Coating inspection system

Abstract

[Problem] To provide a coating inspection system that is capable of accurately inspecting a state of coating a workpiece with a fluid, even in a case in which relative movement speed between an inspection device and the workpiece varies. [Solution] A coating inspection system (S1) has an image-capturing device (10), a moving device (30), and an inspection control device (40). A coating inspection system (S1) executes image-capturing processing of acquiring a plurality of images image-captured at different image-capturing timings by the image-capturing device (10), in a process of relatively moving the image-capturing device (10) and a workpiece (W), feature point extraction processing of extracting feature points included in the images, movement amount derivation processing of deriving a relative movement amount between the image-capturing device (10) and the workpiece (W) among image-capturing timings, image formation processing of forming an inspection image by arranging and compositing, on the basis of the relative movement amount, original images that have been acquired in the image-capturing processing and have different image-capturing timings, and inspection processing of performing inspection regarding coating on the basis of the inspection image.

Description

Coating inspection system

[0001] The present invention relates to a coating inspection system.

[0002] Conventionally, there has been provided a paste application device such as that disclosed in Patent Document 1. This paste application device applies linear paste to a substrate from an application nozzle while moving an XY table on which the substrate is placed, and has imaging cameras arranged on the left and right, front and back of the application nozzle above the XY table, and a slit light source arranged to irradiate slit light perpendicular to the linear paste from an oblique direction at the intersection of the optical axis of each imaging camera and the XY table, and judges the quality of the paste application quality based on image data captured by the imaging cameras.

[0003] Japanese Patent Application Laid-Open No. 2000-15163

[0004] The inventors of the present invention have conducted extensive research into whether sufficient inspection accuracy can be achieved when applying a fluid material such as paste to a workpiece using an application device equipped with an inspection device such as the conventional technology described above, even when the relative movement speed between the application device and the workpiece is changed during the application process. As a result, they found that when an inspection device equipped with an imaging camera or the like is moved relative to the application device and the workpiece while changing its movement speed, and images are captured by the imaging camera at regular time intervals, the inspection accuracy decreases. Specifically, when performing inspections during this type of relative movement, the movement speed of the moving device changes significantly, accelerating in straight sections and decelerating in curved sections. Therefore, when the movement speed fluctuates as described above, the distance traveled by the inspection device between the regular image capture timings of the imaging camera fluctuates. Therefore, they found that without taking into account information on the relative movement speed and amount of relative movement between the inspection device and the workpiece, it is not possible to accurately combine inspection images at each image capture timing, making it difficult to accurately determine the application position or the application amount based on the application width and length.

[0005] Furthermore, in view of the above-mentioned problems, the inventors have come to the realization that by acquiring position information from a moving device that moves the inspection device and the workpiece relatively, even if a change in the relative movement speed occurs, it may be possible to accurately perform inspections such as determining the coating position and the coating amount by taking into account the change. However, with such a configuration, the inventors have come to the realization that, due to the balance between the output cycle of data such as position information output from the moving device and the interval between the image capture timings of the imaging camera, it is not possible to obtain information on the relative movement speed and the relative movement amount accurately and at an appropriate time, and this does not contribute to improving the accuracy of inspections such as determining the coating position and the coating amount.

[0006] Therefore, an object of the present invention is to provide a coating inspection system that can accurately inspect the state of application of a fluid to a workpiece even when fluctuations occur in the relative movement speed between the inspection device and the workpiece.

[0007] (1) The coating inspection system of the present invention is for inspecting the state of application of a fluid to a workpiece, and includes an imaging device that acquires images of the workpiece, a moving device that moves the imaging device and the workpiece relatively, and an inspection control device that controls the inspection of the application of the fluid to the workpiece. In the process of moving the imaging device and the workpiece relatively, the coating inspection system is capable of executing an imaging process that acquires multiple images at different imaging timings using the imaging device, a feature point extraction process that extracts feature points contained in the images, a movement amount derivation process that derives the amount of relative movement between the imaging device and the workpiece between imaging timings based on the difference between the position of the feature points in the image acquired by imaging at an earlier imaging timing and the position of the feature points in the image acquired by imaging at a later imaging timing, an image formation process that uses the images acquired by the imaging process at different imaging timings or processed images processed based on the images as original images, and arranges and combines the original images based on the relative movement amount to form an inspection image, and an inspection process that inspects the application of the fluid to the workpiece based on the inspection images acquired by the image formation process.

[0008] By configuring the coating inspection system of the present invention as described above in (1), the feature points extracted by the feature point extraction process can be used as indicators to accurately determine the relative movement amount between the workpiece and the imaging device between imaging timings in the movement amount derivation process. Furthermore, by executing the image formation process, the coating inspection system of the present invention can appropriately combine original images based on the images obtained by the imaging process based on the relative movement amount determined as described above to obtain an inspection image. The coating inspection system of the present invention performs the inspection process based on the inspection image obtained in this manner. Therefore, the coating inspection system of the present invention can accurately inspect the state of application of a fluid to a workpiece even when fluctuations occur in the relative movement speed between the inspection device and the workpiece.

[0009] (2) The coating inspection system of the present invention is preferably capable of executing a master definition process that defines master information that associates the relative movement amount derived by the movement amount derivation process and the imaging timing, and the inspection control device is preferably capable of executing a master creation flow that defines the master information through a process including the imaging process, the feature point extraction process, the movement amount derivation process, and the master definition process, and an inspection flow that acquires the inspection image by executing the image formation process based on the imaging timing of the original image obtained by the imaging process and the relative movement amount derived based on the master information defined by the master creation flow, and then executes the inspection process based on the inspection image.

[0010] By configuring the coating inspection system of the present invention as described above (2), it is possible to define master information that associates the amount of relative movement and the timing of imaging by executing a master creation flow. Furthermore, the coating inspection system of the present invention can acquire an inspection image in which the original image is positioned with high positional accuracy by taking the amount of relative movement into account, by executing an image formation process based on the imaging timing of the original image obtained by the imaging process and the relative movement amount derived based on the master information defined by the master creation flow. The coating inspection system of the present invention performs the inspection process using the inspection image prepared in this way, thereby accurately inspecting the state of application of the fluid to the workpiece. Furthermore, if the master creation flow is executed in advance to define the master information, the coating inspection system of the present invention can execute the inspection flow using this master information.

[0011] (3) The coating inspection system of the present invention may preferably execute the master creation flow each time before executing the inspection flow.

[0012] By configuring the coating inspection system of the present invention as described above in (3), the master creation flow can be executed in advance for each inspection flow to update the master information. This allows the coating inspection system of the present invention to always perform inspection processing based on inspection images created based on the latest master information. Therefore, the coating inspection system of the present invention can further improve inspection accuracy.

[0013] (4) In the coating inspection system of the present invention, it is preferable that the master information defined by the master creation flow is repeatedly used in a plurality of inspection flows.

[0014] By configuring the coating inspection system of the present invention as described above in (4), the master information defined in advance by the master creation flow can be repeatedly used in multiple inspection flows to perform inspection processing. Therefore, the coating inspection system of the present invention can efficiently inspect the coating state when the same coating is repeatedly applied to multiple workpieces.

[0015] (5) The coating inspection system of the present invention is a coating inspection system for inspecting the state of application of a fluid material to a workpiece, and includes an imaging device that acquires an image of the workpiece, and an inspection control device that controls the inspection of the application of the fluid material to the workpiece, wherein multiple imaging devices are arranged to surround an area to be imaged, and the inspection control device is capable of executing an inspection process that inspects the application of the fluid material to the workpiece based on images obtained by imaging by the multiple imaging devices.

[0016] By configuring the coating inspection system of the present invention as described above in (5), the target area can be imaged from different angles by multiple imaging devices, and coating inspection can be performed based on the images obtained thereby, thereby enabling the coating inspection system of the present invention to perform inspection with high accuracy.

[0017] (6) The coating inspection system of the present invention preferably includes an irradiation device that irradiates a line of irradiation light across the fluid applied to the workpiece, and the imaging device images an area including the irradiation area of ​​the irradiation light as an imaging target area, and the imaging process acquires images at multiple locations on the workpiece by moving the imaging device and the workpiece relative to each other to vary the imaging target area while irradiating the irradiation light onto the imaging target area, and the inspection process preferably inspects the application state of the fluid on the workpiece based on the characteristics of the irradiation light that appear in the image.

[0018] By configuring the coating inspection system of the present invention as described above in (6), the characteristics of the irradiated light reflected in the image obtained by the imaging process can be utilized to inspect the state of application of the fluid on the workpiece.

[0019] (7) In the coating inspection system of the present invention, the irradiation device may be capable of irradiating a plurality of the linear irradiation lights in a direction intersecting the direction in which the irradiation lights extend.

[0020] By configuring the coating inspection system of the present invention as described above in (7), it is possible to reduce the number of images taken in the imaging process and reduce the time required for image processing in processes such as feature point extraction processing, movement amount derivation processing, and image formation processing. Furthermore, by configuring the coating inspection system of the present invention as described above, the spacing between the linear irradiation light beams does not vary regardless of the relative movement speed, and therefore it is possible to improve the inspection accuracy compared to when a single linear irradiation light beam is used for inspection.

[0021] (8) The coating inspection system of the present invention may be configured to inspect the coating condition of the fluid on the workpiece by capturing images of the same imaging target area using multiple imaging devices and using the images obtained from each imaging device.

[0022] By configuring the coating inspection system of the present invention as described above in (8), it is possible to prevent blind spots from occurring during inspection and improve inspection accuracy.

[0023] (9) The coating inspection system of the present invention includes an irradiation device that irradiates a line of irradiation light across the fluid applied to the workpiece, and the irradiation device is provided in plurality corresponding to the imaging device, and irradiates the irradiation light in synchronization with imaging by the associated imaging device, and when imaging the same imaging target area by the plurality of imaging devices, the imaging timing by each imaging device is preferably staggered.

[0024] By configuring the coating inspection system of the present invention as described above in (9), when capturing images using the multiple imaging devices, the coating inspection system of the present invention can perform irradiation using an irradiation device associated with the imaging device that is capturing the image, while preventing irradiation light from irradiation devices associated with other imaging devices from appearing in the image. This allows the coating inspection system of the present invention to further improve inspection accuracy.

[0025] (10) The coating inspection system of the present invention includes an irradiation device that irradiates a line of irradiation light across the fluid applied to the workpiece, and a plurality of the irradiation devices are provided corresponding to the imaging devices, and the irradiation light is irradiated in synchronization with imaging by the associated imaging device, and the plurality of irradiation devices each emit irradiation light of a different wavelength, and the plurality of imaging devices are each capable of imaging the irradiation light emitted from the irradiation device that is provided corresponding to them, but are unable to image the irradiation light emitted from other irradiation devices that are not associated with them.

[0026] By configuring the coating inspection system of the present invention as described above in (10), when capturing images using the multiple imaging devices, it is possible to prevent the illumination light from the illumination device associated with the imaging device capturing the image from appearing in the image, while preventing the illumination light from the illumination devices associated with the other imaging devices from appearing in the image. This allows the coating inspection system of the present invention to further improve inspection accuracy.

[0027] (11) The coating inspection system of the present invention preferably has a coating device capable of discharging the fluid toward the workpiece to apply it, and the coating device is installed so as to be movable together with the imaging device, so that the discharging of the fluid can be performed simultaneously with imaging by the imaging device.

[0028] By configuring the coating inspection system of the present invention as described above in (11), the coating of the fluid on the workpiece and the inspection of the coating state can be carried out simultaneously. As a result, the coating inspection system of the present invention can apply and inspect the fluid more efficiently than when the application of the fluid and the inspection of the coating state are carried out separately.

[0029] According to the present invention, it is possible to provide a coating inspection system that can solve the above-mentioned problems.

[0030] 1 is a system configuration diagram showing the configuration of a coating inspection system according to one embodiment of the present invention. FIG. 1 is a perspective view showing the state in which an imaging device, an irradiation device, and an inspection control device are attached to a coating device in the coating inspection system shown in FIG. 1, as viewed from the discharge port side. FIG. 2 is a side view showing the state in which an imaging device, an irradiation device, and an inspection control device are attached to a coating device in the coating inspection system shown in FIG. 1, as viewed from the side. FIG. 3 is a bottom view showing the state in which an imaging device, an irradiation device, and an inspection control device are attached to a coating device in the coating inspection system shown in FIG. 1, as viewed from the discharge port side. FIG. 4 is a cross-sectional view showing the structure of a coating device provided in the coating inspection system shown in FIG. 1. (a) and (b) are explanatory views each showing a state in which irradiation light is irradiated onto a workpiece coated with a fluid in the coating inspection system shown in FIG. 1. FIG. 5 is an explanatory diagram for explaining a feature point extraction process and a movement amount derivation process executed in the coating inspection system shown in FIG. 1. FIG. 6 is an explanatory diagram for explaining an image formation process executed in the coating inspection system shown in FIG. 1. FIG. 7 is a flowchart showing the flow of a master creation flow executed in the coating inspection system shown in FIG. 1.

[0031] Hereinafter, a coating inspection system S1 according to one embodiment of the present invention will be described in detail with reference to the drawings. In the following description, the configuration of the coating inspection system S1 will be first described, and then the processing and flow performed in the coating inspection system S1 will be described.

[0032] <Configuration of Coating Inspection System S1> The coating inspection system S1 inspects the state of application of the fluid F on the workpiece W. The coating inspection system S1 can simultaneously apply the fluid F to the workpiece W and inspect the state of application of the fluid F. As shown in FIG. 1 , the coating inspection system S1 includes an imaging device 10, an irradiation device 20, a moving device 30, an inspection control device 40, and a coating device 50.

[0033] The imaging device 10 is a device for capturing an image of a workpiece W. As shown in FIGS. 2 to 4 , the imaging device 10 is attached to the moving device 30 via an installation member 35 attached to the moving device 30. The imaging device 10 can be equipped with various types of cameras, such as digital cameras, CCD cameras, high-speed cameras, or spectroscopic cameras, as well as various optical devices and sensors, such as 3D scanners. As shown in FIG. 3 and other figures, the imaging device 10 is installed in an orientation that allows it to capture an image of the surface of the workpiece W installed at a predetermined installation position, which is the imaging target area A. The imaging device 10 can be configured to be provided separately from any one or all of the irradiation device 20, the moving device 30, and the coating device 50. In this embodiment, the imaging device 10 is attached to the moving device 30 together with the irradiation device 20 and the coating device 50.

[0034] The coating inspection system S1 can be equipped with a single imaging device 10, but can also be equipped with multiple imaging devices 10. When there is a single imaging device 10, the coating inspection system S1 has a simple device configuration. When there are multiple imaging devices 10, the imaging target area A can be imaged from multiple directions depending on their arrangement, etc. The coating inspection system S1 of this embodiment is equipped with three imaging devices 10.

[0035] 3 and 4, in the coating inspection system S1, multiple imaging devices 10 are arranged to surround the periphery of the imaging target area A. The imaging devices 10 can also be arranged at uneven intervals in the circumferential direction around the imaging target area A, but in this embodiment, they are arranged at approximately equal intervals in the circumferential direction. Therefore, the coating inspection system S1 can capture images from multiple angles using multiple (three in this embodiment) imaging devices 10 (imaging devices 10A, 10B, and 10C). This allows the coating inspection system S1 to prevent blind spots from occurring when the imaging devices 10 capture images of the imaging target area A.

[0036] As shown in FIGS. 2 to 4 , the irradiation device 20 is configured to irradiate a line of irradiation light L across the fluid F applied to the workpiece W (see FIG. 6 ). The irradiation device 20 may be configured to irradiate a single line of irradiation light L, or to irradiate multiple lines of irradiation light L in an array intersecting the direction in which the irradiation light L extends. In the coating inspection system S1, the irradiation device 20 can be configured to irradiate a single line of irradiation light L, thereby simplifying the configuration of the irradiation device 20. Furthermore, in the coating inspection system S1, the irradiation device 20 can be configured to irradiate multiple lines of irradiation light L in an array, thereby reducing the number of images taken in the imaging process described in detail below and reducing the time required for image processing in processes such as feature point extraction, movement amount derivation, and image formation.

[0037] The irradiation devices 20 are provided in correspondence with the above-described imaging devices 10. In this embodiment, since a plurality of imaging devices 10 (three in this embodiment) are provided, the same number of irradiation devices 20 (three in this embodiment) as the number of imaging devices 10 are provided. Like the imaging devices 10, the irradiation devices 20 are attached to the moving device 30 via installation members 35 attached to the moving device 30. The plurality of irradiation devices 20 are provided in correspondence with the above-described plurality of imaging devices 10, respectively. Specifically, in this embodiment, irradiation devices 20A, 20B, and 20C are provided as the irradiation devices 20, corresponding to the imaging devices 10A, 10B, and 10C. The irradiation devices 20A, 20B, and 20C can irradiate irradiation light L in synchronization with imaging by the imaging devices 10A, 10B, and 10C, respectively.

[0038] The moving device 30 is a device for moving the imaging device 10, the irradiation device 20, and the coating device 50 relative to the workpiece W. The moving device 30 can be configured, for example, by an industrial robot, an X-Y table, or the like. As shown in FIG. 1 , in this embodiment, the moving device 30 is an industrial robot equipped with a robot arm 32. The moving device 30 can operate the robot arm 32 based on a command signal from a movement control unit 36 ​​of a movement control device 34.

[0039] As shown in FIG. 1 , the moving device 30 has a coating device 50 attached to the tip of a robot arm 32. Therefore, the moving device 30 can move the coating device 50 attached to the tip of the robot arm 32 along a predetermined trajectory by controlling the operation of a movement control unit 36. As a result, the coating inspection system S1 can move the coating device 50 relative to a workpiece W placed at a predetermined position, discharge a fluid F from the coating device 50, and apply the fluid F to the workpiece W along a predetermined trajectory. Furthermore, the moving device 30 has an imaging device 10 and an irradiation device 20 attached to the tip of the robot arm 32 in addition to the coating device 50. Therefore, the moving device 30 can move the imaging device 10 and the irradiation device 20 together with the coating device 50 along the same trajectory as the application trajectory of the fluid F.

[0040] The inspection control device 40 controls the inspection of the application of the fluid F to the workpiece W. The inspection control device 40 executes an inspection process, which will be described in detail later, to perform an inspection of the application of the fluid F to the workpiece W based on images obtained by capturing images using the multiple imaging devices 10.

[0041] The coating device 50 is a device for discharging and coating the fluid F toward the workpiece W. As described above, the coating device 50 is attached to the moving device 30 together with the imaging device 10. Specifically, the coating device 50 is installed at the tip of the robot arm 32 that constitutes the moving device 30. The coating device 50 is installed at the tip of the robot arm 32 in a state where it is surrounded by a plurality of imaging devices 10 and a plurality of irradiation devices 20.

[0042] The coating device 50 is configured to apply a fluid F (coating material) to a workpiece W (object to be coated) by discharging it. The coating device 50 controls the discharge of the fluid F under the control of a coating control device 55, thereby applying the fluid F to the workpiece W. The coating device 50 is connected to a supply unit 80 for supplying the fluid F. The supply unit 80 may include, for example, a storage unit 82 for storing the fluid F, and a pump 84 for pumping the fluid F from the storage unit 82 toward the coating device 50. The coating device 50 applies the fluid F to the workpiece W by pumping the fluid F supplied from the supply unit 80 and discharging it toward the workpiece W. The applicator 50 may be of a type (hoseless type) that is connected to the supply unit 80 to replenish the fluid F, and then disconnected from the supply unit 80 to independently discharge the fluid F, or may be of a type that is constantly connected to the supply unit 80 via a connecting pipe 86 such as a hose, so that the fluid F can be supplied from the supply unit 80 as needed. As shown in Fig. 1, in this embodiment, the applicator 50 is constantly connected to the supply unit 80 via the connecting pipe 86.

[0043] The coating device 50 is equipped with a pressure-feeding mechanism for pressure-feeding the fluid F. In this embodiment, the coating device 50 employs a pressure-feeding mechanism equipped with a uniaxial eccentric screw pump 60. The coating device 50 operates in accordance with an operation command from a coating control device 55, driving a pump mechanism 62 and discharging the fluid F from a discharge port 52 provided at the tip, thereby applying the fluid F to the workpiece W in the form of point application or line application. In this embodiment, a nozzle 53 is attached to the discharge port 52, and the fluid F discharged from the discharge port 52 is discharged through the nozzle 53 onto the workpiece W and applied thereto.

[0044] 5, the uniaxial eccentric screw pump 60 is a rotary positive displacement pump and includes a male-threaded rotor 64 that receives power and rotates eccentrically, a stator 66 whose inner circumferential surface 66a is formed with a female thread, a drive unit 68 that generates a driving force, and a power transmission unit 70 that transmits power from the drive unit 68 to the rotor 64.

[0045] The rotor 64 is a shaft made of metal or the like and formed into an n-thread (n=1 in this embodiment) male screw. The stator 66 is a substantially cylindrical member having a through-hole 66b whose inner circumferential surface 66a is formed into an n+1-thread (n=1 in this embodiment) female screw. The uniaxial eccentric screw pump 60 is configured such that a pump mechanism 62, the main part of which is formed by inserting the rotor 64 into the through-hole 66b of the stator 66, is built into the pump casing 54. The pump mechanism 62 has the function of moving the fluid F toward the discharge port 52.

[0046] The drive device 68 serves as a drive source for the uniaxial eccentric screw pump 60. The drive device 68 is configured with a motor, a speed change mechanism, etc., and is configured to output rotational power. The drive device 68 is connected to the base end of the rotor 64 via a power transmission unit 70. Therefore, in the uniaxial eccentric screw pump 60, the output rotational power is transmitted to the rotor 64 by operating the drive device 68, and the rotor 64 can be freely eccentrically rotated inside the through-hole 66b.

[0047] The power transmission unit 70 connects the rotor 64 and the drive unit 68 so as to transmit power while allowing eccentric rotation of the rotor 64. The power transmission unit 70 may include, for example, a joint such as a universal joint or an Oldham joint, a coupling rod, or the like.

[0048] The uniaxial eccentric screw pump 60 can advance the fluid F in the longitudinal direction of the rotor 64 and the stator 66 in a fluid transport path 72 formed between the rotor 64 and the stator 66 by rotating the rotor 64 in the forward direction within the through-hole 66b of the stator 66. Therefore, by rotating the rotor 64, the fluid F can be sucked into the fluid transport path 72 from one end of the stator 66, transported toward the other end of the stator 66, and discharged. Furthermore, the amount of fluid F transported (discharged) can be controlled according to the rotation amount of the rotor 64 (drive device 68). Furthermore, the direction of travel of the fluid F in the fluid transport path 72 can be switched by reversing the rotation direction of the rotor 64.

[0049] The coating device 50 can perform a discharge operation in which the pump mechanism 62 is operated (forward rotation) so that the fluid F moves from the pump mechanism 62 toward the discharge port 52, and a suck-back operation in which the pump mechanism 62 is operated (reverse rotation) so that the fluid F moves from the discharge port 52 toward the pump mechanism 62. The coating device 50 can perform a discharge operation in which the fluid F is discharged from the discharge port 52 by operating the pump mechanism 62 in the forward direction (forward rotation). Furthermore, the coating device 50 can perform a suck-back operation in which the fluid F is sucked in by operating the pump mechanism 62 in the reverse direction (reverse rotation). Furthermore, the coating device 50 can perform a suck-back operation when finishing discharging the fluid F onto the workpiece W through the discharge operation, thereby preventing excess dispensing of the fluid F and preventing dripping of the fluid F onto the workpiece W.

[0050] The application inspection system S1 can execute various processes required to inspect the state of application of the fluid F to the workpiece W by operating the imaging device 10, the irradiation device 20, and the movement device 30 under the control of the above-mentioned inspection control device 40. In this embodiment, the application inspection system S1 is capable of executing an imaging process, a feature point extraction process, a movement amount derivation process, a master definition process, an image formation process, and an inspection process. Each process will be described in detail below.

[0051] <<Imaging Process>> The imaging process is a process of acquiring multiple images captured at different imaging timings by the imaging device 10 during the process of moving the imaging device 10 and the workpiece W relative to each other. In the imaging process, the imaging device 10 captures images while varying the imaging target area A by moving the imaging device 10 and the workpiece W relative to each other. Therefore, by executing the imaging process, images are acquired at multiple locations on the workpiece W. During the imaging process, the imaging target area A can be imaged using only a portion of the multiple imaging devices 10, or the same imaging target area A can be imaged from different angles using multiple imaging devices 10. Whether imaging is performed using only a portion of the multiple imaging devices 10 (imaging devices 10A, 10B, 10C) or all of the imaging devices 10 can be selected by the user or automatically selected by the inspection control device 40 based on the position on the workpiece W, characteristics such as the type and shape of the workpiece W, the processing speed of the inspection control device 40, the required inspection accuracy, etc.

[0052] The imaging process can be performed by a method of imaging by the imaging device 10 in a state where the imaging target area A is irradiated by the irradiation device 20 (irradiation imaging), or a method of imaging by the imaging device 10 without irradiation by the irradiation device 20 (non-irradiation imaging).Whether to perform irradiation imaging or non-irradiation imaging in the imaging process can be selected by the user or automatically selected by the inspection control device 40 based on the position of the workpiece W, characteristics such as the type and shape of the workpiece W, the processing speed of the inspection control device 40, the required inspection accuracy, etc.

[0053] In the imaging process, it is preferable to image each workpiece at a fixed time interval from the start of the process. This allows images to be taken at the same position each time, as long as the same type of workpiece is imaged while moving at the same speed and trajectory, such as in the case of mass production. Furthermore, the imaging process can be performed simultaneously with the application of the fluid by the application device 50, and the time required for application and inspection can be shortened by taking an image of the fluid F immediately after application.

[0054] As described above, when a plurality of imaging devices 10 are provided, when imaging the same imaging target area A, it is preferable to image the same imaging timing by all of the imaging devices 10, or to stagger the imaging timing for some or all of the imaging devices 10. In this embodiment, imaging processing is performed by staggering the timing at which the imaging target area A is imaged for all of the imaging devices 10A, 10B, and 10C.

[0055] <Feature Point Extraction Process> The feature point extraction process is a process for extracting feature points contained in an image obtained by the above-described imaging process. The feature point extraction process can be performed using the image obtained by the imaging process itself, or can be performed using an image obtained by the imaging process that has been processed. The feature point extraction process is a process for extracting characteristic locations in an image as feature points. The locations extracted as feature points by the feature point extraction process can be characteristic locations of the workpiece W, such as edges, holes, and bends of the workpiece W that appear in the image, or locations prepared for the feature point extraction process by attaching stickers or markings to the workpiece W. Specifically, in the example shown in FIG. 7 (a), in addition to the fluid F applied to the workpiece W, the image (1) also shows the edge of the workpiece W to the left of the fluid F and the hole formed in the workpiece W to the right of the fluid F. By performing a feature point extraction process on this image (1), for example, as shown in FIG. 7(b), the bending points of the fluid F are detected as feature points (1) and (2), and the holes and the bending points of the edge of the workpiece W are detected as feature points (3 and (4), respectively. Similarly, feature points (1) to (3) can be extracted from image (2), which is captured at the next capture timing after image (1), as shown in FIG. 7(c). In image (2), feature point (4) extracted in image (1) has moved outside the range of the angle of view, so feature point (4) is not extracted. Note that in FIG. 7(c), the edges, holes, and fluid F of the workpiece W in image (1) are shown with dashed double-dashed lines for comparison with FIG. 1 (image (1)), but these do not actually exist in image (2).

[0056] Any appropriate method can be selected for the feature point extraction process as long as it is a process for extracting characteristic parts of the workpiece W, etc. For example, the feature point extraction process can be performed by a method in which preprocessing is performed on the image obtained by the imaging process, such as filtering to remove noise, and then processing is performed to detect feature points using a technique such as edge detection based on the preprocessed image.

[0057] <<Movement Amount Derivation Process>> The movement amount derivation process is a process for deriving the amount of relative movement between the imaging device 10 and the workpiece W between the previous and subsequent imaging timings based on the difference between the position imaged at the previous imaging timing and the position imaged at the subsequent imaging timing during the process of sequentially imaging the imaging device 10 and the workpiece W while moving them relative to each other. The movement amount derivation process is performed using the position information of the feature points extracted by the feature point extraction process described above. Specifically, position information of the feature points in the image obtained by imaging at the previous imaging timing and position information of the feature points in the image obtained by imaging at the subsequent imaging timing are each derived, and a calculation process is performed to derive the amount of relative movement between the imaging device 10 and the workpiece W between the previous and subsequent imaging timings based on the difference in the position information.

[0058] More specifically, in the example shown in FIG. 7(b), the positions of feature points (1) to (3) in image (1) derived in FIG. 7(b) and feature points (1) to (3) in image (2) are derived. Based on this result, the relative movement amount of feature points (1) to (3) is derived as shown in FIG. 7(d). Based on this result, the relative movement amount between the workpiece W and the imaging device 10 is derived, for example, by deriving the average value of the relative movement amounts of feature points (1) to (3). Note that in the example shown in FIG. 7, feature point (4) extracted in image (1) is not detected in image (2) due to the relative movement between the workpiece W and the imaging device 10. Therefore, feature point (4) is treated as an outlier and is not used to derive the relative movement amount.

[0059] <<Master Definition Processing>> The master definition processing is a processing for defining master information that associates the relative movement amount derived by the above-described movement amount derivation processing with the imaging timing. That is, the master information is a series of information that records the relative movement amount from the first imaging timing to the second imaging timing, the relative movement amount from the second imaging timing to the third imaging timing, ... the relative movement amount from the (n-1)th imaging timing to the nth imaging timing (n = natural number), and the relative movement amount for each imaging timing. The master information defined by the master definition processing is stored in the inspection control device 40 or a storage unit 42 provided outside the inspection control device 40.

[0060] Image Formation Processing: The image formation processing is a process for forming a test image by combining images captured at different times by the above-described imaging processing, or processed images processed based on the images, as an original image. In the image formation processing, the original images are arranged and combined based on the relative movement amount. Specifically, as shown in FIG. 8 , when images (1) to (n) captured at different times are prepared as original images, images (1) to (n) are arranged and combined based on the relative movement amount between the capture times of each original image derived by the movement amount derivation processing. This allows the formation of a test image that accurately captures the application state of the fluid F on the workpiece W, even if the relative movement amount between the capture times varies due to fluctuations in the movement speed when the application device 50 moves relative to the workpiece W along the application path of the fluid F.

[0061] The inspection image obtained by the image formation process can be, for example, two-dimensional data (two-dimensional image) viewed from a plane from the side where the fluid F is applied to the workpiece W, or three-dimensional data (three-dimensional image) that allows a three-dimensional understanding of the state of application of the fluid F to the workpiece W by using images obtained from each imaging device 10. When the inspection image obtained by the image formation process is two-dimensional data, the load and data capacity required for the image formation process can be reduced. Furthermore, when the inspection image obtained by the image formation process is three-dimensional data, the state of application of the fluid F to the workpiece W can be easily understood.

[0062] <Inspection Process> The inspection process is a process for inspecting the application of the fluid F on the workpiece based on the inspection image acquired by the image formation process described above. The inspection process can be performed by various methods. For example, a method can be used in which the application pattern of the fluid F shown in the inspection image is compared with reference data using a technique such as pattern matching to inspect the application of the fluid F, such as whether the fluid F is applied according to a specified application pattern or whether there are any breaks (disconnections in the application line) in the application pattern. Another method for performing the inspection process can be a method in which irradiation light is applied by the irradiation device 20 during imaging by the imaging device 10, and the application state is inspected based on the characteristics of the irradiation light (irradiation light image Li) shown in the inspection image.

[0063] When inspecting the coating state based on the characteristics of the irradiated light image Li, the inspection process can be performed, for example, by executing the following processing method (irradiated light image analysis process). Specifically, when performing the irradiated light image analysis process, the inspection control device 40 identifies the irradiated light image Li that appears in the inspection image and stores it as feature data in the storage unit 42. The inspection control device 40 also compares the feature data of the irradiated light image Li stored in the storage unit 42 with reference data registered in advance in the storage unit 42 to determine whether the coating state is good or bad.

[0064] The quality of the coating state can be determined, for example, as follows. That is, as shown in Fig. 6(a), when the irradiated light L is irradiated across the fluid F at a location on the workpiece W where the fluid F is applied, the irradiated light image Li is formed in a shape that is a series of linearly extending portions (linear portions) at locations where the fluid F is not applied and bent or curved portions (curved portions) at locations where the fluid F is applied. On the other hand, as shown in Fig. 6(b), when the irradiated light L is irradiated across the fluid F at a location on the workpiece W where the application of the fluid F has stopped, the irradiated light image Li is a linear portion that is formed so that the entire image extends in a straight line, without forming curved portions even at locations where the fluid F should have been applied. Therefore, the inspection control device 40 determines that the fluid F has been applied if a curved portion is formed in the area in the inspection image where the fluid F should have been applied, as shown in Figure 6(a), and determines that poor application of the fluid F has occurred if a curved portion is not formed, as shown in Figure 6(b).

[0065] In addition to determining whether the fluid F has been applied as described above, the inspection control device 40 can also determine whether the amount and shape of the application of the fluid F are appropriate based on the characteristics of the irradiated light image Li. For example, even if the fluid F has been applied to the areas of the workpiece W where it should be applied, the application state can be considered poor if the fluid F is smeared due to an insufficient amount of fluid F applied, if the amount of fluid F applied is too large or too small and therefore the width is wide or narrow, or if the application shape of the fluid F differs from the specified amount. In such cases, even if a curved portion is formed in the irradiated light image Li, the shape and degree of curvature of the curved portion will differ from those in cases where the application state is good. Therefore, by pre-specifying and registering parameters for determining the shape and degree of curvature of the curved portion as reference data for the irradiated light image Li and comparing the characteristic data of the irradiated light image Li with the reference data registered in the memory unit 42, the quality of the application state can be determined taking into account whether the amount and shape of the application of the fluid F are appropriate.

[0066] Furthermore, when inspecting the amount of fluid F applied to the entire workpiece W (total amount applied), the cross-sectional area of ​​the fluid F applied at each inspection point (imaging timing, imaging position) is derived from the shape of the curved portion, etc., and the total amount of fluid F applied can be derived by multiplying the cross-sectional area by the length of the interval between multiple irradiation lights L and integrating the result, thereby making it possible to determine whether the application condition is good or bad.

[0067] By executing a combination of the various processes described above, the application inspection system S1 is capable of executing a control flow (master creation flow) that defines master information and a control flow (inspection flow) that inspects the application state of the fluid material F on the workpiece W. The control flow will be specifically described below.

[0068] <Master Creation Flow> The master creation flow is performed in accordance with the flowchart shown in Fig. 9. The master creation flow is executed by performing a plurality of processes, including an imaging process, a feature point extraction process, a movement amount derivation process, and a master definition process, on a workpiece W prepared for master creation. The master creation flow will be described below in order in accordance with Fig. 9.

[0069] (Step 1-1) When the master creation flow starts, first, in step 1-1, an image capture process is performed and an original image is prepared based on the image obtained by the process. The original image is recorded in association with the capture timing, for example by assigning a serial number for each capture timing in chronological order. Once the original image is prepared in this way, the control flow proceeds to step 1-2.

[0070] (Step 1-2) When the control flow proceeds to step 1-2, a feature point extraction process is performed to extract feature points contained in the original image. In the feature point extraction process, feature points are extracted and outliers are removed. Thereafter, the control flow proceeds to step 1-3.

[0071] (Step 1-3) When the control flow proceeds to step 1-3, a movement amount derivation process is performed. Specifically, a process is performed to derive the relative movement amount between the workpiece W and the imaging device 10 between the earlier and later imaging timings by deriving the movement amount of the feature points extracted in the original images whose imaging timings are different in time series. When there are multiple feature points, for example, the movement amount for each feature point is derived, and the value obtained by deriving the average value is derived as the relative movement amount between the workpiece W and the imaging device 10. Thereafter, the control flow proceeds to step 1-4.

[0072] (Step 1-4) When the process proceeds to step 1-4, a master definition process is performed. That is, in step 1-4, master information that associates the relative movement amount derived by the movement amount derivation process in step 1-3 with the image capture timing is defined, and the master information is stored in the storage unit 42.

[0073] The master creation flow is executed through the processes of steps 1-1 to 1-4 described above. The master creation flow may be executed by performing the above-described series of control flows each time an image is acquired by the imaging process, or by starting each of the above-described processes when the imaging process has been completed for part or all of the area to be inspected.

[0074] <Inspection Flow> The inspection flow is performed in accordance with the flowchart shown in Fig. 10. The inspection flow is executed by performing a plurality of processes, including an imaging process, an image formation process, and an inspection process, on the workpiece W to be inspected, while utilizing the master information prepared in the master creation flow described above. The inspection flow will be described below in order in accordance with Fig. 10.

[0075] (Step 2-1) In the coating inspection system S1 of this embodiment, when inspecting the workpiece W according to the inspection flow, master information is defined in advance in the master creation flow described above, and this master information is utilized in multiple inspections of the workpiece W. Each imaging timing is determined to be the same each time, for example, by setting a specific timing defined based on the time from the start of the imaging process. Therefore, once the master information is defined in the coating inspection system S1, the master information can be utilized in multiple inspections of the workpiece W without changing it, as long as the same type of workpiece is coated and inspected while moving at the same speed and trajectory. Therefore, at the start of the inspection flow, first, in step 2-1, the master information defined in the master creation flow previously performed is read out, and the master information is prepared so that it can be utilized in the inspection of the workpiece W. The control flow then proceeds to step 2-2.

[0076] (Step 2-2) In step 2-2, the inspection control device 40 performs an imaging process on the workpiece W to be inspected, and prepares an original image based on the image obtained thereby. The original image is recorded in association with the imaging timing, for example by assigning a serial number to each imaging timing in chronological order. Once the original image of the workpiece W to be inspected is prepared in this way, the control flow proceeds to step 2-3.

[0077] (Step 2-3) When the control flow proceeds to step 2-3, an image formation process is performed. This prepares an inspection image for the workpiece W to be inspected. Specifically, the inspection image is formed by combining multiple original images captured at different times and recorded in association with the imaging timing in the imaging process of step 2-2. Here, in forming the inspection image, the relative movement amount between the imaging timings is determined based on the master information prepared in the master creation flow performed in advance, and the multiple original images acquired in step 2-2 are positioned and combined according to the relative movement amount. This allows the original images to be positioned in appropriate positions taking into account the relative movement amount, and an inspection image for the workpiece W to be inspected can be formed, without performing feature point extraction processing and movement amount derivation processing on the original images acquired in step 2-2.

[0078] Furthermore, in forming the inspection image in step 2-3, the images obtained from each of the multiple imaging devices 10 are combined to form three-dimensional data (three-dimensional image) that allows a three-dimensional understanding of the application state of the fluid F on the workpiece W. Thereafter, the control flow proceeds to step 2-4.

[0079] (Step 2-4) When the control flow proceeds to step 2-4, an inspection process is performed on the workpiece W to be inspected. In this embodiment, as described above, a method for inspecting the application state based on the characteristics of the irradiated light image Li reflected in the inspection image and the three-dimensional shape of the fluid F on the entire workpiece W based on three-dimensional data is used to determine whether there is any application defect of the fluid F in areas where the fluid F should be applied, and whether the total volume (application amount) and application shape of the fluid F on the workpiece W are appropriate. Thereafter, the control flow proceeds to step 2-5.

[0080] (Step 2-5) When the control flow proceeds to step 2-5, it is confirmed whether or not inspection of the application state of the fluid F has been completed for all of the workpieces W to be inspected. If there are any workpieces W for which inspection has not been completed, the control flow returns to step 2-2. This allows the master information prepared in step 2-1 to be used in the inspection of the next workpiece W. On the other hand, if it is confirmed in step 2-5 that inspection of all of the workpieces W has been completed, the moving device 30 completes the series of control flows.

[0081] As described above, the configuration of the coating inspection system S1 of this embodiment merely illustrates one embodiment of the present invention, and various modified examples are possible. Below, a coating inspection system S2 having a configuration related to a modified example will be described. Note that the coating inspection system S2 shares most of the configuration, control, etc. with the above-mentioned coating inspection system S1. Therefore, in the following description of the coating inspection system S2, the configuration, control, etc. that are common to the coating inspection system S1 will be assigned the same reference numerals, and description thereof will be omitted or simplified.

[0082] <<Modification of Device Configuration>> Similar to the above-described coating inspection system S1, the coating inspection system S2 according to this modification includes an imaging device 110, an irradiation device 120, a moving device 30, and an inspection control device 40. In the coating inspection system S2, the imaging device 110 and the irradiation device 120 are partially different from those in the above-described coating inspection system S1, but the moving device 30 and the inspection control device 40 are similar.

[0083] The imaging device 110 is a device for capturing an image of the workpiece W, similar to the imaging device 10 described above. The imaging device 110 can use various optical devices such as cameras, sensors, etc., similar to the imaging device 10. The imaging device 110 is attached to the moving device 30 together with the irradiation device 120 and the coating device 50 so as to be oriented so as to be able to capture an image of the imaging target area A. Furthermore, although the coating inspection system S2 may have a single imaging device 110, in this embodiment, multiple imaging devices 110 (three in this embodiment) are provided. Multiple imaging devices 110 (three) are provided so as to be spaced approximately equally apart in the circumferential direction of the imaging target area A.

[0084] The imaging device 110 has the same configuration and functions as the imaging device 10 of the above embodiment, and is installed in the same arrangement. In addition, the imaging device 110 is capable of capturing irradiation light L in a specific wavelength range that is specified in advance, but is unable to capture irradiation light L outside the specified wavelength range. Furthermore, in this embodiment, the wavelength range of the irradiation light L that can be captured by each of the multiple imaging devices 110 (imaging devices 110A, 110B, and 110C) provided (three in this embodiment) is different.

[0085] The irradiation device 120 is provided in correspondence with the above-described imaging device 110, similar to the irradiation device 20. In this embodiment, a plurality of imaging devices 110 (three in this embodiment) are provided, and therefore the same number of irradiation devices 120 (three in this embodiment) as the number of imaging devices 10 are provided in correspondence with the imaging devices 110, respectively. Specifically, in this embodiment, irradiation devices 120A, 120B, and 120C are provided as the irradiation devices 120, corresponding to the imaging devices 110A, 110B, and 110C.

[0086] Like the illumination devices 20A, 20B, and 20C, the illumination devices 120A, 120B, and 120C can irradiate illumination light L in synchronization with image capture by the imaging devices 10A, 10B, and 10C, respectively. Furthermore, the illumination devices 120A, 120B, and 120C are configured to emit illumination light L of different wavelengths. The wavelengths of the illumination light L emitted by the illumination devices 120A, 120B, and 120C are set to match the wavelength ranges that the associated imaging devices 110 can capture, and to wavelengths that are outside the wavelength ranges that the unassociated imaging devices 110 can capture.

[0087] The coating inspection system S2 can perform imaging processing, feature point extraction processing, movement amount derivation processing, master definition processing, image formation processing, and inspection processing by performing control similar to that of the coating inspection system S1. In the coating inspection system S2, the multiple imaging devices 110 are each capable of capturing irradiation light L in a different wavelength range, and the multiple irradiation devices 120 provided corresponding to each imaging device 110 are each capable of irradiating irradiation light L in a wavelength range that can be captured by the corresponding imaging device 110. Therefore, in the coating inspection system S2, even if the multiple irradiation devices 120 simultaneously irradiate the same imaging target area A during the imaging processing and simultaneously capture images of the imaging target area A, the irradiation light L irradiated by the multiple irradiation devices 120 can be captured by each imaging device 110 without overlapping with each other.

[0088] As in the first embodiment, the application inspection system S2 can execute the master creation flow and define the master information in accordance with the flowchart shown in Fig. 9. Furthermore, the application inspection system S2 can execute the inspection flow and inspect the application state of the fluid F on the workpiece W in accordance with the flowchart shown in Fig. 10.

[0089] <<Modified Control>> The above-described coating inspection systems S1 and S2 have been exemplified as executing the master creation flow as described above, and then utilizing the master information defined thereby in inspection flows that are performed multiple times, but the present invention is not limited to this. For example, the coating inspection systems S1 and S2 may be configured to execute the master creation flow each time before executing an inspection flow.

[0090] Furthermore, in the above-described coating inspection systems S1 and S2, an original image is acquired by performing an imaging process (step 1-1) in a master creation flow for defining master information, and then an imaging process (step 2-2) is performed again in an inspection flow. However, the present invention is not limited to this. In the master creation flow, the original image used to derive the relative movement amount can be used to create an inspection image used for the inspection process in the inspection flow. For example, while both the master creation flow and the inspection flow can be executed as a series of steps for each workpiece W to be inspected, steps 2-1 and 2-2 can be omitted. As a result, the original image obtained in the imaging process in step 1-1 can be used as the original image used to derive the relative movement amount in step 1-3 in the master creation flow, and an inspection image can be prepared in the image formation process in step 2-3 to perform the inspection process in step 2-4.

[0091] The above-described application inspection systems S1 and S2 have been described as examples of inspecting the application state of a workpiece W on which the fluid F has been applied in a line, but the present invention is not limited to this. For example, the application inspection systems S1 and S2 can also inspect a workpiece W on which the fluid F has been applied in a dot pattern (point application). When inspecting a workpiece W on which the fluid F has been applied in a dot pattern, if the size of the dot-patterned application of the fluid F exceeds the size of the imaging target area A or if there are many dot-patterned applications of the fluid F on the workpiece W, it is preferable to perform the imaging process while moving the imaging device 10 relative to the workpiece W. Furthermore, in cases where the dot-patterned application of the fluid F can be imaged by the imaging device 10 without moving the workpiece W and the imaging device 10 relative to each other, it is preferable to image the fluid F without moving the imaging device 10 relative to each other during the imaging process.

[0092] Furthermore, in the formation of the inspection image in step 2-3 of the inspection flow, an example was given in which images obtained from each of the multiple imaging devices 10 were combined, but the present invention is not limited to this. For example, based on the relative movement direction between the workpiece W and the imaging devices 10a, 10b, 10c and the irradiation devices 20a, 20b, 20c, and the shape of the fluid F relative to the imaging devices 10a, 10b, 10c, it is also possible to select only images obtained from the imaging devices 10a, 10b, 10c positioned in a direction that provides the most appropriate irradiation light image Li for each imaging device 10a, 10b, 10c and use them to create the inspection image. In this way, as a method of selecting the most appropriate image from the images obtained by the imaging devices 10a, 10b, 10c, for example, it is preferable to adopt a method of selecting only images obtained by the imaging devices 10a, 10b, 10c positioned in a direction in which the irradiation light image Li is captured as a bright line without being hidden by the fluid F, etc.

[0093] <Effects Obtained by Coating Inspection Systems S1, S2> The coating inspection systems S1, S2 exemplified as the above-described embodiment and modified examples have the following characteristic configurations (a) to (m), which enable the coating inspection systems S1, S2 to achieve the unique effects described below.

[0094] (a) The above-mentioned application inspection systems S1, S2 are intended to inspect the application state of fluid F on the workpiece W, and include an imaging device 10, 110 that acquires an image of the workpiece W, a moving device 30 that moves the imaging device 10, 110 and the workpiece W relative to each other, and an inspection control device 40 that controls the inspection of the application of fluid F on the workpiece W. The application inspection systems S1, S2 are capable of performing, during the process of moving the imaging device 10, 110 and the workpiece W relative to each other, an imaging process in which the imaging device 10, 110 acquires multiple images at different imaging timings; a feature point extraction process in which feature points contained in the images are extracted; a movement amount derivation process in which the amount of relative movement between the imaging device 10, 110 and the workpiece W between imaging timings is derived based on the difference between the positions of feature points in the image acquired by imaging at an earlier imaging timing and the positions of feature points in the image acquired by imaging at a later imaging timing; an image formation process in which an inspection image is formed by using images acquired by the imaging process at different imaging timings or processed images processed based on the images as original images, and arranging and combining the original images based on the relative movement amount; and an inspection process in which the application of fluid F to the workpiece W is inspected based on the inspection images acquired by the image formation process.

[0095] By configuring the above-described coating inspection systems S1 and S2 as described above in (a), the feature points extracted by the feature point extraction process can be used as indicators to accurately determine the relative movement amount between the workpiece W and the imaging device 10, 110 between imaging timings in the movement amount derivation process. Furthermore, by executing the image formation process, the above-described coating inspection systems S1 and S2 can appropriately combine original images based on the images obtained by the imaging process based on the relative movement amount determined as described above to obtain an inspection image. The above-described coating inspection systems S1 and S2 perform the inspection process based on the inspection image thus obtained. Therefore, the above-described coating inspection systems S1 and S2 can accurately inspect the application state of the fluid F on the workpiece W even if there is a fluctuation in the relative movement speed between the inspection device and the workpiece W.

[0096] (b) The above-mentioned application inspection systems S1 and S2 are capable of executing a master definition process that defines master information that associates the relative movement amount derived by the movement amount derivation process and the imaging timing, and the inspection control device 40 is capable of executing a master creation flow that defines master information through processes including imaging processing, feature point extraction processing, movement amount derivation processing, and master definition processing, and an inspection flow that acquires an inspection image by executing an image formation process based on the imaging timing of the original image obtained by the imaging process and the relative movement amount derived based on the master information defined by the master creation flow, and then executes inspection processing based on the inspection image.

[0097] The above-described coating inspection systems S1 and S2 can define master information that associates the relative movement amount and the imaging timing by executing the master creation flow as described above (b). Furthermore, the above-described coating inspection systems S1 and S2 can acquire an inspection image in which the original image is positioned with high positional accuracy by executing an image formation process based on the imaging timing of the original image obtained by the imaging process and the relative movement amount derived based on the master information defined by the master creation flow, taking the relative movement amount into account. The above-described coating inspection systems S1 and S2 perform the inspection process using the inspection image prepared in this manner, thereby enabling highly accurate inspection of the application state of the fluid F on the workpiece W. Furthermore, the above-described coating inspection systems S1 and S2 can execute the inspection flow by previously defining the master information by executing the master creation flow and utilizing this master information.

[0098] (c) The above-described coating inspection systems S1 and S2 execute a master creation flow each time before executing an inspection flow.

[0099] By configuring the above-described coating inspection systems S1 and S2 as described in (c), the master creation flow can be executed in advance for each inspection flow to update the master information. This allows the above-described coating inspection systems S1 and S2 to always perform inspection processing based on inspection images created based on the latest master information. Therefore, the above-described coating inspection systems S1 and S2 can further improve inspection accuracy.

[0100] (d) The above-described coating inspection systems S1 and S2 repeatedly use the master information defined by the master creation flow in multiple inspection flows.

[0101] By configuring the above-described coating inspection systems S1 and S2 as described in (d) above, the master information defined in advance by the master creation flow can be repeatedly used in multiple inspection flows to perform inspection processing. Therefore, the above-described coating inspection systems S1 and S2 can efficiently inspect the coating conditions of multiple workpieces W.

[0102] (e) The above-mentioned application inspection systems S1, S2 are application inspection systems S1, S2 for inspecting the application state of fluid F on a workpiece W, and include an imaging device 10, 110 for acquiring an image of the workpiece W, a moving device 30 for moving the imaging device 10, 110 and the workpiece W relative to each other, and an inspection control device 40 for controlling the inspection of the application of fluid F on the workpiece W, wherein the multiple imaging devices 10, 110 are arranged to surround the imaging target area A, and the inspection control device 40 is capable of executing an inspection process for inspecting the application of fluid F on the workpiece W based on images obtained by imaging by the multiple imaging devices 10, 110.

[0103] By configuring the above-described coating inspection systems S1 and S2 as described in (e) above, the target area can be imaged from different angles using multiple imaging devices 10 and 110, and coating inspection can be performed based on the images obtained thereby. This allows the above-described coating inspection systems S1 and S2 to perform inspection with high accuracy.

[0104] (f) The above-mentioned application inspection systems S1, S2 are equipped with an irradiation device 20, 120 that irradiates a line of irradiation light L across the fluid F applied to the workpiece W, and an imaging device 10, 110 that images an area including the irradiation area of ​​the irradiation light L as an imaging target area A, and the imaging process involves moving the imaging device 10, 110 and the workpiece W relative to each other to vary the imaging target area A, while imaging the imaging device 10, 110 while irradiating the imaging target area A with the irradiation light L, thereby obtaining images at multiple locations on the workpiece W, and the inspection process involves inspecting the application state of the fluid F on the workpiece W based on the characteristics of the irradiation light L that appear in the image.

[0105] By configuring the above-mentioned application inspection systems S1 and S2 as described above (f), the characteristics of the irradiated light L reflected in the image obtained by the imaging process can be utilized to inspect the application state of the fluid F on the workpiece W.

[0106] (g) In the above-described coating inspection systems S1 and S2, the irradiation devices 20 and 120 can irradiate a plurality of line-shaped irradiation light beams L arranged in a direction intersecting the direction in which the irradiation light beams L extend.

[0107] By configuring the above-described coating inspection systems S1 and S2 as described in (g) above, it is possible to reduce the number of times images are taken in the imaging process and reduce the time required for image processing in processes such as feature point extraction processing, movement amount derivation processing, image formation processing, etc. Furthermore, by configuring the above-described coating inspection systems S1 and S2, the spacing between the linear irradiation light L does not vary regardless of the relative movement speed, and therefore it is possible to improve the inspection accuracy compared to when inspection is performed by irradiating a single linear irradiation light L.

[0108] (h) The above-mentioned application inspection systems S1, S2 capture images of the same imaging target area A using multiple imaging devices 10, 110, and use the images obtained from each imaging device 10, 110 to form three-dimensional data regarding the application state of the fluid F on the workpiece W.

[0109] By configuring the above-described coating inspection systems S1 and S2 as described in (h), it is possible to prevent blind spots from occurring during inspection and improve inspection accuracy.

[0110] (i) The above-mentioned application inspection systems S1, S2 are equipped with irradiation devices 20, 120 that irradiate a line of irradiation light L across the fluid material F applied to the workpiece W, and multiple irradiation devices 20, 120 are provided corresponding to the imaging devices 10, 110, and the irradiation light L is irradiated in synchronization with imaging by the associated imaging device 10, 110.When imaging the same imaging target area A by multiple imaging devices 10, 110, the imaging timing by each imaging device 10, 110 is staggered.

[0111] By configuring the above-described coating inspection systems S1, S2 as described in (i) above, when capturing images using a plurality of imaging devices 10, 110, irradiation is performed by the irradiation device 20, 120 associated with the imaging device 10, 110 that is capturing the image, while preventing the irradiation light L from the irradiation device 20, 120 associated with the other imaging devices 10, 110 from appearing in the image. This allows the above-described coating inspection systems S1, S2 to further improve the inspection accuracy.

[0112] (j) The above-mentioned application inspection systems S1, S2 are equipped with irradiation devices 20, 120 that irradiate a line of irradiation light L across the fluid material F applied to the workpiece W, and a plurality of irradiation devices 20, 120 are provided corresponding to the imaging devices 10, 110, and irradiate the irradiation light L in synchronization with imaging by the associated imaging device 10, 110, and the plurality of irradiation devices 20, 120 each emit irradiation light L of a different wavelength, and the plurality of imaging devices 10, 110 are capable of imaging the irradiation light L emitted from the irradiation devices 20, 120 that are respectively provided corresponding to them, but are unable to image the irradiation light L emitted from other irradiation devices 20, 120 that are not associated with them.

[0113] By configuring the above-described coating inspection systems S1, S2 as in (j) above, when imaging is performed using a plurality of imaging devices 10, 110, it is possible to prevent the illumination light L from the illumination devices 20, 120 associated with the imaging device 10, 110 that is performing the imaging from appearing in the image, while preventing the illumination light L from the illumination devices 20, 120 associated with the other imaging devices 10, 110 from appearing in the image. This allows the above-described coating inspection systems S1, S2 to further improve the inspection accuracy.

[0114] (k) The above-mentioned coating inspection systems S1 and S2 have a coating device 50 that can spray and coat a fluid F onto a workpiece W, and the coating device 50 is installed so that it can be moved together with the imaging device 10, 110, so that the fluid F can be sprayed simultaneously with imaging by the imaging device 10, 110.

[0115] By configuring the above-described application inspection systems S1 and S2 as described in (k) above, it is possible to simultaneously apply the fluid F to the workpiece W and inspect the state of application. This allows the above-described application inspection systems S1 and S2 to apply and inspect the fluid F more efficiently than when the application of the fluid F and the inspection of the state of application are performed separately.

[0116] <Other Modifications> The above-described coating inspection systems S1 and S2 are not limited to those exemplified in the above embodiments and modifications, and may have further different configurations and controls as long as they do not deviate from the spirit of the present invention.

[0117] Specifically, the coating inspection systems S1 and S2 include an imaging device 10 and 110, an irradiation device 20 and 120, a moving device 30, an inspection control device 40, and a coating device 50, but the present invention is not limited to this. In addition to these components, other components may be included, or, as described above in (a), a configuration may be adopted in which the irradiation device 20 and 120 and the coating device 50 are not included. In a configuration in which the irradiation device 20 and 120 are not included, the coating inspection systems S1 and S2 may be configured to inspect the coating state of the fluid F using a method other than the method of inspecting the coating state of the fluid F based on the characteristics of the irradiation light image Li, as in the inspection process described above.

[0118] Specifically, the application state of the fluid F can be inspected using a method such as the ToF (Time of Flight) method, in which light is irradiated onto the object to be measured and the distance is determined by measuring the time and phase change until the reflected light returns to the detector. In this case, the imaging device 10, 110 can be a so-called ToF camera, in which an infrared pulse emitter and an infrared image sensor are time-synchronized, and distance information can be obtained for each pixel from the time difference and phase difference in the light reception timing of each pixel, and 3D information for the entire angle of view can be created by combining the distance information. It is also possible to inspect the application state of the fluid F using a method such as the stereo method, in which two or more imaging devices 10, 110 with different viewpoints are used to determine the distance based on the principle of triangulation.

[0119] Furthermore, in the above-described coating inspection systems S1 and S2, the movement control unit 36 ​​of the movement control device 34 and the coating control device 55 are separate entities, but the present invention is not limited to this. For example, the coating inspection systems S1 and S2 can be configured to include a coating control unit in the movement control device 34 that controls coating in the same way as the above-described coating control device 55.

[0120] The coating inspection systems S1 and S2 inspect the coating condition of the fluid F by executing the master creation flow and the inspection flow as described above (b), but the present invention is not limited to this. For example, the coating inspection systems S1 and S2 can operate as a flow that integrates both flows by omitting some steps of the master creation flow and the inspection flow as described above or by adding other steps, or one or both of the master creation flow and the inspection flow can be different from the above. Furthermore, the coating inspection systems S1 and S2 can also inspect the coating condition of the fluid F using other processes or flows without executing the master creation flow and the inspection flow.

[0121] The above-described coating inspection systems S1 and S2 can execute a master creation flow each time before executing an inspection flow, as in (c) above, or can repeatedly use master information defined by a master creation flow executed in advance in multiple inspection flows, as in (d) above. In either case, the coating inspection systems S1 and S2 can also add and execute other flows or processes, or can change some of the processes or flows to other ones and execute them.

[0122] The above-described coating inspection systems S1, S2 have an imaging device 10, 110 and an inspection control device 40, as shown in (e) above, and are configured such that multiple imaging devices 10, 110 are arranged to surround an imaging target area A, and are not limited to those exemplified in the above-described embodiments, as long as they are capable of performing inspection processing related to the application of fluid F using the inspection control device 40. Specifically, the coating inspection systems S1, S2 do not necessarily have to include the irradiation device 20, 120 and the moving device 30. Therefore, the coating inspection systems S1, S2 can also be configured to perform imaging without irradiating the irradiation light image Li using the irradiation device 20, 120, or to perform imaging without relatively moving the workpiece W and the imaging device 10, 110 using the moving device 30.

[0123] The inspection control device 40 described above is installed on the installation member 35 together with the imaging devices 10, 110 and the irradiation devices 20, 120, but it can also be configured by an external information processing device such as a personal computer.

[0124] The above-described application inspection systems S1, S2 inspect the application state of the fluid F on the workpiece W based on the characteristics of the irradiated light L reflected in the image obtained by the imaging devices 10, 110, as described above (f), but the present invention is not limited to this. As described above, the application inspection systems S1, S2 can also inspect the application state of the fluid F using a method other than an inspection based on the characteristics of the irradiated light image Li, such as the ToF method or the stereo method.

[0125] The above-mentioned coating inspection systems S1, S2 are not limited to a configuration in which the irradiation devices 20, 120 are configured to irradiate multiple linear irradiation light beams L arranged in a direction intersecting the direction in which the irradiation light beams L extend, as in (g) above, but may also be configured to irradiate, for example, a single irradiation light beam L as the irradiation device 20, 120.

[0126] The above-described application inspection systems S1, S2, as described above in (h), use multiple imaging devices 10, 110 to capture images of the same imaging target area A, thereby generating three-dimensional data that allows the application state of the fluid F to be grasped in three dimensions, but the present invention is not limited to this. The application inspection systems S1, S2 can use one or more selected from multiple original images obtained by capturing images using multiple imaging devices 10, 110, or can be configured with only one imaging device 10, 110, and can generate two-dimensional data for grasping the application state of the fluid F from the original image captured by this device.

[0127] The above-described coating inspection systems S1, S2 are configured such that, as in (i) above, when the multiple imaging devices 10, 110 image the same imaging target area A, the imaging timing of each imaging device 10, 110 is staggered, or as in (j) above, the multiple imaging devices 10, 110 are capable of imaging the irradiation light L emitted from the irradiation devices 20, 120 associated with them, but are unable to image the irradiation light L emitted from other irradiation devices 20, 120 that are not associated with them, but the present invention is not limited to this. For example, in cases where the accuracy of the inspection process is not significantly affected even if an irradiation light image Li emitted by an irradiation device 20, 120 other than the one associated with the imaging device 10, 110 that performs the imaging is included in the image, it is preferable to perform imaging at the same imaging timing while irradiating irradiation light L in the same wavelength range, without staggering the imaging timing of each imaging device 10, 110 or shifting the wavelength of the irradiation light image Li, as described above.

[0128] As described above in (k), the above-described coating inspection systems S1 and S2 are equipped with a coating device 50 and can discharge the fluid F simultaneously with imaging by the imaging devices 10 and 110, but the present invention is not limited to this. For example, the above-described coating inspection systems S1 and S2 may not be equipped with a coating device 50, and after a separately provided coating device 50 applies the fluid F to the workpiece W, the coating inspection systems S1 and S2 may inspect the application state of the fluid F.

[0129] The present invention is not limited to the configurations described in the above-described embodiments, and appropriate design modifications and the like are possible within the scope of the technical concept of the present invention. The components of the above-described embodiments and variations may be arbitrarily selected and combined. Furthermore, any component of each embodiment or variation may be arbitrarily combined with any component described in the means for solving the problems, the detailed description, etc., or any component embodying any component described in the means for solving the problems, the detailed description, etc. The present invention also intends to obtain rights to these in this application or in divisional applications based on this application.

[0130] The stator handling device and uniaxial eccentric screw pump system of the present invention can be suitably used in all uniaxial eccentric screw pumps that require stator assembly and removal work, and in all uniaxial eccentric screw pump systems equipped with such pumps.

[0131] 10: Imaging device 20: Irradiation device 30: Moving device 40: Inspection control device 50: Coating device 110: Imaging device 120: Irradiation device A: Image capture target area F: Fluid L: Irradiation light S1: Coating inspection system S2: Coating inspection system W: Work

Claims

1. A coating inspection system for inspecting the application of a fluid on a workpiece, comprising: an imaging device for acquiring an image of the workpiece; a moving device for relatively moving the imaging device and the workpiece; and an inspection control device for controlling the inspection of the application of the fluid on the workpiece, characterized in that the coating inspection system is capable of executing an imaging process for acquiring a plurality of images at different imaging timings by the imaging device during the process of relatively moving the imaging device and the workpiece; a feature point extraction process for extracting feature points contained in the images; a movement amount derivation process for deriving an amount of relative movement between the imaging device and the workpiece between imaging timings based on the difference between the position of the feature point in an image acquired by imaging at an earlier imaging timing and the position of the feature point in an image acquired by imaging at a later imaging timing; an image formation process for forming an inspection image by using the images acquired by the imaging process at different imaging timings or processed images processed based on the images as original images, and arranging and combining the original images based on the amount of relative movement; and an inspection process for inspecting the application of the fluid on the workpiece based on the inspection images acquired by the image formation process.

2. A coating inspection system as described in claim 1, characterized in that the coating inspection system is capable of executing a master definition process that defines master information that associates the relative movement amount derived by the movement amount derivation process and the imaging timing, and the inspection control device is capable of executing a master creation flow that defines the master information through processes including the imaging process, the feature point extraction process, the movement amount derivation process, and the master definition process, and an inspection flow that obtains the inspection image by executing the image formation process based on the imaging timing of the original image obtained by the imaging process and the relative movement amount derived based on the master information defined by the master creation flow, and executes the inspection process based on the inspection image.

3. The coating inspection system according to claim 2, wherein the master creation flow is executed each time before the inspection flow is executed.

4. The coating inspection system according to claim 2, wherein the master information defined by the master creation flow is repeatedly used in a plurality of inspection flows.

5. A coating inspection system for inspecting the application of a fluid on a workpiece, comprising: an imaging device for acquiring an image of the workpiece; and an inspection control device for controlling the inspection of the application of the fluid on the workpiece, wherein a plurality of the imaging devices are arranged to surround an area to be imaged; and the inspection control device is capable of executing an inspection process for inspecting the application of the fluid on the workpiece based on images obtained by imaging by the plurality of the imaging devices.

6. A coating inspection system according to any one of claims 1 to 5, comprising an irradiation device which irradiates a line of irradiation light so as to cross the fluid applied to the workpiece, the imaging device which images an area including the irradiation area of ​​the irradiation light as an imaging target area, the imaging process which acquires images at multiple points on the workpiece by imaging the imaging device while irradiating the irradiation light onto the imaging target area while varying the imaging target area by moving the imaging device and the workpiece relatively, and the inspection process which inspects the coating condition of the fluid on the workpiece based on characteristics of the irradiation light that appear in the image.

7. A coating inspection system according to claim 6, wherein the irradiation device is capable of irradiating a plurality of the line-shaped irradiation light beams in a direction intersecting the direction in which the irradiation light beam extends, the line-shaped irradiation light beams being arranged in a plurality of directions.

8. A coating inspection system as described in claim 5, characterized in that the same imaging target area is imaged by a plurality of imaging devices, and the images obtained from each of the imaging devices are used to inspect the coating condition of the fluid on the workpiece.

9. A coating inspection system as described in claim 5, further comprising an irradiation device which irradiates a line of irradiation light across the fluid applied to the workpiece, wherein a plurality of the irradiation devices are provided corresponding to the imaging devices, and the irradiation light is irradiated in synchronization with imaging by the associated imaging device, and when imaging the same imaging target area by the plurality of imaging devices, the imaging timing by each imaging device is staggered.

10. A coating inspection system as described in claim 5, comprising an irradiation device which irradiates a line of irradiation light so as to cross the fluid applied to the workpiece, a plurality of the irradiation devices are provided corresponding to the imaging devices, and the irradiation light is irradiated in synchronization with imaging by the associated imaging device, the plurality of irradiation devices each emitting irradiation light of a different wavelength, and the plurality of imaging devices are capable of imaging the irradiation light emitted from the irradiation device respectively associated therewith, but are unable to image the irradiation light emitted from the other irradiation devices not associated therewith.

11. A coating inspection system as described in any one of claims 1, 2 and 5, characterized in that it has a coating device capable of discharging the fluid toward the workpiece to coat it, the coating device being movably installed together with the imaging device, and the discharging of the fluid can be performed simultaneously with imaging by the imaging device.

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