Contaminated argon separation system and method capable of reducing discharge amount of cryogenic contaminated argon

Abstract

A contaminated argon separation system and contaminated argon separation method capable of reducing the discharge amount of cryogenic contaminated argon. The system comprises a valve group (40), at least two adsorption towers (20), waste discharge channels (30) having at least the same number as that of the adsorption towers (20), a gas intake member (10) and at least one argon reflux member (80), wherein the valve group (40) comprises a gas intake valve (41), a desorption control valve (42) and at least two waste discharge valves (43); and an argon-rich gas outlet (202) is provided at the top of each adsorption tower (20), the argon-rich gas outlets (202) at the tops of the adsorption towers (20) are in communication with each other to form a regeneration channel (21), and the argon-rich gas outlet (202) at the top of each adsorption tower is also in communication with an argon-rich output channel (50).

Description

Waste argon separation system and method capable of reducing the amount of cryogenic waste argon discharged Technical Field

[0001] The present invention provides an argon recovery method, and in particular relates to a contaminated argon separation system and method capable of reducing the amount of cryogenic contaminated argon discharged. Background Art

[0002] Currently, the use of cryogenic distillation with pre-stage deoxidation and decarbonization can address the argon shortage and high energy requirements faced by existing photovoltaic companies, reducing the production costs of photovoltaic renewable energy. While the argon recovery rate of cryogenic equipment is generally around 85%, a large amount of contaminated argon is still emitted into the atmosphere, resulting in argon waste.

[0003] Compared to obtaining high-purity argon by separating and purifying argon from atmosphere containing 1% argon, the contaminated argon gas with an argon concentration of 10-80% in the exhaust of cryogenic contaminated argon is still a high-value gas source. Further recovery of the contaminated argon gas from the exhaust of cryogenic contaminated argon, purifying it before introducing it into the inlet of the integrated cryogenic argon recovery unit, can improve the overall yield of the argon recovery unit.

[0004] The contaminated argon gas in the cryogenic distillation process contains mainly nitrogen, hydrogen or carbon monoxide. Affected by the raw gas recovered from the single crystal silicon furnace, the proportion of each component in the contaminated gas varies greatly. For example, the nitrogen concentration fluctuates between 90% and 20%, and the hydrogen concentration fluctuates between 1% and 4%. The pressure of the contaminated argon gas is related to the previous cryogenic distillation process.

[0005] In the existing technology, most of the cryogenic waste argon is discharged through direct discharge, which will lead to the waste of argon in the cryogenic waste argon. The concentration of argon in the exhaust gas of the cryogenic waste argon cannot meet the user's usage concentration requirements. Although there is a process of filtering the exhaust gas through an adsorption tower in the existing technology, the gas after filtration by the adsorption tower is divided into high-purity argon and residual gas. There is still a lot of argon in the residual gas, and its concentration is much higher than the concentration of argon in the atmosphere. In the existing technology, the residual gas is usually discharged directly into the atmosphere. In this way, a large amount of argon is still wasted.

[0006] Summary of the Invention

[0007] One advantage of the present invention is that it provides a system and method for separating contaminated argon that can reduce the amount of cryogenic contaminated argon discharged, wherein the method for reducing the amount of cryogenic contaminated argon discharged can reduce the discharge of cryogenic contaminated argon and can more efficiently recover the argon.

[0008] Another advantage of the present invention is that it provides a system and method for separating contaminated argon that can reduce the amount of cryogenic contaminated argon discharged. The method for reducing the amount of cryogenic contaminated argon discharged can effectively prevent dangerous accidents caused by excessive hydrogen when cryogenic contaminated argon enters.

[0009] Another advantage of the present invention is that it provides a contaminated argon separation system and method that can reduce the amount of cryogenic contaminated argon emissions. The method for reducing the amount of cryogenic contaminated argon emissions can effectively prevent the incoming contaminated argon exhaust from penetrating the packing due to excessively high flow rate. In other words, the method can enable the contaminated argon to slowly pass through the packing when being filtered by the packing, thereby ensuring that the gas can fully contact the adsorption packing layer of the adsorption tower, thereby improving the purity of the collected argon gas.

[0010] Another advantage of the present invention is that it provides a contaminated argon separation system and method that can reduce the emission of cryogenic contaminated argon. The method for reducing the emission of cryogenic contaminated argon can enable the contaminated argon to be recovered and connected through multiple towers, so that at least one tower is filtering the contaminated argon while another tower is regenerating. When the regenerated adsorption tower is filtering the contaminated argon, the adsorption tower that was previously filtering the contaminated argon is regenerating. In this way, the adsorption capacity of the adsorption packing layer in each tower can be effectively guaranteed, thereby improving the purity of the contaminated argon after filtration.

[0011] Another advantage of the present invention is to provide a waste argon separation system and method that can reduce the amount of cryogenic waste argon emissions, wherein the method can effectively reduce the emission of cryogenic waste argon, thereby improving the utilization rate of waste argon.

[0012] To achieve at least one of the above advantages of the present invention, the present invention provides a waste argon separation system capable of reducing the amount of waste argon discharged from a cryogenic device. The waste argon separation system capable of reducing the amount of waste argon discharged from a cryogenic device comprises:

[0013] A valve group, comprising an air inlet valve, a degassing control valve and at least two sewage valves;

[0014] At least two adsorption towers, each having an argon-rich gas outlet at the top, and the argon-rich gas outlets at the top of each adsorption tower are interconnected to form a regeneration channel, and the argon-rich gas outlet at the top of each adsorption tower is also connected to an argon-rich gas outlet channel, wherein the analytical control valve is provided in the regeneration channel to control the on-off of the regeneration channel, and each adsorption tower also has at least one sewage outlet at the bottom;

[0015] At least the same number of drain channels as the adsorption towers, one end of each drain channel being connected to the drain port at the bottom of each adsorption tower, and the other end forming a drain port for discharging exhaust gas from the bottom of each adsorption tower, wherein each drain channel is provided with at least one drain valve;

[0016] 18. The smoke detector of claim 17, wherein the smoke detector is configured to detect whether or not the smoke detector is connected to the control panel. The smoke detector is configured to detect whether or not the smoke detector is connected to the control panel. The smoke detector is configured to detect whether or not the smoke detector is connected to the control panel.

[0017] At least one argon reflux component, the argon reflux component includes at least one pressure equalizing tank and a number of first pressure equalizing channels that is at least the same as the number of the adsorption towers, the valve group includes a first pressure equalizing valve, wherein the first pressure equalizing valve is arranged on each of the first pressure equalizing channels, one end of each of the first pressure equalizing channels is connected to the pressure equalizing tank, and the other end is connected to the top of one of the adsorption towers.

[0018] According to one embodiment of the present invention, the argon reflux component also includes a second pressure equalizing channel, and the valve group also includes at least one second pressure equalizing valve, wherein the second pressure equalizing valve is arranged in the second pressure equalizing channel, and is located between the adsorption tower in the adsorption working state and the adsorption tower in the decomposition state. The second pressure equalizing channel is used to connect the middle and upper parts of the adsorption tower.

[0019] According to one embodiment of the present invention, the argon reflux component also includes a third pressure equalizing channel with a number at least the same as the number of the adsorption towers, and the valve group includes a third pressure equalizing valve, which is arranged in each of the third pressure equalizing channels. One end of the third pressure equalizing channel is connected to the upper middle part of the adsorption tower in the adsorption working state, and the other end is connected to the bottom of the adsorption tower in the decomposition state.

[0020] According to one embodiment of the present invention, the contaminated argon separation system capable of reducing the amount of cryogenic contaminated argon discharged further includes a flow reducing argon tank, wherein the flow reducing argon tank stores argon-rich gas, and the flow reducing argon tank is arranged to be connected to the other end of the argon-rich gas outlet channel.

[0021] According to an embodiment of the present invention, the air intake component further comprises at least one pressure stabilizing tank, wherein the pressure stabilizing tank is arranged on the air intake pipeline to buffer the cryogenic dirty argon exhaust gas entering from the air intake pipeline.

[0022] According to one embodiment of the present invention, the air intake component further includes an inert gas intake pipeline, wherein one end of the inert gas intake pipeline is connected to the air intake pipeline, and the other end of the inert gas intake pipeline is connected to an inert gas storage tank.

[0023] According to an embodiment of the present invention, the argon gas reflux component includes a plurality of third pressure equalization channels connecting the adsorption tower in the adsorption working state and the adsorption tower in the desorption state.

[0024] According to an embodiment of the present invention, the gas stored in the inert gas storage tank is an inert gas such as nitrogen.

[0025] According to an embodiment of the present invention, each of the third pressure equalizing channels is configured as a branch of the first pressure equalizing channel, and the first pressure equalizing valve and the third pressure equalizing valve are configured as the same valve and are arranged on the branch.

[0026] According to one embodiment of the present invention, the waste argon separation system capable of reducing the discharge amount of cryogenic waste argon includes a reflux component, wherein the reflux component includes a reflux channel, a waste storage tank and a negative pressure pump, one end of the reflux channel is connected to the bottom of each of the adsorption towers, and the other end is connected to the waste storage tank, and the waste storage tank is connected to the sewage discharge channel, and the negative pressure pump is configured to guide the waste argon in the sewage discharge channel to flow into the waste storage tank, and subsequently guide the waste argon in the waste storage tank to enter the adsorption tower from the bottom of the adsorption tower through the reflux channel.

[0027] To achieve at least one of the above advantages of the present invention, the present invention provides a method for separating contaminated argon to reduce the amount of cryogenic contaminated argon discharged, wherein the method is performed by a contaminated argon separation system capable of reducing the amount of cryogenic contaminated argon discharged, the contaminated argon separation system capable of reducing the amount of cryogenic contaminated argon discharged comprising:

[0028] A valve group, comprising an air inlet valve, a degassing control valve and at least two sewage valves;

[0029] At least two adsorption towers, each having an argon-rich gas outlet at the top, and the argon-rich gas outlets at the top of each adsorption tower are interconnected to form a regeneration channel, and the argon-rich gas outlet at the top of each adsorption tower is also connected to an argon-rich gas outlet channel, wherein the analytical control valve is provided in the regeneration channel to control the on-off of the regeneration channel, and each adsorption tower also has at least one sewage outlet at the bottom;

[0030] At least the same number of drain channels as the adsorption towers, one end of each drain channel being connected to the drain port at the bottom of each adsorption tower, and the other end forming a drain port for discharging exhaust gas from the bottom of each adsorption tower, wherein each drain channel is provided with at least one drain valve;

[0031] 18. The smoke detector of claim 17, wherein the smoke detector is configured to detect whether or not the smoke detector is connected to the control panel. The smoke detector is configured to detect whether or not the smoke detector is connected to the control panel. The smoke detector is configured to detect whether or not the smoke detector is connected to the control panel.

[0032] At least one argon reflux component, the argon reflux component including at least one pressure equalizing tank and a number of first pressure equalizing channels at least the same as the number of the adsorption towers, the valve group including a first pressure equalizing valve, wherein the first pressure equalizing valve is arranged on each of the first pressure equalizing channels, one end of each of the first pressure equalizing channels is connected to the pressure equalizing tank, and the other end is connected to the top of one of the adsorption towers, the contaminated argon separation method capable of reducing the amount of cryogenic contaminated argon discharged includes:

[0033] Open at least one of the air inlet valves to put the adsorption tower connected to the corresponding opened air inlet valve into an adsorption working state. At the same time, close at least another air inlet valve and open the desorption control valve to put the other adsorption towers connected to the closed air inlet valve into a desorption state. The drain valve connected to the bottom of the adsorption tower in the adsorption working state is closed, and the drain valve connected to the bottom of the adsorption tower in the desorption state is opened.

[0034] The first pressure equalizing valve is opened so that the argon-rich gas in the adsorption tower that has just completed the adsorption working state can be evenly delivered to the pressure equalizing tank through the first pressure equalizing valve.

[0035] To achieve at least one of the above advantages of the present invention, the present invention provides a waste argon separation system capable of reducing the amount of waste argon discharged from a cryogenic device. The waste argon separation system capable of reducing the amount of waste argon discharged from a cryogenic device comprises:

[0036] A valve group, comprising an air inlet valve, a degassing control valve and at least two sewage valves;

[0037] At least two adsorption towers, each having an argon-rich gas outlet at the top, and the argon-rich gas outlets at the top of each adsorption tower are interconnected to form a regeneration channel, and the argon-rich gas outlet at the top of each adsorption tower is also connected to an argon-rich gas outlet channel, wherein the analytical control valve is provided in the regeneration channel to control the on-off of the regeneration channel, and each adsorption tower also has at least one sewage outlet at the bottom;

[0038] At least the same number of drain channels as the adsorption towers, one end of each drain channel being connected to the drain port at the bottom of each adsorption tower, and the other end forming a drain port for discharging exhaust gas from the bottom of each adsorption tower, wherein each drain channel is provided with at least one drain valve;

[0039] 18. The smoke detector of claim 17, wherein the smoke detector is configured to detect whether or not the smoke detector is connected to the control panel. The smoke detector is configured to detect whether or not the smoke detector is connected to the control panel. The smoke detector is configured to detect whether or not the smoke detector is connected to the control panel.

[0040] A reflux component, wherein the reflux component includes a reflux channel, a sewage storage tank and a negative pressure pump, one end of the reflux channel is connected to the bottom of each adsorption tower, and the other end is connected to the sewage storage tank, and the sewage storage tank is connected to the sewage discharge channel, and the negative pressure pump is configured to guide the waste argon in the sewage discharge channel to flow into the sewage storage tank, and subsequently guide the waste argon in the sewage storage tank to enter the adsorption tower from the bottom of the adsorption tower through the reflux channel. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] FIG1 shows a schematic diagram of a dirty argon separation system of the present invention that can reduce the amount of dirty argon discharged from a cryogenic chamber.

[0042] FIG2 is a schematic diagram showing another embodiment of the dirty argon separation system of the present invention that can reduce the amount of cryogenic dirty argon discharged.

[0043] FIG3 is an enlarged schematic diagram showing a portion of the structure of FIG2 of the contaminated argon separation system of the present invention, which can reduce the amount of contaminated cryogenic argon discharged. DETAILED DESCRIPTION

[0044] The following description is intended to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are for illustrative purposes only, and those skilled in the art will readily appreciate other obvious variations. The basic principles of the present invention defined in the following description may be applied to other embodiments, variations, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of the present invention.

[0045] Those skilled in the art should understand that, in the disclosure of the present invention, the terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms should not be understood as limiting the present invention.

[0046] It is to be understood that the term "one" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element may be one, while in another embodiment, the number of the elements may be multiple, and the term "one" should not be understood as a limitation on the quantity.

[0047] With reference to Figures 1 to 3, a contaminated argon separation system capable of reducing the discharge of contaminated cryogenic argon according to a preferred embodiment of the present invention will be described in detail below. The contaminated argon separation system capable of reducing the discharge of contaminated cryogenic argon can treat the contaminated cryogenic argon waste gas and, during the treatment, reduce the content of contaminated argon in the exhaust gas ultimately discharged, thereby improving the recovery rate of contaminated argon.

[0048] Specifically, the contaminated argon separation system capable of reducing the discharge amount of cryogenic contaminated argon includes an air inlet component 10 , at least two adsorption towers 20 and a valve group 40 .

[0049] As shown in FIG1 , the valve assembly 40 includes an air intake valve 41. The air intake component 10 has an air intake port 101 and includes at least two air intake pipes 11, the same number as the adsorption towers 20, wherein each air intake pipe 11 is provided with an air intake valve 41, and the two ends of each air intake pipe 11 are respectively connected to the air intake port 101 and the bottom of the adsorption tower 20, so that when the air intake valve 41 is opened, the contaminated argon exhaust gas entering from the air intake port 101 can enter the air intake port 101 of the corresponding adsorption tower 20 through the air intake pipe 11 and then be filtered.

[0050] It is worth mentioning that, as will be understood by those skilled in the art, each of the adsorption towers 20 is provided with an adsorption filler layer, wherein the adsorption filler layer is used to adsorb gases other than argon in the exhaust gas, such as hydrogen. In this way, the exhaust gas passing through the adsorption tower 20 from bottom to top can be filtered to obtain argon-rich gas.

[0051] Each adsorption tower 20 has an argon-rich gas outlet 202 at the top, and the argon-rich gas outlets 202 at the top of each adsorption tower 20 are interconnected to form a regeneration channel 21. At the same time, the argon-rich gas outlet 202 at the top of each adsorption tower 20 is also connected to an argon-rich gas outlet channel 50.

[0052] It is worth mentioning that the valve group 40 further includes a resolving control valve 42 , wherein the resolving control valve 42 is disposed in the regeneration channel 21 to control the on-off of the regeneration channel 21 .

[0053] In addition, the bottom of each adsorption tower 20 also has at least one drain port 203. Accordingly, the waste argon separation system capable of reducing the amount of cryogenic waste argon discharged also includes at least the same number of drain channels 30 as the adsorption towers 20. One end of each drain channel 30 is connected to the drain port 203 at the bottom of each adsorption tower 20, while the other end forms an exhaust port for discharging exhaust gas from the bottom of each adsorption tower 20.

[0054] The valve group 40 further includes at least the same number of drain valves 43 as the number of the adsorption towers 20 , wherein each drain channel 30 is provided with at least one drain valve 43 .

[0055] It is worth noting that when at least one of the air inlet valves 41 connected to at least one of the adsorption towers 20 is opened, the other adsorption towers 20 connected to the unopened air inlet valve 41 will enter the desorption state. The corresponding adsorption towers 20 connected to the corresponding opened air inlet valve 41 will enter the adsorption working state. The drain valve 43 connected to the bottom of the adsorption tower 20 in the adsorption working state will be closed, while the drain valve 43 connected to the bottom of the adsorption tower 20 in the desorption state will be open.

[0056] Those skilled in the art will appreciate that, in this manner, the adsorption tower 20 in the adsorption working state can be used to filter the contaminated argon exhaust gas, while a portion of the argon-rich gas formed by the filtration in the adsorption working state can simultaneously flow from top to bottom through the regeneration channel 21 to the other adsorption towers 20 in the desorption state. In this way, the adsorption tower 20 in the adsorption working state can be used to filter the cryogenic contaminated argon exhaust gas, and when the adsorption tower 20 in the desorption state is regenerated by the argon-rich gas flowing from top to bottom, the exhaust gas adsorbed by the adsorbent in the adsorption tower 20 in the desorption state can be desorbed and discharged from the bottom of the adsorption tower 20 in the desorption state through the drain channel 30 from top to bottom.

[0057] In this way, by regularly switching the adsorption tower 20 between the decomposition state and the adsorption state, the deep-cold contaminated argon exhaust gas can be filtered.

[0058] At the same time, a portion of the argon-rich gas can be discharged through the argon-rich gas outlet 202 at the top of the adsorption tower 20 in the adsorption working state and through the argon-rich gas outlet channel 50. The argon-rich gas discharged from the argon-rich gas outlet channel 50 can be directly used by users or collected in a collection tank for storage.

[0059] Specifically, for example, as shown in FIG2 , when the air inlet valve 41 corresponding to the adsorption tower 20A is opened, the adsorption tower 20A is in the adsorption working state. Since the air inlet valve 41 corresponding to the adsorption tower 20B is closed, the adsorption tower 20B is in the desorption state.

[0060] Preferably, the contaminated argon separation system capable of reducing the amount of cryogenic contaminated argon discharged further comprises a flow reducing argon tank 70, wherein the flow reducing argon tank 70 stores argon-rich gas, wherein the flow reducing argon tank 70 is arranged to be connected to the other end of the argon-rich gas outlet channel 50, so that when the cryogenic contaminated argon exhaust gas is initially introduced into the adsorption tower 20 through the air intake component 10, the argon-rich gas stored in the flow reducing argon tank 70 can offset the contaminated argon exhaust gas entering from the air inlet 101 of the adsorption tower 20 from the bottom up from the top down to the adsorption tower 20 in the adsorption working state.

[0061] In this way, the incoming cryogenic dirty argon exhaust gas can slowly flow through the adsorption filler layer of the adsorption tower 20 in the adsorption working state, so that the dirty argon exhaust gas can fully contact the adsorption filler layer of the adsorption tower 20 in the adsorption working state, thereby improving the filtering effect of the cryogenic dirty argon exhaust gas, thereby improving the purity of the argon in the filtered argon-rich gas.

[0062] Also preferably, the air intake component 10 further includes at least one pressure stabilizing tank 12 , wherein the pressure stabilizing tank 12 is arranged on the air intake pipe 11 and is located between the air inlet 101 and the bottom of the adsorption tower 20 , so as to buffer the deep-cold dirty argon exhaust gas entering from the air intake pipe 11 .

[0063] More preferably, the air intake component 10 further comprises an inert gas air intake pipe 13, wherein one end of the inert gas air intake pipe 13 is connected to the air intake pipe 11, and the other end of the inert gas air intake pipe 13 is connected to an inert gas storage tank, so as to introduce inert gas into the air intake pipe 11 and the adsorption tower 20 before the cryogenic waste argon gas is discharged into the air intake pipe 11, thereby exhausting the air in the air intake pipe 11 and the adsorption tower 20, thereby preventing the cryogenic waste argon gas containing waste gases such as hydrogen from entering the air intake pipe 11 and the adsorption tower 20 and exploding after mixing with the cryogenic waste argon gas containing waste gases such as hydrogen due to excessive oxygen in the gas.

[0064] It will be understood by those skilled in the art that the gas stored in the inert gas storage tank is an inert gas such as nitrogen.

[0065] Furthermore, the dirty argon separation system that can reduce the amount of deep-cold dirty argon emissions also includes at least one argon reflux component 80. Specifically, the argon reflux component 80 includes at least one pressure equalizing tank 81 and a number of first pressure equalizing channels 82 that is at least the same as the number of the adsorption towers 20. The valve group 40 includes a first pressure equalizing valve 44, wherein the first pressure equalizing valve 44 is arranged on each of the first pressure equalizing channels 82. One end of each of the first pressure equalizing channels 82 is connected to the pressure equalizing tank 81, and the other end is connected to one of the adsorption towers 20. In the example shown in Figure 1, the other end of each of the first pressure equalizing channels 82 is connected to the top of one of the adsorption towers 20. In another embodiment, the other end of each of the first pressure equalizing channels 82 is connected to the bottom of one of the adsorption towers 20, as shown in Figure 2.

[0066] Preferably, the argon reflux component 80 further includes a second pressure-equalizing channel 83 for connecting the adsorption tower 20 in the adsorption working state with the adsorption tower 20 in the desorption state. The valve group 40 further includes at least one second pressure-equalizing valve 45, wherein the second pressure-equalizing valve 45 is disposed in the second pressure-equalizing channel 83. The second pressure-equalizing channel 83 is used to connect the middle and upper portions of the adsorption tower 20.

[0067] After the adsorption tower 20 in the adsorption working state completes adsorption, the adsorption tower 20 in the desorption state completes desorption at the same time. Accordingly, the air inlet valve 41, the drain valve 43 and the desorption control valve 42 are all closed.

[0068] Preferably, the first equalizing pressure valve 44 and the second equalizing pressure valve 45 are controlled to open, so that the argon-rich gas in the adsorption tower 20 that has just completed the adsorption working state can be sent to the equalizing pressure tank 81 and the other adsorption tower 20 that has just completed the analysis through the first equalizing pressure valve 44 and the second equalizing pressure valve 45.

[0069] Those skilled in the art will appreciate that, in this manner, the amount of gas retained in the adsorption tower 20 that has just completed the adsorption operation can be reduced, thereby reducing the amount of exhaust gas discharged when the adsorption tower 20 that has just completed the adsorption operation is subsequently switched to the desorption state, thereby reducing the argon content in the exhausted exhaust gas. This can improve the argon recovery rate.

[0070] More preferably, the argon reflux component 80 further includes at least the same number of third pressure equalizing channels 84 as the number of the adsorption towers 20. Accordingly, the valve group 40 includes a third pressure equalizing valve 46. The third pressure equalizing valve 46 is provided in each of the third pressure equalizing channels 84. One end of the third pressure equalizing channel 84 is connected to the upper middle portion of the adsorption tower 20 in the adsorption working state, and the other end is connected to the bottom of the adsorption tower 20 in the desorption state.

[0071] It is worth mentioning that after the adsorption tower 20 in the adsorption working state completes adsorption, the adsorption tower 20 in the desorption state completes desorption at the same time. Accordingly, the air inlet valve 41, the drain valve 43 and the desorption control valve 42 are all closed.

[0072] The third pressure equalizing valve 46 on the third pressure equalizing channel 84 connected to the adsorption tower 20 that has just completed the adsorption work is opened, so that the relatively high-quality argon-rich gas in the middle and upper parts of the adsorption tower 20 that has just completed the adsorption work can flow from bottom to top to the adsorption tower 20 that has just completed the analysis. In this way, the adsorption filler layer flowing into the adsorption tower 20 that has just completed the analysis can not only further filter the waste gas in the relatively argon-rich gas to obtain argon-rich gas, but also allow more gas at the bottom of the adsorption tower 20 that has just completed the adsorption work to be transferred to the adsorption tower 20 that has just completed the analysis. In this way, when the adsorption tower 20 that has just completed the adsorption work is subsequently switched to the analysis state, the amount of exhaust gas discharged can be reduced, thereby reducing the argon content in the exhaust gas discharged, thereby improving the recovery rate of deep-cold contaminated argon, and at the same time, ensuring the purity of the argon-rich gas finally obtained.

[0073] Preferably, the argon gas reflux component 80 further includes a plurality of third pressure equalization channels 84 connecting the adsorption tower 20 in the adsorption working state and the adsorption tower in the desorption state.

[0074] In a preferred embodiment shown in FIG2 , each of the third pressure-equalizing channels 84 is configured as a branch of the first pressure-equalizing channel 82 , and the first pressure-equalizing valve 44 and the third pressure-equalizing valve 46 are configured as the same valve and are located on the branch. This not only enables multiple recirculations of contaminated argon but also reduces the complexity of the pipeline design.

[0075] Preferably, the inert gas inlet pipeline is provided with at least one blowing control valve 47 .

[0076] Preferably, in the second embodiment of the present invention, the contaminated argon separation system capable of reducing the discharge of cryogenic contaminated argon further comprises a reflux component 90 , wherein the reflux component 90 comprises a reflux channel 91 , a contamination storage tank 92 and a negative pressure pump 93 .

[0077] One end of the reflux channel 91 is connected to the bottom of each of the adsorption towers 20, and the other end is connected to the sewage storage tank 92. The sewage storage tank 92 is connected to the sewage discharge channel 30. The negative pressure pump 93 is configured to guide the waste argon in the sewage discharge channel 30 to flow into the sewage storage tank 92, and can subsequently guide the waste argon in the sewage storage tank 92 to enter the adsorption tower 20 from the bottom of the adsorption tower 20 through the reflux channel 91. The waste argon that enters is adsorbed by the adsorption tower 20 and then purified again. In this way, the content of argon in the exhaust gas finally discharged can be effectively reduced, thereby effectively improving the recovery rate of argon. It is worth mentioning that a control valve 48 is provided on the reflux channel 91. It is also worth mentioning that after the adsorption tower 20 in the adsorption state completes adsorption and pressure equalization, the negative pressure pump 93 and the control valve 48 are opened, so that the waste argon in the waste storage tank 92 can enter the adsorption tower 20 from the bottom of the adsorption tower 20 through the reflux channel 91.

[0078] As shown in FIG2 , preferably, one end of the reflux channel 91 is connected to the main channel of the first pressure-equalizing channel 82. In this way, the reflux channel 91 can be connected to the adsorption tower 20 via a branch of the first pressure-equalizing channel 82, namely the third pressure-equalizing channel 84. Similarly, this not only enables multiple refluxes of contaminated argon, but also reduces the complexity of the pipeline design.

[0079] Those skilled in the art will appreciate that the embodiments of the present invention described above and shown in the accompanying drawings are intended to be illustrative only and are not intended to limit the present invention. The advantages of the present invention have been fully and effectively achieved. The functional and structural principles of the present invention have been demonstrated and illustrated in the embodiments. Any variations or modifications may be made to the embodiments of the present invention without departing from the principles described.

Claims

1. A waste argon separation system capable of reducing the amount of waste argon discharged from a cryogenic environment, wherein the waste argon separation system capable of reducing the amount of waste argon discharged from a cryogenic environment comprises: A valve group, the valve group comprising an air inlet valve, a resolution control valve and at least two waste valves; At least two adsorption towers, each of which has an argon-rich gas outlet at the top, and the argon-rich gas outlets at the top of each adsorption tower are interconnected to form a regeneration channel, and the argon-rich gas outlet at the top of each adsorption tower is also connected to an argon-rich gas outlet channel, wherein the analytical control valve is arranged in the regeneration channel to control the on-off of the regeneration channel, and each of the adsorption towers also has at least one sewage outlet at the bottom; At least the same number of drain channels as the adsorption towers, one end of each drain channel is connected to the drain port at the bottom of each adsorption tower, and the other end forms a drain port for discharging waste gas at the bottom of each adsorption tower, wherein each drain channel is provided with at least one drain valve; An air intake component, wherein the air intake component has an air intake port, and the air intake component comprises at least two air intake pipelines which are the same in number as the adsorption towers, wherein each of the air intake pipelines is provided with an air intake valve, and both ends of each of the air intake pipelines are respectively connected to the air intake port and the bottom of the adsorption tower, so that when the air intake valve is opened, the polluted argon exhaust gas entering from the air intake port can enter an air intake port in the corresponding adsorption tower via the air intake pipeline and be filtered subsequently, and when at least one of the air intake valves connected to at least one of the adsorption towers is opened, the other adsorption towers connected to the unopened air intake valves will be in a decomposition state, and the corresponding adsorption towers connected to the corresponding opened air intake valves will be in an adsorption working state, and the blowdown valve connected to the bottom of the adsorption tower in the adsorption working state is in a closed state, and the blowdown valve connected to the bottom of the adsorption tower in the decomposition state is in an open state; At least one argon reflux component, the argon reflux component includes at least one pressure equalizing tank and first pressure equalizing channels at least the same number as the adsorption towers, the valve group includes a first pressure equalizing valve, wherein the first pressure equalizing valve is arranged on each of the first pressure equalizing channels, one end of each of the first pressure equalizing channels is connected to the pressure equalizing tank, and the other end is connected to the top of one of the adsorption towers.

2. According to claim 1, the dirty argon separation system capable of reducing the emission of deep-cold dirty argon, wherein the argon reflux component further comprises a second pressure equalizing channel, and the valve group further comprises at least one second pressure equalizing valve, wherein the second pressure equalizing valve is arranged in the second pressure equalizing channel, and is located between the adsorption tower in the adsorption working state and the adsorption tower in the decomposition state. The second pressure equalizing channel connects the middle and upper parts of all the adsorption towers.

3. According to claim 2, the dirty argon separation system capable of reducing the emission of deep-cold dirty argon, wherein the argon reflux component further includes third pressure equalizing channels having at least the same number as the adsorption towers, the valve group includes a third pressure equalizing valve, the third pressure equalizing valve is arranged in each of the third pressure equalizing channels, one end of the third pressure equalizing channel is connected to the upper middle part of the adsorption tower in the adsorption working state, and the other end is connected to the bottom of the adsorption tower in the decomposition state.

4. The dirty argon separation system capable of reducing the amount of cryogenic dirty argon emissions according to any one of claims 1 to 3, wherein the dirty argon separation system capable of reducing the amount of cryogenic dirty argon emissions further comprises a flow reducing argon tank, wherein the flow reducing argon tank stores argon-rich gas, wherein the flow reducing argon tank is arranged to be connected to the other end of the argon-rich gas outlet passage.

5. The dirty argon separation system capable of reducing the discharge amount of cryogenic dirty argon according to any one of claims 1 to 3, wherein the air intake component further comprises at least one surge tank, wherein the surge tank is arranged on the air intake pipeline to buffer the cryogenic dirty argon exhaust gas entering from the air intake pipeline.

6. The contaminated argon separation system capable of reducing the amount of cryogenic contaminated argon discharged according to any one of claims 1 to 3, wherein the gas intake component further comprises an inert gas intake pipeline, wherein one end of the inert gas intake pipeline is connected to the gas intake pipeline, and the other end of the inert gas intake pipeline is connected to an inert gas storage tank.

7. The dirty argon separation system capable of reducing the emission of deep-cold dirty argon according to claim 3, wherein the argon reflux component comprises a plurality of the third pressure equalization channels connecting the adsorption tower in an adsorption working state and the adsorption tower in a desorption state at the same time.

8. The contaminated argon separation system capable of reducing the amount of cryogenic contaminated argon discharged according to claim 6, wherein the gas stored in the inert gas storage tank is nitrogen.

9. The dirty argon separation system capable of reducing the amount of cryogenic dirty argon emissions according to claim 3, wherein each of the third pressure equalizing channels is configured as a branch of the first pressure equalizing channel, and the first pressure equalizing valve and the third pressure equalizing valve are configured as the same valve and are arranged on the branch.

10. The waste argon separation system capable of reducing the amount of cryogenic waste argon discharged according to claim 1, wherein the waste argon separation system capable of reducing the amount of cryogenic waste argon discharged comprises a reflux component, wherein the reflux component comprises a reflux channel, a waste storage tank and a negative pressure pump, one end of the reflux channel is connected to the bottom of each of the adsorption towers, and the other end is connected to the waste storage tank, the waste storage tank is connected to the sewage discharge channel, and the negative pressure pump is configured to guide the waste argon in the sewage discharge channel to flow into the waste storage tank, and subsequently guide the waste argon in the waste storage tank to enter the adsorption tower from the bottom of the adsorption tower through the reflux channel.

11. A method for separating waste argon capable of reducing the amount of waste argon discharged from a cryogenic environment, wherein the method is performed by a waste argon separation system capable of reducing the amount of waste argon discharged from a cryogenic environment, wherein the waste argon separation system capable of reducing the amount of waste argon discharged from a cryogenic environment comprises: A valve group, the valve group comprising an air inlet valve, a resolution control valve and at least two waste valves; At least two adsorption towers, each of which has an argon-rich gas outlet at the top, and each of which has an argon-rich gas outlet at the top. The argon-rich gas outlets at the top of each adsorption tower are connected to each other to form a regeneration channel, and the argon-rich gas outlet at the top of each adsorption tower is also connected to an argon-rich gas outlet channel, wherein the analytical control valve is arranged in the regeneration channel to control the on-off of the regeneration channel, and the bottom of each adsorption tower also has at least one sewage outlet; At least the same number of drain channels as the adsorption towers, one end of each drain channel is connected to the drain port at the bottom of each adsorption tower, and the other end forms a drain port for discharging waste gas at the bottom of each adsorption tower, wherein each drain channel is provided with at least one drain valve; An air intake component, wherein the air intake component has an air intake port, and the air intake component comprises at least two air intake pipelines which are the same in number as the adsorption towers, wherein each of the air intake pipelines is provided with an air intake valve, and both ends of each of the air intake pipelines are respectively connected to the air intake port and the bottom of the adsorption tower, so that when the air intake valve is opened, the polluted argon exhaust gas entering from the air intake port can enter an air intake port in the corresponding adsorption tower via the air intake pipeline and be filtered subsequently, and when at least one of the air intake valves connected to at least one of the adsorption towers is opened, the other adsorption towers connected to the unopened air intake valves will be in a decomposition state, and the corresponding adsorption towers connected to the corresponding opened air intake valves will be in an adsorption working state, and the blowdown valve connected to the bottom of the adsorption tower in the adsorption working state is in a closed state, and the blowdown valve connected to the bottom of the adsorption tower in the decomposition state is in an open state; At least one argon reflux component, the argon reflux component comprising at least one pressure equalizing tank and first pressure equalizing channels at least the same number as the adsorption towers, the valve group comprising a first pressure equalizing valve, wherein the first pressure equalizing valve is arranged on each of the first pressure equalizing channels, one end of each of the first pressure equalizing channels is connected to the pressure equalizing tank, and the other end is connected to the top of one of the adsorption towers; The dirty argon separation method capable of reducing the amount of cryogenic dirty argon discharged comprises: Open at least one of the air inlet valves to put the adsorption tower connected to the corresponding opened air inlet valve into an adsorption working state, and at the same time, close at least another air inlet valve, and open the desorption control valve, so that the other adsorption towers connected to the closed air inlet valves will be in a desorption state, the drain valve connected to the bottom of the adsorption tower in the adsorption working state is in a closed state, and the drain valve connected to the bottom of the adsorption tower in the desorption state is in an open state; The first pressure equalizing valve is opened so that the argon-rich gas in the adsorption tower that has just completed the adsorption working state can be evenly delivered to the pressure equalizing tank through the first pressure equalizing valve.

12. The dirty argon separation method capable of reducing the amount of cryogenic dirty argon emissions according to claim 11, wherein the argon reflux component further comprises a second pressure equalizing channel, the valve group further comprises at least one second pressure equalizing valve, wherein the second pressure equalizing valve is disposed in the second pressure equalizing channel and is located between the adsorption tower in the adsorption working state and the adsorption tower in the desorption state, the second pressure equalizing channel is connected to the middle and upper parts of all the adsorption towers, and the dirty argon separation method capable of reducing the amount of cryogenic dirty argon emissions comprises: The second pressure equalizing valve is opened so that the argon-rich gas in the adsorption tower that has just completed the adsorption working state can be evenly delivered to the other adsorption tower that has just completed the desorption through the second pressure equalizing valve.

13. The dirty argon separation method capable of reducing the amount of cryogenic dirty argon emissions according to claim 11, wherein the argon reflux component further comprises a third pressure equalizing channel having at least the same number as the number of the adsorption towers, the valve group comprises a third pressure equalizing valve, the third pressure equalizing valve is arranged in each of the third pressure equalizing channels, one end of the third pressure equalizing channel is connected to the middle and upper part of the adsorption tower in the adsorption working state, and the other end is connected to the bottom of the adsorption tower in the desorption state, the dirty argon separation method capable of reducing the amount of cryogenic dirty argon emissions comprises: Open the third pressure equalizing valve on the third pressure equalizing channel connected to the adsorption tower that has just completed the adsorption work, so that the relatively high-quality argon-rich gas in the middle and upper parts of the adsorption tower that has just completed the adsorption work can flow from bottom to top to the adsorption tower that has just completed the analysis.

14. The method for separating waste argon capable of reducing the amount of discharged waste argon from a cryogenic tank according to claim 11, wherein the waste argon separation system capable of reducing the amount of discharged waste argon from a cryogenic tank comprises a reflux component, wherein the reflux component comprises a reflux channel, a waste storage tank and a negative pressure pump, one end of the reflux channel is connected to the bottom of each of the adsorption towers, and the other end is connected to the waste storage tank, the waste storage tank is connected to the sewage channel, and the negative pressure pump is configured to guide the waste argon in the sewage channel to flow into the waste storage tank; The dirty argon separation method capable of reducing the amount of cryogenic dirty argon discharged comprises: The negative pressure pump is turned on to subsequently guide the waste argon in the waste storage tank to enter the adsorption tower from the bottom of the adsorption tower through the reflux channel.

15. The method for separating contaminated argon capable of reducing the amount of discharged contaminated argon from a cryogenic furnace according to claim 11, wherein the gas inlet component further comprises an inert gas inlet pipeline, wherein one end of the inert gas inlet pipeline is connected to the gas inlet pipeline, wherein the other end of the inert gas inlet pipeline is connected to an inert gas storage tank, wherein the method for separating contaminated argon capable of reducing the amount of discharged contaminated argon from a cryogenic furnace comprises: An inert gas is introduced into the inlet pipeline and the adsorption tower through the inert gas inlet pipeline.

16. A waste argon separation system capable of reducing the amount of waste argon discharged from a cryogenic environment, wherein the waste argon separation system capable of reducing the amount of waste argon discharged from a cryogenic environment comprises: A valve group, the valve group comprising an air inlet valve, a resolution control valve and at least two waste valves; At least two adsorption towers, each of which has an argon-rich gas outlet at the top, and the argon-rich gas outlets at the top of each adsorption tower are interconnected to form a regeneration channel, and the argon-rich gas outlet at the top of each adsorption tower is also connected to an argon-rich gas outlet channel, wherein the analytical control valve is arranged in the regeneration channel to control the on-off of the regeneration channel, and each of the adsorption towers also has at least one sewage outlet at the bottom; At least the same number of drain channels as the adsorption towers, one end of each drain channel is connected to the drain port at the bottom of each adsorption tower, and the other end forms a drain port for discharging waste gas at the bottom of each adsorption tower, wherein each drain channel is provided with at least one drain valve; An air intake component, wherein the air intake component has an air intake port, and the air intake component comprises at least two air intake pipelines which are the same in number as the adsorption towers, wherein each of the air intake pipelines is provided with an air intake valve, and both ends of each of the air intake pipelines are respectively connected to the air intake port and the bottom of the adsorption tower, so that when the air intake valve is opened, the polluted argon exhaust gas entering from the air intake port can enter an air intake port in the corresponding adsorption tower via the air intake pipeline and be filtered subsequently, and when at least one of the air intake valves connected to at least one of the adsorption towers is opened, the other adsorption towers connected to the unopened air intake valves will be in a decomposition state, and the corresponding adsorption towers connected to the corresponding opened air intake valves will be in an adsorption working state, and the blowdown valve connected to the bottom of the adsorption tower in the adsorption working state is in a closed state, and the blowdown valve connected to the bottom of the adsorption tower in the decomposition state is in an open state; A reflux component, wherein the reflux component includes a reflux channel, a sewage storage tank and a negative pressure pump, one end of the reflux channel is connected to the bottom of each adsorption tower, and the other end is connected to the sewage storage tank, the sewage storage tank is connected to the sewage discharge channel, and the negative pressure pump is configured to guide the waste argon in the sewage discharge channel to flow into the sewage storage tank, and can subsequently guide the waste argon in the sewage storage tank to enter the adsorption tower from the bottom of the adsorption tower through the reflux channel.

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