Collimator for a physical vapor deposition (PVD) chamber

Description

[0001] FIG. 1 is a top isometric view of a collimator for physical vapor deposition chamber, showing our new design.

[0002] FIG. 2 is a bottom isometric view thereof.

[0003] FIG. 3 is a top plan view thereof.

[0004] FIG. 4 is a bottom plan view thereof.

[0005] FIG. 5 is a front elevation view thereof.

[0006] FIG. 6 is a back elevation view thereof.

[0007] FIG. 7 is a left elevation view thereof.

[0008] FIG. 8 is a right elevation view thereof; and,

[0009] FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 3.

[0010] The dash-dash broken lines in the drawings illustrate portions of the article that form no part of the claimed design. The dot-dash broken line in FIG. 3 illustrates the indication of the cross-section and forms no part of the claimed design.

Claims

The ornamental design for a collimator for a physical vapor deposition (PVD) chamber, as shown and described.

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