Scanning probe microscope

Abstract

A scanning probe microscope according to the present disclosure comprises: a laser emitting device (17) that emits laser light (33) for heating a sample (S) onto a portion of the sample (S); a temperature sensor (18) that detects the temperature of the sample (S); and a control device (100) that controls a laser light source. The control device (100) of the scanning probe microscope controls an output state of the laser light (33) emitted from the laser emitting device (17) in accordance with the temperature of the sample (S) detected by the temperature sensor (18).

Description

scanning probe microscope

[0001] The present invention relates to a scanning probe microscope.

[0002] Conventional scanning probe microscopes sometimes include a configuration for adjusting the temperature of a sample when measuring the sample. For example, if the sample is a resin, adjusting the temperature of the sample and measuring the state of the sample makes it possible to measure the state of the sample corresponding to the temperature, such as the state of deterioration of the sample due to heating.

[0003] For example, Japanese Patent Publication No. 2022-507979 (Patent Document 1) discloses a scanning probe microscope equipped with a configuration in which a sample is heated by a heater.

[0004] Special Publication No. 2022-507979

[0005] However, in conventional scanning probe microscopes that are configured to heat the sample with a heater, the heater heats the entire sample, making it difficult to adjust the temperature of only a portion of the sample.

[0006] In a scanning probe microscope having a configuration in which a sample is heated by a heater, if the sample is deformed due to thermal expansion, it may become difficult to accurately perform the desired measurement.

[0007] Furthermore, scanning probe microscopes are equipped with piezoelectric elements to change the position of the sample, but when adjusting the temperature of the sample with a heater, the heat emitted from the heater can damage the piezoelectric elements, causing them to stop functioning properly.

[0008] The present invention has been made to solve such problems, and its object is to provide a scanning probe microscope that can suppress the occurrence of problems caused by heating the sample.

[0009] A scanning probe microscope according to one aspect of the present invention includes a sample stage on which a sample is placed, a cantilever that scans along the surface of the sample, a laser irradiation device that irradiates a part of the sample with laser light that heats the sample, a temperature sensor that detects the temperature of the sample, and a control device that controls the laser irradiation device. The control device controls the output state of the laser light irradiated from the laser irradiation device in accordance with the temperature of the sample detected by the temperature sensor.

[0010] The laser irradiation device heats a part of the sample by irradiating it with laser light, and the control device controls the output state of the laser light irradiated from the laser irradiation device according to the temperature of the sample detected by the temperature sensor, thereby suppressing the occurrence of problems caused by heating the sample.

[0011] FIG. 1 is a diagram showing the main structure and control circuit of a scanning probe microscope 1 of a first embodiment. FIG. 2 is a plan view showing the positional relationship of a light emitting device 15, a light receiving device 16, a laser irradiation device 17, and a temperature sensor 18 in a scanning probe microscope 1 of the first embodiment. FIG. 3 is a flowchart of a temperature adjustment process of a sample S by a laser irradiation device 17 of the first embodiment. FIG. 4 is a diagram showing a control circuit of a scanning probe microscope 1 of a second embodiment. FIG. 5 is a flowchart of a laser light source selection process of the second embodiment. FIG. 6 is a diagram showing a control circuit of a scanning probe microscope 1 of a third embodiment. FIG. 7 is a flowchart of a first example of a movement control process of a temperature detection position according to the third embodiment.

[0012] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following, the same or corresponding parts in the drawings will be designated by the same reference numerals, and their descriptions will not be repeated in principle. While several embodiments will be described below, it is intended from the beginning of the application that the configurations described in each embodiment may be appropriately combined.

[0013] First Embodiment [Configuration of Main Structure and Control Circuit of Scanning Probe Microscope 1] Fig. 1 is a diagram showing the main structure and control circuit of a scanning probe microscope 1 of the first embodiment. In Fig. 1, the main structure of the scanning probe microscope 1 is shown in side view, and the control circuit is shown in a block diagram. As for the control circuit, the circuit configuration of characteristic parts in a scanning probe microscope of the second embodiment is shown in a block diagram.

[0014] In the following description, the contact surface of the scanning probe microscope 1 is defined as the XY plane, and the axis perpendicular to the XY plane is defined as the Z axis.

[0015] Referring to FIG. 1, the scanning probe microscope 1 includes, as its main components, a cantilever 12, a support device 13, a sample stage 14, a light emitting device 15, a light receiving device 16, a laser irradiation device 17, a temperature sensor 18, a Z-direction actuator 141, an XY-direction actuator 142, and a control device 100.

[0016] A sample S is placed on the sample stage 14. A Z-direction actuator 141 that moves the sample stage 14 up and down (Z direction) is provided below the sample stage 14. An XY-direction actuator 142 that moves the sample stage 14 and the Z-direction actuator 141 in the X and Y directions is provided below the Z-direction actuator 141.

[0017] A position changing device is configured by the Z-direction actuator 141 and the XY-direction actuator 142. The Z-direction actuator 141 and the XY-direction actuator 142 can also be said to be devices for moving the sample stage 14. Both the Z-direction actuator 141 and the XY-direction actuator 142 have piezoelectric elements. The positions of the Z-direction actuator 141 and the XY-direction actuator 142 in the Z direction and the XY direction are controlled by voltages applied to the piezoelectric elements that each of them has.

[0018] The cantilever 12 is disposed so as to be positioned above the sample S placed on the sample stage 14 during measurement of the sample S. The cantilever 12 has a probe 11 on the surface facing the sample S at a tip 121, which is one end of the cantilever 12. The rear end 122, which is the other end of the cantilever 12, is fixed to a support device 13 extending in the Z direction. When pressed against the sample S, for example, the cantilever 12 is flexible and can bend in the Z direction.

[0019] Above the cantilever 12, there are provided a light emitting device 15, a light receiving device 16, a laser irradiation device 17, and a temperature sensor 18. The light emitting device 15 is a laser irradiation device equipped with a laser light source that irradiates laser light 31 toward the back surface side of the tip 121 of the cantilever 12 when measuring the sample S. The back surface of the cantilever 12 is the surface opposite to the front surface side that faces the sample S.

[0020] The light receiving device 16 is a sensor that detects laser light. The light receiving device 16 is provided at a position where it can receive the laser light 32 reflected by the back surface of the tip 121 of the cantilever 12. The light receiving device 16 receives and detects the laser light 32 reflected by the back surface of the tip 121 of the cantilever 12.

[0021] In the scanning probe microscope 1, a cantilever 12 including a probe 11 is arranged facing a sample S, and with the cantilever 12 and the sample brought close to each other, deflection of the cantilever 12 that may occur due to mechanical interaction, electromagnetic interaction, etc. between the sample S and the probe 11 is detected. The amount of deflection of the cantilever 12 is detected by a calculation performed by the control device 100 in response to laser light 31 irradiated onto the cantilever 12 from the light emitting device 15 and laser light 32 reflected by the cantilever 12 being received by the light receiving device 16.

[0022] The control device 100 drives a position change device (movement device) including a Z-direction actuator 141 and an XY-direction actuator 142 that change the position of the sample stage 14, thereby changing the position of the sample S that the probe 11 faces, and thereby causing the probe 11 to scan over the sample S. In this way, in the scanning probe microscope 1, the amount of deflection of the cantilever 12 is detected while the probe 11 is scanned over the sample S, and the control device 100 executes a process for analyzing the surface condition of the sample S, thereby making it possible to measure the surface condition of the sample S in three dimensions.

[0023] The laser irradiation device 17 includes a laser light source 170 and irradiates a part of the sample S with laser light 33. The laser irradiation device 17 heats the part of the sample S by irradiating the part of the sample S with the laser light 33, and is used to adjust the temperature of the sample S. The laser irradiation device 17 outputs laser light having a frequency different from the frequency of the laser light 31 output by the light emitting device 15.

[0024] The following is an example of a case where the temperature of the sample S is adjusted in the scanning probe microscope 1. In the scanning probe microscope 1, the temperature of the sample S may be adjusted in order to evaluate the heat resistance and the like of various samples such as films, lithium ion battery separators, lithium ion battery binders, resins, and living organisms.

[0025] The temperature sensor 18 is configured by a thermograph and is provided above the sample stage 14. The temperature sensor 18 receives infrared rays emitted from the sample S placed on the sample stage 14 and detects the heat distribution of the sample S.

[0026] The light receiving device 16 is provided with a bandpass filter 160. The bandpass filter 160 is an optical filter that passes only light in a specific frequency band in order to accurately receive the laser light 32 reflected by the rear surface of the tip 121 of the cantilever 12. Note that the bandpass filter 160 does not necessarily have to be provided.

[0027] As described above, the laser irradiation device 17 outputs laser light having a frequency different from the frequency of the laser light output by the light emitting device 15. Therefore, by providing a bandpass filter 160 in the light receiving device 16, the laser light 33 output from the laser irradiation device 17 and the laser light generated when the laser light 33 is reflected by the sample S are prevented from being received by the light receiving device 16 by the bandpass filter 160.

[0028] The control device 100 is realized by hardware such as a CPU (Central Processing Unit) and memory, and software that performs the arithmetic processing described below.

[0029] The control device 100 controls the operation of each component constituting the scanning probe microscope 1. The control device 100 is configured, for example, according to a general-purpose computer architecture. Note that the control device 100 may be implemented using hardware dedicated to the scanning probe microscope 1. The control device 100 includes a processor 101 and a memory 102. A display device 103 and an input device 104 are connected to the control device 100.

[0030] The control device 100 may be configured to include a display device 103 and an input device 104 in addition to the processor 101 and the memory 102 .

[0031] The processor 101 is typically an arithmetic processing unit such as a CPU (Central Processing Unit) or an MPU (Multi Processing Unit). The processor 101 reads and executes programs stored in the memory 102 to implement each of the processes of the control device 100, which will be described later. Note that while the example in FIG. 2 illustrates a configuration with a single processor, the control device 100 may have multiple processors.

[0032] The memory 102 is realized by a non-volatile memory such as a random access memory (RAM), a read only memory (ROM), or a flash memory. The memory 102 non-temporarily stores programs executed by the processor 101, data used by the processor 101, etc. For example, the memory 102 stores various programs such as a program for executing the processes shown in FIG. 7 .

[0033] The memory 102 may be a CD-ROM (Compact Disc - Read Only Memory), a DVD-ROM (Digital Versatile Disk - Read Only Memory), a USB (Universal Serial Bus) memory, a memory card, a FD (Flexible Disk), a hard disk, an SSD (Solid State Drive), a magnetic tape, a cassette tape, an MO (Magnetic Optical Disc), an MD (Mini Disc), an IC (Integrated Circuit) card (excluding memory cards), an optical card, a mask ROM, or an EPROM, as long as it can non-temporarily record a program in a format readable by the control device 100, which is a type of computer.

[0034] The display device 103 is configured by a liquid crystal display panel, etc. The display device 103 can display various images, such as a setting screen image for making various settings for performing measurements using the scanning probe microscope 1, a screen image showing the status during measurement using the scanning probe microscope 1, a screen image displaying the measurement results measured by the scanning probe microscope 1, a screen image showing the status during measurement using the temperature sensor 18, and a screen image displaying the measurement results using the temperature sensor 18.

[0035] The input device 104 is configured by a mouse, a keyboard, etc. The input device 104 is an input interface that accepts information input via the input device 104. Note that the control device 100 may be provided with a touch panel that integrates the display device 103 and the input device 104.

[0036] The control device 100 sends a control signal to an optical system driving device (not shown) that drives the light-emitting device 15 and the light-receiving device 16. The optical system driving device drives the light-emitting device 15 and the light-receiving device 16 in response to the control signal. This executes light emission control and position control of the light-emitting device 15, and executes position control of the light-receiving device 16. The light-receiving device 16 outputs detection information of the laser light 32 to the control device 100.

[0037] The control device 100 controls the driving of the Z-direction actuator 141 and the X-Y-direction actuator 142 by sending control signals to the Z-direction actuator 141 and the X-Y-direction actuator 142 and applying voltages to the piezoelectric elements. This enables the control device 100 to execute control to change the relative positional relationship between the cantilever 12 and the sample S.

[0038] Based on the detection information input from the light receiving device 16, the control device 100 identifies the incident position of the laser light 32 detected by the light receiving device 16, and based on that input position, calculates the Z-direction position of the tip 121 of the cantilever 12, i.e., the amount of deflection of the cantilever 12 in the Z direction.

[0039] The control device 100 acquires detection data of the temperature of the sample S from the temperature sensor 18. The control device 100 compares the detection data of the temperature of the sample S acquired from the temperature sensor 18 with a predetermined target temperature of the sample S, and determines the output value of the laser irradiation device 17 so that the detected temperature of the sample S becomes the target temperature of the sample S. The control device 100 sends a control signal to the laser driving device 20 so that the laser light 33 output from the laser irradiation device 17 becomes the determined output value. In this way, the control device 100 performs control to adjust the intensity of the laser light 33 output from the laser irradiation device 17.

[0040] The laser driving device 20 adjusts the output of the laser irradiation device 17 in response to a control signal received from the control device 100. In this way, the control device 100 executes control so that the temperature of the portion of the sample S to be measured becomes the target temperature.

[0041] [Relationship Between Light-Emitting Device 15, Light-Receiving Device 16, Laser Irradiation Device 17, and Temperature Sensor 18] Next, the relationship between light-emitting device 15, light-receiving device 16, laser irradiation device 17, and temperature sensor 18 in the scanning probe microscope 1 will be described.

[0042] FIG. 2 is a plan view showing the positional relationship between the light emitting device 15, the light receiving device 16, the laser irradiation device 17, and the temperature sensor 18 in the scanning probe microscope 1 of the first embodiment.

[0043] As shown in FIG. 2, the light-emitting device 15 and the light-receiving device 16 are arranged above the sample stage 14 so that the path along which the laser light 31 output from the light-emitting device 15 is reflected by the sample S and the reflected laser light 32 is received by the light-receiving device 16 is a straight path when viewed from above.

[0044] The laser irradiating device 17 is installed at a position where the laser light 33 is incident on the sample S at a preset angle 4 with respect to the path of the laser light 32 between the light emitting device 15 and the light receiving device 16, so that the output laser light 33 and the laser light 33 reflected by the sample S are less likely to be received by the light receiving device 16. In other words, the light receiving device 16 is arranged in a direction different from the reflection direction of the laser light that is incident on the sample S from the laser irradiating device 17 and reflected by the sample S. With this configuration, it is possible to prevent the light receiving device 16 from erroneously detecting the laser light 33 output from the laser irradiating device 17.

[0045] The temperature sensor 18 is a thermographic sensor, and is positioned directly above the sample stage 14 so that the temperature detection range includes almost the entire sample stage 14, in order to be able to detect the temperature distribution throughout the sample S.

[0046] [Temperature Control Process of Sample S by Laser Irradiation Device 17] Next, with reference to FIG. 3, the temperature control process of the sample S by the laser irradiation device 17 executed by the control device 100 will be described.

[0047] 3 is a flowchart of the temperature adjustment process of the sample S by the laser irradiation device 17 of the first embodiment. A program for executing the temperature adjustment process shown in FIG. 3 is stored in the memory 102 of the control device 100 and is executed by the processor 101.

[0048] The processor 101 executes the following process in the temperature adjustment process of the sample S by the laser irradiation device 17.

[0049] In step S1, the processor 101 causes the laser irradiation device 17 to output laser light 33 that adjusts the temperature of the sample S. As a result, the laser light 33 is irradiated onto a partial region of the sample S. In the region of the sample S irradiated with the laser light 33, the temperature rises in response to heating by the laser light 33.

[0050] In step S2, the processor 101 acquires detection data of the temperature in the sample S from the temperature sensor 18. In step S3, the processor 101 causes the display device 103 to display an image of the temperature distribution in the sample S detected by the temperature sensor 18 in accordance with the detection data acquired from the temperature sensor 18.

[0051] In step S3, an image of the temperature distribution in the sample S is displayed on the display device 103, and the image is obtained based on the amount of deflection of the cantilever 12 detected by the light receiving device 16. An image may be displayed in which a first image showing a map of the surface shape of the sample S is superimposed on a second image showing the temperature distribution in the sample S detected by the temperature sensor 18. By displaying such an image, it is possible to clearly show the relationship between the temperature and the surface state of the sample S, for example, when the sample S is made of a composite material and the temperature varies depending on the location within the sample S.

[0052] In step S4, the processor 101 compares the detected temperature data of the sample S obtained from the temperature sensor 18 with a predetermined target temperature of the sample S, and determines whether the detected temperature of the sample S matches the target temperature of the sample S.

[0053] In step S4, the processor 101 ends the process if the detected temperature of the sample S matches the target temperature of the sample S. In step S4, if the detected temperature of the sample S does not match the target temperature of the sample S, the processor 101 adjusts the output state of the laser light from the laser irradiation device 17 so that the detected temperature of the sample S becomes the target temperature, and ends the process. In step S4, for example, if the detected temperature is lower than the target temperature, the processor 101 adjusts the output state of the laser light from the laser irradiation device 17 so that the temperature of the sample S increases, and if the detected temperature is higher than the target temperature, the processor 101 adjusts the output state of the laser irradiation device 17 so that the temperature of the sample S decreases.

[0054] In step S4, the adjustment of the output state of the laser beam by the laser irradiation device 17 is performed by adjusting the intensity of the output laser beam 33 or by adjusting the duty ratio of the pulse of the laser beam 33. By adjusting the intensity of the laser beam 33, the output of the laser beam 33 can be increased or decreased. Also, by adjusting the duty ratio of the pulse of the laser beam 33, the output of the laser beam 33 can be increased or decreased.

[0055] The scanning probe microscope 1 of the first embodiment described above can provide the following technical effects.

[0056] In the scanning probe microscope 1, when the sample S is heated in response to the laser light 33 output from the laser irradiation device 17, the temperature of the sample S is adjusted by adjusting the output of the laser irradiation device 17 so that the temperature of the sample S detected by the temperature sensor 18 becomes the target temperature. In this way, by heating a portion of the sample S with the laser irradiation device 17, it is possible to prevent the occurrence of problems caused by heating the sample, such as preventing thermal expansion of the entire sample S due to a change in temperature of the entire sample S from adversely affecting the measurement results of the measurement target region of the sample S with the scanning probe microscope 1. Furthermore, because heating the sample S with the laser irradiation device 17 heats a portion of the sample S, it is possible to prevent damage to the piezoelectric element due to heating when adjusting the temperature of the sample with a heater.

[0057] In the scanning probe microscope 1, the sample is heated in response to the laser light output from the laser irradiation device 17, so compared to heating the entire sample using a heater, it is possible to locally heat an area in the nm order and a very small area such as a μm order.

[0058] In the scanning probe microscope 1, as in steps S4 and S5 of FIG. 3, the output state of the laser light 33 irradiated from the laser irradiation device 17 is controlled so that the temperature of the sample S detected by the temperature sensor 18 becomes the target temperature, and therefore the temperature of the part of the sample S being heated can be adjusted to the target temperature.

[0059] In the scanning probe microscope 1, as explained in step S5 of FIG. 3, the output state of the laser light 33 is controlled by controlling the intensity of the laser light 33 that heats the sample S, so that the temperature of the part of the sample S that is being heated can be easily adjusted to a target temperature.

[0060] In the scanning probe microscope 1, as explained in step S5 of FIG. 3, the output state of the laser light 33 is controlled by controlling the duty ratio of the laser light 33 that heats the sample S, so that the temperature of the part of the sample S that is being heated can be easily adjusted to the target temperature.

[0061] In the scanning probe microscope 1 of the first embodiment, it is possible to locally heat a minute area in the sample S, and therefore it is possible to measure a relatively small sample.

[0062] In the scanning probe microscope 1 of the first embodiment, it is possible to locally heat a minute area in the sample S, and therefore it is possible to create locations in a single sample that are in various temperature states.

[0063] In the scanning probe microscope 1 of the first embodiment, it is possible to locally heat a very small area of ​​the sample S, so that a temperature difference can be generated within a certain measurement range, for example, by heating only half of the sample.

[0064] In the scanning probe microscope 1 of the first embodiment, the sample is heated locally over a small range, and therefore the amount of heat generated in the entire device is small compared to when the entire sample is heated using a heater, making it suitable for measurements in a vacuum. The reason for this is that measurements in a vacuum are performed in a sealed space, making it difficult to release the heat required to heat the sample.

[0065] In a typical scanning probe microscope, for example, a current mode may be executed in which a potential difference is generated between the sample stage 14 and the cantilever 12 to generate a current. In a conventional configuration in which a heater is used to heat the entire sample, a heat insulator must be provided between the heater and the movement device to protect the movement device. When a heat insulator is provided in this manner, the presence of the heat insulator, which is an insulator, prevents current from flowing between the sample stage 14 and the cantilever 12, making it impossible to execute the current mode. In contrast, in the scanning probe microscope of the first embodiment, the sample S is heated by laser light from the laser irradiation device 17, so there is no need to provide a heat insulator as in a configuration in which a heater is used to heat the entire sample, and therefore the current mode can be executed.

[0066] In the scanning probe microscope 1 of the first embodiment, the laser light 33 irradiated onto the sample S from the laser irradiation device 17 has a different frequency than the laser light 33 irradiated onto the cantilever 12 by the light emitting device 15, and therefore it is possible to prevent the light receiving device 16 from receiving the laser light 33 irradiated onto the sample S from the laser irradiation device 17.

[0067] In the scanning probe microscope 1 of the first embodiment, as shown in FIG. 2 , the light receiving device 16 is arranged in a direction different from the reflection direction of the laser light that is incident on the sample S from the laser irradiating device 17 and reflected by the sample S, so that it is possible to prevent the light receiving device 16 from receiving the laser light that is incident on the sample S from the laser irradiating device 17 and reflected therefrom.

[0068] In the scanning probe microscope 1 of the first embodiment, as shown in FIG. 1 , a bandpass filter 160 provided on the light-receiving side of the light-receiving device 16 allows only light within a specific range of frequencies to be received by the light-receiving device 16, thereby preventing the light-receiving device 16 from receiving the laser light 33 irradiated from the laser irradiation device 17.

[0069] In the scanning probe microscope 1 of the first embodiment, an image showing the temperature distribution in the sample S can be displayed on the display device 103 of FIG. 1 in accordance with the detection data of the temperature sensor 18, making it possible to easily grasp the temperature distribution in the sample S.

[0070] In the first embodiment, an example has been shown in which a thermograph is used as the temperature sensor 18. When using a thermograph as the temperature sensor 18, it is desirable to use a thermograph with a higher resolution, because the higher the resolution of the thermograph, the clearer the image will be.

[0071] Furthermore, when displaying an image on the display device 103 as described in the first embodiment, in which a first image showing a map of the surface shape of the sample S obtained based on the amount of deflection of the cantilever 12 detected by the light receiving device 16 and a second image showing the temperature distribution in the sample S detected by the temperature sensor 18 are superimposed, it is desirable to use a higher resolution thermography.

[0072] Furthermore, as described in the first embodiment, when the temperature distribution in the sample S detected by the temperature sensor 18 is displayed on the display device 103, the control device 100 may store detected data of the temperature that changes over time, and display the state in which the temperature changes over time in the temperature distribution in the sample S according to the detected data. The state in which the temperature changes over time includes both the case in which the temperature increases over time and the case in which the temperature decreases over time.

[0073] Second Embodiment [Characteristic Control Circuit Configuration of Scanning Probe Microscope 1 of Second Embodiment] Fig. 4 is a diagram showing the control circuit of the scanning probe microscope 1 of the second embodiment. In Fig. 4, the circuit configuration of the characteristic parts of the scanning probe microscope of the second embodiment is shown in block diagram form.

[0074] The configuration shown in Figure 4 differs from the configuration shown in Figure 1 in that the laser irradiation device 17 is provided with multiple types of laser light sources, namely, a first laser light source 171, a second laser light source 172, and a third laser light source 173.

[0075] 4, the laser irradiation device 17 includes a first laser light source 171, a second laser light source 172, and a third laser light source 173. The first laser light source 171 is driven by a first laser driving device 21 and outputs an infrared laser light as the first laser light. The first laser light source 171 is driven by a second laser driving device 22 and outputs an ultraviolet laser light as the second laser light. The first laser light source 171 is driven by a third laser driving device 23 and outputs a visible laser light as the third laser light.

[0076] The control device 100 selects the laser light source that outputs laser light from among the first laser light source 171, the second laser light source 172, and the third laser light source 173, depending on the purpose of temperature adjustment of the sample S to be measured and the type of sample S.

[0077] The use of temperature control of the sample S to be measured refers to measurement-related uses such as measuring the degree of deterioration of the sample S due to the temperature and measuring the degree of hardening of the sample S due to the temperature. The type of sample S to be measured refers to the type of sample S to be measured, such as a biological sample and a photocatalyst.

[0078] The control device 100 outputs a control signal to the laser driving device that drives the laser light source, among the first laser driving device 21, the second laser driving device 22, and the third laser driving device 23. This allows the scanning probe microscope 1 of the second embodiment to output to the sample S a type of laser light that is selected according to the type of application for temperature regulation of the sample S to be measured.

[0079] The control device 100 outputs a control signal to the laser driving device that drives the laser light source, out of the first laser driving device 21, the second laser driving device 22, and the third laser driving device 23. This allows the scanning probe microscope 1 of the second embodiment to output to the sample S a type of laser light that is selected according to the type of application for temperature adjustment of the sample S to be measured.

[0080] The selectable types of laser light sources are not limited to the three types described above, and may be two or more types. Furthermore, the multiple types of laser light sources may be laser light sources capable of outputting laser light other than the infrared light, ultraviolet light, and visible light described above. When selecting one laser light source from the multiple types of laser light sources, the laser light source may be selected using selection conditions other than the purpose of temperature adjustment and the type of sample S described above.

[0081] [Laser Light Source Selection Process by Control Device 100] Next, with reference to FIG. 5, a laser light source selection process executed by the control device 100 will be described.

[0082] Fig. 5 is a flowchart of the laser light source selection process of the second embodiment. A program for executing the laser light source selection process shown in Fig. 5 is stored in the memory 102 of the control device 100 and is executed by the processor 101. The processor 101 executes the following processes in the laser light source selection process.

[0083] In step S11, the processor 101 acquires information regarding the intended purpose of the measurement of the sample S input from the input device 104. Examples of the information regarding the intended purpose of the measurement of the sample S acquired in step S11 include, for example, information indicating the type of sample S and information indicating the type of measurement. The information regarding the type of sample S is information indicating the type of sample S, such as a living organism, cloth, metal, or resin. The information indicating the type of measurement is information indicating the state to be measured, such as measurement of the deterioration state of the sample S or measurement of the hardening state of the sample S.

[0084] In step S12, the processor 101 selects a laser light source corresponding to the measurement purpose from among the first laser light source 171, the second laser light source 172, and the third laser light source 173, depending on the information regarding the measurement purpose of the sample S acquired in step S11.

[0085] The memory 102 stores data indicating the correspondence between information regarding the purpose of measurement of the sample S and the type of laser light source to be selected, and by referring to such data, the memory 102 selects and determines the type of laser light source that corresponds to the purpose of measurement.

[0086] In step S13, in order to use the first laser light source 171, the second laser light source 172, or the third laser light source 173 selected in step S12 for measurement, the processor 101 determines the driving device corresponding to the type of laser light source selected in S12 from among the first laser driving device 21, the second laser driving device 22, and the third laser driving device 23 as the destination of the control signal from the control device 100, and terminates the processing.

[0087] By performing such a laser light source selection process, the control device 100 can select the laser light source that outputs laser light from multiple types of laser light sources, namely, a first laser light source 171, a second laser light source 172, and a third laser light source 173, depending on the type of application for temperature regulation of the sample S to be measured.

[0088] After selecting a laser light source through such a laser light source selection process, the control device 100 can adjust the temperature of the sample S by executing a temperature adjustment process of the sample S as shown in FIG.

[0089] In the scanning probe microscope 1 according to the second embodiment, the control device 100 selects the laser light source to be irradiated from among a plurality of laser light sources, namely, the first laser light source 171, the second laser light source 172, and the third laser light source 173, depending on the purpose of measuring the sample S, so that the sample S can be irradiated with the type of laser light source depending on the purpose of measuring the sample S.

[0090] In the scanning probe microscope 1 according to the second embodiment, the control device 100 selects a laser light source to irradiate laser light from among a plurality of laser light sources depending on the type of sample S, so that the sample S can be irradiated with a type of laser light source depending on the type of sample S to be measured.

[0091] <Third Embodiment> Configuration of a Control Circuit of a Scanning Probe Microscope 1 of a Third Embodiment] Fig. 6 is a diagram showing a control circuit of a scanning probe microscope 1 of a third embodiment. In Fig. 6, the circuit configuration of a characteristic part of the scanning probe microscope 1 of the third embodiment is shown in a block diagram.

[0092] The configuration shown in FIG. 6 differs from the configuration shown in FIG. 1 in that a temperature sensor 180 and a first moving device 51 are included as devices connected to the control device 100 .

[0093] 6, the temperature sensor 180 is a spot radiation thermometer, and is a sensor that detects the temperature in a narrower area of ​​the sample S than the temperature sensor 18 that is a thermograph shown in FIG.

[0094] The first moving device 51 is made up of an actuator that moves the temperature sensor 180, and is a device that moves the temperature detection position by the temperature sensor 180. Because the temperature detection range of the temperature sensor 180 is relatively narrow, the temperature detection position is moved by the first moving device 51, and the temperature detection position is scanned over the sample S. By such scanning, the temperature sensor 180 can detect the temperature of the entire sample S.

[0095] The temperature sensor 180 may be configured so that the temperature detection position is not scanned on the sample S, but rather detects the temperature at a position on the sample S that is heated by the laser light.

[0096] The control device 100 sends control signals to the Z-direction actuator 141 and the XY-direction actuator 142 to apply voltages to the piezoelectric elements, thereby driving the Z-direction actuator 141 and the XY-direction actuator 142 and moving the sample stage 14 as described above. In this way, the control device 100 controls the movement of the measurement position of the sample S.

[0097] The control device 100 sends a control signal to the first moving device 51. In response to the control signal, the first moving device 51 moves the temperature detection position of the temperature sensor 180. In this way, the control device 100 controls the movement of the temperature detection position of the sample S by sending a control signal to the first moving device 51.

[0098] [First Example of Temperature Detection Position Movement Control Process by Control Device 100] Next, a first example of temperature detection position movement control process executed by the control device 100 will be described with reference to FIG.

[0099] 7 is a flowchart of a first example of the process for controlling the movement of the temperature detection position according to the third embodiment. A program for executing the process for controlling the movement of the temperature detection position shown in FIG. 7 is stored in the memory 102 of the control device 100 and is executed by the processor 101. The processor 101 executes the following processes in the process for controlling the movement of the temperature detection position.

[0100] In step S21, the processor 101 applies voltage to the piezoelectric elements of the Z-direction actuator 141 and the XY-direction actuator 142, thereby controlling the movement of the measurement position of the sample S by driving the Z-direction actuator 141 and the XY-direction actuator 142.

[0101] In step S22, the processor 101 controls the movement of the temperature detection position of the sample S by sending a control signal to the first moving device 51. In step S22, in response to the movement of the measurement position of the sample S in step S21, the temperature detection position of the sample S is moved so that the temperature at the measurement position to which the sample S moves can be detected.

[0102] In this way, in the first example of the temperature detection position movement control process according to the third embodiment, the temperature detection position of the sample S can be moved in accordance with the movement of the measurement position on the sample S, thereby detecting the temperature at the moving measurement position.

[0103] In addition, in the first example of the temperature detection position movement control process according to the third embodiment, the control device 100 controls the first moving device 51 so that the detection position of the sample S by the temperature sensor 180 moves in response to the movement of the scanning position of the sample S by the cantilever 12, so that the temperature sensor 180 can detect the temperature of the position of the sample S corresponding to the scanning position of the sample S by the cantilever 12.

[0104] <Fourth embodiment> Configuration of a control circuit of a scanning probe microscope 1 according to a fourth embodiment In the fourth embodiment, in addition to moving the temperature detection position on the sample S in accordance with the movement of the measurement position on the sample S as in the third embodiment, an example will be described in which the irradiation position on the sample S of the laser light output from the laser irradiation device 17 is moved.

[0105] The fourth embodiment differs from the third embodiment in the following points: In Fig. 6, a second movement device 52 is added; and in the temperature detection position movement control process shown in Fig. 7, step S23 is added.

[0106] The second moving device 52 is composed of an actuator that moves the laser irradiation device 17, and is a device that moves the position on the sample S where the laser irradiation device 17 irradiates the laser light. The second moving device 52 moves the region to be heated on the sample S. By moving the region to be heated in this way, it is possible to heat the sample S and adjust the temperature in a region at a position corresponding to the measurement position of the sample S by the probe 11 at the tip of the cantilever 12.

[0107] 6 , the control device 100 sends a control signal to the second moving device 52. In response to the control signal, the second moving device 52 moves the position on the sample S where the laser light is irradiated by the laser irradiation device 17. In this way, the control device 100 controls the movement of the position on the sample S where the laser light is irradiated by the laser irradiation device 17 by sending a control signal to the second moving device 52.

[0108] [Second Example of Temperature Detection Position Movement Control Process by Control Device 100] Next, a second example of the temperature detection position movement control process executed by the control device 100 will be described with reference to FIG.

[0109] After steps S21 and S22 are executed, in step S23, the processor 101 sends a control signal to the second moving device 52, thereby performing control to move the irradiation position of the laser light that heats the sample S so that the position on the sample S corresponding to the sample measurement position can be heated in accordance with the movement of the sample measurement position in step S21.

[0110] Thus, in the second example of the temperature detection position movement control process according to the fourth embodiment, the temperature detection position of the sample S is moved in accordance with the movement of the measurement position on the sample S, thereby making it possible to detect the temperature at the moving measurement position, and further, by moving the irradiation position of the laser light that heats the sample S in accordance with the movement of the measurement position on the sample S, it is possible to heat the area corresponding to the moving measurement position and adjust the temperature in that area.

[0111] In addition, in a second example of the temperature detection position movement control process according to the fourth embodiment, the control device 100 controls the second movement device 52 so that the irradiation position of the sample S by the laser irradiation device 17 moves in response to the movement of the measurement position of the sample S by the cantilever 12, thereby controlling the temperature of the position of the sample S corresponding to the scanning position of the sample S by the cantilever 12.

[0112] Aspects It will be understood by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0113] (Item 1) A scanning probe microscope according to one aspect includes a sample stage on which a sample is placed, a cantilever that scans along the surface of the sample, a laser irradiation device that irradiates a part of the sample with laser light that heats the sample, a temperature sensor that detects the temperature of the sample, and a control device that controls the laser irradiation device, and the control device may control the output state of the laser light irradiated from the laser irradiation device in accordance with the temperature of the sample detected by the temperature sensor.

[0114] According to the scanning probe microscope described in paragraph 1, the laser irradiation device irradiates a part of the sample with laser light, thereby heating the sample, and the control device controls the output state of the laser light irradiated from the laser irradiation device in accordance with the temperature of the sample detected by the temperature sensor, so that the occurrence of problems in the scanning probe microscope caused by heating the sample can be suppressed. Therefore, with this scanning probe microscope, it is possible to prevent sample temperature adjustment from adversely affecting measurements with the scanning probe microscope.

[0115] (Item 2) In the scanning probe microscope described in item 1, the control device may control the output state of the laser light irradiated from the laser irradiation device so that the temperature of the sample detected by the temperature sensor becomes a target temperature.

[0116] According to the scanning probe microscope described in paragraph 2, the output state of the laser light irradiated from the laser irradiation device is controlled so that the temperature of the sample detected by the temperature sensor becomes the target temperature, and therefore the temperature of the part of the sample being heated can be adjusted to the target temperature.

[0117] (Item 3) In the scanning probe microscope described in item 1 or 2, the control device may control the output state of the laser light by controlling the intensity of the laser light irradiated from the laser irradiation device.

[0118] According to the scanning probe microscope described in paragraph 3, the output state of the laser light is controlled by controlling the intensity of the laser light that heats the sample, so that the temperature of the part of the sample being heated can be easily adjusted to a target temperature.

[0119] (4) In the scanning probe microscope described in paragraph 1 or 2, the control device may control the output state of the laser light by controlling the duty ratio of the laser light irradiated from the laser irradiation device.

[0120] According to the scanning probe microscope described in paragraph 4, the output state of the laser light is controlled by controlling the laser light that heats the sample, so that the temperature of the part of the sample being heated can be easily adjusted to a target temperature.

[0121] (5) In the scanning probe microscope described in any one of paragraphs 1 to 4, the laser irradiation device may include a plurality of laser light sources that emit different types of laser light, and the control device may select a laser light source for the laser light to be emitted from the laser irradiation device from among the plurality of laser light sources depending on the purpose of measuring the sample.

[0122] According to the scanning probe microscope described in paragraph 5, the control device selects the laser light source to be irradiated from among a plurality of laser light sources depending on the purpose of measuring the sample, so that the sample can be irradiated with the type of laser light source depending on the purpose of measuring the sample.

[0123] (Item 6) In the scanning probe microscope described in any one of Items 1 to 4, the laser irradiation device may include a plurality of laser light sources that irradiate different types of laser light, and the control device may select a laser light source for the laser light irradiated from the laser irradiation device from among the plurality of laser light sources depending on the type of the sample.

[0124] According to the scanning probe microscope described in paragraph 6, the control device selects the laser light source that irradiates the laser light from among a plurality of laser light sources depending on the type of sample, so that the sample can be irradiated with the type of laser light source that corresponds to the type of sample to be measured.

[0125] (Item 7) The scanning probe microscope described in any one of Items 1 to 6 further comprises a light emitting device that irradiates the cantilever with laser light for detecting the amount of deflection of the cantilever, and a light receiving device that receives the laser light reflected by the cantilever, and the laser light that the laser irradiating device irradiates the portion of the sample may have a different frequency from the laser light that the light emitting device irradiates the cantilever.

[0126] According to the scanning probe microscope described in paragraph 7, the laser light irradiated onto the sample from the laser irradiation device has a frequency different from that of the laser light irradiated onto the cantilever by the light emitting device, and therefore it is possible to prevent the light receiving device from receiving the laser light irradiated onto the sample from the laser irradiation device.

[0127] (Item 8) In the scanning probe microscope described in item 7, the light receiving device may be arranged in a direction different from the reflection direction of the laser light that is incident on the sample from the laser irradiation device and reflected by the sample.

[0128] According to the scanning probe microscope described in paragraph 8, the light receiving device is arranged in a direction different from the reflection direction of the laser light that is incident on the sample from the laser irradiating device and reflected by the sample, so that it is possible to prevent the light receiving device from receiving the laser light that is incident on the sample from the laser irradiating device and reflected by the sample.

[0129] (Item 9) The scanning probe microscope described in item 7 may further include a bandpass filter provided on the light receiving side of the light receiving device, which allows the light receiving device to receive only light within a specific range of frequencies.

[0130] According to the scanning probe microscope described in paragraph 9, the bandpass filter provided on the light-receiving side of the light-receiving device allows the light-receiving device to receive only light within a specific range of frequencies, thereby preventing the light-receiving device from receiving the laser light irradiated from the laser irradiation device.

[0131] (Item 10) The scanning probe microscope described in any one of Items 1 to 9 may further include a display device that displays an image, and the control device may cause the display device to display an image showing the temperature distribution in the sample in accordance with the detection data of the temperature sensor.

[0132] According to the scanning probe microscope described in paragraph 10, an image showing the temperature distribution in the sample can be displayed on the display device in accordance with the detection data of the temperature sensor, making it easy to grasp the temperature distribution in the sample.

[0133] (Item 11) The scanning probe microscope described in any one of Items 1 to 10 may further include a first moving device that moves the detection position of the sample by the temperature sensor, and the control device may control the first moving device so that the detection position of the sample by the temperature sensor moves in response to the movement of the scanning position of the sample by the cantilever.

[0134] According to the scanning probe microscope described in paragraph 11, the control device controls the first moving device so that the detection position of the sample by the temperature sensor moves in response to the movement of the scanning position of the sample by the cantilever, so that the temperature sensor can detect the temperature of the position of the sample that corresponds to the scanning position of the sample by the cantilever.

[0135] (Item 12) The scanning probe microscope described in Item 11 may further include a second moving device that moves the heating position of the sample by the laser light output from the laser irradiation device, and the control device may control the moving device so that the irradiation position of the sample by the laser irradiation device moves in response to the movement of the measurement position of the sample by the cantilever.

[0136] According to the scanning probe microscope described in paragraph 12, the control device controls the second moving device so that the irradiation position of the sample by the laser irradiation device moves in response to the movement of the measurement position of the sample by the cantilever, so that the temperature of the position on the sample corresponding to the scanning position of the sample by the cantilever can be controlled.

[0137] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the above description, and is intended to include all modifications within the meaning and scope of the claims.

[0138] S sample, 14 sample stage, 12 cantilever, 31, 33 laser light, 17 laser irradiation device, 18, 180 temperature sensor, 100 control device, 1 scanning probe microscope, 171 first laser light source, 172 second laser light source, 173 third laser light source, 15 light emitting device, 16 light receiving device, 160 band pass filter, 103 display device, 51 first moving device, 52 second moving device.

Claims

1. a sample stage on which a sample is placed; a cantilever that is scanned along the surface of the sample; a laser irradiation device that irradiates a part of the sample with laser light that heats the sample; a temperature sensor for detecting the temperature of the sample; a control device for controlling the laser irradiation device, the control device controls an output state of the laser light irradiated from the laser irradiation device in accordance with the temperature of the sample detected by the temperature sensor; a first moving device that moves a detection position of the sample by the temperature sensor; The control device controls the first moving device so that the detection position of the sample by the temperature sensor moves in response to the movement of the scanning position of the sample by the cantilever.

2. 2. The scanning probe microscope according to claim 1, wherein the control device controls an output state of the laser light irradiated from the laser irradiation device so that the temperature of the sample detected by the temperature sensor reaches a target temperature.

3. 3. The scanning probe microscope according to claim 1, wherein the control device controls the output state of the laser light by controlling the intensity of the laser light emitted from the laser irradiation device.

4. 3. The scanning probe microscope according to claim 1, wherein the control device controls the output state of the laser light by controlling a duty ratio of the laser light emitted from the laser irradiation device.

5. the laser irradiation device includes a plurality of laser light sources that emit different types of laser light, 3. The scanning probe microscope according to claim 1, wherein the control device selects a laser light source for the laser light irradiated from the laser irradiation device from among the plurality of laser light sources depending on the purpose of measuring the sample.

6. the laser irradiation device includes a plurality of laser light sources that emit different types of laser light, 3. The scanning probe microscope according to claim 1, wherein the control device selects a laser light source for the laser light emitted from the laser irradiation device from among the plurality of laser light sources depending on the type of sample to be measured.

7. a light emitting device that irradiates the cantilever with a laser beam for detecting the amount of deflection of the cantilever; a light receiving device that receives the laser light reflected by the cantilever, 3. The scanning probe microscope according to claim 1, wherein the laser light emitted from said laser irradiation device has a frequency different from that of the laser light emitted from said light emitting device.

8. 8. The scanning probe microscope according to claim 7, wherein the light receiving device is arranged in a direction different from a reflection direction of the laser light that is incident on the sample from the laser irradiating device and reflected by the sample.

9. 8. The scanning probe microscope according to claim 7, further comprising a bandpass filter provided on the light receiving side of said light receiving device, said bandpass filter causing said light receiving device to receive only light within a specific range of frequencies.

10. Further comprising a display device for displaying an image, 3. The scanning probe microscope according to claim 1, wherein the control device causes the display device to display an image showing a temperature distribution in the sample in accordance with the detected data from the temperature sensor.

11. a second moving device that moves a heating position of the sample by the laser light irradiated from the laser irradiation device; 3. The scanning probe microscope according to claim 1, wherein the control device controls the second moving device so that an irradiation position of the sample by the laser irradiation device moves in response to movement of a measurement position of the sample by the cantilever.