Automatic stroke setting device of multi-wire cutting apparatus

Abstract

The present invention provides an automatic stroke setting device of a multi-wire cutting apparatus, the device comprising: a driving unit having a rotary shaft on which a bobbin is detachably mounted; a traverse unit for moving the unwinding point of a wire with respect to the bobbin; and a sensor unit for measuring the distance between the driving unit and the bobbin.

Description

Automatic stroke setting device for cutting device using multi-wire

[0001] The present invention relates to an automatic stroke setting device for a cutting device using a multi-wire, and more specifically, to an automatic stroke setting device for a cutting device using a multi-wire, which can easily detect the displacement of a replaced bobbin when replacing a bobbin on which a wire is wound, and correct the stroke position of a traverse in response thereto.

[0002] Silicon substrates, sapphire substrates, quartz substrates (accessories), silicon parts (accessories) used in semiconductor processes are generally cut using multi-wires from large samples.

[0003] For example, a wafer is a thin silicon plate made from silicon, which is widely used as a material for manufacturing semiconductor devices, and is composed of a slicing process for cutting a grown silicon ingot into a wafer shape, a lapping process for uniformizing and flattening the thickness of the wafer, an etching process for removing or alleviating damage caused by mechanical polishing, a polishing process for mirror-finishing the wafer surface, and a washing process for washing the polished wafer and removing foreign substances attached to the surface. Among these, the slicing process is a process for grinding the outer surface of a silicon single crystal ingot to form a cylindrical shape of a predetermined size, and cutting it into wafers in individual sheet units.

[0004] A variety of slicing devices are commonly used for the slicing process, one of which is the wire saw. A wire saw device cuts by applying high-speed friction to a wire against the cutting material, resulting in cutting by friction between the wire and the material. These wire saw devices are widely used because they can simultaneously cut an ingot into multiple wafers, resulting in an excellent production yield per unit time.

[0005] Recently, there has been a lot of use of coating the wire itself with diamonds and using this to cut products.

[0006] Since these wire saw devices are devices that process wire by winding and unwinding it while maintaining a constant tension on the rotating body, the bobbin that supplies and retrieves the wire must be replaced periodically.

[0007] However, the method of replacing the bobbin is that the worker manually performs the replacement, and as displacement occurs according to the bobbin mounting position depending on the worker's skill level, the dispersing point of the traverse that discharges the wire from the bobbin or supplies it to the bobbin within the stroke range of the bobbin changes, causing problems in precisely winding or unwinding the wire.

[0008] The present invention is intended to solve such a problem, and more specifically, to provide an automatic stroke setting device for a cutting device using a multi-wire, which can easily detect the displacement of a replaced bobbin when replacing a bobbin on which a wire is wound, and correct the stroke position of a traverse in response thereto.

[0009] The objects of the present invention are not limited to the objects mentioned above, and other objects not mentioned will be clearly understood by those skilled in the art from the description below.

[0010] In order to achieve the above object, the present invention provides an automatic stroke setting device for a cutting device using a multi-wire, comprising: a driving unit having a rotating shaft on which a bobbin is detachably mounted; a traverse unit for moving a disentanglement point of a wire with respect to the bobbin; and a sensor unit for measuring a distance between the driving unit and the bobbin.

[0011] The automatic stroke setting device of the cutting device using the above multi-wire may further include a control unit that controls the stroke range of the traverse to move in parallel using distance data provided through the sensor unit.

[0012] The sensor unit can measure first distance data between one side of the driving unit and one side of the bobbin, and second distance data between one side of the driving unit and one side of the other bobbin when the bobbin is replaced and another bobbin is coupled to the rotation shaft, and transmit the measured data to the control unit.

[0013] The above control unit may include a storage unit that stores first distance data and second distance data provided from the sensor unit.

[0014] The sensor unit may be arranged to face one side of the bobbin on one side of the driving unit.

[0015] The control unit may include a judgment unit that measures one side of the bobbin multiple times in the sensor unit, compares each distance data transmitted to the storage unit, and derives offset data according to the amount of distance change.

[0016] The above judgment unit can set the offset data as an average value of each data stored in the above storage unit.

[0017] The above judgment unit can set the offset data to the maximum value of each data stored in the above storage unit.

[0018] The above driving unit may include a cover unit that protects the sensor unit from the outside and is provided to be openable and closable.

[0019] The above sensor unit can transmit a distance detection signal in a direction parallel to the rotation axis.

[0020] Specific details of other embodiments are included in the detailed description and drawings.

[0021] According to the automatic stroke setting device of the cutting device using a multi-wire according to an embodiment of the present invention,

[0022] First, even if the bobbin is replaced on the rotation axis, the displacement of the replaced bobbin can be precisely detected.

[0023] Second, the stroke position of the traverse can be automatically compensated in response to the displacement of the bobbin.

[0024] Third, by providing a cover in front of the sensor unit, it is possible to prevent contamination of the sensor unit by foreign substances generated from the cutting device.

[0025] The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims.

[0026] The above summary, as well as the detailed description of preferred embodiments of the present application described below, will be better understood when read in conjunction with the accompanying drawings. For the purpose of illustrating the present invention, preferred embodiments are depicted in the drawings. However, it should be understood that the present application is not limited to the precise arrangements and means illustrated.

[0027] FIG. 1 is a front view illustrating an automatic stroke setting device of a cutting device using a multi-wire according to an embodiment of the present invention.

[0028] FIG. 2 is a block diagram briefly illustrating an automatic stroke setting device of a cutting device using a multi-wire according to an embodiment of the present invention.

[0029] Fig. 3 is a cross-sectional view showing a state in which the first bobbin is mounted in the automatic stroke setting device of the cutting device using the multi-wire shown in Fig. 1.

[0030] Fig. 4 is a cross-sectional view showing a state in which the automatic stroke setting device of the cutting device using the multi-wire shown in Fig. 1 is replaced with a second bobbin.

[0031] FIG. 5 is a cross-sectional view showing a state in which the traverse of the automatic stroke setting device of the cutting device using the multi-wire shown in FIGS. 3 and 4 has moved in parallel by the offset data according to the distance change amount between the first bobbin and the second bobbin.

[0032] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. The advantages and features of the present invention, and methods for achieving them, will become clear with reference to the embodiments described in detail below together with the attached drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms. These embodiments are provided only to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

[0033] The present invention can have various modifications and embodiments, and specific embodiments are illustrated and described in the drawings.

[0034] However, this is not intended to limit the present invention to a specific embodiment, but should be understood to include all modifications, equivalents, or substitutes included in the spirit and technical scope of the present invention.

[0035] Terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but the components are not limited by the terms.

[0036] The above terms are used solely to distinguish one component from another.

[0037] For example, without departing from the scope of the present invention, the second component may be referred to as the first component, and similarly, the first component may also be referred to as the second component.

[0038] The term and / or includes any combination of a plurality of related described items or any one of a plurality of related described items.

[0039] When it is said that a component is "connected" or "connected" to another component, it should be understood that it may be directly connected or connected to that other component, but there may also be other components in between.

[0040] On the other hand, when it is said that a component is "directly connected" or "directly connected" to another component, it should be understood that there are no other components in between.

[0041] The terminology used in this application is for the purpose of describing specific embodiments only and is not intended to limit the present invention.

[0042] Singular expressions include plural expressions unless the context clearly indicates otherwise.

[0043] In this application, terms such as “include” or “have” are intended to specify the presence of a feature, number, step, operation, component, part or combination thereof described in the specification, but should be understood not to exclude in advance the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts or combinations thereof.

[0044] Hereinafter, embodiments will be described in detail with reference to the attached drawings. Regardless of the drawing numbers, identical or corresponding components are given the same reference numbers, and redundant descriptions thereof will be omitted.

[0045] FIG. 1 is a front view illustrating an automatic stroke setting device of a cutting device using a multi-wire according to an embodiment of the present invention, and FIG. 2 is a block diagram briefly illustrating an automatic stroke setting device of a cutting device using a multi-wire according to an embodiment of the present invention.

[0046] Referring to FIGS. 1 and 2, an automatic stroke setting device (100) of a cutting device using a multi-wire according to an embodiment of the present invention can be configured to rotate bobbins arranged parallel to each other on both sides to unwind or wind wire wound on the bobbin. In this case, since the structures for rotating the bobbins on both sides have the same structure, one of the structures will be described in detail.

[0047] Of course, although not shown in the drawing, the automatic stroke setting device (100) of the cutting device using a multi-wire according to the embodiment of the present invention may have a structure in which the wire is unwound (131) from one bobbin and wound onto another bobbin.

[0048] An automatic stroke setting device (100) of a cutting device using a multi-wire according to an embodiment of the present invention may include a driving unit (110), a bobbin (120), a traverse (130), a sensor unit (140), a control unit (150), and a cover unit (160).

[0049] First, the driving unit (110) can provide driving force to rotate the rotation shaft (111). The bobbin is detachably coupled to the rotation shaft (111), and can rotate simultaneously along the rotational direction of the rotation shaft (111).

[0050] For example, when the driving unit (110) rotates the rotation shaft (111) in the forward direction, the wire (W) wound on one bobbin may be cut while moving to another bobbin, and conversely, the wire (W) wound on another bobbin may be cut while moving to one bobbin, or the wire may be rewinded to one bobbin.

[0051] In addition, the bobbin has a wire (W) wound around its outer surface, and the wire (W) can be unwound (131) or wound by rotation of the rotation shaft (111).

[0052] The bobbin (120) is formed with a starting point (SP) for unwinding or winding the wire in one direction centered on the axial direction, and an ending point (EP) for unwinding or winding the wire again in the other direction on the opposite side from the starting point, and the stroke range can be set between the starting point (SP) and the ending point (EP).

[0053] The starting point (SP) and the ending point (EP) of the bobbin (120) can be set by protrusions (121) protruding circumferentially from both ends of the bobbin (120). These protrusions (121) can prevent the wire from escaping from the outer surface of the bobbin, or can limit the height at which the wire (W) is wound on the outer surface of the bobbin (120).

[0054] The bobbin (120) is fastened by a bolt (112) on the rotation axis (111), and a predetermined assembly tolerance may occur depending on the fastening torque of the bolt (112). Alternatively, during the process of fastening the bobbin on the rotation axis (111), it may be coupled at a predetermined angle rather than parallel to the rotation axis (111).

[0055] In addition, the traverse (130) is arranged to enable a linear reciprocating movement along the axial direction (D), and can provide a function of supplying the wire (W) to the bobbin (120) along a direction orthogonal to the axial direction (D) of the bobbin (120). That is, the traverse (130) can move so that the point at which the wire (W) is released always corresponds to the circumferential direction of the bobbin (120), and the direction can be accurately changed at a timing corresponding to the start and end points of the bobbin (120).

[0056] The traverse (130) may include a pulley (131) that guides the wire (W) at the maritime point of the wire, and an arm (132) that moves the pulley (131) point-symmetrically about a single center of rotation. That is, the pulley (131) may be brought closer to or further away from the bobbin (120) by the rotation of the arm (132), and thereby may be moved along the circumferential direction of the bobbin (120) to correspond to the height at which the wire (W) is wound.

[0057] In addition, the sensor unit (140) can measure the distance between the bobbin (120) and the driving unit (110). For example, the sensor unit (140) can be placed in an area where one side of the bobbin (120) faces the driving unit (110). Of course, the sensor unit (140) can be placed in an external area of ​​the driving unit (110) and measure the distance therebetween. In this embodiment, the sensor unit (140) is provided on the driving unit (110) as an example.

[0058] The sensor unit (140) can measure the distance in a contact or non-contact manner, and in this embodiment, precise measurement of the distance between the bobbin (120) and the driving unit (110) in a non-contact manner is described as an example. For example, the sensor unit (140) can be applied with a non-contact ultrasonic sensor, infrared sensor, etc.

[0059] In addition, the control unit (150) can receive distance data from the sensor unit (140) and control the stroke range of the traverse (130) to move in parallel. That is, the set stroke range is maintained, but the control unit (150) can adjust the stroke position of the traverse (130). For example, when displacement occurs at the position where the bobbin is mounted on the rotation shaft (111), the control unit (150) can receive data corresponding to the displacement from the sensor unit (140) and move the traverse point (130) in parallel along the axis by the displacement.

[0060] The control unit (150) may include a storage unit (151) that stores distance data provided from the sensor unit (140). The storage unit (151) may store first distance data for one bobbin and second distance data for another replaced bobbin.

[0061] Additionally, the control unit (150) may include a determination unit (152) that compares the distances of the first distance data and the second distance data to derive offset data according to the distance change amount. The offset data may be information on the distance by which the traverse (130) moves in parallel in response to the distance change amount.

[0062] In addition, the sensor unit (140) can measure a plurality of first distance data and second distance data and store them in the storage unit (151). At this time, the sensor unit (140) can measure the first distance data multiple times while rotating the first bobbin (120), and can also measure the second distance data multiple times while rotating the second bobbin (120').

[0063] In addition, the judgment unit (152) can derive the distance change amount as an average value using each distance data stored in the storage unit (151), and thereby set offset data according to the average value.

[0064] In addition, the judgment unit (152) can derive the distance change amount as the maximum value using each distance data stored in the storage unit (151), and thereby set the offset data according to the maximum value.

[0065] In addition, the cover part (160) provides a function of preventing foreign substances generated at the process location where the cutting process is performed from contaminating the sensor part (140). In the present embodiment, since the sensor part (140) is provided on the drive part (110), the cover part (160) is provided on the drive part (110), and the sensor part (140) area can be selectively opened during the measurement process of the sensor part (140). This cover part (160) can be mounted on the drive part (110) in a sliding or opening manner. Of course, when the sensor part (140) is applied in a contact manner, a structure may be applied in which the sensor part (140) pops up so that it protrudes from the side of the drive part (110) when the cover part (160) is opened.

[0066] Although not shown in the drawing, the control unit (150) can control not only the position adjustment of the traverse (130), but also the rotation speed and direction of the driving unit (110), and can also control the replacement time of the bobbin (120) and the overall operation of the sensor unit (140) and the cover unit (160).

[0067] Fig. 3 is a cross-sectional view showing a state in which the first bobbin is mounted in the automatic stroke setting device of the cutting device using the multi-wire shown in Fig. 1.

[0068] Referring to FIG. 3, a first bobbin (120) is mounted on a rotational axis (111) of a driving unit (110), and a sensor unit (140) is mounted on the driving unit (110) facing one side of the first bobbin (120). The sensor unit (140) can be shielded by a cover unit (160), and can be opened when measuring a distance.

[0069] In FIGS. 3 to 5, the rotation axis (111) is depicted as being more exposed to indicate the change in distance between the bobbin and the driving unit (110). Of course, the actual distance between the bobbin and the driving unit (110) may be as shown in FIG. 1.

[0070] The first bobbin (120) can be driven while the wire (W) is wound within a preset stroke range and is spaced apart from the driving unit (110) by the first distance data.

[0071] FIG. 4 is a cross-sectional view showing a state in which the automatic stroke setting device of the cutting device using the multi-wire shown in FIG. 1 is replaced with the second bobbin, and FIG. 5 is a cross-sectional view showing a state in which the traverse of the automatic stroke setting device of the cutting device using the multi-wire shown in FIGS. 3 and 4 is moved in parallel by the offset data according to the distance change amount between the first bobbin and the second bobbin.

[0072] Referring to FIGS. 4 and 5, the automatic stroke setting device (100) of the cutting device using a multi-wire measures the distance to the second bobbin (120') again through the sensor unit (140) when the first bobbin (120) is removed and the second bobbin (120') is replaced, thereby indicating a state where the distance is separated by the second distance data.

[0073] That is, in the contents of the above-described Fig. 3, when the first bobbin (see Fig. 3, 120) is spaced apart by the first distance data and the second bobbin (120') is spaced apart by the second distance data as in Fig. 4, a distance change amount (Δd) occurs.

[0074] Of course, although not shown in the drawing, the distance change amount (Δd) can be derived by measuring and comparing it in the control unit (150).

[0075] Here, the derived distance change amount (Δd) can be applied as offset data for the traverse (130) to move.

[0076] For example, if the offset data is +0.2 mm according to the derived distance change amount (Δd), the control unit (see Fig. 2, 150) can control the traverse (130) to move 0.2 mm to the left (based on Fig. 5) relative to the bobbin (120') along the axial direction of the rotation axis (111). Alternatively, if the offset data is -0.1 mm according to the derived distance change amount (Δd), the control unit (see Fig. 2, 150) can control the traverse (130) to move 0.1 mm to the right (based on Fig. 5) relative to the bobbin (120') along the axial direction of the rotation axis (111).

[0077] Therefore, as shown in FIG. 5, when the traverse (130) moves in parallel by the offset data, the traverse (130) can be precisely aligned to correspond to the stroke range of the second bobbin (120').

[0078] Therefore, according to the automatic stroke setting device of the cutting device using a multi-wire according to an embodiment of the present invention, even if the bobbin is replaced on the rotation axis, the displacement of the position of the replaced bobbin can be precisely detected, the stroke position of the traverse can be automatically corrected in response to the displacement of the position of the bobbin, and by providing a cover part in front of the sensor part, there is an effect of preventing contamination of the sensor part by foreign substances generated in the cutting device.

[0079] While specific embodiments have been illustrated and described above to illustrate the technical concepts of the present invention, the present invention is not limited to the configuration and operation of the specific embodiments described above, and various modifications may be implemented without departing from the scope of the present invention. Therefore, such modifications should be considered within the scope of the present invention, and the scope of the present invention should be determined by the claims set forth below.

[0080] 100: Automatic stroke setting device for cutting device using multi-wire

[0081] 110: Drive unit

[0082] 120: Bobbin

[0083] 130: Traverse

[0084] 140: Sensor section

[0085] 150: Control unit

[0086] 160: Cover

Claims

1. A driving unit having a rotating shaft on which a bobbin is mounted so as to be removable; A traverse for moving the maritime point of the wire relative to the above bobbin; and A sensor unit that measures the distance between the driving unit and the bobbin; An automatic stroke setting device for a cutting device using a multi-wire, including:

2. In paragraph 1, A control unit that controls the stroke range of the traverse to move in parallel using distance data provided through the sensor unit; An automatic stroke setting device for a cutting device using a multi-wire, further including:

3. In paragraph 2, The above sensor part, First distance data between one side of the above driving unit and one side of the bobbin, An automatic stroke setting device for a cutting device using a multi-wire, which measures second distance data between one side of the driving unit and one side of the other bobbin when the above bobbin is replaced and another bobbin is coupled to the rotating shaft, and transmits the measured data to the control unit.

4. In paragraph 3, The above control unit, An automatic stroke setting device for a cutting device using a multi-wire, comprising a storage unit that stores first distance data and second distance data provided from the sensor unit.

5. In paragraph 4, The above sensor part, An automatic stroke setting device for a cutting device using a multi-wire, which is arranged to face one side of the bobbin on one side of the above driving unit.

6. In paragraph 4, The above control unit, An automatic stroke setting device for a cutting device using a multi-wire, comprising a judgment unit that measures one side of the bobbin multiple times in the sensor unit, compares each distance data transmitted to the storage unit, and derives offset data according to the amount of distance change.

7. In paragraph 6, The above judgment is, An automatic stroke setting device for a cutting device using a multi-wire, which sets the offset data as an average value of each data stored in the above storage unit.

8. In paragraph 6, The above judgment is, An automatic stroke setting device for a cutting device using a multi-wire, which sets the offset data to the maximum value of each data stored in the above storage unit.

9. In paragraph 1, The above driving part, An automatic stroke setting device for a cutting device using a multi-wire, comprising a cover part that protects the sensor part from the outside and is provided so as to be openable.

10. In paragraph 1, An automatic stroke setting device for a cutting device using a multi-wire, wherein the sensor unit transmits a distance detection signal in a direction parallel to the rotation axis.

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