Fluorescent x-ray analysis device

Abstract

The present invention improves analysis accuracy and shortens measurement time by preventing a decrease in the intensity of fluorescent X-rays to be detected. This fluorescent X-ray analysis device includes: a sample chamber in which a sample is disposed; and an irradiation chamber which is partitioned from the sample chamber by using a partition. The fluorescent X-ray analysis device has: an X-ray source that is disposed in the irradiation chamber, and emits X-rays obliquely toward an opening provided in a partition wall between the sample chamber and the irradiation chamber; a window frame member that is formed of a material allowing transmission of the X-rays therethrough, holds a partition film constituting a part of the partition, and is disposed in the opening provided in the partition wall; and a film support member that has a long hole allowing passage of the X-rays therethrough, is disposed adjacent to the partition film on the irradiation chamber side, and supports the partition film from the irradiation chamber side. The film support member is disposed such that the long hole is parallel to the optical axis of the X-rays in a plan view from the sample chamber side to the irradiation chamber side.

Description

X-ray fluorescence analyzer

[0001] The present invention relates to an X-ray fluorescence analyzer.

[0002] X-ray fluorescence analyzers are known as devices for analyzing elements contained in samples. X-ray fluorescence analyzers irradiate a sample with primary X-rays and perform analysis based on the intensity and energy of fluorescent X-rays emitted from the sample. Simple X-ray fluorescence analyzers are also known, each having a structure in which a sample chamber and an irradiation chamber are separated by a partition membrane to prevent contamination of the inside of the device by the sample. For example, Patent Document 1 discloses an X-ray detection device in which a sample holder is disposed between the sample chamber and the irradiation chamber, and the sample holder secures an X-ray transparent membrane in a stretched state to prevent bending, wrinkling, folding, or the like.

[0003] JP 2014-38035 A

[0004] When analyzing light elements in a sample, X-rays are significantly attenuated by the atmosphere, requiring the X-ray optical path to be purged with helium or evacuated. However, helium can be difficult to supply or obtain. When the sample is liquid, the sample cannot be placed under vacuum, so the irradiation chamber must be evacuated while the sample chamber is kept at atmospheric pressure. However, the X-ray detection device in Patent Document 1 does not anticipate a pressure difference between the front and back surfaces of the X-ray transparent membrane. Therefore, when performing measurements under a pressure difference between the front and back surfaces of the X-ray transparent membrane, measures such as reducing the size of the circular through-holes in the sample holder or making the through-holes mesh-like are necessary. However, because the X-ray irradiation unit irradiates the sample with X-rays at an angle, such measures result in the X-rays being blocked by the sample holder, reducing the area of ​​the sample irradiated with X-rays. In this case, the intensity of the detected fluorescent X-rays decreases, resulting in reduced analytical accuracy and increased measurement time.

[0005] The present disclosure has been made in consideration of the above-mentioned problems, and its purpose is to provide an X-ray fluorescence analyzer in which a partition film is provided between a sample chamber and an irradiation chamber, and which has high analytical accuracy and a short measurement time by preventing a decrease in the intensity of the detected fluorescent X-rays.

[0006] (1) An X-ray fluorescence analyzer according to one aspect of the present disclosure is an X-ray fluorescence analyzer having a sample chamber in which a sample is placed and an irradiation chamber separated from the sample chamber by a partition wall, the X-ray source being disposed in the irradiation chamber and irradiating X-rays obliquely toward an opening in a partition wall between the sample chamber and the irradiation chamber; a window frame member that holds a partition film that is formed of a material that transmits the X-rays and that constitutes part of the partition wall and is disposed within the opening in the partition wall; and a film support member that has an elongated hole that allows the X-rays to pass through and is disposed adjacent to the irradiation chamber side of the partition film and supports the partition film from the irradiation chamber side, the film support member being disposed so that the elongated hole is parallel to the optical axis of the X-rays in a plan view from the sample chamber side toward the irradiation chamber side.

[0007] (2) Another aspect of the X-ray fluorescence analyzer according to the present disclosure is characterized in that it further includes a slit arranged on the optical path of the X-ray fluorescence and composed of a plurality of parallel plates arranged at regular intervals, and the parallel plates are arranged so as to be parallel to the slot in a plan view from the sample chamber side toward the irradiation chamber side.

[0008] (3) Another aspect of the present disclosure is an X-ray fluorescence analyzer, characterized in that it has an opening that allows the X-rays to pass from the irradiation chamber to the sample chamber, and a window frame holding member that is placed in the sample chamber and supports the outer edge of the film support member from below.

[0009] (4) In another aspect of the X-ray fluorescence analysis apparatus of the present disclosure, the film support member has a mating portion at a position where it contacts the window frame holding member, and the window frame holding member has a mating portion at a position where it mates with the mating portion when the film support member is positioned so that the long hole is parallel to the optical axis of the X-rays in a plan view from the sample chamber side toward the irradiation chamber side.

[0010] (5) In a fluorescent X-ray analyzer according to another aspect of the present disclosure, the film support member is formed of resin.

[0011] (6) In a fluorescent X-ray analyzer according to another aspect of the present disclosure, the film support member is formed of PEEK or PTFE.

[0012] (7) In another aspect of the X-ray fluorescence analyzer of the present disclosure, at least a portion of the film support member that is irradiated with X-rays is formed of a resin coated with aluminum.

[0013] (8) In a fluorescent X-ray analyzer according to another aspect of the present disclosure, the film support member has a thickness of 1 mm or more.

[0014] (9) In another aspect of the X-ray fluorescence analysis apparatus of the present disclosure, the film support member has a plurality of the long holes, and the plurality of long holes are arranged in a direction perpendicular to the optical axis of the X-rays in a planar view from the sample chamber side toward the irradiation chamber side.

[0015] (10) In another aspect of the X-ray fluorescence analyzer of the present disclosure, the width of the slot is at least four times the distance between adjacent slots.

[0016] (11) In a fluorescent X-ray analyzer according to another aspect of the present disclosure, the length of the slot is four times or more the width.

[0017] (12) In a fluorescent X-ray analyzer according to another aspect of the present disclosure, the film support member is made of metal.

[0018] According to the present disclosure, by preventing a decrease in the intensity of the detected fluorescent X-rays, it is possible to improve analytical accuracy and shorten measurement time.

[0019] 1 is a diagram showing an outline of an X-ray fluorescence analyzer; FIG. 2 is a diagram showing a cross section of a sample stage; FIG. 3 is a top view, a side view, and a bottom view of a film support member; FIG. 4 is a projection view from viewpoint A in FIG. 1 in the direction of the arrow; FIG. 5 is a projection view from viewpoint A in FIG. 1 in the direction of the arrow; and FIG. 6 is a projection view from viewpoint B in FIG. 1 in the direction of the arrow.

[0020] Preferred embodiments (hereinafter referred to as "embodiments") for carrying out the present disclosure will be described below with reference to the drawings. Fig. 1 is a diagram illustrating an outline of an X-ray fluorescence analyzer 100. As shown in Fig. 1, the X-ray fluorescence analyzer 100 has a sample chamber 102 in which a sample 118 is placed, and an irradiation chamber 106 separated from the sample chamber 102 by a partition wall. The sample chamber 102 and the irradiation chamber 106 are separated by partition walls, including a partition wall 104, to prevent gas from moving between them. The partition wall 104 has an opening that allows X-rays to pass from the irradiation chamber 106 to the sample chamber 102.

[0021] The irradiation chamber 106 is equipped with an X-ray source 108 that emits X-rays, a slit 110, a spectroscopic element 111 that disperses fluorescent X-rays, and a detector 112 that detects the fluorescent X-rays dispersed by the spectroscopic element 111. The X-ray source 108 is disposed in the irradiation chamber 106 and obliquely irradiates X-rays toward an opening provided in the partition wall 104 between the sample chamber 102 and the irradiation chamber 106. The X-ray source 108 irradiates X-rays through the opening onto a sample 118 placed in a sample cell 116. Fluorescent X-rays are emitted from the sample 118 irradiated with X-rays. The slit 110 is a Soller slit that is disposed on the optical path of the fluorescent X-rays and is composed of multiple parallel plates 402 (see FIG. 4 ) arranged at regular intervals. The spectroscopic element 111 disperses fluorescent X-rays having a predetermined wavelength from the fluorescent X-rays that have passed through the slit 110. The detector 112 is disposed at a position where the fluorescent X-rays are incident, and detects the fluorescent X-rays dispersed by the spectroscopic element 111. The detector 112 is, for example, a proportional counter, which measures the fluorescent X-rays and outputs a pulse signal. A counter (not shown) counts the pulse signal output from the detector 112 to obtain the intensity of the fluorescent X-rays. Analysis of the sample 118 is performed based on the intensity of the fluorescent X-rays.

[0022] 1 is a diagram showing the positional relationships in the x-axis direction and z-axis direction of the X-ray source 108, the slit 110, the spectroscopic element 111, and the detector 112, and these are drawn on the same xz plane. However, because the detector 112 is placed at a position where the dispersed fluorescent X-rays are incident, the position of the detector 112 in the y-axis direction differs from the positions of the X-ray source 108, the slit 110, and the spectroscopic element 111 in the y-axis direction.

[0023] The sample chamber 102 is provided with a sample stage 114, and a sample cell 116 is placed on the sample stage 114. The interior of the sample chamber 102 may be filled with helium or air. According to the present disclosure, measurements can be performed whether the sample 118 is placed in a helium environment or an air environment. Below, we will explain the case where the sample 118 is placed in an air environment, as this is the simplest case for the measurement method. Although the sample 118 may be a liquid or a solid (including powder), the following will explain the case where the sample 118 is a liquid. The liquid sample is placed in the sample cell 116. The sample cell 116 is cylindrical, and a sample-holding film is attached to cover the bottom. The liquid sample is placed on the sample-holding film. The top surface of the sample cell 116 may be sealed with another film to prevent the sample 118 from spilling. The sample stage 114 includes a window frame holding member, a window frame member 208, a film support member 210, and a lid member 212. FIG. 2 is a cross-sectional view of the sample stage 114. As shown in FIG.

[0024] The window frame holding member has an opening that allows X-rays to pass from the irradiation chamber 106 to the sample chamber 102, and is disposed in the sample chamber 102 to support from below the outer edge 306 of the film support member 210 and the outer edge of the window frame member 208. Specifically, the window frame holding member has a lower holding member 202 and an upper holding member 204. The lower holding member 202 and the upper holding member 204 have openings that allow X-rays to pass from the irradiation chamber 106 to the sample chamber 102.

[0025] The lower holding member 202 is a member disposed on and in contact with the partition wall 104. When viewed from the top and bottom, the lower holding member 202 has a substantially circular outer edge and a circular opening at a position corresponding to the opening provided in the partition wall 104. The opening of the lower holding member 202 has a shape corresponding to the area of ​​the film support member 210 excluding an outer edge portion 306 (described below). As shown in FIG. 2 , the lower holding member 202 has a step corresponding to the outer edge of the film support member 210. Furthermore, the lower holding member 202 has a fitting portion 206 that fits with a fitting portion 304 (see FIG. 3 ) of the film support member 210. The film support member 210 is disposed such that its outer edge is located at the step of the lower holding member 202, and the portion excluding the outer edge is located at the opening of the lower holding member 202, and the fitting portion 304 fits with the fitting portion 206 of the lower holding member 202. This allows the lower holding member 202 to support the outer edge 306 of the film support member 210 .

[0026] The lower holding member 202 also supports a window frame member 208 that is placed above the film support member 210. As shown in Figure 2, the lower holding member 202 has a step that corresponds to the outer edge of the curved portion of the window frame member 208. The lower holding member 202 has an O-ring at the position where the step is provided. The O-ring comes into contact with the curved portion of the window frame member 208 when the window frame member 208 is placed on the lower holding member 202. This creates an airtight seal between the window frame member 208 and the lower holding member 202.

[0027] The upper holding member 204 is a member that is placed on top of and in contact with the lower holding member 202. When viewed from the top and bottom, the upper holding member 204 has a substantially circular outer edge and a circular opening that is centered at the same position as the opening provided in the lower holding member 202 and has a larger diameter. The upper holding member 204 has an O-ring at a position where it comes into contact with the lower holding member 202. The upper holding member 204 supports the window frame member 208 together with the lower holding member 202.

[0028] The window frame member 208 holds a partition wall film 214 made of a material that is transparent to X-rays and that constitutes a part of the partition wall, and is placed in an opening provided in the partition wall 104. Specifically, the window frame member 208 holds a partition wall film 214 made of a material that is transparent to X-rays and that constitutes another part of the partition wall, and is placed in the opening of the window frame holding member. The window frame member 208 has an inner film holding member and an outer film holding member, each of which is annular. The window frame member 208 is placed in the opening of the window frame holding member with the partition wall film 214 sandwiched between the inner film holding member and the outer film holding member. The partition wall film 214 in the opening constitutes a part of the partition wall.

[0029] The film support member 210 has a long hole 302 that allows X-rays to pass through, and is positioned adjacent to the partition film 214 on the irradiation chamber 106 side to support the partition film 214 from the irradiation chamber 106 side. FIG. 3 shows a top view (upper side), a side view (center), and a bottom view (lower side) of the film support member 210. The position of the long hole 302 is indicated by a dashed line in the side view. The film support member 210 has a substantially circular outer edge when viewed from the top and bottom. As shown in FIG. 3, the film support member 210 may be provided with a thin outer edge portion 306 that contacts the upper surface of the lower holding member 202. For example, the film support member 210 has a circular shape with a diameter of 30 mm excluding the outer edge portion 306 when viewed from the top and bottom.

[0030] The film support member 210 is formed with a thickness that allows deformation due to the pressure difference between the sample chamber 102 and the irradiation chamber 106 to be negligible. Specifically, for example, the thickness of the film support member 210 is 1 mm or more, and preferably 2 mm or more. The thickness of the outer edge 306 that contacts the upper surface of the lower holding member 202 is 0.5 mm. The portion of the film support member 210 excluding the outer edge 306 has a shape that corresponds to the shape of the opening of the lower holding member 202.

[0031] The film support member 210 has a mating portion 304 at a position where it contacts the window frame holding member. Specifically, for example, the film support member 210 has two holes on the surface below the outer edge portion 306 (the side that contacts the lower holding member 202). In FIG. 3 , the mating portion 304 is a through hole, but the mating portion 304 may also be a non-through hole or recess. If the film support member 210 does not have the outer edge portion 306, a notch may be provided around the periphery. If the film support member 210 has the outer edge portion 306, the film support member 210 is placed on the lower holding member 202 so that the portion other than the outer edge portion 306 is positioned at the opening of the lower holding member 202 and the outer edge is positioned at the step of the lower holding member 202. At this time, the film support member 210 is placed so that the two holes (matting portion 304) fit into the protrusions (fitting portion 206) of the lower holding member 202.

[0032] The film support member 210 has a plurality of slots 302. For example, the film support member 210 has five elongated slots 302. The length of each slot 302 is preferably at least four times its width, and the width of each slot 302 is preferably at least four times the distance between adjacent slots 302. For example, each slot 302 has the same width but is formed to be the largest within the film support member 210 excluding the outer edge 306. Therefore, the slots 302 are longer the closer they are to the center. In the example shown in FIG. 3 , the lengths of the slots 302 from the inside to the outside are 26 mm, 24 mm, and 17 mm, respectively. The width of each slot 302 is the same, 4 mm. The distance between adjacent slots 302 (the width of the beam portion) is 0.5 mm.

[0033] The portions between adjacent slots 302 of the film support member 210 (hereinafter referred to as beam portions for convenience) support the partition film 214. When a plurality of slots 302 are connected to form one large opening, the partition film 214 is supported only by the outer edge portion 306 of the film support member 210. When the sample chamber 102 is at atmospheric pressure and the irradiation chamber 106 is a vacuum, a large force is applied to the partition film 214, causing it to break. However, by configuring the film support member 210 to have a plurality of slots 302 as in the present disclosure, the partition film 214 can be supported by the beam portions.

[0034] Furthermore, it is desirable that the length of the elongated hole 302 be made longer as the film support member 210 becomes thicker. For example, it is desirable that the ratio of the length of the elongated hole 302 to the thickness of the film support member 210 (thickness / length) be greater than the ratio of the x component to the z component included in the optical axis of the X-rays emitted by the X-ray source (z component / x component). Specifically, if the thickness of the central portion of the film support member 210 is 3.4 mm as described above, a length of the elongated hole 302 of 26 mm can prevent the X-rays from being blocked by the film support member 210.

[0035] The film support member 210 is formed from a resin. Specifically, the film support member 210 is formed from, for example, polyether ether ketone (PEEK) or polytetrafluoroethylene (PTFE). If the film support member 210 were made from metal, interference would occur, making it impossible to analyze some elements. By forming the film support member 210 from a resin that is less likely to generate interference, it is possible to analyze samples containing elements that cause interference. Note that if the film support member 210 is formed from a resin, it is desirable that the thickness of the portion excluding the outer edge 306 be 2 mm or more.

[0036] Furthermore, the film support member 210 may be made of resin with an aluminum coating on at least the portion irradiated with X-rays. Specifically, for example, the film support member 210 may be made of PEEK or PTFE and may be thermally sprayed with aluminum on the entire surface except for the outer edge 306. This can further reduce interference caused by impurities contained inside the resin.

[0037] Furthermore, the film support member 210 may be made of metal. Specifically, for example, the film support member 210 may be made of metal such as stainless steel (SUS) or titanium. By making the film support member 210 of metal, the mechanical strength can be improved and deformation due to the pressure difference between the irradiation chamber 106 and the sample chamber 102 can be suppressed.

[0038] The cover member 212 seals the space in which the sample cell 116 is placed. Specifically, as shown in Fig. 2, the cover member 212 has a shape that covers the space in which the sample cell 116 is placed, and is placed in contact with the upper holding member 204 of the window frame holding member. The cover member 212 has an O-ring at a position where it contacts the upper holding member 204.

[0039] Next, the orientation of the slot 302 and the flat plate of the slit 110 will be described. Fig. 4 is a projection view from viewpoint A in Fig. 1 in the direction of the arrow, with the cover member 212, sample cell 116, and window frame member 208 removed. Fig. 5 is a projection view from viewpoint A in Fig. 1 in the direction of the arrow, with the cover member 212, sample cell 116, window frame member 208, film support member 210, and window frame support member removed. Fig. 6 is a projection view from viewpoint B in Fig. 1 in the direction of the arrow, with the cover member 212, sample cell 116, window frame member 208, and window frame support member removed. Note that Fig. 6 omits the detector 112 and parts of the slit 110 other than the parallel plate 402, and omits the X-ray source 108, slit 110, and spectroscopic element 111 located below the partition wall 104.

[0040] The optical axis 602 of the X-rays emitted by the X-ray source 108 is oblique to the surface of the irradiated sample 118 (i.e., the surface including the sample-holding film, the xy plane). The optical axis 602 of the X-rays is included in the xz plane. That is, the optical axis 602 of the X-rays includes an x-axis component and a z-axis component, but does not include a y-component.

[0041] The film support member 210 is arranged so that the slots 302 are parallel to the optical axis 602 of the X-rays in a plan view from the sample chamber 102 side toward the irradiation chamber 106 side (plan view in the -z direction). That is, the film support member 210 is arranged so that the slots 302 are aligned along the x-axis direction. Furthermore, the multiple slots 302 are arranged side by side in a direction perpendicular to the optical axis 602 of the X-rays in a plan view from the sample chamber 102 side toward the irradiation chamber 106 side. That is, the film support member 210 is arranged so that the multiple slots 302 are aligned in the y-axis direction.

[0042] The film support member 210 has a certain thickness, and the optical axis 602 of the X-rays includes an x-axis component. Therefore, part of the X-rays is blocked by the beam portion of the film support member 210 (the optical path of the X-rays interferes with the beam portion). However, by arranging the elongated hole 302 along the x-axis direction, it is possible to minimize the interference between the optical path of the X-rays and the beam portion.

[0043] In addition, in a plan view from the sample chamber 102 side toward the irradiation chamber 106 side, the slit 110 is arranged so that the plurality of parallel plates 402 are parallel to the slots 302. At the back of the slots 302 in Fig. 4, some of the parallel plates 402 arranged so as to be oriented in the same direction as the slots 302 shown in Fig. 5 are shown. In other words, the slit 110 is arranged so that the plurality of parallel plates 402 are aligned along the x-axis direction.

[0044] As shown in FIG. 6 , X-rays emitted from the X-ray source 108 pass through the slot 302 and are irradiated toward an irradiation position 600 on the sample 118. Fluorescent X-rays emitted from the sample 118 pass through the slot 302 and the slit 110, are dispersed by the spectroscopic element 111, and are incident on the detector 112. At this time, in a plan view from the sample chamber 102 side toward the irradiation chamber 106 side, the slot 302 is parallel to an optical axis 602 of the X-rays. In other words, the film support member 210 is positioned so that the slot 302 is aligned along the intersection (x-axis) of a plane (x-z plane) including the optical axis 602 of the X-rays emitted by the X-ray source 108 and the optical axis 604 of the fluorescent X-rays passing through the slit 110, and a plane (x-y plane) formed by the film support member 210. The fitting portion 206 and the fitted portion 304 are positioned to achieve this positional relationship. That is, the window frame holding member has the fitting portion 206 at a position that fits into the fitted portion 304 when the film support member 210 is positioned so that the long hole 302 is parallel to the optical axis 602 of the X-rays in a plan view from the sample chamber 102 side toward the irradiation chamber 106 side. Therefore, the user can easily position the film support member 210 so that the long hole 302 is parallel to the optical axis 602 of the X-rays.

[0045] The fluorescent X-rays generated from the sample 118 do not have any particular directionality. However, because the slots 302 are arranged along the x-axis direction, some of the fluorescent X-rays having a y component are blocked by the beam portion (the optical path of the X-rays interferes with the beam portion). Note that FIG. 6 shows the optical axis 604 of the fluorescent X-rays that pass through the slit 110 among the generated fluorescent X-rays. Because some of the fluorescent X-rays having a y component are blocked by the beam portion, among the fluorescent X-rays that reach the irradiation chamber 106, the fluorescent X-rays without a y component have a higher intensity than the fluorescent X-rays with a y component. By arranging the slit 110 so that the multiple parallel plates 402 are parallel to the slots 302, the intensity of the fluorescent X-rays incident on the detector 112 can be increased.

[0046] Furthermore, although the film support member 210 is made of a material that is less susceptible to deterioration by X-rays (for example, a thermoplastic resin such as polyether ether ketone), it is desirable to replace the film support member 210 at regular intervals. According to the present disclosure, when replacing the film support member 210, the film support member 210 can be easily positioned so as to achieve the above-mentioned arrangement.

[0047] The present disclosure may be applied to either a wavelength-dispersive or energy-dispersive X-ray fluorescence analyzer 100. Furthermore, the present disclosure is not limited to the above-described embodiment and various modifications are possible. The configuration of the above-described X-ray fluorescence analyzer 100 is merely an example and is not intended to be limiting. The configuration may be replaced with a configuration that is substantially the same as the configuration shown in the above-described embodiment, that provides the same effects, or that achieves the same purpose. For example, although the outer shape of the film support member has been described as being circular, it may also be polygonal or have other shapes.

[0048] 100 X-ray fluorescence analyzer, 102 sample chamber, 104 partition wall, 106 irradiation chamber, 108 X-ray source, 110 slit, 112 detector, 114 sample stage, 116 sample cell, 118 sample, 202 lower holding member, 204 upper holding member, 206 fitting portion, 208 window frame member, 210 film support member, 212 lid member, 214 partition film, 302 elongated hole, 304 fitting portion, 306 outer edge portion, 402 parallel plate, 600 irradiation position, 602 X-ray optical axis, 604 X-ray fluorescent optical axis.

Claims

1. An X-ray fluorescence analysis apparatus having a sample chamber in which a sample is placed, and an irradiation chamber separated from the sample chamber by a partition wall, comprising: an X-ray source disposed in the irradiation chamber and irradiating X-rays obliquely toward an opening provided in a partition wall between the sample chamber and the irradiation chamber; a window frame member disposed within the opening provided in the partition wall and holding a partition film forming part of the partition, the partition film being made of a material that transmits the X-rays; and a film support member having a long hole that allows the X-rays to pass, disposed adjacent to the irradiation chamber side of the partition film and supporting the partition film from the irradiation chamber side, wherein the film support member is disposed so that the long hole is parallel to the optical axis of the X-rays in a plan view from the sample chamber side toward the irradiation chamber side.

2. The fluorescent X-ray analysis apparatus according to claim 1, further comprising: a slit arranged on the optical path of the fluorescent X-rays and composed of a plurality of parallel plates arranged at regular intervals; and wherein, in a plan view from the sample chamber side toward the irradiation chamber side, the plurality of parallel plates are arranged so as to be parallel to the long hole.

3. A fluorescent X-ray analysis apparatus as described in claim 1 or 2, characterized in that it has an opening that allows the X-rays to pass from the irradiation chamber to the sample chamber, and has a window frame holding member that is positioned in the sample chamber and supports the outer edge of the film support member from below.

4. The fluorescent X-ray analysis apparatus described in claim 3, characterized in that the film support member has a mating portion at a position where it contacts the window frame holding member, and the window frame holding member has a mating portion at a position where it mates with the mating portion when the film support member is positioned so that the long hole is parallel to the optical axis of the X-rays in a planar view from the sample chamber side toward the irradiation chamber side.

5. The fluorescent X-ray analysis apparatus according to claim 1 or 2, characterized in that the film support member is made of resin.

6. The fluorescent X-ray analysis apparatus according to claim 5, wherein the film support member is made of PEEK or PTFE.

7. The fluorescent X-ray analysis apparatus according to claim 1 or 2, characterized in that at least the portion of said film support member that is irradiated with X-rays is made of resin coated with aluminum.

8. The fluorescent X-ray analysis apparatus according to claim 1 or 2, characterized in that the film support member has a thickness of 1 mm or more.

9. The fluorescent X-ray analysis apparatus according to claim 1 or 2, characterized in that the film support member has a plurality of the long holes, and the plurality of the long holes are arranged in a row in a direction perpendicular to the optical axis of the X-rays in a planar view from the sample chamber side toward the irradiation chamber side.

10. The X-ray fluorescence analysis apparatus according to claim 1 or 2, characterized in that the width of the slot is at least four times the distance between adjacent slots.

11. The X-ray fluorescence analysis apparatus according to claim 1 or 2, characterized in that the length of the slot is at least four times its width.

12. The fluorescent X-ray analysis apparatus according to claim 1 or 2, characterized in that the film support member is made of metal.

Images