Measurement system, processing system, measurement method, and processing method

Abstract

Provided is a measurement system provided with: a measurement device whereby measurement light can be radiated to a first member that is attached to at least one of a processing object and a jig for retaining the processing object, and a second member that is attached to a movable portion of a processing device, the measurement device being capable of measuring the positions of each of the first member and the second member in a measurement coordinate system; and a measurement control device for controlling the measurement device. The measurement control device comprises: a computation unit that converts the position of the second member in the measurement coordinate system measured by the measurement device to a position of the second member in a processing coordinate system, on the basis of first position information that indicates the position of the first member in the measurement coordinate system measured by the measurement device and second position information that indicates the position of the first member in the processing coordinate system; and a transmission unit capable of transmitting third position information that indicates the converted position of the second member in the processing coordinate system to a processing control device for controlling a processing device.

Description

Measurement system, processing system, measurement method and processing method

[0001] The present invention relates to the technical fields of a measurement system, a processing system, a measurement method, and a processing method.

[0002] As a method used in this type of system, a calibration method has been proposed in which positions in two mutually separated systems are correlated with each other (see Patent Document 1).

[0003] U.S. Patent No. 5,007,006

[0004] According to a first aspect, there is provided a measurement system including a measurement device capable of irradiating measurement light onto a first member attached to at least one of a workpiece and a jig that holds the workpiece, and a second member attached to a movable part of a processing device capable of processing the workpiece, the measurement device being capable of measuring the positions of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measurement device, and a measurement control device that controls the measurement device, wherein the measurement control device includes a calculation unit that converts the position of the second member in the measurement coordinate system, measured by the measurement device based on the measurement light irradiated onto the second member, into the position of the second member in the processing coordinate system, based on first position information that indicates the position of the first member in the measurement coordinate system, measured by the measurement device based on the measurement light irradiated onto the first member, and second position information that indicates the position of the first member in a processing coordinate system that is a coordinate system related to the processing device, and a transmission unit that is capable of transmitting third position information that indicates the position of the second member in the converted processing coordinate system to the processing control device that controls the processing device.

[0005] According to a second aspect, there is provided a measurement system including a measurement device capable of irradiating measurement light onto a workpiece and a first member attached to at least one of a jig that holds the workpiece, and a second member attached to a movable portion of a processing device that can process the workpiece, the measurement device being capable of measuring the positions of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measurement device, and a measurement control device that controls the measurement device, the measurement control device including an input device, and a measurement control device that controls the measurement device, the measurement device receiving the position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated onto the first member, and a previous position input via the input device. a first calculation unit that calculates first conversion information for converting a position in the measurement coordinate system to a position in the machining coordinate system based on the position of the first member in a machining coordinate system that is a coordinate system associated with the machining device; and a first transmission unit that can transmit the first conversion information to a machining control device that controls the movement of the machining device under the machining coordinate system that is a coordinate system associated with the machining device, wherein the measurement control device controls measurement of the second member by the measurement device based on seventh position information that indicates a measurement position in the measurement coordinate system for measuring the second member, converted based on the first conversion information.

[0006] According to a third aspect, there is provided a processing system comprising the measurement system provided by the first aspect, the processing device capable of processing the object to be processed, and the processing control device that controls the movement of the processing device under the processing coordinate system, wherein the processing control device controls the processing device under the processing coordinate system based on the position of the second member in the processing coordinate system indicated by the third position information.

[0007] According to a fourth aspect, there is provided a processing system comprising the measurement system provided by the second aspect, a processing device capable of processing the workpiece, and a processing control device that controls the movement of the processing device under the processing coordinate system, wherein the processing control device comprises a second calculation unit that converts a measurement position in the processing coordinate system for measuring the second member into a measurement position in the measurement coordinate system based on the first conversion information, and a second transmission unit that transmits seventh position information indicating the measurement position in the converted measurement coordinate system to the measurement control device.

[0008] According to a fifth aspect, there is provided a measurement system comprising a measurement device capable of measuring a first measurement member and a second measurement member attached to a processing device, and a measurement control device that controls the measurement device, wherein the measurement control device comprises a calculation unit that converts the position of the second measurement member measured by the measurement device based on the position of the first measurement member measured by the measurement device, and a transmission unit that can transmit position information indicating the converted position of the second measurement member to a processing control device that controls the processing device.

[0009] According to a sixth aspect, there is provided a measurement system comprising a measurement device capable of measuring a first measurement member and a second measurement member attached to a processing device, and a measurement control device that controls the measurement device, wherein the measurement control device comprises a calculation unit that calculates conversion information for converting the position of the second measurement member measured by the measurement device based on the position of the first measurement member measured by the measurement device, and a transmission unit that can transmit the conversion information to a processing control device that controls the processing device.

[0010] 1 is a perspective view showing an overview of the system. FIG. 2 is a block diagram showing the configuration of the system. FIG. 3 is a block diagram showing the configuration of the measurement control device. FIG. 4 is a block diagram showing the configuration of the machining control device. FIG. 5 is a diagram showing a tip portion of a robot arm. FIG. 6 is a flowchart showing an example of the operation of a calculation device of the measurement control device. FIG. 7 is a diagram showing an example of the positional relationship between the measurement device and the stereo camera. FIG. 8 is a diagram showing a first modified example of a reflector module attached to a robot arm. FIG. 9 is a diagram showing an example of an arrangement of a plurality of antennas. FIG. 10 is a diagram showing a second modified example of a reflector module attached to a robot arm. FIG. 11 is a diagram showing an example of a method for measuring the position of a tool center point. FIG. 12 is a diagram showing another example of a method for measuring the position of a tool center point. FIG. 13 is a diagram showing another example of a method for measuring the position of a tool center point. FIG. 14 is a flowchart showing another example of the operation of the calculation device of the measurement control device. FIG. 15 is a perspective view showing an overview of a modified example of the system. FIG. 16 is a block diagram showing the configuration of a modified example of the system. FIG. 17 is a flowchart showing another example of the operation of the calculation device of the measurement control device. FIG. 18 is a diagram for explaining the concept of integration threshold processing. FIG. 19 is a diagram for explaining the order of reflector measurement. FIG. 20 is a diagram for explaining the timing of irradiation of measurement light. FIG. 21 is a diagram for explaining the concept of stationary determination. FIG. 22 is a diagram showing another example of an irradiation method of measurement light.

[0011] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A measurement system, a processing system, a measurement method, and a processing method will be described below. In the following embodiments, an example in which a measurement system, a processing system, a measurement method, and a processing method are applied to a system 1 will be described.

[0012] A system 1 according to an embodiment will be described with reference to Figures 1 to 25. The system 1 may also be referred to as a processing system.

[0013] (1) Overview of System 1 An overview of system 1 will be described with reference to Figs. 1 and 2. In Figs. 1 and 2, system 1 includes a measurement control device 10, a measuring device 21, a processing control device 30, and a robot 41. The robot 41 may also be referred to as a processing device. The measurement control device 10 controls the measuring device 21. The processing control device 30 controls the robot 41. The measurement control device 10 and the processing control device 30 can communicate with each other. Note that the measurement control device 10 and the measuring device 21 may constitute a measurement system 2.

[0014] 3, the measurement control device 10 includes a calculation device 11, a storage device 12, a communication device 13, an input device 14, and an output device 15. The calculation device 11, the storage device 12, the communication device 13, the input device 14, and the output device 15 may be connected via a data bus 16.

[0015] 4, the processing control device 30 includes a calculation device 31, a storage device 32, a communication device 33, an input device 34, and an output device 35. The calculation device 31, the storage device 32, the communication device 33, the input device 34, and the output device 35 may be connected via a data bus 36.

[0016] The arithmetic units 11 and 31 may include at least one of a CPU (Central Processing Unit), a GPU (Graphical Processing Unit), and an FPGA (Field Programmable Gate Array), for example.

[0017] The storage devices 12 and 32 may include at least one of, for example, a random access memory (RAM), a read-only memory (ROM), a hard disk drive, a magneto-optical disk drive, a solid state drive (SSD), and a hard disk array. In other words, the storage devices 12 and 32 may include non-transitory storage media.

[0018] The communication device 13 is capable of communicating with each of the measuring device 21 and the processing control device 30. The communication device 13 may be capable of communicating with devices other than the measuring device 21 and the processing control device 30 via a network (not shown). The communication device 33 is capable of communicating with each of the robot 41 and the measurement control device 10. The communication device 33 may be capable of communicating with devices other than the robot 41 and the measurement control device 10 via a network (not shown). The network may be wired or wireless.

[0019] The input devices 14 and 34 may include at least one of a keyboard, a mouse, and a touch panel, for example. The input devices 14 and 34 may also include a recording medium reader capable of reading information recorded on a removable recording medium such as a USB (Universal Serial Bus) memory.

[0020] When information is input to the measurement control device 10 via the communication device 13 (in other words, when the measurement control device 10 acquires information via the communication device 13), the communication device 13 may function as an input device. When information is input to the processing control device 30 via the communication device 33 (in other words, when the processing control device 30 acquires information via the communication device 33), the communication device 33 may function as an input device.

[0021] The output devices 15 and 35 may include at least one of a display, a speaker, and a printer, for example. The output devices 15 and 35 may be capable of outputting information to a removable storage medium such as a USB memory. When information is output from the measurement control device 10 via the communication device 13, the communication device 13 may function as an output device. When information is output from the processing control device 30 via the communication device 33, the communication device 33 may function as an output device.

[0022] In the system 1, the robot 41 processes a workpiece W (see FIG. 1 ) held by a jig 90. The processing control device 30 controls the robot 41 based on the measurement results of the measuring device 21 obtained from the measurement control device 10. The processing control device 30 controls the robot 41, for example, so that an end effector attached to the tip of the robot arm 410 of the robot 41 moves to a target position. The processing control device 30 controls the robot 41, causing the robot 41 to process the workpiece W. Note that the control of the robot 41 may be control of the motion mode of the robot 41 (the movement mode of a movable part of the robot 41). The jig 90 may also be called a holder, an attachment member, a fixing member, or a clamp.

[0023] (2) Coordinate System Conversion The measurement system 2 including the measuring device 21 and the processing control device 30 that controls the robot 41 each use their own coordinate systems. Specifically, the measurement system 2 uses a measurement coordinate system that is a coordinate system related to the measuring device 21, while the processing control device 30 uses a robot coordinate system that is a coordinate system related to the robot 41. In other words, the measurement control device 10 controls the measuring device 21 under the measurement coordinate system. The processing control device 30 controls the movement of the robot 41 under the robot coordinate system.

[0024] The machining control device 30 may control the movement of the robot 41 under the measurement coordinate system. When the system 1 includes a plurality of robots (see, for example, FIGS. 17 and 18 ), the robot coordinate system may be a coordinate system common to the plurality of robots, or a robot coordinate system may be set for each robot (in this case, one robot coordinate system may be set for one robot, and other robot coordinate systems may be set for other robots).

[0025] Therefore, for example, in order for the measurement system 2 and the processing control device 30 to share the measurement results obtained by the measuring device 21 (in other words, in order for the measurement system 2 and the processing control device 30 to cooperate with each other), conversion between the measurement coordinate system and the robot coordinate system is necessary. The robot coordinate system may be, for example, an orthogonal coordinate system consisting of an x-axis, a y-axis, and a z-axis that are orthogonal to each other. The measurement coordinate system may be, for example, an orthogonal coordinate system consisting of an x-axis, a y-axis, and a z-axis that are orthogonal to each other. The robot coordinate system may also be referred to as a processing coordinate system.

[0026] (2-1) Measuring Device 21 The measuring device 21 measures, for example, the position of the workpiece W or the robot 41. Here, the workpiece W may be a relatively large structure such as the fuselage of an aircraft. The measuring device 21, which measures the workpiece W, which is a relatively large structure, may be, for example, a three-dimensional measuring device capable of measuring a relatively large space. An example of such a measuring device 21 is a laser tracker. A laser tracker is an optical measuring device that irradiates a reflector (also called a probe) that is brought into contact with the measurement object with laser light, and determines the three-dimensional position of the measurement object by the laser light reflected from the reflector returning to the light source. Note that the laser light may also be called measurement light.

[0027] To enable position measurement by the measurement device 21, for example, a reflector r11 is attached to the jig 90, and reflectors r12 and r13 are attached to the workpiece W (see FIG. 1). The reflectors r11, r12, and r13 may be referred to as first members. That is, the first members may include reflectors r11, r12, and r13 that can reflect measurement light. Note that while no reflector may be attached to the workpiece W, at least three reflectors may be attached to the jig 90.

[0028] A reflector module r2 including reflectors r21, r22, and r23 is attached to the robot arm 410 of the robot 41 (see FIG. 5). The reflectors r21, r22, and r23 may be referred to as a second member. The robot arm 410 may be referred to as a movable part.

[0029] The measuring device 21 is capable of irradiating each of the reflectors r11, r12, and r13 with measurement light, which may be, for example, laser light. The measuring device 21 is capable of measuring the positions of each of the reflectors r11, r12, and r13 in a measurement coordinate system based on the measurement light irradiated onto each of the reflectors r11, r12, and r13. Similarly, the measuring device 21 is capable of irradiating each of the reflectors r21, r22, and r23 with measurement light. The measuring device 21 is capable of measuring the positions of each of the reflectors r21, r22, and r23 in a measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23. In other words, measuring the position of the workpiece W is not limited to directly measuring the position of a specific location on the workpiece W, but may also include indirect position measurements, such as measuring the position of a reflector attached to the workpiece W or measuring the position of a reflector attached to a jig 90 that holds the workpiece W. Similarly, measuring the position of the robot 41 is not limited to directly measuring the position of a specific point on the robot 41, but may also include indirect position measurement, such as measuring the position of a reflector attached to the robot 41.

[0030] Note that "based on the measurement light irradiated onto each of the reflectors r11, r12, and r13" may be rephrased as "the measurement device 21 receives the measurement light generated from each of the reflectors r11, r12, and r13 as a result of the measurement light being irradiated onto each of the reflectors r11, r12, and r13." Similarly, "based on the measurement light irradiated onto each of the reflectors r21, r22, and r23" may be rephrased as "the measurement device 21 receives the measurement light generated from each of the reflectors r21, r22, and r23 as a result of the measurement light being irradiated onto each of the reflectors r21, r22, and r23."

[0031] Furthermore, if we refer to reflectors r11, r12, and r13 as first members and reflectors r21, r22, and r23 as second members, then it can be said that the measuring device 21 is capable of irradiating measurement light onto the workpiece W, which may be called the object to be processed, and the first member attached to at least one of the jigs 90 that hold the workpiece W, and the second member attached to the robot arm 410 of the robot 41 that can process the workpiece W, and is capable of measuring the positions of each of the first and second members in the measurement coordinate system.

[0032] The positions of the reflector r11 attached to the jig 90 and the reflectors r12 and r13 attached to the workpiece W are often managed by the user of the system 1. For this reason, the positions of the reflectors r11, r12, and r13 are often known in the robot coordinate system.

[0033] Note that the positions of the reflectors r11, r12, and r13 do not need to be known. In this case, for example, features such as surfaces, lines, and points may be defined using the reflectors, and a coordinate system may be constructed using the defined features. Specifically, a coordinate system may be constructed by placing three reflectors on a first surface, placing three reflectors on a second surface intersecting with the first surface, and placing three reflectors on a third surface intersecting with the first and second surfaces, and defining each surface using the three reflectors placed on each surface. For example, a coordinate system may be constructed by combining a surface defined using three reflectors and a line defined using two reflectors different from the three reflectors. For example, a coordinate system may be constructed by combining a surface defined using three reflectors and a point defined using one reflector different from the three reflectors. For example, a coordinate system may be constructed by combining a surface defined using three reflectors, a line defined using two reflectors, and a point defined using one reflector.

[0034] In this embodiment, the description will be given assuming that the positions of the reflectors r11, r12, and r13 in the robot coordinate system are known. In this embodiment, the reflectors r11, r12, and r13 function as members for defining a reference position. For this reason, the reflectors r11, r12, and r13 may be referred to as reference reflectors. The reflector r11 may be attached to a position that indicates the reference of the jig 90. The position of the reflector r11 may also be used as the position that indicates the reference of the jig 90. The reflectors r12 and r13 may be attached to a position (e.g., a master hole) that indicates the reference for the position of the workpiece W, which may be referred to as the processing target. The positions at which the reflectors r12 and r13 are attached may also be used as the reference for the position of the workpiece W.

[0035] (2-2) Coordinate Transformation As described above, the measurement device 21 can irradiate each of the reflectors r11, r12, and r13 with measurement light. The measurement device 21 measures the position of the reflector r11 in the measurement coordinate system based on the measurement light irradiated onto the reflector r11. The measurement device 21 measures the position of the reflector r12 in the measurement coordinate system based on the measurement light irradiated onto the reflector r12. The measurement device 21 measures the position of the reflector r13 in the measurement coordinate system based on the measurement light irradiated onto the reflector r13.

[0036] The arithmetic unit 11 of the measurement control device 10 acquires first position information indicating the positions of each of the reflectors r11, r12, and r13 in the measurement coordinate system from the measurement device 21. The arithmetic unit 11 acquires second position information indicating the positions of each of the reflectors r11, r12, and r13 in the robot coordinate system input, for example, via the input device 14. Note that the positions of each of the reflectors r11, r12, and r13 in the robot coordinate system may be automatically input to the measurement control device 10 (i.e., they do not need to be input via the input device 14). The arithmetic unit 11 may acquire the second information by, for example, selecting the positions of each of the reflectors r11, r12, and r13 in the robot coordinate system input to the processing control device 30.

[0037] The calculation device 11 calculates a first transformation matrix for converting a position in the measurement coordinate system and a position in the robot coordinate system based on the first position information and the second position information. The first transformation matrix may include, for example, a rotation matrix for performing a rotational transformation of the position and a translation matrix for translating the position. The first transformation matrix may be transmitted to the machining control device 30 by the communication device 13. That is, the communication device 13, which may be referred to as a first transmission unit, may transmit the first transformation matrix to the machining control device. Note that various existing methods can be applied to the method of calculating the first transformation matrix, and therefore detailed description thereof will be omitted. Note that calculating the first transformation matrix may also be referred to as calculating the first transformation matrix. The first transformation matrix may also be referred to as first transformation information.

[0038] As described above, the measurement device 21 can irradiate each of the reflectors r21, r22, and r23 with measurement light. The measurement device 21 measures the position of the reflector r21 in the measurement coordinate system based on the measurement light irradiated onto the reflector r21. The measurement device 21 measures the position of the reflector r22 in the measurement coordinate system based on the measurement light irradiated onto the reflector r22. The measurement device 21 measures the position of the reflector r23 in the measurement coordinate system based on the measurement light irradiated onto the reflector r23.

[0039] The calculation device 11 uses the first transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. For example, the first transformation matrix includes a rotation matrix R and a translation matrix t, and the position of the reflector r21 in the measurement coordinate system is expressed as (x ｒ２１ , y ｒ２１ , z ｒ２１ In this case, the calculation device 11 calculates "R(x ｒ２１ , y ｒ２１ , z ｒ２１ The position of the reflector r21 in the robot coordinate system can be calculated from the equation:

[0040] The operation of the measurement system 2 will now be described again with reference to the flowchart of FIG. 6 . In FIG. 6 , the calculation device 11 acquires second position information, input via the input device 14, indicating the positions of each of the reflectors r11, r12, and r13 in the robot coordinate system (step S101). In parallel with the processing of step S101, the measurement device 21 measures the positions of each of the reflectors r11, r12, and r13 in the measurement coordinate system based on the measurement light irradiated onto each of the reflectors r11, r12, and r13 (step S102). At this time, the calculation device 11 of the measurement control device 10 acquires first position information, indicating the positions of each of the reflectors r11, r12, and r13 in the measurement coordinate system.

[0041] The computing device 11 calculates a first transformation matrix for transforming a position in the measurement coordinate system and a position in the robot coordinate system based on the first position information and the second position information (step S103). Note that, when an individual robot coordinate system is defined for each robot, the individual robot coordinate system may be realized, for example, by measuring the position of each of the reflectors r21, r22, and r23 attached to the robot 41 while changing the posture of the robot 41. In other words, the individual robot coordinate system may be realized by changing the posture of the robot and measuring the position of each of the reflectors r21, r22, and r23 at, for example, three locations.

[0042] (3) Improvements in Reflector Measurement The size of a reflector such as reflector r11 is, for example, about a few centimeters. In other words, the size of the reflector is significantly smaller than the size of, for example, the workpiece W. For this reason, for example, if the measuring device 21 measures the position of the reflector while scanning the space to be measured with measurement light, the time required to measure the position of the reflector may be relatively long. Therefore, at least one of the following methods (3-1) and (3-2) may be used to shorten the time required to measure the position of the reflector.

[0043] (3-1) Method using a stereo camera The measurement system 2 may include, for example, a stereo camera 22 in addition to the measurement device 21. The stereo camera 22 may be arranged near the measurement device 21, for example, as shown in FIG. 7 . For example, the measurement device 21 and the stereo camera 22 may be included in the same housing. Here, it is assumed that the positional relationship between the measurement device 21 and the stereo camera 22 is known. It is also assumed that the positional relationship between the measurement device 21 and the stereo camera 22 is constant. It is not necessary for the positional relationship between the measurement device 21 and the stereo camera 22 to be known. It is also not necessary for the positional relationship between the measurement device 21 and the stereo camera 22 to be constant.

[0044] A light emitter (not shown), such as an LED (Light Emitting Diode), may be disposed near each of the reflectors r11, r12, and r13. Instead of the reflector module r2 (see FIG. 5), a reflector module r2a including reflectors r21, r22, and r23 and a light emitter 81, such as an LED, as shown in FIG. 8 may be attached to the robot arm 410.

[0045] In the image captured by the stereo camera 21, the luminance value of the pixel corresponding to the light-emitting body is higher than the luminance values ​​of the other pixels. Therefore, if the light-emitting body is placed near the reflector as described above, the position of the light-emitting body can be relatively easily identified from the image captured by the stereo camera 21. Note that an example of a method for identifying the position of the light-emitting body will be described later (see "(7) Method for identifying the position of the light-emitting body from an image").

[0046] Here, it is assumed that the positional relationship between the measurement device 21 and the stereo camera 22 is known and unchanging. Therefore, the measurement control device 10 can convert the position of the light-emitting object identified from the image captured by the stereo camera 22 (i.e., the position in the coordinate system related to the stereo camera 22) into a position in the measurement coordinate system related to the measurement device 21 (in other words, it can integrate the coordinate systems). For this conversion, a rotation matrix and a translation matrix may be used, for example, as in the conversion between the position in the measurement coordinate system and the position in the robot coordinate system described above (see "(2-2) Coordinate Transformation"). The measurement control device 10 may estimate the position in the measurement coordinate system of the reflector, which is the measurement target of the measurement device 21, based on the position of the light-emitting object in the measurement coordinate system.

[0047] The accuracy of the position of the light-emitting body identified from the images captured by the stereo camera 22 varies depending on the pixel size of the stereo camera 22, the distance between the stereo camera 22 and the light-emitting body, etc. In other words, the accuracy of the position of the light-emitting body varies depending on the pixel size of the imaging element of the stereo camera 22 and the size of the image of the light-emitting body on the imaging element of the stereo camera 22. In the space to be measured by the measurement device 21, the accuracy of the position of the light-emitting body identified from the images captured by the stereo camera 22 is lower than the accuracy of the measurement device 21. In other words, considering the accuracy, identifying the position of the light-emitting body from the images captured by the stereo camera 22 is synonymous with identifying the position of a reflector near the light-emitting body. In addition, if the positional relationship between each of the reflectors r11, r12, and r13 and the light-emitting body is known, the positions of each of the reflectors r11, r12, and r13 may be identified taking into account the positional relationship.

[0048] The measurement control device 10 may identify the position of a light-emitting object located near the reflector r11, for example, from an image captured by the stereo camera 22. The measurement control device 10 may estimate the position of the reflector r11 based on the identified position of the light-emitting object. Then, the measurement control device 10 may control the measurement device 21 to measure the reflector r11 based on the estimated position of the reflector r11. This allows the measurement device 21 to narrow down the range to which the measurement light should be irradiated in order to measure the position of the reflector r11, for example. This allows the measurement device 21 to shorten the time required to measure the position of the reflector r11. The same applies to the reflectors r12 and r13.

[0049] The measurement control device 10 may identify the position of, for example, the light-emitting body 81 included in the reflector module r2a from an image captured by the stereo camera 22. The measurement control device 10 may estimate the positions of the reflectors r21, r22, and r23 included in the reflector module r2a based on the identified position of the light-emitting body 81. The measurement control device 10 may then control the measurement device 21 to measure each of the reflectors r21, r22, and r23 based on the estimated positions of the reflectors r21, r22, and r23. This allows the measurement device 21 to narrow down the range to which the measurement light should be irradiated in order to measure the position of each of the reflectors r21, r22, and r23, for example. This reduces the time required for the measurement device 21 to measure the position of each of the reflectors r21, r22, and r23.

[0050] The light-emitting bodies may be disposed only near the reflectors r11, r12, and r13. In this case, the measurement control device 10 may identify the positions of the light-emitting bodies from the images captured by the stereo camera 22 only when the measurement device 21 measures the positions of the reflectors r11, r12, and r13.

[0051] Alternatively, the light-emitting body may be disposed only on the robot arm 410. In this case, the measurement control device 10 may identify the position of the light-emitting body 81 from the image captured by the stereo camera 22 only when the measurement device 21 measures the position of each of the reflectors r21, r22, and r23 included in the reflector module r2a.

[0052] If the reflectors r11, r12, and r13 are referred to as first members and the reflectors r21, r22, and r23 are referred to as second members, it can be said that the measurement system 2 may include a stereo camera 22, which may be referred to as an imaging device, that is capable of capturing images of at least one of the first member and the second member. Alternatively, it can be said that the measurement system 2 may include a measurement device 21, which may be referred to as a first measurement device, and a stereo camera 22, which may be referred to as a second measurement device, that is capable of measuring at least one of the first member and the second member with lower accuracy than the measurement device 21. The measurement control device 10 may control the measurement of at least one of the first member and the second member by the measurement device 21 based on the measurement results by the stereo camera 22.

[0053] (3-2) Method Using Wireless Communication The measurement system 2 may include antennas ANT1, ANT2, and ANT3 capable of wireless communication in addition to the measurement device 21. The antennas ANT1, ANT2, and ANT3 may be arranged around the workpiece W, for example, as shown in FIG.

[0054] Here, it is assumed that the positional relationship between the measurement device 21 and each of the antennas ANT1, ANT2, and ANT3 is known. Furthermore, it is assumed that the positional relationship between the measurement device 21 and each of the antennas ANT1, ANT2, and ANT3 is unchanged. That is, similar to the case where the stereo camera described above is used, the measurement device 21 can convert positions in the coordinate system related to the antennas ANT1, ANT2, and ANT3 into positions in the measurement coordinate system related to the measurement device 21 (in other words, the coordinate systems can be integrated). It is not necessary that the positional relationship between the measurement device 21 and each of the antennas ANT1, ANT2, and ANT3 is known. Furthermore, it is not necessary that the positional relationship between the measurement device 21 and each of the antennas ANT1, ANT2, and ANT3 is unchanged.

[0055] A ranging antenna (not shown) capable of wireless communication may be disposed near each of the reflectors r11, r12, and r13. Instead of the reflector module r2 (see FIG. 5), the robot arm 410 may be equipped with a reflector module r2b including reflectors r21, r22, and r23 and a ranging antenna 82 capable of wireless communication, as shown in FIG.

[0056] Antennas ANT1, ANT2, and ANT3 transmit radio waves. A description will be given of a case where the position of, for example, a ranging antenna 82 is identified using antennas ANT1, ANT2, and ANT3. Antenna ANT1 can transmit two or more radio waves with different frequencies. Ranging antenna 82 can receive two or more radio waves transmitted from antenna ANT1. The distance between antenna ANT1 and ranging antenna 82 is estimated from the phase difference between the two or more radio waves received by ranging antenna 82. Because the two or more radio waves transmitted from antenna ANT1 have different frequencies, the phase difference between the two or more radio waves varies depending on the distance between antenna ANT1 and ranging antenna 82. Similarly, the distance from antenna ANT2 to ranging antenna 82 and the distance from antenna ANT3 to ranging antenna 82 are estimated.

[0057] For example, the position of the ranging antenna 82 can be determined by finding the intersection of a sphere centered on antenna ANT1 and having a radius equal to the distance from antenna ANT1 to the ranging antenna 82, a sphere centered on antenna ANT2 and having a radius equal to the distance from antenna ANT2 to the ranging antenna 82, and a sphere centered on antenna ANT3 and having a radius equal to the distance from antenna ANT3 to the ranging antenna 82. Note that the error in distance measured using wireless communication (in other words, measured based on the phase difference of radio waves) is, for example, about 10 centimeters. The accuracy of the position of, for example, the ranging antenna 82 determined using wireless communication is lower than the accuracy of the measurement device 21. In other words, determining the position of a ranging antenna (for example, the ranging antenna 82) using wireless communication is equivalent to determining the position of a reflector near the ranging antenna, taking into account the accuracy.

[0058] The measurement control device 10 may convert the position of the ranging antenna 82 measured using, for example, wireless communication into the position of the ranging antenna 82 in a measurement coordinate system. The measurement control device 10 may estimate the positions of, for example, the reflectors r21, r22, and r23 included in the reflector module r2b based on the position of the ranging antenna 82 in the measurement coordinate system. The measurement control device 10 may control the measurement device 21 to measure each of the reflectors r21, r22, and r23 based on the estimated positions of each of the reflectors r21, r22, and r23. This allows the measurement device 21 to narrow down the range over which the measurement light is irradiated to measure the position of each of the reflectors r21, r22, and r23 (i.e., the scanning range of the measurement light to find the reflector). This reduces the time required for the measurement device 21 to measure the positions of each of the reflectors r21, r22, and r23.

[0059] The measurement control device 10 may estimate the position of the reflector r11 based on, for example, the position of a ranging antenna located near the reflector r11, which is identified using a similar method. The measurement control device 10 may control the measurement device 21 to measure the reflector r11 based on the estimated position of the reflector r11. This allows the measurement device 21 to narrow down, for example, the range to which the measurement light should be irradiated in order to measure the position of the reflector r11 (i.e., the scanning range of the measurement light to find the reflector r11). This allows the measurement device 21 to shorten the time required to measure the position of the reflector r11. The same applies to the reflectors r12 and r13.

[0060] The ranging antennas may be arranged only near the reflectors r11, r12, and r13. In this case, the measurement control device 10 may identify the positions of the ranging antennas from the distances to the ranging antennas identified by the antennas ANT1, ANT2, and ANT3 only when the measurement device 21 measures the positions of the reflectors r11, r12, and r13.

[0061] Alternatively, the ranging antenna may be disposed only on the robot arm 410. In this case, the measurement control device 10 may identify the position of the ranging antenna 82 from the distance to the ranging antenna 82 identified by each of the antennas ANT1, ANT2, and ANT3 only when the measurement device 21 measures the position of each of the reflectors r21, r22, and r23 included in the reflector module r2b.

[0062] If the reflectors r11, r12, and r13 are referred to as first members, and the reflectors r21, r22, and r23 are referred to as second members, then the measurement system 2 may include a measurement device 21, which may be referred to as a first measurement device, and antennas ANT1, ANT2, and ANT3, which may be referred to as second measurement devices, that are capable of measuring at least one of the first and second members with lower accuracy than the measurement device 21. The measurement control device 10 may control the measurement of at least one of the first and second members by the measurement device 21 based on the measurement results from the antennas ANT1, ANT2, and ANT3.

[0063] (4) Tool Center Point When the machining control device 30 controls the robot 41, the machining control device 30 sets a path along which a point on the robot arm 410 of the robot 41 moves. This point on the robot arm 410 is called a "tool center point" (hereinafter, referred to as "TCP" where appropriate). The TCP roughly specifies the position of the part of the end effector (in other words, the tool) attached to the tip of the robot arm 410 that acts on the workpiece. The TCP is a part that serves as a reference when the machining control device 30 controls the robot 41. For this reason, the tool center point may also be called a reference part.

[0064] The TCP changes depending on the application of the end effector, etc. In other words, if the end effector is changed, the TCP associated with the robot arm 410 also changes. For example, in the case of a rod-shaped end effector EE1 as shown in FIG. 5 , the TCP may be located at the tip of the end effector EE1. If the end effector is, for example, a suction hand having multiple suction pads, the TCP may be located on one of the multiple suction pads or may be located midway between the multiple suction pads. If the end effector is, for example, a gripping hand having multiple fingers or claws, the TCP may be located on one of the multiple fingers or claws or may be located midway between the multiple fingers or claws. If, for example, a suction hand or a gripping hand is attached to the robot arm 410, the robot 41 may be referred to as a pickup device. Note that the end effectors attached to the robot arm 410 are not limited to these.

[0065] 5, the position of the reflector module r2 attached to the robot arm 410 is different from the position of the TCP. As described above, since the TCP corresponds to the part that acts on the processing target, it is difficult to attach a measuring member such as a reflector to the TCP.

[0066] On the other hand, reflector module r2 is attached to a predetermined position on robot arm 410, where the positional relationship between reflector module r2 and the TCP does not change. In other words, the positions of reflectors r21, r22, and r23 included in reflector module r2 are each at a predetermined position relative to the TCP, which may be referred to as a reference portion, on robot arm 410. Therefore, by using the positional relationship between each of reflectors r21, r22, and r23 and the TCP, the position of each of reflectors r21, r22, and r23 can be measured by measurement device 21, and the position of the TCP can be identified.

[0067] (4-1) TCP Measurement Specific TCP measurement methods will be described with reference to Figures 11 to 15. Note that the TCP measurement method is not limited to the method described below, and various existing methods can be applied.

[0068] (4-1-1) Method Using a Contact Sensor In FIG. 11 , a jig 91 has a hole H into which a rod-shaped end effector EE1 is inserted. A sensor 23 for measuring the end effector EE1 is disposed on the bottom of the hole H. The jig 91 is fixed so that its position does not change. The position of the sensor 23, in other words, the position of the bottom of the hole H in the jig 91, is assumed to be known. In this case, when the tip of the end effector EE1 contacts the sensor 23 (in other words, when the sensor 23 measures the tip of the end effector EE1), the position of the TCP of the end effector EE1 is identified as the position of the sensor 23. The position of the TCP of the end effector EE1 identified in this manner may be input to the measurement control device 10 via the input device 14. In this case, the position of the TCP may be the position of the TCP in the robot coordinate system. Note that the sensor 23 is not limited to being disposed on the bottom of the hole H, but may also be disposed on, for example, the side of the hole H. The sensor 23 may be referred to as a third measurement device.

[0069] 12, a hole H into which a rod-shaped end effector EE1 is inserted is formed in a jig 91a. A sensor 23 for measuring the end effector EE1 is disposed on the bottom surface of the hole H. A reflector module r3 including reflectors r31, r32, and r33 is attached to the jig 91a. The jig 91a may be moved so that the end effector EE1 is inserted into the hole H (i.e., the position of the jig 91a may be changed). It is assumed that the positional relationship between the sensor 23 and each of the reflectors r31, r32, and r33 is known. The reflector module r3 or the reflectors r31, r32, and r33 may be referred to as a reference member.

[0070] In this case, with the tip of the end effector EE1 in contact with the sensor 23 (i.e., with the end effector EE1 inserted into the hole H of the jig 91a), the measuring device 21 irradiates each of the reflectors r31, r32, and r33 with measurement light. The measuring device 21 measures the position of each of the reflectors r31, r32, and r33 in the measurement coordinate system based on the measurement light irradiated onto each of the reflectors r31, r32, and r33. The measurement control device 10 specifies the position of the TCP of the end effector EE1 based on the position of each of the reflectors r31, r32, and r33 in the measurement coordinate system and the positional relationship between the sensor 23 and each of the reflectors r31, r32, and r33. In this case, the position of the TCP may be the position of the TCP in the measurement coordinate system.

[0071] (4-1-2) Method Using a Non-Contact Sensor In FIG. 13 , a sensor 24 that measures the object to be measured using the light-section method is attached to a jig 92. Here, the sensor 24 is configured to emit light L1. The jig 92 is fixed so that its position does not change. For example, the position in the robot coordinate system corresponding to the reference point of the sensor 24 is assumed to be known. In this case, the position of the TCP of the end effector EE1 measured by the sensor 24 may be converted to a position in the robot coordinate system based on the relationship between the reference point of the sensor 24 and the position in the robot coordinate system corresponding to the reference point. The position of the TCP of the end effector EE1 measured in this manner may be input to the measurement control device 10 via the input device 14. In this case, the position of the TCP may be the position of the TCP in the robot coordinate system. The sensor 24 may be referred to as a third measurement device.

[0072] 14, the sensor 24 is attached to a jig 92a. A reflector module r4 including reflectors r41, r42, and r43 is attached to the jig 92a. The jig 92a may be moved so that the sensor 24 approaches the end effector EE1. The positional relationship between the reference point of the sensor 24 and each of the reflectors r41, r42, and r43 is assumed to be known. The reflector module r4 or the reflectors r41, r42, and r43 may be referred to as a reference member.

[0073] In this case, while the TCP of the end effector EE1 is being measured by the sensor 24, the measurement device 21 irradiates each of the reflectors r41, r42, and r43 with measurement light. The measurement device 21 measures the position of each of the reflectors r41, r42, and r43 in the measurement coordinate system based on the measurement light irradiated onto each of the reflectors r41, r42, and r43. The measurement control device 10 identifies the position of the TCP of the end effector EE1 based on the positional relationship between the reference point related to the sensor 24 and each of the reflectors r41, r42, and r43, the position of the TCP of the end effector EE1 measured by the sensor 24, and the position of each of the reflectors r41, r42, and r43 in the measurement coordinate system. In this case, the position of the TCP may be the position of the TCP in the measurement coordinate system.

[0074] Instead of the sensor 24, a non-contact sensor such as a stereo camera or a laser scanner may be used to measure the TCP.

[0075] (4-1-3) Others In FIG. 15 , an end effector EE2, which is, for example, an optical sensor, is attached to the tip of the robot arm 410. A tool ball TB is attached to a jig 93. A reflector module r5 including reflectors r51, r52, and r53 is attached to the jig 93. The position of the jig 93 (in other words, the position of the tool ball TB) is changeable. It is assumed that the positional relationship between the center of the tool ball TB and each of the reflectors r51, r52, and r53 is known. However, the positional relationship between the center of the tool ball TB and each of the reflectors r51, r52, and r53 does not have to be known.

[0076] In this case, while the sensor serving as the end effector EE2 is measuring the center of the tool ball TB, the measurement device 21 irradiates each of the reflectors r51, r52, and r53 with measurement light. The measurement device 21 measures the positions of the reflectors r51, r52, and r53 in the measurement coordinate system based on the measurement light irradiated onto each of the reflectors r51, r52, and r53. The measurement control device 10 compares the positions of the reflectors r51, r52, and r53 in the measurement coordinate system with the center of the tool ball TB measured by the sensor serving as the end effector EE2. This operation is performed multiple times (e.g., three or more times) while changing the relative positional relationship between the end effector EE2 and the jig 93 (i.e., the tool ball TB). As a result, the position of the TCP of the end effector EE2 is identified. In this case, the position of the TCP may be the position of the TCP in the measurement coordinate system. It should be noted that a corner cube may be used in place of the tool ball TB.

[0077] 11, for example, in a state where the TCP of the end effector EE1 is being measured, in other words, in a state where the position of the TCP of the end effector EE1 is specified, the measurement device 21 irradiates measurement light onto each of the reflectors r21, r22, and r23 included in the reflector module r2 attached to the robot arm 410. The measurement device 21 measures the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23.

[0078] As a result, the positions of the reflectors r21, r22, and r23 and the position of the TCP are identified (measured) without changing the position and posture of the robot arm 410. The position and posture of the robot arm 410 at this time will hereinafter be referred to as the "reference position and reference posture" as appropriate.

[0079] (4-3) Transformation Matrix The positions of the reflectors r21, r22, and r23 when the robot arm 410 is in the reference position and the reference posture are respectively expressed as (x ｒｂ１ , y ｒｂ１ , z ｒｂ１ ), (x ｒｂ２ , yｒｂ２ , z ｒｂ２ ) and (x ｒｂ３ , y ｒｂ３ , z ｒｂ３ The position of the TCP when the robot arm 410 is in the reference position and the reference posture is expressed as (x ｔ , y ｔ , z ｔ )

[0080] Here, (x ｒｂ１ , y ｒｂ１ , z ｒｂ１ ), (x ｒｂ２ , y ｒｂ２ , z ｒｂ２ ), (x ｒｂ３ , y ｒｂ３ , z ｒｂ３ ) and (x ｔ , y ｔ , z ｔ ) is a position in the robot coordinate system. Note that a first transformation matrix (see "(2) Transformation of Coordinate Systems") may be used to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21 into the positions of the reflectors r21, r22, and r23 in the robot coordinate system.

[0081] The calculation device 11 of the measurement control device 10 calculates a posture corresponding to the reference posture of the robot arm 410 based on the positions of the reflectors r21, r22, and r23. The calculated posture may be expressed as (W, P, R), for example. Here, "W" may be the angle around the x-axis of the robot coordinate system, "P" may be the angle around the y-axis of the robot coordinate system, and "R" may be the angle around the z-axis of the robot coordinate system. In other words, "W" is the amount of rotation of the robot arm 410 around the x-axis of the robot coordinate system, "P" is the amount of rotation of the robot arm 410 around the y-axis of the robot coordinate system, and "R" is the amount of rotation of the robot arm 410 around the z-axis of the robot coordinate system. In other words, the amount of rotation around each of the x-axis, y-axis, and z-axis is referred to as the "posture" in this embodiment.

[0082] The orientation of a vector (so-called tool axis vector) extending along the direction in which the end effector EE1 extends is regarded as the orientation of the TCP. Here, the orientation of this vector and the orientation of the robot arm 410 can be regarded as being the same. Therefore, the calculation device 11 calculates the position and orientation of the TCP when the position and orientation of the robot arm 410 are the reference position and reference orientation as, for example, (x ｔ , y ｔ , z ｔ , W, P, R). The calculation device 11 associates the position and posture of the TCP when the position and posture of the robot arm 410 are the reference position and posture with the positions of the reflectors r21, r22, and r23, and stores them in the storage device 12. As a result, for example, (x ｔ , y ｔ , z ｔ , W, P, R) and (x ｒｂ１ , y ｒｂ１ , z ｒｂ１ ), (x ｒｂ２ , y ｒｂ２ , z ｒｂ２ ) and (x ｒｂ３ , y ｒｂ３ , z ｒｂ３ ) are linked to each other and stored in the storage device 12.

[0083] The calculation device 11 calculates a second transformation matrix for transforming the positions of the reflectors r21, r22, and r23 and the position and orientation of the TCP based on the positions and orientations of the mutually linked TCPs and the positions of the reflectors r21, r22, and r23. The second transformation matrix may include, for example, a matrix for calculating the position of the TCP based on the positions of the reflectors r21, r22, and r23, and a matrix for calculating the orientation of the TCP based on the positions of the reflectors r21, r22, and r23. The second transformation matrix may be transmitted to the processing control device 30 by the communication device 13. Since various existing methods can be applied to calculating the second transformation matrix, detailed description thereof will be omitted. Calculating the second transformation matrix may also be referred to as calculating the second transformation matrix. The second transformation matrix may also be referred to as second transformation information.

[0084] The second transformation matrix may be calculated from the positions of the reflectors r21, r22, and r23 in the measurement coordinate system and the position of the TCP in the measurement coordinate system. In this case, for example, if the position of the TCP input via the input device 14 is the position of the TCP in the robot coordinate system, the calculation device 11 may use the first transformation matrix to transform the position of the TCP in the robot coordinate system into the position of the TCP in the measurement coordinate system.

[0085] The second transformation matrix may be calculated, for example, as follows: First, when the position and orientation of the robot arm 410 are at a reference position and orientation, the positions of the reflectors r21, r22, and r23 are measured, and the orientation of the surface defined by the reflectors r21, r22, and r23 is calculated based on the measured positions. Next, the machining control device 30 controls the robot 41 so that the position and orientation of the TCP become predetermined. As a result, the position and orientation of the robot arm 410 change. After that, the positions of the reflectors r21, r22, and r23 are measured, and the orientation of the surface defined by the reflectors r21, r22, and r23 is calculated based on the measured positions. At this time, the predetermined position and orientation of the TCP are determined (i.e., known) by the machining control device 30. The second transformation matrix may also be calculated statistically based on the results of repeating the above-described operation multiple times.

[0086] 11, when the position of the TCP of the end effector EE1 is measured, the position and orientation of the robot arm 410 are the reference position and orientation, so it can be said that the TCP is located at a predetermined position. The positions of the reflectors r21, r22, and r23 used to obtain the second transformation matrix are measured while the TCP of the end effector EE1 is being measured.

[0087] If we refer to reflectors r21, r22, and r23 as the second member, it can be said that the calculation device 11, which may be called a calculation unit, calculates a second transformation matrix for converting the position of the second member and the position of the TCP based on fourth position information indicating the position of the second member measured by the measurement device 21 based on the measurement light irradiated onto the second member when the TCP of the robot 41 is located at a predetermined position.

[0088] Furthermore, since the above-mentioned predetermined position can be said to be the position of the TCP, it can be said that the calculation device 11, which may be called a calculation unit, calculates a second transformation matrix for converting the position of the second member and the position of the TCP based on fourth position information indicating the position of the second member measured by the measurement device 21 based on the measurement light irradiated onto the second member, and fifth position information indicating the position of the TCP corresponding to the above-mentioned predetermined position, when the TCP of the robot 41 is located at the predetermined position.

[0089] 11 and 13 , the measurement system 2 may include a measurement device 21 that may be referred to as a first measurement device, and a sensor 23 or 24 that may be referred to as a third measurement device that is capable of measuring the position of the TCP of the robot 41. In this case, a calculation device 11 that may be referred to as a calculation unit may calculate a second transformation matrix for converting the position of the second member and the position of the TCP, based on the position of the second member measured by the measurement device 21 based on measurement light irradiated onto the second member, and the position of the TCP measured by the sensor 23 or 24, while the sensor 23 or 24 is measuring the position of the TCP.

[0090] 12 and 14, when a jig for measuring the position of the TCP of the end effector EE1 is movable and a reflector is attached to the jig (see, for example, jig 91a in FIG. 12 and jig 92a in FIG. 14), the position of the reflector attached to the jig may move depending on the position of the end effector EE1 (i.e., the position of the robot arm 410). Furthermore, when the position of the TCP is being measured, it can be said that the positional relationship between the reflector attached to the jig and reflectors r21, r22, and r23 attached to the robot arm 410 (in other words, the second member) is a predetermined relationship.

[0091] If the reflector attached to the jig is referred to as a reference member, it can be said that the measuring device 21 may be capable of measuring the position of the TCP of the robot 41, which moves together with the robot arm 410, by irradiating measurement light onto the reference member, which moves according to the position of the robot arm 410, and measuring the position of the reference member. In this case, the calculation device 11, which may be referred to as a calculation unit, may calculate a second transformation matrix for converting the position of the second member and the position of the TCP, based on the position of the TCP and the position of the second member measured by the measuring device 21 based on the measurement light irradiated onto the reference member and the second member, respectively, in a state where the positional relationship between the reference member and the second member is a predetermined relationship.

[0092] Here, the operation of the measurement system 2 will be described again with reference to the flowchart in Fig. 16. In Fig. 16, the calculation device 11 acquires the position of the TCP of the robot 41 when the robot arm 410 is in the reference position and reference posture. At this time, the calculation device 11 calculates a posture corresponding to the reference posture of the robot arm 410 based on the positions of the reflectors r21, r22, and r23. The calculation device 11 acquires the position and posture of the TCP by setting the calculated posture as the posture of the TCP (step S201).

[0093] In parallel with the processing of step S201, the measurement device 21 measures the positions of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23 when the robot arm 410 of the robot 41 is in the reference position and reference posture (step S202). At this time, the calculation device 11 of the measurement control device 10 acquires fourth position information indicating the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0094] Based on the fourth position information and the position and attitude of the TCP obtained in the processing of step S201, the calculation device 11 calculates a second transformation matrix for converting the positions of each of the reflectors r21, r22, and r23 and the position and attitude of the TCP (step S203).

[0095] As described above, the measurement system 2 including the measurement control device 10 and the measuring device 21 can be linked with the processing control device 30. In other words, the measurement results by the measuring device 21 can be used for the control of the robot 41 by the processing control device 30.

[0096] For example, when the position and posture of the robot arm 410 are different from the reference position and posture, the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21 can be transformed into the position of the TCP in the robot coordinate system using the first transformation matrix and the second transformation matrix. The position of the TCP in this robot coordinate system is used when the processing control device 30 controls the robot 41.

[0097] The communication device 13 of the measurement control device 10 may associate, for example, the position and orientation of the TCP in the robot coordinate system and the positions of the reflectors r21, r22, and r23 in the robot coordinate system when the robot arm 410 is in the reference position and reference orientation, and transmit these to the processing control device 30. The processing control device 30 may associate, for example, the position and orientation of the TCP in the robot coordinate system and the positions of the reflectors r21, r22, and r23 in the robot coordinate system when the robot arm 410 is in the reference position and reference orientation, and store these in the storage device 32.

[0098] Incidentally, for example, when the TCP of the end effector EE1 is measured, the machining control device 30 controls the robot 41 so that the position and posture of the robot arm 410 are at a reference position and posture. At this time, the position set as the target position by the machining control device 30 (i.e., the position of the TCP when the TCP is measured) may differ from the actual position of the TCP. Therefore, the machining control device 30 may calibrate the origin of the robot coordinate system, for example, based on the position and posture of the TCP in the robot coordinate system when the robot arm 410 is at the reference position and posture, so that the position set as the target position coincides with the actual position of the TCP. Specifically, at least one of rotational transformation and translation of the origin of the robot coordinate system may be performed.

[0099] As described above, the posture of the TCP when the posture of the robot arm 410 is the reference posture may be calculated based on the positions of the reflectors r21, r22, and r23. Therefore, the processing control device 30 calibrating the origin of the robot coordinate system based on the position and posture of the TCP in the robot coordinate system can be rephrased as the processing control device 30 calibrating the origin of the robot coordinate system based on the positions of the reflectors r21, r22, and r23.

[0100] (5) Calculation of the position of the TCP By using the above-mentioned first transformation matrix (i.e., transformation information for converting between a position in the measurement coordinate system and a position in the robot coordinate system) and the second transformation matrix (i.e., transformation information for converting between the position of each of the reflectors r21, r22, and r23 and the position of the TCP), the positions of each of the reflectors r21, r22, and r23 measured by the measurement device 21 can be converted into the position and orientation of the TCP when the position and orientation of the robot arm 410 are different from the above-mentioned reference position and reference orientation.

[0101] As explained in "(4-3) Transformation Matrix", the second transformation matrix is ​​the position and orientation of the TCP, for example (x ｔ , y ｔ , z ｔ , W, P, R), and the positions of the reflectors r21, r22, and r23, for example (x ｒｂ１ , y ｒｂ１ , z ｒｂ１ ), (x ｒｂ２ , y ｒｂ２ , z ｒｂ２ ) and (x ｒｂ３ , y ｒｂ３ , z ｒｂ３ ) Therefore, by using the second transformation matrix, the position and orientation of the TCP can be calculated from the positions of the reflectors r21, r22, and r23. Here, to avoid complexity, the position and orientation of the TCP will be referred to as the "position of the TCP" as appropriate.

[0102] The amount of rotation W about the x-axis of the robot coordinate system may be rephrased as the position in the direction of rotation about the x-axis of the robot coordinate system. The amount of rotation P about the y-axis of the robot coordinate system may be rephrased as the position in the direction of rotation about the y-axis of the robot coordinate system. The amount of rotation R about the z-axis of the robot coordinate system may be rephrased as the position in the direction of rotation about the z-axis of the robot coordinate system. Therefore, the position and orientation of the TCP can be expressed by the position in the x-axis direction of the robot coordinate system, the position in the y-axis direction of the robot coordinate system, the position in the z-axis direction of the robot coordinate system, the position in the direction of rotation about the x-axis of the robot coordinate system, the position in the direction of rotation about the y-axis of the robot coordinate system, and the position in the direction of rotation about the z-axis of the robot coordinate system. In other words, the TCP can move along the x-axis, y-axis, and z-axis in three-dimensional space, and can rotate around the x-axis, y-axis, and z-axis. In other words, the TCP has six degrees of freedom of movement (so-called 6DoF: Six Degrees of Freedom).

[0103] Here, the calculation of the position of the TCP may be performed by the calculation device 11 of the measurement control device 10, or by the calculation device 31 of the processing control device 30. The calculation of the position of the TCP may be shared between the calculation devices 11 and 31. Furthermore, taking into consideration the conversion between the position in the measurement coordinate system and the position in the robot coordinate system, the following four methods can be mentioned.

[0104] (i) The calculation device 11 of the measurement control device 10 may use a first transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21 into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The calculation device 11 may further use a second transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the position of the TCP in the robot coordinate system.

[0105] (ii) The calculation device 11 of the measurement control device 10 may use the first transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21 into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The communication device 13 of the measurement control device 10 may transmit position information indicating the positions of the reflectors r21, r22, and r23 in the robot coordinate system and the second transformation matrix to the processing control device 30. The calculation device 31 of the processing control device 30 may use the second transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the position of the TCP in the robot coordinate system.

[0106] (iii) The calculation device 11 of the measurement control device 10 may use the second transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21 into the position of the TCP in the measurement coordinate system. The communication device 13 of the measurement control device 10 may transmit position information indicating the position of the TCP in the measurement coordinate system and the first transformation matrix to the processing control device 30. The calculation device 31 of the processing control device 30 may use the first transformation matrix to transform the position of the TCP in the measurement coordinate system into the position of the TCP in the robot coordinate system.

[0107] (iv) The communication device 13 of the measurement control device 10 may transmit position information indicating the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21, as well as first and second conversion information to the processing control device 30. The calculation device 31 of the processing control device 30 may use a first transformation matrix to transform the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system into the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system. The calculation device 31 may further use a second transformation matrix to transform the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system into the position of the TCP in the robot coordinate system.

[0108] (5-1) When transformation into the robot coordinate system and transformation into the TCP position are performed in the measurement control device 10 The measurement device 21 may irradiate each of the reflectors r21, r22, and r23 with measurement light in a state in which the position and posture of the robot arm 410 are different from the reference position and reference posture. The measurement device 21 may measure the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23.

[0109] The calculation device 11 of the measurement control device 10 may use a first transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The calculation device 11 may further use a second transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the position of the TCP in the robot coordinate system.

[0110] Alternatively, the calculation device 11 may use the second transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system into the position and orientation of the TCP in the measurement coordinate system. The calculation device 11 may further use the first transformation matrix to transform the position of the TCP in the measurement coordinate system into the position of the TCP in the robot coordinate system.

[0111] In this case, the communication device 13, which may be referred to as a transmitter, may transmit position information indicating the position of the TCP in the robot coordinate system to the processing control device 30. The processing control device 30 may control the movement of the robot arm 410 of the robot 41 based on the position of the TCP in the robot coordinate system indicated by the position information, to move the TCP.

[0112] As explained in "(2-2) Coordinate Transformation," the first transformation matrix is ​​calculated based on first position information indicating the positions of the reflectors r11, r12, and r13 in the measurement coordinate system, and second position information indicating the positions of the reflectors r11, r12, and r13 in the robot coordinate system. Therefore, "using the first transformation matrix" can be rephrased as "based on the first position information and the second position information." "A state in which the position and posture of the robot arm 410 are different from the reference position and reference posture" can be rephrased as "a state in which the TCP is located at a position different from a predetermined position."

[0113] 11 and 13, the "state in which the position and posture of the robot arm 410 are different from the reference position and posture" corresponds to the state in which the sensor 23 or 24 is not measuring the position of the TCP. If the sensor 23 or 24 is rephrased as the third measuring device, the "state in which the position and posture of the robot arm 410 are different from the reference position and posture" can also be rephrased as the "state in which the third measuring device is not measuring the position of the TCP."

[0114] 11 and 13, the second transformation matrix may be calculated based on the positions of the reflectors r21, r22, and r23 measured by the measurement device 21 based on measurement light irradiated onto the reflectors r21, r22, and r23 while the sensor 23 or 24 is measuring the position of the TCP, and based on the position of the TCP measured by the sensor 23 or 24. Here, if the sensor 23 or 24 is referred to as the third measurement device, "using the second transformation information" can be rephrased as "based on the position of the second member measured by the measurement device 21 based on measurement light irradiated onto the second member while the third measurement device is measuring the position of the TCP."

[0115] "A state in which the position and posture of the robot arm 410 are different from the reference position and reference posture" corresponds to a state in which the positional relationship between reflectors r31, r32, and r33 attached to jig 91a shown in Fig. 12 and reflectors r21, r22, and r23 is different from a predetermined relationship. Here, if reflectors r31, r32, and r33 are referred to as reference members and reflectors r21, r22, and r23 are referred to as second members, then "a state in which the position and posture of the robot arm 410 are different from the reference position and reference posture" can be rephrased as "a state in which the positional relationship between the reference members and the second members is different from a predetermined relationship."

[0116] As explained in "(4-3) Transformation matrix", the second transformation matrix may be obtained based on the position of the TCP measured by the measurement device 21 based on the measurement light irradiated onto the reflectors r31, r32, and r33, and the positions of the reflectors r21, r22, and r23 measured by the measurement device 21 based on the measurement light irradiated onto the reflectors r21, r22, and r23, when the positional relationship between the reflectors r31, r32, and r33 attached to the jig 91a shown in FIG. 12 and the reflectors r21, r22, and r23 is a predetermined relationship. Here, if reflectors r31, r32, and r33 are referred to as reference members and reflectors r21, r22, and r23 are referred to as second members, then "using the second transformation matrix" can be rephrased as "based on the position of the TCP and the position of the second member measured by the measuring device 21 based on the measurement light irradiated onto each of the reference member and the second member, when the positional relationship between the reference member and the second member is a predetermined relationship."

[0117] (5-2) When transformation into the robot coordinate system is performed in the measurement control device 10 and transformation into the TCP position is performed in the machining control device 30: The measuring device 21 may irradiate each of the reflectors r21, r22, and r23 with measurement light in a state where the position and posture of the robot arm 410 are different from the reference position and reference posture. The measuring device 21 may measure the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23.

[0118] The calculation device 11 of the measurement control device 10 may use the first transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The communication device 13, which may be referred to as a transmitter, may transmit the second transformation matrix and third position information indicating the positions of the reflectors r21, r22, and r23 in the robot coordinate system to the processing control device 30.

[0119] The arithmetic unit 31 of the processing control device 30 may use the second transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system indicated by the third position information into the position of the TCP in the robot coordinate system. The processing control device 30 may control the movement of the robot arm 410 of the robot 41 based on the transformed positions of the TCP to move the position of the TCP.

[0120] (5-3) When conversion to the TCP position is performed in the measurement control device 10 and conversion to the robot coordinate system is performed in the machining control device 30: The measuring device 21 may irradiate each of the reflectors r21, r22, and r23 with measurement light in a state where the position and posture of the robot arm 410 are different from the reference position and reference posture. The measuring device 21 may measure the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23.

[0121] The calculation device 11 of the measurement control device 10 may use the second transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system into the position of the TCP in the measurement coordinate system. The communication device 13, which may be referred to as a first transmission unit, may transmit the first transformation matrix and ninth position information indicating the position of the TCP in the measurement coordinate system to the processing control device 30.

[0122] The calculation device 31 of the processing control device 30 may use the first transformation matrix to transform the position of the TCP in the measurement coordinate system indicated by the ninth position information into the position of the TCP in the robot coordinate system. The processing control device 30 may control the movement of the robot arm 410 of the robot 41 based on the position of the TCP in the transformed robot coordinate system to move the position of the TCP. In other words, the processing control device 30 may control the movement of the robot arm 410 based on the ninth position information to move the position of the TCP.

[0123] (5-4) When transformation into the robot coordinate system and transformation into the TCP position are performed in the machining control device 30: The measuring device 21 may irradiate each of the reflectors r21, r22, and r23 with measurement light while the position and posture of the robot arm 410 are different from the reference position and reference posture. The measuring device 21 may measure the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23.

[0124] The communication device 13, which may be referred to as a first transmission unit, may transmit the first transformation matrix, the second transformation matrix, and eighth position information indicating the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system to the processing control device 30.

[0125] The calculation device 31 of the machining control device 30 may use the first transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the eighth position information into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The calculation device 31 may further use the second transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the position of the TCP in the robot coordinate system.

[0126] Alternatively, the calculation device 31 may use the second transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the eighth position information into the position and orientation of the TCP in the measurement coordinate system. The calculation device 31 may further use the first transformation matrix to transform the position of the TCP in the measurement coordinate system into the position of the TCP in the robot coordinate system.

[0127] The machining control device 30 may move the position of the TCP by controlling the movement of the robot arm 410 of the robot 41 based on the position of the TCP in the transformed robot coordinate system. Here, if the reflectors r21, r22, and r23 are referred to as the second member, it can be said that the machining control device 30 may transform the position of the second member indicated by the eighth position information into the position of the TCP based on the second transformation matrix, and may control the movement of the robot arm 410 based on the transformed position of the TCP to move the position of the TCP (or may control the robot 41 to move the position of the TCP).

[0128] (6) In the case where there are multiple robots capable of processing the workpiece W, the workpiece W, which may be referred to as a processing target, may be processed by multiple robots. For example, a system 1a shown in Figures 17 and 18 includes a measurement control device 10, a measuring device 21, a processing control device 30, and robots 41, 42, and 43. In the system 1a, the processing control device 30 controls the robots 41, 42, and 43.

[0129] A reflector module r2 including reflectors r21, r22, and r23 shown in Fig. 5 is attached to the robot arm 410 of the robot 41. However, the reflector module r2 is not shown in Fig. 17. Similarly, a reflector module including three reflectors is attached to the robot arm 420 of the robot 42. A reflector module including three reflectors is attached to the robot arm 430 of the robot 43.

[0130] The measurement device 21 can irradiate measurement light onto each of the reflectors r21, r22, and r23 included in the reflector module r2 attached to the robot arm 410. The measurement device 21 measures the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light irradiated onto each of the reflectors r21, r22, and r23. The calculation device 11 of the measurement control device 10 uses a first transformation matrix to transform the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system into the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system.

[0131] The measurement device 21 can irradiate measurement light onto each of three reflectors included in a reflector module attached to the robot arm 420. The measurement device 21 measures the position of each of the three reflectors in the measurement coordinate system based on the measurement light irradiated onto each of the three reflectors. The calculation device 11 uses a first transformation matrix to transform the position of each of the three reflectors attached to the robot arm 420 in the measurement coordinate system into the position of each of the three reflectors in the robot coordinate system.

[0132] The measurement device 21 can irradiate measurement light onto each of three reflectors included in a reflector module attached to the robot arm 430. The measurement device 21 measures the position of each of the three reflectors in the measurement coordinate system based on the measurement light irradiated onto each of the three reflectors. The calculation device 11 uses a first transformation matrix to transform the position of each of the three reflectors attached to the robot arm 430 in the measurement coordinate system into the position of each of the three reflectors in the robot coordinate system.

[0133] The reflectors r21, r22, and r23 included in the reflector module r2 attached to the robot arm 410, the three reflectors included in the reflector module attached to the robot arm 420, and the three reflectors included in the reflector module attached to the robot arm 430 may be referred to as second members. It can be said that the calculation device 11, which may be referred to as a calculation unit, is capable of calculating the position in the robot coordinate system of each of the multiple second members attached to the robots 41, 42, and 43, respectively, that are capable of machining the workpiece W. In this case, the first transformation matrix may be shared for calculating the position in the robot coordinate system of each of the multiple second members attached to the robots 41, 42, and 43, respectively.

[0134] (7) Method for identifying the position of a light-emitting body from an image A specific example of a method for identifying the position of a light-emitting body, such as the light-emitting body 81, using the stereo camera 22, as described in "(3-1) Method using a stereo camera," will be described with reference to Figures 19 and 20.

[0135] Images captured by the stereo camera 22 often contain noise. When images contain noise, the noise may cause the position of the light-emitting object to be erroneously recognized. Therefore, erroneous recognition can be suppressed by removing noise, for example, by performing the process shown in the flowchart of FIG. 19. Note that the process described below is an example and is not limited to this.

[0136] 19 , the calculation device 11 of the measurement control device 10 acquires images captured by the stereo camera 22 (i.e., images captured by each of the two cameras included in the stereo camera 22) (step S301). The calculation device 11 generates a parallax image based on the images acquired in the processing of step S301 (step S302). Note that various existing methods can be applied to the method of generating the parallax image, and therefore detailed description thereof will be omitted.

[0137] The arithmetic unit 11 performs median filtering on the parallax image generated in step S302 (step S303). The arithmetic unit 11 further performs integration threshold (IT) processing on the median filtered image (step S304).

[0138] The integration threshold process is a process of integrating or averaging the values ​​of each pixel (e.g., luminance values) in a parallax image in the time direction, and excluding pixel values ​​below a predetermined value (e.g., setting them to 0). "Integrating or averaging the values ​​of each pixel in the time direction" means integrating or averaging the values ​​of each pixel across multiple parallax images that are consecutive in time. The predetermined value may also be referred to as a threshold.

[0139] Pixels with relatively large values ​​due to noise are random (i.e., different for each image). When the values ​​of each pixel are integrated or averaged over time, the values ​​of pixels corresponding to noise become relatively small. Therefore, noise can be removed by removing pixel values ​​below a predetermined value.

[0140] The integration threshold process will be further explained with reference to Fig. 20. Here, a frame image of 5 x 5 pixels will be used for explanation. For example, numerical values ​​such as "0" and "255" indicate the luminance values ​​of pixels.

[0141] In the integration threshold process, for example, a new image is generated by adding (accumulating) the luminance values ​​of each pixel constituting the (n)th frame, which is the nth image, and the luminance values ​​of each pixel constituting the (n+1)th frame, which is the (n+1)th image following the (n)th frame (see FIG. 20(b)). Note that in the case of averaging, the luminance values ​​of each pixel constituting the (n)th frame and the luminance values ​​of each pixel constituting the (n+1)th frame are calculated.

[0142] Next, the threshold value is calculated by multiplying the maximum brightness value (here, "499") in the generated new image by a predetermined percentage (for example, 50%). Then, in the generated new image, the brightness values ​​of pixels whose brightness values ​​are equal to or less than the threshold value are set to "0" (see FIG. 20(c)).

[0143] 20(c) with the luminance values ​​of the pixels in the (n+2)th frame, which is the (n+2)th image following the (n+1)th frame, to generate a new image. In other words, the integration threshold process may be performed using multiple temporally consecutive images.

[0144] Returning to FIG. 19, the calculation device 11 detects the position of the light emitter from the parallax image that has been subjected to the integration threshold process in the process of step S304 (step S305).

[0145] In addition, instead of performing noise removal processing such as median filter processing or integration threshold processing on the parallax image, the calculation device 11 may perform noise removal processing on the image acquired in the processing of step S301 (i.e., the image captured by the stereo camera 22).

[0146] Instead of or in addition to the above-described method, the following method may be used. Here, one of the two cameras included in the stereo camera 22 may be provided with a bandpass filter. The bandpass filter may be configured to have a relatively high transmittance for the wavelength band of light emitted from a light emitter 81 (see FIG. 8 ), such as an LED, and a relatively low transmittance for other wavelength bands. In an image captured by one of the two cameras included in the stereo camera 22, the luminance value of the portion in which the light emitter 81 appears is relatively high, while the luminance value of the other portion is relatively low. Therefore, by referring to the image captured by the one camera, the position of the light emitter 81 can be estimated relatively easily. Then, based on the position of the light emitter 81 estimated from the image captured by the one camera, the approximate position of the light emitter 81 in the image captured by the other camera included in the stereo camera 22 may be identified. Then, based on the identified approximate position, the position of the light emitter 81 may be identified, for example, by searching for a characteristic portion of the light emitter 81 in the image captured by the other camera. According to this method, for example, it is possible to shorten the time required to search for the characteristic portion of the light-emitting body 81 and also to suppress erroneous recognition.

[0147] (8) Measurement during operation of robot 41 From the viewpoint of improving the processing accuracy of the workpiece W by the robot 41, it is desirable that the positions of each of the reflectors r21, r22, and r23 included in the reflector module r2 attached to the robot arm 410 be measured by the measuring device 21 during operation of the robot 41.

[0148] On the other hand, if the robot arm 410 is moving, for example, the first point in time at which the position of reflector r21 is measured may differ from the second point in time at which the position of reflector r22 is measured, and as a result, the position and posture of the robot arm 410 at the first point in time may differ from the position and posture of the robot arm 410 at the second point in time.

[0149] For this reason, the movement of the robot arm 410 may be temporarily stopped in order to measure the position of each of the reflectors r21, r22, and r23. However, from the viewpoint of the work efficiency of the robot 41, it is desirable to keep the time during which the movement of the robot arm 410 is stopped in order to measure the position of each of the reflectors r21, r22, and r23 as short as possible. Note that if the scanning speed of the measurement light is sufficiently higher than the movement speed of the robot arm 410, measurement errors can be ignored. In this case, the movement of the robot arm 410 does not need to be temporarily stopped in order to measure the position of each of the reflectors r21, r22, and r23. Note that the movement speed of the robot arm 410 may be reduced when measuring the position of each of the reflectors r21, r22, and r23.

[0150] The robot 41 is controlled by the processing control device 30. Therefore, when the robot 41 is operating, the measurement control device 10 controls the measurement of the reflectors r21, r22, and r23 by the measuring device 21 in accordance with signals output from the processing control device 30.

[0151] The arithmetic device 31 of the processing control device 30 may determine, for example, the position and orientation of the TCP when measuring reflectors r21, r22, and r23 included in the reflector module r2 attached to the robot arm 410. Thereafter, the arithmetic device 31 generates a measurement start signal for causing the measuring device 21 to start measurement. The communication device 33 may transmit the measurement start signal to the measurement control device 10. Here, the measurement start signal may include information for the measurement control device 10 to control the measuring device 21.

[0152] (i) For example, the measurement start signal may include position information indicating the position and orientation of the TCP when the reflectors r21, r22, and r23 are measured (hereinafter, appropriately referred to as the "position of the TCP at the time of measurement"). Specifically, the measurement start signal may include position information indicating the position of the TCP at the time of measurement in the robot coordinate system determined by the arithmetic unit 31 of the processing control device 30.

[0153] In this case, for example, the calculation device 11 of the measurement control device 10 may use a first transformation matrix to transform the position of the TCP at the time of measurement in the robot coordinate system indicated by the position information included in the measurement start signal into the position of the TCP at the time of measurement in the measurement coordinate system. The calculation device 11 may further use a second transformation matrix to transform the position of the TCP at the time of measurement in the measurement coordinate system into the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0154] Alternatively, the calculation device 11 may use the second transformation matrix to transform the position of the TCP at the time of measurement in the robot coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The calculation device 11 may further use the first transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0155] The measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0156] (ii) For example, the measurement start signal may include position information indicating the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system. In this case, the arithmetic unit 31 of the machining control device 30 may determine the position of the TCP in the robot coordinate system at the time of measurement. The arithmetic unit 31 may use a second transformation matrix to transform the position of the TCP in the robot coordinate system at the time of measurement into the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system. The communication unit 33 may transmit the measurement start signal including position information indicating the positions of each of the reflectors r21, r22, and r23 in the robot coordinate system to the measurement control device 10.

[0157] The calculation device 11 of the measurement control device 10 may use a first transformation matrix to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system indicated by the position information included in the measurement start signal into the positions of the reflectors r21, r22, and r23 in the measurement coordinate system. The measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0158] (iii) For example, the measurement start signal may include a position signal indicating the position of the TCP in the measurement coordinate system at the time of measurement. In this case, the arithmetic unit 31 of the machining control device 30 may determine the position of the TCP in the robot coordinate system at the time of measurement. The arithmetic unit 31 may use a first transformation matrix to transform the position of the TCP in the robot coordinate system at the time of measurement into the position of the TCP in the measurement coordinate system at the time of measurement. The communication unit 33 may transmit a measurement start signal including position information indicating the position of the TCP in the measurement coordinate system at the time of measurement to the measurement control device 10.

[0159] The calculation device 11 of the measurement control device 10 may use the second transformation matrix to transform the position of the TCP at the time of measurement in the measurement coordinate system indicated by the position information included in the measurement start signal into the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system. The measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0160] (iv) For example, the measurement start signal may include position information indicating the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system. In this case, the arithmetic unit 31 of the machining control device 30 may determine the position of the TCP at the time of measurement in the robot coordinate system. The arithmetic unit 31 may use a first transformation matrix to transform the position of the TCP at the time of measurement in the robot coordinate system into the position of the TCP at the time of measurement in the measurement coordinate system. The arithmetic unit 31 may further use a second transformation matrix to transform the position of the TCP at the time of measurement in the measurement coordinate system into the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0161] Alternatively, the calculation device 31 may use the second transformation matrix to transform the position of the TCP at the time of measurement in the robot coordinate system into the positions of the reflectors r21, r22, and r23 in the robot coordinate system. The calculation device 31 may further use the first transformation information to transform the positions of the reflectors r21, r22, and r23 in the robot coordinate system into the positions of the reflectors r21, r22, and r23 in the measurement coordinate system.

[0162] The communication device 33 may transmit a measurement start signal including position information indicating the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system to the measurement control device 10. The measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the position information included in the measurement start signal.

[0163] The measurement start signal may include a first measurement start signal including position information and a second measurement start signal that commands the measurement control device 10 to perform measurement. In this case, the communication device 33 of the processing control device 30 may first transmit the first measurement start signal to the measurement control device 10. At this time, the processing control device 30 may control the robot 41 so that the robot arm 410 moves to a predetermined position indicated by the position information included in the first measurement start signal. When the communication device 33 of the processing control device 30 receives a signal from the robot 41 indicating that the movement of the robot arm 410 to the predetermined position has been completed, the communication device 33 may transmit a second measurement start signal to the measurement control device 10. As a result, measurement of the positions of the reflectors r21, r22, and r23 may be started.

[0164] In this case, the measurement control device 10 may estimate the positions of the reflectors r21, r22, and r23 at the time of measurement based on the position information included in the first measurement start signal. Then, the measurement control device 10 may change in advance the emission direction of the measurement light from the measurement device 21 so that the measurement light is irradiated onto the estimated positions. Alternatively, the measurement control device 10 may change in advance the emission direction of the measurement light from the measurement device 21 so that the measurement light is irradiated onto the position indicated by the position information included in the first measurement start signal. Thereafter, the measurement control device 10 may enter a standby state until receiving a second measurement start signal. At this time, the measurement device 21 waits in a state in which it can measure the positions of the reflectors r21, r22, and r23. When the measurement control device 10 receives the second measurement start signal, the measurement control device 10 may start measuring the positions of the reflectors r21, r22, and r23.

[0165] If the reflectors r21, r22, and r23 are referred to as the second member, then in the case of (iii) above, "the position of the TCP at the time of measurement in the measurement coordinate system indicated by the position information included in the measurement start signal" can be rephrased as "measurement positions in the measurement coordinate system for measuring the second member transformed based on the first transformation matrix in the processing control device." Similarly, in the case of (iv) above, "the positions of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the position information included in the measurement start signal" can be rephrased as "measurement positions in the measurement coordinate system for measuring the second member transformed based on the first transformation matrix in the processing control device."

[0166] Furthermore, in the case of (iii) above, "the calculation device 31 uses the first transformation matrix to transform the position of the TCP at the time of measurement in the robot coordinate system into the position of the TCP at the time of measurement in the measurement coordinate system" can be rephrased as "the calculation device 31 transforms the measurement positions in the robot coordinate system into measurement positions in the measurement coordinate system in order to measure reflectors r21, r22, and r23, based on the first transformation matrix." Similarly, in the case of (iv) above, "the calculation device 31 uses the first transformation information to transform the positions of each of reflectors r21, r22, and r23 in the robot coordinate system into the positions of each of reflectors r21, r22, and r23 in the measurement coordinate system" can be rephrased as "the calculation device 31 transforms the measurement positions in the robot coordinate system into measurement positions in the measurement coordinate system in order to measure reflectors r21, r22, and r23, based on the first transformation matrix."

[0167] As described above, the communication device 33 of the processing control device 30 may transmit a measurement start signal to the measurement control device 10. In other words, the communication device 13 of the measurement control device 10 may receive the measurement start signal from the processing control device 30. That is, the measurement control device 10 may include the communication device 13, which may be called a receiving unit, that receives a measurement start signal from the processing control device 30 to cause the measuring device 21 to start measurement.

[0168] In the above cases (i) to (iii), the calculation device 11 of the measurement control device 10 converts the position indicated by the position information included in the measurement start signal into the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system, which may be referred to as estimating the position of each of the reflectors r21, r22, and r23. For this reason, the calculation device 11 may be referred to as an estimation unit.

[0169] As described above, the measurement control device 10 may control the measurement of the reflectors r21, r22, and r23 by the measurement device 21 based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the position information included in the measurement start signal. Here, "controlling the measurement of the reflectors r21, r22, and r23 by the measurement device 21" may include changing the direction (i.e., emission direction) of the measurement light. The measurement control device 10 may change the direction of the measurement light so that the measurement light emitted from the measurement device 21 is irradiated onto the positions of the reflectors r21, r22, and r23 estimated by the calculation device 11, which may be referred to as an estimation unit. Here, the measurement device 21 may be provided with a tracking device (not shown) capable of tracking the positions of the reflectors r21, r22, and r23 that move in accordance with the operation of the robot 41. In this case, the measurement control device 10 may change the direction of the measurement light by transmitting signals indicating the positions of the reflectors r21, r22, and r23 in the measurement coordinate system to the tracking device.

[0170] The calculation device 31 of the processing control device 30 may determine the timing at which the measuring device 21 starts measuring each of the reflectors r21, r22, and r23. The calculation device 31 may generate timing information (in other words, a timing signal) indicating the determined timing. The communication device 33 of the processing control device 30 may transmit the timing information to the measurement control device 10 in addition to the measurement start signal. In other words, the communication device 13 of the measurement control device 10 may receive the timing information. In other words, the communication device 13, which may be referred to as a receiving unit, may receive timing information indicating the timing at which to start measurement. The timing signal may correspond to the above-mentioned "second measurement start signal."

[0171] (8-1) Example of changing the emission direction of measurement light A specific example of a method for changing the emission direction of measurement light will be described with reference to Fig. 21. For example, when the emission direction of measurement light is changed by changing the angle of a mirror that reflects measurement light in the measurement device 21, the measurement control device 10 controls a motor that changes the angle of the mirror included in the measurement device 21, thereby changing the emission direction.

[0172] In this case, due to, for example, a mechanical response delay of the motor, it takes a certain amount of time from when the measurement control device 30 starts controlling the motor until the emission direction of the measurement light becomes the desired emission direction.

[0173] 21, dotted circles indicate the positions of the reflectors r21, r22, and r23 (i.e., the positions where the reflectors r21, r22, and r23 are measured). "P21" indicates the position of the reflector r21, "P22" indicates the position of the reflector r22, and "P23" indicates the position of the reflector r23. Note that the positions P21, P22, and P23 may correspond to the positions of the reflectors r21, r22, and r23, respectively, in a measurement coordinate system indicated by position information included in the measurement start signal, for example.

[0174] The solid arrow extending from the measurement device 21 indicates the current emission direction d0 of the measurement light. When the measurement device 21 first measures, for example, the reflector r21 shown in Fig. 21, the difference α between the current emission direction d0 of the measurement light and the target emission direction d1 is relatively large. In this case, it takes a relatively long time from when the measurement control device 10 starts controlling the measurement device 21 until the measurement of the reflector r21 actually starts.

[0175] 21, the difference β between the current emission direction d0 of the measurement light and the target emission direction d2 is relatively small. In this case, the time required from when the measurement control device 30 starts to control the measurement device 21 until the measurement of the reflector r22 actually starts is relatively short.

[0176] The measurement control device 10 may determine the order of measurements of the reflectors r21, r22, and r23 so as to suppress the amount of change in the emission direction of the measurement light based on the positions of the reflectors r21, r22, and r23 in the measurement coordinate system, which are based on position information included in the measurement start signal, for example, and the current emission direction d0 of the measurement light from the measurement device 21. In this way, the time required for the measurement device 21 to measure the reflectors r21, r22, and r23 can be shortened. Note that in the case shown in FIG. 21 , the measurement control device 10 may determine the order of measurements so that the reflector r22 is measured first, then the reflector r23, and finally the reflector r21.

[0177] It should be noted that "the positions of the reflectors r21, r22, and r23 in the measurement coordinate system based on the position information included in the measurement start signal" is not limited to "the positions of the reflectors r21, r22, and r23 in the measurement coordinate system indicated by the position information," but also includes the concept of "the positions of the reflectors r21, r22, and r23 in the measurement coordinate system in which the positions indicated by the position information are transformed by the calculation device 11 of the measurement control device 10 using at least one of the first transformation matrix and the second transformation matrix."

[0178] (8-2) Reflector Measurement Method (8-2-1) Measurement Timing From the viewpoint of shortening the time required to measure the reflectors r21, r22, and r23, it is desirable to change in advance the emission direction of the measurement light L2 from the measurement device 21 so that the emission direction is the direction toward the position of the reflector r21, r22, or r23. For example, after receiving the measurement start signal and before the reflectors r21, r22, and r23 are positioned at the positions where the measurement device 21 measures the reflectors r21, r22, and r23 (see, for example, positions P21, P22, and P23 in FIG. 21 ), the measurement control device 10 may change the emission direction of the measurement light L2 so that the measurement light L2 is irradiated toward the positions where the measurement device 21 measures the reflectors r21, r22, and r23. In addition, after receiving the timing information and before reflectors r21, r22, and r23 are positioned at the positions where reflectors r21, r22, and r23 are measured by the measurement device 21, the measurement control device 10 may change the emission direction of the measurement light L2 so that the measurement light L2 is irradiated from the measurement device 21 toward the positions where reflectors r21, r22, and r23 are measured by the measurement device 21.

[0179] On the other hand, if the measurement light L2 is emitted toward the position where the reflectors r21, r22, and r23 are measured by the measuring device 21 before the reflectors r21, r22, and r23 are positioned at the position where the reflectors r21, r22, and r23 are measured by the measuring device 21, there is a risk that the measurement light L2 will be irradiated onto a reflector other than the reflector to be measured.

[0180] For example, assume that the reflector module r2 attached to the robot arm 410 moves along the trajectory indicated by the dashed arrow in FIG. 22 . The emission direction of the measurement light L2 from the measurement device 21 is the direction toward the position P22 where the reflector r22 is measured. In this case, the reflector r23 passes near the position P22 before the reflector r22 is positioned at the position P22. If the measurement light L2 is emitted from the measurement device 21 before the reflector r22 is positioned at the position P22, the measurement light L2 may be irradiated onto the reflector r23. In this case, the measurement result based on the measurement light L2 irradiated onto the reflector r23 may be output from the measurement device 21 as the measurement result related to the reflector r22. In other words, there is a risk of erroneous recognition of the reflector.

[0181] To prevent such erroneous recognition, the measurement start signal may include information indicating, for example, a waiting time. The waiting time may be, for example, the time from when the measurement control device 10 receives the measurement start signal until the measurement device 21 starts emitting the measurement light L2. The waiting time may be set based on the time required to control the robot arm 410 to realize the position and orientation of the TCP when measuring the reflectors r21, r22, and r23, which are determined by the calculation device 31 of the acceleration control device 30.

[0182] When the processing control device 30 transmits timing information to the measurement control device 10 in addition to the measurement start signal, the measurement start signal does not need to include information indicating, for example, a waiting time. In this case, the timing information may indicate the time when the measuring device 21 should start measurement. The time indicated by the timing information may be set based on the time when the robot arm 410 is controlled to achieve, for example, the position and orientation of the TCP determined by the calculation device 31 (i.e., the position and orientation of the TCP when measuring the reflectors r21, r22, and r23). Alternatively, the timing information may indicate the waiting time as the timing when the measuring device 21 starts measurement.

[0183] In this way, it is possible to prevent the measurement light L2 from being emitted from the measurement device 21 before the reflector to be measured by the measurement device 21 is positioned at the measurement position. As a result, it is possible to prevent the occurrence of erroneous recognition of the reflector. Note that while the measurement light L2 is being emitted from the measurement device 21, the light receiving sensor of the measurement device 21 may be turned off or a measurement value may not be calculated based on the output from the light receiving sensor until it is time for the measurement device 21 to start measurement. In this case as well, it is possible to prevent the occurrence of erroneous recognition of the reflector.

[0184] (8-2-2) Measurement Light Irradiation Method When reflectors r21, r22, and r23 are measured by the measurement device 21, the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system (see, for example, positions P21, P22, and P23 in FIG. 21 ) are calculated (estimated) based on the position and orientation of the TCP when the measurements of the reflectors r21, r22, and r23 are performed (i.e., the position of the TCP at the time of measurement), which are determined by the calculation device 31 of the processing control device 30. Hereinafter, this "position of each of the reflectors r21, r22, and r23 in the measurement coordinate system" will be referred to as the "estimated measurement position of each of the reflectors r21, r22, and r23" as appropriate.

[0185] Now, the estimated measurement positions of the reflectors r21, r22, and r23 may differ from the actual positions of the reflectors r21, r22, and r23 at the time of measurement. In this case, even if the measurement device 21 emits the measurement light L2 toward the position of the reflector to be measured among the estimated measurement positions of the reflectors r21, r22, and r23, the measurement light L2 will not be irradiated onto the reflector to be measured. In other words, the position of the reflector to be measured cannot be measured.

[0186] Therefore, the measurement device 21 may emit the measurement light L2 so that the trajectory of the measurement light L2 is a spiral trajectory centered on the position of the reflector to be measured, for example, among the estimated measurement positions of each of the reflectors r21, r22, and r23. For example, if the reflector r22 is the reflector to be measured, as shown in Fig. 23, the measurement device 21 may emit the measurement light L2 so that the trajectory is a spiral trajectory centered on position P22, which is the estimated measurement position of the reflector r22. Note that the trajectory of the measurement light L2 is not limited to a spiral trajectory, and may be, for example, a trajectory such as a raster scan.

[0187] In this way, even if the estimated measurement positions of the reflectors r21, r22, and r23 differ from the actual positions of the reflectors r21, r22, and r23 at the time of measurement, the measurement device 21 can irradiate the measurement light L2 onto the reflector to be measured. In other words, the measurement device 21 can measure the position of the reflector to be measured.

[0188] (8-2-3) Correction of Estimated Positions As described above, the estimated measured positions of the reflectors r21, r22, and r23 may differ from the actual positions of the reflectors r21, r22, and r23 at the time of measurement.

[0189] For example, the measurement device 21 may first measure the position of the reflector r22, then measure the position of the reflector r23, and finally measure the position of the reflector r21. In this case, after the measurement device 21 measures the position of the reflector r22 and before the measurement device 21 measures the position of the reflector r23, the calculation device 11 of the measurement control device 10 may compare the estimated measured position of the reflector r22 with the actual position of the reflector r22 measured by the measurement device 21. The calculation device 11 may correct the estimated measured positions of the reflectors r23 and r21 based on the comparison result. In other words, the calculation device 11, which may be referred to as an estimating unit, may correct the positions of the other reflectors of the measurement target based on the estimated position of one reflector of the measurement target and the position of the one reflector of the measurement target measured by the measurement device 21 based on the measurement light L2 irradiated onto the one reflector of the measurement target.

[0190] When the positions of the reflectors r23 and r21 are measured, the measurement control device 10 controls the direction of emission of the measurement light from the measurement device 21 based on the corrected measurement positions of the reflectors r23 and r21, thereby shortening the time required to measure the positions of the reflectors r23 and r21.

[0191] (8-2-4) Stationary Determination Even when the processing control device 30 has completed controlling the robot 41 so that the position and posture of the TCP are the same as when measurements of reflectors r21, r22, and r23 are taken, vibrations may occur in the robot arm 410, for example, due to the recoil when the mechanism constituting the robot 41 stops.

[0192] The measuring device 21 may measure the position of one of the reflectors r21, r22, and r23 that is the measurement target multiple times. The calculation device 11 of the measurement control device 10 may determine that the robot arm 410 is stationary if the variation in the multiple positions indicated by the multiple measurement results of the one reflector that is the measurement target over a predetermined period (e.g., several hundred milliseconds to several seconds) is within a predetermined range (e.g., the range of the dashed circle shown in FIG. 24 ). In this way, it is possible to suppress a decrease in the accuracy of the position measured by the measuring device 21 due to vibration of the robot arm 410. Note that the predetermined range may be set, for example, based on the allowable error in position measurement by the measuring device 21, in other words, the measurement accuracy required for position measurement by the measuring device 21.

[0193] (8-2-5) Other methods of irradiating measurement light The measurement control device 10 may control the measurement device 21 based on the estimated measurement positions of each of the reflectors r21, r22, and r23 so that the trajectory of the measurement light L2 of the measurement device 21 becomes a spiral trajectory in a range including the reflectors r21, r22, and r23, as shown in FIG. 25, for example.

[0194] (8-2-6) Measurement results When the robot 41 is operating, the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement device 21 may be converted by the calculation device 11 of the measurement control device 10 to the positions of the reflectors r21, r22, and r23 in the robot coordinate system, or may be converted by the calculation device 11 of the processing control device 30 to the positions of the reflectors r21, r22, and r23 in the robot coordinate system.

[0195] (9) Others (9-1) The end effector attached to the robot 41 may be an end effector for purposes other than machining. Examples of end effectors for purposes other than machining include a pick-up hand (specifically, a suction hand, a gripping hand, etc.) and a CMM (Coordinate Measuring Machine). The CMM may be, for example, a scanning laser probe type or an optical type that performs non-contact measurement. For example, when a CMM is attached to the robot 41 as an end effector and the CMM measures a workpiece W (see FIG. 1), the robot 41 may be referred to as a processing device, and the workpiece W may be referred to as a processing target.

[0196] (9-2) The storage device 12 of the measurement control device 10 may store one or more programs for realizing the functions of the measurement control device 10. The arithmetic device 11 may execute at least one of the one or more programs stored in the storage device 12, thereby realizing the functions of the arithmetic device 11 described above.

[0197] The storage device 32 of the machining control device 30 may store one or more programs for realizing the functions of the machining control device 30. The arithmetic device 31 may execute at least one of the one or more programs stored in the storage device 32, thereby realizing the functions of the arithmetic device 31 described above.

[0198] (9-3) Reflectors r11, r12, and r13, as well as reflectors r31, r32, and r33, for example, are referred to as "first measurement members," and reflectors r21, r22, and r23 are referred to as "second measurement members."

[0199] As explained in "(2-2) Coordinate Transformation," the first transformation matrix for transforming a position in the measurement coordinate system and a position in the robot coordinate system may be calculated based on, for example, the positions of the reflectors r11, r12, and r13 in the measurement coordinate system measured by the measurement device 21 (i.e., the positions of the first measurement members). Furthermore, as explained in "(4) Tool Center Point," the second transformation matrix for transforming the positions of the reflectors r21, r22, and r23 and the position of the TCP may be calculated based on, for example, the positions of the reflectors r31, r32, and r33 attached to the jig 91a shown in FIG. 12 (i.e., the positions of the first measurement members). Therefore, it can be said that the first transformation matrix and the second transformation matrix are based on the positions of the first measurement members.

[0200] As explained in "(5) Calculation of the Position of the TCP," the calculation device 11 of the measurement control device 10 may use a first transformation matrix based on the position of the first measurement member to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system (i.e., the positions of the second measurement member) into the positions of the reflectors r21, r22, and r23 in the robot coordinate system (i.e., the positions of the second measurement member). Furthermore, the calculation device 11 may use a second transformation matrix based on the position of the first measurement member to transform the positions of the reflectors r21, r22, and r23 in the measurement coordinate system (i.e., the positions of the second measurement member) into the position of the TCP in the measurement coordinate system.

[0201] From these, the following aspect can be derived: The calculation device 11, which may be called a calculation unit, may convert the position of the second measurement member measured by the measurement device 21 based on the position of the first measurement member measured by the measurement device 21. In this case, the communication device 13, which may be called a transmission unit, may transmit position information indicating the converted position of the second measurement member to the processing control device 30.

[0202] Furthermore, the calculation device 11, which may be referred to as a calculation unit, may calculate conversion information for converting the position of the second measurement member measured by the measurement device 21 based on the position of the first measurement member measured by the measurement device 21. In this case, the communication device 13, which may be referred to as a transmission unit, may transmit the calculated conversion information to the processing control device 30.

[0203] (9-4) When the measuring device 21 measures, for example, the reflector r11 attached to the jig 90, the measurement result is output from the measuring device 21 to the measurement control device 10. Similarly, when the measuring device 21 measures the reflectors r21, r22, and r23 attached to the robot arm 410 of the robot 41, the measurement result is output from the measuring device 21 to the measurement control device 10.

[0204] From these findings, the following aspect can be derived. A measurement method related to the measurement system 2 may include the following: a measurement device 21 irradiating a first member attached to a jig 90 that holds a processing target with measurement light, receiving measurement light generated from the first member, and outputting first-member position information indicating the position of the first member; and a measurement device 21 irradiating a second member attached to a robot arm 410 of a robot 41 that can process the processing target with measurement light, receiving measurement light generated from the second member, and outputting second-member position information indicating the position of the second member. Note that the reflector r11 is referred to as the first member, and the reflectors r21, r22, and r23 are referred to as the second members. The first-member position information (i.e., the position of the reflector r11) and the second-member position information (i.e., the positions of each of the reflectors r21, r22, and r23) may be used to control the movement of the robot arm 410 of the robot 41, as described above.

[0205] Furthermore, as explained in "(3-1) Method using a stereo camera," the measurement of the measuring device 21 may be controlled based on the measurement results from the stereo camera 22. Here, controlling the measurement of the measuring device 21 may include controlling the direction of the measurement light (e.g., the irradiation direction). From these, the following aspect can be derived. A measurement method related to the measurement system 2 including the measuring device 21 and the stereo camera 22 may include the stereo camera 22, which may be called an imaging device, capturing images of a first member and a second member, controlling the irradiation direction of the measurement light irradiated from the measuring device 21 onto the first member based on the output from the stereo camera 22, and controlling the irradiation direction of the measurement light irradiated from the measuring device 21 onto the second member based on the output from the stereo camera 22.

[0206] (9-5) The positional relationship between the TCP and the reflectors, such as reflectors r21, r22, and r23, does not have to be calculated. In this case, the positional relationship between the TCP and the reflectors may be input by, for example, a user of the system 1. In other words, the positional relationship between the TCP and the reflectors may be memorized in the measurement system 2 and / or the system 1, which may be referred to as a processing system.

[0207] <Supplementary Notes> The following supplementary notes are further disclosed regarding the above-described embodiment.

[0208] (Supplementary Note 1) A measurement method in a measurement system including a measurement device capable of irradiating measurement light onto a first member attached to at least one of a workpiece and a jig that holds the workpiece, and a second member attached to a movable part of a processing device capable of processing the workpiece, the measurement device being capable of measuring the position of each of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measurement device, and a measurement control device that controls the measurement device, the measurement method including: the measurement control device converting, by the measurement device, the position of the second member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated onto the second member, to the position of the second member in the processing coordinate system, based on first position information indicating the position of the first member in the measurement coordinate system, measured by the measurement device based on the measurement light irradiated onto the first member, and second position information indicating the position of the first member in a processing coordinate system that is a coordinate system related to the processing device; and the measurement control device transmitting, by the measurement control device, third position information indicating the position of the second member in the converted processing coordinate system, to the processing control device that controls the processing device.

[0209] (Supplementary Note 2) A machining method in a machining system including a machining device capable of machining a machining target, a measurement device capable of irradiating measurement light onto a first member attached to at least one of the machining target and a jig that holds the machining target, and a second member attached to a movable portion of the machining device, the measurement device being capable of measuring the positions of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measurement device, a measurement control device that controls the measurement device, and a machining control device that controls movement of the machining device under the machining coordinate system, wherein the measurement control device converts the position of the second member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated onto the second member into a position of the second member in the machining coordinate system, based on first position information indicating the position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated onto the first member, and second position information indicating the position of the first member in a machining coordinate system that is a coordinate system related to the machining device; the measurement control device transmitting third position information indicating the position of the second member in the converted machining coordinate system to the machining control device; and the machining control device controlling the machining device under the machining coordinate system based on the position of the second member in the machining coordinate system indicated by the third position information.

[0210] (Supplementary Note 3) A measurement method in a measurement system including a measurement device capable of irradiating measurement light onto a first member attached to at least one of a workpiece and a jig that holds the workpiece, and a second member attached to a movable part of a processing device capable of processing the workpiece, the measurement device being capable of measuring the positions of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measurement device, and a measurement control device that controls the measurement device, wherein the measurement control device calculates first conversion information for converting a position in the measurement coordinate system and a position in the processing coordinate system based on the position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated onto the first member, and the position of the first member in a processing coordinate system that is a coordinate system related to the processing device and input via an input device of the measurement control device; and the measurement control device transmits the first conversion information to a processing control device that controls movement of the processing device under the processing coordinate system that is the coordinate system related to the processing device. and the measurement control device controls the measurement of the second member by the measurement device based on seventh position information that indicates a measurement position in the measurement coordinate system for measuring the second member, the measurement position having been converted based on the first conversion information in the processing control device.

[0211] (Supplementary Note 4) A machining method in a machining system including a machining device capable of machining a workpiece, a measurement device capable of irradiating measurement light onto the workpiece and / or a first member attached to a jig that holds the workpiece, and a second member attached to a movable portion of the machining device, the measurement device being capable of measuring the positions of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measurement device, a measurement control device that controls the measurement device, and a machining coordinate system that is a coordinate system related to the machining device, wherein the measurement control device calculates first conversion information for converting a position in the measurement coordinate system to a position in the machining coordinate system, based on the position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated onto the first member, and the position of the first member in the machining coordinate system input via an input device of the measurement control device, and the measurement control device transmits the first conversion information to the machining control device. a machining control device converting a measurement position in the machining coordinate system for measuring the second member into a measurement position in the measurement coordinate system based on the first conversion information; a machining control device transmitting seventh position information indicating the converted measurement position in the measurement coordinate system to the measurement control device; and a measurement control device controlling measurement of the second member by the measurement device based on the measurement position in the measurement coordinate system indicated by the seventh position information.

[0212] (Appendix 5) A measurement method in a measurement system including a measurement device capable of measuring a first measurement member and a second measurement member attached to a processing device, and a measurement control device that controls the measurement device, the measurement control device converting the position of the second measurement member measured by the measurement device based on the position of the first measurement member measured by the measurement device, and the measurement control device transmitting position information indicating the converted position of the second measurement member to a processing control device that controls the processing device.

[0213] (Supplementary Note 6) A measurement method in a measurement system including a measurement device capable of measuring a first measurement member and a second measurement member attached to a processing device, and a measurement control device that controls the measurement device, the measurement control device calculating conversion information for converting the position of the second measurement member measured by the measurement device based on the position of the first measurement member measured by the measurement device, and the measurement control device transmitting the conversion information to a processing control device that controls the processing device.

[0214] (Supplementary Note 7) A measurement method including: a measurement device receiving measurement light generated from a first member attached to a jig that holds a processing object when the measurement light is irradiated onto the first member, and outputting first member position information indicating the position of the first member; and the measurement device receiving measurement light generated from a second member attached to a movable part of a processing device that can process the processing object when the measurement light is irradiated onto the second member, and outputting second member position information indicating the position of the second member, wherein the first member position information and the second member position information outputted from the measurement device are used to control movement of the movable part of the processing device.

[0215] (Supplementary Note 8) The measurement method according to Supplementary Note 7 includes: an imaging device capturing images of the first member and the second member; controlling the direction of irradiation of measurement light irradiated from the measurement device to the first member based on an output from the imaging device; and controlling the direction of irradiation of measurement light irradiated from the measurement device to the second member based on an output from the imaging device.

[0216] The present invention is not limited to the above-described embodiments, but can be modified as appropriate within the scope of the claims and the gist or idea of ​​the invention that can be read from the entire specification, and measurement systems, processing systems, measurement methods, and processing methods that involve such modifications are also included in the technical scope of the present invention.

[0217] REFERENCE SIGNS LIST 1, 1a... system, 2... measurement system, 10... measurement control device, 21... measurement device, 22... stereo camera, 23, 24... sensor, 30... processing control device, 41, 42, 43... robot, 90... jig, W... workpiece, r11, r12, r13, r21, r22, r23... reflector

Claims

1. a measuring device capable of irradiating a measurement light onto a workpiece, a first member attached to at least one of a jig for holding the workpiece, and a second member attached to a movable portion of a processing device capable of processing the workpiece, the measuring device being capable of measuring the position of each of the first member and the second member in a measurement coordinate system which is a coordinate system related to the measuring device; A measurement control device that controls the measuring device; A measurement system comprising: The measurement control device includes: a calculation unit that converts the position of the second member in the measurement coordinate system, measured by the measurement device based on the measurement light irradiated onto the second member, into the position of the second member in the processing coordinate system, based on first position information indicating the position of the first member in the measurement coordinate system, measured by the measurement device based on the measurement light irradiated onto the first member, and second position information indicating the position of the first member in a processing coordinate system, which is a coordinate system related to the processing device; and a transmission unit capable of transmitting third position information indicating a position of the second member in the converted machining coordinate system to a machining control device that controls the machining device; Equipped Measurement system.

2. the measurement system includes an imaging device capable of imaging at least one of the first member and the second member; The measurement control device controls the measurement of the measurement device with respect to at least one of the first member and the second member based on an imaging result by the imaging device. The measurement system of claim 1 .

3. the measurement system includes a first measurement device as the measurement device, and a second measurement device capable of measuring at least one of the first member and the second member with lower accuracy than the first measurement device; The measurement control device controls the measurement of the first measuring device with respect to at least one of the first member and the second member based on a measurement result by the second measuring device. The measurement system of claim 1 .

4. The calculation unit is capable of calculating the position in the processing coordinate system of each of the plurality of second members that are respectively attached to the plurality of processing devices that are capable of processing the workpiece. The measurement system of claim 1 .

5. The measurement control device includes an input device, The calculation unit calculates first conversion information for converting a position in the measurement coordinate system and a position in the machining coordinate system based on the first position information and the second position information input via the input device. The measurement system of claim 1 .

6. The measurement control device includes an input device, the calculation unit calculates first conversion information for converting a position in the measurement coordinate system and a position in the machining coordinate system based on the first position information and the second position information input via the input device; The first transformation information is used in common to calculate the position of each of the plurality of second members in the machining coordinate system. The measurement system of claim 4.

7. The measurement control device includes a receiving unit that receives a measurement start signal from the processing control device to cause the measuring device to start measurement. The measurement system of claim 1 .

8. The measurement control device changes an emission direction of the measurement light so that the measurement light is irradiated toward a position where the second member is measured by the measurement device after receiving the measurement start signal and before the second member is positioned at a position where the second member is measured by the measurement device. The measurement system of claim 7.

9. The receiving unit receives timing information indicating a timing to start measurement from the processing control device. The measurement system of claim 7.

10. After receiving the timing information, the measurement control device changes the emission direction of the measurement light so that the measurement light is irradiated toward the position where the second member is measured by the measurement device before the second member is positioned at the position where the second member is measured by the measurement device. The measurement system of claim 9.

11. the position of the second member is a predetermined position in the movable portion with respect to a reference portion of the processing device; The second member is a reflector capable of reflecting the measurement light. The measurement system of claim 1 .

12. The reference portion is the tool center point. The measurement system of claim 11.

13. the measurement control device includes an estimation unit capable of estimating a position of the second member that moves in association with the operation of the processing device during the operation of the processing device, The measurement control device changes a direction of the measurement light so that the measurement light is irradiated onto the position of the second member estimated by the estimation unit. The measurement system of claim 1 .

14. The measuring device includes a tracking device capable of tracking the position of the second member that moves in association with the operation of the processing device. The measurement system of claim 1 .

15. the measurement control device includes an estimation unit capable of estimating a position of the second member that moves in association with the operation of the processing device during the operation of the processing device, The estimation unit corrects the position of the second member based on the estimated position of the second member and the position of the second member measured by the measurement device based on the measurement light irradiated onto the second member. The measurement system of claim 14.

16. The first member includes at least three reflectors capable of reflecting the measurement light. The measurement system of claim 1 .

17. The first member is attached to at least one of a position indicating a reference for a position of the workpiece and a position indicating a reference for a position of the jig. The measurement system of claim 1 .

18. the calculation unit calculates second conversion information for converting between the position of the second member and the position of the tool center point based on fourth position information indicating the position of the second member measured by the measurement device based on the measurement light irradiated onto the second member, when a tool center point of the processing device is located at a predetermined position, and fifth position information indicating the position of the tool center point corresponding to the predetermined position; the calculation unit converts, based on the first position information and the second position information, a position of the second member in the measurement coordinate system, which is measured by the measurement device based on the measurement light irradiated onto the second member, in a state in which the tool center point is located at a position different from the predetermined position, into a position of the second member in the machining coordinate system; The transmission unit transmits the second conversion information and the third position information indicating a position of the second member in the converted machining coordinate system to the machining control device. The measurement system of claim 1 .

19. the calculation unit calculates second conversion information for converting between the position of the second member and the position of the tool center point based on fourth position information indicating the position of the second member measured by the measurement device based on the measurement light irradiated onto the second member, with a tool center point of the processing device being located at a predetermined position; the calculation unit converts, based on the first position information and the second position information, a position of the second member in the measurement coordinate system, which is measured by the measurement device based on the measurement light irradiated onto the second member, in a state in which the tool center point is located at a position different from the predetermined position, into a position of the second member in the machining coordinate system; The calculation unit converts the position of the second member in the converted machining coordinate system into the position of the tool center point based on the second conversion information, The transmitting unit transmits sixth position information indicating the converted position of the tool center point to the processing control device instead of transmitting the third position information to the processing control device. The measurement system of claim 1 .

20. The measurement system includes a first measurement device as the measurement device and a third measurement device capable of measuring a position of a tool center point of the processing device, the calculation unit calculates, in a state in which the third measurement device is measuring the position of the tool center point, second conversion information for converting the position of the second member and the position of the tool center point based on the position of the second member measured by the first measurement device based on the measurement light irradiated onto the second member and the position of the tool center point measured by the third measurement device; the calculation unit converts, based on the first position information and the second position information, the position of the second member in the measurement coordinate system, which is measured by the first measurement device based on the measurement light irradiated onto the second member, into the position of the second member in the machining coordinate system in a state in which the third measurement device has not measured the position of the tool center point; The transmission unit transmits the second conversion information and the third position information indicating a position of the second member in the converted machining coordinate system to the machining control device. The measurement system of claim 1 .

21. The measurement system includes a first measurement device as the measurement device and a third measurement device capable of measuring a position of a tool center point of the processing device, the calculation unit converts, based on the first position information and the second position information, the position of the second member in the measurement coordinate system, which is measured by the first measurement device based on the measurement light irradiated onto the second member, into the position of the second member in the machining coordinate system in a state in which the third measurement device has not measured the position of the tool center point; the calculation unit converts the position of the second member in the converted machining coordinate system into the position of the tool center point based on the position of the second member measured by the first measurement device based on the measurement light irradiated onto the second member and the position of the tool center point measured by the third measurement device, while the third measurement device is measuring the position of the tool center point; The transmitting unit transmits sixth position information indicating the position of the converted tool center point to the processing control device instead of transmitting the third position information to the processing control device. The measurement system of claim 1 .

22. the measuring device is further capable of measuring a position of a tool center point of the processing device that moves together with the movable part by irradiating the measuring light onto a reference member that moves in accordance with the position of the movable part and measuring the position of the reference member, the calculation unit calculates second conversion information for converting the position of the second member and the position of the tool center point based on the position of the tool center point and the position of the second member measured by the measurement device based on the measurement light irradiated onto the reference member and the second member, respectively, in a state in which the positional relationship between the reference member and the second member is a predetermined relationship; the calculation unit converts, based on the first position information and the second position information, a position of the second member in the measurement coordinate system, which is measured by the measurement device based on the measurement light irradiated onto the second member, into a position of the second member in the processing coordinate system in a state in which the positional relationship is different from the predetermined relationship; The transmission unit transmits the second conversion information and the third position information indicating a position of the second member in the converted machining coordinate system to the machining control device. The measurement system of claim 1 .

23. the measuring device is further capable of measuring a position of a tool center point of the processing device that moves together with the movable part by irradiating the measuring light onto a reference member that moves in accordance with the position of the movable part and measuring the position of the reference member, the calculation unit converts, based on the first position information and the second position information, a position of the second member in the measurement coordinate system measured by the first measurement device based on the measurement light irradiated onto the second member in a state in which a positional relationship between the position of the reference member and the second member is different from a predetermined relationship, into a position of the second member in the processing coordinate system; the calculation unit converts the position of the second member in the converted machining coordinate system into the position of the tool center point based on the position of the tool center point and the position of the second member measured by the measurement device based on the measurement light irradiated onto each of the reference member and the second member while the positional relationship is the predetermined relationship; The transmitting unit transmits sixth position information indicating the position of the converted tool center point to the processing control device instead of transmitting the third position information to the processing control device. The measurement system of claim 1 .

24. a measuring device capable of irradiating a measurement light onto a workpiece, a first member attached to at least one of a jig for holding the workpiece, and a second member attached to a movable portion of a processing device capable of processing the workpiece, the measuring device being capable of measuring the position of each of the first member and the second member in a measurement coordinate system which is a coordinate system related to the measuring device; A measurement control device that controls the measuring device; A measurement system comprising: The measurement control device includes: An input device; a first calculation unit that calculates first conversion information for converting a position in the measurement coordinate system and a position in the machining coordinate system based on a position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated onto the first member and a position of the first member in a machining coordinate system that is a coordinate system related to the machining device and inputted via the input device; a first transmission unit capable of transmitting the first conversion information to a processing control device that controls a movement of the processing device under a processing coordinate system that is a coordinate system related to the processing device; Equipped with The measurement control device controls the measurement of the second member by the measurement device based on seventh position information indicating a measurement position in the measurement coordinate system for measuring the second member, which is converted based on the first conversion information in the processing control device. Measurement system.

25. The seventh position information indicates, as a measurement position in the measurement coordinate system, a position in the measurement coordinate system at which the measurement device starts measuring the second member. The measurement system according to claim 24.

26. The measurement control device receives a measurement start signal for causing the measuring device to start measurement from the processing control device.

25. The measurement system of claim 24.

27. After receiving the measurement start signal, the measurement control device changes the emission direction of the measurement light so that the measurement light is irradiated toward the measurement position in the measurement coordinate system before the second member is positioned at the measurement position in the measurement coordinate system indicated by the seventh position information.

27. The measurement system of claim 26.

28. The measurement control device receives timing information indicating a timing for causing the measuring device to start measurement from the processing control device.

25. The measurement system of claim 24.

29. After receiving the timing information, the measurement control device changes the emission direction of the measurement light so that the measurement light is irradiated toward the measurement position in the measurement coordinate system before the second member is positioned at the measurement position in the measurement coordinate system indicated by the seventh position information.

29. The measurement system of claim 28.

30. the position of the second member is a predetermined position in the movable portion with respect to a reference portion of the processing device; The second member is a reflector capable of reflecting the measurement light.

25. The measurement system of claim 24.

31. The reference point is the tool center point.

31. The measurement system of claim 30.

32. A reflector module having at least three reflectors is disposed at a predetermined position relative to a reference portion of the processing device.

25. The measurement system of claim 24.

33. the measurement control device includes an estimation unit capable of estimating a position of the second member that moves in association with the operation of the processing device during the operation of the processing device, The measurement control device changes a direction of the measurement light so that the measurement light is irradiated onto the estimated position of the second member.

25. The measurement system of claim 24.

34. The measuring device includes a tracking device capable of tracking the position of the second member that moves in association with the operation of the processing device.

25. The measurement system of claim 24.

35. The measuring device includes a tracking device capable of tracking the position of the second member that moves in association with the operation of the processing device.

34. The measurement system of claim 33.

36. The estimation unit corrects the position of the second member based on the estimated position of the second member and the position of the second member measured by the measurement device based on the measurement light irradiated onto the second member.

36. The measurement system of claim 35.

37. The first member includes at least three reflectors capable of reflecting the measurement light.

25. The measurement system of claim 24.

38. The measurement system includes an imaging device capable of imaging at least one of the first member and the second member, The measurement control device controls the measurement of the measurement device with respect to at least one of the first member and the second member based on an imaging result by the imaging device.

25. The measurement system of claim 24.

39. The measurement system includes a first measurement device as the measurement device, and a second measurement device capable of measuring at least one of the first member and the second member with lower accuracy than the first measurement device, The measurement control device controls the measurement of the first measuring device with respect to at least one of the first member and the second member based on a measurement result by the second measuring device.

25. The measurement system of claim 24.

40. A plurality of the second members are attached to a plurality of the processing devices capable of processing the processing object, respectively; The first transformation information is used in common to calculate the position of each of the plurality of second members in the machining coordinate system.

25. The measurement system of claim 24.

41. The first member is attached to at least one of a position indicating a reference for a position of the workpiece and a position indicating a reference for a position of the jig.

25. The measurement system of claim 24.

42. the first calculation unit calculates second conversion information for converting between the position of the second member and the position of the tool center point based on fourth position information indicating the position of the second member measured based on the measurement light irradiated onto the second member by the measurement device while a tool center point of the processing device is located at a predetermined position, and fifth position information indicating the position of the tool center point corresponding to the predetermined position; The first transmission unit transmits, in addition to the first conversion information, the second conversion information and eighth position information indicating a position of the second member measured by the measurement device based on the measurement light irradiated onto the second member in a state in which the tool center point is located at a position different from the predetermined position, to the machining control device.

25. The measurement system of claim 24.

43. the first calculation unit calculates second conversion information for converting between the position of the second member and the position of the tool center point based on fourth position information indicating the position of the second member measured by the measuring device based on the measurement light irradiated onto the second member when a tool center point of the processing device is located at a predetermined position, and converts the position of the second member measured by the measuring device based on the measurement light irradiated onto the second member when the tool center point is located at a position different from the predetermined position, into the position of the tool center point based on the second conversion information; The first transmission unit transmits, in addition to the first conversion information, ninth position information indicating the converted position of the tool center point to the processing control device.

25. The measurement system of claim 24.

44. The measurement system includes a first measurement device as the measurement device and a third measurement device capable of measuring a position of a tool center point of the processing device, the first calculation unit calculates, in a state in which the third measurement device is measuring the position of the tool center point, second conversion information for converting the position of the second member and the position of the tool center point based on the position of the second member measured by the first measurement device based on the measurement light irradiated onto the second member and the position of the tool center point measured by the third measurement device; The first transmission unit transmits, in addition to the first conversion information, to the processing control device, the second conversion information and eighth position information indicating a position of the second member measured by the first measuring device based on the measurement light irradiated onto the second member in a state in which the third measuring device has not measured the tool center point.

25. The measurement system of claim 24.

45. The measurement system includes a first measurement device as the measurement device and a third measurement device capable of measuring a position of a tool center point of the processing device, the first calculation unit converts the position of the second member measured by the first measurement device based on the measurement light irradiated onto the second member, into the position of the tool center point, in a state in which the third measurement device is not measuring the tool center point, based on the position of the second member measured by the first measurement device based on the measurement light irradiated onto the second member and the position of the tool center point measured by the third measurement device, in a state in which the third measurement device is measuring the tool center point; The first transmission unit transmits, in addition to the first conversion information, ninth position information indicating a position of the converted tool center point to the processing control device.

25. The measurement system of claim 24.

46. the measuring device is further capable of measuring a position of a tool center point of the processing device that moves together with the movable part by irradiating the measuring light onto a reference member that moves in accordance with the position of the movable part and measuring the position of the reference member, the first calculation unit calculates second conversion information for converting the position of the second member and the position of the tool center point based on the position of the tool center point and the position of the second member measured by the measurement device based on the measurement light irradiated onto the reference member and the second member, respectively, in a state in which the positional relationship between the reference member and the second member is a predetermined relationship; The first transmission unit transmits, in addition to the first conversion information, the third conversion information and eighth position information indicating a position of the second member measured by the measurement device based on the measurement light irradiated onto the second member in a state in which the positional relationship is different from the predetermined relationship, to the processing control device.

25. The measurement system of claim 24.

47. the measuring device is further capable of measuring a position of a tool center point of the processing device that moves together with the movable part by irradiating the measuring light onto a reference member that moves in accordance with the position of the movable part and measuring the position of the reference member, the first calculation unit converts the position of the second member measured by the measurement device based on the measurement light irradiated to the second member into the position of the tool center point in a state in which the positional relationship between the reference member and the second member is a predetermined relationship, based on the position of the tool center point and the position of the second member measured by the measurement device based on the measurement light irradiated to each of the reference member and the second member, in a state in which the positional relationship is different from the predetermined relationship; The first transmission unit transmits, in addition to the first conversion information, ninth position information indicating a position of the converted tool center point to the processing control device.

25. The measurement system of claim 24.

48. A measurement system according to any one of claims 1 to 23, The processing device capable of processing the processing object; a machining control device that controls the movement of the machining device under the machining coordinate system; Equipped with The machining control device controls the machining device under the machining coordinate system based on the position of the second member in the machining coordinate system indicated by the third position information. Processing system.

49. The processing control device controls a processing position by the processing device based on the third position information.

49. The processing system of claim 48.

50. The processing control device calibrates an origin position of the processing device based on the third position information.

49. The processing system of claim 48.

51. the calculation unit calculates second conversion information for converting between the position of the second member and the position of the tool center point based on fourth position information indicating the position of the second member measured by the measurement device based on the measurement light irradiated onto the second member, when a tool center point of the processing device is located at a predetermined position, and fifth position information indicating the position of the tool center point corresponding to the predetermined position; the calculation unit converts, based on the first position information and the second position information, a position of the second member in the measurement coordinate system, which is measured by the measurement device based on the measurement light irradiated onto the second member, in a state in which the tool center point is located at a position different from the predetermined position, into a position of the second member in the machining coordinate system; the transmission unit transmits the second conversion information and the third position information indicating a position of the second member in the converted machining coordinate system to the machining device control device; The machining control device converts the position of the second member in the converted machining coordinate system, which is indicated by the third position information, into the position of the tool center point based on the second conversion information, and controls the movement of the movable part based on the converted position of the tool center point to move the position of the tool center point.

49. The processing system of claim 48.

52. the calculation unit calculates second conversion information for converting between the position of the second member and the position of the tool center point based on fourth position information indicating the position of the second member measured by the measurement device based on the measurement light irradiated onto the second member, with a tool center point of the processing device being located at a predetermined position; the calculation unit converts, based on the first position information and the second position information, a position of the second member in the measurement coordinate system, which is measured by the measurement device based on the measurement light irradiated onto the second member, in a state in which the tool center point is located at a position different from the predetermined position, into a position of the second member in the machining coordinate system; The calculation unit converts the position of the second member in the converted machining coordinate system into the position of the tool center point based on the second conversion information, the transmitting unit transmits sixth position information indicating the converted position of the tool center point to the processing control device, instead of transmitting the third position information to the processing control device; The machining control device controls the movement of the movable part based on the sixth position information to move the tool center point.

49. The processing system of claim 48.

53. The processing system includes a first measuring device as the measuring device, and a third measuring device capable of measuring a position of a tool center point of the processing device, the calculation unit calculates, in a state in which the third measurement device is measuring the position of the tool center point, second conversion information for converting the position of the second member and the position of the tool center point based on the position of the second member measured by the first measurement device based on the measurement light irradiated onto the second member and the position of the tool center point measured by the third measurement device; the calculation unit converts, based on the first position information and the second position information, the position of the second member in the measurement coordinate system, which is measured by the first measurement device based on the measurement light irradiated onto the second member, into the position of the second member in the machining coordinate system in a state in which the third measurement device has not measured the position of the tool center point; the transmission unit transmits the second conversion information and third position information indicating a position of the second member in the converted machining coordinate system to the machining control device; The machining control device converts the position of the second member in the converted machining coordinate system, which is indicated by the third position information, into the position of the tool center point based on the second conversion information, and controls the movement of the movable part based on the converted position of the tool center point to move the position of the tool center point.

49. The processing system of claim 48.

54. The processing system includes a first measuring device as the measuring device, and a third measuring device capable of measuring a position of a tool center point of the processing device, the calculation unit converts, based on the first position information and the second position information, the position of the second member in the measurement coordinate system, which is measured by the first measurement device based on the measurement light irradiated onto the second member, into the position of the second member in the machining coordinate system in a state in which the third measurement device has not measured the position of the tool center point; the calculation unit converts the position of the second member in the converted machining coordinate system into the position of the tool center point based on the position of the second member measured by the first measurement device based on the measurement light irradiated onto the second member and the position of the tool center point measured by the third measurement device, while the third measurement device is measuring the position of the tool center point; the transmitting unit transmits sixth position information indicating the converted position of the tool center point to the processing control device, instead of transmitting the third position information to the processing control device; The machining control device controls the movement of the movable part based on the sixth position information to move the tool center point.

49. The processing system of claim 48.

55. the measuring device is further capable of measuring a position of a tool center point of the processing device that moves together with the movable part by irradiating a reference member that moves together with the movable part with the measurement light and measuring a position of the reference part; the calculation unit calculates second conversion information for converting the position of the second member and the position of the tool center point based on the position of the tool center point and the position of the second member measured by the measurement device based on the measurement light irradiated onto the reference member and the second member, respectively, in a state in which the positional relationship between the reference member and the second member is a predetermined relationship; the calculation unit converts, based on the first position information and the second position information, a position of the second member in the measurement coordinate system, which is measured by the measurement device based on the measurement light irradiated onto the second member, into a position of the second member in the processing coordinate system in a state in which the positional relationship is different from the predetermined relationship; the transmission unit transmits the second conversion information and the third position information indicating a position of the second member in the converted machining coordinate system to the machining control device; The machining control device converts the position of the second member in the converted machining coordinate system, which is indicated by the third position information, into the position of the tool center point based on the second conversion information, and controls the movement of the movable part based on the converted position of the tool center point to control the machining device to move the position of the tool center point.

49. The processing system of claim 48.

56. the measuring device is further capable of measuring a position of a tool center point of the processing device that moves together with the movable part by irradiating a measurement light onto a reference member that moves together with the movable part and measuring a position of the reference member, the calculation unit converts, based on the first position information and the second position information, a position of the second member in the measurement coordinate system measured by the first measurement device based on the measurement light irradiated onto the second member in a state in which a positional relationship between the position of the reference member and the second member is different from a predetermined relationship, into a position of the second member in the processing coordinate system; the calculation unit converts the converted position of the second member in the processing control system into the position of the tool center point based on the position of the tool center point and the position of the second member measured by the measurement device based on the measurement light irradiated onto each of the reference member and the second member, while the positional relationship is a predetermined positional relationship; the transmitting unit transmits sixth position information indicating the converted position of the tool center point to the processing control device, instead of transmitting the third position information to the processing control device; The processing control device controls the movement of the movable part based on the sixth position information to move the position of the tool center point.

49. The processing system of claim 48.

57. A measurement system according to any one of claims 24 to 47; The processing device capable of processing the processing object; a machining control device that controls the movement of the machining device under the machining coordinate system; Equipped with The processing control device includes: a second calculation unit that converts a measurement position in the machining coordinate system for measuring the second member into a measurement position in the measurement coordinate system based on the first conversion information; a second transmission unit that transmits to the measurement control device seventh position information indicating the measurement position in the converted measurement coordinate system; Equipped Processing system.

58. the first calculation unit calculates second conversion information for converting between the position of the second member and the position of the tool center point based on fourth position information indicating the position of the second member measured based on the measurement light irradiated onto the second member by the measurement device while a tool center point of the processing device is located at a predetermined position, and fifth position information indicating the position of the tool center point corresponding to the predetermined position; the first transmission unit transmits, in addition to the first conversion information, to the machining control device, the second conversion information and eighth position information indicating a position of the second member measured by the measurement device based on the measurement light irradiated onto the second member in a state in which the tool center point is located at a position different from the predetermined position; The machining control device converts the position of the second member indicated by the eighth position information into the position of the tool center point based on the second conversion information, and controls the movement of the movable part based on the converted position of the tool center point to move the position of the tool center point.

58. The processing system of claim 57.

59. the first calculation unit calculates second conversion information for converting between the position of the second member and the position of the tool center point based on fourth position information indicating the position of the second member measured by the measuring device based on the measurement light irradiated onto the second member when a tool center point of the processing device is located at a predetermined position, and converts the position of the second member measured by the measuring device based on the measurement light irradiated onto the second member when the tool center point is located at a position different from the predetermined position, into the position of the tool center point based on the second conversion information; the first transmission unit transmits, in addition to the first conversion information, ninth position information indicating a position of the converted tool center point to the machining control device; The machining control device controls the movement of the movable part based on the position of the tool center point indicated by the ninth position information, to move the tool center point.

58. The processing system of claim 57.

60. The processing system includes a first measuring device as the measuring device, and a third measuring device capable of measuring a position of a tool center point of the processing device, the first calculation unit calculates, in a state in which the third measurement device is measuring the position of the tool center point, second conversion information for converting the position of the second member and the position of the tool center point based on the position of the second member measured by the first measurement device based on the measurement light irradiated onto the second member and the position of the tool center point measured by the third measurement device; the first transmission unit transmits, in addition to the first conversion information, the second conversion information and eighth position information indicating a position of the second member measured by the first measuring device based on the measurement light irradiated onto the second member in a state in which the third measuring device has not measured a position of the tool center point, to the machining control device; The machining control device converts the position of the second member indicated by the eighth position information into the position of the tool center point based on the second conversion information, and controls the movement of the movable part based on the converted position of the tool center point to move the position of the tool center point.

58. The processing system of claim 57.

61. The processing system includes a first measuring device as the measuring device, and a third measuring device capable of measuring a position of a tool center point of the processing device, the first calculation unit converts the position of the second member measured by the first measurement device based on the measurement light irradiated onto the second member, into the position of the tool center point, in a state in which the third measurement device is not measuring the tool center point, based on the position of the second member measured by the first measurement device based on the measurement light irradiated onto the second member and the position of the tool center point measured by the third measurement device, in a state in which the third measurement device is measuring the tool center point; the first transmission unit transmits, in addition to the first conversion information, ninth position information indicating a position of the converted tool center point to the machining control device; The processing control device controls the movement of the movable part based on the ninth position information to move the tool center point.

58. The processing system of claim 57.

62. the measurement device is further capable of measuring a position of a tool center point of the processing device that moves together with the movable part by irradiating the measurement light onto a reference member that moves together with the movable part and measuring a position of the reference member, the first calculation unit calculates second conversion information for converting the position of the second member and the position of the tool center point based on the position of the tool center point and the position of the second member measured by the measurement device based on the measurement light irradiated onto the reference member and the second member, respectively, in a state in which the positional relationship between the reference member and the second member is a predetermined relationship; the first transmission unit transmits, in addition to the first conversion information, the second conversion information and eighth position information indicating a position of the second member measured by the measurement device based on the measurement light irradiated onto the second member in a state in which the positional relationship is different from the predetermined relationship, to the processing control device; The machining control device converts the position of the second member indicated by the eighth position information into the position of the tool center point based on the second conversion information, and controls the movement of the movable part based on the converted position of the tool center point to control the machining device to move the position of the tool center point.

58. The processing system of claim 57.

63. the measurement device is further capable of measuring a position of a tool center point of the processing device that moves together with the movable part by irradiating the measurement light onto a reference member that moves together with the movable part and measuring a position of the reference member, the first calculation unit converts the position of the second member measured by the measurement device based on the measurement light irradiated to the second member into the position of the tool center point in a state in which the positional relationship between the reference member and the second member is a predetermined relationship, based on the position of the tool center point and the position of the second member measured by the measurement device based on the measurement light irradiated to each of the reference member and the second member, in a state in which the positional relationship is different from the predetermined relationship; the first transmission unit transmits, in addition to the first conversion information, ninth position information indicating a position of the converted tool center point to the machining control device; The processing control device controls the movement of the movable part based on the ninth position information to move the position of the tool center point.

58. The processing system of claim 57.

64. A measuring device capable of measuring a first measuring member and a second measuring member attached to the processing device; A measurement control device that controls the measuring device; A measurement system comprising: The measurement control device includes: a calculation unit that converts a position of the second measurement member measured by the measurement device based on a position of the first measurement member measured by the measurement device; a transmitting unit capable of transmitting position information indicating a position of the converted second measurement member to a processing control device that controls the processing device; Equipped Measurement system.

65. A measuring device capable of measuring a first measuring member and a second measuring member attached to the processing device; A measurement control device that controls the measuring device; A measurement system comprising: The measurement control device includes: a calculation unit that calculates conversion information for converting the position of the second measurement member measured by the measurement device based on the position of the first measurement member measured by the measurement device; A transmission unit capable of transmitting the conversion information to a processing control device that controls the processing device; Equipped Measurement system.

66. A measurement method in a measurement system including a measurement device capable of irradiating measurement light to a workpiece and a first member attached to at least one of a jig that holds the workpiece, and a second member attached to a movable part of a processing device capable of processing the workpiece, the measurement device being capable of measuring the position of each of the first member and the second member in a measurement coordinate system that is a coordinate system related to the measurement device, and a measurement control device that controls the measurement device, the measurement control device converts the position of the second member in the measurement coordinate system, measured by the measurement device based on the measurement light irradiated onto the second member, into the position of the second member in the processing coordinate system, based on first position information indicating the position of the first member in the measurement coordinate system, measured by the measurement device based on the measurement light irradiated onto the first member, and second position information indicating the position of the first member in a processing coordinate system, which is a coordinate system related to the processing device; the measurement control device transmits third position information indicating a position of the second member in the converted machining coordinate system to a machining control device that controls the machining device; Measurement methods including.

67. A processing method in a processing system including a processing device capable of processing a workpiece, a measuring device capable of irradiating measurement light to the workpiece and a first member attached to at least one of a jig holding the workpiece, and a second member attached to a movable part of the processing device, the measuring device being capable of measuring the positions of the first member and the second member in a measurement coordinate system which is a coordinate system related to the measuring device, a measurement control device controlling the measuring device, and a processing control device controlling movement of the processing device under the processing coordinate system, the measurement control device converts the position of the second member in the measurement coordinate system, measured by the measurement device based on the measurement light irradiated onto the second member, into the position of the second member in the processing coordinate system, based on first position information indicating the position of the first member in the measurement coordinate system, measured by the measurement device based on the measurement light irradiated onto the first member, and second position information indicating the position of the first member in a processing coordinate system, which is a coordinate system related to the processing device; the measurement control device transmits, to the processing control device, third position information indicating a position of the second member in the converted processing coordinate system; the machining control device controls the machining device under the machining coordinate system based on a position of the second member in the machining coordinate system indicated by the third position information; A processing method comprising the steps of:

68. A measurement method in a measurement system including a measurement device capable of irradiating measurement light to a workpiece and a first member attached to at least one of a jig that holds the workpiece, and a second member attached to a movable part of a processing device capable of processing the workpiece, the measurement device being capable of measuring the positions of the first member and the second member in a measurement coordinate system which is a coordinate system related to the measurement device, and a measurement control device that controls the measurement device, the measurement control device calculates first conversion information for converting a position in the measurement coordinate system and a position in the machining coordinate system based on a position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated onto the first member and a position of the first member in a machining coordinate system, which is a coordinate system related to the machining device and inputted via an input device of the measurement control device; the measurement control device transmits the first conversion information to a processing control device that controls a movement of the processing device under a processing coordinate system that is a coordinate system related to the processing device; the measurement control device controls the measurement of the second member by the measurement device based on seventh position information indicating a measurement position in the measurement coordinate system for measuring the second member, the measurement position being converted based on the first conversion information in the processing control device; Measurement methods including.

69. A processing method in a processing system including a processing device capable of processing a workpiece, a measuring device capable of irradiating measurement light to the workpiece and a first member attached to at least one of a jig that holds the workpiece, and a second member attached to a movable part of the processing device, the measuring device being capable of measuring the positions of the first member and the second member in a measurement coordinate system which is a coordinate system associated with the measuring device, a measurement control device which controls the measuring device, and a processing control device which controls the movement of the processing device under a processing coordinate system which is a coordinate system associated with the processing device, the measurement control device calculates first conversion information for converting a position in the measurement coordinate system and a position in the machining coordinate system based on a position of the first member in the measurement coordinate system measured by the measurement device based on the measurement light irradiated onto the first member and a position of the first member in the machining coordinate system input via an input device of the measurement control device; The measurement control device transmits the first conversion information to the processing control device; the machining control device converts a measurement position in the machining coordinate system for measuring the second member into a measurement position in the measurement coordinate system based on the first conversion information; the machining control device transmits to the measurement control device seventh position information indicating the measurement position in the converted measurement coordinate system; the measurement control device controls the measurement of the second member by the measurement device based on a measurement position in the measurement coordinate system that is indicated by the seventh position information; A processing method comprising the steps of:

70. A measurement method in a measurement system including a measurement device capable of measuring a first measuring member and a second measuring member attached to a processing device, and a measurement control device that controls the measurement device, comprising: the measurement control device converts a position of the second measurement member measured by the measurement device based on a position of the first measurement member measured by the measurement device; the measurement control device transmits position information indicating the converted position of the second measurement member to a processing control device that controls the processing device; Measurement methods including.

71. A measurement method in a measurement system including a measurement device capable of measuring a first measuring member and a second measuring member attached to a processing device, and a measurement control device that controls the measurement device, comprising: the measurement control device calculates conversion information for converting the position of the second measurement member measured by the measurement device based on the position of the first measurement member measured by the measurement device; The measurement control device transmits the conversion information to a processing control device that controls the processing device; Measurement methods including.

72. A measuring device receives measurement light generated from a first member attached to a jig that holds a processing object by irradiating the measurement light onto the first member, and outputs first member position information indicating a position of the first member; the measurement device receives measurement light generated from a second member attached to a movable portion of a processing device capable of processing the processing object by irradiating the second member with measurement light, and outputs second member position information indicating a position of the second member; Including, The first member position information and the second member position information outputted from the measuring device are used to control the movement of the movable part of the processing device. Measurement method.

73. The measurement method includes an imaging device imaging the first member and the second member; an irradiation direction of measurement light irradiated from the measurement device to the first member is controlled based on an output from the imaging device; and an irradiation direction of measurement light irradiated from the measurement device to the second member is controlled based on an output from the imaging device; and 73. The measurement method of claim 72, comprising: