Closing module for a shuttle valve, comprising an adjustable pneumatic drive

Abstract

The invention relates to a closing module (10) comprising a valve shutter (14), a pneumatic drive unit (20) coupled to the valve shutter (14), and a valve rod (18). The pneumatic drive unit (20) has a piston system the mobility of which can be variably limited by means of a first stop element.

Description

[0001] Closure module for a pendulum valve with adjustable pneumatic actuator

[0002] The invention relates to a closure module with a pneumatic drive with a calibration device for the precise adjustment of plate positions.

[0003] Generally, valves are designed to adjust the flow of a fluid in particular. With a valve, the flow can be adjusted over a maximum

[0004] The valve opening cross-section can be permitted or completely blocked. Furthermore, certain valve types offer the possibility of regulating a flow rate per unit of time, thus providing controllability of the fluid flow.

[0005] Vacuum valves are a specific type of valve. These are used to control a volume or mass flow and / or to close a flow path in a substantially gas-tight manner, which leads through an opening formed in a valve housing, in different

[0006] Embodiments are known from the prior art and are used in particular in vacuum chamber systems in the field of IC, semiconductor or substrate production, which must take place in a protected atmosphere, if possible without the presence of contaminating particles.

[0007] Such vacuum chamber systems comprise, in particular, at least one evacuable vacuum chamber intended to accommodate semiconductor elements or substrates to be processed or manufactured, which has at least one vacuum chamber opening through which the semiconductor elements or other substrates can be guided into and out of the vacuum chamber, as well as at least one vacuum pump for evacuating the vacuum chamber. For example, in a manufacturing plant for semiconductor wafers or liquid crystal substrates, the highly sensitive semiconductor or liquid crystal elements sequentially pass through several process vacuum chambers, in which the parts located within the process vacuum chambers are each processed by means of a processing device.Both during the processing within the process vacuum chambers and during transport from chamber to chamber, the highly sensitive semiconductor elements or substrates must always be in a protected atmosphere - especially in an airless environment.

[0008] For this purpose, peripheral valves are used to open and close a gas supply or discharge and, on the other hand, transfer valves are used to open and close the transfer openings of the vacuum chambers for the insertion and removal of the parts.

[0009] The vacuum valves passed through by semiconductor components are called vacuum transfer valves due to the described application area and the associated dimensioning, and due to their predominantly rectangular

[0010] Due to its opening cross-section it is also known as a rectangular valve and, due to its usual mode of operation, also as a slide valve, rectangular slide valve or transfer slide valve.

[0011] Peripheral valves are used in particular to control or regulate the gas flow between a vacuum chamber and a vacuum pump or another vacuum chamber. Peripheral valves are located, for example, within a pipe system between a process vacuum chamber or a transfer chamber and a vacuum pump, the atmosphere, or another process vacuum chamber. The opening cross-section of such valves, also called pump valves, is generally smaller than that of a vacuum transfer valve. Since peripheral valves, depending on their application, are used not only to fully open and close an opening, but also to control or regulate a flow by continuously adjusting the opening cross-section between a fully open position and a gas-tight closed position, they are also referred to as control valves.A possible peripheral valve for controlling or regulating the gas flow is the pendulum valve.

[0012] In a typical pendulum valve, as known for example from US 6,089,537 (Olmsted), in a first step a usually round valve disk is rotated over a usually also round opening from a position exposing the opening to an intermediate position covering the opening. In the case of a slide valve, as described for example in US 6,416,037 (Geiser) or US 6,056,266 (Blecha), the valve disk, like the opening, is usually rectangular and in this first step is pushed linearly from a position exposing the opening to an intermediate position covering the opening. In this intermediate position the valve disk of the pendulum or slide valve is at a distance from the valve seat surrounding the opening.In a second step, the distance between the valve disc and the valve seat is reduced so that the valve disc and the valve seat are pressed evenly against each other, and the opening is sealed in a substantially gas-tight manner. This second movement preferably occurs essentially perpendicular to the valve seat.

[0013] Sealing can be achieved, for example, either by a sealing ring arranged on the closing side of the valve plate, which is pressed onto the valve seat surrounding the opening, or by a sealing ring on the valve seat, against which the closing side of the valve plate is pressed. Due to the two-step closing process, the sealing ring between the valve plate and the valve seat is hardly subjected to shear forces that would destroy the sealing ring, since the movement of the valve plate in the second step takes place essentially in a straight line perpendicular to the valve seat.

[0014] Various sealing devices are known from the prior art, for example, from US Pat. No. 6,629,682 B2 (Duelli). A suitable material for sealing rings and seals in vacuum valves is, for example, fluororubber, also called FKM, particularly the fluoroelastomer known under the trade name "Viton," as well as perfluororubber, abbreviated to FFKM.

[0015] In addition, different drive systems for achieving this combination of a rotary movement of the valve disk parallel across the opening in the case of a pendulum valve and a translatory movement of the valve disk parallel across the opening in the case of a slide valve and an essentially translatory movement perpendicular to the opening are known from the prior art, for example from US 6,089,537 (Olmsted) for a pendulum valve and from US 6,416,037 (Geiser) for a slide valve. Since the above-mentioned valves are used, among other things, in the production of highly sensitive semiconductor elements in a vacuum chamber, a corresponding sealing effect must be reliably guaranteed, especially for such vacuum chambers. In this regard, the condition of the entire valve or in particular of a sealing material or of a sealing surface which comes into contact with the sealing material during pressing is of particular importance.

[0016] It is also crucial that in the closed position—i.e., when the valve closure (valve plate) is positioned over the valve opening—the sealing surface of the plate is positioned exactly opposite the sealing surface of the valve seat, with no offset. This ensures that the desired sealing effect can be reliably achieved by the sealing material arranged on either the plate or the valve seat. In a conventional valve, such relative positioning of these two components can be calibrated and adjusted accordingly at the factory.

[0017] Due to temperature influences or other external influences on the valve, such as a shock, this preset relative alignment and positioning can deviate from an ideal target state.

[0018] In addition, valve variants of a pendulum valve can be used, which have at least the valve disk and a drive on the valve side, but interact with a housing or a wall (with opening), for example, a process chamber, and the valve seat is provided by the process chamber. For the realization of such a valve, it is regularly required that the drive and

[0019] Valve discs must be attached to the process chamber at their destination. Adjusting the disc position relative to the chamber wall can therefore no longer be calibrated at the factory.

[0020] The invention is therefore based on the object of providing an improved pendulum valve or parts thereof, in particular a vacuum pendulum valve, which reduces or avoids the disadvantages mentioned above.

[0021] A further object of the invention is to provide an improved pendulum valve which provides a simple and reliable adjustment of the pendulum movement.

[0022] These objects are achieved by implementing the characterizing features of the independent claims. Features that further develop the invention in an alternative or advantageous manner can be found in the dependent patent claims.

[0023] The basic idea of ​​the present invention is to provide a vacuum pendulum valve module with a pneumatic drive and to design the drive in such a way that the pendulum movement of the valve plate (valve closure) can be easily and precisely adjusted by the drive.

[0024] The invention relates to a closure module for a pendulum valve, in particular for a vacuum pendulum valve module, for regulating a volume or mass flow and / or for closing and opening a valve opening of the pendulum valve. The closure module has a valve closure with a first sealing surface for regulating the volume or mass flow and / or for closing the valve opening in a gas-tight manner, wherein the valve closure is mounted so as to be pivotable about a pivot axis, in particular wherein the first sealing surface corresponds to a second sealing surface surrounding the valve opening.

[0025] In addition, the closure module has a pneumatic drive unit coupled to the valve closure, which is designed to provide a pivoting movement of the valve closure about the pivot axis such that the valve closure can be adjusted from an open position, in which the valve closure in particular at least partially releases the valve opening, into a closed position, in which the valve closure is in particular positioned above the valve opening and (completely) covers the opening cross-section of the valve opening, and back again. A valve rod, which defines the pivot axis, is connected to the valve closure and provides the coupling of the valve closure to the pneumatic drive unit.

[0026] In the closed position, in particular, a sealing contact between the first sealing surface and the second sealing surface can be established by means of a sealing material (e.g., a sealing ring comprising a fluoropolymer) located therebetween, thus sealing the valve opening in a gas-tight manner. Alternatively, in the closed position, the sealing surfaces can be positioned opposite one another without mutual contact.

[0027] The pneumatic drive unit has a linearly extended housing whose extension defines a movement axis, the housing having a first end and a second end and the ends are opposite along the movement axis (diametrically). The pneumatic drive unit also has a in the

[0028] Housing with a first piston arranged to be linearly movable along the movement axis and having a first piston surface pointing towards the first end, wherein a first partial volume can be varied by a movement of the first piston along the movement axis, the volume size of which is limited at least by the first piston surface.

[0029] In particular, the first piston surface and the first end thus delimit the first partial volume. Together with the housing of the drive, the first partial volume can be enclosed accordingly.

[0030] The pneumatic drive unit also has a second piston which is arranged in the housing so as to be linearly movable along the movement axis and has a second piston surface pointing towards the second end, wherein a second partial volume can be varied by a movement of the second piston along the movement axis, the volume size of which is limited at least by the second piston surface.

[0031] In particular, the second piston surface and the second end thus delimit the second partial volume. Together with the housing of the drive, the second partial volume can be enclosed accordingly.

[0032] The pneumatic drive unit has a first connection for pressurizing the first partial volume and a second connection for pressurizing the second partial volume.

[0033] Furthermore, the pneumatic drive unit provides a piston connector which firmly connects the first piston to the second piston and thus provides a joint mobility of the first piston, the second piston and the piston connector linearly along the movement axis, wherein the piston connector has a coupling element which is coupled to the valve rod, in particular by means of a gear or reduction.

[0034] The pneumatic drive unit also has a first stop element, which is arranged in the region of the first end of the housing, in particular at the first end, provides a first stop point for the first piston surface, and limits a movement path for the first piston. The position, spatial extent, and / or shape of the stop element can be changed such that a position of the first stop point can be varied with respect to a direction along the movement axis.

[0035] By adjusting the stop point of the pneumatic actuator, an end position, in particular the open or closed position, of the valve closure can be set. Due to the interaction and coupling of the actuator to the closure via the valve rod, a correspondingly (adjusted) limited movement distance for a piston in the actuator results in a correspondingly limited pivoting movement range (angular range around the pivot axis) of the valve closure.

[0036] In particular, the solution according to the invention thus provides the ability to adjust the actuator and valve closure after installation or assembly on a valve seat, especially when the valve seat is provided by the customer, e.g. on a process line, and the actuator and valve closure are mounted on this process line. In addition, the solution according to the invention provides simple and precise calibration and pendulum positions during operation of the valve, e.g. in order to equalize or compensate for any drift that may occur. For example, a deviation from the exact closing position due to thermal influences can be corrected by appropriately adjusting the stop point.

[0037] Unlike an electromechanical drive, the pneumatic drive design prevents the creation of an electromagnetic field or other electronic influences. This is particularly advantageous for use in vacuum environments, for example, in semiconductor production, as it leaves coating processes unaffected.

[0038] The closure module according to the invention is designed and constructed for intended combination with a counterpart, wherein the counterpart provides the valve seat and thus also the valve opening. The closure module can accordingly also be referred to as part of a pendulum valve and, together with a second module (valve seat module), which has at least the valve seat, forms the pendulum valve.

[0039] In one embodiment, the pneumatic drive unit may include a second stop element arranged at the second end of the housing, providing a second stop point for the second piston surface, and limiting a travel path for the second piston. A position, spatial extent, and / or shape of the second stop element may be variable such that a position of the second stop point is variable with respect to a direction along the movement axis.

[0040] The movement path for the piston arrangement can thus be adjusted in both opposite directions along the movement axis, i.e. reduced or increased. The piston arrangement is to be understood here as the connection of the first piston, second piston and piston connector. With such a

[0041] In particular, the adjustability of the closed position and the open position for the valve closure can be provided by the adjustment options of the first and second stop points on the part of the drive unit.

[0042] In one embodiment, the coupling element can extend linearly with respect to a direction along the movement axis. In particular, the coupling element can be aligned parallel to the movement axis.

[0043] The coupling element can in particular be designed as a rack or have a rack.

[0044] Alternatively, the coupling element can be provided by a contact surface. The contact surface can have a coating that provides increased friction and thus interaction with a transmission element.

[0045] In one embodiment, the pneumatic drive unit can accordingly have a transmission element, in particular a gear or pinion, and the transmission element can be operatively connected to the coupling element in such a way that the linear mobility of the coupling element can be converted into a

[0046] Rotational movement of the transmission element is convertible.

[0047] Alternatively, a shaft, a cylinder or a wheel can be provided as a transmission element, which in turn is coupled to the valve rod.

[0048] By means of the transmission element, a linear movement directly provided by the drive can be converted into a rotational movement.

[0049] In particular, the transmission element can provide the coupling of the valve closure with the pneumatic drive unit - at least indirectly - and the rotational movement of the transmission element can cause the pivoting movement of the valve closure about the pivot axis.

[0050] In one embodiment, the closure module may comprise a connecting body, wherein the valve closure is arranged pivotably mounted relative to the connecting body, the pneumatic drive unit is fixedly connected to the connecting body, and the connecting body is designed to connect the valve closure (and the drive unit) to a valve seat providing the valve opening.

[0051] Such a connecting body can enable the modular combination or assembly of the closure module according to the invention. For example, the connecting body can be shaped so that it can be precisely arranged on a component that provides the valve seat for the closure module. The connecting body is, in particular, solidly formed and has correspondingly positioned bores that enable easy attachment to the valve seat.

[0052] In one embodiment, the first and / or the second stop element can have an adjustment element accessible from outside the housing for varying the position of the first or second stop point with respect to a direction along the movement axis.

[0053] This allows the stop point and thus the travel distance provided for the piston assembly to be adjusted without requiring any intervention inside the drive unit. Adjustment is therefore simple and precise, enabling correspondingly easy calibration or alignment of the valve closure.

[0054] In one embodiment, the first and / or second stop element can have a sealing element for sealing the first and / or second partial volumes, respectively. Such a sealing element is particularly advantageous in combination with the externally accessible adjustment element. This allows for reliable sealing of the internal volume while simultaneously allowing adjustment of the stop point.

[0055] In one embodiment, the pneumatic drive unit can have a position sensor designed to determine a position of the first and / or second block along the movement axis. The position sensor can be designed, for example, as an optical or capacitive distance sensor. Information generated by the sensor can, for example, provide continuous determination or monitoring of a position or position of the valve closure. In particular, it can thus be determined whether the valve closure is in the open or closed position.

[0056] In one embodiment, the valve closure may include a sealing material. The sealing material may, for example, be in the form of an O-ring or a vulcanized polymer. The sealing material is preferably provided on the first sealing surface.

[0057] The invention also relates to a pendulum valve, in particular a vacuum pendulum valve, for regulating a volume or mass flow and / or for closing and opening a valve opening. The pendulum valve has a valve seat that defines the valve opening defining an opening axis and has a second sealing surface surrounding the valve opening. The pendulum valve also has a closure module as described above.

[0058] The first sealing surface corresponds to the second sealing surface, i.e., the shape and / or spatial extent of the sealing surfaces are, in particular, identical. The valve seat and the closure module are arranged relative to one another such that the valve closure at least partially exposes the valve opening in the open position, and in the closed position the valve closure is positioned over the valve opening and covers the opening cross-section of the valve opening.

[0059] In one embodiment, the closure module can have a separating device for separating a process atmosphere region from an external atmosphere region. This particularly applies to a design of the pendulum valve as a vacuum pendulum valve.

[0060] The process atmosphere area is to be understood in particular as an area that can be defined by a process chamber (vacuum chamber). In this area, a process atmosphere, in particular a vacuum, can be created for processing substrates (e.g., semiconductors). Components intended for this area must meet, for example, increased requirements with regard to material resistance. Accordingly, the outside atmosphere area is to be understood in particular as an area in which normal atmospheric conditions prevail, e.g., room air.

[0061] The drive unit can be assigned to the outside atmosphere area and the valve closure to the process atmosphere area.

[0062] The valve's separating device can be formed, for example, by a seal (e.g., an O-ring) or a bellows. The bellows can be located inside the connecting body, for example. Two main types of bellows are used: the diaphragm bellows, and the corrugated bellows. The latter differs from the diaphragm bellows in that it has no welds and is easier to clean, but has a lower maximum stroke.

[0063] The closure module according to the invention is described in more detail below, purely by way of example, using exemplary embodiments schematically illustrated in the drawings. Identical elements are identified by identical reference numerals in the figures. The described embodiments are generally not drawn to scale and are not to be understood as limiting.

[0064] Show in detail

[0065] Fig. 1a-b shows an embodiment of a vacuum pendulum valve according to the prior art;

[0066] Fig. 2 shows an embodiment of an inventive

[0067] Vacuum sealing module in a top view;

[0068] Fig. 3 shows an embodiment of a pneumatic

[0069] Drive unit of a closure module according to the invention in a sectional view;

[0070] Fig. 4 shows an embodiment of an inventive

[0071] Locking module in a side view; and

[0072] Fig. 5 the drive unit of the embodiment according to

[0073] Figure 4 in side view in an enlarged representation.

[0074] Figures 1a and 1b show an embodiment of a vacuum pendulum valve 100 according to the prior art. The valve 100 is designed in particular to regulate a mass flow and to interrupt a flow path in a substantially gas-tight manner. The valve 100 has a valve housing 110 which has an opening 12. The opening 12 here has, for example, a circular cross-section. The opening 12 is enclosed by a valve seat. This valve seat has a second sealing surface 13 which, in a closed position, points axially in the direction of a valve closure 14 (valve disk) and runs transversely to an opening axis A and has the shape of a circular ring, which in the example shown is formed on the valve housing 110.

[0075] The valve closure 14 is pivotable about a rotational axis R and adjustable substantially parallel to the opening axis A. In a closed position S (Fig. 1a) of the valve plate 14 (valve closure), the opening 12 is covered by the valve plate 14, which has a first sealing surface with sealing material. An open position of the valve 100 is shown in Fig. 1b. The valve closure 14 is pivoted about the pivot axis such that the opening 12 is completely exposed and the valve closure 14 is present in the valve housing 110.

[0076] The valve closure 14 is connected to a drive unit 190 (e.g., a motor) via an arm (not shown) arranged laterally on the closure and extending perpendicular to the opening axis. In the closed position (Fig. 1a) of the valve disk 14, this arm is located outside the opening cross-section of the opening 12, geometrically projected along the opening axis A.

[0077] The drive 190 is designed by using a corresponding gear such that the valve disk 14 - as is usual with a pendulum valve - can be pivoted by means of a transverse movement x by the drive 190 transverse to the opening axis A and essentially parallel across the cross section of the opening 12 and perpendicular to the opening axis A in the form of a pivoting movement about the pivot axis R between an open position (Fig. 1b) and a closed position (Fig. 1a). The closed position is generally a state of a

[0078] Valve closure to understand in which the

[0079] Valve closure at least covers the opening. In the closed position, the valve closure can be contactless relative to the valve seat (intermediate position; no complete sealing of the opening is provided by contacting the sealing material with both the first and the first sealing surface). In the closed position, however, a gas-tight closure of the opening can also be provided (sealing position). In this case, the sealing material on the side of the valve closure is in contact with the second sealing surface. For this purpose, the valve closure can be moved linearly by the drive according to a longitudinal movement y along the opening axis A.

[0080] As already mentioned, in the open position, the valve disk 14 is positioned in a retention section arranged laterally next to the opening 12, so that the opening 12 and the flow path are exposed. In the intermediate position, the valve disk 14 is positioned at a distance above the first opening 12 and covers the opening cross-section of the opening 12. In the sealed position, the opening 12 is closed in a gas-tight manner, and the flow path is interrupted by a gas-tight contact between the valve closure 14 and the sealing surface 13 of the valve seat (by means of the sealing material).

[0081] To enable automated and controlled opening and closing of the valve, the valve can have an electronic control and processing unit 18, which is designed and connected to the drive 190 in such a way that the valve disk 14 can be adjusted accordingly to seal a process volume in a gas-tight manner or to regulate an internal pressure of this volume. Such a control and processing unit 18, together with the valve, a process chamber and, for example, a peripheral unit (e.g., a gas inlet unit), can form the core of a vacuum processing device, such as is used, for example, in semiconductor production.

[0082] The position of the valve plate 14 can be variably adjusted using a controlled variable and an output control signal. Information about, for example, a current pressure state in the process volume connected to the valve can be received as an input signal. In addition, a further input variable, e.g. a mass inflow into the volume, can be provided to the controller. Based on these variables and on a predetermined target pressure that is to be set or achieved for the volume, the valve can then be adjusted in a controlled manner over the time of a control cycle, so that a mass outflow from the volume can be controlled over time by means of the valve. For this purpose, a vacuum pump is typically provided downstream of the valve, i.e. the valve is arranged between the process chamber and the pump. In this way, a desired pressure curve can be regulated.

[0083] By adjusting the position of the valve closure 14, a respective opening cross-section for the valve opening 12 can be set and thus the possible amount of gas that can be evacuated from the process volume per unit of time can be set.

[0084] For this purpose, the valve closure 14 can have a shape other than circular, in particular in order to achieve the most laminar media flow possible. To adjust the opening cross-section, the valve disk 14 can be adjusted by the control and processing unit 18 by means of the transverse movement x by the drive 190 from the open position to the intermediate position and by means of the longitudinal movement y by the drive 190 from the intermediate position to the sealing position. To fully open the flow path, the valve disk 14 can then be adjusted by the control unit by means of the longitudinal movement y from the sealing position to the intermediate position and from there by means of the transverse movement x from the intermediate position to the open position.

[0085] In the present exemplary embodiment, the drive 190 is designed as an electric motor, wherein the transmission is switchable such that driving the drive 190 brings about either the transverse movement x or the longitudinal movement y. The drive 190 and the transmission are controlled electronically by the control system. Such transmissions, in particular those with gate switches, are known from the prior art. Furthermore, it is possible to use a plurality of drives to bring about the transverse movement x and the longitudinal movement y, wherein the control system takes over the control of the drives. In such an embodiment, the plurality of drives are to be understood as parts of the drive unit.

[0086] The precise control or adjustment of the flow with the described pendulum valve is possible not only by pivoting the valve plate 14 between the open position and the intermediate position using the transverse movement x, but primarily by linearly adjusting the valve plate 14 along the opening axis A between the intermediate position and the sealing position using the longitudinal movement y. The described pendulum valve can be used for precise control tasks.

[0087] Both the valve disk 14 and the valve seat each have a sealing surface - a first and a second sealing surface. The first sealing surface on the valve closure also has a seal. This seal can, for example, be vulcanized as a polymer onto the second sealing surface. Alternatively, the seal can be designed, for example, as an O-ring in a groove in the valve closure. A sealing material can also be glued to the valve closure and thus embody the seal. In an alternative embodiment, the seal can be arranged on the side of the valve seat, in particular on the second sealing surface 13. Combinations of these embodiments are also conceivable.

[0088] The control and processing unit 18 can, for example, be integrated with the vacuum valve, i.e., the control and processing unit is provided by and with the valve. Alternatively, the control and processing unit can be physically separate from the valve 100 and, for example, be in a wireless communication connection with the drive unit 190.

[0089] Figure 2 shows a closure module 10 according to the invention in a plan view. In contrast to the valve 100 of the prior art, as shown in Figures 1a and 1b, the closure module 10 according to the invention has a pneumatic drive unit 20. In addition, the closure module 10 according to the invention is designed as a modularly installable part of a pendulum valve. The module 10 is accordingly designed such that it can be arranged, for example, on an existing wall structure, e.g. a housing wall of a process chamber or a flow channel, and interacts with this structure. The wall then accordingly provides the valve opening and the valve seat, which surrounds the opening and has a second sealing surface, and forms a second module (valve seat module) of a pendulum valve.

[0090] The valve closure 14 is designed such that a first sealing surface 15 of the valve closure 14 corresponds to the second sealing surface on the side of the intended valve seat. The sealing surfaces, in particular, have the same spatial dimensions and / or shapes.

[0091] The closure module 10 also has an arm 16 with which the valve plate 14 is moved by means of two compensating elements

[0092] 17. The compensating elements 17 allow a limited rotation of the valve closure 14 about a compensating axis connecting these compensating elements 17. This rotational possibility of the closure 14 provides a circumferentially reliable, complete contact pressure of the two sealing surfaces when the valve is closed.

[0093] The arm 16 is connected at its other end to the valve rod

[0094] 18 and can thus be swiveled around the swivel axis R.

[0095] The closure module 10 also has a connecting body 30. The drive unit 20 and the connecting body 30 are firmly connected to one another. The connecting body 30 is configured such that the closure module 10 can be connected to the valve seat, for example, by screwing it onto a corresponding housing. This allows adjustment of the valve closure 14 between an open position and a closed position.

[0096] Figure 3 shows the pneumatic drive unit 20 of a closure module according to the invention, as shown for example in Figure 2, in a sectional view.

[0097] The drive unit 20 has a housing 21 enclosing a volume. The housing 21 extends along the movement axis B and is defined by a first end 22a and a second end 22b. The two ends 22a and 22b are diametrically opposite each other along the axis B.

[0098] A first piston 23a and a second piston 23b are arranged in the housing such that they can be moved linearly along the movement axis B. Each piston 23a and 23b has a piston surface 24b and 24b, which in turn points towards the respective end 22a or 22b of the housing 21. The pistons separate respective partial volumes 25a and 25b (not shown) inside the housing and limit the size of the respective volume by the piston surface. For example, the piston surface 24a limits the partial volume 25a. The size of the partial volume 25a is also defined by the position of the piston 23a and can be varied accordingly by changing the position of the piston 23a.

[0099] In addition, a piston connector 26 is provided, which connects the first

[0100] Piston 23a is firmly connected to the second piston 23b and thus provides a joint mobility of the first piston 23a, the second piston 23b and the piston connector 26 (collectively also: piston arrangement) linearly along the movement axis B.

[0101] The drive 20 also has a connection 25a and 25b for each partial volume 25a and 25b for pressurizing the respective partial volume. Thus, when the first partial volume 25a is pressurized, the piston 23a, as shown, can be displaced together with the piston connector 26 and the second piston 23b in the direction of the second end 22b. Accordingly, when the second partial volume 25b is pressurized, the piston 23b, together with the piston connector 26 and the first piston 23a, can be displaced towards the first end 22a.

[0102] The piston connector 26 also has a coupling element 27. The coupling element 27 is designed here as a rack.

[0103] To drive the pivoting movement of the valve closure 14, the coupling element 27 is coupled to the valve rod 18 by means of a pinion 29 (transmission element). The linear movement of the coupling element 27 during a piston movement in the drive unit 20 is converted into a rotational movement by the interaction of the rack 27 and the pinion 29. To transmit the rotational movement of the pinion 29 to the valve rod 18, a gear or reduction gear (not shown) is preferably provided.

[0104] The drive unit 20 further comprises a first

[0105] Stop element 28a. This is arranged at the first end 22a of the housing 21 and provides a first stop point 29a for the first piston surface 24a, so that a movement path for the first piston 23a is limited. The stop point 29a can, for example, be provided by a stop surface of the stop element 28a. The stop element 28a accordingly serves as a movement limiter for the piston arrangement in a first direction of the first end 22a. The stop element 28a is also arranged and / or designed such that its position, spatial extent and / or shape can be changed such that a position of the first stop point 29a can be varied or adjusted with respect to a direction along the movement axis B.

[0106] In one embodiment, a stop surface or the stop point of the stop element 28a can be displaced along the movement axis, for example, by rotating the stop element 28a. For this purpose, the stop element 28a can have an external thread that interacts with an internal thread in the housing in the region of the first end 22a. Alternatively or additionally, the stop element 28a can be changed in its extension along the axis B, i.e., e.g., expanded or stretched (extended).

[0107] By adjusting the stop point 29a in this way, the freedom of movement of the piston assembly in the first direction can be changed. For example, the point 29a can be moved away from the first end 22a, thereby reducing the movement distance accordingly.

[0108] By shifting the stop point 29a and the resulting change in the travel distance of the piston assembly, a possible pivoting movement of the valve closure 14 can be changed, adjusted, or limited accordingly. This allows, for example, the closed position of the valve closure 14 to be adjusted so that, in this position, the sealing surfaces of the valve closure 14 and the valve seat are exactly opposite each other. Alternatively, the angular position of the arm 16 about the pivot axis R can be adjusted for the open position.

[0109] In this embodiment, the drive 20 shown has a second stop element 28b. The second stop element 28b is assigned to the second end 22b of the housing 21 and is designed analogously to the first stop, i.e., the second stop point of the second stop element 28b can be displaced accordingly in a direction parallel to the movement axis B.

[0110] This allows both the closed position and the open position of the valve closure 14 for the closure module 10 to be adjusted by adjusting the two stop points. The two stop points form respective stops for the piston assembly. Due to the corresponding movement transmission to the pivoting of the closure 14, the limits for the movement of the valve closure 14 can also be defined and changed.

[0111] The adjustability of the range of movement, in particular an angular range for pivoting the valve closure 14, is particularly advantageous for closure modules according to the invention which are designed for modular combination with a process unit (e.g. process chamber), the process unit providing the valve seat. The positioning of a valve closure 14 modularly connected to the valve seat can thus be calibrated by means of one or two stop elements in such a way that the valve closure, on the one hand, precisely and reliably covers and closes the valve opening and, on the other hand, just as precisely and reliably assumes a parking position in which the valve opening is released, in particular completely released.

[0112] Figure 4 shows an embodiment of a closure module 10 according to the invention in a side view.

[0113] The valve closure 14 (valve plate) is connected to the valve rod 18 by the adjusting arm 16 and is thus rotatable about the pivot axis R and relative to the connecting body 30. The drive unit 20 is fixedly connected to the connecting body 30.

[0114] Figure 5 shows the drive unit of the embodiment according to Figure 4 in an enlarged side view. The side view corresponds to a lateral plan view of a second end 22b of the pneumatic drive unit 20.

[0115] The drive unit 20 has an adjusting element 41, which is accessible from the outside. In the embodiment shown, the adjusting element 41 is designed as an element rotatable about the movement axis B and having a hexagon socket. The adjusting element 41 also has a display 42, which indicates the positioning of the stop point and thus the angle setting for the valve closure on the outside of the valve.

[0116] The adjusting element 41 is coupled to the corresponding stop element 28b and provides a transmission of the rotary movement to the stop element 28b. In particular, the adjusting element 41 and

[0117] Stop element 28b formed in one piece.

[0118] By turning the adjusting element 41, the

[0119] The stop point inside the second partial volume can be adjusted along the movement axis.

[0120] In particular, the stop element has a sealing element for sealing the first or the second partial volume.

[0121] This is particularly advantageous because the attachment point can be adjusted from the outside in order to prevent compressed air from escaping from the partial volume.

[0122] It is understood that these figures only schematically illustrate possible embodiments. The various approaches can also be combined with one another and with prior art devices and methods.

Claims

1. Closure module (10) for a pendulum valve, in particular a vacuum pendulum valve, for regulating a volume or mass flow and / or for closing and opening a valve opening (12) of the pendulum valve, with • a valve closure (14) with a first sealing surface (15), wherein the valve closure (14) is pivotally mounted about a pivot axis (R), • a pneumatic drive unit (20) coupled to the valve closure (14) and configured to provide a pivoting movement of the valve closure (14) about the pivot axis (R) such that the valve closure (14) can be adjusted from an open position to a closed position and back, and • a valve rod (18) which defines the pivot axis (R), is connected to the valve closure (14) and provides the coupling of the valve closure (14) to the pneumatic drive unit (14), characterized in that the pneumatic drive unit (20) has • a linearly extending housing (21) whose extension defines a movement axis (B), wherein the housing (21) has a first end (22a) and a second end (22b) and the ends (22a, 22b) are opposite each other along the movement axis (B), • a first piston (23a) arranged in the housing (21) so as to be movable linearly along the movement axis (B) and having a first piston surface (24a) pointing towards the first end (22a), wherein by a movement of the first piston (23a) along the A first partial volume (25a) can be varied along the movement axis (B), the volume size of which is limited at least by the first piston surface (24a), • a second piston (23b) arranged in the housing (21) so as to be movable linearly along the movement axis (B) and having a second piston surface (24b) pointing towards the second end (22b), wherein a second partial volume can be varied by a movement of the second piston (23b) along the movement axis (B), the volume size of which is limited at least by the second piston surface (24b), • a first connection (25a) for pressurising the first partial volume, • a second connection (25b) for pressurising the second partial volume, • a piston connector (26) which firmly connects the first piston (23a) to the second piston (23b) and thus provides a joint mobility of the first piston (23a), the second piston (23b) and the piston connector (26) linearly along the movement axis (B), wherein the piston connector (26) has a coupling element (27) which is coupled to the valve rod (18), in particular by means of a gear or reduction, and • a first stop element (28a) ° which is arranged in the region of the first end (22a) of the housing (21), ° provides a first stop point (29a) for the first piston surface (24a) and limits a movement path for the first piston (23a) and ° whose position, spatial extent and / or shape can be changed such that a position of the first stop point (29a) can be varied with respect to a direction along the movement axis (B).

2. Closure module (10) according to claim 1, characterized in that the pneumatic drive unit (20) has a second stop element (28b) • which is arranged in the region of the second end (22b) of the housing (21), • provides a second stop point for the second piston surface (24b) and limits a movement path for the second piston (23b) and • whose position, spatial extent and / or shape can be changed such that a position of the second attachment point can be varied with respect to a direction along the movement axis (B).

3. Closure module (10) according to claim 1 or 2, characterized in that the coupling element (27) extends linearly with respect to a direction along the movement axis (B).

4. Closure module (10) according to one of claims 1 to 3, characterized in that the coupling element (27) has a toothed rack or is designed as such.

5. Closure module (10) according to one of claims 1 to 4, characterized in that the pneumatic drive unit (20) Transmission element (29), in particular a gear or pinion, and the transmission element (29) is operatively connected to the coupling element (27) in such a way that the linear mobility of the coupling element can be converted into a rotational movement of the transmission element (29).

6. Closure module (10) according to claim 5, characterized in that the transmission element (29) provides the coupling of the valve closure (14) to the pneumatic drive unit (20) and the rotational movement of the transmission element (29) causes the pivoting movement of the valve closure (14) about the pivot axis (R).

7. Closure module (10) according to one of claims 1 to 6, characterized in that the closure module (10) has a connecting body (30), wherein • the valve closure (14) is arranged pivotably mounted relative to the connecting body (30), • the pneumatic drive unit (20) is firmly connected to the connecting body (30) and • the connecting body (30) is designed to connect the valve closure (14) to a valve seat providing the valve opening.

8. Closure module (10) according to one of claims 1 to 7, characterized in that the first and / or the second stop element (28a, 28b) has a sealing element for sealing the first and / or the second partial volume.

9. Closure module (10) according to one of claims 1 to 8, characterized in that the first and / or the second stop element (28a, 28b) has an adjusting element (41) accessible from outside the housing for varying the position of the first or second stop point with respect to a direction along the movement axis (B).

10. Closure module (10) according to one of claims 1 to 9, characterized in that the pneumatic drive unit (20) has a position sensor designed to determine a position of the first and / or second block (23a, 23b) along the movement axis.

11. Closure module (10) according to one of claims 1 to 10, characterized in that the valve closure (14) comprises a sealing material.

12. Pendulum valve (10), in particular vacuum pendulum valve, for regulating a volume or mass flow and / or for closing and opening a valve opening (12), with • a valve seat which defines the valve opening (12) defining an opening axis (A) and has a second sealing surface (13) surrounding the valve opening (12), and • a closure module (10) according to one of claims 1 to 11, wherein • the first sealing surface (15) corresponds to the second sealing surface (13) and • the valve seat and the closure module (10) are arranged relative to each other in such a way that the valve closure (14) closes the valve opening (12) in the Open position at least partially released and in the closed position the valve closure (14) is positioned over the valve opening (12) and the Opening cross-section of the valve opening (12) is covered.

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