Fluoroolefin decomposition apparatus and fluoroolefin detection apparatus
The use of basic alkaline earth metal silicates and platinum/rhodium/ruthenium catalysts in fluoroolefin decomposition devices addresses inefficiencies in existing technologies, enabling efficient catalysis and detection of fluoroolefins in semiconductor manufacturing.
JP7894751B2Active Publication Date: 2026-07-24NEW COSMOS ELECTRIC CO LTD
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Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- NEW COSMOS ELECTRIC CO LTD
- Filing Date
- 2022-07-13
- Publication Date
- 2026-07-24
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Abstract
To provide a fluoroolefin detection device capable of efficiently causing catalytic reaction of fluoroolefin.SOLUTION: The fluoroolefin detection device 100 comprises: a fluoroolefin decomposition part 30 for performing catalytic reaction of fluoroolefin while involving a molecule including hydrogen atoms which is a water molecule, for example; and a gas detection part 40 which detects components in gas G to be detected generated by catalytic reaction of fluoroolefin by the fluoroolefin decomposition part 30. The fluoroolefin decomposition part 30 includes: a catalyst cylinder 31 which has a catalyst 31b for performing catalytic reaction of fluoroolefin while involving a molecule including hydrogen atoms which is a water molecule, for example; and a heating mechanism 32 for causing catalytic reaction. The catalyst 31b contains an alkaline earth metal silicate.SELECTED DRAWING: Figure 1
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