Measurement system, processing system, measurement method, and processing method

Abstract

This measurement system comprises: a first measurement device that is capable of projecting measurement light onto a measuring member attached to a movable part of a processing device capable of processing a processing object, and that is capable of measuring the position of the measuring member; and a measurement control device capable of controlling the first measurement device. The measurement control device comprises: a calculation unit that, in a first state, which is a state in which a tool center point of the processing device is located at a predetermined position, calculates position conversion information on the basis of first position information indicating a position of the measuring member which is measured on the basis of the measurement light projected by the first measurement device onto the measuring member, and second position information indicating the predetermined position; and a transmission unit that transmits the calculated position conversion information to a processing control device capable of controlling movement of the moving part of the processing device. In a second state, which is a state in which the tool center point is located at a position different from the predetermined position, the transmission unit transmits, to the processing control device, third position information indicating a position of the measuring member which is measured on the basis of the measurement light projected by the first measurement device onto the measuring member.

Description

Measurement system, processing system, measurement method and processing method

[0001] The present invention relates to the technical fields of a measurement system, a processing system, a measurement method, and a processing method.

[0002] As a method used in this type of system, a calibration method has been proposed in which positions in two mutually separated systems are correlated with each other (see Patent Document 1).

[0003] U.S. Patent No. 5,007,006

[0004] According to a first aspect, there is provided a measurement system comprising: a first measurement device capable of irradiating measurement light onto a measurement member attached to a movable part of a processing device capable of processing a processing object and capable of measuring the position of the measurement member; and a measurement control device capable of controlling the first measurement device, wherein the measurement control device comprises: a calculation unit that calculates position conversion information based on first position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member and second position information indicating the predetermined position in a first state in which a tool center point of the processing device is located at a predetermined position; and a transmission unit that transmits the calculated position conversion information to a processing control device that can control the movement of the movable part of the processing device, wherein the transmission unit transmits third position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member to the processing control device in a second state in which the tool center point is located at a position different from the predetermined position.

[0005] According to a second aspect, there is provided a measurement system comprising: a first measurement device capable of irradiating measurement light onto a measurement member attached to a movable part of a processing device capable of processing a processing object and capable of measuring the position of the measurement member; and a measurement control device capable of controlling the first measurement device, wherein the measurement control device comprises: a calculation unit that converts the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member into the position of a tool center point of the processing device based on position conversion information; and a transmission unit that transmits sixth position information indicating the position of the tool center point to the processing control device capable of controlling the movement of the movable part, and wherein the calculation unit calculates the position conversion information based on the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member in a first state in which the tool center point is located at a predetermined position.

[0006] According to a third aspect, there is provided a measurement system for a processing device capable of processing a processing object, the measurement system comprising: a first measuring device capable of irradiating a measuring light onto a measuring member attached to a movable part of the processing device at a position different from that corresponding to a tool center point of the processing device and capable of measuring the position of the measuring member; a measurement control device capable of controlling the first measuring device; and a third measuring device capable of measuring the position of the tool center point, wherein the measurement control device comprises: a calculation unit that calculates position conversion information based on the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member and the position of the tool center point measured by the third measuring device, when the third measuring device is measuring the position of the tool center point; and a transmission unit that transmits the position conversion information and third position information indicating the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member, when the third measuring device is not measuring the position of the tool center point, to a processing control device capable of controlling movement of the movable part.

[0007] According to a fourth aspect, there is provided a measurement system for a processing device capable of processing a processing object, the measurement system comprising: a first measuring device capable of irradiating measurement light onto a measuring member attached to a movable part of the processing device at a position different from that corresponding to a tool center point of the processing device and capable of measuring the position of the measuring member; a measurement control device capable of controlling the first measuring device; and a third measuring device capable of measuring the position of the tool center point, wherein the measurement control device comprises: a calculation unit that converts the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member when the third measuring device is measuring the position of the tool center point, and the position of the tool center point measured by the third measuring device based on the measurement light irradiated onto the measuring member when the third measuring device is not measuring the position of the tool center point, into the position of the tool center point; and a transmission unit that transmits sixth position information indicating the converted position of the tool center point to a processing control device capable of controlling the movement of the movable part.

[0008] According to a fifth aspect, there is provided a measurement system including a first measurement device that can measure the position of a tool center point of a processing device that moves in accordance with the movement of the movable part by irradiating a measurement light onto a second reference member that moves in accordance with the position of a movable part of a processing device that can process a processing object, and that can measure the position of a measurement member attached to the movable part at a position different from that corresponding to the tool center point by irradiating a measurement light onto the measurement member, and a measurement control device that can control the first measurement device, wherein the measurement control device measures the position of the measurement member when a positional relationship between the position of the measurement member and the position of the second reference member is a predetermined relationship. a calculation unit that calculates position conversion information based on the position of the tool center point measured by the first measurement device based on the measurement light irradiated onto the second reference member and the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member; and a transmission unit that transmits the position conversion information and third position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member when the positional relationship is different from the predetermined relationship to a processing control device that can control the movement of the movable part.

[0009] According to a sixth aspect, there is provided a measurement system including a first measurement device that is capable of measuring the position of a tool center point that moves in accordance with the movement of a movable part of a processing device that can process a processing object by irradiating a measurement light onto a second reference member that moves in accordance with the position of the movable part, and that is capable of measuring the position of a measurement member that is attached to the movable part at a position different from the tool center point by irradiating a measurement light onto the measurement member, and a measurement control device that is capable of controlling the first measurement device, wherein the measurement control device controls the first measurement device to measure the position of the measurement member when a position of the measurement member and a position of the second reference member are in a predetermined positional relationship. and a transmitting unit that transmits sixth position information indicating the converted position of the tool center point to a processing control device that can control the movement of the movable part.

[0010] According to the seventh aspect, there is provided a processing system comprising the measurement system provided by the first aspect, the processing device capable of processing the object to be processed, and the processing control device capable of controlling the movement of the movable part of the processing device, wherein the processing control device converts the position of the measurement member indicated by the third position information into the position of the tool center point based on the position conversion information, and controls the movement of the movable part based on the converted position of the tool center point, thereby moving the position of the tool center point.

[0011] According to the eighth aspect, there is provided a processing system comprising the measurement system provided in the second aspect, the processing device capable of processing the object to be processed, and the processing control device capable of controlling the movement of the movable part of the processing device, wherein the processing control device controls the movement of the movable part based on the position of the tool center point indicated by the sixth position information transmitted by the transmitting unit, thereby moving the position of the tool center point.

[0012] According to a ninth aspect, there is provided a processing system comprising the measurement system provided by the third aspect, the processing device capable of processing the object to be processed, and the processing control device capable of controlling the movement of the movable part of the processing device, wherein the processing control device converts the position of the measurement member indicated by the third position information into the position of the tool center point based on the position conversion information, and controls the movement of the movable part based on the converted position of the tool center point, thereby moving the position of the tool center point.

[0013] According to a tenth aspect, there is provided a processing system comprising the measurement system provided by the fourth aspect, the processing device capable of processing the object to be processed, and the processing control device capable of controlling the movement of the movable part of the processing device, wherein the processing control device controls the movement of the movable part based on the sixth position information to move the position of the tool center point.

[0014] According to an eleventh aspect, there is provided a processing system comprising the measurement system provided in the fifth aspect, the processing device capable of processing the object to be processed, and the processing control device capable of controlling the movement of the movable part of the processing device, wherein the processing control device converts the position of the measurement member indicated by the third position information into the position of the tool center point based on the position conversion information, and moves the movable part based on the converted position of the tool center point to move the position of the tool center point.

[0015] According to the twelfth aspect, there is provided a processing system comprising the measurement system provided in the sixth aspect, the processing device capable of processing the object to be processed, and the processing control device capable of controlling the movement of the movable part of the processing device, wherein the processing control device controls the movement of the movable part based on the position of the tool center point indicated by the sixth position information, thereby moving the position of the tool center point.

[0016] According to a thirteenth aspect, there is provided a measurement method in a measurement system including a first measurement device capable of irradiating measurement light onto a measurement member attached to a movable part of a processing device capable of processing a processing object and capable of measuring the position of the measurement member, and a measurement control device capable of controlling the first measurement device, the measurement method including: the measurement control device, in a first state in which a tool center point of the processing device is located at a predetermined position, calculating position conversion information based on first position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member and second position information indicating the predetermined position; the measurement control device transmitting the calculated position conversion information to a processing control device capable of controlling movement of the movable part of the processing device; and the measurement control device, in a second state in which the tool center point is located at a position different from the predetermined position, transmitting third position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member to the processing control device.

[0017] According to a fourteenth aspect, there is provided a measurement method in a measurement system including a first measurement device capable of irradiating measurement light onto a measurement member attached to a movable part of a processing device capable of processing a processing object and capable of measuring the position of the measurement member, and a measurement control device capable of controlling the first measurement device, the measurement method including: the measurement control device converting, based on position conversion information, the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member, into the position of a tool center point of the processing device; the measurement control device transmitting sixth position information indicating the position of the tool center point to a processing control device capable of controlling the movement of the movable part; and the measurement control device calculating, in a first state in which the tool center point is located at a predetermined position, the position conversion information based on the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member.

[0018] According to a fifteenth aspect, there is provided a measurement method for a measurement system in a processing device capable of processing a processing object, the measurement system including: a first measurement device capable of irradiating a measurement light onto a measurement member attached to a movable part of the processing device at a position different from that corresponding to a tool center point of the processing device and capable of measuring the position of the measurement member; a measurement control device capable of controlling the first measurement device; and a third measurement device capable of measuring the position of the tool center point, the measurement method including: the measurement control device calculating position conversion information based on the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member and the position of the tool center point measured by the third measurement device, while the third measurement device is measuring the position of the tool center point; and the measurement control device transmitting the position conversion information and third position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member, while the third measurement device is not measuring the position of the tool center point, to a processing control device capable of controlling movement of the movable part.

[0019] According to a sixteenth aspect, there is provided a measurement method for a measurement system in a processing device capable of processing a processing object, the measurement system including: a first measurement device capable of irradiating measurement light onto a measurement member attached to a movable part of the processing device at a position different from that corresponding to a tool center point of the processing device and capable of measuring the position of the measurement member; a measurement control device capable of controlling the first measurement device; and a third measurement device capable of measuring the position of the tool center point, the measurement method including: the measurement control device converting, into the position of the tool center point, the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member when the third measurement device is measuring the position of the tool center point, and the position of the tool center point measured by the third measurement device; and the measurement control device transmitting, to the processing control device capable of controlling movement of the movable part, sixth position information indicating the converted position of the tool center point.

[0020] According to a seventeenth aspect, there is provided a measurement method in a measurement system including a first measurement device that can measure the position of a tool center point of the processing device that moves in accordance with the movement of the movable part by irradiating a measurement light onto a second reference member that moves in accordance with the position of a movable part of a processing device that can process a processing object, and that can measure the position of a measurement member attached to the movable part that is different from the position corresponding to the tool center point by irradiating a measurement light onto the measurement member, and a measurement control device that can control the first measurement device, wherein the measurement control device determines that the position of the measurement member and the position of the second reference member have a predetermined positional relationship. and when the positional relationship is different from the predetermined relationship, the measurement control device transmits the position conversion information and third position information indicating the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member to a processing control device capable of controlling the movement of the movable part.

[0021] According to an eighteenth aspect, there is provided a measurement method in a measurement system including a first measurement device that is capable of measuring the position of a tool center point that moves in accordance with the movement of a movable part of a processing device that can process a processing object by irradiating a measurement light onto a second reference member that moves in accordance with the position of the movable part, and that is capable of measuring the position of a measurement member that is attached to the movable part at a position different from that corresponding to the tool center point by irradiating a measurement light onto the measurement member, and a measurement control device that is capable of controlling the first measurement device, wherein the measurement control device controls the first measurement device to measure the position of the measurement member when the position of the measurement member and the position of the second reference member are in a predetermined positional relationship. A measurement method is provided that includes converting the position of the measurement member measured by the first measurement device based on the measurement light irradiated to the measurement member into the position of the tool center point when the positional relationship is different from the predetermined position based on the position of the measurement member measured based on the measurement light irradiated to the member and the position of the tool center point measured by the first measurement device based on the measurement light irradiated to the second reference member, and transmitting sixth position information indicating the converted position of the tool center point by the measurement control device to a processing control device capable of controlling the movement of the movable part.

[0022] According to a 19th aspect, there is provided a processing system comprising a processing device capable of processing a processing object, a first measuring device capable of irradiating a measuring member attached to the processing device with measuring light and measuring the position of the measuring member, a measurement control device capable of controlling the first measuring device, and a processing control device capable of controlling the movement of the processing device, wherein the processing control device has a transmitting unit that transmits first start position information to the measurement control device, the first start position information indicating a first measurement start position, which is the position at which the first measuring device should start measuring the measuring member, and the measurement control device changes the emission direction of the measurement light so that the measurement light is irradiated toward the first measurement start position indicated by the first start position information.

[0023] According to the twentieth aspect, there is provided a processing system comprising a processing device capable of processing a processing object, a first measuring device capable of irradiating a measuring member attached to the processing device with measuring light and measuring the position of the measuring member, a measurement control device capable of controlling the first measuring device, and a processing control device capable of controlling the movement of the processing device, wherein the processing control device has a transmitting unit that transmits a measurement start signal to the measurement control device to cause the first measuring device to start measuring the position of the measuring member, and the measurement control device controls the first measuring device to start emitting the measuring light based on the measurement start signal.

[0024] According to a 21st aspect, there is provided a processing system comprising a processing device capable of processing a processing object, a first measuring device capable of irradiating a measuring member attached to the processing device with measuring light and measuring the position of the measuring member, a measurement control device capable of controlling the first measuring device, and a processing control device capable of controlling the movement of the processing device, wherein the processing control device has a transmitting unit that transmits timing information indicating the timing at which the first measuring device starts measuring the position of the measuring member to the measurement control device, and the measurement control device controls the emission timing of the measuring light emitted from the first measuring device based on the timing information.

[0025] According to a 22nd aspect, there is provided a measurement system comprising a first measurement device capable of measuring the position of a measurement member attached to a processing device capable of processing the workpiece, and a measurement control device capable of controlling the first measurement device, wherein the measurement control device comprises a calculation unit that calculates position conversion information for converting the position of the measurement member to the position of a tool center point of the processing device based on the position of the measurement member measured by the first measurement device, and a transmission unit that transmits the position conversion information to the processing control device that controls the processing device.

[0026] According to a 23rd aspect, there is provided a measurement system comprising a first measurement device capable of measuring the position of a measurement member attached to a processing device capable of processing the object to be processed, and a measurement control device capable of controlling the first measurement device, wherein the measurement control device comprises a calculation unit that converts the position of the measurement member into the position of a tool center point of the processing device based on the position of the measurement member measured by the first measurement device, and a transmission unit that transmits sixth position information indicating the converted position of the tool center point to the processing control device that controls the processing device.

[0027] According to a 24th aspect, there is provided a measurement system comprising a first measurement device capable of irradiating measurement light onto a measurement member attached to a processing device capable of processing an object to be processed, and a measurement control device capable of controlling the first measurement device, wherein the measurement control device controls the first measurement device based on information regarding measurement by the first measurement device transmitted from a processing control device capable of controlling the processing device.

[0028] 1 is a perspective view showing an overview of the system. FIG. 2 is a block diagram showing the configuration of the system. FIG. 3 is a block diagram showing the configuration of the measurement control device. FIG. 4 is a block diagram showing the configuration of the machining control device. FIG. 5 is a diagram showing a tip portion of a robot arm. FIG. 6 is a flowchart showing an example of the operation of a calculation device of the measurement control device. FIG. 7 is a diagram showing an example of the positional relationship between the measurement device and the stereo camera. FIG. 8 is a diagram showing a first modified example of a reflector module attached to the robot arm. FIG. 9 is a diagram showing an example of an arrangement of multiple antennas. FIG. 10 is a diagram showing a second modified example of a reflector module attached to the robot arm. FIG. 11 is a diagram showing an example of a reflector attached to the robot arm. FIG. 12 is a diagram showing another example of a reflector attached to the robot arm. FIG. 13 is a diagram showing an example of a method for measuring the position of a tool center point. FIG. 14 is a diagram showing another example of a method for measuring the position of a tool center point. FIG. 15 is a diagram showing another example of a method for measuring the position of a tool center point. FIG. 16 is a diagram showing another example of a method for measuring the position of a tool center point. FIG. 17 is a diagram showing an example of the positional relationship between a reflector attached to the robot arm and the tool center point. A flowchart showing another example of the operation of the calculation device of the measurement control device. FIG. 18 is a perspective view showing an overview of a modified example of the system. FIG. 19 is a block diagram showing an example of the configuration of a modified example of the system. A flowchart showing another example of the operation of the calculation device of the measurement control device. FIG. 19 is a diagram for explaining the concept of integration threshold processing. It is a figure for explaining the order of measurement of a reflector. It is a figure for explaining the irradiation timing of measurement light. It is a figure for explaining an example of an irradiation method of measurement light. It is a figure for explaining the concept of rest determination. It is a figure for explaining another example of an irradiation method of measurement light.

[0029] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A measurement system, a processing system, a measurement method, and a processing method will be described below. In the following embodiments, an example in which a measurement system, a processing system, a measurement method, and a processing method are applied to a system 1 will be described.

[0030] A system 1 according to an embodiment will be described with reference to Figures 1 to 28. The system 1 may also be referred to as a processing system.

[0031] (1) Overview of System 1 An overview of system 1 will be described with reference to Figs. 1 and 2. In Figs. 1 and 2, system 1 includes a measurement control device 10, a measuring device 21, a processing control device 30, and a robot 41. The robot 41 may also be referred to as a processing device. The measurement control device 10 controls the measuring device 21. The processing control device 30 controls the robot 41. The processing control device 30 may be able to control the movement of the robot 41 (e.g., movement of the robot arm 410). The measurement control device 10 and the processing control device 30 are able to communicate with each other. Note that the measurement control device 10 and the measuring device 21 may constitute a measurement system 2.

[0032] 3, the measurement control device 10 includes a calculation device 11, a storage device 12, a communication device 13, an input device 14, and an output device 15. The calculation device 11, the storage device 12, the communication device 13, the input device 14, and the output device 15 may be connected via a data bus 16.

[0033] 4, the processing control device 30 includes a calculation device 31, a storage device 32, a communication device 33, an input device 34, and an output device 35. The calculation device 31, the storage device 32, the communication device 33, the input device 34, and the output device 35 may be connected via a data bus 36.

[0034] The arithmetic units 11 and 31 may include at least one of a CPU (Central Processing Unit), a GPU (Graphical Processing Unit), and an FPGA (Field Programmable Gate Array), for example.

[0035] The storage devices 12 and 32 may include at least one of, for example, a random access memory (RAM), a read-only memory (ROM), a hard disk drive, a magneto-optical disk drive, a solid state drive (SSD), and a hard disk array. In other words, the storage devices 12 and 32 may include non-transitory storage media.

[0036] The communication device 13 is capable of communicating with each of the measuring device 21 and the processing control device 30. The communication device 13 may be capable of communicating with devices other than the measuring device 21 and the processing control device 30 via a network (not shown). The communication device 33 is capable of communicating with each of the robot 41 and the measurement control device 10. The communication device 33 may be capable of communicating with devices other than the robot 41 and the measurement control device 10 via a network (not shown). The network may be wired or wireless.

[0037] The input devices 14 and 34 may include at least one of a keyboard, a mouse, and a touch panel, for example. The input devices 14 and 34 may also include a recording medium reader capable of reading information recorded on a removable recording medium such as a USB (Universal Serial Bus) memory.

[0038] When information is input to the measurement control device 10 via the communication device 13 (in other words, when the measurement control device 10 acquires information via the communication device 13), the communication device 13 may function as an input device. When information is input to the processing control device 30 via the communication device 33 (in other words, when the processing control device 30 acquires information via the communication device 33), the communication device 33 may function as an input device.

[0039] The output devices 15 and 35 may include at least one of a display, a speaker, and a printer, for example. The output devices 15 and 35 may be capable of outputting information to a removable storage medium such as a USB memory. When information is output from the measurement control device 10 via the communication device 13, the communication device 13 may function as an output device. When information is output from the processing control device 30 via the communication device 33, the communication device 33 may function as an output device.

[0040] In the system 1, the robot 41 processes a workpiece W (see FIG. 1 ) held by a jig 90. The processing control device 30 controls the robot 41 based on the measurement results of the measuring device 21 obtained from the measurement control device 10. The processing control device 30 controls the robot 41, for example, so that an end effector attached to the tip of the robot arm 410 of the robot 41 moves to a target position. The processing control device 30 controls the robot 41, causing the robot 41 to process the workpiece W. Note that the control of the robot 41 may be control of the motion mode of the robot 41 (the movement mode of a movable part of the robot 41). The jig 90 may also be called a holder, an attachment member, a fixing member, or a clamp.

[0041] (2) Conversion of Coordinate Systems The measurement system 2 including the measuring device 21 and the processing control device 30 that controls the robot 41 each use their own coordinate systems. Specifically, the measurement system 2 uses a first measurement coordinate system that is a coordinate system related to the measuring device 21, while the processing control device 30 uses a robot coordinate system that is a coordinate system related to the robot 41. In other words, the measurement control device 10 controls the measuring device 21 under the first measurement coordinate system. The processing control device 30 controls the movement of the robot 41 under the robot coordinate system.

[0042] The machining control device 30 may control the movement of the robot 41 under a measurement coordinate system. When the system 1 includes a plurality of robots (see, for example, FIGS. 20 and 21 ), the robot coordinate system may be a coordinate system common to the plurality of robots, or a robot coordinate system may be set for each robot (in this case, one robot coordinate system may be set for one robot, and other robot coordinate systems may be set for other robots).

[0043] Therefore, for example, in order for the measurement system 2 and the processing control device 30 to share the measurement results obtained by the measuring device 21 (in other words, in order for the measurement system 2 and the processing control device 30 to cooperate with each other), conversion between the first measurement coordinate system and the robot coordinate system is necessary. The robot coordinate system may be, for example, an orthogonal coordinate system consisting of an x-axis, a y-axis, and a z-axis that are orthogonal to each other. The first measurement coordinate system may be, for example, an orthogonal coordinate system consisting of an x-axis, a y-axis, and a z-axis that are orthogonal to each other. The robot coordinate system may also be referred to as a processing coordinate system.

[0044] (2-1) Measuring Device 21 The measuring device 21 measures, for example, the position of the workpiece W or the robot 41. Here, the workpiece W may be a relatively large structure such as the fuselage of an aircraft. The measuring device 21, which measures the workpiece W, which is a relatively large structure, may be, for example, a three-dimensional measuring device capable of measuring a relatively large space. An example of such a measuring device 21 is a laser tracker. A laser tracker is an optical measuring device that irradiates a reflector (also called a probe) that is brought into contact with the measurement object with laser light, and determines the three-dimensional position of the measurement object by the laser light reflected from the reflector returning to the light source. Note that the laser light may also be called measurement light.

[0045] To enable position measurement by the measurement device 21, for example, a reflector r11 is attached to the jig 90, and reflectors r12 and r13 are attached to the workpiece W (see FIG. 1). The reflectors r11, r12, and r13 may be referred to as first reference members. In other words, the first reference members may include reflectors r11, r12, and r13 that can reflect measurement light. Note that while no reflector may be attached to the workpiece W, at least three reflectors may be attached to the jig 90.

[0046] A reflector module r2 including reflectors r21, r22, and r23 is attached to the robot arm 410 of the robot 41 (see FIG. 5). The reflectors r21, r22, and r23 may be referred to as measurement members. That is, the measurement member may include the reflectors r21, r22, and r23 that can reflect measurement light. The robot arm 410 may also be referred to as a movable part.

[0047] The measuring device 21 is capable of irradiating each of the reflectors r11, r12, and r13 with measurement light, which may be, for example, laser light. The measuring device 21 is capable of measuring the positions of each of the reflectors r11, r12, and r13 in a first measurement coordinate system based on the measurement light irradiated onto each of the reflectors r11, r12, and r13. Similarly, the measuring device 21 is capable of irradiating each of the reflectors r21, r22, and r23 with measurement light. The measuring device 21 is capable of measuring the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23. In other words, measuring the position of the workpiece W is not limited to directly measuring the position of a specific location on the workpiece W, but may also include indirect position measurements, such as measuring the position of a reflector attached to the workpiece W or measuring the position of a reflector attached to a jig 90 that holds the workpiece W. Similarly, measuring the position of the robot 41 is not limited to directly measuring the position of a specific point on the robot 41, but may also include indirect position measurement, such as measuring the position of a reflector attached to the robot 41.

[0048] Note that "based on the measurement light irradiated onto each of the reflectors r11, r12, and r13" may be rephrased as "the measurement device 21 receives the measurement light generated from each of the reflectors r11, r12, and r13 as a result of the measurement light being irradiated onto each of the reflectors r11, r12, and r13." Similarly, "based on the measurement light irradiated onto each of the reflectors r21, r22, and r23" may be rephrased as "the measurement device 21 receives the measurement light generated from each of the reflectors r21, r22, and r23 as a result of the measurement light being irradiated onto each of the reflectors r21, r22, and r23."

[0049] If the reflectors r11, r12, and r13 are referred to as first reference members, then the measuring device 21, which may be referred to as a first measuring device, can irradiate measurement light onto a first reference member attached to at least one of the workpiece W, which may be referred to as a processing target, and the jig 90 that holds the workpiece W. It can also be said that the measuring device 21 is capable of measuring the position of the first reference member in a first measurement coordinate system. If the reflectors r21, r22, and r23 are referred to as measuring members, then the measuring device 21 can irradiate measurement light onto a measuring member attached to a robot arm 410 of a robot 41 that can process the workpiece W. It can also be said that the measuring device 21 is capable of measuring the position of the measuring device.

[0050] The positions of the reflector r11 attached to the jig 90 and the reflectors r12 and r13 attached to the workpiece W are often managed by the user of the system 1. For this reason, the positions of the reflectors r11, r12, and r13 are often known in the robot coordinate system.

[0051] Note that the positions of the reflectors r11, r12, and r13 do not need to be known. In this case, for example, features such as surfaces, lines, and points may be defined using the reflectors, and a coordinate system may be constructed using the defined features. Specifically, a coordinate system may be constructed by placing three reflectors on a first surface, placing three reflectors on a second surface intersecting with the first surface, and placing three reflectors on a third surface intersecting with the first and second surfaces, and defining each surface using the three reflectors placed on each surface. For example, a coordinate system may be constructed by combining a surface defined using three reflectors and a line defined using two reflectors different from the three reflectors. For example, a coordinate system may be constructed by combining a surface defined using three reflectors and a point defined using one reflector different from the three reflectors. For example, a coordinate system may be constructed by combining a surface defined using three reflectors, a line defined using two reflectors, and a point defined using one reflector.

[0052] In this embodiment, the description will be given assuming that the positions of the reflectors r11, r12, and r13 in the robot coordinate system are known. In this embodiment, the reflectors r11, r12, and r13 function as members for defining a reference position. For this reason, the reflectors r11, r12, and r13 may be referred to as reference reflectors. The reflector r11 may be attached to a position that indicates the reference of the jig 90. Furthermore, the position of the reflector r11 may be used as the position that indicates the reference of the jig 90. The reflectors r12 and r13 may be attached to a position (e.g., a master hole) that indicates the reference for the position of the workpiece W, which may be referred to as the processing target. Furthermore, the positions at which the reflectors r12 and r13 are attached may be used as the reference for the position of the workpiece W.

[0053] (2-2) Coordinate Transformation As described above, the measurement device 21 can irradiate each of the reflectors r11, r12, and r13 with measurement light. The measurement device 21 measures the position of the reflector r11 in the first measurement coordinate system based on the measurement light irradiated onto the reflector r11. The measurement device 21 measures the position of the reflector r12 in the first measurement coordinate system based on the measurement light irradiated onto the reflector r12. The measurement device 21 measures the position of the reflector r13 in the first measurement coordinate system based on the measurement light irradiated onto the reflector r13.

[0054] The calculation device 11 of the measurement control device 10 acquires first reference position information indicating the positions of each of the reflectors r11, r12, and r13 in the first measurement coordinate system from the measurement device 21. The calculation device 11 acquires second reference position information indicating the positions of each of the reflectors r11, r12, and r13 in the robot coordinate system input, for example, via the input device 14. The first reference position information may be referred to as fourth position information. The second reference position information may be referred to as fifth position information. The positions of each of the reflectors r11, r12, and r13 in the robot coordinate system may be automatically input to the measurement control device 10 (i.e., they do not need to be input via the input device 14). The calculation device 11 may acquire the second reference position information by, for example, selecting the positions of each of the reflectors r11, r12, and r13 in the robot coordinate system input to the processing control device 30.

[0055] The calculation device 11 may calculate a coordinate transformation matrix for converting a position in the first measurement coordinate system and a position in the robot coordinate system based on the first reference position information and the second reference position information. The coordinate transformation matrix may be referred to as coordinate transformation information. The coordinate transformation matrix may include, for example, a rotation matrix for performing a rotational transformation of a position and a translation matrix for translating a position. Since various existing methods can be applied to the method of calculating the coordinate transformation matrix, detailed description thereof will be omitted. Calculating the coordinate transformation matrix may also be referred to as calculating the coordinate transformation matrix. The calculation device 11 may calculate two coordinate transformation matrices: a first coordinate transformation matrix for converting a position in the robot coordinate system to a position in the first measurement coordinate system, and a second coordinate transformation matrix for converting a position in the first measurement coordinate system to a position in the robot coordinate system. The first coordinate transformation matrix and the second coordinate transformation matrix may be referred to as first coordinate transformation information and second coordinate transformation information, respectively.

[0056] For example, the position of the reflector r11 in the first measurement coordinate system indicated by the first reference position information is expressed as (x ｒ１１Ｍ , y ｒ１１Ｍ , z ｒ１１Ｍ ), and the position of the reflector r11 in the robot coordinate system indicated by the second reference position information is (x ｒ１１Ｒ , y ｒ１１Ｒ , z ｒ１１Ｒ Similarly, the position of the reflector r12 in the first measurement coordinate system is defined as (x ｒ１２Ｍ , y ｒ１２Ｍ , z ｒ１２Ｍ ), and the position of the reflector r12 in the robot coordinate system is (x ｒ１２Ｒ , y ｒ１２Ｒ , z ｒ１２Ｒ The position of the reflector r13 in the first measurement coordinate system is defined as (x ｒ１３Ｍ , y ｒ１３Ｍ , z ｒ１３Ｍ ), and the position of the reflector r13 in the robot coordinate system is (x ｒ１３Ｒ , y ｒ１３Ｒ , z ｒ１３Ｒ The calculation device 11 calculates, for example, "(x ｒ１１Ｍ , y ｒ１１Ｍ , z ｒ１１Ｍ ) = R１ (x ｒ１１Ｒ , y ｒ１１Ｒ , z ｒ１１Ｒ ) + t １ ", "(x ｒ１２Ｍ , y ｒ１２Ｍ , z ｒ１２Ｍ ) = R １ (x ｒ１２Ｒ , y ｒ１２Ｒ , z ｒ１２Ｒ ) + t １ " and "(x ｒ１３Ｍ , y ｒ１３Ｍ , z ｒ１３Ｍ ) = R １ (x ｒ１３Ｒ , y ｒ１３Ｒ , z ｒ１３Ｒ ) + t １ " R satisfies the three equations １ and t １ The calculation device 11 may calculate the first coordinate transformation matrix by calculating, for example, "(x ｒ１１Ｒ , y ｒ１１Ｒ , z ｒ１１Ｒ ) = R ２ (x ｒ１１Ｍ , y ｒ１１Ｍ , z ｒ１１Ｍ ) + t ２ ", "(x ｒ１２Ｒ , y ｒ１２Ｒ , z ｒ１２Ｒ ) = R ２ (x ｒ１２Ｍ , y ｒ１２Ｍ , z ｒ１２Ｍ ) + t ２ " and "(x ｒ１３Ｒ , y ｒ１３Ｒ , z ｒ１３Ｒ ) = R ２ (x ｒ１３Ｍ , y ｒ１３Ｍ , z ｒ１３Ｍ ) + t ２ " R satisfies the three equations ２ and t ２ Here, the second coordinate transformation matrix may be obtained by calculating "R １ " and "R ２ " is a rotation matrix, and "t １ " and "t ２ " is a translation matrix. That is, the calculation device 11 may obtain the first coordinate transformation matrix and the second coordinate transformation matrix based on the first reference position information and the second reference position information.

[0057] The calculation device 11 does not need to calculate the coordinate transformation matrix. In this case, the coordinate transformation matrix may be calculated by a device other than the measurement control device 10, such as the processing control device 30. For example, the communication device 13 of the measurement control device 10 may transmit the first reference position information and the second reference position information to the processing control device 30. The calculation device 31 of the processing control device 30 may calculate the coordinate transformation matrix based on the first position reference information and the second reference position information. The communication device 33 of the processing control device 30 may transmit the coordinate transformation matrix to the measurement control device 10. That is, the measurement control device 10 may acquire the coordinate transformation matrix. The measurement control device 10 may acquire the first coordinate transformation matrix, the second coordinate transformation matrix, or both the first and second coordinate transformation matrices as the coordinate transformation matrix.

[0058] The calculation device 11 may calculate only one of the first coordinate transformation matrix and the second coordinate transformation matrix as the coordinate transformation matrix. For example, if the calculation device 11 calculates only the first coordinate transformation matrix, the calculation device 11 may use the first coordinate transformation matrix to transform a position in the robot coordinate system into a position in the first measurement coordinate system. In this case, the calculation device 11 may use the first coordinate transformation matrix to inversely transform a position in the first measurement coordinate system into a position in the robot coordinate system. For example, if the calculation device 11 calculates only the second coordinate transformation matrix, the calculation device 11 may use the second coordinate transformation matrix to transform a position in the first measurement coordinate system into a position in the robot coordinate system. In this case, the calculation device 11 may use the second coordinate transformation matrix to inversely transform a position in the robot coordinate system into a position in the first measurement coordinate system.

[0059] As described above, the measurement device 21 can irradiate each of the reflectors r21, r22, and r23 with measurement light. The measurement device 21 measures the position of the reflector r21 in the first measurement coordinate system based on the measurement light irradiated onto the reflector r21. The measurement device 21 measures the position of the reflector r22 in the first measurement coordinate system based on the measurement light irradiated onto the reflector r22. The measurement device 21 measures the position of the reflector r23 in the first measurement coordinate system based on the measurement light irradiated onto the reflector r23.

[0060] The calculation device 11 may use, for example, a second coordinate transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. If the reflectors r21, r22, and r23 are referred to as measurement members, the calculation device 11, which may be referred to as a calculation unit, may transform the positions of the measurement members in the first measurement coordinate system, which are measured by the measurement device 21 based on the measurement light irradiated onto the measurement members, into the positions of the measurement members in the robot coordinate system, based on the second transformation matrix. At this time, the communication device 13, which may be referred to as a transmission unit, may transmit position information indicating the positions of the measurement members in the robot coordinate system to the machining control device 30.

[0061] Furthermore, as described above, the coordinate transformation matrix (e.g., the first coordinate transformation matrix) is calculated based on the first reference position information and the second reference position information. If the reflectors r21, r22, and r23 are referred to as measurement members, the calculation device 11, which may be referred to as a calculation unit, may convert the position of the measurement member in the first measurement coordinate system, which is measured by the measurement device 21 based on the measurement light irradiated onto the measurement member, into the position of the measurement member in the robot coordinate system, based on the first reference position information and the second reference position information. At this time, the communication device 13, which may be referred to as a transmission unit, may transmit position information indicating the position of the measurement member in the robot coordinate system to the machining control device 30.

[0062] The machining control device 30 may control the robot 41 under the robot coordinate system based on position information indicating the position of the measurement member in the robot coordinate system. Furthermore, the calculation device 11 may calculate a second coordinate transformation matrix based on the first reference position information and the second reference position information to transform the position of the measurement member in the first measurement coordinate system, measured by the measurement device 21 based on the measurement light irradiated onto the measurement member, into the position of the measurement member in the robot coordinate system. The position information indicating the position of the measurement member in the robot coordinate system may be referred to as third position information.

[0063] The operation of the measurement system 2 will now be described again with reference to the flowchart of FIG. 6 . In FIG. 6 , the calculation device 11 acquires second reference position information, input via the input device 14, indicating the positions of the reflectors r11, r12, and r13 in the robot coordinate system (step S101). In parallel with the processing of step S101, the measurement device 21 measures the positions of the reflectors r11, r12, and r13 in the first measurement coordinate system based on the measurement light irradiated onto the reflectors r11, r12, and r13 (step S102). At this time, the calculation device 11 of the measurement control device 10 acquires first reference position information indicating the positions of the reflectors r11, r12, and r13 in the first measurement coordinate system.

[0064] The computing device 11 calculates a coordinate transformation matrix for transforming a position in the first measurement coordinate system and a position in the robot coordinate system based on the first reference position information and the second reference position information (step S103). Note that, when an individual robot coordinate system is defined for each robot, the individual robot coordinate system may be realized by, for example, measuring the position of each of the reflectors r21, r22, and r23 attached to the robot 41 while changing the posture of the robot 41. In other words, the individual robot coordinate system may be realized by changing the posture of the robot and measuring the position of each of the reflectors r21, r22, and r23 at, for example, three locations.

[0065] (3) Improvements in Reflector Measurement The size of a reflector such as reflector r11 is, for example, about a few centimeters. In other words, the size of the reflector is significantly smaller than the size of, for example, the workpiece W. For this reason, for example, if the measuring device 21 measures the position of the reflector while scanning the space to be measured with measurement light, the time required to measure the position of the reflector may be relatively long. Therefore, at least one of the following methods (3-1) and (3-2) may be used to shorten the time required to measure the position of the reflector.

[0066] (3-1) Method using a stereo camera The measurement system 2 may include, for example, a stereo camera 22 in addition to the measurement device 21. The stereo camera 22 may be arranged near the measurement device 21, for example, as shown in FIG. 7 . For example, the measurement device 21 and the stereo camera 22 may be included in the same housing. Here, it is assumed that the positional relationship between the measurement device 21 and the stereo camera 22 is known. It is also assumed that the positional relationship between the measurement device 21 and the stereo camera 22 is constant. It is not necessary for the positional relationship between the measurement device 21 and the stereo camera 22 to be known. It is also not necessary for the positional relationship between the measurement device 21 and the stereo camera 22 to be constant.

[0067] A light emitter (not shown), such as an LED (Light Emitting Diode), may be disposed near each of the reflectors r11, r12, and r13. Instead of the reflector module r2 (see FIG. 5), a reflector module r2a including reflectors r21, r22, and r23 and a light emitter 81, such as an LED, as shown in FIG. 8 may be attached to the robot arm 410.

[0068] In the image captured by the stereo camera 21, the luminance value of the pixel corresponding to the light-emitting body is higher than the luminance values ​​of the other pixels. Therefore, if the light-emitting body is placed near the reflector as described above, the position of the light-emitting body can be relatively easily identified from the image captured by the stereo camera 21. Note that an example of a method for identifying the position of the light-emitting body will be described later (see "(7) Method for identifying the position of the light-emitting body from an image").

[0069] Here, it is assumed that the positional relationship between the measurement device 21 and the stereo camera 22 is known and unchanging. Therefore, the measurement control device 10 can convert the position of the light-emitting object identified from the image captured by the stereo camera 22 (i.e., the position in the coordinate system related to the stereo camera 22) into a position in the first measurement coordinate system related to the measurement device 21 (in other words, the coordinate systems can be integrated). For this conversion, a rotation matrix and a translation matrix may be used, for example, as in the conversion between the position in the first measurement coordinate system and the position in the robot coordinate system described above (see "(2-2) Coordinate Transformation"). The measurement control device 10 may estimate the position in the first measurement coordinate system of the reflector, which is the measurement target of the measurement device 21, based on the position of the light-emitting object in the first measurement coordinate system.

[0070] The accuracy of the position of the light-emitting body identified from the images captured by the stereo camera 22 varies depending on the pixel size of the stereo camera 22, the distance between the stereo camera 22 and the light-emitting body, etc. In other words, the accuracy of the position of the light-emitting body varies depending on the pixel size of the imaging element of the stereo camera 22 and the size of the image of the light-emitting body on the imaging element of the stereo camera 22. In the space to be measured by the measurement device 21, the accuracy of the position of the light-emitting body identified from the images captured by the stereo camera 22 is lower than the accuracy of the measurement device 21. In other words, considering the accuracy, identifying the position of the light-emitting body from the images captured by the stereo camera 22 is synonymous with identifying the position of a reflector near the light-emitting body. In addition, if the positional relationship between each of the reflectors r11, r12, and r13 and the light-emitting body is known, the positions of each of the reflectors r11, r12, and r13 may be identified taking into account the positional relationship.

[0071] The measurement control device 10 may identify the position of a light-emitting object located near the reflector r11, for example, from an image captured by the stereo camera 22. The measurement control device 10 may estimate the position of the reflector r11 based on the identified position of the light-emitting object. Then, the measurement control device 10 may control the measurement device 21 to measure the reflector r11 based on the estimated position of the reflector r11. This allows the measurement device 21 to narrow down the range to which the measurement light should be irradiated in order to measure the position of the reflector r11, for example. This allows the measurement device 21 to shorten the time required to measure the position of the reflector r11. The same applies to the reflectors r12 and r13.

[0072] The measurement control device 10 may identify the position of, for example, the light-emitting body 81 included in the reflector module r2a from an image captured by the stereo camera 22. The measurement control device 10 may estimate the positions of the reflectors r21, r22, and r23 included in the reflector module r2a based on the identified position of the light-emitting body 81. The measurement control device 10 may then control the measurement device 21 to measure each of the reflectors r21, r22, and r23 based on the estimated positions of the reflectors r21, r22, and r23. This allows the measurement device 21 to narrow down the range to which the measurement light should be irradiated in order to measure the position of each of the reflectors r21, r22, and r23, for example. This reduces the time required for the measurement device 21 to measure the position of each of the reflectors r21, r22, and r23.

[0073] The light-emitting bodies may be disposed only near the reflectors r11, r12, and r13. In this case, the measurement control device 10 may identify the positions of the light-emitting bodies from the images captured by the stereo camera 22 only when the measurement device 21 measures the positions of the reflectors r11, r12, and r13.

[0074] Alternatively, the light-emitting body may be disposed only on the robot arm 410. In this case, the measurement control device 10 may identify the position of the light-emitting body 81 from the image captured by the stereo camera 22 only when the measurement device 21 measures the position of each of the reflectors r21, r22, and r23 included in the reflector module r2a.

[0075] If the reflectors r21, r22, and r23 are referred to as measurement members, it can be said that the measurement system 2 may include a stereo camera 22, which may be called an imaging device, that is capable of capturing images of the measurement members. Alternatively, it can be said that the measurement system 2 may include a stereo camera 22, which may be called a second measurement device, that is capable of measuring the measurement members with lower accuracy than the measurement device 21, which may be called a first measurement device. The measurement control device 10 may control the measurement of the measurement members by the measurement device 21 based on the measurement results by the stereo camera 22.

[0076] (3-2) Method Using Wireless Communication The measurement system 2 may include antennas ANT1, ANT2, and ANT3 capable of wireless communication in addition to the measurement device 21. The antennas ANT1, ANT2, and ANT3 may be arranged around the workpiece W, for example, as shown in FIG.

[0077] Here, it is assumed that the positional relationship between the measurement device 21 and each of the antennas ANT1, ANT2, and ANT3 is known. Furthermore, it is assumed that the positional relationship between the measurement device 21 and each of the antennas ANT1, ANT2, and ANT3 is unchanged. That is, similar to the case where the stereo camera described above is used, the measurement device 21 can convert positions in the coordinate system related to the antennas ANT1, ANT2, and ANT3 into positions in the first measurement coordinate system related to the measurement device 21 (in other words, the coordinate systems can be integrated). It is not necessary that the positional relationship between the measurement device 21 and each of the antennas ANT1, ANT2, and ANT3 is known. Furthermore, it is not necessary that the positional relationship between the measurement device 21 and each of the antennas ANT1, ANT2, and ANT3 is unchanged.

[0078] A ranging antenna (not shown) capable of wireless communication may be disposed near each of the reflectors r11, r12, and r13. Instead of the reflector module r2 (see FIG. 5), the robot arm 410 may be equipped with a reflector module r2b including reflectors r21, r22, and r23 and a ranging antenna 82 capable of wireless communication, as shown in FIG.

[0079] Antennas ANT1, ANT2, and ANT3 transmit radio waves. A description will be given of a case where the position of, for example, a ranging antenna 82 is identified using antennas ANT1, ANT2, and ANT3. Antenna ANT1 can transmit two or more radio waves with different frequencies. Ranging antenna 82 can receive two or more radio waves transmitted from antenna ANT1. The distance between antenna ANT1 and ranging antenna 82 is estimated from the phase difference between the two or more radio waves received by ranging antenna 82. Because the two or more radio waves transmitted from antenna ANT1 have different frequencies, the phase difference between the two or more radio waves varies depending on the distance between antenna ANT1 and ranging antenna 82. Similarly, the distance from antenna ANT2 to ranging antenna 82 and the distance from antenna ANT3 to ranging antenna 82 are estimated.

[0080] For example, the position of the ranging antenna 82 can be determined by finding the intersection of a sphere centered on antenna ANT1 and having a radius equal to the distance from antenna ANT1 to the ranging antenna 82, a sphere centered on antenna ANT2 and having a radius equal to the distance from antenna ANT2 to the ranging antenna 82, and a sphere centered on antenna ANT3 and having a radius equal to the distance from antenna ANT3 to the ranging antenna 82. Note that the error in distance measured using wireless communication (in other words, measured based on the phase difference of radio waves) is, for example, about 10 centimeters. The accuracy of the position of, for example, the ranging antenna 82 determined using wireless communication is lower than the accuracy of the measurement device 21. In other words, determining the position of a ranging antenna (for example, the ranging antenna 82) using wireless communication is equivalent to determining the position of a reflector near the ranging antenna, taking into account the accuracy.

[0081] The measurement control device 10 may convert the position of the ranging antenna 82 measured using, for example, wireless communication into the position of the ranging antenna 82 in the first measurement coordinate system. The measurement control device 10 may estimate the positions of, for example, the reflectors r21, r22, and r23 included in the reflector module r2b based on the position of the ranging antenna 82 in the first measurement coordinate system. The measurement control device 10 may control the measurement device 21 to measure each of the reflectors r21, r22, and r23 based on the estimated positions of each of the reflectors r21, r22, and r23. This allows the measurement device 21 to narrow down the range over which the measurement light is irradiated to measure the position of each of the reflectors r21, r22, and r23 (i.e., the scanning range of the measurement light to find the reflector). This reduces the time required for the measurement device 21 to measure the positions of each of the reflectors r21, r22, and r23.

[0082] The measurement control device 10 may estimate the position of the reflector r11 based on, for example, the position of a ranging antenna located near the reflector r11, which is identified using a similar method. The measurement control device 10 may control the measurement device 21 to measure the reflector r11 based on the estimated position of the reflector r11. This allows the measurement device 21 to narrow down, for example, the range over which the measurement light should be irradiated to measure the position of the reflector r11 (i.e., the scanning range of the measurement light to find the reflector). This allows the measurement device 21 to shorten the time required to measure the position of the reflector r11. The same applies to the reflectors r12 and r13.

[0083] The ranging antennas may be arranged only near the reflectors r11, r12, and r13. In this case, the measurement control device 10 may identify the positions of the ranging antennas from the distances to the ranging antennas identified by the antennas ANT1, ANT2, and ANT3 only when the measurement device 21 measures the positions of the reflectors r11, r12, and r13.

[0084] Alternatively, the ranging antenna may be disposed only on the robot arm 410. In this case, the measurement control device 10 may identify the position of the ranging antenna 82 from the distance to the ranging antenna 82 identified by each of the antennas ANT1, ANT2, and ANT3 only when the measurement device 21 measures the position of each of the reflectors r21, r22, and r23 included in the reflector module r2b.

[0085] If the reflectors r21, r22, and r23 are referred to as measurement members, it can be said that the measurement system 2 may include antennas ANT1, ANT2, and ANT3, which may be called second measurement devices, that are capable of measuring the measurement members with lower accuracy than the measurement device 21, which may be called a first measurement device. The measurement control device 10 may control the measurement of the measurement members by the measurement device 21 based on the measurement results from the antennas ANT1, ANT2, and ANT3.

[0086] (4) Tool Center Point When the machining control device 30 controls the robot 41, the machining control device 30 sets a path along which a point on the robot arm 410 of the robot 41 moves. This point on the robot arm 410 is called a "tool center point" (hereinafter, referred to as "TCP" where appropriate). The TCP roughly specifies the position of the part of the end effector (in other words, the tool) attached to the tip of the robot arm 410 that acts on the workpiece. The TCP is a part that serves as a reference when the machining control device 30 controls the robot 41. For this reason, the tool center point may also be called a reference part.

[0087] The TCP changes depending on the application of the end effector, etc. In other words, if the end effector is changed, the TCP associated with the robot arm 410 also changes. For example, in the case of a rod-shaped end effector EE1 as shown in FIG. 5, the TCP may be located at the tip of the end effector EE1. If the end effector is, for example, a suction hand having multiple suction pads, the TCP may be located on one of the multiple suction pads or may be located midway between the multiple suction pads (see, for example, FIG. 12). If the end effector is, for example, a gripping hand having multiple fingers or claws, the TCP may be located on one of the multiple fingers or claws or may be located midway between the multiple fingers or claws. If, for example, a suction hand or a gripping hand is attached to the robot arm 410, the robot 41 may be referred to as a pickup device. Note that the end effectors attached to the robot arm 410 are not limited to these.

[0088] 5, the position of the reflector module r2 attached to the robot arm 410 is different from the position of the TCP. In other words, the positions at which the reflectors r21, r22, and r23, which may be called measuring members, are attached are different from the position of the TCP. As described above, since the TCP corresponds to the part that acts on the workpiece, it is difficult to attach measuring members such as reflectors to the TCP.

[0089] On the other hand, the reflector module r2 is attached to a predetermined position on the robot arm 410 so that the positional relationship between the reflector module r2 and the TCP does not change. That is, the positions of the reflectors r21, r22, and r23 included in the reflector module r2 are each at a predetermined position relative to the TCP, which may be referred to as a reference portion, on the robot arm 410. In other words, the reflector module r2 including at least three reflectors (e.g., reflectors r21, r22, and r23) is disposed at a predetermined position relative to the TCP of the robot 41. That is, the reflectors r21, r22, and r23 capable of reflecting measurement light are disposed at predetermined positions relative to the TCP of the robot 41. Therefore, by using the positional relationship between each of the reflectors r21, r22, and r23 and the TCP, the position of the TCP can be identified by measuring the position of each of the reflectors r21, r22, and r23 with the measurement device 21.

[0090] The arrangement of the reflectors r21, r22, and r23 attached to the robot arm 410 may be changed depending on the shape of the end effector attached to the tip of the robot arm 410, for example. When the end effector is a rod-shaped end effector extending in the longitudinal direction of the robot arm 410, the reflectors r21, r22, and r23 may be arranged, for example, as shown in FIG. 11 . That is, the distance s11 between the reflectors r21 and r23 on the robot arm 410 (i.e., the distance in the longitudinal direction of the robot arm 410, which may be referred to as the first direction) may be longer than the distance s12 between the reflectors r22 and r23 (i.e., the distance in a second direction intersecting with the first direction). In other words, on the robot arm 410 on which multiple reflectors are arranged, the distance s11 between the multiple reflectors in the first direction may be longer than the distance s12 in the second direction intersecting with the first direction. In this way, when calculating the position and orientation of the TCP from the positions of the reflectors r21, r22, and r23 (see "(5) Calculation of the TCP position"), the tilt of the robot arm 410 in the longitudinal direction (in other words, the axis of the rod-shaped end effector) can be determined with relatively high accuracy.

[0091] When the end effector is a suction hand having a branched tip, the reflectors r21, r22, and r23 may be arranged, for example, as shown in Fig. 12. That is, the distance s21 between the reflectors r21 and r23 on the robot arm 410 (i.e., the spacing in the longitudinal direction of the robot arm 410, which may be referred to as the first direction) may be shorter than the spacing s22 between the reflectors r22 and r23 (i.e., the spacing in a second direction intersecting with the first direction). In other words, on the robot arm 410 on which multiple reflectors are arranged, the spacing s21 between the multiple reflectors in the first direction may be shorter than the spacing s22 in the second direction intersecting with the first direction. In this way, when calculating the position and attitude of the TCP from the positions of the reflectors r21, r22, and r23, the degree of rotation (e.g., rotation angle) around the longitudinal direction of the robot arm 410 (in other words, the axis of the rod-shaped end effector) can be determined with relatively high accuracy. Note that the first direction may also be referred to as a direction along the rotation axis of the end effector, which may be called a processing tool, of the robot arm 410. If the end effector is, for example, a laser processing head capable of laser processing an object to be processed, the first direction may also be referred to as a direction along the optical axis of the laser light (i.e., processing light) emitted from the laser processing head.

[0092] (4-1) TCP Measurement Specific TCP measurement methods will be described with reference to Figures 13 to 17. Note that the TCP measurement method is not limited to the method described below, and various existing methods can be applied.

[0093] (4-1-1) Method Using a Contact Sensor In FIG. 13 , a jig 91 has a hole H into which a rod-shaped end effector EE1 is inserted. A sensor 23 that measures the end effector EE1 is disposed on the bottom of the hole H. The jig 91 is fixed so that its position does not change. The position of the sensor 23, in other words, the position of the bottom of the hole H in the jig 91, is assumed to be known. The position of the sensor 23 may be expressed as a position in the robot coordinate system. In this case, when the tip of the end effector EE1 contacts the sensor 23 (in other words, when the sensor 23 measures the tip of the end effector EE1), the position of the TCP of the end effector EE1 is identified as the position of the sensor 23. The position of the TCP of the end effector EE1 identified in this manner may be input to the measurement control device 10 via the input device 14. In this case, the position of the TCP may be the position of the TCP in the robot coordinate system. The sensor 23 is not limited to being disposed on the bottom surface of the hole H, but may also be disposed on, for example, the side surface of the hole H. The sensor 23 may be referred to as a third measuring device.

[0094] 14 , a jig 91a has a hole H formed therein into which a rod-shaped end effector EE1 is inserted. A sensor 23 for measuring the end effector EE1 is disposed on the bottom surface of the hole H. A reflector module r3 including reflectors r31, r32, and r33 is attached to the jig 91a. The jig 91a may be moved so that the end effector EE1 is inserted into the hole H (i.e., the position of the jig 91a may be changed). The positional relationship between the sensor 23 and each of the reflectors r31, r32, and r33 is assumed to be known. For example, a transformation matrix for converting the positions of each of the reflectors r31, r32, and r33 into the position of the sensor 23 is assumed to be known. The reflector module r3 or the reflectors r31, r32, and r33 may be referred to as a second reference member.

[0095] In this case, with the tip of the end effector EE1 in contact with the sensor 23 (i.e., with the end effector EE1 inserted into the hole H of the jig 91a), the measuring device 21 irradiates each of the reflectors r31, r32, and r33 with measurement light. The measuring device 21 measures the position of each of the reflectors r31, r32, and r33 in the first measurement coordinate system based on the measurement light irradiated onto each of the reflectors r31, r32, and r33. The measurement control device 10 identifies the position of the TCP of the end effector EE1 based on the position of each of the reflectors r31, r32, and r33 in the first measurement coordinate system and the positional relationship between the sensor 23 and each of the reflectors r31, r32, and r33. Since the positional relationship between the sensor 23 and each of the reflectors r31, r32, and r33 is known, the calculation device 11 of the measurement control device 10 may convert the positions of each of the reflectors r31, r32, and r33 measured by the measurement device 21 in the first measurement coordinate system into the position of the sensor 23 in the first measurement coordinate system, for example, based on a transformation matrix for converting the positions of each of the reflectors r31, r32, and r33 in the first measurement coordinate system into the position of the sensor 23. Here, since the position of the sensor 23 corresponds to the position of the TCP of the end effector EE1, the calculation device 11 converts the positions of each of the reflectors r31, r32, and r33 in the first measurement coordinate system into the position of the sensor 23 in the first measurement coordinate system, thereby identifying the position of the TCP (e.g., the position of the TCP in the first measurement coordinate system).

[0096] (4-1-2) Method Using a Non-Contact Sensor In FIG. 15 , a sensor 24 that measures an object to be measured using a light-section method is attached to a jig 92. The sensor 24 is configured to emit light L1. The jig 92 is fixed so that its position does not change. For example, it is assumed that a position in the robot coordinate system corresponding to a reference point associated with the sensor 24 is known. In this case, the position of the TCP of the end effector EE1 measured by the sensor 24 may be converted to a position in the robot coordinate system based on the relationship between the reference point associated with the sensor 24 and the position in the robot coordinate system corresponding to the reference point. For example, the coordinate system associated with the sensor 24 is defined as a second measurement coordinate system. Since the reference point associated with the sensor 24 (i.e., the reference point in the second measurement coordinate system) and the position in the robot coordinate system corresponding to the reference point are known, for example, the calculation device 11 of the measurement control device 10 may calculate a transformation matrix for converting the position in the second measurement coordinate system to a position in the robot coordinate system. The calculation device 11 may convert the position of the TCP measured by the sensor 24 (i.e., the position in the second measurement coordinate system) into the position of the TCP in the robot coordinate system based on the transformation matrix. The position of the TCP of the end effector EE1 measured in this manner may be input to the measurement control device 10 via the input device 14. The sensor 24 may be referred to as a third measurement device.

[0097] 16 , the sensor 24 is attached to a jig 92a. A reflector module r4 including reflectors r41, r42, and r43 is attached to the jig 24a. The jig 92a may be moved so that the sensor 24 approaches the end effector EE1. The positional relationship between a reference point associated with the sensor 24 and each of the reflectors r41, r42, and r43 is assumed to be known. For example, a transformation matrix for converting the positions of each of the reflectors r41, r42, and r43 to the reference point associated with the sensor 24 is assumed to be known. The reflector module r4 or the reflectors r41, r42, and r43 may be referred to as a second reference member.

[0098] In this case, while the TCP of the end effector EE1 is being measured by the sensor 24, the measurement device 21 irradiates each of the reflectors r41, r42, and r43 with measurement light. The measurement device 21 measures the position of each of the reflectors r41, r42, and r43 in the first measurement coordinate system based on the measurement light irradiated onto each of the reflectors r41, r42, and r43. The measurement control device 10 identifies the position of the TCP of the end effector EE1 based on the positional relationship between the reference point associated with the sensor 24 and each of the reflectors r41, r42, and r43, the position of the TCP of the end effector EE1 measured by the sensor 24, and the positions of each of the reflectors r41, r42, and r43 in the first measurement coordinate system. Because the positional relationship between the reference point associated with the sensor 24 and each of the reflectors r41, r42, and r43 is known, the calculation device 11 of the measurement control device 10 may, for example, convert the positions of each of the reflectors r41, r42, and r43 in the first measurement coordinate system measured by the measurement device 21 into a reference point in the first measurement coordinate system based on a transformation matrix for converting the positions of each of the reflectors r41, r42, and r43 in the first measurement coordinate system into a reference point in the first measurement coordinate system. The calculation device 11 may calculate a transformation matrix for converting a position in the second measurement coordinate system into a position in the first measurement coordinate system based on the reference point in the first measurement coordinate system and a reference point in the second measurement coordinate system (i.e., a reference point associated with the sensor 24 in the coordinate system associated with the sensor 24). The calculation device 11 may convert the position of the TCP measured by the sensor 24 (i.e., a position in the second measurement coordinate system) into the position of the TCP in the first measurement coordinate system based on the transformation matrix.

[0099] The calculation device 11 does not need to calculate the above-mentioned "transformation matrix for transforming a position in the second measurement coordinate system into a position in the first measurement coordinate system." In this case, the transformation matrix may be input via the input device 14 of the measurement control device 10 by, for example, an administrator of the system 1. In other words, the measurement control device 10 may acquire the above-mentioned transformation matrix. The "transformation matrix for transforming a position in the second measurement coordinate system into a position in the first measurement coordinate system" may be referred to as third coordinate transformation information. Instead of the sensor 24, a non-contact sensor such as a stereo camera or a laser scanner may be used to measure the TCP.

[0100] (4-1-3) Others In FIG. 17 , an end effector EE2, which is, for example, an optical sensor, is attached to the tip of the robot arm 410. A tool ball TB is attached to a jig 93. A reflector module r5 including reflectors r51, r52, and r53 is attached to the jig 93. The position of the jig 93 (in other words, the position of the tool ball TB) is changeable. The positional relationship between the center of the tool ball TB and each of the reflectors r51, r52, and r53 is assumed to be known. However, the positional relationship between the center of the tool ball TB and each of the reflectors r51, r52, and r53 does not have to be known. The reflector module r5 or the reflectors r51, r52, and r53 may be referred to as a second reference member.

[0101] In this case, while the sensor serving as the end effector EE2 is measuring the center of the tool ball TB, the measurement device 21 irradiates each of the reflectors r51, r52, and r53 with measurement light. The measurement device 21 measures the positions of each of the reflectors r51, r52, and r53 in the first measurement coordinate system based on the measurement light irradiated onto each of the reflectors r51, r52, and r53. The measurement control device 10 compares the positions of each of the reflectors r51, r52, and r53 in the first measurement coordinate system with the center of the tool ball TB measured by the sensor serving as the end effector EE2. This operation is performed multiple times (e.g., three or more times) while changing the relative positional relationship between the end effector EE2 and the jig 93 (i.e., the tool ball TB). As a result, the position of the TCP of the end effector EE2 is identified. At this time, the position of the TCP may be the position of the TCP in the first measurement coordinate system. It should be noted that a corner cube may be used in place of the tool ball TB.

[0102] 13, for example, in a state where the TCP of the end effector EE1 is being measured, in other words, in a state where the position of the TCP of the end effector EE1 is specified, the measuring device 21 irradiates measurement light onto each of the reflectors r21, r22, and r23 included in the reflector module r2 attached to the robot arm 410. The measuring device 21 measures the position of each of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23.

[0103] As a result, the positions of the reflectors r21, r22, and r23 and the position of the TCP are identified (measured) without changing the position and posture of the robot arm 410. The position and posture of the robot arm 410 at this time are hereinafter referred to as the "reference position and reference posture" as appropriate. The positions of the reflectors r21, r22, and r23 and the position of the TCP when the robot arm 410 is in the reference position and reference posture may be expressed as positions in the first measurement coordinate system or may be expressed as positions in the robot coordinate system.

[0104] When the robot arm 410 is in the reference position and the reference posture, the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system and the position of the TCP are respectively expressed as (x ｒ２１Ｍ , y ｒ２１Ｍ , z ｒ２１Ｍ ), (x ｒ２２Ｍ , y ｒ２２Ｍ , z ｒ２２Ｍ ) and (x ｒ２３Ｍ , y ｒ２３Ｍ , z ｒ２３Ｍ ), and (x ｔＭ , y ｔＭ , z ｔＭ The calculation device 11 may transform the position of the TCP in the robot coordinate system into the position of the TCP in the first measurement coordinate system based on, for example, the above-mentioned first coordinate transformation matrix.

[0105] The calculation device 11 may calculate a posture corresponding to the reference posture of the robot arm 410 based on the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system. The calculated posture may be, for example, (W Ｍ , P Ｍ , R Ｍ ) where "W Ｍ " is the angle around the x-axis of the first measurement coordinate system, and "P Ｍ " is the angle around the y-axis of the first measurement coordinate system, and "R Ｍ " may be an angle around the z-axis of the first measurement coordinate system. In other words, "W Ｍ " is the amount of rotation of the robot arm 410 around the x-axis of the first measurement coordinate system, and "P Ｍ " is the amount of rotation of the robot arm 410 around the y-axis of the first measurement coordinate system, and "R Ｍ ″ is the amount of rotation of the robot arm 410 around the z-axis in the first measurement coordinate system.

[0106] The orientation of a vector (so-called tool axis vector) extending along the direction in which the end effector EE1 extends is regarded as the orientation of the TCP. Here, the orientation of this vector and the orientation of the robot arm 410 can be regarded as being the same. Therefore, the calculation device 11 calculates the position and orientation of the TCP when the position and orientation of the robot arm 410 are the reference position and reference orientation as, for example, (x ｔＭ , yｔＭ , z ｔＭ , W Ｍ , P Ｍ , R Ｍ The calculation device 11 may store in the storage device 12 the position and posture of the TCP when the position and posture of the robot arm 410 are the reference position and posture, and the positions of the reflectors r21, r22, and r23, in association with each other.

[0107] When the robot arm 410 is in the reference position and the reference posture, the positions of the reflectors r21, r22, and r23 in the robot coordinate system and the position of the TCP are respectively expressed as (x ｒ２１Ｒ , y ｒ２１Ｒ , z ｒ２１Ｒ ), (x ｒ２２Ｒ , y ｒ２２Ｒ , z ｒ２２Ｒ ) and (x ｒ２３Ｒ , y ｒ２３Ｒ , z ｒ２３Ｒ ), and (x ｔＲ , y ｔＲ , z ｔＲ ) The calculation device 11 may convert the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system measured by the measurement device 21 into the positions of the reflectors r21, r22, and r23 in the robot coordinate system, for example, based on the above-mentioned second coordinate transformation matrix. The calculation device 11 may also convert the position of the TCP in the first measurement coordinate system into the position of the TCP in the robot coordinate system, for example, based on the above-mentioned second coordinate transformation matrix.

[0108] The computing device 11 may calculate a posture corresponding to the reference posture of the robot arm 410 based on the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The calculated posture may be, for example, (W Ｒ , P Ｒ , R Ｒ ) where "W Ｒ " is the angle around the x-axis of the robot coordinate system, and "P Ｒ " is the angle around the y-axis of the robot coordinate system, and "R Ｒ " may be an angle around the z-axis of the robot coordinate system. In other words, "W Ｒ" is the amount of rotation of the robot arm 410 around the x-axis of the robot coordinate system, and "P Ｒ " is the amount of rotation of the robot arm 410 around the y-axis of the robot coordinate system, and "R Ｒ ″ is the amount of rotation of the robot arm 410 around the z-axis in the robot coordinate system.

[0109] The calculation device 11 calculates the position and posture of the TCP when the position and posture of the robot arm 410 are the reference position and reference posture, for example, as (x ｔＲ , y ｔＲ , z ｔＲ , W Ｒ , P Ｒ , R Ｒ The calculation device 11 may store in the storage device 12 the position and posture of the TCP when the position and posture of the robot arm 410 are the reference position and posture, and the positions of the reflectors r21, r22, and r23, in association with each other.

[0110] (4-3) Position Transformation The computing device 11 may calculate a position transformation matrix for transforming the positions of the reflectors r21, r22, and r23 into the position and orientation of the TCP based on the position and orientation of the TCP and the positions of the reflectors r21, r22, and r23, which are linked to each other and stored in the storage device 12. The position transformation matrix may include, for example, a matrix for calculating the position of the TCP based on the positions of the reflectors r21, r22, and r23, and a matrix for calculating the orientation of the TCP based on the positions of the reflectors r21, r22, and r23. The position transformation matrix may also be referred to as position transformation information.

[0111] The computing device 11 may calculate the position transformation matrix based on the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system and the position of the TCP when the robot arm 410 is in the reference position and posture (i.e., linked to each other). The position transformation matrix in the first measurement coordinate system may be referred to as first position transformation information.

[0112] The computing device 11 may calculate the position transformation matrix based on the positions of the reflectors r21, r22, and r23 in the robot coordinate system and the position of the TCP when the robot arm 410 is in the reference position and posture (i.e., linked to each other). The position transformation matrix in the robot coordinate system may be referred to as second position transformation information.

[0113] Here, when the robot arm 410 is in the reference position and reference posture, whether the positions of the reflectors r21, r22, and r23 and the position of the TCP are expressed as positions in the robot coordinate system or as positions in the first measurement coordinate system, the physical positional relationship between the reflectors r21, r22, and r23 and the TCP remains unchanged (see, for example, FIG. 18 ). Therefore, the first position transformation matrix and the second position transformation matrix are essentially the same. For this reason, in the following description, the "first position transformation matrix" and the "second position transformation matrix" will be referred to as the "position transformation matrix" as appropriate. In other words, the "position transformation matrix" is a concept that includes the "first position transformation matrix" and the "second position transformation matrix."

[0114] Here, the operation of the measurement system 2 will be described again with reference to the flowchart in Fig. 19. In Fig. 19, the calculation device 11 acquires the position of the TCP of the robot 41 when the robot arm 410 is in the reference position and reference posture. At this time, the calculation device 11 calculates a posture corresponding to the reference posture of the robot arm 410 based on the positions of the reflectors r21, r22, and r23. The calculation device 11 acquires the position and posture of the TCP by setting the calculated posture as the posture of the TCP (step S201).

[0115] In parallel with the processing of step S201, the measurement device 21 measures the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23 when the robot arm 410 of the robot 41 is in the reference position and reference posture (step S202). At this time, the calculation device 11 of the measurement control device 10 acquires position information indicating the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0116] Based on the position and attitude of the TCP obtained in the processing of step S201 and the position information obtained in the processing of step S202, the calculation device 11 calculates a position transformation matrix for converting the positions of each of the reflectors r21, r22, and r23 and the position and attitude of the TCP (step S203).

[0117] The position transformation matrix may be calculated, for example, as follows. First, when the position and orientation of the robot arm 410 are at a reference position and reference orientation, the positions of the reflectors r21, r22, and r23 are measured, and the orientation of the surface defined by the reflectors r21, r22, and r23 is calculated based on the measured positions. Next, the processing control device 30 controls the robot 41 so that the position and orientation of the TCP become predetermined. As a result, the position and orientation of the robot arm 410 change. After that, the positions of the reflectors r21, r22, and r23 are measured, and the orientation of the surface defined by the reflectors r21, r22, and r23 is calculated based on the measured positions. At this time, the predetermined position and orientation of the TCP are determined (i.e., known) by the processing control device 30. The position transformation matrix may also be calculated statistically based on the results of repeating the above-described operation multiple times.

[0118] 13, when the position of the TCP of the end effector EE1 is measured, the position and orientation of the robot arm 410 are the reference position and orientation, so it can be said that the TCP is located at a predetermined position. The positions of the reflectors r21, r22, and r23 used to calculate the position transformation matrix are measured while the TCP of the end effector EE1 is being measured.

[0119] Note that the "state in which the robot arm 410 is in the reference position and the reference posture" can be rephrased as "a state in which the TCP of the robot 41, which may be called a processing device, is located at a predetermined position." Here, the "state in which the TCP of the robot 41, which may be called a processing device, is located at a predetermined position" may be referred to as a first state. If the reflectors r21, r22, and r23 are referred to as measurement members, the "positions of the respective reflectors r21, r22, and r23 in the state in which the robot arm 410 is in the reference position and the reference posture" can be rephrased as "positions of the measurement members measured by the measurement device 21, which may be called a first measurement device, based on measurement light irradiated onto the measurement members in the first state." If the sensors 23 and 24 are referred to as third measurement devices, for example, the "state in which the robot arm 410 is in the reference position and the reference posture" can be rephrased as "a state in which the third measurement device is measuring the position of the TCP."

[0120] 14 and 16, if a jig (see, for example, jig 91a or jig 92a) for measuring the position of the TCP of the end effector EE1 is movable and a reflector is attached to the jig, the position of the reflector attached to the jig may move depending on the position of the end effector EE1 (i.e., the position of the robot arm 410). Furthermore, when the position of the TCP is being measured, the positional relationship between the reflector attached to the jig and reflectors r21, r22, and r23 attached to the robot arm 410 (in other words, measurement members) can be said to be a predetermined relationship. In this case, the measuring device 21 can identify the position of the TCP by measuring the position of the reflector attached to the jig (see "(4-1) Measuring the TCP" above).

[0121] If the reflector attached to the jig is referred to as a second reference member, then the measuring device 21, which may be called the first measuring device, can measure the position of the second reference member by irradiating measurement light onto the second reference member that moves according to the position of the robot arm 410, and can measure the position of the TCP of the robot 41, which moves in accordance with the movement of the robot arm 410.

[0122] As described above, the measurement system 2 including the measurement control device 10 and the measuring device 21 can be linked with the processing control device 30. In other words, the measurement results by the measuring device 21 can be used for the control of the robot 41 by the processing control device 30.

[0123] For example, when the position and posture of the robot arm 410 are different from the reference position and posture, the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measuring device 21 can be converted into the position of the TCP in the robot coordinate system using a coordinate transformation matrix and a position transformation matrix. The position of the TCP in this robot coordinate system is used when the processing control device 30 controls the robot 41.

[0124] The communication device 13 of the measurement control device 10 may associate, for example, the position and orientation of the TCP in the robot coordinate system and the positions of the reflectors r21, r22, and r23 in the robot coordinate system when the robot arm 410 is in the reference position and reference orientation, and transmit these to the processing control device 30. The processing control device 30 may associate, for example, the position and orientation of the TCP in the robot coordinate system and the positions of the reflectors r21, r22, and r23 in the robot coordinate system when the robot arm 410 is in the reference position and reference orientation, and store these in the storage device 32.

[0125] Incidentally, for example, when the TCP of the end effector EE1 is measured, the machining control device 30 controls the robot 41 so that the position and posture of the robot arm 410 are at a reference position and posture. At this time, the position set as the target position by the machining control device 30 (i.e., the position of the TCP when the TCP is measured) may differ from the actual position of the TCP. Therefore, the machining control device 30 may calibrate the origin of the robot coordinate system, for example, based on the position and posture of the TCP in the robot coordinate system when the robot arm 410 is at the reference position and posture, so that the position set as the target position coincides with the actual position of the TCP. Specifically, at least one of rotational transformation and translation of the origin of the robot coordinate system may be performed.

[0126] As described above, the posture of the TCP when the posture of the robot arm 410 is the reference posture may be calculated based on the positions of the reflectors r21, r22, and r23. Therefore, the processing control device 30 calibrating the origin of the robot coordinate system based on the position and posture of the TCP in the robot coordinate system can be rephrased as the processing control device 30 calibrating the origin of the robot coordinate system based on the positions of the reflectors r21, r22, and r23.

[0127] (5) Calculation of the position of the TCP By using the above-mentioned coordinate transformation matrix (i.e., transformation information for converting between a position in the measurement coordinate system and a position in the robot coordinate system) and the coordinate transformation matrix (i.e., transformation information for converting the position of each of the reflectors r21, r22, and r23 into the position of the TCP), the positions of each of the reflectors r21, r22, and r23 measured by the measurement device 21 can be converted into the position and orientation of the TCP when the position and orientation of the robot arm 410 are different from the above-mentioned reference position and reference orientation.

[0128] As explained in "(4-3) Position Transformation", the position transformation matrix is ​​the position and orientation of the TCP, for example, (x ｔＲ , y ｔＲ , z ｔＲ , W Ｒ , P Ｒ , R Ｒ ) and the positions of the reflectors r21, r22, and r23, for example (x ｒ２１Ｒ , y ｒ２１Ｒ , z ｒ２１Ｒ ), (x ｒ２２Ｒ , y ｒ２２Ｒ , z ｒ２２Ｒ ) and (x ｒ２３Ｒ , y ｒ２３Ｒ , z ｒ２３Ｒ ) Therefore, by using the position transformation matrix, the position and orientation of the TCP can be calculated from the positions of the reflectors r21, r22, and r23. Here, to avoid complexity, the position and orientation of the TCP will be referred to as the "position of the TCP" as appropriate.

[0129] The amount of rotation around the x-axis of the robot coordinate system is W Ｒcan be rephrased as a position in the rotation direction around the x-axis of the robot coordinate system. Ｒ can be rephrased as a position in the rotation direction around the y-axis of the robot coordinate system. The amount of rotation R around the z-axis of the robot coordinate system Ｒ can be rephrased as the position in the rotation direction around the z-axis of the robot coordinate system. Then, the position and orientation of the TCP can be expressed by the position in the x-axis direction of the robot coordinate system, the position in the y-axis direction of the robot coordinate system, the position in the z-axis direction of the robot coordinate system, the position in the rotation direction around the x-axis of the robot coordinate system, the position in the rotation direction around the y-axis of the robot coordinate system, and the position in the rotation direction around the z-axis of the robot coordinate system. In other words, the TCP can move along each of the x-axis, y-axis, and z-axis directions in three-dimensional space, and can rotate around each of the x-axis, y-axis, and z-axis. In other words, the TCP can be said to have six degrees of freedom of movement (so-called 6DoF: Six Degrees of Freedom).

[0130] Here, the calculation of the position of the TCP may be performed by the calculation device 11 of the measurement control device 10, or by the calculation device 31 of the processing control device 30. The calculation of the position of the TCP may be shared between the calculation devices 11 and 31. Furthermore, taking into consideration the conversion between the position in the measurement coordinate system and the position in the robot coordinate system, the following four methods can be mentioned.

[0131] (i) The measurement device 21 may irradiate each of the reflectors r21, r22, and r23 with measurement light while the position and posture of the robot arm 410 are different from the reference position and posture. The measurement device 21 may measure the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23.

[0132] The calculation device 11 of the measurement control device 10 may use a coordinate transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system measured by the measurement device 21 into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The calculation device 11 may further use a position transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the position of the TCP in the robot coordinate system.

[0133] Alternatively, the calculation device 11 may use a position transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system into the position and orientation of the TCP in the first measurement coordinate system. The calculation device 11 may further use a coordinate transformation matrix to transform the position of the TCP in the first measurement coordinate system into the position of the TCP in the robot coordinate system. The communication device 13 of the measurement control device 0 may transmit position information indicating the position of the TCP in the robot coordinate system to the processing control device 30.

[0134] (ii) The measurement device 21 may irradiate each of the reflectors r21, r22, and r23 with measurement light while the position and posture of the robot arm 410 are different from the reference position and posture. The measurement device 21 may measure the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23.

[0135] The calculation device 11 of the measurement control device 10 may use a coordinate transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system measured by the measurement device 21 into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The communication device 13 of the measurement control device 10 may transmit position information indicating the positions of the reflectors r21, r22, and r23 in the robot coordinate system and the position transformation matrix to the processing control device 30. The calculation device 31 of the processing control device 30 may use the position transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the position of the TCP in the robot coordinate system.

[0136] (iii) The measurement device 21 may irradiate each of the reflectors r21, r22, and r23 with measurement light while the position and posture of the robot arm 410 are different from the reference position and posture. The measurement device 21 may measure the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23.

[0137] The calculation device 11 of the measurement control device 10 may use the position transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system measured by the measurement device 21 into the position of the TCP in the first measurement coordinate system. The communication device 13 of the measurement control device 10 may transmit position information indicating the position of the TCP in the first measurement coordinate system and the coordinate transformation matrix to the processing control device 30. The calculation device 31 of the processing control device 30 may use the coordinate transformation matrix to transform the position of the TCP in the first measurement coordinate system into the position of the TCP in the robot coordinate system.

[0138] (iv) The measurement device 21 may irradiate each of the reflectors r21, r22, and r23 with measurement light while the position and posture of the robot arm 410 are different from the reference position and posture. The measurement device 21 may measure the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23.

[0139] The communication device 13 of the measurement control device 10 may transmit position information indicating the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system measured by the measurement device 21, coordinate transformation information, and position transformation information to the processing control device 30. The calculation device 31 of the processing control device 30 may use a coordinate transformation matrix to transform the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system into the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system. The calculation device 31 may further use a position transformation matrix to transform the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system into the position of the TCP in the robot coordinate system.

[0140] Alternatively, the calculation device 31 may use a position transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system indicated by the position information into the position and orientation of the TCP in the first measurement coordinate system. The calculation device 31 may further use a coordinate transformation matrix to transform the position of the TCP in the first measurement coordinate system into the position of the TCP in the robot coordinate system.

[0141] Here, focusing on the operation of the measurement control device 10, the above (i) to (iv) can be divided into cases where the measurement control device 10 transmits position conversion information to the processing control device 30 and cases where the measurement control device 10 transmits position information indicating the position of the TCP to the processing control device 30.

[0142] (5-1) When the measurement control device 10 transmits position conversion information to the processing control device 30 In this case, the communication device 13 of the measurement control device 10 transmits, in addition to the position conversion information, to the processing control device 30 position information indicating the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system (see (ii) above), or position information indicating the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system (see (iv) above).

[0143] If the reflectors r21, r22, and r23 are referred to as measurement members, the position information indicating the position of each of the reflectors r21, r22, and r23 in the robot coordinate system and the position information indicating the position of each of the reflectors r21, r22, and r23 in the first measurement coordinate system can be rephrased as "position information indicating the position of the measurement members." In other words, the "position information indicating the position of the measurement members" is a concept that includes the position information indicating the position of the measurement members in the robot coordinate system and the position information indicating the position of the measurement members in the first measurement coordinate system. Furthermore, the phrase "a state in which the robot arm 410 is different from the reference position and reference posture" can be rephrased as "a state in which the TCP of the robot 41, which may be called a processing device, is positioned at a position different from a predetermined position."

[0144] From these facts, the following aspects can be derived for the above (ii) and (iv): The communication device 13, which may be called a transmitter, may transmit the position transformation matrix to the processing control device 30, and the communication device 13 may further transmit, to the processing control device 30, position information indicating the position of the measurement member measured by the measurement device 21, which may be called a first measurement device, based on measurement light irradiated onto the measurement member, in a second state in which the TCP is located at a position different from the predetermined position.

[0145] Furthermore, "a state in which the robot arm 410 is different from the reference position and the reference posture" can be rephrased as "a state in which the third measuring device is not measuring the position of the TCP," for example, if the sensors 23 and 24 are rephrased as the third measuring device. From this, the following aspects are derived for the above (ii) and (iv). The communication device 13, which may be referred to as a transmitter, may transmit to the processing control device 30 the position transformation matrix and position information indicating the position of the measuring member measured by the measuring device 21, which may be referred to as the first measuring device, based on the measurement light irradiated onto the measuring member, in a state in which the third measuring device is not measuring the position of the TCP.

[0146] For example, as shown in Figures 14 and 16, if a jig (see, for example, jig 91a and jig 92a) for measuring the position of the TCP of the end effector EE1 is movable and a reflector is attached to the jig, it can be said that the positional relationship between the reflector attached to the jig and reflectors r21, r22, and r23 attached to the robot arm 410 (in other words, measuring members) when the position of the TCP is being measured is a predetermined relationship.

[0147] Here, when "the robot arm 410 is different from the reference position and the reference posture," this can be rephrased as when "the position of the TCP is not measured by the jig (for example, by the sensor 23 or 24)." Therefore, when the position of the TCP is not measured, it can be said that the positional relationship between the reflector attached to the jig and the reflectors r21, r22, and r23 attached to the robot arm 410 is different from a predetermined relationship.

[0148] From these facts, the following aspects can be derived for (ii) and (iv) above: The communication device 13, which may be called a transmitter, may transmit to the processing control device 30 a position transformation matrix and position information indicating the position of the measurement member measured by the measurement device 21, which may be called a first measurement device, based on measurement light irradiated onto the measurement member when the positional relationship between the measurement member and the second reference member is different from a predetermined positional relationship. Note that the reflector attached to the jig is referred to as the second reference member.

[0149] (5-2) When the measurement control device 10 transmits position information indicating the position of the TCP to the processing control device 30 In this case, the calculation device 11 of the measurement control device 10 may convert the positions of the reflectors r21, r22, and r23 measured by the measuring device 21 into the position of the TCP based on a position transformation matrix. Note that the converted position of the TCP may be the position of the TCP in the robot coordinate system (see (i) above) or the position of the TCP in the first measurement coordinate system (see (iii) above).

[0150] Furthermore, if we refer to reflectors r21, r22, and r23 as measuring members, it can be said that the calculation device 11, which may be called the calculation unit, may convert the position of the measuring member measured by the measuring device 21, which may be called the first measuring device, based on the measurement light irradiated onto the measuring member, into the position of the TCP of the robot 41 based on a position transformation matrix.

[0151] Alternatively, considering that the position transformation matrix is ​​calculated based on the position of the measurement member measured by the measurement device 21 (see "(4-3) Position Transformation"), it can be said that the calculation device 11, which may be called the calculation unit, may convert the position of the measurement member into the position of the TCP of the robot 41 based on the position of the measurement member measured by the measurement device 21, which may be called the first measurement device.

[0152] Note that "a state in which the robot arm 410 is different from the reference position and the reference posture" can be rephrased as "a state in which the third measuring device is not measuring the position of the TCP" if, for example, the sensors 23 and 24 are rephrased as the third measuring device. From this, the following aspects are derived for the above (i) and (iii). The calculating device 11, which may be called a calculating unit, may convert the position of the measuring member measured by the measuring device 21, which may be called the first measuring device, based on measurement light irradiated onto the measuring member into the position of the TCP, based on a position transformation matrix, in a state in which the third measuring device is not measuring the position of the TCP.

[0153] Furthermore, the "position transformation matrix" may be calculated based on the position of the measurement member measured by the measurement device 21 based on the measurement light irradiated onto the measurement member, and the position of the TCP measured by the third measurement device, while the third measurement device is measuring the position of the TCP (see "(4-3) Position Transformation"). From this, the following aspect can be derived. The calculation device 11, which may be called a calculation unit, may convert the position of the measurement member measured by the measurement device 21 based on the measurement light irradiated onto the measurement member, while the third measurement device is not measuring the position of the TCP, into the position of the TCP, based on the position of the measurement member measured by the measurement device 21, which may be called the first measurement device, based on the measurement light irradiated onto the measurement member, while the third measurement device is measuring the position of the TCP, and the position of the TCP measured by the third measurement device.

[0154] 14 and 16, when a jig (see, for example, jig 91a and jig 92a) for measuring the position of the TCP of the end effector EE1 is movable and a reflector is attached to the jig, it can be said that the positional relationship between the reflector attached to the jig and reflectors r21, r22, and r23 (in other words, measuring members) attached to the robot arm 410 when the position of the TCP is being measured is a predetermined relationship. Then, when the position of the TCP is not measured, that is, when the robot arm 410 is different from the reference position and reference posture, it can be said that the positional relationship is different from the predetermined relationship.

[0155] From this, the following aspects are derived for (i) and (iii) above. When the positional relationship between the measurement member and the second reference member is different from a predetermined positional relationship, the calculation device 11, which may be called a calculation unit, may convert the position of the measurement member measured by the measurement device 21, which may be called a first measurement device, based on measurement light irradiated onto the measurement member, into the position of the TCP, based on a position transformation matrix. Note that the reflector attached to the jig is referred to as the second reference member.

[0156] Furthermore, when the positional relationship between the position of the measurement member and the position of the second reference member is a predetermined relationship, the "position transformation matrix" may be calculated based on the position of the TCP measured by the measurement device 21 based on the measurement light irradiated onto the second reference member and the position of the measurement member measured by the measurement device 21 based on the measurement light irradiated onto the measurement member when the positional relationship between the position of the measurement member and the position of the second reference member is a predetermined relationship (see "(4-3) Position Transformation"). From this, the following aspect can be derived. When the positional relationship between the position of the measurement member and the position of the second reference member is a predetermined relationship, the calculation device 11, which may be called a calculation unit, may convert the position of the measurement member measured by the measurement device 21 based on the measurement light irradiated onto the measurement member into the position of the TCP when the positional relationship between the measurement member and the position of the second reference member is different from the predetermined positional relationship, based on the position of the measurement member measured by the measurement device 21 based on the measurement light irradiated onto the measurement member and the position of the TCP measured by the measurement device 21 based on the measurement light irradiated onto the second reference member.

[0157] (6) In the case where there are multiple robots capable of processing the workpiece W, the workpiece W, which may be referred to as a processing target, may be processed by multiple robots. For example, a system 1a shown in Figures 20 and 21 includes a measurement control device 10, a measuring device 21, a processing control device 30, and robots 41, 42, and 43. In the system 1a, the processing control device 30 controls the robots 41, 42, and 43.

[0158] A reflector module r2 including reflectors r21, r22, and r23 shown in Fig. 5 is attached to the robot arm 410 of the robot 41. However, the reflector module r2 is not shown in Fig. 20. Similarly, a reflector module including three reflectors is attached to the robot arm 420 of the robot 42. A reflector module including three reflectors is attached to the robot arm 430 of the robot 43.

[0159] The measurement device 21 can irradiate measurement light onto each of the reflectors r21, r22, and r23 included in the reflector module r2 attached to the robot arm 410. The measurement device 21 measures the positions of each of the reflectors r21, r22, and r23 in a first measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23. The calculation device 11 of the measurement control device 10 uses a coordinate transformation matrix to transform the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system into the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system.

[0160] The measurement device 21 can irradiate measurement light onto each of three reflectors included in a reflector module attached to the robot arm 420. The measurement device 21 measures the position of each of the three reflectors in a first measurement coordinate system based on the measurement light irradiated onto each of the three reflectors. The calculation device 11 uses a coordinate transformation matrix to transform the position of each of the three reflectors attached to the robot arm 420 in the first measurement coordinate system into the position of each of the three reflectors in the robot coordinate system.

[0161] The measurement device 21 can irradiate measurement light onto each of three reflectors included in a reflector module attached to the robot arm 430. The measurement device 21 measures the position of each of the three reflectors in a first measurement coordinate system based on the measurement light irradiated onto each of the three reflectors. The calculation device 11 uses a coordinate transformation matrix to transform the position of each of the three reflectors attached to the robot arm 430 in the first measurement coordinate system into the position of each of the three reflectors in the robot coordinate system.

[0162] If the reflectors attached to each of the robot arms 410, 420, and 430 are referred to as measurement members, the calculation device 11, which may be referred to as a calculation unit, can calculate the position in the robot coordinate system of each of the multiple measurement members attached to each of the robots 41, 42, and 43 capable of processing the workpiece W. In addition, the calculation device 11 can calculate the position of each of the TCPs of the robots 41, 42, and 43, for example, based on a position transformation matrix. Note that the calculation device 11 may calculate, as the coordinate transformation matrix, a second coordinate transformation matrix for converting the position of the measurement member in the first measurement coordinate system, measured by the measurement device 21 based on the measurement light irradiated onto the measurement member, into the position of the measurement member in the robot coordinate system, based on the first reference position information and the second reference position information (see "(2-2) Coordinate Transformation"). The second coordinate transformation matrix may be used in common to calculate the position in the robot coordinate system of each of the multiple measurement members attached to each of the robots 41, 42, and 43.

[0163] (7) Method for identifying the position of a light-emitting body from an image A specific example of a method for identifying the position of a light-emitting body, such as the light-emitting body 81, using the stereo camera 22, as described in "(3-1) Method using a stereo camera," will be described with reference to Figures 22 and 23.

[0164] Images captured by the stereo camera 22 often contain noise. When images contain noise, the noise may cause the position of the light-emitting object to be erroneously recognized. Therefore, erroneous recognition can be suppressed by removing noise, for example, by performing the process shown in the flowchart of FIG. 22. Note that the process described below is an example and is not limited to this.

[0165] 22 , the calculation device 11 of the measurement control device 10 acquires images captured by the stereo camera 22 (i.e., images captured by each of the two cameras included in the stereo camera 22) (step S301). The calculation device 11 generates a parallax image based on the images acquired in the processing of step S301 (step S302). Note that various existing methods can be applied to the method of generating the parallax image, and therefore detailed description thereof will be omitted.

[0166] The arithmetic unit 11 performs median filtering on the parallax image generated in step S302 (step S303). The arithmetic unit 11 further performs integration threshold (IT) processing on the median filtered image (step S304).

[0167] The integration threshold process is a process of integrating or averaging the values ​​of each pixel (e.g., luminance values) in a parallax image in the time direction, and excluding pixel values ​​below a predetermined value (e.g., setting them to 0). "Integrating or averaging the values ​​of each pixel in the time direction" means integrating or averaging the values ​​of each pixel across multiple parallax images that are consecutive in time. The predetermined value may also be referred to as a threshold.

[0168] Pixels with relatively large values ​​due to noise are random (i.e., different for each image). When the values ​​of each pixel are integrated or averaged over time, the values ​​of pixels corresponding to noise become relatively small. Therefore, noise can be removed by removing pixel values ​​below a predetermined value.

[0169] The integration threshold process will be further explained with reference to Fig. 23. Here, a frame image of 5 x 5 pixels will be used for explanation. For example, numerical values ​​such as "0" and "255" indicate the luminance value of a pixel.

[0170] In the integration threshold process, a new image is generated by adding (accumulating) the luminance values ​​of each pixel constituting the (n)th frame, which is the nth image, and the luminance values ​​of each pixel constituting the (n+1)th frame, which is the (n+1)th image following the (n)th frame (see FIG. 23(b)). Note that in the case of averaging, the luminance values ​​of each pixel constituting the (n)th frame and the luminance values ​​of each pixel constituting the (n+1)th frame are calculated.

[0171] Next, the threshold value is calculated by multiplying the maximum brightness value (here, "499") in the generated new image by a predetermined percentage (for example, 50%). Then, in the generated new image, the brightness values ​​of pixels whose brightness values ​​are equal to or less than the threshold value are set to "0" (see FIG. 23(c)).

[0172] 23(c) with the luminance values ​​of the pixels in the (n+2)th frame, which is the (n+2)th image following the (n+1)th frame, to generate a new image. In other words, the integration threshold process may be performed using multiple temporally consecutive images.

[0173] Returning to FIG. 22, the arithmetic unit 11 detects the position of the light emitter from the parallax image that has been subjected to the integration threshold process in the process of step S304 (step S305).

[0174] In addition, instead of performing noise removal processing such as median filter processing or integration threshold processing on the parallax image, the calculation device 11 may perform noise removal processing on the image acquired in the processing of step S301 (i.e., the image captured by the stereo camera 22).

[0175] Instead of or in addition to the above-described method, the following method may be used. Here, one of the two cameras included in the stereo camera 22 may be provided with a bandpass filter. The bandpass filter may be configured to have a relatively high transmittance for the wavelength band of light emitted from a light emitter 81 (see FIG. 8 ), such as an LED, and a relatively low transmittance for other wavelength bands. In an image captured by one of the two cameras included in the stereo camera 22, the luminance value of the portion in which the light emitter 81 appears is relatively high, while the luminance value of the other portion is relatively low. Therefore, by referring to the image captured by the one camera, the position of the light emitter 81 can be estimated relatively easily. Then, based on the position of the light emitter 81 estimated from the image captured by the one camera, the approximate position of the light emitter 81 in the image captured by the other camera included in the stereo camera 22 may be identified. Then, based on the identified approximate position, the position of the light emitter 81 may be identified, for example, by searching for a characteristic portion of the light emitter 81 in the image captured by the other camera. According to this method, for example, it is possible to shorten the time required to search for the characteristic portion of the light-emitting body 81 and also to suppress erroneous recognition.

[0176] (8) Measurement during operation of robot 41 From the viewpoint of improving the processing accuracy of the workpiece W by the robot 41, it is desirable that the positions of each of the reflectors r21, r22, and r23 included in the reflector module r2 attached to the robot arm 410 be measured by the measuring device 21 during operation of the robot 41.

[0177] On the other hand, if the robot arm 410 is moving, for example, the first point in time at which the position of reflector r21 is measured may differ from the second point in time at which the position of reflector r22 is measured, and as a result, the position and posture of the robot arm 410 at the first point in time may differ from the position and posture of the robot arm 410 at the second point in time.

[0178] For this reason, the movement of the robot arm 410 may be temporarily stopped in order to measure the position of each of the reflectors r21, r22, and r23. However, from the viewpoint of the work efficiency of the robot 41, it is desirable to keep the time during which the movement of the robot arm 410 is stopped in order to measure the position of each of the reflectors r21, r22, and r23 as short as possible. Note that if the scanning speed of the measurement light is sufficiently higher than the movement speed of the robot arm 410, measurement errors can be ignored. In this case, the movement of the robot arm 410 does not need to be temporarily stopped in order to measure the position of each of the reflectors r21, r22, and r23. Note that the movement speed of the robot arm 410 may be reduced when measuring the position of each of the reflectors r21, r22, and r23.

[0179] The robot 41 is controlled by the processing control device 30. Therefore, when the robot 41 is operating, the measurement control device 10 controls the measurement of the reflectors r21, r22, and r23 by the measuring device 21 in accordance with signals output from the processing control device 30.

[0180] The arithmetic device 31 of the processing control device 30 may determine, for example, the position and orientation of the TCP when measuring reflectors r21, r22, and r23 included in the reflector module r2 attached to the robot arm 410. Thereafter, the arithmetic device 31 generates a measurement start signal for causing the measuring device 21 to start measurement. The communication device 33 may transmit the measurement start signal to the measurement control device 10. Here, the measurement start signal may include information for the measurement control device 10 to control the measuring device 21.

[0181] (i) For example, the measurement start signal may include position information indicating the position and orientation of the TCP when the reflectors r21, r22, and r23 are measured (hereinafter, appropriately referred to as the "position of the TCP at the time of measurement"). Specifically, the measurement start signal may include position information indicating the position of the TCP at the time of measurement in the robot coordinate system determined by the arithmetic unit 31 of the processing control device 30.

[0182] In this case, for example, the calculation device 11 of the measurement control device 10 may use a coordinate transformation matrix to transform the position of the TCP at the time of measurement in the robot coordinate system indicated by the position information included in the measurement start signal into the position of the TCP at the time of measurement in the first measurement coordinate system. The calculation device 11 may further use a position transformation matrix to transform the position of the TCP at the time of measurement in the first measurement coordinate system into the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0183] Alternatively, the calculation device 11 may use a position transformation matrix to transform the position of the TCP at the time of measurement in the robot coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The calculation device 11 may further use a coordinate transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0184] The measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0185] (ii) For example, the measurement start signal may include position information indicating the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system. In this case, the arithmetic unit 31 of the machining control device 30 may determine the position of the TCP in the robot coordinate system at the time of measurement. The arithmetic unit 31 may use a position transformation matrix to transform the position of the TCP in the robot coordinate system at the time of measurement into the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system. The communication unit 33 may transmit the measurement start signal including position information indicating the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system to the measurement control device 10.

[0186] The calculation device 11 of the measurement control device 10 may use a coordinate transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system indicated by the position information included in the measurement start signal into the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system. The measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0187] (iii) For example, the measurement start signal may include a position signal indicating the position of the TCP at the time of measurement in the first measurement coordinate system. In this case, the arithmetic unit 31 of the machining control device 30 may determine the position of the TCP at the time of measurement in the robot coordinate system. The arithmetic unit 31 may use a coordinate transformation matrix to convert the position of the TCP at the time of measurement in the robot coordinate system into the position of the TCP at the time of measurement in the first measurement coordinate system. The communication unit 33 may transmit the measurement start signal including position information indicating the position of the TCP at the time of measurement in the first measurement coordinate system to the measurement control device 10.

[0188] The calculation device 11 of the measurement control device 10 may use a position transformation matrix to transform the position of the TCP at the time of measurement in the first measurement coordinate system indicated by the position information included in the measurement start signal into the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system. The measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0189] (iv) For example, the measurement start signal may include position information indicating the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system. In this case, the arithmetic unit 31 of the machining control device 30 may determine the position of the TCP at the time of measurement in the robot coordinate system. The arithmetic unit 31 may use a coordinate transformation matrix to transform the position of the TCP at the time of measurement in the robot coordinate system into the position of the TCP at the time of measurement in the first measurement coordinate system. The arithmetic unit 31 may further use a position transformation matrix to transform the position of the TCP at the time of measurement in the first measurement coordinate system into the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0190] Alternatively, the calculation device 31 may use a position transformation matrix to transform the position of the TCP at the time of measurement in the robot coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The calculation device 31 may further use coordinate transformation information to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system.

[0191] The communication device 33 may transmit a measurement start signal including position information indicating the position of each of the reflectors r21, r22, and r23 in the first measurement coordinate system to the measurement control device 10. The measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system indicated by the position information included in the measurement start signal.

[0192] The measurement start signal may include a first measurement start signal including position information and a second measurement start signal that commands the measurement control device 10 to perform measurement. In this case, the communication device 33 of the processing control device 30 may first transmit the first measurement start signal to the measurement control device 10. At this time, the processing control device 30 may control the robot 41 so that the robot arm 410 moves to a predetermined position indicated by the position information included in the first measurement start signal. When the communication device 33 of the processing control device 30 receives a signal from the robot 41 indicating that the movement of the robot arm 410 to the predetermined position has been completed, the communication device 33 may transmit a second measurement start signal to the measurement control device 10. As a result, measurement of the positions of the reflectors r21, r22, and r23 may be started.

[0193] In this case, the measurement control device 10 may estimate the positions of the reflectors r21, r22, and r23 at the time of measurement based on the position information included in the first measurement start signal. Then, the measurement control device 10 may change in advance the emission direction of the measurement light from the measurement device 21 so that the measurement light is irradiated onto the estimated positions. Alternatively, the measurement control device 10 may change in advance the emission direction of the measurement light from the measurement device 21 so that the measurement light is irradiated onto the position indicated by the position information included in the first measurement start signal. Thereafter, the measurement control device 10 may enter a standby state until receiving a second measurement start signal. At this time, the measurement device 21 waits in a state in which it can measure the positions of the reflectors r21, r22, and r23. When the measurement control device 10 receives the second measurement start signal, the measurement control device 10 may start measuring the positions of the reflectors r21, r22, and r23.

[0194] As described above, the communication device 33 of the processing control device 30 may transmit a measurement start signal to the measurement control device 10. In other words, the communication device 13 of the measurement control device 10 may receive a measurement start signal from the processing control device 30. That is, the processing control device 30 may include a communication device 33, which may be referred to as a transmitter, that transmits a measurement start signal to the measurement control device 10 to cause the measuring device 21, which may be referred to as a first measuring device, to start measurement. The measurement control device 10 may include a communication device 13, which may be referred to as a receiver, that receives, from the processing control device 30, a measurement start signal to cause the measuring device 21, which may be referred to as a first measuring device, to start measurement.

[0195] In the above cases (i) to (iii), the calculation device 11 of the measurement control device 10 converts the positions indicated by the position information included in the measurement start signal into the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system, which may be referred to as estimating the positions of each of the reflectors r21, r22, and r23. For this reason, the calculation device 11 may be referred to as an estimation unit.

[0196] As described above, the measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system indicated by the position information included in the measurement start signal. Here, "controlling the measurement of the reflectors r21, r22, and r23 by the measurement device 21" may include changing the direction (i.e., emission direction) of the measurement light. The measurement control device 10 may change the direction of the measurement light so that the measurement light emitted from the measurement device 21 is irradiated onto the positions of the reflectors r21, r22, and r23 estimated by the calculation device 11, which may be referred to as an estimation unit. Here, the measurement device 21 may be provided with a tracking device (not shown) capable of tracking the positions of the reflectors r21, r22, and r23 that move in accordance with the operation of the robot 41. In this case, the measurement control device 10 may change the direction of the measurement light by transmitting signals indicating the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system to the tracking device.

[0197] The calculation device 31 of the processing control device 30 may determine the timing at which the measuring device 21 starts measuring each of the reflectors r21, r22, and r23. The calculation device 31 may generate timing information (in other words, a timing signal) indicating the determined timing. The communication device 33 of the processing control device 30 may transmit the timing information to the measurement control device 10 in addition to or instead of the measurement start signal. In other words, the communication device 13 of the measurement control device 10 may receive the timing information. In other words, the processing control device 30 may include a communication device 33, which may be called a transmitter, that transmits timing information to the measurement control device 10 indicating the timing at which the measuring device 21, which may be called a first measuring device, starts measuring the position of the measurement member. The communication device 13, which may be called a receiver, may receive the timing information indicating the timing at which the measurement starts. Note that the timing signal may correspond to the "second measurement start signal" described above.

[0198] Note that the measurement start signal does not need to include position information. In this case, the communication device 33 of the machining control device 30 may transmit position information to the measurement control device 30 separately from the measurement start signal. As described above, the position information may indicate (i) the position of the TCP in the robot coordinate system at the time of measurement, (ii) the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system, (iii) the position of the TCP in the first measurement coordinate system at the time of measurement, or (iv) the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system. It can be said that the positions indicated by this position information are positions where the measuring device 21 should start measuring the reflectors r21, r22, and r23. If the reflectors r21, r22, and r23 are referred to as measurement members, it can be said that the processing control device 30 may include a communication device 33, which may be referred to as a transmitter, that transmits first start position information indicating a first measurement start position, which is a position where the measurement device 21, which may be referred to as a first measurement device, should start measuring the measurement member, to the measurement control device 10. The processing control device 30 may transmit the first start position information and a measurement start signal to the measurement control device 10. The processing control device 30 may transmit the first start position information and timing information to the measurement control device 10. Alternatively, the processing control device 30 may transmit the first start position information, the measurement start signal, and the timing information to the measurement control device 10.

[0199] When the measurement control device 10 receives the first start position information, the measurement control device 10 may change the emission direction of the measurement light so that the measurement light is irradiated toward the first measurement start position indicated by the first start position information. When the measurement control device 10 receives a measurement start signal in addition to the first start position information, the measurement control device 10 may change the emission direction of the measurement light so that the measurement light is irradiated toward the first measurement start position after receiving the measurement start signal and before the position of the measurement member moving with the movement of the robot 41 reaches the first measurement start position indicated by the first start position information. Alternatively, when the measurement control device 10 receives timing information in addition to the first start position information, the measurement control device 10 may change the emission direction of the measurement light so that the measurement light is irradiated toward the first measurement start position after receiving the timing information and before the position of the measurement member moving with the movement of the robot 41 reaches the first measurement start position indicated by the first start position information.

[0200] (8-1) Example of changing the emission direction of measurement light A specific example of a method for changing the emission direction of measurement light will be described with reference to Fig. 24. For example, when the emission direction of measurement light is changed by changing the angle of a mirror that reflects measurement light in the measurement device 21, the measurement control device 10 changes the emission direction by controlling a motor that changes the angle of the mirror provided in the measurement device 21.

[0201] In this case, due to, for example, a mechanical response delay of the motor, it takes a certain amount of time from when the measurement control device 30 starts controlling the motor until the emission direction of the measurement light becomes the desired emission direction.

[0202] 24, dotted circles indicate the positions of the reflectors r21, r22, and r23 (i.e., the positions where the reflectors r21, r22, and r23 are measured). "P21" indicates the position of the reflector r21, "P22" indicates the position of the reflector r22, and "P23" indicates the position of the reflector r23. Note that the positions P21, P22, and P23 may correspond to the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system indicated by the position information included in the measurement start signal, for example.

[0203] The solid arrow extending from the measurement device 21 indicates the current emission direction d0 of the measurement light. When the measurement device 21 first measures, for example, the reflector r21 shown in Fig. 24, the difference α between the current emission direction d0 of the measurement light and the target emission direction d1 is relatively large. In this case, the time required from when the measurement control device 10 starts to control the measurement device 21 until the measurement of the reflector r21 actually starts is relatively long.

[0204] 24, the difference β between the current emission direction d0 of the measurement light and the target emission direction d2 is relatively small. In this case, the time required from when the measurement control device 30 starts to control the measurement device 21 until the measurement of the reflector r22 actually starts is relatively short.

[0205] The measurement control device 10 may determine the order of measurements of the reflectors r21, r22, and r23 based on the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system, which is based on position information included in the measurement start signal, for example, and the current emission direction d0 of the measurement light from the measurement device 21, so as to suppress the amount of change in the emission direction of the measurement light. In this way, the time required for the measurement device 21 to measure the reflectors r21, r22, and r23 can be shortened. In the case shown in Figure 24, the measurement control device 10 may determine the order of measurements so that the reflector r22 is measured first, then the reflector r23, and finally the reflector r21.

[0206] It should be noted that "the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system based on the position information included in the measurement start signal" is not limited to "the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system indicated by the position information," but also includes the concept of "the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system in which the positions indicated by the position information are transformed by the calculation device 11 of the measurement control device 10 using at least one of a coordinate transformation matrix and a position transformation matrix."

[0207] (8-2) Reflector Measurement Method (8-2-1) Measurement Timing From the viewpoint of shortening the time required to measure the reflectors r21, r22, and r23, it is desirable to change in advance the emission direction of the measurement light L2 from the measurement device 21 so that the emission direction is the direction toward the position of the reflector r21, r22, or r23. For example, after receiving the measurement start signal and before the reflectors r21, r22, and r23 are positioned at the positions where the measurement device 21 measures the reflectors r21, r22, and r23 (see, for example, positions P21, P22, and P23 in FIG. 24 ), the measurement control device 10 may change the emission direction of the measurement light L2 so that the measurement light L2 is irradiated toward the positions where the measurement device 21 measures the reflectors r21, r22, and r23. Furthermore, after receiving the timing information and before the reflectors r21, r22, and r23 are positioned at the positions where the reflectors r21, r22, and r23 are measured by the measurement device 21, the measurement control device 10 may change the emission direction of the measurement light L2 so that the measurement light L2 is irradiated from the measurement device 21 toward the positions where the reflectors r21, r22, and r23 are measured by the measurement device 21. The positions where the reflectors r21, r22, and r23 are measured by the measurement device 21 may be referred to as target positions.

[0208] On the other hand, if the measurement light L2 is emitted toward the position where the reflectors r21, r22, and r23 are measured by the measuring device 21 before the reflectors r21, r22, and r23 are positioned at the position where the reflectors r21, r22, and r23 are measured by the measuring device 21, there is a risk that the measurement light L2 will be irradiated onto a reflector other than the reflector to be measured.

[0209] For example, it is assumed that the reflector module r2 attached to the robot arm 410 moves along the trajectory indicated by the dashed arrow in FIG. 25 . The emission direction of the measurement light L2 from the measurement device 21 is the direction of the position P22 where the reflector r22 is measured. In this case, the reflector r23 passes near the position P22 before the reflector r22 is positioned at the position P22. If the measurement light L2 is emitted from the measurement device 21 before the reflector r22 is positioned at the position P22, the measurement light L2 may be irradiated onto the reflector r23. In this case, the measurement result based on the measurement light L2 irradiated onto the reflector r23 may be output from the measurement device 21 as the measurement result related to the reflector r22. In other words, there is a risk of erroneous recognition of the reflector.

[0210] To prevent such erroneous recognition, the measurement start signal may include information indicating, for example, a waiting time. The waiting time may be, for example, the time from when the measurement control device 10 receives the measurement start signal until the measurement device 21 starts emitting the measurement light L2. The waiting time may be set based on the time required to control the robot arm 410 to realize the position and orientation of the TCP when measuring the reflectors r21, r22, and r23, which are determined by the calculation device 31 of the acceleration control device 30.

[0211] When the processing control device 30 transmits timing information to the measurement control device 10 in addition to the measurement start signal, the measurement start signal does not need to include information indicating, for example, a waiting time. In this case, the timing information may indicate the time when the measuring device 21 should start measurement. The time indicated by the timing information may be set based on the time when the robot arm 410 is controlled to achieve, for example, the position and orientation of the TCP determined by the calculation device 31 (i.e., the position and orientation of the TCP when measuring the reflectors r21, r22, and r23). Alternatively, the timing information may indicate the waiting time as the timing when the measuring device 21 starts measurement.

[0212] In this way, it is possible to prevent the measurement light L2 from being emitted from the measurement device 21 before the reflector to be measured by the measurement device 21 is positioned at the measurement position. As a result, it is possible to prevent the occurrence of erroneous recognition of the reflector. Note that while the measurement light L2 is being emitted from the measurement device 21, the light receiving sensor of the measurement device 21 may be turned off or a measurement value may not be calculated based on the output from the light receiving sensor until it is time for the measurement device 21 to start measurement. In this case as well, it is possible to prevent the occurrence of erroneous recognition of the reflector.

[0213] (8-2-2) Measurement Light Irradiation Method When reflectors r21, r22, and r23 are measured by the measurement device 21, the positions of each of the reflectors r21, r22, and r23 in the first measurement coordinate system (see, for example, positions P21, P22, and P23 in FIG. 24 ) are calculated (estimated) based on the position and orientation of the TCP when the measurements of the reflectors r21, r22, and r23 are performed (i.e., the position of the TCP at the time of measurement), which are determined by the calculation device 31 of the processing control device 30. Hereinafter, this "position of each of the reflectors r21, r22, and r23 in the first measurement coordinate system" will be referred to as the "estimated measurement position of each of the reflectors r21, r22, and r23" as appropriate.

[0214] Now, the estimated measurement positions of the reflectors r21, r22, and r23 may differ from the actual positions of the reflectors r21, r22, and r23 at the time of measurement. In this case, even if the measurement device 21 emits the measurement light L2 toward the position of the reflector to be measured among the estimated measurement positions of the reflectors r21, r22, and r23, the measurement light L2 will not be irradiated onto the reflector to be measured. In other words, the position of the reflector to be measured cannot be measured.

[0215] Therefore, the measurement device 21 may emit the measurement light L2 so that the trajectory of the measurement light L2 is a spiral trajectory centered on the position of the reflector to be measured, among the estimated measurement positions of each of the reflectors r21, r22, and r23. For example, if the reflector r22 is the reflector to be measured, as shown in Fig. 26, the measurement device 21 may emit the measurement light L2 so that the trajectory is a spiral trajectory centered on position P22, which is the estimated measurement position of the reflector r22. Note that the trajectory of the measurement light L2 is not limited to a spiral trajectory, and may be, for example, a trajectory such as a raster scan.

[0216] In this way, even if the estimated measurement positions of the reflectors r21, r22, and r23 differ from the actual positions of the reflectors r21, r22, and r23 at the time of measurement, the measurement device 21 can irradiate the measurement light L2 onto the reflector to be measured. In other words, the measurement device 21 can measure the position of the reflector to be measured.

[0217] (8-2-3) Correction of Estimated Positions As described above, the estimated measured positions of the reflectors r21, r22, and r23 may differ from the actual positions of the reflectors r21, r22, and r23 at the time of measurement.

[0218] For example, the measurement device 21 may first measure the position of the reflector r22, then measure the position of the reflector r23, and finally measure the position of the reflector r21. In this case, after the measurement device 21 measures the position of the reflector r22 and before the measurement device 21 measures the position of the reflector r23, the calculation device 11 of the measurement control device 10 may compare the estimated measured position of the reflector r22 with the actual position of the reflector r22 measured by the measurement device 21. The calculation device 11 may correct the estimated measured positions of the reflectors r23 and r21 based on the comparison result. In other words, the calculation device 11, which may be referred to as an estimating unit, may correct the positions of the other reflectors of the measurement target based on the estimated position of one reflector of the measurement target and the position of the one reflector of the measurement target measured by the measurement device 21 based on the measurement light L2 irradiated onto the one reflector of the measurement target.

[0219] When the positions of the reflectors r23 and r21 are measured, the measurement control device 10 controls the emission direction of the measurement light L2 of the measurement device 21 based on the corrected measurement positions of the reflectors r23 and r21, thereby shortening the time required to measure the positions of the reflectors r23 and r21.

[0220] (8-2-4) Stationary Determination Even when the processing control device 30 has completed controlling the robot 41 so that the position and posture of the TCP are the same as when measurements of reflectors r21, r22, and r23 are taken, vibrations may occur in the robot arm 410, for example, due to the recoil when the mechanism constituting the robot 41 stops.

[0221] The measuring device 21 may measure the position of one of the reflectors r21, r22, and r23 that is the measurement target multiple times. The calculation device 11 of the measurement control device 10 may determine that the robot arm 410 is stationary if the variation in the multiple positions indicated by the multiple measurement results of the one reflector that is the measurement target over a predetermined period (e.g., several hundred milliseconds to several seconds) is within a predetermined range (e.g., the range of the dashed circle shown in FIG. 27 ). In this way, it is possible to suppress a decrease in the accuracy of the position measured by the measuring device 21 due to vibration of the robot arm 410. Note that the predetermined range may be set, for example, based on the allowable error in position measurement by the measuring device 21, in other words, the measurement accuracy required for position measurement by the measuring device 21.

[0222] (8-2-5) Other methods of irradiating measurement light The measurement control device 10 may control the measurement device 21 based on the estimated measurement positions of each of the reflectors r21, r22, and r23 so that the trajectory of the measurement light L2 of the measurement device 21 becomes a spiral trajectory in a range including the reflectors r21, r22, and r23, as shown in Figure 28, for example.

[0223] (8-2-6) Measurement results When the robot 41 is operating, the positions of the reflectors r21, r22, and r23 in the first measurement coordinate system measured by the measurement device 21 may be converted by the calculation device 11 of the measurement control device 10 to the positions of the reflectors r21, r22, and r23 in the robot coordinate system, or may be converted by the calculation device 11 of the processing control device 30 to the positions of the reflectors r21, r22, and r23 in the robot coordinate system.

[0224] (9) Others (9-1) The end effector attached to the robot 41 may be an end effector for purposes other than machining. Examples of end effectors for purposes other than machining include a pick-up hand (specifically, a suction hand, a gripping hand, etc.) and a CMM (Coordinate Measuring Machine). The CMM may be, for example, a scanning laser probe type or an optical type that performs non-contact measurement. For example, when a CMM is attached to the robot 41 as an end effector and the CMM measures a workpiece W (see FIG. 1), the robot 41 may be referred to as a processing device, and the workpiece W may be referred to as a processing target.

[0225] (9-2) The storage device 12 of the measurement control device 10 may store one or more programs for realizing the functions of the measurement control device 10. The arithmetic device 11 may execute at least one of the one or more programs stored in the storage device 12, thereby realizing the functions of the arithmetic device 11 described above.

[0226] The storage device 32 of the machining control device 30 may store one or more programs for realizing the functions of the machining control device 30. The arithmetic device 31 may execute at least one of the one or more programs stored in the storage device 32, thereby realizing the functions of the arithmetic device 31 described above.

[0227] (9-3) When the measuring device 21 measures, for example, the reflector r11 attached to the jig 90, the measurement result is output from the measuring device 21 to the measurement control device 10. Similarly, when the measuring device 21 measures the reflectors r21, r22, and r23 attached to the robot arm 410 of the robot 41, the measurement result is output from the measuring device 21 to the measurement control device 10.

[0228] From these findings, the following aspect can be derived. A measurement method related to the measurement system 2 may include the following: a measurement device 21 irradiating a first reference member attached to a jig 90 that holds a processing object with measurement light, receiving measurement light generated from the first reference member, and outputting first member position information indicating the position of the first reference member; and a measurement device 21 irradiating a measurement member attached to a robot arm 410 of a robot 41 that can process the processing object with measurement light, receiving measurement light generated from the measurement member, and outputting second member position information indicating the position of the measurement member. Note that the reflector r11 is referred to as the first reference member, and the reflectors r21, r22, and r23 are referred to as measurement members. The first member position information (i.e., the position of the reflector r11) and the second member position information (i.e., the positions of each of the reflectors r21, r22, and r23) may be used to control the movement of the robot arm 410 of the robot 41, as described above.

[0229] Furthermore, as explained in "(3-1) Method using a stereo camera," the measurement of the measuring device 21 may be controlled based on the measurement results from the stereo camera 22. Here, controlling the measurement of the measuring device 21 may include controlling the direction of the measurement light (e.g., the irradiation direction). From these, the following aspect can be derived. A measurement method related to the measurement system 2 including the measuring device 21 and the stereo camera 22 may include the stereo camera 22, which may be called an imaging device, capturing images of a first reference member and a measurement member, controlling the irradiation direction of the measurement light irradiated from the measuring device 21 onto the first reference member based on the output from the stereo camera 22, and controlling the irradiation direction of the measurement light irradiated from the measuring device 21 onto the measurement member based on the output from the stereo camera 22.

[0230] (9-4) The positional relationship between the TCP and the reflectors, such as reflectors r21, r22, and r23, does not have to be calculated. In this case, the positional relationship between the TCP and the reflectors may be input by, for example, a user of the system 1. In other words, the positional relationship between the TCP and the reflectors may be memorized in the measurement system 2 and / or the system 1, which may be referred to as a processing system.

[0231] <Supplementary Notes> The following supplementary notes are further disclosed regarding the above-described embodiment.

[0232] (Supplementary Note 1) A processing method in a processing system including a processing device capable of processing a processing object, a first measuring device capable of irradiating a measuring light onto a measuring member attached to a movable part of the processing device and capable of measuring the position of the measuring member, a measurement control device capable of controlling the first measuring device, and a processing control device capable of controlling movement of the movable part, wherein the measurement control device, in a first state in which a tool center point of the processing device is located at a predetermined position, calculates position conversion information based on first position information indicating the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member and second position information indicating the predetermined position, the measurement control device transmits the calculated position conversion information to the processing control device, and the measurement control device, in a second state in which the tool center point is located at a position different from the predetermined position, transmits third position information indicating the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member to the processing control device. the machining control device converts the position of the measurement member indicated by the third position information into the position of the tool center point based on the position conversion information, and controls movement of the movable part based on the converted position of the tool center point to move the position of the tool center point.

[0233] (Supplementary Note 2) A processing method in a processing system including a processing device capable of processing a processing object, a first measuring device capable of irradiating a measuring light onto a measuring member attached to a movable part of the processing device and measuring a position of the measuring member, a measurement control device capable of controlling the first measuring device, and a processing control device capable of controlling movement of the movable part, the processing method including: the measurement control device converting, based on position conversion information, the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member, into the position of a tool center point of the processing device; the measurement control device transmitting, to the processing control device, sixth position information indicating the position of the tool center point; the measurement control device calculating, in a first state in which the tool center point is located at a predetermined position, the position conversion information based on the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member; and the processing control device controlling the movement of the movable part based on the position of the tool center point indicated by the sixth position information transmitted by the transmitter, to move the position of the tool center point.

[0234] (Supplementary Note 3) A processing method in a processing system including a processing device capable of processing a processing object, a first measuring device capable of irradiating a measurement light onto a measurement member attached to a movable part of the processing device at a position different from that corresponding to a tool center point of the processing device and capable of measuring the position of the measurement member, a measurement control device capable of controlling the first measuring device, a processing control device capable of controlling movement of the movable part, and a third measuring device capable of measuring the position of the tool center point, wherein the measurement control device calculates position conversion information based on the position of the measurement member measured by the first measuring device based on the measurement light irradiated onto the measurement member and the position of the tool center point measured by the third measuring device, while the third measuring device is measuring the position of the tool center point; and the measurement control device transmits the position conversion information and third position information indicating the position of the measurement member measured by the first measuring device based on the measurement light irradiated onto the measurement member, while the third measuring device is not measuring the position of the tool center point, to the processing control device capable of controlling the movement of the movable part. the machining control device converts the position of the measurement member indicated by the third position information into the position of the tool center point based on the position conversion information, and controls movement of the movable part based on the converted position of the tool center point to move the position of the tool center point.

[0235] (Supplementary Note 4) A processing method in a processing system including a processing device capable of processing a processing object, a first measuring device capable of irradiating a measurement light onto a measurement member attached to a movable part of the processing device at a position different from that corresponding to a tool center point of the processing device and capable of measuring the position of the measurement member, a measurement control device capable of controlling the first measuring device, a processing control device capable of controlling movement of the movable part, and a third measuring device capable of measuring the position of the tool center point, wherein the measurement control device converts the position of the measurement member measured by the first measuring device based on the measurement light irradiated onto the measurement member when the third measuring device is not measuring the position of the tool center point, into the position of the tool center point, based on the position of the measurement member measured by the first measuring device based on the measurement light irradiated onto the measurement member when the third measuring device is measuring the position of the tool center point, and the position of the tool center point measured by the third measuring device; and the measurement control device transmits sixth position information indicating the converted position of the tool center point to the processing control device. the machining control device controls the movement of the movable part based on the sixth position information to move the position of the tool center point.

[0236] (Supplementary Note 5) A processing method in a processing system including a processing device capable of processing a processing object, a first measuring device capable of measuring the position of a tool center point of the processing device that moves with the movement of a movable part by irradiating a measurement light onto a second reference member that moves according to the position of the movable part of the processing device, and capable of measuring the position of the measurement member by irradiating a measurement light onto a measurement member attached to the movable part at a position different from that corresponding to the tool center point, a measurement control device capable of controlling the first measuring device, and a processing control device capable of controlling the movement of the movable part, wherein the measurement control device calculates position conversion information based on the position of the tool center point measured by the first measuring device based on the measurement light irradiated onto the second reference member and the position of the measurement member measured by the first measuring device based on the measurement light irradiated onto the measurement member when a predetermined positional relationship exists between the position of the measurement member and the position of the second reference member; the measurement control device transmitting, to the processing control device, the position conversion information and third position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member when the positional relationship is different from the predetermined relationship; and the processing control device converting, based on the position conversion information, the position of the measurement member indicated by the third position information into the position of the tool center point, and moving the movable part based on the converted position of the tool center point to move the position of the tool center point.

[0237] (Supplementary Note 6) A processing method in a processing system including a processing device capable of processing a processing object, a first measuring device capable of measuring the position of a tool center point that moves with the movement of a movable part of the processing device by irradiating a measurement light onto a second reference member that moves according to the position of the movable part of the processing device, and capable of measuring the position of the measurement member by irradiating a measurement light onto a measurement member attached to the movable part at a position different from that corresponding to the tool center point, a measurement control device capable of controlling the first measuring device, and a processing control device capable of controlling the movement of the movable part, wherein the measurement control device converts, into the position of the tool center point, the position of the measurement member measured by the first measuring device based on the measurement light irradiated onto the measurement member when the positional relationship between the position of the measurement member and the position of the second reference member is a predetermined relationship, and the position of the measurement member measured by the first measuring device based on the measurement light irradiated onto the measurement member when the positional relationship is different from the predetermined position; the measurement control device transmitting sixth position information indicating the converted position of the tool center point to the processing control device; and the processing control device controlling movement of the movable part based on the position of the tool center point indicated by the sixth position information, to move the position of the tool center point.

[0238] (Supplementary Note 7) A processing method in a processing system including a processing device capable of processing a processing object, a first measuring device capable of irradiating a measuring member attached to the processing device with measuring light and measuring the position of the measuring member, a measurement control device capable of controlling the first measuring device, and a processing control device capable of controlling movement of the processing device, the processing method including: the processing control device transmitting first start position information to the measurement control device, the first start position indicating a first measurement start position at which the first measuring device should start measuring the measuring member; and the measurement control device changing the emission direction of the measurement light so that the measurement light is irradiated toward the first measurement start position indicated by the first start position information.

[0239] (Appendix 8) A processing method in a processing system including a processing device capable of processing a processing object, a first measuring device capable of irradiating a measuring member attached to the processing device with measuring light and measuring the position of the measuring member, a measurement control device capable of controlling the first measuring device, and a processing control device capable of controlling movement of the processing device, the processing method including: the processing control device transmitting a measurement start signal to the measurement control device to cause the first measuring device to start measuring the position of the measuring member; and the measurement control device controlling the first measuring device to start emitting the measuring light based on the measurement start signal.

[0240] (Supplementary Note 9) A processing method in a processing system including a processing device capable of processing a processing object, a first measuring device capable of irradiating a measuring member attached to the processing device with measuring light and measuring the position of the measuring member, a measurement control device capable of controlling the first measuring device, and a processing control device capable of controlling movement of the processing device, the processing method including: the processing control device transmitting timing information indicating a timing at which the first measuring device starts measuring the position of the measuring member to the measurement control device; and the measurement control device controlling the emission timing of the measuring light emitted from the first measuring device based on the timing information.

[0241] (Supplementary Note 10) A measurement method in a measurement system including a first measurement device capable of measuring the position of a measurement member attached to a processing device capable of processing the object to be processed, and a measurement control device capable of controlling the first measurement device, the measurement control device calculating position conversion information for converting the position of the measurement member to the position of a tool center point of the processing device based on the position of the measurement member measured by the first measurement device, and the measurement control device transmitting the position conversion information to the processing control device that controls the processing device.

[0242] (Supplementary Note 11) A measurement method in a measurement system including a first measurement device capable of measuring the position of a measurement member attached to a processing device capable of processing the object to be processed, and a measurement control device capable of controlling the first measurement device, the measurement control device converting the position of the measurement member to the position of a tool center point of the processing device based on the position of the measurement member measured by the first measurement device, and the measurement control device transmitting sixth position information indicating the converted position of the tool center point to the processing control device that controls the processing device.

[0243] (Supplementary Note 12) A processing system comprising: a processing device capable of processing a processing object; and a processing control device capable of controlling the processing device, wherein the processing control device comprises a transmitting unit that transmits information relating to measurement by a first measuring device to a measurement control device capable of controlling a first measuring device capable of measuring the processing device.

[0244] (Supplementary Note 13) A processing method in a processing system including a processing device capable of processing a processing object and a processing control device capable of controlling the processing device, the processing control device transmitting information regarding measurement by a first measuring device to a measurement control device capable of controlling a first measuring device capable of measuring the processing device.

[0245] (Supplementary Note 14) A measurement method in a measurement system including a first measurement device capable of irradiating measurement light onto a measurement member attached to a processing device capable of processing a processing object, and a measurement control device capable of controlling the first measurement device, the measurement method including the measurement control device controlling the first measurement device based on information relating to measurement by the first measurement device transmitted from a processing control device capable of controlling the processing device.

[0246] (Supplementary Note 15) A measurement method including: a first measuring device receiving measurement light generated from a first reference member attached to a jig that holds a processing object when the measurement light is irradiated onto the first reference member, and outputting reference member position information indicating the position of the first reference member; and the first measuring device receiving measurement light generated from a measuring member attached to a movable part of a processing device that can process the processing object when the measurement light is irradiated onto the measuring member, and outputting measurement member position information indicating the position of the measuring member, wherein the reference member position information and the measurement member position information outputted from the first measuring device are used to control the movement of the movable part of the processing device.

[0247] (Appendix 16) The measurement method according to Appendix 15 includes: an imaging device capturing an image of the first reference member and the measurement member; controlling the direction of irradiation of measurement light irradiated from the first measurement device to the first reference member based on the output from the imaging device; and controlling the direction of irradiation of measurement light irradiated from the first measurement device to the measurement member based on the output from the imaging device.

[0248] The present invention is not limited to the above-described embodiments, but can be modified as appropriate within the scope of the claims and the gist or idea of ​​the invention that can be read from the entire specification, and measurement systems, processing systems, measurement methods, and processing methods that involve such modifications are also included in the technical scope of the present invention.

[0249] REFERENCE SIGNS LIST 1, 1a... system, 2, ... measurement system, 10... measurement control device, 21... measurement device, 22... stereo camera, 23, 24... sensor, 30... processing control device, 41, 42, 43... robot, 90... jig, W... workpiece, r11, r12, r13, r21, r22, r23... reflector

Claims

1. A first measuring device capable of irradiating a measuring member attached to a movable portion of a processing device capable of processing a processing object with a measuring light and capable of measuring a position of the measuring member; A measurement control device capable of controlling the first measurement device; A measurement system comprising: The measurement control device includes: a calculation unit that calculates position conversion information based on first position information indicating a position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member in a first state in which a tool center point of the processing device is located at a predetermined position, and second position information indicating the predetermined position; a transmitting unit that transmits the calculated position conversion information to a processing control device that can control the movement of the movable part of the processing device; Equipped with The transmission unit transmits, to the processing control device, third position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member in a second state in which the tool center point is located at a position different from the predetermined position. Measurement system.

2. The measurement control device acquires the third position information after acquiring the first position information. The measurement system of claim 1 .

3. The position conversion information is information for converting the position of the measurement member indicated by the third position information into the position of the tool center point. The measurement system of claim 1 .

4. the calculation unit acquires coordinate conversion information for converting between a processing coordinate system, which is a coordinate system related to the processing device, and a first measurement coordinate system, which is a coordinate system related to the first measurement device; the second position information indicates the predetermined position in the machining coordinate system, the calculation unit converts the predetermined position in the machining coordinate system indicated by the second position information into the predetermined position in the first measurement coordinate system based on the coordinate conversion information; the first position information indicates a position of the measurement member in the first measurement coordinate system in the first state, The calculation unit calculates, as the position conversion information, first position conversion information which is position conversion information in the first measurement coordinate system, based on the predetermined position in the first measurement coordinate system and the position of the measurement member in the first measurement coordinate system indicated by the first position information. The measurement system according to any one of claims 1 to 3.

5. the calculation unit acquires first coordinate conversion information for converting a machining coordinate system, which is a coordinate system related to the machining device, into a first measurement coordinate system, which is a coordinate system related to the first measurement device, and second coordinate conversion information for converting the first measurement coordinate system into the machining coordinate system; the second position information indicates the predetermined position in the machining coordinate system, the calculation unit converts a predetermined position in the machining coordinate system indicated by the second position information into a predetermined position in the first measurement coordinate system based on the first coordinate conversion information; the first position information indicates a position of the measurement member in the first measurement coordinate system in the first state, the calculation unit calculates, as the position conversion information, second position conversion information which is position conversion information in the machining coordinate system, based on the predetermined position in the first measurement coordinate system, the position of the measurement member in the first measurement coordinate system indicated by the first position information, and the second coordinate conversion information; The transmitting unit transmits the second conversion information to the processing control device as the position conversion information. The measurement system according to any one of claims 1 to 3.

6. the measurement member includes a plurality of reflectors; A distance between the plurality of reflectors in a first direction on the movable portion on which the plurality of reflectors are arranged is longer than a distance between the plurality of reflectors in a second direction intersecting the first direction. The measurement system of claim 1 .

7. the measurement member includes a plurality of reflectors; A distance between the plurality of reflectors in a first direction on the movable portion on which the plurality of reflectors are arranged is shorter than a distance between the plurality of reflectors in a second direction intersecting the first direction. The measurement system of claim 1 .

8. the movable part is a robot arm, The first direction is a longitudinal direction of the robot arm. The measurement system according to claim 6 or 7.

9. the movable part is a robot arm, The first direction is a direction along a rotation axis of a processing tool of the robot arm or an optical axis of processing light. The measurement system according to claim 6 or 7.

10. The measurement control device acquires the second position information. The measurement system according to any one of claims 1 to 3.

11. The calculation unit converts the position of the measurement member in the first measurement coordinate system, which is measured by the first measurement device based on the measurement light irradiated onto the measurement member, into the position of the measurement member in the processing coordinate system based on the second coordinate conversion information; The transmission unit transmits the third position information indicating a position of the measuring member in the machining coordinate system to the machining control device. The measurement system according to any one of claims 1 to 3.

12. A first measuring device capable of irradiating a measuring member attached to a movable portion of a processing device capable of processing a processing object with a measuring light and capable of measuring a position of the measuring member; A measurement control device capable of controlling the first measurement device; A measurement system comprising: The measurement control device includes: a calculation unit that converts the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member into the position of a tool center point of the processing device based on position conversion information; a transmission unit that transmits sixth position information indicating a position of the tool center point to a processing control device capable of controlling movement of the movable part; Equipped with The calculation unit calculates the position conversion information based on the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member in a first state in which the tool center point is located at a predetermined position. Measurement system.

13. The measurement control device acquires the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member in the first state, and then acquires the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member in a second state in which the tool center point is located at a position different from the predetermined position. The measurement system of claim 12.

14. The position conversion information is information for converting the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member in a second state in which the tool center point is located at a position different from the predetermined position, into the position of the tool center point. The measurement system according to claim 12 or 13.

15. the calculation unit acquires coordinate conversion information for converting between a processing coordinate system, which is a coordinate system related to the processing device, and a first measurement coordinate system, which is a coordinate system related to the first measurement device; The calculation unit converts the predetermined position in the processing coordinate system into the predetermined position in the first measurement coordinate system based on the coordinate conversion information, The calculation unit calculates, as the position conversion information, first position conversion information which is position conversion information in the first measurement coordinate system, based on the predetermined position in the first measurement coordinate system and the position of the measurement member in the first measurement coordinate system measured by the first measurement device based on the measurement light irradiated onto the measurement member in the first state. The measurement system according to claim 12 or 13.

16. the calculation unit acquires first coordinate conversion information for converting a machining coordinate system, which is a coordinate system related to the machining device, into a first measurement coordinate system, which is a coordinate system related to the first measurement device, and second coordinate conversion information for converting the first measurement coordinate system into the machining coordinate system; The calculation unit converts the predetermined position in the machining coordinate system into the predetermined position in the first measurement coordinate system based on the first coordinate conversion information, the calculation unit calculates, as the position conversion information, second position conversion information which is position conversion information in the machining coordinate system, based on the predetermined position in the first measurement coordinate system, a position of the measurement member in the first measurement coordinate system measured by the first measurement device based on the measurement light irradiated onto the measurement member in the first state, and the second coordinate conversion information; The transmitting unit transmits the second position conversion information to the processing control device. The measurement system according to claim 12 or 13.

17. the calculation unit converts a position of the measurement member in the first measurement coordinate system, which is measured by the first measurement device based on the measurement light irradiated onto the measurement member, into a position of the measurement member in the processing coordinate system based on the second coordinate conversion information; The transmission unit transmits third position information indicating a position of the measuring member in the machining coordinate system to the machining control device.

17. The measurement system of claim 16.

18. The transmission unit transmits the first position conversion information to the processing control device. The measurement system of claim 15.

19. The first measuring device is capable of irradiating the measuring light to a first reference member and measuring a position of the first reference member in a first measurement coordinate system which is a coordinate system related to the first measuring device. The measurement system according to any one of claims 1 to 3, 12 and 13.

20. The first measuring device is capable of irradiating the measurement light to a first reference member attached to at least one of the object to be processed and a jig that holds the object to be processed, and is capable of measuring a position of the first reference member in a first measurement coordinate system that is a coordinate system related to the first measuring device. The measurement system according to any one of claims 1 to 3, 12 and 13.

21. The calculation unit converts the position of the measuring member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiated onto the measuring member, into the position of the measuring member in the processing coordinate system, based on fourth position information indicating the position of the first reference member in the first measurement coordinate system, measured by the first measuring device based on the measurement light irradiated onto the first reference member, and fifth position information indicating the position of the first reference member in the processing coordinate system input via an input unit of the measurement control device; The transmission unit transmits the third position information indicating a position of the measuring member in the machining coordinate system to the machining control device.

21. The measurement system of claim 20.

22. The processing control device controls the plurality of processing devices each capable of processing the processing object, The calculation unit is capable of calculating the position in the machining coordinate system of each of the plurality of measuring members attached to the plurality of machining devices, respectively.

22. The measurement system of claim 21.

23. The calculation unit calculates second coordinate transformation information for transforming a position of the measurement member in the first measurement coordinate system measured by the first measuring device based on the measurement light irradiated to the measurement member into a position of the measurement member in the processing coordinate system based on the fourth position information and the fifth position information, The second coordinate transformation information is shared for calculating positions of the plurality of measurement members.

23. The measurement system of claim 22.

24. The calculation unit calculates second coordinate transformation information for transforming a position of the measurement member in the first measurement coordinate system measured by the first measuring device based on the irradiation light irradiated to the measurement member, into a position of the measurement member in the machining coordinate system, based on the fourth position information and the fifth position information.

22. The measurement system of claim 21.

25. A plurality of the measuring members are respectively attached to a plurality of the processing devices capable of processing the processing object, the calculation unit calculates second coordinate conversion information for converting the position of the measurement member in the first measurement coordinate system, measured by the first measurement device based on the irradiation light irradiated onto the measurement member, into the position of the measurement member in the processing coordinate system, based on fourth position information indicating the position of the first reference member in the first measurement coordinate system, measured by the first measurement device based on the measurement light irradiated onto the first reference member, and fifth position information indicating the position of the first reference member in the processing coordinate system input via an input unit of the measurement control device; The second coordinate transformation information is shared for calculating positions of the plurality of measurement members.

21. The measurement system of claim 20.

26. The first reference member includes at least three reflectors each capable of reflecting the measurement light.

21. The measurement system of claim 20.

27. ​​The measurement control device includes a receiving unit that receives a measurement start signal from the processing control device to cause the first measuring device to start measurement. The measurement system according to any one of claims 1 to 3, 12 and 13.

28. The measurement control device changes the emission direction of the measurement light in the first measurement device so that the measurement light is irradiated toward the target position after receiving the measurement start signal and before the position of the measurement member attached to the processing device is positioned at the target position.

28. The measurement system of claim 27.

29. The receiving unit further receives timing information indicating a timing to start measurement from the processing control device.

29. A measurement system according to claim 27 or 28.

30. After receiving the timing information, the measurement control device changes the emission direction of the measurement light in the first measurement device so that the measurement light is irradiated toward the target position before the position of the measurement member attached to the processing device is positioned at the target position.

30. The measurement system of claim 29.

31. The processing device is provided with a reflector capable of reflecting the measurement light as the measurement member. The measurement system according to any one of claims 1 to 3, 12 and 13.

32. The measurement control device includes an estimation unit capable of estimating a position of the measurement member that moves in accordance with the movement of the movable part during operation of the processing device, The measurement control device changes an emission direction of the measurement light in the first measurement device so that the measurement light is irradiated to the position estimated by the estimation unit. The measurement system according to any one of claims 1 to 3, 12 and 13.

33. The first measuring device is provided with a tracking device capable of tracking the measuring member that moves in accordance with the movement of the movable part during operation of the processing device. The measurement system according to any one of claims 1 to 3, 12 and 13.

34. The measurement control device includes an estimation unit capable of estimating a position of the measurement member that moves in accordance with the movement of the movable part during operation of the processing device, The estimation unit corrects the estimated position based on the estimated position and the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member.

34. The measurement system of claim 33.

35. The measuring member includes at least three reflectors each capable of reflecting the measuring light. The measurement system according to any one of claims 1 to 3, 12 and 13.

36. The measurement system includes an imaging device capable of imaging the measurement member, The measurement control device controls the measurement of the measurement member by the first measuring device based on an imaging result by the imaging device. The measurement system according to any one of claims 1 to 3, 12 and 13.

37. The measurement system includes a second measurement device capable of measuring the measurement member with a coarser accuracy than the first measurement device; The measurement control device controls the measurement of the measurement member by the first measurement device based on a measurement result of the measurement member by the second measurement device. The measurement system according to any one of claims 1 to 3, 12 and 13.

38. The processing control device controls processing of the object to be processed by the plurality of processing devices, The calculation unit is capable of calculating the position of the tool center point of each of the plurality of processing devices. The measurement system according to any one of claims 1 to 3, 12 and 13.

39. In a processing device capable of processing a processing object, a first measuring device capable of irradiating a measuring member attached to a movable part of the processing device at a position different from a position corresponding to a tool center point of the processing device and capable of measuring a position of the measuring member; A measurement control device capable of controlling the first measurement device; a third measuring device capable of measuring the position of the tool center point; A measurement system comprising: The measurement control device includes: a calculation unit that calculates position conversion information based on the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member and the position of the tool center point measured by the third measurement device while the third measurement device is measuring the position of the tool center point; and a transmitting unit that transmits the position conversion information and third position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member in a state in which the third measurement device does not measure the position of the tool center point, to a processing control device capable of controlling movement of the movable part; Equipped Measurement system.

40. The measurement control device acquires the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member while the third measurement device is measuring the position of the tool center point, and then acquires the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member while the third measurement device is not measuring the position of the tool center point.

40. The measurement system of claim 39.

41. The position conversion information is information for converting the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member in a state in which the third measurement device has not measured the position of the tool center point, into the position of the tool center point.

41. A measurement system according to claim 39 or 40.

42. the calculation unit acquires third coordinate transformation information for transforming a second measurement coordinate system, which is a coordinate system related to the third measurement device, into a first measurement coordinate system, which is a coordinate system related to the first measurement device; and the calculation unit converts the position of the tool center point in the second measurement coordinate system measured by the third measurement device into the position of the tool center point in the first measurement coordinate system based on the third coordinate conversion information, while the third measurement device is measuring the position of the tool center point; The calculation unit calculates, as the position conversion information, first position conversion information which is position conversion information in the first measurement coordinate system, based on the position of the measurement member in the first measurement coordinate system measured by the first measurement device and the position of the tool center point in the first measurement coordinate system, while the third measurement device is measuring the position of the tool center point.

41. A measurement system according to claim 39 or 40.

43. the calculation unit acquires second coordinate conversion information for converting a first measurement coordinate system, which is a coordinate system related to the first measurement device, into a processing coordinate system, which is a coordinate system related to the processing device, and third coordinate conversion information for converting a second measurement coordinate system, which is a coordinate system related to the third measurement device, into the first measurement coordinate system; the calculation unit converts the position of the tool center point in the second measurement coordinate system measured by the third measurement device into the position of the tool center point in the first measurement coordinate system based on the third coordinate conversion information, while the third measurement device is measuring the position of the tool center point; the calculation unit calculates, while the third measurement device is measuring the position of the tool center point, second position conversion information, which is position conversion information in the machining coordinate system, as the position conversion information, based on the position of the measurement member in the first measurement coordinate system measured by the first measurement device, the position of the tool center point in the first measurement coordinate system, and the second coordinate conversion information; The transmitting unit transmits the second position conversion information to the processing control device.

41. A measurement system according to claim 39 or 40.

44. In a processing device capable of processing a processing object, a first measuring device capable of irradiating a measuring member attached to a movable part of the processing device at a position different from a position corresponding to a tool center point of the processing device and capable of measuring a position of the measuring member; A measurement control device capable of controlling the first measurement device; a third measuring device capable of measuring the position of the tool center point; A measurement system comprising: The measurement control device includes: a calculation unit that converts the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member into the position of the tool center point when the third measurement device is not measuring the position of the tool center point, based on the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member while the third measurement device is measuring the position of the tool center point, and the position of the tool center point measured by the third measurement device; and a transmission unit that transmits sixth position information indicating the converted position of the tool center point to a processing control device capable of controlling movement of the movable part; Equipped Measurement system.

45. The measurement control device acquires the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member while the third measurement device is measuring the position of the tool center point, and then acquires the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member while the third measurement device is not measuring the position of the tool center point.

45. The measurement system of claim 44.

46. the calculation unit acquires coordinate conversion information for converting between a first measurement coordinate system, which is a coordinate system related to the first measurement device, and a processing coordinate system, which is a coordinate system related to the processing device; the calculation unit converts a position of the measurement member in the first measurement coordinate system, which is measured by the first measurement device based on the measurement light irradiated onto the measurement member, into a position of the measurement member in the processing coordinate system based on the coordinate conversion information; The transmission unit transmits third position information indicating a position of the measuring member in the machining coordinate system to the machining control device.

46. ​​A measurement system according to claim 44 or 45.

47. a first measuring device capable of measuring the position of a tool center point of the processing device that moves in accordance with the movement of the movable part by irradiating a measuring light onto a second reference member that moves according to the position of a movable part of the processing device capable of processing a workpiece, and capable of measuring the position of a measuring member attached to the movable part at a position different from that corresponding to the tool center point by irradiating a measuring light onto the measuring member; A measurement control device capable of controlling the first measurement device; A measurement system comprising: The measurement control device includes: a calculation unit that calculates position conversion information based on the position of the tool center point measured by the first measurement device based on the measurement light irradiated onto the second reference member and the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member when a positional relationship between a position of the measurement member and a position of the second reference member is a predetermined relationship; a transmitting unit that transmits the position conversion information and, when the positional relationship is different from the predetermined relationship, third position information indicating a position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member, to a processing control device capable of controlling movement of the movable part; Equipped Measurement system.

48. The measurement control device acquires a position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member when the positional relationship is the predetermined relationship, and then acquires a position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member when the positional relationship is a relationship different from the predetermined relationship.

48. The measurement system of claim 47.

49. The position conversion information is information for converting the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member into the position of the tool center point when the positional relationship is different from the predetermined relationship.

49. The measurement system of claim 48.

50. The calculation unit calculates, when the positional relationship is the predetermined relationship, first position conversion information, which is position conversion information in the first measurement coordinate system, as the position conversion information, based on the position of the measurement member in a first measurement coordinate system that is a coordinate system related to the first measurement device and measured by the first measurement device, and the position of the tool center point in the first measurement coordinate system.

50. A measurement system according to any one of claims 47 to 49.

51. the calculation unit acquires coordinate conversion information for converting between a first measurement coordinate system, which is a coordinate system related to the first measurement device, and a processing coordinate system, which is a coordinate system related to the processing device; when the positional relationship is the predetermined relationship, the calculation unit calculates, as the position conversion information, second position conversion information which is position conversion information in the machining coordinate system, based on the position of the measurement member in the first measurement coordinate system measured by the first measurement device, the position of the tool center point in the first measurement coordinate system measured by the first measurement device, and the coordinate conversion information; The transmitting unit transmits the second position conversion information to the processing control device.

50. A measurement system according to any one of claims 47 to 49.

52. a first measuring device capable of measuring the position of a tool center point that moves with the movement of a movable part of a processing device capable of processing a workpiece by irradiating a measuring light onto a second reference member that moves according to the position of the movable part, and capable of measuring the position of a measuring member attached to the movable part at a position different from that corresponding to the tool center point by irradiating a measuring light onto the measuring member; A measurement control device capable of controlling the first measurement device; A measurement system comprising: The measurement control device includes: a calculation unit that converts the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member into a position of the tool center point when a positional relationship between a position of the measuring member and a position of the second reference member is a predetermined relationship, and the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member into a position of the tool center point when the positional relationship is different from the predetermined position, based on the position of the measuring member measured by the first measuring device based on the measurement light irradiated onto the measuring member and the position of the tool center point measured by the first measuring device based on the measurement light irradiated onto the second reference member; a transmission unit that transmits sixth position information indicating the converted position of the tool center point to a processing control device capable of controlling movement of the movable part; Equipped Measurement system.

53. The measurement control device acquires a position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member when the positional relationship is the predetermined relationship, and then acquires a position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member when the positional relationship is a relationship different from the predetermined relationship.

53. The measurement system of claim 52.

54. The first measurement device is capable of irradiating the measurement light onto a first reference member attached to at least one of the object to be processed and a jig that holds the object to be processed, and is capable of measuring a position of the first reference member in a first measurement coordinate system that is a coordinate system related to the first measurement device.

54. A measurement system according to claim 52 or 53.

55. the calculation unit converts the position of the measurement member in the first measurement coordinate system measured by the first measurement device based on the measurement light irradiated onto the measurement member into a position of the measurement member in the processing coordinate system based on fourth position information indicating the position of the first reference member in the first measurement coordinate system measured by the first measurement device based on the measurement light irradiated onto the first reference member and fifth position information indicating the position of the first reference member in the processing coordinate system input via an input unit of the measurement control device, The transmission unit transmits third position information indicating a position of the measuring member in the machining coordinate system to the machining control device.

55. The measurement system of claim 54.

56. A measurement method in a measurement system including a first measurement device capable of irradiating a measurement member attached to a movable portion of a processing device capable of processing a processing object with measurement light and capable of measuring a position of the measurement member, and a measurement control device capable of controlling the first measurement device, the measurement control device calculates position conversion information based on first position information indicating a position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member and second position information indicating the predetermined position in a first state in which a tool center point of the processing device is located at a predetermined position; the measurement control device transmits the calculated position conversion information to a processing control device capable of controlling movement of the movable part of the processing device; transmitting, to the processing control device, third position information indicating a position of the measuring member measured by the first measuring device based on the measuring light irradiated onto the measuring member in a second state in which the measurement control device is in a state in which the tool center point is located at a position different from the predetermined position; Measurement methods including.

57. The first measuring device is capable of measuring the position of the first reference member in a first measurement coordinate system which is a coordinate system related to the first measuring device.

57. The measurement method according to claim 56.

58. The first measuring device is capable of irradiating the measurement light to a first reference member attached to at least one of the object to be processed and a jig that holds the object to be processed, and is capable of measuring a position of the first reference member in a first measurement coordinate system that is a coordinate system related to the first measuring device.

58. A measuring method according to claim 56 or 57.

59. A measurement method in a measurement system including a first measurement device capable of irradiating a measurement member attached to a movable portion of a processing device capable of processing a processing object with measurement light and capable of measuring a position of the measurement member, and a measurement control device capable of controlling the first measurement device, the measurement control device converts the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member into the position of a tool center point of the processing device based on position conversion information; the measurement control device transmits sixth position information indicating a position of the tool center point to a processing control device capable of controlling movement of the movable part; the measurement control device calculates the position conversion information based on a position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member in a first state in which the tool center point is located at a predetermined position; Measurement methods including.

60. The first measuring device is capable of measuring the position of the first reference member in a first measurement coordinate system which is a coordinate system related to the first measuring device.

60. The measurement method according to claim 59.

61. The first measuring device is capable of irradiating the measurement light to a first reference member attached to at least one of the object to be processed and a jig for holding the object to be processed, and is capable of measuring a position of the first reference member in a first measurement coordinate system which is a coordinate system related to the first measuring device.

61. The measurement method according to claim 59 or 60.

62. A measurement method in a measurement system including a processing device capable of processing a processing object, a first measurement device capable of irradiating a measurement light to a measurement member attached to a movable part of the processing device at a position different from a position corresponding to a tool center point of the processing device and capable of measuring a position of the measurement member, a measurement control device capable of controlling the first measurement device, and a third measurement device capable of measuring a position of the tool center point, the measurement control device calculates position conversion information based on the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member and the position of the tool center point measured by the third measurement device, while the third measurement device is measuring the position of the tool center point; the measurement control device transmits the position conversion information and third position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member in a state in which the third measurement device does not measure the position of the tool center point, to a processing control device capable of controlling movement of the movable part; Measurement methods including.

63. A measurement method in a measurement system including a processing device capable of processing a processing object, a first measurement device capable of irradiating a measurement light to a measurement member attached to a movable part of the processing device at a position different from a position corresponding to a tool center point of the processing device and capable of measuring a position of the measurement member, a measurement control device capable of controlling the first measurement device, and a third measurement device capable of measuring a position of the tool center point, the measurement control device converts the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member into the position of the tool center point when the third measurement device is not measuring the position of the tool center point, based on the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member while the third measurement device is measuring the position of the tool center point, and the position of the tool center point measured by the third measurement device; the measurement control device transmits sixth position information indicating the converted position of the tool center point to a processing control device capable of controlling movement of the movable part; Measurement methods including.

64. A measurement method in a measurement system including a first measurement device capable of measuring a position of a tool center point of a processing device that moves in accordance with the movement of a movable part by irradiating a measurement light onto a second reference member that moves according to a position of a movable part of the processing device capable of processing a workpiece, and capable of measuring a position of a measurement member attached to the movable part at a position different from that corresponding to the tool center point by irradiating a measurement light onto the measurement member, and a measurement control device capable of controlling the first measurement device, the measurement control device calculates position conversion information based on the position of the tool center point measured by the first measurement device based on the measurement light irradiated onto the second reference member and the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member when a positional relationship between the position of the measurement member and the position of the second reference member is a predetermined relationship; and the measurement control device transmits, when the positional relationship is different from the predetermined relationship, the position conversion information and third position information indicating the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member, to a processing control device capable of controlling movement of the movable part; Measurement methods including.

65. A measurement method in a measurement system including a first measurement device capable of measuring a position of a tool center point that moves with the movement of a movable part of a processing device capable of processing a processing object by irradiating a measurement light onto a second reference member that moves according to a position of the movable part, and capable of measuring a position of a measurement member attached to the movable part at a position different from that corresponding to the tool center point by irradiating a measurement light onto the measurement member, and a measurement control device capable of controlling the first measurement device, the measurement control device converts, when a positional relationship between a position of the measurement member and a position of the second reference member is a predetermined relationship, the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member, into the position of the tool center point, when the positional relationship is different from the predetermined position, based on the position of the measurement member measured by the first measurement device based on the measurement light irradiated onto the measurement member and the position of the tool center point measured by the first measurement device based on the measurement light irradiated onto the second reference member; the measurement control device transmits sixth position information indicating the converted position of the tool center point to a processing control device capable of controlling movement of the movable part; Measurement methods including.