Primary shield plate, secondary shield plate, and shield package

Abstract

The present invention relates to a primary shield plate, a secondary shield plate, and a shield package, the primary shield plate according to the present invention comprising: a cooling unit, provided inside a chamber unit and having a first opening facing an object under vapor deposition, for cooling the primary shield plate by means of a liquid injected from the outside; and a shield unit, provided inside the chamber unit and coupled to the cooling unit, for blocking the deposition material from being deposited in directions absent of the object under vapor deposition.

Description

1st shield plate, 2nd shield plate and shield package

[0001] The present invention relates to a primary shield plate, a secondary shield plate, and a shield package, and more particularly, to a primary shield plate, a secondary shield plate, and a shield package that prevent a deposition material from being deposited in a chamber portion in a direction where there is no deposition target and facilitate replacement of the shield plate portion.

[0002] Generally, deposition refers to the process of heating and evaporating a metal or compound in a vacuum, thereby depositing the vapor as a thin film on the surface of an object. Vacuum deposition involves placing the deposition target and an evaporation source in a chamber, heating the source to vaporize it, and forming a thin film on one surface of the deposition target.

[0003] The background technology for the present invention is disclosed in Korean Patent Publication No. 10-2023-0102455 (published on July 7, 2023, title of the invention: Deposition equipment maintenance system).

[0004] The purpose of the present invention is to provide a primary shield plate, a secondary shield plate, and a shield package that protect a chamber portion and facilitate replacement of the shield plate.

[0005] A primary shield plate according to the present invention comprises: a cooling unit provided inside a chamber portion, having a first opening formed in a direction facing a deposition target, and cooling the primary shield plate by a fluid injected from the outside; and a shield unit provided inside the chamber portion, coupled to the cooling unit, and preventing the deposition material from being deposited in a direction where the deposition target is not present.

[0006] The cooling unit may include an upper portion that is arranged in a direction opposite to the deposition target and has the first opening formed therein to allow a deposition material to pass through and be deposited on the deposition target or to block the deposition material; and a vertical portion that supports the upper portion and allows the upper portion to be cooled by the fluid.

[0007] The upper portion may include: an upper plate; a fluid injection portion coupled to one end of the upper plate and through which the fluid is injected into the upper plate; a plurality of flow path portions formed inside the upper plate and through which the injected fluid moves within the upper plate; and a fluid discharge portion through which the fluid moved through the flow path portions is discharged outside the upper plate.

[0008] The upper plate may further include a flow guide section that allows the flow path of the flow section to move in one direction; and a discharge prevention section formed at an end of the upper plate to prevent the fluid from being discharged out of the upper plate.

[0009] The above vertical portion may include a pipe portion that is coupled to the upper plate and supports the upper plate; a pipe fluid injection portion formed at one end of the pipe portion and allowing the fluid to be injected into the pipe portion; a pipe flow path portion formed inside the pipe portion and allowing the injected fluid to move inside the pipe portion; and a pipe fluid discharge portion that allows the fluid moved through the pipe flow path to be discharged outside the pipe portion.

[0010] It may further include a lower plate installed in a direction opposite to the upper plate and having a second opening formed therein so that the deposition material can be discharged through the second opening.

[0011] The above shield portion may include a shield plate frame portion coupled to the cooling portion; and a shield plate portion detachable from the shield plate frame portion.

[0012] A secondary shield plate according to the present invention comprises: a chamber portion; a shield plate portion arranged in a direction opposite to the chamber portion; a fixing portion arranged on the front of the chamber portion and to which the shield plate portion is coupled; and a fastening portion that fastens the fixing portion and the chamber portion.

[0013] The above-mentioned fixed part may include a separation part attached to the front surface of the chamber part and separating the shield plate part and the chamber part; a joining part formed narrower than the width of the separation part and to which the shield plate part is joined; and an additional part formed narrower than the width of the joining part and to which a fitting member is joined.

[0014] It may further include a fitting member that is connected to the above-mentioned fixed part and prevents the shield plate part from coming off.

[0015] The above fitting member may include a fastening joint formed to fit the circumference of the fastening part; a step formed wider than the width of the fastening joint; and a joint part through which the fitting member is fixed to the fastening part.

[0016] A shield package according to the present invention comprises: a primary shield plate including a cooling unit provided inside a chamber portion, a first opening formed in a direction facing a deposition target, and cooling a primary shield plate by a fluid injected from the outside; a shield unit provided inside the chamber portion, coupled to the cooling unit, and preventing deposition of a deposition material in a direction where there is no deposition target; and a secondary shield plate including a chamber portion, a shield plate portion arranged in a direction facing the chamber portion, a fixing unit arranged on a front surface of the chamber portion, to which the shield plate portion is coupled, and a fastening unit fastening the fixing unit to the chamber portion.

[0017] The primary shield plate according to the present invention can protect the chamber by rapidly cooling the primary shield plate by a cooling unit to prevent deposition in a direction other than where the deposition target is located in the chamber.

[0018] The primary shield plate according to the present invention can be configured to deposit only on the deposition target by the upper portion, and to rapidly cool the direction where there is no deposition target by the fluid so that no deposition occurs.

[0019] The primary shield plate according to the present invention can cool the primary shield plate over a wider range than when only the upper plate is provided by the vertical member supporting the upper plate.

[0020] The primary shield plate according to the present invention can rapidly cool the deposition material on the entire surface of the upper plate by a plurality of flow paths.

[0021] The secondary shield plate according to the present invention facilitates separation of the chamber portion and the shield plate portion by a fixing portion, thereby facilitating replacement of the shield plate portion and facilitating maintenance and repair of the chamber portion.

[0022] The secondary shield plate according to the present invention can prevent the shield plate portion from being separated from the fixing portion by the fitting member, thereby stably preventing the deposition material from being deposited in the chamber portion.

[0023] FIG. 1 is a perspective view schematically showing the configuration of a primary shield plate according to one embodiment of the present invention.

[0024] Figure 2 is a perspective view schematically showing the configuration of a cooling unit according to one embodiment of the present invention.

[0025] Fig. 3 is a cross-sectional view schematically showing the configuration of a top plate according to one embodiment of the present invention.

[0026] Figure 4 is a perspective view schematically showing the configuration of a vertical section according to one embodiment of the present invention.

[0027] Figure 5 is a perspective view schematically showing the configuration of a shield portion according to one embodiment of the present invention.

[0028] Figure 6 is a front view schematically showing the configuration of a secondary shield plate according to one embodiment of the present invention.

[0029] FIG. 7 is a side view schematically illustrating an embodiment of a secondary shield plate in a chamber according to one embodiment of the present invention.

[0030] Fig. 8 is a perspective view schematically showing the configuration of a fixing part according to one embodiment of the present invention.

[0031] FIG. 9(a) is a perspective view schematically showing the front side of a fitting member according to one embodiment of the present invention, and FIG. 9(b) is a perspective view schematically showing the rear side of a fitting member according to one embodiment of the present invention.

[0032] Hereinafter, embodiments of a primary shield plate, a secondary shield plate, and a shield package according to the present invention will be described with reference to the attached drawings.

[0033] In this process, the thickness of lines and the sizes of components depicted in the drawings may be exaggerated for clarity and convenience. The terms described below are defined based on their functions in the present invention and may vary depending on the intent or custom of the user or operator. Therefore, the definitions of these terms should be based on the overall content of this specification.

[0034] In this specification, when it is said that a part is "connected (or connected)" to another part, this includes not only cases where it is "directly connected (or connected)" but also cases where it is "indirectly connected (or connected)" with another member in between. In this specification, when it is said that a part "includes (or comprises)" a certain component, this does not mean that other components are excluded, but rather that it may "include (or comprise)" other components, unless specifically stated otherwise.

[0035] Throughout this specification, the same reference numerals may refer to the same components. Even if the same or similar reference numerals are not mentioned or described in a specific drawing, they may be described based on other drawings. Even if a part is not indicated by a reference numeral in a specific drawing, that part may be described based on other drawings. The number, shape, size, and relative size differences of detailed components included in the drawings of this application are set for the convenience of understanding, and do not limit the embodiments and may be implemented in various forms.

[0036] Fig. 1 is a perspective view schematically illustrating the configuration of a primary shield plate according to one embodiment of the present invention. Referring to Fig. 1, the primary shield plate according to the present embodiment includes a cooling unit (200) and a shield unit (300).

[0037] The primary shield plate is a device to primarily prevent deposition of the deposition material (b) in a portion of the chamber section (100) described later where there is no deposition target (a).

[0038] The chamber (100) is a device having a predetermined internal space where a deposition process is performed. The chamber (100) may be any deposition device that performs a deposition process. Inside the chamber (100), a space may be provided in which a deposition target (a), i.e., a deposition target on the surface of which a deposition material is to be deposited through a deposition process, and a deposition material (b) are provided. Inside the chamber (100), a process of depositing the deposition material (b) on the deposition target (a) may be performed.

[0039] A cooling unit (200) is provided inside the chamber unit (100) and cools the primary shield plate using a fluid injected from the outside. The cooling unit (200) can protect the chamber unit by rapidly cooling the primary shield plate and preventing deposition in a direction other than where the deposition target of the chamber unit is located.

[0040] Fig. 2 is a perspective view schematically illustrating the configuration of a cooling unit according to one embodiment of the present invention. Referring to Fig. 2, the cooling unit (200) may include an upper portion (210) and a vertical portion (220).

[0041] The upper plate (210) is arranged in a direction facing the deposition target (a), and a first opening (c) is formed to allow the deposition material (b) to be deposited on the deposition target (a). The deposition material (b) is vaporized and passes through the first opening (c) of the upper plate (210), and the deposition material (b) can reach and be deposited on the deposition target (a) arranged in a direction facing the upper plate (210).

[0042] Fig. 3 is a cross-sectional view schematically illustrating the configuration of a top plate according to one embodiment of the present invention. Referring to Fig. 3, the top plate portion (210) may include a top plate (211), a fluid injection portion (212), a flow path portion (213), and a fluid discharge portion (214).

[0043] The upper plate (211) forms the outer shape of the upper portion (210), and a first opening (c) is formed to allow the deposition material (b) to pass through to the deposition target (a). The upper plate (211) can be made of various materials.

[0044] The fluid injection unit (212) is connected to one end of the upper plate (211) and allows fluid to be injected into the upper plate (211). The fluid injected into the fluid injection unit (212) may be any fluid that cools the upper plate (211). The fluid injection unit (212) may be configured as a valve, but is not limited thereto and may be modified into various embodiments.

[0045] The flow path (213) is formed inside the upper plate (211) and allows the fluid injected from the fluid injection part (212) to move within the upper plate (211). A plurality of flow paths (213) may be provided on the upper plate (211). A fluid that lowers the temperature of the upper plate (211) is injected from the fluid injection part (212) to the upper plate (211), and the temperature of the entire upper plate (211) can be lowered by passing through the upper plate (211) through the flow path (213). The upper plate (211) whose temperature is lowered by the fluid can cool the deposition material (b) into a solid when the deposition material (b) comes into contact with the upper plate (211).

[0046] The fluid discharge unit (214) can discharge the fluid moved through the flow path unit (213) out of the upper plate (211). The fluid discharge unit (214) may be configured as a valve, but is not limited thereto and may be modified in various embodiments. In FIG. 3, the fluid discharge unit (214) is illustrated at a position corresponding to the fluid injection unit (212), but is not limited thereto and may be positioned at various positions.

[0047] The upper part (210) may further include a euro guide part (215) and an exhaust prevention part (216).

[0048] The flow path guide (215) allows the flow path of the flow path (213) to move in one direction. The flow path guide (215) is provided inside the upper plate (211) and is positioned between the flow paths of the flow path (213) to prevent the flow paths from intersecting with each other and to move in one direction. However, the flow path guide (215) is not limited thereto, and the flow path guide (215) may be positioned and formed in a different position and shape than that illustrated in FIG. 3.

[0049] The discharge prevention unit (216) is formed at the end of the upper plate (211) to prevent the fluid from being discharged out of the upper plate (211). A hole is formed at the end of the upper plate (211) during the gun-drill process to form the flow path (213) inside the upper plate (211). The discharge prevention unit (216) is coupled to the end of the upper plate (211) to prevent the fluid injected through the fluid injection unit (212) from being discharged through the hole formed during the gun-drill process, thereby preventing the fluid from being discharged to the outside.

[0050] The vertical portion (220) supports the upper portion (210), and allows fluid to be injected to cool the upper portion (210). The vertical portion (220) is positioned perpendicular to the upper portion (210), so that it can support the upper portion (210). In Fig. 2, the vertical portion is illustrated as having a rectangular pillar shape, but is not limited thereto and can be modified into various shapes. Since the deposition material (b) can be cooled in a vertical direction by the vertical portion (220), the primary shield plate can be cooled over a wider range than when only the upper portion (210) is provided.

[0051] Fig. 4 is a perspective view schematically illustrating the configuration of a vertical portion according to one embodiment of the present invention. Referring to Fig. 4, the vertical portion (220) may include a pipe portion (221), a pipe fluid injection portion (222), a pipe flow portion (223), and a pipe fluid discharge portion (224).

[0052] The pipe section (221) is coupled to the upper plate (211) and supports the upper plate (211). A plurality of pipe sections (221) may be coupled to the upper plate (211), but the present invention is not limited thereto and may be modified in various ways. The pipe section (221) may be manufactured from various materials capable of supporting the upper plate (211).

[0053] A pipe fluid injection portion (222) is formed at one end of the pipe portion (221) and allows fluid to be injected into the pipe portion (221). The fluid injected into the pipe fluid injection portion (222) may be any fluid that cools the pipe portion (221). The pipe fluid injection portion (222) may be configured as a valve, but may be modified into various embodiments.

[0054] The pipe passage part (223) is formed inside the pipe part (221) and can allow the fluid injected from the pipe fluid injection part (222) to move inside the pipe part (221). A fluid that lowers the temperature of the pipe part (221) is injected from the pipe fluid injection part (222) to the pipe passage part (223), and the temperature of the pipe part (221) can be lowered overall by passing through the pipe part (221) via the pipe passage part (223). The pipe part (221) whose temperature is lowered by the fluid can cool the deposition material (b) to a liquid or solid when the deposition material (b) comes into contact with the pipe part (221). Therefore, the deposition material (b) can be cooled when it comes into contact with the upper plate (210) in a vertical direction as well, so that the deposition material (b) can be quickly cooled over a wider range than when only the upper plate (210) is provided.

[0055] The pipe fluid discharge unit (224) can discharge the fluid moved through the pipe flow unit (223) out of the pipe unit (221). The pipe fluid discharge unit (224) may be configured as a valve, but is not limited thereto and may be modified with other materials. In Fig. 4, the pipe fluid discharge unit (224) is illustrated in a position that does not correspond to the pipe fluid injection unit (222), but is not limited thereto and may be arranged in various positions.

[0056] Figure 5 is a perspective view schematically showing the configuration of a shield portion according to one embodiment of the present invention.

[0057] The shield part (300) is provided inside the chamber part (100), is coupled to the cooling part (200), and prevents the deposition material (b) from being deposited in a direction where there is no deposition target (a). A plurality of shield parts (300) may be coupled to a surface other than the upper plate part (210). The shield parts (300) are cooled by the cooling part (200), and can quickly block the deposition material (b).

[0058] Referring to FIG. 5, the shield portion (300) includes a shield plate frame portion (310) and a shield plate portion (320).

[0059] The shield plate frame part (310) is coupled to the cooling part (200), and the shield plate part (320) described later is coupled thereto. The shield plate frame part (310) can be manufactured from various materials, and although it is illustrated as a square shape in FIG. 5, it is not limited thereto and can be changed to various shapes.

[0060] The shield plate part (320) is detachably attached to the shield plate frame part (310). The shield plate part (320) prevents the deposition material (b) from being deposited in the chamber part (100) in a direction where there is no deposition target (a). The shield plate part (320) is attached to the shield plate frame part (310) at an angle to prevent the deposition material (b) from leaking. When the amount of deposition material (b) attached to the shield plate part (320) is large, it can be separated from the shield plate frame part (310), the deposition material (b) attached to the shield plate part (320) can be removed, and then reattached to the shield plate frame part (310) for reuse.

[0061] Referring to FIG. 5, the primary shield plate may further include a lower plate (400).

[0062] The lower plate (400) is installed in a direction facing the upper plate (211), and a second opening (d) is formed so that the deposition material (b) is discharged through the second opening (d). The lower plate (400) has a second opening (d) formed in a direction facing the deposition target (a) so that the deposition material (b) can be deposited in the direction in which the deposition target (a) is placed, and the deposition material (b) can be prevented from being deposited in a direction away from the deposition target (a) through a portion where the second opening is not formed.

[0063] FIG. 6 is a front view schematically showing the configuration of a secondary shield plate according to one embodiment of the present invention, and FIG. 7 is a side view schematically showing an example of a secondary shield plate according to one embodiment of the present invention.

[0064] The secondary shield plate is a device for secondarily preventing deposition of the deposition material (b) in a portion of the chamber section (100) where there is no deposition target (a).

[0065] Referring to FIGS. 6 and 7, the chamber portion (100) may include a shield plate portion (110), a fixing portion (120), and a fastening portion (130).

[0066] The shield plate (110) is arranged in a direction opposite to the front surface of the chamber (100), that is, the side of the chamber (100) where the deposition material (b) is provided, and prevents the deposition material (b) from being deposited in the chamber (100) where there is no deposition target (a). The shield plate (110) can be coupled not only to one surface of the chamber (100) but also to multiple surfaces of the chamber (100). The shield plate (110) prevents the deposition material (b) that has passed through the first opening (c) of the upper plate (210) from being deposited in the chamber (100) where there is no deposition target (a), and is coupled to one or multiple surfaces of the chamber (100) to prevent the deposition material (b) from being deposited in the chamber (100) when the passage of the deposition material (b) in the shield (300) is not blocked. The worker can easily maintain and repair the chamber section (100) by replacing the shield plate section (110). The shield plate section (110) is illustrated as a square plate in FIG. 6, but is not limited thereto and can be modified into various shapes.

[0067] The fixed part (120) is placed on the front of the chamber part (100), and the shield plate part (110) is coupled to fix the chamber part (100) and the shield plate part (110) at a certain distance apart from each other. The fixed part (120) may have a plurality of circular shapes with different diameters as shown in Fig. 8, but is not limited thereto and may be transformed into various shapes.

[0068] Fig. 8 is a perspective view schematically illustrating the configuration of a fixing part according to one embodiment of the present invention. Referring to Fig. 8, the fixing part (120) may include a separation part (121), a coupling part (122), and an additional part (123).

[0069] The separation part (121) is attached to the front of the chamber part (100) and separates the shield plate part (110) and the chamber part (100) by a certain distance. Since the shield plate part (110) and the chamber part (100) are separated by the separation part (121), it is easy for the user to separate the shield plate part (110), thereby facilitating replacement of the shield plate part (110).

[0070] The connecting portion (122) is formed narrower than the width of the separating portion (121) and is the portion where the shield plate portion (110) is connected. Since the connecting portion (122) is formed smaller than the width of the separating portion (121), a space is formed between the separating portion (121) and the connecting portion (122), allowing the shield plate portion (110) to be easily connected.

[0071] The additional portion (123) is formed to be narrower than the width of the connecting portion (122), and a fixing member, i.e., a member that prevents the shield plate portion (110) from being detached, can be coupled to it. The additional portion (123) is formed to be narrower than the width of the connecting portion (122), and a fitting member can be additionally coupled to it to prevent the shield plate portion (110) from being detached from the connecting portion (122). The shape of the additional portion (123) is formed to be circular in FIG. 8, but is not limited thereto and can be modified into various shapes.

[0072] The fastening member (130) fastens the chamber member (100) and the fixing member (120) to prevent the fixing member (120) from being separated from the chamber member (100). A hole may be formed in the front of the chamber member (100) for coupling the fastening member (130), and a hole may be formed in the center of the fixing member (120). The fastening member (130) may penetrate the hole between the chamber member (100) and the fixing member (120) to prevent the fixing member (120) from being separated from the chamber member (100). The fastening member (130) may be a bolt, but is not limited thereto and may be replaced with various fixing means.

[0073] FIG. 9(a) is a perspective view schematically showing the front side of a fitting member according to one embodiment of the present invention, and FIG. 9(b) is a perspective view schematically showing the rear side of a fitting member according to one embodiment of the present invention.

[0074] The fitting member (140) is coupled to the fixed member (120) and prevents the shield plate member (110) from detaching. The fitting member (140) may be coupled to the additional member (123), but is not limited thereto and may be coupled to various positions of the fixed member (120).

[0075] Referring to FIG. 9, the fitting member (140) may include a fastening joint (141), a step portion (142), and a joint portion (143).

[0076] The fastening joint (141) is formed to fit the circumference of the fastening joint (130), and as shown in FIG. 6, the fastening joint (130) is fixed to the fastening joint (141) to prevent the fitting member (140) from being detached.

[0077] The step portion (142) is formed wider than the width of the fastening joint, and the fastening portion (130) can be inserted through the wide step portion (142) so that the fastening portion (130) can be easily coupled with the fitting member (140). As illustrated in Fig. 6, the user can first insert the fastening portion (130) into the wide step portion (142) and then firmly fix it with the fastening joint (141).

[0078] The joint part (143) is formed on the rear surface of the fitting member (140) and may have a plurality of protruding shapes. The joint part (143) is formed of an elastic material, so that when the joint part (143) is coupled to the additional member (123), it can be fixed to the fixing member (120) by the elastic force of the joint part (143). The joint part (143) can be attached to the shield plate part (110) to prevent the fitting member (140) from slipping.

[0079] Although the present invention has been described with reference to the embodiments shown in the drawings, these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom.

[0080] Therefore, the technical protection scope of the present invention should be defined by the following patent claims.

Claims

1. A cooling unit provided inside the chamber, having a first opening formed in a direction facing the deposition target, and cooling the primary shield plate by a fluid injected from the outside; and A primary shield plate characterized by including a shield part provided inside the chamber part, coupled to the cooling part, and preventing the deposition material from being deposited in a direction where there is no deposition target.

2. In paragraph 1, The above cooling unit, An upper portion arranged in a direction opposite to the deposition target and having the first opening formed therein to allow the deposition material to pass through and be deposited on the deposition target or to block the deposition material; and A primary shield plate characterized by including a vertical portion that supports the upper portion and cools the upper portion by the fluid.

3. In paragraph 2, The above upper part, top plate; A fluid injection unit coupled to one end of the upper plate and through which the fluid is injected into the upper plate; A plurality of flow paths formed inside the upper plate and allowing the injected fluid to move inside the upper plate; and A primary shield plate characterized by including a fluid discharge portion that allows the fluid moved through the above-mentioned euro portion to be discharged outside the upper plate.

4. In paragraph 3, The above upper part, A euro guide section that moves the path of the euro section in one direction; and A primary shield plate further comprising a discharge prevention portion formed at an end of the upper plate to prevent the fluid from being discharged out of the upper plate.

5. In paragraph 3. The above vertical part, A pipe portion coupled to the upper plate and supporting the upper plate; A pipe fluid injection part formed at one end of the pipe part and allowing the fluid to be injected into the pipe part; A pipe passage formed inside the pipe section and allowing the injected fluid to move inside the pipe section; and A primary shield plate characterized by including a pipe fluid discharge section that allows the fluid moved through the pipe section to be discharged outside the pipe section.

6. In paragraph 3, A primary shield plate characterized by further comprising a lower plate installed in a direction opposite to the upper plate and having a second opening formed therein so that the deposition material can be discharged through the second opening.

7. In paragraph 1, The above shield part, A shield plate frame part coupled to the above cooling part; A primary shield plate characterized by including a shield plate portion detachable from the shield plate frame portion.

8. Chamber; A shield plate portion arranged in a direction opposite to the chamber portion; A fixed part arranged on the front of the chamber part and to which the shield plate part is coupled; and A secondary shield plate characterized by including a fastening part that fastens the fixed part and the chamber part.

9. In paragraph 8, The above fixed part, A separation portion attached to the front of the chamber portion and separating the shield plate portion and the chamber portion; A joint formed narrower than the width of the above-mentioned separation portion and to which the shield plate portion is joined; and A secondary shield plate characterized by including an additional portion formed narrower than the width of the above-mentioned joint portion and to which a fitting member is joined.

10. In paragraph 8, A secondary shield plate characterized in that it further includes a fitting member that is connected to the above-mentioned fixed part and prevents the shield plate part from coming off.

11. In paragraph 10, The above fitting member is, A fastening joint formed to fit the circumference of the above fastening portion; A step formed wider than the width of the above-mentioned joint; and A secondary shield plate characterized in that it includes a joint portion in which the above fitting member is fixed to the above joining portion.

12. A cooling unit provided inside the chamber, having a first opening formed in a direction facing the deposition target, and cooling the primary shield plate by a fluid injected from the outside; A primary shield plate provided inside the chamber, coupled to the cooling unit, and including a shield portion that prevents deposition of a deposition material in a direction where there is no deposition target; and Chamber Department, A shield plate portion arranged in a direction opposite to the chamber portion, A fixed part arranged on the front of the chamber part and to which the shield plate part is connected, A shield package comprising a secondary shield plate including a fastening portion that fastens the fixed portion and the chamber portion.

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