Light emitting device and distance measuring device

Abstract

[Problem] To provide a light emitting device and a distance measuring device in which the structure of wiring lines for light emitting elements can be optimized and the resolution of measured values can be increased. [Solution] A light emitting device according to the present disclosure comprises: a plurality of light emitting elements that are arranged in a two-dimensional array and that each have first and second terminals; a plurality of first terminal wiring lines that are electrically connected to the first terminals of the light emitting elements, and that each include a first wiring line extending in a first direction and second wiring lines each electrically connected to the first wiring line; a plurality of second terminal wiring lines that are electrically connected to the second terminals of the light emitting elements, each of the second terminal wiring lines being electrically connected to P of the light emitting elements; a plurality of selection circuits that are electrically connected to one of the first and second terminal wiring lines to select light emitting elements that are to generate light; a plurality of drive circuits that are electrically connected to the other of the first and second terminal wiring lines to drive the light emitting elements; an optical system that causes light emitted by the plurality of light emitting elements to illuminate a plurality of illumination positions; and a first drive unit that drives the optical system to change the plurality of illumination positions.

Description

Light emitting device and distance measuring device

[0001] The present disclosure relates to a light emitting device and a distance measuring device.

[0002] Surface-emitting lasers such as vertical cavity surface-emitting lasers (VCSELs) are known as one type of semiconductor laser. Generally, in a light-emitting device using a surface-emitting laser, a plurality of light-emitting elements are provided in a two-dimensional array on the front or back surface of a substrate.

[0003] Japanese Patent Application Laid-Open No. 2020-96169

[0004] When VCSEL light-emitting elements are individually driven, the wiring for the light-emitting elements becomes longer as the number of light-emitting elements increases. As a result, the impedance of each wiring increases and the difference in impedance between the wirings becomes larger. Furthermore, there is a demand for increased resolution in distance measurements.

[0005] Therefore, the present disclosure provides a light emitting device and a distance measuring device that can optimize the structure of wiring for light emitting elements and increase the resolution of measurement values.

[0006] In order to solve the above problems, according to the present disclosure, there is provided a light emitting device comprising: a plurality of light emitting elements arranged in a two-dimensional array, each having a first and second terminal; a plurality of first terminal wirings including M first wirings (M is an integer of 2 or more) extending in a first direction and N second wirings (N is an integer of 2 or more) extending in a second direction intersecting the first direction and electrically connected to the M first wirings, respectively, the plurality of first terminal wirings being electrically connected to the first terminals of the light emitting elements; a plurality of second terminal wirings electrically connected to the second terminals of the light emitting elements, each electrically connected to P (P is an integer of 2 or more) of the light emitting elements; a plurality of selection circuits electrically connected to one of the plurality of first terminal wirings and the plurality of second terminal wirings, and selecting the light emitting elements to be light emitting; a plurality of drive circuits electrically connected to the other of the plurality of first terminal wirings and the plurality of second terminal wirings, and driving the plurality of light emitting elements; an optical system that irradiates a plurality of irradiation positions with light emitted by the plurality of light emitting elements; and a first drive unit that drives the optical system and changes the plurality of irradiation positions, wherein N is an integer that is the same as or different from M, The P is an integer that is the same as or different from at least one of the M and the N.

[0007] The optical system may include a reflecting mirror, and the first driving unit may rotate the reflecting mirror about a rotation axis.

[0008] The first driving unit may rotate the light source so as to irradiate light between the plurality of irradiation positions.

[0009] The reflecting mirror may have a plurality of rotation axes, and the first driving unit may rotate the reflecting mirror so that the reflecting mirror periodically reciprocates around the plurality of rotation axes.

[0010] The optical system may include a lens, and the first driving unit may move an optical axis of the lens relative to the plurality of light-emitting elements.

[0011] The first driving unit may move the optical axis of the lens so as to irradiate between the plurality of irradiation positions.

[0012] The first driving section may periodically reciprocate the optical axis of the lens so as to irradiate between the plurality of irradiation positions.

[0013] The light source device may further include a microlens array corresponding to each of the plurality of light-emitting elements and configured to collect light emitted from the plurality of light-emitting elements.

[0014] The first driving unit may be any one of a voice coil motor, a piezoelectric element, a shape memory alloy element, and a liquid crystal element.

[0015] In order to solve the above problems, according to the present disclosure, there is provided a light source unit that generates light and irradiates it onto a subject, and a control unit, wherein the light source unit includes: a plurality of light-emitting elements that are arranged in a two-dimensional array, each having a first and a second terminal; M first wirings (M is an integer of 2 or more) extending in a first direction, and N second wirings (N is an integer of 2 or more) that extend in a second direction intersecting the first direction and are electrically connected to the M first wirings, respectively; a plurality of first terminal wirings that are electrically connected to the first terminals of the light-emitting elements; a plurality of second terminal wirings that are electrically connected to the second terminals of the light-emitting elements, and each of the second terminal wirings is electrically connected to P (P is an integer of 2 or more) of the light-emitting elements; a plurality of selection circuits that are electrically connected to one of the plurality of first terminal wirings and the plurality of second terminal wirings, and that select the light-emitting elements to be light-emitting; a plurality of drive circuits that are electrically connected to the other of the plurality of first terminal wirings and the plurality of second terminal wirings, and that drive the plurality of light-emitting elements; and an optical system that irradiates a plurality of irradiation positions with light emitted by the plurality of light-emitting elements. and a first driving unit that drives the optical system and changes the plurality of irradiation positions, wherein the control unit controls the selection circuit, the driving circuit, and the first driving unit, wherein N is an integer that is the same as or different from M, and wherein P is an integer that is the same as or different from at least one of M and N.

[0016] The control unit may be capable of changing a light irradiation method depending on an area to be measured.

[0017] The control unit may change the number of scans, which is the number of times irradiation is performed between the plurality of irradiation positions, depending on the region to be measured.

[0018] The control unit may change a frame rate, which is the number of times the light emitting element emits light per predetermined time, depending on the area to be measured.

[0019] The control unit may change which of the plurality of light-emitting elements emits light, depending on the area to be measured.

[0020] The control unit may change the number of times the plurality of light emitting elements emit light depending on the area to be measured.

[0021] The control unit may change the light emission intensity of the plurality of light emitting elements according to the area to be measured.

[0022] The object detection device may include a light receiving unit that receives light reflected from the object, and a distance measuring unit that measures the distance to the object based on the light received by the light receiving unit.

[0023] The light receiving unit may have a plurality of light receiving elements arranged in a matrix and included in a target area, and the control unit may specify an addition area including two or more light receiving elements from the plurality of light receiving elements, and control scanning based on the specified addition area.

[0024] 1 is a schematic layout diagram showing a configuration example of the distance measuring device 1 of the first embodiment. FIG. 2 is a block diagram showing a configuration example of the distance measuring device 1 of the first embodiment. FIG. 3 is a diagram for explaining the STL (Structured Light) system of the first embodiment. FIG. 4 is a schematic diagram showing the structure of the light source unit 2 of the first embodiment. FIG. 5 is a cross-sectional view showing the structure of the light emitter 11 of the first embodiment. FIG. 6 is a circuit diagram showing the structure of the light source unit 2 of the first embodiment. FIG. 7 is a graph for explaining the performance of the light source unit 2 of the first embodiment. FIG. 8 is a cross-sectional view and a plan view showing the structure of the light source unit 2 of the first embodiment. FIG. 9 is a perspective view schematically showing the structure of the light source unit 2 of the first embodiment. FIG. 10 is a circuit diagram showing the structure of the light source unit 2 of a first modified example of the first embodiment. FIG. 11 is a circuit diagram showing the structure of the light source unit 2 of a second modified example of the first embodiment. FIG. 12 is a circuit diagram showing the structure of the light source unit 2 of a third modified example of the first embodiment. FIG. 13 is a circuit diagram showing the structure of the light source unit 2 of a fourth modified example of the first embodiment. FIG. 14 is a circuit diagram showing the structure of the light source unit 2 of a fifth modified example of the first embodiment. FIG. 15 is another circuit diagram showing the structure of the light source unit 2 of the fifth modified example of the first embodiment. FIG. 16 is a circuit diagram showing various examples of the structure of the light source unit 2 of a sixth modified example of the first embodiment. 21. FIG. 22 is a circuit diagram showing the structure of a light source unit 2 according to a seventh modified example of the first embodiment. FIG. 23 is a timing chart showing the operation of the light source unit 2 according to the seventh modified example of the first embodiment. FIG. 24 is a cross-sectional view and a plan view showing the structure of a light source unit 2 according to an eighth modified example of the first embodiment. FIG. 25 is a circuit diagram showing the structure of a light source unit 2 according to the second embodiment. FIG. 26 is a plan view schematically showing the structure of a light source unit 2 according to the third embodiment. FIG. 27 is a diagram showing the irradiation position of irradiation light La minutely fluctuated by a minute scanning unit 10. FIG. 28 is a diagram showing an example of the arrangement of light-emitting elements 2a of the light source unit 2. FIG. 29 is a timing chart showing an example of irradiation control at the irradiation position shown in FIG. 21. FIG. 29 is a diagram showing four irradiation positions of irradiation light La. FIG. 29 is a diagram showing an example of the overall structure of a distance measurement module in a light-emitting device 1b according to the second embodiment. FIG. 29 is a diagram showing an example of a frame in which the irradiation position is changed by an actuator 170. FIG. 29 is a diagram showing an example of the configuration of a light source unit 2 according to the third embodiment. FIG. 29 is a block diagram showing an example of the configuration of a distance measuring device 1 according to the fourth embodiment. FIG. 29 is a diagram showing an example of the recognition result of a recognition unit 600. FIG. 29 is a diagram showing an example of a signal generated by the recognition unit 600. Fig. 10 is a diagram showing a more specific example of the configuration of a pixel array section 100 in a light receiving section 7 according to the fifth embodiment. Fig. 11 is a block diagram showing an example of the configuration of a distance measuring section 9a.FIG. 10 is a diagram schematically showing a distance measurement method according to a fifth embodiment. FIG. 11 is a diagram schematically showing a distance measurement method according to a fifth embodiment. FIG. 12 is a diagram schematically showing a distance measurement method according to a fifth embodiment. FIG. 13 is a block diagram of an example of an Indirect-Time of Flight sensor to which the present technology is applied. FIG. 14 is a circuit diagram showing an example configuration of a pixel 10230 in an embodiment of the present technology. FIG. 15 is a block diagram showing an example of a schematic configuration of a vehicle control system. FIG. 16 is an explanatory diagram showing an example of installation positions of an outside-vehicle information detection unit and an imaging unit.

[0025] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings.

[0026] (First Embodiment) (1) Distance Measuring Device 1 of First Embodiment (1.1) Configuration of Distance Measuring Device 1 FIG. 1 is a schematic layout diagram showing an example of the configuration of the distance measuring device 1 of the first embodiment. FIG. 2 is a block diagram showing an example of the configuration of the distance measuring device 1 of the first embodiment. The distance measuring device 1 of this embodiment is mounted on, for example, an automobile. As shown in FIGS. 1 and 2, the distance measuring device 1 includes a light emitting device 1a, a power supply circuit 4, a light receiving side optical system 6, a light receiving unit 7, a signal processing unit 8, a control unit 9, and an optical element m2. The light emitting device 1a includes a light source unit 2, a light emitting side optical system 5, a minute scanning unit 10, and an optical element m4. The light source unit 2 includes a light emitting unit 11 and a driving unit 3. The light emitting side optical system 5 and optical element m4 according to this embodiment may be referred to as an optical system.

[0027] The light source unit 2 emits light from a plurality of light sources in the light-emitting unit 11. The light-emitting unit 11 in this example has light-emitting elements 2a, each of which is a vertical cavity surface-emitting laser (VCSEL), and these light-emitting elements 2a are arranged in a predetermined pattern, such as a matrix.

[0028] The driving unit 3 is, for example, a driver, and is configured to include a power supply circuit for driving the light emitting unit 11 .

[0029] The power supply circuit 4 generates a power supply voltage for the drive unit 3 based on an input voltage from, for example, a battery (not shown) provided in the distance measuring device 1. The drive unit 3 drives the light emitting unit 11 based on the power supply voltage.

[0030] The illumination light La emitted from the light-emitting unit 11 is irradiated onto the subject S, which is the distance measurement target, via the light-emitting side optical system 5 and optical element m2. The optical element m2 transmits the illumination light La that has passed through the light-emitting side optical system 5 and causes it to be incident on the optical element m4. The optical element m2 is, for example, a half mirror. The illumination light La can illuminate the entire illumination frame SS or a partial area. In other words, the multiple light-emitting elements 2a of the light-emitting unit 11 can all emit light simultaneously, or can emit light selectively. The light-emitting side optical system 5 is composed of, for example, a single lens or multiple lenses.

[0031] The optical element m4 has a reflective surface that reflects multiple beams of irradiation light La. The multiple beams of irradiation light La are emitted by multiple light-emitting elements 2a. The reflective surface is rotatable, for example, around two intersecting rotation axes r2 and r4. The minute scanning unit 10 is capable of periodically and minutely varying the two rotation axes r2 and r4. That is, the minute scanning unit 10 is a mechanism for periodically and minutely varying the two rotation axes r2 and r4, and may utilize, for example, a magnetic circuit or a piezoelectric element. Alternatively, the irradiation position of the measurement beam La may be minutely changed using a voice coil motor, piezo, shape memory alloy, liquid crystal, or the like. This allows the optical element m4 to periodically and minutely vary the irradiation position of the irradiation beam La. This also enables the irradiation density of the irradiation beam La to be increased. Note that the minute scanning unit 10 in this embodiment corresponds to the first driving unit. Details of the minute variations will be described later.

[0032] The reflected light from the subject S is reflected by optical element m4, further reflected by optical element m2, and then incident on the light-receiving surface of the light-receiving unit 7 via the light-receiving-side optical system 6. The light-receiving unit 7 is a light-receiving element such as a CCD (Charge Coupled Device) sensor or a CMOS (Complementary Metal Oxide Semiconductor) sensor, and receives the reflected light from the subject S that is incident via the light-receiving-side optical system 6 as described above, converts it into an electrical signal, and outputs it. The light-receiving-side optical system 6 is composed of, for example, a single lens or multiple lenses.

[0033] The light receiving unit 7 performs processes such as CDS (Correlated Double Sampling) and AGC (Automatic Gain Control) on the electrical signal obtained by photoelectrically converting the received light, and then performs A / D (Analog / Digital) conversion on the electrical signal, and outputs the resulting digital data to the signal processing unit 8 at the subsequent stage.

[0034] Furthermore, the light-receiving unit 7 in this example outputs a frame synchronization signal Fs to the driving unit 3. This causes the driving unit 3 to cause the light-emitting element 2a in the light-emitting unit 11 to emit light in response to a timing signal TRIG_O (see FIG. 24 described later) that corresponds to the frame period of the light-receiving unit 7. This allows the light-emitting element 2a to emit light at a timing that corresponds to the frame period of the light-receiving unit 7.

[0035] The signal processing unit 8 is configured as a signal processor, for example, a DSP (Digital Signal Processor), etc. The signal processing unit 8 performs various signal processes on the digital signal input from the light receiving unit 7.

[0036] The control unit 9 is configured with, for example, a microcomputer having a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), etc., or an information processing device such as a DSP, and controls the drive unit 3 for controlling the light emission operation of the light emitter 11, and controls the light reception operation of the light receiver 7. The control unit 9 also controls the drive of the minute scan unit 10.

[0037] The control unit 9 has a function as a distance measuring unit 9a. The distance measuring unit 9a measures the distance to the subject S based on a signal input via the signal processing unit 8 (i.e., a signal obtained by receiving reflected light from the subject S). The distance measuring unit 9a in this example measures the distance to each part of the subject S in order to be able to identify the three-dimensional shape of the subject S.

[0038] Here, we will explain again later the specific distance measurement method used in the distance measuring device 1. (1.2) Distance Measurement Method As the distance measurement method used in the distance measuring device 1, for example, a distance measurement method using an STL (Structured Light) method or a ToF (Time of Flight) method can be adopted.

[0039] The STL method is a method for measuring distance based on an image of a subject S illuminated with light having a predetermined light / dark pattern, such as a dot pattern or a grid pattern.

[0040] FIG. 3 is a diagram for explaining the STL system of the first embodiment.

[0041] In the STL method, pattern light Lp having a dot pattern such as that shown in Fig. 3A is irradiated onto the subject S. The pattern light Lp is divided into a plurality of blocks BL, and a different dot pattern is assigned to each block BL (dot patterns are arranged so as not to overlap between blocks BL).

[0042] FIG. 3B is a diagram illustrating the distance measurement principle of the STL system.

[0043] In this example, a wall W and a box BX placed in front of it are treated as the subject S, and pattern light Lp is irradiated onto the subject S. "G" in the figure schematically represents the angle of view of the light receiving unit 7.

[0044] In addition, in the drawing, "BLn" denotes the light of a certain block BL in the pattern light Lp, and "dn" denotes the dot pattern of the block BLn projected on the light-receiving image by the light-receiving unit 7.

[0045] Here, if there is no box BX in front of the wall W, the dot pattern of the block BLn is projected at the position "dn'" in the figure in the received light image. In other words, the position at which the pattern of the block BLn is projected in the received light image differs depending on whether the box BX is present or not, and specifically, the pattern is distorted.

[0046] The STL method is a method for determining the shape and depth of the subject S by utilizing the fact that the irradiated pattern is distorted by the object shape of the subject S. Specifically, it is a method for determining the shape and depth of the subject S from the way the pattern is distorted.

[0047] When the STL system is adopted, for example, a global shutter type IR (Infrared) light receiving unit is used as the light receiving unit 7. In the case of the STL system, the distance measuring unit 9 a controls the driving unit 3 so that the light emitting unit 11 emits pattern light, detects distortion of the pattern in the image signal obtained via the signal processing unit 8, and calculates the distance based on the distortion of the pattern.

[0048] Next, the ToF method is a method for measuring the distance to an object by detecting the time of flight (time difference) of light emitted from the light-emitting unit 11, reflected by the object, and reaching the light-receiving unit 7.

[0049] When the so-called direct ToF (dToF) method is adopted as the ToF method, a SPAD (Single Photon Avalanche Diode) is used as the light receiving unit 7, and the light emitting unit 11 is pulse-driven. In this case, the distance measuring unit 9a calculates the time difference between light emission and reception of light emitted from the light emitting unit 11 and received by the light receiving unit 7 based on a signal input via the signal processing unit 8, and calculates the distance to each part of the subject S based on this time difference and the speed of light. In the dToF method, the distance to the subject S is calculated by calculating the time from light emission to light reception, so a narrower light emission pulse width improves time resolution and enables more precise distance measurement. Therefore, the dToF method is more suitable for this embodiment, which achieves high-power, short-pulse light emission.

[0050] When the so-called indirect ToF (iToF) method (phase difference method) is adopted as the ToF method, a light receiving unit capable of receiving, for example, IR light is used as the light receiving unit 7. In the iToF method, the distance to the subject is calculated from the phase difference between the emitted light and the light reflected from the subject and received, so it is desirable that the rise and fall of the waveform of the LDD output current during light emission be steep. This embodiment is also suitable for the iToF method because the characteristics of the waveform are improved by reducing the inductance of the wiring within the light-emitting element 2a.

[0051] (2) Detailed Description of the Configuration of the Light Source Unit 2 and the Light-Emitting Side Optical System 5 in the Light-Emitting Device 1a According to the First Embodiment

[0052] FIG. 4 is a diagram showing the structure of the light-emitting unit 11. FIG. 4A is a diagram showing an example configuration of the light source unit 2 and the light-emitting side optical system 5 (see FIG. 1). The light-emitting device 1a in FIG. 4A includes the light-emitting unit (VCSEL chip) 11 of the light source unit 2, an LDD (Laser Diode Driver) substrate 12 including the driving unit 3, a mounting substrate 13, a heat dissipation substrate 14, a correcting lens holding unit 15, one or more correcting lenses 16, and wiring 17. The VCSEL chip 11 is also called a VCSEL substrate. The VCSEL chip 11 is an example of a first substrate of the present disclosure, and the LDD substrate 12 is an example of a second substrate of the present disclosure. That is, the one or more correcting lenses 16 are an example configuration of the light-receiving side optical system 6, and the LDD substrate 12 is an example configuration including the driving unit 3. The mounting substrate 13, the heat dissipation substrate 14, the correction lens holding portion 15, and the wiring 17 are configured as a package.

[0053] 4A shows X-axis, Y-axis, and Z-axis that are perpendicular to each other. The +Z direction corresponds to the upward direction, and the −Z direction corresponds to the downward direction. Note that the −Z direction may or may not strictly coincide with the direction of gravity.

[0054] The VCSEL chip 11 is disposed on a mounting substrate 13 via a heat dissipation substrate 14, and the LDD substrate 12 is also disposed on the mounting substrate 13. The mounting substrate 13 is, for example, a printed circuit board. The above-mentioned light receiving unit 7 and signal processing unit 8 may also be disposed on the mounting substrate 13. The heat dissipation substrate 14 is, for example, a ceramic substrate such as an aluminum oxide substrate or an aluminum nitride substrate.

[0055] The correction lens holding unit 15 is disposed on the heat dissipation substrate 14 so as to surround the VCSEL chip 11, and holds one or more correction lenses 16 above the VCSEL chip 11. These correction lenses 16 are included in the above-mentioned light-emitting side optical system 5. Light emitted from the light-emitting unit 2 in the VCSEL chip 11 is corrected by these correction lenses 16 and then irradiated onto the above-mentioned subject S. Fig. 4A shows, as an example, two correction lenses 16 held by the correction lens holding unit 15.

[0056] The wiring 17 is provided on the front, back, or inside of the mounting substrate 13, and electrically connects the VCSEL chip 11 and the LDD substrate 12. The wiring 17 is, for example, a printed wiring provided on the front or back of the mounting substrate 13, or a via wiring that penetrates the mounting substrate 13. In this embodiment, the wiring 17 also passes inside or near the heat dissipation substrate 14.

[0057] 4B is a diagram showing an example cross section of a VCSEL chip 11 having multiple light-emitting elements. The VCSEL chip 11 in FIG. 4B includes a substrate 21, a stacked film 22, and multiple light-emitting elements 23. The light-emitting elements 23 are, for example, VCSEL emitters, and correspond to the locations that emit laser light. These light-emitting elements 23 are specific examples of the light-emitting elements 2a described above.

[0058] The substrate 21 is, for example, a compound semiconductor substrate such as a GaAs (gallium arsenide) substrate. Figure 4 shows a front surface S1 of the substrate 21 facing the -Z direction and a back surface S2 of the substrate 21 facing the +Z direction. The front surface S1 and the back surface S2 are perpendicular to the Z direction. The front surface S1 is the lower surface of the substrate 21, and the back surface S2 is the upper surface of the substrate 21.

[0059] The laminated film 22 includes multiple layers laminated on the surface S1 of the substrate 21. Examples of these layers include an n-type semiconductor layer, an active layer, a p-type semiconductor layer, a light-reflecting layer, and an insulating layer having a light exit window. The laminated film 22 includes multiple post portions P protruding in the −Z direction. Some of these post portions P serve as multiple light-emitting elements 23.

[0060] The light emitting element 23 is provided on the surface S1 of the substrate 21 as part of the laminated film 22. The light emitting element 23 of this embodiment has a VCSEL structure and emits light in the +Z direction. The light emitted from the light emitting element 23 passes through the substrate 21 from the surface S1 to the back surface S2 of the substrate 21, and enters the above-mentioned correcting lens 16 from the substrate 21. In this way, the VCSEL chip 11 of this embodiment is a back-emission type VCSEL chip. The light emitting element 23 is also called a mesa portion.

[0061] Each light-emitting element 23 is provided between an anode wiring (anode electrode) and a cathode wiring (cathode electrode), not shown. Each light-emitting element 23 emits light when a current flows between the anode wiring and the cathode wiring. Further details of the anode wiring and the cathode wiring will be described later.

[0062] FIG. 5 is a circuit diagram showing the structure of the light source unit 2 according to the first embodiment.

[0063] As shown in Fig. 5, the light source unit 2 according to the first embodiment includes a plurality of light-emitting elements 23 arranged in a two-dimensional array and a plurality of transistors 24 electrically connected to these light-emitting elements 23. These transistors 24 are, for example, N-type MOS (Metal-Oxide-Semiconductor) transistors. Fig. 5 shows an example in which the light source unit 2 according to the first embodiment includes 9 x 9 light-emitting elements 23 and 9 x 9 transistors 24. Therefore, the light source unit 2 shown in Fig. 5 includes a 9ch x 9ch light-emitting element array. The number of channels in the light-emitting element array may be any number.

[0064] As shown in FIG. 5 , the light source unit 2 according to the first embodiment further includes a first anode wiring 31, a second anode wiring 32, a third anode wiring 33, a plurality of first capacitors 34, a plurality of second capacitors 35, a plurality of third capacitors 36, a first selection circuit 37, a second selection circuit 38, a third selection circuit 39, a plurality of cathode wirings 41, and a plurality of gate wirings 42. The first to third anode wirings 31 to 33 are examples of first terminal wirings of the present disclosure, and the cathode wiring 41 is an example of second terminal wirings of the present disclosure. The first to third capacitors 34 to 36 are examples of first to M-th capacitors of the present disclosure, and the first to third selection circuits 37 to 39 are examples of first to M-th selection circuits of the present disclosure (M is an integer of 2 or greater). FIG. 5 shows an example in which M is 3.

[0065] The first terminal wirings include M first wirings 31a, 32a, and 33a (M is an integer of 2 or greater) extending in a first direction X, and N second wirings 31b, 32b, and 33b extending in a second direction Y intersecting the first direction X and electrically connected to the M first wirings 31a, 32a, and 33a, respectively. FIG. 5 shows an example where M=3 and N=3. The first terminal wirings are electrically connected to first terminals of a plurality of light-emitting elements 23. In this specification, the first wirings 31a and the second wirings 31b connected to each other are referred to as first anode wirings 31, the second wirings 32a and 32b connected to each other are referred to as second anode wirings 32, and the third wirings 33a and 33b connected to each other are referred to as third anode wirings 33. In this specification, the first direction X may be referred to as the horizontal direction, and the second direction Y may be referred to as the vertical direction. In the following, the first terminal wiring and one of the plurality of second terminal wirings may be referred to as an anode wiring, and the other of the first terminal wiring and the plurality of second terminal wirings may be referred to as a cathode wiring.

[0066] The light source unit 2 according to the first embodiment includes L (L is an integer of 1 or more) sets of the first to third anode wirings 31 to 33. Figure 5 shows an example in which L=5.

[0067] The five sets of first anode wirings 31 include a plurality of (e.g., five) first wirings 31a each extending in the first direction X (horizontal direction) and arranged along the second direction Y (vertical direction), and a plurality of (e.g., five) second wirings 31b each extending in the second direction Y (vertical direction) and arranged along the first direction X (horizontal direction). In this specification, the first wirings 31a may be referred to as first horizontal wirings 31a, and the second wirings 31b may be referred to as first vertical wirings 31b.

[0068] The five sets of second anode wirings 32 each include a plurality of (e.g., five) first wirings 32a each extending in the first direction X (horizontal direction) and arranged along the second direction Y (vertical direction), and a plurality of (e.g., five) second wirings 32b each extending in the second direction Y (vertical direction) and arranged along the first direction X (horizontal direction). In this specification, the first wirings 32a may be referred to as second horizontal wirings 32a, and the second wirings 32b may be referred to as second vertical wirings 32b.

[0069] The five sets of third anode wirings 33 each include a plurality of (e.g., five) first wirings 33a each extending in the first direction X (horizontal direction) and arranged along the second direction Y (vertical direction), and a plurality of (e.g., five) second wirings 33b each extending in the second direction Y (vertical direction) and arranged along the first direction X (horizontal direction). In this specification, the first wirings 33a may be referred to as third horizontal wirings 33a, and the second wirings 33b may be referred to as third vertical wirings 33b.

[0070] 5 shows an example in which the light source unit 2 according to the first embodiment includes five first horizontal wires 31a, five first vertical wires 31b, five second horizontal wires 32a, five second vertical wires 32b, five third horizontal wires 33a, and five third vertical wires 33b. Fig. 5 also shows an example in which L sets of M first wires and N second wires are provided. The number of light-emitting elements 23 shown in Fig. 5 is M(L-2) x N(L-2), where N and L are symbols.

[0071] The first to third anode wirings 31 to 33 may include the first to Mth horizontal wirings of the La set and the first to Nth vertical wirings of the Lb set (La and Lb are integers of 2 or greater that satisfy La≠Lb). In this case, the number of light-emitting elements 23 in the light-emitting section 11 is M(La-2)×N(Lb-2).

[0072] The first selection circuit 37 includes transistors 37a and 37b connected in series. Similarly, the second selection circuit 38 includes transistors 38a and 38b connected in series. Similarly, the third selection circuit 39 includes transistors 39a and 39b connected in series. The transistors 37a, 38a, and 39a are, for example, P-type MOS transistors. The transistors 37b, 38b, and 39b are, for example, N-type MOS transistors. The transistors 37a, 38a, and 39a are examples of first switches of the present disclosure. The transistors 37b, 38b, and 39b are examples of second switches of the present disclosure.

[0073] [First to third anode wirings 31 to 33] In FIG. 5, in order to distinguish the first to third anode wirings 31 to 33 from one another, the first anode wiring 31 is shown by a thick solid line, the second anode wiring 32 is shown by a thick dashed line, and the third anode wiring 33 is shown by a thin solid line.

[0074] The first anode wiring 31 has a structure in which a plurality of first horizontal wirings 31a and a plurality of first vertical wirings 31b are arranged in a mesh pattern. These first horizontal wirings 31a and first vertical wirings 31b are electrically connected to each other at the locations where the first horizontal wirings 31a and first vertical wirings 31b intersect. Similarly, the second anode wiring 32 includes a plurality of second horizontal wirings 32a and a plurality of second vertical wirings 32b that are electrically connected to each other, and the third anode wiring 33 includes a plurality of third horizontal wirings 33a and a plurality of third vertical wirings 33b that are electrically connected to each other. Meanwhile, the first to third anode wirings 31 to 33 are electrically insulated from each other.

[0075] The first to third horizontal wirings 31a to 33a extend in the first direction X (horizontal direction) and are adjacent to each other in the second direction Y (vertical direction). Although the first to third horizontal wirings 31a to 33a extend linearly in the first direction X in FIG. 5, they may extend in a curved manner in the first direction X. That is, the first to third horizontal wirings 31a to 33a may include bent portions.

[0076] On the other hand, the first to third vertical wirings 31b to 33b extend in the second direction Y and are adjacent to each other in the first direction X. Although the first to third vertical wirings 31b to 33b extend linearly in the second direction Y in FIG. 5, they may also extend in a curved manner in the second direction Y. That is, the first to third vertical wirings 31b to 33b may also include bent portions.

[0077] FIG. 5 shows five sets of first to third horizontal wirings (first wirings) 31a to 33a. In FIG. 5, the first, second, third, fourth, and fifth sets of first to third horizontal wirings 31a to 33a are arranged in order from top to bottom. In each set, the first horizontal wiring 31a, the second horizontal wiring 32a, and the third horizontal wiring 33a are arranged in order from top to bottom. The first set of first to third horizontal wirings 31a to 33a and the fifth set of first to third horizontal wirings 31a to 33a are arranged so as to sandwich 9 × 9 light-emitting elements 23 therebetween. Each of the second to fourth sets of first to third horizontal wirings 31a to 33a is arranged along one row (nine light-emitting elements) 23.

[0078] FIG. 5 further shows five sets of first to third vertical wirings (second wirings) 31b to 33b. In FIG. 5, the first, second, third, fourth, and fifth sets of first to third vertical wirings 31b to 33b are arranged in order from left to right. In each set, the first vertical wiring 31b, the second vertical wiring 32b, and the third vertical wiring 33b are arranged in order from left to right. The first set of first to third vertical wirings 31b to 33b and the fifth set of first to third vertical wirings 31b to 33b are arranged so as to sandwich 9×9 light-emitting elements 23 therebetween. Each of the second to fourth sets of first to third vertical wirings 31b to 33b is arranged along one column (nine light-emitting elements) 23.

[0079] The anode of each light-emitting element 23 is electrically connected to one of the first to third vertical wirings 31b to 33b. For example, the light-emitting element 23 in the leftmost column is electrically connected to the first vertical wiring 31b in the second set of first to third vertical wirings 31b to 33b. The light-emitting element 23 in the rightmost column is electrically connected to the third vertical wiring 33b in the fourth set of first to third vertical wirings 31b to 33b. The anode of each light-emitting element 23 may be electrically connected to one of the first to third horizontal wirings 31a to 33a instead of being electrically connected to one of the first to third vertical wirings 31b to 33b. The anode is an example of a first terminal in the present disclosure.

[0080] [Cathode Wiring 41] Each cathode wiring 41 extends in the first direction X and is electrically connected to the cathodes of three light-emitting elements 23. Specifically, each cathode wiring 41 is electrically connected to one light-emitting element 23 electrically connected to the first vertical wiring 31b, one light-emitting element 23 electrically connected to the second vertical wiring 32b, and one light-emitting element 23 electrically connected to the third vertical wiring 33b. These three light-emitting elements 23 are adjacent to each other in the first direction X. FIG. 5 shows 27 cathode wirings 41 for 81 light-emitting elements 23. The cathodes are an example of the second terminals of the present disclosure. The number of light-emitting elements 23 connected to each cathode wiring 41 is not limited to three. Each cathode wiring 41 may be electrically connected to the cathodes of P light-emitting elements 23 (P is an integer greater than or equal to 2).

[0081] Each light-emitting element 23 is provided between a corresponding anode wiring, i.e., any one of the first to third anode wirings 31 to 33, and a corresponding cathode wiring, i.e., any one of the plurality of cathode wirings 41. Each light-emitting element 23 emits light when a current flows between the corresponding anode wiring and the corresponding cathode wiring.

[0082] [Gate Wiring 42] Each gate wiring 42 extends in the first direction X and is electrically connected to the gates of three transistors 24. The sources of these three transistors 24 are electrically connected to the ground wiring (GND), and the drains of these three transistors 24 are electrically connected to the same single cathode wiring 41. These three transistors 24 form one drive circuit E. FIG. 5 shows 27 gate wirings 42 for 81 transistors 24.

[0083] Each drive circuit E is electrically connected to the cathodes of three light-emitting elements 23 via a single cathode wiring 41. Each drive circuit E (output stage) E is used to drive the light-emitting elements 23 to generate (output) light from the light-emitting elements 23. For example, to generate light from a certain light-emitting element 23, a predetermined signal is applied to the gate wiring 42 of the drive circuit E for that light-emitting element 23. This causes conduction between the source and drain of each transistor 24 in that drive circuit E, allowing current to flow through that light-emitting element 23. When current flows through that light-emitting element 23, light is generated from that light-emitting element 23. The light source unit 2 shown in FIG. 5 includes 27 drive circuits E for 81 light-emitting elements 23. Note that each drive circuit E in this embodiment corresponds to a drive unit 3 (see FIG. 2).

[0084] [First to Third Selection Circuits 37 to 39] The first to third selection circuits 37 to 39 are electrically connected to the first to third horizontal wirings 31a to 33a of the first to third anode wirings 31 to 33, respectively. The first selection circuit 37 is used to select the light-emitting element 23 electrically connected to the first anode wiring 31 as the light-emitting element 23 that generates light. The second selection circuit 38 is used to select the light-emitting element 23 electrically connected to the second anode wiring 32 as the light-emitting element 23 that generates light. The third selection circuit 39 is used to select the light-emitting element 23 electrically connected to the third anode wiring 33 as the light-emitting element 23 that generates light. The first to third selection circuits 37 to 39 may be electrically connected to the first to third vertical wirings 31b to 33b of the first to third anode wirings 31 to 33, respectively, instead of the first to third horizontal wirings 31a to 33a of the first to third anode wirings 31 to 33.

[0085] The first selection circuit 37 includes a transistor 37a having a source electrically connected to the power supply wiring (VDD) and a transistor 37b having a source electrically connected to the ground wiring. The drains of the transistors 37a and 37b are electrically connected to the first anode wiring 31. The first selection circuit 37 is electrically connected to each of the first capacitors 34 via the first anode wiring 31.

[0086] The transistor 37a is used to store charge in each first capacitor 34. The transistor 37b is used to discharge charge from each first capacitor 34. When a predetermined signal is applied to the gate of the transistor 37a, charge is stored in each first capacitor 34. When a predetermined signal is applied to the gate of the transistor 37b, charge is discharged from each first capacitor 34. Therefore, according to this embodiment, by selectively storing charge in the first capacitor 34 of the first to third capacitors 34 to 36 using the first selection circuit 37, it is possible to pass a current to each light-emitting element 23 electrically connected to the first anode wiring 31.

[0087] 5 , the second and third selection circuits 38, 39 have the same structure as the first selection circuit 37. Therefore, according to this embodiment, by storing charge in each second capacitor 35 by the second selection circuit 38, it is possible to pass a current to each light-emitting element 23 electrically connected to the second anode wiring 32. Furthermore, according to this embodiment, by storing charge in each third capacitor 36 by the third selection circuit 39, it is possible to pass a current to each light-emitting element 23 electrically connected to the third anode wiring 33.

[0088] [First to Third Capacitors 34 to 36] The first to third capacitors 34 to 36 are electrically connected to the first to third anode wirings 31 to 33, respectively. Each first capacitor 34 stores charge to be supplied to the light-emitting element 23 electrically connected to the first anode wiring 31. Each second capacitor 35 stores charge to be supplied to the light-emitting element 23 electrically connected to the second anode wiring 32. Each third capacitor 36 stores charge to be supplied to the light-emitting element 23 electrically connected to the third anode wiring 33. According to this embodiment, by supplying charge to each light-emitting element 23 from the first to third capacitors 34 to 36, a current can be passed through each light-emitting element 23. Each of the first to third capacitors 34 to 36 has one electrode electrically connected to one of the first to third anode wirings 31 to 33 and the other electrode electrically connected to a ground wiring.

[0089] The light source unit 2 shown in FIG. 5 includes a light-emitting element array including 9×9 light-emitting elements 23 arranged in a two-dimensional array. As shown in FIG. 5, the shape of this light-emitting element array is roughly square in plan view. The light source unit 2 shown in FIG. 5 includes four sets of first to third capacitors 34-36 near the four sides of the square. Specifically, the light source unit 2 shown in FIG. 5 includes a first set of first to third capacitors 34-36 near the top side of the square, a second set of first to third capacitors 34-36 near the right side of the square, a third set of first to third capacitors 34-36 near the bottom side of the square, and a fourth set of first to third capacitors 34-36 near the left side of the square. These first to third capacitors 34-36 are examples of K sets of first to M-th capacitors of the present disclosure (K is an integer greater than or equal to 2). FIG. 5 shows an example where K is 4.

[0090] The first to third capacitors 34 to 36 of the first and third sets are electrically connected to the first to third horizontal wires 31 a to 33 a of the first to third anode wirings 31 to 33, respectively. On the other hand, the first to third capacitors 34 to 36 of the second and fourth sets are electrically connected to the first to third vertical wires 31 b to 33 b of the first to third anode wirings 31 to 33, respectively. As a result, the first to third capacitors 34 to 36 shown in FIG. 5 are electrically connected to the first to third anode wirings 31 to 33, respectively.

[0091] In each group, the first to third capacitors 34 to 36 are arranged in clockwise order. For example, the first capacitor 34, the second capacitor 35, and the third capacitor 36 of the first group are respectively arranged on the left, center, and right sides near the top edge of the square. The first capacitor 34, the second capacitor 35, and the third capacitor 36 of the second group are respectively arranged on the upper, center, and lower sides near the right edge of the square. As a result, the four groups of first to third capacitors 34 to 36 shown in FIG. 5 are arranged symmetrically with respect to the center of the square. The center of the square is approximately located at the position of the light-emitting element 23 in the fifth row and fifth column of the 9×9 light-emitting elements 23. In FIG. 5, the four groups of first to third capacitors 34 to 36 are arranged in four-fold rotational symmetry (90-degree rotational symmetry).

[0092] According to this embodiment, it is possible to set the average distance between each light-emitting element 23 and the corresponding four capacitors to a value close to the average distance between another light-emitting element 23 and the corresponding four capacitors.

[0093] For example, the light-emitting element 23 at the upper left is close to the first capacitor 34 above but far from the first capacitor 34 below. On the other hand, the light-emitting element 23 at the lower right is close to the third capacitor 36 on the right but far from the third capacitor 36 on the left. Therefore, the average distance between the light-emitting element 23 at the upper left and the four first capacitors 34 is close to the average distance between the light-emitting element 23 at the lower right and the four third capacitors 36. This is also true for the other 79 light-emitting elements 23. This makes it possible to reduce the difference in impedance between the wiring of different light-emitting elements 23 with respect to the anode wiring between each light-emitting element 23 and the corresponding four capacitors.

[0094] The light-emitting elements 23 indicated by symbols P2 to P4 are electrically connected to the first anode wiring 31 and are electrically connected to mutually different cathode wirings 41. When only these light-emitting elements 23 are to be driven (simultaneous drive), only the first selection circuit 37 of the first to third selection circuits 37 to 39 is turned on, and only the drive circuit E for these cathode wirings 41 is turned on. As a result, charge is accumulated only in the first capacitor 34 of the first to third capacitors 34 to 36, and only the nine light-emitting elements 23 electrically connected to these cathode wirings 41 are to be driven. As a result, current flows only through the light-emitting elements 23 indicated by symbols P2 to P4, and only these light-emitting elements 23 emit light.

[0095] The light source unit 2 of this embodiment may include the first to third capacitors 34 to 36 only near one, two, or three of the four sides of the square. However, in this case, it is desirable that the first to third capacitors 34 to 36 are also arranged symmetrically or nearly symmetrically with respect to the center of the square. Therefore, it is desirable that the light source unit 2 of this embodiment include the first to third capacitors 34 to 36 on two or more of the four sides of the square. For example, by arranging two sets of the first to third capacitors 34 to 36 near the top and bottom sides of the square, it is possible to achieve an arrangement with two-fold rotational symmetry (180-degree rotational symmetry).

[0096] FIG. 6 is a graph for explaining the performance of the light source unit 2 of the first embodiment.

[0097] The vertical axis of Fig. 6 represents the LDD output current (the output current from the LDD substrate 12 to each light-emitting element 23), and the horizontal axis of Fig. 6 represents time. Fig. 6 shows the waveform of the LDD output current. Fig. 6 also shows the peak value Ipeak of the LDD output current, the pulse width W of the LDD output current, and the half-value width W' of the LDD output current.

[0098] It is desirable to increase the peak value Ipeak and shorten the pulse width W (or half-value width W') to improve the performance of the distance measuring device 1. According to this embodiment, it is possible to increase the peak value Ipeak and shorten the pulse width W (or half-value width W') by reducing the impedance of each wiring or the difference in impedance between wirings.

[0099] 7A and 7B are cross-sectional and plan views showing the structure of the light source unit 2 of the first embodiment. Fig. 7A shows the XZ cross section of the light source unit 2. Fig. 7B shows the planar structure of the light source unit 2 shown in Fig. 7A.

[0100] The light source unit 2 of this embodiment may have the structure shown in Figures 7A and 7B. In Figures 7A and 7B, the light source unit 2 of this embodiment includes a VCSEL chip 11, an LDD substrate 12, a mounting substrate 13, and four sets of first to third capacitors 34 to 36.

[0101] The mounting substrate 13 includes an insulating substrate 51, an insulating film 52, a wiring layer 53, an insulating film 54, a wiring layer 55, and a plurality of wirings 56. The LDD substrate 12 shown in FIG. 7A is provided within the insulating substrate 51. The insulating film 52 and the wiring layer 53 are formed in this order on the upper surface of the insulating substrate 51. The insulating film 54 and the wiring layer 55 are formed in this order on the lower surface of the insulating substrate 51. The VCSEL chip 11 shown in FIG. 7A is provided on the wiring layer 53. Each wiring 56 is formed within the insulating substrate 51, the insulating film 52, and the wiring layer 53, and electrically connects the VCSEL chip 11 and the LDD substrate 12.

[0102] Each of the first to third capacitors 34 to 36 is disposed on the wiring layer 53 via a plurality of solder balls 57, and is electrically connected to the VCSEL chip 11 and the LDD substrate 12 via these solder balls 57 and the wiring layer 53.

[0103] In FIG. 7B, the VCSEL chip 11 and LDD substrate 12 have a square shape in plan view. The light source unit 2 of the light-emitting device 1a shown in FIG. 7B includes four sets of first to third capacitors 34 to 36 near the four sides of the square planar shape of the VCSEL chip 11. These first to third capacitors 34 to 36 are arranged symmetrically with respect to the center of the square. Note that the light source unit 2 of the light-emitting device 1a shown in FIG. 7B may include the first to third capacitors 34 to 36 only near one, two, or three of the four sides of the square. However, in this case, it is desirable that the first to third capacitors 34 to 36 are also arranged symmetrically or nearly symmetrically with respect to the center of the square. Therefore, it is desirable that the light source unit 2 of the light-emitting device 1a shown in FIG. 7B include the first to third capacitors 34 to 36 on two or more of the four sides of the square.

[0104] 7A and 7B, the plurality of light-emitting elements 23, the plurality of transistors 24, and the first to third selection circuits 37 to 39 (FIG. 5) are provided, for example, in the VCSEL chip 11 or the LDD substrate 12. For example, the light-emitting element 23 is provided in the VCSEL chip 11, similar to the light-emitting element 23 shown in FIG. 4B. Meanwhile, the transistor 24 and the first to third selection circuits 37 to 39 may be provided in the VCSEL chip 11 or in the LDD substrate 12. The first to third capacitors 34 to 36 may be disposed on the VCSEL chip 11 or the LDD substrate 12.

[0105] FIG. 8 is a perspective view schematically showing the structure of the light source unit 2 of the first embodiment.

[0106] Fig. 8 schematically shows the shapes of the VCSEL chip 11 and LDD substrate 12 shown in Fig. 7A and 7B. Fig. 8 also schematically and partially shows the first to third horizontal wirings 31a to 33a and the first to third vertical wirings 31b to 33b of the first to third anode wirings 31 to 33 described above, and a plurality of cathode wirings 41. As shown in Fig. 8, the first to third horizontal wirings 31a to 33a and the first to third vertical wirings 31b to 33b have a mesh-like structure.

[0107] Although the first to third anode wirings 31 to 33 and the cathode wiring 41 shown in FIG. 8 are depicted between the VCSEL chip 11 and the LDD substrate 12, they may be disposed within the VCSEL chip 11, within the LDD substrate 12, or between the VCSEL chip 11 and the LDD substrate 12.

[0108] Next, various modified examples of the light source unit 2 of this embodiment will be described with reference to Figures 9 to 18. The contents described with reference to Figures 1 to 8 also apply to these modified examples.

[0109] (3) Light Source Section 2 of First Modification FIG. 9 is a circuit diagram showing the structure of the light source section 2 of a first modification of the first embodiment.

[0110] The light source section 2 shown in Fig. 9 has the same structure as the light source section 2 shown in Fig. 5. Here, a method for driving the light emitting elements 23 indicated by the reference characters P1 to P6 will be described.

[0111] The light-emitting element 23 designated by symbol P1 is electrically connected to the first anode wiring 31 and the upper left cathode wiring 41. When only this light-emitting element 23 is to be driven (individual drive), only the first selection circuit 37 of the first to third selection circuits 37 to 39 is turned on, and only the drive circuit E for the upper left cathode wiring 41 is turned on. As a result, charge is accumulated only in the first capacitor 34 of the first to third capacitors 34 to 36, and only the three light-emitting elements 23 electrically connected to the upper left cathode wiring 41 are to be driven. As a result, current flows only through the light-emitting element 23 designated by symbol P1, and only this light-emitting element 23 emits light.

[0112] The light-emitting elements 23 indicated by symbols P2 to P4 are electrically connected to the first anode wiring 31 and are electrically connected to mutually different cathode wirings 41. When only these light-emitting elements 23 are to be driven (simultaneous drive), only the first selection circuit 37 of the first to third selection circuits 37 to 39 is turned on, and only the drive circuit E for these cathode wirings 41 is turned on. As a result, charge is accumulated only in the first capacitor 34 of the first to third capacitors 34 to 36, and only the nine light-emitting elements 23 electrically connected to these cathode wirings 41 are to be driven. As a result, current flows only through the light-emitting elements 23 indicated by symbols P2 to P4, and only these light-emitting elements 23 emit light.

[0113] The light-emitting elements 23 indicated by symbols P5 and P6 are electrically connected to the first and second anode wirings 31 and 32, respectively, and are also electrically connected to the same single cathode wiring 41. When only these light-emitting elements 23 are to be driven (simultaneous drive), only the first and second selection circuits 37 and 38 of the first to third selection circuits 37 to 39 are turned on, and only the drive circuit E for this cathode wiring 41 is turned on. As a result, charge is accumulated only in the first and second capacitors 34 and 35 of the first to third capacitors 34 to 36, and only the three light-emitting elements 23 electrically connected to this cathode wiring 41 are to be driven. As a result, current flows only through the light-emitting elements 23 indicated by symbols P5 and P6, and only these light-emitting elements 23 emit light.

[0114] The individual driving of the light-emitting element 23 indicated by reference symbol P1 can also be applied to the other 80 light-emitting elements 23. The same applies to the simultaneous driving of the light-emitting elements 23 indicated by reference symbols P2 to P6. Any number of light-emitting elements 23 may be simultaneously driven. The control of these individual driving and simultaneous driving is performed by, for example, the control unit 9 shown in FIG. 1.

[0115] (4) Light Source Section 2 of Second Modification FIG. 10 is a circuit diagram showing the structure of a light source section 2 of a second modification of the first embodiment.

[0116] The light source unit 2 of this modification includes first to third cathode wirings 31' to 33' in the positions of the first to third anode wirings 31 to 33 shown in FIG. 5 , multiple anode wirings 41' in the positions of the multiple cathode wirings 41, and no multiple gate wirings 42. Similarly to the first to third anode wirings 31 to 33, the first to third cathode wirings 31' to 33' each include first to third horizontal wirings 31a' to 33a' and first to third vertical wirings 31b' to 33b'. The first to third cathode wirings 31' to 33' are an example of first terminal wirings of the present disclosure. The anode wiring 41' is an example of second terminal wiring of the present disclosure.

[0117] Each light emitting element 23 of this modified example includes a cathode electrically connected to one of the first to third cathode wirings 31' to 33', and an anode electrically connected to one of the plurality of anode wirings 41'.

[0118] The light source unit 2 of this modified example further includes first to third transistors 61 to 63 at the positions of the first to third capacitors 34 to 36 shown in FIG. 5 . The first to third transistors 61 to 63 are, for example, N-type MOS transistors. The gates of the first to third transistors 61 to 63 are electrically connected to the first to third gate wirings 64 to 66, respectively. Each of the first to third transistors 61 to 63 has a drain electrically connected to one of the first to third cathode wirings 31′ to 33′ and a source electrically connected to a ground wiring. Each of the first to third transistors 61 to 63 forms a drive circuit E. The drive circuit E including the first to third transistors 61 to 63 is an example of the first to Mth drive circuits, respectively.

[0119] The light source unit 2 of this modified example further includes a plurality of capacitors 67 at the positions of the plurality of transistors 24 shown in Fig. 5. Each of these capacitors 67 has one electrode electrically connected to one of the plurality of anode wirings 41' and the other electrode electrically connected to a ground wiring.

[0120] The light source unit 2 of this modification further includes a plurality of selection circuits 68 instead of the first to third selection circuits 37 to 39. Each selection circuit 68 is electrically connected to a corresponding anode wiring 41′. Each selection circuit 68 includes a transistor 68a having a source electrically connected to a power supply wiring and a transistor 68b having a source electrically connected to a ground wiring. The drain of the transistor 68a and the drain of the transistor 68b are electrically connected to the cathode wiring 41. Each selection circuit 68 is electrically connected to a corresponding capacitor 67 via the anode wiring 41′. The transistor 68a is, for example, a P-type MOS transistor. The transistor 68b is, for example, an N-type MOS transistor. The transistor 68a is an example of a first switch of the present disclosure. The transistor 68b is an example of a second switch of the present disclosure.

[0121] The functions of the capacitor 67, the transistor 68a, and the transistor 68b are similar to those of the first to third capacitors 34 to 36, the transistors 37a to 39a, and the transistors 37b to 39b, respectively. The transistor 68a can store charge in the corresponding capacitor 67. The transistor 68b can discharge charge from the corresponding capacitor 67. The capacitor 67 can supply charge to the light-emitting element 23 via the anode wiring 41′, thereby causing a current to flow through the light-emitting element 23.

[0122] The functions of the first to third transistors 61 to 63 and their drive circuit E are similar to those of the transistor 34 and its drive circuit E. The first to third transistors 61 to 63 can drive the light-emitting elements 23 electrically connected to the first to third cathode wirings 31′ to 33′, respectively.

[0123] According to the light source section 2 of this modification, it is possible to realize the same control as that of the light source section 2 of the first embodiment, despite a structure different from that of the light source section 2 of the first embodiment.

[0124] (5) Light Source Section 2 of Third Modification FIG. 11 is a circuit diagram showing the structure of a light source section 2 of a third modification of the first embodiment.

[0125] The light source unit 2 of this modification includes first to third cathode wirings 31' to 33' at the positions of the first to third anode wirings 31 to 33 shown in FIG. 5 , a plurality of anode wirings 41' at the positions of the plurality of cathode wirings 41, and a plurality of gate wirings 42' at the positions of the plurality of gate wirings 42. Similarly to the first to third anode wirings 31 to 33, the first to third cathode wirings 31' to 33' each include first to third horizontal wirings 31a' to 33a' and first to third vertical wirings 31b' to 33b'. The first to third cathode wirings 31' to 33' are an example of first terminal wirings of the present disclosure. The anode wiring 41' is an example of second terminal wiring of the present disclosure.

[0126] Each light-emitting element 23 in this modification includes a cathode electrically connected to one of the first to third cathode wirings 31' to 33' and an anode electrically connected to one of the plurality of anode wirings 41'. Each transistor 24 in this modification includes a gate electrically connected to one of the plurality of gate wirings 42', a drain electrically connected to one of the plurality of anode wirings 41', and a source electrically connected to a power supply wiring. Each transistor 24 in this modification is, for example, a P-type MOS transistor. The first to third capacitors 34 to 36 and the first to third selection circuits 37 to 39 in this modification are electrically connected to the first to third cathode wirings 31' to 33', respectively.

[0127] According to the light source section 2 of this modification, it is possible to realize the same control as that of the light source section 2 of the first embodiment, despite a structure different from that of the light source section 2 of the first embodiment.

[0128] (6) Light Source Section 2 of Fourth Modification FIG. 12 is a circuit diagram showing the structure of a light source section 2 of a fourth modification of the first embodiment.

[0129] 5, the light source unit 2 includes six sets of first to third capacitors 34 to 36. The first to third capacitors 34 to 36 of this modification are disposed within the VCSEL chip 11 (or within the LDD substrate 12), and are therefore disposed near the light emitting element 23. In this modification, each first capacitor 34 is electrically connected to one of the horizontal wirings 31a, each second capacitor 35 is electrically connected to one of the horizontal wirings 32a, and each third capacitor 36 is electrically connected to one of the horizontal wirings 33a.

[0130] According to the light source section 2 of this modification, it is possible to realize the same control as that of the light source section 2 of the first embodiment, despite a structure different from that of the light source section 2 of the first embodiment.

[0131] (7) Light Source Section 2 of Fifth Modification FIG. 13 is a circuit diagram showing the structure of a light source section 2 of a fifth modification of the first embodiment.

[0132] The light source unit 2 of this modified example does not include the first to third capacitors 34 to 36. The light source unit 2 of this modified example stores the electric charge to be supplied to each light-emitting element 2 a in a parasitic capacitance, which will be described later, instead of the first to third capacitors 34 to 36.

[0133] FIG. 14 is another circuit diagram showing the structure of the light source unit 2 of the fifth modified example of the first embodiment.

[0134] FIG. 14 shows a pair of a light-emitting element 23 and a transistor 24 included in the light source unit 2 of this modified example. FIG. 14 further shows a parasitic capacitance 23' of the light-emitting element 23 and a parasitic capacitance 24' of the transistor 24. The light source unit 2 of this modified example stores charge to be supplied to each light-emitting element 2a in these parasitic capacitances 23', 24'. This allows current to flow through each light-emitting element 23, causing each light-emitting element 23 to emit light. The storage in the parasitic capacitances 23', 24' is controlled by first to third selection circuits 37 to 39.

[0135] According to the light source section 2 of this modification, it is possible to realize the same control as that of the light source section 2 of the first embodiment, despite a structure different from that of the light source section 2 of the first embodiment.

[0136] (8) Light Source Section 2 of Sixth Modification FIG. 15 is a circuit diagram showing various examples of the structure of the light source section 2 of a sixth modification of the first embodiment.

[0137] The light source unit 2 of this modified example has the same structure as the light source unit 2 of the first embodiment as shown in Fig. 5. However, while each drive circuit E of the first embodiment has the structure shown in A of Fig. 15, each drive circuit E of this modified example has the structure shown in any one of B to D of Fig. 15.

[0138] The drive circuit E shown in Fig. 15B includes three transistors 24 electrically connected to a cathode wiring 41 and three transistors 25 electrically connected to these transistors 24. The transistors 24 and 25 shown in Fig. 15B are, for example, N-type MOS transistors. The gates of these transistors 24 are electrically connected to a common gate wiring 42, and the gates of these transistors 25 are electrically connected to a common gate wiring 43. The transistors 24 and 25 are examples of the first and second transistors of the present disclosure, respectively.

[0139] Each transistor 24 is used to select a light-emitting element 23 that emits light. Each transistor 25 is used as a current source. For example, to generate light from a certain light-emitting element 23, a predetermined signal is applied to the gate wiring 42 of the drive circuit E for that light-emitting element 23, and a predetermined signal (DC bias voltage) is applied to the gate wiring 43 of the drive circuit E for that light-emitting element 23. This causes the source and drain of each transistor 24 in that drive circuit E to become conductive, and also causes the source and drain of each transistor 25 in that drive circuit E to become conductive, allowing current to flow through that light-emitting element 23. In this case, each transistor 25 functions as a current source.

[0140] The drive circuit E shown in Fig. 15C includes three transistors 24 electrically connected to a cathode wiring 41. The transistors 24 shown in Fig. 15C are, for example, NPN-type bipolar transistors. In this case, the wiring 42 is a "base wiring" rather than a "gate wiring." The operation of the drive circuit E shown in Fig. 15C is similar to that of the drive circuit E shown in Fig. 15A.

[0141] The drive circuit E shown in Fig. 15D includes three transistors 24 electrically connected to a cathode wiring 41 and three transistors 25 electrically connected to these transistors 24. The transistors 24 and 25 shown in Fig. 15D are, for example, NPN-type bipolar transistors. In this case, the wirings 42 and 43 are "base wirings" rather than "gate wirings." The operation of the drive circuit E shown in Fig. 15D is similar to that of the drive circuit E shown in Fig. 15B.

[0142] According to the light source section 2 of this modification, it is possible to realize the same control as that of the light source section 2 of the first embodiment, despite a structure different from that of the light source section 2 of the first embodiment.

[0143] (9) Light Source Section 2 of Seventh Modification FIG. 16 is a circuit diagram showing the structure of a light source section 2 of a seventh modification of the first embodiment.

[0144] 5, the light source unit 2 of this modified example includes first to third voltage detection circuits 71 to 73. The first voltage detection circuit 71 is electrically connected to the first horizontal wiring 31a of the first anode wiring 31 and the gate of the transistor 37a. The second voltage detection circuit 72 is electrically connected to the second horizontal wiring 32a of the second anode wiring 32 and the gate of the transistor 38a. The third voltage detection circuit 73 is electrically connected to the third horizontal wiring 33a of the third anode wiring 33 and the gate of the transistor 39a.

[0145] The first voltage detection circuit 71 detects the voltage of the first anode wiring 31 from the first horizontal wiring 31a of the first anode wiring 31. This voltage indicates the amount of charge stored in the four first capacitors 34. Therefore, the first voltage detection circuit 71 controls the gate voltage of the transistor 37a based on the voltage detected from the first anode wiring 31. For example, if the detected voltage is lower than a predetermined voltage, the transistor 37a is turned on to start charge storage. On the other hand, if the detected voltage is higher than the predetermined voltage, the transistor 37a is turned off to end charge storage. According to this modification, the output power of the light-emitting element 2a can be changed by changing the value of this predetermined voltage. The value of this predetermined voltage is adjusted, for example, by the control unit 9 shown in FIG. 1.

[0146] Similarly, the second voltage detection circuit 72 detects the voltage of the second anode wiring 32 and controls the gate voltage of the transistor 38 a based on the detected voltage. The third voltage detection circuit 73 detects the voltage of the third anode wiring 33 and controls the gate voltage of the transistor 39 a based on the detected voltage.

[0147] FIG. 17 is a timing chart showing the operation of the light source unit 2 according to the seventh modification of the first embodiment.

[0148] Curves A1 and A2 represent the gate voltages of the anode-side PMOS, i.e., transistors 37a to 39a. Curve B represents the gate voltages of the anode-side NMOS, i.e., transistors 37b to 39b. Curve C represents the gate voltage of the cathode-side NMOS, i.e., transistor 24. Curves D1 and D2 represent the voltages (anode voltages) of the first to third anode wirings 31 to 32. Curves E1 and E2 represent the output currents (LDD output currents) from the LDD substrate 12 to each light-emitting element 23.

[0149] Curve A1 shows the case where the pulse width of the gate voltage of the transistors 37a to 39a is short, in which case the transistors 37a to 39a are turned off at a low anode voltage (curve D1), resulting in low-power emission (curve E1).

[0150] Curve A2 shows the case where the pulse width of the gate voltage of the transistors 37a to 39a is long, in which case the transistors 37a to 39a are turned off at a high anode voltage (curve D2), resulting in high-power emission (curve E2).

[0151] In this way, according to this modification, it is possible to freely change the output power of the light-emitting element 2a.

[0152] (10) Light Source Section 2 of Eighth Modification FIG. 18 is a cross-sectional view and a plan view showing the structure of a light source section 2 of an eighth modification of the first embodiment.

[0153] The light source unit 2 of this modified example has the structure shown in A and B of Fig. 18 instead of the structure shown in A and B of Fig. 7. Fig. 18A shows the XZ cross section of the light source unit 2 of this modified example. Fig. 18B shows the planar structure of the light source unit 2 shown in Fig. 18A.

[0154] In this modification, the LDD substrate 12 is disposed on the wiring layer 53 via a plurality of solder balls 58, and is electrically connected to the first to third capacitors 34 to 36 via these solder balls 58 and the wiring layer 53. Furthermore, the VCSEL chip 11 is mounted on the LDD substrate 12 via a plurality of bumps 59, and is electrically connected to the LDD substrate 12 via these bumps 59. These bumps 59 are formed of a metal such as gold (Au). The rest of the structure of the light source unit 2 in this modification is similar to the structure shown in FIGS. 7A and 7B.

[0155] According to the light source section 2 of this modification, it is possible to realize the same control as that of the light source section 2 of the first embodiment, despite a structure different from that of the light source section 2 of the first embodiment.

[0156] As described above, the light source unit 2 of this embodiment includes the first to third anode wirings 31 to 33 arranged in a mesh pattern, and the first to third capacitors 34 to 36 electrically connected to the first to third anode wirings 31 to 33 so as to be arranged symmetrically. Therefore, this embodiment makes it possible to suppress the above-mentioned problems of impedance and impedance difference and improve the performance of the distance measuring device 1. Furthermore, this embodiment makes it possible to suppress problems related to the cathode wirings 41 by arranging the cathode wirings 41 for every three light-emitting elements 23. In this way, this embodiment makes it possible to optimize the structure of the wiring for the light-emitting elements 23.

[0157] (11) Micro-Scanning Micro-scanning will be described using Figures 21 to 24 with reference to Figures 1 and 2. Figure 21 is a diagram showing the irradiation position of the irradiation light La that has been minutely changed by the micro-scan unit 10. As described above, the micro-scan unit 10 rotates the optical element m4 by a minute angle around the two intersecting rotation axes r2 and r4 (see Figure 1) of the optical element m4 in accordance with the synchronization signal F_SYNC supplied from the control unit 9.

[0158] As shown in FIG. 21 , first, frame SS1 is illuminated via optical element m4. Next, the minute scanning unit 10 slightly rotates the mirror surface of optical element m4, for example, horizontally, around the rotation axis r4, to illuminate irradiation frame SS2. Next, the minute scanning unit 10 slightly rotates the mirror surface of optical element m4, for example, vertically, around the rotation axis r2, to illuminate irradiation frame SS3. Next, the minute scanning unit 10 slightly rotates the mirror surface of optical element m4, for example, horizontally, around the rotation axis r4, to illuminate irradiation frame SS4. In other words, frames SS1 to SS4 correspond to the positions of the light-emitting elements 2a of the light-emitting unit 11 projected onto the mirror surface of optical element m4.

[0159] Fig. 22 is a diagram schematically showing an example of the arrangement of the light-emitting elements 2a of the light-emitting unit 11. In Fig. 23, the positions of the light-emitting elements 2a are indicated by A1 to G7. In this way, the light-emitting elements 2a are arranged in a matrix. Note that, although an example of 7 x 7 light-emitting elements 2a will be described, the present invention is not limited to this.

[0160] Fig. 23 is a timing chart showing an example of irradiation control at the irradiation position shown in Fig. 21. The horizontal axis represents time. From the top, the chart shows the control signal F_SYNC sent to the minute scanning unit 10 from the control unit 9, the selection signal S_SYNC for the light-emitting element 2a, and the light-emitting timing signal TRIG_O.

[0161] The minute scanning unit 10 minutely rotates the mirror surface of the optical element m4 around two rotation axes r2 and r4 (see FIG. 1) in accordance with the control signal F_SYNC. That is, the minute scanning unit 10 controls the orientation of the mirror surface of the optical element m4 to the irradiation positions of the frames SS1 to SS4 in accordance with the control signal F_SYNC.

[0162] The driving unit 3 (see FIG. 2) of the light source unit 2 selects the light-emitting element 2a to emit light in accordance with the selection signal S_SYNC. Then, the driving unit 3 (see FIG. 2) of the light source unit 2 causes the light-emitting element 2a selected by the selection signal S_SYNC to emit light in accordance with the light emission timing signal TRIG_O.

[0163] As shown in Figure 23, first, during the period when the control signal F_SYNC is at a high level Ss1, the minute scanning unit 10 controls the mirror surface of optical element m4 to be oriented in a direction corresponding to frame SS1. That is, during the period when the control signal F_SYNC is at a high level Ss1, the mirror surface of optical element m4 is fixed in a direction corresponding to frame SS1. During this period when the control signal F_SYNC is at a high level Ss1, the selection signal S_SYNC is sequentially changed to high level signals SA1 to SG7. For example, during the period when the signal SA1 is at a high level, light-emitting element A1 is selected, and during the period when the signal SG7 is at a high level, light-emitting element G7 is selected.

[0164] The driver 3 (see FIG. 2) of the light source unit 2 causes the light-emitting element 2a selected by the selection signal S_SYNC to emit light in accordance with the light-emission timing signal TRIG_O. The distance measurement unit 9a generates a distance value in accordance with the selection signal S_SYNC. That is, the light-receiving unit 7 is selected according to the selected light-emitting element, and the six emissions of the selected light-emitting element are integrated to generate a distance value for the position of each light-receiving unit 7.

[0165] Next, during the period when the control signal F_SYNC is at high level Ss2, the minute scanning unit 10 controls the mirror surface of the optical element m4 to orient it in a direction corresponding to the frame SS2. During this period when the control signal F_SYNC is at high level Ss2, the selection signal S_SYNC is sequentially changed to high level signals SA1 to SG7. The driving unit 3 (see FIG. 2) of the light source unit 2 causes the light-emitting element 2a selected by the selection signal S_SYNC to emit light in accordance with the light emission timing signal TRIG_O. This process is repeated with the high level signals Ss3 and Ss4 (not shown) of the control signal F_SYNC.

[0166] By this control, first, the position of the irradiated light La in frame SS1 (see FIG. 21) is changed in sequence to A1 to G7, and six discrete irradiations are performed at each irradiation position. Next, the position of the irradiated light La in frame SS2 (see FIG. 21) is changed in sequence to A1 to G7, and six discrete irradiations are performed at each irradiation position. Next, the position of the irradiated light La in frame SS3 (see FIG. 21) is changed in sequence to A1 to G7, and six discrete irradiations are performed at each irradiation position. Next, the position of the irradiated light La in frame SS4 (see FIG. 21) is changed in sequence to A1 to G7, and six discrete irradiations are performed at each irradiation position.

[0167] 24 is a diagram showing an example of four irradiation positions of irradiation light La. The diagram shows irradiation point Lss1 due to irradiation of frame SS1, irradiation point Lss2 due to irradiation of frame SS2, irradiation point Lss3 due to irradiation of frame SS3, and irradiation point Lss4 due to irradiation of frame SS4. By performing microscanning, irradiation points Lss2, Lss3, and Lss4 are added in addition to irradiation point Lss1. In other words, irradiation points Lss2, Lss3, and Lss4 are irradiated between the irradiation points when microscanning is not performed.

[0168] In this manner, the control unit 9 controls the minute scanning unit 10 to minutely rotate the mirror surface of the optical element m4 around the two rotation axes r2 and r4 (see FIG. 1) in a predetermined order. As a result, the control unit 9 controls the light source unit 2 to irradiate frame SS1 in the first frame, then frames SS2 and SS3, and finally frame SS4. The control unit 9 then controls the minute scanning unit 10 to return to the irradiation position of frame SS1 and the light source unit 2 to irradiate the first frame. As a result, for example, by irradiating frames SS1 to SS4, the irradiation position on the measurement target can be increased, enabling high-resolution distance measurement. Note that, although an example of four frames is described in this embodiment, this is not limiting. For example, 8, 16, or 32 frames may also be used.

[0169] (Column-Directional Scanning) In FIG. 23, the light-emitting elements 2a are sequentially illuminated, but this is not limiting. For example, during the period when the high-level signal Ss1 of the control signal F_SYNC is active, the column-direction light-emitting elements A1 to G1 may be illuminated simultaneously, then the column-direction light-emitting elements A2 to G2 may be illuminated simultaneously, then the column-direction light-emitting elements A3 to G3 may be illuminated simultaneously, then the column-direction light-emitting elements A4 to G4 may be illuminated simultaneously, then the column-direction light-emitting elements A5 to G5 may be illuminated simultaneously, then the column-direction light-emitting elements A6 to G6 may be illuminated simultaneously, and then the column-direction light-emitting elements A7 to G7 may be illuminated simultaneously. In this case, the light-emission timing can be controlled according to the light-emission timing signal TRIG_O. This process can also be repeated with the high-level signals Ss2, Ss3, and Ss4 of the control signal F_SYNC. In other words, this control allows the measurement light La to be minutely scanned in the column direction. In this case, too, minutely scanned illumination by the frames SS1 to SS4 increases the number of illumination positions and improves the resolution of the measurement values.

[0170] (Row-Direction Scanning) For example, during the period when the high-level signal Ss1 of the control signal F_SYNC is active, the row-direction light-emitting elements A1 to A7 may be simultaneously illuminated, then the row-direction light-emitting elements B1 to B7 may be simultaneously illuminated, then the row-direction light-emitting elements C1 to C7 may be simultaneously illuminated, then the row-direction light-emitting elements D1 to D7 may be simultaneously illuminated, then the row-direction light-emitting elements A1 to A7 may be simultaneously illuminated, then the column-direction light-emitting elements A6 to G46 may be simultaneously illuminated, and then the row-direction light-emitting elements E1 to E7 may be simultaneously illuminated. In this case, the light emission timing can be controlled according to the light emission timing signal TRIG_O. This process can also be repeated with the high-level signals Ss2, Ss3, and Ss4 of the control signal F_SYNC. In other words, this control allows for fine scanning of the measurement light La in the row direction. In this case, the fine scanning irradiation by the frames SS1 to SS4 increases the number of irradiation positions and improves the resolution of the measurement value.

[0171] As described above, according to this embodiment, the minute scanning unit 10 rotates the mirror surface of the optical element m4 minutely around two rotation axes r2 and r4 (see FIG. 1 ) in a predetermined order, causing the light source unit 2 to emit light to four reflective surfaces. This increases the number of measurement points within the same area of ​​the measurement target S, thereby increasing the resolution of the measurement values. In this case, the light source unit 2 includes first to third anode wirings 31 to 33 arranged in a mesh pattern and first to third capacitors 34 to 36 electrically connected to the first to third anode wirings 31 to 33 so as to be symmetrically arranged. Therefore, according to this embodiment, it is possible to increase the resolution of the measurement values ​​while suppressing the above-mentioned problems of impedance and impedance difference. Furthermore, according to this embodiment, by arranging a cathode wiring 41 for every three light-emitting elements 23, it is possible to increase the resolution of the measurement values ​​while suppressing problems related to the cathode wiring 41.

[0172] Second Embodiment A light-emitting device 1b according to a second embodiment differs from the light-emitting device 1a according to the first embodiment in that minute scanning is controlled by position driving of a collimator lens. The differences from the light-emitting device 1a according to the first embodiment will be described below.

[0173] 25 is a diagram showing an example of the overall structure of a distance measurement module in a distance measuring device 1 according to the second embodiment. The distance measuring device 1 according to the second embodiment differs from the distance measuring device 1 according to the first embodiment in the configurations of the light-emitting side optical system that irradiates the subject S with light emitted from the light source unit 2 and the light-receiving side optical system that causes reflected light to enter the light-receiving unit 7. The distance measuring device 1 includes an actuator 170, a collimating lens 180, and a lens unit 212. That is, the light-emitting device 1b according to the second embodiment differs from the light-emitting device 1a according to the first embodiment in that it includes the actuator 170 and the collimating lens 180.

[0174] The measurement light La from the light source unit 2 is supplied toward the collimator lens 180. The collimator lens 180 converts the measurement light La into light with a predetermined illumination angle. That is, the measurement light L is irradiated onto the measurement target S at the predetermined illumination angle. The collimator lens 180 according to this embodiment corresponds to the optical system.

[0175] The actuator 170 is a mechanism for vibrating the optical axis of the collimator lens 180 relative to the light source unit 2, and may be, for example, one that uses a magnetic circuit or a piezoelectric element. Alternatively, the irradiation position of the measurement light La may be minutely changed using a voice coil motor, a piezoelectric element, a shape memory alloy, a liquid crystal, or the like. Since the actuator 170 vibrates the collimator lens 180, the irradiation position of the measurement light La can be changed more quickly. The actuator 170 according to this embodiment corresponds to a first driving unit.

[0176] 26 is a diagram showing an example of a frame in which the irradiation position has been changed by the actuator 170. The actuator 170 controls the position of the collimator lens 180 in accordance with a control signal F_SYNC from the control unit 9.

[0177] 26 , first, the light source unit 2 irradiates frame SS1 via the collimator lens 180. Next, the actuator 170 slightly moves the position of the optical axis of the collimator lens 180, for example, in the vertical direction relative to the light source unit 2, to irradiate irradiation frame SS4. Next, the actuator 170 slightly moves the position of the optical axis of the collimator lens 180, for example, in the horizontal direction relative to the light source unit 2, to irradiate irradiation frame SS3. Next, the actuator 170 slightly moves the position of the optical axis of the collimator lens 180, for example, in the vertical direction relative to the light source unit 2, to irradiate irradiation frame SS2.

[0178] In this way, for example, by irradiating frames SS1 to SS4, the irradiation position on the measurement object can be increased, allowing for high-resolution distance measurement. Although the present embodiment will be described using an example of four frames, this is not limiting. For example, eight, sixteen, or thirty-two frames may also be used. Furthermore, since the actuator 170 vibrates the collimator lens 180, the irradiation position of the measurement light La can be changed more quickly.

[0179] As described above, according to this embodiment, the actuator 170 causes the light source unit 2 to emit light to four positions obtained by slightly moving the position of the collimator lens 180 in a predetermined order. This increases the number of measurement points for the same area of ​​the measurement target S, thereby increasing the resolution of the measurement value. Furthermore, according to this embodiment, it is possible to increase the resolution of the measurement value while suppressing the above-mentioned problems of impedance and impedance difference. Furthermore, according to this embodiment, by arranging the cathode wiring 41 for every three light-emitting elements 23, it is possible to increase the resolution of the measurement value while suppressing problems related to the cathode wiring 41.

[0180] Third Embodiment A light emitting device 1c according to a third embodiment differs from the light emitting device 1a according to the first embodiment in that it further includes a microlens array 31. The differences from the light emitting device 1a according to the first embodiment will be described below.

[0181] FIG. 27 is a diagram showing an example of the configuration of the light source unit 2 in the light-emitting device 1c according to the third embodiment. An example of the configuration of the light source unit 2 according to the third embodiment will be described with reference to FIG. 27 . As shown in FIG. 27 , the light-emitting unit 110 of the light source unit 2 is a back-emitting VCSEL. For example, a light-emitting element unit 120 is formed on the first main surface 150A side of the substrate 150 of the light-emitting element 110. The light beam LB from the light-emitting element unit 120 is emitted from the second main surface 150B side opposite the first main surface 150A. While five light-emitting element units 120 are shown in FIG. 27 , any number of light-emitting element units 120 may be used. The light-emitting unit 110 according to this embodiment corresponds to the light-emitting unit 11 (see FIGS. 2 and 25 ). The light-emitting element unit 120 is, for example, a VCSEL emitter, and corresponds to the portion that emits laser light. These light-emitting element units 120 are an example of the light-emitting element 2a described above.

[0182] A microlens array 31 is formed on the second main surface 150B side. The microlens array 31 is integrally formed on the substrate 150 as an on-chip lens. The microlens array 31 focuses the light beam LB emitted from the light-emitting element section 120 at a position VP. The collimator lens 130 focuses the light beam LB, which diverges after being focused by the microlens array 31, at a focal point, and then diverges the light beam, which is then irradiated onto an irradiation target as irradiation light La. Note that the collimator lens 130 according to this embodiment corresponds to the optical system (the irradiation-side optical system 5 in FIG. 1 and the collimator lens 180 in FIG. 25). In other words, the collimator lens 130 can be minutely vibrated relative to the substrate 150. Alternatively, the irradiation light La can be minutely vibrated relative to the substrate 150 via the optical element m4.

[0183] The microlens array 31 can reduce the magnification (lateral magnification) of the image formed by the light beam LB. This allows the light density of the light beam LB to be increased when irradiating the target object beyond the collimator lens 130. Although the spacing between the light beams LB increases, this can be compensated for by micro-scanning. Therefore, according to this embodiment, it is possible to simultaneously achieve a wide ranging range and high resolution while suppressing the problems of impedance and impedance difference described above.

[0184] (Fourth embodiment) The light emitting device 1d according to the fourth embodiment differs from the light emitting device 1a according to the first embodiment in that the irradiation density of the measurement light La can be changed according to the characteristics of the measurement area. The differences from the light emitting device 1a according to the first embodiment will be described below.

[0185] 28 is a block diagram showing an example of the configuration of a distance measuring device 1 according to the fourth embodiment. The distance measuring device 1 according to this embodiment further includes an imaging unit 500, and the light emitting device 1d further includes a recognition unit 600.

[0186] The imaging unit 500 is, for example, a camera that uses visible light, and is capable of capturing two-dimensional digital images under the control of the control unit 9. The recognition unit 600 performs recognition processing on the digital images captured by the imaging unit 500. The recognition unit 600 can also perform recognition processing based on a distance image supplied from the distance measurement unit 9 a. The recognition unit 600 performs object recognition, for example, on a pixel-by-pixel basis, and outputs the recognition result to the control unit 9 as a recognition signal having information associated with the irradiation density and irradiation intensity for each recognized object. At this time, the recognition signal includes coordinate information of the object recognized in the image.

[0187] The control unit 9 controls the light source unit 2 and the minute scanning unit 10 based on a recognition signal including information on irradiation density, irradiation intensity, coordinates, and frame rate supplied from the recognition unit 600. It is also possible to recognize the characteristics of the measurement area and information on the target object based on information from the signal processing unit 8 or the distance measuring unit 9a without providing the photographing unit 500.

[0188] 29 is a diagram schematically illustrating the recognition results of the recognition unit 600. This shows the object recognition results of the recognition unit 600. For each of the pedestrians H1 to H4, vehicles C1 to C4, white lines L1 and L2, traffic light T1, and sign M1, a coordinate position and an identification name (e.g., person, vehicle, white line, traffic light, sign, etc.) are set at, for example, the center of gravity of the pixel region constituting the object. Furthermore, the recognition unit 600 divides the region into a sky region (sky), a long-distance region (fl), a short-distance region (nl), etc., using distance information from a preliminary measurement by the distance measuring device 1 (e.g., a measurement in which the number of light-emitting elements 2a in the light-emitting unit 11 is reduced).

[0189] Based on this information, the recognition unit 600 generates information on the illumination density, illumination intensity, and coordinates for the illumination range of the distance measuring device 1. More specifically, since traffic lights T1 and signs M1 are highly reflective areas, a signal is generated to reduce the emission intensity of the light-emitting elements 2a in the light-emitting unit 11. For sky areas (sky), a signal is generated to reduce the number of minute scans and to reduce the frame rate. In addition, a recognition signal may be generated to reduce the number of light-emitting points or to not emit light.

[0190] For the traveling direction region a10 of the long distance region (fl), signals are generated to increase the number of minute scans, increase the frame rate, increase the number of light emissions, and increase the resolution. On the other hand, for the traveling direction region a10 of the long distance region (fl), signals are generated to decrease the number of minute scans, decrease the frame rate, decrease the number of light emissions, and decrease the resolution. Also, for the short distance region (nl), recognition signals are generated to increase the number of minute scans, increase the frame rate, decrease the number of light emissions, and decrease the light emission intensity.

[0191] 30 is a diagram schematically illustrating an example of a signal generated by the recognition unit 600. FIG. 30 is a diagram schematically illustrating the irradiation density of the measurement light La in an example of a recognition signal from the recognition unit 600. In this way, by changing the irradiation density, irradiation intensity, and frame rate according to the need for monitoring, it is possible to shorten the measurement time and suppress power consumption, etc. Therefore, according to this embodiment, it is possible to change the irradiation density, irradiation intensity, and frame rate according to the need for monitoring while suppressing the above-mentioned problems of impedance and impedance difference, and it is also possible to increase the resolution of the measurement value.

[0192] Fifth Embodiment The distance measuring device 1 according to the fifth embodiment differs from the distance measuring device 1 according to the first embodiment in that it is further capable of executing processing to increase the resolution in the light receiving unit 7. The differences from the distance measuring device 1 according to the first embodiment will be described below.

[0193] Fig. 31 is a diagram illustrating in more detail an example configuration of a pixel array section 100 in a light receiving section 7 according to the fifth embodiment. In Fig. 31, the pixel array section 100 includes a total of (x x y) pixel circuits g10 arranged in x columns in the horizontal direction and y rows in the vertical direction. Note that in Fig. 31 and similar figures thereafter, the pixel circuits g10 are represented by light receiving elements 1000 included in the pixel circuits g10 and having rectangular light receiving surfaces. In other words, the pixel array section 100 includes a configuration in which the light receiving surfaces of the light receiving elements serving as pixel circuits g10 are arranged in a matrix.

[0194] Furthermore, in each embodiment, each pixel circuit g10 included in the pixel array unit 100 is controlled for each element g11, which includes three pixel circuits g10 in the horizontal direction and three pixel circuits g10 in the vertical direction, for a total of nine pixel circuits g10. For example, a signal EN_SPAD_H corresponding to the above-mentioned signal XEN_SPAD_H for controlling each pixel circuit g10 in the row direction (horizontal direction), i.e., in units of columns, is output from the control unit 9 as a 3-bit signal (shown as [2:0]) in units of elements g11 and supplied to the horizontal control unit 102a. That is, signals EN_SPAD_H[0], EN_SPAD_H[1], and EN_SPAD_H[2] for three pixel circuits g10 arranged consecutively in the horizontal direction are merged and transmitted by this single 3-bit signal.

[0195] 31 , signals EN_SPAD_H#0[2:0], EN_SPAD_H#1[2:0], ..., EN_SPAD_H#(x / 3)[2:0] are generated by the control unit 9 and supplied to the horizontal control unit 102a, starting from the leftmost element g11 of the pixel array unit 100. The horizontal control unit 102a controls each column of the corresponding element g11 in accordance with the 3-bit values ​​(indicated as [0], [1], and [2]) of each signal EN_SPAD_H#0[2:0], EN_SPAD_H#1[2:0], ..., EN_SPAD_H#(x / 3)[2:0].

[0196] Similarly, for example, a signal EN_SPAD_V corresponding to the above-mentioned signal XEN_SPAD_V for controlling each pixel circuit g10 in the column direction (vertical direction), i.e., in row units, is output from the control unit 9 as a 3-bit signal in units of element 11 and supplied to the vertical control unit 102b. That is, this single 3-bit signal merges and transmits the signals EN_SPAD_V[0], EN_SPAD_V[1], and EN_SPAD_V[2] for three pixel circuits g10 arranged consecutively in the vertical direction.

[0197] 31 , signals EN_SPAD_V#0[2:0], EN_SPAD_V#1[2:0], ..., EN_SPAD_V#(y / 3)[2:0] are generated by the control unit 9 and supplied to the vertical control unit 102b, starting from the element g11 at the bottom end of the pixel array unit 100. The vertical control unit 102b controls each row of the corresponding element g11 in accordance with the 3-bit values ​​of each of the signals EN_SPAD_V#0[2:0], EN_SPAD_V#1[2:0], ..., EN_SPAD_V#(y / 3)[2:0].

[0198] Although not shown, the signal EN_PR is output from the control unit 9 as a 3-bit signal in units of element g11, similar to the above-mentioned signal EN_SPAD_V, and is supplied to the vertical control unit 102b. The vertical control unit 102b controls each row of the corresponding element in accordance with the 3-bit value of each signal EN_PR.

[0199] 32 is a block diagram showing an example configuration of the distance measuring unit 9a. The distance measuring unit 9a has a generation unit 111 and a distance generation unit 112. The generation unit 111 generates a histogram for each pixel. The distance generation unit 112 generates distance information for each representative position in each pixel based on the generated histogram.

[0200] 33, 34, 35, and 36 are diagrams schematically showing a distance measuring method according to the fifth embodiment. Fig. 33 shows an example in which the row direction of the pixel array section 100 in the light receiving section 7 is divided into pixels 52a1, 52a2, 52a3, and 52a4, each of which includes i pixel circuits g10 in the column direction and j pixel circuits g10 in the row direction, for a total of (i x j) pixel circuits g10. In practice, the effective area within the pixel array section 100 is the target of processing.

[0201] For example, the control unit 9 specifies a scanning area including the pixels 52a1, 52a2, 52a, and 52a4 for the pixel array unit 100, and executes scanning on the specified scanning area.

[0202] For example, the control unit 9 sets, for example, the signals EN_SPAD_H and EN_SPAD_V according to the size and position of the scanning area (each of the pixels 52a1, 52a2, 52a3, and 52a4) to be specified, and passes the set signals EN_SPAD_H and EN_SPAD_V to the horizontal control unit 102a and the vertical control unit 102b, respectively.

[0203] In accordance with the received signal EN_SPAD_H, the horizontal control unit 102a generates a signal XEN_SPAD_H that specifies, on a column-by-column basis, the pixel circuit g10 included in the pixel to be read out of each of the pixels 52a1, 52a2, 52a3, and 52a4, and supplies the signal to each pixel circuit g10. Similarly, in accordance with the received signal EN_SPAD_V, the vertical control unit 102b generates a signal XEN_SPAD_V that specifies each pixel circuit g10 in the height direction (column direction) of the scanning area including each of the pixels 52a1, 52a2, 52a3, and 52a4, and supplies the signal to each pixel circuit g10.

[0204] Through this scanning, in distance measurement unit 9a, generation unit 111 generates a histogram for each of pixels 52a1, 52a2, 52a3, and 52a4. Based on the generated histogram, distance generation unit 112 obtains distance information for each of representative positions 53a1, 53a2, 53a3, and 53a4 in each of pixels 52a1, 52a2, 52a3, and 52a4. Each piece of obtained distance information is associated with position information indicating the position of each of representative positions 53a1 to 53a4, and is stored in, for example, a memory included in distance generation unit 112.

[0205] When the scanning of the scanning area by the pixels 52a1 to 52a4 is completed, the control unit 9 designates new pixels at positions obtained by shifting the positions of the pixels 52a1 to 52a4 in the row direction. That is, as shown in Fig. 34, the control unit 9 designates pixels 52b1, 52b2, 52b3, and 52b4 at positions obtained by shifting the positions of the pixels 52a1 to 52a4 by j / 2 pixel circuits g10 in the row direction (indicated by arrow A in the figure).

[0206] That is, each of the pixels 52b1, 52b2, 52b3, and 52b4 partially overlaps with the corresponding pixel 52a1, 52a2, 52a3, and 52a4 before the positions are shifted.

[0207] The control unit 9 then scans the new scanning area of ​​these pixels 52b1-52b4. Through this scanning, the generation unit 111 generates a histogram for each of the pixels 52b1-52b4, and the distance generation unit 112 acquires distance information for each of the representative positions 53b1-53b4 in each of the pixels 52b1-52b4 based on the generated histogram. Each of the representative positions 53b1-53b4 is shifted in position (phase) in the row direction by j / 2 pixel circuits g10 relative to each of the representative positions 53a1-53a4 described above. The distance information acquired for each of the representative positions 53b1-53b4 is associated with position information indicating the position of each of the representative positions 53b1-53b4 and stored, for example, in a memory included in the distance generation unit 112.

[0208] In the example of FIG. 34, the right half of the pixel 52b4 extends beyond the pixel array section 100, but this portion is not scanned.

[0209] 33 and 34 complete one scan in the row direction of the pixel array unit 100. Next, the control unit 9 specifies new pixels at positions obtained by shifting the positions of the original pixels 52a1, 52a2, 52a3, and 52a4 in the column direction. That is, as shown in FIG. 35, the control unit 9 specifies pixels 52c1, 52c2, 52c3, and 52c4 at positions obtained by shifting the positions of the pixels 52a1 to 52a4 by i / 2 pixel circuits g10 in the column direction (indicated by arrow B in the figure).

[0210] That is, each of the pixels 52c1, 52c2, 52c3, and 52c4 partially overlaps with the corresponding pixel 52a1, 52a2, 52a3, and 52a4 before the positions are shifted.

[0211] The control unit 9 performs scanning of the scanning area of ​​these pixels 52c1-52c4. Through this scanning, the generation unit 111 generates a histogram for each of the pixels 52c1-52c4, and the distance generation unit 112 acquires distance information for each of the representative positions 53c1-53c4 in each of the pixels 52c1-52c4 based on the generated histogram. Each of the representative positions 53c1-53c4 is shifted in position (phase) in the column direction by i / 2 pixel circuits g10 relative to each of the representative positions 53a1-53a4 described above. The distance information acquired for each of the representative positions 53c1-53c4 is associated with position information indicating the position of each of the representative positions 53c1-53c4 and stored, for example, in a memory included in the distance generation unit 112.

[0212] The control unit 9 uses the scanning area of ​​these pixels 52c1 to 52c4 as a new scanning area for the scanning area of ​​the pixels 52c1 to 52c4 that correspond in row position, and performs scanning on the scanning area shifted by j / 2 pixel circuits g10 in the row direction, as described using Figure 34, and further performs scanning on the scanning area shifted by i / 2 pixel circuits g10 in the column direction, as described using Figure 35 (not shown).

[0213] 36 shows examples of representative positions 53a1, 53a2, 53a3, and 53a4, representative positions 53b1, 53b2, 53b3, and 53b4, representative positions 53c1, 53c2, 53c3, and 53c4, and representative positions 53d1, 53d2, 53d3, and 53d4 when scanning is performed according to the above-mentioned Figures 33 to 35, and when scanning is performed on a scanning area that is further shifted in the row direction by j / 2 pixel circuits g10 from Figure 35. In this way, for example, each of representative positions 53a1 to 53b4 and 53c1 to 53d4 is spaced apart by j / 2 pixel circuits g10 in the row direction and is spaced apart by i / 2 pixel circuits g10 in the column direction. This corresponds to a scanning area whose column size corresponds to i pixel circuits g10 and whose row size corresponds to the width of the pixel array unit 100, and 16 representative positions 53a1 to 53d4 are included within this scanning area. This makes it possible to obtain distance information at high resolution using existing technology. In this way, the synergistic effect of increasing the number of measurement points on the light-emitting side makes it possible to obtain distance information at higher resolution.

[0214] Furthermore, in the fifth embodiment, each piece of distance information at each of the representative positions 53a1 to 53d4 is generated based on signals Vpls read out from each pixel circuit g10 included in a pixel of the same size as pixel 52a1, which includes (i × j) pixel circuits g10, as shown representatively by pixel 52a1 in Fig. 36. Therefore, each piece of distance information at each of the representative positions 53a1 to 53d4 is generated based on signals Vpls read out from four times the number of pixel circuits g10 compared to the example in Fig. 10B described above, making it possible to suppress the effects of noise and the like.

[0215] Although the light source unit 2 in the first to fifth embodiments is used as a light source for the distance measuring device 1, it may also be used in other aspects. For example, the light source unit 2 in these embodiments may be used as a light source for optical devices such as a printer, a projector, or eyewear, or may be used as a lighting device. Furthermore, although a VCSEL chip and a VCSEL emitter have been given as specific examples of the light-emitting unit 11 and the light-emitting element 23, the present invention is not limited to these, and other laser diodes, superluminescence diodes, and light-emitting diodes (LEDs) may also be used.

[0216] Although the embodiments of the present disclosure have been described above, these embodiments may be implemented with various modifications within the scope of the gist of the present disclosure. For example, two or more embodiments may be implemented in combination.

[0217] FIG. 37 shows a block diagram of an example of an Indirect-Time of Flight sensor to which the present technology is applied.

[0218] 37 shows a block diagram of an example of an indirect-time of flight sensor 10000 to which an embodiment of the present technology is applied. The indirect-time of flight sensor 10000 includes a sensor chip 10001 and a circuit chip 10002 stacked on the sensor chip 10001.

[0219] The pixel area 10020 includes a plurality of pixels arranged in an array in a two-dimensional grid pattern on the sensor chip. The pixel area 10020 may be arranged in rows and columns and may include a plurality of column signal lines. Each column signal line is connected to a respective pixel. Furthermore, a vertical drive circuit 10010, a column signal processing circuit 10040, a timing adjustment circuit 10050, and an output circuit 10060 are arranged on the circuit chip 10002.

[0220] The vertical drive circuit 10010 is configured to drive pixels and output pixel signals to a column signal processing unit 10040. The column signal processing unit 10040 performs analog-to-digital (AD) conversion processing on the pixel signals and outputs the AD-converted pixel signals to an output circuit. The output circuit 10060 performs CDS (Correlated Double Sampling) processing and the like on the data from the column signal processing circuit 10040 and outputs the data to a downstream signal processing circuit 10120.

[0221] The timing control circuit 10050 is configured to control the drive timing of each vertical drive circuit 10010. The column signal processing section and output circuit 10060 are synchronized with the vertical synchronization signal.

[0222] The pixel area 10020 has a plurality of pixels arranged in a two-dimensional grid pattern, and each pixel is configured to receive infrared light and perform photoelectric conversion to a pixel signal.

[0223] Furthermore, vertical signal lines VSL1 and VSL2 are wired in the vertical direction for each column of pixels 10230. If the total number of columns in the pixel region 10020 is M (M is an integer), then a total of 2×M vertical signal lines are wired. Each pixel has two taps. The vertical signal line VSL1 is connected to tap A of the pixel 10230, and the vertical signal line VSL2 is connected to tap B of the pixel 10230. Furthermore, the vertical signal line VSL1 transmits a pixel signal AIN Ｐ１ The vertical signal line VSL2 transmits the pixel signal AIN Ｐ２ Transmits.

[0224] The vertical drive circuit 210 sequentially selects and drives rows of the pixel blocks 221, and simultaneously outputs pixel signals AINP1 and AINP2 for each pixel block 221 in that row. In other words, the vertical drive circuit 210 simultaneously drives the 2kth and 2k+1th rows of the pixels 230. The vertical drive circuit 210 is an example of a drive circuit as defined in the claims.

[0225] 38 is a circuit diagram showing an example configuration of a pixel 10230 according to the embodiment of the present technology. This pixel 10230 includes a photodiode 10231, two transfer transistors 10232 and 10237, two reset transistors 10233 and 10238, two taps (floating diffusion layers 10234 and 10239), two amplification transistors 10235 and 10239, and two selection transistors 10236 and 10241.

[0226] The photodiode 10231 photoelectrically converts received light to generate an electric charge. The photodiode 10231 is disposed on the back side of the semiconductor substrate, with the surface on which the circuit is disposed being the front side. Such a solid-state imaging element is called a back-illuminated solid-state imaging element. Note that instead of the back-illuminated type, a front-illuminated type configuration in which the photodiode 10231 is disposed on the front side can also be used.

[0227] The transfer transistor 10232 sequentially transfers charges from the photodiode 10231 to the TAPA 10239 and the TAPB 10234 in accordance with a transfer signal TRG from the vertical drive circuit 10010. The TAPA 10239 and the TAPB 10234 store the transferred charges and generate a voltage according to the amount of the stored charges.

[0228] The overflow transistor 10242 is a transistor that sequentially discharges the charge of the photodiode 10231 to VDD, and has the function of resetting the photodiode.

[0229] The reset transistors 10233 and 10238 extract charge from the TAPA 10239 and TAPB 10234, respectively, in response to a reset signal RSTp from the vertical drive circuit 210, thereby initializing the charge amount. The amplification transistors 10235 and 10240 amplify the voltages of the TAPA 10239 and TAPB 10234, respectively. The selection transistors 10236 and 10241 output the amplified voltage signals as pixel signals to the column signal processing unit 10040 via two vertical signal lines (e.g., VSL1 and VSL2) in response to a selection signal SELp from the vertical drive circuit 210. VSL1 and VSL2 are connected to the inputs of one analog-to-digital converter XXX in the column signal processing circuit 10040.

[0230] The circuit configuration of the pixel 230 is not limited to the configuration exemplified in FIG. 37, as long as it is capable of generating a pixel signal by photoelectric conversion.

[0231] <<Application Examples>> The technology according to the present disclosure can be applied to various products. For example, the technology according to the present disclosure may be realized as a device mounted on any type of moving body, such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, personal mobility, an airplane, a drone, a ship, a robot, construction machinery, or agricultural machinery (tractor).

[0232] 39 is a block diagram showing a schematic configuration example of a vehicle control system 7000, which is an example of a mobile object control system to which the technology according to the present disclosure can be applied. The vehicle control system 7000 includes a plurality of electronic control units connected via a communication network 7010. In the example shown in FIG. 39 , the vehicle control system 7000 includes a drive system control unit 7100, a body system control unit 7200, a battery control unit 7300, an outside-vehicle information detection unit 7400, an inside-vehicle information detection unit 7500, and an integrated control unit 7600. The communication network 7010 connecting these multiple control units may be an in-vehicle communication network conforming to any standard, such as a Controller Area Network (CAN), a Local Interconnect Network (LIN), a Local Area Network (LAN), or FlexRay (registered trademark).

[0233] Each control unit includes a microcomputer that performs arithmetic processing according to various programs, a memory unit that stores the programs executed by the microcomputer or parameters used in various calculations, and a drive circuit that drives various controlled devices. Each control unit includes a network I / F for communicating with other control units via a communication network 7010, and a communication I / F for communicating with devices or sensors inside and outside the vehicle via wired or wireless communication. Figure 39 illustrates the functional configuration of the integrated control unit 7600, including a microcomputer 7610, a general-purpose communication I / F 7620, a dedicated communication I / F 7630, a positioning unit 7640, a beacon receiving unit 7650, an in-vehicle device I / F 7660, an audio / video output unit 7670, an in-vehicle network I / F 7680, and a memory unit 7690. The other control units also include a microcomputer, a communication I / F, a memory unit, and the like.

[0234] The drivetrain control unit 7100 controls the operation of devices related to the drivetrain of the vehicle according to various programs. For example, the drivetrain control unit 7100 functions as a control device for a drive force generating device for generating drive force for the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, and a braking device for generating braking force for the vehicle. The drivetrain control unit 7100 may also function as a control device for an ABS (Antilock Brake System) or an ESC (Electronic Stability Control), etc.

[0235] A vehicle state detection unit 7110 is connected to the drivetrain control unit 7100. The vehicle state detection unit 7110 includes at least one of a gyro sensor that detects the angular velocity of the axial rotational motion of the vehicle body, an acceleration sensor that detects the acceleration of the vehicle, or a sensor that detects the amount of operation of the accelerator pedal, the amount of operation of the brake pedal, the steering angle of the steering wheel, the engine rotation speed, the rotation speed of the wheels, etc. The drivetrain control unit 7100 performs arithmetic processing using signals input from the vehicle state detection unit 7110, and controls the internal combustion engine, the drive motor, the electric power steering device, the brake device, etc.

[0236] The body system control unit 7200 controls the operation of various devices equipped in the vehicle body according to various programs. For example, the body system control unit 7200 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as headlamps, backup lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves transmitted from a portable device that serves as a key or signals from various switches can be input to the body system control unit 7200. The body system control unit 7200 receives these radio waves or signals and controls the vehicle's door lock device, power window device, lamps, etc.

[0237] The battery control unit 7300 controls the secondary battery 7310, which is the power supply source for the drive motor, in accordance with various programs. For example, information such as battery temperature, battery output voltage, or remaining battery capacity is input to the battery control unit 7300 from a battery device equipped with the secondary battery 7310. The battery control unit 7300 performs arithmetic processing using these signals, and controls the temperature regulation of the secondary battery 7310 or a cooling device or the like equipped in the battery device.

[0238] The outside vehicle information detection unit 7400 detects information outside the vehicle equipped with the vehicle control system 7000. For example, at least one of an imaging unit 7410 and an outside vehicle information detection unit 7420 is connected to the outside vehicle information detection unit 7400. The imaging unit 7410 includes at least one of a ToF (Time Of Flight) camera, a stereo camera, a monocular camera, an infrared camera, and other cameras. The outside vehicle information detection unit 7420 includes at least one of an environmental sensor for detecting the current weather or climate, or a surrounding information detection sensor for detecting other vehicles, obstacles, pedestrians, etc. around the vehicle equipped with the vehicle control system 7000.

[0239] The environmental sensor may be, for example, at least one of a raindrop sensor that detects rain, a fog sensor that detects fog, a sunshine sensor that detects the degree of sunshine, and a snow sensor that detects snowfall. The surrounding information detection sensor may be at least one of an ultrasonic sensor, a radar device, and a LIDAR (Light Detection and Ranging, Laser Imaging Detection and Ranging) device. The imaging unit 7410 and the outside vehicle information detection unit 7420 may be provided as independent sensors or devices, or may be provided as a device in which multiple sensors or devices are integrated.

[0240] 40 shows an example of the installation positions of the imaging unit 7410 and the vehicle exterior information detection unit 7420. The imaging units 7910, 7912, 7914, 7916, and 7918 are provided, for example, at least one of the front nose, side mirrors, rear bumper, back door, and upper part of the windshield inside the vehicle cabin of the vehicle 7900. The imaging unit 7910 provided on the front nose and the imaging unit 7918 provided on the upper part of the windshield inside the vehicle cabin mainly acquire images of the front of the vehicle 7900. The imaging units 7912 and 7914 provided on the side mirrors mainly acquire images of the sides of the vehicle 7900. The imaging unit 7916 provided on the rear bumper or back door mainly acquires images of the rear of the vehicle 7900. The imaging unit 7918 provided on the upper part of the windshield inside the vehicle cabin is mainly used to detect leading vehicles, pedestrians, obstacles, traffic lights, traffic signs, lanes, etc.

[0241] 40 shows an example of the imaging ranges of the imaging units 7910, 7912, 7914, and 7916. Imaging range a indicates the imaging range of the imaging unit 7910 provided on the front nose, imaging ranges b and c indicate the imaging ranges of the imaging units 7912 and 7914 provided on the side mirrors, respectively, and imaging range d indicates the imaging range of the imaging unit 7916 provided on the rear bumper or back door. For example, by overlaying the image data captured by the imaging units 7910, 7912, 7914, and 7916, a bird's-eye view image of the vehicle 7900 viewed from above can be obtained.

[0242] The outside vehicle information detection units 7920, 7922, 7924, 7926, 7928, and 7930 provided on the front, rear, sides, corners, and above the windshield inside the vehicle cabin of the vehicle 7900 may be, for example, ultrasonic sensors or radar devices. The outside vehicle information detection units 7920, 7926, and 7930 provided on the front nose, rear bumper, back door, and above the windshield inside the vehicle cabin of the vehicle 7900 may be, for example, LIDAR devices. These outside vehicle information detection units 7920 to 7930 are mainly used to detect preceding vehicles, pedestrians, obstacles, etc.

[0243] Returning to FIG. 39 , the explanation will be continued. The outside-vehicle information detection unit 7400 causes the imaging unit 7410 to capture an image outside the vehicle and receives the captured image data. The outside-vehicle information detection unit 7400 also receives detection information from the connected outside-vehicle information detection unit 7420. If the outside-vehicle information detection unit 7420 is an ultrasonic sensor, a radar device, or a LIDAR device, the outside-vehicle information detection unit 7400 emits ultrasonic waves or electromagnetic waves and receives information on the received reflected waves. Based on the received information, the outside-vehicle information detection unit 7400 may perform object detection processing or distance detection processing for people, vehicles, obstacles, signs, or text on the road surface. Based on the received information, the outside-vehicle information detection unit 7400 may also perform environmental recognition processing for recognizing rainfall, fog, road conditions, etc. Based on the received information, the outside-vehicle information detection unit 7400 may also calculate the distance to an object outside the vehicle.

[0244] The outside vehicle information detection unit 7400 may also perform image recognition processing or distance detection processing to recognize people, vehicles, obstacles, signs, or characters on the road surface based on the received image data. The outside vehicle information detection unit 7400 may perform processing such as distortion correction or alignment on the received image data, and may also generate an overhead image or a panoramic image by combining image data captured by different image capturing units 7410. The outside vehicle information detection unit 7400 may also perform viewpoint conversion processing using image data captured by different image capturing units 7410.

[0245] The interior information detection unit 7500 detects information inside the vehicle. A driver state detection unit 7510 that detects the driver's state is connected to the interior information detection unit 7500, for example. The driver state detection unit 7510 may include a camera that captures an image of the driver, a biosensor that detects the driver's biometric information, or a microphone that collects sound from within the vehicle cabin. The biosensor is provided, for example, on the seat or steering wheel, and detects the biometric information of a passenger sitting in the seat or the driver gripping the steering wheel. The interior information detection unit 7500 may calculate the driver's level of fatigue or concentration based on the detection information input from the driver state detection unit 7510, or may determine whether the driver is dozing off. The interior information detection unit 7500 may perform processing such as noise canceling on the collected audio signal.

[0246] The integrated control unit 7600 controls the overall operation of the vehicle control system 7000 in accordance with various programs. An input unit 7800 is connected to the integrated control unit 7600. The input unit 7800 is realized by a device that can be operated by a passenger, such as a touch panel, a button, a microphone, a switch, or a lever. Data obtained by voice recognition of voice input through a microphone may be input to the integrated control unit 7600. The input unit 7800 may be, for example, a remote control device using infrared or other radio waves, or an externally connected device such as a mobile phone or a personal digital assistant (PDA) that is compatible with the operation of the vehicle control system 7000. The input unit 7800 may be, for example, a camera, in which case the passenger can input information using gestures. Alternatively, data obtained by detecting the movement of a wearable device worn by the passenger may be input. Furthermore, the input unit 7800 may include, for example, an input control circuit that generates an input signal based on information input by a passenger or the like using the input unit 7800 and outputs the signal to the integrated control unit 7600. The passenger or the like operates the input unit 7800 to input various data to the vehicle control system 7000 and to instruct processing operations.

[0247] The storage unit 7690 may include a ROM (Read Only Memory) that stores various programs executed by the microcomputer, and a RAM (Random Access Memory) that stores various parameters, calculation results, sensor values, etc. The storage unit 7690 may also be realized by a magnetic storage device such as a HDD (Hard Disc Drive), a semiconductor storage device, an optical storage device, a magneto-optical storage device, or the like.

[0248] The general-purpose communication I / F 7620 is a general-purpose communication I / F that mediates communication with various devices present in the external environment 7750. The general-purpose communication I / F 7620 may implement a cellular communication protocol such as GSM (registered trademark) (Global System of Mobile communications), WiMAX (registered trademark), LTE (registered trademark) (Long Term Evolution), or LTE-A (LTE-Advanced), or other wireless communication protocols such as a wireless LAN (also referred to as Wi-Fi (registered trademark)) or Bluetooth (registered trademark). The general-purpose communication I / F 7620 may connect to a device (e.g., an application server or a control server) present on an external network (e.g., the Internet, a cloud network, or an operator-specific network) via, for example, a base station or an access point. In addition, the general-purpose communication I / F 7620 may connect to a terminal located near the vehicle (for example, a terminal of a driver, a pedestrian, or a store, or an MTC (Machine Type Communication) terminal) using, for example, P2P (Peer To Peer) technology.

[0249] The dedicated communication I / F 7630 is a communication I / F that supports a communication protocol designed for use in a vehicle. The dedicated communication I / F 7630 may implement a standard protocol such as WAVE (Wireless Access in Vehicle Environment), which is a combination of IEEE 802.11p at a lower layer and IEEE 1609 at an upper layer, DSRC (Dedicated Short Range Communications), or a cellular communication protocol. The dedicated communication I / F 7630 typically performs V2X communication, which is a concept including one or more of vehicle-to-vehicle communication, vehicle-to-infrastructure communication, vehicle-to-home communication, and vehicle-to-pedestrian communication.

[0250] The positioning unit 7640 performs positioning by receiving, for example, GNSS signals from GNSS (Global Navigation Satellite System) satellites (for example, GPS signals from GPS (Global Positioning System) satellites) and generates position information including the latitude, longitude, and altitude of the vehicle. Note that the positioning unit 7640 may identify the current position by exchanging signals with a wireless access point, or may obtain position information from a terminal such as a mobile phone, PHS, or smartphone that has a positioning function.

[0251] The beacon receiving unit 7650 receives, for example, radio waves or electromagnetic waves transmitted from radio stations or the like installed on the road, and acquires information such as the current location, congestion, road closures, required travel time, etc. The function of the beacon receiving unit 7650 may be included in the dedicated communication I / F 7630 described above.

[0252] The in-vehicle device I / F 7660 is a communication interface that mediates connections between the microcomputer 7610 and various in-vehicle devices 7760 present in the vehicle. The in-vehicle device I / F 7660 may establish wireless connections using wireless communication protocols such as wireless LAN, Bluetooth (registered trademark), NFC (Near Field Communication), or WUSB (Wireless USB). The in-vehicle device I / F 7660 may also establish a wired connection such as USB (Universal Serial Bus), HDMI (registered trademark) (High-Definition Multimedia Interface), or MHL (Mobile High-Definition Link) via a connection terminal (and a cable, if necessary) not shown. The in-vehicle device 7760 may include, for example, at least one of a mobile device or a wearable device owned by a passenger, or an information device carried into or attached to the vehicle. The in-vehicle device 7760 may also include a navigation device that searches for a route to an arbitrary destination. The in-vehicle device I / F 7660 exchanges control signals or data signals with these in-vehicle devices 7760.

[0253] The in-vehicle network I / F 7680 is an interface that mediates communication between the microcomputer 7610 and the communication network 7010. The in-vehicle network I / F 7680 transmits and receives signals in accordance with a predetermined protocol supported by the communication network 7010.

[0254] The microcomputer 7610 of the integrated control unit 7600 controls the vehicle control system 7000 in accordance with various programs based on information acquired via at least one of the general-purpose communication I / F 7620, the dedicated communication I / F 7630, the positioning unit 7640, the beacon receiving unit 7650, the in-vehicle device I / F 7660, and the in-vehicle network I / F 7680. For example, the microcomputer 7610 may calculate control target values ​​for the driving force generating device, the steering mechanism, or the braking device based on the acquired information inside and outside the vehicle, and output control commands to the drivetrain control unit 7100. For example, the microcomputer 7610 may perform cooperative control aimed at realizing functions of an ADAS (Advanced Driver Assistance System), including vehicle collision avoidance or impact mitigation, following driving based on the following distance, vehicle speed maintenance driving, vehicle collision warning, vehicle lane departure warning, etc. In addition, the microcomputer 7610 may perform cooperative control for the purpose of autonomous driving, in which the vehicle travels autonomously without relying on driver operation, by controlling a driving force generating device, a steering mechanism, a braking device, etc. based on information acquired about the vehicle's surroundings.

[0255] The microcomputer 7610 may generate three-dimensional distance information between the vehicle and objects such as surrounding structures and people, and create local map information including information about the vicinity of the vehicle's current location, based on information acquired via at least one of the general-purpose communication I / F 7620, the dedicated communication I / F 7630, the positioning unit 7640, the beacon receiving unit 7650, the in-vehicle device I / F 7660, and the in-vehicle network I / F 7680. Furthermore, the microcomputer 7610 may predict dangers, such as a vehicle collision, the approach of a pedestrian, or entry into a closed road, based on the acquired information, and generate a warning signal. The warning signal may be, for example, a signal for generating a warning sound or turning on a warning lamp.

[0256] The audio / video output unit 7670 transmits at least one of audio and visual output signals to an output device capable of visually or audibly notifying the vehicle occupants or the outside of the vehicle of information. In the example of FIG. 39 , an audio speaker 7710, a display unit 7720, and an instrument panel 7730 are illustrated as output devices. The display unit 7720 may include, for example, at least one of an on-board display and a head-up display. The display unit 7720 may have an AR (Augmented Reality) display function. The output device may be other devices besides these devices, such as headphones, a wearable device such as an eyeglass-type display worn by the occupant, a projector, or a lamp. When the output device is a display device, the display device visually displays results obtained by various processes performed by the microcomputer 7610 or information received from other control units in various formats, such as text, images, tables, and graphs. Furthermore, when the output device is an audio output device, the audio output device converts an audio signal consisting of reproduced voice data or acoustic data into an analog signal and outputs it audibly.

[0257] In the example shown in FIG. 39 , at least two control units connected via the communication network 7010 may be integrated into a single control unit. Alternatively, each control unit may be composed of multiple control units. Furthermore, the vehicle control system 7000 may include another control unit not shown. In the above description, some or all of the functions performed by one of the control units may be assigned to another control unit. In other words, as long as information is transmitted and received via the communication network 7010, predetermined arithmetic processing may be performed by one of the control units. Similarly, a sensor or device connected to one of the control units may be connected to another control unit, and multiple control units may transmit and receive detection information to each other via the communication network 7010.

[0258] A computer program for realizing each function of the distance measuring device 1 according to this embodiment described with reference to FIGS. 1 and 2 can be implemented in any control unit or the like. A computer-readable recording medium storing such a computer program can also be provided. Examples of the recording medium include a magnetic disk, an optical disk, a magneto-optical disk, and a flash memory. The computer program may also be distributed, for example, via a network without using a recording medium.

[0259] In the vehicle control system 7000 described above, the distance measuring device 1 according to this embodiment described using Figures 1 and 2 can be applied to the outside vehicle information detection unit 7420 of the application example shown in Figure 39.

[0260] The present disclosure may also be configured as follows.

[0261] a plurality of first terminal wirings electrically connected to the first terminals of the light-emitting elements; a plurality of second terminal wirings electrically connected to the second terminals of the light-emitting elements, each of the first terminal wirings being electrically connected to P (P is an integer of 2 or more) of the light-emitting elements; a plurality of selection circuits electrically connected to one of the plurality of first terminal wirings and the plurality of second terminal wirings, and selecting the light-emitting elements to be light-emitting; a plurality of drive circuits electrically connected to the other of the plurality of first terminal wirings and the plurality of second terminal wirings, and driving the plurality of light-emitting elements; an optical system that irradiates a plurality of irradiation positions with light emitted by the plurality of light-emitting elements; and a first drive unit that drives the optical system to change the plurality of irradiation positions.

[0262] (2) The light emitting device according to (1), wherein the optical system has a reflecting mirror, and the first driving unit rotates the reflecting mirror about a rotation axis.

[0263] (3) The light emitting device according to (2), wherein the first driving section rotates the light emitting device so as to irradiate light between the plurality of irradiation positions.

[0264] (4) The light emitting device according to (3), wherein the reflecting mirror has a plurality of rotation axes, and the first driving unit rotates the reflecting mirror so that the reflecting mirror periodically reciprocates around the plurality of rotation axes.

[0265] (5) The light emitting device according to (1), wherein the optical system includes a lens, and the first driving unit moves an optical axis of the lens relative to the plurality of light emitting elements.

[0266] (6) The light emitting device according to (5), wherein the first drive unit moves the optical axis of the lens so as to irradiate between the plurality of irradiation positions.

[0267] (7) The light emitting device according to (5), wherein the first drive unit periodically reciprocates the optical axis of the lens so as to irradiate areas between the plurality of irradiation positions.

[0268] (8) The light emitting device according to any one of (1) to (7), further comprising: a microlens array corresponding to each of the plurality of light emitting elements and configured to focus light emitted by the plurality of light emitting elements.

[0269] (9) The light-emitting device according to any one of (1) to (7), wherein the first driving unit is one of a voice coil motor, a piezoelectric element, a shape memory alloy, and a liquid crystal.

[0270] (10) The light emitting device according to any one of (1) to (8), further comprising a control unit that controls the selection circuit, the drive circuit, and the first drive unit.

[0271] (11) The light-emitting device described in (1), wherein the plurality of selection circuits include first to Pth selection circuits electrically connected to the first to Nth first wirings or the first to Mth second wirings, respectively, and the plurality of drive circuits are each electrically connected to one of the second terminal wirings.

[0272] (12) A light source unit that generates light and irradiates the light onto a subject, and a control unit, wherein the light source unit includes: a plurality of light-emitting elements that are arranged in a two-dimensional array and each have a first and a second terminal; M first wirings (M is an integer of 2 or more) extending in a first direction; and N second wirings (N is an integer of 2 or more) that extend in a second direction intersecting the first direction and are electrically connected to the M first wirings, respectively; a plurality of first terminal wirings that are electrically connected to the first terminals of the light-emitting elements; a plurality of second terminal wirings that are electrically connected to the second terminals of the light-emitting elements and each are electrically connected to P (P is an integer of 2 or more) of the light-emitting elements; a plurality of selection circuits that are electrically connected to one of the plurality of first terminal wirings and the plurality of second terminal wirings and select the light-emitting elements to be light-emitting; a plurality of drive circuits that are electrically connected to the other of the plurality of first terminal wirings and the plurality of second terminal wirings and drive the plurality of light-emitting elements; and an optical system that irradiates a plurality of irradiation positions with light emitted by the plurality of light-emitting elements. a first driving unit that drives the optical system and changes the plurality of irradiation positions, wherein the control unit controls the selection circuit, the driving circuit, and the first driving unit, wherein N is an integer that is the same as or different from M, and wherein P is an integer that is the same as or different from at least one of M and N.

[0273] (13) The distance measuring device according to (12), wherein the control unit is capable of changing a light irradiation method depending on an area to be measured.

[0274] (14) The distance measuring device according to (13), wherein the control unit changes the number of scans, which is the number of times irradiation is performed between the plurality of irradiation positions, depending on the area to be measured.

[0275] (15) The distance measuring device according to (13), wherein the control unit changes a frame rate, which is the number of times the light emitting element emits light per predetermined time, depending on the area to be measured.

[0276] (16) The distance measuring device according to (13), wherein the control unit changes which of the plurality of light emitting elements emits light depending on the area to be measured.

[0277] (17) The distance measuring device according to (13), wherein the control unit changes the number of times the plurality of light emitting elements emit light depending on the area to be measured.

[0278] (18) The distance measuring device according to (13), wherein the control unit changes the light emission intensity of the plurality of light emitting elements depending on the area to be measured.

[0279] (19) The distance measuring device according to any one of (12) to (18), further comprising: a light receiving unit that receives light reflected from the subject; and a distance measuring unit that measures the distance to the subject based on the light received by the light receiving unit.

[0280] (20) The distance measuring device described in (19), wherein the light receiving unit has a plurality of light receiving elements arranged in a matrix and included in a target area, and the control unit specifies an addition area including two or more light receiving elements from the plurality of light receiving elements, and controls scanning using the specified addition area as a unit.

[0281] 1: distance measuring device, 1a: light emitting device, 1b: light emitting device, 1c: light emitting device, 1d: light emitting device, 2: light source unit, 2a: light emitting element, 3: drive unit, 4: power supply circuit, 5: light emitting side optical system, 6: light receiving side optical system, 7: light receiving unit, 8: signal processing unit, 9: control unit, 9a: distance measuring unit, 10: minute scanning unit, 11: light emitting unit, VCSEL chip, 12: LDD substrate, 13: mounting substrate, 14: heat dissipation substrate, 15: correction lens holding unit, 16: correction lens, 17: wiring, 21: substrate, 22: laminated film, 23: light emitting element, 23': parasitic capacitance, 24: transistor, 24': parasitic capacitance, 25: transistor, 31: first anode wiring, 31a: first horizontal wiring, 31b: first vertical wiring, 32: second anode wiring, 32a: second horizontal wiring, 32b: second vertical wiring, 33: third anode wiring, 33a: third horizontal wiring, 33b: third vertical wiring, 31': first cathode wiring, 31a': first horizontal wiring, 31b': first vertical wiring, 32': second cathode wiring, 32a': second horizontal wiring, 32b': second vertical wiring, 33': third cathode wiring, 33a': third horizontal wiring, 33b': third vertical wiring, 34: first capacitor, 35: second capacitor, 36: third capacitor, 37: first selection circuit, 37a: transistor, 37b: transistor, 38: second selection circuit, 38a: transistor, 38b: transistor, 39: third selection circuit, 39a: transistor, 39b: transistor, 41: cathode wiring, 41': anode wiring, 42: gate wiring, 42': gate wiring, 43: gate wiring, 51: insulating substrate, 52: insulating film, 53: wiring layer, 54: insulating film, 55: wiring layer, 56: wiring, 57: solder ball, 58: solder ball, 59: bump, 61: first transistor, 62: second transistor, 63: third transistor, 64: first gate wiring, 65: second gate wiring, 66: third gate wiring, 67: capacitor, 68: selection circuit, 68a: transistor, 68b: transistor, 71: first voltage detection circuit, 72: second voltage detection circuit, 73: third voltage detection circuit, 81: fourth anode wiring, 81a: fourth horizontal wiring, 81b: fourth vertical wiring, 82: fourth capacitor, 83: fourth selection circuit, 83a: transistor, 83b: transistor, 170: actuator, 180: collimator lens

Claims

1. A light-emitting element including a plurality of light-emitting elements arranged in a two-dimensional array, each having a first and second terminal; M first wirings (M is an integer of 2 or more) extending in a first direction, and N second wirings (N is an integer of 2 or more) extending in a second direction intersecting the first direction and electrically connected to the M first wirings, respectively, a plurality of first terminal wirings electrically connected to the first terminals of the light-emitting elements; a plurality of second terminal wirings electrically connected to the second terminals of the light-emitting elements, each electrically connected to P (P is an integer of 2 or more) of the light-emitting elements; a plurality of selection circuits electrically connected to one of the plurality of first terminal wirings and the plurality of second terminal wirings, and selecting the light-emitting elements to be light-emitting; a plurality of drive circuits electrically connected to the other of the plurality of first terminal wirings and the plurality of second terminal wirings, and driving the plurality of light-emitting elements; an optical system that irradiates light emitted by the plurality of light-emitting elements to a plurality of irradiation positions; and a first drive unit that drives the optical system and changes the plurality of irradiation positions, wherein N is an integer that is the same as or different from M, The light emitting device, wherein the P is an integer that is the same as or different from at least one of the M and the N.

2. The light emitting device according to claim 1, wherein the optical system has a reflecting mirror, and the first driving section rotates the reflecting mirror about a rotation axis.

3. The light emitting device according to claim 2, wherein the first drive section rotates the light emitting device so as to irradiate light between the plurality of irradiation positions.

4. The light emitting device according to claim 3, wherein the reflecting mirror has a plurality of rotation axes, and the first driving section rotates the reflecting mirror so as to periodically reciprocate about the plurality of rotation axes.

5. The light emitting device according to claim 1, wherein the optical system includes a lens, and the first drive section moves an optical axis of the lens relative to the plurality of light emitting elements.

6. The light emitting device according to claim 5, wherein the first drive section moves the optical axis of the lens so as to irradiate between the plurality of irradiation positions.

7. The light emitting device according to claim 5, wherein said first drive section periodically reciprocates the optical axis of said lens so as to irradiate light between said plurality of irradiation positions.

8. The light emitting device according to claim 1, further comprising a microlens array corresponding to each of said plurality of light emitting elements and configured to focus light emitted by said plurality of light emitting elements.

9. The light emitting device according to claim 2, wherein the first driving section is any one of a voice coil motor, a piezoelectric element, a shape memory alloy, and a liquid crystal.

10. The light-emitting device according to claim 1, wherein one of the first and second terminals of the light-emitting element is an anode, the other of the first and second terminals of the light-emitting element is a cathode, one of the first and second terminal wirings is an anode wiring, and the other of the first and second terminal wirings is a cathode wiring.

11. The light-emitting device of claim 1, wherein the plurality of selection circuits include first to Pth selection circuits electrically connected to the first to Mth first wirings or the first to Nth second wirings, respectively, and the plurality of drive circuits are each electrically connected to one of the second terminal wirings.

12. A light source unit that generates light and irradiates the light onto a subject, comprising: a light source unit that is arranged in a two-dimensional array, each of the light-emitting elements having a first and second terminal; M first wirings (M is an integer of 2 or more) extending in a first direction, and N second wirings (N is an integer of 2 or more) extending in a second direction intersecting the first direction and electrically connected to the M first wirings, the light-emitting elements being electrically connected to the first terminals of the light-emitting elements; a plurality of second terminal wirings that are electrically connected to the second terminals of the light-emitting elements, each of the second terminal wirings being electrically connected to P of the light-emitting elements (P is an integer of 2 or more); a plurality of selection circuits that are electrically connected to one of the plurality of first terminal wirings and the plurality of second terminal wirings and that select the light-emitting elements to be emitted; a plurality of drive circuits that are electrically connected to the other of the plurality of first terminal wirings and the plurality of second terminal wirings and that drive the plurality of light-emitting elements; and an optical system that irradiates the light emitted by the plurality of light-emitting elements to a plurality of irradiation positions. a first driving unit that drives the optical system and changes the multiple irradiation positions, wherein the control unit controls the selection circuit, the driving circuit, and the first driving unit, N is an integer that is the same as or different from M, and P is an integer that is the same as or different from at least one of M and N.

13. The distance measuring device according to claim 12, wherein the control unit is capable of changing the method of irradiating light depending on the area to be measured.

14. The distance measuring device according to claim 13, wherein the control unit changes the number of scans, which is the number of times that irradiation is performed between the multiple irradiation positions, depending on the area to be measured.

15. The distance measuring device according to claim 13, wherein the control unit changes a frame rate, which is the number of times the light emitting element emits light per predetermined time, according to the area to be measured.

16. The distance measuring device according to claim 13, wherein the control unit changes which of the plurality of light emitting elements emits light depending on the area to be measured.

17. The distance measuring device according to claim 13, wherein the control unit changes the number of times the plurality of light emitting elements emit light depending on the area to be measured.

18. The distance measuring device according to claim 13, wherein the control unit changes the light emission intensity of the plurality of light emitting elements according to the area to be measured.

19. The distance measuring device according to claim 12, further comprising: a light receiving unit that receives light reflected from the subject; and a distance measuring unit that measures the distance to the subject based on the light received by the light receiving unit.

20. The distance measuring device described in claim 19, wherein the light receiving unit has a plurality of light receiving elements arranged in a matrix and included in a target area, and the control unit specifies an addition area including two or more light receiving elements among the plurality of light receiving elements, and controls scanning based on the specified addition area.

Images