Furnace door structure for diffusion furnace, and diffusion furnace

Abstract

A furnace door structure for a diffusion furnace, and a diffusion furnace. The furnace door structure comprises a metal furnace door, a hanging assembly, and a heat radiation blocking piece, and the metal furnace door is movably connected to the heat radiation blocking piece by means of the hanging assembly. The heat radiation blocking piece in the present invention is hung on the metal furnace door to form a combined furnace door structure, thereby simultaneously avoiding the fragility of a furnace door made of a quartz material and the contamination of a furnace door made of a metal material to a diffusion process. Due to the use of hanging installation, installation and disassembly of the heat radiation blocking piece and the metal furnace door are easier, and adjustment is more convenient.

Description

Furnace door structure for diffusion furnace and diffusion furnace

[0001] This application claims priority from the following patent applications, the entire contents of which are incorporated herein by reference:

[0002] 1) An invention patent application was submitted to the China Patent Office on September 7, 2023, with application number CN202311156854.4 and the invention title is “A furnace door structure for a diffusion furnace and a diffusion furnace”.

[0003] 2) An invention patent application was submitted to the China Patent Office on December 26, 2023, with application number CN202311814692.9 and the invention title is “A furnace door structure and diffusion furnace for a diffusion furnace”. Technical Field

[0004] The present invention relates to the technical field of photovoltaic production equipment, and in particular to a furnace door structure of a diffusion furnace. The present invention also relates to a diffusion furnace provided with the furnace door structure. Background Art

[0005] The main body of a conventional diffusion furnace consists of a heating furnace and a quartz tube cavity. The front end of the quartz tube cavity is provided with a furnace mouth flange, and the rear end of the quartz tube cavity is provided with an air inlet pipe and an exhaust pipe. When the silicon wafer carrier and silicon wafer are fed into the quartz tube cavity, the furnace door moves from the side and fits tightly against the furnace mouth flange at the front end of the quartz tube cavity. The furnace door sealing ring seals the quartz tube cavity between the furnace door and the furnace mouth flange. Current diffusion furnace soft landing process equipment typically uses quartz or metal for the furnace door. If the furnace door is made of quartz, the quartz tube cavity is easily broken during movement or squeezing when the furnace door is closed to seal the quartz tube cavity due to the brittleness of the quartz material. If the furnace door is made of metal, after the furnace door is closed, during the high-temperature diffusion process, metal impurities escape and contaminate the diffusion process occurring within the quartz tube cavity.

[0006] Summary of the Invention

[0007] The technical problem to be solved by the present invention is to overcome the deficiencies of the above-mentioned prior art and provide a furnace door structure for a diffusion furnace which is simpler to install and disassemble and more convenient to adjust.

[0008] Another technical problem to be solved by the present invention is to overcome the deficiencies of the above-mentioned prior art and provide a diffusion furnace with a furnace door that is easy to install and disassemble and is safe and reliable.

[0009] The furnace door structure for a diffusion furnace provided by the present invention comprises a metal furnace door, a suspension assembly and a heat radiation barrier. The metal furnace door and the heat radiation barrier are movably connected via the suspension assembly.

[0010] The furnace door structure for a diffusion furnace provided by the present invention also has the following subsidiary technical features:

[0011] It further includes that the suspension assembly includes a support plate and multiple adjustment support seats, the support plate is installed on the outside of the heat radiation blocking member, multiple slots are provided on the support plate, and the adjustment support seat is provided on the inner side of the metal furnace door, and the adjustment support seat corresponds to the slot one by one and is movably connected.

[0012] Furthermore, the shape of the support plate includes but is not limited to a T-shape, a triangle or a quadrilateral.

[0013] It further includes that the number of the card slots is two, three or four, and the card slots are evenly arranged or symmetrically arranged with the axis of the support plate as the center.

[0014] It further includes that the card slot is semicircular or gourd-shaped.

[0015] It further includes that the adjustment support seat includes a hollow base, and a top plate and a bottom plate installed in the hollow base, the hollow base is installed on the inner side of the metal furnace door, the top plate extends out of the hollow base, an adjustment spring is arranged between the top plate and the bottom plate, the hollow base is provided with a convex ring, the hollow base is clamped into the clamping groove, and the convex ring abuts against the inner side of the support plate.

[0016] It further includes that a spring adjusting screw is installed on the bottom plate, and the spring adjusting screw adjusts the distance between the bottom plate and the top plate, thereby adjusting the spring force of the adjustment spring.

[0017] It further includes that the top plate is provided with a protruding adjustment screw and a locking nut installed on the protruding adjustment screw, the locking nut protrudes from the top plate, and the locking nut is pressed against the heat radiation blocking member.

[0018] It further includes that the outer edge of the heat radiation blocking member is provided with multiple limit ribs, and gaps are provided between adjacent limit ribs. The peripheral structure of the support plate is pressed into the gap and rotated to conflict with the limit ribs. Multiple anti-rotation limit members are installed on the support plate, and the anti-rotation limit members are used to prevent the heat radiation blocking member and the support plate from rotating relative to each other.

[0019] It further includes that a plurality of elastic buckles are provided on the inner side of the support plate, and the elastic buckles are pressed against the inner side of the limiting retaining edge of the heat radiation blocking member.

[0020] Further comprising, the thermal radiation blocking member comprises a shell made of quartz and an opaque high-temperature resistant material filled in the shell.

[0021] It further includes that the metal furnace door is provided with an air inlet pipe, and inert gas is filled into the gap space between the metal furnace door and the heat radiation blocking member through the air inlet pipe.

[0022] It further includes that the adjustment support seat is configured to be able to adjust the adjustment support seat from the outside of the metal furnace door so that the adjustment radiation blocking member is parallel to the metal furnace door, the adjustment support seat includes a support rod, an axial adjustment mechanism and an elastic adjustment mechanism, the axial adjustment mechanism is configured to adjust the distance between the support rod and the heat radiation blocking member from the outside of the metal furnace door, and the elastic adjustment mechanism is configured to elastically support the support rod and adjust the elastic force of the adjustment support seat from the outside of the metal furnace door.

[0023] It further includes that the adjustment support seat also includes a support member and a limit adjustment member, one end of the support rod is connected to the support member, and the other end of the support rod is connected to the limit adjustment member, the support member is provided with a bayonet, and the slot of the support plate is bayonet connected to the bayonet of the support member.

[0024] It further includes that the bayonet of the support member is an annular bayonet, and its cross section is Y-shaped.

[0025] It further includes that the axial adjustment mechanism includes an external thread and a screwing portion provided on the outer wall of the limit adjustment member, and the limit adjustment member is threadedly connected to the metal furnace door through its external thread.

[0026] It further includes that a nut seat is fixed to the outer surface of the metal furnace door, and the nut seat is provided with an internal thread that matches the external thread of the limit adjustment member.

[0027] It further includes that the part of the adjustment support seat located outside the metal furnace door is arranged in a sealed cavity formed by a sealing base and a sealing cover plate, and a sealing ring is provided between the contact surface of the sealing cover plate and the sealing base.

[0028] It further includes that the contact surface of the sealing cover plate or the sealing base is provided with a sealing groove, the sealing ring is installed in the sealing groove, and the sealing groove is higher than the outer surface of the metal furnace door.

[0029] It further includes that the elastic adjustment mechanism includes an internal thread provided on the inner wall of the limit adjustment member; an adjustment spring and a locking nut are provided inside the limit adjustment member, and the locking nut is provided with an external thread matching the internal thread of the limit adjustment member, one end of the adjustment spring abuts against the support rod, and the other end abuts against the locking nut.

[0030] It further includes that the end of the support rod located in the inner cavity of the limit adjustment member is provided with an expanded portion, the end of the limit adjustment member close to the metal furnace door is provided with a limit portion, and the expanded portion of the support rod is clamped with the limit portion of the limit adjustment member.

[0031] It further includes that the metal furnace door is provided with a first hole for passing the support rod and a second hole for accommodating an end of the limit adjustment member close to the metal furnace door, the aperture of the second hole is larger than the first hole, and the two form a stepped hole.

[0032] Compared to the prior art, the furnace door structure and diffusion furnace provided by the present invention have the following advantages: First, the heat radiation barrier of the present invention is suspended on the metal furnace door to form a combined furnace door structure, which can simultaneously avoid the furnace door being made of fragile quartz material or the metal material causing contamination to the diffusion process. Due to the use of a hanging installation method, the installation and removal of the heat radiation barrier and the metal furnace door are simpler and more convenient to adjust. Secondly, the specially designed adjustment support seat of the present invention can adjust the buffering force of the heat radiation barrier in various directions and positions, and can also adjust the posture of the suspended heat radiation barrier so that it is parallel to the metal furnace door in the vertical direction, preventing the heat radiation barrier from being squeezed or collided and broken. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] FIG1 is a cross-sectional view of a diffusion furnace of the present invention;

[0034] FIG2 is a perspective view of a furnace door according to the present invention;

[0035] FIG3 is a perspective view of the furnace door of the present invention from another perspective;

[0036] FIG4 is an exploded perspective view of the furnace door of the present invention;

[0037] FIG5 is a perspective view of a heat radiation barrier according to the present invention;

[0038] FIG6 is a perspective view of a support plate according to the present invention;

[0039] FIG7 is a perspective view of the support plate during installation in the present invention;

[0040] FIG8 is a perspective view of the support plate during installation from another perspective in the present invention;

[0041] FIG9 is a front view of the adjustable support seat of the present invention;

[0042] FIG10 is a cross-sectional view of the adjustable support seat of the present invention;

[0043] FIG11 is a schematic structural diagram of another furnace door provided in an embodiment of the present invention;

[0044] Figure 12 is a schematic diagram of the inner structure of the metal furnace door;

[0045] FIG13 is a schematic diagram of the process of hanging a quartz door on a metal furnace door;

[0046] FIG14 is a schematic cross-sectional view of a furnace door;

[0047] FIG15 is a schematic diagram of a partial enlarged view of FIG14;

[0048] FIG16 is a right side view of the furnace door shown in FIG14;

[0049] FIG17 is a cross-sectional view of the position limiting adjustment member shown in FIG15;

[0050] FIG18 is a perspective view of the position limiting adjustment member shown in FIG15;

[0051] FIG19 is a cross-sectional view of the locking nut shown in FIG15;

[0052] FIG. 20 is a perspective view of the locking nut shown in FIG. 15 .

[0053] Description of reference numerals:

[0054] 1-metal furnace door; 11-sealing ring; 12-air inlet pipe; 2-thermal radiation barrier; 21-limiting rib; 22-convex ring; 3-suspension assembly; 31-support plate; 311-slot; 312-elastic buckle; 313-anti-rotation limiter; 32-adjusting support seat; 321-hollow base; 322-top plate; 323-bottom plate; 324-adjusting spring; 325-elastic adjustment screw; 326-extension adjustment screw; 327-locking nut; 329-convex ring; 10-heating furnace; 20-quartz tube cavity; 30-furnace mouth flange.

[0055] 412-sealing base; 50-adjusting support base; 51-support member; 511-bayonet; 52-support rod; 53-nut seat; 54-limit adjustment member; 541-external thread; 542-screwing part; 543-internal thread; 55-locking nut; 56-adjusting spring; 71-sealing cover; 72-base sealing ring. DETAILED DESCRIPTION

[0056] To clearly illustrate the solutions of the present invention, preferred embodiments are provided below and described in detail with reference to the accompanying drawings. The following description is merely illustrative in nature and is not intended to limit the application or use of the present disclosure. It should be understood that throughout the drawings, corresponding reference numerals indicate identical or corresponding parts and features.

[0057] As shown in Figures 1 to 10, the present invention provides a furnace door structure for a diffusion furnace, comprising a metal furnace door 1, a suspension assembly 3, and a heat radiation barrier 2, wherein the metal furnace door 1 and the heat radiation barrier 2 are movably connected via the suspension assembly 3. In order to avoid the furnace door being made of quartz material, which is fragile, or being made of metal material, which may cause pollution to the diffusion process, the present invention adopts a combined furnace door structure, which comprises a metal furnace door 1, and the heat radiation barrier 2 is suspended at the front end of the metal furnace door 1. The main body of the heat radiation barrier 2 is a quartz door made of quartz material, and is filled with opaque and high-temperature resistant materials such as glass fiber. These materials will not cause pollution to the diffusion process. The present invention adopts a hanging installation method in the above structure, which makes the installation and disassembly of the heat radiation barrier 2 simpler and more convenient to adjust.

[0058] Referring to Figures 1 to 10 , the above-described embodiment of the present invention further includes the following: the suspension assembly 3 includes a support plate 31 and a plurality of adjustable support seats 32. The support plate 31 is mounted on the outside of the heat radiation barrier 2 and is provided with a plurality of slots 311. The adjustable support seats 32 are disposed on the inside of the metal furnace door 1 , and the adjustable support seats 32 correspond one-to-one with the slots 311 and are movably connected. In this embodiment, the support plate 31 is T-shaped and primarily comprises a column and two cantilevered arms positioned above the column. Each cantilevered arm has an open semicircular slot, and the column has a gourd-shaped slot. There are three adjustable support seats 32: two on top and one on the bottom. The two upper adjustable support seats 32 are connected to the two open slots, respectively, while the lower adjustable support seat 32 is connected to the gourd-shaped slot. The shape of the support plate 31 in the present invention can be a variety of structural forms, including but not limited to having two corners, a triangle or a quadrilateral. The present embodiment has a triangular structure, forming a T-shaped structure. I-shaped, Y-shaped, triangular, quadrilateral and other structures can also be used, as can elliptical, rectangular, oblong, trapezoidal and other structures. The number of the card slots 311 is consistent with the number of the adjustment support seats 32, and the number can be two, three or four, etc. The card slots 311 are evenly arranged or symmetrically arranged with the axis of the support plate 31 as the center. The support plate 31 is conducive to the processing of the card slot structure and is convenient for hanging. In the present invention, the card slots 311 can also all be semicircular, or can also all be gourd-shaped.

[0059] Referring to Figures 1 to 10, the above-mentioned embodiment provided by the present invention further includes that the outer edge of the heat radiation barrier 2 is provided with multiple sections of limiting ribs 21, and gaps are provided between adjacent limiting ribs 21. The peripheral structure of the support plate 31 is pressed along the gap and rotated a certain angle to conflict with the limiting ribs 21. In this embodiment, a convex ring 22 is also provided below the limiting rib 21. A mounting groove is formed between the convex ring 22 and the limiting rib 21, and the support plate 31 is snapped into the mounting groove. The above structure facilitates the installation and fixation of the support plate 31. Of course, the present invention can also be provided without the convex ring 22. A mounting groove structure can also be formed between the limiting rib 21 and the inner wall of the heat radiation barrier 2, which can still play the role of fixing the support plate 31. The limiting rib 21 is provided as a multi-section structure, which is convenient for the installation of the support plate 31.

[0060] Referring to Figures 1 to 10 , the above-described embodiments of the present invention further include a plurality of elastic clips 312 disposed on the inner side of the support plate 31. These elastic clips 312 abut against the interior of the limiting rib 21 of the thermal radiation barrier 2. In this embodiment, due to the mounting groove structure formed by the bead 22 and the limiting rib 21, the elastic clips 312 abut against the bead 22, which in this case forms part of the inner wall of the thermal radiation barrier 2. These elastic clips 312 act as elastic supports, preventing the support plate 31 from rocking in the mounting groove.

[0061] Referring to Figures 1 to 10, the above-mentioned embodiments provided by the present invention further include that a plurality of anti-rotation limit members 313 are installed on the support plate 31, and the anti-rotation limit members 313 conflict with the end of the limiting retaining edge 21. The anti-rotation limit members 313 are used to prevent the thermal radiation blocking member 2 and the support plate 31 from rotating relative to each other. The anti-rotation limit members 313 prevent the support plate 31 from rotating after being installed in place. A plurality of mounting holes are provided on the support plate 31. After the support plate 31 is installed in place, the anti-rotation limit members 313 are fixed to the mounting holes to prevent the support plate 31 from rotating.

[0062] When installing the support plate 31 in the present invention, the elastic clip 312 is installed in advance, the three corners of the T-shaped support plate 31 are staggered with the limiting rib 21, and the three ends of the support plate 31 are inserted into the installation groove from the gap between adjacent limiting ribs 21. Then, the support plate 31 is rotated at an appropriate angle so that the support plate 31 and the elastic clip 312 are stuck in the installation groove formed by the limiting rib 21 and the protruding ring 22, and then the anti-rotation limiter 313 is installed.

[0063] Referring to Figures 1 to 10 , the above-described embodiment of the present invention further includes the adjustable support seat 32 comprising a hollow base 321, a top plate 322 and a bottom plate 323 mounted within the hollow base 321, an adjustment spring 324 disposed between the top plate 322 and the bottom plate 323, the hollow base 321 being mounted on the inner side of the metal furnace door 1, the top plate 322 extending from the hollow base 321, and a raised ring 329 disposed on the hollow base 321. The hollow base 321 engages with the slot 311, with the raised ring 329 abutting against the inner side of the support plate 31. The raised ring 329 acts as a limiter, preventing the hollow base 321 from disengaging from the slot 311. With the suspended thermal radiation barrier 2 structure, when the thermal radiation barrier 2 moves or is squeezed, the support force exerted by the adjustable support seat 32 at different locations on the metal furnace door 1 on the thermal radiation barrier 2 varies. In addition to providing vertical support force for the thermal radiation barrier 2, the adjustment support seat 32 may also be subjected to horizontal extrusion force or tension from the thermal radiation barrier 2. By adjusting the elastic force of the adjustment spring 324 of each adjustment support seat 32 accordingly, the buffering force of the thermal radiation barrier 2 in various directions and positions can be adjusted to achieve better buffering of the thermal radiation barrier 2 in various directions and positions, and prevent the thermal radiation barrier 2 from being squeezed and broken.

[0064] Referring to Figures 1 to 10, the above-mentioned embodiment provided by the present invention further includes that a spring force adjustment screw 325 is installed on the bottom plate 323, and the spring force adjustment screw 325 drives the bottom plate 323 to move along the inner cavity of the hollow base 321. The spring force adjustment screw 325 adjusts the distance between the bottom plate 323 and the top plate 322, thereby adjusting the spring force of the adjustment spring 324. The spring force adjustment screw 325 is mainly capable of adjusting the distance between the bottom plate 323 and the top plate 322, thereby adjusting the spring force of the adjustment spring 324. The top plate 322 in the present invention can slide along the inner cavity of the hollow base 321, thereby providing a buffer for the thermal radiation barrier 2. By adjusting the spring force of the adjustment spring 324, the buffering force can be adjusted.

[0065] Referring to Figures 1 to 10 , the above-described embodiment of the present invention further includes a top plate 322 provided with an extension adjustment screw 326 and a locknut 327 mounted thereon. The locknut 327 protrudes from the top plate 322 and abuts against the thermal radiation barrier 2. The suspended thermal radiation barrier 2 may be vertically non-parallel to the metal furnace door 1. This situation is detrimental to maintaining the slightly positive pressure air curtain and can easily cause the end face of the thermal radiation barrier 2 to collide with the stepped surface within the quartz tube cavity, leading to breakage. By adjusting the extension of the extension adjustment screws 326 at various locations on the support base 32, the posture of the suspended thermal radiation barrier 2 can be adjusted, allowing the thermal radiation barrier 2 to be vertically parallel to the metal furnace door 1. For a more optimized structure, the extension adjustment screw 326 may be hollow in the middle, facilitating the insertion of a thinner tightening wrench to adjust the inner spring adjustment screw 325.

[0066] Referring to Figures 1 to 10, the above-mentioned embodiment given by the present invention further includes that the thermal radiation barrier 2 includes a shell made of quartz and an opaque high-temperature resistant material filled in the shell, and the metal furnace door 1 is provided with an air inlet pipe 12, and an inert gas is filled into the gap space between the metal furnace door 1 and the thermal radiation barrier 2 via the air inlet pipe 12. The inert gas in this embodiment is nitrogen. In order to avoid metal contamination of the metal furnace door 1, a nitrogen air inlet pipe 12 is provided on the metal furnace door 1, and nitrogen is filled into the gap space between the metal furnace door 1 and the thermal radiation barrier 2 via the air inlet pipe 12. The end face of the thermal radiation barrier 2 is close to or attached to the step end face inside the quartz tube cavity, and this space forms a micro-positive pressure air curtain to prevent the diffusion process gas from reaching there and corroding the metal furnace door 1, thereby contaminating the diffusion process.

[0067] To install the heat radiation barrier 2 onto the metal furnace door 1, simply align the slot of the heat radiation barrier 2 with the adjustable support seat 32 on the metal furnace door 1, lift it to a certain height, apply pressure inward, and then lower it. To remove the heat radiation barrier 2 from the metal furnace door 1, simply apply pressure inward, lift it to a certain height, and then remove it. After removing the heat radiation barrier 2, the adjustable support seat 32 can be adjusted.

[0068] Referring to FIGS. 1 to 10, in an embodiment of a diffusion furnace provided by the present invention, it includes a heating furnace 10, a quartz tube cavity 20, and a furnace mouth flange 30 located at the end of the quartz tube cavity 20. A furnace door structure is provided at the furnace mouth flange 30, and the furnace door structure is the furnace door structure described in the above embodiment. The heat radiation blocking member 2 is located in the quartz tube cavity 20, and the metal furnace door 1 is closely attached to the outside of the furnace mouth flange 30. The diffusion furnace in the present invention can be various models of products that are mature in the prior art, and these different models of diffusion furnaces can all adopt the furnace door structure involved in the present invention. Therefore, the structure of the diffusion furnace in the present invention is not limited to the above structure.

[0069] Referring to FIGS. 1 and 3, in the above embodiment provided by the present invention, it further includes that a sealing ring 11 is provided on the metal furnace door 1, and the metal furnace door 1 and the furnace mouth flange 30 are sealed by the sealing ring 11.

[0070] Referring to FIGS. 11 to 20, in another embodiment, a plurality of support members 51 are provided on the inner side of the metal furnace door 1. The support members 51 are provided with corresponding bayonets 511. After being suspended and connected, the card slots 311 of the support plate 31 are clamped to the bayonets 511 of the support members 51, and the weight of the heat radiation blocking member 2 is supported by the support members 51. The bayonets 511 of the support members 51 are annular bayonets, and the cross-section of the annular bayonet is in a Y shape.

[0071] The support members 51 are installed on the metal furnace door 1 through adjusting support seats 50. The number of adjusting support seats 50 can be two, or three, or more than three. In this embodiment, three adjusting support seats 50 are provided and are distributed in an inverted "pin" shape.

[0072] The adjusting support seat 50 is provided with a support rod 52 and a limit adjusting member 54. One end of the support rod 52 is connected to the support member 51, and the other end is connected to the limit adjusting member 54. The limit adjusting member 54 is provided with an axial adjusting mechanism and an elastic adjusting mechanism. Among them, the axial adjusting mechanism is used to adjust the length of the support rod 52 extending out, and the elastic adjusting mechanism is used to elastically support the support rod 52 and adjust the elastic force of the support rod 52.

[0073] Specifically, the axial adjusting mechanism includes an external thread 541 provided on the outer wall of the limit adjusting member 54 and a screwing part 542. The metal furnace door 1 is provided with a first hole for passing through the support rod 52 and a second hole for accommodating the front end of the limit adjusting member 54. The aperture of the second hole is larger than that of the first hole, and the two form a stepped hole.

[0074] A nut seat 53 corresponding to the second hole is fixed on the outer surface of the metal furnace door 1. The nut seat 53 is provided with an internal thread. The limit adjusting member 54 is threadedly connected to the nut seat 53 through its external thread 541, and the axial position of the limit adjusting member 54 can be adjusted by screwing the screwing part 542.

[0075] The diameter of one end of the support rod 52 located in the inner cavity of the limit adjustment member 54 is enlarged and is limited by the front end of the limit adjustment member 54. The elastic adjustment mechanism has an internal thread 543, an adjustment spring 56 and a locking nut 55 arranged on the inner wall of the limit adjustment member 54. One end of the adjustment spring 56 abuts the support rod 52, and the other end abuts the locking nut 55. A hexagonal hole or a square hole is provided on the inner side of the locking nut 55. A wrench is inserted into the hole to tighten the locking nut 55, so as to adjust the position of the locking nut 55 relative to the limit adjustment member 54, and then adjust the elastic force of the adjustment spring 56.

[0076] The portion of the adjustable support base 50 located outside the metal furnace door is located within a sealed cavity formed by a sealing base 412 and a sealing cover plate 71. The sealing base 412 is welded to the metal furnace door 1, and the weld must be leak-proof. A base sealing ring 72 is positioned between the sealing base 412 and the sealing cover plate 71. This compression seal isolates the inside and outside of the furnace door, preventing air leakage.

[0077] The installation sealing groove of the base sealing ring 72 can be set on the sealing base 412 or the sealing cover 71. The contact surface of the base sealing ring 72 needs to be higher than the outer surface of the metal furnace door 1. This is because the outer surface temperature of the metal furnace door 1 is relatively high, while the end surface temperature of the sealing base 412 is relatively low. By keeping away from the outer surface of the metal furnace door 1, it is possible to avoid high temperature damaging the base sealing ring 72 or shortening its service life.

[0078] Of course, the sealing base 412 and the sealing cover plate 71 may also be connected using a clamping or screwing vacuum quick-release flange or other forms of flanges.

[0079] For the suspended thermal radiation barrier 2, when in motion or under compression, the adjustable support bases 50 at various locations on the metal furnace door 1 exert varying support forces on the thermal radiation barrier 2. In addition to providing vertical support for the thermal radiation barrier 2, the adjustable support bases 50 may also be subject to horizontal compression or tension from the thermal radiation barrier 2. By adjusting the elastic force of the adjustment springs 56 at various locations on the adjustable support bases 50 accordingly, the buffering force at various locations on the thermal radiation barrier 2 can be adjusted, achieving better buffering at various locations on the thermal radiation barrier 2 and preventing the thermal radiation barrier 2 from being crushed.

[0080] The suspended thermal radiation barrier 2 may not be vertically parallel to the metal furnace door 1, which is not conducive to maintaining the slightly positive pressure air curtain and can easily cause the end face of the thermal radiation barrier 2 to collide with the stepped surface inside the quartz tube cavity 20, causing it to break. By adjusting the extension of the limit adjustment members 54 of the support base 50 at various locations, the suspended thermal radiation barrier 2 can be made vertically parallel to the metal furnace door 1.

[0081] To install the thermal radiation barrier 2 onto the metal furnace door 1, simply align the slot on the thermal radiation barrier 2 with the adjustable support base 50 on the metal furnace door 1, lift it to a certain height, apply pressure inward, and then lower it. To remove the thermal radiation barrier 2 from the metal furnace door 1, simply apply pressure inward, lift it to a certain height, and then remove it. After removing the thermal radiation barrier 2, the adjustable support base 50 can be adjusted.

[0082] If it is necessary to adjust the elastic force of the adjustment spring 56 and the axial position of the limit adjustment member 54, the locking nut 55 or the limit adjustment member 54 can be adjusted on the outside of the metal furnace door without removing the suspended heat radiation blocking member 2. After the elastic force of the adjustment spring 56 and the axial position of the limit adjustment member 54 are adjusted, the base sealing ring 72 and the sealing cover plate 71 can be used to seal the part of the adjustment support seat 50 located on the outside of the metal furnace door.

[0083] The above embodiments are only preferred solutions of the present invention and are not limited thereto. Based on these, targeted adjustments can be made according to actual needs to obtain different implementation methods. Since there are many possible implementation methods, they will not be described one by one here.

[0084] The furnace door structure of this diffusion furnace has at least the following advantages compared with the previous furnace door structures in the industry:

[0085] 1) It can simultaneously avoid the furnace door being made of quartz material that is fragile or metal material that may cause pollution to the diffusion process. Moreover, it is simple to install and disassemble and easy to adjust.

[0086] 2) By adjusting the support seat 50, the buffering force of the heat radiation barrier 2 in various directions and positions can be adjusted, and the suspended heat radiation barrier 2 can also be adjusted to be parallel to the metal furnace door 1 in the vertical direction to prevent the heat radiation barrier 2 from being squeezed or collided and broken.

[0087] 3) By adjusting the locking nut 55 or the limit adjustment member 54 on the outside of the metal furnace door 1, the elastic force of the adjustment spring 56 and the axial position of the limit adjustment member 54 can be adjusted without removing the suspended heat radiation blocking member 2.

[0088] 4) The portion of the adjusting support seat 50 located on the outside of the metal furnace door is arranged in a sealed cavity formed by the sealing base 412 and the sealing cover plate 71. The sealing base 412 is sealed and welded to the metal furnace door 1. A base sealing ring 72 is provided between the sealing base 412 and the sealing cover plate 71 to tighten the seal and isolate the inside and outside of the furnace door to prevent air leakage.

[0089] In addition to the aforementioned diffusion furnace door structure, the present invention provides a diffusion furnace comprising a heating furnace 10, a quartz tube body 20, and a furnace opening flange 30 at the end of the quartz tube body. The furnace opening flange is provided with the aforementioned furnace door structure. A sealing ring 11 is provided on the metal furnace door 1, sealing the metal furnace door 1 and the furnace opening flange 30. A furnace chamber air intake and exhaust pipes are provided at the rear end of the quartz tube body 20. When a silicon wafer carrier and silicon wafers are introduced into the quartz tube body 20, the furnace door moves from the side to abut against the furnace opening flange 30 at the front end of the quartz tube body 20, where it is sealed by the sealing ring 11. The remaining structure of the diffusion furnace is not further described herein.

[0090] The above describes in detail the furnace door structure and diffusion furnace provided by the present invention. This article uses specific examples to illustrate the principles and implementation methods of the present invention. The description of the above examples is only intended to facilitate understanding of the core concept of the present invention. It should be noted that those skilled in the art may make various improvements and modifications to the present invention without departing from the principles of the present invention, and such improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A furnace door structure for a diffusion furnace, characterized in that: The invention comprises a metal furnace door, a suspension assembly and a heat radiation blocking member, wherein the metal furnace door and the heat radiation blocking member are movably connected through the suspension assembly.

2. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The suspension assembly includes a support plate and a plurality of adjustment support seats, wherein the support plate is installed on the outer side of the heat radiation blocking member, a plurality of slots are arranged on the support plate, and the adjustment support seats are arranged on the metal furnace door, and the adjustment support seats correspond to the slots one by one and are movably connected.

3. The furnace door structure for a diffusion furnace according to claim 2, characterized in that: The shape of the support plate includes but is not limited to a T-shape, a triangle or a quadrilateral.

4. The furnace door structure for a diffusion furnace according to claim 2, characterized in that: The number of the card slots is two, three or four, and the card slots are evenly arranged or bilaterally symmetrically arranged with the axis of the support plate as the center.

5. The furnace door structure for a diffusion furnace according to any one of claims 2 to 4, characterized in that: The card slot is in a semicircular shape or a gourd hole shape.

6. The furnace door structure for a diffusion furnace according to claim 2, characterized in that: The adjustment support seat is arranged on the inner side of the metal furnace door, and the adjustment support seat includes a hollow base, and a top plate and a bottom plate installed in the hollow base. The hollow base is installed on the inner side of the metal furnace door, and the top plate extends out of the hollow base. An adjustment spring is arranged between the top plate and the bottom plate, and the hollow base is provided with a convex ring, and the hollow base is inserted into the slot, and the convex ring abuts against the inner side of the support plate.

7. The furnace door structure for a diffusion furnace according to claim 6, characterized in that: An elastic force adjusting screw is installed on the bottom plate, and the elastic force adjusting screw adjusts the distance between the bottom plate and the top plate, thereby adjusting the elastic force of the adjusting spring.

8. The furnace door structure for a diffusion furnace according to claim 6, characterized in that: The top plate is provided with a protruding adjustment screw and a locking nut mounted on the protruding adjustment screw, the locking nut protrudes from the top plate, and the locking nut abuts against the heat radiation blocking member.

9. The furnace door structure for a diffusion furnace according to claim 2, characterized in that: The outer edge of the thermal radiation blocking member is provided with multiple limit ribs, and gaps are provided between adjacent limit ribs. The peripheral structure of the support plate is pressed into the gap and rotated to conflict with the limit ribs. Multiple anti-rotation limit members are installed on the support plate, and the anti-rotation limit members are used to prevent the thermal radiation blocking member and the support plate from rotating relative to each other.

10. The furnace door structure for a diffusion furnace according to claim 9, characterized in that: A plurality of elastic buckles are arranged on the inner side of the support plate, and the elastic buckles are pressed against the inner side of the limiting retaining edge of the heat radiation blocking member.

11. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The thermal radiation blocking member includes a shell made of quartz and an opaque high-temperature resistant material filled in the shell.

12. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The metal furnace door is provided with an air inlet pipe, and inert gas is filled into the gap space between the metal furnace door and the heat radiation blocking member through the air inlet pipe.

13. The furnace door structure for a diffusion furnace according to claim 2, characterized in that: The adjustment support seat is configured to be able to adjust the adjustment support seat from the outside of the metal furnace door so that the adjustment radiation blocking member is parallel to the metal furnace door. The adjustment support seat includes a support rod, an axial adjustment mechanism and an elastic adjustment mechanism. The axial adjustment mechanism is configured to be able to adjust the distance between the support rod and the heat radiation blocking member from the outside of the metal furnace door. The elastic adjustment mechanism is configured to elastically support the support rod and adjust the elastic force of the adjustment support seat from the outside of the metal furnace door.

14. The furnace door structure for a diffusion furnace according to claim 13, characterized in that: The adjustment support seat also includes a support member and a limit adjustment member, one end of the support rod is connected to the support member, and the other end of the support rod is connected to the limit adjustment member, the support member is provided with a bayonet, and the slot of the support plate is snapped into the bayonet of the support member.

15. The furnace door structure for a diffusion furnace according to claim 14, characterized in that: The bayonet of the support member is an annular bayonet, and its cross section is Y-shaped.

16. The furnace door structure for a diffusion furnace according to claim 14, characterized in that: The axial adjustment mechanism comprises an external thread and a screwing portion provided on the outer wall of the limit adjustment member, and the limit adjustment member is threadedly connected to the metal furnace door via its external thread.

17. The furnace door structure for a diffusion furnace according to claim 16, characterized in that: A nut seat is fixed on the outer surface of the metal furnace door, and the nut seat is provided with an internal thread that matches the external thread of the limit adjustment member.

18. The furnace door structure for a diffusion furnace according to claim 14, characterized in that: The part of the adjustment support seat located outside the metal furnace door is arranged in a sealing cavity formed by a sealing base and a sealing cover plate, and a sealing ring is arranged between the contact surfaces of the sealing cover plate and the sealing base.

19. The furnace door structure for a diffusion furnace according to claim 18, characterized in that: The contact surface of the sealing cover plate or the sealing base is provided with a sealing groove, the sealing ring is installed in the sealing groove, and the sealing groove is higher than the outer surface of the metal furnace door.

20. The furnace door structure for a diffusion furnace according to claim 14, characterized in that: The elastic adjustment mechanism includes an internal thread arranged on the inner wall of the limit adjustment member; an adjustment spring and a locking nut are arranged inside the limit adjustment member, and the locking nut is provided with an external thread matching the internal thread of the limit adjustment member, one end of the adjustment spring abuts against the support rod, and the other end abuts against the locking nut.

21. The furnace door structure for a diffusion furnace according to claim 14, characterized in that: The end of the support rod located in the inner cavity of the limit adjustment member is provided with an expanded diameter portion, and the end of the limit adjustment member close to the metal furnace door is provided with a limit portion, and the expanded diameter portion of the support rod is clamped with the limit portion of the limit adjustment member.

22. The furnace door structure for a diffusion furnace according to claim 14, characterized in that: The metal furnace door is provided with a first hole for passing the support rod and a second hole for accommodating an end of the limit adjustment member close to the metal furnace door. The diameter of the second hole is larger than that of the first hole, and the two form a stepped hole.

23. A diffusion furnace, comprising a heating furnace, a quartz tube cavity and a furnace mouth flange located at the end of the quartz tube cavity, wherein a furnace door structure is arranged at the furnace mouth flange, characterized in that: The furnace door structure is the furnace door structure described in any one of claims 1 to 22 above, the heat radiation blocking member is located in the quartz tube cavity, and the metal furnace door is located outside the furnace mouth flange.

24. The diffusion furnace according to claim 23, characterized in that: The metal furnace door is provided with a sealing ring, and the metal furnace door and the furnace mouth flange are sealed by the sealing ring.

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