Conveying device

Abstract

The conveying device according to an embodiment of the present invention comprises: a first disk having a disk shape and provided so as to be rotatable about the central axis of the disk; a second disk provided above the first disk and having a disk shape; and a gasket interposed between the first disk and the second disk.

Description

transport device

[0001] The present invention relates to a device for transporting an object, particularly a battery cell or a component constituting a battery cell.

[0002] This application claims priority to Korean Patent Application No. 10-2023-0119927, filed on September 8, 2023, and all contents disclosed in the specification and drawings of the said application are incorporated by reference into this application.

[0003]

[0004] Secondary batteries, which boast high electrical properties such as high energy density and high applicability across a wide range of product categories, are widely used not only in portable devices but also in electric vehicles (EVs) and hybrid electric vehicles (HEVs) powered by electrical power sources. These batteries not only offer the primary advantage of dramatically reducing fossil fuel use but also produce no byproducts from energy use, attracting attention as a new energy source for environmental friendliness and energy efficiency.

[0005] Currently, widely used types of secondary batteries include lithium-ion batteries, lithium polymer batteries, nickel-cadmium batteries, nickel-metal hydride batteries, and nickel-zinc batteries. The operating voltage of these unit secondary battery cells, i.e., unit battery cells, is approximately 2.5 V to 4.5 V. Therefore, when a higher output voltage is required, multiple battery cells are connected in series to form a battery pack. Furthermore, depending on the charge / discharge capacity required for the battery pack, a number of battery cells are connected in parallel to form a battery pack. Therefore, the number of battery cells included in the battery pack can be set in various ways depending on the required output voltage and / or charge / discharge capacity.

[0006] Meanwhile, in the manufacturing process of these secondary batteries, rotary equipment is utilized in various processes. For example, this includes transport devices used to transport battery cells or components constituting battery cells from one process to the next. This rotary equipment structure operates by sending and receiving signals to solenoid valves in accordance with vacuum and vacuum conditions in the disk section that receives and transfers components.

[0007] However, due to the high-speed nature of rotary equipment, it was difficult to synchronize the timing of vacuum absorption and release during parts transfer. Specifically, problems such as vacuum and release delays resulted in malfunctions. Furthermore, the need for electrical wiring to match the number of parts being transported led to increased electrical component management points and increased equipment costs.

[0008]

[0009] Accordingly, the present invention aims to solve the above problem by increasing the consistency of vacuum and vacuum release timing during transport of battery cells or components constituting battery cells.

[0010] In another aspect, the present invention aims to reduce the number of parts constituting a transport device, thereby reducing device management points and costs.

[0011] However, the technical problems to be solved by the present invention are not limited to the problems described above, and other problems not mentioned can be clearly understood by those skilled in the art from the description of the invention described below.

[0012]

[0013] A transport device according to one embodiment of the present invention for solving the above-described problem includes a first disk having a disk shape and configured to rotate around a central axis of the disk; a second disk provided above the first disk and having a disk shape; and a gasket interposed between the first disk and the second disk.

[0014] Preferably, the second disk and the gasket may not rotate.

[0015] In one aspect of the present invention, the first disk may have a plurality of adsorption holes along the circumferential direction.

[0016] Preferably, the above adsorption hole can be configured to adsorb and desorb the object to be transported.

[0017] In another aspect of the present invention, the gasket may include at least one first slot and at least one second slot each configured to penetrate in a direction parallel to the central axis and have a predetermined space.

[0018] Here, the first slot may be a vacuum slot.

[0019] Here, the second slot may be an air blow slot.

[0020] In another aspect of the present invention, the first slot and the second slot may have an arc shape formed to have a predetermined angle with respect to the central axis.

[0021] In another aspect of the present invention, the gasket may have a ring shape.

[0022] In one aspect of the present invention, the second disc may include a first fitting connected to a vacuum device; and a second fitting connected to an air blow device.

[0023] Here, the first fitting can be connected to the first slot, and the second fitting can be connected to the second slot.

[0024] Preferably, at least one of the first fitting and the second fitting may be provided in multiple numbers.

[0025] In another aspect of the present invention, a first valve configured to control the inflow and outflow of gas may be provided between the first fitting and the vacuum device.

[0026] In another aspect of the present invention, a second valve configured to control the inflow and outflow of gas may be provided between the second fitting and the air blower device.

[0027] Preferably, the first valve and the second valve may be solenoid valves.

[0028]

[0029] According to the present invention, the consistency of vacuum and vacuum release timing can be increased during transport of battery cells or components constituting battery cells.

[0030] In another aspect, according to the present invention, the number of parts constituting the transport device can be reduced.

[0031] Accordingly, it is possible to secure economic efficiency by reducing device management points and reducing costs.

[0032] However, the effects that can be obtained through the present invention are not limited to the effects described above, and other technical effects that are not mentioned can be clearly understood by those skilled in the art from the description of the invention described below.

[0033]

[0034] The following drawings attached to this specification illustrate preferred embodiments of the present invention and, together with the detailed description of the invention described below, serve to further understand the technical idea of ​​the present invention, and therefore, the present invention should not be interpreted as being limited to matters described in such drawings.

[0035] FIG. 1 is a drawing for explaining a transport device according to one embodiment of the present invention.

[0036] Figure 2 is an exploded perspective view of Figure 1.

[0037] FIG. 3 is a drawing for explaining the first disk included in the transport device of FIG. 1.

[0038] Figure 4 is a side view of the first disk of Figure 3.

[0039] Fig. 5 is a drawing for explaining a gasket included in the transport device of Fig. 1.

[0040] FIG. 6 is a drawing for explaining a second disk included in the transport device of FIG. 1.

[0041] Fig. 7 is a longitudinal cross-sectional view of the transport device of Fig. 1 cut at a predetermined angle.

[0042] Fig. 8 is a cross-sectional view of the transport device of Fig. 1 taken at a different angle from Fig. 7.

[0043] Fig. 9 is a drawing for explaining the vacuum section and the point where the vacuum ends of the transport device of Fig. 1.

[0044] Figure 10 is a drawing for explaining the process of the transfer device of Figure 1 transferring a tape to a tape attachment disk.

[0045]

[0046] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. Prior to this, it should be noted that the terms and words used in this specification and claims should not be construed as limited to their conventional or dictionary meanings. Based on the principle that the inventor can appropriately define the concepts of terms to best explain his or her invention, they should be interpreted in a way that conforms to the technical spirit of the present invention.

[0047] Accordingly, the embodiments described in this specification and the configurations illustrated in the drawings are only some of the most preferred embodiments of the present invention and do not represent all of the technical ideas of the present invention, so it should be understood that there may be various equivalents and modified examples that can replace them at the time of this application.

[0048] Additionally, to aid understanding of the invention, the attached drawings are not drawn to scale and the dimensions of some components may be exaggerated.

[0049]

[0050] Conventionally, rotary equipment has been utilized in various processes during the secondary battery manufacturing process. Examples include transport devices used to transport battery cells or components constituting battery cells from one process to the next. These rotary equipment structures operate by sending and receiving signals to solenoid valves in accordance with vacuum and vacuum conditions in the disk section that receives and transfers components.

[0051] However, due to the high-speed nature of rotary equipment, it was difficult to synchronize the timing of vacuum absorption and release during parts transfer. Specifically, problems such as vacuum and release delays resulted in malfunctions. Furthermore, the need for electrical wiring to match the number of parts being transported led to increased electrical component management points and increased equipment costs.

[0052] More specifically, in conventional rotary equipment, the conveying device formed a vacuum chamber for each disk head, and each vacuum chamber was equipped with a solenoid valve to control vacuum and vacuum release. For example, if the number of disk heads is six, six vacuum chambers had to be formed, and six solenoid valves had to be included. This method of controlling vacuum by providing a valve for each head not only resulted in cost issues, but also resulted in problems such as an excessive number of components constituting the conveying device, such as solenoid valves and electrical wiring, increasing the number of equipment maintenance points.

[0053] The present invention is intended to solve the above problems, and a transport device (1) for achieving the above purpose will be described in detail below with reference to FIGS. 1 to 10.

[0054]

[0055] FIG. 1 is a drawing for explaining a transport device (1) according to one embodiment of the present invention, and FIG. 2 is an exploded perspective view of FIG. 1.

[0056] Referring to FIGS. 1 and 2, a transport device (1) according to one embodiment of the present invention includes a first disk (10), a second disk (20), and a gasket (30).

[0057] More specifically, the transport device (1) may include a first disk (10) having a disk shape and configured to be rotatable about a central axis (C) of the disk; a second disk (20) provided above the first disk (10) and having a disk shape; and a gasket (30) interposed between the first disk (10) and the second disk (20).

[0058] The gasket (30) can ensure airtightness between the first disk (10) and the second disk (20). The gasket (30) can be configured to generate a vacuum, vacuum release, or air blow at a predetermined location. The object to be transported can be configured to be absorbed and desorbed from the first disk (10).

[0059] This structure reduces the number of valves required for each location requiring vacuum and vacuum release, thereby reducing equipment costs. Furthermore, the consistency of the timing of handover, previously determined by the valve's electrical signal, can be improved. In other words, the present invention improves the consistency of the timing of handover through improved mechanical structure and reduces the number of valves required for the absorption and desorption of the object to be transported, thereby reducing unnecessary wiring work and complexity.

[0060]

[0061] Preferably, the second disk (20) and the gasket (30) may not rotate. That is, only the first disk (10) may rotate, and the second disk (20) and the gasket (30) may be configured not to rotate.

[0062] According to this structure, the object can be transported by rotating only the first disk (10) that transports the object to be transported, and the second disk (20) and gasket (30) that do not come into direct contact with the object to be transported are kept fixed, thereby increasing the efficiency of the device and minimizing unnecessary operation and movement.

[0063]

[0064] FIG. 3 is a drawing for explaining the first disk (10) included in the transport device (1) of FIG. 1, and FIG. 4 is a drawing of the first disk (10) of FIG. 3 viewed from the side.

[0065] In one aspect of the present invention, the first disk (10) may have a plurality of adsorption holes (H) along the circumferential direction.

[0066] For example, referring to FIGS. 3 and 4, the first disk (10) may have a substantially circular shape. At this time, the first disk (10) may be provided with a plurality of through lines (11) penetrating in a direction parallel to the central axis (C). That is, the through lines (11) may be configured to have a tube-shaped space penetrating the upper and lower surfaces of the first disk (10). The through lines (11) may be provided in a plurality of rows along the circumferential direction based on the central axis (C).

[0067] Meanwhile, referring to FIGS. 3 and 4, the first disk (10) may have a plurality of suction holes (H) along the circumferential direction. The suction holes (H) may be provided on the side surface of the first disk (10). A plurality of suction holes (H) may be provided on the side surface of the first disk (10). The suction holes (H) may be configured to be connected to the through line (11). That is, the suction holes (H) may be configured as a tubular passage extending from the outer surface of the first disk (10) to the through line (11). Therefore, the suction holes (H) and the through line (11) may be connected to each other.

[0068] In another aspect of the present invention, there may be a plurality of adsorption holes (H) physically connected to a single through line (11). For example, referring to FIG. 3, there may be three adsorption holes (H) connected to a single through line (11). This will be described in more detail below with reference to FIGS. 7 and 8.

[0069]

[0070] In another aspect of the present invention, the adsorption hole (H) can be configured to adsorb and desorb an object to be transported. That is, according to the present invention, by controlling the inflow and outflow of gas through the through line (11) and the adsorption hole (H), the adsorption and desorption of an object to be transported that comes into contact with the adsorption hole (H) can be controlled.

[0071] For example, referring to FIG. 4, the object to be transported may be a tape (T). The tape (T) may be a tape (T) that wraps the outer surface of a battery cell. In particular, the tape (T) may be a tape (T) that wraps the side of a cylindrical battery cell. That is, the side of the cylindrical battery cell is made of a conductor and generally has a negative or positive electrode, and by covering the side of the battery cell with the tape (T), the conductivity of the side of the battery cell can be blocked. Before performing the process of wrapping the outer surface of the battery cell with the tape (T) in this way, transport may be required to guide the tape (T) to the process. The present invention may be a transport device (1) for transferring such a tape (T). Referring to FIG. 4, a plurality of suction holes (H) are provided on the side of the first disk (10), and the tape (T) can be attached and / or detached at a position facing the plurality of suction holes (H). That is, the tape (T) can be attached to the side of the first disk (10) at a predetermined point, and the tape (T) can be detached from the side of the first disk (10) at a predetermined point. According to the present invention, the attachment and detachment points can be fixed to specific positions, and in the process, the control accuracy of the attachment and detachment points can be improved.

[0072]

[0073] Fig. 5 is a drawing for explaining a gasket (30) included in the transport device (1) of Fig. 1.

[0074] In another aspect of the present invention, the gasket (30) may include a first slot (S1) and a second slot (S2). More specifically, the gasket (30) may include at least one first slot (S1) and at least one second slot (S2) each configured to penetrate in a direction parallel to the central axis (C) and have a predetermined space.

[0075] For example, referring to FIG. 5, the gasket (30) may include a plurality of first slots (S1) and a plurality of second slots (S2) that penetrate in a direction parallel to the central axis (C). Here, the first slots (S1) may be vacuum slots, and the second slots (S2) may be air blow slots. For example, a vacuum may be generated at a position corresponding to the first slots (S1), and a gas discharge may be generated at a position corresponding to the second slots (S2). Here, the first slots (S1) and the second slots (S2) may be configured to communicate with the through lines (11) of the first disk (10). That is, the gasket (30) may be positioned above the first disk (10), and the first slots (S1) or the second slots (S2) may be positioned above the plurality of through lines (11) provided in the first disk (10). Accordingly, the first slot (S1), the through line (11), and the adsorption hole (H) can be configured to allow gas to communicate with each other. Similarly, the second slot (S2), the through line, and the adsorption hole (H) can also be configured to allow gas to communicate with each other.

[0076] According to this structure, a vacuum is generated in the suction hole (H) at a position corresponding to the first slot (S1), so that the tape (T) in contact with the suction hole (H) at a position corresponding to the first slot (S1) can be effectively absorbed. In addition, an air blow is generated in the suction hole (H) at a position corresponding to the second slot (S2), so that the tape (T) in contact with the suction hole (H) at a position corresponding to the second slot (S2) can be effectively detached. That is, according to the present invention, it is possible to control vacuum and vacuum release in a specific area and / or point.

[0077]

[0078] In another aspect of the present invention, the first slot (S1) and the second slot (S2) may have an arc shape formed to have a predetermined angle with respect to the central axis (C).

[0079] For example, referring to FIG. 5, the first slot (S1) may be an arc-shaped shape having a predetermined angle relative to the central axis (C). In this case, if the predetermined angle becomes extremely small, the arc-shaped shape may become a circle. For example, referring to FIG. 5, the second slot (S2) may have a circular shape as described above.

[0080] According to this structure, the shapes of the first slot (S1) and the second slot (S2) can be configured in various ways. Accordingly, the vacuum and air blow timings can be configured in various ways depending on the case. For example, if the length of the tape (T) to be attached changes, the positions and angles of the first slot (S1) and the second slot (S2) can be changed to match the changed length, thereby enabling attachment and detachment of the changed tape (T).

[0081]

[0082] In another aspect of the present invention, the gasket (30) may have, for example, a ring shape. However, the shape of the gasket (30) is not limited thereto, and any shape that can be interposed between the first disk (10) and the second disk (20) is included within the scope of the present invention. For example, the gasket (30) may also have a disc shape.

[0083]

[0084] FIG. 6 is a drawing for explaining the second disk (20) included in the transport device (1) of FIG. 1.

[0085] In another aspect of the present invention, the second disc (20) may include a first fitting (F1) and a second fitting (F2). More specifically, the second disc (20) may include a first fitting (F1) connected to a vacuum device; and a second fitting (F2) connected to an air blow device.

[0086] According to this structure, the first fitting (F1) and the second fitting (F2) can serve as passages for the inflow and outflow of gas. That is, the first fitting (F1) can be connected to a vacuum device, and at this time, a pipe for connection, etc. can be further included. Therefore, when the vacuum device is operated, gas can move toward the outside of the first fitting (F1) through the first fitting (F1). Similarly, the second fitting (F2) can be connected to an air blow device, and at this time, a pipe for connection, etc. can be further included. Therefore, when the air blow device is operated, gas can move from the outside to the inside of the second fitting (F2) through the second fitting (F2).

[0087]

[0088] Fig. 7 is a longitudinal cross-sectional view of the transport device (1) of Fig. 1 cut at a predetermined angle, and Fig. 8 is a longitudinal cross-sectional view of the transport device (1) of Fig. 1 cut at a different angle from Fig. 7.

[0089] Referring to Fig. 7, the first fitting (F1) can be connected to the first slot (S1). That is, as can be seen in Fig. 7, the first fitting (F1), the first slot (S1), the through line (11), and the suction hole (H) can be configured to allow gas to communicate with each other. Accordingly, when the vacuum device connected to the first fitting (F1) operates, a vacuum is generated in the suction hole (H) at a location communicated with the first fitting (F1), thereby effectively suctioning the tape (T) facing the corresponding location.

[0090] Referring to Fig. 8, the second fitting (F2) can be connected to the second slot (S2). That is, as can be seen in Fig. 8, the second fitting (F2), the second slot (S2), the through line (11), and the suction hole (H) can be configured to allow gas to communicate with each other. Accordingly, when the air blow device connected to the second fitting (F2) operates, gas is discharged from the suction hole (H) at a position communicated with the second fitting (F2), so that the tape (T) facing the corresponding position can be effectively detached. If only simple vacuum release is performed instead of air blow, the transfer performance of the tape (T) may deteriorate. Therefore, in the present invention, air blow that discharges gas beyond simple vacuum release can be applied to ensure reliable release of the tape (T) at a predetermined position.

[0091]

[0092] In another aspect of the present invention, at least one of the first fitting (F1) and the second fitting (F2) may be provided in multiple numbers.

[0093] For example, referring to FIGS. 5 and 6, two first fittings (F1) may be connected per one first slot (S1). However, the scope of the present invention is not limited to two fittings per slot, and it is obvious that the scope of the present invention also includes embodiments in which three or more fittings are configured to be connected per one slot.

[0094] According to this structure, a uniform vacuum and / or air blow effect can be achieved due to the structure in which multiple fittings are connected to one slot. For example, if only one fitting is connected to a slot having an elongated arc shape in the circumferential direction, such as the first slot (S1), the vacuum and / or air blow may be strongly generated in the suction hole (H) located near the point where the fitting is connected, and the vacuum and / or air blow may be relatively weak in the suction hole (H) located in the remaining area. However, according to the above-described embodiment of the present invention, a uniform air flow can be generated in all the suction holes (H) within one slot.

[0095]

[0096] According to another aspect of the present invention, a first valve configured to control the inflow and outflow of gas may be provided between the first fitting (F1) and the vacuum device. A second valve configured to control the inflow and outflow of gas may be provided between the second fitting (F2) and the air blower device.

[0097] Although not shown in the drawing, the first fitting (F1) may be connected to a vacuum device via a predetermined hose or pipe. At this time, a first valve may be provided on the hose or pipe. For example, referring to FIG. 5, the present invention may include three first slots (S1), i.e., three vacuum slots. Referring further to FIG. 6, two first fittings (F1) may be connected to each first slot (S1). Therefore, in the present embodiment, a total of six first fittings (F1) may be provided. Each first fitting (F1) may be connected to a vacuum device via a pipe, and a first valve may be provided on an integrated pipe line where each pipe is joined.

[0098] That is, according to the present invention, each pipe can be configured to have only one first valve on the integrated pipe line. Therefore, according to the present invention, the vacuum of the entire device can be controlled through a single valve. This significantly reduces the number of electrical component management points.

[0099] Alternatively, the first valve may be installed on each pipe, rather than on the integrated pipe line. If it is desired to configure the vacuum timing differently for each location in the first slot (S1), the first valve may be installed on each pipe. Alternatively, a valve may be installed for each slot.

[0100]

[0101] Likewise, the second fitting (F2) may be connected to the air blower device via a predetermined hose or pipe. At this time, a second valve may be provided on the hose or pipe. For example, referring to FIG. 5, the present invention may include two second slots (S2), i.e., two air blow slots. Here, referring further to FIG. 6, one second fitting (F2) may be connected to each second slot (S2). Therefore, in the present embodiment, a total of two second fittings (F2) may be provided. Each second fitting (F2) may be connected to the air blower device via a pipe, and a second valve may be provided on the integrated pipe line where each pipe is joined.

[0102] That is, according to the present invention, each pipe can be configured to have only one second valve on the integrated pipe line where each pipe is combined. Therefore, according to the present invention, air blowing throughout the entire device can be controlled through a single valve. This significantly reduces the number of electrical component management points.

[0103] Alternatively, the second valve may be installed on each pipe, rather than on the integrated pipe line. If the air blow timing is to be configured differently for each second slot (S2), a second valve may be installed on each pipe. Alternatively, a valve may be installed for each slot.

[0104]

[0105] In conventional rotary equipment, a vacuum chamber was formed at each head location of the object to be transported, and valves were individually installed in each vacuum chamber. This required numerous valves, requiring individual control of the opening and closing timing of each valve. However, the structure described above of the present invention significantly reduces the number of required valves. This effectively reduces equipment costs and significantly reduces the number of electrical component management points.

[0106] Meanwhile, in another aspect of the present invention, the first valve and the second valve may be solenoid valves. By configuring the valves as solenoid valves in this way, gas inflow and outflow can be effectively controlled through electrical signals.

[0107] However, the types of the first valve and the second valve of the present invention are not limited to solenoid valves, and any valve capable of controlling the inflow and outflow of gas can be applied to the first valve and / or the second valve of the present invention.

[0108]

[0109] FIG. 9 is a drawing for explaining the vacuum section and the point where the vacuum ends of the transport device (1) of FIG. 1, and FIG. 10 is a drawing for explaining the process of the transport device (1) of FIG. 1 transferring the tape (T) to the tape (T) attachment disk.

[0110] Fig. 9 shows a plan view of the gasket (30), and the gasket (30) is maintained in a fixed state without rotating as described above. At this time, the first disk (10) located at the bottom of the gasket (30) can rotate. For example, the first disk (10) can rotate counterclockwise. That is, the first disk (10) can rotate counterclockwise at the bottom of the gasket (30). The first disk (10) can be configured to transport the tape (T) from the first point (P1) to the second point (P2). That is, the first disk (10) can receive the tape (T) from another rotary at the first point (P1). The first point (P1) is a position where the first slot (S1) starts, and a vacuum can be generated from the first point (P1) and maintained until the first slot (S1) ends. Accordingly, a vacuum can be maintained up to the second point (P2). Meanwhile, the second point (P2) is the location where the second slot (S2) begins, and air blow occurs at the second point (P2). That is, the tape (T) attached to the first disk (10) at the first point (P1) can be transferred counterclockwise and then transferred to the next rotary equipment at the second point (P2).

[0111] Referring to Fig. 10, the transfer device (1) can receive the tape (T) from a predetermined position, transfer it counterclockwise, and transfer the tape (T) to the right rotary at a second point (P2). That is, the transfer device (1) can transfer the tape (T) to the next rotary device at a point where it comes into contact with the next rotary device. Here, the next rotary device may be, for example, a rotary device that performs a process of wrapping the tape (T) on the outer surface of a battery cell. In this case, for example, the attachment of the tape (T) to the outer surface of the battery cell can be completed at a third point (P3).

[0112]

[0113] According to the various embodiments described above, the present invention can improve the consistency of vacuum and vacuum release timing during the transport of battery cells or components constituting the battery cells. Furthermore, the number of components constituting the transport device (1) can be reduced, thereby reducing device management points and costs, thereby ensuring economic efficiency.

[0114]

[0115] Meanwhile, although terms indicating directions such as up and down are used in this specification, it is obvious to those skilled in the art that these terms are only for convenience of explanation and may vary depending on the location of the target object or the location of the observer.

[0116] Although the present invention has been described above with reference to limited embodiments and drawings, the present invention is not limited thereto, and it is obvious that various modifications and variations are possible within the scope of the technical idea of ​​the present invention and the equivalent scope of the patent claims to be described below by a person having ordinary skill in the art to which the present invention pertains.

Claims

1. A first disk having a disc shape and configured to rotate around the central axis of the disc; A second disk provided above the first disk and having a disc shape; and A gasket interposed between the first disk and the second disk A transport device characterized by including:

2. In paragraph 1, The above second disk and the above gasket, A transport device characterized by not rotating.

3. In paragraph 1, The above first disk, A transport device characterized by having a plurality of adsorption holes along a circumferential direction.

4. In paragraph 3, A transport device characterized in that the above-mentioned suction hole is configured to absorb and desorb an object to be transported.

5. In paragraph 1, The above gasket, A transport device characterized in that it comprises at least one first slot and one second slot each configured to penetrate in a direction parallel to the central axis and have a predetermined space.

6. In paragraph 5, The above first slot is a vacuum slot, A transport device characterized in that the second slot is an air blow slot.

7. In paragraph 5, The first slot and the second slot are, A transport device characterized by having an arc shape formed at a predetermined angle based on the central axis.

8. In paragraph 1, The above gasket, A transport device characterized by having a ring shape.

9. In paragraph 5, The above second disk, a first fitting connected to a vacuum device; and Second fitting connected to the air blower device A transport device characterized by including:

10. In paragraph 9, The above first fitting is connected to the above first slot, A transport device characterized in that the second fitting is connected to the second slot.

11. In paragraph 9, At least one of the first fitting and the second fitting, A transport device characterized by having multiple units.

12. In paragraph 9, A transport device characterized in that a first valve configured to control the inflow and outflow of gas is provided between the first fitting and the vacuum device.

13. In paragraph 12, A transport device characterized in that a second valve configured to control the inflow and outflow of gas is provided between the second fitting and the air blower device.

14. In paragraph 13, A transport device, characterized in that the first valve and the second valve are solenoid valves.

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