Inductor component

Abstract

Provided is an inductor component that can increase inductance acquisition efficiency. The inductor component is provided with: a prime field including a first main surface and a second main surface which face each other; a coil which is provided to the prime field and which is helically wound along the axis; and a first external electrode and a second external electrode which are provided to the prime field and which are electrically connected to the coil. The axis of the coil is disposed in parallel with the first main surface. The coil is provided at the first main surface side relative to the axis, and includes: a plurality of first coil wiring portions which are arranged along the axis on a plane parallel with the first main surface; a plurality of second coil wiring portions which are provided at the second main surface side relative to the axis and which are arranged along the axis on a plane parallel with the second main surface; a plurality of first through-wiring portions which extend from the first coil wiring portions to the second coil wiring portions and which are arranged along the axis; and a plurality of second through-wiring portions which extend from the first coil wiring portions to the second coil wiring portions and which are provided at a side opposite to the first through-wiring portions across the axis and are arranged along the axis. The first coil wiring portions, the first through-wiring portions, the second coil wiring portions, and the second through-wiring portions form at least a portion of the helical shape by being connected in the stated order. At least one of two opposite-end first coil wiring portions, which are positioned at opposite ends in the axial direction from among the plurality of first coil wiring portions, and two opposite-end second coil wiring portions, which are positioned at opposite ends in the axial direction from among the plurality of second coil wiring portions, is a wide coil wiring portion. The maximum width of the wide coil wiring portion in the axial direction is wider than the maximum width, in the axial direction, of at least one coil wiring portion of inner side coil wiring portions from among the plurality of first coil wiring portions and the plurality of second coil wiring portions excluding the opposite-end first coil wiring portions and the opposite-end second coil wiring portions.

Description

Inductor Components

[0001] The present disclosure relates to inductor components.

[0002] A conventional inductor component is described in Japanese Patent No. 6652280 (Patent Document 1). The inductor component has an element body, a coil provided within the element body and wound along the axial direction, and a first external electrode and a second external electrode provided on the element body and electrically connected to the coil.

[0003] The coil has multiple coil patterns stacked along the axis. Adjacent coil patterns in the axial direction are connected via conductive vias. The coil pattern has wiring portions extending in a direction perpendicular to the axis and pad portions provided at the ends of the wiring portions and connecting to the conductive vias. The width of the pad portions is wider than the width of the wiring portions to improve connectivity between the pad portions and the conductive vias.

[0004] Patent No. 6652280

[0005] However, in the conventional inductor components described above, the width of the pad portion is wider than the width of the wiring portion, so part of the pad portion is located radially inward of the wiring portion of the coil, which reduces the inner diameter of the coil and does not necessarily result in a high efficiency of obtaining inductance.

[0006] Therefore, an object of the present disclosure is to provide an inductor component that can increase the efficiency with which inductance can be obtained.

[0007] In order to solve the above problem, an inductor component according to one aspect of the present disclosure comprises: an element body including first and second main surfaces opposing each other; a coil provided on the element body and wound spirally along an axis; and first and second external electrodes provided on the element body and electrically connected to the coil, the axis of the coil being arranged parallel to the first main surface, the coil including: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring towards the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring towards the second coil wiring and arranged on the opposite side of the axis from the first through wires and arranged along the axis. The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a part of the spiral, and at least one of the two end first coil wirings located at both ends in the axial direction among the plurality of first coil wirings and the two end second coil wirings located at both ends in the axial direction among the plurality of second coil wirings is a wide coil wiring, and the wide coil wiring has a maximum width in the axial direction that is larger than the maximum width in the axial direction of at least one coil wiring among the plurality of first coil wirings and the plurality of second coil wirings, excluding the end first coil wiring and the end second coil wiring.

[0008] Here, the axis refers to the intersection of a first plane passing through the center between the first coil wiring and the second coil wiring and a second plane passing through the center between the first through wiring and the second through wiring. The maximum axial width of the wide coil wiring refers to the maximum value of the axial width of the wide coil wiring when viewed from a direction perpendicular to the first main surface of the element body. The maximum axial width of at least one of the inner coil wirings is similarly defined. "External electrodes are provided on the element body" specifically means that the external electrodes are provided on the outer surface of the element body. This includes, for example, cases where the external electrodes are provided directly on the outer surface of the element body, cases where the external electrodes are provided on the outside of the element body via a separate member on the element body, and cases where the external electrodes are provided on the outer surface of the external electrodes with part of the external electrode embedded in the element body.

[0009] According to the above aspect, the coil includes a first coil wiring, a first through-hole wiring, a second coil wiring, and a second through-hole wiring. The first coil wiring, the first through-hole wiring, the second coil wiring, and the second through-hole wiring are connected in this order to form at least a portion of a spiral. This allows the inner diameter of the coil to be increased, thereby improving the efficiency of inductance acquisition. Furthermore, improving the efficiency of inductance acquisition allows the Q value to be increased. Furthermore, when viewed from a direction perpendicular to the first main surface of the element body, at least a portion of the wide coil wiring can be disposed in dead spaces that previously existed at both ends of the element body in the axial direction, where no coil wiring existed in the past. As a result, the dead space of the element body can be effectively utilized, while the electrical resistance of the entire coil can be reduced compared to conventional methods, and the Q value of the inductor component can be increased.

[0010] Preferably, in one embodiment of the inductor component, the wide coil wiring has a maximum width in the axial direction that is greater than the maximum width in the axial direction of any of the inner coil wirings.

[0011] According to the above embodiment, the electrical resistance of the entire coil can be further reduced compared to the conventional case, and the Q value of the inductor component can be further increased.

[0012] Preferably, in one embodiment of the inductor component, the first external electrode is provided on the first main surface of the element body, and the wide coil wiring is included only in the plurality of first coil wirings.

[0013] According to the embodiment, the reliability of the connection between the first external electrode and the coil can be improved.

[0014] Preferably, in one embodiment of the inductor component, the first external electrode is provided on the first main surface of the element body, and the wide coil wiring is included only in the plurality of second coil wirings.

[0015] According to the embodiment, the distance between the wide coil wiring and the first external electrode can be increased compared to when the wide coil wiring is included in a plurality of first coil wirings, thereby reducing the parasitic capacitance between the wide coil wiring and the first external electrode and increasing the self-resonant frequency (SRF).

[0016] Preferably, in one embodiment of the inductor component, the width of the wide coil wiring in the axial direction is not constant in a direction perpendicular to the axial direction.

[0017] According to the embodiment, the dead space of the element body can be utilized more effectively.

[0018] Preferably, in one embodiment of the inductor component, the first external electrode has a via portion connected to the coil, the via portion is connected to the wide coil wiring, and the contact surface area of ​​the wide coil wiring with the via portion is larger than the contact surface area of ​​at least one of the inner coil wirings with the first through wiring.

[0019] According to the embodiment, the connection strength between the first external electrode and the wide coil wiring can be improved.

[0020] Preferably, in one embodiment of the inductor component, the first external electrode has a plurality of via portions connected to the coil, and the plurality of via portions are connected to the wide coil wiring.

[0021] According to the above embodiment, since multiple via portions are connected to the wide coil wiring, the connection strength between the first external electrode and the wide coil wiring can be improved compared to when a single via portion is connected.

[0022] Preferably, in one embodiment of the inductor component, the thickness of the wide coil wire is thinner than the thickness of at least one of the inner coil wires.

[0023] Since the wide coil wiring has a relatively large maximum axial width, an increase in electrical resistance can be suppressed even if the thickness is reduced. Therefore, according to the above embodiment, the electrical resistance of the entire coil can be reduced compared to conventional methods, and a thin inductor component can be realized.

[0024] Preferably, in one embodiment of the inductor component, the wide coil wiring is included in only one of a first group consisting of the plurality of first coil wirings and a second group consisting of the plurality of second coil wirings, and the thickness of all coil wirings in the group including the wide coil wiring of the first group and the second group is thinner than the thickness of all coil wirings in the group not including the wide coil wiring.

[0025] According to the embodiment, a thinner inductor component can be realized.

[0026] Preferably, in one embodiment of the inductor component, either the plurality of first coil wirings or the plurality of second coil wirings is constituted only by the wide coil wiring.

[0027] According to the embodiment, the electrical resistance of the entire coil can be reduced more than in the past.

[0028] Preferably, in one embodiment of the inductor component, when viewed in a direction perpendicular to the first main surface, the ratio of the total area of ​​the plurality of first coil wirings to the area of ​​the first main surface is 50% or more and 95% or less, and the ratio of the total area of ​​the plurality of second coil wirings to the area of ​​the first main surface is 50% or more and 95% or less.

[0029] According to the above embodiment, by setting the ratio of the total area of ​​the plurality of first coil wirings to the area of ​​the first main surface to 50% or more, leakage of magnetic flux radially outward from the coil can be suppressed. By setting the ratio of the total area of ​​the plurality of first coil wirings to the area of ​​the first main surface to 95% or less, it is possible to easily singulate into inductor components. Similarly, by setting the ratio of the total area of ​​the plurality of second coil wirings to the area of ​​the first main surface to 50% or more, leakage of magnetic flux radially outward from the coil can be suppressed. By setting the ratio of the total area of ​​the plurality of second coil wirings to the area of ​​the first main surface to 95% or less, it is possible to easily singulate into inductor components.

[0030] Preferably, in one embodiment of the inductor component, the wide coil wiring is included in at least one of a first group consisting of the plurality of first coil wirings and a second group consisting of the plurality of second coil wirings, and when viewed in a direction perpendicular to the first main surface, the ratio of the total area of ​​all coil wirings in the group including the wide coil wiring from the first group and the second group to the area of ​​the first main surface is 65% or more.

[0031] According to the above embodiment, leakage of magnetic flux to the radially outer side of the coil can be further suppressed.

[0032] Preferably, in one embodiment of the inductor component, the wide coil wiring is included in only one of the first group consisting of the plurality of first coil wirings and the second group consisting of the plurality of second coil wirings, and when viewed in a direction perpendicular to the first main surface, the ratio of the total area of ​​all coil wirings in the group including the wide coil wiring of the first group and the second group to the area of ​​the first main surface is greater than the ratio of the total area of ​​all coil wirings in the group not including the wide coil wiring to the area of ​​the first main surface.

[0033] According to the embodiment, the above ratio can be increased for all coil wirings in a group including a wide coil wiring while ensuring the number of turns of the coil.

[0034] Preferably, in one embodiment of the inductor component, the wide coil wiring is included in both the plurality of first coil wirings and the plurality of second coil wirings.

[0035] According to the embodiment, the electrical resistance of the entire coil can be further reduced compared to the conventional case.

[0036] Preferably, in one embodiment of the inductor component, when viewed from a direction perpendicular to the first main surface, the wide coil wiring has a corner radially outside the coil and toward the center of the element body along the axial direction, and the wide coil wiring is connected to the first through wiring at the corner.

[0037] According to the embodiment, the coil length can be shortened, and therefore the Q value can be increased.

[0038] Preferably, in one embodiment of the inductor component, when viewed from a direction perpendicular to the first main surface, the outline of the wide coil wiring has a portion that follows the outline of the base body, and a portion that follows the outline of the coil wiring of the first coil wiring and the second coil wiring that is adjacent to the wide coil wiring in the axial direction on the same plane as the wide coil wiring.

[0039] According to the above embodiment, when viewed from a direction perpendicular to the first main surface, the wide coil wiring can be arranged in a dead space that may occur between the outer shape of the element body and the outer shape of one of the first and second coil wirings that is adjacent to the wide coil wiring in the axial direction on the same plane as the wide coil wiring, while minimizing the gap with the element body. This makes it possible to more effectively utilize the dead space in the element body, thereby increasing the maximum axial width of the wide coil wiring. As a result, the electrical resistance of the entire coil can be further reduced compared to conventional methods, and the Q value of the inductor component can be further increased.

[0040] Preferably, in one embodiment of the inductor component, the wide coil wiring is connected to the first through wiring, and the area of ​​the contact surface of the wide coil wiring with the first through wiring is larger than the area of ​​the contact surface of at least one of the inner coil wirings with the first through wiring.

[0041] According to the embodiment, the electrical resistance of the first through wiring connected to the wide coil wiring can be reduced more than the electrical resistance of the other first through wirings, and as a result, the electrical resistance of the entire coil can be reduced more than in the past.

[0042] Preferably, in one embodiment of the inductor component, a first end face in the extension direction of the first through wiring is connected to either the first coil wiring or the second coil wiring, a second end face in the extension direction of the first through wiring is connected to the other of the first coil wiring or the second coil wiring, the wide coil wiring is connected to at least the first end face of the first end face and the second end face, and the area of ​​the first end face is larger than the area of ​​the second end face.

[0043] According to the embodiment, the electrical resistance of the first through wiring connected to the wide coil wiring can be reduced more than the electrical resistance of the other first through wirings, and as a result, the electrical resistance of the entire coil can be reduced more than in the past.

[0044] According to an inductor component according to one aspect of the present disclosure, it is possible to increase the efficiency with which inductance is obtained.

[0045] 8 is a schematic bottom view of the inductor component of the first embodiment, as viewed from the bottom side. FIG. 2 is a cross-sectional view taken along II-II in FIG. 1 . FIG. 3 is a cross-sectional view taken along III-III in FIG. 1 . FIG. 3 is an enlarged view of a portion of FIG. 1 . FIG. 4 is a cross-sectional view taken along IX-IX in FIG. 8 . 12 is a schematic bottom view of the inductor component of a fourth embodiment, as viewed from the bottom side. FIG. 13 is a schematic bottom view of the inductor component of a fifth embodiment, as viewed from the bottom side. FIG. 14 is a cross-sectional view taken along line XII-XII of FIG. 11. FIG. 15 is a schematic bottom view of the inductor component of a sixth embodiment, as viewed from the bottom side. FIG. 16 is a cross-sectional view taken along line XIV-XIV of FIG. 13. FIG. 17 is an enlarged view of a portion of FIG. 13. FIG. 18 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 19 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 19 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 19 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 19 is a cross-sectional view illustrating a method for manufacturing an inductor component. FIG. 19 is a cross-sectional view illustrating a first modified example of the inductor component. FIG. 19 is a cross-sectional view illustrating a second modified example of the inductor component.FIG. 10 is a cross-sectional view showing a third modified example of the inductor component.

[0046] Hereinafter, an inductor component according to one aspect of the present disclosure will be described in detail with reference to the illustrated embodiments. Note that the drawings include some schematic views and may not reflect actual dimensions or proportions.

[0047] First Embodiment An inductor component 1 according to a first embodiment will be described below. FIG. 1 is a schematic bottom view of the inductor component 1 as viewed from the bottom side. FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 1. For convenience, external electrodes are depicted by two-dot chain lines in FIG. 1. Furthermore, although the element body 10 is depicted as transparent in FIG. 1 to facilitate understanding of the structure, it may also be translucent or opaque.

[0048] 1. Overview of Configuration The overview of the inductor component 1 will be described. The inductor component 1 is a surface-mount type inductor component used, for example, in a high-frequency signal transmission circuit. As shown in Figures 1, 2, and 3, the inductor component 1 includes an element body 10, a coil 110 provided on the element body 10 and wound spirally along an axis AX, and a first external electrode 121 and a second external electrode 122 provided on the element body 10 and electrically connected to the coil 110.

[0049] The element body 10 has a length, width, and height. The element body 10 has a first end face 100e1 and a second end face 100e2 at both ends in the length direction, a first side face 100s1 and a second side face 100s2 at both ends in the width direction, and a bottom face 100b and a top face 100t at both ends in the height direction. In other words, the outer surface 100 of the element body 10 includes the first end face 100e1 and the second end face 100e2, the first side face 100s1 and the second side face 100s2, the bottom face 100b, and the top face 100t. The bottom face 100b is an example of a "first main surface" as defined in the claims, and the top face 100t is an example of a "second main surface" as defined in the claims.

[0050] As shown in the drawings, for the sake of convenience, the lengthwise direction (longitudinal direction) of the element body 10, that is, the direction from the first end face 100e1 to the second end face 100e2, is referred to as the X direction. The widthwise direction of the element body 10, that is, the direction from the first side face 100s1 to the second side face 100s2, is referred to as the Y direction. The heightwise direction of the element body 10, that is, the direction from the bottom face 100b to the top face 100t, is referred to as the Z direction. The X direction, Y direction, and Z direction are mutually orthogonal, and when arranged in the order X, Y, Z, they form a right-handed system.

[0051] In this specification, the "outer surface 100 of the element body 10," which includes the first end surface 100e1, the second end surface 100e2, the first side surface 100s1, the second side surface 100s2, the bottom surface 100b, and the top surface 100t of the element body 10, does not simply mean a surface facing the outer periphery of the element body 10, but rather a surface that forms the boundary between the outside and the inside of the element body 10. Furthermore, "above the outer surface 100 of the element body 10" does not refer to an absolute direction such as vertically upward, which is defined by the direction of gravity, but rather refers to a direction toward the outside of the outside and the inside, with the outer surface 100 as the boundary, based on the outer surface 100. Therefore, "above the outer surface 100" is a relative direction determined by the orientation of the outer surface 100. Furthermore, "above" with respect to a certain element includes not only an upper position away from the element, i.e., an upper position via another object on the element or an upper position with a gap therebetween, but also a position directly above the element (on).

[0052] The axis AX of the coil 110 is arranged parallel to the bottom surface 100b. The coil 110 includes a plurality of bottom surface wirings 11b provided on the bottom surface 100b side with respect to the axis AX and arranged along the axis AX on a plane parallel to the bottom surface 100b, a plurality of top surface wirings 11t provided on the top surface 100t side with respect to the axis AX and arranged along the axis AX on a plane parallel to the top surface 100t, a plurality of first through wirings 13 extending from the bottom surface wirings 11b toward the top surface wirings 11t and arranged along the axis AX, and a plurality of second through wirings 14 extending from the bottom surface wirings 11b toward the top surface wirings 11t and provided on the opposite side of the axis AX from the first through wirings 13 and arranged along the axis AX. The bottom surface wirings 11b, the first through wirings 13, the top surface wirings 11t, and the second through wirings 14 are connected in this order to form at least a portion of a spiral shape.

[0053] The bottom wiring 11b corresponds to an example of the "first coil wiring" set forth in the claims, and the top wiring 11t corresponds to an example of the "second coil wiring" set forth in the claims. The axis AX is the intersection of a first plane passing through the center between the bottom wiring 11b and the top wiring 11t and a second plane passing through the center between the first through wiring 13 and the second through wiring 14. In other words, the axis AX is a straight line passing through the center of the inner diameter portion of the coil 110. The axis AX of the coil 110 does not have a dimension in a direction perpendicular to the axis AX.

[0054] According to the above configuration, the coil 110 includes the bottom wiring 11b, the first through wiring 13, the top wiring 11t, and the second through wiring 14. The bottom wiring 11b, the first through wiring 13, the top wiring 11t, and the second through wiring 14 are connected in this order to form at least a part of a spiral, which allows the inner diameter of the coil 110 to be increased and the efficiency of obtaining inductance to be increased. Furthermore, by increasing the efficiency of obtaining inductance, the Q value can be increased.

[0055] Specifically, the pad portion of a conventional inductor component and the bottom wiring 11b and top wiring 11t of this embodiment are "receiving portions" for the wiring that penetrates the element body (the conductive vias of a conventional inductor component and the first through wiring 13 and second through wiring 14 of this embodiment), and therefore have a shape that extends perpendicular to the direction that penetrates the element body. Here, in the configuration of a conventional inductor component, the conductive vias extend in a direction parallel to the axis of the coil, and therefore the pad portion extends in a direction perpendicular to the axis of the coil, and is likely to have a structure that blocks magnetic flux generated in the axial direction of the coil.

[0056] In contrast, in this embodiment, the first through wiring 13 and the second through wiring 14 extend in a direction perpendicular to the axis AX of the coil 110, and therefore the bottom wiring 11b and the top wiring 11t extend in a direction parallel to the axis AX of the coil 110. Therefore, the bottom wiring 11b and the top wiring 11t are unlikely to have a structure that blocks magnetic flux generated in the direction of the axis AX. In other words, this embodiment can have a structure that is unlikely to block magnetic flux, thereby improving inductance acquisition efficiency and Q value.

[0057] At least one of the two bottom wirings 11b located at both ends in the axial AX direction among the multiple bottom wirings 11b and the two top wirings 11t located at both ends in the axial AX direction among the multiple top wirings 11t is a wide coil wiring. The two bottom wirings 11b at both ends correspond to an example of "first coil wirings at both ends" as set forth in the claims, and are also referred to as both-end bottom wirings 11b. The two top wirings 11t at both ends correspond to an example of "second coil wirings at both ends" as set forth in the claims, and are also referred to as both-end top wirings 11t. In this embodiment, the two bottom wirings 11b located at both ends in the axial AX direction among the multiple bottom wirings 11b and the two top wirings 11t located at both ends in the axial AX direction among the multiple top wirings 11t are all wide coil wirings.

[0058] In the following, the wide coil wiring among the multiple bottom wirings 11b that is located closest to the first end face 100e1 will be referred to as the "first wide coil wiring W1," the wide coil wiring among the multiple bottom wirings 11b that is located closest to the second end face 100e2 will be referred to as the "second wide coil wiring W2," the wide coil wiring among the multiple top wirings 11t that is located closest to the first end face 100e1 will be referred to as the "third wide coil wiring W3," and the wide coil wiring among the multiple top wirings 11t that is located closest to the second end face 100e2 will be referred to as the "fourth wide coil wiring W4." Furthermore, of the multiple bottom wirings 11b, coil wiring other than the two bottom wirings 11b located at both ends in the direction of the axis AX (both-end bottom wirings 11b) is referred to as "narrow bottom wiring 11nb," and of the multiple top wirings 11t, coil wiring other than the two top wirings 11t located at both ends in the direction of the axis AX (both-end top wirings 11t) is referred to as "narrow top wiring 11nt." The narrow bottom wiring 11nb and narrow top wiring 11nt correspond to examples of "inner coil wiring" as defined in the claims.

[0059] Fig. 4 is an enlarged view of a portion of Fig. 1. Specifically, Fig. 4 is an enlarged view of the first wide coil wiring 11w1, the narrow bottom wiring 11nb adjacent to the first wide coil wiring 11w1 in the axis AX direction, the third wide coil wiring 11w3, and the narrow top wiring 11nt adjacent to the third wide coil wiring 11w3 in the axis AX direction.

[0060] 4, the first wide coil wiring 11w1 has a maximum width W1 in the axial direction AX that is greater than the maximum width in the axial direction of at least one of the narrow bottom wiring 11nb and the narrow top wiring 11nt. The third wide coil wiring 11w3 has a maximum width W3 in the axial direction AX that is greater than the maximum width in the axial direction of at least one of the narrow bottom wiring 11nb and the narrow top wiring 11nt.

[0061] The maximum width W1 of the first wide coil wiring 11w1 in the axial AX direction refers to the maximum value of the width of the first wide coil wiring 11w1 in the axial AX direction as viewed from the direction perpendicular to the bottom surface 100b (the Z direction). The maximum width W3 of the third wide coil wiring 11w3 is defined similarly.

[0062] In this embodiment, the first wide coil wiring 11w1 has a generally triangular shape with a width in the axial AX direction increasing from the second side surface 100s2 side toward the first side surface s1 side as viewed from the Z direction. Specifically, the first wide coil wiring 11w1 has a generally triangular shape with three sides: one side parallel to the X direction, one side parallel to the Y direction, and one side parallel to the extension direction of the narrow bottom wiring 11nb adjacent to it in the axial AX direction as viewed from the Z direction.

[0063] The maximum width W1 of the first wide coil wiring 11w1 in the axial direction is larger than the maximum width W2 of the narrow bottom wiring 11nb in the axial direction. The maximum width W1 of the first wide coil wiring 11w1 in the axial direction is larger than the maximum width W4 of the narrow top wiring 11nt in the axial direction. Note that the maximum width W1 may be larger than either the maximum width W2 or the maximum width W4.

[0064] The third wide coil wiring 11w3 has a generally rectangular shape extending in the Y direction when viewed from the Z direction. Specifically, the third wide coil wiring 11w3 has a generally rectangular shape having four sides, two sides parallel to the X direction and two sides parallel to the Y direction, when viewed from the Z direction.

[0065] The maximum width W3 of the third wide coil wiring 11w3 in the axial direction is larger than the maximum width W2 of the narrow bottom wiring 11nb in the axial direction. The maximum width W3 of the third wide coil wiring 11w3 in the axial direction is larger than the maximum width W4 of the narrow top wiring 11nt in the axial direction. The maximum width W2 and the maximum width W4 are defined in the same way as the maximum width W1. Note that the maximum width W3 may be larger than either the maximum width W2 or the maximum width W4.

[0066] While the maximum widths of the first wide coil wiring W1 and the third wide coil wiring W3 have been described above, the same applies to the maximum widths of the second wide coil wiring W2 and the fourth wide coil wiring W4. That is, the maximum width in the axial direction of the second wide coil wiring 11w2 is larger than the maximum width in the axial direction of at least one of the narrow bottom wiring 11nb and the narrow top wiring 11nt. The maximum width in the axial direction of the fourth wide coil wiring 11w4 is larger than the maximum width in the axial direction of at least one of the narrow bottom wiring 11nb and the narrow top wiring 11nt.

[0067] According to the above configuration, when viewed from a direction perpendicular to the bottom surface 100b, at least a portion of the first to fourth wide coil wirings 11w1 to 11w4 can be arranged in dead spaces that previously did not have coil wiring and that existed at both ends of the element body 10 in the direction of the axis AX. As a result, the dead spaces of the element body 10 can be effectively utilized while reducing the electrical resistance of the entire coil 110 compared to conventional cases, and the Q value of the inductor component 1 can be increased.

[0068] Specifically, in FIG. 1 , for example, if the bottom wiring 11b located closest to the first end face 100e1 is not a wide coil wiring but rather a coil wiring that extends linearly in a direction parallel to the adjacent narrow bottom wiring 11nb in the axial AX direction and has the same wiring width as the narrow bottom wiring 11nb, a dead space where the bottom wiring 11b is not present may be created at the corner of the element body 10 where the first end face 100e1 and the first side face 100s1 intersect. According to the above configuration, the first wide coil wiring 11w1 has a relatively large maximum width W1 in the axial AX direction, so a portion of the first wide coil wiring 11w1 can be disposed in this dead space. The same applies to the second to fourth wide coil wirings 11w2 to 11w4. As a result, the electrical resistance of the entire coil 110 can be reduced compared to conventional methods while effectively utilizing the dead space of the element body 10, thereby increasing the Q value of the inductor component 1.

[0069] 2. Configuration of Each Part (Inductor Component 1) The volume of the inductor component 1 is preferably 0.08 mm ３ The dimension of the long side of the inductor component 1 is 0.65 mm or less. The dimension of the long side of the inductor component 1 refers to the largest value among the length, width, and height of the inductor component 1, and in this embodiment, refers to the length in the X direction. With the above configuration, the volume of the inductor component 1 is small and the long side of the inductor component 1 is short, so the weight of the inductor component 1 is light. Therefore, even if the external electrodes 121 and 122 are small, the required mounting strength can be obtained. Furthermore, the thickness of the inductor component 1 is preferably 200 μm or less. This allows the inductor component 1 to be made thin.

[0070] Specifically, the size of the inductor component 1 (length (X direction) × width (Y direction) × height (Z direction)) is 0.6 mm × 0.3 mm × 0.3 mm, 0.4 mm × 0.2 mm × 0.2 mm, 0.25 mm × 0.125 mm × 0.120 mm, etc. Furthermore, the width and height do not have to be equal, and may be, for example, 0.4 mm × 0.2 mm × 0.3 mm.

[0071] (Element body 10) The element body 10 is preferably made of SiO ２This makes it possible to impart insulation and rigidity to the element body 10. The element body 10 is made of, for example, a sintered glass body. The sintered glass body may contain alumina, which can further increase the strength of the element body.

[0072] The glass sintered body is formed by stacking, for example, a plurality of insulating layers containing glass. The stacking direction of the plurality of insulating layers is the Z direction. That is, the insulating layers are in a layered form having main surfaces extending in the XY plane. Note that, in the element body 10, the interfaces between the plurality of insulating layers may not be clear due to firing or the like.

[0073] The element body 10 may be made of, for example, a glass substrate. The glass substrate may be a single-layer glass substrate, and since the majority of the element body is made of glass, losses such as eddy current losses at high frequencies can be suppressed.

[0074] (Coil 110) The coil 110 includes a plurality of bottom wirings 11b, a plurality of top wirings 11t, a plurality of first through wirings 13, and a plurality of second through wirings 14. The bottom wirings 11b, the first through wirings 13, the top wirings 11t, and the second through wirings 14 are connected in order to form at least a part of the coil 110 wound in the direction of the axis AX.

[0075] According to the above configuration, the coil 110 is a so-called helical-shaped coil 110, so that in a cross section perpendicular to the axis AX, the area in which the bottom wiring 11b, the top wiring 11t, the first through wiring 13, and the second through wiring 14 run parallel to the winding direction of the coil 110 can be reduced, thereby reducing the stray capacitance in the coil 110.

[0076] Here, a helical shape refers to a shape in which the number of turns in the entire coil is greater than one, but the number of turns in the coil in a cross section perpendicular to the axis is less than one. "One or more turns" refers to a state in which, in a cross section perpendicular to the axis, the coil wiring has portions that are adjacent in the radial direction when viewed from the axial direction and run parallel to the winding direction, and "less than one turn" refers to a state in which, in a cross section perpendicular to the axis, the coil wiring does not have portions that are adjacent in the radial direction when viewed from the axial direction and run parallel to the winding direction.

[0077] The narrow bottom wiring 11nb extends in only one direction. Specifically, the narrow bottom wiring 11nb extends in the Y direction at a slight inclination toward the X direction. The multiple narrow bottom wirings 11nb are arranged parallel to each other along the X direction. The maximum widths of the multiple narrow bottom wirings 11nb in the axial AX direction may be the same or different, but in this embodiment, they are the same. Here, using modified illumination, such as annular illumination or dipole illumination, in the photolithography process can improve pattern resolution in a specific direction and form a finer pattern. According to the above configuration, since the narrow bottom wiring 11nb extends in only one direction, using modified illumination, for example, in the photolithography process can form fine narrow bottom wirings 11nb, thereby miniaturizing the inductor component 1.

[0078] The narrow top surface wiring 11nt extends in only one direction. Specifically, the narrow top surface wiring 11nt extends in the Y direction. The multiple narrow top surface wirings 11nt are arranged in parallel along the X direction. The maximum width of each of the multiple narrow top surface wirings 11nt in the axis AX direction may be the same or different, but in this embodiment, they are made the same. According to the above configuration, since the narrow top surface wiring 11nt extends in only one direction, by using, for example, modified illumination in the photolithography process, it is possible to form fine narrow top surface wirings 11nt and reduce the size of the inductor component 1.

[0079] The bottom wiring 11b and the top wiring 11t are made of a good conductor material such as copper, silver, gold, or an alloy thereof. The bottom wiring 11b and the top wiring 11t may be a metal film formed by plating, vapor deposition, sputtering, or the like, or may be a metal sintered body formed by applying and sintering a conductive paste. The bottom wiring 11b and the top wiring 11t may also have a multilayer structure in which multiple metal layers are stacked. The thickness of the bottom wiring 11b and the top wiring 11t is preferably 5 μm or more and 50 μm or less.

[0080] The first through wiring 13 is arranged on the first side surface 100s1 side with respect to the axis AX within the through hole V of the element body 10, and the second through wiring 14 is arranged on the second side surface 100s2 side with respect to the axis AX within the through hole V of the element body 10. The first through wiring 13 and the second through wiring 14 each extend in a direction perpendicular to the bottom surface 100b and the top surface 100t. This allows the lengths of the first through wiring 13 and the second through wiring 14 to be shortened, thereby suppressing DC resistance (Rdc). The multiple first through wirings 13 and the multiple second through wirings 14 are each arranged in parallel along the X direction.

[0081] Preferably, the first through wiring 13 is made of SiO ２ According to this, the element body 10 contains SiO ２ When the first through wiring 13 contains a material such as SiO, the linear expansion coefficient of the first through wiring 13 can be matched with the linear expansion coefficient of the element body 10, and cracks between the first through wiring 13 and the element body 10 can be suppressed. The first through wiring 13 is made of, for example, a conductive paste. The conductive material is Ag, Cu, or the like. Similarly, the second through wiring 14 is preferably made of SiO ２ Includes:

[0082] Preferably, at least one of the bottom surface wiring 11b, the top surface wiring 11t, the first through wiring 13, and the second through wiring 14 includes a void portion or a resin portion. This allows the void portion or the resin portion to absorb stress caused by the difference in linear expansion coefficient between the wiring and the element body 10, thereby alleviating the stress. As a method for forming the void portion, for example, a material that is burned away by sintering is used as the wiring material, and the void portion can be formed by sintering the wiring. As a method for forming the resin portion, for example, a conductive paste can be used as the wiring material to form the resin portion.

[0083] Preferably, at least one of the bottom surface wiring 11b and the top surface wiring 11t is made of SiO ２ According to this, the element body 10 contains SiO ２ When the wiring includes the element body 10, the linear expansion coefficient of the wiring can be matched to the linear expansion coefficient of the element body 10, and cracks between the wiring and the element body 10 can be suppressed.

[0084] Preferably, the first external electrode 121 is provided on the bottom surface 100b of the element body 10, and the wide coil wiring is included only in the multiple bottom surface wirings 11b. In this case, the wide coil wiring is not included in the multiple top surface wirings 11t. This configuration improves the connection reliability between the first external electrode 121 and the coil 110. Specifically, since the wide coil wiring has a relatively large maximum width in the axial AX direction, the contact area between the first external electrode 121 and the wide coil wiring can be made larger than before. Furthermore, even if misalignment occurs in at least one of the first external electrode 121 and the wide coil wiring, the wide coil wiring can suppress the influence of this misalignment and more reliably connect the first external electrode 121 and the wide coil wiring. As a result, the connection reliability between the first external electrode 121 and the coil 110 can be improved.

[0085] Preferably, the wide coil wiring is included in both the plurality of bottom wirings 11b and the plurality of top wirings 11t. With this configuration, the electrical resistance of the entire coil 110 can be further reduced compared to conventional cases.

[0086] Preferably, the width of the wide coil wiring in the axial AX direction is not constant in the direction perpendicular to the axial AX direction. Specifically, in each of the first wide coil wiring 11w1 and the second wide coil wiring 11w2, the width in the axial AX direction in a central region excluding both end portions in the direction perpendicular to the axial AX direction is not constant in the direction perpendicular to the axial AX direction. This configuration makes it possible to more effectively utilize the dead space in the element body 10.

[0087] Preferably, the maximum width of each of the first to fourth wide coil wires 11w1 to 11w4 in the direction of the axis AX is greater than the maximum width of all of the narrow bottom wires 11nb and all of the narrow top wires 11nt in the direction of the axis AX. This configuration can further reduce the electrical resistance of the entire coil 110 compared to conventional configurations, thereby enabling the Q value of the inductor component 1 to be increased.

[0088] 1 and 4, when viewed from a direction perpendicular to the bottom surface 100b, the first wide coil wiring 11w1 preferably has a corner C1 radially outward of the coil 110 and toward the center of the element body 10, and the first wide coil wiring 11w1 is connected to the first through wiring 13 at the corner C1. With this configuration, the coil length of the coil 110 can be shortened, thereby increasing the Q value. The coil length refers to the length of the coil 110 in the axial AX direction.

[0089] Similarly, preferably, when viewed from a direction perpendicular to the bottom surface 100b, the fourth wide coil wiring 11w4 has a corner radially outside the coil 110 and toward the center of the base body 10, and the fourth wide coil wiring 11w4 is connected to the first through wiring 13 at the corner.

[0090] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the third wide coil wiring 11w3 has a corner C2 radially outside the coil 110 and toward the center of the element body 10, and the third wide coil wiring 11w3 is connected to the second through wiring 14 at the corner C2. With this configuration, the coil length of the coil 110 can be shortened, thereby making it possible to further increase the Q value.

[0091] Similarly, preferably, when viewed from a direction perpendicular to the bottom surface 100b, the second wide coil wiring 11w2 has a corner radially outside the coil 110 and toward the center of the base body 10, and the second wide coil wiring 11w2 is connected to the second through wiring 14 at the corner.

[0092] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the outline of the first wide coil wiring 11w1 has a portion that follows the outline of the element body 10 and portions of the bottom surface wiring 11b and the top surface wiring 11t that follow the outline of the coil wiring adjacent to the first wide coil wiring 11w1 in the direction of the axis AX on the same plane as the first wide coil wiring 11w1. Specifically, as shown in Figures 1 and 4, the outline of the first wide coil wiring 11w1 includes a portion P1 that follows the outline of the first end surface 100e1 of the element body 10, a portion P2 that follows the outline of the first side surface 100s1 of the element body 10, and a portion P3 that follows the outline of the narrow bottom surface wiring 11nb that follows the outline of the narrow bottom surface wiring 11nb that follows the outline of the narrow bottom surface wiring 11nb adjacent to the first wide coil wiring 11w1 in the direction of the axis AX on the same plane as the first wide coil wiring 11w1. Note that, for convenience, in Figure 4, portions P1 and P2 are indicated by dashed lines, and portion P3 is indicated by a dashed double-dashed line.

[0093] According to the above configuration, when viewed from a direction perpendicular to the bottom surface 100b, the first wide coil wiring 11w1 can be arranged in the dead space that may occur between the outline of the element body 10 and the outline of the narrow bottom wiring 11nb, minimizing the gap with the element body 10. This makes it possible to more effectively utilize the dead space of the element body 10, thereby making it possible to increase the maximum width W1 of the first wide coil wiring 11w1 in the direction of the axis AX. As a result, the electrical resistance of the entire coil 110 can be further reduced compared to conventional methods, and the Q value of the inductor component 1 can be further increased.

[0094] Similarly, when viewed from a direction perpendicular to the bottom surface 100b, the outer shapes of the second to fourth wide coil wirings 11w2 to 11w4 may have a portion that follows the outer shape of the base body 10, and a portion that follows the outer shape of the coil wiring adjacent to the wide coil wiring in the axial AX direction among the bottom surface wiring 11b and the top surface wiring 11t on the same plane as the wide coil wiring.

[0095] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the ratio of the total area of ​​the multiple bottom surface wirings 11b to the area of ​​the bottom surface 100b is 50% or more and 95% or less, and the ratio of the total area of ​​the multiple top surface wirings 11t to the area of ​​the bottom surface 100b is 50% or more and 95% or less.

[0096] According to the above configuration, by setting the ratio of the total area of ​​the plurality of bottom wirings 11b to the area of ​​the bottom surface 100b to 50% or more, leakage of magnetic flux radially outward from the coil 110 can be suppressed. Furthermore, the electrical resistance of the bottom wirings 11b can be further reduced. Furthermore, the strength of the element body 10 can be improved and the heat dissipation of the inductor component 1 can be enhanced. By setting the ratio of the area of ​​the plurality of bottom wirings 11b to the area of ​​the bottom surface 100b to 95% or less, the inductor component 1 can be easily singulated. Similarly, by setting the ratio of the area of ​​the plurality of top wirings 11t to the area of ​​the bottom surface 100b to 50% or more, leakage of magnetic flux radially outward from the coil 110 can be suppressed. Furthermore, the electrical resistance of the top wirings 11t can be further reduced. Furthermore, the strength of the element body 10 can be improved and the heat dissipation of the inductor component 1 can be enhanced. By setting the ratio of the area of ​​the plurality of top surface wirings 11t to the area of ​​the bottom surface 100b to 95% or less, the inductor components 1 can be easily separated into individual pieces.

[0097] In conventional inductor components, the same coil wiring pattern is repeated, and the coil wiring pattern is formed inside the element body 10 so as not to expose the coil wiring outside the element body 10. Therefore, it has been difficult to increase the ratio. In the inductor component 1, the multiple bottom wirings 11b and the multiple top wirings 11t include wide coil wiring, making it possible to increase the ratio. On the other hand, if the ratio is set to 100% or nearly 100%, the coil wiring and the element body 10 are made of different materials, which increases the difficulty of processing during singulation. Furthermore, if the coil wiring is formed off-center or due to processing variations, the coil wiring may be exposed from the element body 10. Therefore, a side gap is provided from the outer surface of the element body 10 to the inside to restrict the area where the coil wiring is formed. For example, if the dimensions of the bottom surface 100b are 0.4 mm × 0.2 mm and the side gap is 10 μm, the ratio is 93%.

[0098] Preferably, the wide coil wiring is included in at least one of a first group consisting of a plurality of bottom wirings 11 b and a second group consisting of a plurality of top wirings 11 t, and the ratio of the area of ​​all coil wirings in the first and second groups including the wide coil wiring to the area of ​​the bottom surface 100 b is 65% or more when viewed in a direction perpendicular to the bottom surface 100 b. This configuration further prevents magnetic flux from leaking radially outward from the coil 110.

[0099] (First external electrode 121 and second external electrode 122) The first external electrode 121 is connected to a first end of the coil 110, and the second external electrode 122 is connected to a second end of the coil 110. The first external electrode 121 is provided on the first end face 100e1 side of the center of the element body 10 in the X direction so as to be exposed from the outer surface 100 of the element body 10. The second external electrode 122 is provided on the second end face 100e2 side of the center of the element body 10 in the X direction so as to be exposed from the outer surface 100 of the element body 10.

[0100] When viewed from a direction perpendicular to the bottom surface 100b, the first external electrode 121 and the second external electrode 122 are preferably located inside the outer surface 100 of the element body 10. In other words, the first external electrode 121 and the second external electrode 122 are preferably located inside the first end surface 100e1, the second end surface 100e2, the first side surface 100s1, and the second side surface 100s2 of the element body 10.

[0101] According to the above configuration, the first external electrode 121 and the second external electrode 122 are not in contact with the outer surface 100 of the element body 10, and therefore, when the inductor component is singulated, the load on the first external electrode 121 and the second external electrode 122 can be reduced, and deformation and peeling of the first external electrode 121 and the second external electrode 122 can be suppressed. Therefore, even if the inductor component is made smaller, deformation and peeling of the first external electrode 121 and the second external electrode 122 can be prevented.

[0102] The first external electrode 121 may be provided continuously on the bottom surface 100b and the first end surface 100e1. In this case, since the first external electrode 121 is a so-called L-shaped electrode, a solder fillet can be formed on the first external electrode 121 when the inductor component 1 is mounted on a mounting board. Similarly, the second external electrode 122 may be provided continuously on the bottom surface 100b and the second end surface 100e2.

[0103] The first external electrode 121 has a bottom surface portion 121b provided on the bottom surface 100b and a via portion 121v embedded in the bottom surface 100b. The via portion 121v is connected to the bottom surface portion 121b. The via portion 121v is connected to the first wide coil wiring 11w.

[0104] The second external electrode 122 has a bottom surface portion 122b provided on the bottom surface 100b and a via portion 122v embedded in the bottom surface 100b. The via portion 122v is connected to the bottom surface portion 122b. The via portion 122v is connected to the second wide coil wiring 11w2.

[0105] The first external electrode 121 has an underlayer 121e1 and a plating layer 121e2 covering the underlayer 121e1. The underlayer 121e1 includes a conductive material such as Ag or Cu. The plating layer 121e2 includes a conductive material such as Ni or Sn. A portion of the bottom surface portion 121b and the via portion 121v are formed from the underlayer 121e1. Another portion of the bottom surface portion 121b is formed from the plating layer 121e2. Similarly, the second external electrode 122 has an underlayer and a plating layer covering the underlayer. Note that the first external electrode 121 and the second external electrode 122 may be formed from a single layer of conductive material.

[0106] In this embodiment, the first external electrode 121 has a plurality of via portions 121v. Specifically, the first external electrode 121 has two via portions 121v arranged side by side in the Y direction. The two via portions 121v are connected to the end of the first wide coil wiring 11w1 on the second side surface 100s2 side. Similarly, the second external electrode 122 has a plurality of via portions 121v. Specifically, the second external electrode 122 has two via portions 122v arranged side by side in the Y direction. The two via portions 122v are connected to the end of the second wide coil wiring 11w2 on the first side surface 100s1 side. The number of each of the via portions 121v and the via portions 122v is not particularly limited and may be three or more. Furthermore, there may be a plurality of either the via portions 121v or the via portions 122v.

[0107] According to the above configuration, since a plurality of via portions 121v are connected to the first wide coil wiring 11w1, the connection strength between the first external electrode 121 and the first wide coil wiring 11w1 can be improved compared to when a single via portion 121v is connected. Similarly, since a plurality of via portions 122v are connected to the second wide coil wiring 11w2, the connection strength between the second external electrode 122 and the second wide coil wiring 11w2 can be improved compared to when a single via portion 122v is connected.

[0108] (Method of Manufacturing Inductor Component 1) Next, a method of manufacturing inductor component 1 will be described with reference to Figures 5A to 5M. Figures 5A to 5H, 5K, and 5L are views corresponding to the II-II cross section in Figure 1. Figures 5I, 5J, and 5M are views corresponding to the III-III cross section in Figure 1.

[0109] 5A, a first insulating layer 1011 is provided by printing on a base substrate 1000. The material of the base substrate 1000 is, for example, a glass substrate, a silicon substrate, an alumina substrate, or the like, and the material of the first insulating layer 1011 is, for example, a resin such as epoxy or polyimide, or an inorganic insulating film such as SiO or SiN.

[0110] 5B, a second insulating layer 1012 is provided on a first insulating layer 1011 by printing. A groove 1012a is provided in the second insulating layer 1012. At this time, the groove 1012a is formed by, for example, a photolithography process. Alternatively, the groove may be formed from the beginning as a printing pattern.

[0111] As shown in FIG. 5C , a top surface conductor layer 1011t is provided in the groove 1012a by printing. The material of the top surface conductor layer 1011t is, for example, Ag, Cu, Au, Al, an alloy containing at least one of these elements, solder paste, or the like. At this time, for example, the top surface conductor layer 1011t is formed as a print pattern so that it remains only in the groove 1012a. After printing the top surface conductor layer 1011t on the second insulating layer 1012, a photolithography process may be used to leave the top surface conductor layer 1011t only in the groove 1012a.

[0112] As shown in Fig. 5D, a third insulating layer 1013 is provided by printing on the second insulating layer 1012. A first groove 1013a and a second groove 1013b are provided in the third insulating layer 1013. The first groove 1013a and the second groove 1013b are formed in the same manner as in Fig. 5B.

[0113] As shown in Fig. 5E, a first through conductor layer 1131 of the first layer is provided in the first groove 1013a by printing, and a second through conductor layer 1141 of the first layer is provided in the second groove 1013b by printing. The first through conductor layer 1131 of the first layer and the second through conductor layer 1141 of the first layer are formed in the same manner as in Fig. 5C.

[0114] 5F , the above-described steps are repeated to provide a fourth insulating layer 1014 on the third insulating layer 1013, and a second-layer first penetrating conductor layer 1132 and a second-layer second penetrating conductor layer 1142 are provided in each of the two grooves provided in the fourth insulating layer 1014. Furthermore, a fifth insulating layer 1015 is provided on the fourth insulating layer 1014, and a third-layer first penetrating conductor layer 1133 and a third-layer second penetrating conductor layer 1143 are provided in each of the two grooves provided in the fifth insulating layer 1015.

[0115] As shown in Figure 5G, a sixth insulating layer 1016 is provided on the fifth insulating layer 1015, and a bottom conductor layer 1011b is provided in a groove provided in the sixth insulating layer 1016. The material of the bottom conductor layer 1011b is the same as the material of the top conductor layer 1011t. As shown in Figure 5H, a seventh insulating layer 1017 is provided on the sixth insulating layer 1016.

[0116] As shown in Fig. 5I, a groove 1017a is provided in seventh insulating layer 1017 so as to expose a portion of bottom conductor layer 1011b. As shown in Fig. 5J, an underlying conductor layer 1121e1 is provided on seventh insulating layer 1017 and in groove 1017a. The material of underlying conductor layer 1121e1 is, for example, a resin paste made of Ag, Cu, or the like.

[0117] As shown in FIG. 5K, the entire laminate is sintered in a high-temperature furnace (e.g., 500°C or higher). The first to seventh insulating layers 1011-1017 are sintered to form the element body 10, the top conductor layer 1011t is sintered to form the top wiring 11t, the bottom conductor layer 1011b is sintered to form the bottom wiring 11b, the first to third through conductor layers 1131-1133 are sintered to form the first through wiring 13, the first to third second through conductor layers 1141-1143 are sintered to form the second through wiring 14, and the base conductor layer 1121e1 is sintered to form the base layer 121e1. Therefore, sintering the insulating layers improves strength, and sintering the conductor layers volatilizes unnecessary resin components contained in the conductor layers and fuses the conductor materials contained in the conductor layers, thereby achieving high conductivity. The base substrate 1000 may be peeled off by decomposing the surface during sintering, or may be mechanically removed by grinding or the like before or after sintering, or may be chemically removed by etching or the like before or after sintering.

[0118] As shown in Fig. 5L, the substrate is separated into individual pieces along cut lines C. As shown in Fig. 5M, a plating layer 121e2 is formed by barrel plating so as to cover the base layer 121e1, thereby forming the first external electrode 121. In this way, the inductor component 1 is manufactured as shown in Fig. 2.

[0119] 6A is a view corresponding to the cross section II-II of FIG. 1 , showing a first modified example of an inductor component. As shown in FIG. 6A , in an inductor component 1A of the first modified example, the first through wiring 13 and the second through wiring 14 are not parallel to each other when viewed from a direction parallel to the axis AX of the coil 110. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, allowing the inner diameter of the coil 110 to be increased, and the Q value to be improved.

[0120] Specifically, the first through wiring 13 and the second through wiring 14 are bent at the center so that the distance between them becomes wider toward the center in the Z direction. In other words, the first through wiring 13 and the second through wiring 14 each have a shape that widens outward in the radial direction of the coil 110 toward the center in the Z direction. Furthermore, the first through wiring 13 and the second through wiring 14 each have a stepped shape along the Z direction. According to the above configuration, when the first through wiring 13 and the second through wiring 14 are each formed by stacking multiple conductor layers, the first through wiring 13 and the second through wiring 14 can be easily formed in a stepped shape by stacking the conductor layers of each layer in a shifted manner.

[0121] 6B is a view showing a second modified inductor component corresponding to the cross section II-II of FIG. 1. As shown in FIG. 6B, in an inductor component 1B of the second modified example, the first through wiring 13 and the second through wiring 14 are not parallel when viewed from a direction parallel to the axis AX of the coil 110. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, allowing the inner diameter of the coil 110 to be increased, and the Q value to be improved.

[0122] Specifically, the first through wiring 13 and the second through wiring 14 are inclined so that the distance between them becomes wider toward the top surface wiring 11t in the Z direction. In other words, the first through wiring 13 and the second through wiring 14 each have a shape that extends radially outward from the coil 110 as far as the top surface wiring 11t in the Z direction. In this way, the coil 110 has a trapezoidal shape when viewed from the axis AX direction. With the above configuration, the first through wiring 13 and the second through wiring 14 can be formed linearly and shortened, thereby reducing the DC resistance of the first through wiring 13 and the second through wiring 14.

[0123] (Third Modification) Fig. 6C is a view showing a third modification of an inductor component, corresponding to the cross section taken along line II-II in Fig. 1. As shown in Fig. 6C, an inductor component 1C of the third modification includes a first coil 110A and a second coil 110B, as compared to the inductor component 1A of the first modification shown in Fig. 6A.

[0124] In the first coil 110A, when viewed in a direction parallel to the axis AX, the first through wiring 13 and the second through wiring 14 are not parallel to each other. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, the inner diameter of the coil 110A to be increased, and the Q value to be improved.

[0125] Specifically, the first through wiring 13 has the same configuration as the first through wiring 13 of the inductor component 1A of the first modified example. On the other hand, the second through wiring 14 has a linear shape parallel to the Z direction. In other words, the first through wiring 13 is bent at the center so that the distance between the first through wiring 13 and the second through wiring 14 becomes wider toward the center in the Z direction. The first through wiring 13 has a stepped shape along the Z direction. According to the above configuration, when the first through wiring 13 is formed by stacking multiple conductor layers, the first through wiring 13 can be easily formed in a stepped shape by stacking the conductor layers of each layer in a shifted manner.

[0126] In the second coil 110B, when viewed in a direction parallel to the axis AX, the first through wiring 13 and the second through wiring 14 are not parallel to each other. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, the inner diameter of the coil 110B to be increased, and the Q value to be improved.

[0127] Specifically, the second through wiring 14 has the same configuration as the second through wiring 14 of the inductor component 1A of the first modified example. On the other hand, the first through wiring 13 has a linear shape parallel to the Z direction. In other words, the second through wiring 14 is bent at the center so that the distance between the first through wiring 13 and the second through wiring 14 becomes wider toward the center in the Z direction. The second through wiring 14 has a stepped shape along the Z direction. According to the above configuration, when the second through wiring 14 is formed by stacking multiple conductor layers, the second through wiring 14 can be easily formed in a stepped shape by stacking the conductor layers of each layer in a shifted manner.

[0128] (Fourth Modification) Fig. 6D is a view showing a fourth modification of an inductor component, corresponding to the cross section taken along line II-II in Fig. 1. As shown in Fig. 6D, an inductor component 1D of the fourth modification includes a first coil 110A and a second coil 110B, as compared to the inductor component 1B of the second modification shown in Fig. 6B.

[0129] In the first coil 110A, when viewed in a direction parallel to the axis AX, the first through wiring 13 and the second through wiring 14 are not parallel to each other. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, the inner diameter of the coil 110A to be increased, and the Q value to be improved.

[0130] Specifically, the first through wiring 13 has a configuration similar to that of the first through wiring 13 of the inductor component 1B of the second modified example. On the other hand, the second through wiring 14 has a linear shape parallel to the Z direction. That is, the first through wiring 13 is inclined so that the distance between the first through wiring 13 and the second through wiring 14 becomes wider in the Z direction toward the top surface wiring 11t. With the above configuration, the first through wiring 13 and the second through wiring 14 can be formed linearly and shortened, thereby reducing the DC resistance of the first through wiring 13 and the second through wiring 14.

[0131] In the second coil 110B, when viewed in a direction parallel to the axis AX, the first through wiring 13 and the second through wiring 14 are not parallel to each other. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, the inner diameter of the coil 110B to be increased, and the Q value to be improved.

[0132] Specifically, the second through wiring 14 has the same configuration as the second through wiring 14 of the inductor component 1B of the second modified example. On the other hand, the first through wiring 13 has a linear shape parallel to the Z direction. That is, the second through wiring 14 is inclined so that the distance between the first through wiring 13 and the second through wiring 14 becomes wider in the Z direction toward the top surface wiring 11t. With the above configuration, the first through wiring 13 and the second through wiring 14 can be formed linearly, and the electrical resistance of the first through wiring 13 and the second through wiring 14 can be reduced.

[0133] Second Embodiment Fig. 7 is a schematic bottom view showing a second embodiment of an inductor component, as viewed from the bottom side. In Fig. 7, for convenience, the external electrodes are depicted by two-dot chain lines. Also, in Fig. 7, the element body 10 is depicted as transparent to facilitate understanding of the structure. Also, in Fig. 7, the second end face side of the element body is omitted for convenience. The second embodiment differs from the first embodiment in the configuration of the via portions of the external electrodes, and this different configuration will be described below. The other configurations are the same as those of the first embodiment, and description thereof will be omitted.

[0134] As shown in Figure 7, the first external electrode 121E has a via portion 121vE connected to the coil 110, and the via portion 121vE is connected to the first wide coil wiring 11w1, and the area of ​​the contact surface CF1 with the via portion 121vE in the first wide coil wiring 11w1 is larger than the area of ​​the contact surface CF2 with the first through wiring 13 in the narrow bottom wiring 11nb and the narrow top wiring 11nt.

[0135] Specifically, the first external electrode 121E has a single via portion 121vE. The via portion 121vE is connected to the end of the first wide coil wiring 11w1 on the second side surface 100s2 side. When viewed from the Z direction, the shape of the via portion 121vE is elliptical with its major axis parallel to the Y direction. The area of ​​a contact surface CF1 between the first wide coil wiring 11w1 and the via portion 121vE is larger than the area of ​​a contact surface CF2 between the narrow bottom wiring 11nb and the first through wiring 13. This configuration can improve the connection strength between the first external electrode 121E and the first wide coil wiring 11w1.

[0136] Although not shown, the via portion of the second external electrode 122 may also have the same configuration as the via portion 121vE, and has the same effects as the above-described via portion 121vE.

[0137] Third Embodiment Fig. 8 is a schematic bottom view showing a third embodiment of an inductor component, as viewed from the bottom side. Fig. 9 is a cross-sectional view taken along line IX-IX in Fig. 8. In Fig. 8, external electrodes are depicted by two-dot chain lines for convenience. In Fig. 8, the element body 10 is depicted as transparent to facilitate understanding of the structure. In Fig. 8, the second end surface side of the element body is omitted for convenience. The third embodiment differs from the first embodiment in that there is no wide coil wiring on the bottom wiring side and in the thickness of the wide coil wiring on the top wiring side. These different configurations will be described below. The other configurations are the same as those of the first embodiment, and their description will be omitted.

[0138] As shown in FIGS. 8 and 9, the thickness of the third wide coil wiring 11w3 is thinner than the thickness of the narrow bottom wiring 11nb and the narrow top wiring 11nt.

[0139] Specifically, in this embodiment, the bottom wiring 11b located closest to the first end face 100e1 is not a wide coil wiring. This bottom wiring 11b extends linearly in a direction parallel to the narrow bottom wiring 11nb. The wiring width of this bottom wiring 11b is the same as the wiring width of the narrow bottom wiring 11nb. Furthermore, although not shown, the thickness of this bottom wiring 11b in the Z direction is the same as the thickness of the narrow bottom wiring 11nb in the Z direction.

[0140] The Z-direction thickness t2 of the third wide coil wiring 11w3 is thinner than the Z-direction thickness t1 of the bottom wiring 11b located closest to the first end face 100e1. In other words, the Z-direction thickness t2 of the third wide coil wiring 11w3 is thinner than the Z-direction thickness of the narrow bottom wiring 11nb (not shown). Note that the thickness t2 of the third wide coil wiring 11w3 only needs to be thinner than the thickness of at least one of the narrow bottom wirings 11nb and the narrow top wirings 11nt.

[0141] Since the third wide coil wiring 11w3 has a relatively large maximum width in the axial direction, an increase in electrical resistance can be suppressed even if the thickness is reduced. Therefore, with the above configuration, the electrical resistance of the entire coil 110F can be reduced compared to conventional inductor components, and a thin inductor component 1F can be realized.

[0142] Preferably, the first external electrode 121 is provided on the bottom surface 100b of the element body 10, and the wide coil wiring is included only in the multiple top surface wirings 11t. With this configuration, the distance between the wide coil wiring and the first external electrode 121 can be increased compared to when the wide coil wiring is included in multiple bottom surface wirings 11b. This reduces the parasitic capacitance between the wide coil wiring and the first external electrode 121, and increases the self-resonant frequency (SRF). Similarly, the second external electrode 122 may be provided on the bottom surface 100b of the element body 10, and the wide coil wiring may be included only in the multiple top surface wirings 11t.

[0143] Preferably, the wide coil wiring is included in only one of a first group consisting of a plurality of bottom wirings 11 b and a second group consisting of a plurality of top wirings 11 t, and the thickness of all of the coil wirings in the group including the wide coil wiring is thinner than the thickness of all of the coil wirings in the group not including the wide coil wiring. This configuration makes it possible to realize a thinner inductor component 1F.

[0144] <Fourth Embodiment> Fig. 10 is a schematic bottom view showing a fourth embodiment of an inductor component, as viewed from the bottom side. In Fig. 10, external electrodes are depicted by two-dot chain lines for convenience. In Fig. 10, the element body 10 is depicted as transparent to facilitate understanding of the structure. In Fig. 10, the second end surface side of the element body is omitted for convenience. The fourth embodiment differs from the third embodiment in the configuration of the first through wiring connected to the wide coil wiring, and this different configuration will be described below. The other configurations are the same as those of the third embodiment, and description thereof will be omitted.

[0145] As shown in Figure 10, the first wide coil wiring 11w1 is connected to the first through wiring 13G, and the area of ​​the contact surface CF3 of the first wide coil wiring 11w1 with the first through wiring 13G is larger than the area of ​​the contact surface CF4 of the narrow bottom wiring 11nb and the narrow top wiring 11nt with the first through wiring 13G.

[0146] Specifically, the first through wiring 13G located closest to the first end face 100e1 is connected to the end of the first wide coil wiring 11w1 on the first side face 100s1 side. When viewed from the Z direction, the shape of the first through wiring 13G is elliptical with its major axis parallel to the X direction. The area of ​​a contact surface CF3 of the first wide coil wiring 11w1 with the first through wiring 13G is larger than the area of ​​a contact surface CF4 of the narrow bottom surface wiring 11nb with the first through wiring 13.

[0147] According to the above configuration, the electrical resistance of the first through wiring 13G connected to the first wide coil wiring 11w1 can be reduced to be lower than the electrical resistance of the other first through wirings 13. As a result, the electrical resistance of the entire coil 110G can be reduced compared to the conventional case.

[0148] Furthermore, although not shown, the second through wiring connected to the second wide coil wiring 11w2 may also have the same configuration as the first through wiring 13G and have the same effects as the above-mentioned first through wiring 13G.

[0149] Fifth Embodiment FIG. 11 is a schematic bottom view showing a fifth embodiment of an inductor component, as viewed from the bottom side. FIG. 12 is a cross-sectional view taken along line XII-XII in FIG. 11. In FIG. 11, for convenience, external electrodes are depicted using two-dot chain lines. Also, in FIG. 11, the element body 10 is depicted as transparent to facilitate understanding of the structure. Also, in FIG. 11, the second end surface side of the element body is omitted for convenience. The fifth embodiment differs from the third embodiment in the configuration of the first through wiring connected to the wide coil wiring, and this different configuration will be described below. The other configurations are the same as those of the third embodiment, and description thereof will be omitted.

[0150] 11 and 12 , a first end face EF1 in the extension direction of the first through wiring 13H is connected to the top surface wiring 11t. The first end face EF1 is an end face of the first through wiring 13H on the top surface 100t side. A second end face EF2 in the extension direction of the first through wiring 13H is connected to the bottom surface wiring 11b. The second end face EF2 is an end face of the first through wiring 13H on the bottom surface 100b side. A third wide coil wiring 11w3 is connected to the first end face EF1. The area of ​​the first end face EF1 is larger than the area of ​​the second end face EF2.

[0151] Specifically, the first through wiring 13H located closest to the first end face 100e1 has a stepped side surface such that its width in the X direction increases stepwise from the bottom face 100b toward the top face 100t in a cross section including the extension direction of the first through wiring 13H. Therefore, the area of ​​the first end face EF1 is larger than the area of ​​the second end face EF2.

[0152] According to the above configuration, the electrical resistance of the first through wiring 13H connected to the third wide coil wiring 11w3 can be reduced below the electrical resistance of the other first through wirings 13. As a result, the electrical resistance of the entire coil 110H can be reduced compared to the conventional case.

[0153] Note that the shape of the first through wiring 13H does not have to be stepped as long as the area of ​​the first end face EF1 is larger than the area of ​​the second end face EF2. For example, the side surface of the first through wiring 13H may be linear, curved, or a combination of these so that the width in the X direction increases from the bottom surface 100b toward the top surface 100t in a cross section including the center line of the first through wiring 13H. In other words, the area of ​​the cross section of the first through wiring 13H perpendicular to the extending direction may increase continuously or stepwise from the second end face EF2 toward the first end face EF1.

[0154] Although not shown, the second through wiring located closest to the second end face 100e2 may also have the same configuration as the first through wiring 13H and has the same effects as the first through wiring H described above.

[0155] Sixth Embodiment FIG. 13 is a schematic bottom view showing a sixth embodiment of an inductor component, as viewed from the bottom side. FIG. 14 is a cross-sectional view taken along the line XIV-XIV of FIG. 13. In FIG. 13, for convenience, the insulating layers are omitted, and the external electrodes are depicted with two-dot chain lines. Also, in FIG. 13, the element body 10 is depicted as transparent to facilitate understanding of the structure. The sixth embodiment differs from the first embodiment mainly in the position of the coil axis, the configuration of the wide coil wiring, the orientation of the through-wiring, the material of the element body, and the presence of an insulating layer. These differences will be mainly described below. The remaining configuration is the same as that of the first embodiment, and description thereof will be omitted.

[0156] 1. Configuration of Each Part (Inductor Component 1I) As shown in Fig. 13 , in inductor component 1I, axis AX of coil 110 is perpendicular to the X direction. Specifically, axis AX is parallel to the Y direction and passes through the center of element body 10 in the X direction. This reduces the interference of magnetic flux of coil 110 by first external electrode 121 and second external electrode 122, thereby improving the efficiency of obtaining inductance.

[0157] The length of the coil 110 in the direction of the axis AX is shorter than the inner diameter of the coil 110. This allows the coil length to be short and the inner diameter to be large, thereby improving the Q value. The inner diameter of the coil refers to the diameter of a circle that is based on the minimum area of ​​the region surrounded by the coil 110 when viewed through from the direction of the axis AX.

[0158] (Element body 10) The element body 10 is an inorganic insulator. The material of the element body 10 is preferably glass, which has high insulating properties and can suppress eddy currents, thereby increasing the Q value. The element body 10 preferably contains silicon, which increases the thermal stability of the element body 10 and therefore suppresses fluctuations in the dimensions of the element body 10 due to heat, thereby reducing variations in electrical characteristics.

[0159] The element body 10 is preferably a single-layer glass plate. This ensures the strength of the element body 10. Furthermore, the single-layer glass plate has small dielectric loss, which allows for a high Q value at high frequencies. Furthermore, since there is no sintering process as in the case of sintered bodies, deformation of the element body 10 during sintering can be suppressed, thereby suppressing pattern misalignment and providing an inductor component with a small inductance tolerance.

[0160] As a material for the single-layer glass plate, from the viewpoint of the manufacturing method, a photosensitive glass plate, such as Foturan II (registered trademark of Schott AG), is preferred. In particular, the single-layer glass plate is preferably made of cerium oxide (ceria: CeO ２ In this case, cerium oxide acts as a sensitizer, making photolithographic processing easier.

[0161] However, the single-layer glass plate may be a glass plate that does not have photosensitivity, since it can be processed by mechanical processing such as drilling or sandblasting, dry / wet etching using a photoresist or metal mask, laser processing, etc. Furthermore, the single-layer glass plate may be one obtained by sintering a glass paste, or may be formed by a known method such as the float method.

[0162] 14 , the inductor component 1I has an insulator 22. The insulator 22 covers both the bottom surface 100b and the top surface 100t of the element body 10. The insulator 22 may be provided only on the bottom surface 100b out of the bottom surface 100b and the top surface 100t.

[0163] The insulator 22 is a component that covers the wiring (bottom wiring 11b, top wiring 11t) to protect the wiring from external forces, prevent damage to the wiring, and improve the insulation of the wiring. The insulator 22 is preferably an organic insulator. For example, the insulator 22 may be a resin film such as epoxy or polyimide, which is easy to form. In particular, the insulator 22 is preferably made of a material with a low dielectric constant, which can reduce the stray capacitance formed between the coil 110 and the external electrodes 121 and 122 when the insulator 22 is present between the coil 110 and the external electrodes 121 and 122. The insulator 22 can be formed, for example, by laminating a resin film such as ABF GX-92 (manufactured by Ajinomoto Fine-Techno Co., Ltd.) or by applying and thermally curing a paste-like resin. The insulator 22 may also be an inorganic film, such as an oxide, nitride, or oxynitride of silicon or hafnium, which has excellent insulating properties and can be thinned.

[0164] Preferably, when the element body 10 is an inorganic insulator and the insulator 22 is an organic insulator, the organic insulator is located inside the outer surface 100 of the inorganic insulator when viewed from a direction perpendicular to the bottom surface 100b. Since the organic insulator is included, the organic insulator is easily imparted with fluidity. When the wiring (bottom wiring 11b, top wiring 11t) is covered with the organic insulator, the organic insulator can be easily filled between adjacent wirings, improving insulation. Furthermore, since the organic insulator does not contact the outer surface of the inorganic insulator, the load on the organic insulator can be reduced when the element body 10 is singulated into individual inductor components, and deformation or peeling of the organic insulator can be suppressed.

[0165] (Coil 110) As shown in Fig. 13, the bottom wiring 11b extends in only one direction. Specifically, the bottom wiring 11b extends in the X direction. The multiple bottom wirings 11b are arranged in parallel along the Y direction. In this embodiment, the wiring width of each bottom wiring 11b is the same, and the coil wirings located at both ends of the multiple bottom wirings 11b in the axial AX direction are not wide coil wirings.

[0166] The multiple top surface wirings 11t are composed only of wide coil wirings. Specifically, the multiple top surface wirings 11t are composed of fifth wide coil wirings 11w5 arranged on the second side surface 100s2 side of the element body 10 and sixth wide coil wirings 11w6 arranged on the first side surface 100s1 side of the element body 10. When viewed from the Z direction, the fifth wide coil wiring 11w5 has a generally triangular shape whose width in the axial AX direction narrows from the first end surface 100e1 side to the second end surface 100e2 side of the element body 10. When viewed from the Z direction, the sixth wide coil wiring 11w6 has a generally triangular shape whose width in the axial AX direction narrows from the second end surface 100e2 side to the first end surface 100e1 side of the element body 10.

[0167] The first through wiring 13 is arranged on the first end face 100e1 side with respect to the axis AX within the through hole V of the element body 10, and the second through wiring 14 is arranged on the second end face 100e2 side with respect to the axis AX within the through hole V of the element body 10. The first through wiring 13 and the second through wiring 14 each extend in a direction perpendicular to the bottom surface 100b and the top surface 100t. The multiple first through wirings 13 and the multiple second through wirings 14 are each arranged in parallel along the Y direction.

[0168] Fig. 15 is an enlarged view of a portion of Fig. 13. Specifically, Fig. 15 is an enlarged view of the fifth wide coil wiring 11w5 and the narrow bottom wiring 11nb. As shown in Fig. 15, the maximum width W5 of the fifth wide coil wiring 11w5 in the axial AX direction is larger than the maximum width W6 of the narrow bottom wiring 11nb in the axial AX direction. The same is true for the sixth wide coil wiring 11w6. That is, the maximum width of the sixth wide coil wiring 11w6 in the axial AX direction is larger than the maximum width W6 of the narrow bottom wiring 11nb in the axial AX direction.

[0169] According to the above configuration, it is possible to arrange at least a portion of the fifth wide coil wiring 11w5 and the sixth wide coil wiring 11w6 in the dead spaces that existed at both ends of the element body 10 in the axial AX direction, where no coil wiring had conventionally existed, when viewed from a direction perpendicular to the bottom surface 100b of the element body 10. As a result, it is possible to effectively utilize the dead spaces of the element body 10 while reducing the electrical resistance of the entire coil 110 compared to conventional cases, and to increase the Q value of the inductor component 1I.

[0170] Furthermore, since the multiple top surface wirings 11t are made up of only wide coil wiring, the electrical resistance of the entire coil 110 can be reduced compared to conventional inductor components with a small number of turns.

[0171] The wide coil wiring is included in only one of the first group consisting of a plurality of bottom wirings 11b and the second group consisting of a plurality of top wirings 11t, and when viewed from a direction perpendicular to the bottom surface 100b, the ratio of the total area of ​​all coil wirings in the group including the wide coil wiring of the first and second groups to the area of ​​the bottom surface 100b is greater than the ratio of the total area of ​​all coil wirings in the group not including the wide coil wiring.

[0172] Specifically, as described above, the coil 110 includes the fifth wide coil wiring 11w5 and the sixth wide coil wiring 11w6 as wide coil wirings, and the fifth wide coil wiring 11w5 and the sixth wide coil wiring 11w6 are included only in the second group out of the first and second groups. When viewed in a direction perpendicular to the bottom surface 100b, the ratio of the total area of ​​all the top surface wirings 11t (i.e., the fifth wide coil wiring 11w5 and the sixth wide coil wiring 11w6) in the second group to the area of ​​the bottom surface 100b is greater than the ratio of the total area of ​​all the bottom surface wirings 11b in the first group to the area of ​​the bottom surface 100b. As an example, the ratio of the total area of ​​all the top surface wirings 11t is 70.5%, and the ratio of the total area of ​​all the bottom surface wirings 11b is 55.7%.

[0173] According to the above configuration, the ratio of all top surface wirings 11t in the second group including wide coil wiring can be increased while ensuring the number of turns of the coil 110. This can further suppress leakage of magnetic flux radially outward from the coil 110. Specifically, when the multiple top surface wirings 11t do not include wide coil wiring, each top surface wiring 11 can be configured to be slightly inclined in the Y direction and extend linearly in the X direction. In this case, the number of turns is approximately two, and the ratio is smaller than when the multiple top surface wirings 11t include wide coil wiring. On the other hand, according to the above configuration, the ratio can be increased while ensuring the number of turns of approximately two, compared to when the multiple top surface wirings 11t do not include wide coil wiring.

[0174] (Method of Manufacturing Inductor Component 1I) Next, a method of manufacturing inductor component 1I will be described with reference to Figures 16A to 16H, which are views corresponding to the cross section taken along line XIV-XIV in Figure 13.

[0175] 16A, copper foil 2001 is provided by printing on a base substrate 2000. The material of the base substrate 2000 is the same as that of the base substrate 1000 of the first embodiment.

[0176] As shown in FIG. 16B , a glass substrate 2010, which will become the element body 10, is provided on a base substrate 2000. For example, the base substrate 2000 and the glass substrate 2010 are tightly attached to each other using a jig such as conductive tape, pins, or a frame. The glass substrate 2010 has a through-hole V. The glass substrate 2010 is, for example, a TGV (Through Glass Via) substrate. A TGV substrate is a substrate in which through-holes are formed in advance using a laser, photolithography, or the like. The glass substrate 2010 may be, for example, a TSV (Through Silicon Via) substrate, or may be something else. Furthermore, Ti / Cu or other necessary conductive materials may be deposited in advance as seeds on the surface of the glass substrate 2010 by sputtering or the like.

[0177] As shown in FIG. 16C , a first through conductor layer 2013, which will become the first through wiring 13, is formed in the through hole V of the glass substrate 2010. Although not shown, a second through conductor layer, which will become the second through wiring 14, is similarly formed in the through hole V. Specifically, by supplying power from the copper foil 2001 on the base substrate 2000, electrolytic plating is performed in the through hole V of the glass substrate 2010 to form the first through conductor layer 2013. Alternatively, a seed layer may be formed on the surface of the glass substrate 2010 or the inner surface of the through hole V by sputtering or the like, and the through conductor layer may be formed using known methods such as fill plating, conformal plating, or a printing and filling method of a conductive paste. If there is unnecessary plating growth on the surface of the glass substrate 2010, the unnecessary portions may be removed by polishing, CMP, wet etching (etch-back), or dry etching.

[0178] 16D, the base substrate 2000 is peeled off from the glass substrate 2010. At this time, the base substrate 2000 may be removed mechanically by grinding or the like, or may be removed chemically by etching or the like.

[0179] As shown in FIG. 16E , a bottom conductor layer 2011b that will become the bottom wiring 11b and a top conductor layer 2011t that will become the top wiring 11t are formed on a glass substrate 2010. Specifically, a seed layer (not shown) is provided on the entire surface of the glass substrate 2010, and a patterned photoresist is formed on the seed layer. A copper layer is formed by electrolytic plating on the seed layer in the openings of the photoresist. The photoresist and seed layer are then removed by wet etching or dry etching. This results in the formation of a bottom conductor layer 2011b and a top conductor layer 2011t that are patterned into any desired shape. At this time, the bottom conductor layer 2011b and the top conductor layer 2011t may be formed one at a time, or both may be formed simultaneously.

[0180] 16F , insulating layers 2022 that will become insulators 22 are provided on the top and bottom surfaces of glass substrate 2010 so as to cover the conductor layers. At this time, bottom-side insulating layer 2022 and top-side insulating layer 2022 may be formed one at a time, or both may be formed simultaneously. Thereafter, holes 2022a are formed on bottom-side conductor layer 2011b of bottom-side insulating layer 2022 using photolithography or laser processing.

[0181] As shown in FIG. 16G , a first external electrode conductor layer 2121, which will become the first external electrode 121, is provided on the bottom insulating layer 2022. At this time, the first external electrode conductor layer 2121 is connected to the bottom conductor layer 2011b via the hole 2022a. Specifically, a Pd catalyst (not shown) is provided on the bottom insulating layer 2022, and a Ni and Au plating layer is formed by electroless plating. A patterned photoresist is formed on the plating layer. The plating layer in the openings of the photoresist is removed by wet etching or dry etching. This forms the first external electrode conductor layer 2121 patterned into a desired shape. Alternatively, a seed layer (not shown) is provided on the bottom insulating layer 2022, and a patterned photoresist is formed on the seed layer. Next, the seed layer in the openings of the photoresist is removed by wet etching or dry etching. A Ni and Au plating layer may be formed on the remaining seed layer by electroless plating. Although not shown, a second external electrode conductor layer that will become the second external electrode 122 is similarly provided on the insulating layer 2022 on the bottom surface side.

[0182] Here, since the first external electrode conductor layer 2121 is formed to follow the shape of the upper surface of the bottom insulating layer 2022, the upper surface of the first external electrode conductor layer 2121 has a depression in the region overlapping the hole 2022a. Note that the upper surface of the first external electrode conductor layer 2121 may be formed to be flat.

[0183] 16H, the substrate is separated into individual pieces along the cutting lines C. In this way, the inductor component 1I is manufactured as shown in FIG.

[0184] 2. Modifications (First Modification) FIG. 17A is a cross-sectional view corresponding to the XIV-XIV cross section of FIG. 13 , illustrating a first modification of an inductor component. As shown in FIG. 17A , in an inductor component 1J of the first modification, the first external electrode 121 is connected to the first through wire 13 rather than the bottom wiring 11b. That is, the first end of the first through wire 13 is connected to the first external electrode 121, and the second end of the first through wire 13 is connected to the fifth wide coil wiring 11w5. This allows the coil to be easily connected to the first external electrode 121 even if the number of turns of the coil is changed. Similarly, the second external electrode 122 may be connected to the second through wire 14 rather than the bottom wiring 11b.

[0185] (Second Modification) Fig. 17B is a view corresponding to the XIV-XIV cross section of Fig. 13 , illustrating a second modification of an inductor component. As shown in Fig. 17B , in an inductor component 1K of the second modification, first through wiring 13 extends in a direction perpendicular to bottom wiring 11b, and the cross-sectional area of ​​each of end portions 13e of first through wiring 13 in the extension direction is larger than the cross-sectional area of ​​central portion 13m of first through wiring 13 in the extension direction. That is, in a cross section along the extension direction of first through wiring 13, the width in the direction perpendicular to the extension direction of first through wiring 13 continuously increases from central portion 13m toward end portions 13e.

[0186] This allows the cross-sectional area of ​​the end 13e of the first through wiring 13 to be increased, thereby improving the connectivity between the first through wiring 13 and at least one of the bottom wiring 11b and the top wiring 11t. Furthermore, when forming a through hole V as a hole portion in the element body 10 and filling the through hole V with a conductive material by filling plating or the like to form the first through wiring 13 in the through hole V, it is easy to fill the conductive material on the opening side of the through hole V. Furthermore, since the cross-sectional area of ​​the end 13e of the first through wiring 13 is large and the cross-sectional area of ​​the central portion 13m of the first through wiring 13 is small, the first through wiring 13 is easy to form.

[0187] It is sufficient that the cross-sectional area of ​​one end 13e of the first through wiring 13 is larger than the cross-sectional area of ​​the central portion 13m of the first through wiring 13. Similarly, the cross-sectional area of ​​at least one end of the second through wiring 14 may be larger than the cross-sectional area of ​​the central portion 13m of the first through wiring 13.

[0188] (Third Modification) Figure 17C is a cross-sectional view corresponding to the XIV-XIV cross section of Figure 13, illustrating a third modification of an inductor component. As shown in Figure 17C, in an inductor component 1L of the third modification, the first through wiring 13 has a conductive layer 13s located on the outer periphery when viewed from the direction in which the first through wiring 13 extends, and a non-conductive layer 13u located inside the conductive layer 13s. When used in a high frequency band, current flows mainly through the surface of the first through wiring 13 due to the skin effect, so providing the conductive layer 13s on the outer periphery does not reduce the Q value. Furthermore, providing the non-conductive layer 13u on the inner side can alleviate stress and reduce manufacturing costs by not using a conductor.

[0189] An example of a method for forming the conductive layer 13s and the non-conductive layer 13u will be described. A seed layer is provided on the inner surface of the through hole V of the element body 10 by sputtering or electroless plating. Then, a plating layer is formed on the seed layer by electrolytic plating. In this manner, multiple conductive layers 13s, such as Ti / Cu / electrolytic Cu or Pd / electroless Cu / electrolytic Cu, can be formed on the outer periphery of the first through wiring 13. The inside of the conductive layer 13s is then sealed with resin by printing, heat pressing, or the like, to form the non-conductive layer 13u made of resin. In this manner, current can flow through the surface (conductive layer 13s) of the first through wiring 13, while stress can be alleviated by the non-conductive layer 13u inside the first through wiring 13.

[0190] Similarly, the second through wiring 14 may have a conductive layer located on the outer periphery when viewed in the direction in which the second through wiring 14 extends, and a non-conductive layer located inside the conductive layer.

[0191] The present disclosure is not limited to the above-described embodiments, and design modifications are possible within the scope of the present disclosure. For example, the features of the first to sixth embodiments may be combined in various ways.

[0192] In the above embodiment, the plurality of bottom wirings and the plurality of top wirings include two or more wide coil wirings, but it is sufficient that at least one wide coil wiring is included.

[0193] In the third embodiment, the thickness of the third wide coil wiring was relatively thin, but if the coil includes other wide coil wirings such as the first wide coil wiring, the second wide coil wiring, and the fourth wide coil wiring, the thickness of these other wide coil wirings may be relatively thin.

[0194] In the fifth embodiment, the bottom wiring located closest to the first end face of the element body is not a wide coil wiring, and the top wiring located closest to the first end face of the element body is a wide coil wiring. However, the bottom wiring located closest to the first end face of the element body may be a wide coil wiring, and the top wiring located closest to the first end face of the element body may not be a wide coil wiring. In this case, the area of ​​the end face on the bottom wiring side of the first through wiring located closest to the first end face of the element body may be larger than the area of ​​the end face on the top wiring side. The same applies to the second through wiring located closest to the second end face of the element body.

[0195] In the sixth embodiment, the plurality of top surface wirings are composed only of wide coil wirings, but the plurality of bottom surface wirings may be composed only of wide coil wirings. In this case, the plurality of top surface wirings may not include wide coil wirings.

[0196] The present disclosure includes the following aspects. <1> An element body including a first main surface and a second main surface opposing each other; a coil provided on the element body and wound spirally along an axis; and a first external electrode and a second external electrode provided on the element body and electrically connected to the coil, wherein the axis of the coil is arranged parallel to the first main surface, and the coil includes: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring toward the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring toward the second coil wiring and provided on the opposite side of the axis to the first through wires and arranged along the axis, and the first coil wiring, the first through wire, the second coil wiring, and the second through wire are connected in this order to form at least a part of the spiral shape, An inductor component, wherein at least one of two end first coil wirings located at both ends in the axial direction among the plurality of first coil wirings and two end second coil wirings located at both ends in the axial direction among the plurality of second coil wirings is a wide coil wiring, and the wide coil wiring has a maximum width in the axial direction greater than the maximum width in the axial direction of at least one of the inner coil wirings excluding the end first coil wirings and the end second coil wirings among the plurality of first coil wirings and the plurality of second coil wirings. <2> The inductor component according to <1>, wherein the maximum width in the axial direction of the wide coil wiring is greater than the maximum width in the axial direction of all of the inner coil wirings. <3> The inductor component according to <1> or <2>, wherein the first external electrode is provided on the first main surface of the element body, and the wide coil wiring is included only in the plurality of first coil wirings. <4> The inductor component according to <1> or <2>, wherein the first external electrode is provided on the first main surface of the element body, and the wide coil wiring is included only in the plurality of second coil wirings.<5> The inductor component according to any one of <1> to <4>, wherein the width of the wide coil wiring in the axial direction is not constant in a direction perpendicular to the axial direction. <6> The inductor component according to any one of <1> to <5>, wherein the first external electrode has a via portion connected to the coil, the via portion is connected to the wide coil wiring, and a contact surface area of ​​the wide coil wiring with the via portion is larger than a contact surface area of ​​at least one of the inner coil wirings with the first through wiring. <7> The inductor component according to any one of <1> to <6>, wherein the first external electrode has a plurality of via portions connected to the coil, and the plurality of via portions are connected to the wide coil wiring. <8> The inductor component according to any one of <1> to <7>, wherein a thickness of the wide coil wiring is thinner than a thickness of at least one of the inner coil wirings. <9> The inductor component according to any one of <1> to <8>, wherein the wide coil wiring is included in only one of a first group consisting of the plurality of first coil wirings and a second group consisting of the plurality of second coil wirings, and wherein a thickness of all of the coil wirings in the first group or the second group including the wide coil wiring is thinner than a thickness of all of the coil wirings in the group not including the wide coil wiring. <10> The inductor component according to any one of <1> to <9>, wherein either the plurality of first coil wirings or the plurality of second coil wirings is composed only of the wide coil wiring. <11> The inductor component according to any one of <1> to <10>, wherein, when viewed in a direction orthogonal to the first main surface, a ratio of a total area of ​​the plurality of first coil wirings to an area of ​​the first main surface is 50% or more and 95% or less, and a ratio of a total area of ​​the plurality of second coil wirings to an area of ​​the first main surface is 50% or more and 95% or less.<12> The inductor component according to any one of <1> to <11>, wherein the wide coil wiring is included in at least one of a first group consisting of the plurality of first coil wirings and a second group consisting of the plurality of second coil wirings, and wherein, when viewed in a direction orthogonal to the first main surface, a ratio of a total area of ​​all of the coil wirings in the group including the wide coil wiring from the first group and the second group to an area of ​​the first main surface is 65% or more. <13> The inductor component according to any one of <1> to <12>, wherein the wide coil wiring is included in only one of the first group consisting of the plurality of first coil wirings and the second group consisting of the plurality of second coil wirings, and wherein, when viewed in a direction orthogonal to the first main surface, a ratio of a total area of ​​all of the coil wirings in the group including the wide coil wiring from the first group and the second group to an area of ​​the first main surface is greater than a ratio of a total area of ​​all of the coil wirings in a group not including the wide coil wiring from the first main surface to an area of ​​the first main surface. <14> The inductor component according to any one of <1> to <9>, wherein the wide coil wiring is included in both the plurality of first coil wirings and the plurality of second coil wirings. <15> The inductor component according to any one of <1> to <14>, wherein, when viewed in a direction orthogonal to the first main surface, the wide coil wiring has a corner on the radially outer side of the coil and toward the center of the element body along the axial direction, and the wide coil wiring is connected to the first through wiring at the corner. <16> The inductor component according to any one of <1> to <15>, wherein, when viewed in a direction orthogonal to the first main surface, the outline of the wide coil wiring has a portion that follows the outline of the element body and a portion that follows the outline of one of the first coil wiring and the second coil wiring that is adjacent to the wide coil wiring in the axial direction on the same plane as the wide coil wiring. <17> The inductor component according to any one of <1> to <16>, wherein the wide coil wiring is connected to the first through wiring, and the area of ​​a contact surface of the wide coil wiring with the first through wiring is larger than the area of ​​a contact surface of at least one of the inner coil wirings with the first through wiring.<18> The inductor component according to any one of <1> to <17>, wherein a first end face in the extension direction of the first through wiring is connected to either the first coil wiring or the second coil wiring, a second end face in the extension direction of the first through wiring is connected to the other of the first coil wiring or the second coil wiring, the wide coil wiring is connected to at least the first end face of the first end face and the second end face, and an area of ​​the first end face is larger than an area of ​​the second end face.

[0197] 1, 1A-1L Inductor component 10 Body 11b Bottom wiring (first coil wiring) 11nb Narrow bottom wiring 11t Top wiring (second coil wiring) 11nt Narrow top wiring 11w1-11w6 Wide coil wiring 13, 13G, 13H First through wiring 13e End 13m Central portion 13s Conductive layer 13u Non-conductive layer 14 Second through wiring 22 Insulator 100b Bottom surface (first main surface) 100t Top surface (second main surface) 100e1 First end surface 100e2 Second end surface 100s1 First side surface 100s2 Second side surface 110, 110F, 110G, 110H Coil 121 First external electrode 121b Bottom surface portion 121v, 121vE Via portion 121e1 Underlayer 121e2 Plating layer 122 Second external electrode 122b Bottom portion 122v Via portion AX Axis C1, C2 Corner portion CF1-CF4 Contact surface EF1, EF2 End surface t1, t2 Thickness V Through hole W1-W6 Maximum width in the axial direction

Claims

1. A base body including a first main surface and a second main surface facing each other, a coil provided on the base body and wound spirally along an axis, a first external electrode and a second external electrode provided on the base body and electrically connected to the coil, comprising: the axis of the coil is arranged parallel to the first main surface, the coil a plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface, a plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface, a plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis, a plurality of second through wirings extending from the first coil wiring toward the second coil wiring and provided on the side opposite to the first through wiring with respect to the axis and arranged along the axis including, the first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to constitute at least a part of the spiral shape, at least one of two end first coil wirings located at both axial ends along the axis among the plurality of first coil wirings and two end second coil wirings located at both axial ends among the plurality of second coil wirings is a wide coil wiring, the maximum width in the axial direction of the wide coil wiring is larger than the maximum width in the axial direction of at least one of the inner coil wirings excluding the end first coil wiring and the end second coil wiring among the plurality of first coil wirings and the plurality of second coil wirings, the first external electrode has a via portion connected to the coil, the via portion is connected to the wide coil wiring, an inductor component in which the area of the contact surface of the wide coil wiring with the via portion is larger than the area of the contact surface of at least one of the inner coil wirings with the first through wiring.

2. A base body including a first main surface and a second main surface facing each other, a coil provided on the base body and wound spirally along an axis, a first external electrode and a second external electrode provided on the base body and electrically connected to the coil, comprising: the axis of the coil is arranged parallel to the first main surface, the coil A plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface; A plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface; A plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis; A plurality of second through wirings extending from the first coil wiring toward the second coil wiring, provided on the side opposite to the first through wiring with respect to the axis, and arranged along the axis including; The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to constitute at least a part of the spiral shape. At least one of two end first coil wirings located at both axial ends along the axis among the plurality of first coil wirings and two end second coil wirings located at both axial ends among the plurality of second coil wirings is a wide coil wiring. The wide coil wiring has a maximum width in the axial direction that is larger than the maximum width in the axial direction of at least one of the inner coil wirings excluding the end first coil wiring and the end second coil wiring among the plurality of first coil wirings and the plurality of second coil wirings. The first external electrode has a plurality of via portions connected to the coil. An inductor component in which the plurality of via portions are connected to the wide coil wiring.

3. A base body including a first main surface and a second main surface facing each other; A coil provided on the base body and wound spirally along an axis; A first external electrode and a second external electrode provided on the base body and electrically connected to the coil; comprising; The axis of the coil is arranged parallel to the first main surface. The coil is A plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface; A plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface; A plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis; A plurality of second through-wiring lines that extend from the first coil wiring toward the second coil wiring, are provided on the side opposite to the first through-wiring lines with respect to the axis, and are arranged along the axis, and include the first coil wiring, the first through-wiring lines, the second coil wiring, and the second through-wiring lines are connected in this order to constitute at least a part of the spiral shape, at least one of two end first coil wirings located at both axial ends along the axis among the plurality of first coil wirings and two end second coil wirings located at both axial ends among the plurality of second coil wirings is a wide coil wiring, the maximum width in the axial direction of the wide coil wiring is larger than the maximum width in the axial direction of at least one coil wiring among the inner coil wirings excluding the end first coil wirings and the end second coil wirings among the plurality of first coil wirings and the plurality of second coil wirings, the thickness of the wide coil wiring is thinner than the thickness of at least one coil wiring among the inner coil wirings, an inductor component.

4. A base body including a first main surface and a second main surface facing each other, a coil provided on the base body and wound spirally along an axis, a first external electrode and a second external electrode provided on the base body and electrically connected to the coil, and comprising the axis of the coil is arranged parallel to the first main surface, the coil a plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface, a plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface, a plurality of first through-wiring lines that extend from the first coil wiring toward the second coil wiring and are arranged along the axis, a plurality of second through-wiring lines that extend from the first coil wiring toward the second coil wiring, are provided on the side opposite to the first through-wiring lines with respect to the axis, and are arranged along the axis, and include the first coil wiring, the first through-wiring lines, the second coil wiring, and the second through-wiring lines are connected in this order to constitute at least a part of the spiral shape, Of the plurality of first coil wirings, at least one of the two end first coil wirings located at both axial ends along the axis, and at least one of the two end second coil wirings located at both axial ends of the plurality of second coil wirings is a wide coil wiring. The wide coil wiring has a maximum width in the axial direction that is greater than the maximum width in the axial direction of at least one of the inner coil wirings excluding the end first coil wiring and the end second coil wiring among the plurality of first coil wirings and the plurality of second coil wirings. The wide coil wiring is included in only one of the first group consisting of the plurality of first coil wirings and the second group consisting of the plurality of second coil wirings. An inductor component in which the thickness of all coil wirings in the group including the wide coil wiring among the first group and the second group is thinner than the thickness of all coil wirings in the group not including the wide coil wiring.

5. A base body including a first main surface and a second main surface facing each other, A coil provided on the base body and wound spirally along an axis, A first external electrode and a second external electrode provided on the base body and electrically connected to the coil, Comprising, The axis of the coil is arranged parallel to the first main surface, The coil is, A plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface, A plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface, A plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis, A plurality of second through wirings extending from the first coil wiring toward the second coil wiring and provided on the side opposite to the first through wiring with respect to the axis and arranged along the axis Including, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to constitute at least a part of the spiral shape. Of the plurality of first coil wirings, at least one of the two end first coil wirings located at both axial ends along the axis, and at least one of the two end second coil wirings located at both axial ends of the plurality of second coil wirings is a wide coil wiring. The wide coil wiring has a maximum width in the axial direction that is larger than the maximum width in the axial direction of at least one of the inner coil wirings among the plurality of first coil wirings and the plurality of second coil wirings, excluding the both-end first coil wirings and the both-end second coil wirings. Either one of the plurality of first coil wirings and the plurality of second coil wirings is an inductor component composed only of the wide coil wiring. **Claim 6**: A base body including a first main surface and a second main surface facing each other, a coil provided on the base body and wound spirally along an axis, a first external electrode and a second external electrode provided on the base body and electrically connected to the coil, comprising: the axis of the coil is arranged parallel to the first main surface, the coil includes a plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface, a plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface, a plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis, and a plurality of second through wirings extending from the first coil wiring toward the second coil wiring and provided on the side opposite to the first through wiring with respect to the axis and arranged along the axis. The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a part of the spiral shape. At least one of two both-end first coil wirings located at both ends in the axial direction along the axis among the plurality of first coil wirings and two both-end second coil wirings located at both ends in the axial direction among the plurality of second coil wirings is a wide coil wiring. The wide coil wiring has a maximum width in the axial direction that is larger than the maximum width in the axial direction of at least one of the inner coil wirings among the plurality of first coil wirings and the plurality of second coil wirings, excluding the both-end first coil wirings and the both-end second coil wirings. When viewed from a direction orthogonal to the first main surface, the wide coil wiring has a corner on the outer side in the radial direction of the coil and on the central side of the base body along the axial direction, and the wide coil wiring is an inductor component connected to the first through wiring at the corner. ​

7. A base body including a first main surface and a second main surface facing each other, a coil provided on the base body and wound spirally along an axis, a first external electrode and a second external electrode provided on the base body and electrically connected to the coil, comprising: the axis of the coil is arranged parallel to the first main surface, the coil a plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface, a plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface, a plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis, a plurality of second through wirings extending from the first coil wiring toward the second coil wiring, provided on the side opposite to the first through wiring with respect to the axis, and arranged along the axis including, the first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to constitute at least a part of the spiral shape, at least one of two end first coil wirings located at both axial ends along the axis among the plurality of first coil wirings and two end second coil wirings located at both axial ends among the plurality of second coil wirings is a wide coil wiring, the maximum width in the axial direction of the wide coil wiring is larger than the maximum width in the axial direction of at least one coil wiring among the inner coil wirings excluding the end first coil wiring and the end second coil wiring among the plurality of first coil wirings and the plurality of second coil wirings, the wide coil wiring is connected to the first through wiring, an inductor component in which the area of the contact surface of the wide coil wiring with the first through wiring is larger than the area of the contact surface of at least one coil wiring among the inner coil wirings with the first through wiring.

8. A base body including a first main surface and a second main surface facing each other, a coil provided on the base body and wound spirally along an axis, a first external electrode and a second external electrode provided on the base body and electrically connected to the coil, comprising: the axis of the coil is arranged parallel to the first main surface, the coil A plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface; A plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface; A plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis; A plurality of second through wirings extending from the first coil wiring toward the second coil wiring and provided on the side opposite to the first through wiring with respect to the axis and arranged along the axis including; The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to constitute at least a part of the spiral shape. At least one of two end first coil wirings located at both axial ends along the axis among the plurality of first coil wirings and two end second coil wirings located at both axial ends among the plurality of second coil wirings is a wide coil wiring. The wide coil wiring has a maximum width in the axial direction that is larger than the maximum width in the axial direction of at least one of the inner coil wirings among the plurality of first coil wirings and the plurality of second coil wirings, excluding the end first coil wiring and the end second coil wiring. A first end face in the extending direction of the first through wiring is connected to either the first coil wiring or the second coil wiring. A second end face in the extending direction of the first through wiring is connected to the other of the first coil wiring and the second coil wiring. The wide coil wiring is connected to at least the first end face among the first end face and the second end face. An inductor component in which the area of the first end face is larger than the area of the second end face.

9. The inductor component according to any one of claims 1 to 8, wherein the wide coil wiring has a maximum width in the axial direction that is larger than the maximum width in the axial direction of all the inner coil wirings.

10. The first external electrode is provided on the first main surface of the element body. The inductor component according to any one of claims 1 to 8, wherein the wide coil wiring is included only in the plurality of first coil wirings.

11. The first external electrode is provided on the first main surface of the element body. The wide coil wiring is included only in the plurality of second coil wirings, and the inductor component according to any one of claims 1 to 8.

12. The width of the wide coil wiring in the axial direction is not constant in the direction orthogonal to the axial direction, and the inductor component according to any one of claims 1 to 8.

13. When viewed from the direction orthogonal to the first main surface, The ratio of the total area of the plurality of first coil wirings to the area of the first main surface is 50% or more and 95% or less, The ratio of the total area of the plurality of second coil wirings to the area of the first main surface is 50% or more and 95% or less, and the inductor component according to any one of claims 1 to 8.

14. The wide coil wiring is included in at least one of a first group composed of the plurality of first coil wirings and a second group composed of the plurality of second coil wirings, When viewed from the direction orthogonal to the first main surface, The ratio of the total area of all coil wirings in the group including the wide coil wiring among the first group and the second group to the area of the first main surface is 65% or more, and the inductor component according to any one of claims 1 to 8.

15. The wide coil wiring is included only in one of a first group composed of the plurality of first coil wirings and a second group composed of the plurality of second coil wirings, When viewed from the direction orthogonal to the first main surface, The ratio of the total area of all coil wirings in the group including the wide coil wiring among the first group and the second group to the area of the first main surface is larger than the ratio of the total area of all coil wirings in the group not including the wide coil wiring to the area of the first main surface, and the inductor component according to any one of claims 1 to 8.

16. The wide coil wiring is included in both the plurality of first coil wirings and the plurality of second coil wirings, and the inductor component according to any one of claims 1 to 4 and 6 to 8.

17. When viewed from the direction orthogonal to the first main surface, The outer shape of the wide coil wiring has a portion along the outer shape of the element body and a portion along the outer shape of the coil wiring adjacent to the wide coil wiring in the axial direction on the same plane as the wide coil wiring among the first coil wiring and the second coil wiring, and the inductor component according to any one of claims 1 to 8.

18. The first external electrode has a plurality of via portions connected to the coil, The inductor component according to claim 1, wherein the plurality of via portions are connected to the wide coil wiring.

19. The inductor component according to claim 1 or 2, wherein the thickness of the wide coil wiring is thinner than the thickness of at least one of the inner coil wirings.

20. The wide coil wiring is included in only one of a first group consisting of the plurality of first coil wirings and a second group consisting of the plurality of second coil wirings. The inductor component according to any one of claims 1 to 3, wherein the thickness of all the coil wirings in the group including the wide coil wiring among the first group and the second group is thinner than the thickness of all the coil wirings in the group not including the wide coil wiring.

21. The inductor component according to any one of claims 1 to 4, wherein either one of the plurality of first coil wirings and the plurality of second coil wirings is composed of only the wide coil wiring.

22. When viewed from a direction orthogonal to the first main surface, the wide coil wiring has a corner on the radially outer side of the coil and on the central side of the element along the axial direction. The inductor component according to any one of claims 1 to 5, wherein the wide coil wiring is connected to the first through wiring at the corner.

23. The wide coil wiring is connected to the first through wiring. The inductor component according to any one of claims 1 to 6, wherein the area of the contact surface of the wide coil wiring with the first through wiring is larger than the area of the contact surface of at least one of the inner coil wirings with the first through wiring.

24. A first end face in the extending direction of the first through wiring is connected to either one of the first coil wiring and the second coil wiring. A second end face in the extending direction of the first through wiring is connected to the other of the first coil wiring and the second coil wiring. The wide coil wiring is connected to at least the first end face among the first end face and the second end face. The inductor component according to any one of claims 1 to 7, wherein the area of the first end face is larger than the area of the second end face.

25. An element including a first main surface and a second main surface facing each other, a coil provided on the element and wound spirally along an axis, a first external electrode and a second external electrode provided on the element and electrically connected to the coil, and comprising. The axis of the coil is arranged parallel to the first main surface, The coil is a plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface, a plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface, a plurality of first through wirings extending from the first coil wiring toward the second coil wiring and arranged along the axis, a plurality of second through wirings extending from the first coil wiring toward the second coil wiring and provided on the side opposite to the first through wiring with respect to the axis and arranged along the axis and includes the first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to constitute at least a part of the spiral shape, at least one of two end first coil wirings located at both axial ends along the axis among the plurality of first coil wirings and two end second coil wirings located at both axial ends among the plurality of second coil wirings is a wide coil wiring, the maximum width in the axial direction of the wide coil wiring is larger than the maximum width in the axial direction of at least one of the inner coil wirings excluding the end first coil wiring and the end second coil wiring among the plurality of first coil wirings and the plurality of second coil wirings, when viewed from a direction orthogonal to the first main surface, the wide coil wiring is located at a corner of the outer shape of the element body, the outer shape of the wide coil wiring has a portion extending along the corner of the outer shape of the element body, an inductor component in which the width of the wide coil wiring in the axial direction becomes smaller as it moves away from the corner.