Leakage detection device and detection method

Abstract

A leakage detection device, comprising: a detection chamber (10), the detection chamber (10) having a cavity (101), the detection chamber (10) being provided with a feeding opening (102) communicated with the cavity (101) and a blocking member (103) used for opening or blocking the feeding opening (102), and the feeding opening (102) being used for putting / taking a part to be tested into / out of the cavity (101); a vacuum generator (11), the vacuum generator (11) being communicated with the cavity (101), and a first switch valve (12) being connected between the vacuum generator (11) and the detection chamber (10); a clean gas generator (13), the clean gas generator (13) being communicated with the cavity (101), and a second switch valve (14) being connected between the clean gas generator (13) and the detection chamber (10); and a leakage detector (15), the leakage detector (15) being communicated with the cavity (101), a third switch valve (16) being connected between the leakage detector (15) and the detection chamber (10), the third switch valve (16) being used for connecting / disconnecting the leakage detector (15) to / from the cavity (101), and the leakage detector (15) being used for detecting components of gas in the cavity (101). Further provided is a leakage detection method.

Description

Leak detection equipment and detection methods

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on July 28, 2023, with application number 202310951667.9 and application name “Leak Detection Equipment and Detection Method”, all contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the technical field of leakage detection, and in particular to a leakage detection device and a detection method. Background Art

[0003] In lithium battery production lines, leak testing is required for lithium batteries after they have been filled and sealed to ensure they meet factory requirements. If the battery is not sealed tightly, the electrolyte injected into the battery can leak out, seriously affecting its performance. Therefore, leak testing is crucial.

[0004] Leak detectors, electronic components that can detect gas composition, can theoretically be used to detect lithium battery leaks. However, since lithium battery leaks typically occur in a vacuum environment, and existing leak detectors can only be used in non-vacuum environments, leak detectors are unable to detect lithium battery leaks.

[0005] Summary of the Invention

[0006] The present application discloses a leakage detection device and a detection method, which can perform leakage detection on lithium batteries.

[0007] To achieve the above objectives, in a first aspect, the present application discloses a leakage detection device, comprising:

[0008] An inspection chamber having a cavity, a loading port communicating with the cavity and a blocking member for opening or blocking the loading port, the loading port being used for placing an object to be inspected into or taking it out of the cavity;

[0009] a vacuum generating device, the vacuum generating device being in communication with the cavity, a first switching valve being connected between the vacuum generating device and the detection chamber, the first switching valve being used to connect or disconnect the vacuum generating device from the cavity, and the vacuum generating device being used to suck gas from the cavity;

[0010] a clean gas generating device, the clean gas generating device being in communication with the cavity, a second on-off valve being connected between the clean gas generating device and the detection chamber, the second on-off valve being used to connect or disconnect the clean gas generating device from the cavity, the clean gas generating device being used to deliver clean gas to the cavity;

[0011] A leak detector is connected to the cavity, and a third switch valve is connected between the leak detector and the detection chamber. The third switch valve is used to connect or disconnect the leak detector with the cavity, and the leak detector is used to detect the composition of the gas in the cavity.

[0012] When leak detection equipment is used to detect leaks in a part to be detected, the vacuum generating device is first used to place the cavity in a vacuum environment so that the gas inside the part to be detected can leak into the cavity. Then, the clean gas generating device is used to deliver clean gas to the cavity, gradually changing the cavity from a vacuum environment to a non-vacuum environment. Finally, the leak detector is used to extract the gas from the cavity to detect the composition of the gas in the cavity. With this arrangement, although the leakage of the part to be detected is detected in a vacuum environment, when the leak detector detects the composition of the gas in the cavity, the cavity is in a non-vacuum environment, and the leak detector can be used in a non-vacuum environment. Therefore, the leak detector can be used to detect leaks in the part to be detected, making the leak detector more adaptable.

[0013] Optionally, the leakage detection device further includes:

[0014] A pressure detection element is communicated with the cavity, and the pressure detection element is used to detect the pressure of the gas in the cavity.

[0015] Since the pressure detection element is connected to the cavity, the air pressure in the cavity can be monitored in real time through the pressure detection element, and the time for the vacuum generating device to suck the gas in the cavity can be controlled according to the air pressure, making the air pressure in the cavity more controllable.

[0016] Optionally, the pressure detection element is connected between the third switch valve and the detection chamber and is communicated with the third switch valve and the cavity respectively.

[0017] By connecting the pressure detection element between the third switch valve and the detection chamber and communicating with the third switch valve and the cavity respectively, the pressure detection element, the third switch valve and the cavity can be located on the same air path. Such an arrangement, on the one hand, can make the air path layout of the entire leakage detection equipment more regular. On the other hand, there is no need to set up an additional opening on the detection chamber for communicating with the pressure detection element, making the structure of the detection chamber more concise.

[0018] Optionally, the leakage detection device further includes:

[0019] A pipeline cleaning valve, comprising a first pipeline cleaning port, a second pipeline cleaning port, and a third pipeline cleaning port, wherein the pipeline cleaning valve is used to connect the second pipeline cleaning port to the first pipeline cleaning port or the third pipeline cleaning port;

[0020] The first pipeline cleaning port is communicated with the clean gas generating device, the second pipeline cleaning port is communicated with the third switch valve, and the third pipeline cleaning port is communicated with the leakage detector.

[0021] When the leakage detection device also includes a pipeline cleaning valve, by switching the connectivity status of each cleaning port in the pipeline cleaning valve, specifically, by making the second pipeline cleaning port and the third pipeline cleaning port in a connectivity state, the leakage detection device can realize the leakage detection function of the part to be detected, and by making the second pipeline cleaning port and the first pipeline cleaning port in a connectivity state, the function of cleaning the gas path can be realized. That is, while realizing the leakage detection function of the part to be detected, the function of cleaning the gas path can also be realized, and the functions are very diverse.

[0022] Optionally, the leakage detection device further includes:

[0023] A one-way valve is connected between the first pipeline cleaning port and the clean gas generating device and is communicated with the first pipeline cleaning port and the clean gas generating device respectively, and the flow direction of the gas in the one-way valve is configured to be from the clean gas generating device to the first pipeline cleaning port.

[0024] By connecting the one-way valve between the first pipeline cleaning port and the clean gas generating device, and configuring the flow direction of the gas in the one-way valve to be from the clean gas generating device to the first pipeline cleaning port, it is possible to prevent the gas in the gas path between the pipeline cleaning valve and the cavity from entering the gas path between the pipeline cleaning valve and the clean gas generating device and flowing toward the clean gas generating device, thereby preventing the gas path between the pipeline cleaning valve and the clean gas generating device from being contaminated.

[0025] Optionally, the leakage detection device further includes:

[0026] A relay valve is connected between the third switch valve and the pipeline cleaning valve, and is used to connect or disconnect the third switch valve and the second pipeline cleaning port.

[0027] By arranging a relay valve between the third switch valve and the pipeline cleaning valve, the relay valve can connect or disconnect the third switch valve and the second pipeline cleaning port, so that the connection or disconnection of the gas path between the third switch valve and the second pipeline cleaning port can be controlled by the relay valve, which is very flexible, making the controllability of the gas path between the third switch valve and the second pipeline cleaning port higher, and when the third switch valve malfunctions and cannot be disconnected, the relay valve can also replace the third switch valve to function, making the operation of the leakage detection equipment more reliable.

[0028] Optionally:

[0029] The relay valve includes a first relay port, a second relay port, and a third relay port. The relay valve is used to connect the second relay port to the first relay port or the third relay port, and the second relay port to the second pipeline cleaning port.

[0030] The leakage detection equipment also includes an instrument cleaning valve, which includes a first instrument cleaning port, a second instrument cleaning port, and a third instrument cleaning port. The instrument cleaning valve is used to connect the second instrument cleaning port to the first instrument cleaning port or the third instrument cleaning port, respectively. The first instrument cleaning port is connected to the leak detector, the second instrument cleaning port is connected to the clean gas generating device, and the third instrument cleaning port is connected to the third relay port.

[0031] By making the second instrument cleaning port of the instrument cleaning valve and the first instrument cleaning port connected, and the second pipeline cleaning port of the pipeline cleaning valve and the third pipeline cleaning port connected, since the first instrument cleaning port is connected to the leak detector and the second instrument cleaning port is connected to the clean gas generating device, when the clean gas generating device starts to deliver clean gas, the clean gas can clean the leak detector through the path of the clean gas generating device, the second instrument cleaning port, the first instrument cleaning port and the leak detector, thereby avoiding the situation where gas leaked from the part to be detected remains in the leak detector and affects the accuracy of the next detection.

[0032] Optionally, the first instrument cleaning port is also connected to the third pipeline cleaning port.

[0033] By connecting the first instrument cleaning port to the third pipeline cleaning port, when the clean gas generating device starts to deliver clean gas, the clean gas can also clean the gas path through the clean gas generating device, the second instrument cleaning port, the first instrument cleaning port, the third pipeline cleaning port, the second pipeline cleaning port, the second relay port, the first relay port, the third switch valve and the cavity, thereby making the gas path cleaner.

[0034] Optionally, an electric proportional valve is connected between the clean gas generating device and the second instrument cleaning port.

[0035] By connecting the clean gas generating device and the second instrument cleaning port with an electrical proportional valve, since the electrical proportional valve is located in the gas path where the clean gas generating device and the leak detector are located, the size of the airflow when cleaning the leak detector can be adjusted through the electrical proportional valve, so that the clean gas generating device can better clean the leak detector.

[0036] Optionally, an electric proportional valve is connected between the second switch valve and the clean gas generating device.

[0037] By connecting an electrical proportional valve between the second switch valve and the clean gas generating device, since the electrical proportional valve is located in the gas path where the clean gas generating device and the cavity are located, the size of the airflow when the clean gas is delivered to the cavity can be adjusted, making the leakage detection equipment more controllable.

[0038] In a second aspect, the present application discloses a leakage detection method, which is implemented based on the leakage detection device described in any one of the first aspects above, and the method includes:

[0039] Place the object to be tested into the cavity through the loading port;

[0040] The feeding port is blocked by the blocking member, and the vacuum generating device is connected to the cavity through the first switch valve, the clean gas generating device is disconnected from the cavity through the second switch valve, and the leakage detector is disconnected from the cavity through the third switch valve;

[0041] Using the vacuum generating device to suck the gas in the cavity so that the cavity is in a vacuum environment;

[0042] disconnecting the vacuum generating device from the cavity through the first on-off valve and connecting the cleaning gas generating device to the cavity through the second on-off valve, so as to deliver cleaning gas to the cavity through the cleaning gas generating device until the cavity is in a non-vacuum environment;

[0043] The leakage detector is connected to the cavity through the third switch valve, so that the leakage detector detects the composition of the gas in the cavity.

[0044] Optionally, after disconnecting the vacuum generating device from the cavity through the first switching valve and before connecting the cleaning gas generating device to the cavity through the second switching valve, the method further includes:

[0045] The chamber is left to stand for a preset time, so that the cavity is in a vacuum environment for a preset time.

[0046] Optionally, after the leakage detector is connected to the cavity through the third switch valve so that the leakage detector detects the composition of the gas in the cavity, the method further includes:

[0047] If the leak detector confirms that the component to be tested is leaking based on the composition of the gas, the feeding port is opened, and the second pipeline cleaning port of the pipeline cleaning valve is connected to the first pipeline cleaning port;

[0048] The cleaning gas generating device is used to sequentially deliver cleaning gas to the cavity through the first pipeline cleaning port, the second pipeline cleaning port and the third switch valve, so as to clean the gas path between the pipeline cleaning valve and the cavity with the cleaning gas.

[0049] Compared with the prior art, the present invention has the following advantages:

[0050] In the present application, when leak detection is performed on a part to be detected by a leak detection device, the cavity is first placed in a vacuum environment by a vacuum generating device so that the gas inside the part to be detected leaks into the cavity. Then, a clean gas generating device is used to deliver clean gas to the cavity so that the cavity gradually changes from a vacuum environment to a non-vacuum environment. Finally, the gas in the cavity is sucked out by the leak detector to detect the composition of the gas in the cavity. With this arrangement, although the leakage of the part to be detected is detected in a vacuum environment, when the leak detector detects the composition of the gas in the cavity, the cavity is a non-vacuum environment, and the leak detector can be used in a non-vacuum environment. Therefore, the leak detector can perform leak detection on the part to be detected, making the leak detector more adaptable.

[0051] Based on this, when the part to be tested is a lithium battery, in a vacuum environment, if the lithium battery is not tightly packaged, the electrolyte gas inside the lithium battery will slowly leak from the inside of the part to be tested into the cavity, causing the electrolyte gas leaked from the lithium battery to exist in the cavity. If the part to be tested is tightly packaged, the gas inside the lithium battery will not leak from the inside of the lithium battery into the cavity, and naturally there will be no electrolyte gas leaked from the lithium battery in the cavity. Therefore, the leak detector can confirm whether the lithium battery is leaking by detecting whether there is electrolyte gas in the cavity, that is, the leak detector can perform leak detection on the lithium battery. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0053] FIG1 is a schematic structural diagram of a first leakage detection device provided in an embodiment of the present application;

[0054] FIG2 is a schematic structural diagram of a second leakage detection device provided in an embodiment of the present application;

[0055] FIG3 is a schematic structural diagram of a third leakage detection device provided in an embodiment of the present application;

[0056] FIG4 is a schematic structural diagram of a fourth leakage detection device provided in an embodiment of the present application;

[0057] FIG5 is a schematic structural diagram of a fifth leakage detection device provided in an embodiment of the present application;

[0058] FIG6 is a schematic structural diagram of a sixth leakage detection device provided in an embodiment of the present application;

[0059] FIG7 is a schematic structural diagram of a seventh leakage detection device provided in an embodiment of the present application;

[0060] FIG8 is a schematic structural diagram of an eighth leakage detection device provided in an embodiment of the present application;

[0061] FIG9 is a flow chart of a leakage detection method provided in an embodiment of the present application;

[0062] FIG10 is a flow chart of another leakage detection method provided in an embodiment of the present application.

[0063] Explanation of main reference numerals: 10-detection chamber; 101-cavity; 102-feeding port; 103-sealing part; 11-vacuum generating device; 12-first switch valve; 13-cleaning gas generating device; 14-second switch valve; 15-leakage detector; 16-third switch valve; 17-pressure detecting element; 18-pipeline cleaning valve; 181-first pipeline cleaning port; 182-second pipeline cleaning port; 183-third pipeline cleaning port; 19-one-way valve; 20-relay valve; 201-first relay port; 202-second relay port; 203-third relay port; 21-instrument cleaning valve; 211-first instrument cleaning port; 212-second instrument cleaning port; 213-third instrument cleaning port; 22-electric proportional valve; 100-leakage detection equipment. DETAILED DESCRIPTION

[0064] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0065] In this application, terms such as "upper," "lower," "left," "right," "front," "back," "top," "bottom," "inner," "outer," "center," "vertical," "horizontal," "transverse," and "longitudinal" indicate positions or locations based on the positions or locations shown in the accompanying drawings. These terms are primarily intended to better describe this application and its embodiments and are not intended to limit the devices, elements, or components indicated to having a specific orientation, or to being constructed or operated in a specific orientation.

[0066] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to express a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0067] Furthermore, the terms "installed," "disposed," "provided with," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections, indirect connections through an intermediary, or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0068] Furthermore, the terms "first," "second," and the like are primarily used to distinguish between different devices, elements, or components (which may or may not be of the same type and configuration), and are not intended to indicate or imply the relative importance or quantity of the devices, elements, or components indicated. Unless otherwise specified, "plurality" means two or more.

[0069] The technical solution of the present application will be further described below with reference to specific embodiments and drawings.

[0070] Example 1

[0071] FIG1 is a schematic structural diagram of a leakage detection device 100 provided in an embodiment of the present application.

[0072] Referring to Figure 1 , leak detection equipment 100 includes a detection chamber 10, a vacuum generator 11, a clean gas generator 13, and a leak detector 15. The detection chamber 10 has a cavity 101, a loading port 102 communicating with the cavity 101, and a sealing member 103 for opening or closing the loading port 102. The loading port 102 is used to allow an object to be tested to be placed in or removed from the cavity 101. The vacuum generator 11 is in communication with the cavity 101. A first on-off valve 12 is connected between the vacuum generator 11 and the detection chamber 10. The first on-off valve 12 is used to connect or disconnect the vacuum generator 11 with the cavity 101. The vacuum generator 11 is used to extract gas from the cavity 101.

[0073] A clean gas generator 13 is in communication with the cavity 101. A second on-off valve 14 is connected between the clean gas generator 13 and the detection chamber 10. The second on-off valve 14 is used to connect or disconnect the clean gas generator 13 with the cavity 101. The clean gas generator 13 is used to deliver clean gas to the cavity 101. A leak detector 15 is in communication with the cavity 101. A third on-off valve 16 is connected between the leak detector 15 and the detection chamber 10. The third on-off valve 16 is used to connect or disconnect the leak detector 15 with the cavity 101. The leak detector 15 is used to detect the composition of the gas in the cavity 101.

[0074] In an embodiment of the present application, when a leak detection device 100 is used to perform leak detection on a part to be detected, first, the blocking piece 103 can be used to open the loading port 102 on the detection chamber 10, and then the part to be detected can be placed in the cavity 101 of the detection chamber 10. Next, the blocking piece 103 can be used to block the loading port 102 on the detection chamber 10.

[0075] After the sealing member 103 blocks the loading port 102 on the detection chamber 10, since the first switch valve 12 is connected between the vacuum generating device 11 and the detection chamber 10, the second switch valve 14 is connected between the cleaning gas generating device 13 and the detection chamber 10, and the third switch valve 16 is connected between the leakage detector 15 and the detection chamber 10, it is only necessary to open the first switch valve 12 and close the second switch valve 14 and the third switch valve 16 respectively, so that the vacuum generating device 11 can be connected to the cavity 101 and the cleaning gas generating device 13 and the leakage detector 15 can be disconnected from the cavity 101. In this state, when the vacuum generating device 11 starts to suck the gas in the cavity 101 and extract the gas out of the cavity 101, the air pressure in the cavity 101 can be gradually reduced and the cavity 101 is in a vacuum environment.

[0076] After the cavity 101 is in a vacuum environment (the air pressure is about -98KPa), the first switch valve 12 can be closed and the pressure can be maintained for a preset time (20s). At this time, if the component to be detected is not tightly packaged, the gas inside the component to be detected will slowly leak from the inside of the component to be detected into the cavity 101, so that the gas leaked from the component to be detected exists in the cavity 101. If the component to be detected is tightly packaged, the gas inside the component to be detected will not leak from the inside of the component to be detected into the cavity 101, and naturally there will be no gas leaked from the component to be detected in the cavity 101.

[0077] Next, the second switch valve 14 can be opened to connect the clean gas generating device 13 with the cavity 101. Then, the clean gas can be transported to the cavity 101 through the clean gas generating device 13. As the clean gas gradually enters the cavity 101, the cavity 101 will gradually change from a vacuum environment to a non-vacuum environment (the air pressure rises from about -98Kpa to about 8Kpa).

[0078] It is worth noting that the above-mentioned non-vacuum environment should be understood in a broad sense, that is, when the air pressure in the cavity 101 is greater than the air pressure when the cavity 101 is in a vacuum environment and is within the range of 0KPa-150KPa, it can be considered that the cavity 101 is a non-vacuum environment at this time.

[0079] After the cavity 101 changes from a vacuum environment to a non-vacuum environment, the third switch valve 16 can be opened to connect the leak detector 15 to the cavity 101. Then, the gas in the cavity 101 can be sucked by the leak detector 15, so that the gas in the cavity 101 enters the leak detector 15, and then the composition of the gas in the cavity 101 can be detected by the leak detector 15. When the leak detector 15 detects that the composition of the gas in the cavity 101 contains the gas inside the to-be-detected part, it can be confirmed that the to-be-detected part has leaked. When the leak detector 15 detects that the composition of the gas in the cavity 101 does not contain the gas inside the to-be-detected part, it can be confirmed that the to-be-detected part has not leaked. In other words, it can be confirmed whether the to-be-detected part is leaking, and leak detection of the to-be-detected part can be achieved.

[0080] It can be understood that in order for the leak detector 15 to confirm whether the part to be detected is leaking based on the composition of the gas in the cavity 101, the composition of the clean gas must be different from the composition of the gas inside the part to be detected. In this way, when the leak detector 15 detects that the composition of the gas in the cavity 101 contains the gas inside the part to be detected, it can be confirmed that the part to be detected is leaking.

[0081] It can be seen that when leak detection is performed on the part to be detected by the leak detection device 100, the vacuum generating device 11 is first used to place the cavity 101 in a vacuum environment so that the gas inside the part to be detected leaks into the cavity 101. Then, the clean gas generating device 13 is used to deliver clean gas to the cavity 101, so that the cavity 101 gradually changes from a vacuum environment to a non-vacuum environment. Finally, the gas in the cavity 101 is sucked out by the leak detector 15 to detect the composition of the gas in the cavity 101. With this arrangement, although the leakage of the part to be detected is detected in a vacuum environment, when the leak detector 15 detects the composition of the gas in the cavity 101, the cavity 101 is in a non-vacuum environment, and the leak detector 15 can be used in a non-vacuum environment. Therefore, the leak detector 15 can perform leak detection on the part to be detected, making the leak detector 15 more adaptable.

[0082] Based on this, when the part to be tested is a lithium battery, and the cavity 101 is in a vacuum environment, if the lithium battery is not tightly packaged, the electrolyte gas inside the lithium battery will slowly leak from the inside of the part to be tested into the cavity 101, so that the electrolyte gas leaked from the lithium battery exists in the cavity 101. If the part to be tested is tightly packaged, the gas inside the lithium battery will not leak from the inside of the lithium battery into the cavity 101, and naturally there will be no electrolyte gas leaked from the lithium battery in the cavity 101. Therefore, the leak detector 15 can confirm whether the lithium battery is leaking by detecting whether there is electrolyte gas in the cavity 101, that is, the leak detector can perform leak detection on the lithium battery.

[0083] Among them, the part to be tested being a lithium battery is only a possible interpretation of the part to be tested based on a specific application scenario in the embodiment of the present application. Of course, the part to be tested can also be understood as any other possible component that needs to be tested for leakage, and the embodiment of the present application does not limit this.

[0084] It is worth noting that, considering that when the leak detector 15 detects that the cavity 101 contains gas inside the part to be detected, it may be caused by residual gas leaked from the previous part to be detected, so that the detection result is affected by the previous part to be detected, and thus the detection result is inaccurate. In order to avoid this situation, before the leak detector 15 sucks the gas in the cavity 101 to detect the composition of the gas in the cavity 101, the action of delivering clean gas to the cavity 101 and sucking the gas in the cavity 101 can be performed multiple times to replace the gas in the cavity. In this way, the residual gas leaked from the previous part to be detected can be completely discharged from the cavity 101, thereby avoiding the situation where the detection result is affected by the previous part to be detected, and making the detection result more accurate.

[0085] In the process of replacing the gas in the cavity, when the gas in the cavity 101 is sucked by the vacuum generating device 11, the suction can be stopped after the gas pressure in the cavity 101 drops to about -60KPa. When the clean gas is delivered to the cavity 101 by the clean gas generating device 13, the delivery of the clean gas to the cavity 101 can be stopped after the gas pressure in the cavity 101 rises to about 0KPa. In this way, the gas in the cavity can be replaced more completely.

[0086] It should be noted that the vacuum generating device 11 may be a vacuum pump or any other device capable of generating a vacuum, which is not limited in the present embodiment. The clean gas generating device 13 may be an air pump or any other device capable of generating a clean gas, which is not limited in the present embodiment.

[0087] In order to allow the leak detector 15 to more accurately determine whether the detected part is leaking, the leak detector 15 can draw gas from the cavity 101 for approximately 5 seconds. This allows the leak detector 15 to more accurately determine whether the detected part is leaking without taking too much time. Of course, the leak detector 15 can draw gas from the cavity 101 for other durations, such as 6 seconds or 7 seconds, and this is not limited in this embodiment of the present application.

[0088] The first on-off valve 12 may be a ball valve or any other valve capable of connecting or disconnecting the vacuum generating device 11 from the cavity 101, and this embodiment of the present application is not limited thereto. Similarly, the structures of the second on-off valve 14 and the third on-off valve 16 may be the same as that of the first on-off valve 12, and will not be further described in this embodiment of the present application.

[0089] The blocking member 103 may be understood as a sealing door or any component capable of blocking or opening the loading port 102 , and this embodiment of the present application does not limit this.

[0090] In some embodiments, referring to FIG. 2 , the leakage detection device further includes a pressure detection element 17 . The pressure detection element 17 is in communication with the cavity 101 , and is used to detect the pressure of the gas in the cavity 101 .

[0091] Since the pressure detection element 17 is connected to the cavity 101, the air pressure in the cavity 101 can be monitored in real time through the pressure detection element 17, and then the time for the vacuum generating device 11 to suck the gas in the cavity 101 can be controlled according to the air pressure, so that the air pressure in the cavity 101 is more controllable.

[0092] The pressure detection element 17 may be a pressure gauge, or other possible components capable of detecting the air pressure in the cavity 101 , which is not limited in this embodiment of the present application.

[0093] In some embodiments, referring to FIG. 3 , the pressure detection element 17 is connected between the third switch valve 16 and the detection chamber 10 and is in communication with the third switch valve 16 and the cavity 101 , respectively.

[0094] By connecting the pressure detection element 17 between the third switch valve 16 and the detection chamber 10 and communicating with the third switch valve 16 and the cavity 101 respectively, the pressure detection element 17, the third switch valve 16 and the cavity 101 can be located on the same air path. Such an arrangement, on the one hand, can make the air path layout of the entire leakage detection equipment more regular. On the other hand, there is no need to set an additional opening on the detection chamber 10 for communicating with the pressure detection element 17, so that the structure of the detection chamber 10 is simpler.

[0095] When the part to be tested leaks, gas leaked from the part to be tested will exist in the cavity 101. At this time, when the gas in the cavity 101 is sucked out by the leak detector 15, gas leaked from the part to be tested will inevitably remain in the pipeline between the leak detector 15 and the cavity 101, causing the gas path between the leak detector 15 and the cavity 101 to be contaminated, affecting the next use.

[0096] To avoid this, in some embodiments, as shown in FIG4 , the leak detection apparatus further includes a pipeline cleaning valve 18 , which includes a first pipeline cleaning port 181 , a second pipeline cleaning port 182 , and a third pipeline cleaning port 183 . Pipe cleaning valve 18 is configured to connect second pipeline cleaning port 182 to first pipeline cleaning port 181 or third pipeline cleaning port 183 . First pipeline cleaning port 181 is connected to clean gas generator 13 , second pipeline cleaning port 182 is connected to third on / off valve 16 , and third pipeline cleaning port 183 is connected to leak detector 15 .

[0097] In the case where the leakage detection equipment also includes a pipeline cleaning valve 18, when the pipeline cleaning valve 18 is in a state where the second pipeline cleaning port 182 is connected to the third pipeline cleaning port 183, since the second pipeline cleaning port 182 is connected to the third switch valve 16 and the third pipeline cleaning port 183 is connected to the leakage detector 15, the leakage detector 15 can be connected to the cavity 101 through the third pipeline cleaning port 183, the second pipeline cleaning port 182 and the third switch valve 16 in sequence, and the leakage detector 15 can detect the composition of the gas in the cavity 101 by sucking the gas in the cavity 101, thereby realizing leakage detection of the component to be detected.

[0098] When the pipeline cleaning valve 18 is switched to the state where the second pipeline cleaning port 182 is connected to the first pipeline cleaning port 181, since the first pipeline cleaning port 181 is connected to the clean gas generating device 13, the clean gas generating device 13 can be connected to the cavity 101 through the first pipeline cleaning port 181, the second pipeline cleaning port 182 and the third switch valve 16 in sequence. In this way, when the clean gas is delivered to the cavity 101 by the clean gas generating device 13 (at this time, the feeding port 102 is ensured to be open), the clean gas can be sequentially fed through the first pipeline cleaning port 181, the second pipeline cleaning port 182 and the third switch valve 16. After entering the cavity 101, the residual gas in the air path from the first pipeline cleaning port 181, the second pipeline cleaning port 182, and the third switch valve 16 to the cavity 101 can be blown into the cavity 101 and discharged out of the cavity 101 from the loading port 102, which can play the role of cleaning the air path between the pipeline cleaning valve 18 and the cavity 101, and thus can make the air path between the leakage detector 15 and the cavity 101 cleaner to a certain extent, thereby avoiding or reducing the contamination of the air path between the leakage detector 15 and the cavity 101 to a certain extent, and will not affect the next use of the leakage detection equipment.

[0099] It can be seen that when the leakage detection equipment also includes a pipeline cleaning valve 18, by switching the connectivity status of each cleaning port in the pipeline cleaning valve 18, specifically, by making the second pipeline cleaning port 182 and the third pipeline cleaning port 183 in a connectivity state, the leakage detection equipment can realize the leakage detection function of the part to be detected, and by making the second pipeline cleaning port 182 and the first pipeline cleaning port 181 in a connectivity state, the function of cleaning the gas path can be realized, that is, the leakage detection function of the part to be detected can be realized while the cleaning function of the gas path can be realized, and the functions are very diverse.

[0100] Referring to Figure 5, in order to prevent the gas in the gas path between the pipeline cleaning valve 18 and the cavity 101 from entering the gas path between the pipeline cleaning valve 18 and the clean gas generating device 13 and flowing toward the clean gas generating device 13 when the pipeline cleaning valve 18 is switched to the state where the second pipeline cleaning port 182 is connected to the first pipeline cleaning port 181, in some embodiments, the leakage detection equipment also includes: a one-way valve 19, the one-way valve 19 is connected between the first pipeline cleaning port 181 and the clean gas generating device 13 and is respectively connected to the first pipeline cleaning port 181 and the clean gas generating device 13, and the flow direction of the gas in the one-way valve 19 is configured to be from the clean gas generating device 13 to the first pipeline cleaning port 181.

[0101] By connecting the one-way valve 19 between the first pipeline cleaning port 181 and the clean gas generating device 13, and configuring the flow direction of the gas in the one-way valve 19 to be from the clean gas generating device 13 to the first pipeline cleaning port 181, it is possible to prevent the gas in the gas path between the pipeline cleaning valve 18 and the cavity 101 from entering the gas path between the pipeline cleaning valve 18 and the clean gas generating device 13 and flowing toward the clean gas generating device 13, thereby preventing the gas path between the pipeline cleaning valve 18 and the clean gas generating device 13 from being contaminated.

[0102] In some embodiments, referring to FIG6 , the leakage detection device further includes: a relay valve 20 , which is connected between the third switch valve 16 and the pipeline cleaning valve 18 , and is used to connect or disconnect the third switch valve 16 and the second pipeline cleaning port 182 .

[0103] By setting a relay valve 20 between the third switch valve 16 and the pipeline cleaning valve 18, since the relay valve 20 can connect or disconnect the third switch valve 16 and the second pipeline cleaning port 182, the connection or disconnection of the air path between the third switch valve 16 and the second pipeline cleaning port 182 can be controlled by the relay valve 20, which is very flexible, making the controllability of the air path between the third switch valve 16 and the second pipeline cleaning port 182 higher, and when the third switch valve 16 malfunctions and cannot be disconnected, the relay valve 20 can also replace the third switch valve 16 to function, making the leakage detection equipment more reliable.

[0104] If the leak detector 15 detects a leak in the part to be detected, gas leaked from the part to be detected will remain in the leak detector 15, affecting the accuracy of the next detection. In order to avoid this situation, in some embodiments, see Figure 7, the relay valve 20 includes a first relay port 201, a second relay port 202 and a third relay port 203. The relay valve 20 is used to connect the second relay port 202 to the first relay port 201 or the third relay port 203 respectively, and the second relay port 202 is connected to the second pipeline cleaning port 182. The leakage detection equipment also includes an instrument cleaning valve 21, which includes a first instrument cleaning port 211, a second instrument cleaning port 212 and a third instrument cleaning port 213. The instrument cleaning valve 21 is used to connect the second instrument cleaning port 212 with the first instrument cleaning port 211 or the third instrument cleaning port 213 respectively. The first instrument cleaning port 211 is connected to the leakage detector 15, the second instrument cleaning port 212 is connected to the clean gas generating device 13, and the third instrument cleaning port 213 is connected to the third relay port 203.

[0105] In this arrangement, by making the second instrument cleaning port 212 of the instrument cleaning valve 21 and the first instrument cleaning port 211 in a connected state, and the second pipeline cleaning port 182 and the third pipeline cleaning port 183 of the pipeline cleaning valve 18 in a connected state, since the first instrument cleaning port 211 is connected to the leak detector 15, and the second instrument cleaning port 212 is connected to the clean gas generating device 13, therefore, when the clean gas generating device 13 starts to deliver clean gas, the clean gas can clean the leak detector 15 through the path of the clean gas generating device 13, the second instrument cleaning port 212, the first instrument cleaning port 211 and the leak detector 15, thereby avoiding the situation where gas leaked from the to-be-detected component remains in the leak detector 15 and affects the accuracy of the next detection.

[0106] Furthermore, in some embodiments, referring to FIG7 , the first instrument cleaning port 211 is also connected to the third pipeline cleaning port 183. By making the first instrument cleaning port 211 also connected to the third pipeline cleaning port 183, when the clean gas generating device 13 starts to deliver clean gas, the clean gas can also pass through the clean gas generating device 13, the second instrument cleaning port 212, the first instrument cleaning port 211, the third pipeline cleaning port 183, the second pipeline cleaning port 182, the second relay port 202, the first relay port 201, the third switch valve 16 and the cavity 101 to clean the gas path, thereby making the gas path cleaner.

[0107] In some embodiments, referring to FIG. 8 , an electric proportional valve 22 is connected between the clean gas generating device 13 and the second instrument cleaning port 212 .

[0108] By connecting the electric proportional valve 22 between the clean gas generating device 13 and the second instrument cleaning port 212, since the electric proportional valve 22 is located in the gas path where the clean gas generating device 13 and the leakage detector 15 are located, the size of the airflow when cleaning the leakage detector 15 can be adjusted through the electric proportional valve 22, so that the clean gas generating device 13 can better clean the leakage detector 15.

[0109] Furthermore, referring to FIG8 , an electric proportional valve 22 is connected between the second on-off valve 14 and the clean gas generating device 13. By connecting the electric proportional valve 22 between the second on-off valve 14 and the clean gas generating device 13, and because the electric proportional valve 22 is located in the gas path between the clean gas generating device 13 and the cavity 101, the flow of clean gas into the cavity 101 can be adjusted, thereby enhancing the controllability of the leak detection device 100.

[0110] Example 2

[0111] FIG9 is a flow chart of a leakage detection method provided in an embodiment of the present application.

[0112] 9 , the method may be implemented based on any of the leakage detection devices in the first embodiment, and the method includes:

[0113] Step 101: Place the part to be tested into the cavity through the loading port.

[0114] Step 102: The feed port is sealed by a sealing member, and the vacuum generating device is connected to the cavity by a first switch valve, the cleaning gas generating device is disconnected from the cavity by a second switch valve, and the leakage detector is disconnected from the cavity by a third switch valve.

[0115] Step 103: Use a vacuum generating device to extract the gas in the cavity to put the cavity into a vacuum environment.

[0116] Step 104: disconnecting the vacuum generating device from the cavity through the first switch valve and connecting the cleaning gas generating device to the cavity through the second switch valve, so as to deliver cleaning gas to the cavity through the cleaning gas generating device until the cavity is in a non-vacuum environment.

[0117] Step 105: The leak detector is connected to the cavity through the third switch valve, so that the leak detector detects the composition of the gas in the cavity.

[0118] In the embodiment of the present application, when a leak detection device is required to perform leak detection on a component to be detected, the component to be detected can first be placed into the cavity through the loading port. Then, the loading port can be blocked with a blocking member, and the vacuum generating device can be connected to the cavity via a first switching valve, the clean gas generating device can be disconnected from the cavity via a second switching valve, and the leak detector can be disconnected from the cavity via a third switching valve. This arrangement is equivalent to connecting the cavity only to the vacuum generating device, which can prevent leakage in other locations of the cavity.

[0119] Then, a vacuum generating device can be used to suck the gas in the cavity to put the cavity in a vacuum environment. When the cavity is in a vacuum environment, the pressure inside the cavity is relatively small. If the part to be tested is not tightly packaged, the gas inside the part to be tested will slowly leak from the inside of the part to be tested into the cavity, so that the gas leaked from the part to be tested exists in the cavity.

[0120] Then, the vacuum generating device can be disconnected from the cavity through the first switching valve, and the cleaning gas generating device can be connected to the cavity through the second switching valve, and the cleaning gas generating device can be used to deliver cleaning gas to the cavity. In the process of delivering cleaning gas to the cavity, the air pressure in the cavity will gradually increase until the cavity is in a non-vacuum environment.

[0121] After the cavity is in a non-vacuum environment, the third switch valve can be opened to connect the leak detector to the cavity, thereby allowing the gas in the cavity to enter the leak detector, so that the composition of the gas in the cavity can be detected by the leak detector. When the leak detector detects that the composition of the gas in the cavity contains the gas inside the to-be-detected part, it can be confirmed that the to-be-detected part has leaked. When the leak detector detects that the composition of the gas in the cavity does not contain the gas inside the to-be-detected part, it can be confirmed that the to-be-detected part has not leaked. In other words, it can be confirmed whether the to-be-detected part is leaking, and leak detection of the to-be-detected part can be achieved.

[0122] It can be seen that the method provided in the embodiment of the present application first puts the cavity into a vacuum environment through a vacuum generating device so that the gas inside the part to be detected leaks into the cavity, then, a clean gas generating device is used to deliver clean gas to the cavity, so that the cavity gradually changes from a vacuum environment to a non-vacuum environment, and finally the leak detector is used to detect the composition of the gas in the cavity. With this arrangement, although the leakage of the part to be detected is detected in a vacuum environment, when the leak detector detects the composition of the gas in the cavity, the cavity is a non-vacuum environment, and the leak detector can be used in a non-vacuum environment. Therefore, the leak detector can perform leak detection on the part to be detected, making the leak detector more adaptable.

[0123] FIG10 is a flow chart of another leakage detection method provided in an embodiment of the present application.

[0124] Referring to FIG. 10 , the method may be implemented based on any of the leak detection devices in the first embodiment, and the method includes:

[0125] Step 201: Place the part to be tested into the cavity through the loading port.

[0126] The part to be tested can be placed into the cavity through the loading port manually, or by mechanical equipment, such as a robot, etc., and this embodiment of the present application does not limit this.

[0127] Step 202: The feed port is sealed by a sealing member, and the vacuum generating device is connected to the cavity through a first switch valve, the cleaning gas generating device is disconnected from the cavity through a second switch valve, and the leakage detector is disconnected from the cavity through a third switch valve.

[0128] Among them, the order of the four processes of blocking the feeding port by a blocking piece, connecting the vacuum generating device with the cavity by a first switch valve, disconnecting the cleaning gas generating device from the cavity by a second switch valve, and disconnecting the leakage detector from the cavity by a third switch valve can be any possible order, and it is only necessary to ensure that the feeding port is in a blocked state, the vacuum generating device and the cavity are in a connected state, and the clean gas generating device and the leakage detector are respectively disconnected from the cavity.

[0129] Step 203: Use a vacuum generating device to extract the gas in the cavity to put the cavity into a vacuum environment.

[0130] When the gas in the cavity is sucked by the vacuum generating device, the gas in the cavity will be gradually reduced, thereby achieving a vacuum-like environment.

[0131] Among them, the above-mentioned vacuum environment can be understood in a broad sense, that is, it is only necessary to make the cavity roughly in a vacuum environment with a low air pressure, so that when the package of the part to be tested is not tight, the gas inside the part to be tested can leak from the inside of the part to be tested into the cavity. The embodiment of the present application does not impose strict restrictions on the vacuum environment.

[0132] Step 204: disconnecting the vacuum generating device from the cavity via the first switching valve.

[0133] When the vacuum generating device is disconnected from the cavity by the first switch valve, the cavity will be isolated from the outside world, which facilitates maintaining a vacuum environment in the cavity.

[0134] Step 205: Let it stand for a preset time, so that the cavity is in a vacuum environment for a preset time.

[0135] Under the premise that the cavity is a vacuum environment, by standing still for a preset time, the time in which the cavity is in the vacuum environment can reach a preset time, that is, the cavity is pressurized for a preset time. In this way, when the package of the to-be-tested part is not tight, the gas inside the to-be-tested part can be fully leaked from the inside of the to-be-tested part into the cavity.

[0136] The preset time may be any value between 10s and 30s, for example, the preset time may be 10s, 20s or 30s, etc. The embodiment of the present application does not limit the preset time.

[0137] Step 206 : connecting the cleaning gas generating device to the cavity through the second switching valve, so as to deliver the cleaning gas to the cavity through the cleaning gas generating device until the cavity is in a non-vacuum environment.

[0138] When the clean gas is delivered to the cavity by the clean gas generating device, the gas pressure in the cavity will gradually increase with the input of the clean gas, thereby achieving the purpose of changing the cavity from a vacuum environment to a non-vacuum environment.

[0139] Step 207: The leakage detector is connected to the cavity through the third switch valve, so that the leakage detector detects the composition of the gas in the cavity.

[0140] After the leak detector is connected to the cavity, the gas in the cavity can be sucked by the leak detector, so that the gas in the cavity enters the leak detector, thereby achieving the purpose of detecting the composition of the gas in the cavity through the leak detector.

[0141] Step 208: If the leak detector confirms that the test piece is leaking based on the composition of the gas, the feed port is opened and the second pipeline cleaning port of the pipeline cleaning valve is connected to the first pipeline cleaning port.

[0142] When the leak detector detects leakage in the part to be tested, the second pipeline cleaning port of the pipeline cleaning valve can be connected to the first pipeline cleaning port. When the second pipeline cleaning port of the pipeline cleaning valve is connected to the first pipeline cleaning port, the cleaning gas generating device can be connected to the cavity through the second pipeline cleaning port, the first pipeline cleaning port and the third switch valve. In addition, the feeding port can be opened to connect the cavity with the external environment.

[0143] Step 209: Use the cleaning gas generating device to sequentially deliver cleaning gas to the cavity through the first pipeline cleaning port, the second pipeline cleaning port and the third switch valve, so as to clean the gas path between the pipeline cleaning valve and the cavity through the cleaning gas.

[0144] When the part to be detected leaks, gas leaked from the part to be detected may remain in the air path between the pipeline cleaning valve and the cavity. If it is not cleaned in time, the detection result will be inaccurate during the next leakage detection. Based on this, by using a cleaning gas generating device to sequentially deliver cleaning gas to the cavity through the first pipeline cleaning port, the second pipeline cleaning port and the third switch valve, the residual gas can be blown into the cavity from the air path between the pipeline cleaning valve and the cavity and blown out of the cavity through the feeding port, thereby achieving the purpose of cleaning the air path between the pipeline cleaning valve and the cavity, thereby avoiding the occurrence of inaccurate detection results.

[0145] In the embodiment of the present application, the cavity is first placed in a vacuum environment by a vacuum generating device so that the gas inside the part to be detected leaks into the cavity. Then, a clean gas generating device is used to deliver clean gas to the cavity, so that the cavity gradually changes from a vacuum environment to a non-vacuum environment. Finally, the composition of the gas in the cavity is detected by a leak detector. With this arrangement, although the leakage of the part to be detected is detected in a vacuum environment, when the leak detector detects the composition of the gas in the cavity, the cavity is in a non-vacuum environment, and the leak detector can be used in a non-vacuum environment. Therefore, the leak detector can perform leak detection on the part to be detected, making the leak detector more adaptable.

[0146] In addition, when the leak detector detects a leak in the part to be tested, since the cleaning gas generating device can sequentially deliver cleaning gas to the cavity through the first pipeline cleaning port, the second pipeline cleaning port and the third switch valve, the residual gas can be blown into the cavity from the gas path between the pipeline cleaning valve and the cavity and blown out of the cavity through the feeding port. Therefore, the purpose of cleaning the gas path between the pipeline cleaning valve and the cavity can be achieved, thereby avoiding the occurrence of inaccurate detection results.

[0147] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some or all of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A leak detection device, characterized in that: The leakage detection device comprises: A testing chamber (10), the testing chamber (10) having a cavity (101), the testing chamber (10) being provided with a loading port (102) communicating with the cavity (101) and a blocking member (103) for opening or blocking the loading port (102), the loading port (102) being used for placing a to-be-tested object into or taking it out of the cavity (101); a vacuum generating device (11), the vacuum generating device (11) being in communication with the cavity (101), a first switch valve (12) being connected between the vacuum generating device (11) and the detection chamber (10), the first switch valve (12) being used to connect or disconnect the vacuum generating device (11) and the cavity (101), and the vacuum generating device (11) being used to extract gas in the cavity (101); a clean gas generating device (13), the clean gas generating device (13) being in communication with the cavity (101), a second switch valve (14) being connected between the clean gas generating device (13) and the detection chamber (10), the second switch valve (14) being used to connect or disconnect the clean gas generating device (13) and the cavity (101), the clean gas generating device (13) being used to deliver clean gas to the cavity (101); A leakage detector (15), the leakage detector (15) being in communication with the cavity (101), a third switch valve (16) being connected between the leakage detector (15) and the detection chamber (10), the third switch valve (16) being used to connect or disconnect the leakage detector (15) and the cavity (101), the leakage detector (15) being used to detect the composition of the gas in the cavity (101).

2. The leak detection device according to claim 1, characterized in that The leakage detection device also includes: A pressure detection element (17), the pressure detection element (17) being in communication with the cavity (101), and the pressure detection element (17) being used to detect the pressure of the gas in the cavity (101).

3. The leak detection device according to claim 2, characterized in that The pressure detection element (17) is connected between the third switch valve (16) and the detection chamber (10) and is communicated with the third switch valve (16) and the cavity (101) respectively.

4. The leakage detection device according to any one of claims 1 to 3, characterized in that: The leakage detection device also includes: A pipeline cleaning valve (18), the pipeline cleaning valve (18) comprising a first pipeline cleaning port (181), a second pipeline cleaning port (182) and a third pipeline cleaning port (183), the pipeline cleaning valve (18) being used to connect the second pipeline cleaning port (182) with the first pipeline cleaning port (181) or the third pipeline cleaning port (183); The first pipeline cleaning port (181) is connected to the clean gas generating device (13), the second pipeline cleaning port (182) is connected to the third switch valve (16), and the third pipeline cleaning port (183) is connected to the leakage detector (15).

5. The leak detection device according to claim 4, characterized in that The leakage detection device also includes: a one-way valve (19), the one-way valve (19) being connected between the first pipeline cleaning port (181) and the clean gas generating device (13) and being respectively connected to the first pipeline cleaning port (181) and the clean gas generating device (13) The one-way valve (19) is connected to the first pipeline cleaning port (181), and the flow direction of the gas in the one-way valve (19) is configured to be from the clean gas generating device (13) to the first pipeline cleaning port (181).

6. The leakage detection device according to any one of claims 1 to 5, characterized in that: The leakage detection device also includes: A relay valve (20), the relay valve (20) is connected between the third switch valve (16) and the pipeline cleaning valve (18), and the relay valve (20) is used to connect or disconnect the third switch valve (16) and the second pipeline cleaning port (182).

7. The leak detection device according to claim 6, characterized in that: The relay valve (20) comprises a first relay port (201), a second relay port (202) and a third relay port (203); the relay valve (20) is used to connect the second relay port (202) to the first relay port (201) or the third relay port (203), and the second relay port (202) to the second pipeline cleaning port (182); The leakage detection device further comprises an instrument cleaning valve (21), the instrument cleaning valve (21) comprising a first instrument cleaning port (211), a second instrument cleaning port (212) and a third instrument cleaning port (213), the instrument cleaning valve (21) being used to connect the second instrument cleaning port (212) to the first instrument cleaning port (211) or the third instrument cleaning port (213), the first instrument cleaning port (211) being connected to the leakage detector (15), the second instrument cleaning port (212) being connected to the clean gas generating device (13), and the third instrument cleaning port (213) being connected to the third relay port (203).

8. The leak detection device according to claim 7, characterized in that The first instrument cleaning port (211) is also in communication with the third pipeline cleaning port (183).

9. The leak detection device according to claim 7, characterized in that An electric proportional valve (22) is connected between the clean gas generating device (13) and the second instrument cleaning port (212).

10. The leakage detection device according to any one of claims 1 to 9, characterized in that: An electric proportional valve (22) is connected between the second switch valve (14) and the clean gas generating device (13).

11. A leakage detection method, characterized in that: The method is implemented based on the leakage detection device according to any one of claims 1 to 10, comprising: Place the object to be tested into the cavity through the loading port; The feeding port is blocked by the blocking member, and the vacuum generating device is connected to the cavity by the first switch valve, the clean gas generating device is disconnected from the cavity by the second switch valve, and the leakage detector is disconnected from the cavity by the third switch valve; Using the vacuum generating device to extract the gas in the cavity so that the cavity is in a vacuum environment; Disconnecting the vacuum generating device from the cavity through the first switch valve and connecting the cleaning gas generating device to the cavity through the second switch valve, so as to transport the cleaning gas to the cavity through the cleaning gas generating device until the cavity is in a non-vacuum environment; The leakage detector is connected to the cavity through the third switch valve, so that the leakage detector detects the composition of the gas in the cavity.

12. The leakage detection method according to claim 11, characterized in that: After the vacuum generating device is disconnected from the cavity by the first switch valve and before the cleaning gas generating device is connected to the cavity by the second switch valve, the method further includes: The chamber is left to stand for a preset time, so that the cavity is in a vacuum environment for a preset time.

13. The leakage detection method according to claim 11 or 12, characterized in that: After the leakage detector is connected to the cavity through the third switch valve so that the leakage detector detects the composition of the gas in the cavity, the method further includes: If the leak detector confirms that the to-be-detected component is leaking according to the composition of the gas, the feeding port is opened, and the second pipeline cleaning port of the pipeline cleaning valve is connected to the first pipeline cleaning port; The cleaning gas generating device is used to sequentially deliver cleaning gas to the cavity through the first pipeline cleaning port, the second pipeline cleaning port and the third switch valve, so as to clean the gas path between the pipeline cleaning valve and the cavity with the cleaning gas.

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