Air curtain device

Abstract

An air knife device is disclosed, suitable for loading equipment of semiconductor carriers. The air knife device mainly includes a housing and an air knife assembly. The housing contains multiple air distribution chambers divided by various gas diffusers. The air knife assembly is adjacent to one of the air distribution chambers of the housing and is defined as an air outlet. The air knife assembly includes at least two adjustable air knives at different horizontal planes and a defined narrow gap between them. The air knife assembly receives gas passing through the air distribution chambers. After the gas is adjusted by the narrow gap and the two adjustable air knives, it presents a directional linear airflow suitable for blowing towards the opening of the semiconductor carrier. This prevents dust and moisture from entering the semiconductor carrier during semiconductor device handling, thereby improving the preservation quality of the semiconductor devices and increasing process yield.

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