Infrared detection device, temperature measuring device, and infrared detection method
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- HORIBA LTD
- Filing Date
- 2022-12-26
- Publication Date
- 2026-08-04
Smart Images
Figure 0007900279000001 
Figure 0007900279000002 
Figure 0007900279000003
Abstract
Description
Technical Field
[0001] The present application relates to an infrared detection device, a temperature measurement device, and an infrared detection method.
Background Art
[0002] Conventionally, for example, an infrared detection device includes a first sensor and a second sensor that detect the amount of infrared rays incident from a target surface along a first direction and a second direction orthogonal to each other (for example, Patent Document 1). In the first direction view, the first intersection angle between the optical axis of the first sensor and the target surface is smaller than the second intersection angle between the optical axis of the second sensor and the target surface.
[0003] By the way, in the first direction view, since the first intersection angle is small, the length in the second direction of the region (detection field of view) of the target surface where infrared rays are detected by the first sensor becomes long. Thus, the smaller the first intersection angle in the first direction view, the longer the length in the second direction required on the target surface.
Prior Art Documents
Patent Documents
[0004]
Patent Document 1
Summary of the Invention
Problems to be Solved by the Invention
[0005] Therefore, the problem is to provide an infrared detection device, a temperature measurement device, and an infrared detection method capable of suppressing the increase in the length in the second direction of the detection field of view.
Means for Solving the Problems
[0006] The infrared detection device is an infrared detection device that detects infrared radiation from a target surface along a first direction and a second direction which are mutually orthogonal, and has a first detection optical path that extends toward the target surface, and includes a first detection unit that detects the amount of infrared radiation incident from the first detection optical path, the optical axis of the first detection unit intersects the target surface at an inclination in the first direction view, and the first detection unit includes a first sensor that detects the amount of infrared radiation incident from the first detection optical path, and a first optical system that emits infrared radiation incident from the target surface toward the first sensor, and the first optical system converts the first incident field of view angle in the first direction view in the incident first detection optical path to the first exit field of view angle of the exit first detection optical path, and the first incident field of view angle is smaller than the first exit field of view angle.
[0007] The temperature measuring device comprises the infrared detection device and a processing unit that calculates the temperature of the target surface based on the amount of infrared radiation detected by the first detection unit and the second detection unit.
[0008] The infrared detection method involves detecting infrared radiation from the target surface using the infrared detection device described above. [Brief explanation of the drawing]
[0009] [Figure 1] Schematic diagram of a temperature measuring device according to one embodiment. [Figure 2] Schematic diagram of the infrared detection device according to the same embodiment, viewed from the first direction. [Figure 3] Schematic diagram of the infrared detection device according to the same embodiment, viewed from a second direction ((a): overall view, (b): diagram of the first detection unit only, (c): diagram of the second detection unit only) [Figure 4] Schematic diagram of the sensor according to the same embodiment. [Figure 5] Perspective view of the reflective material according to the same embodiment [Figure 6] A first view of the reflective material according to the same embodiment. [Figure 7] Figure 6, section view along line VII-VII [Figure 8] First Direction View Diagram illustrating the detection light path and detection field of view of the first detection unit. [Figure 9] First Direction View illustrating the detection optical path and detection field of view of the first and second detection units. [Figure 10] Diagram illustrating the detection optical path of the first detection unit ((a): View from the fourth direction in Figure 8, (b): View from the second direction) [Figure 11] Third-direction view illustrating the detection light path and detection field of view of the first detection unit. [Modes for carrying out the invention]
[0010] In each drawing, the dimensions of components may be enlarged or reduced from their actual dimensions for the sake of clarity, and the dimensional ratios between drawings may not be consistent. Furthermore, in each drawing, some components may be omitted for the sake of clarity.
[0011] Terms including ordinal numbers such as "1st," "2nd," etc., are used to describe various components, but these terms are used solely for the purpose of distinguishing one component from others, and the components are not particularly limited by these terms. Furthermore, the number of components including ordinal numbers is not particularly limited; for example, there may be only one. Also, the ordinal numbers used in the following specification and drawings may differ from the ordinal numbers described in the claims.
[0012] The following description will explain one embodiment of a temperature measuring device and an infrared detection device with reference to Figures 1 to 11. Note that the following embodiment is provided as an example to aid in understanding the configuration of the temperature measuring device and infrared detection device, and does not limit the configuration of the temperature measuring device and infrared detection device.
[0013] As shown in FIG. 1, for example, the temperature measurement device 1 may include an infrared detection device (hereinafter, also simply referred to as a "detection device") 2 that detects infrared rays from the target surface X2 of the target object X1 that is the measurement target, a device main body 3 that can communicate with the detection device 2, and a communication means 4 that enables communication between the detection device 2 and the device main body 3. The device main body 3 may include, for example, an input unit 3a to which information is input, a processing unit 3b that processes information, and an output unit 3c that outputs information, as in this embodiment.
[0014] The communication means 4 may be, for example, wireless communication means such as Wi-Fi or Bluetooth, or may be, for example, wired communication means such as a communication cable. For example, the detection device 2 and the device main body 3 may be integrally configured by being arranged inside a common housing.
[0015] The input unit 3a is not particularly limited, but can be, for example, a button, a touch panel, etc. Information such as an instruction to start measuring the temperature of the target surface X2 may be input to the input unit 3a.
[0016] The processing unit 3b may include, for example, a processor such as a CPU and MPU, a memory such as a ROM and RAM, and various interfaces. Specifically, the processing unit 3b may include, for example, an acquisition unit that acquires information from the detection device 2 and the input unit 3a, a storage unit that stores information, a calculation unit that calculates information (for example, the temperature of the target surface X2), and a control unit that controls each part of the temperature measurement device 1 (for example, the output unit 3c).
[0017] The output unit 3c is not particularly limited, but can be, for example, a display device. The output unit 3c may also be, for example, a transmission means that outputs (transmits) a signal to the outside of the temperature measurement device 1. The output unit 3c may output the measurement result (for example, the temperature of the target surface X2).
[0018] As shown in FIGS. 2 and 3, the object X1 may be, for example, a metal material conveyed along the first direction D1 (including not only a configuration conveyed in a direction parallel to the first direction D1 but also a configuration conveyed in a direction intersecting the first direction D1 within 10°), and more specifically, it may be a metal sheet material. And the target surface X2 may be the surface of the metal material, for example, a surface along the first direction D1 and the second direction D2 respectively. Note that the object X1 is not particularly limited, and for example, it may be a stationary metal material.
[0019] Also, although not particularly limited, for example, in the present embodiment, the first direction D1 is the first lateral direction D1, the second direction D_{2} is the second lateral direction D2 orthogonal to the first direction D1, and the third direction D3 is the vertical direction D3 orthogonal to the first direction D1 and the second direction D2.
[0020] The detection device 2 may include, for example, as in the present embodiment, a first detection unit 5 and a second detection unit 6 that detect the amount of infrared rays from the target surface X2, and a fixing means 7 that fixes the first detection unit 5 and the second detection unit 6. Note that the infrared rays from the target surface X2 include, for example, infrared rays radiated (emitted) from the target surface X2 and infrared rays radiated (emitted) from objects around the object X1 and reflected by the target surface X2.
[0021] The first detection unit 5 may include, for example, as in the present embodiment, a first sensor 8 that detects the amount of incident infrared rays, and a first optical system 9 that emits infrared rays incident from the target surface X2 toward the first sensor 8. Thereby, the infrared rays from the target surface X2 enter the first sensor 8 via the first optical system 9.
[0022] The second detection unit 6 may include, for example, as in the present embodiment, a second sensor 10 that detects the amount of incident infrared rays, and a second optical system 11 that emits infrared rays incident from the target surface X2 toward the second sensor 10. Thereby, the infrared rays from the target surface X2 enter the second sensor 10 via the second optical system 11.
[0023] The fixing means 7 may, for example, include a base portion 7a, a first fixing portion 7b for fixing the first sensor 8 to the base portion 7a, a second fixing portion 7c for fixing the first optical system 9 to the base portion 7a, a third fixing portion 7d for fixing the second sensor 10 to the base portion 7a, and a fourth fixing portion 7e for fixing the second optical system 11 to the base portion 7a, as in this embodiment.
[0024] As a result, the base portion 7a and the first and second fixing portions 7b and 7c constitute a first heat transfer portion 7f connected to the first sensor 8 and the first optical system 9, respectively, and the first heat transfer portion 7f conducts heat between the first sensor 8 and the first optical system 9. In addition, the base portion 7a and the third and fourth fixing portions 7d and 7e constitute a second heat transfer portion 7g connected to the second sensor 10 and the second optical system 11, respectively, and the second heat transfer portion 7g conducts heat between the second sensor 10 and the second optical system 11.
[0025] Therefore, it is possible to suppress the occurrence of a temperature difference between sensors 8,10 and optical systems 9,11. As a result, the transfer of infrared radiation between sensors 8,10 and optical systems 9,11 can be suppressed, allowing sensors 8,10 to accurately detect the amount of infrared radiation from the target surface X2.
[0026] Furthermore, since the base portion 7a constitutes the first heat transfer section 7f and the second heat transfer section 7g, the first heat transfer section 7f and the second heat transfer section 7g are connected to each other. As a result, heat is conducted between the first sensor 8, the second sensor 10, the first optical system 9, and the second optical system 11, thereby suppressing the occurrence of temperature differences between the first sensor 8, the second sensor 10, the first optical system 9, and the second optical system 11.
[0027] Therefore, the transfer of infrared radiation between the first sensor 8, the second sensor 10, the first optical system 9, and the second optical system 11 can be suppressed. As a result, even if the first sensor 8, the second sensor 10, the first optical system 9, and the second optical system 11 are placed close together, the amount of infrared radiation from the target surface X2 can be accurately detected by the first and second sensors 8 and 10.
[0028] For example, the thermal conductivity of each heat transfer section 7f, 7g (specifically, the base section 7a and each fixing section 7b~7e) is preferably greater than the thermal conductivity of the housing 2a that houses each detection section 5, 6 and the fixing means 7. Although not particularly limited, the heat transfer sections 7f, 7g may be made of aluminum, for example, and the housing 2a may be made of a hard resin, for example.
[0029] While not particularly limited, the thermal conductivity of each heat transfer section 7f, 7g may be, for example, 100 (W / m·K) or higher, and preferably, for example, 200 (W / m·K) or higher. The detection device 2 may also be equipped with a device for introducing a heat transfer medium (for example, a gas at a constant temperature) inside the housing 2a. This can further suppress the occurrence of temperature differences between the sensors 8, 10 and the optical systems 9, 11.
[0030] The first optical system 9 may be composed of a single first reflective material (e.g., a mirror) 9a having a first reflective surface 9b, as in this embodiment. As a result, infrared light traveling from the target surface X2 toward the first reflective material 9a is incident on the first reflective surface 9b, reflected by the first reflective surface 9b, and then directed toward the first sensor 8.
[0031] The second optical system 11 may be composed of a second reflective material (e.g., a mirror) 11a having a second reflective surface 11b, as in this embodiment. As a result, infrared light traveling from the target surface X2 toward the second reflective material 11a is incident on the second reflective surface 11b, reflected by the second reflective surface 11b, and then directed toward the second sensor 10.
[0032] While not particularly limited, the percentage of infrared radiation reflected by the reflective surfaces 9b and 11b of the reflective materials 9a and 11a (infrared reflectance of the reflective surfaces 9b and 11b) may be, for example, 90%, preferably 95% or more, and more preferably 98% or more. This suppresses the absorption of infrared radiation by the reflective materials 9a and 11a, allowing the sensors 8 and 10 to accurately detect infrared radiation from the target surface X2.
[0033] While not particularly limited, for example, as in this embodiment, the first sensor 8 and the first optical system 9 may be positioned away from the object X1 (object surface X2) in the vertical direction D3 view. Also, while not particularly limited, for example, as in this embodiment, the second sensor 10 and the second optical system 11 may be positioned away from the object X1 (object surface X2) in the vertical direction D3 view.
[0034] Furthermore, the detection units 5 and 6 are equipped with optical axes 5a and 6a, respectively. The optical axes 5a and 6a of the detection units 5 and 6 are also the optical axes of the infrared light incident on the sensors 8 and 10. The optical axes 5a and 6a of each detection unit 5 and 6 may intersect the target surface X2 at an inclination in the first lateral direction D1 view, for example, as in this embodiment.
[0035] As a result, in the first lateral view D1, the first intersection angle θ1 between the optical axis 5a of the first detection unit 5 and the target surface X2 becomes less than 90° (for example, 45° or less), and the second intersection angle θ2 between the optical axis 6a of the second detection unit 6 and the target surface X2 becomes less than 90° (for example, 45° or less). Note that the first intersection angle θ1 may be smaller than the second intersection angle θ2, for example, as in this embodiment.
[0036] While not particularly limited, for example, if the object X1 is made of aluminum, the first intersection angle θ1 may be 2° to 6° and the second intersection angle θ2 may be 8° to 15°. Also, while not particularly limited, for example, the difference between the first intersection angle θ1 and the second intersection angle θ2 may be 4° to 10°.
[0037] Furthermore, the optical axes 5a and 6a of each detection unit 5 and 6 may intersect perpendicularly with the target surface X2 in the second lateral direction D2 view, for example, as in this embodiment. As a result, in the second lateral direction D2 view, the third intersection angle θ3 between the optical axis 5a of the first detection unit 5 and the target surface X2 becomes 90°, and the fourth intersection angle θ4 between the optical axis 6a of the second detection unit 6 and the target surface X2 becomes 90°.
[0038] The optical axes 5a and 6a that intersect the target surface X2 at the first to fourth intersection angles θ1 to θ4 are the optical axes of infrared rays incident from the target surface X2 to the detection units 5 and 6, and are also called the incident optical axis or the incident optical axis. Specifically, the incident optical axis is the optical axis between the target surface X2 and the optical systems 9 and 11 (specifically, the reflective surfaces 9b and 11b of the reflective materials 9a and 11a) among the optical axes 5a and 6a of the detection units 5 and 6.
[0039] Furthermore, although not particularly limited, for example, as in this embodiment, the length of the optical axis 5a of the first detection unit 5 may be the same as the length of the optical axis 6a of the second detection unit 6. Specifically, for example, the distance between the first sensor 8 and the first reflector 9a within the optical axis 5a of the first detection unit 5 may be the same as the distance between the second sensor 10 and the second reflector 11a within the optical axis 6a of the second detection unit 6, and the distance between the target surface X2 and the first reflector 9a within the optical axis 5a of the first detection unit 5 may be the same as the distance between the target surface X2 and the second reflector 11a within the optical axis 6a of the second detection unit 6.
[0040] Incidentally, since the reflectance and emissivity of the object X1 differ with respect to the object surface X2, if the intersection angles θ1 and θ2 between the optical axes 5a and 6a of the detection units 5 and 6 and the object surface X2 are different, the amount of infrared radiation detected by the detection units 5 and 6 will also be different. As a result, since the first intersection angle θ1 and the second intersection angle θ2 are different, the processing unit 3b (see Figure 1) calculates the temperature of the object surface X2 based on the amount of infrared radiation detected by the first detection unit 5 and the second detection unit 6.
[0041] The calculation method of the processing unit 3b is not particularly limited. For example, the processing unit 3b may calculate the temperature of the target surface X2 using simultaneous equations or the bisection method, based on the amount of infrared radiation detected by the first detection unit 5 and the second detection unit 6, and at least one of the known reflectance and emissivity at each intersection angle θ1 and θ2. This allows the temperature of the target surface X2 to be measured. Thus, the temperature measuring device 1 may be a non-contact type radiation thermometer, for example, as in this embodiment.
[0042] As shown in Figure 4, the first sensor 8 may comprise, for example, a light-receiving element 8a that detects infrared light, a lens 8b through which infrared light passes, an aperture 8c through which infrared light that has passed through the lens 8b passes, and a sensor body 8d that houses the light-receiving element 8a and the lens 8b. In this way, infrared light is received by the light-receiving element 8a by passing through the lens 8b and the aperture 8c.
[0043] The light-receiving element 8a may, for example, detect the temperature change when it absorbs infrared radiation as a change in electromotive force. Although not particularly limited, the light-receiving element 8a may be a thermal type such as a thermopile, which is made by arranging many thermocouples in series to form a thin film, or it may be a quantum type, for example.
[0044] Although not shown in the diagram, the second sensor 10 may also include a light-receiving element, lens, aperture, and sensor body, similar to the first sensor 8. While not particularly limited, the first sensor 8 and the second sensor 10 may, for example, share the same detection light path, i.e., be the same sensor.
[0045] As shown in Figures 5 to 7, the first reflective surface 9b of the first reflective material 9a may be formed in a concave shape, for example, when viewed in the first lateral direction D1. Alternatively, the first reflective surface 9b of the first reflective material 9a may be formed in a convex shape in a cross-section including the first lateral direction D1 and the second lateral direction D2, i.e., when viewed in the vertical direction D3, as in this embodiment.
[0046] The second reflective surface 11b of the second reflective material 11a may be formed in a concave shape in a view in the first lateral direction D1, for example, as in this embodiment (see Figures 2 and 9). Alternatively, the second reflective surface 11b of the second reflective material 11a may be formed in a convex shape in a cross-section including the first lateral direction D1 and the second lateral direction D2, i.e., in a view in the vertical direction D3, for example, as in this embodiment (see Figure 3).
[0047] Here, the detection optical paths 5b, 5d, 6b, 6d and detection fields 5c, 6c of the detection units 5 and 6 will be explained with reference to Figures 8 to 11.
[0048] As shown in Figure 8, the first detection unit 5 is equipped with first detection optical paths 5b and 5d that extend toward the target surface X2, and the first sensor 8 detects the amount of infrared light incident from the first detection optical paths 5b and 5d. The first detection optical path 5b between the target surface X2 and the first optical system 9 is called the incident first detection optical path 5b, and the first detection optical path 5d between the first optical system 9 and the first sensor 8 is called the outgoing first detection optical path 5d. That is, the outgoing first detection optical path 5d is the same as the detection optical path of the first sensor 8.
[0049] The first optical system 9 converts the first lateral view angle D1 in the first detection optical path 5b on the incident side (hereinafter referred to as the "first incident field of view angle") θ6 into the first exit field of view angle θ5 of the first detection optical path 5d on the exit side. In this embodiment, the first optical system 9 is a single first reflective material 9a, and not only the optical axis 5a on the incident side of the first detection unit 5 but also the optical axis 5a on the exit side intersects perpendicularly with the target surface X2 in the second lateral view D2. Therefore, the first exit field of view angle θ5 is the angle of the first lateral view D1 in the first detection optical path 5d on the exit side.
[0050] Furthermore, the first reflective surface 9b of the first reflective material 9a is formed in a concave shape in the first lateral direction D1 view. As a result, the first incident field of view angle θ6 is smaller than the first exit field of view angle θ5. Therefore, it is possible to suppress an increase in the length of the second lateral direction D2 in the detection field of view 5c of the first detection unit 5 (the region of the target surface X2 where infrared light is detected by the first detection unit 5).
[0051] In Figure 8, the dashed line illustrates the first detection optical path Y5b on the incident side when the first incident field of view angle θY6 is the same as the first exit field of view angle θ5. Furthermore, in the configuration where the first incident field of view angle θ6 is smaller than the first exit field of view angle θ5 (θ6 < θ5), the length of the second lateral D2 of the detection field of view 5c is shorter than the length of the second lateral D2 of the detection field of view Y5c in the configuration where the first incident field of view angle θY6 is the same as the first exit field of view angle θ5 (θY6 = θ5) (see also Figure 11).
[0052] Furthermore, while the reflectance and emissivity of the object X1 differ depending on the angle with respect to the object surface X2, the range of angles of infrared rays in the first detection optical path 5b with respect to the object surface X2 becomes smaller. As a result, the range of angles of infrared rays in the first detection optical path 5b with respect to the optical axis 5a of the first detection unit 5 becomes smaller. Therefore, the difference between the reflectance and emissivity of infrared rays in the first detection optical path 5b becomes smaller, which in turn improves the accuracy of detecting the amount of infrared rays.
[0053] Furthermore, as shown in Figure 9, the second detection unit 6 is equipped with second detection optical paths 6b and 6d that extend toward the target surface X2, and the second sensor 10 detects the amount of infrared radiation incident from the second detection optical paths 6b and 6d. The second detection optical path 6b between the target surface X2 and the second optical system 11 is called the incident second detection optical path 6b, and the second detection optical path 6d between the second optical system 11 and the second sensor 10 is called the outgoing second detection optical path 6d. In other words, the outgoing second detection optical path 6d is the same as the detection optical path of the second sensor 10.
[0054] The second optical system 11 converts the angle of the first lateral view D1 in the incident second detection optical path 6b (hereinafter referred to as the "second incident field of view angle") θ8 into the second exit field of view angle θ7 of the exit second detection optical path 6d. In this embodiment, the second optical system 11 is a single second reflective material 11a, and not only the incident optical axis 6a of the second detection unit 6 but also the exit optical axis 6a intersects perpendicularly with the target surface X2 in the second lateral view D2. Therefore, the second exit field of view angle θ7 becomes the angle of the first lateral view D1 in the exit second detection optical path 6d.
[0055] Furthermore, the second reflective surface 11b of the second reflective material 11a is formed in a concave shape in the first lateral direction D1 view. As a result, the second incident field of view angle θ8 is smaller than the second exit field of view angle θ7. Therefore, it is possible to suppress an increase in the length of the second lateral direction D2 in the detection field of view 6c of the second detection unit 6 (the region of the target surface X2 where infrared light is detected by the second detection unit 6).
[0056] Incidentally, while the first intersection angle θ1 is smaller than the second intersection angle θ2, for example, as in this embodiment, in the first lateral view D1, the concave radius of curvature of the first reflective surface 9b may be smaller than the concave radius of curvature of the second reflective surface 11b. As a result, the first incident field angle θ6 becomes smaller than the second incident field angle θ8.
[0057] Therefore, for example, it is possible to suppress a large difference in the length of the second lateral direction D2 between the detection field 5c of the first detection unit 5 and the detection field 6c of the second detection unit 6. Although not particularly limited, for example, the length of the second lateral direction D2 in the detection field 5c of the first detection unit 5 and the length of the second lateral direction D2 in the detection field 6c of the second detection unit 6 can be made the same.
[0058] Furthermore, as shown in Figure 10, the first optical system 9 converts the angle of the second lateral D2 view (hereinafter referred to as the "third incident field of view angle") θ10 in the first detection optical path 5b on the incident side to the third exit field of view angle θ9 of the first detection optical path 5d on the exit side. In this embodiment, the third exit field of view angle θ9 is the angle of the first detection optical path 5d on the exit side in the fourth direction D4 view shown in Figure 8.
[0059] In this embodiment, the first optical system 9 is a single first reflective material 9a, and not only the incident optical axis 5a of the first detection unit 5 but also the exit optical axis 5a intersects perpendicularly with the target surface X2 in the second lateral direction D2 view. Therefore, in the first direction D1 view, the intersection angle between the fourth direction D4 and the exit optical axis 5a is the same as the intersection angle between the second lateral direction D2 and the incident optical axis 5a.
[0060] Furthermore, the first reflective surface 9b of the first reflective material 9a is formed in a convex shape in a cross-section that includes the first transverse direction D1 and the second transverse direction D2. As a result, the third incident field of view angle θ10 is larger than the third exit field of view angle θ9, and therefore, given that the target surface X2 is the surface of a metal material being transported along the first transverse direction D1, the length of the first transverse direction D1 in the detection field of view 5c of the first detection unit 5 can be increased.
[0061] Therefore, because the length of the first lateral direction D1 in the detection field of view 5c is long, it is possible to suppress errors in the amount of infrared radiation detected by the first sensor 8 when, for example, the object X1 is transported along the first lateral direction D1 and the object surface X2 vibrates partially. As a result, for example, the detection error caused by such vibration in the first sensor 8 can be reduced.
[0062] In Figures 10(b) and 11, the dashed lines illustrate the first detection optical path Y5b and the first detection field Y5c when the third incident field angle θY10 is the same as the third exit field angle θ9. Furthermore, the length of the first lateral direction D1 of the detection field 5c in the configuration where the third incident field angle θ10 is greater than the third exit field angle θ9 (θ10>θ9) is longer than the length of the second lateral direction D2 of the detection field Y5c in the configuration where the third incident field angle θY10 is the same as the third exit field angle θ9 (θY10=θ9).
[0063] Furthermore, although not shown in the diagram, the second optical system 11 converts the angle of view in the second lateral direction D2 in the incident second detection optical path 6b (hereinafter referred to as the "fourth incident field of view angle") into the fourth exit field of view angle of the exit second detection optical path 6d. Since the second reflective surface 11b of the second reflective material 11a is formed in a convex shape in a cross-section including the first lateral direction D1 and the second lateral direction D2 (see Figure 3), the fourth incident field of view angle is larger than the fourth exit field of view angle.
[0064] Therefore, given that the target surface X2 is the surface of a metal material being transported along the first transverse direction D1, the length of the first transverse direction D1 in the detection field 6c of the second detection unit 6 can be increased. Although not particularly limited, for example, the length of the first transverse direction D1 in the detection field 5c of the first detection unit 5 and the length of the first transverse direction D1 in the detection field 6c of the second detection unit 6 may be made the same.
[0065] Thus, the first optical system 9 can make the detection field 5c of the first detection unit 5 a desired region, and the second optical system 11 can make the detection field 6c of the second detection unit 6 a desired region. Therefore, although not particularly limited, for example, the detection field 5c of the first detection unit 5 and the detection field 6c of the second detection unit 6 can be made to the same region.
[0066] While not particularly limited, for example, the first emission field of view angle θ5 and the third emission field of view angle θ9 may be the same. Specifically, the divergence angles of the first detection optical path 5b on the emission side, i.e., the detection optical path of the first sensor 8 (for example, the first emission field of view angle θ5 and the third emission field of view angle θ9), may be the same not only in the first lateral direction D1 and the second lateral direction D2, but also in any lateral direction.
[0067] Furthermore, although not particularly limited, for example, the second emission field of view angle θ7 and the fourth emission field of view angle may be the same. Specifically, the divergence angle of the second detection optical path 6d on the emission side, i.e., the detection optical path of the second sensor 10 (for example, the third emission field of view angle θ9 and the fourth emission field of view angle), may be the same not only in the first lateral direction D1 and the second lateral direction D2, but also in any lateral direction.
[0068] As described above, the infrared detection device 2 is, for example, as in this embodiment, an infrared detection device 2 that detects infrared rays from a target surface X2 along mutually orthogonal first directions D1 and second directions D2, respectively, and has first detection optical paths 5b and 5d that spread toward the target surface X2, and includes a first detection unit 5 that detects the amount of infrared rays incident from the first detection optical paths 5b and 5d, the optical axis 5a of the first detection unit 5 intersects the target surface X2 at an inclination in the view of the first direction D1, and the first detection unit 5 The system comprises a first sensor 8 that detects the amount of infrared radiation incident from the first detection optical paths 5b and 5d, and a first optical system 9 that emits infrared radiation incident from the target surface X2 toward the first sensor 8. Preferably, the first optical system 9 converts the first incident field of view angle θ6 in the first direction D1 view in the incident first detection optical path 5b to the first exit field of view angle θ5 of the exit first detection optical path 5d, and the first incident field of view angle θ6 is smaller than the first exit field of view angle θ5.
[0069] With this configuration, the first optical system 9 emits infrared light incident from the target surface X2 toward the first sensor 8, and the first incident field of view angle θ6 is smaller than the first outgoing field of view angle θ5. This makes it possible to suppress an increase in the length of the second direction D2 in the detection field of view 5c of the first detection unit 5.
[0070] Furthermore, the infrared detection device 2, for example as in this embodiment, has second detection optical paths 6b and 6d that extend toward the target surface X2, and further comprises a second detection unit 6 that detects the amount of infrared radiation incident from the second detection optical paths 6b and 6d, the optical axis 6a of the second detection unit 6 intersects the target surface X2 at an angle in the first direction D1 view, and the second detection unit 6 comprises a second sensor 10 that detects the amount of infrared radiation incident from the second detection optical paths 6b and 6d, and a second optical system 11 that emits infrared radiation incident from the target surface X2 toward the second sensor 10, and the second optical system 11 preferably converts the second incident field of view angle θ8 in the first direction D1 view of the second detection optical path 6b on the incident side to the second exit field of view angle θ7 of the second detection optical path 6d on the exit side, and the second incident field of view angle θ8 is smaller than the second exit field of view angle θ7.
[0071] With this configuration, the second optical system 11 emits infrared light incident from the target surface X2 toward the second sensor 10, and the second incident field of view angle θ8 is smaller than the second output field of view angle θ7. This makes it possible to suppress an increase in the length of the second direction D2 in the detection field of view 6c of the second detection unit 6.
[0072] Furthermore, in the infrared detection device 2, for example, as in this embodiment, it is preferable that, in the view in the first direction D1, the intersection angle θ1 between the optical axis 5a of the first detection unit 5 and the target surface X2 (in this embodiment, the first intersection angle) is smaller than the intersection angle θ2 between the optical axis 6a of the second detection unit 6 and the target surface X2 (in this embodiment, the second intersection angle) is smaller than the first incident field of view angle θ6 is smaller than the second incident field of view angle θ8.
[0073] With this configuration, in the view in the first direction D1, the intersection angle θ1 between the optical axis 5a of the first detection unit 5 and the target surface X2 is smaller than the intersection angle θ2 between the optical axis 6a of the second detection unit 6 and the target surface X2, while the first incident field angle θ6 is smaller than the second incident angle θ8. This makes it possible to suppress a large difference in the length of the second direction D2 between, for example, the detection field 5c of the first detection unit 5 and the detection field 6c of the second detection unit 6.
[0074] Furthermore, in the infrared detection device 2, for example, as in this embodiment, the target surface X2 is the surface of an object X1 being transported along the first direction D1, and the first optical system 9 converts the third incident field of view angle θ10 in the second direction D2 view in the first detection optical path 5b on the incident side to the third exit field of view angle θ9 in the first detection optical path 5d on the exit side, and it is preferable that the third incident field of view angle θ10 is larger than the third exit field of view angle θ9.
[0075] With this configuration, since the third incident field of view angle θ10 is larger than the third exit field of view angle θ9, the length of the first direction D1 in the detection field of view 5c of the first detection unit 5 can be increased, given that the target surface X2 is the surface of the object X1 being transported along the first direction D1.
[0076] Furthermore, in the infrared detection device 2, for example, as in this embodiment, the first optical system 9 is preferably a single reflective material (first reflective material in this embodiment) 9a that includes a reflective surface (first reflective surface in this embodiment) 9b that reflects infrared rays incident from the target surface X2 toward the first sensor 8, and the reflective surface 9b is preferably formed in a concave shape when viewed in the first direction D1.
[0077] With this configuration, the reflective surface 9b is formed in a concave shape when viewed in the first direction D1. As a result, the reflective surface 9b emits infrared light incident from the target surface X2 toward the first sensor 8, so that the first incident field of view angle θ6 becomes smaller than the first output field of view angle θ5.
[0078] Furthermore, in the infrared detection device 2, for example, as in this embodiment, the first optical system 9 is a single reflective material (in this embodiment, the first reflective material) 9a that includes a reflective surface (in this embodiment, the first reflective surface) 9b that reflects infrared rays incident from the target surface X2 toward the first sensor 8, and it is preferable that the reflective surface 9b is formed in a concave shape when viewed in the first direction D1, and in a convex shape in a cross-section of a plane including the first direction D1 and the second direction D2.
[0079] With this configuration, the reflective surface 9b is formed in a concave shape when viewed in the first direction D1. As a result, the reflective surface 9b emits infrared light incident from the target surface X2 toward the first sensor 8, so that the first incident field of view angle θ6 becomes smaller than the first output field of view angle θ5.
[0080] Furthermore, the reflective surface 9b is formed in a convex shape in a cross-section that includes the first direction D1 and the second direction D2. As a result, the reflective surface 9b emits infrared light incident from the target surface X2 toward the first sensor 8, so that the third incident field of view angle θ10 becomes larger than the third output field of view angle θ9.
[0081] Furthermore, the infrared detection device 2 is preferably configured to further include a first heat transfer unit 7f connected to the first sensor 8 and the first optical system 9, respectively, in order to conduct heat between the first sensor 8 and the first optical system 9, as in this embodiment.
[0082] With this configuration, since the first heat transfer unit 7f is connected to the first sensor 8 and the first optical system 9, heat conduction occurs between the first sensor 8 and the first optical system 9. This makes it possible to suppress the occurrence of a temperature difference between the first sensor 8 and the first optical system 9.
[0083] Furthermore, the infrared detection device 2 preferably comprises, for example, as in this embodiment, a first heat transfer unit 7f connected to the first sensor 8 and the first optical system 9, respectively, for heat conduction between the first sensor 8 and the first optical system 9, and a second heat transfer unit 7g connected to the second sensor 10 and the second optical system 11, respectively, for heat conduction between the second sensor 10 and the second optical system 11, wherein the first heat transfer unit 7f and the second heat transfer unit 7g are connected to each other for heat conduction between the first heat transfer unit 7f and the second heat transfer unit 7g.
[0084] With this configuration, the first heat transfer section 7f and the second heat transfer section 7g are connected to each other, so that heat conduction occurs between the first sensor 8, the second sensor 10, the first optical system 9, and the second optical system 11. This makes it possible to suppress the occurrence of temperature differences between the first sensor 8, the second sensor 10, the first optical system 9, and the second optical system 11.
[0085] Furthermore, the temperature measuring device 1 is preferably configured to include, for example, the infrared detection device 2 and a processing unit 3b that calculates the temperature of the target surface X2 based on the amount of infrared radiation detected by the first detection unit 5 and the second detection unit 6, as in this embodiment.
[0086] With this configuration, in the first direction D1 view, the intersection angle θ1 between the optical axis 5a of the first detection unit 5 and the target surface X2 is different from the intersection angle θ2 between the optical axis 6a of the second detection unit 6 and the target surface X2. Therefore, the processing unit 3b calculates the temperature of the target surface X2 based on the amount of infrared radiation detected by the first detection unit 5 and the second detection unit 6. This makes it possible to measure the temperature of the target surface X2.
[0087] Furthermore, a preferred method for detecting infrared radiation is, for example, as in this embodiment, to detect infrared radiation from the target surface X2 using the infrared detection device 2 described above.
[0088] This method makes it possible to suppress the length of the second direction D2 of the detection field 5c of the first detection unit 5 from becoming longer.
[0089] It should be noted that the temperature measuring device 1, infrared detection device 2, and infrared detection method are not limited to the configuration of the embodiment described above, nor are they limited to the effects described above. Furthermore, it goes without saying that the temperature measuring device 1, infrared detection device 2, and infrared detection method can be modified in various ways without departing from the spirit of the present invention. For example, it goes without saying that one or more of the configurations and methods, etc., related to the various modification examples described below may be arbitrarily selected and adopted in the configurations and methods, etc., of the embodiment described above.
[0090] (1) The infrared detection device 2 according to the above embodiment is configured to include a first detection unit 5 and a second detection unit 6. However, the infrared detection device 2 is not limited to this configuration. For example, the infrared detection device 2 may be configured to include only the first detection unit 5 and not the second detection unit 6.
[0091] (2) In the infrared detection device 2 according to the above embodiment, the second detection unit 6 is configured to include a second sensor 10 and a second optical system 11. However, the infrared detection device 2 is not limited to this configuration. For example, the second detection unit 6 may be configured to include only the second sensor 10 and not the second optical system 11.
[0092] (3) In addition, in the infrared detection device 2 according to the above embodiment, the optical axis 5a of the first detection unit 5 is configured to intersect the target surface X2 perpendicularly in the second direction D2 view. However, the infrared detection device 2 is not limited to this configuration. For example, the optical axis 5a of the first detection unit 5 may be configured to intersect the target surface X2 at an angle in the second direction D2 view. That is, for example, the optical axis 5a of the first detection unit 5 may be configured to intersect the target surface X2 at an angle in the first direction D1 view and the second direction D2 view, respectively.
[0093] (4) In addition, in the infrared detection device 2 according to the above embodiment, the optical axis 6a of the second detection unit 6 is configured to intersect the target surface X2 at an angle when viewed in the first direction D1, and to intersect the target surface X2 perpendicularly when viewed in the second direction D2. That is, the second intersection angle θ2 is less than 90°, and the fourth intersection angle θ4 is 90°. However, the infrared detection device 2 is not limited to this configuration.
[0094] For example, the optical axis 6a of the second detection unit 6 may be configured to intersect the target surface X2 at an inclination in the first direction D1 and the second direction D2, respectively. That is, the second intersection angle θ2 and the fourth intersection angle θ4 may be configured to be less than 90°.
[0095] Alternatively, for example, the optical axis 6a of the second detection unit 6 may be configured to intersect the target surface X2 perpendicularly in the first direction D1 and the second direction D2, respectively. That is, the second intersection angle θ2 and the fourth intersection angle θ4 may each be 90°.
[0096] Furthermore, for example, the optical axis 6a of the second detection unit 6 may be configured to intersect the target surface X2 perpendicularly in the first direction D1 view, and to intersect the target surface X2 at an angle in the second direction D2 view. That is, the second intersection angle θ2 may be 90°, and the fourth intersection angle θ4 may be less than 90°.
[0097] (5) In the infrared detection device 2 according to the above embodiment, the second incident field of view angle θ8 is smaller than the second exit field of view angle θ7. However, the infrared detection device 2 is not limited to this configuration. For example, the second incident field of view angle θ8 may be larger than the second exit field of view angle θ7. Also, for example, the second incident field of view angle θ8 may be the same as the second exit field of view angle θ7.
[0098] (6) In the infrared detection device 2 according to the above embodiment, the third incident field of view angle θ10 is greater than the third exit field of view angle θ9. However, the infrared detection device 2 is not limited to this configuration. For example, the third incident field of view angle θ10 may be smaller than the third exit field of view angle θ9. Also, for example, the third incident field of view angle θ10 may be the same as the third exit field of view angle θ9.
[0099] (7) In the infrared detection device 2 according to the above embodiment, the optical system 9, 11 is a single optical element, and the optical element is a reflective material 9a, 11a. However, the infrared detection device 2 is not limited to this configuration. For example, the optical system 9, 11 may be a plurality of optical elements. Also, for example, the optical element may be at least one lens, or for example, at least one reflective material and at least one lens.
[0100] When the optical system 9,11 consists of multiple optical elements, the incident detection light paths 5b,6b refer to the detection light paths between the target surface X2 and the optical element located furthest towards the incident side, and the exit detection light paths 5d,6d refer to the detection light paths between the sensors 8,10 and the optical element located furthest towards the exit side. Furthermore, the detection light path between the optical element located furthest towards the incident side and the optical element located furthest towards the exit side is called the detection light path within the optical system.
[0101] (8) In addition, in the infrared detection device 2 according to the above embodiment, the first sensor 8 and the first optical system 9 are connected to the first heat transfer unit 7f, the second sensor 10 and the second optical system 11 are connected to the second heat transfer unit 7g, and the first heat transfer unit 7f and the second heat transfer unit 7g are connected to each other. However, the infrared detection device 2 is not limited to this configuration.
[0102] For example, the first heat transfer section 7f and the second heat transfer section 7g may be configured to be separated so as not to conduct heat. Also, for example, the first sensor 8 and the first optical system 9 may be configured to be separated so as not to conduct heat. Also, for example, the second sensor 10 and the second optical system 11 may be configured to be separated so as not to conduct heat. [Explanation of Symbols]
[0103] 1…Temperature measuring device, 2…Infrared detection device, 2a…Housing, 3…Device body, 3a…Input unit, 3b…Processing unit, 3c…Output unit, 4…Communication means, 5…First detection unit, 5a…Optical axis, 5b…(Incident side) First detection optical path, 5c…Detection field of view, 5d…(Output side) First detection optical path, 6…Second detection unit, 6a…Optical axis, 6b…(Incident side) Second detection optical path, 6c…Detection field of view, 6d…(Output side) Second detection optical path, 7…Fixing means, 7a…Base unit, 7b…First fixing unit, 7c…Second fixing unit, 7d…Third fixing unit, 7e…Fourth fixing unit, 7f…First heat transfer unit, 7g…Second heat transfer unit, 8…First sensor, 8a…Photodetector, 8b…Lens, 8c…Aperture, 8d… Sensor body, 9...First optical system, 9a...First reflective material, 9b...First reflective surface, 10...Second sensor, 11...Second optical system, 11a...Second reflective material, 11b...Second reflective surface, D1...First lateral direction (first direction), D2...Second lateral direction (second direction), D3...Up / down direction (third direction), D4...Fourth direction, X1...Object, X2...Object surface, θ1...First intersection angle, θ2...Second intersection angle, θ3...Third intersection angle, θ4...Fourth intersection angle, θ5...First exit field of view angle, θ6...First incident field of view angle (first angle), θ7...Second exit field of view angle, θ8...Second incident field of view angle (second angle), θ9...Third exit field of view angle, θ10...Third incident field of view angle (third angle)
Claims
1. An infrared detection device for detecting infrared radiation from a target surface along a first and second direction that are mutually orthogonal, It has a first detection optical path that extends toward the target surface and a first detection unit that detects the amount of infrared light incident from the first detection optical path, The optical axis of the first detection unit intersects the target surface at an inclination in the first viewing direction, The first detection unit is, A first sensor that detects the amount of infrared light incident from the first detection optical path, The system includes a first optical system that emits infrared light incident from the target surface toward the first sensor, The first optical system converts the first incident field of view angle of the first direction view in the first detection light path on the incident side to the first exit field of view angle of the first detection light path on the exit side. The infrared detection device wherein the first incident field of view angle is smaller than the first exit field of view angle. The system further comprises a second detection unit that has a second detection optical path extending toward the target surface and detects the amount of infrared radiation incident from the second detection optical path, The optical axis of the second detection unit intersects the target surface at an inclination in the first direction view, The second detection unit is, A second sensor detects the amount of infrared radiation incident from the second detection optical path, The system includes a second optical system that emits infrared light incident from the target surface toward the second sensor, The second optical system converts the second incident field of view angle in the first direction view in the second detection light path on the incident side to the second exit field of view angle in the second detection light path on the exit side. The second incident field of view angle is smaller than the second exit field of view angle. In the first viewing direction, the intersection angle between the optical axis of the first detection unit and the target surface is smaller than the intersection angle between the optical axis of the second detection unit and the target surface. An infrared detection device in which the first incident field of view angle is smaller than the second incident field of view angle.
2. An infrared detection device for detecting infrared radiation from a target surface along a first direction and a second direction which are mutually orthogonal, It has a first detection optical path that extends toward the target surface and a first detection unit that detects the amount of infrared light incident from the first detection optical path, The optical axis of the first detection unit intersects the target surface at an inclination in the first viewing direction, The first detection unit is, A first sensor that detects the amount of infrared light incident from the first detection optical path, The system includes a first optical system that emits infrared light incident from the target surface toward the first sensor, The first optical system converts the first incident field of view angle of the first direction view in the first detection light path on the incident side to the first exit field of view angle of the first detection light path on the exit side. The infrared detection device wherein the first incident field of view angle is smaller than the first exit field of view angle. The aforementioned surface is the surface of an object being transported along the first direction, The first optical system converts the third incident field of view angle in the second direction view in the first detection light path on the incident side to the third exit field of view angle in the first detection light path on the exit side. An infrared detection device in which the third incident field of view angle is larger than the third exit field of view angle.
3. The first optical system is a single reflective material that includes a reflective surface that reflects infrared light incident from the target surface toward the first sensor, The infrared detection device according to claim 1, wherein the reflective surface is formed in a concave shape when viewed in the first direction.
4. The first optical system is a single reflective material that includes a reflective surface that reflects infrared light incident from the target surface toward the first sensor, The infrared detection device according to claim 2, wherein the reflective surface is formed in a concave shape when viewed in the first direction and in a convex shape in a cross-section of a plane including the first and second directions.
5. The infrared detection device according to any one of claims 1 to 4, further comprising a first heat transfer unit connected to the first sensor and the first optical system, respectively, for conducting heat between the first sensor and the first optical system.
6. To conduct heat between the first sensor and the first optical system, a first heat transfer unit is connected to the first sensor and the first optical system, respectively. The system further comprises a second heat transfer unit connected to the second sensor and the second optical system, respectively, for heat conduction between the second sensor and the second optical system. The infrared detection device according to claim 1 or 3, wherein the first heat transfer section and the second heat transfer section are connected to each other in order to conduct heat between the first heat transfer section and the second heat transfer section.
7. An infrared detection device according to claim 1 or 3, A temperature measuring device comprising: a processing unit that calculates the temperature of the target surface based on the amount of infrared radiation detected by the first detection unit and the second detection unit.
8. An infrared detection method for detecting infrared radiation from a target surface using an infrared detection device according to any one of claims 1 to 4.