown in Figure 6) by a spring (not shown) built into the rotating body 66. When pushed inward towards the inside of the rotating body 66, the spring contracts and the pin 72 is housed inside the rotating body 66. The pin 72 is also positioned in accordance with the location of the pin hole formed in the fixing nut.

[0043] In the fixing nut holding section 50, a suction force is generated in each suction hole 70 by a suction means to hold the fixing nut by suction, and with a pin 72 inserted into a pin hole formed in the fixing nut, the motor 67 rotates the rotating body 66, so that the fixing nut for fixing the hub blade 36 or washer blade 45 to the spindle of the cutting device can be screwed into and out of the male thread formed at the tip of the spindle.

[0044] Furthermore, when unscrewing (removing) the fixing nut from the spindle, even if the position of the pin 72 of the fixing nut holding part 50 and the position of the pin hole of the fixing nut are misaligned, if the end face 66a of the rotating body 66 is positioned on the end face of the fixing nut mounted on the spindle, and the pin 72 is housed inside the rotating body 66, and then the rotating body 66 is rotated by the motor 67, the pin 72 will be pushed out by the spring when its position aligns with the position of the pin hole, and the pin 72 will be inserted into the pin hole.

[0045] As described above, the loading / unloading means 6 is arranged inside the frame 74 in the illustrated embodiment, as shown in Figure 1. The frame 74 is supported by the lifting table 76 so as to be movable in the Y-axis direction, and the lifting table 76 is supported by the base frame 78 so as to be movable up and down in the Z-axis direction.

[0046] (Frame 74) Referring to Figure 7 along with Figure 1, the frame 74 includes a rectangular plate-shaped bottom 80, four support columns 82 extending upward from the four corners of the top surface of the bottom 80, and a plate-shaped ceiling portion 84 (see Figure 1) fixed to the upper end of each support column 82. On the lower surface of the bottom 80, a pair of guide members 86, each having a groove 86a extending in the Y-axis direction, are provided at intervals in the X-axis direction.

[0047] (Height-adjustable table 76) The lifting table 76 includes a rectangular top plate 88 and four cylindrical legs 90 extending downward from the four corners of the underside of the top plate 88. A pair of guide rails 92 are provided on the upper surface of the top plate 88, spaced apart in the X-axis direction and extending in the Y-axis direction. The pair of guide rails 92 are slidably fitted into grooves 86a of a pair of guided members 86 of the frame 74.

[0048] (Y-axis positioning means 8) Furthermore, a Y-axis positioning means 8 is provided on the upper surface of the tabletop 88 of the lifting table 76. The Y-axis positioning means 8 includes a ball screw 94 extending in the Y-axis direction between a pair of guide rails 92, and a motor 96 that rotates the ball screw 94. The nut portion (not shown) of the ball screw 94 is fixed to the lower surface of the bottom 80 of the frame 74.

[0049] In the Y-axis positioning means 8, a ball screw 94 converts the rotational motion of the motor 96 into linear motion and transmits it to the frame 74, moving the frame 74 along a pair of guide rails 92 in the Y-axis direction. In this way, the frame 74 on which the loading / unloading means 6 is installed is slidably supported by the guide rails 92 extending in the Y-axis direction, which are installed on the lifting table 76, and is positioned by the Y-axis positioning means 8 in the Y-axis working position and retracted position relative to the cutting blade storage means 4.

[0050] The above-mentioned operating position is a position in which the blade holding portion 48 of the loading / unloading means 6 is close to the cutting blade storage means 4, and the cutting blade supported by the cutting blade storage means 4 can be held by suction from the blade holding portion 48. The above-mentioned retracted position is a position in which the blade holding portion 48 of the loading / unloading means 6 is further away from the cutting blade storage means 4 than the above-mentioned operating position.

[0051] (Base frame 78) As shown in Figure 7, the base frame 78 includes a frame 98 and a rectangular base plate 100 fixed to the top of the frame 98. Four circular holes 102 are formed at the four corners of the base plate 100 into which the legs 90 of the lifting table 76 are slidably inserted. In addition, a female screw 104 is formed in the center of the base plate 100.

[0052] (Z-axis moving means 10) Continuing the explanation with reference to Figure 7, the lifting table 76 and the base frame 78 are connected to a Z-axis moving mechanism 10. The Z-axis moving mechanism 10 includes a ball screw 106 extending in the Z-axis direction, a motor 108 that rotates the ball screw 106, and a connecting plate 110 fixed to the upper end of the motor 108. The ball screw 106 is screwed into a female screw 104 of the base plate 100. The connecting plate 110 is fixed to the underside of the top plate 88 of the lifting table 76 by appropriate connecting means such as bolts (not shown).

[0053] In the Z-axis moving mechanism 10, the rotational motion of the motor 108 is converted into linear motion by a ball screw 106, and the lifting table 76 is raised and lowered relative to the base frame 78, thereby moving the frame 74 on which the loading and unloading mechanism 6 is installed in the Z-axis direction.

[0054] (X-axis moving means 12) Referring to Figure 8, the X-axis moving means 12 includes a bendable arm 112 mounted on the frame 74, and a first motor 114 and a second motor 115 for operating the bendable arm 112. The bendable arm 112 has a first arm piece 118 that is pivotably connected to the lower surface of the ceiling portion 84 of the frame 74 via a spacer 116, and a second arm piece 120 that is pivotably connected to the lower surface of the first arm piece 118.

[0055] Spacer 116 is positioned at one end of the first arm piece 118. The first arm piece 118 is connected to the ceiling portion 84 with the spacer 116 side as the pivot point. Spacer 122 is also provided on the upper surface of the other end of the first arm piece 118. The second arm piece 120 is connected to the first arm piece 118 with the spacer 122 side as the pivot point.

[0056] A circular hole (not shown) is provided at the tip of the second arm piece 120 (the end opposite to the spacer 122). The Z-axis rotation shaft 46 of the loading / unloading mechanism 6 is inserted into this circular hole, and the Z-axis rotation shaft 46 is fixed to the second arm piece 120 in a non-rotatable manner. When the motor of the loading / unloading mechanism 6, which is connected to the Z-axis rotation shaft 46, is driven, the casing 52 of the loading / unloading mechanism 6 rotates relative to the second arm piece 120, and the blade holding portion 48 and the fixing nut holding portion 50 are positioned in any orientation. In this way, the loading / unloading mechanism 6 is connected to the tip of the bent arm 112 via the Z-axis rotation shaft 46 and is also disposed on the frame 74 via the bent arm 112.

[0057] In the X-axis moving mechanism 12, the first motor 114 swings the first arm piece 118 with the spacer 116 side as the pivot point, and the second motor 115 swings the second arm piece 120 with the spacer 122 side as the pivot point, thereby bending or extending the bending arm 112 and moving the loading / unloading mechanism 6 in the X-axis direction.

[0058] (Cleaning mechanism 13) As shown in Figure 2, the cleaning mechanism 13 is stored in the cutting blade storage means 4 and supported by the blade support shaft 24. The cleaning mechanism 13 includes a first cleaning unit 124 that cleans a cutting edge detection sensor disposed on the cutting means for detecting the state of the cutting edge of the cutting blade, a second cleaning unit 126 that is disposed adjacent to the chuck table for cleaning a position detection sensor that detects the position of the cutting edge of the cutting blade mounted on the cutting means, a third cleaning unit 128 that cleans the fixing flange of the cutting means, and a fourth cleaning unit 130 that cleans the clamping surface of the mounting flange that clamps the washer blade 45, which serves as the cutting blade, between the fixing flange and the mounting flange.

[0059] (First cleaning unit 124) Referring to Figure 9, the first cleaning unit 124 has an annular base 132 and an annular cleaning member 134 provided on the outer circumference of the base 132.

[0060] The base 132 can be formed from an appropriate metal material such as an aluminum alloy. The central opening 132a of the base 132 is fitted onto the shaft portion 34 of the blade support shaft 24, and the first cleaning unit 124 is detachably supported on the blade support shaft 24. Furthermore, the outer diameter of the base 132 is slightly smaller than the inner diameter of the annular projection 62 of the blade holding portion 48, so that the first cleaning unit 124 is held in place by suction from the blade holding portion 48.

[0061] The cleaning member 134 is made of felt or a hard sponge made of synthetic resin. The thickness of the cleaning member 134 is such that it can clean both the light-emitting part and the light-receiving part of the cutting blade detection sensor.

[0062] (Second cleaning unit 126) As shown in Figure 10, the second cleaning unit 126, like the first cleaning unit 124, has an annular base 136 and an annular cleaning member 138 provided on the outer circumference of the base 136.

[0063] The base 136 can be formed from an appropriate metal material such as an aluminum alloy. The central opening 136a of the base 136 is fitted onto the shaft portion 34 of the blade support shaft 24, and the second cleaning unit 126 is detachably supported on the blade support shaft 24. Furthermore, the outer diameter of the base 136 is slightly smaller than the inner diameter of the annular projection 62 of the blade holding portion 48, so that the second cleaning unit 126 can be held by suction from the blade holding portion 48.

[0064] The cleaning member 138 is made of felt or a hard sponge made of synthetic resin. The thickness of the cleaning member 138 is such that it can clean both the light-emitting and light-receiving parts of the position detection sensor.

[0065] (Third cleaning unit 128) As shown in Figure 11, the third cleaning unit 128 has an annular base 140 and an annular cleaning member 142 provided on the back surface of the base 140. An opening 144 is formed in the center of the third cleaning unit 128, passing through the base 140 and the cleaning member 142. The opening 144 is fitted onto the shaft portion 34 of the blade support shaft 24, and the third cleaning unit 128 is detachably supported on the blade support shaft 24 with the cleaning member 142 facing the base portion 32.

[0066] The base 140 can be formed from an appropriate metal material such as an aluminum alloy. An annular projection 140a is formed on the surface of the base 140. The outer diameter of the annular projection 140a is slightly smaller than the inner diameter of the annular projection 62 of the blade holding portion 48, so that the third cleaning unit 128 is held in place by suction from the blade holding portion 48.

[0067] The material of the cleaning member 142 may be felt or a relatively hard sponge made of synthetic resin. The cleaning member 142 is also formed to a size that allows it to clean the fixing flange of the cutting means.

[0068] (Fourth cleaning unit 130) Referring to Figure 12, the fourth cleaning unit 130 has an annular base 146 and an annular cleaning member 148 provided on the surface of the base 146. An opening 150 is formed in the center of the fourth cleaning unit 130, passing through the base 146 and the cleaning member 148. The opening 150 is fitted onto the shaft portion 34 of the blade support shaft 24, and the fourth cleaning unit 130 is fixed to the blade support shaft 24 so as not to rotate, with the base 146 facing the base portion 32.

[0069] The base 146 can be formed from an appropriate metal material such as an aluminum alloy. The material of the cleaning member 148 may be felt or a relatively hard sponge made of synthetic resin. The cleaning member 148 is also formed to a size that allows it to clean the clamping surface of the mounting flange that clamps the washer blade 45, which serves as a cutting blade, between the fixing flange and the cleaning member 148.

[0070] Next, with reference to Figures 13 to 19, the cutting device 170 to which the auxiliary device 2 described above is connected will be explained.

[0071] (Cutting device 170) As shown in Figure 13, the cutting apparatus 170 comprises a chuck table 172 having a holding surface for holding a workpiece, a cutting means 174 having a cutting blade for cutting the workpiece held on the chuck table 172 attached with a fixing nut, an X-axis feed means 176 for machining feed of the chuck table 172 in the X-axis direction, a Y-axis feed means 178 for indexing feed of the cutting means 174 in the Y-axis direction perpendicular to the X-axis direction, and a Z-axis feed means 180 for cutting feed of the cutting means 174 in the Z-axis direction perpendicular to the X-axis direction and the Y-axis direction.

[0072] (Chuck table 172) Referring to Figures 13 and 14, the cutting device 170 comprises an X-axis movable plate 184 mounted on the upper surface of a base 182 (see Figure 13) so as to be movable in the X-axis direction, a support column 186 fixed to the upper surface of the X-axis movable plate 184, and a cover plate 188 fixed to the upper end of the support column 186. A circular opening 188a is formed in the cover plate 188. The chuck table 172 is rotatably mounted on the upper end of the support column 186 and extends upward through the circular opening 188a of the cover plate 188. The chuck table 172 is rotated about the Z-axis direction by a motor (not shown) built into the support column 186.

[0073] As shown in Figure 14, a porous, circular suction chuck 190 connected to a suction means (not shown) is positioned at the upper end of the chuck table 172. In the chuck table 172, the suction means generates a suction force on the upper surface of the suction chuck 190, thereby suctioning and holding the workpiece placed on the upper surface of the suction chuck 190.

[0074] In this chuck table 172, the upper surface of the suction chuck 190 serves as the holding surface for the workpiece, and the holding surface is positioned on the XY plane defined by the X-axis and Y-axis directions. In addition, multiple clamps 192 are arranged around the periphery of the chuck table 172 at intervals in the circumferential direction.

[0075] Continuing the explanation with reference to Figure 14, a position detection sensor 194 for detecting the position (lower end position) of the cutting edge of the cutting blade mounted on the cutting means 174 is disposed adjacent to the chuck table 172 on the upper surface of the cover plate 188. In the illustrated embodiment, a pair of position detection sensors 194 are provided at intervals in the Y-axis direction. The position detection sensor 194 has a substrate 195 fixed to the upper surface of the cover plate 188, and a light-emitting part 196 and a light-receiving part 197 arranged at intervals from each other on the upper surface of the substrate 195.

[0076] When detecting the position of the cutting edge of the cutting blade using the position detection sensor 194, the cutting blade of the cutting means 174 is gradually lowered between the light-emitting unit 196 and the light-receiving unit 197 while irradiating light from the light-emitting unit 196 toward the light-receiving unit 197. The position of the cutting edge of the cutting blade is then detected by the position detection sensor 194 when the light from the light-emitting unit 196 is blocked by the cutting edge of the cutting blade and the amount of light received by the light-receiving unit 197 decreases to a predetermined value.

[0077] (X-axis feed mechanism 176) As shown in Figure 14, the X-axis feed mechanism 176 includes a ball screw 198 connected to the X-axis movable plate 184 and extending in the X-axis direction, and a motor 200 that rotates the ball screw 198. The X-axis feed mechanism 176 converts the rotational motion of the motor 200 into linear motion using the ball screw 198 and transmits it to the X-axis movable plate 184, moving the X-axis movable plate 184 along the guide rail 182a of the base 182, and simultaneously feeding the chuck table 172 in the X-axis direction for machining.

[0078] As shown in Figure 13, the cutting apparatus 170 includes a gate-shaped frame 202 positioned across the chuck table 172. The frame 202 has a pair of support columns 204 that extend upward from the upper surface of the base 182 at intervals in the Y-axis direction, and a beam 206 that spans between the upper ends of the pair of support columns 204 and extends in the Y-axis direction.

[0079] (Cutting means 174) The cutting means 174 are provided in pairs on one side of the beam 206 (the rear side in Figure 13) at intervals in the Y-axis direction. In the illustrated embodiment of the cutting device 170, a pair of cutting means 174 are provided so that the cutting blades face each other, allowing the workpiece held in the chuck table 172 to be cut simultaneously by the pair of cutting blades. Note that there may be only one cutting means 174.

[0080] As shown in Figure 15, each cutting means 174 includes a rectangular Y-axis movable member 208 supported on one side of the beam 206 so as to be movable in the Y-axis direction, an L-shaped Z-axis movable member 210 supported on the Y-axis movable member 208 so as to be able to move up and down in the Z-axis direction, and a spindle housing 212 fixed to the lower end of the Z-axis movable member 210.

[0081] A pair of guide grooves 208a extending in the Y-axis direction are formed on one side of the Y-axis movable member 208 (the side facing forward in Figure 15), spaced apart in the Z-axis direction. The guide grooves 208a are slidably connected to a pair of guide rails (not shown) extending in the Y-axis direction, spaced apart vertically on one side of the beam 206.

[0082] (Y-axis feed mechanism 178) The Y-axis feed mechanism 178 includes a ball screw 214 extending in the Y-axis direction on one side of the beam 206, and a motor 216 that rotates the ball screw 214. The ball screw 214 is connected to a Y-axis movable member 208. The Y-axis feed mechanism 178 converts the rotational motion of the motor 216 into linear motion using the ball screw 214 and transmits it to the Y-axis movable member 208, indexing and feeding the Y-axis movable member 208 in the Y-axis direction along a guide rail attached to one side of the beam 206.

[0083] On the other side of the Y-axis movable member 208 (the side facing the back in Figure 15), a pair of guide rails (not shown) are formed, spaced apart in the Y-axis direction and extending in the Z-axis direction. The Z-axis movable member 210 has a pair of guided grooves (not shown) that are slidably connected to the pair of guide rails of the Y-axis movable member 208.

[0084] (Z-axis feed mechanism 180) The Z-axis feed mechanism 180 includes a ball screw (not shown) connected to the Z-axis movable member 210 and extending in the Z-axis direction, and a motor 218 that rotates this ball screw. The Z-axis feed mechanism 180 converts the rotational motion of the motor 218 into linear motion using the ball screw and transmits it to the Z-axis movable member 210, thereby cutting and feeding the Z-axis movable member 210 in the Z-axis direction along the guide rail of the Y-axis movable member 208.

[0085] Referring to Figure 16, the spindle housing 212 supports a cylindrical spindle 220 that is rotatable around the Y-axis, and also houses a motor (not shown) that rotates the spindle 220. A cutting blade for cutting the workpiece is detachably fixed to the tip of the spindle 220 by a fixing nut 222. Figure 16 shows an example in which a hub blade 36 is fixed to the spindle 220 as the cutting blade.

[0086] A blade cover 224 that covers the cutting blade is mounted at the tip of the spindle housing 212. The blade cover 224 has a first cover member 224a fixed to the tip of the spindle housing 212 and a second cover member 224b that is movably mounted to the tip of the first cover member 224a. The second cover member 224b is moved in the X-axis direction by an appropriate actuator (not shown), such as an air cylinder, and is positioned in the open position shown in Figure 16 when the cutting blade is replaced, and in the closed position shown in Figure 15 when cutting is performed.

[0087] As shown in Figure 17, an annular fixing flange 226 is provided on the outer circumferential surface of the tip side of the spindle 220, projecting radially outward. An annular recess 226a is formed on the radially inward portion of the tip surface of the fixing flange 226, and the outer circumferential portion of the tip surface of the fixing flange 226 is an annular receiving portion 226b projecting axially. Furthermore, a male screw 228 is formed on the outer circumferential surface of the spindle 220 further towards the tip than the fixing flange 226.

[0088] When the hub blade 36 is mounted on the spindle 220 as a cutting blade, the central opening 38a of the hub blade 36 fits into the tip of the spindle 220, and the male thread 228 of the spindle 220 and the fixing nut 222 are screwed (fastened) together, so that the hub blade 36 is sandwiched between the receiving portion 226b of the fixing flange 226 and the fixing nut 222, and is detachably fixed to the tip of the spindle 220. In addition, multiple pin holes 222a are formed on the side surface of the fixing nut 222 at equal intervals in the circumferential direction, into which the pin 72 of the fixing nut holding portion 50 of the loading / unloading means 6 is inserted.

[0089] Furthermore, when the washer blade 45 is mounted on the spindle 220 as a cutting blade, as shown in Figure 18, the washer blade 45 is sandwiched between the receiving portion 226b of the fixing flange 226 and the clamping surface 229a of the annular mounting flange 229, and the male thread 228 of the spindle 220 and the fixing nut 222 are screwed (fastened) together, thereby detachably fixing the washer blade 45 to the tip of the spindle 220.

[0090] Furthermore, the clamping surface 229a of the mounting flange 229 is provided with an annular projection 229b having an outer diameter D corresponding to the inner diameter of the central opening 45a of the washer blade 45 (which is the same as the outer diameter D of the shaft portion 34 of the cutting blade storage means 4). When the washer blade 45 is fixed to the spindle 220, the central opening 45a of the washer blade 45 is fitted into the projection 229b.

[0091] As shown in Figure 16, a cutting edge detection sensor 230 for detecting the state of the cutting edge of the cutting blade is provided on the upper part of the first cover member 224a of the blade cover 224. Referring to Figure 19, the cutting edge detection sensor 230 includes a light-emitting unit 232 and a light-receiving unit 234 positioned opposite each other on either side of the cutting blade.

[0092] When the cutting edge of the cutting blade is functioning normally, without wear or chipping, the light from the light-emitting unit 232 is partially blocked by the cutting edge of the cutting blade. On the other hand, when wear or chipping occurs on the cutting edge of the cutting blade, the amount of light received by the light-receiving unit 234 increases compared to the normal state. For this reason, the cutting edge detection sensor 230 is configured to detect the damage state of the cutting edge of the cutting blade based on the amount of light received by the light-receiving unit 234. The cutting edge detection sensor 230 is raised and lowered by a lifting mechanism (not shown) to adjust its vertical position.

[0093] As shown in Figure 13, a pair of imaging means 236 for imaging a workpiece held by the chuck table 172 is mounted on the other side of the beam 206 of the frame 202 (the side facing forward in Figure 13) so as to be movable in the Y-axis direction, and a pair of moving means 238 for moving the imaging means 236 in the Y-axis direction is also mounted.

[0094] The moving means 238 includes a ball screw 240 extending in the Y-axis direction on the other side of the beam 206, and a motor 242 that rotates the ball screw 240. The ball screw 240 is connected to the imaging means 236. The moving means 238 converts the rotational motion of the motor 242 into linear motion using the ball screw 240 and transmits it to the imaging means 236, moving the imaging means 236 in the Y-axis direction along the guide rail 206a attached to the other side of the beam 206. Note that there may be only one imaging means 236.

[0095] (cutting) When performing cutting on a workpiece such as a wafer using the cutting device 170, first, the workpiece is picked up by suction onto the chuck table 172. Next, the chuck table 172 is moved below the imaging device 236 using the X-axis feed means 176, and the Y-axis position of the imaging device 236 is adjusted using the moving means 238. Then, the imaging device 236 images the workpiece from above to detect the cutting area of ​​the workpiece.

[0096] Next, based on the cutting area of ​​the workpiece detected by the imaging means 236, the chuck table 172 is rotated to adjust the orientation of the cutting area of ​​the workpiece relative to the cutting blades of the cutting means 174. Then, the chuck table 172 is moved in the X-axis direction by the X-axis feed means 176, and the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed means 178, to position the pair of cutting blades above the cutting area of ​​the workpiece.

[0097] Next, the Z-axis feed mechanism 180 lowers the spindle housing 212, causing the cutting edge of the high-speed rotating cutting blade to cut into the cutting area of ​​the workpiece. At the same time, cutting fluid is supplied to the portion of the cutting blade that is cutting, and the chuck table 172 is fed in the X-axis direction to perform a predetermined cutting operation on the cutting area of ​​the workpiece. The Y-axis feed mechanism 178 indexes and feeds the spindle housing 212 in the Y-axis direction, and the above cutting operation is repeated as needed to perform cutting on the entire cutting area of ​​the workpiece. After the cutting process is complete, the cut workpiece is transported to the next process.

[0098] (Cutting blade replacement) When the cutting process is repeated, the cutting blade wears down, and when the wear of the cutting blade reaches a predetermined level, the cutting accuracy can no longer be maintained, so it is necessary to replace the cutting blade mounted on the spindle 220 with a new cutting blade. In addition, even if the wear of the cutting blade mounted on the spindle 220 has not reached a predetermined level, when cutting a workpiece made of a different material than the workpiece that was previously cut, it may be necessary to replace the cutting blade with one that is appropriate for the material of the workpiece.

[0099] In the illustrated embodiment, as shown in Figure 20, an auxiliary device 2 capable of automatically replacing the cutting blade of the cutting device 170 is connected to the cutting device 170. The method for replacing the hub blade 36 using the auxiliary device 2 will be described below.

[0100] As shown in Figure 20, the auxiliary device 2 is positioned on the rear side of the cutting device 170 in the X-axis direction, and can be attached to the cutting device 170 after it has been delivered to the user. When replacing the cutting blade attached to the cutting device 170 using the auxiliary device 2, first the endless track 22 of the cutting blade storage means 4 is rotated to position the blade support shaft 24 that supports the new hub blade 36 to be brought into the cutting device 170 at a predetermined position (for example, the lowest end position in the track of the blade support shaft 24).

[0101] Next, as shown in Figure 21, the casing 52 is rotated by a motor connected to the Z rotation axis 46 of the loading / unloading means 6, so that the side wall 56 of the casing 52, to which the blade holding part 48 is mounted, is aligned in the X-axis direction, and the blade holding part 48 faces the cutting blade storage means 4.

[0102] Furthermore, the X-axis moving means 12 and the Z-axis moving means 10 are activated to adjust the X-axis and Z-axis positions of the blade holding part 48 so that the shaft portion 34 of the blade support shaft 24 at the predetermined position can be inserted into the central opening 60 (see Figure 6) of the blade holding part 48.

[0103] Next, as shown in Figure 22, the Y-axis positioning means 8 moves the frame 74 in the Y-axis direction, positioning the loading / unloading means 6 to an operating position where the hub blade 36 supported by the blade support shaft 24 can be held by the blade holding part 48. This inserts the shaft portion 34 of the blade support shaft 24 at the predetermined position into the central opening 60 of the blade holding part 48, and brings the end face 58 of the blade holding part 48 into contact with the end face of the hub blade 36 located on the tip side of the shaft portion 34. Next, a suction force is generated in the first suction hole 61 of the blade holding part 48, and the hub blade 36 located on the tip side of the shaft portion 34 is held by the blade holding part 48 through suction.

[0104] Next, the Y-axis positioning means 8 is activated to move the loading / unloading means 6 away from the cutting blade storage means 4 in the Y-axis direction and position it in a retracted position. Then, the casing 52 of the loading / unloading means 6 is rotated 180° so that the blade holding part 48 opposite to the blade holding part 48 that holds the hub blade 36 by suction faces the cutting blade storage means 4.

[0105] Next, the Y-axis positioning means 8 is activated to position the loading / unloading means 6 in an operating position where the opposite blade holding part 48 can hold the hub blade 36 of the blade support shaft 24. Then, a suction force is generated in the first suction hole 61 of the opposite blade holding part 48, and the hub blade 36 located on the tip side of the shaft part 34 is held in place by the blade holding part 48. As a result, a new hub blade 36 is held in place by a pair of opposing blade holding parts 48 out of the four blade holding parts 48.

[0106] Next, as shown in Figure 23, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the lifting table 76 is moved in the Z-axis direction by the Z-axis moving means 10. This separates the loading / unloading means 6 from the cutting blade storage means 4 and positions it in a retracted position, while also adjusting the Y-axis and Z-axis positions of the loading / unloading means 6 relative to the cutting device 170. After position adjustment, the Y-axis position of the loading / unloading means 6 is between the pair of cutting means 174 of the cutting device 170, and the Z-axis position of the loading / unloading means 6 after position adjustment is above the holding surface of the chuck table 172.

[0107] Next, as shown in Figure 24, the loading / unloading mechanism 6 is moved in the X-axis direction by the X-axis moving mechanism 12 to adjust the X-axis position of the loading / unloading mechanism 6 relative to the pair of cutting mechanisms 174. Specifically, the X-axis position of the center of the new pair of hub blades 36, which are held by the pair of blade holding parts 48 of the loading / unloading mechanism 6, is aligned with the X-axis position of the center of the pair of hub blades 36 mounted on the pair of cutting mechanisms 174.

[0108] Furthermore, the Z-axis moving means 10 of the auxiliary device 2 or the Z-axis feeding means 180 of the cutting device 170 is activated to align the Z-axis position of the center of the hub blade 36 of the blade holding part 48 with the Z-axis position of the center of the hub blade 36 of the cutting means 174.

[0109] Next, the casing 52 of the loading / unloading means 6 is rotated 60° so that the pair of fixing nut holding parts 50 face the hub blades 36 of the pair of cutting means 174. Alternatively, the casing 52 may be rotated 60° before moving the loading / unloading means 6 forward.

[0110] Next, the second cover member 224b of each blade cover 224 of the pair of cutting means 174 is positioned in the open position (see Figure 16). The cutting edge detection sensor 230 is also raised and moved away from the hub blade 36. Then, the cutting means 174 is moved in the Y-axis direction by the Y-axis feed means 178 of the cutting device 170, so that the fixing nut 222 that secures the hub blade 36 to the spindle 220 comes into contact with the end face 66a of the rotating body 66 of the fixing nut holding part 50. As a result, the pin 72 of the fixing nut holding part 50 is pushed by the fixing nut 222 and housed inside the rotating body 66, and the tip of the spindle 220 is housed in the central opening 68 of the rotating body 66.

[0111] Next, when the motor 67 of the fixing nut holding part 50 rotates the rotating body 66, each pin 72 aligns with the pin hole 222a of the fixing nut 222. At this point, each pin 72 engages with the pin hole 222a, and the rotational motion of the rotating body 66 is transmitted to the fixing nut 222 via each pin 72, causing the fixing nut 222 to loosen. This allows the fixing nut 222 to be unscrewed (removed) from the male thread 228 of the spindle 220 of the cutting means 174. Additionally, a suction force is generated in each suction hole 70 of the fixing nut holding part 50, and the removed fixing nut 222 is held in place by the fixing nut holding part 50.

[0112] Next, the Y-axis feed mechanism 178 separates the cutting mechanism 174 from the loading / unloading mechanism 6, and rotates the casing 52 of the loading / unloading mechanism 6 by 60°, so that the empty blade holding portion 48, which does not hold the hub blade 36 by suction, faces the hub blade 36 of the cutting mechanism 174.

[0113] Next, the Y-axis feed mechanism 178 brings the cutting mechanism 174 closer to the loading / unloading mechanism 6, inserting the spindle 220 of the cutting mechanism 174 into the central opening 60 of the blade holding part 48, and bringing the end face 58 of the empty blade holding part 48 into contact with the end face of the hub blade 36 of the cutting mechanism 174. Then, a suction force is generated in the first suction hole 61 of the blade holding part 48, and the hub blade 36 of the cutting mechanism 174 is held in place by the blade holding part 48.

[0114] Next, the Y-axis feed mechanism 178 separates the cutting mechanism 174 from the loading / unloading mechanism 6, and rotates the casing 52 of the loading / unloading mechanism 6 by 60°, so that the blade holding part 48 that holds the new hub blade 36 by suction faces the spindle 220 of the cutting mechanism 174.

[0115] Next, the Y-axis feed mechanism 178 moves the cutting mechanism 174 closer to the loading / unloading mechanism 6, inserting the spindle 220 into the central opening 38a of the new hub blade 36 and bringing the end face of the hub blade 36 into contact with the receiving portion 226b of the fixed flange 226 of the spindle 220. Then, the suction force of the blade holder 48 is released, and the new hub blade 36 is transferred from the blade holder 48 to the spindle 220.

[0116] Next, the Y-axis feed mechanism 178 separates the cutting mechanism 174 from the loading / unloading mechanism 6, and rotates the casing 52 of the loading / unloading mechanism 6 by 60°, so that the fixing nut holding part 50, which holds the removed fixing nut 222 by suction, faces the spindle 220 of the cutting mechanism 174.

[0117] Next, the Y-axis feed mechanism 178 moves the cutting mechanism 174 closer to the loading / unloading mechanism 6, and the fixing nut 222, which is held by the fixing nut holding part 50, is fitted onto the tip of the spindle 220. Then, the motor 67 of the fixing nut holding part 50 is operated in the opposite direction to when the fixing nut 222 was removed, and the fixing nut 222 is rotated, screwing (fastening) the fixing nut 222 onto the male thread 228 of the spindle 220.

[0118] This allows the new hub blade 36 to be attached to the cutting means 174 to be secured to the spindle 220 by being sandwiched between the receiving portion 226b of the fixing flange 226 of the spindle 220 and the fixing nut 222.

[0119] Next, after releasing the suction force of the fixing nut holding part 50, the second cover member 224b of the blade cover 224 of the cutting means 174 is positioned in the closed position. The removal and installation of the fixing nut 222 and the hub blade 36 as described above may be performed simultaneously or separately for the pair of cutting means 174.

[0120] Next, the loading / unloading mechanism 6 is retracted, and the casing 52 of the loading / unloading mechanism 6 is rotated by 60°, so that one of the removed pair of hub blades 36 faces the cutting blade storage mechanism 4. In addition, the endless track 22 of the cutting blade storage mechanism 4 is rotated to position the empty blade support shaft 24, which does not support the hub blade 36, in a predetermined position (for example, the lowest end position in the track of the blade support shaft 24).

[0121] Next, the X-axis moving means 12 and the Z-axis moving means 10 are activated to adjust the X-axis and Z-axis positions of the blade holding part 48 so that the shaft portion 34 of the blade support shaft 24 at the predetermined position can be inserted into the central opening 38a of one of the hub blades 36 that is held by the blade holding part 48.

[0122] Next, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the shaft portion 34 of the blade support shaft 24 at the predetermined position is inserted into the central opening 38a of one of the hub blades 36 that is held in suction by the blade holding portion 48, and the end face of one of the hub blades 36 is brought into contact with the end face of the base portion 32 of the blade support shaft 24. Then, the suction force of the blade holding portion 48 is released, and one of the removed hub blades 36 is transferred to the blade support shaft 24.

[0123] Furthermore, the Y-axis positioning means 8 separates the loading / unloading means 6 from the cutting blade storage means 4, and rotates the casing 52 of the loading / unloading means 6 by 180° so that the blade holding portion 48 on the opposite side, which is suction-holding the other of the removed pair of hub blades 36, faces the cutting blade storage means 4.

[0124] Next, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the shaft portion 34 of the blade support shaft 24 at the predetermined position is inserted into the central opening 38a of the other hub blade 36 which is held in suction by the blade holding portion 48 on the opposite side, and the end face of the other hub blade 36 is brought into contact with the end face of the hub blade 36 supported by the blade support shaft 24. Then, the suction force of the blade holding portion 48 is released, and the other of the removed pair of hub blades 36 is transferred to the blade support shaft 24.

[0125] As described above, the auxiliary device 2 of the illustrated embodiment can be attached to the cutting device 170 that has already been delivered to the user, and the cutting blade attached to the cutting means 174 of the cutting device 170 can be replaced.

[0126] (Replacement of washer blade 45) In the example above, we described an example of replacing the hub blade 36, but in the illustrated embodiment, the washer blade 45 can also be replaced.

[0127] When replacing the washer blade 45, the loading / unloading mechanism 6 is positioned between the pair of cutting means 174 of the cutting device 170 without holding the new replacement washer blade 45 by suction with the blade holding part 48. Next, the fixing nut holding part 50 is brought facing the cutting means 174, and the fixing nut 222 is removed from the spindle 220 of the cutting means 174 using the fixing nut holding part 50.

[0128] Next, the blade holder 48 is brought into contact with the cutting means 174, and a suction force is generated in the first suction hole 61 of the blade holder 48 to hold the mounting flange 229 by suction, thereby removing the mounting flange 229 from the spindle 220. At the same time, a suction force is generated in the second suction hole 63 to hold the washer blade 45 mounted on the spindle 220 with the blade holder 48.

[0129] Next, the loading / unloading means 6 is moved to the cutting blade storage means 4, and the blade holding part 48, which holds the mounting flange 229 and washer blade 45 by suction, is brought facing the cutting blade storage means 4, releasing the suction force of the second suction hole 63 and storing the washer blade 45 in the cutting blade storage means 4. Then, suction force is generated in the second suction hole 63 of the blade holding part 48 that holds the mounting flange 229 by suction, and the new replacement washer blade 45 is held by the blade holding part 48 by suction. In other words, the new replacement washer blade 45 is held by suction together with the mounting flange 229 by the same blade holding part 48.

[0130] Next, the blade holding portion 48, which holds the mounting flange 229 and the new washer blade 45, is brought facing the cutting means 174, and the mounting flange 229 and the new washer blade 45 are transferred to the spindle 220. Then, the fixing nut holding portion 50 is brought facing the cutting means 174, and the fixing nut 222 is screwed onto the male thread 228 of the spindle 220. In this way, the auxiliary device 2 can be attached to the cutting device 170 that has already been delivered to the user, and the washer blade 45 of the cutting device 170 can be replaced.

[0131] (Cleaning of the cutting edge detection sensor 230) When cleaning the cutting edge detection sensor 230, first, the endless track 22 of the cutting blade storage means 4 is rotated to position the blade support shaft 24 that supports the first cleaning unit 124 in a predetermined position.

[0132] Next, the loading / unloading mechanism 6 is moved to position it in an operational position where the first cleaning unit 124 can be held by the blade holding part 48. That is, the shaft portion 34 of the blade support shaft 24 is inserted into the central opening 60 of the blade holding part 48, and the end face 58 of the blade holding part 48 is brought into contact with the end face of the base 132 of the first cleaning unit 124. Then, a suction force is generated in the first suction hole 61 of the blade holding part 48, and the first cleaning unit 124 is held by the blade holding part 48 through suction.

[0133] Next, the loading / unloading mechanism 6 is moved and positioned between the pair of cutting means 174 of the cutting device 170. Then, the fixing nut holding part 50 is brought facing the cutting means 174, the fixing nut 222 is removed from the spindle 220 by the fixing nut holding part 50, and the removed fixing nut 222 is held in place by suction with the fixing nut holding part 50.

[0134] Next, the empty blade holder 48, which is not holding the first cleaning unit 124 by suction, is brought facing the cutting means 174, and the cutting blade is held by suction using the blade holder 48 to remove the cutting blade from the spindle 220. If the cutting blade is a washer blade 45, the washer blade 45 and the mounting flange 229 are held by suction using the blade holder 48 to remove them from the spindle 220.

[0135] Next, the blade holder 48, which is holding the first cleaning unit 124 by suction, is brought facing the spindle 220, and then the central opening 132a of the first cleaning unit 124 is fitted onto the spindle 220. Then, the suction force of the blade holder 48 is released, and the first cleaning unit 124 is transferred from the blade holder 48 to the spindle 220.

[0136] Next, the fixing nut holding part 50, which is holding the removed fixing nut 222 by suction, is brought into contact with the spindle 220 of the cutting means 174. Then, the fixing nut 222, which is held by suction in the fixing nut holding part 50, is fitted onto the tip of the spindle 220, and the fixing nut 222 is screwed onto the male thread 228 of the spindle 220. In this way, the first cleaning unit 124 is fixed to the fixing flange 226 of the spindle 220 using the loading / unloading means 6.

[0137] Once the first cleaning unit 124 is fixed to the fixing flange 226, the cutting edge detection sensor 230 is lowered as shown in Figure 25, and the cleaning member 134 of the first cleaning unit 124 is positioned between the light-emitting part 232 and the light-receiving part 234. Then, by rotating the spindle 220, the light-emitting part 232 and the light-receiving part 234 of the cutting edge detection sensor 230 can be cleaned by the cleaning member 134 of the first cleaning unit 124. After cleaning, the first cleaning unit 124 is removed from the spindle 220, the cutting blade is mounted on the spindle 220, and the first cleaning unit 124 is returned to the cutting blade storage means 4.

[0138] (Cleaning of position detection sensor 194) When cleaning the position detection sensor 194, the second cleaning unit 126 is fixed to the fixed flange 226 of the spindle 220, just as the first cleaning unit 124 was fixed to the fixed flange 226 of the spindle 220. Next, as shown in Figure 26, the cutting means 174 is moved to position the cleaning member 138 between the light-emitting part 196 and the light-receiving part 197 of the position detection sensor 194. Then, by rotating the spindle 220, the light-emitting part 196 and the light-receiving part 197 of the position detection sensor 194 can be cleaned by the cleaning member 138 of the second cleaning unit 126.

[0139] (Cleaning of fixed flange 226) When cleaning the fixed flange 226, the endless track 22 of the cutting blade storage means 4 is rotated to position the blade support shaft 24 that supports the third cleaning unit 128 in a predetermined position.

[0140] Next, the loading / unloading mechanism 6 is moved to position it in an operational position where the third cleaning unit 128 can be held by the blade holding part 48. That is, the shaft portion 34 of the blade support shaft 24 is inserted into the central opening 60 of the blade holding part 48, and the end face 58 of the blade holding part 48 is brought into contact with the end face of the annular projection 140a of the base 140 of the third cleaning unit 128. Then, a suction force is generated in the first suction hole 61 of the blade holding part 48, and the third cleaning unit 128 is held by the blade holding part 48 through suction.

[0141] Next, the loading / unloading means 6 is moved and positioned between the pair of cutting means 174 of the cutting device 170. Then, the fixing nut 222 is removed from the spindle 220 by the fixing nut holding part 50, and the removed fixing nut 222 is held in place by suction with the fixing nut holding part 50.

[0142] Next, the empty blade holder 48, which is not holding the third cleaning unit 128 by suction, is brought facing the cutting means 174, and the cutting blade is held by suction using the blade holder 48 to remove the cutting blade from the spindle 220. If the cutting blade is a washer blade 45, the washer blade 45 and the mounting flange 229 are held by suction using the blade holder 48 to remove them from the spindle 220.

[0143] After removing the cutting blade from the spindle 220, the blade holding portion 48, which holds the third cleaning unit 128 by suction, is brought facing the spindle 220, as shown in Figure 27. Then, the cleaning member 142 of the third cleaning unit 128 is pressed against the receiving portion 226b of the fixed flange 226 of the cutting means 174, and the third cleaning unit 128 and the fixed flange 226 are rotated relative to each other. This allows the receiving portion 226b of the fixed flange 226 to be cleaned by the cleaning member 142 of the third cleaning unit 128.

[0144] When cleaning the fixed flange 226, the blade holder 48 that holds the third cleaning unit 128 may be rotated by the motor 57, or the fixed flange 226 may be rotated together with the spindle 220 by the motor for the spindle 220.

[0145] (Cleaning of mounting flange 229) When cleaning the mounting flange 229, the loading / unloading means 6 is moved and positioned between the pair of cutting means 174 of the cutting device 170. Next, the fixing nut holding part 50 is brought facing the cutting means 174, the fixing nut 222 is removed from the spindle 220 by the fixing nut holding part 50, and the removed fixing nut 222 is held in place by suction with the fixing nut holding part 50.

[0146] Next, the blade holding portion 48 is brought into contact with the cutting means 174, generating suction force in the first suction hole 61 to hold the mounting flange 229 by suction, and generating suction force in the second suction hole 63 to hold the washer blade 45 by suction, thereby removing the washer blade 45 and the mounting flange 229 from the spindle 220 by suction.

[0147] Next, the loading / unloading means 6 is moved so that the blade holding part 48, which holds the washer blade 45 and mounting flange 229 by suction, faces the cutting blade storage means 4. In addition, the endless track 22 of the cutting blade storage means 4 is rotated to position the blade support shaft 24, which can support the washer blade 45, in a predetermined position.

[0148] Then, the washer blade 45 is fitted onto the shaft portion 34 of the blade support shaft 24, and the suction force of the second suction hole 63 is released, transferring the washer blade 45 to the blade support shaft 24. At this time, the suction force of the first suction hole 61 is not released, and the suction holding of the mounting flange 229 by the blade holding portion 48 continues.

[0149] Next, the blade holding unit 48 is moved away from the cutting blade storage means 4. Also, by rotating the endless track 22 of the cutting blade storage means 4, the cleaning member 148 of the fourth cleaning unit 130 is brought into contact with the mounting flange 229, which is held by the blade holding unit 48 by suction, as shown in Figure 28. Then, the clamping surface 229a of the mounting flange 229 is pressed against the cleaning member 148 of the fourth cleaning unit 130, and the blade holding unit 48, which is holding the mounting flange 229, is rotated by the motor 57. This allows the clamping surface 229a of the mounting flange 229 to be cleaned by the cleaning member 148.

[0150] (Cleaning of the blade holder 48) Furthermore, it is also possible to clean the blade holding portion 48 with the cleaning member 148 by pressing the blade holding portion 48, which does not hold the mounting flange 229, etc., against the cleaning member 148 of the fourth cleaning unit 130, and rotating the blade holding portion 48 with the motor 57.

[0151] As described above, in the illustrated embodiment of the auxiliary device 2, it can be attached to the cutting device 170 that has already been delivered to the user, allowing for the replacement of the cutting blade attached to the cutting means 174 of the cutting device 170, and also enabling the cleaning of the cutting edge detection sensor 230, etc. [Explanation of symbols]

[0152] 2: Auxiliary equipment 4: Cutting blade storage means 6: Carrying in / out means 8: Y-axis positioning means 10:Z-axis movement means 12:X-axis movement means 13: Cleaning mechanism 36: Hub blade (cutting blade) 45: Washer blade (cutting blade) 124: First cleaning unit 126: Second washing unit 128: Third Washing Unit 130: Fourth Washing Unit 170: Cutting equipment 172: Chuck Table 174:Cutting means 176: X-axis feed mechanism 178: Y-axis feed mechanism 180: Z-axis feed mechanism 194: Position detection sensor 222: Fixing nut 226: Fixed flange 229: Mounting flange 229a: Sandwiching surface 230: Cutting edge detection sensor

Claims

1. The auxiliary device comprises a chuck table with a holding surface for holding a workpiece, a cutting means for cutting the workpiece held on the chuck table with a cutting blade mounted on a fixed flange and fixed with a fixing nut, an X-axis feed means for feeding the chuck table in the X-axis direction, a Y-axis feed means for indexing and feeding the cutting means in the Y-axis direction perpendicular to the X-axis direction, and a Z-axis feed means for cutting and feeding the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, wherein the holding surface is an auxiliary device connected to a cutting device defined in the X-axis and Y-axis directions. An auxiliary device comprising at least: a cutting blade storage means for storing multiple cutting blades; an loading / unloading means for loading and unloading cutting blades from the cutting blade storage means; a Y-axis positioning means for positioning the loading / unloading means in an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means; a Z-axis moving means for moving the loading / unloading means in the Z-axis direction; an X-axis moving means for moving the loading / unloading means in the X-axis direction to act on a cutting blade mounted on the spindle of the cutting means; and a cleaning mechanism that is stored together with the cutting blade in the cutting blade storage means and has a function to clean the position facing the cutting blade when it is removed from the cutting blade storage means and mounted on the fixed flange.

2. The cleaning mechanism includes a first cleaning unit that cleans a cutting edge detection sensor, which is disposed in the cutting means and detects the state of the cutting edge of the cutting blade. The auxiliary device according to claim 1, wherein the loading / unloading means attaches the first cleaning unit to the fixed flange.

3. The cleaning mechanism comprises a second cleaning unit disposed adjacent to the chuck table for cleaning a position detection sensor that detects the position of the cutting edge of a cutting blade mounted on the cutting means, The auxiliary device according to claim 1, wherein the loading / unloading means attaches the second cleaning unit to the fixed flange.

4. An auxiliary device comprising: a chuck table having a holding surface for holding a workpiece; a cutting means having a cutting blade for cutting the workpiece held on the chuck table mounted on a fixed flange and fixed with a fixed nut; an X-axis feed means for machining feed of the chuck table in the X-axis direction; a Y-axis feed means for indexing feed of the cutting means in the Y-axis direction perpendicular to the X-axis direction; and a Z-axis feed means for cutting feed of the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, wherein the holding surface is an auxiliary device connected to a cutting device defined in the X-axis direction and the Y-axis direction, The cutting means includes at least: a cutting blade storage means for storing multiple cutting blades; an loading / unloading means for loading and unloading cutting blades from the cutting blade storage means; a Y-axis positioning means for positioning the loading / unloading means in an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means; a Z-axis moving means for moving the loading / unloading means in the Z-axis direction; an X-axis moving means for moving the loading / unloading means in the X-axis direction to act on a cutting blade mounted on the spindle of the cutting means; and a cleaning mechanism. The cleaning mechanism includes a third cleaning unit for cleaning the fixed flange, The loading / unloading means is an auxiliary device that holds the third cleaning unit and presses it against the fixed flange.

5. The auxiliary device according to claim 4, wherein the third cleaning unit is stored in the cutting blade storage means.

6. An auxiliary device comprising: a chuck table having a holding surface for holding a workpiece; a cutting means having a cutting blade for cutting the workpiece held on the chuck table mounted on a fixed flange and fixed with a fixed nut; an X-axis feed means for machining feed of the chuck table in the X-axis direction; a Y-axis feed means for indexing feed of the cutting means in the Y-axis direction perpendicular to the X-axis direction; and a Z-axis feed means for cutting feed of the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, wherein the holding surface is an auxiliary device connected to a cutting device defined in the X-axis direction and the Y-axis direction, The cutting means includes at least: a cutting blade storage means for storing multiple cutting blades; an loading / unloading means for loading and unloading cutting blades from the cutting blade storage means; a Y-axis positioning means for positioning the loading / unloading means in an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means; a Z-axis moving means for moving the loading / unloading means in the Z-axis direction; an X-axis moving means for moving the loading / unloading means in the X-axis direction to act on a cutting blade mounted on the spindle of the cutting means; and a cleaning mechanism. The cleaning mechanism includes a fourth cleaning unit that cleans the clamping surface of the mounting flange that clamps the washer blade, which serves as a cutting blade, between the fixing flange and the clamping surface. The loading / unloading means is an auxiliary device that holds and rotates the mounting flange while pressing it against the fourth cleaning unit.

7. The auxiliary device according to claim 6, wherein the fourth cleaning unit is stored in the cutting blade storage means.

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