Automatic exchange device

Abstract

To provide an automatic changing device that can prevent deviation from occurring between a rotation center of a cutting blade and a rotating shaft line of a spindle even when a support end face of a stationary flange supporting the cutting blade is soiled or scratched.SOLUTION: An automatic changing device 2 includes: cutting blade storing means 4 that stores a plurality of cutting blades 36; correction jig storing means 5, formed at a tip of a spindle of cutting means of a cutting device, and storing a correction jig 132 that corrects a support end face of a stationary flange supporting the cutting blades 36; and carry-out / in means 6 that carries out / in the cutting blades 36 from the cutting blade storing means 4 or carries-out / in the correction jig 132 from the correction jig storing means 5. The correction jig 132 has a polishing part that removes soil or scratch from the support end face and a sensor that detects a state of the support end face.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an automatic changer connected to a cutting device.

Background Art

[0002] A wafer on which a plurality of devices such as ICs and LSIs are formed on the surface and partitioned by a division planned line is divided into individual device chips by a cutting device, and each divided device chip is used in electric devices such as mobile phones and personal computers.

[0003] The cutting device includes a chuck table having a holding surface for holding a wafer, cutting means in which a cutting blade for cutting the wafer held on the chuck table is attached with a fixing nut, X-axis feeding means for processing and feeding the chuck table in the X-axis direction, Y-axis feeding means for indexing and feeding the cutting means in the Y-axis direction orthogonal to the X-axis direction, and Z-axis feeding means for cutting and feeding the cutting means in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction. The holding surface is defined in the X-axis direction and the Y-axis direction, and the wafer can be divided into individual device chips with high precision.

[0004] In addition, the present applicant has proposed an automatic changer capable of automatically exchanging a cutting blade attached to the cutting means (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] However, repeated attachment and detachment of the cutting blade can cause dirt and scratches to accumulate on the support end face of the fixed flange that supports the cutting blade, which is formed at the tip of the spindle of the cutting means. In such cases, a slight misalignment occurs between the rotation center of the cutting blade and the rotation axis of the spindle.

[0007] The object of the present invention is to provide an automatic blade replacement device that can prevent misalignment between the rotation center of the cutting blade and the rotation axis of the spindle, even if dirt or scratches become present on the support end face of the fixed flange that supports the cutting blade. [Means for solving the problem]

[0008] According to the present invention, the following automatic exchange device is provided that solves the above problems. That is, "The chuck table is equipped with a holding surface for holding a workpiece, and the cutting means is equipped with a cutting blade for cutting the workpiece held on the chuck table, which is attached to the chuck table with a fixing nut, and the X-axis feed means is for feeding the chuck table in the X-axis direction, the Y-axis feed means is for indexing and feeding the cutting means in the Y-axis direction perpendicular to the X-axis direction, and the Z-axis feed means is for cutting and feeding the cutting means in the Z-axis direction perpendicular to the X-axis direction and the Y-axis direction, and the holding surface but Defined in the X-axis and Y-axis directions Positioned on the XY plane An automatic exchange device connected to a cutting machine, The cutting blade storage means for storing multiple cutting blades, the correction jig storage means for storing a correction jig for correcting the support end face of a fixed flange formed at the tip of the spindle of the cutting means and supporting the cutting blade, and the loading / unloading means for loading and unloading cutting blades from the cutting blade storage means and the correction jig from the correction jig storage means, The repair jig includes a polishing section for removing dirt or scratches from the support end face and a sensor for detecting the condition of the support end face. death, The sensor is positioned to detect the state of the support end face when the support end face of the fixed flange is being corrected by the polishing part. An automatic exchange device is provided.

[0009] Preferably, While polishing the support end face, the sensor detects the state of the support end face, and when the difference between the recess and protrusion of the support end face falls below a predetermined value, the correction of the support end face is terminated. Furthermore, preferably, The system comprises: a Y-axis positioning means for positioning the loading / unloading means in an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means; a Z-axis moving means for moving the loading / unloading means in the Z-axis direction; and an X-axis moving means for moving the loading / unloading means in the X-axis direction to act on the cutting blade mounted on the spindle of the cutting means. The loading and unloading means includes a Z rotation axis extending in the Z-axis direction, a blade holding part radially connected to the Z rotation axis and holding the cutting blade by suction, a fixing nut holding part for screwing the fixing nut onto and off a male thread formed at the tip of the spindle, and a fixing jig holding part for holding the fixing jig.

[0010] The loading / unloading means may also include a determination means for detecting the state of the support end face when the cutting blade is not attached and determining whether or not the support end face needs to be modified.

[0011] The loading and unloading means is preferably mounted on a frame via a bent arm of the X-axis moving means, the frame is slidably supported on a guide rail extending in the Y-axis direction mounted on a lifting table, and positioned in the Y-axis direction relative to the cutting blade storage means by the Y-axis direction positioning means.

[0012] The loading / unloading means is equipped with a modification jig holding section for holding the modification jig, and it is preferable that the modification jig is loaded into and unloaded from the modification jig storage means to a sub-chuck table located adjacent to the chuck table by moving the bending arm in the X-axis direction. [Effects of the Invention]

[0013] The automatic exchange device of the present invention is A chuck table having a holding surface for holding a workpiece, cutting means for cutting the workpiece held on the chuck table with a cutting blade mounted by a fixing nut, X-axis feeding means for feeding the chuck table in the X-axis direction for machining, Y-axis feeding means for indexing and feeding the cutting means in the Y-axis direction orthogonal to the X-axis direction, and Z-axis feeding means for feeding the cutting means in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction, and the holding surface but defined in the X-axis direction and the Y-axis direction Positioned on the XY plane An automatic exchange device connected to the cutting device, blade storage means for storing a plurality of cutting blades, jig storage means for storing a jig for correcting the support end face of a fixing flange formed at the tip of the spindle of the cutting means for supporting the cutting blade, and loading / unloading means for carrying out and carrying in the cutting blade from the blade storage means or the jig from the jig storage means, The jig has a polishing part for removing dirt or scratches from the support end face and a sensor for detecting the state of the support end face death, The sensor is positioned to detect the state of the support end face when the support end face of the fixed flange is being corrected by the polishing part. Therefore, even if dirt or scratches adhere to the support end face of the fixing flange that supports the cutting blade, it is possible to prevent a deviation from occurring between the rotation center of the cutting blade and the rotation axis of the spindle.

Brief Description of the Drawings

[0014] [Figure 1] Perspective view of the automatic exchange device configured according to the present invention. [Figure 2] Exploded perspective view of the blade storage means shown in FIG. 1. [Figure 3] Perspective view of the blade support shaft shown in FIG. 2. [Figure 4] Cross-sectional view of the blade support shaft shown in FIG. 2. [Figure 5] Perspective view of the jig storage means shown in FIG. 1. [Figure 6] Perspective view of the loading / unloading means shown in FIG. 1. [Figure 7] Exploded perspective view of the frame shown in FIG. 1. [Figure 8]Exploded perspective view of the frame, lifting table, and base stand shown in FIG. 1. [Figure 9] Perspective view of the cutting device to which the automatic exchange device shown in FIG. 1 is connected. [Figure 10] Perspective view of the chuck table shown in FIG. 9. [Figure 11] Perspective view of the cutting means shown in FIG. 9. [Figure 12] Perspective view of the cutting means in a state where the blade cover shown in FIG. 11 is open. <{ [Figure 13] Exploded perspective view of the cutting means shown in FIG. 9. [Figure 14] Perspective view showing the state where the automatic exchange device shown in FIG. 1 is connected to the cutting device shown in FIG. 9. [Figure 15] Perspective view showing a state where the cutting blade storage means and the loading / unloading means of the automatic exchange device shown in FIG. 1 face each other. [Figure 16] Perspective view showing the state where the frame has advanced toward the cutting blade storage means from the state shown in FIG. 15. [Figure 17] Perspective view showing the state where the frame has retreated and the lifting table has risen from the state shown in FIG. 16. [Figure 18] Perspective view showing the state where the loading / unloading means has advanced toward the cutting device from the state shown in FIG. 17. [Figure 19] Perspective view showing the state where the correction jig is adsorbed on the sub-chuck table shown in FIG. 8. [Figure 20] Schematic diagram showing the state where the end face of the fixing flange is being corrected by the correction jig shown in FIG. 5.

Embodiments for Carrying Out the Invention

[0015] Hereinafter, a preferred embodiment of the automatic exchange device configured according to the present invention will be described with reference to the drawings. <{

[0016] [[ID=#48]](Automatic Exchange Device 2) Referring to Figure 1, the automatic exchange device, collectively denoted by reference numeral 2, includes a cutting blade storage means 4 for storing multiple cutting blades, a correction jig storage means 5 for storing correction jigs for correcting the support end faces of the fixed flanges formed at the tip of the spindle of the cutting means of the cutting device and supporting the cutting blades, and an loading / unloading means 6 for loading and unloading cutting blades from the cutting blade storage means 4 or correction jigs from the correction jig storage means 5.

[0017] Furthermore, the automatic exchange device 2 of the illustrated embodiment includes a Y-axis positioning means 8 (see Figure 8) that positions the loading / unloading means 6 to an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means 4, a Z-axis moving means 10 (see Figures 1 and 8) that moves the loading / unloading means 6 in the Z-axis direction, and an X-axis moving means 12 (see Figure 1) that moves the loading / unloading means 6 in the X-axis direction to act on the cutting blade mounted on the spindle of the cutting means of the cutting device.

[0018] The X-axis direction is indicated by the arrow X in Figure 1, and the Y-axis direction is indicated by the arrow Y in Figure 1, which is perpendicular to the X-axis direction. The Z-axis direction is indicated by the arrow Z in Figure 1, which is the vertical direction perpendicular to both the X-axis and Y-axis directions. The plane defined by the X-axis and Y-axis directions is essentially horizontal.

[0019] (Cutting blade storage means 4) As shown in Figure 2, the cutting blade storage means 4 includes a drive gear 16 having a rotating shaft 14 extending in the Y-axis direction, a driven gear 20 having a rotating shaft 18 spaced apart from the drive gear 16 in the Z-axis direction and extending in the Y-axis direction, an endless track 22 wrapped around the drive gear 16 and the driven gear 20, and a blade support shaft 24 extending in the Y-axis direction, which is arranged at predetermined intervals on the endless track 22 and inserted into the central opening of the cutting blade to support the cutting blade.

[0020] (Drive gear 16) Referring to Figures 1 and 2, the cutting blade storage means 4 of the illustrated embodiment includes a base plate 26 (see Figure 1), a support wall 28 extending upward from the upper surface of the base plate 26, and a motor 30 fixed to one side of the support wall 28. As shown in Figure 2, the motor 30 is connected to the rotation shaft 14 of the drive gear 16, and the motor 30 rotates the drive gear 16 with the Y-axis direction as its axis.

[0021] (Driven gear 20) As shown in Figure 2, the driven gear 20 is positioned above the drive gear 16, and the rotation shaft 18 of the driven gear 20 is supported by a support wall 28 so as to be rotatable about the Y-axis and vertically movable in the Z-axis direction. The support wall 28 is provided with a lifting mechanism (not shown) for raising and lowering the driven gear 20 in the Z-axis direction. The lifting mechanism may consist of a ball screw connected to the rotation shaft 18 of the driven gear 20 and extending in the Z-axis direction, and a motor for rotating this ball screw.

[0022] (Infinite track 22) The continuous track 22 is composed of numerous interconnected link pieces (not shown in the symbols) and is wrapped around the drive gear 16 and the driven gear 20. The continuous track 22 rotates in accordance with the rotation of the drive gear 16 by the motor 30.

[0023] In the illustrated embodiment of the cutting blade storage means 4, the distance between the drive gear 16 and the driven gear 20 in the Z-axis direction can be adjusted by changing the position of the driven gear 20 in the Z-axis direction using the lifting means. In addition, in the cutting blade storage means 4, the length of the endless track 22 can also be adjusted by appropriately increasing or decreasing the number of link pieces of the endless track 22.

[0024] (Blade support shaft 24) As shown in Figure 2, multiple blade support shafts 24 are arranged on the continuous track 22 at predetermined intervals. Furthermore, as can be understood by referring to Figure 3 in conjunction with Figure 2, each blade support shaft 24 has a cylindrical base 32 connected to the continuous track 22 and a cylindrical shaft portion 34 extending in the Y-axis direction from the end face of the base 32. The diameter of the shaft portion 34 is smaller than the diameter of the base 32.

[0025] (Cutting blade 36) Figure 3 also shows the cutting blade 36 stored in the cutting blade storage means 4. The cutting blade 36 has an annular base 38 and an annular cutting edge 40 arranged on the outer circumference of the base 38. The base 38 can be made of an appropriate metal material such as an aluminum alloy. A circular central opening 38a is provided in the center of the base 38. The cutting edge 40 is made of abrasive grains such as diamond and a binder such as metal or resin to a predetermined thickness (for example, about 10 to 30 μm) and protrudes radially outward from the outer edge of the base 38.

[0026] In the illustrated embodiment, the shaft portion 34 of the blade support shaft 24 has an outer diameter corresponding to the inner diameter of the central opening 38a of the cutting blade 36. In the blade support shaft 24, the shaft portion 34 is inserted into the central opening 38a of the cutting blade 36, and multiple (for example, five) cutting blades 36 are supported by the shaft portion 34.

[0027] In the illustrated embodiment, as can be understood by referring to Figure 2, the cutting blade 36 is supported on half of the multiple blade support shafts 24. Also, as shown in Figure 3, multiple ball plungers 42 are mounted at circumferential intervals on the tip side of the shaft portion 34 to prevent the cutting blade 36 supported by the shaft portion 34 from flying out.

[0028] As shown in Figure 4, a flow channel 32a is formed inside each base portion 32 of the blade support shaft 24, and multiple flow channels 22a are formed on the endless track 22, communicating with one end of each flow channel 32a. The other end of each flow channel 32a opens at the end face of the base portion 32 radially outward from the shaft portion 34, as shown in Figure 3.

[0029] Furthermore, as shown in Figure 2, the support wall 28 is provided with an air nozzle 44 that protrudes in the Y-axis direction below the drive gear 16, and the air nozzle 44 is connected to a high-pressure air supply means (not shown). In the illustrated embodiment, the blade support shaft 24, which is located at the lowest end of the trajectory of the blade support shaft 24 as the endless track 22 rotates, faces the tip of the air nozzle 44.

[0030] When the cutting blade 36 located at the tip of the shaft portion 34 is ejected, high-pressure air is supplied from the air nozzle 44 through the flow path 22a of the continuous track 22 to the flow path 32a of the base 32 of the blade support shaft 24 located at the lowest end, thereby pushing the cutting blade 36 remaining on the shaft portion 34 towards the tip of the shaft portion 34. However, the cutting blade 36 will not fall from the shaft portion 34 due to the action of the ball plunger 42.

[0031] (Correction jig storage means 5) Referring to Figure 5, the repair jig storage means 5 includes a rectangular plate-shaped tray 130, and the upper surface of the tray 130 is provided with a plurality of rectangular storage recesses 130a. The storage recesses 130a store a repair jig 132 for repairing the support end face of the fixed flange formed at the tip of the spindle of the cutting means and supporting the cutting blade 36, and a dressing board 134 for dressing the cutting blade 36. In the illustrated embodiment, two repair jigs 132 and four dressing boards 134 are stored in six storage recesses 130a. In addition, grooves 130b extending in the Y-axis direction are formed on the lower surface of the tray 130, spaced apart in the X-axis direction.

[0032] (Correction jig 132) The repair jig 132 includes a substrate 136, a polishing section 138 for removing dirt or scratches from the support end face of the fixed flange, and a sensor 140 for detecting the condition of the support end face of the fixed flange. The polishing section 138, which can be made of a grinding wheel, is fixed to the upper surface of the substrate 136, and the tip of the polishing section 138 protrudes from the end of the substrate 136.

[0033] The sensor 140 is also fixed to the upper surface of the substrate 136. For example, the sensor 140 could be a laser displacement meter capable of non-contact detection of irregularities on the support end face of the fixing flange. Although not shown in the figures, the sensor 140 is connected wirelessly or via wire to the control means (computer) of the automatic exchange device 2, and the information detected by the sensor 140 is transmitted to the control means.

[0034] (Dressing board 134) The dressing board 134 may be made by forming green carbide and alundum-based abrasive grains into a rectangular plate shape using a binder such as resin bond. One side of the dressing board 134 is, for example, about 5 cm.

[0035] (Carrying in / out means 6) The loading / unloading means 6 will be described with reference to Figures 6 and 7. The loading / unloading means 6 comprises at least a Z rotation axis 46 extending in the Z axis direction, a blade holding part 48 radially connected to the Z rotation axis 46 and holding the cutting blade 36 by suction, a fixing nut holding part 50 that screws and unscrews a fixing nut onto a male thread formed at the tip of the spindle of the cutting device, and a correction jig holding part 142 (see Figure 7) that holds the correction jig 132.

[0036] As shown in Figure 6, the loading / unloading means 6 of the illustrated embodiment further comprises a casing 52, which has a regular hexagonal top plate 54 and six rectangular plate-shaped side walls 56 hanging down from the periphery of the top plate 54. The Z rotation axis 46 protrudes from the upper surface of the top plate 54. A motor (not shown) connected to the Z rotation axis 46 is housed inside the casing 52.

[0037] In the illustrated embodiment, of the six side walls 56 of the casing 52, blade holding portions 48 are attached to four side walls 56, and fixing nut holding portions 50 are attached to two side walls 56, with the two fixing nut holding portions 50 being provided on a pair of opposing side walls 56.

[0038] (Blade holding section 48) The blade holder portion 48 is formed in a cylindrical shape, and the end face 58 of the blade holder portion 48 is provided with a circular central opening 60 capable of receiving the shaft portion 34 of the blade support shaft 24 and the tip portion of the cutting device's spindle, and a plurality of suction holes 61 arranged at equal intervals in the circumferential direction around the central opening 60. Each suction hole 61 is connected to a suction means (not shown).

[0039] The blade holding portion 48 is positioned so that its end face 58 contacts the base 38 of the cutting blade 36 stored in the cutting blade storage means 4, and the suction means generates a suction force in the suction hole 61 to hold the cutting blade 36 in suction.

[0040] (Fixed nut holding part 50) Referring to Figure 6, the fixing nut holding section 50 includes a cylindrical housing 64 fixed to the side wall 56 of the casing 52, an annular rotating body 66 rotatably housed inside the housing 64, and a motor (not shown) for rotating the rotating body 66.

[0041] The rotating body 66 has a central opening 68 that can receive the tip of the spindle of the cutting device. The end face 66a of the rotating body 66 has a plurality of suction holes 70 and a plurality of pins 72 that are alternately spaced apart in the circumferential direction.

[0042] Each suction hole 70 is connected to a suction means (not shown). The pin 72 is positioned to protrude from the end face 66a of the rotating body 66 (as shown in Figure 6) by a spring (not shown) built into the rotating body 66. When pushed inward towards the inside of the rotating body 66, the spring contracts and the pin 72 is housed inside the rotating body 66. The pin 72 is also positioned in accordance with the location of the pin hole formed in the fixing nut.

[0043] In the fixing nut holding section 50, a suction means generates suction force in each suction hole 70 to hold the fixing nut in place by suction, and with a pin 72 inserted into a pin hole formed in the fixing nut, the motor rotates the rotating body 66, allowing the fixing nut for fixing the cutting blade 36 to the spindle of the cutting device to be screwed onto and unscrewed from the male thread formed at the tip of the spindle.

[0044] Furthermore, when unscrewing (removing) the fixing nut from the spindle, even if the position of the pin 72 of the fixing nut holding part 50 and the position of the pin hole of the fixing nut are misaligned, if the end face 66a of the rotating body 66 is positioned on the end face of the fixing nut mounted on the spindle, and the pin 72 is housed inside the rotating body 66, and then the rotating body 66 is rotated by the motor, the spring will push out the pin 72 when its position aligns with the position of the pin hole, and the pin 72 will be inserted into the pin hole.

[0045] (Correction jig holding part 142) As shown in Figure 7, the correction jig holder 142 in the illustrated embodiment is provided in pairs on both sides of the bending arm 112, which will be described later. The correction jig holder 142 includes a fixing piece 144 fixed to the bending arm 112, a lifting means 146 connected to the lower surface of the fixing piece 144, a holding plate 148 connected to the lower end of the lifting means 146, and a plurality of suction pads 150 attached to the lower surface of the holding plate 148. The lifting means 146 may be composed of an appropriate actuator such as an air cylinder. Each suction pad 150 is connected to a suction means (not shown).

[0046] In the repair jig holding section 142, the lifting means 146 lowers the holding plate 148 to bring the suction pad 150 into contact with the repair jig 132 stored in the repair jig storage means 5, and the suction means generates a suction force on the suction pad 150 so that the repair jig 132 is held in place by the suction pad 150.

[0047] (Judgment means 152) The loading / unloading means 6 in the illustrated embodiment also includes a determination means 152 that detects the state of the support end face of the fixed flange when the cutting blade 36 is not attached and determines whether or not the support end face of the fixed flange needs to be modified. As shown in Figure 6, the determination means 152 can be mounted on the side wall 56 of the casing 52. One determination means 152 is sufficient on the side wall 56 where the blade holding portion 48 is provided, but one may be provided on each of a pair of opposing side walls 56 (a total of two).

[0048] Examples of the determination means 152 include a laser displacement meter capable of non-contact detection of irregularities on the support end face of the fixed flange. Although not shown in the figures, the determination means 152 is connected wirelessly or via a wire to the control means (computer) of the automatic exchange device 2, and the information detected by the determination means 152 is transmitted to the control means.

[0049] As described above, the loading / unloading means 6 is arranged inside the frame 74 in the illustrated embodiment, as shown in Figure 1. The frame 74 is supported by the lifting table 76 so as to be movable in the Y-axis direction, and the lifting table 76 is supported by the base frame 78 so as to be movable up and down in the Z-axis direction.

[0050] (Frame 74) Referring to Figures 7 and 8, the frame 74 includes a rectangular plate-shaped bottom 80, four support columns 82 extending upward from the four corners of the top surface of the bottom 80, and a plate-shaped ceiling portion 83 (see Figure 7) fixed to the upper end of each support column 82. The top surface of the bottom 80 is provided with a moving mechanism 84 for moving the repair jig storage means 5 in the Y-axis direction, and a pair of guide rails 85 extending in the Y-axis direction at intervals in the X-axis direction. The pair of guide rails 85 are slidably fitted into grooves 130b of the tray 130 of the repair jig storage means 5. On the lower surface of the bottom 80, a pair of guide members 86, each having a groove 86a extending in the Y-axis direction, are provided at intervals in the X-axis direction.

[0051] The moving mechanism 84 moves the tray 130 of the repair jig storage means 5 in the Y-axis direction along a pair of guide rails 85, positioning the repair jig 132 or dressing board 134 in a position where it can be held by the repair jig holding part 142. Although Figures 7 and 8 show an example in which the moving mechanism 84 is composed of a linear motor, the moving mechanism 84 may also be configured to have a ball screw.

[0052] (Height-adjustable table 76) As shown in Figure 8, the lifting table 76 includes a rectangular top plate 88 and four cylindrical legs 90 extending downward from the four corners of the lower surface of the top plate 88. A pair of guide rails 92 are provided on the upper surface of the top plate 88, spaced apart in the X-axis direction and extending in the Y-axis direction. The pair of guide rails 92 are slidably fitted into grooves 86a of a pair of guided members 86 of the frame 74.

[0053] (Y-axis positioning means 8) Furthermore, a Y-axis positioning means 8 is provided on the upper surface of the tabletop 88 of the lifting table 76. The Y-axis positioning means 8 includes a ball screw 94 extending in the Y-axis direction between a pair of guide rails 92, and a motor 96 that rotates the ball screw 94. The nut portion (not shown) of the ball screw 94 is fixed to the lower surface of the bottom 80 of the frame 74.

[0054] In the Y-axis positioning means 8, a ball screw 94 converts the rotational motion of the motor 96 into linear motion and transmits it to the frame 74, moving the frame 74 along a pair of guide rails 92 in the Y-axis direction. In this way, the frame 74 on which the loading / unloading means 6 is installed is slidably supported by the guide rails 92 extending in the Y-axis direction, which are installed on the lifting table 76, and is positioned by the Y-axis positioning means 8 in the Y-axis working position and retracted position relative to the cutting blade storage means 4.

[0055] The above-mentioned operating position is a position in which the blade holding portion 48 of the loading / unloading means 6 is close to the cutting blade storage means 4, and the cutting blade 36 supported by the cutting blade storage means 4 can be held by suction from the blade holding portion 48. The above-mentioned retracted position is a position in which the blade holding portion 48 of the loading / unloading means 6 is further away from the cutting blade storage means 4 than the above-mentioned operating position.

[0056] (Base frame 78) As shown in Figure 8, the base frame 78 includes a frame 98 and a rectangular base plate 100 fixed to the top of the frame 98. Four circular holes 102 are formed at the four corners of the base plate 100 into which the legs 90 of the lifting table 76 are slidably inserted. In addition, a female screw 104 is formed in the center of the base plate 100.

[0057] (Z-axis moving means 10) Continuing the explanation with reference to Figure 8, the Z-axis moving mechanism 10 is connected to the lifting table 76 and the base frame 78. The Z-axis moving mechanism 10 includes a ball screw 106 extending in the Z-axis direction, a motor 108 that rotates the ball screw 106, and a connecting plate 110 fixed to the upper end of the motor 108. The ball screw 106 is screwed into a female screw 104 of the base plate 100. The connecting plate 110 is fixed to the underside of the top plate 88 of the lifting table 76 by appropriate connecting means such as bolts (not shown).

[0058] In the Z-axis moving mechanism 10, the rotational motion of the motor 108 is converted into linear motion by a ball screw 106, and the lifting table 76 is raised and lowered relative to the base frame 78, thereby moving the frame 74 on which the loading and unloading mechanism 6 is installed in the Z-axis direction.

[0059] (X-axis moving means 12) Referring to Figure 7, the X-axis moving means 12 includes a bendable arm 112 mounted on the frame 74, and a first motor 114 and a second motor 115 for operating the bendable arm 112. The bendable arm 112 has a first arm piece 118 that is pivotably connected to the lower surface of the ceiling portion 83 of the frame 74 via a spacer 116, and a second arm piece 120 that is pivotably connected to the lower surface of the first arm piece 118.

[0060] Spacer 116 is positioned at one end of the first arm piece 118. The first arm piece 118 is connected to the ceiling portion 83 with the spacer 116 side as the pivot point. Spacer 122 is also provided on the upper surface of the other end of the first arm piece 118. The second arm piece 120 is connected to the first arm piece 118 with the spacer 122 side as the pivot point.

[0061] A circular hole (not shown) is provided at the tip of the second arm piece 120 (the end opposite to the spacer 122). The Z rotation axis 46 of the loading / unloading means 6 is inserted into this circular hole, and the Z rotation axis 46 is fixed to the second arm piece 120 in a non-rotatable manner. When the motor of the loading / unloading means 6, which is connected to the Z rotation axis 46, is driven, the casing 52 of the loading / unloading means 6 rotates relative to the second arm piece 120, and the blade holding part 48 and the fixing nut holding part 50 are positioned in any orientation. In addition, a pair of correction jig holding parts 142 of the loading / unloading means 6 are attached to the second arm piece 120 of the bending arm 112. Thus, the loading / unloading means 6 is connected to the bending arm 112 of the X-axis moving means 12 and is disposed on the frame 74 via the bending arm 112.

[0062] In the X-axis moving mechanism 12, the first motor 114 swings the first arm piece 118 with the spacer 116 side as the pivot point, and the second motor 115 swings the second arm piece 120 with the spacer 122 side as the pivot point, thereby bending or extending the bending arm 112 and moving the loading / unloading mechanism 6 in the X-axis direction.

[0063] Next, with reference to Figures 9 to 13, the cutting device 170 to which the above-mentioned automatic exchange device 2 is connected will be described.

[0064] (Cutting device 170) As shown in Figure 9, the cutting apparatus 170 comprises a chuck table 172 having a holding surface for holding a workpiece, a cutting means 174 to which a cutting blade 36 for cutting the workpiece held on the chuck table 172 is attached with a fixing nut, an X-axis feed means 176 for feeding the chuck table 172 in the X-axis direction, a Y-axis feed means 178 for indexing and feeding the cutting means 174 in the Y-axis direction perpendicular to the X-axis direction, and a Z-axis feed means 180 for cutting and feeding the cutting means 174 in the Z-axis direction perpendicular to the X-axis and Y-axis directions.

[0065] (Chuck table 172) Referring to Figures 9 and 10, the cutting device 170 comprises an X-axis movable plate 184 mounted on the upper surface of a base 182 (see Figure 9) so as to be movable in the X-axis direction, a support column 186 fixed to the upper surface of the X-axis movable plate 184, and a cover plate 188 fixed to the upper end of the support column 186. A circular opening 188a is formed in the cover plate 188. The chuck table 172 is rotatably mounted on the upper end of the support column 186 and extends upward through the circular opening 188a of the cover plate 188. The chuck table 172 is rotated about the Z-axis direction by a motor (not shown) built into the support column 186.

[0066] As shown in Figure 10, a porous, circular suction chuck 190 connected to a suction means (not shown) is positioned at the upper end of the chuck table 172. In the chuck table 172, the suction means generates a suction force on the upper surface of the suction chuck 190, thereby suctioning and holding the workpiece placed on the upper surface of the suction chuck 190.

[0067] In this chuck table 172, the upper surface of the suction chuck 190 serves as the holding surface for the workpiece, and the holding surface is positioned on the XY plane defined by the X-axis and Y-axis directions. In addition, multiple clamps 192 are arranged around the periphery of the chuck table 172 at intervals in the circumferential direction.

[0068] Continuing the explanation with reference to Figure 10, a pair of rectangular sub-chuck tables 194 are arranged on the upper surface of the cover plate 188, spaced apart in the Y-axis direction. Multiple suction holes 196 connected to a suction means (not shown) are formed on the upper surface of each sub-chuck table 194. In the sub-chuck tables 194, the suction means generates a suction force in each suction hole 196, thereby suction-holding the correction jig 132 or dressing board 134 that has been held and brought in by the correction jig holding unit 142.

[0069] (X-axis feed mechanism 176) As shown in Figure 10, the X-axis feed mechanism 176 includes a ball screw 198 connected to the X-axis movable plate 184 and extending in the X-axis direction, and a motor 200 that rotates the ball screw 198. The X-axis feed mechanism 176 converts the rotational motion of the motor 200 into linear motion using the ball screw 198 and transmits it to the X-axis movable plate 184, moving the X-axis movable plate 184 along the guide rail 182a of the base 182, and simultaneously feeding the chuck table 172 in the X-axis direction for machining.

[0070] As shown in Figure 9, the cutting apparatus 170 includes a gate-shaped frame 202 positioned across the chuck table 172. The frame 202 has a pair of support columns 204 that extend upward from the upper surface of the base 182 at intervals in the Y-axis direction, and a beam 206 that spans between the upper ends of the pair of support columns 204 and extends in the Y-axis direction.

[0071] (Cutting means 174) The cutting means 174 are provided in pairs on one side of the beam 206 (the side facing the back in Figure 9) at intervals in the Y-axis direction. In the illustrated embodiment of the cutting device 170, a pair of cutting means 174 are provided so that the cutting blades 36 face each other, allowing the workpiece held in the chuck table 172 to be cut simultaneously by the pair of cutting blades 36. Note that there may be only one cutting means 174.

[0072] As shown in Figure 11, each cutting means 174 includes a rectangular Y-axis movable member 208 supported on one side of the beam 206 so as to be movable in the Y-axis direction, an L-shaped Z-axis movable member 210 supported on the Y-axis movable member 208 so as to be able to move up and down in the Z-axis direction, and a spindle housing 212 fixed to the lower end of the Z-axis movable member 210.

[0073] A pair of guide grooves 208a extending in the Y-axis direction are formed on one side of the Y-axis movable member 208 (the side facing forward in Figure 11), spaced apart in the Z-axis direction. The guide grooves 208a are slidably connected to a pair of guide rails (not shown) extending in the Y-axis direction, spaced apart vertically on one side of the beam 206.

[0074] (Y-axis feed mechanism 178) The Y-axis feed mechanism 178 includes a ball screw 214 extending in the Y-axis direction on one side of the beam 206, and a motor 216 that rotates the ball screw 214. The ball screw 214 is connected to a Y-axis movable member 208. The Y-axis feed mechanism 178 converts the rotational motion of the motor 216 into linear motion using the ball screw 214 and transmits it to the Y-axis movable member 208, indexing and feeding the Y-axis movable member 208 in the Y-axis direction along a guide rail attached to one side of the beam 206.

[0075] On the other side of the Y-axis movable member 208 (the side facing the back in Figure 11), a pair of guide rails (not shown) are formed, spaced apart in the Y-axis direction and extending in the Z-axis direction. The Z-axis movable member 210 has a pair of guided grooves (not shown) that are slidably connected to the pair of guide rails of the Y-axis movable member 208.

[0076] (Z-axis feed mechanism 180) The Z-axis feed mechanism 180 includes a ball screw (not shown) connected to the Z-axis movable member 210 and extending in the Z-axis direction, and a motor 218 that rotates this ball screw. The Z-axis feed mechanism 180 converts the rotational motion of the motor 218 into linear motion using the ball screw and transmits it to the Z-axis movable member 210, thereby cutting and feeding the Z-axis movable member 210 in the Z-axis direction along the guide rail of the Y-axis movable member 208.

[0077] Referring to Figure 12, the spindle housing 212 supports a cylindrical spindle 220 that is rotatable about the Y-axis, and also houses a motor (not shown) that rotates the spindle 220. A cutting blade 36 for cutting the workpiece is detachably fixed to the tip of the spindle 220 by a fixing nut 222.

[0078] A blade cover 224 is mounted on the tip of the spindle housing 212 to cover the cutting blade 36. The blade cover 224 has a first cover member 224a fixed to the tip of the spindle housing 212 and a second cover member 224b that is movably mounted on the tip of the first cover member 224a. The second cover member 224b is moved in the X-axis direction by an appropriate actuator (not shown), such as an air cylinder, and is positioned in the open position shown in Figure 12 when the cutting blade 36 is replaced, and in the closed position shown in Figure 11 when cutting is performed.

[0079] As shown in Figure 13, an annular fixing flange 226 is provided on the outer circumferential surface of the tip side of the spindle 220, projecting radially outward. An annular recess 226a is formed on the radially inward portion of the tip surface of the fixing flange 226, and the outer circumferential portion of the tip surface of the fixing flange 226 is an annular support end face 226b projecting axially. Furthermore, a male screw 228 is formed on the outer circumferential surface of the spindle 220 further towards the tip than the fixing flange 226.

[0080] Then, the central opening 38a of the cutting blade 36 is fitted to the tip of the spindle 220, and the male thread 228 of the spindle 220 and the fixing nut 222 are screwed (fastened) together, so that the cutting blade 36 is sandwiched between the support end face 226b of the fixing flange 226 and the fixing nut 222, and is detachably fixed to the tip of the spindle 220. In addition, multiple pin holes 222a are formed on the side surface of the fixing nut 222 at equal intervals in the circumferential direction, into which the pin 72 of the fixing nut holding part 50 of the loading / unloading means 6 is inserted.

[0081] As shown in Figure 9, a pair of imaging means 230 for imaging a workpiece held by the chuck table 172 is mounted on the other side of the beam 206 of the frame 202 (the side facing forward in Figure 9) so as to be movable in the Y-axis direction, and a pair of moving means 232 for moving the imaging means 230 in the Y-axis direction is also mounted.

[0082] The moving means 232 includes a ball screw 234 extending in the Y-axis direction on the other side of the beam 206, and a motor 236 that rotates the ball screw 234. The ball screw 234 is connected to the imaging means 230. The moving means 232 converts the rotational motion of the motor 236 into linear motion and transmits it to the imaging means 230, moving the imaging means 230 in the Y-axis direction along the guide rail 206a attached to the other side of the beam 206. Note that there may be only one imaging means 230.

[0083] (cutting) When performing cutting on a workpiece such as a wafer using the cutting device 170, first, the workpiece is picked up by suction onto the chuck table 172. Next, the chuck table 172 is moved below the imaging device 230 using the X-axis feed means 176, and the Y-axis position of the imaging device 230 is adjusted using the moving means 232. Then, the imaging device 230 images the workpiece from above to detect the cutting area of ​​the workpiece.

[0084] Next, based on the cutting area of ​​the workpiece detected by the imaging means 230, the chuck table 172 is rotated to adjust the orientation of the cutting area of ​​the workpiece relative to the cutting blades 36 of the cutting means 174. Then, the chuck table 172 is moved in the X-axis direction by the X-axis feed means 176, and the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed means 178, to position the pair of cutting blades 36 above the cutting area of ​​the workpiece.

[0085] Next, the Z-axis feed mechanism 180 lowers the spindle housing 212, causing the cutting edge 40 of the rapidly rotating cutting blade 36 to cut into the cutting area of ​​the workpiece. At the same time, cutting fluid is supplied to the portion of the cutting edge 40 of the cutting blade 36 that is cutting, and the chuck table 172 is fed in the X-axis direction to perform a predetermined cutting operation on the cutting area of ​​the workpiece. The Y-axis feed mechanism 178 indexes and feeds the spindle housing 212 in the Y-axis direction, and the above cutting operation is repeated as needed to perform cutting on the entire cutting area of ​​the workpiece. After the cutting process is completed, the cut workpiece is transported to the next process.

[0086] (Replacement of cutting blade 36) When the cutting process is performed repeatedly, the cutting blade 36 wears down, and when the wear of the cutting blade 36 reaches a predetermined amount, the cutting accuracy can no longer be maintained, so it is necessary to replace the cutting blade 36 mounted on the spindle 220 with a new cutting blade 36. In addition, even if the wear of the cutting blade 36 mounted on the spindle 220 has not reached a predetermined amount, when cutting a workpiece made of a different material than the workpiece that was previously cut, it may be necessary to replace the cutting blade 36 with one that is appropriate for the material of the workpiece.

[0087] In the illustrated embodiment, as shown in Figure 14, an automatic blade exchange device 2 capable of automatically replacing the cutting blade 36 of the cutting device 170 is connected to the cutting device 170. The method for replacing the cutting blade 36 using the automatic blade exchange device 2 will be described below.

[0088] As shown in Figure 14, the automatic replacement device 2 is located on the rear side in the X-axis direction of the cutting device 170, and can be installed later on the cutting device 170 that has already been delivered to the user. When replacing the cutting blade 36 installed in the cutting device 170 using the automatic replacement device 2, first, the endless track 22 of the cutting blade storage means 4 is rotated to position the blade support shaft 24 that supports the new cutting blade 36 to be brought into the cutting device 170 at a predetermined position (for example, the lowest end position in the track of the blade support shaft 24).

[0089] Next, as shown in Figure 15, the casing 52 is rotated by a motor connected to the Z rotation axis 46 of the loading / unloading means 6, so that the side wall 56 of the casing 52, to which the blade holding part 48 is mounted, is aligned in the X-axis direction, and the blade holding part 48 faces the cutting blade storage means 4.

[0090] Furthermore, the X-axis moving means 12 and the Z-axis moving means 10 are activated to adjust the X-axis and Z-axis positions of the blade holding part 48 so that the shaft portion 34 of the blade support shaft 24 at the predetermined position can be inserted into the central opening 60 (see Figure 6) of the blade holding part 48.

[0091] Next, as shown in Figure 16, the Y-axis positioning means 8 moves the frame 74 in the Y-axis direction, positioning the loading / unloading means 6 to an operating position where the cutting blade 36 supported by the blade support shaft 24 can be held by the blade holding part 48. This inserts the shaft portion 34 of the blade support shaft 24 at the predetermined position into the central opening 60 of the blade holding part 48, and brings the end face 58 of the blade holding part 48 into contact with the end face of the cutting blade 36 located on the tip side of the shaft portion 34. Next, a suction force is generated in the suction hole 61 of the blade holding part 48, and the cutting blade 36 located on the tip side of the shaft portion 34 is held by the blade holding part 48 through suction.

[0092] Next, the Y-axis positioning means 8 is activated to move the loading / unloading means 6 away from the cutting blade storage means 4 in the Y-axis direction and position it in a retracted position. Then, the casing 52 of the loading / unloading means 6 is rotated 180° so that the blade holding part 48 opposite to the blade holding part 48 that holds the cutting blade 36 by suction faces the cutting blade storage means 4.

[0093] Next, the Y-axis positioning means 8 is activated to position the loading / unloading means 6 in an operating position where the blade holding part 48 on the opposite side can hold the cutting blade 36 of the blade support shaft 24. Then, a suction force is generated in the suction hole 61 of the blade holding part 48 on the opposite side, and the cutting blade 36 located on the tip side of the shaft part 34 is held in place by the blade holding part 48. As a result, a new cutting blade 36 is held in place by a pair of opposing blade holding parts 48 out of the four blade holding parts 48.

[0094] Next, as shown in Figure 17, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the lifting table 76 is moved in the Z-axis direction by the Z-axis moving means 10. This separates the loading / unloading means 6 from the cutting blade storage means 4 and positions it in a retracted position, while also adjusting the Y-axis and Z-axis positions of the loading / unloading means 6 relative to the cutting device 170. After position adjustment, the Y-axis position of the loading / unloading means 6 is between the pair of cutting means 174 of the cutting device 170, and the Z-axis position of the loading / unloading means 6 after position adjustment is above the holding surface of the chuck table 172.

[0095] Next, as shown in Figure 18, the loading / unloading means 6 is moved in the X-axis direction by the X-axis moving means 12 to adjust the X-axis position of the loading / unloading means 6 relative to the pair of cutting means 174. Specifically, the X-axis position of the center of the new pair of cutting blades 36 held by the pair of blade holding parts 48 of the loading / unloading means 6 is aligned with the X-axis position of the center of the pair of cutting blades 36 mounted on the pair of cutting means 174.

[0096] Furthermore, the Z-axis moving means 10 of the automatic exchange device 2 or the Z-axis feeding means 180 of the cutting device 170 is activated to align the Z-axis position of the center of the cutting blade 36 of the blade holding part 48 with the Z-axis position of the center of the cutting blade 36 of the cutting means 174.

[0097] Next, the casing 52 of the loading / unloading means 6 is rotated 60° so that the pair of fixing nut holding parts 50 face the cutting blades 36 of the pair of cutting means 174. Alternatively, the casing 52 may be rotated 60° before moving the loading / unloading means 6 forward.

[0098] Next, the second cover member 224b of each blade cover 224 of the pair of cutting means 174 is positioned in the open position (see Figure 12). Then, the cutting means 174 is moved in the Y-axis direction by the Y-axis feed means 178 of the cutting device 170, so that the fixing nut 222 that secures the cutting blade 36 to the spindle 220 comes into contact with the end face 66a of the rotating body 66 of the fixing nut holder 50. As a result, the pin 72 of the fixing nut holder 50 is pushed by the fixing nut 222 and housed inside the rotating body 66, and the tip of the spindle 220 is housed in the central opening 68 of the rotating body 66.

[0099] Next, when the motor of the fixing nut holding part 50 rotates the rotating body 66, each pin 72 aligns with the pin hole 222a of the fixing nut 222. At this point, each pin 72 engages with the pin hole 222a, and the rotational motion of the rotating body 66 is transmitted to the fixing nut 222 via each pin 72, causing the fixing nut 222 to loosen. This allows the fixing nut 222 to be unscrewed (removed) from the male thread 228 of the spindle 220 of the cutting means 174. Additionally, a suction force is generated in each suction hole 70 of the fixing nut holding part 50, and the removed fixing nut 222 is held in place by the fixing nut holding part 50.

[0100] Next, the Y-axis feed mechanism 178 separates the cutting mechanism 174 from the loading / unloading mechanism 6, and rotates the casing 52 of the loading / unloading mechanism 6 by 60°, so that the empty blade holding portion 48, which does not hold the cutting blade 36 by suction, faces the cutting blade 36 of the cutting mechanism 174.

[0101] Next, the Y-axis feed mechanism 178 brings the cutting mechanism 174 closer to the loading / unloading mechanism 6, inserting the spindle 220 of the cutting mechanism 174 into the central opening 60 of the blade holder 48, and bringing the end face 58 of the empty blade holder 48 into contact with the end face of the cutting blade 36 of the cutting mechanism 174. Then, a suction force is generated in the suction hole 61 of the blade holder 48, and the cutting blade 36 of the cutting mechanism 174 is held in place by the blade holder 48.

[0102] Next, the Y-axis feed mechanism 178 separates the cutting mechanism 174 from the loading / unloading mechanism 6, and rotates the casing 52 of the loading / unloading mechanism 6 by 60°, so that the blade holding part 48, which holds the new cutting blade 36 by suction, faces the spindle 220 of the cutting mechanism 174.

[0103] Next, the Y-axis feed mechanism 178 moves the cutting mechanism 174 closer to the loading / unloading mechanism 6, inserting the spindle 220 into the central opening 38a of the new cutting blade 36, and bringing the end face of the cutting blade 36 into contact with the support end face 226b of the fixed flange 226 of the spindle 220. Then, the suction force of the blade holder 48 is released, and the new cutting blade 36 is transferred from the blade holder 48 to the spindle 220.

[0104] Next, the Y-axis feed mechanism 178 separates the cutting mechanism 174 from the loading / unloading mechanism 6, and rotates the casing 52 of the loading / unloading mechanism 6 by 60°, so that the fixing nut holding part 50, which holds the removed fixing nut 222 by suction, faces the spindle 220 of the cutting mechanism 174.

[0105] Next, the Y-axis feed mechanism 178 moves the cutting mechanism 174 closer to the loading / unloading mechanism 6, and the fixing nut 222, which is held by the fixing nut holding part 50, is fitted onto the tip of the spindle 220. Then, the motor of the fixing nut holding part 50 is operated in the opposite direction to when the fixing nut 222 was removed, and the fixing nut 222 is rotated, screwing (fastening) the fixing nut 222 onto the male thread 228 of the spindle 220.

[0106] This allows the new cutting blade 36 to be attached to the cutting means 174 to be sandwiched between the support end face 226b of the fixing flange 226 of the spindle 220 and the fixing nut 222, thereby fixing it to the spindle 220.

[0107] Next, after releasing the suction force of the fixing nut holding part 50, the second cover member 224b of the blade cover 224 of the cutting means 174 is positioned in the closed position. The removal and installation of the fixing nut 222 and the cutting blade 36 as described above may be performed simultaneously or separately for the pair of cutting means 174.

[0108] Next, the loading / unloading mechanism 6 is retracted, and the casing 52 of the loading / unloading mechanism 6 is rotated by 60°, so that one of the removed cutting blades 36 faces the cutting blade storage mechanism 4. In addition, the endless track 22 of the cutting blade storage mechanism 4 is rotated to position the empty blade support shaft 24, which does not support the cutting blades 36, in a predetermined position (for example, the lowest end position in the track of the blade support shaft 24).

[0109] Next, the X-axis moving means 12 and the Z-axis moving means 10 are activated to adjust the X-axis and Z-axis positions of the blade holding part 48 so that the shaft portion 34 of the blade support shaft 24 at the predetermined position can be inserted into the central opening 38a of one of the cutting blades 36 that is held by suction in the blade holding part 48.

[0110] Next, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the shaft portion 34 of the blade support shaft 24 at the predetermined position is inserted into the central opening 38a of one of the cutting blades 36 that is being held by the blade holding portion 48, and the end face of one of the cutting blades 36 is brought into contact with the end face of the base portion 32 of the blade support shaft 24. Then, the suction force of the blade holding portion 48 is released, and one of the removed cutting blades 36 is transferred to the blade support shaft 24.

[0111] Furthermore, the Y-axis positioning means 8 separates the loading / unloading means 6 from the cutting blade storage means 4, and rotates the casing 52 of the loading / unloading means 6 by 180° so that the blade holding portion 48 on the opposite side, which is suction-holding the other of the pair of removed cutting blades 36, faces the cutting blade storage means 4.

[0112] Next, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the shaft portion 34 of the blade support shaft 24 at the predetermined position is inserted into the central opening 38a of the other cutting blade 36 which is held in suction by the blade holding portion 48 on the opposite side, and the end face of the other cutting blade 36 is brought into contact with the end face of the cutting blade 36 supported by the blade support shaft 24. Then, the suction force of the blade holding portion 48 is released, and the other of the removed pair of cutting blades 36 is transferred to the blade support shaft 24.

[0113] Thus, in the illustrated embodiment of the automatic replacement device 2, it can be attached to the cutting device 170 that has already been delivered to the user, and the cutting blade 36 attached to the cutting means 174 of the cutting device 170 can be replaced.

[0114] (Modification of the support end face 226b of the fixed flange 226) Next, we will describe the case in which the correction jig 132 is loaded into the cutting device 170. In this case, first, the X-axis position of the correction jig holder 142 is adjusted by the bending arm 112, and the Y-axis position of the correction jig storage means 5 is adjusted by the moving mechanism 84, so that the correction jig holder 142 is positioned above the correction jig 132 stored in the correction jig storage means 5.

[0115] Next, the lifting mechanism 146 lowers the holding plate 148, bringing the suction pad 150 into contact with the upper surface of the base plate 136 of the repair jig 132 stored in the repair jig storage mechanism 5. Then, the suction mechanism generates suction force on the suction pad 150, holding the repair jig 132 by suction. Next, the lifting mechanism 146 raises the repair jig 132, which is being held by the suction pad 150.

[0116] Next, the Y-axis positioning means 8 and the Z-axis moving means 10 adjust the Y-axis and Z-axis positions of the correction jig holder 142 relative to the cutting device 170. Then, the X-axis moving means 12 advances the correction jig holder 142 toward the cutting device 170, positioning the correction jig 132, which is held by the suction pad 150, above the sub-chuck table 194.

[0117] Next, the correction jig 132 is lowered, and the lower surface of the substrate 136 of the correction jig 132 is brought into contact with the upper surface of the sub-chuck table 194. Then, as shown in Figure 19, a suction force is generated in the suction hole 196 of the sub-chuck table 194, and the correction jig 132 is held in place by the sub-chuck table 194, while the suction force of the suction pad 150 of the correction jig holding unit 142 is released. In this way, the correction jig 132 is transferred from the correction jig holding unit 142 of the automatic exchange device 2 to the sub-chuck table 194 of the cutting device 170. Although Figure 19 shows an example of loading one correction jig 132 into the cutting device 170, a pair of correction jigs 132 may be loaded simultaneously.

[0118] Once the repair jig 132 is loaded into the cutting device 170, the blade holding part 48 and the fixing nut holding part 50 of the loading / unloading means 6 remove the fixing nut 222 and the cutting blade 36 from the spindle 220 of the cutting means 174. Then, the Z-axis feed means 180 is activated to bring the support end face 226b of the fixing flange 226 of the spindle 220 facing the sensor 140 of the repair jig 132.

[0119] Then, the spindle 220 is rotated at a low speed (lower than in the case of cutting), and the state of the support end face 226b of the fixed flange 226 during rotation is detected by the sensor 140. Specifically, the sensor 140 measures the unevenness of the support end face 226b and detects whether the difference between the concave and convex parts of the support end face 226b is greater than or equal to a predetermined value.

[0120] If the difference between the recess and protrusion of the support end face 226b is greater than or equal to a predetermined value, it is determined that there is dirt or scratches on the support end face 226b that need to be removed, and the support end face 226b of the fixed flange 226 is modified. On the other hand, if the above difference is less than the predetermined value, it is determined that there is no dirt or scratches on the support end face 226b that need to be removed, and the modification of the support end face 226b is not performed. In this way, by detecting the state of the support end face 226b with the sensor 140 of the modification jig 132, unnecessary end face modification can be eliminated (or reduced).

[0121] To repair the support end face 226b, as shown in Figure 20, the spindle 220 is rotated in the direction indicated by arrow R, and the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed means 178, so that the support end face 226b of the fixed flange 226 of the spindle 220 comes into contact with the polishing part 138 of the repair jig 132. This allows the support end face 226b of the fixed flange 226 to be polished by the polishing part 138, and dirt or scratches can be removed from the support end face 226b.

[0122] When polishing the support end face 226b, the sensor 140 detects the state of the support end face 226b, and when the difference between the concave and convex portions of the support end face 226b falls below a predetermined value, the polishing of the support end face 226b is terminated. This prevents over-polishing of the support end face 226b.

[0123] The above-mentioned modification of the support end face 226b may be performed simultaneously or separately on a pair of cutting means 174 by loading a pair of modification jigs 132 into the cutting device 170.

[0124] As described above, the loading / unloading means 6 in the illustrated embodiment has a determination means 152 that detects the state of the support end face 226b when the cutting blade 36 is not attached and determines whether or not the support end face 226b needs to be modified. Therefore, when the cutting blade 36 is removed from the cutting device 170 for replacement, the determination means 152 of the loading / unloading means 6 may determine whether or not the support end face 226b needs to be modified. This makes it possible to determine whether or not the support end face 226b needs to be modified without loading the modification jig 132 into the cutting device 170.

[0125] As described above, even if the support end face 226b of the fixed flange 226 becomes dirty or scratched, the automatic replacement device 2 of the illustrated embodiment can remove the dirt and scratches from the support end face 226b by polishing it with the correction jig 132. Therefore, it is possible to prevent misalignment between the rotation center of the cutting blade 36 and the rotation axis of the spindle 220. In addition, by detecting the condition of the support end face 226b with the sensor 140 or determination means 152 of the correction jig 132, unnecessary polishing can be eliminated (or reduced).

[0126] In the illustrated embodiment, since the dressing board 134 is stored in the correction jig storage means 5, the dressing board 134 can be loaded into the cutting device 170 by the correction jig holding part 142 of the loading / unloading means 6, similar to how the correction jig 132 is loaded into the cutting device 170, and the dressing board 134 can be held in place by suction on the sub-chuck table 194. Then, the dressing board 134 can be used to perform dressing (sharpening) to correct the cutting edge 40 of the cutting blade 36.

[0127] When performing dressing, first, the cutting blade 36 attached to the cutting means 174 is positioned above the dressing board 134, which is held in place by suction on the sub-chuck table 194. Next, the cutting blade 36 is rotated, and the spindle housing 212 is lowered by the Z-axis feed means 180, so that the cutting edge 40 of the cutting blade 36 cuts the dressing board 134. This allows the cutting edge 40 to be dressed (sharpened). [Explanation of symbols]

[0128] 2: Automatic exchange device 4: Cutting blade storage means 5: Correction jig storage means 6: Carrying in / out means 8: Y-axis positioning means 10:Z-axis movement means 12:X-axis movement means 36: Cutting blade 46: Z rotation axis 48: Blade holder 50: Fixing nut holding part 74:Frame body 76: Height-adjustable table 92: Guide rail (for height-adjustable table) 112: Flexible arm 132: Correction jig 138: Polishing section 140: Sensor 142: Correction jig holding part 152: Judgment means 170: Cutting equipment 172: Chuck Table 174:Cutting means 176: X-axis feed mechanism 178: Y-axis feed mechanism 180: Z-axis feed mechanism 194: Sub-chuck table 220: Spindle 222: Fixing nut 226: Fixed flange 226b: Support end surface

Claims

1. An automatic exchange device connected to a cutting machine, comprising: a chuck table having a holding surface for holding a workpiece; a cutting means for cutting a workpiece held on the chuck table with a fixing nut attached to a cutting blade; an X-axis feed means for feeding the chuck table in the X-axis direction; a Y-axis feed means for indexing and feeding the cutting means in the Y-axis direction perpendicular to the X-axis direction; and a Z-axis feed means for cutting and feeding the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, wherein the holding surface is positioned on an XY plane defined in the X-axis and Y-axis directions, The cutting blade storage means for storing multiple cutting blades, the correction jig storage means for storing a correction jig for correcting the support end face of a fixed flange formed at the tip of the spindle of the cutting means and supporting the cutting blade, and the loading / unloading means for loading and unloading cutting blades from the cutting blade storage means and the correction jig from the correction jig storage means, The repair jig has a polishing section for removing dirt or scratches from the support end face and a sensor for detecting the condition of the support end face. The sensor is an automatic replacement device positioned to detect the condition of the support end face when the support end face of the fixed flange is being corrected by the polishing section.

2. The automatic replacement device according to Claim 1, wherein, while polishing the support end face, the sensor detects the state of the support end face, and when the difference between the recess and the protrusion of the support end face falls below a predetermined value, the correction of the support end face is terminated.

3. A Y-axis positioning means for positioning the loading / unloading means in an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means; a Z-axis moving means for moving the loading / unloading means in the Z-axis direction; and an X-axis moving means for moving the loading / unloading means in the X-axis direction to act on a cutting blade mounted on the spindle of the cutting means, The automatic exchange device according to claim 1, wherein the loading and unloading means includes a Z rotation axis extending in the Z axis direction, a blade holding part radially connected to the Z rotation axis and holding a cutting blade by suction, a fixing nut holding part for screwing and unscrewing the fixing nut onto a male thread formed at the tip of the spindle, and a fixing jig holding part for holding the fixing jig.

4. The automatic exchange device according to claim 1, wherein the loading and unloading means is further comprising a determination means for detecting the state of the support end face when a cutting blade is not attached and determining whether or not correction of the support end face is necessary.

5. A Y-axis positioning means for positioning the loading / unloading means in an operating position and a retracted position in the Y-axis direction relative to the cutting blade storage means; a Z-axis moving means for moving the loading / unloading means in the Z-axis direction; and an X-axis moving means for moving the loading / unloading means in the X-axis direction to act on a cutting blade mounted on the spindle of the cutting means, The automatic exchange device according to claim 1, wherein the loading and unloading means is disposed on a frame via a bent arm of the X-axis moving means, the frame is slidably supported on a guide rail extending in the Y-axis direction disposed on a lifting table, and the Y-axis positioning means positions the cutting blade storage means in the Y-axis direction to the working position and the retracted position.

6. The automatic exchange device according to claim 5, wherein the loading / unloading means comprises a fixing jig holding part for holding the fixing jig, and the fixing jig is loaded into and unloaded from the fixing jig storage means to a sub-chuck table disposed adjacent to the chuck table by movement of the bending arm in the X-axis direction.

Images