Discharge cell for ozone generation and ozone gas generation device

Abstract

Cooling flow paths (HP2, LP2) include at least: first flow paths (81) that extend in a second direction perpendicular to a first direction and are positioned toward the gas downstream side in a discharge space (63); second flow paths (82) that extend in the second direction and are positioned on the gas upstream side from the first flow path (81) in the discharge space (63); and an intermediate flow path (83) that extends in the first direction and connects outflow ends of the first flow paths (81) and inflow ends of the second flow paths (82).

Description

Discharge cell for generating ozone and ozone gas generator

[0001] The present disclosure relates to a discharge cell for ozone generation.

[0002] Patent Document 1 discloses a discharge cell for generating ozone. The discharge cell includes a discharge unit having a high-voltage electrode module and a low-voltage electrode module, and a cooling flow path that cools the discharge unit. In the discharge unit, a discharge space is formed between the high-voltage electrode module and the low-voltage electrode module. When a high voltage is applied to the high-voltage electrode of the high-voltage electrode module, a barrier discharge occurs in the discharge space and ozone gas is generated. When heat is generated as a result of the discharge, the temperature of the discharge space rises and the generated ozone is decomposed by the heat. Therefore, the discharge unit is cooled by a heat medium in the cooling flow path, thereby suppressing the decomposition of ozone due to the heat.

[0003] JP 2012-167009 A

[0004] In the discharge cell disclosed in Patent Document 1, the cooling flow path sometimes fails to sufficiently cool the discharge section, resulting in a large amount of ozone being decomposed by heat in the discharge section, and a decrease in the efficiency of ozone gas generation.

[0005] An object of the present disclosure is to provide a discharge cell that can improve the efficiency of generating ozone gas.

[0006] The present invention relates to a discharge cell (20) for an ozone generator. The discharge cell (20) includes a high-voltage electrode module (62) including a high-voltage electrode (62c) and a low-voltage electrode module (61) including a low-voltage electrode (61c), and the discharge cell (20) includes a discharge section (60) in which a dielectric (61a, 62a) is provided in at least one of the high-voltage electrode module (62) and the low-voltage electrode module (61), and a discharge space (63) in which a gas flows in a first direction is formed between the high-voltage electrode module (62) and the low-voltage electrode module (61), and cooling flow paths (HP2, LP2) in which a heat medium flows to cool the discharge section (60). The cooling flow paths (HP2, LP2) include at least a first flow path (81) extending along a second direction intersecting the first direction and positioned closer to the downstream side of the gas in the discharge space (63), a second flow path (82) extending along the second direction and positioned closer to the upstream side of the gas in the discharge space (63) than the first flow path (81), and an intermediate flow path (83) extending along the first direction and connecting the outlet end of the first flow path (81) and the inlet end of the second flow path (82).

[0007] In the present invention, the first flow path (81) is located closer to the downstream side of the gas in the discharge space (63). The concentration of ozone gas downstream of the discharge space (63) is higher than that upstream of the discharge space (63). In contrast, the first flow path (81) is located upstream of the cooling flow paths (HP2, LP2) and has a relatively low temperature of the heat medium. Therefore, the downstream side of the discharge space (63), through which the high-concentration ozone gas passes, can be cooled by the relatively low-temperature heat medium. The heat medium in the intermediate flow path (83) and the gas in the discharge space (63) flow in opposite directions. Therefore, the upstream side of the intermediate flow path (83) can cool the downstream side of the discharge space (63), through which the relatively high-concentration ozone gas passes, by the relatively low-temperature heat medium. This makes it possible to remove heat associated with the discharge and maintain the downstream side of the discharge space (63) at a low temperature. As a result, decomposition of the high-concentration gas flowing downstream of the discharge space (63) can be suppressed.

[0008] The second flow path (82) is located closer to the upstream side of the gas in the discharge space (63). The second flow path (82) is located downstream of the cooling flow paths (HP2, LP2), and the temperature of the heat medium is relatively high. However, the concentration of ozone gas is relatively low upstream of the discharge space (63). Therefore, the amount of ozone gas decomposed due to the high temperature of the heat medium is relatively small upstream of the discharge space (63). As a result, in the present invention, the amount of ozone gas decomposed can be reduced throughout the entire discharge space (63), thereby improving the efficiency of ozone gas generation.

[0009] It is preferable that the discharge cell (20) for the ozone generator includes a high-pressure side cooling flow path (HP2) as the cooling flow path (HP2, LP2) through which a heat medium for cooling the high-voltage electrode module (62) flows, and a low-pressure side cooling flow path (LP2) as the cooling flow path (HP2, LP2) through which a heat medium for cooling the low-voltage electrode module (61) flows.

[0010] This configuration allows the high voltage electrode module (62) and the low voltage electrode module (61) of the discharge cell (20) to be cooled, thereby enabling the discharge space (63) to be cooled efficiently.

[0011] In the discharge cell (20) for the ozone generator, it is preferable that the flow of the heat medium in the first flow path (81) of the high-pressure side cooling flow path (HP2) and the flow of the heat medium in the first flow path (81) of the low-pressure side cooling flow path (LP2) are opposite to each other in the second direction, and that the flow of the heat medium in the second flow path (82) of the high-pressure side cooling flow path (HP2) and the flow of the heat medium in the second flow path (82) of the low-pressure side cooling flow path (LP2) are opposite to each other in the second direction.

[0012] This configuration can prevent the distribution of high-temperature portions from becoming biased in the second direction in the discharge section (60), thereby equalizing the temperature distribution in the second direction in the discharge section (60) and preventing the occurrence of portions in the high-temperature portion where the amount of decomposition of ozone gas becomes large.

[0013] The discharge cell has a first surface (20e) and a second surface (20f) located on both sides in the first direction, and a third surface (20d) and a fourth surface (20c) located on both sides in the second direction, and includes a rectangular parallelepiped discharge unit (DU) having the discharge part (60), and a rectangular parallelepiped cooling unit (CU) in which the cooling flow paths (HP2, LP2) are formed, and each of the discharge unit (DU) and the cooling unit (CU) includes a gas inlet path (GP1) for introducing gas into the discharge space (63), a gas outlet path (GP2) for discharging gas from the discharge space (63), a high-pressure side inlet path (HP1) for introducing a heat medium into the high-pressure side cooling flow path (HP2), and a high-pressure side outlet path (HP2) for discharging the heat medium from the high-pressure side cooling flow path (HP2). It is preferable that a high-pressure side outlet passage (HP3), a low-pressure side inlet passage (LP1) for introducing a heat medium into the low-pressure side cooling passage (LP2), and a low-pressure side outlet passage (LP3) for discharging the heat medium from the low-pressure side cooling passage (LP2) are formed, the gas inlet passage (GP1) is provided at a position along the first surface (20e), the gas outlet passage (GP2) is provided at a position along the second surface (20f), the high-pressure side inlet passage (HP1) is provided at a position along the third surface (20d), the low-pressure side inlet passage (LP1) is provided at a position along the fourth surface (20c), and either one of the high-pressure side outlet passage (HP3) and the low-pressure side outlet passage (LP3) is provided at a position along the third surface (20d), and the other is provided at a position along the fourth surface (20c).

[0014] With this configuration, the gas inlet channels (GP1), gas outlet channels (GP2), high-pressure side inlet channels (HP1), high-pressure side outlet channels (HP3), low-pressure side inlet channels (LP1), and low-pressure side outlet channels (LP3) of the discharge unit (DU) and the cooling unit (CU) can be dispersed and arranged along each surface of the discharge cell (20), thereby making it possible to reduce the size of the discharge cell (20) and also suppress interference with the piping connected to these channels.

[0015] It is preferable that a plurality of the discharge units (DU) and the cooling units (CU) are provided, the gas inlet passage (GP1) of each of the plurality of discharge units (DU) and the plurality of cooling units (CU) are connected to each other in the third direction, the gas outlet passage (GP2) of each of the plurality of discharge units (DU) and the plurality of cooling units (CU) are connected to each other in the third direction, the high-pressure side inlet passage (HP1) of each of the plurality of discharge units (DU) and the plurality of cooling units (CU) are connected to each other in the third direction, the high-pressure side outlet passage (HP3) of each of the plurality of discharge units (DU) and the plurality of cooling units (CU) are connected to each other in the third direction, the low-pressure side inlet passage (LP1) of each of the plurality of discharge units (DU) and the plurality of cooling units (CU) are connected to each other in the third direction, and the low-pressure side outlet passage (LP3) of each of the plurality of discharge units (DU) and the plurality of cooling units (CU) are connected to each other in the third direction.

[0016] This configuration allows a plurality of discharge units (DU) to be arranged in multiple stages in the third direction, thereby increasing the amount of ozone gas generated. These discharge units (DU) can be cooled by each cooling unit (CU), thereby reducing the amount of ozone gas decomposed. The flow paths of each discharge unit (DU) and each cooling unit (CU) communicate with each other in the third direction, thereby simplifying the gas flow paths connected to the discharge cells (20) and the heat medium flow paths connected to the discharge cells (20).

[0017] When viewed in the third direction, it is preferable that the intermediate flow path (83) does not overlap with the gas inlet path (GP1), the gas outlet path (GP2), the high-pressure side inlet path (HP1), the high-pressure side outlet path (HP3), the low-pressure side inlet path (LP1), and the low-pressure side outlet path (LP3), but overlaps with the discharge section (60).

[0018] This configuration makes it possible to efficiently cool the discharge part (60) by the heat medium of the intermediate flow path (83), while preventing the intermediate flow path (83) from interfering with other flow paths.

[0019] FIG. 1 is a schematic perspective view showing the appearance of an ozone generator. FIG. 2 is a configuration diagram schematically showing discharge cells and flow paths connected to the discharge cells. FIG. 3 is a perspective view showing the overall configuration of a discharge cell. FIG. 4 is a perspective view showing discharge cell units disassembled into units. FIG. 5 is a perspective view showing a header unit disassembled into substrates. FIG. 6 is a perspective view showing a low-pressure side cooling unit disassembled into substrates. FIG. 7 is a perspective view showing a discharge unit disassembled into substrates. FIG. 8 is a cross-sectional view of a main part of a discharge unit cut in the front-rear direction. FIG. 9 is a perspective view showing a high-pressure side cooling unit disassembled into substrates. FIG. 10 is a schematic view showing the upstream side of a heat medium flow path in a discharge cell. FIG. 11 is a schematic view showing the downstream side of a heat medium flow path in a discharge cell. FIG. 12 is a top view of a first upper flow path plate of a low-pressure side cooling unit. FIG. 13 is a top view of a second upper flow path plate of a high-pressure side cooling unit. FIG. 14 is a schematic view of a cooling unit of a first example of another embodiment. FIG. 15 is a diagram corresponding to FIG. 12 of a second example of another embodiment.

[0020] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. Note that the present disclosure is not limited to the embodiments shown below, and various modifications are possible within the scope of the technical concept of the present disclosure. Since the drawings are intended to conceptually explain the present disclosure, dimensions, ratios, or numbers may be exaggerated or simplified as necessary to facilitate understanding.

[0021] (1) Overall Configuration of Ozone Generator The discharge cell (20) of the present disclosure is applied to an ozone generator (1). The ozone generator (1) is applied to, for example, semiconductor manufacturing equipment. The ozone generator (1) generates ozone gas. The ozone generator (1) generates ozone gas using high-purity oxygen gas supplied from an external source. In semiconductor manufacturing equipment, ozone water is generated by dissolving the ozone gas generated by the ozone generator (1) in water. This ozone water is used, for example, to clean silicon wafers. Alternatively, the generated ozone gas is used to form a film on a substrate.

[0022] As shown in FIG. 1, the ozone generator (1) includes a casing (10), a discharge cell (20), and a power supply unit (11). The casing (10) is formed in the shape of a hollow box. The discharge cell (20) and the power supply unit (11) are housed inside the casing (10). The power supply unit (11) includes a high-voltage power supply. The power supply unit (11) supplies power to the discharge cell (20). The discharge cell (20) generates ozone gas when a high voltage is applied from the power supply unit (11). An operation unit (12) is provided on the front surface of the casing (10). The operation unit (12) includes a switch, a display, a lamp, etc.

[0023] As shown schematically in FIG. 2, the ozone generator (1) includes an oxygen gas supply section (2), an ozone gas supply section (3), a heat medium supply section (4), and a heat medium discharge section (5).

[0024] The oxygen gas supply unit (2) supplies high-purity oxygen gas to the discharge cell (20). The oxygen gas supply unit (2) includes an oxygen gas source (6) that stores oxygen gas, and an oxygen gas supply path (2a) that connects the oxygen gas source (6) to the discharge cell (20).

[0025] The ozone gas supply unit (3) delivers the ozone gas generated in the discharge cell (20) to a predetermined target. The ozone gas supply unit (3) includes an ozone gas supply path (3a) for delivering the ozone gas from the discharge cell (20) to the target.

[0026] The heat medium supply unit (4) supplies a heat medium to the discharge cells (20) for cooling the discharge cells (20). The heat medium supply unit (4) includes a heat medium supply path (4a) for supplying cooling water, which is a heat medium, to the discharge cells (20).

[0027] The heat medium discharge section (5) discharges the cooling water used to cool the discharge cells (20). The heat medium discharge section (5) includes a heat medium discharge path (5a) for sending the cooling water flowing out of the discharge cells (20) to a predetermined flow path.

[0028] The heat medium flowing out of the heat medium discharge passage (5a) may be sent to the heat medium supply passage (4a) to circulate the heat medium. In this configuration, the heat medium supply part (4) includes a transport part for transporting the heat medium and a cooling device for cooling the heat medium.

[0029] (2) Discharge Cell The configuration of the discharge cell (20) will be described with reference to Figs. 3 to 13. In the following description, "upper," "lower," "right," "left," "front," and "rear" refer to the directions shown in Fig. 3 unless otherwise specified. As shown in Fig. 3, the "first direction" described below corresponds to the left-right direction, the "second direction" corresponds to the "front-rear direction," and the third direction corresponds to the "up-down direction." In the following description, "right" and "left" refer to the directions when the discharge cell (20) is viewed from the front.

[0030] As shown in FIG. 3, the discharge cell (20) has an outer shape of a rectangular parallelepiped or a prismatic column. The discharge cell (20) is configured by stacking multiple substrates (S) vertically. Strictly speaking, the multiple substrates (S) are stacked via glass-based bonding layers. The multiple substrates (S) are configured from multiple types of substrates with different structures and functions. These substrates (S) are configured as rectangular flat plates in a plan view (top view). The multiple substrates are configured from an alumina material, for example.

[0031] The discharge cell (20) has six surfaces. The six surfaces are comprised of an upper surface (20a) formed on the upper side of the discharge cell (20), a lower surface (20b) formed on the lower side of the discharge cell (20), and four side surfaces. The four side surfaces are comprised of a front surface (20c) formed on the front side of the discharge cell (20), a rear surface (20d) formed on the rear side of the discharge cell (20), a right surface (20e) formed on the right side of the discharge cell (20), and a left surface (20f) formed on the left side of the discharge cell (20).

[0032] As shown in FIG. 4 , the discharge cell (20) of this embodiment includes, from top to bottom, a header unit (HU), a first cooling unit (CU1), a first discharge unit (DU1), a second cooling unit (CU2), a second discharge unit (DU2), a third cooling unit (CU3), a third discharge unit (DU3), a fourth cooling unit (CU4), and an end plate (E). The first discharge unit (DU1), the second discharge unit (DU2), and the third discharge unit (DU3) are basically configured the same. For convenience, the first discharge unit (DU1), the second discharge unit (DU2), and the third discharge unit (DU3) may be referred to as “discharge units (DU).” However, the vertical positional relationship of the low-voltage electrode module (61) and the high-voltage electrode module (62) in the first discharge unit (DU1) and the third discharge unit (DU3) is reversed from that in the second discharge unit (DU2).

[0033] The first cooling unit (CU1) and the third cooling unit (CU3) have basically the same configuration. The first cooling unit (CU1) and the third cooling unit (CU3) constitute a low-voltage side cooling unit (50) located on the low-voltage electrode module (61) side of the discharge cell (20). The second cooling unit (CU2) and the fourth cooling unit (CU4) have basically the same configuration. The second cooling unit (CU2) and the fourth cooling unit (CU4) constitute a high-voltage side cooling unit (70) located on the high-voltage electrode module (62) side of the discharge cell (20). For convenience, the first cooling unit (CU1), the second cooling unit (CU2), the third cooling unit (CU3), and the fourth cooling unit (CU4) may be referred to as "cooling units (CU)."

[0034] In the discharge cell (20), the discharge units (DU) and the cooling units (CU) are stacked alternately in the vertical direction.

[0035] (2-1) Header Unit The header unit (HU) has a function of introducing oxygen gas into the discharge cells (20) and a function of causing the generated ozone gas to flow out of the discharge cells (20). The header unit (HU) has a function of introducing cooling water into the discharge cells (20) and a function of causing the cooling water to flow out of the discharge cells (20). The header unit (HU) has a function of dividing the cooling water into the low-voltage electrode module (61) side and the high-voltage electrode module (62) side. The header unit (HU) has a function of joining the cooling water divided into the low-voltage electrode module (61) side and the high-voltage electrode module (62) side.

[0036] As shown in FIG. 5, the header unit (HU) has, from top to bottom, a first header plate (30A), a second header plate (30B), and a third header plate (30C).

[0037] (2-2-1) First Header Plate The first header plate (30A) is formed with a gas inlet (31), a gas outlet (32), a heat medium inlet channel (33), and a heat medium outlet channel (34). These are circular holes penetrating the first header plate (30A) in the third direction. These holes may be elongated holes. The gas inlet (31) is connected to the outlet end of the oxygen gas supply channel (2a). The gas outlet (32) is connected to the inlet end of the ozone gas supply channel (3a). The heat medium inlet channel (33) is connected to the outlet end of the heat medium supply channel (4a). The heat medium outlet channel (34) is connected to the inlet end of the heat medium outlet channel (5a). The discharge cell (20) is formed with a heat medium flow path (P) extending from the heat medium inlet channel (33) to the heat medium outlet channel (34), through which cooling water flows as a heat medium (see FIGS. 10 and 11 ).

[0038] The gas inlet (31) is formed at a position along the right surface (20e) of the discharge cell (20). The gas inlet (31) is located at a central portion in the front-to-rear direction on the right side of the first header plate (30A). The gas outlet (32) is formed at a position along the left surface (20f) of the discharge cell (20). The gas outlet (32) is located at a central portion in the front-to-rear direction on the left side of the first header plate (30A).

[0039] The heat medium inlet channel (33) is formed at a position closer to the front surface (20c) and the left surface (20f) than the center of the discharge cell (20). The heat medium outlet channel (34) is formed at a position closer to the front surface (20c) and the right surface (20e) than the center of the discharge cell (20).

[0040] (2-2-2) Second Header Plate The second header plate (30B) is formed with a first gas inlet relay channel (35) and a first gas outlet relay channel (36). The first gas inlet relay channel (35) and the first gas outlet relay channel (36) are circular holes that penetrate the second header plate (30B) in the third direction. These holes may be elongated holes. The first gas inlet relay channel (35) is located so as to overlap with the gas inlet (31) in the third direction. The first gas outlet relay channel (36) is located so as to overlap with the gas outlet (32) in the third direction.

[0041] The second header plate (30B) is formed with a low-pressure side inlet relay channel (37), a low-pressure side outlet relay channel (38), a high-pressure side inlet relay channel (39), and a high-pressure side outlet relay channel (40). These relay channels penetrate the second header plate (30B) in the third direction.

[0042] The low-pressure side inlet relay channel (37) is formed at a position along the front surface (20c) of the discharge cell (20). The low-pressure side inlet relay channel (37) is located to the left of the front edge of the second header plate (30B). The low-pressure side inlet relay channel (37) is formed in a substantially rectangular shape extending from a middle part of the second header plate (30B) in the left-right direction to near the left surface (20f) of the discharge cell (20).

[0043] The low-pressure side outlet relay path (38) is formed at a position along the front surface (20c) of the discharge cell (20). The low-pressure side outlet relay path (38) is located to the right of the front edge of the second header plate (30B). The low-pressure side outlet relay path (38) is formed in a substantially rectangular shape extending from a middle portion of the second header plate (30B) in the left-right direction to near the right surface (20e) of the discharge cell (20).

[0044] The high-pressure side inlet relay path (39) is formed at a position along the rear surface (20d) of the discharge cell (20). The high-pressure side inlet relay path (39) is located to the left of the rear edge of the second header plate (30B). The high-pressure side inlet relay path (39) is formed in a substantially rectangular shape extending from a middle part of the second header plate (30B) in the left-right direction to near the left surface (20f) of the discharge cell (20).

[0045] The high-pressure side outlet relay path (40) is formed at a position along the rear surface (20d) of the discharge cell (20). The high-pressure side outlet relay path (40) is located to the right of the rear edge of the second header plate (30B). The high-pressure side outlet relay path (40) is formed in a substantially rectangular shape extending from a middle part of the second header plate (30B) in the left-right direction to near the right surface (20e) of the discharge cell (20).

[0046] The second header plate (30B) is formed with a low-pressure side inlet branch channel (41), a low-pressure side outlet branch channel (42), a high-pressure side inlet branch channel (43), and a high-pressure side outlet branch channel (44). These branch channels penetrate the second header plate (30B) in a third direction. The upper sides of these branch channels are closed by the first header plate (30A), and the lower sides thereof are closed by the third header plate (30C).

[0047] The low-pressure side inlet branch channel (41) has an inlet end connected to the heat medium inlet channel (33) and an outlet end connected to the low-pressure side inlet relay channel (37). The low-pressure side inlet branch channel (41) has a portion extending from the heat medium inlet channel (33) toward a corner between the front edge and the left edge of the second header plate (30B), and a portion extending further forward from this portion and connected to the low-pressure side inlet relay channel (37).

[0048] The low-pressure side outlet branch channel (42) has an outlet end connected to the heat medium outlet channel (34) and an inlet end connected to the low-pressure side outlet relay channel (38). The low-pressure side outlet branch channel (42) has a portion extending from the heat medium outlet channel (34) toward a corner between the front edge and the right edge of the second header plate (30B), and a portion extending further forward from this portion and connecting to the low-pressure side outlet relay channel (38).

[0049] The high-pressure side inlet branch channel (43) has an inlet end connected to the heat medium inlet channel (33) and an outlet end connected to the high-pressure side inlet relay channel (39). The high-pressure side inlet branch channel (43) has: a portion extending from the heat medium inlet channel (33) to the center of the second header plate (30B), a portion extending further rearward from this portion, a portion extending from this portion toward a corner between the rear edge and the left edge of the second header plate (30B), and a portion extending further rearward from this portion to connect to the high-pressure side inlet relay channel (39).

[0050] In this way, the high-pressure side inlet branch channel (43) has a curved shape. The flow path length of the high-pressure side inlet branch channel (43) is greater than the flow path length of the low-pressure side inlet branch channel (41).

[0051] The high-pressure-side outlet branch channel (44) has an outlet end connected to the heat medium outlet channel (34) and an inlet end connected to the high-pressure-side outlet relay channel (40). The high-pressure-side outlet branch channel (44) has: a portion extending from the heat medium outlet channel (34) to the center of the second header plate (30B), a portion extending further rearward from this portion, a portion extending from this portion toward a corner between the rear edge and the right edge of the second header plate (30B), and a portion extending further rearward from this portion to connect to the high-pressure-side outlet relay channel (40).

[0052] In this way, the high-pressure side outlet branch channel (44) has a curved shape. The flow path length of the high-pressure side outlet branch channel (44) is greater than the flow path length of the low-pressure side outlet branch channel (42).

[0053] (2-2-3) Third Header Plate The third header plate (30C) is formed with a second gas inlet relay channel (45) and a second gas outlet relay channel (46). The second gas inlet relay channel (45) and the second gas outlet relay channel (46) are circular holes that penetrate the third header plate (30C) in the third direction. These holes may be elongated holes. The second gas inlet relay channel (45) is positioned to overlap with the first gas inlet relay channel (35) in the third direction, and the second gas outlet relay channel (46) is positioned to overlap with the first gas outlet relay channel (36) in the third direction.

[0054] The third header plate (30C) is formed with a low-pressure side inlet opening (O1), a low-pressure side outlet opening (O2), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4). These openings penetrate the third header plate (30C) in a third direction. These openings are also formed in several other substrates (S), which will be described in detail below. The following describes the openings formed in the third header plate (30C) as a representative example.

[0055] The low-pressure side inlet opening (O1) is formed at a position along the front surface (20c) of the discharge cell (20). The low-pressure side inlet opening (O1) is located toward the left of the front edge of the third header plate (30C). The low-pressure side inlet opening (O1) is formed in a substantially rectangular shape extending from a central portion of the third header plate (30C) in the left-right direction to near the left surface (20f) of the discharge cell (20). The low-pressure side inlet opening (O1) is located at a position overlapping with the low-pressure side inlet relay path (37) in the third direction.

[0056] The low-pressure side outlet opening (O2) is formed at a position along the front surface (20c) of the discharge cell (20). The low-pressure side outlet opening (O2) is located towards the right of the front edge of the second header plate (30B). The low-pressure side outlet opening (O2) is formed in a substantially rectangular shape extending from a central portion of the second header plate (30B) in the left-right direction to near the right surface (20e) of the discharge cell (20). The low-pressure side outlet opening (O2) is located at a position overlapping with the low-pressure side outlet relay path (38) in the third direction.

[0057] The high-pressure side inlet opening (O3) is formed at a position along the rear surface (20d) of the discharge cell (20). The high-pressure side inlet opening (O3) is located toward the left of the rear edge of the second header plate (30B). The high-pressure side inlet opening (O3) is formed in a substantially rectangular shape extending from a central portion of the second header plate (30B) in the left-right direction to near the left surface (20f) of the discharge cell (20). The high-pressure side inlet opening (O3) is located at a position overlapping with the high-pressure side inlet relay path (39) in the third direction.

[0058] The high-pressure side outlet opening (O4) is formed at a position along the rear surface (20d) of the discharge cell (20). The high-pressure side outlet opening (O4) is located to the right of the rear edge of the second header plate (30B). The high-pressure side outlet opening (O4) is formed in a substantially rectangular shape extending from a central portion of the second header plate (30B) in the left-right direction to near the right surface (20e) of the discharge cell (20). The high-pressure side outlet opening (O4) is located at a position overlapping with the high-pressure side outlet relay path (40) in the third direction.

[0059] (2-3) Low-Pressure Side Cooling Unit The low-pressure side cooling unit (50) is disposed adjacent to the low-voltage electrode module (61) of the discharge unit (DU). As shown in Fig. 6, the low-pressure side cooling unit (50) has, from top to bottom, a first upper partition plate (50A), a first upper flow path plate (50B), a first intermediate plate (50C), a first lower flow path plate (50D), and a first lower partition plate (50E).

[0060] (2-3-1) First Upper Partition Plate The first upper partition plate (50A) is formed with a gas inlet opening (O5) and a gas outlet opening (O6). These openings penetrate the first upper partition plate (50A) in the third direction. These openings are also formed in several other substrates, the details of which will be described later. The following describes in detail the openings formed in the first upper partition plate (50A) as a representative example.

[0061] The gas inlet opening (O5) is formed at a position along the right surface (20e) of the discharge cell (20). The gas inlet opening (O5) extends in the front-rear direction along the right edge of the first upper partition plate (50A). The gas inlet opening (O5) is located at a position overlapping the second gas inlet relay path (45) in the third direction.

[0062] The gas outlet opening (O6) is formed at a position along the left surface (20f) of the discharge cell (20). The gas outlet opening (O6) extends in the front-rear direction along the left edge of the first upper partition plate (50A). The gas outlet opening (O6) is located at a position overlapping the second gas outlet relay path (46) in the third direction.

[0063] The first upper partition plate (50A) is formed with a low-pressure side inlet opening (O1), a low-pressure side outlet opening (O2), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4), which penetrate the first upper partition plate (50A) in the third direction.

[0064] (2-3-2) First Upper Flow Channel Plate The first upper flow channel plate (50B) is formed with a gas inlet opening (O5), a gas outlet opening (O6), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4). These openings penetrate the first upper flow channel plate (50B) in the third direction.

[0065] The first upper flow path plate (50B) is formed with first upper upstream flow paths (51) and first upper downstream flow paths (52). These flow paths penetrate the first upper flow path plate (50B) in the third direction. In the first upper flow path plate (50B) of this embodiment, four first upper upstream flow paths (51) and four first upper downstream flow paths (52) are formed.

[0066] The first upper upstream flow path (51) is formed in a rectangular shape extending in the front-rear direction, which is the second direction. The first upper upstream flow path (51) may be trapezoidal. The first upper upstream flow path (51) extends from near the front surface (20c) of the discharge cell (20) to near the high-pressure side inlet opening (O3). The multiple first upper upstream flow paths (51) are arranged parallel to one another at equal intervals in the left-right direction. The multiple first upper upstream flow paths (51) may be arranged at different intervals in the left-right direction. The front end (inlet end) of each first upper upstream flow path (51) is located at a position overlapping with the low-pressure side inlet opening (O1) in the third direction.

[0067] The first upper-downstream flow path (52) is formed in a rectangular shape extending in the front-rear direction, which is the second direction. The first upper-lower flow path (52) may be trapezoidal. The first upper-downstream flow path (52) extends from near the front surface (20c) of the discharge cell (20) to near the high-pressure side outlet opening (O4). The multiple first upper-downstream flow paths (52) are arranged parallel to one another at equal intervals in the left-right direction. The multiple first upper-downstream flow paths (52) may be arranged at different intervals in the left-right direction. The front end (outlet end) of each first upper-downstream flow path (52) is located at a position overlapping with the low-pressure side outlet opening (O2) in the third direction.

[0068] The upper side of the first upper upstream flow path (51) is closed by the first upper partition plate (50A) except for its inlet end (front end). The lower side of the first upper upstream flow path (51) is closed by the first intermediate plate (50C) except for its inlet end (front end) and outlet end (rear end). The upper side of the first upper downstream flow path (52) is closed by the first upper partition plate (50A) except for its outlet end (front end). The lower side of the first upper downstream flow path (52) is closed by the first intermediate plate (50C) except for its inlet end (rear end) and outlet end (front end).

[0069] (2-3-3) First Intermediate Plate The first intermediate plate (50C) is formed with a gas inlet opening (O5), a gas outlet opening (O6), a low-pressure side inlet opening (O1), a low-pressure side outlet opening (O2), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4). These openings penetrate the first intermediate plate (50C) in the third direction.

[0070] The first intermediate plate (50C) is formed with a first intermediate flow path (53). The first intermediate flow path (53) extends in the left-right direction, which is the first direction, along the rear surface (20d) of the discharge cell (20). Specifically, the first intermediate flow path (53) extends from near the gas inlet opening (O5) to near the gas outlet opening (O6). An upstream portion of the first intermediate flow path (53) is adjacent to the high-pressure side inlet opening (O3), and a downstream portion of the first intermediate flow path (53) is adjacent to the high-pressure side outlet opening (O4). The upstream portion of the first intermediate flow path (53) is positioned to overlap with the rear ends (outlet ends) of the first upper upstream flow paths (51) in the third direction. The downstream portion of the first intermediate flow path (53) is positioned to overlap with the rear ends (inlet ends) of the first upper downstream flow paths (52) in the third direction.

[0071] (2-3-4) First Lower Flow Path Plate The structure of the first lower flow path plate (50D) is basically the same as the structure of the first upper flow path plate (50B). The first lower flow path plate (50D) is formed with a gas inlet opening (O5), a gas outlet opening (O6), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4). These openings penetrate the first lower flow path plate (50D) in the third direction.

[0072] The first lower flow path plate (50D) is formed with first lower upstream flow paths (54) and first lower downstream flow paths (55). These flow paths penetrate the first lower flow path plate (50D) in the third direction. In the first lower flow path plate (50D) of the present embodiment, four first lower upstream flow paths (54) and four first lower downstream flow paths (55) are formed.

[0073] The first lower upstream flow path (54) extends in the front-rear direction, which is the second direction. The first lower upstream flow path (54) extends from near the front surface (20c) of the discharge cell (20) to near the high-pressure side inlet opening (O3). The multiple first lower upstream flow paths (54) are arranged parallel to one another at equal intervals in the left-right direction. The front end (inlet end) of each first lower upstream flow path (54) is located at a position overlapping with the low-pressure side inlet opening (O1) in the third direction.

[0074] The first lower downstream flow path (55) extends in the front-rear direction, which is the second direction. The first lower downstream flow path (55) extends from near the front surface (20c) of the discharge cell (20) to near the high-pressure side outlet opening (O4). The multiple first lower downstream flow paths (55) are arranged parallel to one another at equal intervals in the left-right direction. The front end (outlet end) of each first lower downstream flow path (55) is located at a position overlapping with the low-pressure side outlet opening (O2) in the third direction.

[0075] The upper side of the first lower upstream flow path (54) is closed by the first intermediate plate (50C) except for its inlet end (front end) and outlet end (rear end). The lower side of the first lower upstream flow path (54) is closed by the first lower partition plate (50E) except for its inlet end (front end). The upper side of the first lower downstream flow path (55) is closed by the first intermediate plate (50C) except for its outlet end (front end) and inlet end (rear end). The lower side of the first lower downstream flow path (55) is closed by the first lower partition plate (50E) except for its outlet end (front end).

[0076] (2-3-5) First Lower Partition Plate The first lower partition plate (50E) is formed with a gas inlet opening (O5), a gas outlet opening (O6), a low-pressure side inlet opening (O1), a low-pressure side outlet opening (O2), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4). These openings penetrate the first lower partition plate (50E) in the third direction.

[0077] (2-4) Discharge Unit As shown in FIGS. 7 and 8 , the discharge unit (DU) has a discharge section (60). The discharge section (60) has a low-voltage electrode module (61) and a high-voltage electrode module (62) that face each other. In the first discharge unit (DU1) and the third discharge unit (DU3), the low-voltage electrode module (61) is located on the upper side, and the high-voltage electrode module (62) is located on the lower side. In the second discharge unit (DU2), the high-voltage electrode module (62) is located on the upper side, and the low-voltage electrode module (61) is located on the lower side. In the discharge section (60), a discharge space (63) is formed between the low-voltage electrode module (61) and the high-voltage electrode module (62).

[0078] In the discharge cell (20), the high-voltage electrode modules (62) of the discharge units (DU) adjacent to each other in the third direction face each other, and the low-voltage electrode modules (61) of the discharge units (DU) face each other (see FIGS. 10 and 11).

[0079] The low-voltage electrode module (61) has a first base (61a) and a plurality of first protrusions (61b) protruding from the first base (61a) toward the high-voltage electrode module (62). The first base (61a) constitutes the main body of the substrate (S). The first base (61a) is formed of a flat plate having a rectangular parallelepiped shape in a plan view. The first base (61a) constitutes a low-voltage side dielectric. A low-voltage electrode (61c) is formed on the rear surface (top surface) of the first base (61a). The low-voltage electrode (61c) is electrically connected to the low-voltage side (ground side) of the power supply unit (11). The low-voltage electrode (61c) is formed of a metal film, but may also be a plate-shaped electrode. The first protrusions (61b) are formed in a rod shape that is elongated in the left-right direction. The plurality of first protrusions (61b) are arranged parallel to one another at equal intervals in the front-rear direction.

[0080] The high-voltage electrode module (62) has a second base (62a) and a plurality of second protrusions (62b) protruding from the second base (62a) toward the low-voltage electrode module (61). The second base (62a) constitutes the main body of the substrate (S). The second base (62a) is formed of a flat plate that is rectangular in plan view. The second base (62a) constitutes a high-voltage side dielectric. A high-voltage electrode (62c) is formed on the rear surface (lower surface) of the second base (62a). The high-voltage electrode (62c) is electrically connected to the high-voltage side of the power supply unit (11). The high-voltage electrode (62c) is formed of a metal film, but may also be a plate-shaped electrode. The second protrusions (62b) are formed in a rod shape that is elongated in the left-right direction. The plurality of second protrusions (62b) are arranged parallel to one another at equal intervals in the front-rear direction.

[0081] The first convex portion (61b) and the second convex portion (62b) have a glass bonding layer (64) formed between the tip of the first convex portion (61b) and the tip of the second convex portion (62b) in the third direction. The bonding layer (64) constitutes an insulator.

[0082] A plurality of discharge spaces (63) are formed between the first base portion (61a), the first convex portion (61b), the second base portion (62a), and the second convex portion (62b). These discharge spaces (63) are horizontally elongated spaces extending in the left-right direction. When a voltage is applied to the high-voltage electrode (62c), a discharge (strictly speaking, a barrier discharge) occurs in the discharge spaces (63). In the discharge spaces (63), gases (oxygen gas and ozone gas) flow in the left-right direction, which is a first direction.

[0083] The first base portion (61a) is formed with a first discharge side inlet channel (65) and a first discharge side outlet channel (66). The first discharge side inlet channel (65) and the first discharge side outlet channel (66) penetrate the first base portion (61a) in the third direction. The first discharge side inlet channel (65) communicates with the gas inlet opening (O5) of the first lower partition plate (50E), and the second discharge side outlet channel (68) communicates with the gas outlet opening (O6) of the first lower partition plate (50E).

[0084] The first discharge side inlet channel (65) is formed at a position along the right surface (20e) of the discharge cell (20). The first discharge side inlet channel (65) extends in the front-rear direction along the right edge of the first base (61a). The first discharge side inlet channel (65) communicates with the inlet ends of the plurality of discharge spaces (63). The first discharge side outlet channel (66) is formed at a position along the left surface (20f) of the discharge cell (20). The first discharge side outlet channel (66) extends in the front-rear direction along the left edge of the first base (61a). The first discharge side outlet channel (66) communicates with the outlet ends of the plurality of discharge spaces (63).

[0085] The second base (62a) is formed with a second discharge side inlet channel (67) and a second discharge side outlet channel (68). The second discharge side inlet channel (67) and the second discharge side outlet channel (68) penetrate the second base (62a) in the third direction. The second discharge side inlet channel (67) is formed along the right surface (20e) of the discharge cell (20). The second discharge side inlet channel (67) extends in the front-rear direction along the right edge of the second base (62a). The second discharge side inlet channel (67) communicates with the inlet ends of the plurality of discharge spaces (63). The second discharge side inlet channel (67) communicates with the first discharge side inlet channel (65) of the first base (61a). The second discharge side outlet channel (68) is formed along the left surface (20f) of the discharge cell (20). The second discharge side outlet channel (68) extends in the front-rear direction along the left side of the second base (62a). The second discharge side outlet channel (68) communicates with the outlet ends of the plurality of discharge spaces (63). The second discharge side outlet channel (68) communicates with the first discharge side outlet channel (66) of the first base (61a).

[0086] The first base portion (61a) and the second base portion (62a) are respectively formed with a low-pressure side inlet opening (O1), a low-pressure side outlet opening (O2), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4).

[0087] (2-5) High-Pressure Side Cooling Unit The high-pressure side cooling unit (70) is disposed adjacent to the high-voltage electrode module (62) of the discharge unit (DU). As shown in Fig. 9 , the high-pressure side cooling unit (70) has, from top to bottom, a second upper partition plate (70A), a second upper flow path plate (70B), a second intermediate plate (70C), a second lower flow path plate (70D), and a second lower partition plate (70E). The configurations of the second upper partition plate (70A) and the second lower partition plate (70E) are the same as the configurations of the first upper partition plate (50A) and the first lower partition plate (50E) described above, and therefore detailed description thereof will be omitted.

[0088] (2-5-1) Second Upper Flow Path Plate The second upper flow path plate (70B) is formed with a gas inlet opening (O5), a gas outlet opening (O6), a low-pressure side inlet opening (O1), and a low-pressure side outlet opening (O2). These openings penetrate the second upper flow path plate (70B) in the third direction.

[0089] The second upper flow path plate (70B) is formed with second upper upstream flow paths (71) and second upper downstream flow paths (72). These flow paths penetrate the second upper flow path plate (70B) in the third direction. In the second upper flow path plate (70B) of the present embodiment, four second upper upstream flow paths (71) and four second upper downstream flow paths (72) are formed.

[0090] The second upper upstream flow path (71) extends in the front-rear direction, which is the second direction. The second upper upstream flow path (71) extends from near the low-pressure side inlet opening (O1) to near the rear surface (20d) of the discharge cell (20). The second upper upstream flow paths (71) are arranged parallel to one another at equal intervals in the left-right direction. The rear end (inlet end) of each second upper upstream flow path (71) is located at a position overlapping with the high-pressure side inlet opening (O3) in the third direction.

[0091] The second upper-downstream flow path (72) extends in the front-rear direction, which is the second direction. The second upper-downstream flow path (72) extends from near the low-pressure side outlet opening (O2) to near the rear surface (20d) of the discharge cell (20). The second upper-downstream flow paths (72) are arranged parallel to one another at equal intervals in the left-right direction. The rear end (outlet end) of each second upper-downstream flow path (72) is located at a position overlapping with the high-pressure side outlet opening (O4) in the third direction.

[0092] The upper side of the second upper upstream flow path (71) is closed by the second upper partition plate (70A) except for its inlet end (rear end). The lower side of the second upper upstream flow path (71) is closed by the second intermediate plate (70C) except for its inlet end (rear end) and outlet end (front end). The upper side of the second upper downstream flow path (72) is closed by the second upper partition plate (70A) except for its outlet end (rear end). The lower side of the second upper downstream flow path (72) is closed by the first intermediate plate (50C) except for its inlet end (front end) and outlet end (rear end).

[0093] (2-5-2) Second Intermediate Plate The second intermediate plate (70C) is formed with a gas inlet opening (O5), a gas outlet opening (O6), a low-pressure side inlet opening (O1), a low-pressure side outlet opening (O2), a high-pressure side inlet opening (O3), and a high-pressure side outlet opening (O4). These openings penetrate the second intermediate plate (70C) in the third direction.

[0094] The second intermediate plate (70C) is formed with a second intermediate flow path (73). The second intermediate flow path (73) extends in the left-right direction, which is the first direction, along the front surface (20c) of the discharge cell (20). Specifically, the second intermediate flow path (73) extends from near the gas inlet opening (O5) to near the gas outlet opening (O6). An upstream portion of the second intermediate flow path (73) is adjacent to the low-pressure side inlet opening (O1), and a downstream portion of the second intermediate flow path (73) is adjacent to the low-pressure side outlet opening (O2). The upstream portion of the second intermediate flow path (73) is positioned to overlap with the front ends (outlet ends) of the second upper upstream flow paths (71) in the third direction. The downstream portion of the second intermediate flow path (73) is positioned to overlap with the front ends (inlet ends) of the second upper downstream flow paths (72) in the third direction.

[0095] (2-5-3) Second Lower Flow Path Plate The structure of the second lower flow path plate (70D) is basically the same as the structure of the second upper flow path plate (70B). The second lower flow path plate (70D) is formed with a gas inlet opening (O5), a gas outlet opening (O6), a low-pressure side inlet opening (O1), and a low-pressure side outlet opening (O2). These openings penetrate the second lower flow path plate (70D) in the third direction.

[0096] The second lower flow path plate (70D) is formed with second lower upstream flow paths (74) and second lower downstream flow paths (75). These flow paths penetrate the second lower flow path plate (70D) in the third direction. In the second lower flow path plate (70D) of the present embodiment, four second lower upstream flow paths (74) and four second lower downstream flow paths (75) are formed.

[0097] The second lower upstream flow path (74) extends in the front-rear direction, which is the second direction. The second lower upstream flow path (74) extends from near the low-pressure side inlet opening (O1) to near the rear surface (20d) of the discharge cell (20). The second lower upstream flow paths (74) are arranged parallel to one another at equal intervals in the left-right direction. The rear end (inlet end) of each second lower upstream flow path (74) is located at a position overlapping with the high-pressure side inlet opening (O3) in the third direction.

[0098] The second lower downstream flow path (75) extends in the front-rear direction, which is the second direction. The second lower downstream flow path (75) extends from near the low-pressure side outlet opening (O2) to near the rear surface (20d) of the discharge cell (20). The second lower downstream flow paths (75) are arranged parallel to one another at equal intervals in the left-right direction. The rear end (outlet end) of each second lower downstream flow path (75) is located at a position overlapping with the high-pressure side outlet opening (O4) in the third direction.

[0099] The upper side of the second lower-upstream flow path (74) is closed by the second intermediate plate (70C) except for its inlet end (rear end) and outlet end (front end). The lower side of the second lower-upstream flow path (74) is closed by the second lower partition plate (70E) except for its inlet end (rear end). The upper side of the second lower-downstream flow path (75) is closed by the second intermediate plate (70C) except for its inlet end (front end) and outlet end (rear end). The lower side of the second lower-downstream flow path (75) is closed by the second lower partition plate (70E) except for its outlet end (rear end).

[0100] (2-6) End Plate As shown in Figure 4, the end plate (E) is the substrate located at the bottom of the discharge cell (20). No openings are formed in the end plate (E). The end plate (E) blocks the gas inlet opening (O5), gas outlet opening (O6), low-pressure side inlet opening (O1), low-pressure side outlet opening (O2), high-pressure side inlet opening (O3), and high-pressure side outlet opening (O4) of the adjacent substrate (S).

[0101] (3) Heat Medium Flow Path A heat medium flow path (P) through which cooling water flows is formed in the discharge cell (20). Details of the heat medium flow path (P) will be described mainly with reference to Figures 10 and 11. Figure 10 shows the flow path on the upstream side of the heat medium flow path (P), and Figure 11 shows the flow path on the downstream side of the heat medium flow path (P).

[0102] The heat medium flow path (P) has a high-pressure side flow path (HP) corresponding to the high-pressure electrode module (62) and a low-pressure side flow path (LP) corresponding to the low-pressure electrode module (61). The high-pressure side flow path (HP) and the low-pressure side flow path (LP) branch off from the outlet end of the heat medium inlet channel (33) (see FIG. 10). The outlet ends of the high-pressure side flow path (HP) and the low-pressure side flow path (LP) are connected to the inlet end of the heat medium outlet channel (34) (see FIG. 11).

[0103] (3-1) High-Pressure Side Flow Path The high-pressure side flow path (HP) includes a high-pressure side inlet branch path (43), a high-pressure side inlet relay path (39), a high-pressure side inlet path (HP1), a high-pressure side cooling path (HP2), a high-pressure side outlet path (HP3), a high-pressure side outlet relay path (40), and a high-pressure side outlet branch path (44).

[0104] The high-pressure side inlet channel (HP1) is a channel for introducing cooling water, which is a heat transfer medium, into the high-pressure side cooling channel (HP2). The high-pressure side inlet channel (HP1) is formed in each of the cooling unit (CU) and the discharge unit (DU). In each of the cooling unit (CU) and the discharge unit (DU), a plurality of high-pressure side inlet openings (O3) are connected in the vertical direction to form the high-pressure side inlet channel (HP1). The high-pressure side inlet channel (HP1) is formed at a position along the rear surface (20d), which is the third surface of the discharge cell (20).

[0105] The high-pressure side cooling flow path (HP2) is a cooling flow path through which a heat medium flows to cool the high-pressure electrode module (62). The high-pressure side cooling flow path (HP2) is formed adjacent to the high-pressure electrode module (62). In this embodiment, the high-pressure side cooling flow path (HP2) is formed in the second cooling unit (CU2) and the fourth cooling unit (CU4). The high-pressure side cooling flow path (HP2) is composed of a second upper upstream flow path (71), a second lower upstream flow path (74), a second intermediate flow path (73), a second upper downstream flow path (72), and a second lower downstream flow path (75). The second upper upstream flow path (71) and the second lower upstream flow path (74) each constitute a first flow path (81), the second upper downstream flow path (72) and the second lower downstream flow path (75) each constitute a second flow path (82), and the second intermediate flow path (73) constitutes an intermediate flow path (83).

[0106] The high-pressure side outlet channel (HP3) is a channel for discharging the heat medium from the high-pressure side cooling channel (HP2). The high-pressure side outlet channel (HP3) is formed in each of the cooling unit (CU) and the discharge unit (DU). In the cooling unit (CU) and the discharge unit (DU), the high-pressure side outlet channel (HP3) is formed by connecting multiple high-pressure side outlet openings (O4) in the vertical direction. The high-pressure side outlet channel (HP3) is formed at a position along the rear surface (20d), which is the third surface of the discharge cell (20).

[0107] In the discharge cell (20), the high-pressure side inflow channels (HP1) of the plurality of discharge units (DU) and the plurality of cooling units (CU) are vertically connected. In the discharge cell (20), the high-pressure side outflow channels (HP3) of the plurality of discharge units (DU) and the plurality of cooling units (CU) are vertically connected. As a result, the discharge cell (20) is formed with a plurality of high-pressure side cooling channels (HP2) arranged in parallel with each other.

[0108] (3-2) Low-Pressure Side Flow Path The low-pressure side flow path (LP) includes a low-pressure side inlet branch path (41), a low-pressure side inlet relay path (37), a low-pressure side inlet path (LP1), a low-pressure side cooling flow path (LP2), a low-pressure side outlet path (LP3), a low-pressure side outlet relay path (38), and a low-pressure side outlet branch path (42).

[0109] The low-pressure side inlet channel (LP1) is a channel for allowing cooling water, which is a heat medium, to flow into the low-pressure side cooling channel (LP2). The low-pressure side inlet channel (LP1) is formed in each of the cooling unit (CU) and the discharge unit (DU). In the cooling unit (CU) and the discharge unit (DU), a plurality of low-pressure side inlet openings (O1) are connected in the vertical direction to form the low-pressure side inlet channel (LP1). The low-pressure side inlet channel (LP1) is formed at a position along the front surface (20c), which is the fourth surface of the discharge cell (20).

[0110] The low-pressure side cooling flow path (LP2) is a cooling flow path through which a heat medium for cooling the low-pressure electrode module (61) flows. The low-pressure side cooling flow path (LP2) is formed adjacent to the low-pressure electrode module (61). In this embodiment, the low-pressure side cooling flow path (LP2) is formed in the first cooling unit (CU1) and the third cooling unit (CU3). The low-pressure side cooling flow path (LP2) is formed by a first upper upstream flow path (51), a first lower upstream flow path (54), a first intermediate flow path (53), a first upper downstream flow path (52), and a first lower downstream flow path (55). The first upper upstream flow path (51) and the first lower upstream flow path (54) each constitute a first flow path (81), the first upper downstream flow path (52) and the first lower downstream flow path (55) each constitute a second flow path (82), and the first intermediate flow path (53) constitutes an intermediate flow path (83).

[0111] The low-pressure side outlet channel (LP3) is a channel for discharging the heat medium from the low-pressure side cooling channel (LP2). The low-pressure side outlet channel (LP3) is formed in each of the cooling unit (CU) and the discharge unit (DU). In the cooling unit (CU) and the discharge unit (DU), the low-pressure side outlet channel (LP3) is formed by connecting multiple low-pressure side outlet openings (O2) in the vertical direction. The low-pressure side outlet channel (LP3) is formed at a position along the front surface (20c), which is the fourth surface of the discharge cell (20).

[0112] In the discharge cell (20), the low-pressure side inlet channels (LP1) of the plurality of discharge units (DU) and the plurality of cooling units (CU) are vertically connected. In the discharge cell (20), the low-pressure side outlet channels (LP3) of the plurality of discharge units (DU) and the plurality of cooling units (CU) are vertically connected. As a result, the discharge cell (20) is provided with a plurality of low-pressure side cooling channels (LP2) arranged in parallel with each other.

[0113] (3-3) Grounding Section As shown in FIG. 10 , a grounding section (8) is connected to the heat medium flow path (P). The grounding section (8) is connected to the ground. The grounding section (8) is connected to the low-pressure side flow path (LP). The grounding section (8) is configured, for example, by grounding a stainless steel joint. In this embodiment, the grounding section (8) is connected to the low-pressure side inlet channel (LP1). The grounding section (8) may be connected to the low-pressure side inlet branch channel (41), the low-pressure side outlet branch channel (42), the low-pressure side cooling flow path (LP2), or the low-pressure side outlet channel (LP3). The grounding section (8) has the function of dissipating to the ground the current that flows in the heat medium flow path (P) due to the discharge of the discharge section (60).

[0114] (4) Gas Inlet Channel and Gas Outlet Channel A gas inlet channel (GP1) is formed in each of the cooling unit (CU) and the discharge unit (DU). In the cooling unit (CU), the gas inlet channel (GP1) is formed by connecting a plurality of gas inlet openings (O5) in the vertical direction. In the discharge unit (DU), the first discharge side inlet channel (65) and the second discharge side inlet channel (67) are connected in the vertical direction to form the gas inlet channel (GP1). The gas inlet channel (GP1) is formed in a position along the right face (20e), which is the first face of the discharge cell (20).

[0115] A gas outlet channel (GP2) is formed in each of the cooling unit (CU) and the discharge unit (DU). In the cooling unit (CU), the gas outlet channel (GP2) is formed by vertically connecting a plurality of gas outlet openings (O6). In the discharge unit (DU), the first discharge side outlet channel (66) and the second discharge side outlet channel (68) are vertically connected to form the gas outlet channel (GP2). The gas outlet channel (GP2) is formed at a position along the left face (20f), which is the second face of the discharge cell (20).

[0116] (5) Operation The basic operation of the ozone generator (1) will be described. When the ozone generator (1) is operating, a high voltage is applied between the high-voltage electrode (62c) and the low-voltage electrode (61c) of the discharge unit (60) from the power supply unit (11). The oxygen gas supply unit (2) supplies oxygen gas to the discharge cell (20). The heat medium supply unit (4) supplies cooling water to the discharge cell (20).

[0117] Oxygen gas flows sequentially through the gas inlet (31), the first gas inlet relay channel (35), and the second gas inlet relay channel (45), and then flows through the gas inlet channel (GP1). The oxygen gas is diverted from the gas inlet channel (GP1) to the discharge space (63) of each discharge unit (DU). In the discharge space (63), a barrier discharge occurs between the high-voltage electrode module (62) and the low-voltage electrode module (61). As a result, ozone gas is generated from the oxygen gas in the discharge space (63). In the discharge space (63), the ozone gas concentration increases from the upstream side to the downstream side, specifically from the right side to the left side in the first direction.

[0118] The gas containing ozone gas flowing out from each discharge space (63) joins together at the gas outlet channel (GP2), flows through the second gas outlet relay channel (46), the first gas outlet relay channel (36) and the gas outlet port (32) in this order, and then flows out of the discharge cell (20). This gas is supplied from the ozone generator (1) to a predetermined object.

[0119] The cooling water flows through the heat medium inlet channel (33), and then branches into a high-pressure flow path (HP) and a low-pressure flow path (LP).

[0120] The cooling water that flows into the high-pressure side flow path (HP) flows sequentially through the high-pressure side inlet branch path (43) and the high-pressure side inlet relay path (39), and then flows through the high-pressure side inlet path (HP1). The cooling water is diverted from the high-pressure side inlet path (HP1) into multiple high-pressure side cooling paths (HP2). The cooling water that flows into the high-pressure side cooling path (HP2) is mainly used to cool the high-pressure electrode module (62). The cooling water that flows out of each high-pressure side cooling path (HP2) joins together at the high-pressure side outlet path (HP3), and flows sequentially through the high-pressure side outlet relay path (40) and the high-pressure side outlet branch path (44).

[0121] The cooling water that flows into the low-pressure side flow path (LP) flows sequentially through the low-pressure side inlet branch path (41) and the low-pressure side inlet relay path (37), and then flows through the low-pressure side inlet path (LP1). The cooling water is diverted from the low-pressure side inlet path (LP1) into multiple low-pressure side cooling paths (LP2). The cooling water that flows into the low-pressure side cooling path (LP2) is mainly used to cool the low-pressure electrode module (61). The cooling water that flows out of each low-pressure side cooling path (LP2) joins together at the low-pressure side outlet path (LP3), and flows sequentially through the low-pressure side outlet relay path (38) and the low-pressure side outlet branch path (42).

[0122] The cooling waters of the high-pressure side outlet branch channel (44) and the low-pressure side outlet branch channel (42) join together in the heat medium outlet channel (34), and are then discharged to the outside of the discharge cell (20).

[0123] (6) Details of Cooling Water and Gas Flows The details of the gas flow in the discharge units (DU) and the cooling water flow in the cooling units (CU) will be described mainly with reference to Fig. 12 and Fig. 13. Fig. 12 is a plan view showing the cooling water flow in the low-pressure side cooling unit (50) and the gas flow in the adjacent discharge units (DU). Fig. 13 is a plan view showing the cooling water flow in the high-pressure side cooling unit (70) and the gas flow in the adjacent discharge units (DU).

[0124] 12, in the low-pressure side cooling unit (50), the cooling water in the low-pressure side inlet channel (LP1) flows into a plurality of first upper upstream flow paths (51). The cooling water in the first upper upstream flow path (51) flows into a plurality of first lower upstream flow paths (54) through a low-pressure side inlet opening (O1) below the first upper upstream flow path (51).

[0125] The cooling water in the first upper upstream flow path (51) flows through the first upper upstream flow path (51) rearward in the second direction and enters the first intermediate flow path (53). Similarly, the cooling water in the first lower upstream flow path (54) flows through the first lower upstream flow path (54) rearward in the second direction and enters the first intermediate flow path (53).

[0126] The cooling water in the first intermediate flow path (53) flows to the right in the first direction through the first intermediate flow path (53). The cooling water on the downstream side of the first intermediate flow path (53) flows into the first upper-downstream flow path (52) and the first lower-downstream flow path (55).

[0127] The cooling water in the first upper-downstream flow path (52) flows forward in the second direction through the first upper-downstream flow path (52) and flows out into the low-pressure outlet path (LP3). Similarly, the cooling water in the first lower-downstream flow path (55) flows forward in the second direction through the first lower-downstream flow path (55) and flows out into the low-pressure outlet path (LP3).

[0128] In this manner, in the low-pressure side cooling unit (50), a substantially U-shaped flow path for cooling water is formed, the front side of which is open. In contrast, in the discharge space (63), gas flows from the right side to the left side in the first direction.

[0129] In the low-pressure cooling unit (50), the first flow paths, that is, the first upper upstream flow path (51) and the first lower upstream flow path (54), extend along the second direction and are located downstream of the gas in the discharge space (63). Here, the ozone gas downstream of the discharge space (63) has a relatively high concentration. Therefore, when heat is generated due to discharge, the amount of ozone decomposition downstream of the discharge space (63) increases. In contrast, the first upper upstream flow path (51) and the first lower upstream flow path (54) allow relatively low-temperature cooling water to flow, thereby sufficiently cooling the gas downstream of the discharge space (63). In addition, a sufficient temperature difference can be ensured between the cooling water and the gas downstream of the discharge space (63). Therefore, the amount of ozone decomposition downstream of the discharge space (63) can be prevented from increasing.

[0130] The first upper-downstream flow path (52) and the first lower-downstream flow path (55), which are the second flow paths, extend in the second direction and are located closer to the upstream side of the gas in the discharge space (63). Here, the concentration of ozone gas is relatively low on the upstream side of the discharge space (63). Therefore, even if the temperature of the cooling water in the first upper-downstream flow path (52) and the first lower-downstream flow path (55) becomes relatively high, the amount of ozone decomposed by heat does not become very large.

[0131] The first intermediate flow path (53), which is an intermediate flow path, extends along the first direction and connects the outlet ends of the first upper-upstream flow path (51) and the first lower-upstream flow path (54) to the inlet ends of the first upper-downstream flow path (52) and the first lower-downstream flow path (55). The flow direction of the cooling water in the first intermediate flow path (53) and the flow direction of the gas in the discharge space (63) are opposite to each other. This allows the gas downstream of the discharge space (63) to be cooled by the cooling water at a relatively low temperature. In addition, a sufficient temperature difference can be ensured between the cooling water upstream of the first intermediate flow path (53) and the gas downstream of the discharge space (63). This prevents the amount of ozone decomposition downstream of the discharge space (63) from increasing.

[0132] As a result, the low-pressure side cooling unit (50) can sufficiently cool the ozone gas in the discharge space (63) throughout the entire discharge space (63), thereby reducing the amount of ozone decomposed by heat and improving the efficiency of ozone generation by the discharge cell (20) or the ozone generator (1).

[0133] 13, in the high-pressure side cooling unit (70), the cooling water in the high-pressure side inlet channel (HP1) flows into a plurality of second upper upstream flow channels (71). The cooling water in the second upper upstream flow channel (71) flows into a plurality of second lower upstream flow channels (74) through a high-pressure side inlet opening (O3) below the second upper upstream flow channel (71).

[0134] The cooling water in the second upper upstream flow path (71) flows through the second upper upstream flow path (71) toward the front in the second direction and enters the second intermediate flow path (73). Similarly, the cooling water in the second lower upstream flow path (74) flows through the second lower upstream flow path (74) toward the front in the second direction and enters the second intermediate flow path (73).

[0135] The cooling water in the second intermediate flow path (73) flows to the right in the first direction through the second intermediate flow path (73). The cooling water on the downstream side of the second intermediate flow path (73) flows into the second upper-downstream flow path (72) and the second lower-downstream flow path (75).

[0136] The cooling water in the second upper-downstream flow path (72) flows rearward in the second direction through the second upper-downstream flow path (72) and flows out into the high-pressure side outlet path (HP3). Similarly, the cooling water in the second lower-downstream flow path (75) flows rearward in the second direction through the second lower-downstream flow path (75) and flows out into the high-pressure side outlet path (HP3).

[0137] In this way, in the high-pressure side cooling unit (70), a substantially U-shaped flow path for cooling water is formed, the rear side of which is open. In contrast, in the discharge space (63), gas flows from the right side to the left side in the first direction.

[0138] In the high-pressure side cooling unit (70), the second upper upstream flow path (71) and the second lower upstream flow path (74), which are first flow paths, extend along the second direction and are located closer to the downstream side of the gas in the discharge space (63). The second upper downstream flow path (72) and the second lower downstream flow path (75), which are second flow paths, extend along the second direction and are located closer to the upstream side of the gas in the discharge space (63). The second intermediate flow path (73), which is an intermediate flow path, extends along the first direction and connects the outlet ends of the second upper upstream flow path (71) and the second lower upstream flow path (74) to the inlet ends of the second upper downstream flow path (72) and the second lower downstream flow path (75).

[0139] The effects obtained by this configuration are similar to those of the low-pressure side cooling unit (50) described above.

[0140] 12 and 13, the flow of cooling water in the first flow path (81) of the high-pressure side cooling flow path (HP2) and the flow of cooling water in the first flow path (81) of the low-pressure side cooling flow path (LP2) are opposite to each other in the front-to-rear direction. Also, the flow of cooling water in the second flow path (82) of the high-pressure side cooling flow path (HP2) and the flow of cooling water in the second flow path (82) of the low-pressure side cooling flow path (LP2) are opposite to each other in the front-to-rear direction.

[0141] This makes the temperature distribution in the front-to-rear direction uniform in the discharge unit (DU) sandwiched between the high-pressure side cooling channel (HP2) and the low-pressure side cooling channel (LP2), thereby preventing the temperature at the front or rear part of the discharge unit (DU) from becoming too high, which would otherwise cause the decomposition of ozone gas.

[0142] (7) Effects of the embodiment In the above embodiment, the cooling flow path (HP2, LP2) includes at least a first flow path (81) extending along a second direction intersecting the first direction and located closer to the downstream side of the gas in the discharge space (63), a second flow path (82) extending along the second direction and located closer to the upstream side of the gas in the discharge space (63) than the first flow path (81), and an intermediate flow path (83) extending along the first direction and connecting the outlet end of the first flow path (81) and the inlet end of the second flow path (82).

[0143] In this configuration, the gas downstream of the discharge space (63) can be sufficiently cooled, thereby reducing the amount of ozone decomposition. As a result, the ozone generation efficiency of the discharge cell (20) or the ozone generator (1) can be improved. Furthermore, the improved ozone generation efficiency allows the discharge cell (20) to be made smaller.

[0144] The discharge cell (20) of the above embodiment has a high-pressure side cooling flow path (HP2) through which cooling water flows to cool the high-voltage electrode module (62), and a low-pressure side cooling flow path (LP2) through which cooling water flows to cool the low-voltage electrode module (61).

[0145] In this configuration, both the high-voltage electrode module (62) and the low-voltage electrode module (61) can be cooled, thereby suppressing a temperature rise in the discharge unit (DU), thereby reducing the amount of ozone decomposition caused by heat.

[0146] In the above embodiment, the flow of cooling water in the first flow path (81) of the high-pressure side cooling unit (70) and the flow of cooling water in the first flow path (81) of the low-pressure side cooling unit (50) are opposite to each other in the second direction. The flow of cooling water in the second flow path (82) of the high-pressure side cooling unit (70) and the flow of cooling water in the second flow path (82) of the low-pressure side cooling unit (50) are opposite to each other in the second direction.

[0147] In this configuration, the temperature distribution in the front-to-rear direction in the discharge unit (DU) is made uniform, so that the amount of ozone decomposition caused by heat can be reduced.

[0148] In the discharge cell (20) of the above embodiment, the gas inlet channel (GP1) is provided along the right side (20e) of the discharge cell (20), the gas outlet channel (GP2) is provided along the left side (20f) of the discharge cell (20), the high-pressure side inlet channel (HP1) and the high-pressure side outlet channel (HP3) are provided along the rear side (20d) of the discharge cell (20), and the low-pressure side inlet channel (LP1) and the low-pressure side outlet channel (LP3) are provided along the front side (20c) of the discharge cell (20).

[0149] In this configuration, these flow paths are distributed and arranged on the four side surfaces of the discharge cell (20), which prevents interference between these flow paths and the pipes connected to these flow paths, thereby simplifying and miniaturizing the discharge cell (20) or the ozone generator (1).

[0150] In the discharge cell (20) of the above embodiment, the discharge units (DU) and the cooling units (CU) are alternately stacked in the third direction. The gas inlet channels (GP1) of the plurality of discharge units (DU) and the plurality of cooling units (CU) communicate with each other in the third direction. The gas outlet channels (GP2) of the plurality of discharge units (DU) and the plurality of cooling units (CU) communicate with each other in the third direction. The high-pressure side inlet channels (HP1) of the plurality of discharge units (DU) and the plurality of cooling units (CU) communicate with each other in the third direction. The high-pressure side outlet channels (HP3) of the plurality of discharge units (DU) and the plurality of cooling units (CU) communicate with each other in the third direction. The low-pressure side inlet channels (LP1) of the plurality of discharge units (DU) and the plurality of cooling units (CU) communicate with each other in the third direction. The low-pressure side outlet channels (LP3) of the plurality of discharge units (DU) and the plurality of cooling units (CU) communicate with each other in the third direction.

[0151] In this configuration, by providing a plurality of discharge units (DU) in the discharge cell (20), the amount of ozone generated in the discharge cell (20) can be increased. By providing a plurality of cooling units (CU) in the discharge cell (20), the cooling performance of the discharge units (DU) can be improved. Since each flow path is formed in all units (DU, CU), the flow paths for gas and cooling water can be prevented from becoming complex, and the discharge cell (20) can be simplified and made smaller. By simply connecting a single flow path for supplying oxygen gas to the discharge cell (20), oxygen gas can be sent to a plurality of discharge units (DU). By simply connecting a single flow path for discharging ozone gas to the discharge cell (20), ozone gas generated in each discharge unit (DU) can be discharged to the outside of the discharge cell (20). By simply connecting a single flow path for supplying cooling water to the discharge cell (20), cooling water can be supplied to each cooling unit (CU). By simply connecting one flow path for discharging the cooling water to the discharge cell (20), the cooling water that has flowed through each cooling unit (CU) can be discharged to the outside of the discharge cell (20), thereby simplifying the ozone generator (1).

[0152] In the above embodiment, when viewed in the third direction, the intermediate flow path (83) does not overlap with the gas inlet path (GP1), the gas outlet path (GP2), the high-pressure side inlet path (HP1), the high-pressure side outlet path (HP3), the low-pressure side inlet path (LP1), and the low-pressure side outlet path (LP3), but overlaps with the discharge section (60).

[0153] In this configuration, the intermediate flow path (83) can be prevented from interfering with other flow paths, and the discharge part (60) can be sufficiently cooled by the cooling water in the intermediate flow path (83).

[0154] In the above embodiment, in the low-pressure side cooling unit (50), the cooling water that flows out of the low-pressure side inlet channel (LP1) flows through the U-shaped low-pressure side cooling channel (LP2) and is sent to the low-pressure side outlet channel (LP3). The cooling water that flows out of the high-pressure side inlet channel (HP1) flows through the U-shaped high-pressure side cooling channel (HP2) and is sent to the high-pressure side outlet channel (HP3). As a result, even in a configuration in which the directions of the cooling water in the high-pressure side cooling channel (HP2) and the low-pressure side cooling channel (LP2) are opposite to each other in the second direction and a plurality of low-pressure side cooling channels (LP2) and a plurality of high-pressure side cooling channels (HP2) are provided in the third direction, interference between the high-pressure side inlet channel (HP1) and the low-pressure side outlet channel (LP3) and between the high-pressure side outlet channel (HP3) and the low-pressure side inlet channel (LP1) can be avoided, and these channels can be formed in a space-saving manner within the discharge cell (20).

[0155] In the cooling unit (CU) of the above embodiment, two first flow paths (81) are formed in parallel in the third direction, and two second flow paths (82) are formed in parallel in the third direction. This increases the flow rate of the cooling water flowing through the cooling unit (CU), and facilitates laminar flow of the cooling water. This improves the cooling performance of the discharge part (60). Because the two cooling flow paths (HP2, LP2) are formed in parallel, an increase in pressure loss can also be suppressed.

[0156] In the above embodiment, the device includes a substrate (S) (first substrate) on which the first flow path (81) and the second flow path (82) are formed, and a substrate (S) (second substrate) adjacent to the first substrate (S) on which the intermediate flow path (83) is formed, and the intermediate flow path (83) overlaps with the first flow path (81) and the second flow path (82) in the thickness direction of the substrate (S). With this configuration, it is possible to ensure sufficient flow path lengths for the first flow path (81) and the second flow path (82), and also to ensure sufficient strength for the first substrate (S).

[0157] (8) Other Embodiments The above embodiment may be configured as follows.

[0158] As schematically shown in Fig. 14, the cooling flow paths (HP2, LP2) may include a flow path that further meanders from the U-shaped flow path. In this configuration, a third flow path (84) extending from the outlet end of the second flow path (82) along the first direction and a fourth flow path (85) extending from the third flow path (84) along the second direction are formed. In this configuration, the gas inlet path (GP1) may be provided along the first surface (20e), the gas outlet path (GP2) may be provided along the second surface (20f), the high-pressure side inlet path (HP1) may be provided along the third surface (20d), the low-pressure side inlet path (LP1) may be provided along the fourth surface (20c), the high-pressure side outlet path (HP3) may be provided along the fourth surface (20c), and the low-pressure side outlet path (LP3) may be provided along the third surface (20d).

[0159] As shown in FIG. 15 , the first flow path (81), the second flow path (82), and the intermediate flow path (83) may be formed on the same substrate (S). In this configuration, the ends of the first flow paths (81) and the second flow paths (82) communicate with each other via the intermediate flow path (83). This allows a U-shaped flow path to be formed on the single substrate (S). In this case, in the cooling unit (CU) of the above-described embodiment, the upper flow path plate (50B, 70B), the intermediate plate (50C, 70C), and the lower flow path plate (50D, 70D) can be replaced with a single substrate (S) having a U-shaped flow path. In this configuration, discharge units (DU) are disposed above and below the cooling unit (CU). One cooling unit (CU) cools the upper discharge module (DU) and the lower discharge module (DU).

[0160] The cooling unit (CU) may be formed with one first flow path (81) and one second flow path (82). In this case, for example, the first lower flow path plate (50D) and the second lower flow path plate (70D) may be omitted from the cooling unit (CU). This cooling unit (CU) may be disposed, for example, adjacent to the upper side of the uppermost discharge unit (DU) or adjacent to the lower side of the lowermost discharge unit (DU).

[0161] The first convex portion (61b) and the second convex portion (62b) of the discharge portion (60) may be columnar projections.

[0162] The heat medium in the heat medium flow path (P) does not have to be water, but may be a liquid such as a refrigerant or brine. The water may be pure water or city water. The heat medium may be any fluid, and may be a gas instead of a liquid.

[0163] The number of discharge units (DU) is not limited to that in the above embodiment. When the number of discharge units (DU) is increased, the number of cooling units (CU) also increases accordingly.

[0164] In the vertically adjacent discharge units (DU), the vertical positional relationship between the low-voltage electrode module (61) and the high-voltage electrode module (62) may be the same. In this configuration, the header unit (HU) may be omitted.

[0165] In the discharge unit (DU) of the above embodiment, a dielectric is provided in each of the high-voltage electrode module (62) and the low-voltage electrode module (61), but a dielectric may be provided in only one of the two. In other words, the discharge unit (DU) does not have to be of a so-called double-sided barrier type, and may be of a single-sided barrier type.

[0166] Although the embodiments and modifications have been described above, it will be understood that various changes in form and details are possible without departing from the spirit and scope of the claims. Furthermore, elements of the above embodiments, modifications, and other embodiments may be combined or substituted as appropriate.

[0167] The above-mentioned descriptions such as "first," "second," "third," etc. are used to distinguish the words to which these descriptions are attached, and do not limit the number or order of the words.

[0168] As described above, the present disclosure is useful for discharge cells and ozone generators.

[0169] 1 Ozone generator 20 Discharge cell 20c Front (fourth surface) 20d Rear (third surface) 20e Right surface (first surface) 20f Left surface (second surface) 60 Discharge section 61 Low-voltage electrode module 61a First base (low-voltage side dielectric) 61c Low-voltage electrode 62 High-voltage electrode module 62a Second base (high-voltage side dielectric) 62c High-voltage electrode 63 Discharge space 81 First flow path 82 Second flow path 83 Intermediate flow path CU Cooling unit DU Discharge unit GP1 Gas inlet path GP2 Gas outlet path HP1 High-pressure side inlet path HP2 High-pressure side cooling flow path HP2,LP2 Cooling flow path HP3 High-pressure side outlet path LP1 Low-pressure side inlet path LP2 Low-pressure side cooling flow path LP3 Low-pressure side outlet path

Claims

1. a discharge section (60) including a high-voltage electrode module (62) including a high-voltage electrode (62c) and a low-voltage electrode module (61) including a low-voltage electrode (61c), wherein a dielectric (61a, 62a) is provided in at least one of the high-voltage electrode module (62) and the low-voltage electrode module (61), and a discharge space (63) through which a gas flows is formed between the high-voltage electrode module (62) and the low-voltage electrode module (61); a cooling flow path (HP2, LP2) through which a heat medium for cooling the discharge part (60) flows; The cooling flow paths (HP2, LP2) are a first flow path (81) located downstream of the gas in the discharge space (63); a second flow path (82) located upstream of the first flow path (81) in the gas direction in the discharge space (63); and at least an intermediate flow path (83) connecting the outlet end of the first flow path (81) and the inlet end of the second flow path (82). Discharge cell for ozone generator.

2. The gas flows through the discharge space (63) in a first direction, the first flow path (81) and the second flow path (82) extend along a second direction intersecting the first direction; The intermediate flow path (83) extends along the first direction.

2. A discharge cell for an ozone generator according to claim 1.

3. a high-pressure side cooling flow path (HP2) as the cooling flow path (HP2, LP2) through which a heat medium for cooling the high-voltage electrode module (62) flows; a low-pressure side cooling flow path (LP2) as the cooling flow path (HP2, LP2) through which a heat medium for cooling the low-voltage electrode module (61) flows; 3. A discharge cell for an ozone generator according to claim 2.

4. the flow of the heat medium in the first flow path (81) of the high-pressure side cooling flow path (HP2) and the flow of the heat medium in the first flow path (81) of the low-pressure side cooling flow path (LP2) are opposite to each other in the second direction, The flow of the heat medium in the second flow path (82) of the high-pressure side cooling flow path (HP2) and the flow of the heat medium in the second flow path (82) of the low-pressure side cooling flow path (LP2) are opposite to each other in the second direction.

4. A discharge cell for an ozone generator according to claim 3.

5. The discharge cell has a first surface (20e) and a second surface (20f) located on both sides in the first direction, and a third surface (20d) and a fourth surface (20c) located on both sides in the second direction, a rectangular parallelepiped discharge unit (DU) having the discharge portion (60); a cooling unit (CU) having a rectangular parallelepiped shape in which the cooling flow paths (HP2, LP2) are formed, Each of the discharge unit (DU) and the cooling unit (CU) has: a gas inlet passage (GP1) for introducing gas into the discharge space (63); a gas outlet path (GP2) for discharging gas from the discharge space (63); a high-pressure side inlet channel (HP1) for allowing a heat transfer medium to flow into the high-pressure side cooling channel (HP2); a high-pressure side outlet passage (HP3) for discharging the heat transfer medium from the high-pressure side cooling passage (HP2); a low-pressure side inlet channel (LP1) for allowing a heat medium to flow into the low-pressure side cooling channel (LP2); a low-pressure side outlet passage (LP3) for discharging the heat transfer medium from the low-pressure side cooling passage (LP2); the gas inlet channel (GP1) is provided at a position along the first surface (20e), the gas outlet channel (GP2) is provided at a position along the second surface (20f), the high-pressure-side inlet channel (HP1) is provided at a position along the third surface (20d), the low-pressure-side inlet channel (LP1) is provided at a position along the fourth surface (20c), One of the high-pressure side outlet channel (HP3) and the low-pressure side outlet channel (LP3) is provided at a position along the third surface (20d), and the other is provided at a position along the fourth surface (20c).

5. A discharge cell for an ozone generator according to claim 2.

6. a plurality of the discharge units (DU) and the cooling units (CU); the discharge units (DU) and the cooling units (CU) are alternately stacked in the third direction perpendicular to the first direction and the second direction, The gas inlet channels (GP1) of the plurality of discharge units (DU) and the plurality of cooling units (CU) communicate with each other in the third direction, the gas outlet channels (GP2) of the plurality of discharge units (DU) and the plurality of cooling units (CU) communicate with each other in the third direction, the high-pressure side inlet channels (HP1) of the plurality of discharge units (DU) and the plurality of cooling units (CU) communicate with each other in the third direction, the high-pressure side outlet channels (HP3) of the plurality of discharge units (DU) and the plurality of cooling units (CU) communicate with each other in the third direction, the low-pressure side inlet channels (LP1) of the plurality of discharge units (DU) and the plurality of cooling units (CU) communicate with each other in the third direction, and the low-pressure side outlet channels (LP3) of the plurality of discharge units (DU) and the plurality of cooling units (CU) communicate with each other in the third direction. The discharge cell for generating ozone according to claim 5 .

7. When viewed in the third direction, the intermediate flow path (83) does not overlap with the gas inlet channel (GP1), the gas outlet channel (GP2), the high-pressure side inlet channel (HP1), the high-pressure side outlet channel (HP3), the low-pressure side inlet channel (LP1), and the low-pressure side outlet channel (LP3), but overlaps with the discharge part (60).

7. A discharge cell for an ozone generator according to claim 6.

8. The first flow path (81), the intermediate flow path (83), and the second flow path (82) form a U-shaped flow path.

2. A discharge cell for an ozone generator according to claim 1.

9. The first flow path (81), the intermediate flow path (83), and the second flow path (82) are formed on the same substrate (S).

2. A discharge cell for an ozone generator according to claim 1.

10. A discharge unit (DU) having the discharge section (60), a cooling unit (CU) in which the cooling flow paths (HP2, LP2) are formed, The cooling unit (CU) is formed with a high-pressure side inlet channel (HP1) connected to the first flow path (81) and a high-pressure side outlet channel (HP3) connected to the second flow path (82), The high-pressure side inlet channel (HP1) and the high-pressure side outlet channel (HP3) do not overlap with the discharge space (63) when viewed in a third direction which is the stacking direction of the discharge unit (DU) and the cooling unit (CU).

2. A discharge cell for an ozone generator according to claim 1.

11. The high-pressure side inlet channel (HP1) and the high-pressure side outlet channel (HP3) are located in the same direction as seen from the discharge space (63).

11. A discharge cell for an ozone generator according to claim 10.

12. A discharge unit (DU) having the discharge section (60), a cooling unit (CU) in which the cooling flow paths (HP2, LP2) are formed, The cooling unit (CU) is formed with a low-pressure inlet channel (LP1) connected to the first flow path (81) and a low-pressure outlet channel (LP3) connected to the second flow path (82), The low-pressure side inlet channel (LP1) and the low-pressure side outlet channel (LP3) do not overlap with the discharge space (63) when viewed in a third direction which is the stacking direction of the discharge unit (DU) and the cooling unit (CU).

2. A discharge cell for an ozone generator according to claim 1.

13. The low-pressure side inlet channel (LP1) and the low-pressure side outlet channel (LP3) are located in the same direction as seen from the discharge space (63).

11. A discharge cell for an ozone generator according to claim 10.