Maintenance work system

Abstract

The present invention improves the safety of a worker during maintenance work performed by a robot. A maintenance work system in a substrate processing factory comprises: a device space in which a substrate processing system is installed; and a travel space in which a work body related to maintenance work of the substrate processing system travels, the travel space being positioned above or below the device space. The maintenance work system includes the work body, and a lifting mechanism for lifting the work body, which travels through the travel space to an upper position or a lower position of the substrate processing system for a work object, between the travel space and the device space.

Description

Maintenance Work System

[0001] The present disclosure relates to a maintenance work system.

[0002] Currently, maintenance work (replacement of consumables, cleaning, etc.) for substrate processing systems is performed manually by maintenance workers.

[0003] In response to this, development of a maintenance work system that uses robots to perform maintenance work is underway. In this maintenance work system, it is assumed that the robots will perform the maintenance work autonomously.

[0004] On the other hand, even when maintenance work is performed by a robot, there are cases where work other than maintenance work is performed during the maintenance period. In such cases, there is a possibility that workers performing work other than maintenance work may enter the vicinity of the robot performing maintenance work or on the robot's travel path toward the device undergoing maintenance work.

[0005] Japanese Patent Publication No. 2021-136359 Japanese Patent Publication No. 2020-161827 International Publication No. 2021 / 178458 US Patent Application Publication No. 2018 / 032062 US Patent Application Publication No. 2020 / 103756

[0006] The present disclosure improves worker safety during maintenance work using a robot.

[0007] A maintenance work system according to one aspect of the present disclosure has, for example, the following configuration: That is, a maintenance work system in a substrate processing factory including an equipment space in which a substrate processing system is installed, and a travel space located above or below the equipment space and through which a working body involved in maintenance work on the substrate processing system travels, the system including the working body, and a lifting mechanism for lifting and lowering the working body, which has traveled through the travel space to a position above or below the substrate processing system to be worked on, between the travel space and the equipment space.

[0008] According to the present disclosure, it is possible to improve the safety of workers during maintenance work using a robot.

[0009] FIG. 1A is a first diagram showing a side view of a first substrate processing factory to which a maintenance work system is applied. FIG. 1B is a second diagram showing a side view of the first substrate processing factory to which a maintenance work system is applied. FIG. 1C is a third diagram showing a side view of the first substrate processing factory to which a maintenance work system is applied. FIG. 1D is a diagram showing a top view of the first substrate processing factory to which a maintenance work system is applied. FIG. 2A is a first diagram showing a side view of a second substrate processing factory to which a maintenance work system is applied. FIG. 2B is a second diagram showing a side view of the second substrate processing factory to which a maintenance work system is applied. FIG. 2C is a diagram showing a top view of the second substrate processing factory to which a maintenance work system is applied. FIG. 3A is a first diagram showing an example of a layout of an equipment space. FIG. 3B is a second diagram showing an example of a layout of an equipment space. FIG. 4 is a diagram showing an example of a system configuration of a maintenance work system. FIG. 5 is a diagram showing an example of mode transition of a substrate processing system in a maintenance work system. FIG. 6 is a diagram showing an example of a functional configuration of a management system. FIG. 7 is a diagram showing an example of the hardware configuration of a management system. FIG. 8A is a first diagram showing an example of the operation of the traveling mechanism and the like in the maintenance mode. FIG. 8B is a second diagram showing an example of the operation of the traveling mechanism and the like in the maintenance mode. FIG. 8C is a third diagram showing an example of the operation of the traveling mechanism and the like in the maintenance mode. FIG. 9A is a fourth diagram showing an example of the operation of the traveling mechanism and the like in the maintenance mode. FIG. 9B is a fifth diagram showing an example of the operation of the traveling mechanism and the like in the maintenance mode. FIG. 9C is a sixth diagram showing an example of the operation of the traveling mechanism and the like in the maintenance mode. FIG. 10A is a first diagram showing an example of the operation of the traveling mechanism and the like in the independent maintenance mode. FIG. 10B is a second diagram showing an example of the operation of the traveling mechanism and the like in the independent maintenance mode. FIG. 10C is a third diagram showing an example of the operation of the traveling mechanism and the like in the independent maintenance mode. FIG. 11 is a diagram showing an example of the operation of the traveling mechanism in the normal mode. FIG. 12A is a first diagram showing an example of the operation of the lifting mechanism in the independent maintenance mode.FIG. 12B is a second diagram showing an example of the operation of the lifting mechanism in the independent maintenance mode. FIG. 12C is a third diagram showing an example of the operation of the lifting mechanism in the independent maintenance mode. FIG. 12D is a fourth diagram showing an example of the operation of the lifting mechanism in the independent maintenance mode. FIG. 13A is a first diagram showing an example of the operation of the lifting mechanism in the maintenance mode. FIG. 13B is a second diagram showing an example of the operation of the lifting mechanism in the maintenance mode. FIG. 14A is a first diagram showing an example of the operation of the crane mechanism in the maintenance mode. FIG. 14B is a second diagram showing an example of the operation of the crane mechanism in the maintenance mode. FIG. 14C is a third diagram showing an example of the operation of the crane mechanism in the maintenance mode. FIG. 14D is a fourth diagram showing an example of the operation of the crane mechanism in the maintenance mode. FIG. 15 is a sequence diagram showing the flow of processes related to maintenance work in the normal mode of the maintenance work system. FIG. 16 is a sequence diagram showing the flow of processes related to maintenance work in the independent maintenance mode of the maintenance work system. FIG. 17A is a first sequence diagram showing the flow of processes related to maintenance work in the maintenance mode of the maintenance work system. FIG. 17B is a second sequence diagram showing the flow of processing related to maintenance work in the maintenance mode of the maintenance work system. FIG. 17C is a third sequence diagram showing the flow of processing related to maintenance work in the maintenance mode of the maintenance work system. FIG. 18A is a first diagram for explaining an overview of a replacement unit. FIG. 18B is a second diagram for explaining an overview of a replacement unit. FIG. 19 is a diagram showing an example of the functional configuration of a replacement unit. FIG. 20A is a flowchart showing the flow of processing for separating a replacement unit in independent maintenance mode. FIG. 20B is a flowchart showing the flow of processing for combining a replacement unit in independent maintenance mode. FIG. 21A is a first diagram for explaining the details of a work robot. FIG. 21B is a second diagram for explaining the details of a work robot. FIG. 22 is a diagram showing an example of the functional configuration of a work robot.FIG. 23A is a first flowchart showing the flow of movement processing for a work robot in maintenance mode. FIG. 23B is a second flowchart showing the flow of movement processing for a work robot in maintenance mode. FIG. 24A is a third flowchart showing the flow of movement processing for a work robot in maintenance mode. FIG. 24B is a fourth flowchart showing the flow of movement processing for a work robot in maintenance mode. FIG. 25 is a flowchart showing the flow of maintenance work processing for a work robot in maintenance mode. FIG. 26 is a diagram showing an example of the functional configuration of an inspection robot. FIG. 27 is a flowchart showing the flow of inspection processing for an inspection robot in normal mode. FIG. 28 is a diagram showing an example of the hardware configuration of a control device.

[0010] Hereinafter, each embodiment will be described with reference to the accompanying drawings. In this specification and drawings, components having substantially the same functional configurations are designated by the same reference numerals, and redundant description will be omitted.

[0011] First Embodiment <Application Example of Maintenance Work System> First, an application example of the maintenance work system according to the first embodiment will be described.

[0012] (1) Description of the First Substrate Processing Factory Part 1 FIG. 1A is a first diagram showing a side view of the first substrate processing factory to which the maintenance work system is applied.

[0013] 1A, a first substrate processing factory 100 to which the maintenance work system according to the first embodiment is applied has two spaces, an upper space and an lower space. Specifically, the first substrate processing factory 100 has an upper travel space 110 and a lower equipment space 120. A portion of the upper travel space 110 may be used as a preparation space 111, and a portion of the lower equipment space 120 may be used as a preparation space 121.

[0014] The equipment space 120 is a space in which the substrate processing systems 141, 142, etc. are installed. The travel space 110 is a space in which workers involved in maintenance work on the substrate processing systems 141, 142, etc. travel on rails 170.

[0015] In the first embodiment, the workers involved in the maintenance work include: a "replacement unit" that is replaced with a part of a unit in the substrate processing systems 141, 142, ..., etc.; a "work robot" that performs maintenance work on the substrate processing systems 141, 142, ..., etc., or that assists in attaching a unit to the substrate processing systems 141, 142, ..., etc., or in removing the unit from the substrate processing systems 141, 142, ..., etc.; an "inspection robot" that inspects the rails 170 laid in the traveling space 110; and an "elevating robot" that raises and lowers a part of a unit in the substrate processing systems 141, 142, ..., etc. from an upper position in the vertical direction in order to replace the unit. The example in Figure 1A shows replacement units 160, 160' and elevating robot 150 operating among the replacement units, work robots, inspection robots, and elevating robots included in the workers.

[0016] The replacement unit 160 is a detachable unit (in the example of FIG. 1A , a detachable unit disposed in the middle tier of the substrate processing system 142) disposed on one of the tiers (three tiers in the example of FIG. 1A ) of the substrate processing system 142. When the replacement unit 160 is separated from the substrate processing system 142 during a maintenance period, the replacement unit 160 autonomously travels to the travel space 110 via lifting rails 180, and then autonomously travels further on rails 170 within the travel space 110 to head toward the preparation space 111. Note that the replacement unit 160 may be, for example, a unit detachable on a chamber-by-chamber basis, a unit detachable on a device-by-device basis, or a unit detachable on a part-by-part basis in the substrate processing system 142.

[0017] A new replacement unit 160′ is prepared in advance in the preparation space 111, and the new replacement unit 160′ autonomously travels on rails 170 in the travel space 110, and then descends into the equipment space 120 via the lifting rails 180. As a result, the new replacement unit 160′ is coupled to the position in the substrate processing system 142 where the replacement unit 160 was coupled.

[0018] The lifting robot 150 is a robot that lifts and lowers a removable unit (units 190, 190' in the example of FIG. 1A) from a vertically upper position among the removable units arranged in the substrate processing system (substrate processing system 141 in the example of FIG. 1A). During a maintenance period, the lifting robot 150 autonomously travels on rails 170 in the traveling space 110 to a vertically upper position of the unit 190. The lifting robot 150 also lifts the removable unit 190 from a vertically upper position up to the traveling space 110 and transports the unit 190 to the preparation space 111 by autonomously traveling on the rails 170 in the traveling space 110.

[0019] A new unit 190′ is prepared in advance in the preparation space 111, and the lifting robot 150 autonomously travels on the rails 170 in the traveling space 110 to transport the new unit 190′ to a position vertically above the substrate processing system 141. The lifting robot 150 also lowers the new unit 190′ toward the substrate processing system 141 and attaches it to the substrate processing system 141.

[0020] Alternatively, a work robot (not shown) that performs maintenance work on the transported unit 190 may be on standby in the preparation space 111, and the work robot may perform the maintenance work on the unit 190 within the preparation space 111. In this case, the lifting robot 150 autonomously travels on the rails 170 within the traveling space 110, thereby transporting the unit 190 that has undergone the maintenance work to a position vertically above the substrate processing system 141. The lifting robot 150 also lowers the unit 190 that has undergone the maintenance work toward the substrate processing system 141 and attaches it to the substrate processing system 141.

[0021] (2) Description of the First Substrate Processing Factory Part 2 FIG. 1B is a second diagram showing the first substrate processing factory to which the maintenance work system is applied, as viewed from the side.

[0022] In the example of FIG. 1B, of the replacement unit, work robot, inspection robot, and lifting robot included in the work body, work robot 161 is shown in operation.

[0023] The working robot 161 is a robot that performs maintenance work on a substrate processing system (substrate processing system 142 in the example of FIG. 1B ). The working robot 161 autonomously travels on rails 170 in the traveling space 110, and then descends to the equipment space 120 via the lifting rails 180. This allows the working robot 161 to autonomously travel within the equipment space 120 to the position of the substrate processing system 142 and perform maintenance work on the substrate processing system 142. Once the maintenance work is completed, the working robot 161 autonomously travels within the equipment space 120, autonomously travels to the traveling space 110 via the lifting rails 180, and then returns to the preparation space 111 by autonomously traveling further on the rails 170 in the traveling space 110.

[0024] Alternatively, the work robot 161 may assist the lift robot 150 in installing or removing a unit from a substrate processing system (eg, the substrate processing system 141 of FIG. 1A).

[0025] (3) Explanation of the First Substrate Processing Factory Part 3 FIG. 1C is a third diagram showing the first substrate processing factory to which the maintenance work system is applied, as viewed from the side.

[0026] The example of FIG. 1C shows a state in which a crane mechanism 151 is arranged on the ceiling surface of the equipment space 120.

[0027] Like the lifting robot 150, the crane mechanism 151 is a robot that lifts and lowers removable units from a vertically upper position among the removable units arranged in the substrate processing system (substrate processing system 141 in the example of FIG. 1C ). Specifically, in the example of FIG. 1C , the crane mechanism 151 is a robot that lifts and lowers units 190 and 190′. During a maintenance period, the crane mechanism 151 travels on rails 171 in the equipment space 120 to a vertically upper position above unit 190. Furthermore, the crane mechanism 151 lifts the removable unit 190 from a vertically upper position and transports the unit 190 to the preparation space 121 by traveling on the rails 171 in the equipment space 120.

[0028] A new unit 190′ is prepared in advance in the preparation space 121, and the crane mechanism 151 travels on rails 171 in the equipment space 120 to transport the new unit 190′ to a position vertically above the substrate processing system 141. The crane mechanism 151 also lowers the new unit 190′ toward the substrate processing system 141 and attaches it to the substrate processing system 141.

[0029] Alternatively, a work robot (not shown) that performs maintenance work on the transported unit 190 may be on standby in the preparation space 121, and the work robot may perform the maintenance work on the unit 190 within the preparation space 121. In this case, the crane mechanism 151 travels on rails 171 within the equipment space 120 to transport the unit 190 that has undergone the maintenance work to a position vertically above the substrate processing system 141. The crane mechanism 151 also lowers the unit 190 that has undergone the maintenance work towards the substrate processing system 141 and attaches it to the substrate processing system 141.

[0030] The work robot 161 may assist in removing the unit 190 from the substrate processing system 141 and in attaching a new unit 190′ (or a unit 190 that has undergone maintenance work) to the substrate processing system 141.

[0031] (4) Explanation of the First Substrate Processing Factory Part 4 Fig. 1D is a diagram showing a first substrate processing factory to which the maintenance work system is applied, as seen from above, and mainly shows the rails laid in traveling space 110 and the lid that opens the floor of traveling space 110. However, Fig. 1D also shows substrate processing systems 141_1, 142_1, 141_1, and 142_2 so that their positional relationships with the substrate processing systems in equipment space 120 can be understood.

[0032] 1D , in the travel space 110, a rail group GR1 is arranged above the substrate processing systems 141_1 and 142_1 in the direction in which the substrate processing systems 141_1 and 142_1 are arranged. Similarly, in the travel space 110, a rail group GR2 is arranged above the substrate processing systems 141_2 and 142_2 in the direction in which the substrate processing systems 142_1 and 142_2 are arranged.

[0033] The rail group GR1 includes three sets of rails for the replacement unit, the work robot, and the inspection robot to travel autonomously within the travel space 110. The number of sets of rails included in the rail group GR1 may be determined, for example, according to the number of replacement units (number of replacement units in the width direction) of the substrate processing systems 141_1, 142_1 arranged at corresponding positions within the equipment space 120. In this embodiment, the substrate processing systems 141_1, 142_1 each have three replacement units in the width direction, and therefore the rail group GR1 includes three sets of rails.

[0034] The positions of the three sets of rails are changed by a changing mechanism (not shown). The changing mechanism changes the position of the rails depending on, for example, the position to which the work robot ascends or descends. The changing mechanism also changes the position of the rails depending on, for example, the size of the autonomously traveling elevator robot, replacement unit, work robot, and inspection robot.

[0035] Similarly, rail group GR2 includes three sets of rails for the replacement unit, work robot, and inspection robot to travel autonomously within travel space 110. Note that the number of sets of rails included in rail group GR2 may be determined, for example, according to the number of replacement units (number of replacement units in the width direction) of substrate processing systems 141_2, 142_2 arranged at corresponding positions within equipment space 120. In this embodiment, each of substrate processing systems 141_2, 142_2 has three replacement units in the width direction, and therefore rail group GR2 includes three sets of rails.

[0036] The positions of the three sets of rails are changed by a changing mechanism (not shown). The changing mechanism changes the position of the rails depending on, for example, the position to which the work robot ascends or descends. The changing mechanism also changes the position of the rails depending on, for example, the size of the autonomously traveling elevator robot, replacement unit, work robot, and inspection robot.

[0037] 1D, the rails included in rail group GR1 and the rails included in rail group GR2 are both shown as straight rails. However, the rails included in rail group GR1 and the rails included in rail group GR2 are not limited to straight rails, and may include rails other than straight rails.

[0038] As shown in the example of FIG. 1D, the travel space 110 is provided with lid portions 172_1, 172_2, 172_3, and 172_4 that open to the floor.

[0039] The lids 172_1 and 172_3 operate when the lifting robot 150 lifts and lowers units that are attached and detached from a vertically upper position and that are included in the substrate processing systems 141_1 and 142_1, respectively, from a vertically upper position.

[0040] The cover portions 172_2 and 172_4 operate when the replacement unit attached to and detached from the substrate processing systems 141_1 and 142_1 moves up and down between the travel space 110 and the equipment space 120. Alternatively, the cover portions 172_2 and 172_4 operate when the work robot moves up and down between the travel space 110 and the equipment space 120.

[0041] Similarly, as shown in the example of FIG. 1D, cover portions 173_1, 173_2, 173_3, and 173_4 that open to the floor surface are arranged in the travel space 110.

[0042] The lids 173_1 and 173_3 operate when the lifting robot 150 lifts and lowers units that are detachable from a vertically upper position and that are included in the substrate processing systems 141_2 and 142_2, respectively, from a vertically upper position.

[0043] The cover portions 173_2 and 173_4 operate when the replacement unit attached to and detached from the substrate processing systems 141_2 and 142_2 moves up and down between the travel space 110 and the equipment space 120. Alternatively, the cover portions 173_2 and 173_4 operate when the work robot moves up and down between the travel space 110 and the equipment space 120.

[0044] (5) Description of the Second Substrate Processing Factory Part 1 FIG. 2A is a first diagram showing a side view of the second substrate processing factory to which the maintenance work system is applied.

[0045] 2A , the second substrate processing factory 200 to which the maintenance work system according to the first embodiment is applied has two spaces, an upper space and an lower space. Specifically, the second substrate processing factory 200 has an upper equipment space 210 and a lower travel space 220. Note that a portion of the upper equipment space 210 may be used as a preparation space 211, and a portion of the lower travel space 220 may be used as a preparation space 221.

[0046] The equipment space 210 is a space in which the substrate processing systems 241, 242, etc. are installed. The travel space 220 is a space in which a work body involved in maintenance work on the substrate processing systems 241, 242, etc. travels on rails 270.

[0047] In the maintenance work system applied to the second substrate processing factory 200, the work bodies involved in the maintenance work are generally the same as the work bodies involved in the maintenance work in the maintenance work system applied to the first substrate processing factory 100. Therefore, the following description will focus on the differences.

[0048] The example of FIG. 2A shows examples of replacement units 260, 260' and a lifting robot 250 among the replacement units, work robots, inspection robots, and lifting robots included in the working body.

[0049] During the maintenance period, when the replacement unit 260 is separated from the substrate processing system 242, it autonomously travels to the running space 220 via the lifting rails 280, and then autonomously travels further on the rails 270 within the running space 220 to head towards the preparation space 221.

[0050] A new replacement unit 260′ is prepared in advance in the preparation space 221, and the new replacement unit 260′ autonomously travels on rails 270 in the travel space 220, and then rises to the equipment space 210 via the lifting rails 280. As a result, the new replacement unit 260′ is docked at the position in the substrate processing system 242 where the replacement unit 260 was docked.

[0051] The lifting robot 250 is a robot that lifts and lowers a removable unit (units 290, 290′ in the example of FIG. 2A ) from a vertically lower position among the removable units arranged in the substrate processing system (substrate processing system 241 in the example of FIG. 2A ). During a maintenance period, the lifting robot 250 autonomously travels on rails 270 in the traveling space 220 to a position vertically lower than the unit 290. The lifting robot 250 also lowers the removable unit 290 from the vertically lower position to the traveling space 220, and transports the unit 290 to the preparation space 221 by autonomously traveling on the rails 270 in the traveling space 220.

[0052] A new unit 290′ is prepared in advance in the preparation space 221, and the lifting robot 250 autonomously travels on the rails 270 in the traveling space 220 to transport the new unit 290′ to a position vertically below the substrate processing system 241. The lifting robot 250 also lifts the new unit 290′ toward the substrate processing system 241 and attaches it to the substrate processing system 241.

[0053] Alternatively, a work robot (not shown) that performs maintenance work on the transported unit 290 may be on standby in the preparation space 221, and the work robot may perform the maintenance work on the unit 290 within the preparation space 221. In this case, the lifting robot 250 autonomously travels on rails 270 within the traveling space 220, thereby transporting the unit 290 that has undergone the maintenance work to a position vertically below the substrate processing system 241. The lifting robot 250 also lifts the unit 290 that has undergone the maintenance work toward the substrate processing system 241 and attaches it to the substrate processing system 241.

[0054] 2A , when the lifting robot 250 lifts or lowers the units 290, 290′, it is expected that the lifting robot 250 may interfere with ancillary equipment of the substrate processing system 241. Alternatively, when the replacement units 260, 260′ are lifted or lowered via the lifting rails 280, it is expected that the replacement units 260, 260′ may interfere with ancillary equipment of the substrate processing system 242.

[0055] In contrast to this, the maintenance work system according to the first embodiment may include a retraction mechanism for retracting, for example, horizontally, the incidental equipment of the substrate processing system 241 or 242. The retraction position of the incidental equipment by the retraction mechanism may be determined according to, for example, the size of the lifting robot 250 or the size of the replacement unit 260, 260′.

[0056] (6) Description of the Second Substrate Processing Factory Part 2 FIG. 2B is a second diagram showing a side view of the second substrate processing factory to which the maintenance work system is applied.

[0057] The example of FIG. 2B shows the working robot 261 in operation among the replacement unit, working robot, inspection robot, and lifting robot included in the working body.

[0058] The working robot 261 is a robot that performs maintenance work on a substrate processing system (substrate processing system 242 in the example of FIG. 2B ). The working robot 261 autonomously travels on rails 270 in the traveling space 220, and then ascends to the equipment space 210 via the lifting rails 280. This allows the working robot 261 to autonomously travel within the equipment space 210 to the position of the substrate processing system 242 and perform maintenance work on the substrate processing system 242. Upon completion of the maintenance work, the working robot 261 autonomously travels within the equipment space 210, autonomously travels to the traveling space 220 via the lifting rails 280, and then returns to the preparation space 221 by autonomously traveling further on the rails 270 in the traveling space 220.

[0059] Alternatively, the work robot 261 may assist the lift robot 250 in installing or removing a unit from a substrate processing system (eg, the substrate processing system 241 of FIG. 2A).

[0060] (7) Explanation of the Second Substrate Processing Factory Part 2 Figure 2C is a diagram showing a second substrate processing factory to which the maintenance work system is applied, as seen from above, and mainly shows the lid that opens the floor of the equipment space 210 and the rails laid in the travel space 220. However, Figure 2C also shows substrate processing systems 241_1, 242_1, 241_2, and 242_2 so that the positional relationship between the lid and the rails can be seen.

[0061] 2C , in the travel space 220, a rail group GR1 is arranged below the substrate processing systems 241_1 and 242_1 in the direction in which the substrate processing systems 241_1 and 242_1 are arranged. Similarly, in the travel space 220, a rail group GR2 is arranged below the substrate processing systems 241_2 and 242_2 in the direction in which the substrate processing systems 241_2 and 242_2 are arranged.

[0062] The details of the rail groups GR1 and GR2 have already been explained using FIG. 1D, and therefore will not be explained here.

[0063] As shown in the example of FIG. 2C, the device space 210 is provided with lid portions 272_1, 272_2, 272_3, and 272_4 that open to the floor.

[0064] The cover parts 272_1 and 272_3 operate when the lifting robot 250 lifts and lowers units that are detachable from a lower position in the vertical direction and that are included in the substrate processing systems 241_1 and 242_1, respectively, from a lower position in the vertical direction.

[0065] The cover portions 272_2 and 272_4 operate when the replacement unit attached to and detached from the substrate processing systems 241_1 and 242_1 moves up and down between the equipment space 210 and the traveling space 220. Alternatively, the cover portions 272_2 and 272_4 operate when the working robot moves up and down between the equipment space 210 and the traveling space 220.

[0066] Similarly, as shown in the example of FIG. 2C, the device space 210 is provided with lid portions 273_1, 273_2, 273_3, and 273_4 that open to the floor.

[0067] The cover parts 273_1 and 273_3 operate when the lifting robot 250 lifts and lowers units that are detachable from a lower position in the vertical direction and that are included in the substrate processing systems 241_2 and 242_2, respectively, from a lower position in the vertical direction.

[0068] The cover portions 273_2 and 273_4 operate when the replacement unit attached to and detached from the substrate processing systems 241_2 and 242_2 moves up and down between the equipment space 210 and the traveling space 220. Alternatively, the cover portions 273_2 and 273_4 operate when the work robot moves up and down between the equipment space 210 and the traveling space 220.

[0069] <Layout within the Equipment Space> Next, the layout within the equipment space (mainly the mechanisms installed within the equipment space for the travel of the work robot) will be described. Note that, although the following mainly describes the case where the maintenance work system is applied to the first substrate processing factory 100, the same applies when applied to the second substrate processing factory 200.

[0070] (1) Layout of the Equipment Space Part 1 Fig. 3A is a first diagram showing an example of the layout of the equipment space, showing a top view of the equipment space 120. As shown in Fig. 3A, a light-emitting unit 310 is installed on the floor of the equipment space 120.

[0071] The light emitting units 310 guide the working robot along a predetermined travel path by turning on when the working robot travels within the equipment space 120. A plurality of light emitting units 310 are installed at predetermined intervals along the travel path on the periphery of the substrate processing systems 141_1, 142_1, 141_2, and 142_2. A plurality of light emitting units 310 are also installed at predetermined intervals along the travel path extending from the substrate processing systems 141_1, 142_1, 141_2, and 142_2.

[0072] (2) Layout of the Equipment Space Part 2 Fig. 3B is a second diagram showing an example of the layout of the equipment space, showing the inside of the equipment space 120 as viewed from above. Instead of installing the light-emitting unit 310 on the floor of the equipment space 120, markers 321 to 329 are installed on the ceiling surface of the equipment space 120, as shown in Fig. 3B.

[0073] Markers 321 to 329 are photographed by the work robot as it travels autonomously within equipment space 120. The position coordinates within equipment space 120 where markers 321 to 329 are installed are recognized in advance by the work robot, and the work robot analyzes image data capturing one or more of markers 321 to 329. This allows the work robot to calculate its current position within equipment space 120 while traveling autonomously.

[0074] In addition, in the example of FIG. 3B, the markers 321 to 329 are placed at the vertices of rectangular areas surrounding the substrate processing systems 141_1, 142_1, 141_2, and 142_2, respectively, but the placement positions of the markers 321 to 329 are not limited to this.

[0075] The method for calculating the current position of the working robot within the equipment space 120 while it is autonomously traveling is not limited to this. For example, a transmitter may be installed in each unit of the substrate processing systems 141_1, 142_1, 141_2, and 142_2.

[0076] The work robot recognizes in advance the position coordinates of the installed transmitters within the device space 120, and calculates its current position within the device space 120 while autonomously traveling by analyzing signals from one or more transmitters.

[0077] <System Configuration of Maintenance Work System> Next, a description will be given of the system configuration of the maintenance work system according to the first embodiment. Fig. 4 is a diagram showing an example of the system configuration of the maintenance work system.

[0078] As shown in FIG. 4 , the maintenance work system 400 according to the first embodiment comprises: a work body 410; a traveling mechanism 420; a crane mechanism 431; a management system 440; a lifting mechanism 450; a light-emitting unit 433, a marker 434, or a transmitter 435; and a mobile terminal 460.

[0079] In the maintenance work system 400 , the management system 440 is communicably connected to the work body 410 , the traveling mechanism 420 , the crane mechanism 431 , the lifting mechanism 450 , the light-emitting unit 433 , and the mobile terminal 460 via a network 470 .

[0080] The management system 440 is communicably connected via a network 470 to the substrate processing systems 141_1 to 142_2 that are the targets of maintenance work performed by the maintenance work system 400.

[0081] Of the working body 410, at least the replacement unit 411, the working robot 412, and the lifting robot 413 are connected to the substrate processing systems 141_1 to 142_2 by short-range wireless communication.

[0082] Of the elements included in the maintenance work system 400 shown in Figure 4, elements that have already been explained in the application examples shown in Figures 1A to 3B will not be explained here, but rather their corresponding relationship with Figure 4 will be explained.

[0083] As shown in FIG. 4, the working body 410 includes a replacement unit 411 , a working robot 412 , a lifting robot 413 , and an inspection robot 414 .

[0084] Of these, a specific example of replacement unit 411 included in working body 410 in FIG. 4 is replacement unit 160 shown in FIG. 1A, and a specific example of work robot 412 included in working body 410 in FIG. 4 is work robot 161 shown in FIG. 1B.

[0085] A specific example of the lifting robot 413 included in the working body 410 in FIG. 4 is the lifting robot 150 shown in FIG. 1A.

[0086] As shown in FIG. 4 , the traveling mechanism 420 includes a changing mechanism 421 , a rail 422 , an opening mechanism 423 , and a lid portion 424 .

[0087] The changing mechanism 421 changes the position of the rail 422. A specific example of the rail 422 is the rail 170 in Fig. 1A or the rail groups GR1 and GR2 shown in Fig. 1D.

[0088] The opening mechanism 423 opens and closes the floor surface of the travel space 110 by changing the position of the lid portion 424. Specific examples of the lid portion 424 are the lid portions 172_1 to 172_4 in FIG. 1D.

[0089] An example of crane mechanism 431 in FIG. 4 is crane mechanism 151 shown in FIG. 1C.

[0090] 4, the lifting mechanism 450 includes an installation mechanism 451 and a lifting rail 452. The installation mechanism 451 installs the lifting rail 452 at a predetermined position. A specific example of the lifting rail 452 is the lifting rail 180 shown in FIG. 1B.

[0091] Specific examples of light-emitting section 433 or marker 434 in FIG. 4 are light-emitting section 310 in FIG. 3A or markers 321 to 329 in FIG. 3B.

[0092] In order to perform maintenance work on the substrate processing systems 141_1 to 142_2, the management system 440 acquires information from the working body 410, the traveling mechanism 420, and the crane mechanism 431. In addition, in order to perform maintenance work on the substrate processing systems 141_1 to 142_2, the management system 440 acquires information from the lifting mechanism 450, the substrate processing systems 141_1 to 142_2, and the mobile terminal 460. In addition, under the supervision of an administrator 481, the management system 440 issues various instructions to the working body 410, the traveling mechanism 420, the crane mechanism 431, the lifting mechanism 450, the substrate processing systems 141_1 to 142_2, the light-emitting unit 433, and the mobile terminal 460 based on the acquired information.

[0093] The mobile terminal 460 is a mobile terminal held by an operator 482 (an example of an equipment manager who manages the substrate processing systems 141_1 to 142_2) who performs a predetermined task in the equipment space 120. The mobile terminal 460 here includes any portable information terminal. Examples of the portable information terminal include a notebook PC (Personal Computer), a tablet terminal, a smartphone, a smartwatch, and an HMD (Head Mounted Display).

[0094] <Modes in Maintenance Work System> Next, a description will be given of mode transitions in the maintenance work system 400. Fig. 5 is a diagram showing an example of mode transitions of the substrate processing systems in the maintenance work system. As shown in Fig. 5, the substrate processing systems 141_1 to 142_2 perform their respective processes in any one of the modes while transitioning between normal mode, maintenance mode, and independent maintenance mode.

[0095] The normal mode refers to a state in which the substrate processing systems 141_1 to 142_2 are normally processing substrates. In the normal mode, the maintenance work system 400 acquires information from the substrate processing systems 141_1 to 142_2 for determining whether maintenance work is necessary. If the maintenance work system 400 determines that maintenance work is necessary, it determines the following as a maintenance schedule: - the substrate processing systems and units to be subjected to the maintenance work, - the content of the maintenance work, - the timing of the maintenance work, etc.

[0096] The maintenance mode is a mode in which substrate processing performed by one or more of the substrate processing systems 141_1 to 142_2 is stopped, and maintenance work is performed on the substrate processing system whose substrate processing has been stopped.

[0097] The independent maintenance mode is a mode in which substrate processing performed by any one of the substrate processing systems 141_1 to 142_2 is temporarily stopped to perform maintenance work.

[0098] <Example of functional configuration of management system> Next, the functional configuration of the management system 440 will be described. Fig. 6 is a diagram showing an example of the functional configuration of the management system. A management program is installed in the management system 440. By executing this program, the management system 440 functions as a working body management unit 610, a traveling mechanism management unit 620, and a crane mechanism management unit 630. Furthermore, by executing this program, the management system 440 functions as a lifting mechanism management unit 640, a substrate processing system management unit 650, a light-emitting unit management unit 660, and a mobile terminal management unit 670.

[0099] The worker management unit 610 manages the operation of the worker 410. Specifically, the worker management unit 610 transmits instructions corresponding to the work content to one of the workers 410 at a predetermined timing for: maintenance work in the maintenance mode or the independent maintenance mode, or inspection work in the normal mode. The instructions corresponding to the work content here include information based on the maintenance schedule, such as: information for identifying the substrate processing system or unit that is the target of the maintenance work, information for identifying the rail that is the target of the inspection work, a travel route (outbound and return) to the unit that is the target of the maintenance work, a travel route when inspecting the rail that is the target of the inspection, a maintenance work procedure for the unit that is the target of the maintenance work, and an inspection work procedure for the rail that is the target of the inspection.

[0100] The working body management unit 610 also transmits a travel start instruction to the working body 410. The working body management unit 610 also receives the work history of the maintenance work performed by the working body 410 or the inspection results of the inspection work, etc. The working body management unit 610 also receives various information from the working body 410, such as the completion of separation or connection, the completion of travel, the completion of maintenance work, and the detection of a worker.

[0101] The traveling mechanism management unit 620 manages the operation of the traveling mechanism 420. Specifically, the traveling mechanism management unit 620 transmits instructions corresponding to the work content to the traveling mechanism management unit 620 at a predetermined timing for: maintenance work in maintenance mode or independent maintenance mode, or inspection work in normal mode. The instructions corresponding to the work content here include information based on the maintenance schedule, such as: information for identifying the working body 410 traveling in the traveling space 110; the traveling path within the traveling space 110 of the working body 410 traveling in the traveling space 110; the opening position of the traveling space 110; information for identifying the rail to be inspected; and information for identifying the substrate processing system or unit to be subjected to the maintenance work.

[0102] The crane mechanism management unit 630 manages the operation of the crane mechanism 431. Specifically, the crane mechanism management unit 630 transmits instructions corresponding to the work content to the crane mechanism 431 at predetermined timing for maintenance work in the maintenance mode or the independent maintenance mode. The instructions corresponding to the work content here include information based on the maintenance schedule, such as information for identifying the substrate processing system or unit that is the target of the maintenance work.

[0103] The lifting mechanism management unit 640 manages the operation of the lifting mechanism 450. Specifically, the lifting mechanism management unit 640 transmits instructions to the lifting mechanism 450 at predetermined timing according to the work content, for example, maintenance work in maintenance mode or independent maintenance mode. The instructions according to the work content here include information based on the maintenance schedule, such as: information for identifying the work body 410 to be lifted or lowered; the opening position of the travel space 110; and information for identifying the connection destinations of the two ends of the lifting rails. The lifting mechanism management unit 640 also transmits a storage instruction to the lifting mechanism 450.

[0104] The substrate processing system management unit 650 manages the states of the substrate processing systems 141_1 to 142_2. Specifically, the substrate processing system management unit 650: - in normal mode, receives information on the wear level of parts or information on parts requiring replacement from the substrate processing systems 141_1 to 142_2, and notifies the central control unit 680; - in normal mode, receives from the central control unit 680 a determination result on whether replacement is required in response to the notification to the central control unit 680, and notifies the substrate processing systems 141_1 to 142_2; - in normal mode, transmits the maintenance schedule notified from the central control unit 680 to the substrate processing systems 141_1 to 142_2; - in normal mode, receives from the substrate processing systems 141_1 to 142_2 a determination result on whether to transition to the maintenance mode or the independent maintenance mode, and notifies the central control unit 680; - in normal mode, transmits a transition instruction notified from the central control unit 680 to the substrate processing systems 141_1 to 142_2. In the maintenance mode or the independent maintenance mode, the control unit 680 receives notification information for the operator 482 from the integrated control unit 680 and transmits it to the substrate processing systems 141_1 to 142_2.

[0105] The light-emitting unit management unit 660 manages the operation of the light-emitting unit 433. Specifically, the light-emitting unit management unit 660 transmits light-emitting start instructions and light-emitting stop instructions to the light-emitting unit 433 based on instructions corresponding to the work content, for example, maintenance work in maintenance mode. The instructions corresponding to the work content here include information based on the maintenance schedule, such as the travel route within the travel space 110 of the working body 410 traveling in the travel space 110.

[0106] The mobile terminal management unit 670 transmits and receives various types of information to and from the mobile terminal 460. The various types of information here include, for example, a maintenance schedule, notification information for the worker 482 who holds the mobile terminal 460, instruction information from the worker 482 who holds the mobile terminal 460 (including voice instruction information), and the like.

[0107] The general control unit 680 manages the entire management system 440 . Specifically, the integrated control unit 680: - in normal mode, when notified by the substrate processing system management unit 650 of information regarding the wear level of a part or information regarding a part requiring replacement, determines whether replacement is required and notifies the substrate processing system management unit 650; - in normal mode, in response to determining whether replacement is required, generates a maintenance schedule and notifies the working body management unit 610, the traveling mechanism management unit 620, and the crane mechanism management unit 630; - in normal mode, in response to determining whether replacement is required, generates a maintenance schedule and notifies the lifting mechanism management unit 640, the substrate processing system management unit 650, the light-emitting unit management unit 660, and the mobile terminal management unit 670; - in normal mode, identifies parts to be used in maintenance work, checks the inventory of the parts (inventory information held either internally or externally may be accessed), and then orders the parts to be used in the maintenance work based on the maintenance schedule; - when it becomes possible to switch to maintenance mode or independent maintenance mode, notifies the substrate processing system management unit 650 of an instruction to switch. In the maintenance mode, when the worker detection information is notified from the worker management unit 610, the notification information is notified to the substrate processing system management unit 650, the corresponding worker is identified, and the notification information is notified to the mobile terminal management unit 670.

[0108] <Hardware Configuration of Management System> Next, a description will be given of the hardware configuration of the management system 440. Fig. 7 is a diagram showing an example of the hardware configuration of the management system.

[0109] 7, the management system 440 includes a processor 701, a memory 702, an auxiliary storage device 703, an I / F (Interface) device 704, a communication device 705, and a drive device 706. The hardware components included in the management system 440 are connected to each other via a bus 707.

[0110] The processor 701 has various computing devices such as a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), etc. The processor 701 reads various programs (for example, a management program, etc.) into the memory 702 and executes them.

[0111] The memory 702 has a main storage device such as a ROM (Read Only Memory), a RAM (Random Access Memory), etc. The processor 701 and the memory 702 form a so-called computer, and the processor 701 executes various programs read onto the memory 702, causing the computer to realize various functions.

[0112] The auxiliary storage device 703 stores various programs and various information used when the various programs are executed by the processor 701 .

[0113] The I / F device 704 is a connection device that connects to external devices (such as an operation device 711 and a display device 712). The I / F device 704 accepts operations on the management system 440 by the administrator 481 via the operation device 711. The operation device 711 here includes a keyboard, a mouse, a touch panel, and the like. The I / F device 704 also outputs the results of processing by the management system 440 to the administrator 481 via the display device 712.

[0114] The communication device 705 is a communication device for communicating with an external device 720 via the network 470. The external device 720 here includes the working body 410, the traveling mechanism 420, the crane mechanism 431, the lifting mechanism 450, the substrate processing systems 141_1 to 142_2, the light-emitting unit 433, the mobile terminal 460, and the like.

[0115] The drive device 706 is a device for loading a recording medium 730. The recording medium 730 here includes media that record information optically, electrically, or magnetically, such as a CD-ROM, a flexible disk, a magneto-optical disk, etc. The recording medium 730 may also include semiconductor memory that records information electrically, such as a ROM, a flash memory, etc.

[0116] The various programs to be installed in the auxiliary storage device 703 are installed, for example, by setting the distributed recording medium 730 in the drive device 706 and reading the various programs recorded on the recording medium 730 by the drive device 706. Alternatively, the various programs to be installed in the auxiliary storage device 703 may be installed by being downloaded from the network 470 via the communication device 705.

[0117] <Operation Example 1 of Travel Mechanism, etc. in Maintenance Mode> Next, as an example of the operation of the travel mechanism 420, etc. in the maintenance mode, the operation when the lifting robot 413 travels will be described. Figures 8A to 8C are first to third diagrams showing an example of the operation of the travel mechanism, etc. in the maintenance mode.

[0118] The traveling mechanism 420 receives from the traveling mechanism management unit 620 instructions according to the work content, such as: - information for identifying the work body 410 traveling in the traveling space 110: lifting robot 413; - traveling path within the traveling space 110 of the work body 410 traveling in the traveling space 110: traveling path on the rail identified by R3 of the rails 422 from the preparation space 111 to the lid portion identified by S1 of the lid portion 424; - opening position of the traveling space 110: the lid portion identified by S1 of the lid portion 424 (the lid portion located vertically above the unit 802); - information for identifying the substrate processing system and unit that are the target of the maintenance work: substrate processing system 141_1, unit 802, etc.

[0119] As a result, the change mechanism 421 of the traveling mechanism 420 changes the rail width of the rail identified by R3 among the rails 422 so that the rail width corresponds to the size of the lifting robot 413. At this time, if the changed position of the rail interferes with the position of an adjacent rail, the change mechanism 421 of the traveling mechanism 420 also changes the position of the adjacent rail.

[0120] Fig. 8A shows a state in which the rail width of the rail specified by R3 has been widened to a rail width appropriate for the size of the lifting robot 413. Note that in Fig. 8A, the rail position indicated by the dotted line is the rail position specified by R3, and indicates the rail position before the rail width is widened.

[0121] FIG. 8A also shows that the position of the adjacent rail (the rail identified by R2) has also been changed because the changed position of the rail interferes with the position of the adjacent rail (the rail identified by R2).

[0122] Next, the opening mechanism 423 of the running mechanism 420 opens the floor surface of the running space 110 by sliding the cover portion identified by S1 of the cover portion 424 so that the opening size corresponds to the size of the unit 802.

[0123] FIG. 8B shows a state in which the floor of the travel space 110 is opened so that the opening size corresponds to the size of the unit 802.

[0124] Next, the lifting robot 413 receives from the work body management unit 610 instructions according to the work content, such as: - information for identifying the substrate processing system and unit that are the target of the maintenance work to be performed: substrate processing system 141_1, unit 802; - travel route (outward and return) to the unit that is the target of the maintenance work: the travel route that travels on the rail identified by R3 of the rails 422 from the preparation space 111 to the lid section identified by S1, and the travel route that travels from the lid section identified by S1 to the preparation space 111; - work procedure for the maintenance work on the unit that is the target of the maintenance work: the work procedure for removing unit 802 from substrate processing system 141_1 and attaching a new unit 802' (not shown) to the substrate processing system 141_1, etc.

[0125] FIG. 8C shows the lifting robot 413 autonomously traveling on a rail identified by R3 from the preparation space 111 to the lid portion identified by S1 to remove the unit 802 of the substrate processing system 141_1.

[0126] <Example 2 of Operation of Travel Mechanism, etc. in Maintenance Mode> Next, the operation of travel mechanism 420, etc. in maintenance mode when work robot 412 travels autonomously will be described. Figures 9A to 9C are fourth to sixth diagrams showing an example of operation of the travel mechanism, etc. in maintenance mode.

[0127] The traveling mechanism 420 receives from the traveling mechanism management unit 620 instructions according to the work content, such as: information for identifying the work body 410 traveling in the traveling space 110: work robot 412; traveling path within the traveling space 110 of the work body 410 traveling in the traveling space 110: a traveling path traveling on the rail identified by R6 of the rails 422 from the preparation space 111 to the lid portion identified by S8 of the lid portion 424; opening position of the traveling space 110: the lid portion identified by S8 of the lid portion 424 (the lid portion located directly above the traveling path extending from the substrate processing system 142_2 in the equipment space 120); information for identifying the substrate processing system and unit that are the target of the maintenance work: substrate processing system 142_2, unit, etc.

[0128] As a result, the changing mechanism 421 of the traveling mechanism 420 changes the rail width of the rail identified by R6 among the rails 422 so that the rail width corresponds to the size of the work robot 412. The changing mechanism 421 of the traveling mechanism 420 also moves the rail identified by R6 in the range from the preparation space 111 to the lid portion 424 identified by S8 to the open position. Furthermore, the opening mechanism 423 of the traveling mechanism 420 opens the floor surface of the traveling space 110 by sliding the lid portion 424 identified by S8 (the lid portion in the equipment space 120 that is located directly above the traveling path extending from the substrate processing system 142_2).

[0129] Figure 9A shows that the rail identified by R6, which extends from the preparation space 111 to the lid identified by S8, has been moved to the open position. Figure 9A also shows that the rail width of the rail identified by R6 has been adjusted to match the size of the work robot 412. Furthermore, Figure 9A shows that the lid identified by S8 has been slid, opening the floor of the travel space 110.

[0130] Next, the lifting mechanism 450 receives instructions from the lifting mechanism management unit 640 according to the work content, such as: information for identifying the work body 410 to be lifted and lowered: work robot 412; opening position of the running space 110: the cover portion 424 identified by S8 (the cover portion located directly above the running path extending from the substrate processing system 142_2 in the equipment space 120); information for identifying the connection destinations of the two ends of the lifting rail: the rail 422 identified by R6, and the running path extending from the substrate processing system 142_2 in the equipment space 120.

[0131] As a result, the lifting mechanism 450 adjusts the rail width of the lifting rail identified by R7 among the lifting rails 452 to a rail width according to the size of the work robot 412, and then connects: - the rail identified by R6 that is in the range from the preparation space 111 to the lid portion identified by S8 and has been moved to the opening position; and - the running path extending from the substrate processing system 142_2.

[0132] Figure 9B shows how the rail, which has been moved to the opening position, is connected to the running path within the equipment space 120 by the lifting rail identified by R7, whose rail width has been adjusted to correspond to the size of the work robot 412.

[0133] Figure 9C shows the work robot 412 autonomously traveling from the preparation space 111 toward the travel path in the equipment space 120 on the rails identified by R6 and the lifting rails identified by R7 in the equipment space 120.

[0134] <Example of Operation of Travel Mechanism, etc. in Independent Maintenance Mode> Next, an operation of the travel mechanism 420, etc. in the independent maintenance mode when the replacement unit 411 travels will be described. Figures 10A to 10C are first to third diagrams showing an example of the operation of the travel mechanism, etc. in the independent maintenance mode.

[0135] The traveling mechanism 420 receives from the traveling mechanism management unit 620 instructions according to the work content, such as: - information for identifying the working body 410 traveling in the traveling space 110: a replacement unit identified by RP2 among the replacement units 411; - traveling path within the traveling space 110 of the working body 410 traveling in the traveling space 110: a traveling path traveling on a rail identified by R6 among the rails 422 from the preparation space 111 to the lid part identified by S8 among the lid parts 424; - opening position of the traveling space 110: the lid part identified by S8 among the lid parts 424 (a position in the equipment space 120 that connects to the replacement unit identified by RP2 among the replacement units 411 of the substrate processing system 142_2); - information for identifying the substrate processing system and unit that is the target of the maintenance work: a replacement unit identified by RP2 among the replacement units 411 of the substrate processing system 142_2.

[0136] As a result, the change mechanism 421 of the traveling mechanism 420 changes the rail width of the rail specified by R6 so that the rail width corresponds to the size of the replacement unit 411. The change mechanism 421 of the traveling mechanism 420 also moves the rails specified by R6 that are not in the range from the preparation space 111 to the lid portion specified by S8 to a position other than the open position. Furthermore, the opening mechanism 423 of the traveling mechanism 420 opens the floor surface of the traveling space 110 by sliding the lid portion specified by S8 of the lid portion 424.

[0137] Fig. 10A shows that the rails identified by R6, except for the rails in the range from the preparation space 111 to the lid identified by S8, have been moved to positions other than the open position. Fig. 10A also shows that the rail width of the rails identified by R6 has been adjusted to correspond to the size of the replacement unit 411. Fig. 10A also shows that the lid identified by S8 has been slid, opening the floor of the travel space 110.

[0138] Next, the lifting mechanism 450 receives from the lifting mechanism management unit 640 instructions according to the work content, such as: information for identifying the work body 410 to be lifted / lowered: the replacement unit 411 identified by RP2 among the replacement units; opening position of the running space 110: the cover portion 424 identified by S8 (the position in the equipment space 120 that connects to the replacement unit 411 of the substrate processing system 142_2 identified by RP2); information for identifying the connection destinations of the two ends of the lifting rail: the rail 422 identified by R6, and the support rail r2 that supports the replacement unit 411 of the substrate processing system 142_2 identified by RP2 among the replacement units 411 in the equipment space 120, etc.

[0139] As a result, the lifting mechanism 450 adjusts the rail width of the lifting rail identified by R8 to a rail width according to the size of the replacement unit 411, and then connects: - the rails identified by R6 in the range from the preparation space 111 to the lid portion identified by S8; and - the support rail r2 that supports the replacement unit identified by RP2 of the replacement unit 411 of the substrate processing system 142_2.

[0140] FIG. 10B shows how the lifting rails identified by R8, which have been adjusted to a rail width according to the size of the replacement unit 411, connect: the rails identified by R6 that extend to the lid portion identified by S8; and a support rail r2 that supports the replacement unit identified by RP2.

[0141] Figure 10C shows the replacement unit identified by RP2 separating from the substrate processing system 142_2 in the equipment space 120 and autonomously traveling toward the preparation space 111 on the lifting rails identified by R8 and the rails identified by R6.

[0142] <Example of Operation of Travel Mechanism in Normal Mode> Next, an operation of the travel mechanism 420 in the normal mode will be described, in which the inspection robot 414 travels. Fig. 11 is a diagram showing an example of the operation of the travel mechanism in the normal mode.

[0143] The traveling mechanism 420 receives instructions from the traveling mechanism management unit 620 according to the work content, such as: information for identifying the rail to be inspected: the rail identified by R1 to R6 among the rails 422.

[0144] As a result, the change mechanism 421 of the traveling mechanism 420 changes the rail width of each rail specified by R1 to R6 so that the rail width corresponds to the size of the inspection robot 414.

[0145] Next, the inspection robot 414 receives instructions from the worker management unit 610 according to the work content, such as: - Information for identifying the rail to be inspected for inspection work: rails identified as R1 to R6 among the rails 422; - Travel route when inspecting the rail to be inspected: R1 → R2 → R3 → R4 → R5 → R6; - Work procedure for inspecting the rail to be inspected: work procedure for traveling back and forth while photographing the rail to be inspected, and inspecting the image data for abnormalities, etc.

[0146] As a result, the inspection robot 414 travels back and forth in order, starting from the rail 422 identified by R1, to inspect each of the rails identified by R1 to R6 for abnormalities.

[0147] Figure 11 shows how each rail identified by R1 to R6 is changed to a rail width corresponding to the size of the inspection robot 414, and then the inspection robot 414 travels back and forth, photographing the rails in order starting from R1, to inspect the image data for any abnormalities.

[0148] <Example of Operation of Lifting Mechanism in Independent Maintenance Mode> Next, an operation of the lifting mechanism 450 in the independent maintenance mode when the replacement unit 411 moves autonomously will be described. Figures 12A to 12D are first to fourth diagrams showing an example of the operation of the lifting mechanism in the independent maintenance mode.

[0149] The lifting mechanism 450 receives from the lifting mechanism management unit 640 instructions according to the work content, such as: information for identifying the work body 410 to be lifted and lowered: the replacement unit 411 identified by RP2 among the replacement units; opening position of the running space 110: the cover portion 424 identified by S8 (the position in the equipment space 120 that connects to the replacement unit 411 of the substrate processing system 142_2 identified by RP2); information for identifying the connection destinations of the two ends of the lifting rail: the rail 422 identified by R6, and the support rail r2 that supports the replacement unit 411 of the substrate processing system 142_2 identified by RP2 among the replacement units 411 in the equipment space 120, etc.

[0150] As a result, the lifting mechanism 450 moves to the position of the lid portion identified in S8, removes the lifting rail 452, adjusts the rail width to a rail width corresponding to the size of the replacement unit 411, and then extends it to connect: - rail R6_1 of the rails identified by R6 in the range from the preparation space 111 to the lid portion identified in S8; and - support rail r2 that supports the replacement unit identified by RP2.

[0151] Figure 12A shows the lifting mechanism 450 receiving instructions according to the work content, and then the installation mechanism 451 of the lifting mechanism 450 moves to the position of the lid portion identified in S8, and then removes the stored lifting rail 452.

[0152] 12A, the installation mechanism 451 is configured to be movable in the depth direction of the page. The lifting rails 452 are stored in the installation mechanism 451 in a folded state.

[0153] 12B shows the lifting rail 452 taken out of the installation mechanism 451 and adjusted to a rail width corresponding to the size of the replacement unit 411.

[0154] FIG. 12C also shows the lifting rail 452 extended and adjusted to a length suitable for connecting: - rail R6_1, identified by R6, extending from the preparation space 111 to the lid portion identified by S8; and - support rail r2, which supports the replacement unit identified by RP2.

[0155] Also, Figure 12C shows how the position and attitude of the lifting rail 452 are controlled so that: one end of the lifting rail 452 is connected to rail R6_1, among the rails identified by R6, in the range from the preparation space 111 to the lid portion identified by S8; and the other end of the lifting rail 452 is connected to support rail r2 that supports the replacement unit identified by RP2.

[0156] Furthermore, Figure 12D shows a state in which the replacement unit 411 is able to move autonomously because: one end of the lifting rail 452 is connected to rail R6_1, among the rails identified by R6, in the range from the preparation space 111 to the lid portion identified by S8; and the other end of the lifting rail 452 is connected to support rail r2 that supports the replacement unit identified by RP2.

[0157] <Example of Operation of Lifting Mechanism in Maintenance Mode> Next, the operation of the lifting mechanism 450 in maintenance mode will be described, specifically the operation when the work robot 412 is traveling. Figures 13A and 13B are first and second diagrams showing an example of the operation of the lifting mechanism in maintenance mode.

[0158] The lifting mechanism 450 receives from the lifting mechanism management unit 640 instructions according to the work content, such as: information for identifying the work body 410 to be lifted and lowered: the work robot 412; opening position of the running space 110: the cover portion 424 identified by S8 (the cover portion located directly above the running path extending from the substrate processing system 142_2 in the equipment space 120); information for identifying the connection destinations of the two ends of the lifting rail: the rail 422 identified by R6, and the running path extending from the substrate processing system 142_2 in the equipment space 120.

[0159] As a result, the lifting mechanism 450 moves to the position of the lid portion identified in S8, adjusts the rail width of the lifting rail 452 to a rail width according to the size of the work robot 412, and then extends it to connect: - rail R6_1, of the rails identified in R6, in the range from the preparation space 111 to the lid portion identified in S8; and - a running path extending from the substrate processing system 142_2.

[0160] 13A shows that the installation mechanism 451 of the lifting mechanism 450 has moved to the position of the lid portion identified in S8 in response to the lifting mechanism 450 receiving an instruction corresponding to the work content. Also, FIG. 13A shows that the installation mechanism 451 of the lifting mechanism 450 takes out the lifting rails 452 stored therein and adjusts the rail width while extending them.

[0161] FIG. 13B also shows that the lifting rail 452 is: - adjusted to a length suitable for connecting rail R6_1, which is identified by R6 and extends from the preparation space 111 to the lid portion identified by S8, to a running path extending from the substrate processing system 142_2; - adjusted to a rail width according to the size of the work robot 412; - one end of the lifting rail 452 is connected to rail R6_1, which is identified by R6 and extends from the preparation space 111 to the lid portion identified by S8; and - the other end of the lifting rail 452 is connected to a running path extending from the substrate processing system 142_2.

[0162] <Example of Operation of Crane Mechanism in Maintenance Mode> Next, an example of operation of the crane mechanism 431 in the maintenance mode will be described, in which a unit that is included in the substrate processing system 141_2 and that is detachable from a vertically upper position is transported. Figures 14A to 14D are first to fourth diagrams showing an example of operation of the crane mechanism in the maintenance mode.

[0163] The crane mechanism 431 receives instructions from the crane mechanism management unit 630 according to the work content, including: information for identifying the substrate processing system and unit that are the target of the maintenance work: in the substrate processing system 141_2, the unit identified by U1 among the units that can be attached and detached from a vertically upper position, etc.

[0164] As a result, the crane mechanism 431 moves to the destination substrate processing system 141_2, and removes the unit identified by U1 from the substrate processing system 141_2 among the units that are detachable at a vertically upper position.

[0165] FIG. 14A shows a state in which a unit identified by U1 is removed from the substrate processing system 141_2 and then lifted upward by the crane mechanism 431.

[0166] Next, the crane mechanism 431 transports the unit identified by U1 to the preparation space 121. Figure 14B shows the state in which the unit identified by U1 has been transported to the preparation space 121 by the crane mechanism 431 and placed in the preparation space 121.

[0167] Next, the crane mechanism 431 transports a unit to be newly attached to the substrate processing system 141_2, which is detachably attached to an upper position in the vertical direction, to the substrate processing system 141_2.

[0168] FIG. 14C shows how a unit identified as U1', which is to be newly installed in the substrate processing system 141_2, is lifted by the crane mechanism 431 and transported to the substrate processing system 141_2.

[0169] Next, the crane mechanism 431 transports the unit identified by U1′ to the position of the substrate processing system 141_2 and lowers it vertically from a position directly above the transported substrate processing system 141_2, thereby attaching the unit identified by U1′ to the substrate processing system 141_2.

[0170] FIG. 14D shows a state in which the unit designated by U1', which has been transported by the crane mechanism 431, is attached to the substrate processing system 141_2.

[0171] <Processing Flow in Normal Mode of Maintenance Work System> Next, a processing flow in the maintenance work system 400 according to the first embodiment will be described. Fig. 15 is a sequence diagram showing the processing flow related to maintenance work in the normal mode of the maintenance work system.

[0172] In step S1501, the substrate processing systems 141_1 to 142_2 each measure the degree of wear of the parts at predetermined intervals, and transmit information about the measured degree of wear of the parts or information about parts that need to be replaced to the management system 440.

[0173] In step S1502, the management system 440 determines whether replacement is necessary based on the received information on the wear level and the like.

[0174] In step S1503, the management system 440 creates a maintenance schedule for the substrate processing system for which it has been determined that part replacement is necessary. The management system 440 determines, as the maintenance schedule, the substrate processing system and unit to be subjected to maintenance work, the contents of the maintenance work, and the timing of the maintenance work for each of the contents of the maintenance work.

[0175] In step S1504, the management system 440 manages the inventory of parts used in the maintenance work, and places an order for the parts to be used in the maintenance work based on the maintenance schedule.

[0176] In step S1505, the management system 440 transmits the result of the determination in step S1502 to the substrate processing systems 141_1 to 142_2.

[0177] In step S1506, the management system 440 transmits a maintenance schedule to the substrate processing system for which it has determined that part replacement is necessary.

[0178] In step S1507, the management system 440 transmits the maintenance schedule to the work object 410 involved in the maintenance work.

[0179] In step S1508 , the management system 440 transmits the maintenance schedule to the mobile terminal 460 .

[0180] In step S1509, the management system 440 transmits to the traveling mechanism 420 an instruction according to the work content regarding the inspection of the rail 422.

[0181] In step S1510, the management system 440 transmits instructions to the inspection robot 414 of the work body 410 regarding the inspection of the rail 422 according to the work content.

[0182] In step S1511 , the inspection robot 414 of the working body 410 inspects the rail 422 .

[0183] In step S1512 , the inspection robot 414 of the working body 410 transmits the inspection results of the rail 422 to the management system 440 .

[0184] 15, the rail 422 is inspected in steps S1509 to S1512 as processing in normal mode, but inspection of the rail 422 does not need to be performed every time in normal mode. For example, it may be configured to be performed when it is determined that inspection is necessary.

[0185] <Processing Flow in Independent Maintenance Mode of Maintenance Work System> Next, a processing flow in the independent maintenance mode of the maintenance work system 400 according to the first embodiment will be described. Fig. 16 is a sequence diagram showing the processing flow related to maintenance work in the independent maintenance mode of the maintenance work system.

[0186] In step S1601, the management system 440 inquires of the substrate processing systems 141_1 to 142_2 as to whether or not to shift to the independent maintenance mode.

[0187] In step S1602, the substrate processing systems 141_1 to 142_2 determine whether or not to switch to the independent maintenance mode, and transmit the determination result to the management system 440.

[0188] In step S1603, the management system 440 receives the determination result as to whether or not the mode can be shifted to the independent maintenance mode, and transmits an instruction to shift to the independent maintenance mode to the substrate processing systems that can be shifted to the independent maintenance mode.

[0189] In step S1604, the substrate processing system that has received the transition instruction transitions to the independent maintenance mode and notifies the management system 440 that the transition has been completed.

[0190] In step S1605, the management system 440 transmits to the traveling mechanism 420 an instruction according to the work content of the maintenance work determined in the maintenance schedule.

[0191] In step S1606, the change mechanism 421 and opening mechanism 423 of the traveling mechanism 420 control the rail 422 and the lid portion 424 according to instructions corresponding to the work content.

[0192] In step S1607, the management system 440 transmits an instruction according to the work content to the replacement unit specified by RP2 and the replacement unit specified by RP2′ among the replacement units 411 of the work body 410.

[0193] In step S1608, the management system 440 transmits an instruction to the lifting mechanism 450 according to the work content.

[0194] In step S1609, the installation mechanism 451 of the lifting mechanism 450 moves in accordance with instructions according to the work content, and then controls the lifting rails 452.

[0195] In step S1610, the management system 440 transmits a command to start traveling (separation) to the replacement unit identified by RP2 among the replacement units 411 of the working body 410.

[0196] In step S1611, the replacement unit identified by RP2 among the replacement units 411 of the working body 410 (the replacement unit of the substrate processing system 142_2 that has transitioned to the independent maintenance mode) is separated from the substrate processing system 142_2. Then, the replacement unit identified by RP2 starts autonomous travel to the preparation space 111 and reaches the preparation space.

[0197] In step S1612, the replacement unit identified by RP2 among the replacement units 411 of the working body 410 notifies the management system 440 that separation has been completed.

[0198] In step S1613, the management system 440 transmits a command (connection) to start traveling to the replacement unit specified by RP2 among the replacement units 411 of the working body 410 that is to be newly connected to the substrate processing system.

[0199] In step S1614, the replacement unit identified by RP2 among the replacement units 411 of the working body 410 starts autonomous travel, moves from the preparation space 111 to the travel space 110, travels within the travel space 110, and then moves to the equipment space 120. Furthermore, the replacement unit identified by RP2 among the replacement units 411 of the working body 410 is coupled in the equipment space 120 to the substrate processing system 142_2 that has transitioned to the independent maintenance mode.

[0200] In step S1615, when the replacement unit identified by RP2 among the replacement units 411 of the working body 410 completes connection to the substrate processing system 142_2 that has transitioned to the independent maintenance mode, it transmits to the management system 440 that the connection has been completed.

[0201] In step S1616, the management system 440 instructs the lifting mechanism 450 to return to the state before the instruction corresponding to the work content was sent.

[0202] In step S1617, the installation mechanism 451 of the lifting mechanism 450 stores the lifting rails 452, thereby returning to the state before the instruction according to the work content was sent.

[0203] In step S1618, the replaceable unit identified by RP2 among the replaceable units 411 of the working body 410 creates work history information.

[0204] In step S1619 , the replaceable unit identified by RP2 among the replaceable units 411 of the working body 410 transmits work history information to the management system 440 .

[0205] In the example of Figure 16, a transition to the independent maintenance mode is triggered by an inquiry from the management system 440, but the transition to the independent maintenance mode may also be triggered by a request from the substrate processing systems 141_1 to 142_2.

[0206] Examples of cases in which a transition to maintenance mode is triggered by a request from the substrate processing systems 141_1 to 142_2 include: - a transition due to the occurrence of a problem; - a transition due to an autonomous device action; - a transition due to the need for cooperative operation with a work robot; etc.

[0207] <Processing flow in maintenance mode of maintenance work system (1)> Next, a description will be given of the processing flow in the maintenance mode of the maintenance work system 400 according to the first embodiment. Fig. 17A is a first sequence diagram showing the processing flow related to maintenance work in the maintenance mode of the maintenance work system.

[0208] In step S1701, the management system 440 inquires of the substrate processing systems 141_1 to 142_2 as to whether or not to shift to the maintenance mode.

[0209] In step S1702, the substrate processing systems 141_1 to 142_2 determine whether or not to switch to the maintenance mode, and transmit the determination result to the management system 440.

[0210] In step S1703, the management system 440 receives the determination result as to whether or not the transition to the maintenance mode is possible, and transmits an instruction to transition to the maintenance mode to the substrate processing systems that can be transitioned to the maintenance mode.

[0211] In step S1704, the substrate processing system that has received the transition instruction transitions to the maintenance mode and notifies the management system 440 that the transition has been completed.

[0212] In step S1705, the management system 440 transmits to the traveling mechanism 420 an instruction according to the work content of the maintenance work determined in the maintenance schedule.

[0213] In step S1706, the change mechanism 421 and opening mechanism 423 of the traveling mechanism 420 control the rail 422 and the lid portion 424 according to instructions corresponding to the work content.

[0214] In step S1707, the management system 440 transmits instructions to the work robot 412 of the work body 410 according to the work content.

[0215] In step S1708, management system 440 transmits a start light emission command to light emitter 433. The start light emission command transmitted to light emitter 433 includes information regarding the travel path of work robot 412 within travel space 110.

[0216] In step S1709, light emitter 433 emits light in accordance with the travel path of working robot 412 within travel space 110. This allows light emitter 433 to guide working robot 412 within equipment space 120 toward the substrate processing system that is the target of maintenance work.

[0217] In step S1710, the management system 440 transmits to the lifting mechanism 450 an instruction according to the work content.

[0218] In step S1711, the installation mechanism 451 of the lifting mechanism 450 moves in accordance with instructions according to the work content, and then controls the lifting rails 452.

[0219] In step S1712, management system 440 transmits a travel start command (outbound) to work robot 412 of work body 410.

[0220] In step S1713, the work robot 412 of the work body 410 autonomously travels within the travel space 110 and moves to the equipment space 120 via the lift rails 452. After moving to the equipment space 120, the work robot 412 travels within the equipment space 120, guided by the light-emitting unit 433 within the equipment space 120, and moves to the position of the substrate processing system that is the target of the maintenance work.

[0221] In step S1714, the work robot 412 notifies the management system 440 that autonomous driving has been completed.

[0222] In step S1715, the working robot 412 of the working body 410 performs the maintenance work on the substrate processing system that is the maintenance work target. When the maintenance work on the substrate processing system that is the maintenance work target is completed, the process proceeds to step S1716.

[0223] In step S1716, management system 440 transmits a travel start command (returning route) to work robot 412 of work body 410.

[0224] In step S1717, the work robot 412 of the work body 410 travels within the equipment space 120, guided by the light-emitting unit 433 within the equipment space 120, and moves to the position of the lifting rail 452. The work robot 412 also moves to the travel space 110 via the lifting rail 452, and moves to the preparation space 111 by autonomously traveling within the travel space 110.

[0225] In step S1718, the work robot 412 of the work body 410 notifies the management system 440 that the maintenance work has been completed.

[0226] In step S1719, the management system 440 transmits an instruction to the light emitting unit 433 to stop light emission.

[0227] In step S1720 , the light emitting unit 433 stops emitting light in accordance with the light emission stop instruction from the management system 440 .

[0228] In step S1721, the management system 440 instructs the lifting mechanism 450 to return to the state before the instruction corresponding to the work content was transmitted.

[0229] In step S1722, the installation mechanism 451 of the lifting mechanism 450 stores the lifting rails 452, thereby returning to the state before the instruction according to the work content was sent.

[0230] In step S1723, the work robot 412 of the work body 410 creates work history information.

[0231] In step S1724 , the work robot 412 of the work body 410 transmits the work history information to the management system 440 .

[0232] In the example of FIG. 17, a transition to the maintenance mode is triggered by an inquiry from the management system 440, but the transition to the maintenance mode may also be triggered by a request from the substrate processing systems 141_1 to 142_2.

[0233] <Processing Flow (2) in Maintenance Mode of Maintenance Work System> Next, another processing flow in the maintenance mode of the maintenance work system 400 according to the first embodiment will be described. Here, a case will be described in which the working robot 412 autonomously travels within the equipment space 120 based on the marker 434 or based on signals from the transmitters 435 of the substrate processing systems 141_1 to 142_2. A case will also be described in which the working robot 412 communicates with the substrate processing system that is the target of the maintenance work before the maintenance work. A case will also be described in which a worker 482 who approaches the working robot 412 during the maintenance work is notified.

[0234] Fig. 17B is a second sequence diagram showing the flow of processing related to maintenance work in the maintenance mode of the maintenance work system. Note that, since the processing other than the hatched portion in Fig. 17A is common, Fig. 17B shows only the processing corresponding to the hatched portion in Fig. 17A.

[0235] In step S1731, the management system 440 transmits instructions to the work robot 412 of the work body 410 according to the work content.

[0236] In step S1732, the management system 440 transmits to the lifting mechanism 450 an instruction according to the work content.

[0237] In step S1733, the installation mechanism 451 of the lifting mechanism 450 moves in accordance with instructions according to the work content, and then controls the lifting rails 452.

[0238] In step S1734, management system 440 transmits a travel start command (outbound) to work robot 412 of work body 410.

[0239] In step S1735, the work robot 412 of the work body 410 autonomously travels within the travel space 110 and moves to the equipment space 120 via the lift rails 452. After moving to the equipment space 120, the work robot 412 autonomously travels within the equipment space 120 while calculating its current position by photographing the marker 434 or by receiving a signal from the transmitter 435. In this way, the work robot 412 moves to the position of the substrate processing system that is the target of maintenance work.

[0240] In step S1736, the work robot 412 notifies the management system 440 that autonomous driving has been completed.

[0241] In step S1737, the work robot 412 of the work body 410 communicates with the substrate processing system that is the maintenance work target, and inquires whether the current mode of the substrate processing system that is the maintenance work target has already been switched to the maintenance mode.

[0242] In step S1738, the substrate processing system that is the target of the maintenance operation notifies the working robot 412 in response to an inquiry that the current mode has been switched to the maintenance mode.

[0243] In step S1739, the work robot 412 of the working body 410 performs the maintenance work on the substrate processing system that is the target of the maintenance work. During the maintenance work, the work robot 412 of the working body 410 monitors whether or not the worker 482 is present in the work area.

[0244] In step S1740, work robot 412 of work body 410 detects worker 482, if any, in the work area.

[0245] In step S1741 , the work robot 412 of the work body 410 transmits the detection results to the management system 440 .

[0246] In step S1742, the management system 440 identifies the substrate processing system on which the work robot 412 of the work body 410 is performing maintenance work, and transmits to the identified substrate processing system a detection result indicating that a worker is present within the work area of ​​the work robot 412.

[0247] In step S1743, the substrate processing system notifies the worker 482 that he or she is within the work area of ​​the work robot 412 and calls his or her attention, for example, by turning on an LED based on the detection results transmitted from the management system 440.

[0248] In step S1744, the management system 440 identifies the worker 482 who is within the work area of ​​the work robot 412, and transmits a detection result to the mobile terminal 460 of the identified worker 482 indicating that the worker 482 has entered the work area of ​​the work robot 412.

[0249] In step S1745, based on the detection results sent from management system 440, mobile terminal 460 notifies worker 482 that he or she has entered the work area of ​​work robot 412 of work body 410, and calls his or her attention.

[0250] Thereafter, when the maintenance work on the substrate processing system that is the maintenance work target is completed, the process proceeds to step S1746.

[0251] In step S1746, management system 440 transmits a travel start command (returning route) to work robot 412 of work body 410.

[0252] In step S1747, the work robot 412 of the work body 410 autonomously travels within the equipment space 120 and moves to the position of the lifting rail 452. The work robot 412 also moves to the travel space 110 via the lifting rail 452, and moves to the preparation space 111 by autonomously traveling within the travel space 110.

[0253] In step S1748, the work robot 412 of the work body 410 notifies the management system 440 that the maintenance work has been completed.

[0254] In step S1749, the work robot 412 instructs the lifting mechanism 450 to return to the state it was in before the instruction corresponding to the work content was sent.

[0255] In step S1750, the installation mechanism 451 of the lifting mechanism 450 stores the lifting rails 452, thereby returning to the state before the instruction according to the work content was transmitted.

[0256] In step S1751, the work robot 412 of the work body 410 creates work history information.

[0257] In step S1752 , the work robot 412 of the work body 410 transmits the work history information to the management system 440 .

[0258] <Processing Flow (3) in Maintenance Mode of Maintenance Work System> Next, another processing flow in the maintenance mode of the maintenance work system 400 according to the first embodiment will be described. Here, a case will be described in which the work robot 412 communicates with the mobile device 460 of the worker 482 during maintenance work and receives voice instructions from the worker 482.

[0259] Fig. 17C is a third sequence diagram showing the flow of processing related to maintenance work in the maintenance mode of the maintenance work system. Since the processing in Fig. 17C is the same as that in Fig. 17A except for the hatched portions, Fig. 17C only shows the processing corresponding to the hatched portions in Fig. 17A. Furthermore, among the processing shown in Fig. 17C, the same processing as that shown in Fig. 17B is given the same reference numerals, and description thereof will be omitted. Among the processing shown in Fig. 17C, the processing that differs from that in Fig. 17B is steps S1761 to S1763.

[0260] If the worker 482 wants to change the work content of the work robot 412 during maintenance work on the work robot 412 (including, for example, when stopping the maintenance work), the worker 482 gives voice instructions to the mobile terminal 460.

[0261] In step S1761 , the mobile terminal 460 receives a voice instruction from the worker 482 .

[0262] In step S1762 , the mobile terminal 460 transmits a voice instruction from the worker 482 to the work robot 412 of the work body 410 .

[0263] In step S1763, the work robot 412 changes the work content of the maintenance work in accordance with voice instructions from the worker 482, and performs the maintenance work according to the changed work content.

[0264] <Explanation of Replacement Unit> Next, the replacement unit 411 will be described.

[0265] (1) Overview of Replacement Unit First, we will explain the overview of the replacement unit 411. Fig. 18A is the first diagram for explaining the overview of the replacement unit, and shows a scene in which the replacement unit 411 coupled to the substrate processing system 142_2 is separated.

[0266] 18A (a-1) shows a state in which a replacement unit identified by RP2 among the replacement units 411 is coupled to the substrate processing system 142_2 as viewed from the side, and FIG. 18A (b-1) shows a state in which a replacement unit identified by RP2 among the replacement units 411 is coupled to the substrate processing system 142_2 as viewed from the front.

[0267] As shown in (a-1) or (b-1) of FIG. 18A, when coupled to the substrate processing system 142_2, the replacement unit identified by RP2 among the replacement units 411 is supported by a support rail r2.

[0268] 18A (a-2) shows a state in which the lifting rail 452 is connected to the support rail r2 that supports the replacement unit identified by RP2 of the replacement unit 411, as viewed from the side. Also, (b-2) of Fig. 18A shows a state in which the lifting rail 452 is connected to the support rail r2 that supports the replacement unit identified by RP2 of the replacement unit 411, as viewed from the front.

[0269] As shown in (a-2) or (b-2) of FIG. 18A, by connecting the lifting rails 452, the replacement unit identified by RP2 among the replacement units 411 is separated from the substrate processing system 142_2.

[0270] 18A (a-3) shows a state in which a replacement unit identified by RP2 among the replacement units 411 starts autonomous traveling and moves into the traveling space 110 via the lifting rail 452, as viewed from the side. Also, FIG. 18A (b-3) shows a state in which a replacement unit identified by RP2 among the replacement units 411 starts autonomous traveling and moves into the traveling space 110 via the lifting rail 452, as viewed from the front.

[0271] 18A (a-3) or (b-3), when the replacement unit identified by RP2 among the replacement units 411 starts autonomous traveling, a rear wall 1830 in the substrate processing system 142_2 is exposed. Note that, as shown in (b-3) of FIG. 18A , the rear wall 1830 is provided with an attachment portion for fixing the replacement unit identified by RP2 among the replacement units 411.

[0272] 18B is a second diagram for explaining an overview of the replacement unit. The example of Fig. 18B illustrates a scene in which a replacement unit identified by RP2' is coupled as a new replacement unit 411 to the substrate processing system 142_2 from which the replacement unit identified by RP2 of the replacement units 411 has been separated.

[0273] 18B (a-1) shows a state in which the replacement unit specified by RP2' as the new replacement unit 411 has descended from the travel space 110 along the lifting rail 452 with the lifting rail 452 connected, as viewed from the side. Also, FIG. 18B (b-1) shows a state in which the replacement unit specified by RP2' as the new replacement unit 411 has descended from the travel space 110 along the lifting rail 452 with the lifting rail 452 connected, as viewed from the front.

[0274] 18B (a-2) shows a state in which the replacement unit identified by RP2′ as the new replacement unit 411 has moved along the support rail r2 and then been fixed to the attachment portions 1831 to 1834, as viewed from the side. Also, FIG. 18B (b-2) shows a state in which the replacement unit identified by RP2′ as the new replacement unit 411 has moved along the support rail r2 and then been fixed to the attachment portions 1831 to 1834, as viewed from the front.

[0275] 18B (a-3) shows a state in which the lifting rails 452 have been removed from the substrate processing system 142_2 to which the replacement unit identified by RP2' has been coupled as the replacement unit 411, as viewed from the side. Also, FIG. 18B (b-3) shows a state in which the lifting rails 452 have been removed from the substrate processing system 142_2 to which the replacement unit identified by RP2' has been coupled as the replacement unit 411, as viewed from the front.

[0276] (2) Functional Configuration of Replacement Unit Next, the functional configuration of the replacement unit 411 will be described. Fig. 19 is a diagram showing an example of the functional configuration of the replacement unit. As shown in Fig. 19, the replacement unit 411 has a processing device 1910, a control device 1920, a sensor 1941, a traveling device 1942, a sensor 1943, and an attachment / detachment device 1944.

[0277] When the replacement unit 411 is coupled to, for example, the substrate processing system 142_2, the processing device 1910 communicates with the substrate processing system 142_2 and performs a portion of the substrate processing when the substrate processing system 142_2 performs substrate processing in normal mode.

[0278] The control device 1920 functions, for example, when the replacement unit 411 is separated from the substrate processing system 142_2 or, after separation, when the replacement unit 411 autonomously travels from the substrate processing system 142_2 to the preparation space 111. The control device 1920 also functions, for example, when the replacement unit 411 autonomously travels from the preparation space 111 to the substrate processing system 142_2 before being coupled to the substrate processing system 142_2 or when the replacement unit 411 is coupled to the substrate processing system 142_2.

[0279] The sensors 1941 are various sensors (for example, an imaging device, a laser rangefinder, etc.) used when the replacement unit 411 travels autonomously, and transmit measured sensor data (for example, image data, distance data, etc.) to the control device 1920. The traveling device 1942 moves the replacement unit 411 based on control instructions from the control device 1920.

[0280] The sensors 1943 are various sensors used when the replacement unit 411 is coupled to or separated from the substrate processing system 142_2, and transmit sensor data indicating the coupling or separation to the control device 1920. The attachment / detachment device 1944 detaches the replacement unit 411 from the substrate processing system 142_2 or couples the replacement unit 411 to the substrate processing system 142_2 based on a control instruction from the control device 1920.

[0281] A control program is installed in the control device 1920. When the program is executed, the control device 1920 functions as a main control unit 1930, an autonomous driving control unit 1931, a sensor data processing unit 1932, an attachment / detachment control unit 1933, and a sensor data processing unit 1934.

[0282] The main control unit 1930 controls the entire control device 1920 while communicating with the management system 440 .

[0283] When the main control unit 1930 receives an instruction corresponding to the work content from the management system 440, the autonomous driving control unit 1931 generates a control instruction for autonomously driving the replacement unit 411 based on: information notified from the sensor data processing unit 1932; and layout information of the first substrate processing factory 100 stored in the layout information storage unit 1935. The autonomous driving control unit 1931 also transmits the generated control instruction to the traveling device 1942. When the autonomous driving is completed, the autonomous driving control unit 1931 transmits a notification that separation has been completed to the management system 440 via the main control unit 1930.

[0284] The sensor data processing unit 1932 processes the sensor data (e.g., image data, distance data, etc.) notified from the sensor 1941 to identify the rail 422 (or the lift rail 452) on which the vehicle is traveling and notifies the autonomous driving control unit 1931. The sensor data processing unit 1932 also processes the sensor data (e.g., image data, distance data, etc.) notified from the sensor 1941 to identify the position on the rail 422 (or the lift rail 452) on which the vehicle is traveling and notifies the autonomous driving control unit 1931.

[0285] The attachment / detachment control unit 1933 transmits a control instruction for separating the replacement unit 411 from the substrate processing system 142_2 to the attachment / detachment device 1944. In response to transmitting the control instruction for separation, the attachment / detachment control unit 1933 recognizes that the replacement unit 411 has been separated from the substrate processing system 142_2 based on information notified by the sensor data processing unit 1934.

[0286] The attachment / detachment control unit 1933 also transmits a control instruction to the attachment / detachment device 1944 to attach the replacement unit 411 to the substrate processing system 142_2. In response to transmitting the control instruction to attach, the attachment / detachment control unit 1933 recognizes that the replacement unit 411 has been attached to the substrate processing system 142_2 based on information notified by the sensor data processing unit 1934. Furthermore, the attachment / detachment control unit 1933 transmits information that the attachment has been completed to the management system 440 via the main control unit 1930.

[0287] The sensor data processing unit 1934 processes the sensor data notified from the sensor 1943 to detect, for example, the attachment / detachment state of the substrate processing system 142_2 relative to the attachment units 1831 to 1834, and notifies the attachment / detachment control unit 1933.

[0288] (3) Separation Processing of Replacement Unit Next, a description will be given of the flow of processing when the replacement unit 411 is separated from the substrate processing system 142_2 and autonomously travels to the preparation space 111. Fig. 20A is a flowchart showing the flow of the separation processing of the replacement unit in the independent maintenance mode.

[0289] In step S2001, the replacement unit 411 receives an instruction according to the work content from the management system 440.

[0290] In step S2002, the replacement unit 411 determines whether the substrate processing system 142_2 has transitioned to the independent maintenance mode. If it is determined in step S2002 that the substrate processing system 142_2 has not transitioned to the independent maintenance mode (NO in step S2002), the replacement unit 411 waits until the substrate processing system 142_2 transitions to the independent maintenance mode. On the other hand, if it is determined in step S2002 that the substrate processing system 142_2 has transitioned to the independent maintenance mode (YES in step S2002), the process proceeds to step S2003.

[0291] In step S2003, the replacement unit 411 determines whether or not a running start instruction (separation) has been received from the management system 440. If it is determined in step S2003 that a running start instruction (separation) has not been received (NO in step S2003), the replacement unit 411 waits until the running start instruction (separation) is received. On the other hand, if it is determined in step S2003 that a running start instruction (separation) has been received (YES in step S2003), the replacement unit 411 proceeds to step S2004.

[0292] In step S2004, the replacement unit 411 is released from the attachment portions 1831 to 1834 and separated from the substrate processing system 142_2.

[0293] In step S2005, the replacement unit 411 autonomously travels on the lifting rails 452 and the rails 422 to the preparation space 111.

[0294] In step S2006, the replacement unit 411 notifies the management system 440 that the separation has been completed.

[0295] (4) Coupling Process of Replacement Unit Next, a flow of processes until the replacement unit 411 is coupled to the substrate processing system 142_2 will be described. Fig. 20B is a flowchart showing the flow of coupling processes of the replacement unit in the independent maintenance mode.

[0296] In step S2011, the replacement unit 411 receives an instruction according to the work content from the management system 440.

[0297] In step S2012, the replacement unit 411 determines whether or not a travel start instruction (connection) has been received from the management system 440. If it is determined in step S2012 that a travel start instruction (connection) has not been received (NO in step S2012), the replacement unit 411 waits until a travel start instruction (connection) is received. On the other hand, if it is determined in step S2012 that a travel start instruction (connection) has been received (YES in step S2012), the replacement unit 411 proceeds to step S2013.

[0298] In step S2013, the replacement unit 411 autonomously travels on the rails 422 and the lifting rails 452 and moves from the preparation space 111 to the substrate processing system 142_2.

[0299] In step S2014, the replacement unit 411 is coupled to the mounting portions 1831 to 1834 of the substrate processing system 142_2, thereby fixing the replacement unit 411 to the substrate processing system 142_2.

[0300] In step S2015, the replacement unit 411 notifies the management system 440 that the coupling is complete.

[0301] <Description of Working Robot> Next, the working robot 412 will be described.

[0302] (1) Configuration of Work Robot During Maintenance Work First, the configuration of work robot 412 during maintenance work will be described. Fig. 21A is the first diagram for explaining the details of the work robot. As shown in Fig. 21A, work robot 412 has a manipulator 2100a and a mobile body 2100b.

[0303] Of these, the mobile body 2100b moves the working robot 412 and controls the position and posture of the entire working robot 412. The mobile body 2100b has a support base 2101, a moving unit 2102, and a control device 2103.

[0304] The support base 2101 is a base that supports the manipulator 2100a. The moving unit 2102 is controlled based on image data and distance data from an imaging device and a laser rangefinder (not shown) attached to the support base 2101. This allows the moving unit 2102 to move the work robot 412 to any position (for example, the position of the substrate processing system 142_2). The control device 2103 controls the operation of the manipulator 2100a and the moving unit 2102.

[0305] The manipulator 2100a mainly performs consumable replacement and cleaning among the maintenance operations for the substrate processing systems 141_1 to 142_2. Furthermore, the manipulator 2100a measures the work quality after the consumable replacement and cleaning.

[0306] As shown in FIG. 21A, the manipulator 2100a has a plurality of link portions (link portions 2111 to 2119).

[0307] One end of link portion 2111 is attached to moving body 2100b via rotating portion 2121 that rotates in the direction of arrow 2171. Link portion 2111 also has an elevation mechanism that moves up and down in the direction of arrow 2172, and one end of link portion 2112 is attached to the other end via rotating portion 2122 that rotates in the direction of arrow 2173.

[0308] A branch portion 2130 is formed at the other end of the link portion 2112, and a first arm that mainly performs consumable part replacement and cleaning, and a second arm that measures work quality after consumable part replacement and cleaning are attached to the branch portion 2130.

[0309] In the first arm, one end of a link portion 2113 is attached to a branch portion 2130 via a rotating portion 2123 that rotates in the direction of arrow 2174, and the other end is attached to a link portion 2114 via a rotating portion 2124 that rotates in the direction of arrow 2175. Furthermore, one end of a link portion 2115 is attached to the other end of the link portion 2114 via a rotating portion 2125 that rotates in the direction of arrow 2176. Furthermore, an end effector 2140 is attached to the other end of the link portion 2115 via a rotating portion 2126 that rotates in the direction of arrow 2177.

[0310] The end effector 2140 has a sensor (for example, an imaging device 2127) and measures the direction of the tip of the end effector 2140. This controls the attitude of the first arm, controls the operation of the end effector 2140, and performs replacement of consumables and cleaning.

[0311] 21A shows an example in which a five-fingered end effector is attached as the end effector 2140, but the type of end effector 2140 is not limited to this and can be replaced with an appropriate type of end effector depending on the task. Specifically, the work robot 412 selects an end effector appropriate for the task from multiple types of end effectors stocked within the robot and replaces it. The end effector 2140 is detachably attached at the position of the rotating part 2126.

[0312] In the second arm, one end of link portion 2116 is attached to branch portion 2130 via rotating portion 2151 that rotates in the direction of arrow 2178, and the other end is attached to link portion 2117 via rotating portion 2152 that rotates in the direction of arrow 2179. Furthermore, one end of link portion 2118 is attached to the other end of link portion 2117 via rotating portion 2153 that rotates in the direction of arrow 2180. Furthermore, one end of link portion 2119 is attached to the other end of link portion 2118 via rotating portion 2154 that rotates in the direction of arrow 2181. Furthermore, multi-sensor unit 2160 is attached to the other end of link portion 2119 via rotating portion 2155 that rotates in the direction of arrow 2182.

[0313] The multi-sensor unit 2160 is an example of a measurement unit and includes various sensors (for example, an imaging device and a laser rangefinder). This controls the posture of the second arm and measures the quality of the consumable part replacement and cleaning performed by the end effector 2140.

[0314] (2) Configuration of Working Robot When Running Next, the configuration of working robot 412 when running will be described. FIG. 21B is a second diagram for explaining the details of the working robot. As shown in FIG. 21B, working robot 412 has a storage section 2190 that stores manipulator 2100a. Before running, working robot 412 stores manipulator 2100a in storage section 2190, and runs with manipulator 2100a stored in storage section 2190.

[0315] The storage section 2190 is configured to be openable and closable, and when the work robot 412 reaches the position of the substrate processing system that is the target of maintenance work, it opens the storage section 2190 and operates the manipulator 2100a.

[0316] (3) Functional Configuration of Work Robot Next, the functional configuration of the control device 2103 of the work robot 412 will be described. Fig. 22 is a diagram showing an example of the functional configuration of a work robot. As described above, the work robot 412 has a manipulator 2100a and a mobile body 2100b, and the control device 2103 is disposed inside the mobile body 2100b, but in the example of Fig. 22, for convenience of explanation, it is shown outside the mobile body 2100b. Therefore, in the example of Fig. 22, the mobile body 2100b refers to the mobile body excluding the control device 2103.

[0317] A control program is installed in the control device 2103. By executing the control program, the control device 2103 functions as a main control unit 2210, an autonomous driving control unit 2211, a sensor data processing unit 2212, a maintenance work control unit 2213, and a sensor data processing unit 2214, as shown in FIG.

[0318] The main control unit 2210 controls the entire working robot 412 while communicating with the management system 440 , the substrate processing systems 141 _ 1 to 142 _ 2 , and the mobile terminal 460 .

[0319] For example, the main control unit 2210 communicates with the substrate processing system that is the target of the maintenance work to determine whether the maintenance work can be started, and if it determines that the maintenance work can be started, it instructs the maintenance work control unit 2213 to start the maintenance work.

[0320] Furthermore, the main control unit 2210 communicates with the mobile terminal 460, and when a voice instruction is given by the worker during maintenance work, the main control unit 2210 instructs the maintenance work control unit 2213 to perform the maintenance work according to the voice instruction.

[0321] The autonomous driving control unit 2211 generates control instructions for causing the work robot 412 to autonomously travel to the position of the substrate processing system that is the target of maintenance work (or for causing the work robot 412 to travel along the light-emitting unit 433) based on: instructions according to the work content that the main control unit 2210 receives from the management system 440, sensor data notified from the sensor data processing unit 2212, and layout information of the first substrate processing factory 100 stored in the layout information storage unit 2215. The autonomous driving control unit 2211 also transmits the generated control instructions to the mobile unit 2100b.

[0322] In addition, the autonomous driving control unit 2211 transmits information that autonomous driving has been completed to the management system 440 via the main control unit 1930.

[0323] The sensor data processing unit 2212 processes sensor data notified from a sensor possessed by the mobile body 2100b, for example, to identify the current position or detect the light emitting unit 433, and notify the autonomous driving control unit 2211. The sensor data processing unit 2212 also processes the sensor data notified from the sensor possessed by the mobile body 2100b, for example, to obtain obstacle information, and notify the autonomous driving control unit 2211. Note that the sensor possessed by the mobile body 2100b is, for example, an imaging device and a laser rangefinder (not shown) attached to the support base 2101, and the sensor data notified from the sensor refers to image data, distance data, etc.

[0324] The maintenance work control unit 2213 generates control instructions and the like for the work robot 412 to perform maintenance work based on: - instructions corresponding to the work content received by the main control unit 2210 from the management system 440; and - information indicating the status of the maintenance work notified by the sensor data processing unit 2214. The maintenance work control unit 2213 also transmits the generated control instructions and the like to the manipulator 2100a. Furthermore, the maintenance work control unit 2213 transmits information that the maintenance work has been completed and work history information to the management system 440 via the main control unit 1930. The maintenance work control unit 2213 generates work history information based on the generated control instructions for performing the maintenance work and the notified sensor data.

[0325] The sensor data processing unit 2214 processes the sensor data notified from the sensors of the manipulator 2100a to generate information indicating the maintenance work status of the manipulator 2100a and notifies the maintenance work control unit 2213 of the information.

[0326] (4) Movement Processing of Working Robot Next, the flow of processing until the working robot 412 moves to the position of the substrate processing system 142_2 that is the target of maintenance work will be described. The processing until the working robot 412 moves to the position of the substrate processing system 142_2 that is the target of maintenance work can be broadly divided into two cases within the equipment space 120: A case in which the working robot 412 moves according to the guidance of the light-emitting unit 433, and A case in which the working robot 412 moves autonomously while calculating its current position. Therefore, the movement processing for each of the two cases will be described below.

[0327] (4-1) Movement process when traveling according to the guidance of the light-emitting unit Figure 23A is a first flowchart showing the flow of the movement process of the work robot in maintenance mode, and is a first flowchart showing the flow of the movement process when traveling from the preparation space 111 to the substrate processing system 142_2 that is the target of the maintenance work.

[0328] In step S2301, the work robot 412 receives instructions from the management system 440 according to the work content.

[0329] In step S2302, the work robot 412 determines whether or not a start travel command (outbound) has been received from the management system 440. If it is determined in step S2302 that a start travel command (outbound) has not been received (NO in step S2302), the work robot 412 waits until a start travel command (outbound) is received. On the other hand, if it is determined in step S2302 that a start travel command (outbound) has been received (YES in step S2302), the process proceeds to step S2303.

[0330] In step S2303, the working robot 412 autonomously travels on the rails 422 in the travel space 110 and moves to the equipment space 120 via the lift rails 452.

[0331] In step S2304, the work robot 412 determines whether or not it has reached the equipment space 120. If it is determined in step S2304 that it has not reached the equipment space 120 (NO in step S2304), it continues autonomous travel. On the other hand, if it is determined in step S2304 that it has reached the equipment space 120 (YES in step S2304), the process proceeds to step S2305.

[0332] In step S2305, the work robot 412 detects a light-emitting unit 310 that is lit and that is installed on the floor of the equipment space 120. The work robot 412 also starts moving along the lit light-emitting unit 310.

[0333] In step S2306, the work robot 412 determines whether or not an obstacle has been placed on the travel path. If it is determined in step S2306 that no obstacle has been placed (NO in step S2306), the work robot 412 continues traveling and proceeds to step S2309.

[0334] On the other hand, if it is determined in step S2306 that an obstacle is placed (YES in step S2306), the process proceeds to step S2307.

[0335] In step S2307, the work robot 412 travels so as to avoid obstacles.

[0336] In step S2308, the work robot 412 detects the illuminated light-emitting unit 310 behind the obstacle that was avoided. The work robot 412 then resumes traveling along the illuminated light-emitting unit 310.

[0337] In step S2309, the work robot 412 determines whether or not it has reached the destination position. If it is determined in step S2309 that it has not reached the destination position (NO in step S2309), the process returns to step S2306 and the work robot 412 continues traveling along the light-emitting unit 310. On the other hand, if it is determined in step S2309 that it has reached the destination position (YES in step S2309), the process proceeds to step S2310.

[0338] The work robot 412 determines that it has reached the destination position when it detects the end position of the lit light-emitting element 310. The end position of the lit light-emitting element 310 corresponds to the position of the substrate processing system 142_2 that is the target of the maintenance work. However, if the substrate processing system 142_2 that is the target of the maintenance work is included in the work area of ​​the worker 482, the end position of the lit light-emitting element 310 will be a position just before the work area.

[0339] In step S2310, the work robot 412 stops traveling at the destination position indicated by the light emitter 310. The work robot 412 also transmits a message to the management system 440 that it has completed traveling.

[0340] FIG. 23B is a second flowchart showing the flow of the movement process of the working robot in the maintenance mode, and is a flowchart showing the flow of the movement process when returning to the preparation space 111 from the substrate processing system 142_2 that is the target of the maintenance work.

[0341] In step S2321, the work robot 412 determines whether or not a start traveling command (returning) has been received from the management system 440. If it is determined in step S2321 that a start traveling command (returning) has not been received (NO in step S2321), the work robot 412 waits until a start traveling command (returning) is received. On the other hand, if it is determined in step S2321 that a start traveling command (returning) has been received (YES in step S2321), the process proceeds to step S2322.

[0342] In step S2322, the work robot 412 detects a light-emitting unit 310 that is lit and that is installed on the floor of the equipment space 120. The work robot 412 also starts moving along the lit light-emitting unit 310.

[0343] In step S2323, the work robot 412 determines whether or not an obstacle has been placed on the travel path. If it is determined in step S2323 that no obstacle has been placed on the travel path (NO in step S2323), the work robot 412 continues traveling and proceeds to step S2326.

[0344] On the other hand, if it is determined in step S2323 that an obstacle has been placed (YES in step S2323), the process proceeds to step S2324.

[0345] In step S2324, the work robot 412 travels so as to avoid obstacles.

[0346] In step S2325, the work robot 412 detects the illuminated light-emitting unit 310 behind the obstacle that was avoided. The work robot 412 then resumes traveling along the illuminated light-emitting unit 310.

[0347] In step S2326, the work robot 412 determines whether cleaning is required along or around the travel path. If it is determined in step S2326 that cleaning is not required (NO in step S2326), the process proceeds to step S2328.

[0348] On the other hand, if it is determined in step S2327 that cleaning is necessary (YES in step S2326), the process proceeds to step S2327.

[0349] In step S2327, the work robot 412 moves while cleaning the path or the area around the path as it travels, guided by the light-emitting unit 310. In this way, the work robot 412 cleans as it travels within the equipment space 120 on its way back to the preparation space 111 after completing the maintenance work, and removes any dust or dirt that has occurred during the maintenance work.

[0350] In step S2328, the work robot 412 determines whether it has reached the position of the lift rail 452. If it is determined in step S2328 that it has not reached the position of the lift rail 452 (NO in step S2329), the process returns to step S2323. On the other hand, if it is determined in step S2328 that it has reached the position of the lift rail 452 (YES in step S2328), the process proceeds to step S2329.

[0351] In step S2329, the work robot 412 moves to the travel space 110 via the lift rail 452, and then moves to the preparation space 111 by autonomously traveling on the rails 422 within the travel space 110.

[0352] In step S2330, the work robot 412 determines whether or not it has reached the preparation space 111. If it is determined in step S2330 that it has not reached the preparation space 111 (NO in step S2330), it continues autonomous traveling.

[0353] On the other hand, if it is determined in step S2330 that the preparation space 111 has been reached (YES in step S2330), the process proceeds to step S2331.

[0354] In step S2331, the work robot 412 notifies the management system 440 that the maintenance work has been completed.

[0355] (4-2) Case where the robot travels while calculating the current position Figure 24A is a third flowchart showing the flow of the movement process of the work robot in maintenance mode, and is a flowchart showing the flow of the movement process when the robot travels from the preparation space 111 to the substrate processing system 142_2 that is the target of the maintenance work.

[0356] In step S2401, the work robot 412 receives instructions from the management system 440 according to the work content.

[0357] In step S2402, the work robot 412 acquires information about the work area of ​​the worker 482 from the instructions corresponding to the work content. The instructions corresponding to the work content received by the work robot 412 in step S2401 include a travel route (outbound) to the substrate processing system 142_2 that is the target of the maintenance work. The travel route (outbound) also includes, as an incidental state, information about the work area of ​​the worker 482.

[0358] In step S2403, the work robot 412 optimizes its travel route within the equipment space 120. Specifically, the robot searches for a route that will take the shortest time from the position where it descends into the equipment space 120 via the lift rails 452 to the position of the substrate processing system that is the target of maintenance work, while avoiding the work area of ​​the worker 482. When searching for a travel route, it is assumed that multiple travel route candidates have been transmitted in advance from the management system 440, and the work robot 412 selects from among the multiple transmitted travel route candidates. Furthermore, the travel time for each past travel route recorded in the past movement history is referenced to determine the required time.

[0359] In step S2404, the work robot 412 determines whether or not a start travel command (outbound) has been received from the management system 440. If it is determined in step S2404 that a start travel command (outbound) has not been received (NO in step S2404), the work robot 412 waits until a start travel command (outbound) is received. On the other hand, if it is determined in step S2404 that a start travel command (outbound) has been received (YES in step S2404), the process proceeds to step S2405.

[0360] In step S2405, the working robot 412 autonomously travels on the rails 422 in the travel space 110 and moves to the equipment space 120 via the lift rails 452.

[0361] In step S2406, the work robot 412 determines whether or not it has reached the equipment space 120. If it is determined in step S2406 that it has not reached the equipment space 120 (NO in step S2406), it continues autonomous travel. On the other hand, if it is determined in step S2406 that it has reached the equipment space 120 (YES in step S2406), the process proceeds to step S2407.

[0362] In step S2407, the work robot 412 calculates its current position based on a signal from a transmitter 435 of a nearby substrate processing system or by photographing a marker 434 on the ceiling surface of the equipment space 120. Based on the calculated current position, the work robot 412 begins autonomous travel along a travel route (the travel route optimized in step S2403) to the position of the substrate processing system 142_2 that is the target of maintenance work.

[0363] In step S2408, the work robot 412 determines whether or not an obstacle has been placed on the travel path. If it is determined in step S2408 that no obstacle has been placed (NO in step S2408), the work robot 412 continues autonomous travel and proceeds to step S2410.

[0364] On the other hand, if it is determined in step S2408 that an obstacle is placed (YES in step S2408), the process proceeds to step S2409.

[0365] In step S2409, the working robot 412 autonomously travels to avoid the obstacle. After avoiding the obstacle, the working robot 412 resumes autonomous travel along the travel route to the position of the substrate processing system 142_2 that is the target of maintenance work, while again calculating its current position.

[0366] In step S2410, the working robot 412 determines whether the periphery of the substrate processing system 142_2 that is the target of the maintenance work is included in the work area of ​​the worker 482. If it is determined in step S2410 that the periphery is included in the work area of ​​the worker 482 (YES in step S2410), the process proceeds to step S2411.

[0367] In step S2411, the working robot 412 stops in front of the work area regardless of the position of the substrate processing system 142_2 that is the maintenance work target, and notifies the management system 440 that autonomous traveling has been completed.

[0368] On the other hand, if it is determined in step S2411 that the area is not included in the work area of ​​the worker 482 (NO in step S2411), the process proceeds to step S2412.

[0369] In step S2412, the working robot 412 continues autonomous travel to the position of the substrate processing system 142_2 that is the maintenance work target, and stops after moving to the position of the substrate processing system 142_2 that is the maintenance work target. The working robot 412 also transmits a message to the management system 440 that the autonomous travel has been completed.

[0370] FIG. 24B is a fourth flowchart showing the flow of the movement process of the working robot in the maintenance mode, which is a flowchart showing the flow of the movement process when returning to the preparation space 111 from the substrate processing system 142_2 that is the target of the maintenance work.

[0371] In step S2421, the work robot 412 receives instructions from the management system 440 according to the work content.

[0372] In step S2422, the work robot 412 acquires information about the work area of ​​the worker 482 from the instruction corresponding to the work content. This information about the work area of ​​the worker 482 is information about the work area in which the worker 482 is still working at the time when the maintenance work by the work robot 412 is completed. Note that the instruction corresponding to the work content received by the work robot 412 in step S2421 includes a travel route (return route) to the substrate processing system 142_2 that is the target of the maintenance work. Furthermore, this travel route (return route) also includes information about the work area of ​​the worker 482 as an incidental state.

[0373] In step S2423, the work robot 412 optimizes the travel route within the equipment space 120. Specifically, the work robot 412 searches for a route that takes the shortest time to travel from the position of the substrate processing system 142_2 for which maintenance work has been completed to the position of the lifting rail 452 while avoiding the work area of ​​the worker 482.

[0374] In step S2424, the work robot 412 determines whether or not a start traveling command (returning) has been received from the management system 440. If it is determined in step S2424 that a start traveling command (returning) has not been received (NO in step S2424), the work robot 412 waits until a start traveling command (returning) is received. On the other hand, if it is determined in step S2424 that a start traveling command (returning) has been received (YES in step S2424), the process proceeds to step S2425.

[0375] In step S2425, the work robot 412 calculates its current position based on a signal from a transmitter 435 of a nearby substrate processing system or by photographing a marker 434 on the ceiling surface of the equipment space 120. Based on the calculated current position, the work robot 412 begins autonomous travel along the travel route to the position of the lift rail 452 (the travel route optimized in step S2423).

[0376] In step S2426, the work robot 412 determines whether or not an obstacle has been placed on the travel path. If it is determined in step S2426 that no obstacle has been placed (NO in step S2426), the work robot 412 continues autonomous travel and proceeds to step S2428.

[0377] On the other hand, if it is determined in step S2426 that an obstacle has been placed (YES in step S2426), the process proceeds to step S2427.

[0378] In step S2427, the work robot 412 autonomously travels to avoid the obstacle. After avoiding the obstacle, the work robot 412 resumes autonomous travel to the position of the lift rail 452 while again calculating its current position.

[0379] In step S2428, the work robot 412 determines whether cleaning is required on or around the travel path. If it is determined in step S2428 that cleaning is not required (NO in step S2428), the process proceeds to step S2430.

[0380] On the other hand, if it is determined in step S2428 that cleaning is necessary (YES in step S2428), the flow proceeds to step S2429.

[0381] In step S2429, the work robot 412 moves autonomously along the optimized travel path, cleaning the area along or around the travel path as it moves. In this way, the work robot 412 cleans as it travels within the equipment space 120 on its way back to the preparation space 111 after completing the maintenance work, removing any dust or dirt that has occurred during the maintenance work.

[0382] In step S2430, the work robot 412 determines whether it has reached the position of the lift rail 452. If it is determined in step S2430 that it has not reached the position of the lift rail 452 (NO in step S2430), the process returns to step S2426. On the other hand, if it is determined in step S2430 that it has reached the position of the lift rail 452 (YES in step S2430), the process proceeds to step S2431.

[0383] In step S2431, the work robot 412 moves to the travel space 110 via the lift rail 452, and then moves to the preparation space 111 by autonomously traveling on the rails 422 within the travel space 110.

[0384] In step S2432, the work robot 412 determines whether or not it has reached the preparation space 111. If it is determined in step S2432 that it has not reached the preparation space 111 (NO in step S2432), it continues autonomous traveling.

[0385] On the other hand, if it is determined in step S2432 that the preparation space 111 has been reached (YES in step S2432), the process proceeds to step S2433.

[0386] In step S2433, the work robot 412 notifies the management system 440 that the maintenance work has been completed.

[0387] (5) Maintenance Work Processing by Working Robot Next, a flow of the process when the working robot 412 performs maintenance work on the substrate processing system 142_2 that is the target of the maintenance work will be described. Fig. 25 is a flowchart showing the flow of the maintenance work processing by the working robot in the maintenance mode.

[0388] In step S2501, the working robot 412 communicates with the substrate processing system 142_2 that is the target of the maintenance work, and confirms that the substrate processing system 142_2 that is the target of the maintenance work has transitioned to the maintenance mode.

[0389] In step S2502, the work robot 412 starts the maintenance work.

[0390] In step S2503, the work robot 412 begins monitoring the area around the robot itself.

[0391] In step S2504, the work robot 412 determines whether or not the worker 482 is present within a predetermined distance from the robot. If it is determined in step S2504 that the worker 482 is present (YES in step S2504), the process proceeds to step S2505.

[0392] In step S2505, the work robot 412 temporarily suspends the maintenance work, or alternatively, the work robot 412 slows down the work speed of the maintenance work.

[0393] In step S2506, the work robot 412 transmits to the management system 440 the position information of the worker 482 who is within a predetermined distance from the robot itself.

[0394] On the other hand, if it is determined in step S2504 that the worker 482 is not present (NO in step S2504) and maintenance work is being performed, the maintenance work continues. Also, if it is determined that the worker 482 is not present (NO in step S2504) and the maintenance work has been temporarily suspended or the work speed has been slowed down, the normal maintenance work is resumed.

[0395] In step S2508, the work robot 412 determines whether or not a voice instruction has been received from the worker 482 via the mobile terminal 460.

[0396] If it is determined in step S2508 that a voice instruction has not been received (NO in step S2508), the process proceeds to step S2509. On the other hand, if it is determined in step S2508 that a voice instruction has been received (YES in step S2508), the process proceeds to step S2510.

[0397] In step S2509, the work robot 412 determines whether or not to end the maintenance work. If it is determined in step S2509 that the maintenance work is not yet ended (NO in step S2509), the process returns to step S2504.

[0398] On the other hand, if it is determined in step S2509 that the maintenance work has been completed (YES in step S2509), the maintenance work processing is terminated and a message is sent to the management system 440 indicating that the maintenance work has been completed.

[0399] In step S2510, the work robot 412 stops the maintenance work and ends the maintenance work process.

[0400] <Description of Inspection Robot> Next, we will describe the configuration of inspection robot 414. Inspection robot 414 has a configuration similar to that of mobile body 2100b (see FIG. 21A ) of working robot 412, and is configured such that sensors for inspecting rails 422 are attached to mobile body 2100b.

[0401] (1) Functional Configuration of Inspection Robot First, as the functional configuration of the inspection robot 414, the functional configuration of the control device 2103 of the inspection robot 414 will be described. Fig. 26 is a diagram showing an example of the functional configuration of an inspection robot. Note that, like the work robot 412, the control device 2103 is arranged inside the mobile body 2100b, but in the example of Fig. 26, for convenience of explanation, it is shown outside the mobile body 2100b. Therefore, the mobile body 2100b shown in Fig. 26 refers to the mobile body excluding the control device 2103.

[0402] A control program is installed in the control device 2103. By executing the control program, the control device 2103 functions as a main control unit 2601, an autonomous driving control unit 2602, a sensor data processing unit 2603, an inspection unit 2604, and a sensor data processing unit 2605, as shown in FIG.

[0403] The main control unit 2601 controls the entire inspection robot 414 while communicating with the management system 440 .

[0404] The autonomous driving control unit 2602 generates control instructions for causing the inspection robot 414 to autonomously drive on the rail 422 to be inspected, based on: instructions according to the work content received by the main control unit 2601 from the management system 440, sensor data notified from the sensor data processing unit 2603, and layout information of the first substrate processing factory 100 stored in the layout information storage unit 2606. The autonomous driving control unit 2602 also transmits the generated control instructions to the mobile unit 2100b.

[0405] The sensor data processing unit 2603 processes sensor data notified from a sensor possessed by the moving body 2100b, thereby, for example, identifying the current position and notifying the autonomous driving control unit 2602. Note that the sensor possessed by the moving body 2100b here refers to, for example, an imaging device and a laser rangefinder (not shown) attached to the support base 2101, and the sensor data notified from the sensor refers to image data, distance data, etc.

[0406] The inspection unit 2604 determines whether or not a malfunction has occurred in the rail 422 based on the sensor data notified from the sensor data processing unit 2605, and transmits the inspection results, including whether or not a malfunction has occurred, to the management system 440 via the main control unit 2601.

[0407] The sensor data processing unit 2605 processes the sensor data notified from the sensor possessed by the moving body 2100b to detect defects in the rail 422 and notify the inspection unit 2604. The sensor possessed by the moving body 2100b here refers to, for example, an imaging device attached to the support base 2101 that captures images of the rail while the moving body 2100b is traveling, and the sensor data notified from the sensor refers to image data and the like.

[0408] (2) Inspection Process of Inspection Robot Next, a description will be given of the flow of the process in which the inspection robot 414 inspects the rails 422 in the travel space 110. Fig. 27 is a flowchart showing the flow of the inspection process of the inspection robot in normal mode.

[0409] In step S2701, the inspection robot 414 receives instructions from the management system 440 according to the work content.

[0410] In step S2702, the inspection robot 414 determines whether or not an inspection start instruction has been received from the management system 440. If it is determined in step S2702 that an inspection start instruction has not been received (NO in step S2702), the inspection robot 414 waits until the inspection start instruction is received. On the other hand, if it is determined in step S2702 that an inspection start instruction has been received (YES in step S2702), the inspection robot 414 proceeds to step S2703.

[0411] In step S2703, the inspection robot 414 moves to the position of the rail to be inspected among the rails 422 in the travel space 110, and starts autonomous travel.

[0412] In step S2704, the inspection robot 414 starts inspecting the rail to be inspected.

[0413] In step S2705, the inspection robot 414 determines whether or not all rails to be inspected have been inspected. If it is determined in step S2705 that there are rails that have not been inspected (NO in step S2705), the inspection robot 414 continues autonomous traveling and inspection. On the other hand, if it is determined in step S2705 that all rails have been inspected (YES in step S2705), the process proceeds to step S2706.

[0414] In step S2706, the inspection robot 414 transmits the inspection results to the management system 440.

[0415] <Hardware Configuration of Control Device> Next, we will explain the hardware configuration of the control device 1920 of the replacement unit 411, and the control device 2103 of the work robot 412 and inspection robot 414. Note that since all of these control devices have similar hardware configurations, they will be explained together using FIG.

[0416] Fig. 28 is a diagram showing an example of the hardware configuration of a control device. As shown in Fig. 28, the control device 1920, 2103 has a processor 2801, a memory 2802, an auxiliary storage device 2803, an I / F (Interface) device 2804, and a communication device 2805. The hardware components included in the control device 1920, 2103 are connected to each other via a bus 2806.

[0417] The processor 2801 has various arithmetic devices such as a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), etc. The processor 2801 reads various programs (for example, control programs, etc.) into the memory 2802 and executes them.

[0418] The memory 2802 has a main storage device such as a ROM (Read Only Memory), a RAM (Random Access Memory), etc. The processor 2801 and the memory 2802 form a so-called computer, and the processor 2801 executes various programs read onto the memory 2802, causing the computer to realize various functions.

[0419] The auxiliary storage device 2803 stores various programs and various information used when the various programs are executed by the processor 2801 .

[0420] The I / F device 2804 is a connection device that connects to external devices (such as the operation device 2811, drive control device 2812, and sensor 2813). The I / F device 2804 accepts operations for the replacement unit 411, work robot 412, and inspection robot 414 via the operation device 2811. The operation device 2811 here includes an operation switch for turning the power on and off, an operation switch for emergency stop, and the like, that the replacement unit 411, work robot 412, and inspection robot 414 have.

[0421] Furthermore, the I / F device 2804 outputs control instructions from the control devices 1920 and 2103 to the drive control device 2812. The drive control device 2812 here includes devices that control operations based on control instructions for the movement processing of the replacement unit 411, work robot 412, and inspection robot 414, maintenance work processing of the work robot 412, etc.

[0422] Furthermore, the I / F device 2804 receives sensor data from a sensor 2813. The sensor 2813 here includes any sensor that the replacement unit 411, the work robot 412, and the inspection robot 414 have.

[0423] The communication unit 2805 is a communication device for communicating with an external unit 2814 (such as the management system 440) via the network 470.

[0424] The various programs installed in the auxiliary storage device 2803 are installed by being downloaded from the network 470 via the communication device 2805, for example.

[0425] <Summary> As is clear from the above description, the maintenance work system 400 according to the first embodiment is applicable to a substrate processing factory in which the travel space 110 for the working body 410 and the equipment space 120 in which the substrate processing system is installed and the worker 482 performs work are formed as separate spaces. This reduces the chances of contact between the working body 410 and the worker 482 while it is traveling. The replacement unit 411 is provided and is replaced autonomously on a unit-by-unit basis. This reduces the chances of contact between the replacement unit 411 and the worker 482 in the equipment space 120. When the working robot 412 travels within the equipment space 120, it has a function to prevent the working robot 412 from entering the work area of ​​the worker 482. Furthermore, when the working robot 412 performs maintenance work within the equipment space 120, it has a function to issue an alert or temporarily suspend the maintenance work if the worker 482 approaches the working robot 412. Furthermore, it has a function to stop the maintenance work when the worker 482 issues a voice command. This reduces the chances of contact between the work robot 412 and the worker 482 in the equipment space 120, and also ensures the safety of the worker 482.

[0426] In this way, according to the maintenance work system 400 according to the first embodiment, the safety of the worker 482 when performing maintenance work using the work body 410 can be improved.

[0427] In the first embodiment, the description has been given of the case where the replacement unit 411 autonomously performs separation and connection. However, the separation of the replacement unit 411 from the substrate processing system 142_2 and the connection of the replacement unit 411 to the substrate processing system 142_2 may be performed with the assistance of the work robot 412.

[0428] For example, the work robot 412 may assist in separating or connecting the replacement unit 411 in the substrate processing system that is the target of the maintenance work.

[0429] Although the first embodiment does not mention the timing of the inspection of the rails 422 by the inspection robot 414, the inspection may be performed at any timing during normal mode. Alternatively, the inspection may be performed periodically at a predetermined date and time, such as once a day, once a week, or once a month.

[0430] Furthermore, in the first embodiment described above, no detailed description was given of a method for notifying the mobile device 460 of the worker 482 when the work robot 412 detects that the worker 482 is in the work area while the work robot 412 is performing maintenance work. However, the method for notifying the mobile device 460 of the worker 482 is arbitrary.

[0431] For example, the management system 440 may acquire the location information of each worker using a location detection function and location information transmission function installed in the mobile device 460 carried by each worker. The management system 440 may then identify the worker 482 detected by the work robot 412 from the location information of the work robot 412, and notify the mobile device 460 of the identified worker 482.

[0432] Alternatively, the worker 482 may be identified from image data captured by an imaging device provided on the work robot 412, and the identified worker 482 may be notified to the management system 440. The management system 440 may then notify the mobile device 460 of the identified worker 482.

[0433] Furthermore, in the first embodiment described above, if the work robot 412 detects an obstacle or the like while traveling within the equipment space 120, the work robot 412 will avoid the obstacle or the like as it travels. However, the process that the work robot 412 may take when it detects an obstacle or the like is not limited to this. For example, if the obstacle or the like is a person, the work robot 412 may be configured to stop traveling.

[0434] In the first embodiment, the substrate processing system is assumed to be in an atmospheric state when the working robot 412 accesses the substrate processing system. However, the working robot 412 may be configured to be housed in a housing so that the working robot 412 can access the substrate processing system even when the substrate processing system is in a vacuum state.

[0435] Furthermore, in the first embodiment, the description has been given of one each of the work bodies 410, but there may be a plurality of each of the work bodies 410. For example, in the case where replacement work is performed on a unit basis instead of performing maintenance work inside the substrate processing system, the replacement work may be performed by cooperative control of the plurality of work bodies.

[0436] The present invention is not limited to the configurations described in the above embodiments, but may be combined with other elements, etc. These aspects can be changed without departing from the spirit of the present invention, and can be appropriately determined depending on the application form.

[0437] This application claims priority based on Japanese Patent Application No. 2023-146842 filed on September 11, 2023, the entire contents of which are incorporated herein by reference.

[0438] 100: First substrate processing factory 110: Travel space 111: Preparation space 120: Equipment space 121: Preparation space 400: Maintenance work system 410: Work body 411: Replacement unit 412: Work robot 413: Lifting robot 414: Inspection robot 420: Traveling mechanism 421: Changing mechanism 422: Rail 423: Opening mechanism 424: Lid 431: Crane mechanism 433: Light emitting unit 434: Marker 435: Transmitter 440: Management system 450: Lifting mechanism 451: Installation mechanism 452: Lifting rail 460: Portable terminal 610: Work body management unit 620: Traveling mechanism management unit 630: Crane mechanism management unit 640 : Elevation mechanism control unit 650 : Substrate processing system control unit 660 : Light emitting unit control unit 670 : Portable terminal control unit 680 : General control unit 801 : Lid unit 1811 : Support rails 1831 to 1834 : Mounting units

Claims

1. A maintenance work system in a substrate processing factory comprising: an equipment space in which a substrate processing system is installed; and a travel space located above or below the equipment space and through which a working body involved in maintenance work of the substrate processing system travels, the maintenance work system having the working body and a lifting mechanism for raising and lowering the working body, which has traveled through the travel space to a position above or below the substrate processing system being worked on, between the travel space and the equipment space.

2. The maintenance work system of claim 1, wherein the working body includes a replacement unit that is replaced with a portion of a unit of the substrate processing system, the replacement unit having the function of autonomously traveling in the traveling space, and being raised and lowered by the lifting mechanism to be coupled to the substrate processing system at a position after the portion of the unit has been removed.

3. The maintenance work system of claim 2, wherein the work body includes a work robot, which has the ability to autonomously travel in the travel space and is raised and lowered by the lifting mechanism to perform maintenance work on the substrate processing system installed in the equipment space, or assists the replacement unit raised and lowered by the lifting mechanism in connecting to the substrate processing system at a position after some of the units have been removed.

4. The maintenance work system described in claim 3, wherein the work robot generates the replacement unit by performing maintenance work on a unit removed from the substrate processing system, and the substrate processing factory is provided with a preparation space used when the replacement unit is generated by the work robot.

5. A maintenance work system as described in claim 3, further comprising a traveling mechanism installed in the traveling space for causing the working body to travel autonomously to a position above or below a substrate processing system to be worked on.

6. A maintenance work system as described in claim 5, wherein the substrate processing factory is provided with a management system that outputs instructions related to maintenance work based on information from the substrate processing system and information from the work body, and the processing in the substrate processing system and the operation of the work body, the traveling mechanism and the lifting mechanism are controlled based on instructions from the management system.

7. A maintenance work system as described in claim 5, wherein the traveling mechanism comprises a rail and a change mechanism that changes the position of the rail depending on the position of the lifting mechanism, and the work body autonomously travels on the rail in the traveling space.

8. The maintenance work system described in claim 2, further comprising a crane mechanism that is installed in the equipment space and transports the replacement unit to a position above a substrate processing system to be worked on, and the replacement unit is raised and lowered by the crane mechanism to be coupled to the substrate processing system at a position after the portion of the units has been removed.

9. The maintenance work system according to claim 6, wherein the work robot moves through the travel space or the equipment space according to a route instructed by the management system.

10. The maintenance work system described in claim 6, wherein after the work robot ascends and descends into the equipment space, it monitors whether there are any workers in the vicinity, and if it detects the presence of a worker, it notifies the management system which is capable of alerting the worker.

11. The maintenance work system of claim 10, wherein the work robot, when detecting the presence of the worker, stops moving, slows down the work speed of the maintenance work, stops the maintenance work, or alerts the worker.

12. The maintenance work system according to claim 9, wherein markers are installed on a ceiling or floor surface of the equipment space, and the work robot calculates its position in the equipment space by photographing the markers.

13. The maintenance work system according to claim 9, wherein the work robot calculates its position in the equipment space by communicating with the substrate processing system.

14. The maintenance work system according to claim 9, wherein the work robot, when moving within the equipment space, selects a route based on past movement times and routes recorded in a movement history.

15. The maintenance work system according to claim 6, wherein the substrate processing system transitions to the maintenance mode in response to a query from the management system or a request from the substrate processing system.

16. The maintenance work system according to claim 15, wherein the work body communicates with the substrate processing system, determines whether or not the transition to the maintenance mode has been completed, and starts maintenance work when it is determined that the transition to the maintenance mode has been completed.

17. The maintenance work system according to claim 6, wherein the substrate processing system receives a determination result as to whether or not replacement is required from the management system in response to transmitting information relating to the degree of wear of the part.

18. The maintenance work system according to claim 17, wherein the substrate processing system receives a determination result regarding the unit of a replacement unit from the management system in response to transmitting information regarding a part requiring replacement.

19. The maintenance work system according to claim 15, wherein the management system manages an inventory of parts used in the maintenance work and places orders based on a maintenance schedule.

20. The maintenance work system according to claim 6, further comprising a terminal carried by an equipment manager who manages said substrate processing system, said terminal communicating with said management system.