Advanced fluid handling methods and systems
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- FUJIFILM ELECTRONIC MATERIALS U S A INC
- Filing Date
- 2023-10-06
- Publication Date
- 2026-06-23
Smart Images

Figure 0007878631000001 
Figure 0007878631000002 
Figure 0007878631000003
Abstract
Claims
1. A plurality of material tanks, each configured to receive materials used to prepare a chemical composition, wherein the chemical composition is an abrasive composition prepared from components comprising a diluent, an acid, a base, and abrasive particles, and each material tank includes a first recirculation loop in fluid communication with the respective material tank, and the first recirculation loop is configured to recirculate at least one of each material back into the respective material tank; At least one mixing tank into which multiple types of materials from the multiple material tanks are mixed to form a chemical composition, wherein the mixing tank is in fluid communication independently of each of the multiple material tanks, and is configured to continuously receive the multiple types of materials from the multiple material tanks and to continuously deliver the chemical composition downstream, the mixing tank has a capacity of 10 liters to 1,500 liters, and the mixing tank includes a second recirculation loop in fluid communication with the mixing tank, and the second recirculation loop is configured to recirculate the chemical composition back to the mixing tank. Multiple fluid flow controller units, each fluid flow controller unit configured to adjust the flow rate of at least one material from each material tank to the at least one mixing tank, the flow rate configured to provide a continuous flow of each of the at least one material and the chemical composition through the system. A holding tank located downstream of the mixing tank and in fluid communication with the mixing tank, wherein the holding tank is configured to continuously receive the chemical composition from the mixing tank, the holding tank includes a third recirculation loop in fluid communication with the holding tank, and the third recirculation loop is configured to recirculate the chemical composition back to the holding tank, and, A packaging station configured to receive the chemical composition and package the chemical composition into a product, A system that includes, The system comprises at least one flow controller unit between the at least one mixing tank and the at least one holding tank, which controls the continuous transfer of the chemical composition between the at least one mixing tank and the at least one holding tank. It optionally includes at least one flow controller unit configured to facilitate this, The system optionally includes at least one filtration device configured to receive and filter a chemical composition, which is in fluid communication with the mixing tank or the at least one holding tank. The packaging station is located downstream of the filtration device, which may include at least one holding tank or optionally the filtration device. The system is configured to form in-process steady-state material flows and chemical composition flows.
2. The system according to claim 1, wherein the at least one mixing tank further comprises an agitator, a vortex, a turbulent mixer, or a combination thereof.
3. The system according to claim 1, further comprising at least one quality determination unit integrally attached to a system component selected from the group consisting of the plurality of material tanks, the at least one holding tank, the at least one filtration device, and connecting pipes.
4. The system according to claim 3, wherein the quality determination unit includes a pH meter, a conductivity meter, a concentration meter, or an LPC (Large Particle Count) meter.
5. The system according to claim 1, wherein the mixing tank has a capacity of 40 liters to 1,500 liters.
6. The system according to claim 1, further comprising a fluid transfer unit configured to communicate with each material tank and to continuously transfer the material in each material tank to the mixing tank.
7. The system according to claim 1, further comprising a load cell configured to contact each material tank and measure the weight of the contents in each material tank.
8. The system according to claim 1, wherein the at least one holding tank has a capacity of 1,500 liters to 20,000 liters.
9. The system according to claim 1, including the filtration device.
10. The system according to claim 1, further comprising a plurality of fluid transfer units, each configured to continuously transfer material from a system component selected from the group consisting of a material tank, a mixing tank, and a holding tank to another system component selected from the group consisting of a mixing tank, a holding tank, and a packaging station.
11. The system according to claim 1, further comprising at least one heating unit configured to independently heat system components selected from the group consisting of a material tank, a mixing tank, and a holding tank.
12. The system according to claim 1, comprising a first material tank, a second material tank, a third material tank, and a fourth material tank, wherein the first material tank contains a diluent, the second material tank contains an acid, the third material tank contains a base, and the fourth material tank contains abrasive particles.
13. The second recirculation loop includes a pipe connecting the outlet and inlet of the mixing tank. The system described in claim 1.
14. The system according to claim 1, wherein the third recirculation loop includes a pipe connecting the outlet and inlet of the holding tank.
15. The system according to claim 1, configured to perform a process for preparing a chemical composition in which the material received by the mixing tank and the chemical composition delivered downstream from the mixing tank form an in-process steady state.