Method and apparatus for generating recipe file of measurement point, and device and storage medium

Abstract

Provided in the present invention are a method and apparatus for generating a recipe file for a measurement point, and a device and a storage medium. The method comprises: acquiring measurement parameters and input quantities, which correspond to the measurement parameters; filling a measurement parameter template, which contains the measurement parameters, with the input quantities; performing analysis in combination with a measurement point and the measurement parameter template filled with the input quantities, so as to obtain a measurement configuration file of the measurement point; and generating a recipe file for the measurement point according to the measurement configuration file of the measurement point and a design layout. According to the present invention, a measurement configuration template with measurement parameters can be flexibly and accurately selected according to a requirement of a user for the measurement parameters, thereby efficiently and accurately generating a corresponding recipe file.

Description

Method, device, equipment and storage medium for generating recipe file of measurement point Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a method, device, equipment and storage medium for generating a recipe file of a measurement point. Background Art

[0002] In the prior art, checking the conformance between a wafer scan and the wafer's design layout is accomplished offline using a measurement recipe file, as shown in Figure 10. However, the measurement parameters input in the prior art are specific parameters based on specific rules. These specific parameters are often few in number and rigid in form, necessitating an algorithm to infer the remaining measurement parameters before generating the measurement recipe for the measurement points. Inferring the remaining measurement parameters through an algorithm consumes significant computing resources, slowing down the generation of the measurement recipe. Furthermore, the inferred measurement parameters may lack accuracy and may not necessarily reflect the user's needs. After generating the recipe file, the user must review and modify the measurement parameters for each measurement point one by one, increasing their workload and reducing their user experience. Furthermore, the measurement results for some actual wafer scans, especially those with unique or complex patterns, are poor. Furthermore, the inference method used in the prior art often generates redundant measurement information. For example, a measurement location may have n possible measurement points, but the user often only requires one or two of them. As shown in Figure 11, using existing technology will infer and generate four locations to be measured, but the user may only need to measure location 1. How to properly solve the above problem has become an urgent issue to be solved in the industry.

[0003] Summary of the Invention

[0004] Embodiments of the present invention provide a method, apparatus, device, and storage medium for generating a recipe file of a measurement point, so as to accurately and efficiently generate the recipe file of the measurement point.

[0005] According to a first aspect of the present invention, a method for generating a recipe file of a measurement point is provided, the method comprising:

[0006] Obtaining measurement parameters and input quantities corresponding to the measurement parameters;

[0007] Filling the input quantity into a measurement parameter template containing the measurement parameters;

[0008] Analyze the measurement point and the measurement parameter template after filling in the input quantity to obtain a measurement configuration file of the measurement point;

[0009] Generate a recipe file for the measurement point according to the measurement configuration file and the design layout of the measurement point.

[0010] In one embodiment, filling the input quantity into a measurement parameter template containing the measurement parameter includes:

[0011] If a measurement parameter template including the measurement parameter exists in the preset measurement parameter template, the measurement parameter template is directly used; or

[0012] If there is no measurement parameter template including the measurement parameter in the preset measurement parameter template, creating a measurement parameter template including the measurement parameter;

[0013] The corresponding input quantity is filled in each measurement parameter in the measurement parameter template.

[0014] In one embodiment, it further includes:

[0015] Obtain the design layout and measurement point location information;

[0016] The measurement points are determined according to the design layout and the position information of the measurement points.

[0017] In one embodiment, the analysis of the combined measurement point and the measurement parameter template after filling in the input quantity to obtain the measurement configuration file of the measurement point includes:

[0018] Generating a corresponding measurement parameter template for each of the measurement points;

[0019] Analyze each measurement point and the corresponding measurement parameter template with input quantity to obtain the measurement configuration file of each measurement point.

[0020] In one embodiment, it further includes:

[0021] In the interface displaying the recipe file, view and / or modify the input quantity of the measurement parameter corresponding to each measurement point in the recipe file;

[0022] Replace the original recipe file with the modified recipe file.

[0023] In one embodiment, it further includes:

[0024] Align the wafer scan image with the design layout through alignment diagnostics;

[0025] The recipe file is run on the aligned silicon wafer scan to perform measurement and obtain measurement values.

[0026] In one embodiment, the further embodiment further comprises:

[0027] The measured value and the recipe file are sent to an intelligent terminal, which has a function of displaying the measured value and the recipe file, and a function of modifying the recipe file.

[0028] In one embodiment, it further includes:

[0029] If there is no data in the field to be desensitized, no desensitization operation will be performed.

[0030] According to a second aspect of the present invention, an embodiment of the present application provides a device for generating a recipe file of a measurement point, the generating device comprising:

[0031] An acquisition module, configured to acquire measurement parameters and input quantities corresponding to the measurement parameters;

[0032] A filling module, configured to fill in the input quantity in a measurement parameter template containing the measurement parameter;

[0033] an analysis module, configured to analyze the measurement point and the measurement parameter template after the input quantity is filled in, to obtain a measurement configuration file for the measurement point;

[0034] The generating module is used to generate a recipe file of the measurement point according to the measurement configuration file and the design layout of the measurement point.

[0035] According to a third aspect of the present invention, an embodiment of the present application provides an electronic device, the electronic device comprising: a processor and a memory storing computer program instructions;

[0036] When the processor executes the computer program instructions, the method for generating the recipe file of the measurement point as shown in the first aspect is implemented.

[0037] According to the fourth aspect of the present invention, an embodiment of the present application provides a computer-readable storage medium, on which computer program instructions are stored. When the computer program instructions are executed by a processor, the method for generating a recipe file of a measurement point as shown in the first aspect is implemented.

[0038] In summary, the present invention provides a method and apparatus for generating a recipe file for a measurement point. The method comprises: obtaining measurement parameters and input quantities corresponding to the measurement parameters; entering the input quantities into a measurement parameter template containing the measurement parameters; analyzing the measurement points and the measurement parameter template after entering the input quantities to obtain a measurement configuration file for the measurement points; and generating a recipe file for the measurement points based on the measurement configuration file and a design layout for the measurement points. The present invention can flexibly and accurately select a measurement configuration template that contains the measurement parameters based on the user's measurement parameter requirements, thereby efficiently and accurately generating the corresponding recipe file.

[0039] Other features and advantages of the present invention will be described in the following description, and in part will become apparent from the description, or will be understood by practicing the present invention. The purposes and other advantages of the present invention can be realized and obtained by the structures particularly pointed out in the written description, claims, and drawings.

[0040] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0042] FIG1 is a flow chart of a method for generating a recipe file of a measurement point provided by an embodiment of the present invention;

[0043] FIG2 is a flow chart of another method for generating a recipe file for measurement points provided by an embodiment of the present invention;

[0044] 3 is a flow chart of another method for generating a recipe file for measurement points provided by an embodiment of the present invention;

[0045] FIG4 is a flow chart of another method for generating a recipe file of measurement points provided by an embodiment of the present invention;

[0046] 5 is a flow chart of another method for generating a recipe file for measurement points provided by an embodiment of the present invention;

[0047] 6 is a flow chart of another method for generating a recipe file for measurement points provided by an embodiment of the present invention;

[0048] 7 is a flow chart of another method for generating a recipe file for measurement points provided by an embodiment of the present invention;

[0049] FIG8 is a structural diagram of a device for generating a recipe file for measurement points provided by an embodiment of the present invention;

[0050] FIG9 is a structural diagram of an electronic device provided by an embodiment of the present invention;

[0051] FIG10 is a flow chart of a technical solution of the prior art of the present invention;

[0052] FIG11 is a schematic diagram of the measurement position of a complex pattern of the present invention;

[0053] FIG12 is a flowchart of generating a measurement configuration file according to an embodiment of the present invention;

[0054] FIG13 is a flowchart of generating a recipe file according to an embodiment of the present invention;

[0055] FIG14 is a schematic diagram of a graphical interface of a measurement configuration file provided by an embodiment of the present invention;

[0056] FIG15 is a schematic diagram of a display interface for a recipe file according to an embodiment of the present invention. DETAILED DESCRIPTION

[0057] In order to make the above and other features and advantages of the present invention more clear, the present invention is further described below with reference to the accompanying drawings. It should be understood that the specific embodiments given herein are for the purpose of explaining to those skilled in the art and are only exemplary and not restrictive.

[0058] In the following description, many specific details are set forth to provide a thorough understanding of the present invention. However, it will be apparent to one of ordinary skill in the art that it is not necessary to employ these specific details to practice the present invention. In other cases, well-known steps or operations are not described in detail to avoid obscuring the present invention.

[0059] The technical solution of this application provides a rich set of measurement parameter templates. These measurement parameter modules include a variety of measurement parameters, such as various scanning direction and imaging parameter templates, various measurement type templates, and various measurement algorithm templates. By viewing the design layout and measurement parameters, users can independently select the measurement parameter templates required for each measurement point and generate a measurement configuration file. The flowchart for generating the measurement configuration file is shown in Figure 12. Based on the measurement configuration file and the design layout information provided by the user, a recipe file for a large number of measurement points can be quickly and flexibly generated. After the recipe file is generated, the user can easily view the imaging range, measurement area, measurement parameters, measurement frame, and other information of each measurement point through the intuitive display feature, and can quickly modify it to enhance the accuracy of the recipe file and ensure that the recipe file meets the user's measurement requirements. The flowchart for generating, modifying, and saving the recipe file is shown in Figure 13. Before measurement, the design layout and silicon wafer scan image with high precision need to be aligned through the special diagnosis. The recipe file can be automatically run on the scanning electron microscope (SEM) machine to achieve fast and accurate measurement. Moreover, the scanning electron microscope machine has the function of conveniently viewing, saving and exporting measurement results. For users who have clear measurement requirements and know how to set measurement parameter information, especially optical proximity correction (OPC) engineers who are familiar with chip design, they can flexibly select measurement parameters based on the technical solution of this application. If the user does not adapt to the appropriate measurement parameter module, he can directly select the measurement parameters according to his own needs, and then form a customized measurement parameter template, so that the recipe file can be easily and quickly produced. Compared with the existing technology, it not only increases the flexibility of producing measurement parameter templates, but also saves the time of generating recipe files and the accuracy of the produced recipe files.

[0060] FIG1 is a flow chart showing a method for generating a recipe file of a measurement point according to an exemplary embodiment. As shown in FIG1 , the generating method includes the following steps S11-S14:

[0061] In step S11, a measurement parameter and an input quantity corresponding to the measurement parameter are obtained;

[0062] In step S12, the input quantity is filled in a measurement parameter template containing the measurement parameters;

[0063] In step S13, the measurement point and the measurement parameter template after the input quantity is filled in are analyzed to obtain a measurement configuration file of the measurement point;

[0064] In step S14 , a recipe file of the measurement point is generated according to the measurement configuration file of the measurement point and the design layout.

[0065] In one embodiment, at least one measurement parameter is obtained by receiving user input based on the user's intent. The specific input quantities of these measurement parameters can be obtained later, particularly after a measurement parameter template is formed, and the input quantities corresponding to these measurement parameters are output in the measurement parameter template. At least one measurement point is determined based on the user-provided design layout and the measurement point location information. At least one measurement configuration file is obtained by analyzing the at least one measurement point and the measurement parameter template with the input quantities filled in. Finally, a recipe file for the measurement point is obtained based on the measurement configuration file and the design layout.

[0066] For example, if measurement parameter templates appear frequently in historical data, multiple frequently occurring measurement parameter templates can be prepared in advance for users to directly select. For example, measurement parameter templates for different scanning directions and imaging, measurement parameter templates for different measurement types, and measurement parameter templates for different measurement algorithms.

[0067] Users configure parameters by browsing and selecting appropriate measurement parameter templates within the scanning electron microscope. Given the diverse range of measurement parameters, users can independently select different measurement template parameters based on their measurement needs. For specialized measurement requirements, users can easily create new measurement template parameters, giving them greater control over measurement information. By flexibly selecting measurement parameter templates corresponding to individual measurement points, measurement configuration files can be easily created.

[0068] The technical solution in this embodiment can flexibly and accurately select a measurement configuration template with measurement parameters according to the user's requirements for the measurement parameters, thereby efficiently and accurately generating a corresponding recipe file.

[0069] In one embodiment, as shown in FIG2 , step S12 includes the following steps S21 - S23:

[0070] In step S21, if there is a measurement parameter template including the measurement parameter in the preset measurement parameter template, the measurement parameter template is directly used;

[0071] In step S22, if there is no measurement parameter template containing the measurement parameter in the preset measurement parameter template, a measurement parameter template containing the measurement parameter is created;

[0072] In step S23, the corresponding input quantity is filled into each measurement parameter in the measurement parameter template.

[0073] In one embodiment, if a measurement parameter template containing the user-entered measurement parameters exists among the preset measurement parameter templates, that measurement parameter template is used directly; or if none of the preset measurement parameter templates contain the user-entered measurement parameters, a measurement parameter template containing the measurement parameters is created. The corresponding input quantities are entered into each measurement parameter in the measurement parameter template. For example, if the user-entered measurement parameters are imaging area, scanning direction, and measurement cursor size, and none of the preset measurement parameter templates contain the scanning direction, the user can create a new measurement parameter template that includes the imaging area, scanning direction, and measurement cursor size. The corresponding input quantities are entered into each measurement parameter in this new measurement parameter template to facilitate subsequent generation of a measurement configuration file.

[0074] In one embodiment, as shown in FIG3 , the following steps S31-S32 are further included:

[0075] In step S31, the design layout and the position information of the measurement points are obtained;

[0076] In step S32, the measurement points are determined according to the design layout and the position information of the measurement points.

[0077] In one embodiment, a user-provided design layout and measurement point location information are obtained, and the measurement point is determined based on the design layout and the measurement point location information. For example, an area is marked on the user-provided design layout, and the area is the measurement point location information. Within the area, a point is determined through analysis, and this point is the measurement point.

[0078] In one embodiment, as shown in FIG4 , step S13 includes the following steps S41 - S42:

[0079] In step S41, a corresponding measurement parameter template is generated for each of the measurement points;

[0080] In step S42, each measurement point and the corresponding measurement parameter template with input quantity are analyzed to obtain a measurement configuration file for each measurement point.

[0081] In one embodiment, a corresponding measurement parameter template is generated for each measurement point, wherein each measurement parameter template is independent of each other. Analysis is performed on each measurement point and the corresponding measurement parameter template with input quantities to obtain a measurement configuration file for each measurement point. The measurement configuration file includes the position information of the scanning electron microscope imaging point (GP, Gauge Point), image capture conditions (CG, Capture Gauge Point Image), scanning electron microscope imaging rough alignment (RA, Roughness Alignment) parameters, auto focus parameters (AFC, Auto Focus), measurement point position information (MP, Measurement Point), measurement parameters, etc.

[0082] In one embodiment, as shown in FIG5 , the following steps S51-S52 are further included:

[0083] In step S51, in the interface displaying the recipe file, the input amount of the measurement parameter corresponding to each measurement point in the recipe file is viewed and / or modified;

[0084] In step S52, the modified recipe file is used to replace the original recipe file.

[0085] In one embodiment, in the interface displaying the recipe file, the input quantities of the measurement parameters corresponding to each measurement point in the recipe file are viewed and / or modified. The original recipe file is replaced with the modified recipe file. Figure 14 is a graphical interface of the measurement configuration file. In the graphical interface of the configuration file, the upper left corner is a list of measurement templates, which includes measurement parameter template 1, measurement parameter template 2, measurement parameter template 3, etc. The upper right corner is the template parameters, which include the measurement type, measurement cursor, measurement algorithm, measurement judgment value, etc. in the position information of the measurement point, as well as the color image conditions, scanning direction, imaging range and automatic focusing parameters in the rough alignment and imaging conditions of the scanning electron microscope. Below is the measurement configuration file, including the design layout path, measurement point parameters, measurement point labels, coordinates and various templates.

[0086] In one embodiment, as shown in FIG6 , the following steps S61-62 are further included:

[0087] In step S61, the wafer scan image and the design layout are aligned through alignment diagnostics;

[0088] In step S62, the recipe file is run on the aligned wafer scan to perform measurement and obtain measurement values.

[0089] In one embodiment, the measurement configuration file generated in the previous embodiment is combined with the wafer design layout to establish a corresponding relationship between the wafer design layout and the measurement configuration file. A large number of measurement point recipe files are then automatically and efficiently generated offline. Conventional techniques generate measurement point recipe files online, resulting in the number of recipe files generated for a single batch typically being less than 10.

[0090] Aligning the wafer scan image with the design layout through alignment diagnostics can improve measurement results and enhance compatibility with various wafers, especially for those with special and complex patterns.

[0091] Based on the intuitive display features of the interface, as shown in Figure 15, users can view the measurement parameters of each measurement point in the recipe file on the interface, such as the imaging area, scanning direction, measurement type, measurement cursor size, measurement algorithm parameters, etc. If the above parameters in the recipe file are incorrect, the user can modify the parameters and save them in a timely manner, ultimately ensuring that the recipe file meets the user's measurement requirements. In Figure 15, the upper left corner is an intuitive graphical display of the position information of the electron microscope imaging point, the upper right corner is a list of the position information of the electron microscope imaging point, the lower right corner is the parameters of the electron microscope imaging point position information, and the lower left corner is an error message automatically prompted by the system.

[0092] After saving the recipe file, the user imports the recipe file on the scanning electron microscope machine, executes the recipe file on the scanning electron microscope machine, and obtains the measurement results, thereby facilitating the sharing of recipe files and measurement values. Based on the scan image of the high-precision scanning electron microscope, the scan image and the design layout are aligned through alignment features. In this way, even if there are large morphological differences between the design layout and the scan image to a certain extent, the scan image and the design layout can be accurately aligned, thereby ensuring that an accurate scan image is captured during the automatic execution of the configuration file on the scanning electron microscope machine. And after obtaining the scan image, through the set measurement parameters, measurements can be performed on the aligned scan image and measurement values ​​can be obtained.

[0093] In one embodiment, as shown in FIG7 , the following step S71 is further included:

[0094] In step S71 , the measurement value and the recipe file are sent to a smart terminal, which has a function of displaying the measurement value and the recipe file, and a function of modifying the recipe file.

[0095] In one embodiment, the preferred embodiment of the smart terminal is a scanning electron microscope, but it is not limited to a scanning electron microscope. Any electronic device that has the function of displaying measurement values ​​and recipe files, and the function of modifying the recipe files can be used.

[0096] Once the recipe file is measured, the measured values ​​can be imported offline, and the measurement images and results can be easily viewed. If the measurement parameters do not meet user requirements, the user can further modify them and re-measure offline until satisfactory results are obtained. The user can also export and save these results as needed.

[0097] In one embodiment, FIG8 is a block diagram of a device for generating a recipe file for a measurement point according to an exemplary embodiment. As shown in FIG8 , the device includes an acquisition module 81 , a filling module 82 , an analysis module 83 , and a generation module 84 .

[0098] The acquisition module 81 is used to acquire measurement parameters and input quantities corresponding to the measurement parameters;

[0099] The filling module 82 is used to fill the input quantity into the measurement parameter template containing the measurement parameters;

[0100] The analysis module 83 is used to analyze the measurement point and the measurement parameter template after filling in the input quantity to obtain the measurement configuration file of the measurement point;

[0101] The generating module 84 is configured to generate a recipe file for the measurement point according to the measurement configuration file and the design layout of the measurement point.

[0102] The included acquisition module 81 , filling module 82 , analysis module 83 and generation module 84 are controlled to execute the method for generating the recipe file of the measurement points described in any of the above embodiments.

[0103] As shown in FIG9 , the present invention provides an electronic device 900 , which includes: a processor 901 and a memory 902 storing computer program instructions;

[0104] When the processor 901 executes the computer program instructions, it obtains the measurement parameters and the input quantities corresponding to the measurement parameters; fills the input quantities into the measurement parameter template containing the measurement parameters; analyzes the measurement points and the measurement parameter template after filling in the input quantities to obtain the measurement configuration file of the measurement points; and generates a recipe file of the measurement points based on the measurement configuration file of the measurement points and the design layout.

[0105] The present invention provides a computer-readable storage medium having computer program instructions stored thereon. When the computer program instructions are executed by a processor, the computer program instructions are configured to obtain a measurement parameter and an input quantity corresponding to the measurement parameter; fill in the input quantity in a measurement parameter template containing the measurement parameter; analyze a measurement point and the measurement parameter template after filling in the input quantity to obtain a measurement configuration file for the measurement point; and generate a recipe file for the measurement point based on the measurement configuration file and a design layout of the measurement point.

[0106] It should be understood that the specific features, operations and details described herein above with respect to the method of the present invention may also be similarly applied to the apparatus and system of the present invention, or vice versa. In addition, each step of the method of the present invention described above may be performed by the corresponding components or units of the apparatus or system of the present invention.

[0107] It should be understood that the various modules / units of the apparatus of the present invention may be implemented in whole or in part by software, hardware, firmware, or a combination thereof. Each module / unit may be embedded in a processor of a computer device in the form of hardware or firmware or may be independent of the processor, or may be stored in a memory of a computer device in the form of software for the processor to call to execute the operations of each module / unit. Each module / unit may be implemented as an independent component or module, or two or more modules / units may be implemented as a single component or module.

[0108] In one embodiment, a computer device is provided, comprising a memory and a processor. The memory stores computer instructions executable by the processor, which, when executed by the processor, instruct the processor to perform the steps of the method according to an embodiment of the present invention. The computer device can be broadly defined as a server, a terminal, or any other electronic device with the necessary computing and / or processing capabilities. In one embodiment, the computer device can include a processor, memory, a network interface, a communication interface, etc. connected via a system bus. The processor of the computer device can be used to provide the necessary computing, processing, and / or control capabilities. The memory of the computer device can include a non-volatile storage medium and an internal memory. An operating system, a computer program, etc. can be stored in or on the non-volatile storage medium. The internal memory can provide an environment for the operation of the operating system and computer program in the non-volatile storage medium. The network interface and communication interface of the computer device can be used to connect to and communicate with external devices via a network. When the computer program is executed by the processor, the steps of the method according to the present invention are performed.

[0109] The present invention can be implemented as a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, causes the steps of the method of an embodiment of the present invention to be performed. In one embodiment, the computer program is distributed on a plurality of computer devices or processors coupled to a network so that the computer program is stored, accessed, and executed in a distributed manner by one or more computer devices or processors. A single method step / operation, or two or more method steps / operations, can be performed by a single computer device or processor or by two or more computer devices or processors. One or more method steps / operations can be performed by one or more computer devices or processors, and one or more other method steps / operations can be performed by one or more other computer devices or processors. One or more computer devices or processors can perform a single method step / operation, or perform two or more method steps / operations.

[0110] It will be understood by those skilled in the art that the method steps of the present invention can be performed by instructing relevant hardware such as a computer device or a processor through a computer program, and the computer program can be stored in a non-transitory computer-readable storage medium, which causes the steps of the present invention to be performed when the computer program is executed. Depending on the circumstances, any reference to memory, storage, database or other media herein may include non-volatile and / or volatile memory. Examples of non-volatile memory include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), flash memory, magnetic tape, floppy disk, magneto-optical data storage device, optical data storage device, hard disk, solid-state disk, etc. Examples of volatile memory include random access memory (RAM), external cache memory, etc.

[0111] The various technical features described above can be combined arbitrarily. Although not all possible combinations of these technical features are described, any combination of these technical features should be considered to be covered by this specification as long as such combination does not conflict.

[0112] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for generating a recipe file of a measurement point, characterized in that: include: Obtaining measurement parameters and input quantities corresponding to the measurement parameters; Filling the input quantity into a measurement parameter template including the measurement parameter; Analyze the measurement parameter template in combination with the measurement point and after the input quantity is filled in, to obtain a measurement configuration file of the measurement point; Generate a recipe file of the measurement point according to the measurement configuration file and the design layout of the measurement point.

2. The method for generating a recipe file of a measurement point according to claim 1, characterized in that: Filling the input quantity into a measurement parameter template containing the measurement parameter comprises: If there is a measurement parameter template including the measurement parameter in the preset measurement parameter template, directly use the measurement parameter template; or If there is no measurement parameter template including the measurement parameter in the preset measurement parameter template, creating a measurement parameter template including the measurement parameter; The corresponding input quantity is filled in each measurement parameter in the measurement parameter template.

3. The method for generating a recipe file of a measurement point according to claim 1, characterized in that: Also includes: Obtain the location information of the design layout and measurement points; The measurement points are determined according to the design layout and the position information of the measurement points.

4. The method for generating a recipe file of a measurement point according to claim 1, characterized in that: The combining the measurement point and the measurement parameter template after filling in the input quantity to obtain the measurement configuration file of the measurement point includes: Generating a corresponding measurement parameter template for each of the measurement points; Each measurement point and the corresponding measurement parameter template with input quantity are analyzed to obtain the measurement configuration file of each measurement point.

5. The method for generating a recipe file of a measurement point according to claim 1, characterized in that: Also includes: In the interface displaying the recipe file, viewing and / or modifying the input quantity of the measurement parameter corresponding to each measurement point in the recipe file; Replace the original recipe file with the modified recipe file.

6. The method for generating a recipe file of a measurement point according to claim 1, characterized in that: Also includes: Align the silicon wafer scan image with the design layout through alignment diagnostics; The recipe file is run on the aligned silicon wafer scan to perform measurement and obtain measurement values.

7. The method for generating a recipe file of a measurement point according to claim 6, characterized in that: Also includes: The measured value and the recipe file are sent to an intelligent terminal, and the intelligent terminal has a function of displaying the measured value and the recipe file, and a function of modifying the recipe file.

8. A device for generating a recipe file of a measurement point, characterized in that: The generating device comprises: An acquisition module, used for acquiring measurement parameters and input quantities corresponding to the measurement parameters; A filling module, used to fill in the input quantity in a measurement parameter template containing the measurement parameter; An analysis module, used for analyzing the measurement point and the measurement parameter template after the input quantity is filled in, to obtain a measurement configuration file of the measurement point; The generating module is used to generate a recipe file of the measuring point according to the measuring configuration file and the design layout of the measuring point.

9. An electronic device, characterized in that: The electronic device comprises: a processor and a memory storing computer program instructions; When the processor executes the computer program instructions, the method for generating a recipe file of a measurement point according to any one of claims 1 to 7 is implemented.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer program instructions, and when the computer program instructions are executed by a processor, the method for generating a recipe file of a measurement point according to any one of claims 1 to 7 is implemented.

Images