Work assistance method and work assistance system

Abstract

In the present invention, information pertaining to a device state of a substrate processing device is collected, and on the basis of the state information, a determination is made as to whether manipulation of a site inside the device is possible. If manipulation of the site is risky, determination is made that manipulation of said site is impossible. A smart-glass display unit performs a color-tinted display based on a determination result with respect to a site that is in sight of a worker (visually recognizable site), among sites for which a determination was made. Meanwhile, the color-tinted display is not performed for a site that the worker is unable to view. The worker can easily and unambiguously recognize whether a site to be worked on can be manipulated regardless of the circumstances of sites that cannot be viewed.

Description

Work support method and work support system

[0001] The present invention relates to a method and system for supporting operations when performing predetermined operations such as maintenance operations on industrial equipment such as substrate processing apparatuses that perform predetermined operations on substrates. Substrates to be processed by the substrate processing apparatuses include, for example, semiconductor substrates, substrates for liquid crystal display devices, substrates for flat panel displays (FPDs), substrates for optical disks, substrates for magnetic disks, and substrates for solar cells.

[0002] Conventionally, in the manufacturing process of semiconductor devices, substrate processing apparatuses are used to perform various processes on substrates such as semiconductor substrates. Examples of substrate processing apparatuses include substrate cleaning apparatuses, heat treatment apparatuses, and inspection apparatuses. Typically, a large number of substrate processing apparatuses are arranged in an orderly fashion in a large clean room. Maintenance is performed on these substrate processing apparatuses at appropriate intervals. Patent Document 1 describes arranging a large number of substrate processing apparatuses at a relatively high density in a clean room and performing maintenance on the substrate processing apparatuses.

[0003] Japanese Patent Application Laid-Open No. 2020-4866

[0004] When performing maintenance on a substrate processing apparatus, workers may open the chamber cover or perform work on the piping. However, the inside of the chamber may be in a dangerous state. For example, when the chamber is purged with nitrogen gas, the chamber is in a dangerous state with almost no oxygen present. Also, immediately after using a chemical solution such as hydrofluoric acid, the chamber may be filled with chemical vapor or have droplets of the chemical solution attached. Furthermore, the residual pressure in the piping surrounding the chamber may be high.

[0005] If an operator opens the cover when the inside of the chamber is in a dangerous state, an accident may occur. Therefore, the cover should not be opened when the inside of the chamber is in a dangerous state, but because such a dangerous state is invisible to the human eye, it is difficult for the operator to determine whether or not it is okay to open the cover.

[0006] The present invention has been made in consideration of the above-mentioned problems, and aims to provide a work assistance method and a work assistance system that allow a worker to easily recognize whether or not an operation can be performed on a part that is the target of work.

[0007] In order to solve the above problem, a first aspect of the present invention is a work support method for performing specified work on industrial equipment, comprising: an information acquisition step of collecting status information regarding the device status of the industrial equipment; a determination step of determining whether or not operation is possible on a visible portion of the industrial equipment based on the status information; and a display step of displaying an annotation on the visible portion on a mobile terminal equipped with a display unit and a communication unit based on the determination result of the determination step.

[0008] In addition, a second aspect is a work support method according to the first aspect, wherein in the display step, the mobile terminal displays the visible area that is determined to be inoperable in the determination step in a first display color.

[0009] In addition, a third aspect is a work support method according to the second aspect, wherein in the display step, the mobile terminal displays the visible area that is determined to be operable in the determination step in a second display color.

[0010] In addition, a fourth aspect is a work support method according to the third aspect, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, and a processing chamber of the substrate processing apparatus is provided with an inner cover and an outer cover, and in the display step, when the inside of the processing chamber is in a dangerous state, the outer cover is colored in the second display color when the inner cover and the outer cover are closed, and when the outer cover is open, the inner cover is colored in the first display color.

[0011] A fifth aspect is the work supporting method according to the fourth aspect, wherein the substrate processing apparatus is a substrate cleaning apparatus that uses a processing gas and a processing liquid in the processing chamber.

[0012] In addition, a sixth aspect is the task assistance method according to any one of the first to fifth aspects, wherein the mobile terminal is a pair of smart glasses.

[0013] Furthermore, a seventh aspect is a work assistance system for performing specified work on industrial equipment, comprising a mobile terminal having a display unit and a communication unit, and a judgment unit that judges whether or not it is possible to operate a visible part of the industrial equipment based on status information regarding the device status of the industrial equipment, and the display unit displays an annotation on the visible part based on the judgment result by the judgment unit.

[0014] In an eighth aspect, in the work assistance system according to the seventh aspect, the display unit displays the visible portion determined by the determination unit to be inoperable in a first display color.

[0015] In a ninth aspect, in the work assistance system according to the eighth aspect, the display unit displays the visible portion determined by the determination unit to be operable in a second display color.

[0016] In a tenth aspect, in the work support system according to the ninth aspect, the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate, and the processing chamber of the substrate processing apparatus is provided with an inner cover and an outer cover, and when the inside of the processing chamber is in a dangerous state, the display unit displays the outer cover in the second display color when the inner cover and the outer cover are closed, and displays the inner cover in the first display color when the outer cover is open.

[0017] In an eleventh aspect, in the work support system according to the tenth aspect, the substrate processing apparatus is a substrate cleaning apparatus that uses a processing gas and a processing liquid in the processing chamber.

[0018] In addition, a twelfth aspect is the work assistance system according to any one of the seventh to eleventh aspects, wherein the mobile terminal is a pair of smart glasses.

[0019] According to the work support methods of the first to sixth aspects, a determination is made based on the collected status information as to whether or not operations can be performed on visible parts of industrial equipment, and an annotation is displayed on the visible parts based on the determination result, so that the worker can easily recognize whether or not operations can be performed on the parts to be worked on, regardless of the status of parts that cannot be seen.

[0020] According to the work support systems of the seventh to twelfth aspects, a determination is made based on the collected status information as to whether or not operations can be performed on visible parts of industrial equipment, and annotations are displayed on the visible parts based on the determination results. This allows workers to easily recognize whether or not they can operate the parts that are the subject of work, regardless of the status of parts that cannot be seen.

[0021] FIG. 1 is a diagram schematically showing a general configuration of a work support system according to the present invention. FIG. 2 is a plan view showing an example of a layout of a plurality of substrate processing apparatuses. FIG. 3 is a diagram showing the configuration of one substrate processing apparatus. FIG. 4 is a diagram showing a general configuration of a processing unit. FIG. 5 is a perspective view showing the appearance of smart glasses. FIG. 6 is a block diagram showing the functional configuration of a control unit of the smart glasses, a server, a work support terminal, and a substrate processing apparatus. FIG. 7 is a flowchart showing the procedure of a work support method according to the present invention. FIG. 8 is a diagram showing an example of a spatial mesh. FIG. 9 is a diagram schematically showing the relative positional relationship between a reference position and parts of a substrate processing apparatus. FIG. 10 is a diagram showing an example of a colored display on an outer cover. FIG. 11 is a diagram showing an example of a colored display on an inner cover when the outer cover is open.

[0022] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Hereinafter, expressions indicating relative or absolute positional relationships (e.g., "in one direction," "along one direction," "parallel," "orthogonal," "center," "concentric," "coaxial," etc.) not only strictly represent the positional relationship but also represent a state of relative angular or distance displacement within a tolerance or a range that provides equivalent functionality, unless otherwise specified. Furthermore, expressions indicating an equal state (e.g., "identical," "equal," "homogeneous," etc.) not only represent a state of strict quantitative equality but also represent a state of difference that provides a tolerance or equivalent functionality, unless otherwise specified. Furthermore, expressions indicating a shape (e.g., "circular," "square," "cylindrical," etc.) not only represent a geometrically strict shape but also represent a shape within a range that provides equivalent functionality, such as irregularities or chamfers, unless otherwise specified. Furthermore, expressions such as "comprise," "comprise," "include," "have," etc., regarding components, are not exclusive expressions that exclude the presence of other components. Furthermore, the expression "at least one of A, B, and C" includes "A only," "B only," "C only," "any two of A, B, and C," and "all of A, B, and C."

[0023] FIG. 1 is a diagram illustrating a schematic configuration of a work support system according to the present invention. The work support system according to the present invention includes a plurality of substrate processing apparatuses 50, smart glasses 10, a server 70, and a work support terminal 80. Controllers of the smart glasses 10 and the substrate processing apparatuses 50 are connected to an information and communication network 5 (e.g., the Internet) via wireless communication. The work support terminal 80 and the server 70 are connected to the information and communication network 5 via a wired connection. Information can be transmitted and received between devices connected to the information and communication network 5, for example, information can be exchanged between the smart glasses 10 and the work support terminal 80. Note that whether each device is connected to the information and communication network 5 wirelessly or via a wired connection is not limited to the above example and can be any suitable connection (e.g., the work support terminal 80 may be connected to the information and communication network 5 wirelessly).

[0024] 2 is a plan view showing an example of the layout of a plurality of substrate processing apparatuses 50. As shown in FIG. 2, a plurality of substrate processing apparatuses 50 are arranged in a clean room 40 in a regular line at regular intervals. The clean room 40 is provided, for example, in a semiconductor device manufacturing factory, and is a room in which a certain level of air cleanliness is ensured and temperature and humidity are controlled. In this embodiment, a plurality of substrate processing apparatuses 50 of the same type and model are arranged in the relatively large clean room 40. Therefore, it is difficult for an operator to distinguish the substrate processing apparatuses 50 arranged in the clean room 40 from their appearance alone.

[0025] 3 is a diagram showing the configuration of one substrate processing apparatus 50. In this embodiment, the substrate processing apparatus 50 is, for example, a single-wafer substrate cleaning apparatus that cleans substrates one by one. The substrate processing apparatus 50 has an indexer 51 and a plurality of processing units 52. A carrier C that stores a plurality of substrates is placed on the indexer 51. The indexer 51 removes unprocessed substrates from the placed carrier C using an indexer robot (not shown). The indexer 51 also stores substrates that have been processed by the indexer robot into the carrier C. The carrier C is, for example, a front opening unified pod (FOUP) that stores substrates in an enclosed space.

[0026] In this embodiment, one stack is made up of, for example, three processing units 52. For example, four stacks are arranged around a main transport robot (not shown). That is, one substrate processing apparatus 50 includes, for example, 12 (=3 × 4) processing units 52.

[0027] The main transport robot, which is positioned at the center of the four stacks, carries the unprocessed substrates handed over from the indexer robot into one of the 12 processing units 52. The main transport robot also carries the processed substrates out of the processing units 52 and hands them over to the indexer robot.

[0028] The substrate processing apparatus 50 also includes a control unit 55. The control unit 55 is a general computer that controls the operations of the indexer robot, the main transport robot, and the processing units 52 provided within the apparatus. The control unit 55 has a touch panel that serves as an input / output interface provided on the wall surface of the apparatus, and a communication unit that communicates with the outside of the apparatus.

[0029] 4 is a diagram showing the schematic configuration of one processing unit 52. The processing unit 52 discharges a processing liquid onto one substrate W to perform a cleaning process. The processing liquid is a term that encompasses various chemical liquids and pure water. Examples of chemical liquids include liquids for etching processes and liquids for removing particles. Specifically, SC-1 liquid (a mixed solution of ammonium hydroxide, hydrogen peroxide, and pure water), SC-2 liquid (a mixed solution of hydrochloric acid, hydrogen peroxide, and pure water), or hydrofluoric acid are used.

[0030] The processing unit 52 includes a processing chamber 60, a spin holder 61, and a processing liquid nozzle 65. The processing chamber 60 is a hollow housing. The spin holder 61, the processing liquid nozzle 65, and the like are provided inside the processing chamber 60. The processing chamber 60 also has a loading / unloading port (not shown). The loading / unloading port is opened and closed by a shutter. With the loading / unloading port open, the main transport robot loads and unloads substrates W into and from the processing chamber 60. The loading / unloading port is closed while the substrate W is being processed.

[0031] The rotation holder 61 includes a spin chuck 62 and a spin motor 63. The spin chuck 62 is a substrate holder that holds the substrate W in a horizontal position (a position in which the normal to the main surface of the substrate W is aligned vertically). The spin chuck 62 is, for example, a vacuum suction-type chuck. The spin chuck 62 has a disk shape with a diameter smaller than the diameter of the substrate W. The spin chuck 62 suction-holds the central portion of the lower surface of the substrate W. When the lower surface of the substrate W is suction-held by the spin chuck 62, the peripheral edge of the substrate W extends beyond the outer circumferential edge of the spin chuck 62. The spin chuck 62 may be another type of chuck, such as a clamping-type mechanical chuck.

[0032] The spin chuck 62 is connected to the spin motor 63 via a motor shaft. That is, the upper end of the motor shaft of the spin motor 63 is connected to the center of the lower surface of the spin chuck 62. When the spin motor 63 rotates the motor shaft while the substrate W is held by suction on the spin chuck 62, the substrate W and the spin chuck 62 rotate in a horizontal plane around a rotation axis extending in the vertical direction.

[0033] A cup 64 is provided to surround the periphery of the spin chuck 62. The cup 64 can be raised and lowered by a lifting mechanism (not shown). The cup 64 has a cylindrical shape, and the upper part of the cup 64 is inclined so that it approaches the spin chuck 62 as it goes up. However, the inner diameter of the upper end part of the cup 64 is larger than the diameter of the substrate W. During processing of the substrate W, the upper end of the cup 64 is higher than the height position of the substrate W held by the spin chuck 62. Therefore, liquid scattered by centrifugal force from the substrate W rotated by the spin motor 63 is received and recovered by the cup 64. The cup 64 may have a multi-stage structure in which a plurality of recovery ports are provided for different purposes.

[0034] The processing liquid nozzle 65 includes a nozzle tip 66, a swing arm 67, and a swing motor 68. The processing liquid nozzle 65 is, for example, a straight nozzle that ejects the processing liquid in the form of a continuous flow. The nozzle tip 66 is attached to the tip of a swing arm 67 that extends in a substantially horizontal direction. A discharge port (not shown) is formed at the lower end of the nozzle tip 66, and the processing liquid is ejected from the discharge port. The swing arm 67 is swung in a horizontal plane around an axis that extends in the vertical direction by the swing motor 68. The swing motor 68 is, for example, a pulse motor.

[0035] The swing motor 68 swings the swing arm 67, causing the nozzle tip 66 to move in an arc-shaped trajectory between a processing position above the substrate W held by the rotary holder 61 and a standby position outside the cup 64. When the nozzle tip 66 is located at the processing position, the processing liquid nozzle 65 discharges a chemical solution onto the substrate W held by the rotary holder 61, thereby, for example, cleaning the substrate W. Alternatively, the processing liquid nozzle 65 discharges pure water onto the substrate W, thereby performing a pure water rinsing process on the substrate W. An encoder for detecting the position of the nozzle tip 66 may be attached to the swing motor 68.

[0036] The processing unit 52 also includes an air supply section 110, an exhaust section 120, a liquid drainage section 130, and a processing liquid supply section 150. The air supply section 110 supplies processing gas into the processing chamber 60. The air supply section 110 includes a nitrogen supply source 111, an air supply valve 112, and a pipe 113. The tip end of the pipe 113 is connected to an FFU (fan filter unit) 69 provided on the ceiling of the processing chamber 60, and the base end is connected to the nitrogen supply source 111. The FFU 69 includes a fan that generates an airflow and a filter (e.g., a HEPA filter or an ULPA filter) that captures and removes particles mixed in the airflow. An air supply valve 112 is provided midway along the path of the pipe 113. When the air supply valve 112 is opened, nitrogen gas (N ２ ) is fed, and nitrogen gas is supplied from the FFU 69 into the processing chamber 60. The FFU 69 forms a downflow of gas from above to below within the processing chamber 60.

[0037] The exhaust unit 120 exhausts the atmosphere from inside the processing chamber 60. The exhaust unit 120 includes an exhaust device 121, an exhaust valve 122, and a pipe 123. The tip end of the pipe 123 is connected to an exhaust duct 125 provided in the processing chamber 60, and the base end is connected to the exhaust device 121. The exhaust device 121 includes, for example, a vacuum pump. An exhaust valve 122 is provided midway along the path of the pipe 123. When the exhaust valve 122 is opened while the exhaust device 121 is operating, the gas inside the processing chamber 60 is exhausted through the exhaust duct 125.

[0038] The drainage unit 130 discharges the used liquid recovered by the cup 64 to the outside of the processing chamber 60. The drainage unit 130 includes a waste liquid treatment device 131, a drainage valve 132, and a pipe 133. The tip side of the pipe 133 is connected to the bottom of the cup 64, and the base side is connected to the waste liquid treatment device 131. A drainage valve 132 is provided midway along the path of the pipe 133. When the drainage valve 132 is open, the liquid recovered by the cup 64 flows through the pipe 133 and is discharged into the waste liquid treatment device 131.

[0039] The processing liquid supply unit 150 supplies the processing liquid to the processing liquid nozzle 65. The processing liquid supply unit 150 includes a pure water supply source 151, a pure water valve 152, a chemical liquid supply source 153, a chemical liquid valve 154, a filter 158, and a pipe 155. The tip side of the pipe 155 is connected to the nozzle tip 66 of the processing liquid nozzle 65, and the base side is branched into two branches, one of which is connected to the pure water supply source 151 and the other is connected to the chemical liquid supply source 153. Of the two branch pipes branched from the pipe 155, one connected to the pure water supply source 151 is provided with a pure water valve 152, and the other connected to the chemical liquid supply source 153 is provided with a chemical liquid valve 154. The pipe 155 is also provided with a filter 158. When the pure water valve 152 is opened, pure water is discharged from the processing liquid nozzle 65. When the chemical liquid valve 154 is opened, the chemical liquid is discharged from the processing liquid nozzle 65. Furthermore, by opening both the chemical valve 154 and the pure water valve 152, it is also possible to discharge a chemical diluted with pure water from the processing liquid nozzle 65. The filter 158 removes impurities from the processing liquid flowing through the pipe 155. The filter 158 and the pipe 155 may be housed together in a fluid box attached to the processing chamber 60.

[0040] Furthermore, the processing chamber 60 of the processing unit 52 is provided with an inner cover 92 and an outer cover 95. The inner cover 92 is a transparent plate-like member such as an acrylic plate. The inner cover 92 is provided so as to face the internal space of the processing chamber 60. On the other hand, the outer cover 95 is an opaque plate-like member made of a metal such as stainless steel. The outer cover 95 is provided on the outside of the inner cover 92 so as to cover the inner cover 92.

[0041] Both the inner cover 92 and the outer cover 95 are openable and closable. When both the inner cover 92 and the outer cover 95 are closed, the operator cannot see inside the processing chamber 60. When the outer cover 95 is open and only the inner cover 92 is closed, the operator can visually check the inside of the processing chamber 60 through the transparent inner cover 92. When both the outer cover 95 and the inner cover 92 are open, the inside of the processing chamber 60 is exposed, and the operator can perform work on the spin chuck 62 and the processing liquid nozzle 65 inside the processing chamber 60.

[0042] A worker who performs maintenance and inspection work on multiple substrate processing apparatuses 50 arranged in a clean room 40 wears smart glasses 10. The smart glasses 10 are a type of wearable device that uses a head-mounted display (HMD). The smart glasses 10 are also devices for realizing AR (Augmented Reality) or MR (Mixed Reality). For example, Microsoft's "HoloLens" (registered trademark) can be used as the smart glasses 10.

[0043] 5 is a perspective view showing the appearance of the smart glasses 10. The smart glasses 10 include a visor 11 and a headband 12. A worker wears the smart glasses 10 by placing the headband 12 on their head. The worker can adjust the length of the headband 12 to fit the size of their head. The headband 12 also includes a power button, a brightness button, a volume button, and the like.

[0044] The visor 11 includes various sensors and a display. The display is a see-through holographic lens. That is, the display can display a three-dimensional image in the worker's field of view using a hologram, and transmits light from real objects in the same way as regular eyeglass lenses. Therefore, a worker wearing the smart glasses 10 can view the displayed three-dimensional image while viewing real objects through the display.

[0045] The sensors of the visor 11 include, for example, multiple visible light cameras that mainly capture images in front of the visor 11, an infrared camera that tracks the worker's line of sight, a depth sensor that measures the distance to an object, and an inertial measurement sensor. The infrared camera tracks the line of sight by measuring the movement of the eyeballs of the wearer of the smart glasses 10. The depth sensor measures the distance to an object using, for example, a Time of Flight (ToF) method. The inertial measurement sensor is composed of an accelerometer, a gyroscope, a magnetometer, etc.

[0046] The smart glasses 10 also have a built-in computer including a CPU, memory, etc. The smart glasses 10 are also provided with a wireless communication mechanism, and the computer in the smart glasses 10 connects to the information communication network 5 using the wireless communication mechanism. The smart glasses 10 are also provided with a microphone, a speaker, a battery, etc.

[0047] 6 is a block diagram showing the functional configuration of the smart glasses 10, the server 70, the work support terminal 80, and the control unit 55 of the substrate processing apparatus 50. The smart glasses 10 include an imaging unit 21, a communication unit 22, a display unit 23, and a storage unit 24. The imaging unit 21 includes a visible light camera provided on the visor 11 described above. The imaging unit 21 includes, for example, four visible light cameras that capture images of the front and diagonally forward, and can capture images of the field of view of the worker wearing the smart glasses 10.

[0048] The communication unit 22 includes the wireless communication mechanism of the smart glasses 10 described above. The communication unit 22 transmits and receives data to and from the work support terminal 80 and the server 70 via the information and communication network 5. The communication unit 22 can also transmit and receive data directly to and from the control unit 55 of the substrate processing apparatus 50 if the distance is short. That is, the communication unit 22 can transmit data and commands to the control unit 55 of the substrate processing apparatus 50 directly or via the information and communication network 5.

[0049] The display unit 23 includes the display of the visor 11. The display unit 23 has a holographic processing device and displays a 3D image at a predetermined spatial position using hologram technology. Note that the 3D image displayed by the display unit 23 is not limited to a 3D shape, and may be a 2D image such as a document.

[0050] The storage unit 24 includes a memory and storage installed in the smart glasses 10. The memory and storage provided in the smart glasses 10 are, for example, a dynamic random access memory (DRAM) and a universal flash storage (UFS), respectively. The storage unit 24 stores applications and data used by the computer of the smart glasses 10.

[0051] The smart glasses 10 also include a determination unit 31. The determination unit 31 is a function processing unit that is realized by the CPU of the smart glasses 10 executing a predetermined processing program. The processing content of the determination unit 31 will be described in more detail later.

[0052] The control unit 55 of the substrate processing apparatus 50 controls the operation of various mechanisms provided in the processing unit 52, such as the processing liquid nozzle 65. The control unit 55 of the substrate processing apparatus 50 can communicate with the communication unit 22 of the smart glasses 10, and can also control the operation of various mechanisms provided in the processing unit 52 in accordance with operation instruction commands transmitted from the smart glasses 10.

[0053] Furthermore, detection signals from a large number of sensors provided in the substrate processing apparatus 50 are transmitted to the control unit 55. The sensors provided in the substrate processing apparatus 50 include, for example, a concentration meter for chemical solutions and sensors for detecting the opening and closing of each valve.

[0054] The work support terminal 80 and the server 70 are installed, for example, in a factory of a vendor that manufactures and maintains the substrate processing apparatus 50. The work support terminal 80 and the server 70 are capable of communicating with the smart glasses 10 via the information and communication network 5. The work support terminal 80 and the server 70 are also capable of communicating with each other via the information and communication network 5.

[0055] The work support terminal 80 and the server 70 are general computer systems. That is, the work support terminal 80 and the server 70 include a CPU which is a circuit that performs various arithmetic processing, a ROM which is a read-only memory that stores basic programs, a RAM which is a readable and writable memory that stores various information, a storage unit (for example, a magnetic disk or SSD) that stores control software and data, and a communication unit that communicates with the information communication network 5.

[0056] The work support terminal 80 is a computer that, for example, allows a work supporter on the vendor side to support the work of a worker in the clean room 40. The work supporter can send various information from the work support terminal 80 to the smart glasses 10 worn by the worker in the clean room 40.

[0057] The server 70 is a computer that executes predetermined processes in response to requests from the smart glasses 10 and the work support terminal 80 in the work support system according to the present invention. The server 70 includes a storage unit 74 with a relatively large capacity. Large-sized data created by the smart glasses 10 and the work support terminal 80 may be stored in the storage unit 74. Note that the server 70 is not an essential element.

[0058] Next, a work support method using the work support system having the above-described configuration will be described. Fig. 7 is a flowchart showing the procedure of the work support method according to the present invention. Among the steps shown in Fig. 7, steps S11 and S12 are advance preparation processes.

[0059] First, the positions of the components included in the substrate processing apparatus 50 are registered (step S11). This process is performed using a VPS (Visual Positioning System) function provided in the smart glasses 10.

[0060] In the following description, it may be stated that the worker performs operations such as selection and input using the stereoscopic image displayed by the display unit 23 of the smart glasses 10. This means that when the worker performs operations such as selection and input using hand gestures on the stereoscopic image displayed by the display unit 23, the imaging unit 21 captures and detects the hand gesture, and the computer of the smart glasses 10 recognizes that a predetermined operation has been performed from the detection result. Alternatively, when the worker performs operations such as selection and input using eye movement on the stereoscopic image displayed by the display unit 23, the smart glasses 10 may track and detect the eye movement using an eye tracking function and recognize that a predetermined operation has been performed.

[0061] As a preliminary process, a part of the clean room 40 is scanned with the smart glasses 10 to generate a spatial mesh. This process is performed, for example, by an operator wearing the smart glasses 10 while using the smart glasses 10 in the clean room 40.

[0062] The worker turns on the scan mode that is set in advance in the smart glasses 10. For example, the worker can select and turn on the scan mode by a hand gesture from a menu screen displayed as a 3D image on the display unit 23. The hand gesture is captured and detected by the imaging unit 21, and the computer of the smart glasses 10 recognizes that the scan mode has been selected from the detection result. Alternatively, the worker may turn on the scan mode by pressing a predetermined button provided on the smart glasses 10.

[0063] When the scan mode is turned on, the smart glasses 10 scan the space including the substrate processing apparatus 50 in the clean room 40 using a depth sensor to create a spatial mesh. The display unit 23 displays a mesh graphic superimposed on the field of view of the worker seen through the visor 11.

[0064] FIG. 8 is a diagram showing an example of a spatial mesh. As shown in the figure, the spatial mesh created by the smart glasses 10 is represented by a large number of triangular meshes. Various shapes, including curved and flat surfaces, are represented by a set of many connected triangles. Complex shapes including concave and convex surfaces are represented by a high density of triangles, and conversely, flat shapes are represented by a relatively low density of triangles. As shown in FIG. 8, the spatial mesh created by scanning a space including a substrate processing apparatus 50 using the smart glasses 10 is displayed superimposed on the actual substrate processing apparatus 50.

[0065] Even if multiple substrate processing apparatuses 50 of the same type and format (i.e., with the same appearance) are arranged in the clean room 40, when a space including the multiple substrate processing apparatuses 50 is scanned and a spatial mesh is created, the created spatial mesh will be different due to subtle differences (e.g., differences in the conditions of the passageways) around each substrate processing apparatus 50. Therefore, the smart glasses 10 can identify the multiple substrate processing apparatuses 50 arranged in the clean room 40 based on the differences in the spatial meshes.

[0066] The worker scans a space including the substrate processing apparatus 50 using the smart glasses 10 to create a spatial mesh, and then places a virtual object on the displayed spatial mesh. The virtual object is a virtual marker displayed as a 3D image by the display unit 23. The worker places the virtual object at any position around the substrate processing apparatus 50 using a hand gesture (e.g., by picking it up with the hand) within the image displaying the spatial mesh as shown in FIG. 8 . Thereafter, the worker may fine-tune the position of the virtual object using a remote control screen displayed as a 3D image by the display unit 23. The position where the virtual object is placed may overlap with the substrate processing apparatus 50.

[0067] By placing a virtual object on the spatial mesh of the substrate processing apparatus 50, the smart glasses 10 set the position of the virtual object as a reference position for the substrate processing apparatus 50. Furthermore, by placing a virtual object on the spatial mesh, the smart glasses 10 recognize the position of the virtual object itself using a characteristic part of the spatial mesh. The characteristic part of the spatial mesh is a part that takes on a characteristic mesh shape when scanned, such as a corner of the substrate processing apparatus 50.

[0068] Next, the positions of the components of the substrate processing apparatus 50 are calculated and registered based on the reference position set by placing the virtual object. The worker, for example, overlays a CAD drawing of the substrate processing apparatus 50 on the area of ​​the substrate processing apparatus 50 visible through the visor 11. At this time, it is preferable to overlay a 3D CAD drawing on the substrate processing apparatus 50. The CAD drawing of the substrate processing apparatus 50 is created in advance at the equipment design stage, and the data is stored, for example, in the memory unit 74 of the server 70. The smart glasses 10 read the CAD drawing data of the substrate processing apparatus 50 from the server 70, and the display unit 23 displays the CAD drawing. The worker moves the displayed CAD drawing with hand gestures to overlay it on the substrate processing apparatus 50. At this time, the worker may also fine-tune the position of the CAD drawing using a remote control screen displayed as a stereoscopic image on the display unit 23.

[0069] By accurately overlaying the CAD drawing of the substrate processing apparatus 50 on the area of ​​the substrate processing apparatus 50 visible through the visor 11, the smart glasses 10 calculate and register the relative positional relationship between the reference position (the position of the virtual object) and the parts included in the substrate processing apparatus 50. FIG. 9 is a diagram schematically showing the relative positional relationship between the reference position and the parts of the substrate processing apparatus 50. By placing the virtual object SA, its position is registered as the reference position RP. The positions of the parts included in the substrate processing apparatus 50 can be obtained from coordinate information included in the CAD data. The smart glasses 10 calculate and register the relative positional relationship between the reference position RP and any part of the substrate processing apparatus 50 (e.g., a corner of the substrate processing apparatus 50) based on the position information of the reference position RP and the coordinate information of the data of the CAD drawing overlaid on the substrate processing apparatus 50.

[0070] The CAD diagram data also includes coordinate information of the processing units 52 provided in the substrate processing apparatus 50 and components provided in the processing units 52 (e.g., the spin chuck 62 and the processing liquid nozzle 65, etc.). Therefore, the smart glasses 10 calculate and register the relative positional relationship between each of the multiple processing units 52 mounted on the substrate processing apparatus 50 and the reference position RP. Furthermore, the smart glasses 10 calculate and register the relative positional relationship between the components provided in each processing unit 52 and the reference position RP. Note that, for a driving component such as the processing liquid nozzle 65, the coordinate information included in the CAD diagram data is that of the home position, and therefore the relative positional relationship between the driving component located at the home position (the standby position described above for the processing liquid nozzle 65) and the reference position RP is calculated.

[0071] The smart glasses 10 may register the position of the part by, for example, writing in a position table the relative positional relationship between the calculated reference position RP and the part of the substrate processing apparatus 50. Specifically, the smart glasses 10 register in the position table the name of the virtual object, the equipment part of the substrate processing apparatus 50 associated with it, and the relative position information of the equipment part, etc., in association with each other.

[0072] The smart glasses 10 do not need to calculate and register the relative positional relationship for all parts included in the substrate processing apparatus 50, but only need to calculate the relative positional relationship for necessary parts. The parts included in the substrate processing apparatus 50 include a representative point of the entire substrate processing apparatus 50, multiple processing units 52 mounted on the substrate processing apparatus 50, and various mechanisms provided in each processing unit 52. For example, the smart glasses 10 may calculate and register the relative positional relationship of only the processing liquid nozzle 65 of the substrate processing apparatus 50 with respect to the reference position RP. In other words, the smart glasses 10 only need to calculate and register the relative positional relationship between at least one part included in the substrate processing apparatus 50 and the reference position RP.

[0073] Next, as a preparatory process different from location registration, a danger standard is set (step S12). Specifically, an apparatus state that is a standard for determining danger is set. For example, a concentration of chemical vapor in the processing chamber 60 above which danger is determined is set. Alternatively, an open / closed state of each valve that is determined to be dangerous is set. This work may be performed by the worker using the smart glasses 10, or by the work support staff using the work support terminal 80.

[0074] Steps S13 and subsequent steps in Fig. 7 are post-processing steps when an operator performs maintenance work on any of the substrate processing apparatuses 50. Maintenance is performed on the substrate processing apparatuses 50 on a regular or irregular basis. Typically, irregular maintenance is performed when some kind of malfunction occurs in the substrate processing apparatus 50. In this embodiment, the operator wears the smart glasses 10 to perform the maintenance work.

[0075] First, status information regarding the status of the substrate processing apparatus 50 is collected (step S13). Specifically, the substrate processing apparatus 50 is provided with a number of sensors, and the control unit 55 collects status information from each sensor. For example, the control unit 55 obtains the oxygen concentration and the chemical vapor concentration (e.g., hydrogen fluoride concentration) in the processing chamber 60 from a concentration meter. The control unit 55 also obtains the chemical concentration in the processing liquid remaining in the processing liquid nozzle 65 from a separate concentration meter. Furthermore, the control unit 55 obtains information regarding the opening and closing of each valve, for example, information that the pure water valve 152 remains closed after the chemical liquid valve 154 is opened. The status information collected by the control unit 55 is stored, for example, in a memory unit provided in the control unit 55. Note that the control unit 55 may collect information from operation history and work history (work log) in addition to information from the sensors.

[0076] Next, based on the status information collected in step S13, the determination unit 31 of the smart glasses 10 performs a risk determination for each part in the substrate processing apparatus 50 (step S14). The target parts to be determined in step S14 include any space in the processing chamber 60. The determination unit 31 performs a risk determination for the inside of the substrate processing apparatus 50 based on the status information and determines whether or not operation of each part is possible. For example, if the concentration of chemical vapor in the processing chamber 60 collected in step S13 is equal to or greater than the reference value set in step S12, the determination unit 31 determines that the inside of the processing chamber 60 is in a dangerous state and determines that the inner cover 92 exposed to the internal space of the processing chamber 60 cannot be opened. On the other hand, the determination unit 31 determines that the outer cover 95, which is not in direct contact with the internal space of the processing chamber 60, can be opened. Furthermore, for example, even when the pure water valve 152 remains closed after the chemical liquid valve 154 is opened, the chemical liquid remains on the inner surface of the cup 64 in the processing chamber 60, and the determination unit 31 makes the same determination as above. Furthermore, for example, if the residual pressure in the piping 155 is equal to or greater than a reference value, the determination unit 31 determines that the piping 155 is in a dangerous state and determines that operation on the filter 158 is not permitted. In order to perform such determination of whether or not an operation is permitted, it is preferable to also set whether or not each component is operable based on the apparatus status in step S12. More specifically, for example, a table may be created in which the apparatus status is associated with whether or not each component is operable.

[0077] Next, when an operator wearing the smart glasses 10 approaches the substrate processing apparatus 50, for example, for maintenance work, the display unit 23 displays in color the parts that the operator can see (visible parts) among the parts determined to be operable or not in step S14 (step S15). For example, when both the inner cover 92 and the outer cover 95 are closed, the operator can see the outer cover 95 but cannot see the inner cover 92 or the inside of the processing chamber 60. In other words, the outer cover 95 is the visible part. In this case, the display unit 23 of the smart glasses 10 displays in color the outer cover 95 but does not display in color the parts inside the inner cover 92 and the processing chamber 60.

[0078] More specifically, the smart glasses 10 identify the position of the visible area where the risk determination was made based on the position information of the area registered in step S11. Then, the display unit 23 of the smart glasses 10 may display the identified position in color. In this embodiment, the display unit 23 may, for example, color the outer surface of the outer cover 95 in a planar (two-dimensional) manner.

[0079] Furthermore, the display unit 23 displays a portion determined to be inoperable in a first display color. For example, when the outer cover 95 cannot be opened, the display unit 23 displays the outer cover 95 in the first display color (e.g., red). On the other hand, the display unit 23 displays a portion determined to be operable in a second display color different from the first display color. For example, when the outer cover 95 can be opened, the display unit 23 displays the outer cover 95 in the second display color (e.g., blue).

[0080] 10 is a diagram showing an example of a color display for the outer cover 95. In the above example, the concentration of chemical vapor in the processing chamber 60 is equal to or higher than the reference value, the inside of the processing chamber 60 is recognized as being in a dangerous state, and it is determined that the inner cover 92 cannot be opened, while it is determined that the outer cover 95 can be opened. In this case, the display unit 23 of the smart glasses 10 displays the outer cover 95 in the second display color (blue).

[0081] In this way, by displaying the parts that the operator can see in color, the operator can easily recognize whether or not the parts can be operated. In the above example, by displaying the outer cover 95 that the operator can see in color, the operator can easily recognize whether or not the outer cover 95 can be opened.

[0082] On the other hand, there is no indication as to whether or not parts that the operator cannot directly see (for example, the inner cover 92 and the interior of the processing chamber 60) can be operated. In the above example, there is no indication that the inner cover 92 cannot be opened. That is, only the outer cover 95 is displayed in color, and nothing is displayed for the inner cover 92. Therefore, the operator can clearly recognize whether or not the visible parts can be operated, regardless of the status of the parts that cannot be seen. In the above example, the operator can clearly recognize that the outer cover 95 can be opened, regardless of the status of the inner cover 92 or the interior of the processing chamber 60.

[0083] Next, an operator who sees the result of the color display of the visible portion may perform an operation on the visible portion (step S16). For example, an operator who sees that the outer cover 95 is displayed in the second display color (blue) may open the outer cover 95.

[0084] When such an operation is performed, the process proceeds from step S16 to step S17, and display unit 23 updates the display. Specifically, display unit 23 displays in color the parts that have become newly visible to the operator as a result of the operation being performed. In the above example, display unit 23 displays in color the parts of inner cover 92 and the interior of processing chamber 60 that have become newly visible to the operator as a result of outer cover 95 being opened.

[0085] 11 is a diagram showing an example of a color display for the inner cover 92 when the outer cover 95 is opened. In the above example, the concentration of chemical vapor in the processing chamber 60 is equal to or higher than the reference value, the inside of the processing chamber 60 is recognized as being in a dangerous state, and it is determined that the inner cover 92 cannot be opened. Therefore, the display unit 23 of the smart glasses 10 displays the inner cover 92 and the inside of the processing chamber 60 in the first display color (red).

[0086] When the worker opens the outer cover 95, which is displayed in blue, he or she will see the inner cover 92, which is displayed in red. That is, the worker can check the state of the inner cover 92 for the first time by opening the outer cover 95. By seeing the inner cover 92 displayed in red, the worker can easily recognize that the inner cover 92 cannot be opened. As a result, the worker can be prevented from being exposed to danger by opening the inner cover 92.

[0087] In this embodiment, whether or not an operation can be performed on a part of the device is determined based on the collected status information, and the determined parts that the worker can see (visible parts) are displayed in color based on the determination result. On the other hand, parts that the worker cannot see are not displayed. Therefore, the worker can easily and clearly recognize whether or not the part that is the target of the operation can be operated, regardless of the status of the parts that the worker cannot see.

[0088] Although the embodiments of the present invention have been described above, various modifications other than those described above are possible without departing from the spirit of the present invention. For example, in the above-described embodiments, the visible portion that the worker can see is displayed in color. However, this is not limited to this. An annotation display (remark display) may be provided to inform the worker whether or not the operation is possible. For example, such an annotation display may be provided by displaying a message (e.g., "Cover cannot be opened") on the display unit 23 of the smart glasses 10. Alternatively, the speaker of the smart glasses 10 may emit a sound to notify the worker.

[0089] In the above embodiment, the risk determination is performed by the determination unit 31 provided in the smart glasses 10, but this is not limited to this, and the risk determination may be performed by the work support terminal 80 or the server 70. Alternatively, the control unit 55 of the substrate processing apparatus 50 may perform the risk determination within the substrate processing apparatus 50.

[0090] Furthermore, the display unit 23 of the smart glasses 10 may be configured to allow the user to select "Normal" or "Maintenance" using a pull-down menu displayed as a stereoscopic image, for example. When "Normal" is selected, the smart glasses 10 do not display in color. This can prevent the smart glasses 10 from displaying in color when it is not necessary. On the other hand, when "Maintenance" is selected, the smart glasses 10 may display in color as in the above embodiment.

[0091] Furthermore, in the above embodiment, the worker uses smart glasses 10, but this is not limited thereto. Instead of the smart glasses 10, a portable terminal such as a tablet terminal or a smartphone may be used. That is, any portable terminal having a display unit and a communication unit may be used. However, since using a tablet terminal or the like would occupy the worker's hands while holding it, it is preferable to use a wearable terminal such as the smart glasses 10.

[0092] Furthermore, the substrate processing apparatus 50 is not limited to a substrate cleaning apparatus, but may be any apparatus that performs a predetermined process on a substrate, such as a heat treatment apparatus, exposure apparatus, coating and developing apparatus, measurement apparatus, or inspection apparatus. When the substrate processing apparatus 50 is a substrate cleaning apparatus, it may be a single-wafer type cleaning apparatus that cleans substrates one by one, or a batch type cleaning apparatus that cleans multiple substrates at once. However, the work support technology according to the present invention is suitable for liquid processing apparatuses such as substrate cleaning apparatuses that use chemicals and are prone to unseen hazardous conditions. In the above embodiment, nitrogen gas was exemplified as the processing gas supplied by the gas supply unit 110 to form a downflow in the processing chamber 60 to create a low-oxygen atmosphere. However, a processing gas other than nitrogen gas may be supplied from a shield plate or another gas nozzle to create a specific processing-related atmosphere near the substrate W. Examples of such processing gases include oxygen (O ２ ), ozone (O ３ ), ammonia (NH ３ ) are examples.

[0093] If the substrate processing apparatus 50 is a UV irradiation apparatus that irradiates substrates with ultraviolet rays to decompose and remove organic matter, etc., the inside of the processing chamber is in a dangerous state when ultraviolet rays are irradiated from the UV lamp. In the above embodiment, because the cause of the dangerous state inside the processing chamber was a chemical atmosphere, it was determined that the inner cover 92 could not be opened, but the outer cover 95 could be opened. In a UV irradiation apparatus, simply opening the outer cover would cause ultraviolet rays to pass through the transparent inner cover and be irradiated outside the apparatus, which is dangerous, so it is determined that the outer cover cannot be opened either. Therefore, the display unit 23 of the smart glasses 10 also displays the outer cover in the first display color (red).

[0094] Furthermore, the work support technology according to the present invention is not limited to substrate processing equipment, but may be applied to any industrial equipment in which some invisible dangerous condition may occur, such as print processing equipment, film forming equipment, medical equipment, and visual inspection equipment.

[0095] 5 Information and communication network 10 Smart glasses 21 Imaging section 22 Communication section 23 Display section 24, 74 Memory section 31 Determination section 50 Substrate processing apparatus 52 Processing unit 61 Rotational holding section 62 Spin chuck 65 Processing liquid nozzle 66 Nozzle tip section 70 Server 80 Work support terminal 92 Inner cover 95 Outer cover 110 Air supply section 120 Exhaust section 130 Liquid drainage section 150 Processing liquid supply section W Substrate

Claims

1. A work support method for performing specified work on industrial equipment, comprising: an information acquisition process for collecting status information relating to the equipment status of the industrial equipment; a determination process for determining whether or not it is possible to operate a visible portion of the industrial equipment based on the status information; and a display process for a mobile terminal equipped with a display unit and a communication unit to display an annotation on the visible portion based on the determination result in the determination process.

2. A work support method according to claim 1, wherein in the display step, the mobile terminal displays the visible area determined to be inoperable in the determination step in a first display color.

3. A work support method according to claim 2, wherein in the display step, the mobile terminal displays the visible area determined to be operable in the determination step in a second display color.

4. A work support method as described in claim 3, wherein the industrial equipment is a substrate processing apparatus which performs a predetermined process on a substrate, the processing chamber of the substrate processing apparatus is provided with an inner cover and an outer cover, and the display step, when the inside of the processing chamber is in a dangerous state, displays the outer cover in the second display color when the inner cover and the outer cover are closed, and displays the inner cover in the first display color when the outer cover is open.

5. A work support method according to claim 4, wherein the substrate processing apparatus is a substrate cleaning apparatus that uses a processing gas and a processing liquid in the processing chamber.

6. A work support method according to any one of claims 1 to 5, wherein the mobile terminal is a pair of smart glasses.

7. A work support system for performing specified work on industrial equipment, comprising: a mobile terminal equipped with a display unit and a communication unit; and a judgment unit that judges whether or not it is possible to operate a visible portion of the industrial equipment based on status information relating to the equipment status of the industrial equipment, wherein the display unit displays an annotation on the visible portion based on the judgment result by the judgment unit.

8. A work support system according to claim 7, wherein the display unit displays the visible area that has been determined by the determination unit to be inoperable in a first display color.

9. A work support system according to claim 8, wherein the display unit displays the visible area determined by the determination unit to be operable in a second display color.

10. A work support system as described in claim 9, wherein the industrial equipment is a substrate processing apparatus which performs a predetermined process on a substrate, a processing chamber of the substrate processing apparatus is provided with an inner cover and an outer cover, and the display unit, when the inside of the processing chamber is in a dangerous state, displays the outer cover in the second display color when the inner cover and the outer cover are closed, and displays the inner cover in the first display color when the outer cover is open.

11. A work support system according to claim 10, wherein the substrate processing apparatus is a substrate cleaning apparatus that uses a processing gas and a processing liquid in the processing chamber.

12. A work support system according to any one of claims 7 to 11, wherein the mobile terminal is a pair of smart glasses.

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