Positioning detection device, carrier, positioning acquisition system and method

Abstract

The application provides a positioning detection device, a bearing part, a positioning acquisition system and a positioning acquisition method. The positioning detection device comprises a test workpiece, a track acquisition assembly and an acquirer. The track acquisition assembly is arranged on the test workpiece, and the acquirer is connected with the track acquisition assembly. The track acquisition assembly at least comprises a first image acquisition part. The first image acquisition part is located on a first surface of the test workpiece, is used for acquiring a first mark located in front of the first surface, and feeds back image information with the first mark to the acquirer, so that the acquirer acquires position information of the test workpiece and the bearing part according to the image information. The bearing part comprises a supporting part, a first side surface and a mark assembly. The mark assembly is arranged on the first side surface. The mark assembly comprises a first mark which can be acquired by the first image acquisition part in the positioning detection device. The positioning acquisition system comprises the positioning detection device and the bearing part. The application can control the workpiece to be accurately placed at a preset position.

Description

Technical Field

[0001] This invention belongs to the field of positioning technology, and specifically relates to a positioning detection device, a carrier, a positioning acquisition system and method. Background Technology

[0002] In common precision machining processes, the workpiece needs to be accurately placed at the required position by a robotic arm or machining component before processing. This position is usually predetermined, such as on a machine tool or within a specific frame. Since current precision machining is typically an assembly line operation, the workpiece is continuously transported to a specific process step and processed by a robotic arm or machining component at a designated location. For the semiconductor chip manufacturing industry, the precision requirements are even higher. For example, in laser lithography, if the workpiece's position is misaligned, it will cause the lithography position to shift, resulting in defective products. Therefore, precise positioning and transport of the workpiece are urgently needed.

[0003] In existing technologies, when processing a workpiece, a vision recognition device on the robotic arm is used to visually identify the workpiece and determine its relative position to the robotic arm. However, this method has a relatively large margin of error. Furthermore, during the transport process, the transport space is often small or limited, making it impossible to install a vision recognition device on the robotic arm.

[0004] To ensure uninterrupted operation of the production line, a transfer robot continuously transports workpieces. For example, if 1000 workpieces are ready for processing, the transfer robot picks up one workpiece from its placement location and moves it to a specific position A. After the processing unit processes the workpiece, the transfer robot moves the finished workpiece to the next process step, such as a specific position B. This process is repeated, picking up the next workpiece and moving it to position A. Throughout this process, it is crucial to continuously verify that the workpiece is accurately placed at position A to improve processing precision and prevent defective products. This verification process is complex. Summary of the Invention

[0005] The technical problem to be solved by this application is to provide a positioning detection device, a bearing device, a positioning acquisition system and method, which can control the workpiece to be accurately placed in a preset position.

[0006] To address the aforementioned technical problems, this application provides a positioning and detection device for substrate conveying, used to measure the positional relationship between a test workpiece and a carrier, comprising: a test workpiece configured to be conveyed from an initial position along a first movement direction to a preset position within the carrier; a trajectory acquisition component disposed on the test workpiece, the trajectory acquisition component including at least a first image acquisition component located on a first surface of the test workpiece, the first surface being at the front end of the first movement direction; and an acquisition device connected to the trajectory acquisition component, used at least to acquire image information fed back by the trajectory acquisition component when the test workpiece moves from the initial position along the first movement direction or moves to the preset position, thereby obtaining positional information between the test workpiece and the carrier; wherein the image information includes at least information corresponding to a marking component disposed on the carrier, the marking component including at least one first mark, the first mark being located on a first side of the carrier, the first side being at the front end of the first movement direction, and when the test workpiece is located at the preset position of the carrier, the center of the first mark is adapted to the position of the first image acquisition component.

[0007] Furthermore, the position information includes any one or more of the following: the spatial offset of the test workpiece relative to its initial position when it moves to the preset position; the gap distance information between the test workpiece and the carrier; the levelness information of the test workpiece and the carrier; and the transport trajectory line of the test workpiece.

[0008] Furthermore, the first mark can be any one or more of the following: including two mutually perpendicular scale lines; three equally spaced mark lines / scale lines; a rectangle with mark lines set within the rectangle; and a grid matrix composed of grids.

[0009] Furthermore, the trajectory acquisition component also includes at least one or more of the following components: an accelerometer connected to the acquirer, wherein the acquirer obtains the acceleration of the test workpiece at least through the accelerometer; and a gyroscope connected to the acquirer, wherein the acquirer obtains the rotation angle of the test workpiece at least through the gyroscope.

[0010] Furthermore, the trajectory acquisition component also includes a second image acquisition element, which is disposed on a second surface of the test workpiece, the second surface being parallel to the first direction of movement; wherein, the marking component also includes at least one second mark, all the second marks being disposed on at least one second side of the carrier parallel to the first direction of movement, the position of the second mark satisfying that: during the transport of the test workpiece, the second image acquisition element can acquire the second mark.

[0011] Furthermore, the position of the second mark satisfies the following condition: during the transport of the test workpiece, the second image acquisition device can be directly aligned with the center of the second mark.

[0012] Furthermore, the second mark includes a guide line, a first scale line, and a second scale line. The first scale line and the second scale line are perpendicular to each other. The first scale line is parallel to the first direction of movement, and the guide line and the first scale line are on the same straight line.

[0013] Furthermore, when a second mark is provided on the second side, the guide line extends to both ends of the second side; when multiple second marks are provided on the second side, the guide lines of two adjacent second marks are connected, and the guide line of one end of the two second marks located at both ends extends to the end of the second side.

[0014] Furthermore, the second marker includes a stop marker. When the image information acquired by the acquirer contains a stop marker, control information is formed to stop the movement of the test workpiece.

[0015] Furthermore, there are two second sides, which are located on different sides of the movement direction of the test workpiece. Multiple second marks are provided on each of the two second sides, and the second marks are staggered in the first movement direction.

[0016] Furthermore, the acquisition device is placed inside the test workpiece, or the acquisition device is connected to the trajectory acquisition component via wireless or wired signal.

[0017] This application also provides a substrate transport carrier used to measure the positional relationship between a test workpiece and the carrier according to the above-described positioning detection device, comprising: a support portion for supporting at least the test workpiece; a first side surface; and a marking assembly, the marking assembly comprising at least one first mark, the first mark being located on the first side surface, wherein the first side surface is located in front of a first direction of movement in the positioning detection device, and when the test workpiece is located at a preset position of the support portion, the center of the first mark is adapted to the position of the first image acquisition device.

[0018] Furthermore, the first mark can be any one or more of the following: including two mutually perpendicular scale lines; three equally spaced mark lines / scale lines; a rectangle with mark lines set within the rectangle; and a grid matrix composed of multiple grids.

[0019] Furthermore, the carrier also includes at least one second side, all of which are parallel to the first direction of movement. The marking component also includes at least one second mark, all of which are disposed on at least one second side. The position of the second mark satisfies the following condition: during the transport of the test workpiece, the second image acquisition component in the positioning detection device can acquire the second mark, wherein the second image acquisition component is disposed on the second surface of the test workpiece, and the second surface is parallel to the first direction of movement.

[0020] Furthermore, during the transport of the test workpiece, the second image acquisition device can be aligned directly with the center of the second mark.

[0021] Furthermore, the second mark includes a guide line, a first scale line, and a second scale line. The first scale line and the second scale line are perpendicular to each other. The first scale line is parallel to the first direction of movement, and the guide line and the first scale line are on the same straight line.

[0022] Furthermore, when a second mark is provided on the second side, the guide line extends to both ends of the second side; when multiple second marks are provided on the second side, the guide lines of two adjacent second marks are connected, and the guide lines of the two second marks located at both ends extend toward the ends of the second side.

[0023] Furthermore, the second marker includes a stop marker. When the image information acquired by the acquirer contains a stop marker, control information is formed to stop the movement of the test workpiece.

[0024] Furthermore, there are two second sides, and multiple second marks are provided on each of the two second sides, with each second mark being staggered in the first direction of movement.

[0025] This application also provides a method for positioning and acquiring substrates during transport, used to measure the positional relationship between a test workpiece and a carrier, comprising: acquiring image information of a marking component on the carrier in real time during the movement of the test workpiece along a first direction; controlling the movement of the test workpiece to a preset position on the carrier based on feedback from the image information; and acquiring motion information of the test workpiece, wherein the marking component is used to define the preset position; and the motion information includes: spatial offset during the transport of the test workpiece, and / or the transport trajectory line of the test workpiece; wherein the marking component includes a first mark, the first mark is located on a first side of the carrier, the first side is in front of the first movement direction, and when the test workpiece is located at the preset position on the carrier, the center of the first mark is adapted to the position of the first image acquisition component; acquiring motion information of the test workpiece includes: determining, based on the first mark in the image information, when the current posture of the test workpiece is offset from the preset position in the horizontal or vertical direction, acquiring the offset direction and calculating the offset amount, and recording the offset direction and offset amount as the spatial offset amount corresponding to the current posture.

[0026] Furthermore, when the test workpiece is located at a preset position on the carrier, the center of the first mark is directly opposite the first image acquisition device.

[0027] Furthermore, during the movement of the test workpiece along the first direction, the rotation angle of the test workpiece is measured in real time by a gyroscope installed on the test workpiece, and the test workpiece is controlled to move to the preset position of the carrier based on the image information and rotation angle feedback.

[0028] This application also provides a substrate conveying method, comprising: acquiring the current posture of the substrate, the current posture including position data of the substrate in a horizontal plane and a vertical plane; based on the current posture, searching in a motion calibration database for the spatial offset and / or conveying trajectory line corresponding to the current posture, forming a control command for controlling the movement of the substrate conveying device, the control command being used to cause the substrate conveying device to convey the substrate to a preset position within a carrier, wherein the motion calibration database is formed by the motion information of the test workpiece acquired by the positioning acquisition method described above.

[0029] Furthermore, the parameters in the motion calibration database also include:

[0030] During the movement of the test workpiece along the first direction, the acceleration acquisition unit measures the acceleration of the test workpiece in real time, and generates control commands for the movement of the control board conveying device based on the conveying trajectory line, initial velocity, and acceleration; after obtaining the spatial offset during the transport of the test workpiece, the unit adjusts the posture based on the spatial offset, and measures the uniform speed time required to transport the test workpiece to the preset position in the carrier at a constant speed, and generates control commands for the movement of the control board conveying device based on the spatial offset, uniform speed time, and constant speed; or measures the speed change time required to transport the test workpiece to the preset position in the carrier at a variable speed and the acceleration during the transport process, and generates control commands for the movement of the control board conveying device based on the spatial offset, initial velocity, speed change time, and acceleration; or measures the straight path when the test workpiece is transported linearly to the preset position in the carrier, and generates control commands for the movement of the control board conveying device based on the spatial offset and the straight path.

[0031] The beneficial effects of this application are:

[0032] The positioning and detection device of this application has a trajectory acquisition component mounted on the test workpiece. During the process of the test workpiece being transported from its initial position to the preset position of the carrier, the trajectory acquisition component acquires image information of the marker component in real time. The acquirer obtains the image information and can obtain the position information between the test workpiece and each marker based on the image information, thereby obtaining the positional relationship between the test workpiece and the carrier. Thus, the test workpiece can be adjusted in real time according to the positional relationship between the test workpiece and the carrier, so that the test workpiece can be transported to the preset position more accurately.

[0033] The substrate conveying positioning and acquisition system of this application includes a marking component on a carrier and a trajectory acquisition component on a test workpiece. The trajectory acquisition component acquires image information of the marking component in real time. The acquirer obtains the image information and generates control information to move the test workpiece to a preset position based on the image information. It then controls the substrate conveying device to drive the test workpiece to adjust its position in real time, thereby more accurately conveying the test workpiece to the preset position. Based on this, the motion information of the test workpiece is acquired simultaneously. This motion information can then be used as a motion calibration database for the substrate conveying component. The acquired motion information ensures that the test workpiece is conveyed to the preset position of the carrier with high accuracy, ensuring the levelness of the test workpiece. Using this motion information as calibration data for substrate conveying facilitates control and provides high control accuracy. In addition, while ensuring the accuracy of substrate conveying, it is only necessary to obtain the current posture of the substrate and generate control commands to adjust the substrate conveying device by searching the motion calibration database. This achieves the conveying of the substrate without the need to judge and analyze the placement accuracy of each substrate in place.

[0034] More advantageously, the device and control method provided by this invention can collect and feed back the position, displacement, and trajectory information of the test workpiece from all directions to the host computer, thereby enabling the host computer to obtain the real-time movement trajectory of the test workpiece, such as whether the test workpiece has shifted in the left-right direction, shifted in the up-down angle, or is rotating. By continuously collecting the above-mentioned position and displacement information of the test workpiece, the overall trajectory information of the test workpiece can be completely obtained, and the trajectory information is 360-degree omnidirectional trajectory information. Attached Figure Description

[0035] To more clearly illustrate the technical solutions of the embodiments of this disclosure, the accompanying drawings of the embodiments will be briefly described below. Obviously, the drawings described below only relate to some embodiments of this disclosure and are not intended to limit this disclosure.

[0036] Figure 1 This is a structural diagram of the positioning detection device in an embodiment of this disclosure;

[0037] Figure 2 This is a structural diagram of the positioning detection device in another embodiment of the present disclosure;

[0038] Figure 3 This is a structural diagram of the positioning detection device in another embodiment of the present disclosure;

[0039] Figure 4 This is a structural diagram of the positioning detection device in another embodiment of the present disclosure;

[0040] Figure 5 This is a schematic diagram of the structure of the first mark and / or the second mark in an embodiment of this disclosure;

[0041] Figure 6 This is a schematic diagram of the structure of the first mark and / or the second mark in another embodiment of this disclosure;

[0042] Figure 7 This is a schematic diagram of the structure of the first mark and / or the second mark in another embodiment of this disclosure;

[0043] Figure 8 This is a schematic diagram of the structure of the first mark and / or the second mark in another embodiment of this disclosure;

[0044] Figure 9 This is a schematic diagram of the structure of the first mark and / or the second mark in another embodiment of this disclosure;

[0045] Figure 10 This is a schematic diagram of the structure of the first mark and / or the second mark in another embodiment of this disclosure;

[0046] Figure 11 This is a schematic diagram of the structure of the carrier in an embodiment of this disclosure;

[0047] Figure 12 This is a schematic diagram of the structure of the carrier in another embodiment of the present disclosure;

[0048] Figure 13 This is a schematic diagram of the structure of the carrier in another embodiment of the present disclosure;

[0049] Figure 14 This is a structural diagram of the positioning acquisition system in an embodiment of this disclosure.

[0050] Figure label:

[0051] Positioning detection device 10, test workpiece 11, first surface 111, second surface 112, front surface 112a, rear surface 112b, top surface 112c, trajectory acquisition component 12, first image acquisition component 121, second image acquisition component 122, acquisition device 13, carrier component 20, support part 21, left side surface 22, marking component 23, first mark 231, first scale line 231a, second scale line 231b, guide line 231c, second mark 232, front side surface 24a, rear side surface 24b, positioning acquisition system 100. Detailed Implementation

[0052] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0053] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar terms used in this patent application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as “comprising” or “including” indicate that the element or object preceding “comprising” or “including” encompasses the element or object listed following “comprising” or “including” and its equivalents, and do not exclude other elements or objects. Terms such as “connected” or “linked” are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. Terms such as “upper,” “lower,” “left,” and “right” are used only to indicate relative positional relationships, and these relative positional relationships may change accordingly when the absolute position of the described object changes.

[0054] In this disclosure, "vertical" and "up" and "down" represent the same direction. In the accompanying drawings, the direction perpendicular to the page is the front-to-back direction. Figures 1 to 3 The left and right directions in the attached figures represent the first direction of movement of the test workpiece.

[0055] This disclosure provides a positioning detection device for substrate conveying. The positioning detection device includes: a test workpiece, a trajectory acquisition component, and a acquirer. The test workpiece is configured to be conveyed from an initial position along a first movement direction to a preset position within a carrier. The trajectory acquisition component is disposed on the test workpiece and includes at least a first image acquisition component located on a first surface of the test workpiece, the first surface being at the front end of the first movement direction. The acquirer is connected to the trajectory acquisition component and is used at least to acquire image information fed back by the trajectory acquisition component when the test workpiece moves from the initial position along the first movement direction or moves to the preset position, thereby obtaining position information of the test workpiece and the carrier. The image information includes at least information corresponding to a marking component disposed on the carrier. The marking component includes at least one first mark located on a first side of the carrier, the first side being at the front end of the first movement direction. When the test workpiece is located at the preset position of the carrier, the center of the first mark is adapted to the position of the first image acquisition component.

[0056] The positioning and detection device for substrate conveying provided in the above embodiments of this disclosure has a trajectory acquisition component disposed on the test workpiece. During the process of the test workpiece being conveyed from the initial position to the preset position of the carrier, the trajectory acquisition component is used to collect image information of the marking component in real time. The acquisition device can obtain the position information between the test workpiece and each mark based on the image information, thereby obtaining the positional relationship between the test workpiece and the carrier. Thus, the test workpiece can be adjusted in real time according to the positional relationship between the test workpiece and the carrier, so that the test workpiece can be conveyed to the preset position more accurately.

[0057] This disclosure also provides a carrier for transporting a substrate, used to measure the positional relationship between a test workpiece and the carrier according to the aforementioned positioning detection device. The carrier includes a support portion, a first side surface, and a marking assembly. The support portion is used to support the test workpiece at least once, and the marking assembly includes at least one first mark located on the first side surface. The first side surface is positioned in front of the first direction of movement in the positioning detection device, and when the test workpiece is located at a preset position on the support portion, the center of the first mark is aligned with the position of a first image acquisition device.

[0058] This disclosure also provides a positioning acquisition system for substrate conveying. The positioning acquisition system includes the above-described positioning detection device and the above-described carrier, wherein when the test workpiece of the positioning detection device moves from an initial position along a first movement direction or moves to a preset position, the trajectory acquisition component of the positioning detection device collects image information of the marking component on the carrier, and the acquisition unit of the positioning detection device acquires the image information, thereby obtaining the position information of the test workpiece and the carrier.

[0059] The substrate conveying positioning acquisition system provided in the above embodiments of this disclosure includes a marking component on a carrier and a trajectory acquisition component on a test workpiece. The trajectory acquisition component acquires image information from the marking component in real time. The acquirer processes the image information to obtain control information for controlling the movement of the test workpiece and controls the substrate conveying device to drive the test workpiece to adjust its position in real time. This allows for more accurate delivery of the test workpiece to the preset position, avoiding inaccurate and low-precision adjustments made when the test workpiece is near the preset position. Simultaneously, the system records the motion information of the test workpiece, such as the offset relative to the initial position when moving to the preset position and the conveying trajectory line of the test workpiece from the initial position to the preset position. This motion information can then be used as a motion calibration database for the substrate conveying component. The obtained motion information ensures that the test workpiece is delivered to the preset position of the carrier with high precision, guaranteeing the levelness of the test workpiece. Using this motion information as calibration data for substrate conveying facilitates control and provides high control accuracy.

[0060] This disclosure also provides a method for obtaining the positioning of a substrate during transport, the method comprising:

[0061] During the movement of the test workpiece along the first direction, image information of the marking component on the carrier is acquired in real time. Based on the image information feedback, the test workpiece is controlled to move to a preset position on the carrier, and motion information of the test workpiece is acquired. The marking component is used to define the preset position. The motion information includes: the spatial offset of the test workpiece during transport, and / or the transport trajectory line of the test workpiece. The marking component includes a first mark located on a first side of the carrier, which is in front of the first movement direction. When the test workpiece is at the preset position on the carrier, the center of the first mark is aligned with the position of the first image acquisition component. Acquiring the motion information of the test workpiece includes: determining, based on the first mark in the image information, when the current posture of the test workpiece is offset from the preset position in the horizontal or vertical direction, acquiring the offset direction and calculating the offset amount, and recording the offset direction and offset amount as the spatial offset corresponding to the current posture. The positioning acquisition method of this embodiment can be implemented using the above-described positioning acquisition system.

[0062] This disclosure also provides a substrate conveying method, comprising: acquiring the current posture of the substrate, the current posture including position data of the substrate in a horizontal plane and a vertical plane; based on the current posture, searching in a motion calibration database for the spatial offset and / or conveying trajectory line corresponding to the current posture, forming a control command for controlling the movement of the substrate conveying device, the control command being used to cause the substrate conveying device to convey the substrate to a preset position within a carrier, wherein the motion calibration database is formed by the motion information of the test workpiece acquired by the positioning acquisition method described above.

[0063] The substrate conveying method provided in the above embodiments of this disclosure ensures substrate conveying accuracy. It only requires acquiring the current posture of the substrate and generating control commands to adjust the substrate conveying device by searching a motion calibration database. This achieves substrate conveying without the need for accuracy analysis of each substrate in place. This substrate conveying method is applicable to scenarios where real-time tracking of the substrate conveying process using visual recognition devices is not feasible, and also to scenarios where substrates are densely conveyed on production lines requiring high-precision positioning. It pre-obtains motion information of a test workpiece using the aforementioned positioning acquisition system and method. The test workpiece has the same size and shape as the substrate. The motion information of this test workpiece is used as control data in the substrate conveying motion calibration database. Only the current posture of the substrate, i.e., the initial position data, needs to be acquired. Using this initial position data as a reference, the conveying trajectory line or spatial offset is obtained from the motion calibration database, thereby controlling the movement of the substrate conveying device. This allows for highly accurate conveying to a preset position within the carrier without the need for real-time analysis of the basic conveying process and the posture after positioning.

[0064] The positioning detection device, carrier, positioning acquisition system, and method of this disclosure are described below with reference to the accompanying drawings.

[0065] Figure 1 This is a structural diagram of a positioning detection device in one embodiment of the present disclosure. Figure 2 This is a structural diagram of a positioning detection device in another embodiment of the present disclosure. Figure 3 This is a structural diagram of a positioning detection device in another embodiment of the present disclosure. Figure 4 This is a structural diagram of a positioning detection device in another embodiment of the present disclosure.

[0066] The positioning detection device 10 is used to measure the positional relationship between the test workpiece and the carrier. For example... Figure 1-3 As shown, the positioning detection device 10 includes: a test workpiece 11, a trajectory acquisition component 12, and an acquisition device 13.

[0067] The test workpiece 11 is configured to be conveyed from an initial position along a first direction of motion to a preset position within the carrier 20. The first direction of motion is the direction in which the test workpiece 11 moves toward the carrier 20.

[0068] A trajectory acquisition component 12 is disposed on the test workpiece 11. The trajectory acquisition component 12 includes at least a first image acquisition component 121, which is located on a first surface 111 of the test workpiece 11, with the first surface 111 positioned at the front end of a first direction of motion. The trajectory acquisition component 12 is used to acquire image information. The image information acquired by the trajectory acquisition component 12 includes at least information corresponding to a marking component 23 disposed on the carrier 20. The marking component 23 includes at least one first mark 231, which is located on a first side surface of the carrier 20, positioned at the front end of the first direction of motion. When the test workpiece 11 is located at a preset position on the carrier 20, the center of the first mark 231 is aligned with the position of the first image acquisition component 121.

[0069] The marking component 23 can limit the preset position to the plane in the horizontal and vertical directions. In this way, the marking component 23 can ensure that when the test workpiece is at the preset position, the levelness and positioning of the test workpiece are accurate, without any left-right, front-back or high-low offset.

[0070] Specifically, the center of the first mark 231 is adapted to the position of the first image acquisition device 121. It can be understood that the first mark 231 can limit the preset position in the plane of the horizontal and vertical directions. In this way, the first mark 231 can ensure that when the test workpiece is at the preset position, the levelness and positioning of the test workpiece are accurate, without any left-right, front-back or high-low offset.

[0071] In some embodiments, the center of the first marker 231 is directly opposite to the first image acquisition unit 121. "Directly opposite" here and "directly opposite" in the following text can be understood as meaning that the image acquired by the image acquisition unit contains the marker, and after the image information is processed by the acquisition unit, the center of the marker has no spatial offset relative to the image acquisition unit.

[0072] It is understandable that the first image acquisition device 121 only needs to be able to acquire the first marker 231.

[0073] Specifically, there may be one or more first image acquisition devices 121, and the number of first markers 231 is the same as the number of first image acquisition devices 121 and they correspond one-to-one. For example, such as Figure 1 As shown, there can be one first image acquisition device 121 and one first marker 231, with the first image acquisition device 121 and the first marker 231 facing each other. For example, as... Figure 3 As shown, there are two first image acquisition units 121 and two first markers 231, with each of the two first image acquisition units 121 facing the other of the two first markers 231. When there are multiple first image acquisition units 121, the deviation in the position of the test workpiece can be determined more accurately, thereby enabling the test workpiece to be transported to the preset position more precisely.

[0074] Specifically, when the first image acquisition component 121 is disposed on the first surface 111 of the test workpiece 11, it can be fixed to the first surface 111, i.e., protruding from the first surface 111, or a groove can be provided on the first surface 111, and the first image acquisition component 121 can be installed in the groove. It is understood that the first image acquisition component 121 only needs to be able to acquire the first mark 231, and the installation method of the first image acquisition component 121 is not limited.

[0075] Figure 5 This is a schematic diagram of the structure of the first mark and / or the second mark in an embodiment of this disclosure. Figure 6 This is a schematic diagram of the structure of the first mark and / or the second mark in another embodiment of this disclosure.

[0076] like Figure 5 , Figure 6 As shown, in some embodiments, the first mark 231 is three equally spaced marking lines. Specifically, as... Figure 5 As shown, the marker lines are thin solid lines, or as... Figure 6 As shown, the marked lines are dotted lines.

[0077] In some embodiments, the first marker 231 is a rectangle with marker lines within it. Specifically, the marker lines are two perpendicular straight lines, and the intersection of the two lines overlaps with the center of the rectangle.

[0078] In some embodiments, the first mark 231 is three equally spaced scale lines.

[0079] Wherein, when the first mark 231 consists of three equally spaced marking lines or scale lines, the middle marking line or scale line is the position where the test workpiece 11 needs to be held horizontally (vertically). For example, the three equally spaced marking lines or scale lines are parallel to the support surface of the carrier 20. Figure 11 When the support part 21 shown is set; or the middle marking line or scale line is the position that the test workpiece 11 needs to maintain in the direction perpendicular to the first direction (i.e. Figure 11 (The position to be maintained in the front and back directions shown), for example, three equally spaced marking lines or scale lines are perpendicular to the support surface of the carrier 20 ( Figure 11 When the support part 21 shown is set, the mark lines or scale lines on both sides of the middle mark line or scale line are within the error range. When the test workpiece 11 is detected to be located between the two mark lines or scale lines on both sides, it is within the allowable error range, and it can be considered that the test workpiece 11 is aligned in the direction perpendicular to the mark line or scale line.

[0080] Specifically, the distance between two adjacent scale lines or marking lines is 5µm-2mm. More specifically, the distance between two adjacent scale lines or marking lines is 5µm-20µm.

[0081] Figure 7 This is a schematic diagram of the structure of the first mark and / or the second mark in another embodiment of this disclosure. Figure 8 This is a schematic diagram of the structure of the first mark and / or the second mark in another embodiment of this disclosure. Figure 9 This is a schematic diagram of the structure of the first mark and / or the second mark in another embodiment of this disclosure.

[0082] In some embodiments, the first mark 231 includes two mutually perpendicular scale lines. Specifically, one scale line is parallel to the horizontal plane on which the test workpiece 11 is to be held, and the horizontal plane on which the test workpiece 11 is to be held is parallel to the placement surface of the test workpiece 11. The placement surface of the test workpiece 11 is the side of the test workpiece 11 supported by the support member 20 when the test workpiece 11 is placed on the support member 20, such as... Figure 1 As shown, the bottom side of the test workpiece 11 is the placement surface of the test workpiece. The acquisition unit 13 can accurately calculate the vertical and horizontal offset of the test workpiece based on the scale lines in the image information acquired by the first image acquisition unit 121.

[0083] like Figure 7As shown, specifically, the first mark 231 is a rectangle, and a first scale line 231a and a second scale line 231b are set inside the rectangle. The first scale line 231a and the second scale line 231b are perpendicular to each other, and the intersection point of the first scale line 231a and the second scale line 231b overlaps with the center of the rectangle.

[0084] like Figure 8 As shown, specifically, the first mark 231 can also be a rectangle, with a circle, a first scale line 231a and a second scale line 231b inside the rectangle. The first scale line 231a and the second scale line 231b are perpendicular to each other, and the intersection point of the first scale line 231a and the second scale line 231b, the center of the rectangle, and the center of the circle overlap.

[0085] like Figure 9 As shown, specifically, the first mark 231 can also be a circle, with two mutually perpendicular scale lines on the circle, and the intersection of the two scale lines overlapping the center of the circle.

[0086] Figure 10 This is a schematic diagram of the structure of the first mark and / or the second mark in another embodiment of this disclosure.

[0087] like Figure 10 As shown, in some embodiments, the first marker 231 is a grid matrix composed of multiple grids.

[0088] Specifically, one edge in the grid matrix is ​​parallel to the horizontal plane (or the supporting plane of the carrier 20) that the test workpiece 11 is to maintain. The acquisition device 13 can accurately calculate the vertical and horizontal offset of the test workpiece based on the grid in the image information acquired by the first image acquisition device 121.

[0089] Specifically, each grid is a square, and each grid is a unit of length, for example, one grid is 1µm.

[0090] The form of the first mark 231 is not limited to the structure described above, and when there are multiple first marks 231, the first mark 231 can contain different forms. For example, when there are two first marks 231, one first mark 231 is... Figure 5 The three equally spaced marking lines shown, the other first marking 231 is as follows Figure 7 The rectangle shown. It can be understood that the first mark 231 enables the acquisition device 13 to calculate the position information of the test workpiece 11 and the carrier 20 based on the image information containing the first mark 231 acquired by the first image acquisition device 121.

[0091] In some embodiments, the trajectory acquisition component 12 further includes an acceleration acquisition element (not shown in the figure), which is connected to the acquisition unit 13. The acquisition unit obtains the acceleration of the test workpiece at least through the acceleration acquisition element and stores the acceleration as one of the parameters for substrate transport.

[0092] In some embodiments, the trajectory acquisition component 12 further includes a gyroscope (not shown) connected to the acquirer 13. The acquirer obtains at least the rotation angle of the test workpiece 11 through the gyroscope. Based on the rotation angle, the acquirer obtains the rotation angle between the test workpiece 11 and the support member 20, thereby adjusting the levelness of the test workpiece 11 according to the rotation angle. Using the rotation angle to adjust the levelness of the test workpiece 11 can improve the accuracy of adjusting the levelness of the test workpiece 11.

[0093] In some embodiments, the trajectory acquisition component 12 further includes a second image acquisition element 122, which is disposed on a second surface 112 of the test workpiece 11. The second surface 112 is parallel to the first direction of motion, i.e., as shown in the figure. Figure 1 As shown, the second surface 112 includes a front surface 112a, a rear surface 112b, a top surface 112c, and a bottom surface (the surface opposite to the top surface 112c). The second image acquisition unit 122 is used to acquire the second mark 232 located in front of the second surface 112 and to feed back the image information with the second mark to the acquisition unit 13. The mark assembly 23 also includes at least one second mark 232, and all the second marks 232 are disposed on at least one second side of the carrier 20 parallel to the first direction of movement, for example, Figure 11 As shown: When the test workpiece 11 is transported from left to right to the preset position of the carrier 20, the second side includes: a front side 24a, a rear side 24b, and a top side (not shown in the figure). The position of the second mark satisfies the condition that the second image acquisition unit 122 can acquire the second mark 232 during the transport of the test workpiece 11. Setting the second image acquisition unit 122 and the second mark 232 can further improve the positioning accuracy of the test workpiece 11.

[0094] In some embodiments, the position of the second mark 232 satisfies the following condition: during the transport of the test workpiece 11, the second image acquisition unit 122 is directly aligned with the center of the second mark 232.

[0095] Specifically, when the second image acquisition component 122 is disposed on the second surface 112 of the test workpiece 11, it can be fixed to the second surface 112, i.e., protruding from the second surface 112, or it can be provided with a groove on the second surface 112, and the second image acquisition component 122 is installed in the groove. It is understood that the second image acquisition component only needs to be able to acquire the second mark, and there is no limitation on the installation method of the second image acquisition component.

[0096] Specifically, there can be one or more second image acquisition elements 122. When there is one second image acquisition element 122, it is disposed on one of the second surfaces 112. For example, all second image acquisition elements 122 may be disposed on the front surface 112a, the rear surface 112b, or the top surface 112c. When there are multiple second image acquisition elements 122, they may be disposed on the same second surface 112 or on two second surfaces 112. When multiple second image acquisition elements 122 are disposed on two second surfaces 112 respectively, the projections of the two second image acquisition elements 122 in the first motion direction may or may not overlap. For example, as shown... Figure 1 As shown, there are two second image acquisition elements 122, which are respectively disposed on the front surface 112a and the rear surface 112b, and their projections overlap in the first motion direction. Figure 2 As shown, there are two second image acquisition elements 122, which are respectively disposed on the front surface 112a and the rear surface 112b. The projections of the two second image acquisition elements 122 in the first motion direction do not overlap. Figure 3 As shown, there are two second image acquisition elements 122, both of which are disposed on the front surface 112a. Figure 4 As shown, there is one second image acquisition device 122, which is disposed on the front surface 112a.

[0097] Specifically, at least one second image acquisition element 122 is disposed at one end near the first surface 111. Thus, after the first surface 111 of the test workpiece 11 enters the carrier 20, the second image acquisition element 122 can acquire image information of the second mark 232, thereby obtaining the position information of the test workpiece 11 and the carrier 20.

[0098] In some embodiments, there are two second sides, located on different sides of the movement direction of the test workpiece 11. Each of the two second sides is provided with multiple second marks 232, which are staggered along the first movement direction. This allows the second image acquisition unit 122 to acquire the second marks 232 more times as the test workpiece 11 moves from its initial position to a preset position along the first movement direction. This enables multiple adjustments to the test workpiece 11 during the movement, allowing it to be placed more accurately at the preset position on the carrier 20.

[0099] Specifically, such as Figure 11As shown, when the test workpiece 11 is conveyed from left to right to the preset position of the carrier 20, the two second sides are a front side 24a and a rear side 24b that are parallel to each other and arranged opposite each other, or the two second sides are an intersecting front side 24a and a top side. When the test workpiece 11 is conveyed from top to bottom to the preset position of the carrier 20, the two second sides can be two sides that are parallel to each other and arranged opposite each other (e.g., front side 24a and rear side 24b), or they can be two sides that are perpendicular to each other and adjacent to each other (e.g., left side 22 and front side 24a).

[0100] Specifically, when multiple second marks 232 are provided on a second side, the multiple second marks 232 are provided at equal intervals.

[0101] Specifically, the second mark 232 includes all forms of the first mark 231. For descriptions of the second mark 232 being identical to the first mark 231, please refer to the description of the first mark 231; these will not be repeated here. The difference lies in the position and orientation of the second mark 232 compared to the first mark 231. The second mark 232 is disposed on the second side surface, and when the second mark 232 includes two mutually perpendicular scale lines, one scale line is parallel to the first direction; when the second mark 232 includes three equally spaced mark lines or scale lines, the mark lines or scale lines are parallel to the first direction.

[0102] Specifically, when multiple second marks 232 are provided on the second side, the multiple second marks 232 can be a combination of various mark forms. For example, three second marks 232 are provided on the two sides of the carrier 20 parallel to the first direction of movement. The three second marks 232 include Figure 5 The three equally spaced marking lines shown Figure 6 The three equally spaced marking lines shown Figure 7 The rectangle shown has two mutually perpendicular scale lines at its center.

[0103] In some embodiments, since the second mark 232 is a mark set in the first movement direction, in order for the second image acquisition unit 122 to measure the position information of the test workpiece 11 and the carrier 20 in real time during the process of moving to the preset position, and to make real-time adjustments, the second mark 232 is further improved as follows. For example... Figure 9 , Figure 10As shown, the second mark 232 includes a guide line 231c, a first scale line 231a, and a second scale line 231b. The first scale line 231a and the second scale line 231b are perpendicular to each other. The first scale line 231a is parallel to the first movement direction, and the guide line 231c is on the same straight line as the first scale line 231a. Specifically, the guide line 231c is an extension of both ends of the first scale line 231a. The guide line ensures that the second image acquisition unit can continuously acquire the guide line as the test workpiece moves toward the preset area, thereby determining whether the test workpiece is moving in a straight line. If there is a spatial offset, the offset direction can be obtained, facilitating fine-tuning of the transport trajectory of the test workpiece during transport. For example, when the second image acquisition unit 122 acquires the guide line 231c and determines that the test workpiece 11 has offset upward relative to the guide line 231c, it can control the test workpiece 11 to offset downward by a predetermined value, for example, 2µm. Through fine-tuning, the test workpiece 11 will not deviate too far from the predetermined horizontal position during movement. When the second image acquisition device acquires the second scale line 231b, it can accurately calculate the offset data of the test workpiece, thereby enabling precise adjustment.

[0104] Figure 12 This is a schematic diagram of the structure of the carrier in another embodiment of this disclosure.

[0105] In some embodiments, such as Figure 12 As shown, when a second mark 232 is provided on the second side, the guide line 231c extends to both ends of the second side. For example... Figure 13 As shown, when multiple second marks 232 are provided on the second side, the guide lines 231c of two adjacent second marks 232 are connected, and the guide lines 231c of the two second marks 232 located at both ends extend to the end of the second side 112. Providing multiple second marks 232 allows the test workpiece 11 to be precisely positioned multiple times during the transport process by means of the second marks 232, so that the test workpiece 11 can finally stop precisely at the preset position of the carrier.

[0106] Specifically, when a second mark 232 is provided on a second side surface, preferably, Figure 9 , Figure 10 The marking pattern shown is either a guide line or three equally spaced scale lines / marker lines that extend through both ends of the second side along the first direction of movement.

[0107] Furthermore, those skilled in the art will understand that in a preferred variation, the guide line 231c does not extend completely to the end of the second side 112, but extends to both sides to a position near the end of the second side 112, without extending completely to the end, and maintains a very small distance from the end. Such variations are all within the protection scope of the present invention.

[0108] Figure 13 This is a schematic diagram of the structure of the carrier in another embodiment of this disclosure.

[0109] In some embodiments, such as Figure 13 As shown, the second marker 232 includes a stop marker 232a. When the image information acquired by the acquirer 13 contains a stop marker, control information is formed to stop the movement of the test workpiece. Specifically, when the image information acquired by the acquirer 13 contains a stop marker and the center of the stop marker is directly opposite the second image acquisition unit 122 that acquired the stop marker, control information is formed to stop the movement of the test workpiece.

[0110] Specifically, there are two stop marks 232a, each located on one of the two second sides. For example, as shown... Figure 13 As shown, two stop marks are respectively set on the front side 24a and the rear side 24b of the carrier 20. When the test workpiece 11 stops at the preset position, a second image acquisition device 122 set on the front surface 112a is aligned with the stop mark on the front side 24a of the carrier 20, and simultaneously, a second image acquisition device 122 set on the rear surface 112b is aligned with the stop mark on the rear side 24b of the carrier 20. In addition to determining the stopping position of the test workpiece 11, the stop marks also allow for position measurement and adjustment of the test workpiece 11 after it stops, thereby ensuring that the test workpiece is accurately placed at the preset position.

[0111] The acquirer 13 is connected to the trajectory acquisition component 12. The acquirer 13 is used at least to acquire image information fed back by the trajectory acquisition component 12 when the test workpiece 11 moves from the initial position along the first movement direction or moves to the preset position, thereby obtaining the position information between the test workpiece 11 and the carrier 20.

[0112] Specifically, control information is generated based on the image information to control the test workpiece to move to a preset position, and motion information of the test workpiece is acquired at the same time. The image information contains a marker component, and the motion information includes: the spatial offset of the test workpiece relative to its initial position when it moves to the preset position and / or the transport trajectory line of the test workpiece.

[0113] Specifically, the transport trajectory of the test workpiece 11 includes all adjustment movements as the test workpiece moves from its initial position to a preset position, including the left and right directions (i.e., Figure 11 Fine-tuning of the front-back direction, the up-down direction, and the horizontality.

[0114] Specifically, the image acquisition unit processes the image information to obtain the relative positional relationship between the first marker and the first image acquisition device, and the relative positional relationship between the second marker and the second image acquisition device. The relative positional relationship includes spatial offset and the distance between the second marker and the second image acquisition device. This allows the acquisition unit to obtain the spatial offset and distance between the test workpiece and the first marker, and the spatial offset and distance between the test workpiece and the second marker. The spatial offset includes up, down, forward, and backward tilt. Specifically, the algorithm used by the acquisition unit for image information processing can be any algorithm in the existing technology, and will not be elaborated further here.

[0115] In some embodiments, the position information includes: the spatial offset of the test workpiece relative to its initial position when it moves to a preset position.

[0116] In some embodiments, the location information includes: the transport trajectory line of the test workpiece.

[0117] In some embodiments, the position information includes: the spatial offset of the test workpiece relative to its initial position when it moves to a preset position, the gap distance information between the test workpiece and the carrier, and the levelness information of the test workpiece and the carrier.

[0118] It is understood that the position information includes any one or more of the following: the spatial offset of the test workpiece relative to its initial position when it moves to the preset position, the transport trajectory of the test workpiece, the gap distance between the test workpiece and the carrier, and the levelness information of the test workpiece and the carrier, so that the substrate can be accurately transported and placed in the preset position of the carrier 20 according to the position information obtained by the test workpiece.

[0119] In some embodiments, the acquirer 13 is disposed within the test workpiece.

[0120] In some embodiments, the acquirer 13 is wirelessly or wiredly connected to the trajectory acquisition component 12.

[0121] Specifically, the acquirer can be implemented either through logic circuits (hardware) formed in integrated circuits (IC chips) or through software.

[0122] When implemented in software, the acquirer includes a computer that executes software program commands to perform various functions. This computer, for example, includes one or more processors and a storage medium storing the program in a computer-readable manner. Furthermore, the objective of the present invention is achieved by the processor reading the program from the storage medium and executing it. The processor can be, for example, a CPU (Central Processing Unit). The storage medium can be a non-temporary physical medium, such as ROM (Read Only Memory), as well as storage tapes, storage disks, memory cards, semiconductor memories, programmable logic circuits, etc. Additionally, RAM (Random Access Memory) for deploying the program can also be included. Furthermore, the program can be provided to the computer via any transmission medium capable of transmitting the program (communication networks, broadcast waves, etc.). Moreover, even if the program is in the form of a data signal carried on a carrier wave and transmitted electronically, one aspect of the present invention can still be achieved.

[0123] Positioning process: Before the substrate conveying device (e.g., a robotic arm) moves the test workpiece, the first image acquisition device acquires image information of the first mark. The acquisition device processes the image information to form control information for controlling the movement of the test workpiece. The controller then starts to control the substrate conveying device to adjust the test workpiece according to the control information, and generates a control command to stop the movement of the test workpiece based on the distance between the test workpiece and the first mark. This adjustment may include: left and right translation (i.e.,...) Figure 11 The movement of the test workpiece 11 along the first direction includes forward and backward translation, up and down translation, and / or tilting and oscillation. During the movement of the test workpiece 11 along the first direction, the first image acquisition unit continuously acquires image information of the first mark, and performs real-time control and adjustment of the substrate conveying device based on the image information to determine whether to stop the movement. These adjustments may include: left and right translation, up and down translation, and / or tilting and oscillation, until the test workpiece moves to a preset position within the carrier. Real-time control and adjustment of the test workpiece from its initial position to the preset position allows for precise placement of the test workpiece at the preset position.

[0124] The aforementioned second image acquisition unit and second mark further ensure the conveying accuracy of the test workpiece, ensuring its delivery to the preset position on the carrier and its levelness. During the movement of the test workpiece along the first direction, the second image acquisition unit acquires image information with the second mark in real time. The acquisition unit simultaneously processes this image information and combines it with the image information acquired by the first image acquisition unit to comprehensively interpret and analyze it to form control information for controlling the movement of the test workpiece. The controller adjusts the test workpiece according to the control information and the base plate conveying device. For example, when the second image acquisition unit acquires image information with a stop mark, the acquisition unit directly generates a control command to stop the movement of the test workpiece based on this image information with the stop mark, thus positioning the test workpiece in the first direction of movement. At this time, the acquisition unit can also adjust the test workpiece in the left and right directions (i.e., based on the image information fed back by each image acquisition unit). Figure 11 The system allows for fine-tuning in the forward / backward direction, vertical direction, and horizontal alignment. Throughout the entire process of moving the test workpiece from start to stop, continuous dynamic adjustments are made to ensure that the workpiece is precisely positioned at the predetermined location when it reaches the intended position.

[0125] The aforementioned gyroscope configuration further ensures the accuracy of the test workpiece transport, guaranteeing a higher level of horizontality when transported to the preset position on the carrier. During the test workpiece's movement along the first direction, the gyroscope measures the workpiece's rotation angle in real time. The acquisition unit obtains this rotation angle and, combined with image information acquired by the first and second image acquisition units, performs comprehensive interpretation and analysis to form control information for controlling the test workpiece's movement. The rotation angle is used as the control parameter for leveling adjustment within this control information. The controller adjusts the test workpiece using the base plate transport device based on the control information.

[0126] Figure 11 This is a schematic diagram of the structure of the carrier in an embodiment of this disclosure.

[0127] like Figure 11 As shown in the embodiments, this disclosure also discloses a substrate transport carrier 20. The carrier 20 is used in the aforementioned positioning detection device 10 to measure the positional relationship between the test workpiece 11 and the carrier 20. The carrier 20 includes a support portion 21, a first side surface, and a marking assembly 23.

[0128] The support part 21 is used to place the test workpiece 11.

[0129] In some embodiments, the support portion 21 is a hollow structure comprising a plurality of support members capable of supporting the test workpiece 11 or the substrate.

[0130] It is understandable that the support part 21 is sufficient to support the test workpiece or substrate, and that it is provided with sidewalls around the preset position for setting the marking components.

[0131] The first side is the front side located in the first direction of movement within the positioning detection device 10. Specifically, with Figure 11 Looking in the direction shown, when the positioning detection device 10 moves from left to right and is placed on the support 21, the first side is the left side 22; when the positioning detection device 10 moves from top to bottom and is placed on the support 21, the first side is the side where the support 21 is located. At this time, the support 21 not only needs to be able to support the test workpiece, but also needs to have a part that can set the first mark 231.

[0132] The marking component 23 includes a first mark 231, which can be acquired by the first image acquisition element 121 in the positioning detection device 10. When the test workpiece 11 is located at a preset position of the support 21, the center of the first mark 231 is adapted to the position of the first image acquisition element 121.

[0133] The center of the first mark 231 is adapted to the position of the first image acquisition component 121. It can be understood that the mark component can limit the preset position in the plane of the horizontal and vertical directions. In this way, the first mark 231 can ensure that the level and positioning accuracy of the test workpiece when it is at the preset position, without any left-right, front-back or high-low offset.

[0134] Specifically, the center of the first mark 231 is directly opposite the first image acquisition element 121.

[0135] In some embodiments, the carrier 20 further includes at least one second side, all of which are parallel to the first direction of movement.

[0136] Specifically, with Figure 11 Viewed from the indicated direction, when the positioning detection device 10 moves from left to right and is placed on the support 21, the second side includes any one or more of the front side 24a, the rear side 24b, and the top side (not shown in the figure); when the positioning detection device 10 moves from top to bottom and is placed on the support 21, the second side includes any one or more of the front side 24a, the rear side 24b, the left side 22, and the right side (not shown in the figure) which is parallel to and opposite to the left side 22.

[0137] Specifically, when the positioning detection device 10 moves from left to right and is placed on the support 21, the front side 24a and / or the rear side 24b include a plurality of spaced sidewalls, and the second mark 232 is disposed on the spaced sidewalls.

[0138] It is understandable that the second side only needs to be able to set the second mark 232, and there are no requirements on whether the second side is continuous or spaced out, nor are there any requirements on the shape of the second side.

[0139] The marking component 23 also includes at least one second mark 232, all of which are disposed on at least one second side. The position of the second mark 232 satisfies that the second image acquisition component 122 can acquire the second mark 232 during the transport of the test workpiece 11.

[0140] Specifically, the shape, position setting, and distribution of the first mark 231 and the second mark 232 are the same as those described in the positioning detection device 10. Please refer to the description in the positioning detection device 10, and it will not be repeated here.

[0141] Figure 14 This is a structural diagram of the positioning acquisition system in an embodiment of this disclosure.

[0142] This disclosure provides a positioning and acquisition system 100 for substrate conveying. The positioning and acquisition system 100 is used to measure the positional relationship between the test workpiece 11 and the carrier 20. For example... Figure 14 As shown, the substrate transport positioning acquisition system 100 includes the above-mentioned positioning detection device 10 and the above-mentioned carrier 20.

[0143] When the test workpiece 11 of the positioning detection device 10 moves from the initial position along the first movement direction or moves to the preset position, the trajectory acquisition component 12 of the positioning detection device 10 collects the image information of the marking component 23 on the carrier 20, and the acquisition device 13 of the positioning detection device 10 acquires the image information, thereby obtaining the position information of the test workpiece 11 and the carrier 20.

[0144] This disclosure also provides a method for positioning and acquiring substrates during transport. The positioning and acquiring method is used to measure the positional relationship between a test workpiece and a carrier. The method includes the following steps: during the movement of the test workpiece 11 along a first direction, image information of a marking component 23 on the carrier 20 is acquired in real time; based on feedback from the image information, the test workpiece 11 is controlled to move to a preset position on the carrier 20; and motion information of the test workpiece 11 is acquired. The marking component 23 is used to define the preset position, and the motion information includes: the spatial offset of the test workpiece 11 during transport, and / or, the transport trajectory line of the test workpiece 11.

[0145] Specifically, the transport trajectory of the test workpiece 11 includes all adjustment movements as the test workpiece moves from its initial position to a preset position, including the left and right directions (i.e., Figure 11 Fine-tuning of the front-back direction, the up-down direction, and the horizontality.

[0146] In some embodiments, the marking component 23 includes at least one first mark 231, the first mark 231 is located on the first side of the carrier 20, the first side is in front of the first movement direction, and when the test workpiece 11 is located at a preset position of the carrier 20, the center of the first mark 231 is adapted to the position of the first image acquisition component 121; obtaining the motion information of the test workpiece 11 includes: according to the first mark 231 in the image information, when it is determined that the current posture of the test workpiece 11 is offset from a preset position in the horizontal, vertical and left-right directions, obtaining the offset direction and calculating the offset amount, and recording the offset direction and offset amount as the spatial offset amount corresponding to the current posture.

[0147] Specifically, when the test workpiece 11 is located at the preset position of the carrier 20, the center of the first mark 231 is directly opposite the first image acquisition unit 121.

[0148] Specifically, the motion information may also include: controlling the test workpiece 11 to be transported along a straight path to a preset position on the carrier based on the spatial offset corresponding to the current posture, and using this straight path as the transport trajectory line of the substrate. Alternatively, controlling the test workpiece 11 to be transported at a set speed along a straight path to a preset position on the carrier 20 based on the spatial offset corresponding to the current posture, and recording the transport time. Alternatively, controlling the test workpiece 11 to be transported along a straight path to a preset position on the carrier 20 based on a set initial speed and a set acceleration (which can be constant acceleration or variable acceleration, measured by an acceleration acquisition device) based on the spatial offset corresponding to the current posture, and recording the transport time. Alternatively, using the transport trajectory line of the test workpiece 11 as the transport trajectory line of the substrate.

[0149] Furthermore, those skilled in the art will understand that, in more optimized application scenarios, the test workpiece and control method provided by this invention can map the complete movement trajectory of the test workpiece. Analysis of the movement trajectory reveals the position and manner in which the test workpiece deviated. Therefore, during the processing and transfer of production workpieces (e.g., wafers, PCBs) by the robotic arm, fine adjustments can be made based on the movement trajectory obtained from the test workpiece. For example, if a leftward and downward deviation occurs at position A, the robotic arm can be pre-adjusted to the right and upward to ensure that the production workpiece does not deviate at position A. Similarly, the movement trajectory of the production workpiece in the actual production process can be optimized, significantly reducing its deviation. Preferably, the test workpiece can be used periodically to test the movement trajectory, and then the movement trajectory can be used again in the formal production process to readjust the production workpiece transfer trajectory. This repeated process can greatly reduce the deviation, resulting in improved production efficiency.

[0150] Precise positioning to the preset position can be understood as ensuring that the distance between the test workpiece and each side of the carrier meets the design requirements in terms of left and right, front and back, and top and bottom. Using a straight path as the transport trajectory, or using a set speed and measurement time as the control parameters for the substrate, or using a set initial speed, a set constant acceleration, and then measurement time as the control parameters for the substrate, facilitates continuous positioning and transport of the substrate. It eliminates the need for real-time adjustment of the substrate transport device's specific travel posture; only the initial posture (i.e., initial position information) of the substrate when it is clamped and ready for transport is required.

[0151] In some embodiments, during the movement of the test workpiece along the first direction, the rotation angle of the test workpiece measured by the gyroscope is acquired in real time, and the test workpiece is controlled to move to a preset position on the carrier based on the image information and rotation angle feedback.

[0152] This disclosure also provides a substrate transport method. The substrate transport method includes the following steps:

[0153] Obtain the current orientation of the substrate, which includes the position data of the substrate in the horizontal and vertical planes.

[0154] Based on the current posture, the spatial offset and / or transport trajectory line corresponding to the current posture are searched in the motion calibration database to form a control command for controlling the movement of the substrate transport device. The control command is used to make the substrate transport device transport the substrate to a preset position in the carrier. The motion calibration database is formed by the motion information of the test workpiece obtained by the positioning acquisition method described above.

[0155] Specifically, the test workpiece and the workpiece to be processed (such as a substrate) have the same size and shape. The current posture is the initial position when the substrate conveying device (such as a robot) holds the test workpiece or the workpiece to be processed, that is, the initial posture of the substrate conveying device when holding the workpiece to be processed from the previous process to the current processing process, which is also the initial position in the positioning acquisition method.

[0156] In some embodiments, the parameters in the motion calibration database further include:

[0157] During the movement of the test workpiece along the first direction, the acceleration acquisition device measures the acceleration of the test workpiece in real time, and generates control commands for the movement of the control board conveying device based on the conveying trajectory line, initial velocity and acceleration.

[0158] After obtaining the spatial offset during the transport of the test workpiece, the posture is adjusted according to the spatial offset. The uniform speed time required to transport the test workpiece at a constant speed to a preset position in the carrier is measured. A control command for the movement of the control board transport device is generated based on the spatial offset, the uniform speed time, and the constant speed. Alternatively, the speed change time required to transport the test workpiece at an initial speed to a preset position in the carrier and the acceleration during the transport process are measured. A control command for the movement of the control board transport device is generated based on the spatial offset, the initial speed, the speed change time, and the acceleration. Alternatively, the straight path when the test workpiece is transported linearly to a preset position in the carrier is measured. A control command for the movement of the control board transport device is generated based on the spatial offset and the straight path.

[0159] Specifically, when the test workpiece is transported to the preset position inside the carrier at an initial speed, the first half of the journey is a uniformly accelerated movement and the second half is a uniformly decelerated movement.

[0160] Specifically, when measuring the straight path of the test workpiece as it is linearly transported to a preset position within the carrier, the test workpiece can move in a straight line at any speed. For example, the length of the straight path can be obtained by controlling the speed and time of the test workpiece. The control command for the straight path is decomposed into speed and time parameters according to the calculation logic of the distance, so that the set speed and time satisfy the requirement that the substrate can move the entire length of the straight path. The speed can be variable or constant.

[0161] The text and accompanying drawings in this disclosure are provided by way of example only to aid in understanding this disclosure. They should not be construed as limiting the scope of this disclosure in any way. Although certain embodiments and examples have been provided, it will be apparent to those skilled in the art, based on the content disclosed herein, that changes can be made to the illustrated embodiments and examples without departing from the scope of this disclosure.

[0162] Although this disclosure has been described with reference to exemplary embodiments, various changes and modifications may be suggested to those skilled in the art. This disclosure is intended to cover such changes and modifications that fall within the scope of the appended claims.

[0163] Nothing described in this disclosure should be construed as implying that any particular element, step, or function is an essential element that must be included within the scope of the claims. The scope of the patent subject matter is defined only by the claims.

Claims

1. A position detecting device for substrate transport for measuring a positional relationship between a test workpiece and a carrier, characterized by, include: The test workpiece is configured to be transported from an initial position along a first direction of motion to a preset position within the carrier; A trajectory acquisition component is disposed on the test workpiece. The trajectory acquisition component includes at least a first image acquisition component and a second image acquisition component. The first image acquisition component is located on a first surface of the test workpiece, and the first surface is at the front end of the first movement direction. The second image acquisition component is disposed on a second surface of the test workpiece, and the second surface is parallel to the first movement direction. as well as The acquisition device, connected to the trajectory acquisition component, is at least used to acquire image information fed back by the trajectory acquisition component when the test workpiece moves from the initial position along the first motion direction or moves to the preset position, thereby obtaining the position information of the test workpiece and the carrier. The image information includes at least information corresponding to a marking component set on the carrier. The marking component includes at least one first mark and at least one second mark. The first mark is located on a first side of the carrier, which is in front of the first direction of movement. When the test workpiece is located at a preset position on the carrier, the center of the first mark is adapted to the position of the first image acquisition device. The first mark includes two mutually perpendicular scale lines. All second marks are set on at least one second side of the carrier parallel to the first direction of movement. The position of the second mark satisfies the following condition: during the transport of the test workpiece, the second image acquisition device can acquire the second mark. The second mark includes a guide line, a first scale line, and a second scale line. The first scale line and the second scale line are mutually perpendicular. The first scale line is parallel to the first direction of movement, and the guide line is on the same straight line as the first scale line.

2. The position detecting apparatus according to claim 1, characterized by The location information includes one or more of the following: - The spatial offset of the test workpiece relative to its initial position when it moves to the preset position; - Information on the gap distance between the test workpiece and the carrier; - The horizontality information of the test workpiece and the carrier; and - The transport trajectory line of the test workpiece.

3. The positioning detection device according to claim 1 or 2, characterized in that, The first marker is any one or more of the following: - Three equally spaced marking lines / scale lines; - A rectangular frame, and a marker line is provided within the rectangular frame; and - A grid matrix composed of multiple grids.

4. The positioning detection device according to claim 1 or 2, characterized in that, The trajectory acquisition component further includes at least one or more of the following components: An accelerometer is connected to the acquisition unit, and the acquisition unit obtains the acceleration of the test workpiece at least through the accelerometer. A gyroscope is connected to the acquisition device, which obtains at least the rotation angle of the test workpiece through the gyroscope.

5. The positioning detection device according to claim 1, characterized in that, The position of the second mark satisfies the following condition: during the transport of the test workpiece, the second image acquisition device is able to be directly aligned with the center of the second mark.

6. The positioning detection device according to claim 1, characterized in that, When a second mark is provided on the second side, the guide line extends to both ends of the second side. When multiple second marks are provided on the second side, the guide lines of two adjacent second marks are connected, and the guide lines of the two second marks at both ends extending toward the end of the second side extend to the end of the second side.

7. The positioning detection device according to claim 1, characterized in that, The second marker includes a stop marker. When the image information acquired by the acquirer contains the stop marker, control information is formed to stop the movement of the test workpiece.

8. The positioning detection device according to claim 1, characterized in that, There are two second sides, which are located on different sides of the movement direction of the test workpiece. Each of the two second sides is provided with a plurality of second marks, and each second mark is staggered in the first movement direction.

9. The positioning detection device according to claim 1 or 2, characterized in that, The acquisition device is disposed inside the test workpiece, or the acquisition device is wirelessly or wiredly connected to the trajectory acquisition component.

10. A carrier for transporting a substrate, used in the positioning detection device according to any one of claims 1 to 9 to measure the positional relationship between a test workpiece and the carrier, characterized in that, At least including: The support portion is at least used to support the test workpiece; First perspective; At least one second side, and all second sides are parallel to the first direction of movement; as well as The marking component includes at least one first mark and at least one second mark, the first mark being located on the first side, and all second marks being disposed on at least one second side. Wherein, the first side is located in front of the first direction of movement in the positioning and detection device, and the test workpiece is located at a preset position of the support, the center of the first mark is adapted to the position of the first image acquisition element, the first mark includes two mutually perpendicular scale lines, and the position of the second mark satisfies the following: during the transport of the test workpiece, the second image acquisition element in the positioning and detection device can acquire the second mark, the second image acquisition element is disposed on the second surface of the test workpiece, the second surface is parallel to the first direction of movement, the second mark includes a guide line, a first scale line and a second scale line, the first scale line and the second scale line are mutually perpendicular, the first scale line is parallel to the first direction of movement, and the guide line and the first scale line are on the same straight line.

11. The carrier according to claim 10, characterized in that, The first marker is any one or more of the following: - Three equally spaced marking lines / scale lines; - A rectangular frame, and a marker line is provided within the rectangular frame; and - A grid matrix composed of multiple grids.

12. The carrier according to claim 10, characterized in that, During the transport of the test workpiece, the second image acquisition device is aligned with the center of the second mark.

13. The carrier according to claim 10, characterized in that, When a second mark is provided on the second side, the guide line extends to both ends of the second side. When multiple second marks are provided on the second side, the guide lines of two adjacent second marks are connected, and the guide lines of the two second marks located at both ends extend toward the end of the second side.

14. The carrier according to claim 10, characterized in that, The second marker includes a stop marker. When the image information acquired by the acquirer contains the stop marker, control information is formed to stop the movement of the test workpiece.

15. The carrier according to claim 10, characterized in that, When there are two second sides, and multiple second marks are provided on each of the two second sides, the second marks are staggered in the first direction of movement.

16. A positioning and acquisition system for substrate conveying, used to measure the positional relationship between a test workpiece and a carrier, characterized in that, The device includes a positioning detection device according to any one of claims 1 to 9 and a carrier according to any one of claims 10 to 15, wherein when the test workpiece of the positioning detection device moves from an initial position along a first movement direction or moves to a preset position, the trajectory acquisition component of the positioning detection device acquires image information of the marking component on the carrier, and the acquisition unit of the positioning detection device acquires the image information to obtain the position information of the test workpiece and the carrier.

17. A method for obtaining the positioning of a substrate during transport, used to measure the positional relationship between a test workpiece and a carrier, characterized in that: During the movement of the test workpiece along the first direction of motion, image information of the marking component on the carrier is acquired in real time. Based on the image information, the test workpiece is controlled to move to a preset position on the carrier, and motion information of the test workpiece is acquired. The marking component is used to define the preset position, and the motion information includes: the spatial offset of the test workpiece during the conveying process, and / or the conveying trajectory line of the test workpiece. The marking component includes at least one first mark and at least one second mark. The first mark is located on a first side of the carrier, which is in front of the first direction of movement. When the test workpiece is located at a preset position on the carrier, the center of the first mark is aligned with the position of the first image acquisition device. The first mark includes two mutually perpendicular scale lines. All second marks are disposed on at least one second side of the carrier parallel to the first direction of movement. The position of the second mark satisfies the following condition: during the transport of the test workpiece, the second image acquisition device can acquire the second mark. The second mark includes a guide line, a first scale line, and a second scale line. The first scale line and the second scale line are perpendicular to each other. The first scale line is parallel to the first direction of movement, and the guide line is on the same straight line as the first scale line. Acquiring the motion information of the test workpiece includes: Based on the first and second markers in the image information, when it is determined that the current posture of the test workpiece is offset from the preset position in the horizontal and vertical directions, the offset direction is obtained and the offset amount is calculated. The offset direction and offset amount are recorded as the spatial offset amount corresponding to the current posture.

18. The positioning acquisition method according to claim 17, characterized in that, When the test workpiece is located at a preset position on the carrier, the center of the first mark is directly opposite the first image acquisition device.

19. The positioning acquisition method according to claim 17, characterized in that, During the movement of the test workpiece along the first direction, the rotation angle of the test workpiece, measured by a gyroscope mounted on the test workpiece, is acquired in real time. Based on the image information and the rotation angle feedback, the test workpiece is controlled to move to a preset position on the support.

20. A substrate transport method, characterized in that: Obtain the current orientation of the substrate, which includes the position data of the substrate in the horizontal and vertical planes; Based on the current posture, the spatial offset and / or transport trajectory line corresponding to the current posture are searched in the motion calibration database to form a control command for controlling the movement of the substrate transport device. The control command is used to cause the substrate transport device to transport the substrate to a preset position within the carrier. The motion calibration database is formed by the motion information of the test workpiece obtained by the positioning acquisition method as described in any one of claims 17-19.

21. The substrate transport method according to claim 20, characterized in that: The parameters in the motion calibration database also include: During the movement of the test workpiece along the first direction, the acceleration acquisition unit measures the acceleration of the test workpiece in real time, and generates control commands for the movement of the control board conveying device based on the conveying trajectory line, initial velocity, and acceleration; and After obtaining the spatial offset during the transport of the test workpiece, the posture is adjusted according to the spatial offset, and the uniform speed time required to transport the test workpiece to a preset position in the carrier at a constant speed is measured. A control command for controlling the movement of the substrate transport device is generated based on the spatial offset, the uniform speed time, and the constant speed. Alternatively, the speed change time required to transport the test workpiece to a preset position in the carrier at an initial speed and the acceleration during the transport process are measured, and a control command for controlling the movement of the substrate transport device is generated based on the spatial offset, the initial speed, the speed change time, and the acceleration. Alternatively, the straight path when the test workpiece is transported linearly to the preset position in the carrier is measured, and a control command for controlling the movement of the substrate transport device is generated based on the spatial offset and the straight path.

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