Implementation structure of a micro-vibration body

Abstract

To provide a mounting structure mounted with a micro-vibration body having a 3D curved surface on a mounting board constituted of different materials capable of reducing temperature fluctuations in distance between the surface electrode and mounting board electrode of the micro-vibration body opposing to each other.SOLUTION: A mounting board 3 with a micro-vibration body 2 mounted thereon includes a first substrate 4 and a second substrate 7 that are bonded to each other. The first substrate 4 is constituted of a material with a linear expansion coefficient higher than that of the micro-vibration body 2. The second substrate 7 is placed at the side opposite to the micro-vibration body 2 and is constituted of a material with the difference of the linear expansion coefficient of the micro-vibration body 2 smaller than that of the first substrate 4.SELECTED DRAWING: Figure 7

Claims

1. A micro-vibrating body (2) having a curved surface portion (21) having an annular curved surface and a connecting portion (22) extending from the curved surface portion to the inner center of the curved surface portion, The mounting substrate (3) comprises a curved surface portion with the end opposite to the connecting portion designated as a rim (211), and a plurality of electrode portions (52) facing the rim and surrounding the rim, arranged at a distance from each other, and further comprising: The micro-vibrating body is hollow in which the connecting portion is bonded to the mounting substrate and the curved portion does not come into contact with other members. The mounting substrate comprises a first substrate (4) on which the plurality of electrode portions are formed on the mounting surface (4a) to which the minute vibrating body is bonded, and a second substrate (7) which is bonded to the other surface (4b) of the first substrate opposite to the mounting surface. The first substrate is made of a material with a coefficient of thermal expansion greater than that of the micro-vibrating body, and is formed by laminating an upper substrate (5) which constitutes the plurality of electrode portions and a lower substrate (6) which serves as the base for the upper substrate. The second substrate is made of a material whose coefficient of thermal expansion differs from that of the first substrate from that of the micro-vibrating body, in a mounting structure for a micro-vibrating body.

2. The electrode forming portion (62) of the first substrate, on which the plurality of electrode portions are formed, comprises a fixing portion (8) bonded to the second substrate and an extension portion (9) extending from the fixing portion toward the rim. The plurality of electrode portions are formed in the extension portion, The mounting structure for a minute vibrator according to claim 1, wherein the extended portion is arranged with a gap between it and the second substrate.

3. The fixing portion has a pair of first anchors (81) arranged in parallel and a pair of second anchors (82) arranged in parallel. The extension portion has two extensions (91) extending from each of the pair of first anchors, a lever (92) connecting the pair of second anchors, and a portion (93) directly below the electrode where the electrode portion is formed. The two extension portions are connected to the lever along the radial direction of the first substrate, with the portion where the micro-vibrating body is joined as the central axis, The lever extends along the circumferential direction with respect to the central axis and is displaceable in the radial direction. The mounting structure for a micro-vibrator according to claim 2, wherein the part directly below the electrode is positioned closer to the micro-vibrator than the pair of first anchors and the pair of second anchors, and is connected radially between the part of the lever to which the two extensions are connected.

4. The aforementioned pair of second anchors is positioned closer to the direct area below the electrode than the aforementioned pair of first anchors. The mounting structure for a micro-vibrator according to claim 3, wherein the electrode forming portion is made of a material having a positive coefficient of linear expansion.

5. The aforementioned pair of first anchors is positioned closer to the direct area below the electrode than the aforementioned pair of second anchors. The mounting structure for a micro-vibrator according to claim 3, wherein the electrode forming portion is made of a material having a negative coefficient of thermal expansion.

6. The micro-vibration body mounting structure according to claim 4 or 5, wherein the extension portion, the pair of first anchors, the pair of second anchors, and the lever are arranged in a region of the first substrate located directly below the micro-vibration body.

7. The mounting structure for a micro-vibrator according to claim 2, wherein the electrode forming portion has a temperature control element (67) arranged in a location different from the portion where the electrode portion is formed.

8. The second substrate is partially bonded to the first substrate via a plurality of adhesive portions (10). The mounting structure for a micro-vibrating body according to claim 2, wherein the plurality of adhesive portions include a first adhesive portion (101) positioned between a first projection portion (4ba), which is a projection of the frame portion (51) surrounding the connection portion of the micro-vibrating body on the other surface, and a second projection portion (4bb), which is a projection of the plurality of electrode portions, and a second adhesive portion (102) positioned in a region radially outward from the second projection portion with the portion to which the micro-vibrating body is joined as the central axis.

9. The first adhesive portion and the second adhesive portion are each arranged in a plurality of island-like configurations along the circumferential direction with respect to the central axis. The mounting structure for a micro-vibrator according to claim 8, wherein the second adhesive portion is arranged on the radial extension line passing through the first adhesive portion.

10. The mounting structure for a micro-vibrator according to claim 8, wherein the first adhesive portion and the second adhesive portion each have an annular shape along the circumferential direction with respect to the central axis.

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